JP2018118187A - Decontamination liquid supply device - Google Patents

Abstract

SOLUTION: A decontamination liquid supply device 12 comprises a tank 31 for storing a decontamination liquid W and a decontamination liquid supply passage 33 for supplying the decontamination liquid W to each decontamination gas generator 11. The decontamination liquid supply passage 33 comprises a main supply passage 40 and plural branch passages 41-45 branched therefrom. When a pump P2 of the branch passage 41 is driven in a state in which the inside of the main supply passage 40 is filled with the decontamination liquid W, and a three-way switching valve V of the branch passage 41 is at a first position, the decontamination liquid W is supplied to the decontamination gas generator 11 of the first supply unit U1 through the main supply passage 40 and the branch passage 41. Similarly, the decontamination liquid W is supplied to the decontamination gas generators 11 of second supply unit U2 to fifth supply unit U5 through the branch passages 42-45.EFFECT: It is possible to supply a decontamination liquid W to plural decontamination gas generators 11 from a single tank 32 through a decontamination liquid supply passage 33.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a decontamination liquid supply apparatus, and more particularly to a decontamination liquid supply apparatus suitable for supplying a decontamination liquid to, for example, a plurality of decontamination gas generators included in an isolator system.

Conventionally, an isolator system including a decontamination gas generation device and a decontamination liquid supply device that supplies a decontamination liquid to the decontamination gas generation device is known (for example, Patent Document 1). In the apparatus of this patent document 1, decontamination gas (hydrogen peroxide gas) is generated by a single evaporator 63 as a decontamination gas generator, and the decontamination gas passes through a gas supply passage 64 made of piping. And supply to a plurality of work rooms.
Conventionally, the decontamination liquid supply device disclosed in Patent Document 2 is used to supply the decontamination liquid (hydrogen peroxide solution) to the single evaporator 63.

Japanese Patent Laying-Open No. 2015-139492 Japanese Patent No. 553312 JP 2014-155593 A

By the way, when supplying decontamination gas to several working chambers via piping using a single evaporator like patent document 1, there existed the following problems. That is, firstly, a heater for heating the piping is necessary so as not to condense the vapor of the decontamination gas in the piping from the evaporator to each working chamber, and the cost of the apparatus increases with an increase in the length of the piping. . Secondly, since it is necessary to aerate the piping from the evaporator to each work chamber, the work chamber cannot be individually decontaminated and aerated. More specifically, the decontamination gas supply pipe cannot be used while supplying a decontamination gas to only one of the work chambers and aeration is performed. There is a problem that gas cannot be supplied. Third, in the case of a single evaporator, the flow rate of the decontamination gas corresponding to the volume of each work chamber is controlled by a mechanical element such as a throttle valve. It becomes very difficult to set the flow rate of dye gas.
As a method for solving such a problem, it is conceivable to provide a decontamination gas generator in each working chamber. For example, Patent Document 3 discloses such a device. However, patent document 3 only discloses supplying decontamination liquid to each evaporator 41-45 by each pump 21a-25a, and a detailed structure is not suggested.
Moreover, although the structure which provides the decontamination liquid supply apparatus of the said patent document 2 in each decontamination gas generator is also considered, the decontamination liquid supply apparatus of the number according to each decontamination gas generator is required in that case Therefore, there arises a problem that the device cost increases.
Further, the following problem is pointed out in the apparatus of Patent Document 2. First, when the decontamination liquid supply passage 5 (pipe) is lengthened, air venting (filling the passage 5 from the empty state to the tip) and air replacement (air is introduced to empty the passage 5) There is a problem that it takes a very long time to complete. Second, there is a problem that even if there is a leak in the passage 5, it cannot be detected.

In view of the circumstances described above, the present invention provides a storage container for storing a decontamination liquid, a decontamination liquid supply passage for supplying the decontamination liquid in the storage container to a downstream device, and a decontamination liquid supply path. In a decontamination liquid supply apparatus provided with a liquid feeding means that is provided and sends a decontamination liquid in a storage container toward a downstream device,
The decontamination liquid supply path includes a main supply path connected to the storage container, and a plurality of branch paths for branching from the main supply path and supplying decontamination liquid to downstream equipment,
The main supply passage is provided with a liquid supply means for supplying a decontamination liquid from the storage container to the main supply passage,
The liquid feeding means is provided in each of the branch passages.

  According to such a configuration, the decontamination liquid stored in the storage container can be supplied to the plurality of downstream devices via the decontamination liquid supply passage.

1 is a schematic front view showing a first embodiment of the present invention. The front view which shows the structure of the principal part of FIG. The front view which shows the structure of the principal part of FIG. The front view which shows 2nd Example of this invention. The front view which shows 3rd Example of this invention. The front view which shows 4th Example of this invention.

