JP2018114487A - Coating apparatus and coating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating apparatus that forms a coating film with uniform thickness without returning a coating liquid, which is supplied to a die, to a tank.SOLUTION: A coating apparatus 1 includes: a die 10 in which a manifold 11 long in a width direction and made of a space for storing a coating liquid, and a discharge opening 18 for discharging the coating liquid to a base material 2 via a slit 12 wide in the width direction, connected to the manifold 11, are formed; supply means 20 for supplying the coating liquid 3 to the manifold 11 from an inflow part communicating with the manifold 11; and coating liquid temperature control means 41 for controlling the temperature of the coating liquid 3 discharged to each of split areas formed by splitting a width-direction part into a plurality of areas.SELECTED DRAWING: Figure 1

Description

The present invention relates to a coating apparatus and a coating method for forming a coating film by coating a coating liquid on a substrate.

  Conventionally, in order to apply a coating solution to a long substrate, the coating solution supplied by a pump is applied in a uniform thickness by discharging the coating solution in a width direction from a slit of a die. ing. For example, Patent Document 1 has a configuration in which the thickness of a coating layer (coating film) formed on a substrate is made uniform even when slurry (coating liquid) is discharged continuously for a long time. Have been described.

Patent Document 1: Japanese Patent Application Laid-Open No. 2015-097198

However, since the thing of patent document 1 supplies a coating liquid with a pump from a tank, and returns the nonuniform excess coating liquid in a die to a tank from a die, the flow volume from a pump according to this return amount There is a problem that it is difficult to control the coating liquid amount (coating amount). Further, the coating liquid returned to the tank has a problem that properties such as viscosity may be changed, which affects the quality of the coating film.

This invention solves the said problem and makes it a subject to form the coating film of uniform thickness, without returning the coating liquid supplied to die | dye to a tank.

In order to solve the above-mentioned problems, the present invention is a coating apparatus for coating a substrate with a coating liquid to form a coating film, the manifold including a space for storing the coating liquid long in the width direction, and the manifold The die is formed with a discharge port for discharging the coating liquid to the base material via a wide slit in the width direction connected to the manifold, and the coating liquid is supplied to the manifold from the inflow portion communicating with the manifold. The present invention provides a coating apparatus comprising: a supply means for supplying; and a coating liquid temperature control means for controlling the temperature of the coating liquid for each divided region obtained by dividing the width direction into a plurality of regions. .

With this configuration, it is possible to change the discharge volume by changing the viscosity of the coating liquid by controlling the coating liquid temperature, and form a coating film with a uniform thickness without returning the coating liquid supplied to the die to the tank can do.

The coating liquid temperature control means may be provided in the space of the manifold.

With this configuration, the temperature in the vicinity of the slit is not directly controlled, so that the coating liquid temperature can be controlled without accompanying thermal deformation of the slit.

It is good also as a structure by which the said coating liquid temperature control means was provided in the vicinity of the said slit in at least one division body among the two division bodies arrange | positioned facing the said slit.

With this configuration, the temperature of the coating liquid immediately before discharge can be controlled, and the viscosity of the coating liquid can be effectively changed.

One of the two divided bodies is provided with a coating liquid temperature control means comprising a plurality of heating mechanisms, and the other of the two divided bodies is provided with a coating liquid temperature control means comprising a plurality of endothermic mechanisms. It is good also as a structure.

With this configuration, the coating liquid temperature immediately before discharge can be effectively controlled in the width direction, and the viscosity of the coating liquid can be effectively changed.

Coating film thickness measuring means for measuring the thickness of the coating film, the coating liquid temperature control means, the temperature of the coating liquid based on the coating film thickness measured by the coating film thickness measuring means It is good also as a structure to control.

With this configuration, the discharge amount of the coating liquid can be changed based on the coating film thickness, and the uniformity of the coating film thickness can be improved.

