JP2018109541A - Optical scanning height measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanning height measuring device that can efficiently measure the shape of a desired portion of a measuring object.SOLUTION: Registration information in which a reference image and a point of measurement are associated with each other is received. A measurement image indicating a measuring object S is acquired, and the position on the measurement image corresponding to the point of measurement on the reference image in the received registration information is specified as a point of correction measurement. Light emitted from a light emitting part 231 is deflected by a deflection part, and the measuring object S is irradiated with the light. The deflection part is controlled so that a portion of the measuring object S corresponding to the point of correction measurement is irradiated with light. Light from the measuring object S is received by a light receiving part, and a light receiving signal indicating the quantity of received light is output. The height of a portion of the measuring object S corresponding to the point of correction measurement is calculated on the basis of the deflection direction of the deflection part detected by a detection part or the irradiation position of the light deflected by the deflection part, and the light receiving signal output from the light receiving part.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an optical scanning height measuring device that measures a surface shape of a measurement object.

  In order to measure the surface shape of the measurement object, an optical scanning height measuring device is used. For example, in the dimension measuring apparatus described in Patent Document 1, light emitted from a white light source is divided into a measurement light beam and a reference light beam by an optical coupler. The measurement light beam is scanned by the measurement object scanning optical system, and is irradiated to an arbitrary measurement point on the surface of the measurement object. The reference light beam is applied to the reference light scanning optical system. Based on the interference between the measurement light beam reflected by the measurement object and the reference light beam, the surface height of the measurement point of the measurement object is obtained.

JP 2010-43954 A

  By using the dimension measuring device of Patent Document 1, the shape of a desired portion of the measurement object can be measured. In this case, in order to irradiate the part with the measurement light beam, it is necessary to accurately determine the position and orientation of the measurement object with respect to the dimension measuring apparatus and prepare the position coordinates of the part in advance. However, the work of placing the measurement object while accurately maintaining the position and orientation is troublesome. Therefore, a desired part of the measurement object cannot be easily specified, and the part cannot be measured efficiently.

  An object of the present invention is to provide an optical scanning height measuring device capable of efficiently measuring the shape of a desired portion of a measurement object.

(1) An optical scanning height measuring device according to the present invention includes:
A light emitting unit that emits light, a deflecting unit that deflects light emitted from the light emitting unit and irradiates the measurement target, and receives light from the measurement target and outputs a light reception signal indicating the amount of light received A light receiving unit, a registration information receiving unit that receives registration information indicating a relationship between a reference image indicating a measurement object and a measurement point on the reference image, and a reference image acquisition unit that acquires an image indicating the measurement object as a reference image The position on the measurement image corresponding to the measurement point on the reference image is corrected based on the comparison between the reference image of the registration information received by the registration information reception unit and the measurement image acquired by the measurement image acquisition unit. A correction unit that is specified as: a drive control unit that controls the deflection unit so that light is irradiated to the portion of the measurement object corresponding to the correction measurement point; and a deflection direction of the deflection unit or the light deflected by the deflection unit Detection unit for detecting the irradiation position Based on the deflection direction of the deflection unit detected by the detection unit or the irradiation position of the light deflected by the deflection unit and the light reception signal output by the light reception unit, the height of the portion of the measurement object corresponding to the correction measurement point A height calculation unit for calculating the height.

  In this optical scanning height measurement device, a measurement image indicating a measurement object is acquired by a measurement image acquisition unit. Based on the comparison between the reference image of the registration information received by the registration information reception unit and the measurement image acquired by the measurement image acquisition unit, the position on the measurement image corresponding to the measurement point on the reference image is used as the correction measurement point. It is specified by the correction unit. The light emitted from the light emitting part is deflected by the deflecting part and is irradiated onto the measurement object. The deflecting unit is controlled by the drive control unit so that light is irradiated to the part of the measurement object corresponding to the corrected measurement point.

  The detection unit detects the deflection direction of the deflection unit or the irradiation position of the light deflected by the deflection unit. Light from the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of light received is output. Based on the deflection direction of the deflection unit detected by the detection unit or the irradiation position of the light deflected by the deflection unit and the light reception signal output by the light reception unit, the height of the portion of the measurement object corresponding to the correction measurement point Is calculated by the height calculator.

  According to this configuration, the height of the portion of the measurement object corresponding to the measurement point designated on the reference image is automatically calculated. Therefore, the operator does not need to place the measurement object in a state where the position and orientation with respect to the optical scanning height measuring device are accurately adjusted, and it is not necessary to prepare the position coordinates of the measurement point in advance. This makes it possible to accurately and easily measure the shape of the desired portion of the measurement object.

  (2) The registration information further includes an allowable value of the height of the part of the measurement object corresponding to the measurement point, and the optical scanning height measurement device is configured to calculate the height of the part of the measurement object calculated by the height calculation unit. And an inspection unit that determines the quality of the measurement object based on the allowable value of the registration information received by the registration information receiving unit.

  In this case, the quality of the measurement object is automatically determined based on the allowable value received by the registration information receiving unit. Therefore, the determination result of the quality of the measurement object can be obtained uniformly. Thereby, it becomes possible to test | inspect a measuring object correctly and easily.

  (3) The optical scanning height measuring device generates a report that displays a determination result of the measurement object by the inspection unit and a measurement image indicating the measurement object acquired by the measurement image acquisition unit. A creation unit may be further provided. In this case, the worker can easily report the inspection result of the measurement object to another worker using the report created by the report creation unit.

  (4) The optical scanning height measurement device may further include an imaging unit that images the measurement object, and the measurement image acquisition unit may acquire an image of the measurement object generated by the imaging unit as a measurement image. In this case, a measurement image of the measurement object can be easily acquired.

  (5) The imaging unit further captures light on the measurement object, and the optical scanning height measurement device includes a first position specifying unit that specifies a light irradiation position in a captured image by the imaging unit, and a first A first determination unit that determines whether the irradiation position of the light specified by the position specifying unit is within a predetermined range from the measurement point, and the drive control unit is based on the first determination unit The deflection unit may be controlled based on the determination result. In this case, the drive control unit can easily control the deflection unit based on the determination result by the first determination unit so that light is irradiated to the portion of the measurement object corresponding to the measurement point.

  (6) The optical scanning height measurement device includes a second position specifying unit that specifies a planar position on the measurement object irradiated with light based on the detection result of the detection unit and the light reception signal output by the light receiving unit. And a second determination unit that determines whether or not the planar position on the measurement object specified by the second position specifying unit is within a predetermined range from the position corresponding to the measurement point. The drive control unit may control the deflection unit based on the determination result by the second determination unit. In this case, the drive control unit can easily control the deflection unit based on the determination result by the second determination unit so that light is irradiated to the portion of the measurement object corresponding to the measurement point.

  (7) The correction unit may specify the correction measurement point by translating or rotating the measurement image relative to the reference image. According to this configuration, even when the measurement object in the measurement image is displaced or rotated with respect to the measurement object in the reference image, the correction unit can easily specify the correction measurement point.

  (8) The correction unit may specify the correction measurement point based on a comparison between the shape of the edge portion of the measurement object indicated by the reference image and the shape of the edge portion of the measurement object indicated by the measurement image. In this case, the correction unit can specify the correction measurement point with high accuracy.

  (9) The registration information further includes a geometric element related to the position of the measurement point, and the optical scanning height measurement device is based on the deflection direction of the deflection unit detected by the detection unit or the irradiation position of the light deflected by the deflection unit. A geometric element calculation unit that calculates a value of the geometric element related to the position of the corrected measurement point corresponding to the geometric element of the registration information received by the registration information reception unit.

  In this case, the geometric element of the measurement object corresponding to the geometric element of the registration information is automatically calculated. Therefore, the calculation result of the geometric element of the corresponding part of the measurement object can be obtained uniformly. This makes it possible to accurately and easily measure various geometric elements including the flatness or assembly size of the measurement object.

  (10) The optical scanning height measuring device is configured to selectively operate in a setting mode and a measurement mode, and in the setting mode, a reference image acquisition unit that acquires a reference image of a measurement object; A position information acquisition unit that accepts designation of measurement points on the reference image acquired by the reference image acquisition unit, and a reference image acquired by the reference image acquisition unit and the measurement points received by the position information acquisition unit in the setting mode And a registration information generation unit that generates the registration information and gives the generated registration information to the registration information reception unit, and includes a registration information reception unit, a measurement image acquisition unit, a correction unit, a drive control unit, and a detection The unit and the height calculation unit may operate in the measurement mode.

  In this case, the optical scanning height measuring device selectively operates in the setting mode and the measurement mode. In the setting mode, registration information is generated by designating a measurement point on the reference image. In the measurement mode, the height of the portion of the measurement object corresponding to the measurement point designated on the reference image is automatically calculated. Therefore, a skilled worker designates the measurement point on the reference image of the measurement object in the setting mode, so that the height of the corresponding part of the measurement object can be adjusted even in the measurement mode even if the worker is not skilled. The calculation result can be obtained uniformly. This makes it possible to efficiently measure the shape of the desired part of the measurement object.

  (11) The position information acquisition unit may superimpose and display an index indicating the position of the received measurement point on the reference image acquired by the reference image acquisition unit. In this case, the operator can easily confirm the designated measurement point by visually recognizing the index superimposed and displayed on the reference image of the measurement object.

  (12) The optical scanning height measuring device further includes a display unit, and the drive control unit controls the deflecting unit so that light is irradiated to the part of the measurement object corresponding to the measurement point in the setting mode, The detection unit detects the deflection direction of the deflection unit or the irradiation position of the light deflected by the deflection unit in the setting mode, and the height calculation unit detects the height of the portion of the measurement object corresponding to the measurement point in the setting mode. The height may be calculated, and the calculated height may be displayed on the display unit.

  In this case, the operator in the setting mode can recognize the calculated value of the height of the part of the measurement object by visually recognizing the display unit. Further, the operator can easily determine whether or not the measurement point has been appropriately designated by recognizing the calculated value of the height of the portion of the measurement object.

  (13) The height calculation unit may display an error message on the display unit when the height of the part of the measurement object corresponding to the measurement point cannot be calculated in the setting mode. In this case, the operator in the setting mode can recognize that the height of the part of the measurement object corresponding to the measurement point cannot be calculated by visually recognizing the display unit. Thus, the operator can change the arrangement of the measurement object or the optical scanning height measurement device or change the position of the designated measurement point so that the height of the part of the measurement object can be calculated. Can do.

  (14) The registration information further includes one or a plurality of reference points on the reference image, and the correction unit compares the reference image received by the registration information reception unit with the measurement image acquired by the measurement image acquisition unit. Based on this, the position on the measurement image corresponding to one or more reference points on the reference image is specified as one or more correction reference points, and the drive control unit specifies one or more corrections specified by the correction unit The deflection unit is controlled so that light is irradiated to the part of the measurement object corresponding to the reference point, and the optical scanning height measurement device is based on the detection result of the detection unit and the light reception signal output by the light reception unit. A coordinate calculation unit that calculates coordinates corresponding to points on the reference image of the registration information, and a reference surface acquisition that acquires a reference surface based on the coordinates corresponding to one or more correction reference points calculated by the coordinate calculation unit Part and further The height calculation unit calculates the height of the part of the measurement object based on the reference plane acquired by the reference plane acquisition unit based on the coordinates corresponding to the measurement point calculated by the coordinate calculation unit. May be. In this case, the relative height of the part of the measurement object with respect to the predetermined reference plane can be acquired.

  (15) The optical scanning height measurement device has a predetermined unique coordinate system, and the height calculation unit calculates the height of the part of the measurement object with reference to the origin in the unique coordinate system. May be. In this case, in the measurement mode, the absolute height of the portion of the measurement object in the unique coordinate system can be acquired.

  (16) The optical scanning height measuring device guides the light emitted from the light emitting unit to the deflecting unit as the measurement light while the reference body arranged to be movable along the first movement axis and the light emitting unit. The emitted light is guided to the reference body as reference light, and interference light between the measurement light from the measurement object reflected by the deflecting unit and the reference light reflected by the reference body is generated, and the generated interference light is received. A light guide unit that guides the interference light generated by the light guide unit, and the light output unit is temporally low coherent. The deflecting unit deflects the measurement light guided by the light guide unit and irradiates the measurement target, reflects the measurement light from the measurement target to the light guide unit, and the light receiving unit Receives interference light split by the spectroscopic unit and outputs a received light signal indicating the amount of interference light received The height calculation unit calculates the height of the portion of the measurement object based on the position of the reference body acquired by the reference position acquisition unit and the amount of received interference light in the light reception signal output from the light reception unit. May be. In this case, the height of the portion of the measurement object can be calculated with high accuracy based on the position of the reference body that reflects the reference light and the amount of received interference light that is split.

  ADVANTAGE OF THE INVENTION According to this invention, the shape of the desired part of a measuring object can be measured efficiently.

1 is a block diagram showing an overall configuration of an optical scanning height measuring apparatus according to an embodiment of the present invention. It is an external appearance perspective view which shows the stand part of FIG. It is a block diagram which shows the structure of a stand part and a measurement head. It is a schematic diagram which shows the structure of a measurement part. It is a schematic diagram which shows the structure of a reference part. It is a schematic diagram which shows the structure of a focusing part. It is a schematic diagram which shows the structure of a scanning part. It is a figure which shows an example of the selection screen displayed on the display part of an optical scanning height measuring apparatus. It is a figure which shows the content of the data transmitted between a control part and a control board in each operation mode. It is a block diagram which shows the control system of the optical scanning height measuring apparatus of FIG. It is a figure which shows an example of the report produced by the report production part. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measuring apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measuring apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measuring apparatus of FIG. It is a flowchart which shows an example of the optical scanning height measurement process performed in the optical scanning height measuring apparatus of FIG. It is a flowchart which shows an example of the designated measurement process by a control board. It is a flowchart which shows an example of the designated measurement process by a control board. It is explanatory drawing for demonstrating the designation | designated measurement process of FIG. 16 and FIG. It is explanatory drawing for demonstrating the designation | designated measurement process of FIG. 16 and FIG. It is a flowchart which shows the other example of the designation | designated measurement process by a control board. It is a flowchart which shows the other example of the designation | designated measurement process by a control board. It is explanatory drawing for demonstrating the designation | designated measurement process of FIG. 20 and FIG. It is a figure for demonstrating the example of operation of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the example of operation of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the example of operation of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the example of operation of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the example of operation of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the example of operation of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the other operation example of the optical scanning height measuring apparatus in setting mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in a measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in a measurement mode. It is a figure for demonstrating the operation example of the optical scanning height measuring apparatus in a measurement mode. It is a block diagram which shows the control system of the optical scanning height measuring apparatus which concerns on a 1st modification. It is a schematic diagram which shows the structure of the optical part of the optical scanning height measuring apparatus which concerns on a 2nd modification.

