JP2018118386A - Liquid discharge head and liquid discharge device - Google Patents

Liquid discharge head and liquid discharge device Download PDF

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JP2018118386A
JP2018118386A JP2017009311A JP2017009311A JP2018118386A JP 2018118386 A JP2018118386 A JP 2018118386A JP 2017009311 A JP2017009311 A JP 2017009311A JP 2017009311 A JP2017009311 A JP 2017009311A JP 2018118386 A JP2018118386 A JP 2018118386A
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substrate
wall member
liquid discharge
sealing material
liquid
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大知 谷口
Hirotomo Taniguchi
大知 谷口
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Canon Inc
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharge head, which can suppress the effect of stress caused by contraction of a sealing material and prevent liquid such as ink from entering a groove part between a side wall near a long side of a recording element substrate and an inner wall of a supporting member.SOLUTION: The liquid discharge head has: a substrate, in which are provided an energy generating element for discharging liquid through a discharge port and a supply port for supplying the liquid to be discharged to a flow path communicating with the discharge port and which has an opening extending in one direction, which has long sides along an extending direction of the supply port and short sides crossing the long sides; a support member having a recessed part for supporting the substrate formed; an electric connection part provided along the short side of the substrate; and a sealing material for sealing the electric connection part. At a position corresponding to a side closer to the center side of the substrate than the electric connection part in the recessed part of the support member, near the long side of the substrate, is arranged a wall member, and at the long side part and at the short side part of the substrate, in the recessed part of the support member, is arranged the sealing material.SELECTED DRAWING: Figure 3

Description

本発明は、液体吐出ヘッドおよび液体吐出装置に関し、詳しくは、液体吐出ヘッドにおける電気接続部を保護するために用いられる封止材の適用範囲に関するものである。   The present invention relates to a liquid discharge head and a liquid discharge apparatus, and more particularly to an application range of a sealing material used for protecting an electrical connection portion in the liquid discharge head.

インクなどの液体を吐出するための液体吐出ヘッドの構成例として、吐出口と、吐出口に連通する圧力室に配置された電気熱変換素子などのエネルギー発生素子を、基板上に設けて形成される素子基板を備えるものが知られている。この種の液体吐出ヘッドでは、支持部材は、その凹部に素子基板を配置して支持する。また、液体吐出ヘッドには、電気熱変換素子の駆動に用いられる電気信号や電力を液体吐出装置の本体から受け取るためのコンタクトが設けられている。このコンタクト部と記録素子基板との電気接続は、電気配線部材から露出したインナーリードを、記録素子基板に設けられた接続端子に接続することによって可能となる。   As a configuration example of a liquid discharge head for discharging a liquid such as ink, an energy generation element such as an electrothermal conversion element disposed in a pressure chamber communicating with the discharge port and the discharge port is provided on a substrate. What is provided with the element substrate which is said is known. In this type of liquid ejection head, the support member supports the element substrate disposed in the recess. Further, the liquid discharge head is provided with a contact for receiving an electric signal and electric power used for driving the electrothermal conversion element from the main body of the liquid discharge apparatus. This electrical connection between the contact portion and the recording element substrate is made possible by connecting the inner leads exposed from the electrical wiring member to connection terminals provided on the recording element substrate.

封止材は、インナーリードと接続端子との電気接続部を覆い、電気接続部をインクなどから保護する。この封止材の適用範囲に関して、特許文献1には、封止材が、支持基板の凹部を形成する側壁と、記録素子基板の接続端子が設けられていない長辺側の側部と、の間の溝部に流れこまないように、壁部材を形成することが記載されている。これにより、記録素子基板が、封止材を高温でキュア硬化し常温に戻す工程や、環境温度が変化する際に、生じ得る封止材の収縮による応力の影響を受けることを抑制することができる。   The sealing material covers the electrical connection portion between the inner lead and the connection terminal, and protects the electrical connection portion from ink or the like. Regarding the application range of this sealing material, Patent Document 1 discloses that the sealing material includes a side wall that forms a concave portion of the support substrate and a side portion on the long side where the connection terminal of the recording element substrate is not provided. It is described that the wall member is formed so as not to flow into the groove portion therebetween. This suppresses the recording element substrate from being affected by the stress due to the shrinkage of the sealing material that may occur when the sealing material is cured at a high temperature and returned to room temperature, or when the environmental temperature changes. it can.

特開2012−143896号公報JP 2012-143896 A

しかしながら、特許文献1のように、封止材が素子基板の長辺側の側壁と支持部材の内壁との間の溝部に適用されない場合、この溝部にインクが侵入し、素子基板がインクに晒されることがある。そして、インクによる素子基板の溶解が発生し、素子基板の寿命に影響を与える。また、封止材が配置されない素子基板長辺側の溝部はインク溜りとなる可能性もあり、その場合には、インク等の液体によって装置や記録する画像が汚されるという問題も生じ得る。   However, as in Patent Document 1, when the sealing material is not applied to the groove between the long side wall of the element substrate and the inner wall of the support member, ink enters the groove and the element substrate is exposed to the ink. May be. Then, dissolution of the element substrate by ink occurs, which affects the life of the element substrate. In addition, the groove on the long side of the element substrate where the sealing material is not disposed may become an ink reservoir, and in that case, there may be a problem that the device or an image to be recorded is soiled by a liquid such as ink.

本発明は、封止材の収縮による応力の影響を抑制できるとともに、インク等の液体が記録素子基板の長辺側の側壁と支持部材の内壁との間の溝部に侵入しない、液体吐出ヘッドおよび液体吐出装置を提供することを目的とする。   The present invention is capable of suppressing the influence of stress due to shrinkage of the sealing material, and does not allow liquid such as ink to enter the groove between the long side wall of the recording element substrate and the inner wall of the support member, and An object is to provide a liquid ejection device.

