JP2018095940A - Deposition determination apparatus, deposition determination method and deposition determination system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a deposition determination apparatus capable of determining the quality of deposition regardless of color of a coat applied onto an inner surface of a vessel; and to provide a deposition determination method and a deposition determination system.SOLUTION: A deposition determination apparatus 15 includes: a color tone acquisition part 14 for acquiring a color tone of an index body after applying deposition by a film deposition apparatus 13 to the inner surface of a vessel having the index body formed on the inner surface, whose color tone is changed by a radical material; and a determination part for determining the quality of deposition on the vessel, based on the color tone of the index body acquired by the color tone acquisition part 14.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a film formation determination apparatus, a film formation determination method, and a film formation determination system that determine the quality of film formation applied to a container.

  As a method for determining the quality of film formation in a container in which a film has been formed, a method is known in which the color of a container before film formation is compared with the color of a container after film formation using a color difference sensor. (For example, refer to Patent Document 1). According to this method, it can be determined that the film is formed when the color difference between the containers before and after the film formation is within a predetermined range. That is, the method described in Patent Document 1 is effective when the film generated by film formation is colored.

Japanese Patent Laid-Open No. 2003-72762

  However, in the technique of Patent Document 1, when the coating film generated by film formation is colorless, it is difficult to determine whether the film formation is good or not because there is no color difference between the containers before and after film formation.

  The present invention has been made to solve the above-described problem, and is a film formation determination apparatus, a film formation determination method, and a film formation determination system capable of determining the quality of film formation regardless of the color of the film. The purpose is to provide.

In order to solve the above problems, the present invention employs the following means.
That is, the film formation determination apparatus according to one aspect of the present invention is an index body after film formation is performed by the film formation apparatus on the inner surface of the container in which the index body whose color tone is changed by the radical substance is formed on the inner surface. A color tone acquisition unit that acquires the color tone of the container, and a determination unit that determines the quality of the film formation of the container based on the color tone of the index body acquired by the color tone acquisition unit.

  According to this configuration, by using the index body whose color tone changes depending on the radical substance, the color tone of the index body changes when film formation is performed on the inner surface of the container. The change in the color tone of the index body can be acquired by the color tone acquisition unit, and the quality of the film formation can be determined.

  Further, in the film formation determination apparatus according to the second aspect of the present invention, the determination unit has a difference between the color tone of the index body before film formation and the color tone of the index body after film formation input in advance to the determination unit. A film formation determination apparatus that determines that the film formation of the container is good when it is equal to or greater than a predetermined threshold may be used.

  Further, in the film formation determination apparatus according to the third aspect of the present invention, the color tone acquisition unit further includes an index body exposed to a substance different from the substance used in the film formation apparatus in addition to the index body after film formation. When the difference between the color tone input in advance to the determination unit and the color tone of the index body after film exposure to a material different from the material used in the film formation apparatus is equal to or less than a predetermined threshold It may be a film formation determination apparatus that determines that the film formation of the container is good.

  According to this configuration, it is possible to determine the quality of the film formation from the color tone of the index body even when the film formation performed previously does not change the color tone of the index body. Specifically, once the film formation is successful, the index body is coated, and therefore the color tone of the index body does not change even when film formation is performed using a different substance. For this reason, the quality of the film formation can be determined by the color tone of the index body not changing.

  Further, in the film formation determination apparatus according to the fourth aspect of the present invention, the determination unit may be a film formation determination apparatus that determines the quality of film formation based on a physical quantity and a color tone at the time of film formation of the container. Good.

  According to this configuration, the quality of film formation can be determined with higher accuracy based on the physical quantity and color tone during film formation on the inner surface of the container.

  In addition, in the film formation determination method according to the fifth aspect of the present invention, the film formation apparatus performs film formation on the inner surface of the container in which the indicator body whose color tone is changed by the radical substance is formed on the inner surface. The color tone of the front index body is acquired, and the film quality of the container is determined based on the color tone of the index body acquired by the color tone acquisition unit.

  In addition, the film forming determination system according to the sixth aspect of the present invention includes a device for attaching an index body whose color tone is changed by a radical substance to a container, a film forming device for forming a film on the inner surface of the container, and a film forming device. A film formation determination system including a determination unit that determines the quality of film formation from the color tone of the index body provided with a film.