(1) Overall Configuration of Optical Scanning Height Measuring Device Hereinafter, an optical scanning height measuring device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing an overall configuration of an optical scanning height measuring apparatus according to an embodiment of the present invention. FIG. 2 is an external perspective view showing the stand unit 100 of FIG. As shown in FIG. 1, the optical scanning height measuring device 400 includes a stand unit 100, a measuring head 200, and a processing device 300.

  The stand unit 100 has an L-shaped longitudinal section and includes an installation unit 110, a holding unit 120, and an elevating unit 130. The installation part 110 has a horizontal flat plate shape and is installed on the installation surface. As shown in FIG. 2, a square optical surface plate 111 on which the measurement object S (FIG. 1) is placed is provided on the upper surface of the installation unit 110. Above the optical surface plate 111, a measurement region V in which the measurement object S can be measured by the measurement head 200 is defined. In FIG. 2, the measurement region V is illustrated by a dotted line.

  A plurality of screw holes are formed in the optical surface plate 111 so as to be arranged at equal intervals in two directions orthogonal to each other. Thereby, the measuring object S can be fixed to the optical surface plate 111 in a state where the surface of the measuring object S is located in the measurement region V using the clamp member and the screw member.

  The holding unit 120 is provided so as to extend upward from one end of the installation unit 110. The measuring head 200 is attached to the upper end of the holding unit 120 so as to face the upper surface of the optical surface plate 111. In this case, since the measuring head 200 and the installation unit 110 are held by the holding unit 120, the optical scanning height measuring device 400 can be easily handled. Further, the measurement object S can be easily positioned in the measurement region V by placing the measurement object S on the optical surface plate 111 on the installation unit 110.

  As shown in FIG. 1, the elevating unit 130 is provided inside the holding unit 120. The elevating unit 130 can move the measuring head 200 in the vertical direction (the height direction of the measuring object S) with respect to the measuring object S on the optical surface plate 111. The measurement head 200 includes a control board 210, an imaging unit 220, an optical unit 230, a light guide unit 240, a reference unit 250, a focusing unit 260, and a scanning unit 270. The control board 210 includes, for example, a CPU (Central Processing Unit), ROM (Read Only Memory), and RAM (Random Access Memory). The control board 210 may be configured by a microcomputer.

  The control board 210 is connected to the processing apparatus 300 and controls operations of the elevating unit 130, the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270 based on instructions from the processing apparatus 300. . In addition, the control board 210 provides the processing apparatus 300 with various information acquired from the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270. The imaging unit 220 generates image data of the measurement object S by imaging the measurement object S placed on the optical surface plate 111, and gives the generated image data to the control board 210.

  The optical unit 230 emits outgoing light having low temporal coherence to the light guide unit 240. The light guide unit 240 divides the light emitted from the optical unit 230 into reference light and measurement light, guides the reference light to the reference unit 250, and guides the measurement light to the focusing unit 260. The reference unit 250 reflects the reference light to the light guide unit 240. The focusing unit 260 gives a focus to the measurement light passing through itself. The scanning unit 270 irradiates a desired portion of the measurement object S with the measurement light by scanning the measurement light focused by the focusing unit 260.

  A part of the measurement light irradiated on the measurement object S is reflected by the measurement object S and guided to the light guide unit 240 through the scanning unit 270 and the focusing unit 260. The light guide unit 240 generates interference light between the reference light reflected by the reference unit 250 and the measurement light reflected by the measurement object S, and guides it to the optical unit 230. The optical unit 230 detects the amount of received light for each wavelength of the interference light, and gives a signal indicating the detection result to the control board 210. Details of the measuring head 200 will be described later.

  The processing apparatus 300 includes a control unit 310, a storage unit 320, an operation unit 330, and a display unit 340. The control unit 310 includes a CPU, for example. The storage unit 320 includes, for example, a ROM, a RAM, and an HDD (hard disk drive). The storage unit 320 stores a system program. The storage unit 320 is used for storing various data and processing data.

  The control unit 310 is a command for controlling operations of the imaging unit 220, the optical unit 230, the reference unit 250, the focusing unit 260, and the scanning unit 270 of the measurement head 200 based on the system program stored in the storage unit 320. Is applied to the control board 210. In addition, the control unit 310 acquires various information from the control board 210 of the measurement head 200 and stores it in the storage unit 320.

  The operation unit 330 includes a mouse, a touch panel, a pointing device such as a trackball or a joystick, and a keyboard, and is operated by a user to give an instruction to the control unit 310. The display unit 340 includes, for example, an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel. The display unit 340 displays an image based on the image data stored in the storage unit 320, a measurement result, and the like.

(2) Elevating Unit and Light Guide Unit FIG. 3 is a block diagram illustrating configurations of the stand unit 100 and the measurement head 200. In FIG. 3, the detailed structure of the raising / lowering part 130, the optical part 230, and the light guide part 240 is shown. As shown in FIG. 3, the elevating unit 130 includes a driving unit 131, a driving circuit 132, and a reading unit 133.

  The drive unit 131 is, for example, a motor, and moves the measurement head 200 in the vertical direction with respect to the measurement object S on the optical surface plate 111 as indicated by a thick arrow in FIG. Thereby, the optical path length of measurement light can be adjusted over a wide range. Here, the optical path length of the measurement light is an optical length from when the measurement light is output from the port 245d of the light guide unit 240 described later until the measurement light reflected by the measurement object S is input to the port 245d. It is the length of the optical path.

  The drive circuit 132 is connected to the control board 210 and drives the drive unit 131 based on the control by the control board 210. The reading unit 133 is an optical linear encoder, for example, and detects the position of the measuring head 200 in the vertical direction by reading the driving amount of the driving unit 131. In addition, the reading unit 133 gives the detection result to the control board 210.

  The optical unit 230 includes a light emitting unit 231 and a measuring unit 232. The light emitting unit 231 includes, for example, an SLD (super luminescent diode) as a light source, and emits outgoing light having a relatively low coherence. Specifically, the coherence of the emitted light is higher than the light emitted from the LED (light emitting diode) or white light, and lower than the coherence of the laser light. Therefore, the emitted light has a wavelength bandwidth that is narrower than the wavelength bandwidth of the light emitted from the LED or the white light and wider than the wavelength bandwidth of the laser light. Light emitted from the optical unit 230 is input to the light guide unit 240.

  Interference light is output from the light guide unit 240 to the measurement unit 232. FIG. 4 is a schematic diagram illustrating the configuration of the measurement unit 232. As shown in FIG. 4, the measuring unit 232 includes lenses 232a and 232c, a spectroscopic unit 232b, and a light receiving unit 232d. Interfering light output from an optical fiber 242 of the light guide unit 240 described later is substantially collimated by passing through the lens 232a and is incident on the spectroscopic unit 232b. The spectroscopic unit 232b is, for example, a reflective diffraction grating. The light incident on the spectroscopic unit 232b is split so as to be reflected at different angles for each wavelength, and is focused on a different one-dimensional position for each wavelength by passing through the lens 232c.

  The light receiving unit 232d includes, for example, an imaging element (one-dimensional line sensor) in which a plurality of pixels are arranged in a one-dimensional manner. The image pickup device may be a multi-segment PD (photodiode), a CCD (charge coupled device) camera, a CMOS (complementary metal oxide semiconductor) image sensor, or another device. The light receiving unit 232d is arranged such that a plurality of pixels of the image sensor respectively receive light at a plurality of in-focus positions that are different for each wavelength formed by the lens 232c.

  From each pixel of the light receiving unit 232d, an analog electric signal (hereinafter referred to as a light receiving signal) corresponding to the amount of received light is output and applied to the control board 210 in FIG. Thereby, the control board 210 acquires data indicating the relationship between each pixel (wavelength of interference light) of the light receiving unit 232d and the amount of received light. The control board 210 calculates the height of the portion of the measuring object S by performing predetermined calculation and processing on the data.

  As shown in FIG. 3, the light guide unit 240 includes four optical fibers 241, 242, 243, 244, a fiber coupler 245, and a lens 246. The fiber coupler 245 has a so-called 2 × 2 configuration, and includes four ports 245a, 245b, 245c, 245d and a main body 245e. The ports 245a and 245b and the ports 245c and 245d are provided on the main body 245e so as to face each other with the main body 245e interposed therebetween.

  The optical fiber 241 is connected between the light emitting part 231 and the port 245a. The optical fiber 242 is connected between the measurement unit 232 and the port 245b. The optical fiber 243 is connected between the reference unit 250 and the port 245c. The optical fiber 244 is connected between the focusing unit 260 and the port 245d. In the present embodiment, the optical fiber 243 is longer than the optical fibers 241, 242, 244. The lens 246 is disposed on the optical path between the optical fiber 243 and the reference unit 250.

  Light emitted from the light emitting portion 231 is input to the port 245a through the optical fiber 241. Part of the emitted light input to the port 245a is output as reference light from the port 245c. The reference light is substantially collimated by passing through the optical fiber 243 and the lens 246 and guided to the reference unit 250. Further, the reference light reflected by the reference unit 250 is input to the port 245c through the lens 246 and the optical fiber 243.

  Another part of the emitted light input to the port 245a is output as measurement light from the port 245d. The measurement light is applied to the measurement object S through the optical fiber 244, the focusing unit 260, and the scanning unit 270. Further, a part of the measurement light reflected by the measurement object S is input to the port 245d through the scanning unit 270, the focusing unit 260, and the optical fiber 244. The reference light input to the port 245c and the measurement light input to the port 245d are output as interference light from the port 245b and guided to the measurement unit 232 through the optical fiber 242.

(3) Reference Part FIG. 5 is a schematic diagram showing the configuration of the reference part 250. As shown in FIG. 5, the reference part 250 includes a fixed part 251, a linear guide 251g extending linearly, movable parts 252a and 252b, a fixed mirror 253, movable mirrors 254a, 254b and 254c, drive parts 255a and 255b, and a drive circuit. 256a, 256b and reading units 257a, 257b. The fixed portion 251 and the linear guide 251g are fixed to the main body of the measurement head 200. The movable portions 252a and 252b are attached to the linear guide 251g so as to be movable along the direction in which the linear guide 251g extends.

  The fixed mirror 253 is attached to the fixed part 251. The movable mirrors 254a and 254c are attached to the movable part 252a. The movable mirror 254b is attached to the movable part 252b. The movable mirror 254c is used as a so-called reference mirror. The movable mirror 254c is preferably constituted by a corner cube. In this case, the optical members can be easily arranged.

  The reference light output from the optical fiber 243 is substantially collimated by passing through the lens 246, and then sequentially reflected by the fixed mirror 253, the movable mirror 254a, the movable mirror 254b, and the movable mirror 254c. The reference light reflected by the movable mirror 254c is sequentially reflected by the movable mirror 254b, the movable mirror 254a, and the fixed mirror 253, and is input to the optical fiber 243 through the lens 246.

  The drive units 255a and 255b are, for example, voice coil motors, and move the movable units 252a and 252b with respect to the fixed unit 251 along the direction in which the linear guide 251g extends, as indicated by white arrows in FIG. . In this case, in a direction parallel to the moving direction of the movable portions 252a and 252b, the distance between the fixed mirror 253 and the movable mirror 254a, the distance between the movable mirror 254a and the movable mirror 254b, and the movable mirror 254b and the movable mirror 254c. The distance between and changes. Thereby, the optical path length of the reference light can be adjusted.

  Here, the optical path length of the reference light is the length of the optical optical path from when the reference light is output from the port 245c in FIG. 3 to when the reference light reflected by the movable mirror 254c is input to the port 245d. is there. When the difference between the optical path length of the reference light and the optical path length of the measurement light is equal to or less than a certain value, the interference light between the reference light and the measurement light is output from the port 245b in FIG.

  In the present embodiment, the movable portions 252a and 252b move in directions opposite to each other along the direction in which the linear guide 251g extends, but the present invention is not limited to this. Only one of the movable part 252a and the movable part 252b moves along the direction in which the linear guide 251g extends, and the other may not move. In this case, the other non-moving movable parts 252a and 252b may be fixed as non-movable parts to the fixed part 251 or the main body of the measuring head 200 instead of the linear guide 251g.

  The drive circuits 256a and 256b are connected to the control board 210 of FIG. 3 and drive the drive units 255a and 255b based on the control by the control board 210, respectively. The reading units 257a and 257b are, for example, optical linear encoders. The reading unit 257a detects the relative position of the movable unit 252a with respect to the fixed unit 251 by reading the driving amount of the driving unit 255a, and gives the detection result to the control board 210. The reading unit 257b detects the relative position of the movable unit 252b with respect to the fixed unit 251 by reading the driving amount of the driving unit 255b, and gives the detection result to the control board 210.

(4) Focusing Unit FIG. 6 is a schematic diagram illustrating the configuration of the focusing unit 260. As shown in FIG. 6, the focusing unit 260 includes a fixed unit 261, a movable unit 262, a movable lens 263, a driving unit 264, a driving circuit 265, and a reading unit 266. The movable part 262 is attached to the fixed part 261 so as to be movable along one direction. The movable lens 263 is attached to the movable part 262. The movable lens 263 is used as an objective lens, and gives a focus to the measurement light passing through itself.

  The measurement light output from the optical fiber 244 is guided to the scanning unit 270 in FIG. 3 through the movable lens 263. Further, a part of the measurement light reflected by the measurement object S in FIG. 3 passes through the scanning unit 270 and then is input to the optical fiber 244 through the movable lens 263.

  The drive unit 264 is, for example, a voice coil motor, and moves the movable unit 262 in one direction (advancing direction of the measurement light) with respect to the fixed unit 261 as indicated by a thick arrow in FIG. Thereby, the focus of the measurement light can be positioned on the surface of the measurement object S.

  The drive circuit 265 is connected to the control board 210 in FIG. 3 and drives the drive unit 264 based on the control by the control board 210. The reading unit 266 is, for example, an optical linear encoder, and detects the relative position of the movable unit 262 (movable lens 263) with respect to the fixed unit 261 by reading the driving amount of the driving unit 264. In addition, the reading unit 266 gives the detection result to the control board 210.