Hereinafter, the present invention will be described with reference to the first embodiment shown in FIG. 1. In FIG. 1, an isolator system 1 for culturing cells includes an isolator 2 whose interior is maintained in a sterile state, and a wall surface on the inlet side of the isolator 2 An incubator connected to the first operation chamber 3, the second operation chamber 4 and the wall surface 2B on the outlet side of the isolator 2 via the connection chamber 5 which are sequentially connected outward from 2A and maintained in a sterile state. 6 is provided.
The doors D1 to D3 can be opened and closed on the wall surface 2A that partitions the isolator 2 and the second operation chamber 4, the wall surface 4A that partitions both operation chambers 3 and 4, and the wall surface 3A on the outer side of the first operation chamber 3. Is provided. Opening / closing doors D4 and D5 are also provided on the wall surface 2B that partitions the isolator 2 and the connection chamber 5 and the wall surface 6A that partitions the connection chamber 5 and the incubator 6 so as to be openable and closable.
In the closed state of these open / close doors D1 to D5, the interiors of the isolator 2, the operation chambers 3 and 4, the connection chamber 5 and the incubator 6 are kept airtight and isolated from the external environment.
A work glove (not shown) is provided in the isolator 2 and the operation chambers 3 and 4 as an aseptic work chamber. When necessary, the isolator 2 and both operation chambers 3 are inserted after the operator inserts a hand into the work glove from the outside. , 4 to carry in and out the article O (a container or equipment containing cells, etc.) and to perform necessary work.

  The isolator system 1 includes a first supply unit U1 to a fifth supply unit U5 for supplying the decontamination gas G to the inside of the isolator 2, the operation chambers 3 and 4, and the connection chamber 5, and the supply units U1 to U1. A decontamination liquid supply device 12 that supplies the decontamination liquid W to the decontamination gas generator 11 of U5, and first exhaust means 13 to exhaust the gas inside the connection chamber 5, the isolator 2, and the operation chambers 3 and 4. First air supply means 17A to 5th air supply for supplying sterilized outside air to the connection chamber 5, the isolator 2, and the two operation chambers 3 and 4 through the fourth exhaust means 16 and the supply units U1 to U5. Means 17E and a control device 10 for controlling the operation of these components are provided.

The first supply unit U1 and the second supply unit U2 are provided on the top surface of the isolator 2, and the first supply unit 17A is connected to the first supply unit 17A and the second supply unit U2 is supplied with the second supply air. Means 17B is connected. The third supply unit U3 is provided on the top surface of the second operation chamber 4, and a third air supply means 17C is connected to the third supply unit U3. The fourth supply unit U4 is provided on the top surface of the first operation chamber 3, and the fourth supply unit 17D is connected to the fourth supply unit 17D. Further, the fifth supply unit U5 is provided on the top surface of the connection chamber 5, and the fifth supply unit 17E is connected to the fifth supply unit U5.
The first supply unit U1 includes a casing 21 that covers the top surface of the isolator 2, a decontamination gas generator 11 that generates the decontamination gas G in the casing 21, and a decontamination gas G generated in the casing 21. Three fans 22 for supplying air into the isolator 2 and a HEPA filter F1 attached to the top surface of the isolator 2 and allowing the decontamination gas G to pass into the isolator 2 are provided.
As shown in FIG. 3, the decontamination gas generator 11 includes a heater 23 supported at a predetermined height and a heater plate 24 placed on the upper surface thereof. The heater 23 and the heater plate 24 function as an evaporator. When the decontamination gas G is generated, the heater 23 and the heater plate 24 are heated to a predetermined temperature in advance. When the decontamination liquid W (hydrogen peroxide solution) is dropped and supplied onto the heater plate 24 from the branch pipe 41 of the decontamination liquid supply device 12 described in detail later, the decontamination liquid W is supplied by the heater plate 24. The decontamination gas G (hydrogen peroxide gas) is generated by being heated and evaporated.
The second supply unit U2 is configured in the same manner as the first supply unit U1 described above, and both the supply units U1 and U2 are disposed on the top surface of the isolator 2 as described above.
In the state where the decontamination gas G is generated by the decontamination gas generators 11 of the first supply unit U1 and the second supply unit U2, the fans 22 of the supply units U1 and U2 are operated in synchronization. The decontamination gas G generated in the casing 21 of each of the supply units U1 and U2 passes through the HEPA filter F1 and is supplied into the isolator 2.

Next, the third supply unit U3, the fourth supply unit U4, and the fifth supply unit U5 are configured in the same manner as the first supply unit U1 except that only one fan 22 is disposed.
When the decontamination gas G is generated by the decontamination gas generator 11 of the third supply unit U3, when the fan 22 of the third supply unit U3 is operated, the inside of the casing 21 of the third supply unit U3 The decontamination gas G generated in step S1 is supplied to the second operation chamber 4 through the HEPA filter F1.
Similarly, when the decontamination gas G is generated by the decontamination gas generator 11 of the fourth supply unit U4, when the fan 22 of the fourth supply unit U4 is operated, the fourth supply unit U4 A decontamination gas G generated in the casing 21 is supplied to the first operation chamber 4 through the HEPA filter F1. Further, similarly, the decontamination gas G generated by the decontamination gas generator 11 of the fifth supply unit U5 is supplied to the connection chamber 5.
In the present embodiment, the first supply unit U1 to the fifth supply unit U5 are decontamination gas supply devices for supplying the decontamination gas G to the isolator 2 and the operation chambers 3 and 4. And by supplying the decontamination gas G into the isolator 2, the operation chambers 3, 4 and the connection chamber 5 by the decontamination gas supply device, the inside of the isolator 2 and the like is decontaminated. Yes.