  The film formation determination system according to the seventh aspect of the present invention includes a recognition unit that recognizes the index body and a branching unit that branches the container to which the index body is bonded to a line different from the product line. It may be a film determination system.

  In addition, the film formation determination system according to the eighth aspect of the present invention is a reading unit that reads a recognizable marking physically or electronically applied to a sample bottle, using a container to which an index body is bonded as a sample bottle. The film forming determination system may include a branch unit that branches the sample bottle recognized by the recognition unit into a line different from the product line.

  Further, the film formation determination system according to the ninth aspect of the present invention may be a film formation determination system in which the recognition unit recognizes the position information of the container of the index body.

  According to the film formation determination apparatus, film formation determination method, and film formation determination system of the present invention, the quality of film formation can be determined regardless of the color of the film formation.

1 is a schematic diagram of a film formation determination system according to a first embodiment. It is a flowchart showing operation | movement of the film-forming determination system which concerns on 1st Embodiment. It is a schematic block diagram which shows the software structure of the film-forming determination apparatus which concerns on 1st Embodiment. It is a flowchart which shows operation | movement of the film-forming determination apparatus which concerns on 1st Embodiment. It is the schematic which shows the structure of the film-forming determination system which concerns on 2nd Embodiment. It is a schematic block diagram which shows the software structure of the control apparatus which concerns on 2nd Embodiment. It is an external view which shows the example of a sample bottle. It is an operation | movement flowchart of the film-forming determination system which concerns on 2nd Embodiment. It is a flowchart which shows operation | movement of the control apparatus which concerns on 2nd Embodiment. It is a flowchart which shows operation | movement of the film-forming determination apparatus which concerns on 3rd Embodiment. It is a schematic block diagram which shows the structure of the computer which concerns on at least 1 embodiment.

[First embodiment]
Hereinafter, embodiments will be described in detail with reference to the drawings.

FIG. 1 is a schematic diagram of a film forming determination system according to the first embodiment.
The film formation determination system 10 includes an index body pasting device 11, a transfer device 12, a film formation device 13, a color tone acquisition device 14, and a film formation determination device 15.

  The indicator body attaching device 11 attaches an indicator body 21 that changes color in response to a radical substance to the inner surface of a container B that is a determination target of film formation. For example, the indicator body attaching device 11 attaches the indicator body 21 by inserting the indicator body 21 from the opening of the container B and pressing the indicator body 21 against the inner surface of the container B. The indicator 21 is an organic dye (for example, anthraquinone dye, azo dye, methine dye, leuco dye, etc.) that changes color in response to a radical substance, or a metal oxide particle (for example, color change in response to a radical substance). Metal oxide particles containing at least one element selected from the group consisting of Mo, W, Sn, V, Ce, Te and Bi. Such an index body 21 is usually used for confirming the completion of the plasma processing in the manufacturing process of the electronic device and the plasma processing for sterilization of medical instruments and the like. That is, the index body 21 is not assumed to be used in the technical field related to the quality determination of the film formation of the container B. The index body pasting device 11 delivers the bottle to the transfer device 12 after pasting the index body 21 to the container B. In another embodiment, the index body pasting device 11 may affix the index body 21 to the container B when the transfer device 12 is transporting the container B.

  The transfer device 12 is a device that receives the container B from the device that manufactures the container B, transfers the film to an external device (for example, a filling device) after film formation by the film formation device 13. The transfer device 12 is configured by, for example, a combination of a plurality of star wheels and a conveyor.

  The film forming apparatus 13 is an apparatus configured to be inserted into the opening of the container B held by the transfer apparatus 12. The film forming apparatus 13 is an apparatus for enclosing a target gas (for example, acetylene gas) in a vacuumed container B and coating the inner film of the container B with plasma generated by applying energy to the gas. The plasma generated by the film forming apparatus 13 includes radicals and ions.

  The color tone acquisition device 14 is a device that acquires the color tone of the index body 21 attached to the container B on which the film is formed. An image sensor such as a camera can be used as the color tone acquisition device 14. For example, the color tone acquisition device 14 acquires the color tone as an RGB value.