  A collimator lens that parallelizes the measurement light output from the optical fiber 244 may be disposed between the optical fiber 244 and the movable lens 263. In this case, the measurement light incident on the movable lens 263 is collimated, and the beam diameter of the measurement light does not change regardless of the movement position of the movable lens, so that the movable lens can be formed in a small size.

(5) Scanning Unit FIG. 7 is a schematic diagram showing the configuration of the scanning unit 270. As shown in FIG. 7, the scanning unit 270 includes deflection units 271 and 272, drive circuits 273 and 274, and reading units 275 and 276. The deflecting unit 271 is configured by a galvanometer mirror, for example, and includes a driving unit 271a and a reflecting unit 271b. The drive unit 271a is, for example, a motor having a rotation axis in a substantially vertical direction. The reflection part 271b is attached to the rotating shaft of the drive part 271a. The measurement light that has passed through the focusing unit 260 from the optical fiber 244 in FIG. 3 is guided to the reflecting unit 271b. As the driving unit 271a rotates, the reflection angle of the measurement light reflected by the reflecting unit 271b changes in a substantially horizontal plane.

  The deflecting unit 272 is configured by, for example, a galvano mirror, similarly to the deflecting unit 271, and includes a driving unit 272a and a reflecting unit 272b. The drive unit 272a is, for example, a motor having a horizontal rotation shaft. The reflection part 272b is attached to the rotating shaft of the drive part 272a. The measurement light reflected by the reflection part 271b is guided to the reflection part 272b. As the driving unit 272a rotates, the reflection angle of the measurement light reflected by the reflecting unit 272b changes in a substantially vertical plane.

  As described above, when the driving units 271a and 272a are rotated, the measurement light is scanned in two directions orthogonal to each other on the surface of the measurement object S in FIG. Thereby, measurement light can be irradiated to an arbitrary position on the surface of the measuring object S. The measurement light applied to the measurement object S is reflected by the surface of the measurement object S. A part of the reflected measurement light is sequentially reflected by the reflection part 272b and the reflection part 271b, and then guided to the focusing part 260 in FIG.

  The drive circuits 273 and 274 are connected to the control board 210 of FIG. 3 and drive the drive units 271a and 272a based on the control by the control board 210, respectively. The reading units 275 and 276 are, for example, optical rotary encoders. The reading unit 275 detects the angle of the reflecting unit 271b by reading the driving amount of the driving unit 271a, and gives the detection result to the control board 210. The reading unit 276 detects the angle of the reflection unit 272b by reading the driving amount of the driving unit 272a, and gives the detection result to the control board 210.

(6) Operation Mode The optical scanning height measuring apparatus 400 in FIG. 1 operates in an operation mode selected by the user from a plurality of operation modes. Specifically, the operation mode includes a setting mode, a measurement mode, and a height gauge mode. FIG. 8 is a diagram illustrating an example of the selection screen 341 displayed on the display unit 340 of the optical scanning height measuring apparatus 400.

  As shown in FIG. 8, a setting button 341a, a measurement button 341b, and a height gauge button 341c are displayed on the selection screen 341 of the display unit 340. When the user operates the setting button 341a, the measurement button 341b, and the height gauge button 341c using the operation unit 330 of FIG. 1, the optical scanning height measuring device 400 operates in the setting mode, the measurement mode, and the height gauge mode, respectively.

  In the following description, among users, a skilled user who manages the measurement work of the measurement object S is referred to as a measurement manager, and the user who performs the measurement work of the measurement object S under the management of the measurement manager. Is appropriately called a measurement operator. The setting mode is mainly used by the measurement manager, and the measurement mode is mainly used by the measurement operator.

  Here, in the optical scanning height measuring apparatus 400, a three-dimensional coordinate system unique to the space including the measurement region V in FIG. 2 is defined in advance by the X axis, the Y axis, and the Z axis. Here, the X axis and the Y axis are parallel to the optical surface plate 111 of FIG. 2 and orthogonal to each other, and the Z axis is orthogonal to the X axis and the Y axis. In each operation mode, coordinate data specified by the coordinate system and plane coordinate data on an image acquired by imaging by the imaging unit 220 are transmitted between the control unit 310 and the control board 210. FIG. 9 is a diagram illustrating the contents of data transmitted between the control unit 310 and the control board 210 in each operation mode.

  In the setting mode, the measurement manager can register information about the desired measurement object S in the optical scanning height measurement device 400. Specifically, the measurement manager places a desired measurement object S on the optical surface plate 111 of FIG. 2, and images the measurement object S by the imaging unit 220 of FIG. Further, the measurement manager designates a portion to be measured of the measuring object S displayed on the display unit 340 in FIG. 1 as a measurement point on the image. In this case, as shown in FIG. 9A, the control unit 310 gives the control board 210 the plane coordinates (Ua, Va) specified by the measurement point designated on the image.

  The control board 210 specifies the three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement region V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Yc, Zc) is given to the controller 310. The control unit 310 stores the three-dimensional coordinates (Xc, Yc, Zc) given by the control board 210 in the storage unit 320 of FIG. Further, the control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 and information such as a reference plane described later, and the calculation result Is stored in the storage unit 320.

  The measurement mode is used to measure the height of the portion corresponding to the measurement point for the measurement object S of the same type as the measurement object S whose information is registered in the optical scanning height measurement device 400 in the setting mode. . Specifically, the measurement operator places the measurement object S of the same type as the measurement object S whose information is registered in the optical scanning height measurement device 400 in the setting mode on the optical surface plate 111, and performs imaging. The image is taken by the unit 220. In this case, as shown in FIG. 9B, the control unit 310 gives the three-dimensional coordinates (Xc, Yc, Zc) stored in the storage unit 320 to the control board 210 in the setting mode.

  Based on the acquired three-dimensional coordinates (Xc, Yc, Zc), the control board 210 calculates the three-dimensional coordinates (Xb, Yb, Zb) of the part of the measuring object S corresponding to the measurement point. In addition, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control board 210 and information such as a reference plane described later. Further, the control unit 310 displays the calculation result on the display unit 340 of FIG.

  As described above, in the measurement mode, the measurement operator can obtain the height of the position without specifying the portion to be measured of the measurement object S. Therefore, even when the measurement operator is not skilled, the shape of a desired portion of the measurement object can be easily and accurately measured. In addition, since the three-dimensional coordinates (Xc, Yc, Zc) are stored in the storage unit 320 in the setting mode, in the measurement mode, the measurement points are handled based on the stored three-dimensional coordinates (Xc, Yc, Zc). The part to be performed can be specified at high speed.

  In the present embodiment, the three-dimensional coordinates (Xc, Yc, Zc) corresponding to the plane coordinates (Ua, Va) are specified and stored in the storage unit 320 in the setting mode, but the present invention is not limited to this. . In the setting mode, the plane coordinates (Xc, Yc) corresponding to the plane coordinates (Ua, Va) are specified, and the Z-axis component Zc need not be specified. In this case, the specified plane coordinates (Xc, Yc) are stored in the storage unit 320. In the measurement mode, the plane coordinates (Xc, Yc) stored in the storage unit 320 are given to the control board 210.

  The height gauge mode is used for the user to specify a desired portion of the measurement object S as a measurement point on the screen while checking the measurement object S on the screen and measure the height of the portion. Specifically, the user places a desired measurement object S on the optical surface plate 111 and images the measurement object S by the imaging unit 220. Further, the user designates a portion to be measured on the image of the measuring object S displayed on the display unit 340 as a measurement point. In this case, as shown in FIG. 9C, the control unit 310 provides the control board 210 with the plane coordinates (Ua, Va) specified by the measurement point designated on the image.

  The control board 210 specifies the three-dimensional coordinates (Xc, Yc, Zc) of the position corresponding to the plane coordinates (Ua, Va) in the measurement region V of FIG. 2, and specifies the specified three-dimensional coordinates (Xc, Yc, Based on Zc), the three-dimensional coordinates (Xb, Yb, Zb) of the part of the measuring object S corresponding to the measurement point are calculated. In addition, the control board 210 gives the calculated three-dimensional coordinates (Xb, Yb, Zb) to the control unit 310. The control unit 310 calculates the height of the portion corresponding to the measurement point based on the three-dimensional coordinates (Xb, Yb, Zb) given by the control board 210 and information such as a reference plane described later, and displays the calculation result. Displayed on the part 340.

  Coordinate conversion information and position conversion information are stored in advance in the storage unit 320 of FIG. The coordinate conversion information indicates the plane coordinates (Xc, Yc) corresponding to the plane coordinates (Ua, Va) at each position in the height direction (Z-axis direction) in the measurement region V. Further, the control board 210 can irradiate the measurement light to a desired position in the measurement region V by controlling the positions of the movable parts 252a and 252b in FIG. 5 and the angles of the reflection parts 271b and 272b in FIG. it can. The position conversion information indicates the relationship between the coordinates in the measurement region V, the positions of the movable parts 252a and 252b, and the angles of the reflecting parts 271b and 272b.

  The control system configured by the control unit 310 and the control board 210 uses the coordinate conversion information and the position conversion information, thereby using the three-dimensional coordinates (Xc, Yc, Zc) and the three-dimensional coordinates (Xb) of the position corresponding to the measurement point. , Yb, Zb) can be specified. Details of the coordinate conversion information and the position conversion information will be described later.

(7) Control System of Optical Scanning Height Measuring Device (a) Overall Configuration of Control System FIG. 10 is a block diagram showing a control system of the optical scanning height measuring device 400 of FIG. As shown in FIG. 10, the control system 410 includes a reference image acquisition unit 1, a position information acquisition unit 2, a drive control unit 3, a reference plane acquisition unit 4, an allowable value acquisition unit 5, a registration unit 6, and a deflection direction acquisition unit 7. , A detection unit 8 and an image analysis unit 9 are included. The control system 410 includes a reference position acquisition unit 10, a light reception signal acquisition unit 11, a distance information calculation unit 12, a coordinate calculation unit 13, a determination unit 14, a height calculation unit 15, a measurement image acquisition unit 16, a correction unit 17, An inspection unit 18 and a report creation unit 19 are further included.

  1 executes the system program stored in the storage unit 320, the functions of the components of the control system 410 are realized. In FIG. 10, a common process flow in all operation modes is indicated by a solid line, a process flow in the setting mode is indicated by a one-dot chain line, and a process flow in the measurement mode is indicated by a dotted line. The same applies to FIG. 35 described later. The process flow in the height cage mode is substantially the same as the process flow in the setting mode. Hereinafter, in order to facilitate understanding, each component of the control system 410 will be described separately in a setting mode and a measurement mode.

(B) Setting Mode The measurement manager places a desired measurement object S on the optical surface plate 111 in FIG. 2, and images the measurement object S by the imaging unit 220 in FIG. The reference image acquisition unit 1 acquires image data generated by the imaging unit 220 as reference image data, and displays an image based on the acquired reference image data on the display unit 340 of FIG. 1 as a reference image. The reference image displayed on the display unit 340 may be a still image or a moving image that is sequentially updated. The measurement manager can specify a portion to be measured as a measurement point on the reference image displayed on the display unit 340 and can also specify a reference point. The reference point is a point for determining a reference plane that serves as a reference when calculating the height of the measuring object S.

  The position information acquisition unit 2 receives the designation of the measurement point on the reference image acquired by the reference image acquisition unit 1, and acquires the position of the received measurement point (the above plane coordinates (Ua, Va)). Further, the position information acquisition unit 2 receives the specification of the reference point using the reference image, and acquires the position of the received reference point. The position information acquisition unit 2 can accept a plurality of measurement points, and can accept a plurality of reference points.

  The drive control unit 3 acquires the position of the measurement head 200 from the reading unit 133 of the elevating unit 130 in FIG. 3, and controls the drive circuit 132 in FIG. 3 based on the acquired position of the measurement head 200. Thereby, the measuring head 200 is moved to a desired position in the vertical direction. Further, the drive control unit 3 acquires the position of the movable lens 263 from the reading unit 266 of the focusing unit 260 in FIG. 6, and controls the drive circuit 265 in FIG. 6 based on the acquired position of the movable lens 263. Thereby, the movable lens 263 is moved so that the measurement light is focused near the surface of the measurement object S.

  Further, the drive control unit 3 drives the drive circuits 273 and 274 in FIG. 7 and the drive in FIG. 5 based on the position conversion information stored in the storage unit 320 in FIG. 1 and the position acquired by the position information acquisition unit 2. The circuits 256a and 256b are controlled. Thereby, the angles of the reflecting portions 271b and 272b of the deflecting portions 271 and 272 in FIG. 7 are adjusted, and the measurement light is irradiated to the portion of the measuring object S corresponding to the measurement point and the reference point. In addition, the optical path length of the reference light is adjusted such that the difference between the optical path length of the measuring light and the optical path length of the reference light is equal to or less than a certain value according to the change in the optical path length of the measuring light.

  As described later, the coordinates of the part of the measuring object S corresponding to the measurement point and the reference point are calculated by the coordinate calculation unit 13 by the operation of the drive control unit 3 described above. Details of the operation of the drive control unit 3 will be described later. Hereinafter, the process of calculating the coordinates of the part of the measurement object S corresponding to the measurement point will be described, but the process of calculating the coordinates of the part of the measurement object S corresponding to the reference point is also a measurement object corresponding to the measurement point. This is the same as the process of calculating the coordinates of the portion S.

  The reference plane acquisition unit 4 acquires a reference plane based on one or more coordinates calculated by the coordinate calculation unit 13 corresponding to one or more reference points acquired by the position information acquisition unit 2. The measurement manager can input an allowable value for the height of the measurement point acquired by the position information acquisition unit 2. The allowable value is used for the inspection of the measuring object S in the measurement mode described later, and includes a design value and a tolerance from the design value. The allowable value acquisition unit 5 receives the input allowable value.

  The registration unit 6 registers the reference image data acquired by the reference image acquisition unit 1, the position acquired by the position information acquisition unit 2, and the allowable value set by the allowable value acquisition unit 5 in association with each other. Specifically, the registration unit 6 causes the storage unit 320 to store registration information indicating the relationship between the reference image data, the measurement point, the position of the reference point, and the allowable value corresponding to each measurement value. A plurality of reference planes may be set. In this case, the registration unit 6 registers, for each reference plane, a reference point corresponding to the reference plane, a measurement point corresponding to the reference plane, and an allowable value corresponding to each measurement value.