A first air supply means 17A to a fifth air supply means 17E are connected to the casing 21 of each of the supply units U1 to U5. These air supply means 17A to 17E are opened and closed by the control device 10 in the figure. It has a normally closed on-off valve.
When the control device 10 individually opens the open / close valves of the air supply means 17A to 17E and operates the fans 22 in the adjacent positions when necessary, outside air is taken into the casings 21 and the HEPA filter F1. Thus, after the outside air is sterilized, the air is supplied into the isolator 2 and the chambers 3 to 5.
In this embodiment, at the start of the culturing operation, the interior of the isolator 2, the chambers 3 to 5, and the incubator 6 are decontaminated with the decontamination gas G, and then the gas inside them is exhausted by the exhaust means 13-16. I try to exhaust. At that time, sterilized outside air is supplied into the isolator 2, the chambers 3 to 5, and the incubator 6 by the air supply means 17 </ b> A to 17 </ b> E. The exhaust means 13-16 and the air supply means 17A-17E constitute an aeration means for aerating the isolator 2, the chambers 3-5, and the incubator 6.

Next, the first exhaust means 13 to the fourth exhaust means 16 for discharging the gas including the decontamination gas G remaining in the isolator 2, the chambers 3 to 5, and the incubator 6 will be described.
The first exhaust means 13 includes an exhaust pipe 27 connected to the connection chamber 5 and communicated with the outside air, an on-off valve 28 with a flow rate adjusting function, a catalyst 29, and a blower 30 that are sequentially provided in the middle of the exhaust pipe 27. And. A HEPA filter F <b> 1 is attached to a connection portion of the exhaust pipe 27 with respect to the connection chamber 5. The catalyst 29 has a function of capturing and decomposing the hydrogen peroxide component of the decontamination gas G.
After the inside of the connection chamber 5 is decontaminated by the decontamination gas G, when the on-off valve 28 is opened and the blower 30 is operated, the gas in the connection chamber 5 is provided with the HEPA filter F1, the exhaust pipe 27, and the exhaust pipe 27. The gas is discharged to the outside through the on-off valve 28, the catalyst 29, and the blower 30. At this time, since the fifth air supply means 17E is operated, the sterilized outside air is supplied into the connection chamber 5 through the casing 21 of the fifth supply unit U5. That is, aeration of the connection chamber 5 is performed.

The 2nd exhaust means 14-the 4th exhaust means 16 are comprised similarly to the 1st exhaust means 13 mentioned above, and attach | subject the same member number to each member corresponding to the 1st exhaust means 13. FIG.
After the inside of the isolator 2 and the chambers 3 and 4 is decontaminated with the decontamination gas G at the start of the culture operation, the on-off valve 28 of the second exhaust means 14 to the fourth exhaust means 16 is opened and the blower 30 is operated. It has become so. In that case, each air supply means 17A-17D is also operated. Therefore, the gas in the isolator 2 is discharged to the outside through the second exhaust unit 14, and the outside air sterilized by the first air supply unit 17A and the second air supply unit 17B is supplied into the isolator 2. The At the same time, the gas in the chambers 3 and 4 is exhausted through the exhaust means 15 and 16, and the third and fourth air supply means 17C and 17D are provided in the chambers 3 and 4, respectively. Thus, sterilized outside air is supplied. Thereby, aeration in the isolator 2 and each chamber 3 and 4 is performed.