  The film formation determination apparatus 15 determines whether the film formation apparatus 13 has formed a film on the basis of the color tone acquired by the color tone acquisition apparatus 14.

FIG. 2 is a flowchart showing the operation of the film forming determination system 10 according to the first embodiment. The indicator body pasting device 11 attaches the indicator body 21 to the inner surface of the container B (step S1). The index body pasting device 11 delivers the container B to the transfer device 12. When the transfer apparatus 12 receives the container B from the index body pasting apparatus 11, the transfer apparatus 12 carries the container B to a place where the film forming apparatus 13 is provided (step S2). When the container B reaches the installation location of the film forming apparatus 13, the film forming apparatus 13 is inserted into the opening of the container B, and the film forming process for the container B is executed (step S3).
Specifically, the film forming apparatus 13 performs the film forming process according to the following procedure. First, the film forming apparatus 13 evacuates the inside of the container B. Next, the film forming apparatus 13 injects gas into the evacuated container B. Next, the film forming apparatus 13 generates discharge plasma on the inner surface of the container B by supplying high-frequency power to the electrode inserted into the container B. Thereby, a film is formed on the inner surface of the container B. Then, the film forming apparatus 13 is removed from the opening of the container B after exhausting the gas. When the film forming process by the film forming apparatus 13 is completed, the transfer apparatus 12 delivers the container B to the outside.
Next, the color tone acquisition device 14 acquires the color tone of the index body 21 attached to the container B (step S4). The color tone acquisition device 14 inputs color tone data indicating the acquired color tone to the film formation determination device 15. The film formation determination device 15 determines the quality of film formation based on the input color tone data, and displays the result (step S5).

FIG. 3 is a schematic block diagram illustrating a software configuration of the film forming determination apparatus 15 according to the first embodiment. The film formation determination device 15 includes a color tone input unit 51, a reference color tone storage unit 52, a color difference calculation unit 53, a film formation determination unit 54, and an output unit 55.
The color tone input unit 51 receives the input of the color tone acquired by the color tone acquisition device 14.
The reference color tone storage unit 52 stores reference color tone information indicating the color tone of the index body 21 before the film forming process is performed. The reference color tone information may be color tone information input in advance, or may use color tone information extracted from images taken before and after the index body 21 is pasted.
The color difference calculation unit 53 calculates a difference between the reference color information stored in the reference color storage unit 52 and the color tone input to the color input unit 51.
The film formation determination unit 54 determines the quality of film formation based on the result calculated by the color difference calculation unit 53. The film formation determination unit 54 determines that the film formation is good when the color tone difference calculated by the color difference calculation unit 53 is equal to or greater than the threshold value, and determines that the film formation is poor when the color difference is less than the threshold value. judge.
The output unit 55 outputs the determination result of the film forming determination unit 54. For example, the output unit 55 displays the determination result of the film forming determination unit 54 on the display.

FIG. 4 is a flowchart showing the operation of the film forming determination apparatus 15 according to the first embodiment.
When the color tone acquisition device 14 acquires the color tone of the index body 21, the color tone information indicating the color tone is input to the film forming determination device 15. The color tone input unit 51 of the film formation determination device 15 receives input of color tone information from the color tone acquisition device 14 (step S51). Next, the color difference calculation unit 53 acquires reference color tone information to be compared from the reference color tone storage unit 52 (step S52). Next, the color difference calculation unit 53 calculates a difference between the color tone input by the color tone input unit 51 and the read reference color tone information as a color difference (step S3).

  The film formation determination unit 54 determines whether or not the color difference calculated by the color difference calculation unit 53 is greater than or equal to a predetermined threshold (step S54). If the color difference is equal to or greater than the threshold (step S54: YES), the film formation determination unit 54 determines that the film formation is good, and the output unit 55 outputs a determination result indicating that the film formation is good ( Step S55). On the other hand, when the color difference is less than the threshold (step S54: NO), the film formation determination unit 54 determines that the film formation is defective, and the output unit 55 outputs a determination result indicating that the film formation is defective. (Step S56).

[Second Embodiment]
A second embodiment of the present invention will be described. The film formation determination system 10 according to the first embodiment performs film formation determination when the film formation apparatus 13 stops the product production line. On the other hand, the film formation determination system 10 according to the second embodiment makes it possible to perform film formation determination during operation of a product production line. In addition, the same code | symbol is attached | subjected about the structure similar to the said 1st Embodiment, and detailed description is abbreviate | omitted.