Moreover, in order to solve the said subject, this invention is a coating method which applies a coating liquid to a base material, and forms a coating film, Comprising: It consists of space long in the said width direction in the die | dye long in the width direction. The coating liquid is supplied to the manifold from the supply unit to accumulate the coating liquid, and the coating liquid is discharged from the discharge port to the substrate through the wide slit connected to the manifold in the width direction. The present invention provides a coating method characterized in that the temperature of the coating liquid is controlled for each divided region obtained by dividing the width direction into a plurality of regions by a temperature control means.

With this configuration, it is possible to change the discharge volume by changing the viscosity of the coating liquid by controlling the coating liquid temperature, and form a coating film with a uniform thickness without returning the coating liquid supplied to the die to the tank can do.

By the coating apparatus and the coating method of the present invention, a coating film having a uniform thickness can be formed without returning the coating liquid supplied to the die to the tank.

It is a figure explaining the structure of the coating apparatus in Example 1 of this invention. It is sectional drawing of arrow a of FIG. It is sectional drawing of b arrow view of FIG. 3 is a plan view of a shim plate 15. FIG. It is a figure explaining the structure of the die | dye in Example 2 of this invention. It is sectional drawing of arrow c of FIG. It is a figure explaining the structure of the coating apparatus in Example 3 of this invention.

A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram illustrating the configuration of a coating apparatus according to a first embodiment of the present invention. 2 is a cross-sectional view taken along arrow a in FIG. 3 is a cross-sectional view taken along the arrow b in FIG. FIG. 4 is a plan view of the shim plate 15.

The coating apparatus 1 is an apparatus for applying the coating liquid 3 to the base material 2 fed by roll-to-roll. The coating film formed by applying the coating liquid 3 by the coating apparatus 1 is dried and used in a subsequent process. The thickness management of the coating film formed on the substrate 2 is important. For example, when this coating film is used for an electrode plate of a battery, the coating film thickness management is very important because it directly affects the charge / discharge amount of the battery. According to this coating apparatus 1, as will be described later, the coating liquid 3 is applied with a uniform thickness (uniform coating amount) along the feed direction MD of the substrate 2. In addition, the width direction TD of the base material 2 is a direction orthogonal to the feeding direction of the base material 2, and the Y-axis direction in FIG.

The material of the base material 2 is not particularly limited, and various materials such as metal foil and resin can be selected. Moreover, the length of the width direction TD (Y direction) is not limited, and things, such as 500-1500 mm, can be selected.

Here, the coating liquid 3 in the present invention is intended for a liquid (that is, a non-Newtonian fluid) having a viscosity change with respect to the shear rate. Since the coating liquid 3 has a change in viscosity with respect to the shear rate, as described later, the viscosity changes and the flow rate changes by controlling the coating liquid temperature. Thereby, the coating liquid amount to apply changes. That is, by controlling the coating liquid temperature, the coating liquid amount to be applied can be controlled, and the coating film thickness can be uniformly controlled.

The coating apparatus 1 includes a die 10 that is long along the width direction TD of the substrate 2 and a supply unit 20 that supplies the coating liquid 3 to the die 10. In the die 10, the longitudinal direction (the Y-axis direction in FIG. 1) is referred to as the width direction. The length of the die 10 in the width direction is about 500 to 1500 mm. In this coating apparatus 1, a roller 5 facing the die 10 is installed, and the width direction of the die 10 and the direction of the rotation center line of the roller 5 are parallel. The base material 2 is guided by this roller 5, and the space | interval (gap) between the base material 2 and die | dye 10 (tip of the slit 12 mentioned later) is kept constant, and application | coating of the coating liquid 3 is performed in this state.

The die 10 according to the first embodiment includes a first divided body 13 having a first lip 13a having a tapered shape and a second divided body 14 having a second lip 14a having a tapered shape, and a shim plate 15 therebetween. And a part of the coating liquid temperature control means 41. 2 is a cross-sectional view taken along arrow a in FIG. FIG. 3 is a cross-sectional view taken along the arrow b in FIG. 1, and the shim plate 15 is shown in FIG. The die 10 is formed therein with a manifold 11 having a long space in the width direction and a slit 12 connected to the manifold 11, and a slit 12 between the first lip 13a and the second lip 14a. A discharge port 18 is formed as a release end. That is, the first manifold 11 and the discharge port 18 are connected via the slit 12. With this configuration, the coating liquid 3 supplied by the supply means 20 is first stored in the manifold 11 and then discharged from the discharge port 18 via the slit 12.

