JP2018129413A - Light irradiator and light irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light irradiator which improves lamp exchange workability and maintainability although a large area can be irradiated with light, and a light irradiation device employing the light irradiator.SOLUTION: A light irradiator comprises a number of rod-like lamp units in each of which an excimer lamp in a double tube shape is held by a metal beam, on a frame for lamp unit installation while the lamp units are arrayed in parallel within the same plane along a horizontal surface and in a direction orthogonal to a length direction of the lamp units. Both ends of the metal beam of the lamp unit include mounting parts for mounting the lamp units to the frame for lamp unit installation in a removable manner by moving the lamp unit in a vertical direction. In a light irradiation device, a light irradiator arrangement space in which the light irradiator is arranged is formed at a lower part within a housing in which a light irradiation window is provided on a lower surface, and a partition wall that closes an upper opening of the light irradiator arrangement space is provided so as to be freely opened/closed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a light irradiator and a light irradiation apparatus using the light irradiator.

At present, for example, a method using ultraviolet rays is known as a method of performing desmear processing or the like in a manufacturing process of a semiconductor element or a liquid crystal substrate. In particular, a method using active oxygen such as ozone generated by vacuum ultraviolet rays radiated from an excimer lamp is suitably used because a predetermined treatment can be performed efficiently in a short time.
In recent years, for example, from the viewpoint of shortening the processing time of a process, there has been a demand for higher illuminance for a light irradiation apparatus, and an excimer lamp used as a light source is required to emit light with high illuminance. In addition, with the increase in the size of a workpiece such as a liquid crystal substrate, there is a demand for a large irradiation area for the light irradiation apparatus.

In order to increase the illuminance of the excimer lamp, for example, it is necessary to supply a large amount of electric power to the excimer lamp. However, when the electric power supplied to the excimer lamp increases, the temperature of the excimer lamp increases and the temperature of the internal discharge gas also increases. In this case, since the discharge gas at a high temperature hinders the production of excimer, the illuminance is rather lowered with a certain power value as a boundary.
For this reason, a light irradiation apparatus having a structure for cooling the excimer lamp is known in order to suppress the temperature rise of the excimer lamp. For example, Patent Document 1 describes that a plurality of excimer lamps are structured to be held by an aluminum cooling block in which a cooling medium flow path is formed.
Further, in response to a request for increasing the irradiation area, for example, a configuration in which a large number of excimer lamps are arranged horizontally in the light irradiation apparatus is employed.

FIG. 13 is a cross-sectional view illustrating an outline of a configuration of an example of a conventional light irradiation apparatus.
The light irradiation device 90 is configured by arranging a light irradiator 95 in a casing 91 having a light irradiation window 93 provided on the lower surface. The casing 91 includes an upper casing member 91a and a lower casing member 91b that are in airtight contact with each other and form a light irradiator arrangement space therein. The upper casing member 91a and the lower casing member 91b are fixed to each other via a hinge portion 92. In addition, an electrical component 94 in which a plurality of lighting power supply units corresponding to each of the plurality of excimer lamps is provided is provided on the upper portion of the upper casing member 91a.
The light irradiator 95 is configured, for example, by holding a plurality of rod-shaped excimer lamps 96 by a cooling block 97 in which a cooling medium flow path 98 is formed. The excimer lamps 96 are arranged in parallel with their central axes positioned on the same plane along the horizontal plane.

JP 2004-265770 A

Thus, the excimer lamp needs to be periodically replaced because the ultraviolet irradiance decreases as the lighting time elapses. In exchanging the excimer lamp 96 in the light irradiation device having the above-described configuration, as shown in FIG. 14, the upper casing member 91a is rotated in a direction away from the lower casing member 91b, and the light irradiation device 95 is moved. Let it be in an exposed state. In this state, the excimer lamp 96 must be attached to and detached from the lamp holder 96a. Moreover, since an electrical component 94 including a lighting power supply unit for the excimer lamp 96 and the like is also provided on the upper portion of the upper casing member 91a, the weight of the movable member itself is considerably increased, and the lamp replacement is performed. Workability and maintainability were not always good.
Such a problem is conspicuously generated in a light irradiation apparatus in which the irradiation area is increased.

  The present invention has been made based on the above circumstances, and a light irradiator having excellent lamp replacement workability and maintainability while being capable of large-area light irradiation, and the light irradiation. It aims at providing the light irradiation apparatus using a vessel.