FIG. 5 is a schematic diagram showing the configuration of the film forming determination system 10 according to the second embodiment.
In the present embodiment, in addition to the configuration of the film forming determination system 10 of the first embodiment, the container discharge for discharging the sample bottle B2 to which the index body 21 is attached to a line (reject line 18) different from the product line 19. A device 17 is further provided. The container discharge device 17 is provided at the subsequent stage of the film forming device 13. The container discharge device 17 includes, for example, a negative pressure source, a suction cup connected to the negative pressure source, and an electromagnetic valve provided between the negative pressure source and the suction cup. The container discharge device 17 can receive the container B from the transfer device 12 by applying a suction cup to the container B to be discharged and opening the electromagnetic valve. The container discharge device 17 flows the received container B through the reject line 18.
The color tone acquisition device 14 according to the second embodiment acquires the color tone of the index body 21 provided on the reject line 18 and attached to the sample bottle B2 discharged to the reject line 18. The container B that has not been discharged to the reject line 18 is transferred from the transfer device 12 to a device related to the next process such as a filling device.
In the second embodiment, a control device 16 is provided instead of the film formation determination device 15 according to the first embodiment.

FIG. 6 is a schematic block diagram illustrating a software configuration of the control device according to the second embodiment.
The control device 16 performs film formation on the same line for the product bottle B1 and the sample bottle B2 shipped as products, and controls the operation of discharging only the sample bottle B2 to the reject line 18 different from the product line 19. Do. The control device 16 includes a sample bottle determination unit 61, a discharge instruction unit 62, a color tone input unit 51, a reference color tone storage unit 52, a color difference calculation unit 53, a film formation determination unit 54, and a stop instruction unit 63.

FIG. 7 is an external view showing an example of a sample bottle.
The sample bottle determination unit 61 determines whether each container B held by the transfer device 12 is a sample bottle B2. The sample bottle B2 is a container B to which an index body 21 is attached as shown in FIG. For example, the sample bottle determination unit 61 analyzes an image captured by a camera (not shown) that captures each container B held by the transfer device 12 and detects the container B to which the index body 21 is attached. You may determine whether it is B2. That is, the index body 21 is an example of marking for recognizing the sample bottle B2. At this time, the transfer device 12 can rotate the container B when the grasped container B passes through the field of view of the camera, so that the camera can reliably photograph the index body 21. In addition, for example, the sample bottle determination unit 61 receives an input of the sample ID related to the sample bottle B2 in advance, and determines whether the ID assigned to each container B matches the sample ID, whereby the sample bottle B2 May be determined. That is, ID is given as an example of marking for recognizing the sample bottle B2. Further, as shown in FIG. 7B, the sample bottle B2 may be provided with a physically visible marking 22 so that the operator can detect the sample bottle B2 visually. In this case, when the operator recognizes the container B with the marking 22, the operator inputs information indicating that the container B is the sample bottle B2 to the control device 16. In addition, even when the sample bottle determination unit 61 detects the index body 21 by analysis of a camera or the like, even if the sample bottle determination unit 61 fails to detect the index body 21 by attaching the marking 22, An operator can find the sample bottle B2. That is, by attaching the marking 22 to the sample bottle B2, it is possible to more reliably prevent the sample bottle B2 from being transferred to the product line 19.

  The discharge instruction unit 62 designates the container B determined to be the sample bottle B2 by the sample bottle determination unit 61, and outputs a discharge instruction for discharging the container B to the reject line 18 to the container discharge device 17. Further, the discharge instruction unit 62 may output a discharge instruction to discharge the container B determined to be defective in other checks to the container discharge device 17. Examples of other checks include an internal pressure of the container B at the time of evacuation and a check for the presence or absence of damage to the container B.

The stop instruction unit 63 outputs a stop instruction to the transfer device 12 and the film formation device 13 when the film formation determination unit 54 determines that the film formation is defective. The production line is stopped by the output of the stop instruction.
The color tone input unit 51, the reference color tone storage unit 52, the color difference calculation unit 53, and the film formation determination unit 54 have the same functions as those in the first embodiment.