上記目的を達成するために本発明は、吐出口から液体を吐出するためのエネルギー発生素子と、吐出するための液体を前記吐出口に連通する流路に供給するための供給口であって、一方向に延在する開口を有した供給口と、が設けられ、前記供給口の延在方向に沿った長辺と前記長辺に交差する短辺とを有した基板と、前記基板を支持する凹部が形成された支持部材と、前記基板の前記短辺に沿って設けられた電気接続部と、前記電気接続部を被覆する封止材と、を有する液体吐出ヘッドであって、前記基板の長辺側の、前記支持部材の前記凹部における、前記電気接続部より前記基板の中央側に対応する位置に壁部材が配置されており、前記支持部材の凹部における、前記基板の前記長辺側部および前記短辺側部に前記封止材が配されていることを特徴とする。   In order to achieve the above object, the present invention provides an energy generating element for discharging liquid from a discharge port, and a supply port for supplying a liquid for discharge to a flow path communicating with the discharge port, A supply port having an opening extending in one direction, a substrate having a long side along the extending direction of the supply port and a short side intersecting the long side, and supporting the substrate A liquid discharge head, comprising: a support member having a concave portion formed thereon; an electrical connection portion provided along the short side of the substrate; and a sealing material covering the electrical connection portion, wherein the substrate A wall member is disposed at a position corresponding to a center side of the substrate from the electrical connection portion in the concave portion of the support member on the long side of the long side, and the long side of the substrate in the concave portion of the support member The sealing material is arranged on the side part and the short side part. It is characterized in.

以上の構成によれば、液体吐出ヘッドにおいて、封止材の収縮による応力の影響を抑制できるとともに、インク等の液体が記録素子基板の長辺側の側壁と支持部材の内壁との間の溝部に侵入しないようにすることが可能となる。   According to the above configuration, in the liquid ejection head, the influence of the stress due to the shrinkage of the sealing material can be suppressed, and the groove portion between the long side wall of the recording element substrate and the inner wall of the support member can be used. It is possible to prevent intrusion.

(a)および(b)は、本発明の一実施形態に係る液体吐出ヘッドを示す図である。(A) And (b) is a figure which shows the liquid discharge head which concerns on one Embodiment of this invention. (a)および(b)は、液体吐出ヘッドを構成する素子基板のそれぞれ吐出口が配設された面側およびその裏面側を示す図である。(A) And (b) is a figure which shows the surface side in which the discharge port of each element substrate which comprises a liquid discharge head was each arrange | positioned, and the back surface side. (a)および(b)は、本発明の第1実施形態に係る液体吐出ヘッドの素子基板の構成を示す図である。(A) And (b) is a figure which shows the structure of the element substrate of the liquid discharge head which concerns on 1st Embodiment of this invention. 第1実施形態に係る壁部材の位置基準を説明する図である。It is a figure explaining the position reference | standard of the wall member which concerns on 1st Embodiment. 第1実施形態に係る、壁部材の位置と封止材の収縮によって供給口の端に作用する最大の主応力との関係を示す図である。It is a figure which shows the relationship between the position of a wall member and the largest principal stress which acts on the end of a supply port by shrinkage | contraction of a sealing material based on 1st Embodiment. 第1実施形態に係る、壁部材の幅と供給口の端に作用する最大主応力との関係を示す図である。It is a figure which shows the relationship between the width | variety of a wall member and the largest principal stress which acts on the edge of a supply port based on 1st Embodiment. 第1実施形態に係る、壁部材と基板の間隔Gと供給口の端に作用する最大主応力との関係を示す図である。It is a figure which shows the relationship between the largest principal stress which acts on the edge G of the space | interval G of a wall member and a board | substrate based on 1st Embodiment, and a supply port. (a)および(b)は、本発明の第2実施形態に係る液体吐出ヘッドの素子基板の構成を示す図である。(A) And (b) is a figure which shows the structure of the element substrate of the liquid discharge head which concerns on 2nd Embodiment of this invention. 第2実施形態に係る、壁部材の位置と封止材の収縮によって供給口の端に作用する最大の主応力との関係を示す図である。It is a figure which shows the relationship between the position of a wall member and the largest principal stress which acts on the end of a supply port by shrinkage | contraction of a sealing material based on 2nd Embodiment. 第2実施形態の壁部材の効果を説明するための図である。It is a figure for demonstrating the effect of the wall member of 2nd Embodiment.

以下、図面を参照して本発明の実施形態を説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1(a)および(b)は、本発明の一実施形態に係る液体吐出ヘッド100を示す図である。図1(a)は、液体吐出ヘッド100を吐出口面側から見た斜視図であり、図1(b)は、液体吐出ヘッド100の分解斜視図である。図2(a)および(b)は、液体吐出ヘッド100を構成する素子基板101のそれぞれ吐出口が配設された面側およびその裏面側を示す図である。   1A and 1B are views showing a liquid discharge head 100 according to an embodiment of the present invention. FIG. 1A is a perspective view of the liquid discharge head 100 viewed from the discharge port surface side, and FIG. 1B is an exploded perspective view of the liquid discharge head 100. FIGS. 2A and 2B are views showing the surface side of the element substrate 101 constituting the liquid discharge head 100 where the discharge ports are provided and the back side thereof.

液体吐出ヘッド100は、インク収容部103を構成するケース部材に、記録素子基板(単に、素子基板ともいう)を取り付けることによって形成される。そして、電気配線部材102と素子基板101は、電気配線部材102のインナーリード109と素子基板101の接続端子107が接続されことによって電気的に接続される。また、電気配線部材102のコンタクト部108は、装置本体のキャリッジにおけるコネクタピンと接続する。これにより、液体吐出ヘッド100と装置本体との間の電気信号の授受や電力の供給が可能となる。   The liquid ejection head 100 is formed by attaching a recording element substrate (simply referred to as an element substrate) to a case member that constitutes the ink containing portion 103. The electrical wiring member 102 and the element substrate 101 are electrically connected by connecting the inner leads 109 of the electrical wiring member 102 and the connection terminals 107 of the element substrate 101. Further, the contact portion 108 of the electric wiring member 102 is connected to a connector pin in the carriage of the apparatus main body. Thereby, it is possible to exchange electric signals and supply power between the liquid discharge head 100 and the apparatus main body.