In the light irradiator of the present invention, a plurality of rod-shaped lamp units each having a double tubular excimer lamp and a metal beam holding the excimer lamp are orthogonal to the length direction of the lamp unit in the same plane along the horizontal plane. Arranged in parallel in the direction to be provided on the lamp unit installation frame,
It has a mounting part for detachably mounting the lamp unit to the lamp unit installation frame by moving the lamp unit in the vertical direction at both ends of the metal beam in the lamp unit.

  In the light irradiator of the present invention, the metal beam in the lamp unit has a lamp mounting portion on one surface side in the vertical direction and a handle for moving the lamp unit on the other surface side. It is preferable.

  In the light irradiation apparatus of the present invention, a light irradiation device arrangement space in which the light irradiation device is arranged is formed in a lower part of a housing having a light irradiation window provided on a lower surface thereof. A partition wall for closing the upper opening of the light irradiator arrangement space to be partitioned is provided to be openable and closable.

In the light irradiation apparatus of this invention, it is preferable that it is set as the structure provided with the transfer mechanism for suspending and moving the lamp unit in the said light irradiation device in the said housing.
Furthermore, the light irradiation apparatus of the present invention includes an inert gas circulation mechanism that circulates the inert gas in the light irradiator arrangement space that is in an inert gas atmosphere when the partition is closed. ,
The inert gas circulation mechanism includes an inert gas circulation path that communicates with the light irradiator arrangement space, and the inert gas circulation path includes a blowing unit and a heat exchanger for heat dissipation. It is preferable.

  According to the light irradiator of the present invention, since the lamp unit is detachably mounted on the lamp unit installation frame by moving the lamp unit in the vertical direction, the lamp unit can be easily attached and detached. For example, when excimer lamps are replaced, the entire lamp unit can be removed from the light irradiator, and the excimer lamps can be attached and detached for each lamp unit in a place with good workability. For this reason, although it is a thing provided with many lamp units so that light irradiation of a large area is possible, the ease and quickness of lamp replacement | exchange are not impaired.

  And according to the light irradiation apparatus of this invention provided with said light irradiation device, it is set as the structure by which the partition which divides the light irradiation device arrangement | positioning space where the said light irradiation device is arrange | positioned was provided so that opening and closing was possible. Thus, maintenance work including excimer lamp replacement work can be easily performed while being configured to enable light irradiation over a large area.

It is a top view which shows roughly the structure in an example of the light irradiation device of this invention. It is sectional drawing which shows schematically the cross section perpendicular | vertical to the length direction of a lamp unit of the light irradiation device shown in FIG. It is sectional drawing which shows roughly the cross section perpendicular | vertical to a length direction of a lamp unit. It is sectional drawing which shows schematically the structure in an example of the excimer lamp which comprises a lamp unit. It is a perspective view which shows roughly the edge part structure of the length direction one end side of a lamp unit. It is a perspective view which shows roughly the edge part structure of the length direction other end side of a lamp unit. It is a perspective view which shows the support structure of the one end part of a lamp unit. It is a perspective view which shows the support structure of the other end part of a lamp unit. It is a perspective view which shows roughly the external appearance in an example of the light irradiation apparatus of this invention. It is a figure which shows roughly the internal structure of the light irradiation apparatus shown in FIG. 9, Comprising: (a) Sectional drawing seen from front direction, (b) Sectional drawing seen from one side surface direction. It is an expanded sectional view showing a part of Drawing 10 (a) roughly. It is an expanded sectional view showing a part of Drawing 10 (b) roughly. It is a figure which shows schematically the structure in an example of the conventional light irradiation apparatus. It is a figure for demonstrating the replacement | exchange method of the excimer lamp in the conventional light irradiation apparatus.

Hereinafter, embodiments of the present invention will be described in detail.
FIG. 1 is a plan view schematically showing a configuration of an example of the light irradiator of the present invention. 2 is a cross-sectional view schematically showing a cross section of the light irradiator shown in FIG. 1 perpendicular to the length direction of the lamp unit. FIG. 3 is a cross-sectional view schematically showing a cross section perpendicular to the length direction of the lamp unit.
The light irradiator 10 includes, for example, a rectangular frame-shaped lamp unit installation frame 11 and a large number of rod-shaped lamp units 20 that are provided on the lamp unit installation frame 11 and constitute a planar light emitting unit. Yes. The lamp units 20 are arranged in parallel in a direction (hereinafter referred to as “width direction”) orthogonal to the length direction of the lamp unit 20 in the same plane along the horizontal plane. Here, the separation distance in the width direction between adjacent lamp units 20 is, for example, 0.1 to 2 mm.