  The deflection direction acquisition unit 7 acquires the angles of the reflection units 271b and 272b from the reading units 275 and 276 in FIG. The detection unit 8 detects the deflection direction of the deflection units 271 and 272 based on the angles of the reflection units 271b and 272b acquired by the deflection direction acquisition unit 7, respectively. In addition, when the imaging by the imaging unit 220 is continued, the measurement light on the measurement object S appears in the reference image. The image analysis unit 9 analyzes the reference image data acquired by the reference image acquisition unit 1. The detection unit 8 detects a plane coordinate indicating the irradiation position on the reference image of the measurement light deflected by the deflection units 271 and 272 based on the analysis result of the image analysis unit 9.

  The reference position acquisition unit 10 acquires the positions of the movable units 252a and 252b from the reading units 257a and 257b of the reference unit 250 in FIG. The light reception signal acquisition unit 11 acquires a light reception signal from the light reception unit 232d in FIG. The distance information calculation unit 12 performs predetermined calculation and processing on data indicating the relationship between the wavelength of the interference light and the amount of received light based on the light reception signal acquired by the light receiving unit 232d. This calculation and processing includes, for example, frequency axis conversion from wavelength to wave number and Fourier transform of wave number.

  The distance information calculation unit 12 outputs the measurement light emission position and the measurement target in the measurement head 200 of FIG. 2 based on the data obtained by the processing and the positions of the movable units 252a and 252b acquired by the reference position acquisition unit 10. Distance information indicating the distance from the measurement light irradiation position on the object S is calculated. The measurement light emission position of the measurement head 200 is, for example, the position of the port 245d of the fiber coupler 245 of FIG.

  The coordinate calculation unit 13 determines the irradiation position of the measurement light on the measurement object S based on the deflection direction of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xc, Yc, Zc) are calculated. The three-dimensional coordinates (Xc, Yc, Zc) of the measurement light irradiation position are composed of a coordinate Zc in the height direction and a plane coordinate (Xc, Yc) in a plane orthogonal to the height direction.

  The coordinate calculation unit 13 uses a triangulation method, for example, based on the planar coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the deflection direction of the deflection units 271 and 272. The three-dimensional coordinates of the irradiation position of the measurement light on the object S may be calculated. Alternatively, the coordinate calculation unit 13 is on the measurement object S based on the plane coordinates indicating the irradiation position on the reference image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. You may calculate the three-dimensional coordinate of the irradiation position of measurement light.

  The determination unit 14 determines whether or not the measurement light is irradiated to the portion of the measurement object S corresponding to the measurement point or a portion in the vicinity thereof. Specifically, the coordinate calculation unit 13 determines the plane coordinate (corresponding to the measurement point registered by the registration unit 6 based on the calculated height direction coordinate and the coordinate conversion information stored in the storage unit 320. The plane coordinates (Xa ′, Ya ′)) described later are acquired. Further, the determination unit 14 determines whether or not the plane coordinates (Xc, Yc) calculated by the coordinate calculation unit 13 are within a predetermined range from the plane coordinates (Xa ′, Ya ′) corresponding to the measurement point. judge.

  Alternatively, the image analysis unit 9 may specify the plane coordinates (plane coordinates (Uc, Vc) described later) of the measurement light irradiation position in the reference image by analyzing the reference image data. In this case, the determination unit 14 determines in advance the plane coordinates (Uc, Vc) of the measurement light irradiation position specified by the image analysis unit 9 from the plane coordinates (Ua, Va) of the measurement points registered by the registration unit 6. It is determined whether it is within the specified range.

  When the determination unit 14 determines that the measurement light is not irradiated to the portion of the measurement object S corresponding to the measurement point and the vicinity thereof, the drive control unit 3 moves the measurement light irradiation position. Thus, the drive circuits 273 and 274 in FIG. 7 and the drive circuits 256a and 256b in FIG. 5 are controlled. When the determination unit 14 determines that the measurement light is irradiated on the portion of the measuring object S corresponding to the measurement point or a portion in the vicinity thereof, the drive control unit 3 fixes the irradiation position of the measurement light. Thus, the drive circuits 273 and 274 and the drive circuits 256a and 256b are controlled.

  The coordinate calculation unit 13 gives the coordinates calculated for the reference point to the reference plane acquisition unit 4. The height calculation unit 15 uses the reference plane acquired by the reference plane acquisition unit 4 based on the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 corresponding to the measurement point. The height of the part of the measuring object S is calculated. For example, when the reference plane is a plane, the height calculation unit 15 determines the length from the reference plane to the three-dimensional coordinates (Xc, Yc, Zc) at the perpendicular to the reference plane passing through the three-dimensional coordinates (Xc, Yc, Zc). The height is calculated as the height. The height calculation unit 15 causes the display unit 340 to display the calculated height. The registration unit 6 uses the three-dimensional coordinates (Xc, Yc, Zc) calculated by the coordinate calculation unit 13 and the height calculated by the height calculation unit 15 as reference image data, measurement point positions, reference point positions, and Register as registration information in association with the allowable value.

(C) Measurement mode The measurement operator places the measurement object S of the same type as the measurement object S in which the registration information is registered in the setting mode on the optical surface plate 111 of FIG. The image is taken by 220. The measurement image acquisition unit 16 acquires the image data generated by the imaging unit 220 as measurement image data, and causes the display unit 340 of FIG. 1 to display an image based on the acquired measurement image data as a measurement image.

  The correction unit 17 corrects the deviation of the measurement image data from the reference image data based on the registration information registered by the registration unit 6. Thereby, the correction unit 17 sets the measurement point and the reference point corresponding to the registration information registered by the registration unit 6 in the measurement image data.

  The drive control unit 3 controls the drive circuits 273 and 274 in FIG. 7 and the drive circuits 256a and 256b in FIG. 5 based on the registration information registered by the registration unit 6 in the setting mode. Accordingly, the coordinate calculation unit 13 calculates the three-dimensional coordinates of the portion of the measurement object S corresponding to the measurement point and the reference point set by the correction unit 17. Here, since the drive control unit 3 performs control based on the three-dimensional coordinates and height registered in the setting mode, the coordinate calculation unit 13 corresponds to the measurement points and reference points set by the correction unit 17. The three-dimensional coordinates of the part of the measuring object S can be calculated efficiently.

  The processes of the deflection direction acquisition unit 7 and the detection unit 8 in the measurement mode are the same as the processes of the deflection direction acquisition unit 7 and the detection unit 8 in the setting mode, respectively. The image analysis unit 9 in the measurement mode performs the image analysis in the setting mode except that the measurement image data acquired by the measurement image acquisition unit 16 is used instead of the reference image data acquired by the reference image acquisition unit 1. This is the same as the processing of the unit 9. The processing of the reference position acquisition unit 10, the light reception signal acquisition unit 11, and the distance information calculation unit 12 in the measurement mode is the same as the processing of the reference position acquisition unit 10, light reception signal acquisition unit 11, and distance information calculation unit 12 in the setting mode. is there.

  The coordinate calculation unit 13 determines the irradiation position of the measurement light on the measurement object S based on the deflection direction of the deflection units 271 and 272 detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. Three-dimensional coordinates (Xb, Yb, Zb) are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on the plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position may be calculated. The three-dimensional coordinates (Xb, Yb, Zb) of the measurement light irradiation position are composed of a coordinate Zb in the height direction and a plane coordinate (Xb, Yb) in a plane orthogonal to the height direction.

  The processing of the determination unit 14 in the measurement mode includes a point using the measurement point set by the correction unit 17 instead of the measurement point registered by the registration unit 6 and a tertiary instead of the three-dimensional coordinates (Xc, Yc, Zc). Except for using the original coordinates (Xb, Yb, Zb), the processing is the same as the processing of the determination unit 14 in the setting mode. As a result, the coordinate calculation unit 13 calculates the coordinates corresponding to the reference point set by the correction unit 17.

  The reference plane acquisition unit 4 acquires a reference plane based on the coordinates corresponding to the reference point calculated by the coordinate calculation unit 13. The height calculation unit 15 is a part of the measuring object S based on the reference plane acquired by the reference plane acquisition unit 4 based on the three-dimensional coordinates (Xb, Yb, Zb) calculated by the coordinate calculation unit 13. Calculate the height of.

  The inspection unit 18 inspects the measurement target S based on the height of the portion of the measurement target S calculated by the height calculation unit 15 and the allowable value registered in the registration unit 6. Specifically, when the calculated height is within a tolerance range based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective product. On the other hand, when the calculated height is outside the tolerance range based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  The report creation unit 19 creates a report based on the inspection result by the inspection unit 18 and the reference image acquired by the measurement image acquisition unit 16. Thereby, the measurement operator can easily report the height measurement value or the inspection result of the measurement object S to the measurement manager or another user using the report. The report is prepared according to a predetermined description format. FIG. 11 is a diagram illustrating an example of a report created by the report creation unit 19.

  11, the report 420 includes a name display field 421, an image display field 422, a status display field 423, a result display field 424, and a warranty display field 425. In the name display field 421, the name of the report 420 (“inspection report” in the example of FIG. 11) is displayed. In the image display field 422, a measurement image to be inspected is displayed. In the status display column 423, the name of the inspection object, the identification number of the inspection object, the name of the measurement operator, the inspection date and time, and the like are displayed.

  In the result display field 424, the inspection result for the inspection object is displayed. Specifically, in the result display field 424, names, measurement values, and determination results of various inspection items set as inspection targets are displayed in a list form in a state associated with design values and tolerances. The The guarantee display field 425 is a blank field for signing or stamping. The measurement operator and the measurement manager can guarantee the inspection result by signing or stamping the guarantee display field 425.

  The report creation unit 19 may create the report 420 only for the measurement object S determined as non-defective by the inspection unit 18. Such a report 420 is attached to the delivery document in order to guarantee the quality of the product when the product to be inspected is delivered to the customer. In addition, the report creation unit 19 may create the report 420 only for the measurement object S that is determined to be defective by the inspection unit 18. Such a report 420 is used in-house in order to analyze the cause of determining that the product to be inspected is defective.

  In the present embodiment, the result display field 424 of the report 420 displays the measurement value of the height of the part of the measurement object S and the determination result of the inspection item set for the part in association with each other. However, the present invention is not limited to this. Either one of the measurement value of the height and the determination result of the inspection item is displayed in the result display field 424 of the report 420, and the other may not be displayed.

(D) Height Gauge Mode A user places a desired measurement object S on the optical surface plate 111 in FIG. 2, and images the measurement object S by the imaging unit 220 in FIG. The reference image acquisition unit 1 acquires the image data generated by the imaging unit 220 and causes the display unit 340 of FIG. 1 to display an image based on the acquired image data. The user designates a portion to be measured as a measurement point on the image displayed on the display unit 340.

  The position information acquisition unit 2 receives the designation of the measurement point on the image acquired by the reference image acquisition unit 1, and acquires the position of the received measurement point (the above plane coordinates (Ua, Va)). Further, the position information acquisition unit 2 receives the specification of the reference point using the reference image, and acquires the position of the received reference point. The position information acquisition unit 2 can accept a plurality of measurement points, and can accept a plurality of reference points.

  Based on the position conversion information stored in the storage unit 320 in FIG. 1 and the position acquired by the position information acquisition unit 2, the drive control unit 3 drives the drive circuits 273 and 274 in FIG. 7 and the drive circuit 256a in FIG. , 256b. Thereby, the measurement light is irradiated to the part of the measurement object S corresponding to the measurement point and the reference point, and the optical path length of the reference light is adjusted.

  The coordinates of the part of the measuring object S corresponding to the measurement point and the reference point are calculated by the coordinate calculation unit 13 by the operation of the drive control unit 3 described above. The reference plane acquisition unit 4 acquires a reference plane based on the coordinates calculated by the coordinate calculation unit 13 corresponding to the reference points acquired by the position information acquisition unit 2.

  The deflection direction acquisition unit 7, the detection unit 8, the image analysis unit 9, the reference position acquisition unit 10, the received light signal acquisition unit 11, and the distance information calculation unit 12 in the height gauge mode are processed by the deflection direction acquisition unit 7 and the detection unit in the setting mode. 8, the processing of the image analysis unit 9, the reference position acquisition unit 10, the received light signal acquisition unit 11, and the distance information calculation unit 12 is the same.

  The coordinate calculation unit 13 performs measurement on the measurement object S based on the deflection direction of the deflection units 271 and 272 detected by the detection unit 8 or the irradiation position of the measurement light and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the light irradiation position are calculated. The coordinate calculation unit 13 measures the measurement light on the measurement object S based on the plane coordinates indicating the irradiation position on the measurement image of the measurement light detected by the detection unit 8 and the distance information calculated by the distance information calculation unit 12. The three-dimensional coordinates (Xb, Yb, Zb) of the irradiation position may be calculated. The processes of the determination unit 14 and the height calculation unit 15 in the height gauge mode are the same as the processes of the determination unit 14 and the height calculation unit 15 in the setting mode, respectively.

(8) Overall Operation Flow of Control System FIGS. 12 to 15 are flowcharts showing an example of the optical scanning height measurement process executed in the optical scanning height measuring apparatus 400 of FIG. A series of processes described below are executed at regular intervals by the control unit 310 and the control board 210 when the power of the optical scanning height measuring apparatus 400 is in an on state. The optical scanning height measurement process includes a designated measurement process and an actual measurement process described later. In the following description, the designated measurement process and the actual measurement process in the optical scanning height measurement process are executed by the control board 210, and other processes in the optical scanning height measurement process are executed by the control unit 310. The invention is not limited to this. For example, all processes of the optical scanning height measurement process may be executed by the control board 210 or the control unit 310.

  In the initial state, it is assumed that the power source of the optical scanning height measuring device 400 is turned on with the measuring object S placed on the optical surface plate 111 of FIG. At this time, the selection screen 341 of FIG. 8 is displayed on the display unit 340 of FIG.

  When the optical scanning height measurement process is started, the control unit 310 determines whether the setting mode is selected by the operation of the operation unit 330 by the user (step S101). More specifically, the control unit 310 determines whether the user has operated the setting button 341a in FIG.

  When the setting mode is not selected, the control unit 310 proceeds to the process of step S201 in FIG. On the other hand, when the setting mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a setting screen 350 of FIG. 23 described later (step S102). On the setting screen 350, the reference image of the measurement region V of FIG. 2 acquired at a constant cycle by the imaging unit 220 is displayed in real time.

  In the optical scanning height measuring apparatus 400 according to the present embodiment, it is necessary to set the pattern image and the search area in the setting mode in order to realize the correction function of the correction unit 17 in FIG. The pattern image means an image of a part including at least the measurement object S in the entire area of the reference image displayed at the time point designated by the user. The search area means a range (a range within the imaging field of the imaging unit 220) in which a portion similar to the pattern image is searched in the measurement image in the measurement mode after the pattern image is set in the setting mode.