インク収容部103の内部には、液体としてのインクが保持されている。そして、インク収容部103と連通したインク供給流路106を介して素子基板101にインクが導かれ、素子基板101に設けられた吐出口104からインクが吐出される。なお、本実施形態は、液体吐出ヘッド100とインク収容部103とが一体型の形態に関するものであるが、液体吐出ヘッド100に対してインク収容部103が着脱可能な方式であってもよい。   Ink inside the ink container 103 is held as liquid. Then, the ink is guided to the element substrate 101 through the ink supply channel 106 communicated with the ink containing portion 103, and the ink is ejected from the ejection port 104 provided in the element substrate 101. The present embodiment relates to a configuration in which the liquid ejection head 100 and the ink storage unit 103 are integrated, but a system in which the ink storage unit 103 can be attached to and detached from the liquid ejection head 100 may be used.

電気配線部材102は可撓性を有した配線部材であり、コンタクト部108、樹脂のフィルムに挟まれた電気配線(不図示)、樹脂フィルムの端面から露出するリード配線であるインナーリード109が形成されている。このような可撓性を有する電気配線部材102の一例として、TAB(Tape Automated Bonding)方式のテープを挙げることができる。コンタクト部108は、複数のコンタクトパッドで構成されており、液体吐出ヘッド100が記録装置本体のキャリッジ(不図示)に装着される際に、記録装置本体側のコネクタピン(不図示)と接触して電気的接続がなされる。   The electric wiring member 102 is a flexible wiring member, and a contact portion 108, an electric wiring (not shown) sandwiched between resin films, and an inner lead 109 which is a lead wiring exposed from the end surface of the resin film are formed. Has been. As an example of such an electric wiring member 102 having flexibility, a TAB (Tape Automated Bonding) type tape can be cited. The contact portion 108 is composed of a plurality of contact pads, and comes into contact with a connector pin (not shown) on the recording apparatus main body when the liquid ejection head 100 is mounted on a carriage (not shown) of the recording apparatus main body. And electrical connection is made.

素子基板101は、基板117と、吐出口104が形成されたノズルプレート116によって形成されている。このうち基板117に、インクを吐出するために利用されるエネルギーを発生するエネルギー発生素子として、電気熱変換素子(不図示)が設けられている。さらに、基板117には、電気熱変換素子に接続する配線と、その配線と電気配線部材102を接続する接続端子107が複数配置されている。電気配線部材102のインナーリード109が接続端子107とボンディングにより接続されることで、電気配線部材102から素子基板101へ電気信号及び電力の供給が可能となる。インナーリード109が接続端子107にボンディングされた領域を電極部とする。この電極部は、基板117の短辺側の端部に配置される。この基板117の端部には、封止材110が塗布され、これにより、インク等の液体からこれらの接続端子部分を被覆し、保護することができる。   The element substrate 101 is formed by a substrate 117 and a nozzle plate 116 in which the discharge ports 104 are formed. Among these, an electrothermal conversion element (not shown) is provided on the substrate 117 as an energy generating element that generates energy used to eject ink. Further, the substrate 117 has a plurality of wirings connected to the electrothermal conversion element and a plurality of connection terminals 107 connecting the wirings and the electrical wiring member 102. By connecting the inner lead 109 of the electric wiring member 102 to the connection terminal 107 by bonding, an electric signal and electric power can be supplied from the electric wiring member 102 to the element substrate 101. A region where the inner lead 109 is bonded to the connection terminal 107 is defined as an electrode portion. This electrode portion is disposed at the end portion on the short side of the substrate 117. The sealing material 110 is applied to the end portion of the substrate 117, so that these connection terminal portions can be covered and protected from a liquid such as ink.

素子基板101の基板117には、長溝状の貫通口からなるインク供給口105が形成されている。このインク供給口105は、一方向に延在する細長い開口を有し、また、基板117の電極部より内側に形成される。本実施形態では、インク供給口の形状は、異方性エッチング等で作成した四角錐台であるが、直方体でもよい。インク収容部103側のインク供給流路106から、インク供給口105を介して、基板117上に形成されたノズルプレート116によって形成された流路に、インクが供給される。そして、流路に設けられた電気熱変換素子を駆動することにより、対応する吐出口104からインクを吐出することができる。   The substrate 117 of the element substrate 101 has an ink supply port 105 formed of a long groove-shaped through-hole. The ink supply port 105 has an elongated opening extending in one direction, and is formed inside the electrode portion of the substrate 117. In this embodiment, the shape of the ink supply port is a quadrangular pyramid created by anisotropic etching or the like, but it may be a rectangular parallelepiped. Ink is supplied from the ink supply channel 106 on the ink container 103 side to the channel formed by the nozzle plate 116 formed on the substrate 117 via the ink supply port 105. Ink can be discharged from the corresponding discharge port 104 by driving the electrothermal conversion element provided in the flow path.

液体吐出ヘッド100の筐体の一部である支持部材111と素子基板101との接合は、支持部材111に接着剤を塗布した後、素子基板101を位置合わせすることにより行われる。また、支持部材111には、素子基板を接着する際の接着剤とは別の接着剤にて電気配線部材102が接着固定される。支持部材111は、樹脂成形により形成されており、本実施形態で使用した樹脂材料(変性ポリフェニレンエーテル)は、剛性を向上させるためにガラスフィラーを35質量%混合している。この支持部材111は、素子基板101を配置する部分が、その周囲の電気配線部材102を接着、固定する部分よりも凹んでいる形状(凹部113)になっている。これは、電気配線部材102のインナーリード109と素子基板101の接続端子107とをほぼ同じ高さにして、両者の電気接続部の信頼性を向上させるためである。   The support member 111, which is a part of the casing of the liquid discharge head 100, and the element substrate 101 are joined by applying an adhesive to the support member 111 and then aligning the element substrate 101. In addition, the electric wiring member 102 is bonded and fixed to the support member 111 with an adhesive different from the adhesive used when the element substrate is bonded. The support member 111 is formed by resin molding, and the resin material (modified polyphenylene ether) used in the present embodiment is mixed with 35% by mass of a glass filler in order to improve rigidity. The support member 111 has a shape (concave portion 113) in which a portion where the element substrate 101 is arranged is recessed from a portion where the surrounding electric wiring member 102 is bonded and fixed. This is because the inner leads 109 of the electric wiring member 102 and the connection terminals 107 of the element substrate 101 are made substantially the same height to improve the reliability of the electric connection portions of both.