The lamp unit installation frame 11 is formed with a lamp unit mounting portion on which the lamp unit 20 is detachably mounted on the inner surfaces of a pair of side walls facing each other in the length direction.
A lamp unit attached portion (hereinafter also referred to as “lamp unit one end attached portion”) 12 to which one end side of the lamp unit 20 is attached is provided in a state of being electrically insulated from the lamp unit installation frame 11. Further, it is constituted by a plate-like support member extending along a horizontal plane. In the lamp unit one end side mounted portion 12, the upper surface of the support member is a mounting surface for one end side holding member 50 of the lamp unit 20 described later, and has a positioning pin 13 extending upward on the upper surface of the support member. (See FIG. 7A).
A lamp unit mounted portion (hereinafter also referred to as a “lamp unit other end mounted portion”) 15 to which the other end side of the lamp unit 20 is mounted is electrically insulated from the lamp unit installation frame 11. It is comprised by the plate-shaped support member provided in the state and extended along a horizontal surface. In the lamp unit other end mounted portion 15, a recess 16 for receiving the other end holding member 55 of the lamp unit 20 described later is formed on the upper surface of the support member, and the bottom surface of the recess 16 is the lamp unit 20. The other end side holding member 55 is a mounting surface (see FIG. 8A). The mounting surface of the other end side holding member 55 in the lamp unit other end side mounted portion 15 is positioned on the same plane as the mounting surface of the one end side holding member 50 in the lamp unit one end side mounted portion 12.
In this example, the lamp unit one end side mounted portion 12 and the lamp unit other end side mounted portion 15 have different configurations, but may have the same configuration.

  The lamp unit one-end mounted portion 12 and the lamp unit other-end mounted portion 15 are provided on the lamp unit installation frame 11 via an insulating sheet 18. By adopting such a configuration, the adjacent lamp units 20 are electrically insulated from each other, so that the lighting control of each lamp unit 20 can be accurately performed.

The lamp unit 20 includes a double tubular excimer lamp 21 and a metal beam 30 that holds the excimer lamp 21. The lamp unit 20 is moved vertically at both ends of the metal beam 30 to thereby cause the lamp unit 20 to move. There are mounting portions 51 and 56 for detachably mounting 20 to the lamp unit installation frame 11.
The lamp unit 20 in this example is configured such that two excimer lamps 21 and 21 are held by a metal beam 30 with the lamp central axes positioned in the same plane along the horizontal plane and aligned in the width direction. Has been.

As shown in FIG. 4, the excimer lamp 21 includes a discharge vessel 25 having a double tube structure having an outer tube 26 and an inner tube 27 arranged coaxially with each other. The inner tube 27 is disposed inside the outer tube 26 with both ends projecting axially outward from both ends of the outer tube 26. Both end portions of the outer tube 26 are hermetically sealed to the outer peripheral surface of the inner tube 27, whereby a cylindrical discharge space S 1 is formed between the inner peripheral surface of the outer tube 26 and the outer peripheral surface of the inner tube 27. Is formed. In the discharge space S1, a discharge gas such as xenon gas that forms excimer molecules by excimer discharge is enclosed. When xenon gas is used as the discharge gas, the sealed pressure of xenon gas is, for example, 0.05 to 0.1 MPa.
As a material constituting the outer tube 26 and the inner tube 27, for example, a dielectric material such as quartz glass can be used.

  Inside the inner tube 27, the inner electrode 22 is disposed in close contact with the inner peripheral surface of the inner tube 27. The inner electrode 22 in this example is formed of, for example, a coil shape in which a conductive wire is spirally wound, but may be of an arbitrary shape such as a cylindrical shape.

  Further, the excimer lamp 21 is provided with an IC tag (not shown) that can input recording information in a non-contact manner. In the IC tag, for example, in addition to information such as a total lighting time and lighting history information that are integrated values of the excimer lamp 21 lighting time, an initial voltage specified value, an initial frequency specified value, a steady voltage specified value, a steady frequency specified value The electrical characteristic values unique to the excimer lamp 21 are recorded. By adopting such a configuration, it is possible to accurately perform lighting control suitable for each lamp unit 20 in consideration of variations in the excimer lamp 21 and the usage progress state.

The metal beam 30 has a substantially rectangular parallelepiped block shape as a whole, and has both side surfaces that are perpendicular to the horizontal plane on which the lamp unit 20 is located.
A lamp mounting portion is formed on one surface (the lower surface in FIG. 3) of the metal beam 30. The lamp mounting portion is configured by a lamp housing recess (groove) 31 having a semicircular cross section having a diameter that matches the outer diameter of the outer tube of the excimer lamp 21. In this example, two lamp housing recesses 31 are formed so as to extend in the length direction in parallel with each other at positions aligned in the width direction, thereby forming a lamp mounting portion.
Since the metal beam 30 also functions as a cooling mechanism for cooling the excimer lamp 21 as will be described later, the metal beam 30 is made of a metal having high mechanical strength and high thermal conductivity. As a material constituting the metal beam 30, for example, aluminum, copper, stainless steel, or the like can be used.