Cell culture by the isolator system 1 is performed in the following steps.
That is, in a state where the opening / closing door D3 is closed and the opening / closing doors D1, D2, D4, and D5 are opened, the decontamination gas G is supplied from the supply units U1 to U5, and the isolator 2, the chambers 3 to 5 and The inside of the incubator 6 is decontaminated. Thereafter, the exhaust means 13 to 16 and the air supply means 17A to 17E are operated in synchronism, whereby aeration in the isolator 2, the chambers 3 to 5, and the incubator 6 is performed.
Next, the opening / closing door D2 is closed and the opening / closing door D3 is opened / closed, and an article O such as a container containing cells is carried into the first operation chamber 3. Then, since the decontamination gas G is supplied from the fourth supply unit U4 to the first operation chamber 3, the first operation chamber 3 and the article O are decontaminated with the decontamination gas G. Thereafter, since the fourth exhaust means 16 and the fourth air supply means 17D are operated, the gas containing the decontamination gas G in the first operation chamber 3 is discharged to the outside and the sterilized outside air is the first. 1 is supplied into the operation chamber 3. Thereby, aeration in the first operation chamber 3 is performed.
Next, the opening / closing door D <b> 1 is closed and the opening / closing door D <b> 2 is opened / closed, and the article O is carried into the second operation chamber 4 from the first operation chamber 3. Thereafter, since the third exhaust means 15 is activated and the third air supply means 17C is activated, the sterilized outside air is supplied into the second operation chamber 4. That is, here, aeration in the second operation chamber 4 is performed without decontamination.
Next, the opening and closing doors D4 and D5 are closed and the opening and closing door D1 is opened and closed, and the article O is carried into the isolator 2 from the second operation chamber 4. After that, required processing is performed on the article O in the isolator 2.
Thereafter, the opening / closing doors D4 and D5 of the connection chamber 5 are opened and closed, and the article O (a container containing cells) is carried into the incubator 6 from the isolator 2. Thereafter, the open / close doors D4 and D5 are closed, the incubator 6 is detached from the connection chamber 5, and the next new incubator 6 is connected to the connection chamber 5. In this way, the articles O are sequentially carried into the incubators 6 through the connection chambers 5 and the cells are cultured in each incubator 6.

Therefore, in this embodiment, the decontamination liquid W is supplied from the single tank 31 of the decontamination liquid supply apparatus 12 to the decontamination gas generation apparatus 11 of each of the supply units U1 to U5 on the assumption of the above-described configuration. It is a feature to have done.
That is, as shown in FIG. 2, the decontamination liquid supply device 12 measures the weight of the tank 31 that stores the decontamination liquid W (hydrogen peroxide solution) and the tank 31 that stores the decontamination liquid W. A weigh scale 32 and a decontamination liquid supply passage 33 for supplying the decontamination liquid W to the decontamination gas generator 11 of each of the supply units U1 to U5 are provided.
A required amount of decontamination liquid W is stored in a tank 31 as a storage means. The weight of the tank 31 including the decontamination liquid W is measured by the weigh scale 32, and the weight measured by the weigh scale 32 is constantly transmitted to the control device 10. The control device 10 can recognize the amount of the decontamination liquid W stored in the tank 31 based on the weight transmitted from the weigh scale 32.

The decontamination liquid supply passage 33 is sequentially branched from the main supply passage 40 for sending the decontamination liquid W toward the decontamination gas generator 11 of each of the supply units U1 to U5, and each of the above-described respective branches. It is comprised from the five branch passages 41-45 connected to the decontamination gas generator 11 of supply unit U1-U5.
The main supply passage 40 is disposed from the tank 31 to the adjacent position of the decontamination gas generator 11 of each of the supply units U1 to U5. One end 40 </ b> A of the main supply passage 40 is immersed in the decontamination liquid W in the tank 31, while the other end 40 </ b> B of the main supply passage 40 is inserted into the tank 31 to remove the decontamination liquid W. It is located in the space above the surface. The other end 40B of the main supply passage 40 may be immersed in the decontamination liquid W.
A pump P1 including a roller pump (peristaltic pump) is provided at a position near the other end 40B in the main supply passage 40, and the operation of the pump P1 is controlled by the control device 10. The installation location of the pump P1 in the main supply passage 40 is composed of a soft resin tube. When the pump P1 is driven, the decontamination liquid W is sucked from one end 40A of the main supply passage 40 and flows through the place where the branch passages 41 to 44 are connected to be sent toward the other end 40B. It has become. That is, the decontamination liquid W in the tank 31 is sucked from the one end 40A of the main supply passage 40, flows through the connection points with the branch passages 41 to 45, and is returned to the tank 31 from the other end 40B. Yes.

An outside air passage 34 is connected to a position near the one end 40A in the main supply passage 40, and a switching valve 35 comprising a two-way switching valve is provided in the outside air passage 34. A filter F <b> 2 for removing dust is provided at a required position of the outside air passage 34. When the switching valve 35 is opened when the tank 31 is replaced, the outside air can be introduced into the main supply passage 34 via the outside air passage 34. In this case, one end 40A of the main supply passage 40 and the outside air passage 34 are introduced. The decontamination liquid W accumulated in the section is returned to the tank 31.
The branch passages 41 to 45 are provided at positions upstream of the pump P1 in the main supply passage 40 and close to the decontamination gas generator 11 of the supply units U1 to U5.
In the branch passage 41 for the first supply unit U1, a three-way switching valve V as a gas supply means is provided at a position near the connection portion 41A with the main supply passage 40, and between it and the tip 41B of the branch passage 41 Is provided with a pump P2. The installation location of the pump P2 in the branch passage 41 is made of a soft resin tube. The operation of the three-way switching valve V and the pump P2 is controlled by the control device 10. As shown in FIG. 2, most regions of the respective branch passages 41 to 45 are accommodated in the casings 21 of the corresponding supply units U1 to U5.
The three-way switching valve V opens the branch passage 41 to allow communication between the main supply passage 40 and the decontamination gas generator 11 and communication between the main supply passage 40 and the decontamination gas generator 11. It is possible to switch to the second position where the air is blocked and introduced into the branch passage 41. Normally, the three-way switching valve V is in the second position for introducing the atmosphere into the branch passage 41 and closes the branch passage 41. In addition, you may exist in the 1st position which open | releases the branch channel | path 41. In this case, the branch channel | path 41 is closed by being crushed by the roller of the pump P2 which consists of a roller pump (peristaltic pump). A filter F3 for removing dust is provided at the outside air intake port of the three-way switching valve V.
When the pump P2 is driven with the three-way switching valve V in the first position, the decontamination liquid W in the tank 31 flows through the main supply passage 40 and the branch passage 41 and then decontaminates the first supply unit U1. The gas generator 11 is supplied.
As shown in FIG. 3, the tip 41B of the branch passage 41 is supported above the heater plate 24 provided in the decontamination gas generator 11 of the first supply unit U1, and the removal that has been fed by the pump P2. The dye liquid W is dropped from the tip 41B onto the heater plate 24 and evaporated to generate a decontamination gas G.