As shown in FIG. 2 and FIG. 3, the coating liquid temperature control means 41 has a plurality of heating mechanisms 41a arranged in the width direction of the die, and the coating liquid temperature control means 41 is applied to each divided region obtained by dividing the width direction into a plurality of regions. It is configured to control the temperature. A part of each heating mechanism 41 a is sandwiched between the first divided body 13 and the second divided body 14 together with the slit 15 and fixed, and most of the heating mechanism 41 a is exposed in the space of the manifold 11 and is applied to the coating liquid 3. Can be controlled efficiently. The dimension of the coating liquid temperature control means 41 in which a plurality of heating mechanisms 41 a are arranged has the same dimension W as a shim plate 15 described later, and the length perpendicular to the width direction is within the space of the manifold 11. It has a length that reaches the vicinity of the center. The several heating mechanism 41a is comprised by the Peltier device, and the dimension of the width direction is about 50-100 mm. Although the number of the heating mechanisms 41a is not particularly limited, it is set to about several to twenty. With the plurality of heating mechanisms 41a, the temperature of the coating liquid 3 can be controlled for each divided region obtained by dividing the width direction of the manifold 11 into a plurality of regions.

The coating liquid 3 has a viscosity change with respect to the shear rate, and it is known that the viscosity curve changes with temperature. Therefore, the temperature of the coating liquid 3 is controlled by the coating liquid temperature control means 41 (a plurality of heating mechanisms 41a) (specifically, the temperature is controlled in the range of room temperature to 60 ° C.), thereby passing through the coating liquid temperature control means 41. The coating liquid viscosity changes, and the flow rate changes (coating flow rate changes). Therefore, by controlling the temperature of the coating liquid for each of the divided areas divided into a plurality of areas in the width direction of the die 10, the uneven coating amount can be corrected and the coating film can be formed with a uniform thickness. it can.

In the control of the coating liquid temperature control means 41 in the first embodiment, the coating liquid temperature near the center in the width direction of the manifold 11 is controlled to be low, the coating liquid temperature near both ends in the width direction of the manifold 11 is controlled to be high, and the vicinity of both ends. A large amount of coating liquid is controlled. In general, the solid components of the coating liquid 3 are liable to precipitate and aggregate in the vicinity of both ends, and are difficult to flow. In the vicinity of the center, the solid components of the coating liquid 3 are easy to flow without precipitation or aggregation. This is to correct the uniformity.

The reason why the solid component of the coating liquid 3 easily precipitates and aggregates at both ends of the manifold 11 is that the walls constituting the end surface in the width direction of the manifold 11 exist at these both ends. This is because the coating liquid 3 that is supplied from the center of one manifold 11 and spreads to both sides in the width direction tends to decrease the flow velocity at both ends, and the coating liquid 3 tends to stay. In particular, in a coating liquid having a high viscosity (for example, a viscosity of several thousand to several tens of thousands cP (when the shear rate is 1)), the solid component tends to stay at both ends, and the solid component tends to precipitate or aggregate.

The slit 12 is formed long in the width direction similarly to the manifold 11, and the width direction dimension of the slit 12 is determined by an inner dimension W (see FIG. 4) of a shim plate 15 to be described later. The coating liquid 3 having substantially the same width direction dimension can be applied on the substrate 2. The clearance dimension (height dimension) of the slit 12 is, for example, 0.4 to 1.5 mm. In the first embodiment, the die 10 is installed in such a posture that the gap direction of the slit 12 is the vertical direction and the width direction is the horizontal direction. That is, the die 10 is installed in a posture in which the manifold 11 and the slit 12 are arranged side by side in the horizontal direction. Therefore, the direction in which the coating liquid 3 stored in the manifold 11 flows to the base material 2 through the slit 12 and the discharge port 18 is a horizontal direction.