  Therefore, the control unit 310 determines whether or not a search area has been designated by the user's operation of the operation unit 330 (step S103). When the search area is not designated, control unit 310 proceeds to the process of step S105 described later. On the other hand, when a search area is designated, control unit 310 sets information by storing information on the designated search area in storage unit 320 (step S104).

  Next, the control unit 310 determines whether or not a pattern image has been designated by the user's operation of the operation unit 330 (step S105). When the pattern image is not designated, the control unit 310 proceeds to the process of step S107 described later. On the other hand, when a pattern image is designated, control unit 310 sets the information by storing the designated pattern image information in storage unit 320 (step S106). Note that the pattern image information includes information indicating the position of the pattern image in the reference image. A specific setting example of the pattern image and search area by the user will be described later.

  Next, the control unit 310 determines whether or not a search area and a pattern image have been set by the processes of steps S104 and S105 (step S107). When at least one of the search area and the pattern image is not set, control unit 310 returns to the process of step S103. On the other hand, when the search area and the pattern image are set, control unit 310 determines whether or not the reference plane setting has been accepted (step S108).

  When the setting of the reference plane is received in step S108, the control unit 310 determines whether or not a point is specified as a reference point on the reference image displayed on the display unit 340 by the operation of the operation unit 330 by the user. (Step S109). If the control unit 310 does not receive a point designation, the control unit 310 proceeds to the subsequent step S111. On the other hand, when receiving the designation of the point, the control unit 310 instructs the designated measurement process to the control board 210 and gives the plane coordinates (Ua, Va) specified by the point designated on the image (FIG. 9 (a)). Thereby, the control board 210 performs the designated measurement process (step S110) and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310. Details of the designated measurement process will be described later.

  Thereafter, the control unit 310 determines whether or not the specification of the point as the reference point has been completed by the user's operation of the operation unit 330 (step S111). If the point designation has not been completed, control unit 310 returns to the process of step S109. On the other hand, when the designation of the point is completed, the control unit 310 sets a reference plane based on one or a plurality of coordinates (Xc, Yc, Zc) acquired in the designated measurement process of step S110 (step S112). In this example, information indicating the coordinates of the reference plane based on the coordinates (Xc, Yc, Zc) corresponding to one or more reference points, for example, the plane coordinates (Xc, Yc) or each reference corresponding to each reference point Coordinates (Xc, Yc, Zc) corresponding to the points are stored in the storage unit 320.

  Here, the information indicating the coordinates of the reference plane may include a reference plane constraint condition for determining the reference plane. The reference surface constraint condition includes, for example, a condition that the reference surface is parallel to the placement surface, or that the reference surface is parallel to another surface stored in advance. In the case of the reference surface constraint condition that the reference surface is parallel to the placement surface, if the coordinates (Xb, Yb, Zb) for one reference point are specified, the plane represented by Z = Zb is acquired as the reference surface. Will be.

  The control unit 310 determines whether or not the accepted setting is a setting relating to the measurement of the measurement object S after the processing of step S112 or when the setting of the reference plane is not accepted in step S108 (step S121). . More specifically, control unit 310 determines whether or not the accepted setting is a setting that specifies a portion of measurement object S whose height is to be measured.

  If the accepted setting is not a setting related to measurement, the control unit 310 acquires information related to the setting by operating the operation unit 330 of the user and stores the information in the storage unit 320 (step S130). Examples of the information acquired here include information such as the allowable value, an index to be displayed on the measurement image in the measurement mode, and a comment. Thereafter, the control unit 310 proceeds to a process of step S126 described later.

  When the setting accepted in step S121 is a setting related to measurement, the control unit 310 has received a point designation as a measurement point on the reference image displayed on the display unit 340 by the operation of the operation unit 330 by the user. Is determined (step S122). If the control unit 310 does not receive a point designation, the control unit 310 proceeds to the subsequent step S124. On the other hand, when receiving the designation of the point, the control unit 310 instructs the control board 210 to perform a designated measurement process, as in the above-described step S110, and the plane coordinates specified by the designated point on the image ( Ua, Va). Thereby, the control board 210 performs the designated measurement process (step S123) and gives the coordinates (Xc, Yc, Zc) specified by the designated measurement process to the control unit 310.

  Thereafter, the control unit 310 determines whether or not the specification of the point as the measurement point is completed by the operation of the user operation unit 330 (step S124). If the point designation has not been completed, control unit 310 returns to the process of step S122.

  On the other hand, when the point designation is completed, the control unit 310 stores the coordinates (Xc, Yc, Zc) of one or a plurality of measurement points acquired in the designated measurement process in step S123 in the storage unit 320. A point is set (step S125).

  After any of the above-described steps S125 and S130, the control unit 310 determines whether setting completion has been commanded or a new setting has been commanded (step S126). When a new setting is instructed, that is, when setting completion is not instructed, control unit 310 returns to the process of step S108.

  On the other hand, when the completion of setting is instructed, control unit 310 registers the information set in any of steps S103 to S112, S121 to S125, and S130 as registration information in association with each other (step S127). Thereafter, the optical scanning height measurement process ends in the setting mode. The registered information file to be registered is stored in the storage unit 320 after being given a specific file name by the user. At this time, in any one of steps S103 to S112, S121 to S125, and S130, information temporarily stored in the storage unit 320 for setting may be deleted.

  Here, in step S127, when the reference plane is set by the processing in step S112, the control unit 310 determines the height of the measurement point based on the reference plane and the specified coordinates (Xc, Yc, Zc). The calculation result is included in the registration information. If the reference plane is already set at the time of step S125, the height of the measurement point is determined based on the set reference plane and the specified coordinates (Xc, Yc, Zc) in step S125. It may be calculated. In this case, the calculation result may be displayed on the setting screen 350 (FIG. 27) as the height of the measurement point.

  When the setting mode is not selected in step S101, the control unit 310 determines whether or not the measurement mode is selected by the operation of the operation unit 330 by the user (step S201). More specifically, the control unit 310 determines whether or not the measurement button 341b in FIG. 8 is operated by the user. When the measurement mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display the measurement screen 360 of FIG. 32 described later (step S202). On the measurement screen 360, a measurement image of the measurement region V of FIG. 2 acquired at a fixed period by the imaging unit 220 is displayed in real time.

  Next, the control unit 310 determines whether or not a registration information file is designated by the user's operation of the operation unit 330 (step S203). Specifically, it is determined whether or not the file name of the registration information has been designated by the user. If there is no file specification, control unit 310 is in a standby state until a file specification is received. On the other hand, when receiving the file designation, the control unit 310 reads the designated registration information file from the storage unit 320 (step S204). Note that if the designated registration information file is not stored in the storage unit 320, the control unit 310 may display information indicating that the designated file does not exist on the display unit 340.

  Next, the control unit 310 acquires registered pattern image information from the read registration information, and superimposes the acquired pattern image on the measurement image displayed on the display unit 340 (step S205). At this time, the control unit 310 acquires a search area in addition to the pattern image. As described above, the pattern image information includes information indicating the position of the pattern image in the reference image. Therefore, the pattern image is superimposed and displayed on the measurement image at the same position as that set in the setting mode.

  Here, the pattern image may be displayed translucently. In this case, the user can easily compare the measurement image of the measurement object S currently imaged with the reference image of the measurement object S acquired in the setting mode. In addition, the user can perform the positioning operation of the measuring object S on the optical surface plate 111.

  Next, the control unit 310 compares the pattern image with the measurement image (step S206). Specifically, the control unit 310 extracts the edge of the measurement object S in the pattern image as a reference edge, and searches for an edge having a shape corresponding to the reference edge in the acquired search area. To do.

  In this case, the edge portion of the measurement object S in the measurement image is considered to be most similar to the reference edge. Therefore, when the part of the measurement image most similar to the reference edge is detected, the control unit 310 calculates how much the detected part is deviated from the reference edge on the image, and the detected part is The amount of rotation from the reference edge on the image is calculated (step S207).

  Next, the control unit 310 acquires registered measurement point information from the read registration information, and corrects the acquired measurement point information based on the calculated deviation amount and rotation amount (step S208). These processes in steps S206 to S208 correspond to the function of the correction unit 17 in FIG. According to this configuration, even when the measurement object in the correction image is displaced or rotated with respect to the measurement object in the pattern image, the measurement point can be easily identified and corrected with high accuracy.

  Next, the control unit 310 instructs the control board 210 to perform actual measurement processing for each corrected measurement point, and gives the coordinates (Xc, Yc, Zc) of the corrected measurement point (FIG. 9B). reference). Thereby, the control board 210 performs the actual measurement process (step S209) and gives the coordinates (Xb, Yb, Zb) specified by the actual measurement process to the control unit 310. Details of the actual measurement process will be described later.

  Next, the control unit 310 acquires information on the registered reference plane, calculates the height of the measurement point based on the reference plane and the acquired coordinates (Xb, Yb, Zb), and measures the calculation result. The result is stored in the storage unit 320. Further, various processes according to other registered information are performed (step S210). As various processes according to other registered information, for example, when the registered information read includes an allowable value, it is determined whether or not the height calculation result is within a tolerance range set by the allowable value. There may be an inspection process for judging. Thereafter, the optical scanning height measurement process ends in the measurement mode.

  When the measurement mode is not selected in step S201 described above, the control unit 310 determines whether or not the height gauge mode is selected by the operation of the operation unit 330 by the user (step S211). More specifically, the control unit 310 determines whether or not the user has operated the height gauge button 341c in FIG. If the height gauge mode is not selected, control unit 310 returns to the process of step S101.

  On the other hand, when the height gauge mode is selected, the control unit 310 causes the display unit 340 of FIG. 1 to display a setting screen 350 of FIG. 25 described later (step S212). Thereafter, the control unit 310 sets a reference plane based on the operation of the operation unit 330 by the user (step S213). This setting process is the same as the process of steps S109 to S112 described above.

  After that, when receiving the designation of the point, the control unit 310 instructs the designated measurement processing to the control board 210 and gives the plane coordinates (Ua, Va) specified by the point designated on the image (FIG. 9 (c)). Thereby, the control board 210 performs designated measurement processing (step S214). Further, the control board 210 determines the positions of the movable parts 252a and 252b in FIG. 5 and the reflection parts 271b and 272b in FIG. 7 based on the coordinates (Xc, Yc, Zc) specified by the designated measurement process and the position conversion information. The measurement light is irradiated with the angle adjusted (step S215).

  Subsequently, the control board 210 determines the measurement target based on the light reception signal output from the light receiving unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. 5, and the deflection directions of the deflection units 271 and 272 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measuring light on the object S are calculated and given to the control unit 310 (step S216).

  In step S215, the control board 210 receives the light reception signal output from the light receiving unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. 5, and the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measurement light on the measurement object S may be calculated based on the plane coordinates indicating the irradiation position of the measurement light.

  Next, the control unit 310 acquires information on the set reference plane, and the measurement light is irradiated on the measurement object S based on the reference plane and the acquired coordinates (Xb, Yb, Zb). Is calculated and the calculation result is displayed on the display unit 340 as a measurement result. For example, when the reference plane is a plane, the control unit 310 extends from the reference plane to the coordinates (Xb, Yb, Zb) when the perpendicular of the reference plane passing through the acquired coordinates (Xb, Yb, Zb) is drawn. The length of the perpendicular is calculated as the height, and the calculation result is displayed on the display unit 340 as the measurement result. In addition, the control unit 310 measures the measurement object corresponding to the measurement point with the plane coordinate indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220 or the plane coordinate specified by the point specified on the image. A green “+” mark indicating that the height of the portion S has been calculated is displayed on the display unit 340 (step S217).

  Subsequently, the control unit 310 determines whether or not an additional point is designated by the user's operation of the operation unit 330 (step S218). When the additional point is designated, the control unit 310 returns to the process of step S214. As a result, the processes in steps S214 to S218 are repeated until no additional points are designated. If no additional points are specified, the optical scanning height measurement process ends in the height gauge mode.

  According to the height gauge mode described above, the user can designate a reference point and a reference plane by designating a point on the image. In addition, the user can acquire the height measurement result by designating the measurement point on the screen. Furthermore, the user can continue the measurement while maintaining the reference plane by designating a plurality of measurement points.

(9) Example of Designated Measurement Process FIGS. 16 and 17 are flowcharts showing an example of the designated measurement process by the control board 210. 18 and 19 are explanatory diagrams for explaining the designated measurement process of FIGS. 16 and 17. 18 (a), (b), (c) and FIGS. 19 (a), (b), the measuring object S placed on the optical surface plate 111 on the left side, the imaging unit 220, and the scanning unit. The positional relationship with 270 is shown in a side view, and an image displayed on the display unit 340 by the imaging of the imaging unit 220 is shown on the right side. The image displayed on the display unit 340 includes the image SI of the measurement object S. In the following description, the plane coordinates on the image displayed on the display unit 340 are referred to as screen coordinates.

  The control board 210 starts the designated measurement process by receiving a command for the designated measurement process from the control unit 310. Therefore, the control board 210 acquires screen coordinates (Ua, Va) given together with the command from the control unit 310 (step S301).

  On the right side of FIG. 18A, screen coordinates (Ua, Va) are shown on the image displayed on the display unit 340. Further, on the left side of FIG. 18A, the part of the measuring object S corresponding to the screen coordinates (Ua, Va) is indicated by a point P0.

  In step S301, the Z-axis component (the component in the height direction) of the coordinates of the point P0 corresponding to the screen coordinates (Ua, Va) is unknown. Therefore, the control board 210 assumes that the Z-axis component of the point P0 designated by the user is “Za” (step S302). In this case, as shown in FIG. 18B, the assumed Z-axis component does not always match the Z-axis component of the actually designated point P0.

  Next, the control board 210 calculates the plane coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the Z-axis component is “Za” based on the coordinate conversion information. (Step S303). Thereby, as shown in FIG. 18B, the coordinates (Xa, Ya, Za) of the virtual point P1 corresponding to the screen coordinates (Ua, Va) and the assumed Z-axis component are obtained. In this example, “Za” is an intermediate position in the Z direction in the measurement region V of FIG.

  Next, the control board 210 determines the positions of the movable parts 252a and 252b in FIG. 5 and the reflecting parts 271b and 272b in FIG. 7 based on the coordinates (Xa, Ya, Za) and the position conversion information obtained by the process in step S303. The measurement light is irradiated with the angle adjusted (step S304).