The remaining branch passages 42 to 45 for the second supply unit U2 to the fifth unit U5 and the configurations of the three-way switching valve V and the pump P2 are provided in the branch passage 41 for the first supply unit U1 and the branch passages 41 and 45. The configuration is the same as the three-way switching valve V and the pump P2.
The main supply passage 40 and the branch passages 41 to 45 are composed of conduits, and the pump P1 disposed in the main supply passage 40 has a higher liquid feeding capacity than the pump P2 disposed in the branch passages 41 to 45. . Also, roller pumps (peristaltic pumps) are used as the pumps P1 and P2. Moreover, the length of each branch channel | path 41-45 is each set to about 100 mm.
As described above, the decontamination liquid supply passage 33 of the decontamination liquid supply device 12 is configured to supply the decontamination liquid W toward the decontamination gas generator 11 of each of the supply units U1 to U5, Then, five branch passages 41 to 45 branched and connected to the respective decontamination gas generators 11 are provided so that the decontamination liquid W can be supplied from the single tank 31 to each of the supply units U1 to U5. It has become.

The decontamination liquid supply apparatus 12 configured as described above supplies the decontamination liquid W to the decontamination gas generation apparatus 11 of each of the supply units U1 to U5 as follows.
First, the main supply passage 40 is vented and the weight of the weigh scale is reset (calibration). Specifically, first, by driving the pump P1, the decontamination liquid W in the tank 31 is sucked into the main supply passage 40 from the one end 40A and then flows through the inside, and then returned to the tank 31 from the other end 40B. It is. Thus, when the air is removed from the main supply passage 40 and the interior is filled with the decontamination liquid W, the pump P1 is stopped. In this state, since the weight is transmitted from the weight scale 32 to the control device 10, the control device 10 calibrates and sets the weight 0 of the weight scale 32.
Next, for example, a case where 100 g of the decontamination liquid W is supplied to the decontamination gas generator 11 of the first supply unit U1 will be described.
In this case, the pump P2 of the branch passages 42 to 45 is stopped, the three-way switching valve V of the branch passage 41 is in the first position, and each three-way switching valve V of the branch passages 42 to 25 is in the second position. In a certain state, when the pump P2 of the branch passage 41 is driven and the measured weight of the weigh scale 32 decreases by 100 g, the pump P2 is stopped. However, in the first time, since the internal space of the branch passage 41 is empty from the connection portion 41A to the tip 41B and air is contained, the weight of the section from the connection portion 41A of the branch passage 41 to the three-way switching valve V is included. Thus, the pump P2 is driven so that the decontamination liquid W is reduced by a large amount. On the other hand, in the second and subsequent times, the internal space from the connecting portion 41A to the tip 41B is evacuated and filled with the decontamination liquid W. Therefore, when supplying 100 g of the decontamination liquid W, the weighing scale 32 The pump P2 is driven so that the measured weight is reduced by 100 g.
By driving the pump P2 in this way, after the decontamination liquid W in the tank 31 is sucked through the branch passage 41 and the main supply passage 40, the first supply unit U1 is removed from the tip 41B of the branch passage 41. It is dropped and supplied to the dyeing gas generator 11 (see FIG. 3).
Then, since the three-way switching valve V of the branch passage 41 is switched from the first position to the second position after the pump P2 is stopped, outside air is introduced into the branch passage 41 from the three-way switching valve V. Thereby, the decontamination liquid W remaining in the section from the position of the three-way switching valve V to the tip 41B is discharged and supplied from the tip 41B to the decontamination gas generator 11. At this time, the decontamination liquid W remains in the branch passage 41 between the connection portion 41A and the three-way switching valve V. As described above, in the first time, only the weight of this section is obtained. Since the pump P2 is driven so that the decontamination liquid W is largely reduced, a total of 100 g of the decontamination liquid W is supplied to the decontamination gas generator 11 of the first supply unit U1 via the branch passage 41 as a whole. It will be supplied.