(第1実施形態)
図3(a)および(b)は、本発明の第1実施形態に係る液体吐出ヘッドの素子基板101の構成を示す図であり、図3(b)は図3におけるIIIb-IIIb線断面図である。これら図に示すように、本実施形態の素子基板101は、上記供給口105の延在方向に沿った長辺と、この長辺に交差する短辺を有した基板117を備えている。また、この基板117の短辺側の端部である電極部の他、基板117の長辺側の側部と支持部材111の凹部を形成する内壁部との間の溝部に、封止材110が充填されている。但し、基板117の長辺側の側部に対応した上記溝部の4箇所には、壁部材119が配置されている。供給口105の端を距離の基準とした壁部材119の位置をP、壁部材119の基板117の長辺方向の幅をW、壁部材119の基板117との間隔Gとする。このとき、本実施形態では、後述されるように、Wは1mm、Pは0.5mm、Gは0.13mmに、定めている。また、壁部材の上面の高さは素子基板101と支持部材111の上面が連なる位置と同じ高さである。なお、本実施形態では、この壁部材は支持部材と一体に樹脂成形されるものであるが、壁部材は接着材等で接着して形成してもよい。また、材質も支持部材と異なる材質であってもよい。
(First embodiment)
3A and 3B are views showing the configuration of the element substrate 101 of the liquid ejection head according to the first embodiment of the present invention, and FIG. 3B is a cross-sectional view taken along the line IIIb-IIIb in FIG. It is. As shown in these drawings, the element substrate 101 of this embodiment includes a substrate 117 having a long side along the extending direction of the supply port 105 and a short side intersecting the long side. Further, in addition to the electrode portion which is an end portion on the short side of the substrate 117, a sealing material 110 is formed in a groove portion between a side portion on the long side of the substrate 117 and an inner wall portion forming a concave portion of the support member 111. Is filled. However, wall members 119 are arranged at four locations of the groove corresponding to the long side of the substrate 117. The position of the wall member 119 with the end of the supply port 105 as the reference of the distance is P, the width of the wall member 119 in the long side direction of the substrate 117 is W, and the distance G between the wall member 119 and the substrate 117 is G. At this time, in this embodiment, as will be described later, W is set to 1 mm, P is set to 0.5 mm, and G is set to 0.13 mm. The height of the upper surface of the wall member is the same height as the position where the upper surfaces of the element substrate 101 and the support member 111 are continuous. In the present embodiment, the wall member is resin-molded integrally with the support member, but the wall member may be formed by bonding with an adhesive or the like. Further, the material may be different from that of the support member.

上述のように壁部材119の配置、形状が定められた素子基板101の仕様の一例は次のとおりである。封止材はエポキシ樹脂を主成分とした熱硬化型のものを使用し、100℃で、1時間、キュア硬化させたものである。この封止材110の線膨張率は、20ppmから40ppm程度、ヤング率が4GPaから8GPa程度のものを使用するが、本実施形態では、線膨張率が約30ppm、ヤング率が約6GPaである。また、支持部材111は、アルミナを材料とし、線膨張率が約7ppm、ヤング率が約320GPaのもので、基板117は、シリコンを材料とし、線膨張率が約3ppm、ヤング率が約170GPaのものである。   An example of the specification of the element substrate 101 in which the arrangement and shape of the wall member 119 are determined as described above is as follows. The sealing material is a thermosetting type mainly composed of an epoxy resin and cured at 100 ° C. for 1 hour. The sealing material 110 has a linear expansion coefficient of about 20 ppm to 40 ppm and a Young's modulus of about 4 GPa to 8 GPa. In this embodiment, the linear expansion coefficient is about 30 ppm and the Young's modulus is about 6 GPa. The support member 111 is made of alumina and has a linear expansion coefficient of about 7 ppm and a Young's modulus of about 320 GPa. The substrate 117 is made of silicon and has a linear expansion coefficient of about 3 ppm and a Young's modulus of about 170 GPa. Is.

上述した仕様の液体吐出ヘッドの素子基板の割れに対する耐性の評価を行うため、液体吐出ヘッド全体を−25℃まで冷却させる評価を行った。キュア硬化温度と温度差が大きいほど封止材がより収縮するため、素子基板の変形が大きくなる。−25℃の評価環境において、壁部材がない従来例の液体吐出ヘッドと比較して、本実施形態に係る、壁部材が設けられた液体吐出ヘッドは、素子基板の割れが抑制されることを確認した。定量的な評価のため、素子基板の供給口の端118の最大主応力を測定した。割れの起点は供給口端部エッジであり、この箇所の最大主応力が高いほど、割れが発生し易いことを示している。最大主応力は、ラマン分光法によるラマンシフトによって測定した。従来例の壁部材が無い素子基板の最大主応力が、100MPaであるのに対し、壁部材がある本実施形態の素子基板101の最大主応力は、20Mpaと2割に低下した。最大主応力が7割程度に低下することで、素子基板の割れ抑制に十分な効果があることが確認されているが、本実施形態では、2割まで低下するという効果を示した。   In order to evaluate the resistance against cracking of the element substrate of the liquid discharge head having the above-described specification, the evaluation was made to cool the entire liquid discharge head to −25 ° C. The larger the temperature difference from the cure curing temperature, the more the sealing material shrinks, and the deformation of the element substrate increases. In the evaluation environment of −25 ° C., the liquid discharge head provided with the wall member according to the present embodiment is less susceptible to cracking of the element substrate than the conventional liquid discharge head without the wall member. confirmed. For quantitative evaluation, the maximum principal stress at the end 118 of the element substrate supply port was measured. The starting point of the crack is the edge of the supply port, and the higher the maximum principal stress at this point, the easier it is to crack. The maximum principal stress was measured by Raman shift by Raman spectroscopy. The maximum principal stress of the element substrate without the wall member of the conventional example is 100 MPa, whereas the maximum principal stress of the element substrate 101 of the present embodiment with the wall member is reduced to 20 MPa and 20%. Although it has been confirmed that the maximum principal stress is reduced to about 70%, there is a sufficient effect for suppressing cracking of the element substrate, but in the present embodiment, the effect of being reduced to 20% is shown.