  In this case, if the Z-axis component assumed in step S302 is greatly deviated from the Z-axis component of the actually designated point P0, as shown in the left side view of FIG. The irradiation position of the measuring light on the object S is greatly deviated from the actually designated point P0. Therefore, the subsequent processing is performed.

  As a result of the processing in step S304, an irradiation portion (light spot) of measurement light emitted from the scanning unit 270 to the measurement object S appears on the image acquired by the imaging unit 220. In this case, the screen coordinates of the irradiated portion of the measurement light can be easily detected using image processing or the like. In the diagram on the right side of FIG. 18C, the measurement light irradiation portion (light spot) appearing on the image displayed on the display unit 340 is indicated by a circle.

  After the process of step S304, the control board 210 detects, as screen coordinates (Uc, Vc), the plane coordinates indicating the irradiation position of the measurement light on the image acquired by the imaging unit 220, and the reflection unit 271b, The deflection direction of the measurement light is detected from the angle 272b (step S305).

  Next, the control board 210 determines the coordinates of the irradiation position P2 of the measurement light on the measurement object S or the optical surface plate 111 based on the detected screen coordinates (Uc, Vc) and the deflection direction (Xc, Yc, Zc) (step S306).

  Here, as shown in FIG. 18C, when the irradiation position P2 is deviated from the point P0, the screen coordinates (Uc, Vc) are also deviated from the screen coordinates (Ua, Va). Therefore, the control board 210 calculates an error (Ua−Uc, Va−Vc) of the detected screen coordinate (Uc, Vc) with respect to the screen coordinate (Ua, Va), and the calculated error is determined in advance. It is determined whether or not it is within the determination range (step S307). The determination range used at this time may be settable by the user, or may be set in advance when the optical scanning height measuring apparatus 400 is shipped from the factory.

  In step S307, when the error (Ua−Uc, Va−Vc) is within the predetermined determination range, the control board 210 uses the coordinates (Xc, Yc, Zc) determined in the immediately preceding step S306 as the user. (Step S308), and the designated measurement process is terminated. Thereafter, the control board 210 gives the specified coordinates (Xc, Yc, Zc) to the control unit 310.

  If the error (Ua−Uc, Va−Vc) is outside the predetermined determination range in step S307, the control board 210 deflects the measurement light based on the error (Ua−Uc, Va−Vc). The direction is adjusted (step S309). Specifically, for example, the relationship between the error on the screen coordinates corresponding to the X axis and the Y axis and the angle to be adjusted of the reflection units 271b and 272b is stored in the storage unit 320 in advance as an error correspondence relationship. In addition, the control board 210, as shown by white arrows in FIG. 19A, is based on the calculated error (Ua−Uc, Va−Vc) and the error correspondence, and the deflection direction of the measurement light Tweak the.

  Thereafter, the control board 210 returns to the process of step S305. Thereby, after the deflection direction of the measurement light is finely adjusted, the processes of steps S305 to S307 are performed again. As a result, finally, as shown in FIG. 19B, when the error (Ua−Uc, Va−Vc) is within the determination range, the coordinates (Xc) corresponding to the measurement point designated by the user are obtained. , Yc, Zc).

  In this example, the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the process of step S306, but the present invention is not limited to this. The coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the processes of steps S405 and S406 in the designated measurement process of FIGS.

(10) Another Example of Designated Measurement Process FIGS. 20 and 21 are flowcharts showing another example of the designated measurement process performed by the control board 210. FIG. 22 is an explanatory diagram for explaining the designated measurement process of FIGS. 20 and 21. In each of FIGS. 22A and 22B, the positional relationship between the measuring object S placed on the optical surface plate 111 on the left side, the imaging unit 220, and the scanning unit 270 is shown in a side view, and the right side. The image displayed on the display part 340 by the imaging of the imaging part 220 is shown.

  When the designated measurement process is started, the control board 210 acquires screen coordinates (Ua, Va) given together with a command from the control unit 310 (step S401). Subsequently, the control board 210 assumes that the Z-axis component of the point P0 designated by the user is “Za” in the same manner as in step S302 described above (step S402). In this case, as in the example of FIG. 18B, the assumed Z-axis component does not necessarily match the Z-axis component of the actually designated point P0.

  Next, in the same way as the processing of step S303, the control board 210 has plane coordinates (Xa, Ya) corresponding to the screen coordinates (Ua, Va) when the Z-axis component is assumed “Za”. Is calculated (step S403). Further, similarly to the process of step S304 described above, the control board 210 performs the movable portions 252a, FIG. 5 based on the coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S403 and the position conversion information. The position of 252b and the angle of the reflection portions 271b and 272b in FIG. 7 are adjusted to irradiate the measurement light (step S404). In step S404, the relationship between the point P0 designated by the user and the irradiation position of the measurement light irradiated on the measurement object S is the same as the state shown in FIG. Thereafter, the subsequent processing is performed so that the irradiation position of the measurement light on the measurement object S coincides with or approaches the actually designated point P0.

  First, the control board 210 detects the positions of the movable parts 252a and 252b in FIG. 5 and detects the deflection direction of the measurement light from the angles of the reflecting parts 271b and 272b in FIG. 7 (step S405).

  Next, the control board 210 outputs the measurement light emission position and the measurement object S based on the positions of the movable parts 252a and 252b detected in the immediately preceding step S405 and the light reception signal acquired by the light reception part 232d in FIG. The distance to the measurement light irradiation position at is calculated. Further, the control board 210 coordinates the coordinates of the irradiation position P2 of the measurement light on the measurement object S or the optical surface plate 111 based on the calculated distance and the deflection direction of the measurement light detected in the immediately preceding step S405 ( Xc, Yc, Zc) (step S406).

  Through the processing in step S406, the Z-axis component “Zc” of the measurement light irradiation position P2 is estimated to be equal to or close to the Z-axis component of the point P0 designated by the user. . Therefore, the control board 210 calculates plane coordinates (Xa ′, Ya ′) corresponding to the screen coordinates (Ua, Va) when the Z-axis component is “Zc” based on the coordinate conversion information. (Step S407). Thereby, as shown in FIG. 22A, the screen coordinates (Ua, Va) and the coordinates (Xa ′, Ya ′, Zc) of the virtual point P3 corresponding to the assumed Z-axis component are obtained.

  Next, the control board 210 calculates an error (Xa′−Xc, Ya′−Yc) of the plane coordinate (Xc, Yc) of the irradiation position P2 with respect to the plane coordinate (Xa ′, Ya ′) of the virtual point P3. Then, it is determined whether or not the calculated error is within a predetermined determination range (step S408). The determination range used at this time may be settable by the user, or may be set in advance when the optical scanning height measuring apparatus 400 is shipped from the factory.

  If the error (Xa′−Xc, Ya′−Yc) is within the predetermined determination range in step S408, the control board 210 determines that the coordinates (Xc, Yc) of the irradiation position P2 determined in the immediately preceding step S406. , Zc) is specified as the coordinates designated by the user (step S409), and the designated measurement process is terminated. Thereafter, the control board 210 gives the specified coordinates (Xc, Yc, Zc) to the control unit 310.

  If the error (Xa′−Xc, Ya′−Yc) is outside the predetermined determination range in step S408, the control board 210 determines that the coordinates (Xa ′, X3) of the virtual point P3 obtained in the immediately preceding step S407 are obtained. Ya ′, Zc) is set as the coordinates (Xa, Ya, Za) to be irradiated with the measurement light in step S404 (step S410). Thereafter, the control board 210 returns to the process of step S404.

  Thereby, after the deflection direction of the measurement light is changed, the processes of steps S404 to S408 are performed again. As a result, finally, as shown in FIG. 22B, when the error (Xa′−Xc, Ya′−Yc) is within the determination range, coordinates corresponding to the measurement point designated by the user are obtained. (Xc, Yc, Zc) is specified.

  In this example, the coordinates (Xc, Yc, Zc) of the irradiation position P2 are calculated by the processing in steps S405 and S406, but the present invention is not limited to this. The coordinates (Xc, Yc, Zc) of the irradiation position P2 may be calculated by the process of step S306 in the designated measurement process of FIGS.

(11) Actual Measurement Processing The control board 210 starts actual measurement processing upon receiving an instruction for actual measurement processing from the control unit 310. When the actual measurement process is started, the control board 210 first acquires the coordinates (Xc, Yc, Zc) of the measurement point given together with the command from the control unit 310.

  Here, even if the measurement light is irradiated based on the coordinates (Xc, Yc, Zc) of the measurement point set in the setting mode and the position conversion information, depending on the shape of the measurement object S measured in the measurement mode. In some cases, the plane coordinates of the irradiation position of the measurement light on the measurement object S are greatly deviated from the coordinates of the measurement point.

  For example, if the Z-axis component of the part of the measuring object S corresponding to the measurement point is greatly deviated from “Zc”, the plane coordinates (Xc, Yc) of the measurement point where the plane coordinates of the irradiation position of the measurement light are also set ). Therefore, in the actual measurement process, the plane coordinates of the measurement light irradiation position are adjusted so as to fall within a certain range from the plane coordinates (Xc, Yc) of the measurement point.

  Specifically, for example, the control board 210 sets the screen coordinates corresponding to the coordinates (Xc, Yc, Zc) of the acquired measurement points as (Ua, Va), and then acquires the coordinates (Xc of the acquired measurement points). , Yc, Zc) are the coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S303 in FIG. Next, the control board 210 performs steps S304 to S308 in FIGS. Subsequently, the control board 210 determines the positions of the movable parts 252a and 252b in FIG. 5 and the reflecting parts 271b and 271b in FIG. 7 based on the coordinates (Xc, Yc, Zc) specified in the process in step S308 and the position conversion information. The measurement light is irradiated by adjusting the angle of 272b.

  Subsequently, the control board 210 determines the measurement target based on the light reception signal output from the light receiving unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measurement light on the object S are calculated and given to the control unit 310. Thereby, the actual measurement process ends. The control board 210 receives the light reception signal output from the light receiving unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. 5, and the irradiation position of the measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measurement light on the measurement object S may be calculated based on the plane coordinates indicating.

  Alternatively, the control board 210 may execute an actual measurement process as follows. For example, the control board 210 sets (Ua, Va) as the screen coordinates corresponding to the coordinates (Xc, Yc, Zc) of the acquired measurement points, and then acquires the coordinates (Xc, Yc, Zc) of the acquired measurement points. Is the coordinates (Xa, Ya, Za) of the virtual point P1 obtained by the process of step S403 in FIG. Next, the control board 210 performs the processing of steps S404 to S409 of FIGS. Subsequently, the control board 210 determines the positions of the movable parts 252a and 252b in FIG. 5 and the reflecting parts 271b and 271b in FIG. 7 based on the coordinates (Xc, Yc, Zc) specified in the process in step S408 and the position conversion information. The measurement light is irradiated by adjusting the angle of 272b.

  Thereafter, similarly to the above example, the control board 210 receives the light reception signal output from the light receiving unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. 5, and the deflection directions of the deflecting units 271 and 272 in FIG. Based on the above, the three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measuring light on the measuring object S are calculated and given to the control unit 310. Alternatively, the control board 210 receives the light reception signal output from the light receiving unit 232d in FIG. 4, the positions of the movable units 252a and 252b in FIG. 5, and the irradiation position of the measurement light on the image acquired by the imaging unit 220 in FIG. The three-dimensional coordinates (Xb, Yb, Zb) of the portion irradiated with the measurement light on the measurement object S are calculated based on the plane coordinates indicating, and provided to the control unit 310.

(12) Operation Example Using Setting Mode and Measurement Mode FIGS. 23 to 28 are diagrams for describing an operation example of the optical scanning height measurement apparatus 400 in the setting mode. Hereinafter, the user of the optical scanning height measuring apparatus 400 will be described by being distinguished as a measurement manager and a measurement operator.

  First, the measurement manager positions the measuring object S serving as a height measurement reference on the optical surface plate 111, and operates the setting button 341a in FIG. 8 using the operation unit 330 in FIG. Thereby, the optical scanning height measuring device 400 starts the operation in the setting mode. In this case, for example, as shown in FIG. 23, a setting screen 350 is displayed on the display unit 340 of FIG. The setting screen 350 includes an image display area 351 and a button display area 352. In the image display area 351, the image of the measuring object S that is currently captured is displayed as the reference image RI. In each of FIGS. 23 to 28 and FIGS. 29 to 34 to be described later, a contour indicating the shape of the measurement object S among the reference image RI displayed in the image display area 351 and the measurement image MI to be described later is shown. Indicated by a thick solid line.

  At the start of the setting mode, a search area button 352a, a pattern image button 352b, and a setting completion button 352c are displayed in the button display area 352. For example, the measurement manager operates the search area button 352a and performs a drag operation or the like on the image display area 351. Thereby, the search region SR is set as shown by the dotted line in FIG. Further, the measurement manager operates the pattern image button 352b, for example, and performs a drag operation or the like on the image display area 351. As a result, the pattern image PI can be set as indicated by the alternate long and short dash line in FIG.

  After setting the search region SR and the pattern image PI, the measurement manager operates the setting completion button 352c. Thereby, the setting of the search area SR and the pattern image PI is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, the index indicating the set search area SR and pattern image PI is removed. In the button display area 352, a point designation button 352d and a reference plane setting button 352e are displayed instead of the search area button 352a and the pattern image button 352b in FIG.

  The measurement manager operates the point designation button 352d and performs a click operation or the like on the image display area 351. Thereby, one or a plurality of (three in this example) reference points are designated as indicated by a “+” mark in FIG. Thereafter, the measurement manager operates the reference plane setting button 352e. Thereby, a reference plane including one or more designated reference points is set, and an index indicating the reference plane RF set in the image display area 351 is displayed as shown by a two-dot chain line in FIG. Here, when four or more reference points are designated, all four or more reference points are not necessarily included in the reference plane RF. In this case, the reference plane RF is set so that, for example, the distance between the plurality of reference points becomes smaller as a whole. Similarly, when a reference surface constraint condition for determining the reference surface is set, for example, the reference surface is parallel to the placement surface, or the reference surface is parallel to another surface stored in advance. When two or more reference points are designated in the case where two or more reference points are specified, it is not always necessary that all the two or more reference points are included in the reference plane RF. A plurality of reference planes RF may be set by repeating the operations of the point designation button 352d and the reference plane setting button 352e.