In the lamp unit 20 in this example, the excimer lamp 21 is held in a state where the outer surface of the outer tube 26 is pressed against the inner surface of the lamp receiving recess 31 of the metal beam 30. Furthermore, both ends are supported by a lamp holder 35 provided on the metal beam 30 (see FIGS. 5 and 6).
In addition, the electrode plate 23 as an outer electrode is detachable (replaceable) while being inserted between the outer surface of the outer tube 26 of the excimer lamp 21 and the inner surface of the lamp receiving recess 31 in the metal beam 30. ) Is installed. By interposing the electrode plate 23, the inner surface of the metal beam 30 is protected, so that the metal beam 30 can be reused and the lamp unit 20 can have a long service life.
As a material constituting the electrode plate 23, for example, stainless steel can be used. Moreover, it is preferable that the thickness of the electrode plate 23 is 0.1-0.5 mm, for example.

The lamp unit 20 includes a cooling mechanism that cools each excimer lamp 21.
In the cooling mechanism in this example, a cooling medium flow path R1 is formed by the internal space of the inner tube 27 of each excimer lamp 21, and a cooling medium flow path R2 communicating with the cooling medium flow path R1 is provided in the metal beam 30. It is configured. By providing such a cooling mechanism, the excimer lamp 21 can be efficiently cooled even when a large amount of electric power is supplied to the excimer lamp 21, and a high illuminance can be obtained in the excimer lamp 21.

  The configuration of the cooling mechanism will be described in detail. As shown in FIG. 5, a joint 41 is attached to each end of the inner tube 27 of the two excimer lamps 21. The cooling medium flow pipe 42 configured by the above is connected. The cooling medium flow pipe 42 associated with each excimer lamp 21 has two branches in one end side channel branch / merging member (hereinafter referred to as “one end side manifold”) 40 having one common port and two branch ports. Connected to the mouth. As shown in FIG. 6, a joint 46 is attached to each other end of the inner pipe 27 of the two excimer lamps 21, and a cooling medium flow pipe made of, for example, an insulator is attached to each joint 46. 47 is connected. The cooling medium flow pipes 47 associated with the respective excimer lamps 21 are 2 in the other-end-side channel branch / merging member (hereinafter referred to as “other-end manifold”) 45 having one common port and two branch ports. Connected to one branch.

  On the other hand, the cooling medium flow path R <b> 2 in the metal beam 30 is configured by a cooling medium flow pipe 32 made of, for example, metal provided in a groove formed on the upper surface of the metal beam 30. As shown in FIG. 1, the cooling medium flow pipe 32 is entirely U-shaped, for example, and includes two linear flow path portions extending in parallel with each other in the length direction of the metal beam 30, and the metal beam 30. And an arcuately curved flow path portion connecting the straight flow path portions at one end side portion. One end of the cooling medium flow pipe 32 is connected to a common port in the other end side manifold 45, whereby the cooling medium flow path R1 and the cooling medium flow path R2 are in communication with each other.

And one side of the other end of the cooling medium distribution pipe 43 provided in the common port in the one end side manifold 40 and the cooling medium distribution pipe 32 provided in the metal beam 30 is connected to a cooling medium supply part (not shown). The other is connected to a cooling medium discharge unit (not shown). In such a cooling mechanism, it is preferable that the cooling medium flow pipe 43 connected to the common port in the one end side manifold 40 is connected to the cooling medium supply unit. With such a configuration, the excimer lamp 21 can be cooled more efficiently.
As the cooling medium W, for example, water, pure water, a fluorocarbon refrigerant, an insulating refrigerant such as a hydrocarbon refrigerant, or the like can be used.

  In the lamp unit 20, as will be described with reference to FIG. 11, the cooling medium W supplied from the cooling medium supply unit to the one end side manifold 40 via the cooling medium flow pipe 43 passes through the cooling medium flow pipes 42 and 42. To the cooling medium flow path R1 in each excimer lamp 21. The excimer lamp 21 is cooled by the cooling medium W flowing through the cooling medium flow path R1. The cooling medium W discharged from the cooling medium flow path R1 in each excimer lamp 21 is introduced into the other end side manifold 45 via the cooling medium flow pipes 47 and 47. Thereafter, the metal beam 30 is supplied to the cooling medium flow path R2. Then, the cooling medium W is circulated through the cooling medium flow pipe 32 that constitutes the cooling medium flow path R <b> 2, whereby the metal beam 30 is cooled, and each excimer lamp 21 is cooled via the metal beam 30. In addition, when the cooling medium W is circulated through the cooling medium flow pipe 32 constituting the cooling medium flow path R2, the photodetector 36 described later is also cooled.