液体吐出ヘッドがキュア温度から冷却される際に、封止材が収縮することで、供給口105の端部エッジを起点とした割れが発生してしまう場合がある。ここで、封止材の線膨張率が大きいほど封止材が収縮するので割れが発生しやすい。また、封止材のヤング率が大きいほど、収縮時の応力が緩和されず、素子基板を引っ張る力が強まり、チップが割れやすくなる。これに対し、チップ割れが発生しにくい物性の封止材を使用すれば良いと考えられるが、封止材の塗付性の点から粘度などもコントロールする必要があり、使用できる封止材の物性値に制約がある。本実施形態は、このような制約を受けることなく、上述のように壁部材の形状、配置を定めることによって、割れを防ぐことができる。   When the liquid discharge head is cooled from the cure temperature, the sealing material contracts, and a crack starting from the end edge of the supply port 105 may occur. Here, since the sealing material contracts as the linear expansion coefficient of the sealing material increases, cracking is likely to occur. In addition, as the Young's modulus of the sealing material is larger, the stress at the time of contraction is not relaxed, the force for pulling the element substrate is increased, and the chip is easily broken. On the other hand, it is thought that it is sufficient to use a sealing material having physical properties that do not easily cause chip cracking, but it is necessary to control the viscosity from the point of applicability of the sealing material. There are restrictions on physical properties. This embodiment can prevent a crack by determining the shape and arrangement | positioning of a wall member as mentioned above, without receiving such a restriction | limiting.

以下では、上述した、本実施形態に係る壁部材119の位置、幅、および基板117との間隔のそれぞれを定める上での検討事項および好ましい範囲について説明する。   Below, the consideration matter and preferable range in determining each of the position of the wall member 119 which concerns on this embodiment, the width | variety, and the space | interval with the board | substrate 117 mentioned above are demonstrated.

<壁部材の位置>
壁部材を配置することによって、壁部材が配置された場所は封止材が存在しない。このため、封止材が収縮することによって素子基板が受ける応力が低減され、素子基板が変形し割れが発生することが抑制される。しかしながら、壁部材を基板117の長辺側の側部全域にわたって配置する場合には、ワイピングに悪影響を及ぼす場合がある。ワイピングは、吐出口が配設された面をワイパーによって拭き、吐出口面に付着したインクやゴミ等を拭き取る動作である。例えば、壁部材が基板117の長辺側の側部全域にわたって存在すると、ワイピング動作時にワイパーが壁部材が当り、ワイピングの効果が低下することがある。このようなワイピングに対する影響を低減するべく、壁部材は、基板の側部の全域に配置するのではなく、必要最小限の場所に配置することが好ましい。また、ワイピング時に壁部材にあたることを極力低減するために、壁部材の上面位置は、基板の上面位置以下であることが好ましい。
<Position of wall member>
By arranging the wall member, there is no sealing material at the place where the wall member is arranged. For this reason, the stress which an element substrate receives by shrinking | contracting a sealing material is reduced, and it is suppressed that an element substrate deform | transforms and a crack generate | occur | produces. However, if the wall member is disposed over the entire side of the long side of the substrate 117, it may adversely affect wiping. Wiping is an operation of wiping the surface on which the discharge port is provided with a wiper and wiping off ink or dust adhering to the surface of the discharge port. For example, if the wall member exists over the entire side of the long side of the substrate 117, the wiper may hit the wall member during the wiping operation, and the wiping effect may be reduced. In order to reduce the influence on the wiping, it is preferable that the wall member is disposed not in the whole area of the side portion of the substrate but in a minimum necessary place. Moreover, in order to reduce as much as possible that it hits the wall member during wiping, the upper surface position of the wall member is preferably equal to or lower than the upper surface position of the substrate.

そこで、壁部材の位置を変更したいくつかの液体吐出ヘッドを作成し、素子基板の割れに対する評価を、上述したように、液体吐出ヘッド全体の温度を変化させて行なった。壁部材の基板117長辺側の幅Wは1.0mm、壁部材と基板の間隔Gは0.13mmとし、壁部材と基板の間には封止材が充填されている。図4は、本実施形態に係る壁部材の位置基準を説明する図である。本実施形態は、壁部材119の中心位置と基板117の供給口105の端が一致する位置を基準0とし、供給口105の長手方向における、供給口105の外側をマイナス、中央側をプラスとしている。   In view of this, several liquid discharge heads having different wall member positions were prepared, and evaluation of cracks in the element substrate was performed by changing the temperature of the entire liquid discharge head as described above. The width W of the wall member on the long side of the substrate 117 is 1.0 mm, the distance G between the wall member and the substrate is 0.13 mm, and a sealing material is filled between the wall member and the substrate. FIG. 4 is a view for explaining the position reference of the wall member according to the present embodiment. In the present embodiment, the position at which the center position of the wall member 119 and the end of the supply port 105 of the substrate 117 coincide with each other as a reference 0, and the outside of the supply port 105 in the longitudinal direction of the supply port 105 is minus and the center side is plus. Yes.