  Thereafter, the measurement manager operates the setting completion button 352c. Thereby, the setting of the reference plane RF is completed, and the display mode of the setting screen 350 is switched as shown in FIG. Specifically, in the image display area 351, an index indicating one or more reference points used for setting the reference plane RF is removed. In the button display area 352, an allowable value button 352g is displayed instead of the reference plane setting button 352e of FIG.

  The measurement manager operates the point designation button 352d and performs a click operation or the like on the image display area 351. Thereby, a measurement point is designated as shown by a “+” mark in FIG. At this time, when a plurality of reference planes RF are set, one selection is accepted from the plurality of reference planes RF set as the reference plane RF serving as a reference for the designated measurement point. Further, when the above-described designated measurement process is performed for the designated measurement point and the height of the part of the measurement object S corresponding to the measurement point can be calculated, the part of the measurement object S corresponding to the measurement point is calculated. The height is displayed on the image display area 351. At this time, the height of the portion of the measuring object S corresponding to the measurement point may be calculated by changing the color of the “+” mark to, for example, green.

  On the other hand, when the above-described designated measurement process is performed for the designated measurement point and the height of the part of the measurement object S corresponding to the measurement point cannot be calculated, an error message such as “FAIL” is displayed on the image display area 351. May be displayed. At this time, by changing the color of the “+” mark to, for example, red, it may be indicated that the height of the part of the measuring object S corresponding to the measurement point cannot be calculated.

  When a plurality of measurement points are designated, measurement path information may be designated. For example, it may be possible to set information such as setting a measurement path according to a specified order of a plurality of measurement points, or setting a measurement path that minimizes the measurement path.

  At the time of designating the measurement point, the measurement manager can further set the design value and tolerance as the tolerance value for each measurement point by operating the tolerance button 352g. Finally, the measurement manager operates the setting completion button 352c. Thereby, a series of information including a plurality of measurement points and allowable values is associated with each other and stored in the storage unit 320 as registered information. At this time, a specific file name is given to the registration information. This file name may be settable by the measurement manager.

  As shown in FIGS. 25 to 28, the reference image RI is superimposed and displayed on a reference point designated by the measurement manager and an index “+” indicating the position of the measurement point. Thereby, the measurement manager can easily confirm the designated reference point and measurement point by visually recognizing the index superimposed and displayed on the reference image RI of the measurement object S.

  Here, in the present invention, the order of setting the reference point and the measurement point in the setting mode is not limited to the above example. The setting of the reference point and the measurement point may be performed as follows.

  FIGS. 29 to 31 are diagrams for explaining another example of operation of the optical scanning height measuring apparatus 400 in the setting mode. In this example, after setting the search area SR and the pattern image PI, as shown in FIG. 29, the button display area 352 includes a setting completion button 352c, a point designation button 352d, a reference plane setting button 352e, an allowable value button 352g, a reference value A point setting button 352h and a measurement point setting button 352i are displayed.

  In this state, the measurement manager operates the point designation button 352d and performs a click operation or the like on the image display area 351. At this time, as shown by a “+” mark in FIG. 25, the measurement manager designates a plurality of (in this example, five) points that can be reference points or measurement points.

  Next, for each designated point, the measurement manager operates the reference point setting button 352h or the measurement point setting button 352i to determine whether to use the point as a reference point or a measurement point. Further, after determining one or more points as reference points, the measurement manager operates the reference plane setting button 352e. As a result, as shown in FIG. 30, one or a plurality of (three in this example) reference points are displayed in the image display area 351 as indicated by dotted “+” marks. Further, as indicated by a two-dot chain line, a reference plane based on one or more reference points is displayed. Further, one or a plurality of (two in this example) measurement points are displayed as indicated by a solid “+” mark.

  Thereafter, as shown in FIG. 31, the height of the portion of the measurement object S corresponding to the designated measurement point is displayed on the image display area 351. At this time, similarly to the above example, the measurement manager can set the design value and the tolerance as the allowable value for each measurement point by operating the allowable value button 352g. Finally, the measurement manager operates the setting completion button 352c.

  32 to 34 are diagrams for explaining an operation example of the optical scanning height measuring apparatus 400 in the measurement mode. The measurement operator positions the measuring object S to be measured for height on the optical surface plate 111 and operates the measurement button 341b in FIG. 8 using the operation unit 330 in FIG. Thereby, the optical scanning height measuring device 400 starts the operation in the measurement mode. In this case, for example, as shown in FIG. 32, a measurement screen 360 is displayed on the display unit 340 of FIG. The measurement screen 360 includes an image display area 361 and a button display area 362. In the image display area 361, an image of the measurement object S that is currently imaged is displayed as a measurement image MI.

  At the start of the measurement mode, a file reading button 362a is displayed in the button display area 362. The measurement operator operates the file reading button 362a to select the file name designated by the measurement manager. Thereby, registration information for height measurement corresponding to the measuring object S placed on the optical surface plate 111 is read.

  When the registration information is read, as shown in FIG. 33, the pattern image PI corresponding to the read registration information is superimposed and displayed on the measurement image MI in the image display area 361 in a translucent state. In addition, a measurement button 362b is displayed in the button display area 362. In this case, the measurement operator can position the measurement object S on the optical surface plate 111 at a more appropriate position while referring to the pattern image PI.

  Thereafter, the measurement operator performs a more accurate positioning operation of the measurement object S, and then operates the measurement button 362b. Thereby, the height from the reference plane of the plurality of portions of the measurement object S corresponding to the plurality of measurement points of the read registration information is measured. Further, when the read registration information includes an allowable value, the pass / fail determination of the corresponding portion of the measurement point is performed based on the allowable value.

  As a result, as shown in FIG. 34, the heights of the portions of the measuring object S respectively corresponding to the set measurement points are displayed on the image display area 361. In addition, on the button display area 362, the heights of the portions of the measuring object S corresponding to the set measurement points are displayed, and the quality determination result based on the allowable value is displayed as the inspection result.

(13) First Modification FIG. 35 is a block diagram showing a control system 410 of an optical scanning height measurement apparatus 400 according to a first modification. A difference between the control system 410 of FIG. 35 and the control system 410 of FIG. 10 will be described. As shown in FIG. 35, in the first modification, the control system 410 further includes a geometric element acquisition unit 20 and a geometric element calculation unit 21.

  In the setting mode, the geometric element acquisition unit 20 receives the specification of the geometric element related to the position of the measurement point acquired by the position information acquisition unit 2. Here, the geometric element relating to the position of the measurement point is various elements that can be calculated based on the coordinates of the portion of the measurement object S corresponding to the measurement point. For example, the flatness of a desired surface of the measurement object S Alternatively, the distance or angle of a plurality of portions of the measuring object S is included. An allowable value corresponding to the designated geometric element may be further input to the allowable value acquisition unit 5.

  The registration unit 6 registers the geometric element received by the geometric element acquisition unit 20 in association with the measurement point. When an allowable value corresponding to the geometric element is input to the allowable value acquisition unit 5, the registration unit 6 registers the allowable value received by the allowable value acquisition unit 5 in association with the geometric element. The coordinate calculation unit 13 further calculates coordinates related to the geometric element registered in the registration unit 6. The geometric element calculation unit 21 calculates the value of the geometric element registered in the registration unit 6 based on the coordinates related to the geometric element calculated by the coordinate calculation unit 13.

  In the measurement mode, the correction unit 17 further sets a geometric element corresponding to the registration information registered by the registration unit 6 in the measurement image data. The coordinate calculation unit 13 further calculates coordinates related to the geometric element set by the correction unit 17. The geometric element calculation unit 21 calculates the geometric element set by the correction unit 17 based on the coordinates related to the geometric element calculated by the coordinate calculation unit 13.

  According to this configuration, when the measurement manager designates the geometric element in the setting mode, the calculation result of the geometric element of the corresponding portion of the measurement object S can be obtained even in the measurement mode even if the measurement operator is not skilled. It can be obtained uniformly. This makes it possible to accurately and easily measure various geometric elements including the flatness or assembly size of the measuring object S.

  Further, when the allowable value corresponding to the geometric element is registered in the registration unit 6, the inspection unit 18 converts the geometric element calculated by the geometric element calculation unit 21 and the allowable value registered in the registration unit 6. Based on this, the measuring object S is further inspected. Specifically, when the calculated geometric element is within a tolerance range based on the design value, the inspection unit 18 determines that the measurement object S is a non-defective product. On the other hand, when the calculated geometric element is outside the tolerance range based on the design value, the inspection unit 18 determines that the measurement object S is a defective product.

  The report creation unit 19 creates the report 420 of FIG. 11 based on the inspection result by the inspection unit 18 and the reference image acquired by the measurement image acquisition unit 16. In this case, the report 420 describes the inspection results of various geometric elements other than the height. In the example of FIG. 11, in addition to the height of the portion of the measuring object S, the flatness, the step, and the angle are described as geometric elements. As a result, the measurement operator can inspect the assembly dimensions of the measurement object S and can easily report the inspection result to the measurement manager or another user using the report 420.

(14) Second Modification FIG. 36 is a schematic diagram showing the configuration of the optical unit 230 of the optical scanning height measuring apparatus 400 according to the second modification. As shown in FIG. 36, the optical unit 230 further includes, for example, a guide light source 233 that emits light in the visible region. The light emitted from the guide light source 233 is referred to as guide light. In addition, the light guide unit 240 further includes a half mirror 247.

  The half mirror 247 is disposed at a desired position on the optical path of the measurement light output from the port 245d of the fiber coupler 245 in FIG. 3, and guide light emitted from the guide light source 233 and measurement light output from the port 245d. Are superimposed. As a result, the guide light is scanned by the scanning unit 270 in FIG.

  According to this configuration, the user can easily recognize the irradiation position of light from the scanning unit 270 to the measurement object S by visually recognizing the irradiation position of the guide light on the measurement object S. Further, the imaging unit 220 in FIG. 3 can clearly capture the guide light on the measurement object S together with the measurement light. Accordingly, the image analysis unit 9 in FIG. 10 can more easily detect the plane coordinates indicating the irradiation position of the guide light on the reference image or the measurement image as the plane coordinates indicating the irradiation position of the measurement light. Note that the measurement light is typically infrared light having low coherence, and the imaging unit 220 typically cannot capture infrared light. In this case, the imaging unit 220 is irradiated with guide light. The position is imaged as the measurement light irradiation position.

  In the second modification, the guide light source 233 and the half mirror 247 are provided so that the guide light overlaps with the measurement light output from the port 245d of the fiber coupler 245, but the present invention is not limited to this. The guide light source 233 and the half mirror 247 may be provided so that the guide light overlaps with the emitted light output from the light emitting unit 231 in FIG. In this case, the half mirror 247 is disposed at a desired position on the optical path of the emitted light between the light emitting unit 231 and the port 245a of the fiber coupler 245.

  In the second modification, the guide light and the measurement light are superimposed by the half mirror 247, but the present invention is not limited to this. The measurement light is typically infrared light having low coherency, and the guide light has light in the visible region, and thus, for example, exhibits high reflectance for light having a wavelength shorter than the cutoff wavelength, For light having a wavelength longer than the cutoff wavelength, the guide light and the measurement light may be overlapped by a wavelength selective mirror such as a dichroic mirror exhibiting high transmittance. Further, the guide light and the measurement light may be overlapped by, for example, a fiber coupler and an optical fiber. In this case, the fiber coupler has a so-called 2 × 1 type configuration.

(15) Effect In the optical scanning height measurement apparatus 400 according to the present embodiment, the measurement manager can specify a measurement point on the reference image RI of the measurement object S in the setting mode. In the measurement mode, the height of the part of the measuring object S corresponding to the measurement point designated on the reference image RI is automatically calculated. For this reason, the skilled measurement manager designates the measurement point on the reference image RI of the measurement object S in the setting mode, so that the measurement object S can be handled even if the measurement operator is not skilled in the measurement mode. The calculation result of the height of the part can be obtained uniformly. Thereby, it becomes possible to measure the shape of the desired part of the measuring object S accurately and easily.

  Similarly, when the measurement manager inputs an allowable value corresponding to the measurement point in the setting mode, even if the measurement operator is not skilled in the measurement mode, the determination result of the quality of the measurement object S is made uniform. Can be obtained. Thereby, it becomes possible to inspect the measuring object S accurately and easily.

  When the position information acquisition unit 2 accepts a plurality of measurement point designations, the measurement light is irradiated to the portion of the measurement object S corresponding to the measurement point every time the measurement point designation is accepted, and the height of the measurement point is increased. Is calculated. The calculation of the height can be performed before the position information acquisition unit 2 receives the designation of the next measurement point. Thereby, the height of the several part of the measuring object S can be acquired at high speed.

(16) Other Embodiments (a) The height calculator 15 is the height of the portion of the measuring object S with respect to the origin in the inherent three-dimensional coordinate system defined in the optical scanning height measuring device 400. May be calculated. In this case, the user can acquire the absolute value of the height of the portion of the measuring object S in the unique three-dimensional coordinate system. The height calculation unit 15 includes a relative value calculation mode for calculating a relative value of height with reference to the reference plane, and an absolute value calculation mode for calculating an absolute value of height in a specific three-dimensional coordinate system. It may be selectively operable. In the absolute value calculation mode, the reference plane is not required, and therefore the reference point may not be specified.

  (B) The height calculation unit 15 may display an error message such as “FAIL” on the display unit 340 when the height of the part of the measurement object S corresponding to the measurement point cannot be calculated in the setting mode. . In this case, the measurement manager can recognize that the height of the part of the measuring object S corresponding to the measurement point cannot be calculated by visually recognizing the display unit 340. Thereby, the measurement manager changes the arrangement of the measurement object S or the optical scanning height measuring device 400 so that the height of the part of the measurement object S can be calculated, or the position of the measurement point to be designated. Can be changed.

  (C) The optical scanning height measurement apparatus 400 may be configured to be able to insert a drawing and a comment into a reference image acquired in the setting mode or a measurement image acquired in the measurement mode. Thereby, the measurement condition of the measuring object S can be recorded in more detail. In addition, the drawing and the comment inserted into the reference image may be registered as registration information.

  For example, a frame line indicating the search area set in the setting mode may be drawn on the reference image. In this case, in the measurement mode, the frame line is displayed on the measurement image. Thereby, in the measurement mode, it becomes easy for the measurement operator to place the measurement object S on the optical surface plate 111 so that the measurement object S is within the frame line displayed in the measurement image. As a result, it is possible to efficiently correct the deviation of the measurement image data with respect to the reference image data.

  (D) The reference image acquisition unit 1 may display the bird's-eye view on the display unit 340 by performing image processing on the acquired reference image. Similarly, the measurement image acquisition unit 16 may display the bird's-eye view on the display unit 340 by performing image processing on the acquired measurement image.