As described above, 100 g of the decontamination liquid W is supplied to the decontamination gas generator 11 of the first supply unit U1 via the branch passage 41.
Thereafter, when supplying the decontamination liquid W to the decontamination gas generator 11 of the second supply unit U2, the three-way switching valve V of the branch passage 41 remains in the second position, and each branch passage 41 , 43 to 45 in a state where the three-way switching valve V is in the second position, the three-way switching valve V of the branch passage 42 is switched from the second position to the first position, and the pump P2 of the branch passage 42 is driven. When the measured weight of the weigh scale 32 decreases by 100 g, the pump P2 is stopped. The process at this time is the same as the case where the decontamination liquid W is supplied to the decontamination gas generator 11 of the first supply unit U1 via the branch passage 41 described above. Then, since the three-way switching valve V of the branch passage 42 is switched from the first position to the second position, outside air is introduced into the branch passage 42 from the three-way switching valve V. As a result, the decontamination liquid W remaining in the section from the position of the three-way switching valve V to the tip 42B is discharged and supplied from the tip 42A to the decontamination gas generator 11 of the second supply unit U2. Then, thereafter, in the same manner as the supply process of the decontamination liquid W to the decontamination gas generator 11 of the first supply unit U1 and the second supply unit U2, the remaining branch passages 43 to 45 are used. 100 g of decontamination liquid W is sequentially supplied to the decontamination gas generator 11 of each of the supply units U3 to U5.

As described above, in the decontamination liquid supply device 12 of the present embodiment, the decontamination liquid W in the single tank 31 is transferred to the decontamination gas generator 11 of each of the supply units U1 to U5. Can be supplied through.
The length of each of the branch passages 41 to 45 of the decontamination liquid supply passage 33 is set to about 100 mm, and the decontamination liquid supply passage is longer than a conventional product having a length of several meters. The length of 33 can be greatly shortened. Therefore, it is possible to quickly perform the air removal and air replacement operations in the decontamination liquid supply passage 33 including the main supply passage 40 and the branch passages 41 to 45.
Further, in the decontamination liquid supply device 12 of this embodiment, it is possible to easily detect a leak in the decontamination liquid supply passage 33 and a failure of the pump P2. That is, when the pump P2 of each branch passage 41-45 is driven and the decontamination liquid W is sequentially supplied to the decontamination gas generator 11 of each supply unit U1-U5, the pump P2 is driven. However, if the measured weight of the weigh scale 32 does not change, there is a leak in the decontamination solution supply passage 33 (main supply passage 40, branch passages 41 to 45), or failure of the pumps P1 and P2. The occurrence of such troubles can be accurately detected by the control device 10.
Moreover, it is also possible to detect a leak in the decontamination liquid supply passage 33 as follows. That is, when the air is released from the main supply passage 40 by the pump P1, the decontamination liquid W is circulated from the one end 40A to the other end 40B by the pump P1, and the measured weight of the weigh scale 32 in this state is controlled. 10 may be monitored. In this case, when the weight measured by the weigh scale 32 decreases, it can be determined that there is a leak in the main supply passage 40.

Next, FIG. 4 shows a second embodiment of the decontamination liquid supply apparatus 12, and this second embodiment has the same configuration as the decontamination liquid supply apparatus 12 of the first embodiment, and each configuration. Only the operation of the element is changed.
When 100 g of the decontamination liquid W is supplied to the first supply unit U1 by the decontamination liquid supply device 12 of the second embodiment, the following processing is performed.
That is, first, the pump P1 is operated to fill the main supply passage 40 with the decontamination liquid W, and the weighing scale 32 is calibrated. During this time, the three-way switching valve V of each of the branch passages 41 to 45 is located at the second position as in the first embodiment.
Next, the three-way switching valve V of the branch passage 41 is switched to the first position, and the pump P2 of the branch passage 41 is operated until the measured weight of the weigh scale 32 decreases by 100 g. At that time, unlike the first embodiment, the pump is operated so that the measured weight of the weigh scale 32 is reduced by the target weight (100 g) each time without performing the operation that decreases more than 100 g only for the first time. Drive P2.
When the measured weight of the weigh scale 32 is reduced by 100 g, the pump P2 is operated with the three-way switching valve V of the branch passage 41 being switched to the second position, air is introduced from the filter F3, and the branch is made from the three-way switching valve V. The decontamination liquid W remaining in the section up to the tip 41B of the passage 41 is dropped onto the decontamination gas generator 11 of the first supply unit U1.
Simultaneously with the introduction of the atmosphere, when the measured weight of the weigh scale 32 is reduced by 100 g, the pump P1 is operated while the switching valve 35 of the outside air passage 34 is opened, and the main air is passed through the filter F2 and the outside air passage 34. The supply passage 40 is replaced with the atmosphere. At this time, the operation speed of the pump P1 can be made larger than the operation speed of the pump P2 dropped on the decontamination gas generator 11 of the first supply unit U1. For this reason, the main supply passage in the atmosphere introduced from the outside air passage 34 until the decontamination liquid W remaining in the section from the three-way switching valve V of the branch passage 41 to the tip 41B is completely dropped onto the decontamination gas generator 11. Within 40 can be replaced.
Next, by operating the pump P2 in a state where the three-way switching valve V of the branch passage 41 is switched to the first position, the decontamination gas W remaining in the section from the connection portion 41A to the three-way switching valve V is removed from the decontamination gas. The entire amount of decontamination liquid W is supplied to the decontamination gas generator 11. During this time, since the switching valve 35 of the outside air passage 34 is kept open, the atmosphere is introduced from the connecting portion 41A to the branch passage 41 via the outside air passage 34 and the main supply passage 40 with the operation of the pump P2. The
In addition, while introducing the outside air into the main supply passage 40 through the outside air passage 4, the decontamination liquid W remaining from the connecting portion 41A to the three-way switching valve V remains in the section, and during that time, the above-described portion When the atmosphere is introduced into the branch passage 41 via the filter 3, the decontamination liquid W in the section from the three-way switching valve V to the tip 41B is discharged from the branch passage 41 at any time. An interval that does not occur will occur. However, as described above, in the second embodiment, in the first supply of the decontamination liquid W as in the first embodiment, in addition to the target weight value, the three-way switching valve V to the connection portion 41A. There is no need to operate as many pumps P2 as the weight of the residual decontamination liquid W is added. In the same manner as the supply operation of the decontamination liquid W to the supply unit U1 described above, the decontamination liquid W is sequentially supplied to the supply units U2 to U5.
According to the second embodiment, not only operations and effects similar to those of the first embodiment can be obtained, but also only the weight detected by the weigh scale 32 can be reliably supplied. Dyeing work is possible.