In the first embodiment, the die 10 is installed horizontally and the coating liquid 3 is allowed to flow in the horizontal direction. However, the embodiment is not necessarily limited to this, and can be changed as appropriate. For example, the die 10 may be installed vertically to allow the coating liquid 3 to flow upward or downward, or the die 10 may be installed to be inclined from a horizontal plane so that the coating liquid 3 flows obliquely. May be. That is, the installation direction of the die 10 can be arbitrarily set. Further, the roller 5 may not be provided at a position facing the discharge port 18 of the die 10. It suffices that at least the substrate 2 is disposed so as to face the discharge port 18.

An inflow portion 16 is provided at the center in the width direction of the die 10, and the inflow portion 16 includes a through hole (inflow port) connected to the manifold 11 from the outside of the die 10. The supply means 20 includes an inflow pipe 21 having one end connected to the inflow section 16, a tank 22 storing the coating liquid 3, and the coating liquid 3 in the tank 22 through the inflow pipe 21 through the die 10. And a pump 23 for supplying to the vehicle. As described above, the supply unit 20 can supply the coating liquid 3 from the inflow portion 16 to the manifold 11. In the first embodiment, as shown in FIG. 1, the inflow portion 16 is connected to the bottom portion 17 of the manifold 11, and the coating liquid 3 is allowed to flow from the bottom portion 17.

The manifold 11 can store the coating liquid 3 supplied from the supply means 20. The coating liquid 3 stored in the manifold 11 passes through the slit 12 and is sent from the discharge port 18 by roll-to-roll. It discharges, performing the viscosity control by the coating liquid temperature control with respect to the material 2, and can apply | coat the coating liquid 3 with respect to this base material 2 continuously. The gap dimension of the slit 12 is constant in the width direction, and the thickness of the coating liquid 3 applied on the substrate 2 is constant in the width direction.

In the first embodiment, the coating liquid temperature control means 41 is composed of a plurality of heating mechanisms 41a. When the coating liquid 3 is heated and discharged onto the substrate 2 to form a coating film, it is possible to shorten the temperature raising time in the subsequent drying step. However, the coating liquid temperature control means 41 is not necessarily configured by the plurality of heating mechanisms 41a, and can be appropriately changed. For example, the coating liquid temperature control means 41 may be configured by a plurality of heat absorption mechanisms having a cooling function, or may be configured by combining a heating mechanism and a heat absorption mechanism.

When the coating liquid temperature control means 41 is constituted by a plurality of heat absorption mechanisms having a cooling function, the coating liquid 3 supplied to the die 10 may be heated in advance. Conversely, when the liquid temperature control means 41 is constituted by a plurality of heating mechanisms, the coating liquid 3 supplied to the die 10 may be cooled in advance.

In the first embodiment, the coating liquid temperature control means 41 is provided in the space of the manifold 11. However, the present invention is not necessarily limited to this and can be changed as appropriate. For example, it may be provided in the vicinity of the manifold 11 inside the first divided body 13 or the second divided body 14, or may be provided in the vicinity of the manifold 11 inside both the first divided body 13 and the second divided body 14.

Moreover, in Example 1, although the several heating mechanism 41a was comprised with the Peltier device, it is not necessarily limited to this, It can change suitably. For example, a mica heater or other heat transfer element may be used.

In this way, the temperature of the coating liquid 3 is controlled at a place away from the slit 12 by being provided in the vicinity of the manifold 11 in the space of the manifold 11 or inside the first divided body 13 or the second divided body 14. 12 is less affected by heat, and it is possible to prevent the thickness of the coating film from becoming uneven due to an increase or decrease in the gap of the slit 12.