  Next, a power feeding structure for each excimer lamp 21 in the lamp unit 20 will be described. In this lamp unit 20, as shown in FIG. 5, each lead 28 connected to the inner electrode 22 of the two excimer lamps 21 is, for example, liquid-tightly exposed from a joint 41 attached to one end of the inner tube 27. Has been derived. Each lead 28 is connected to a high voltage side terminal in a lamp lighting power supply unit (not shown) common to the two excimer lamps 21 via a power supply line 29a. On the other hand, an extraction electrode 24 is electrically connected to each electrode plate 23 interposed between the excimer lamp 21 and the metal beam 30. The lead electrode 24 is electrically connected to an end-side holding member 50 that is electrically connected to a low-voltage side terminal in a lamp lighting power supply unit (not shown) via a power supply line 29b.

The lamp unit 20 includes a photodetector 36 for monitoring the amount of ultraviolet light from the excimer lamp 21. In this example, the photodetector 36 is provided at the other end portion in the length direction on the upper surface of the metal beam.
The photodetector 36 is provided with an antenna (not shown) that reads information unique to the excimer lamp 21 from the IC tag.
Since each lamp unit 20 includes the light detector 36, lighting control suitable for each lamp unit 20 can be performed, and therefore, the ultraviolet rays from the excimer lamp 21 can be stably irradiated with the intended illuminance. Can do.

  As described above, the lamp unit 20 is mounted on both ends of the metal beam 30 so that the lamp unit 20 is detachably mounted on the lamp unit installation frame 10 by moving the lamp unit 20 in the vertical direction. Part. In this example, a pair of holding members 50 and 55 projecting outward from both ends of the metal beam 30 are electrically connected to the metal beam 30 at both ends in the longitudinal direction on the upper surface of the metal beam 30. The mounting portions 51 and 56 are formed at the outer ends of the holding members 50 and 55. The holding members 50 and 55 may be formed integrally with the metal beam 30. Further, in a state in which the lamp unit 20 is mounted, the holding members 50 and 55 and the lamp unit mounted portions 12 and 15 in the lamp unit installation frame 11 may be fixed with screws.

  A holding member (hereinafter referred to as “one-end-side holding member”) 50 provided at one end of the lamp unit 20 is a plate having a width smaller than that of the metal beam 30. As shown in FIGS. 7A and 7B, the mounting portion (hereinafter referred to as “one end mounting portion”) 51 of the one end side holding member 50 includes one end of the lamp unit of the lamp unit installation frame 11. An engagement through hole 52 into which the positioning pin 13 in the side mounted portion 12 is inserted is formed. Further, as shown in FIG. 5, the one end side holding member 50 has an opening 53 and a notch 54 for leading the cooling medium flow pipe 42 and the power supply lines 29 a and 29 b to the upper side of the one end holding member 50. Is formed.

A holding member (hereinafter referred to as “other end side holding member”) 55 provided at the other end of the lamp unit 20 is a plate having a width smaller than that of the metal beam 30. As shown in FIGS. 8A and 8B, the mounting portion (hereinafter referred to as “other end side mounting portion”) 56 of the other end side holding member 55 includes a lamp of the lamp unit installation frame 11. An engaging portion 57 that is received and engaged in the recess 16 in the unit other-end-side mounted portion 15 is formed. The width dimension of the engaging portion 57 is substantially the same as the width dimension of the recess 16 in the lamp unit other end side mounted portion 15 of the lamp unit installation frame 11. Thereby, the movement of the lamp unit 20 in the width direction is restricted in a state where the lamp unit 20 is mounted.
Further, as shown in FIG. 6, the other end side holding member 55 is formed with a notch 58 for leading the cooling medium flow pipe 47 and the like to the upper side of the other end side holding member 55.

  As described above, the opening 53 and the notches 54 and 58 are formed in the one end side holding member 50 and the other end side holding member 55, so that the cooling medium flow pipes 42 and 47 and the power supply lines 29 a and 29 b are connected. It can be contained within the width region of the metal beam 30. As a result, in the lamp unit 20, the excimer lamp 21, the cooling mechanism, and other components are positioned within the width region of the metal beam 30, so that the maximum width of the lamp unit 20 is the metal beam 30. It will be defined by both side surfaces. For this reason, the lamp unit 20 can be disposed at an appropriate position, and the lamp unit 20 can be easily attached and detached.