図5は、本実施形態に係る、壁部材の位置と、封止材の収縮によって供給口の端に作用する最大主応力との関係を示す図である。図5において、実線は上記関係を示しており、破線は壁部材が無い場合に供給口の端に作用する最大主応力を示している。図5に示すように、壁部材119の中心の位置Pが約0.5mmのとき、最大主応力は極小値となる。また、壁部材119の中心の位置Pが、約−0.5mm〜約2.0mmの範囲で、壁部材が無い場合に作用する最大主応力の約7割となる。上述したように、供給口105の端に作用する最大主応力が壁部材が無い場合の約7割以下のときに、素子基板の割れを有効に抑制することができる。   FIG. 5 is a diagram showing the relationship between the position of the wall member and the maximum principal stress acting on the end of the supply port due to the shrinkage of the sealing material according to the present embodiment. In FIG. 5, the solid line indicates the above relationship, and the broken line indicates the maximum principal stress acting on the end of the supply port when there is no wall member. As shown in FIG. 5, when the center position P of the wall member 119 is about 0.5 mm, the maximum principal stress becomes a minimum value. Further, the center position P of the wall member 119 is in the range of about −0.5 mm to about 2.0 mm, which is about 70% of the maximum principal stress acting when there is no wall member. As described above, when the maximum principal stress acting on the end of the supply port 105 is about 70% or less when there is no wall member, cracking of the element substrate can be effectively suppressed.

以上のように、供給口105の端118の近傍に壁部材119を配置することによって、供給口の端118近傍の基板の変形を抑制することができる。具体的には、壁部材119を、素子基板101の接続端子107よりも素子基板101の長手方向における内側に配置することが好ましい。特に、素子基板101の短手方向に壁部材119を延長したとき、壁部材119の(境界を含めた)領域内に供給口105の端118が位置するように、壁部材119を配置することがより好ましい。   As described above, by disposing the wall member 119 in the vicinity of the end 118 of the supply port 105, deformation of the substrate in the vicinity of the end 118 of the supply port can be suppressed. Specifically, the wall member 119 is preferably arranged on the inner side in the longitudinal direction of the element substrate 101 than the connection terminal 107 of the element substrate 101. Particularly, when the wall member 119 is extended in the short direction of the element substrate 101, the wall member 119 is arranged so that the end 118 of the supply port 105 is located in the region (including the boundary) of the wall member 119. Is more preferable.

<壁部材の幅>
壁部材の、基板の長辺に沿った方向の幅W(長さ)を変更したいくつかの液体吐出ヘッドを作成し、素子基板の割れに対する評価を、上記壁部材の位置の検討と同様の方法で行った。壁部材119の中心の位置Pは+0.5mmとし、壁部材119と基板117の間隔Gは0.13mmとして、壁部材119と基板117の間には封止材が充填されている。
<Width of wall member>
Several liquid discharge heads having different width W (length) in the direction along the long side of the substrate of the wall member were created, and the evaluation for cracking of the element substrate was the same as the examination of the position of the wall member. Went in the way. The center position P of the wall member 119 is set to +0.5 mm, the gap G between the wall member 119 and the substrate 117 is set to 0.13 mm, and a sealing material is filled between the wall member 119 and the substrate 117.

図6は、本実施形態に係る、壁部材の幅Wと供給口の端に作用する最大主応力との関係を示す図である。図6に示すように、壁部材119の幅Wが1.5mmおよびそれ以上になると、最大主応力はほぼゼロとなる。一方、幅Wを狭くしていくと、最大主応力は増加する。従って、壁部材119の幅Wは、最大主応力を低下させる観点からは広いほどよいが、上述した、壁部材がワイピングに及ぼす影響の点から、幅Wは、1.5mm以下(下限は0mm)とすることが好ましい。さらに、壁部材が無い場合の最大主応力の約7割となる幅Wである0.25mmが下限であることがより好ましい。   FIG. 6 is a diagram illustrating a relationship between the width W of the wall member and the maximum principal stress acting on the end of the supply port according to the present embodiment. As shown in FIG. 6, when the width W of the wall member 119 is 1.5 mm or more, the maximum principal stress becomes substantially zero. On the other hand, as the width W is reduced, the maximum principal stress increases. Therefore, the width W of the wall member 119 is preferably as large as possible from the viewpoint of reducing the maximum principal stress. However, the width W is 1.5 mm or less (the lower limit is 0 mm) from the viewpoint of the influence of the wall member on the wiping described above. ) Is preferable. Furthermore, it is more preferable that the lower limit is 0.25 mm, which is the width W that is about 70% of the maximum principal stress when there is no wall member.

<壁部材の基板との間隔>
基板117と壁部材119との間隔Gを変更し、その間隔Gの溝に封止材を充填したいくつかの液体吐出ヘッドを作成し、素子基板の割れに対する評価を上記と同様の方法で行った。この評価では、壁部材119の中心の位置Pを+0.5mmとし、壁部材119の幅Wを1.0mmとした。
<Space between substrate and wall member>
The gap G between the substrate 117 and the wall member 119 is changed, and several liquid discharge heads in which a groove with the gap G is filled with a sealing material are created, and evaluation for cracks in the element substrate is performed in the same manner as described above. It was. In this evaluation, the center position P of the wall member 119 was +0.5 mm, and the width W of the wall member 119 was 1.0 mm.

図7は、本実施形態に係る、壁部材と基板の間隔Gと供給口の端に作用する最大主応力との関係を示す図である。図7に示すように、基板117と壁部材119の間隔Gが、1mm以上となると壁部材による最大主応力の低減効果がほとんどなくなる。これは、間隔Gが広がるほど、封止材が増え、封止材の収縮が大きくなるからである。従って、基板117と壁部材119の間隔Gは、1mm以下とすることが好ましい。特に、壁部材が無い場合の最大主応力の約7割以下となる間隔Gの範囲である約0.4mm以下がさらに好ましい。   FIG. 7 is a diagram showing the relationship between the wall member-to-substrate gap G and the maximum principal stress acting on the end of the supply port according to the present embodiment. As shown in FIG. 7, when the distance G between the substrate 117 and the wall member 119 is 1 mm or more, the effect of reducing the maximum principal stress by the wall member is almost lost. This is because as the gap G increases, the sealing material increases and the shrinkage of the sealing material increases. Therefore, the distance G between the substrate 117 and the wall member 119 is preferably 1 mm or less. In particular, about 0.4 mm or less, which is the range of the gap G that is about 70% or less of the maximum principal stress when there is no wall member, is further preferable.