As described above, in Example 1, the coating apparatus forms a coating film by applying a coating liquid to a substrate, and is connected to a manifold including a space for storing the coating liquid long in the width direction and the manifold. In addition, a coating liquid is supplied to the manifold from a die formed with a discharge port for discharging the coating liquid to the substrate via a wide slit in the width direction and an inflow portion communicating with the manifold. The coating liquid temperature is controlled by a coating apparatus comprising: a supply unit; and a coating liquid temperature control unit that controls the temperature of the coating liquid for each of the divided regions obtained by dividing the width direction into a plurality of regions. As a result, the discharge amount can be changed by changing the viscosity of the coating liquid, and a coating film having a uniform thickness can be formed without returning the coating liquid supplied to the die to the tank.

Moreover, in Example 1, it is the coating method which forms a coating film by applying a coating liquid to a base material, and is supplied from a supply unit to a manifold having a space long in the width direction in a die long in the width direction. Supplying the coating liquid and storing the coating liquid, and discharging the coating liquid from the discharge port to the substrate via the wide slit connected to the manifold, by the coating liquid temperature control means, The coating method is characterized in that the temperature of the coating liquid is controlled for each of the divided areas obtained by dividing the width direction into a plurality of areas. By controlling the coating liquid temperature, the viscosity of the coating liquid is changed to change the discharge amount. It is possible to form a coating film having a uniform thickness without returning the coating liquid supplied to the die to the tank.

  Example 2 of the present invention is that, in the die of the coating apparatus, the coating liquid temperature control means is provided in the vicinity of the slit of at least one of the two divided bodies that constitute the slit. This is different from the first embodiment. A second embodiment will be described with reference to FIGS. 5 and 6. FIG. 5 is a diagram illustrating the configuration of a die according to the second embodiment of the present invention. 6 is a cross-sectional view taken along the arrow c in FIG.

  The die 110 of the coating apparatus 101 according to the second embodiment includes a coating liquid temperature control unit 151 in addition to the coating liquid temperature control unit 41. The coating liquid temperature control means 151 includes a plurality of heating mechanisms 151a and a plurality of heat absorption mechanisms 151b. That is, the plurality of heating mechanisms 151 a are provided in the vicinity of the slit 12 in the first divided body 13. Specifically, a plurality of heating mechanisms 151a are slightly moved from the slits 12 in the first divided body 13 in the width direction (Y direction) so as to control the temperature of the coating liquid for each divided region obtained by dividing the width direction into a plurality of regions. It is embedded in the place inside. That is, if the surface of the first divided body 13 constituting the slit 12 is uneven, the flow of the coating liquid 3 is hindered and affects the amount of the coating liquid. Therefore, the heating mechanism 151a is made so that the surface constituting the slit 12 becomes smooth. Is embedded in the first divided body 13.

  Similarly, the plurality of heat absorbing mechanisms 151 b are provided in the vicinity of the slit 12 in the second divided body 14. Specifically, a plurality of heat absorbing mechanisms 151b are slightly moved from the slits 12 in the second divided body 14 in the width direction (Y direction) so as to control the temperature of the coating liquid for each divided region obtained by dividing the width direction into a plurality of regions. It is embedded in the place inside (see FIG. 5 and FIG. 6).

  In the control of the coating liquid temperature control means 151 in the second embodiment, the coating liquid temperature near the center in the width direction of the slit 12 is controlled to be low, and the coating liquid temperature near both ends in the width direction of the slit 12 is controlled to be high. The amount of coating liquid is controlled so as to increase. This is because the solid component of the coating liquid 3 tends to precipitate and aggregate easily and does not flow in the vicinity of both ends of the slit, and the coating liquid amount occurs near the center because the solid component of the coating liquid 3 flows easily without precipitation or aggregation. This is to correct the unevenness.

  In the second embodiment, in addition to the coating liquid temperature control unit 41, the coating liquid temperature control unit 151 is provided. However, the present invention is not necessarily limited thereto, and can be changed as appropriate. For example, only the coating liquid temperature control means 151 may be provided without providing the coating liquid temperature control means 41. Moreover, although it comprised so that the coating liquid temperature control means 151 might be provided in the 1st division body 13 and the 2nd division body 14 which comprise the slit 12, it is not necessarily limited to this but can change suitably. For example, you may comprise so that the coating liquid temperature control means which consists of a some heating mechanism or a some heat absorption mechanism may be provided only in one division body. That is, it is only necessary that the coating liquid temperature control means be provided in the vicinity of the slit in at least one of the two divided bodies that constitute the slit 12 and are opposed to each other.