FIG. 8 is an operation flowchart of the film forming determination system 10 according to the second embodiment.
The indicator body pasting device 11 attaches the indicator body 21 to the inner surface of the container B (step S101). The index body pasting device 11 delivers the container B to the transfer device 12. When the transfer device 12 receives the container B from the index body pasting device 11, the transfer device 12 carries the container B to the place where the film forming device 13 is provided (step S102). When the container B reaches the installation location of the film forming apparatus 13, the film forming apparatus 13 is inserted into the opening of the container B, and the film forming process for the container B is executed (step S103). The control device 16 determines whether or not the deposited container B is the sample bottle B2 (step S104). If the deposited container B is not the sample bottle B2 (step S104: NO), the transfer device 12 is transferred. Delivers the container B to the apparatus for the next process (step S105). On the other hand, when the film-formed container B is the sample bottle B2 (step S104: YES), the film-forming apparatus 13 outputs a discharge instruction to discharge the container B to the container discharge apparatus 17. Thereby, the container discharge device 17 discharges the container B to the reject line 18 (step S106).

The color tone acquisition device 14 acquires the color tone of the index body 21 attached to the container B discharged to the reject line 18 (step S107). The color tone acquisition device 14 inputs color tone data indicating the acquired color tone to the control device 16. The control device 16 determines the quality of film formation based on the input color tone data (step S108). When determining that the film formation is defective (step S108: YES), the control device 16 outputs a stop instruction to the transfer device 12 and the film formation device 13. As a result, the transfer device 12 and the film forming device 13 stop operating (step S109). When the film formation of the sample bottle B2 is poor, there is a high possibility that the other containers B are not properly formed. Therefore, according to the film formation determination system 10 according to the second embodiment, the production line can be quickly stopped when the film formation of the sample bottle B2 is defective.
On the other hand, when it is determined that the film formation is good (step S108: NO), the control device 16 ends the process without outputting a stop instruction.

FIG. 9 is a flowchart showing the operation of the control device according to the second embodiment. The control device 16 executes the following process for each container B.
The sample bottle determination unit 61 determines whether or not the target container B is the sample bottle B2 (step S151). When the target container B is not the sample bottle B2, the control device 16 ends the process related to the container B.
On the other hand, when the target container B is the sample bottle B2, a discharge instruction for discharging the target container B to the container discharge device 17 is output (step S152). As a result, the target container B is discharged to the reject line 18. When the color tone acquisition device 14 acquires the color tone of the index body 21 discharged to the reject line 18, the color tone acquisition device 14 inputs color tone information indicating the color tone to the film forming determination device 15. The color tone input unit 51 of the film formation determination device 15 receives input of color tone information from the color tone acquisition device 14 (step S153). Next, the color difference calculation unit 53 acquires reference color tone information to be compared from the reference color tone storage unit 52 (step S154). Next, the color difference calculation unit 53 calculates the difference between the value of the color tone information input to the color tone input unit 51 and the value of the read reference color information as a color difference (step S155).

The film formation determination unit 54 determines whether or not the color difference calculated by the color difference calculation unit 53 is greater than or equal to a predetermined threshold (step S156). When the color difference is equal to or greater than the threshold (step S156: YES), the film formation determination unit 54 determines that the film formation is good and ends the process related to the container B.
On the other hand, when the color difference is less than the threshold (step S156: NO), the film formation determination unit 54 determines that the film formation is defective, and the stop instruction unit 63 stops at the transfer device 12 and the film formation device 13. An instruction is output (step S157). As a result, it is possible to determine whether the film formation is good without stopping the production of the product during operation of the product production line. For this reason, film formation is determined at an arbitrary timing, product bottles are evaluated for each lot, and production of the container B is stopped when the film formation determination unit 54 determines that the film formation is defective. Can do.

  The color tone acquisition device 14 according to the second embodiment is provided in the reject line 18, but is not limited thereto. For example, the color tone acquisition device 14 according to another embodiment may be provided at the rear stage of the film forming apparatus 13 and the front stage of the container discharge device 17. That is, the sample bottle B2 may be discharged to the reject line 18 after it is determined whether or not the film formation is good.