(第2実施形態)
図8(a)および(b)は、本発明の第1実施形態に係る液体吐出ヘッドの素子基板の構成を示す図である。図8(a)は素子基板101の正面図であり、図8(b)は、図8(a)におけるVIIIb-VIIIb線断面図である。
(Second Embodiment)
FIGS. 8A and 8B are views showing the configuration of the element substrate of the liquid ejection head according to the first embodiment of the present invention. FIG. 8A is a front view of the element substrate 101, and FIG. 8B is a cross-sectional view taken along the line VIIIb-VIIIb in FIG.

本実施形態が上述した第1実施形態と異なる点は、図8(b)に示すように、壁部材120が、支持部材111の凹部底面との間で所定の間隔の隙間Sが設けられる点である。そして、この隙間Sにも封止材110が充填される。なお、壁部材120は支持部材111と一体で形成されるものであるが、支持部材111に接着材等で接着して形成してもよい。   The present embodiment is different from the first embodiment described above in that a gap S with a predetermined interval is provided between the wall member 120 and the recess bottom surface of the support member 111 as shown in FIG. It is. The gap 110 is also filled with the sealing material 110. The wall member 120 is formed integrally with the support member 111, but may be formed by bonding the support member 111 with an adhesive or the like.

このように、支持部材の凹部の底面と壁部材120に間隔Sがあることにより、液体吐出ヘッドの製造工程の自由度が増し工程を簡易化することが可能となる。すなわち、支持部材111の凹部の底面と壁部材に隙間がない構造の場合、封止材を素子基板の長辺側と短辺側のいずれの領域に充填する必要があり工数が増えてしまう。これに対し、本実施形態のように、支持部材111の凹部底面と壁部材120と間に隙間Sがある場合、例えば、基板117の長辺側から封止材110を充填しても、隙間Sを通って短辺側にも充填することが可能となる。   As described above, since there is a space S between the bottom surface of the concave portion of the support member and the wall member 120, the degree of freedom in the manufacturing process of the liquid discharge head is increased, and the process can be simplified. That is, in the case where there is no gap between the bottom surface of the recess of the support member 111 and the wall member, it is necessary to fill the sealing material in either the long side or the short side of the element substrate, which increases the number of steps. On the other hand, when there is a gap S between the bottom surface of the concave portion of the support member 111 and the wall member 120 as in this embodiment, for example, even if the sealing material 110 is filled from the long side of the substrate 117, the gap It is possible to fill the short side through S.

本実施形態の壁部材120の厚さTは基板117の半分であり、壁部材120の上面は素子基板の上面と一致するように配置されている。壁部材120の基板117の長辺に沿った方向の幅(長さ)は1.0mm、壁部材120と基板117との間隔は0.13mmであり、第1実施形態と同じである。   In this embodiment, the thickness T of the wall member 120 is half that of the substrate 117, and the upper surface of the wall member 120 is disposed so as to coincide with the upper surface of the element substrate. The width (length) of the wall member 120 in the direction along the long side of the substrate 117 is 1.0 mm, and the distance between the wall member 120 and the substrate 117 is 0.13 mm, which is the same as in the first embodiment.

壁部材120の位置を変更したいくつかの液体吐出ヘッドを作成し、第1実施形態と同様の評価を行った。図9は、この結果を示しており、封止材の収縮に起因した素子基板の割れの起点となり得る供給口105の端118に作用する最大主応力を壁部材120の中心の位置との関係で示す図である。壁部材120の位置が供給口端部近傍で、最大主応力は極小値をとる。壁部材120の中心の位置について、供給口105の端118の位置を基準0としたとき、−0.5mm〜2.0mmの範囲が、壁部材120が無い液体吐出ヘッドに対して最大主応力が約7割となり、この主応力によるチップ割れを有効に抑制することができる。   Several liquid discharge heads in which the position of the wall member 120 was changed were created, and the same evaluation as in the first embodiment was performed. FIG. 9 shows this result, and the relationship between the maximum principal stress acting on the end 118 of the supply port 105 that can be a starting point of cracking of the element substrate due to shrinkage of the sealing material and the position of the center of the wall member 120. It is a figure shown by. The position of the wall member 120 is near the end of the supply port, and the maximum principal stress takes a minimum value. With respect to the center position of the wall member 120, when the position of the end 118 of the supply port 105 is set to the reference 0, the range of −0.5 mm to 2.0 mm is the maximum principal stress with respect to the liquid ejection head without the wall member 120. Is about 70%, and chip cracking due to this main stress can be effectively suppressed.