  The lamp unit 20 is preferably configured such that a handle (handle) 38 for moving the lamp unit 20 is provided on the upper surface side of the metal beam 30. In this example, as shown in FIG. 1, for example, two handles 38 are provided at positions separated from each other in the length direction. With such a configuration, the lamp unit 20 can be easily moved (carried) and attached / detached.

  In the light irradiator 10, for example, a large number of lamp units 20 are arranged so that one end side of one lamp unit and the other end side of an adjacent lamp unit are arranged alternately. With such a configuration, it is possible to reliably avoid the occurrence of discharge between adjacent lamp units.

  Thus, according to the light irradiator 10 having the above configuration, the lamp unit 20 is detachably mounted on the lamp unit installation frame 11 by moving the lamp unit 20 in the vertical direction. It can be easily attached and detached. For example, when excimer lamps 21 are replaced, the entire lamp unit 20 can be removed from the light irradiator 10, and the excimer lamps 21 can be attached and detached for each lamp unit 20 in a place with good workability. For this reason, although it is a thing provided with many lamp units 20 so that light irradiation of a large area is possible, the ease and quickness of lamp replacement | exchange are not impaired. Further, when the lamp unit 20 is attached to or detached from the lamp unit installation frame 11, no force is applied to the excimer lamp 20 itself, so that the excimer lamp 20 can be prevented from being damaged.

  Further, in the lamp unit 20, the excimer lamp 21, the cooling mechanism, and other components are housed in the width region of the metal beam 30. That is, since the maximum width of the lamp unit 20 is defined by both side surfaces of the metal beam 30, according to the light irradiator 10, the interval between the adjacent lamp units is a constant size in the length direction. A large number of lamp units 20 can be densely arranged at appropriate positions. Therefore, it is possible to easily obtain the light irradiator 10 that can cope with light irradiation of a large area. Further, since the lamp unit 20 can be moved along both side surfaces of the metal beam 30, the lamp unit 20 can be attached and detached more easily.

  Hereinafter, the light irradiation apparatus using the light irradiator of the present invention will be described.

FIG. 9 is a perspective view schematically showing an appearance of an example of the light irradiation apparatus of the present invention. FIG. 10 is a diagram schematically showing the internal structure of the light irradiation device shown in FIG. 9, (a) a sectional view seen from the front direction, and (b) a sectional view seen from one side surface direction. FIG. 11 is an enlarged cross-sectional view schematically showing a part of FIG. FIG. 12 is an enlarged cross-sectional view schematically showing a part of FIG.
The light irradiation device 60 includes a housing 61 having a pair of front doors 62 and 62 that are opened and closed, for example, in a double door. A light transmission window 63 is provided on the lower surface of the casing 61.

A light irradiator arrangement space Sa in which the above-described light irradiator 10 is arranged is formed in the lower part of the housing 61.
The light irradiator arrangement space Sa is defined by, for example, a substantially rectangular frame 65 and a partition wall 66 that hermetically closes the upper opening of the frame 65. The partition wall 66 is provided so as to be openable and closable via a hinge portion 67 with respect to the frame body 65. The partition 66 is made of, for example, stainless steel. The light irradiator 10 is fixed to the frame body 65 in a state where the lamp unit installation frame 11 is disposed along a horizontal plane.
In this light irradiation device 60, the inside of the light irradiator arrangement space Sa is made an inert gas atmosphere in a state where the partition wall 66 is closed, and the inert gas is introduced into the inert gas introduction port ( The light irradiator arrangement space Sa is supplied via a non-illustrated).

  In this light irradiation apparatus, the upper space of the light irradiator arrangement space Sa opened when the front doors 62, 62 are opened is a work space Sb in which a person can put the upper body inside, for example. It is said that. In addition, a number of lighting power supply units 68 corresponding to each of the number of lamp units 20 constituting the light irradiator 10 are disposed above the work space Sb in the housing 61.

  The light irradiation device 60 irradiates the inert gas (indicated by a white arrow in FIGS. 10A and 10B) in the light irradiator arrangement space Sa in a state where the partition wall 66 is closed. And an inert gas circulation mechanism 70 that is discharged from the vessel arrangement space Sa and introduced into the light irradiator arrangement space Sa again. By circulating the inert gas in the light irradiator arrangement space Sa, generation of ozone can be suppressed or prevented and the excimer lamp 21 can be cooled from the light irradiation surface side.