[Third embodiment]
A third embodiment of the present invention will be described with reference to FIG. The film formation determination system 10 according to the first embodiment determines that film formation is good when the color tone of the index body 21 changes. On the other hand, when the generated coating is very thin, the amount of change in the color tone of the indicator body 21 is minute. Therefore, the film formation determination system 10 according to the third embodiment generates a plasma of a gas different from the gas used for film formation after film formation in the container B, and the film formation is performed when the color tone of the index body 21 is greatly changed. Is determined to be defective. That is, the film formation determination system 10 according to the third embodiment includes a plasma generation device (not shown). The plasma generator generates plasma in the bottle according to a different type of gas (for example, a rare gas) from the film forming apparatus 13 after film formation of the bottle. At this time, the color tone of the index body 21 is different when it reacts with the gas used by the film forming apparatus 13 and when it reacts with the plasma generated by the plasma generator. In addition, about the structure similar to the said 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

FIG. 10 is a flowchart showing the operation of the film forming determination apparatus according to the third embodiment.
The color tone acquisition device 14 acquires the color tone of the index body 21 after the plasma is generated by the plasma generator, and inputs the color tone information indicating the color tone to the film forming determination device 15. The color tone input unit 51 of the film formation determination device 15 receives input of color tone information from the color tone acquisition device 14 (step S251). Next, the color difference calculation unit 53 acquires reference color tone information to be compared from the reference color tone storage unit 52 (step S252). The reference color tone information stored in the reference color tone storage unit 52 according to the third embodiment is a color tone when the index body 21 reacts with the gas used by the film forming apparatus 13. The color tone acquired at this time may be color tone data stored in advance as a reference color tone, or may be obtained by acquiring the color tone of the index body after film formation. The color difference calculation unit 53 calculates the difference between the value of the color tone information input to the color tone input unit 51 and the value of the read reference color information as a color difference (step S253).

  The film formation determination unit 54 determines whether or not the color difference calculated by the color difference calculation unit 53 is greater than or equal to a predetermined threshold (step S254). When the color difference is equal to or smaller than the threshold (step S254: YES), the film formation determination unit 54 determines that the film formation is good, and the output unit 55 outputs a determination result that the film formation is good ( Step S255). On the other hand, when the color difference is larger than the threshold value (step S254: NO), the film formation determination unit 54 determines that the film formation is defective, and the output unit 55 outputs a determination result indicating that the film formation is defective. (Step S256).

  As described above, according to the film formation determination device 15 according to the present embodiment, the index body 21 after the film formation is further exposed to a material different from the material used in the film formation device 13, and the index body 21 Get the color tone and make a decision. Since the index body 21 used at this time has a film formed by a film forming process, the plasma does not directly contact the index body 21 even when exposed to plasma, so that the index body 21 is not discolored. Thereby, even when the produced | generated film | membrane is very thin and the variation | change_quantity of the color tone of the parameter | index body 21 is very small, the film-forming determination can be performed effectively.

  The film formation determination system 10 according to the third embodiment uses the color tone of the index body 21 after the film formation and before the plasma processing by the plasma generator is performed as the reference color tone information, but is not limited thereto. For example, the film formation determination system 10 according to another embodiment may use the color tone of the index body 21 when the index body 21 is exposed to the plasma generated by the plasma generator as the reference color tone information. In this case, the film formation determination device 15 determines that the film formation is good when the color difference calculated by the color difference calculation unit 53 is equal to or greater than the predetermined color difference, and performs film formation when the color difference is less than the predetermined threshold. It is determined to be defective.

  In addition, the film formation determination system 10 according to the third embodiment performs plasma processing using a plasma generator after film formation, but is not limited thereto. For example, in the case where the film formation of the container B according to another embodiment has failed, if the index body 21 exhibits some discoloration, the quality of the film formation is determined according to the flow shown in FIG. May be determined.

  Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment, and includes design changes and the like within a scope not departing from the gist of the present invention.

  The index body affixing device 11 according to the embodiment described above affixes the index body 21 by inserting the index body 21 from the opening of the container B and pressing the index body 21 against the inner surface of the container B, for example. At this time, the shape of the index body 21 may be a patch shape or a tape shape. When the index body 21 is in the form of a tape, the color tone acquisition device 14 can easily acquire the color tone of the index body 21 regardless of the rotation angle of the container B by circulating the index body around the inner wall of the container B. Also, the paint itself may be used as the indicator body 21.