図10(a)〜(c)は、上述した本発明の一実施形態に係る壁部材による素子基板の割れ抑制の作用、効果を説明する図である。図10(a)に示すように、壁部材が無い素子基板101では、そのXb−Xb線断面図である図10(b)に示すように、断面において、封止材110は支持部材111と3面が接続されているのに対し、Eで示す面はどの部材とも接していない。この場合、温度変化によって封止材110の収縮が起きると、基板117には、図10(c)で示す方向の回転の力が作用する。ここで、基板単体に対して、その長辺側の外方向の引張り力を作用させた場合の割れに対する耐性が低いことが分かっている。このため、上記回転の力によって、供給口105の端を基点として割れが発生し易くなる。これに対し、上述した本発明の第1および第2実施形態によれば、壁部材(119、120)が存在することによって、その壁部材が基板117の上記回転する量を制限することができる。その結果、基板の割れを抑制することができる。これは第2実施形態のように、壁部材と支持部材凹部との間に隙間Sがある場合でも同様である。加えて、上述したように、供給口105の端118の近傍に壁部材が存在することによって、その箇所には封止部材が存在しない。これにより、その場所では上記回転が生じず、供給口105の端118の近傍での基板117の上記回転を抑制することができる。   FIGS. 10A to 10C are diagrams for explaining the action and effect of suppressing cracking of the element substrate by the wall member according to the embodiment of the present invention described above. As shown in FIG. 10A, in the element substrate 101 having no wall member, as shown in FIG. While the three surfaces are connected, the surface indicated by E is not in contact with any member. In this case, when the sealing material 110 contracts due to a temperature change, a rotational force in the direction shown in FIG. 10C acts on the substrate 117. Here, it has been found that the resistance to cracking is low when an outward tensile force on the long side is applied to a single substrate. For this reason, it becomes easy to generate | occur | produce a crack on the basis of the end of the supply port 105 with the said rotational force. On the other hand, according to the first and second embodiments of the present invention described above, the presence of the wall members (119, 120) can limit the amount of rotation of the substrate 117 by the wall members. . As a result, the substrate can be prevented from cracking. This is the same even when there is a gap S between the wall member and the support member recess as in the second embodiment. In addition, as described above, since the wall member exists in the vicinity of the end 118 of the supply port 105, there is no sealing member there. Thereby, the rotation does not occur at the place, and the rotation of the substrate 117 in the vicinity of the end 118 of the supply port 105 can be suppressed.

100 液体吐出ヘッド
101 素子基板
104 吐出口
105 インク供給口
107 接続端子
109 インナーリード
110 封止材
111 支持部材
116 ノズルプレート
117 基板
118 供給口の端
119、120 壁部材
DESCRIPTION OF SYMBOLS 100 Liquid discharge head 101 Element board | substrate 104 Discharge port 105 Ink supply port 107 Connection terminal 109 Inner lead 110 Sealing material 111 Support member 116 Nozzle plate 117 Substrate 118 End of supply port 119, 120 Wall member

Claims (8)

吐出口から液体を吐出するためのエネルギー発生素子と、吐出するための液体を前記吐出口に連通する流路に供給するための供給口であって、一方向に延在する開口を有した供給口と、が設けられ、前記供給口の延在方向に沿った長辺と前記長辺に交差する短辺とを有した基板と、前記基板を支持する凹部が形成された支持部材と、前記基板の前記短辺に沿って設けられた電気接続部と、前記電気接続部を被覆する封止材と、を有する液体吐出ヘッドであって、
前記基板の長辺側の、前記支持部材の前記凹部における、前記電気接続部より前記基板の中央側に対応する位置に壁部材が配置されており、前記支持部材の凹部における、前記基板の前記長辺側の側部および前記短辺側の側部に前記封止材が配されていることを特徴とする液体吐出ヘッド。
An energy generating element for discharging liquid from the discharge port, and a supply port for supplying the discharge liquid to the flow path communicating with the discharge port, the supply having an opening extending in one direction A substrate having a long side along the extending direction of the supply port and a short side intersecting the long side, a support member having a recess for supporting the substrate, A liquid discharge head having an electrical connection portion provided along the short side of the substrate, and a sealing material covering the electrical connection portion,
A wall member is disposed at a position corresponding to a center side of the substrate from the electrical connection portion in the concave portion of the support member on the long side of the substrate, and the substrate of the substrate in the concave portion of the support member A liquid discharge head, wherein the sealing material is disposed on a side portion on a long side and a side portion on a short side.
前記壁部材の上面の位置が、前記基板の上面位置以下であることを特徴とする請求項1に記載の液体吐出ヘッド。   The liquid discharge head according to claim 1, wherein the position of the upper surface of the wall member is equal to or lower than the position of the upper surface of the substrate. 前記壁部材と前記基板との間隔が0.4mm以下であることを特徴とする請求項1に記載の液体吐出ヘッド。   The liquid discharge head according to claim 1, wherein a distance between the wall member and the substrate is 0.4 mm or less. 前記壁部材と前記基板との前記間隔の溝に封止材が配されていることを特徴とする請求項3に記載の液体吐出ヘッド。   The liquid discharge head according to claim 3, wherein a sealing material is disposed in the groove having the gap between the wall member and the substrate. 前記壁部材は、前記基板の前記供給口の延在方向の端を距離の基準0とし、前記基板の中央側を+としたとき、−0.5mm〜+2.0mmの範囲の位置に前記壁部材の前記延在方向の中心が位置するよう配置されていることを特徴とする請求項1ないし4のいずれか1項に記載の液体吐出ヘッド。   The wall member has the wall at a position in a range of −0.5 mm to +2.0 mm, where an end in the extending direction of the supply port of the substrate is a distance reference 0 and a center side of the substrate is +. 5. The liquid ejection head according to claim 1, wherein the member is disposed so that a center of the extending direction of the member is located. 前記壁部材の前記延在方向の幅が1.5mm以下であることを特徴とする請求項1ないし5のいずれか1項に記載の液体吐出ヘッド。   The liquid ejection head according to claim 1, wherein a width of the wall member in the extending direction is 1.5 mm or less. 前記壁部材と前記支持部材の前記凹部の底面との間に隙間が設けられ、前記隙間に前記封止材が配されていることを特徴とする請求項1ないし6のいずれか1項に記載の液体吐出ヘッド。   The clearance gap is provided between the said wall member and the bottom face of the said recessed part of the said supporting member, The said sealing material is distribute | arranged to the said clearance gap, The any one of Claim 1 thru | or 6 characterized by the above-mentioned. Liquid discharge head. 請求項1ないし7のいずれか1項に記載の液体吐出ヘッドを備えたことを特徴とする液体吐出装置。   A liquid discharge apparatus comprising the liquid discharge head according to claim 1.
JP2017009311A 2017-01-23 2017-01-23 Liquid discharge head and liquid discharge device Pending JP2018118386A (en)

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