  Further, in Example 2, in order to smooth the surface constituting the slit 12, a plurality of heating mechanisms 151a are embedded in a place slightly inside from the slit 12 in the first divided body 13, and a plurality of heat absorption mechanisms are provided. 151b is embedded in a place slightly inside the slit 12 in the second divided body 14, but is not necessarily limited to this and can be changed as appropriate. For example, if the surfaces of the heating mechanism 151a and the endothermic mechanism 151b are smooth, they may be provided directly on the surface constituting the slit 12 without being embedded in the first divided body 13 and the second divided body 14.

  Here, since the coating liquid temperature control means 151 is provided in the vicinity of the slit, it is easy to directly control the coating liquid temperature to be discharged. However, as described above, the slit dimension of the slit is affected by heat. There is a possibility that the coating film thickness becomes non-uniform. Therefore, it is desirable to control the heating temperature or the endothermic temperature while measuring the temperature of the coating liquid or the slit so that there is no excessive heating or endothermic.

  As described above, in the second embodiment, the coating liquid temperature control means is provided in the vicinity of the slit in at least one divided body among the two divided bodies arranged opposite to each other to constitute the slit. The coating liquid temperature can be controlled, and the viscosity of the coating liquid can be effectively changed.

  The third embodiment of the present invention is different from the first embodiment in that it includes a sensor that measures the film thickness (coating film thickness) of the coating liquid applied onto the substrate. A third embodiment will be described with reference to FIG. FIG. 7 is a diagram illustrating the configuration of the coating apparatus according to the third embodiment of the present invention.

As shown in FIG. 7, the sensor 236 which measures the film thickness (coating film thickness) of the coating liquid 3 is provided. A plurality of sensors 236 are provided along the width direction, and a plurality of film thickness measurement results can be obtained in the width direction. The sensor 236 is a non-contact optical displacement sensor. And the film thickness of the coating liquid 3 on the base material 2 is measured at a plurality of locations along the width direction, and a plurality of measurement results are output to a control unit (computer) 37 provided in the coating apparatus 201. The control unit 237 performs feedback control based on a plurality of measurement results in the width direction from the sensor 236 and adjusts the coating liquid temperature control means 41. That is, according to the measurement result of the film thicknesses of the plurality of coating liquids 3 in the width direction, the control unit 237 outputs a control signal to each of the plurality of heating mechanisms 41a constituting the coating liquid temperature control unit 41, and the width The coating liquid temperature is controlled by adjusting the heating temperature of each of the plurality of heating mechanisms 41a for each divided region divided into a plurality of regions in the direction. As a result, the viscosity of the coating liquid 3 changes for each of a plurality of divided areas divided in the width direction, whereby the flow velocity changes for each divided area, and the film thickness of the coating liquid 3 can be kept constant in the width direction. It becomes.

  More specifically, the feedback control based on the measurement result of the sensor 236 specifically increases the heating temperature with respect to the heating mechanism 41a corresponding to the divided region if the measured thickness of the coating film is smaller than a predetermined value. If it is larger than the predetermined value, the heating mechanism 41a corresponding to the divided area is controlled to lower the heating temperature. As a result, the viscosity of the coating liquid can be increased to increase the amount of coating liquid in a region where the coating film thickness is small, and the amount of coating liquid can be decreased by decreasing the viscosity of the coating liquid relative to a region where the coating film thickness is large. Thus, a uniform coating film thickness can be obtained over the entire region in the width direction.

  Here, the arrangement position and the number of the heating mechanisms 41a may not coincide with the measurement position and the number of measurement points of the sensor 236. What is necessary is just to comprise so that the heating mechanism 41a of the division area in the position nearest to the measurement position of the sensor 236 may be controlled.