FIG. 11 is a schematic block diagram illustrating a configuration of a computer according to at least one embodiment.
The computer 90 includes a CPU 91, a main storage device 92, an auxiliary storage device 93, and an interface 94.
Each of the film formation determination device 15 and the control device 16 includes a computer 90. The operation of each processing unit described above is stored in the auxiliary storage device 93 in the form of a program. The CPU 91 reads out the program from the auxiliary storage device 93 and develops it in the main storage device 92, and executes the above processing according to the program. Further, the CPU 91 secures a storage area corresponding to the above-described storage unit in the main storage device 92 according to the program.

  Examples of the auxiliary storage device 93 include HDD (Hard Disk Drive), SSD (Solid State Drive), magnetic disk, magneto-optical disk, CD-ROM (Compact Disc Read Only Memory), DVD-ROM (Digital Versatile Disc Read Only). Memory), semiconductor memory, and the like. The auxiliary storage device 93 may be an internal medium directly connected to the bus of the computer 90 or an external medium connected to the computer 90 via the interface 94 or a communication line. When this program is distributed to the computer 90 via a communication line, the computer 90 that has received the distribution may develop the program in the main storage device 92 and execute the above processing. In at least one embodiment, the auxiliary storage device 93 is a tangible storage medium that is not temporary.

  Further, the program may be for realizing a part of the functions described above. Further, the program may be a so-called difference file (difference program) that realizes the above-described function in combination with another program already stored in the auxiliary storage device 93.

DESCRIPTION OF SYMBOLS 10 Film formation determination system 11 Index body sticking apparatus 12 Transfer apparatus 13 Film formation apparatus 14 Color tone acquisition apparatus 15 Film formation determination apparatus 21 Index body 51 Color tone input part 52 Reference color storage part 53 Color difference calculation part 54 Film formation determination part 55 Output section

Claims (10)

A color tone input unit that acquires the color tone of the index body after film formation is performed by the film forming apparatus on the inner surface of the container in which the index body whose color tone is changed by the radical substance is formed;
A determination unit that determines the quality of film formation of the container based on the color tone of the index body acquired by the color tone input unit;
A film forming determination apparatus.   When the difference between the color tone of the index body before film formation input in advance to the determination unit and the color tone acquired by the color tone input unit is equal to or greater than a predetermined threshold value, the determination unit is good in film formation of the container The film formation determination apparatus according to claim 1, which determines that   When the difference between the color tone of the index body before film formation input in advance to the determination unit and the color tone acquired by the color tone input unit is less than a predetermined threshold, the determination unit is good in film formation of the container The film formation determination apparatus according to claim 1, which determines that   The color tone input unit further acquires a color tone of the index body exposed to a material different from a material used in the film forming apparatus on the index body after film formation. The film formation determination apparatus described in 1.   When the difference between the color tone acquired by the color tone input unit and the color tone of the indicator body when exposed to a material different from the radical material is equal to or greater than a predetermined threshold, the determination unit is good in film formation of the container. The film formation determination apparatus according to claim 3, wherein it is determined that there is a film formation.   4. The film formation determination apparatus according to claim 1, wherein the determination unit determines the quality of film formation based on a physical quantity and a color tone at the time of film formation of the container. Attaching an indicator body whose color tone changes depending on the radical substance on the inner surface of the container;
Forming a film on the inner surface of the container;
Obtaining a color tone of the indicator body after film formation;
Determining the quality of film formation of the container based on the acquired color tone of the indicator body;
A method for determining film formation. A device for attaching an indicator body whose color tone changes depending on the radical substance to the container;
A film forming apparatus for forming a film on the inner surface of the container;
And a determination unit that determines the quality of the film formation from the color tone of the index body formed by the film formation apparatus. The film forming determination system according to claim 8, further comprising: a branch portion that branches the container to which the index body is bonded to a line different from a product line. The container to which the indicator body is bonded is used as a sample bottle, and a recognizable marking that is physically or electronically applied to the sample bottle is read.
The film formation determination system according to claim 9, wherein the branching unit branches the sample bottle recognized by the reading unit into a line different from the product line.

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