Next, FIG. 5 shows a third embodiment of the decontamination liquid supply device 12, and this third embodiment shows the branch passages 41 to 45 in the decontamination liquid supply device 12 of the second embodiment. The three-way switching valve V is omitted, and the operation is the same as that in the second embodiment.
When 100 g of decontamination liquid W is supplied to the first supply unit U1 by the decontamination liquid supply apparatus 12 of the third embodiment, the following processing is performed.
That is, first, the pump P1 is operated to fill the main supply passage 40 with the decontamination liquid W, and the weighing scale 32 is calibrated. During this time, the pumps P2 of the branch passages 41 to 45 are stopped.
Next, the pump P2 of the branch passage 41 is operated until the measured weight of the weigh scale 32 is reduced by 100 g. At that time, the pump P2 is operated so that the weighing scale 32 is decreased by the target weight (100 g) each time without performing the operation that decreases more than 100 g only in the first time as in the first embodiment.
When the measured weight of the weigh scale 32 decreases by 100 g, the pump P1 is operated while opening the switching valve 35 of the outside air passage 34, and the atmosphere is introduced into the main supply passage 40 through the filter F2 and the outside air passage 34, The main supply passage 40 is replaced with the atmosphere. At this time, the operation speed of the pump P1 can be made larger than the operation speed of the pump P2 that drops the decontamination liquid W onto the decontamination gas generator 11. Therefore, the main supply passage 40 can be quickly replaced with the atmosphere.
By operating the pump P2, the decontamination liquid W remaining in the section from the connection portion 41A to the tip 41B is supplied to the decontamination gas generator 11, and the supply of all 100 g of the decontamination liquid W is completed. During this time, the switching valve 35 of the outside air passage 34 is maintained in an open state, so that the atmosphere is introduced into the branch passage 41 through the outside air passage 34 and the main supply passage 40 in accordance with the operation of the pump P2.
Thereafter, the same processing is performed for each of the supply units U2 to U5. Even with the decontamination liquid supply device 12 of the third embodiment, the same operation and effect as the second embodiment can be obtained, and the three-way switching valve V of each branch passage 41 to 45 is provided. By omitting, the cost of the apparatus can be reduced.