  In the third embodiment, a plurality of sensors 236 are provided in the width direction. However, the present invention is not necessarily limited to this and can be appropriately changed. For example, a sensor 236 may be provided in a moving unit such as a robot, and the film thickness may be measured at a plurality of locations by moving in the width direction.

  In addition, when a plurality of heating mechanisms 151a or a plurality of heat absorption mechanisms 151b are provided in the vicinity of the slit like the coating liquid temperature control means 151 described above, feedback control based on the measurement result from the sensor 236 is performed, and each heating is performed. It is good also as a structure which controls the coating liquid temperature by controlling the heating temperature of the mechanism 151a or the endothermic temperature of the endothermic mechanism 151b.

  In the third embodiment, the sensor 236 is an optical displacement sensor. However, the embodiment is not necessarily limited to this and can be changed as appropriate. For example, the sensor 236 may be composed of an X-ray film thickness meter or a β-ray film thickness meter, or may be composed of an ultrasonic film thickness meter. When the X-ray film thickness meter or the β-ray film thickness meter is used, a projector and a light receiver may be installed with the base material 2 and the coating liquid 3 interposed therebetween.

  Thus, in Example 3, the coating film thickness measuring means for measuring the thickness of the coating film is provided, and the coating liquid temperature control means is based on the coating film thickness measured by the coating film thickness measuring means. By controlling the temperature of the coating liquid, the discharge amount can be changed for each of a plurality of regions based on the coating film thickness, and the uniformity of the coating film thickness can be improved.

The coating apparatus and the coating method in this invention can be widely used in the field | area which applies a coating liquid to a base material and forms a coating film.

1: Coating device 2: Base material 3: Coating liquid 5: Roller 10: Die 11: Manifold 12: Slit 13: First divided body 13a: First lip 14: Second divided body 14a: Second lip 15: Shim Plate 16: Inflow part 17: Bottom part 18: Discharge port 20: Supply means 21: Inflow pipe 22: Tank 23: Pump 41: Coating liquid temperature control means 41a: Heating mechanism 101: Coating apparatus 110: Die 151: Coating liquid temperature Control means 151a: heating mechanism 151b: endothermic mechanism 201: coating device 236: sensor 237: control unit

Claims (6)

A coating apparatus that forms a coating film by applying a coating liquid to a substrate,
A die formed with a manifold formed of a space for storing the coating liquid long in the width direction, and a discharge port for discharging the coating liquid to the substrate via the wide slit in the width direction connected to the manifold;
Supply means for supplying a coating liquid to the manifold from an inflow portion communicating with the manifold;
A coating apparatus comprising: a coating liquid temperature control means for controlling the temperature of the coating liquid for each of the divided areas obtained by dividing the width direction into a plurality of areas.   The coating apparatus according to claim 1, wherein the coating liquid temperature control means is provided in a space of the manifold.   The said coating liquid temperature control means was provided in the said slit vicinity in at least one division body among the two division bodies arrange | positioned facing the said slit, The Claim 1 or 2 characterized by the above-mentioned. Coating equipment.   One of the two divided bodies is provided with a coating liquid temperature control means comprising a plurality of heating mechanisms, and the other of the two divided bodies is provided with a coating liquid temperature control means comprising a plurality of endothermic mechanisms. The coating apparatus according to claim 3.   Coating film thickness measuring means for measuring the thickness of the coating film, the coating liquid temperature control means, the temperature of the coating liquid based on the coating film thickness measured by the coating film thickness measuring means The coating apparatus according to claim 1, wherein the coating apparatus is controlled. A coating method for forming a coating film by applying a coating liquid to a substrate,
The coating liquid is supplied from a supply unit to a manifold consisting of a space long in the width direction of the die that is long in the width direction to collect the coating liquid, and the coating liquid is passed through the wide slit in the width direction connected to the manifold. While discharging from the discharge port to the substrate,
A coating method, wherein the temperature of the coating liquid is controlled for each divided region obtained by dividing the width direction into a plurality of regions by a coating liquid temperature control means.

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