  (E) In the above embodiment, the reference image acquisition unit 1 and the measurement image acquisition unit 16 acquire the captured images of the measurement object S by the imaging unit 220 as the reference image and the measurement image, respectively. It is not limited. The reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire a CAD (Computer Aided Design) image of the measurement object S prepared in advance as a reference image and a measurement image, respectively.

  Alternatively, when the measurement light is irradiated to a plurality of parts of the measurement object S, the height calculation unit 15 can calculate the heights of the plurality of parts of the measurement object S. Therefore, the reference image acquisition unit 1 and the measurement image acquisition unit 16 may acquire a distance image of the measurement object S as a reference image and a measurement image, respectively, based on the heights of a plurality of portions of the measurement object S. .

  When a CAD image or a distance image is used as the reference image, the measurement manager recognizes the three-dimensional shape of the measurement object S and accurately designates a desired reference point and measurement point on the CAD image or the distance image. can do. When a distance image is used as the reference image and the measurement image, the distance image may be generated at high speed by reducing the resolution.

  (F) In the above embodiment, the measurement operator designates the registration information file at the start of the measurement mode, but the present invention is not limited to this. For example, an ID (Identification) tag corresponding to the registration information file may be attached to the measurement object S. In this case, when the ID tag is imaged together with the measurement object S at the start of the measurement mode, the registration information file corresponding to the tag is automatically specified. According to this configuration, the measurement operator does not need to specify the registration information file at the start of the measurement mode. Therefore, the process of step S203 in FIG. 15 is omitted.

  (G) In the above embodiment, the height of the measuring object S is calculated by the spectral interference method, but the present invention is not limited to this. The height of the measuring object S may be calculated by other methods such as a white interference method, a confocal method, a triangulation method, or a TOF (Time Of Flight) method.

  (H) In the above embodiment, the operation mode of the optical scanning height measurement device 400 includes a plurality of operation modes, and the optical scanning height measurement device 400 operates in the operation mode selected by the user. Is not limited to this. The operation mode of the optical scanning height measurement apparatus 400 may include only a single operation mode without including a plurality of operation modes, and the optical scanning height measurement apparatus 400 may operate in the operation mode.

  For example, the operation mode of the optical scanning height measuring apparatus 400 does not include the setting mode and the height cage mode, and the optical scanning height measuring apparatus 400 may operate in an operation mode similar to the measurement mode. In this case, the registration unit 6 in FIG. 10 or FIG. 35 operates as a registration information receiving unit, and receives registration information generated by another device. Thereby, the height calculation part 15 can calculate the height of the part of the measuring object corresponding to the measurement point which the received registration information shows. Moreover, the test | inspection part 18 can test | inspect the measuring object S based on the tolerance value which the received registration information shows.

  (I) In the above embodiment, the light guide unit 240 includes the optical fibers 241 to 244 and the fiber coupler 245, but the present invention is not limited to this. The light guide unit 240 may include a half mirror instead of the optical fibers 241 to 244 and the fiber coupler 245.

(17) Correspondence relationship between each constituent element of claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each part of the embodiment will be described. It is not limited.

  In the above embodiment, the optical scanning height measuring device 400 is an example of an optical scanning height measuring device, the light emitting unit 231 is an example of a light emitting unit, and the measuring object S is an example of a measuring object. The deflection units 271 and 272 are examples of the deflection unit. The light receiving unit 232d is an example of a light receiving unit, the reference image RI is an example of a reference image, the reference image acquisition unit 1 is an example of a reference image acquisition unit, and the position information acquisition unit 2 is an example of a position information acquisition unit. Yes, the registration unit 6 is an example of a registration information reception unit and a registration information generation unit, and the measurement image MI is an example of a measurement image.

  The measurement image acquisition unit 16 is an example of a measurement image acquisition unit, the correction unit 17 is an example of a correction unit, the drive control unit 3 is an example of a drive control unit, and the detection unit 8 is an example of a detection unit. The height calculation unit 15 is an example of a height calculation unit. The inspection unit 18 is an example of an inspection unit, the report 420 is an example of a report, the report creation unit 19 is an example of a report creation unit, the imaging unit 220 is an example of an imaging unit, and image analysis The unit 9 is an example of the first position specifying unit, and the determination unit 14 is an example of the first and second determination units.

  The geometric element calculation unit 21 is an example of a geometric element calculation unit, the display unit 340 is an example of a display unit, the coordinate calculation unit 13 is an example of a second position specifying unit and a coordinate calculation unit, and the reference plane RF is It is an example of a reference plane. The reference plane acquisition unit 4 is an example of a reference plane acquisition unit, the movable mirror 254c is an example of a reference body, the light guide unit 240 is an example of a light guide unit, and the reading units 257a and 257b are reference position acquisition units. This is an example, and the spectroscopic unit 232b is an example of the spectroscopic unit.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for various optical scanning height measuring devices.

DESCRIPTION OF SYMBOLS 1 Reference image acquisition part 2 Position information acquisition part 3 Drive control part 4 Reference plane acquisition part 5 Allowable value acquisition part 6 Registration part 7 Deflection direction acquisition part 8 Detection part 9 Image analysis part 10 Reference position acquisition part 11 Light reception signal acquisition part 12 Distance information calculation unit 13 Coordinate calculation unit 14 Judgment unit 15 Height calculation unit 16 Measurement image acquisition unit 17 Correction unit 18 Inspection unit 19 Report creation unit 20 Geometric element acquisition unit 21 Geometric element calculation unit 100 Stand unit 110 Installation unit 111 Optical Surface plate 120 Holding unit 130 Lifting unit 131, 255a, 255b, 264, 271a, 272a Drive unit 132, 256a, 256b, 265, 273, 274 Drive circuit 133, 257a, 257b, 266, 275, 276 Reading unit 200 Measuring head 210 Control board 220 Imaging unit 230 Optical unit 231 Light emitting unit 232 Measuring unit 2 32a, 232c, 246 Lens 232b Spectroscopic unit 232d Light receiving unit 233 Guide light source 240 Light guide unit 241 to 244 Optical fiber 245 Fiber coupler 245a to 245d Port 245e Main unit 247 Half mirror 250 Reference unit 251 261 Fixed unit 251g Linear guide 252a, 252b, 262 Movable part 253 Fixed mirror 254a-254c Movable mirror 260 Focusing part 263 Movable lens 270 Scanning part 271, 272 Deflection part 271b, 272b Reflection part 300 Processing device 310 Control part 320 Storage part 330 Operation part 340 Display part 341 Selection Screen 341a Setting button 341b, 362b Measurement button 341c Height gauge button 350 Setting screen 351 Image display area 352 Button display area 352a Search area button 352b Pattern image button 352c Setting complete button 352d Point designation button 352e Reference plane setting button 352g Tolerance button 352h Reference point setting button 352i Measurement point setting button 360 Measurement screen 361 Image display area 362 Button display area 362a File reading button 400 Optical scanning height Length measuring device 410 Control system 420 Report 421 Name display field 422 Image display field 423 Status display field 424 Result display field 425 Warranty display field MI measurement image P0 point P1, P3 Virtual point P2 Irradiation position PI pattern image RF reference plane RI reference Image S Measurement object SI Image SR Search area V Measurement area

Claims (16)

A light emitting portion for emitting light;
A deflecting unit that deflects the light emitted from the light emitting unit and irradiates the measurement object;
A light receiving unit that receives light from the measurement object and outputs a light reception signal indicating the amount of light received;
A registration information receiving unit that receives registration information indicating a relationship between a reference image indicating a measurement object and a measurement point on the reference image;
A measurement image acquisition unit that acquires an image showing a measurement object as a measurement image;
The position on the measurement image corresponding to the measurement point on the reference image is corrected based on the comparison between the reference image of the registration information received by the registration information reception unit and the measurement image acquired by the measurement image acquisition unit. A correction unit identified as a measurement point;
A drive control unit that controls the deflection unit so that light is irradiated to a portion of the measurement object corresponding to the correction measurement point;
A detection unit for detecting a deflection direction of the deflection unit or an irradiation position of light deflected by the deflection unit;
A measurement object corresponding to the correction measurement point based on the deflection direction of the deflection unit detected by the detection unit or the irradiation position of the light deflected by the deflection unit and the light reception signal output by the light reception unit. An optical scanning height measuring device comprising: a height calculating unit that calculates the height of the portion. The registration information further includes an allowable value of the height of the part of the measurement object corresponding to the measurement point,
The optical scanning height measuring device determines whether or not the measurement object is good based on the height of the part of the measurement object calculated by the height calculation unit and the allowable value of the registration information received by the registration information reception unit. The optical scanning height measuring device according to claim 1, further comprising: an inspection unit that determines whether or not. The report creation part which creates the report on which the determination result of the measurement object by the inspection part and the measurement image which shows the measurement object acquired by the measurement image acquisition part are displayed is provided. The optical scanning height measuring apparatus as described. It further includes an imaging unit that images the measurement object,
The optical scanning height measurement apparatus according to claim 1, wherein the measurement image acquisition unit acquires an image of a measurement object generated by the imaging unit as a measurement image. The imaging unit further images the light on the measurement object,
The optical scanning height measuring device is:
A first position specifying unit that specifies an irradiation position of light in a captured image by the imaging unit;
A first determination unit that determines whether the irradiation position of the light specified by the first position specifying unit is within a predetermined range from the measurement point;
The optical scanning height measuring apparatus according to claim 4, wherein the drive control unit controls the deflection unit based on a determination result by the first determination unit. A second position specifying unit for specifying a planar position on the measurement object irradiated with light based on the detection result of the detection unit and the light reception signal output by the light receiving unit;
A second determination unit that determines whether or not the planar position on the measurement object specified by the second position specifying unit is within a predetermined range from the position corresponding to the measurement point; ,
The optical scanning height measuring device according to claim 1, wherein the drive control unit controls the deflection unit based on a determination result by the second determination unit. The optical scanning height measurement according to any one of claims 1 to 6, wherein the correction unit specifies the correction measurement point by translating or rotating the measurement image relative to a reference image. apparatus. The correction unit identifies the correction measurement point based on a comparison between the shape of the edge portion of the measurement object indicated by the reference image and the shape of the edge portion of the measurement object indicated by the measurement image. The optical scanning height measuring device according to any one of claims 7 to 9. The registration information further includes a geometric element related to the position of the measurement point,
The optical scanning height measuring device is configured to detect registration information received by the registration information receiving unit based on a deflection direction of the deflection unit detected by the detection unit or an irradiation position of light deflected by the deflection unit. The optical scanning height measurement apparatus according to claim 1, further comprising a geometric element calculation unit that calculates a value of a geometric element related to the position of the corrected measurement point corresponding to the geometric element. It is configured to operate selectively in setting mode and measurement mode,
In the setting mode, a reference image acquisition unit that acquires a reference image of the measurement object;
In the setting mode, a position information acquisition unit that receives designation of a measurement point on the reference image acquired by the reference image acquisition unit;
In the setting mode, registration information is generated by associating the reference image acquired by the reference image acquisition unit with the measurement point received by the position information acquisition unit, and the generated registration information is received as the registration information reception A registration information generation unit to be provided to the unit,
The registration information reception unit, the measurement image acquisition unit, the correction unit, the drive control unit, the detection unit, and the height calculation unit operate in the measurement mode, according to any one of claims 1 to 9. The optical scanning height measuring apparatus as described. The optical scanning height measurement device according to claim 10, wherein the position information acquisition unit superimposes and displays an index indicating the received position of the measurement point on the reference image acquired by the reference image acquisition unit. A display unit;
The drive control unit controls the deflection unit so that light is irradiated to a portion of the measurement object corresponding to the measurement point in the setting mode,
The detection unit detects a deflection direction of the deflection unit or an irradiation position of light deflected by the deflection unit in the setting mode,
The height calculation unit according to claim 10 or 11, wherein, in the setting mode, the height calculation unit calculates a height of a portion of the measurement object corresponding to the measurement point, and displays the calculated height on the display unit. Optical scanning height measuring device. The optical scanning height according to claim 12, wherein the height calculation unit displays an error message on the display unit when the height of the part of the measurement object corresponding to the measurement point cannot be calculated in the setting mode. measuring device. The registration information further includes one or more reference points on the reference image,
The correction unit corresponds to each of the one or more reference points on the reference image based on a comparison between the reference image received by the registration information receiving unit and the measurement image acquired by the measurement image acquisition unit. Specify the position on the measurement image as one or more correction reference points,
The drive control unit controls the deflection unit so that light is irradiated to a part of the measurement object corresponding to the one or more correction reference points specified by the correction unit,
The optical scanning height measuring device is:
A coordinate calculation unit that calculates coordinates corresponding to points on a reference image of registration information based on a detection result of the detection unit and a light reception signal output by the light reception unit;
A reference plane acquisition unit that acquires a reference plane based on coordinates corresponding to the one or more correction reference points calculated by the coordinate calculation unit;
The height calculation unit calculates the height of the part of the measurement object based on the reference plane acquired by the reference plane acquisition unit based on the coordinates corresponding to the measurement point calculated by the coordinate calculation unit. The optical scanning height measuring device according to any one of claims 1 to 13, which calculates. Has a predetermined unique coordinate system,
The optical scanning height measuring device according to any one of claims 1 to 14, wherein the height calculating unit calculates the height of a portion of the measuring object with reference to the origin in the unique coordinate system. A reference body arranged to be movable along a first movement axis;
The light emitted from the light emitting unit is guided to the deflecting unit as measurement light, and the light emitted from the light emitting unit is guided to the reference body as reference light, from the measurement object reflected by the deflecting unit. A light guide unit that generates interference light between the measurement light and the reference light reflected by the reference body, and guides the generated interference light to the light receiving unit;
A reference position acquisition unit for acquiring the position of the reference body;
A spectroscopic unit that splits the interference light generated by the light guide unit,
The light emitting unit emits light that is temporally low coherent,
The deflecting unit deflects the measurement light guided by the light guide unit to irradiate the measurement target, and reflects the measurement light from the measurement target to the light guide unit,
The light receiving unit receives the interference light split by the spectroscopic unit, and outputs a light reception signal indicating the amount of interference light received;
The height calculation unit is configured to determine the height of the portion of the measurement object based on the position of the reference body acquired by the reference position acquisition unit and the amount of received interference light in the light reception signal output from the light reception unit. The optical scanning height measuring device according to any one of claims 1 to 15, wherein

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