Next, FIG. 6 shows a fourth embodiment of the decontamination liquid supply device 12, whereas in the first embodiment, each of the supply units U1 to U5 is sequentially operated individually, In the fourth embodiment, the supply units U1 to U5 are operated simultaneously. The configuration of the decontamination liquid supply device 12 in the fourth embodiment is the same as that in the first embodiment.
As shown in the paragraph 0015 and FIG. 1 regarding the first embodiment, in the state where the opening / closing door D3 is closed and the opening / closing doors D1, D2, D4, D5 are opened, for example, the supply units U1 to U5 are summed up. A case where 310 g of the decontamination liquid W is supplied and the decontamination gas G is supplied to the isolator 2 and the respective chambers 3 to 5 will be described below.
Here, the supply units U1 and U2 arranged in the isolator 2 having a large volume are each 100 g, the supply units U3 and U4 of the operation chambers 3 and 4 having a small volume are each 50 g, and the connection chamber 5 having the smallest volume. As for the supply unit U5, a case where 10 g of the decontamination liquid W is supplied will be described.
In this case, the flow rate of the pump P2 in each branch passage 41 is set to a flow rate (X, Y, Zml / SEC) that can supply the total weight in a predetermined time. In this state, when the main supply passage 40 is filled with the decontamination liquid W, the three-way switching valves V of the branch passages 41 to 45 are simultaneously switched to the first position, and each pump P2 is operated at the set flow rate. Each pump P2 is stopped when the measured weight of the weigh scale 32 is reduced by 310 g. Thereafter, the supply of the decontamination liquid W is completed in any form disclosed in the first to third embodiments described above.
For example, when supplying the decontamination gas G only to the isolator 2, the pumps P2 of the supply units U1 and U2 are operated at the same flow rate, and the measured weight of the weigh scale 32 is equal to the total target weight. When it decreases, the decontamination liquid W is supplied so as to stop the pump P2.
Even in the fourth embodiment, the same operation and effect as the first embodiment can be obtained.

The pump P1 of the main supply passage 40 in the first embodiment may be provided at a position X upstream of the branch passage 41 in the main supply passage 40 (see FIG. 2). In this case, in a state where the pump P1 is continuously driven and the decontamination liquid W is circulated and circulated in the main supply passage 40, the pumps P2 for the branch passages 41 to 45 and the three-way switching valve V are connected. By controlling the operation, the decontamination liquid W is supplied to the decontamination gas generator 11 of each of the supply units U1 to U5. In this case, at least during the operation of the pump P2, the pump P1 needs to be operated in synchronization with the pump P2 (preferably, the pump P1 is operated at a flow rate higher than that of the pump P2).
Further, even when the pump P1 is disposed at the position shown in FIG. 2, the pump P2 for each of the branch passages 41 to 45 and the three-way switching valve V are operated while the pump P1 is continuously operated. The decontamination liquid W may be supplied to each decontamination gas generator 11. In this case, the flow rate of the pump P1 may be larger or smaller than the flow rate of the pump P2.
In the first embodiment, the main supply passage 40 is configured to return the decontamination liquid W sucked from one end 40A thereof to the tank 31 from the other end 40B. It is sufficient that the decontamination liquid W sucked from the one end 40A can be supplied to the position of the branch passage 44 for the fourth supply unit U4.
Further, instead of the three-way switching valve V of each of the supply units U1 to U5 of the first embodiment, the following configuration may be used. That is, the same configuration as the switching valve 35 including the outside air passage 34 and the two-way switching valve provided thereon may be used instead of the three-way switching valve V of each branch passage 41 to 45 shown in FIG.
In each of the above-described embodiments, pumps P1 and P2 including roller pumps are used. However, pumps other than the roller pump may be used as the pumps P1 and P2. In that case, it is necessary to provide an open / close valve in each branch passage 41 to 45 for closing them.
The weight scale 32 is not essential and may be omitted. In this case, the control device 10 confirms that a predetermined amount of the decontamination liquid W has been supplied by detecting the rotation amount of the pump P2 in each of the branch passages 41 to 44.

DESCRIPTION OF SYMBOLS 11 ... Decontamination gas generator 12 ... Decontamination liquid supply device 31 ... Tank (storage container) 33 ... Decontamination liquid supply passage 40 ... Main supply passage 41-45 ... Branch passage U1 ... First supply unit (decontamination gas supply) apparatus)
U2 Second supply unit (decontamination gas supply device)
U3 3rd supply unit (decontamination gas supply device)
U4 ... Fourth supply unit (decontamination gas supply device)
U5 Fifth supply unit (decontamination gas supply device)
G Decontamination gas W Decontamination liquid P1 Pump (liquid supply means) P2 Pump (liquid supply means)
V ... Three-way switching valve (gas supply means)

Claims (4)

A storage container for storing the decontamination liquid, a decontamination liquid supply passage for supplying the decontamination liquid in the storage container to downstream equipment, and a decontamination liquid for the storage container provided in the decontamination liquid supply path. In the decontamination liquid supply apparatus provided with the liquid feeding means for feeding the liquid toward the downstream device,
The decontamination liquid supply path includes a main supply path connected to the storage container, and a plurality of branch paths for branching from the main supply path and supplying decontamination liquid to downstream equipment,
The main supply passage is provided with a liquid supply means for supplying a decontamination liquid from the storage container to the main supply passage,
The decontamination liquid supply apparatus, wherein the liquid feeding means is provided in each of the branch passages. 2. The decontamination according to claim 1, wherein each of the branch passages is provided with a gas supply unit that supplies gas to the branch passages at a position upstream of the liquid feeding unit in each of the branch passages. Liquid supply device.   The decontamination liquid supply apparatus according to claim 1, wherein one end and the other end of the main supply passage are connected to the storage container. The decontamination liquid supply apparatus according to any one of claims 1 to 3, wherein the downstream device is a plurality of decontamination gas generators provided in an isolator system.

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