The inert gas circulation mechanism 70 has an inert gas circulation path constituted by the light irradiator arrangement space Sa and ventilation ducts 71a and 71b communicating at both ends thereof. The inert gas circulation path is provided with a blowing means 72 and a heat exchanger 73 for heat dissipation. A gas purification means for removing ozone may be provided in the inert gas circulation path.
In the inert gas circulation mechanism 70, the inert gas whose temperature has increased in the light irradiator arrangement space Sa is sent to the heat exchanger 73 via the ventilation duct 71b. The inert gas whose temperature has been lowered by the action of the heat exchanger 73 is again supplied into the light irradiator arrangement space Sa by the blower 72 through the ventilation duct 71a.

  As described above, the lamp unit 20 in the light irradiator 10 is detachably mounted on the lamp unit installation frame 11 by moving in the vertical direction. For this reason, it is preferable that the light irradiation device 60 includes a transfer mechanism 75 for suspending and moving the lamp unit 20 in the housing 61. By including the transfer mechanism 75, the weight of the lamp unit 20 is reduced, so that the lamp unit can be attached and detached very easily.

  The transfer mechanism 75 includes, for example, a guide rail 76 that extends in the width direction of the light irradiator 10 provided in the ceiling portion of the work space Sb, and a pedestal 77 that can be reciprocated along the guide rail 76. For example, a spring balancer 78 that suspends the lamp unit 20 is suspended from the pedestal 77. Instead of the spring balancer 78, a balancer such as an air balancer may be used.

  In this transfer mechanism 75, as shown by a broken line in FIG. 12, a lamp unit suspension wire 80 is attached to a hook 78b provided at the tip of a suspension wire rope 78a in a spring balancer 78. A gripping fitting (not shown) provided at both ends of the lamp unit hanging wire 80 is attached to each handle 38 of the lamp unit 20. The spring balancer 78 is set to have a suspending force that lifts the lamp unit 20 having a weight of about 5 kg upward by 30 to 50 cm, for example.

Hereinafter, a method for attaching and detaching the lamp unit 20 in the light irradiation device 60 will be described.
First, the partition 66 that defines the light irradiator arrangement space Sa is opened, and the spring balancer 78 is moved to a position immediately above the target lamp unit 20. Then, the hanging wire rope 78 a is lowered, and the gripping metal fittings in the lamp unit hanging wire 80 attached to the hook 78 b are attached to the handle 38 in the lamp unit 20. Here, the piping and the power supply line related to the cooling medium W connected to the lamp unit 20 are removed.
Next, when the operator holds the handle 38 of the lamp unit 20 and pulls up the lamp unit 20, the engagement at the one end side mounting portion 51 and the other end side mounting portion 55 of the lamp unit 20 is released, and the lamp unit 20 It is removed from the lamp unit installation frame 11. At this time, even if the operator releases his hand from the lamp unit 20, the lamp unit 20 is held in the air by the action of the spring balancer 78.
Thereafter, in a state where the spring balancer 78 is slid to move the lamp unit 20 to a place with good workability, the lamp unit hanging wire 80 is removed from the lamp unit 20, so that the lamp unit 20 can be removed. Completed.
The lamp unit 20 is mounted in the reverse order.

In the configuration example of the light irradiation device 60 described above, the size of the casing 61 is 1400 mm in the horizontal direction in FIG. 10A, 1400 mm in the horizontal direction in FIG. The dimension is 2000 mm. In the light irradiator 10, the number of lamp units 20 mounted is 12 (the number of excimer lamps 21 is 24). The maximum dimension of the lamp unit 20 in the length direction is 950 mm, the maximum dimension in the width direction (width dimension of the metal beam 30) is 59 mm, and the weight is about 5 kg. The excimer lamp 21 has a total length of 800 mm (an effective light emission length of 600 mm) and a rated power of 600 W.

Thus, the light irradiation device 60 has a configuration in which the partition 66 that partitions the light irradiation device arrangement space Sa in which the light irradiation device 10 is arranged is provided to be freely opened and closed. For this reason, the excimer lamp 21 can be attached and detached for each lamp unit 20 without moving the entire light irradiator 10. Therefore, according to the light irradiation device 60 described above, maintenance work including exchanging work of the excimer lamp 21 can be easily performed while being configured to be able to irradiate a large area of light.
Specifically, for example, according to such a light irradiation device 60, for example, the size of the light irradiation area is 510 mm × 610 mm, and it is possible to perform light irradiation of a large area capable of performing processing on a large workpiece. Can be configured.

  Further, since the inert gas in the light irradiator arrangement space Sa is circulated, the light irradiator arrangement space Sa can be maintained in an intended atmosphere and the cooling effect of the excimer lamp 21 can be improved. You can definitely get it. Moreover, an inert gas can be utilized efficiently.

  In the above, the light irradiation device 60 is, for example, a photo ashing process of a resist in a manufacturing process of a semiconductor, a liquid crystal or the like, a removal of a resist adhering to a pattern surface of a template in a nanoimprint apparatus, or a glass substrate or a silicon wafer for liquid crystal. It is suitably used for dry cleaning treatment, smear removal treatment (desmear treatment) in the printed circuit board manufacturing process.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, in the light irradiator, the mounting portion in the lamp unit is not limited to the above configuration as long as the lamp unit is detachably mounted by moving the lamp unit in the vertical direction. Absent.
The cooling medium for cooling the excimer lamp in the lamp unit may be supplied independently to each of the cooling medium flow path of the excimer lamp and the cooling medium flow path in the metal beam.
Furthermore, the number of excimer lamps constituting the lamp unit may be one, and the number of excimer lamps (lamp units) mounted on the light irradiator can be appropriately changed according to the purpose. .
Furthermore, the excimer lamp is not limited to the above configuration as long as the cooling medium is configured to flow through the inner space of the inner tube.

DESCRIPTION OF SYMBOLS 10 Light irradiator 11 Lamp unit installation frame 12 Lamp unit one end side mounting portion 13 Positioning pin 15 Lamp unit other end side mounting portion 16 Recess 18 Insulating sheet 20 Lamp unit 21 Excimer lamp 22 Inner electrode 23 Electrode plate 24 Drawer Electrode 25 Discharge vessel 26 Outer tube 27 Inner tube 28 Lead 29a Feed line 29b Feed line 30 Metal beam 31 Lamp housing recess (groove)
32 Cooling medium flow pipe 35 Lamp holder 36 Photo detector 38 Handle (grip)
40 One end side flow path branching / merging member (one end side manifold)
41 Joint 42 Cooling medium flow pipe 43 Cooling medium flow pipe 45 Other end side flow branching / merging member (second end side manifold)
46 joint 47 cooling medium flow pipe 50 holding member (one end side holding member)
51 mounting part (one end side mounting part)
52 through hole 53 for engagement 53 opening 54 notch 55 holding member (other-end side holding member)
56 Mounting part (other end side mounting part)
57 engaging part 58 notch part 60 light irradiation device 61 housing 62 front door 63 light transmission window 65 frame body 66 partition wall 67 hinge part 68 lighting power supply unit 70 inert gas circulation mechanism 71a ventilation duct 71b ventilation duct 72 blowing means 73 Heat exchanger 75 Transfer mechanism 76 Guide rail 77 Mounting base 78 Spring balancer 78a Hanging wire rope 78b Hook 80 Lamp unit hanging wire 90 Light irradiation device 91 Casing 91a Upper casing member 91b Lower casing member 92 Hinge section 93 Light irradiation Window 94 Electrical component 95 Light irradiator 96 Excimer lamp 96a Lamp holder 97 Cooling block 98 Cooling medium flow path R1 Cooling medium flow path R2 Cooling medium flow path S1 Discharge space Sa Light irradiator arrangement space Sb Work space W Cooling medium

Claims (5)

A plurality of rod-shaped lamp units each having a double tubular excimer lamp and a metal beam holding the excimer lamp are arranged in parallel in a direction perpendicular to the length direction of the lamp unit in the same plane along the horizontal plane. It is provided on the lamp unit installation frame,
Light irradiation characterized by having mounting parts for detachably mounting the lamp unit to the lamp unit installation frame by moving the lamp unit in the vertical direction at both ends of the metal beam in the lamp unit. vessel.   2. The light irradiator according to claim 1, wherein the metal beam in the lamp unit has a lamp mounting portion on one surface side in the vertical direction and a handle for moving the lamp unit on the other surface side. .   A light irradiator arrangement space in which the light irradiator according to claim 1 or 2 is arranged is formed in a lower part of the housing provided with a light irradiation window on the lower surface. A light irradiation apparatus, wherein a partition wall that closes an upper opening of the light irradiator arrangement space to be partitioned is provided to be freely opened and closed.   The light irradiation apparatus according to claim 3, further comprising a transfer mechanism for suspending and moving the lamp unit in the light irradiator in the housing. An inert gas circulation mechanism that circulates the inert gas in the light irradiator arrangement space that is an inert gas atmosphere in a state where the partition wall is closed;
The inert gas circulation mechanism has an inert gas circulation path communicating with the light irradiator arrangement space, and the inert gas circulation path is provided with a blowing means and a heat exchanger for heat dissipation. The light irradiation apparatus according to claim 3, wherein the light irradiation apparatus is a light irradiation apparatus.

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