JP2018094620A - Stainless steel material for diffusion joining jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stainless steel material for a diffusion joining jig, that suppresses deformation of materials to be joint while maintaining a diffusion joinability of the materials to be joint, and that is superior in releasability (detachability of the materials to be joint and a release member) after diffusion joining treatment.SOLUTION: Provided is a stainless steel material for a diffusion joining jig, which is a stainless steel material containing Si by 1.5 mass% or more, and in which a ratio (Fr/Fp) is 0.9 or higher between high temperature strength (Fr) of the stainless steel material at 1000°C and high temperature strength (Fp) at 1000°C of the materials to be joint by diffusion joining, and which is superior in deformation inhibition and detachability. The stainless steel material preferably comprises a composition containing, in mass%: 0.1% or less of C; 1.5-5.0% of Si; 2.5% or less of Mn; 0.06% or less of P; 0.02% or less of S; 8.0-15.0% of Ni; 13.0-23.0% of Cr; 0.2% or less of N; and the remainder consisting of Fe and inevitable impurities.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a stainless steel material for a diffusion bonding jig excellent in deformation suppression and releasability. The present invention also relates to a release member suitable for a manufacturing method using diffusion bonding.

  There are various types of heat exchangers. Among them, plate heat exchangers (flat plate heat exchangers) are widely used in electric water heaters, industrial equipment, automotive air conditioners, etc. because of their high heat exchange performance and easy installation and maintenance. Yes. The plate heat exchanger has a structure in which a plurality of thin metal plates (plates) are stacked, and a hot medium passage and a cold medium passage are alternately formed adjacent to each other between the stacked plates. A heat exchange action is performed between the high temperature medium and the low temperature medium through the plate.

  As a method of stacking and assembling a plurality of plates, for example, Patent Document 1 describes a joining method such as fastening with a gasket and a screw, welding, brazing, or the like. Small and medium-sized heat exchangers are often joined by brazing in consideration of pressure resistance. However, if plates with corrugated shapes are stacked and joined by brazing, there may be cases where joining problems peculiar to brazing materials occur, such as melting damage during cracking, cracking of the brazing part, channel burial due to molten brazing, etc. .

  Therefore, the application of a diffusion bonding method instead of the brazing method has been studied. Diffusion bonding is a method of bonding by utilizing mutual diffusion of base material atoms generated at a bonding interface under a high temperature pressure in a vacuum or an inert atmosphere. The joint part that has been diffusion-bonded has the same strength and corrosion resistance as the base material.

  When performing diffusion bonding, the stacked members to be bonded are pressed by a pressing means, and the pressed state is held for a predetermined time. In some cases, diffusion bonding is performed between a member to be bonded and a pressurizing unit with a release member such as a contact plate or a spacer interposed therebetween. As the mold release member, a carbon material is used because it is required to have heat resistance against the temperature during diffusion bonding and not to be damaged. For example, Patent Document 2 describes diffusion bonding means using a carbon sheet having elasticity.

JP 2010-85094 A JP 2014-128815 A

  By the way, from the viewpoint of improving the durability of the heat exchanger, a stainless steel plate having excellent corrosion resistance is used as a metal plate. When laminating plate materials made of stainless steel plates for diffusion bonding, if a carbon material is used as a release member adjacent to the plate material, the reaction between stainless steel and carbon occurs, so after completing the diffusion bonding process, the plate It becomes difficult to remove the release member from the material, and the release properties of both members are lowered. Further, due to the carburization of carbon permeating into the stainless steel, there is a problem that the corrosion resistance of the plate material is lowered, or the surface roughness of the plate material is increased and the surface properties are lowered.

  In addition, in diffusion bonding, it is necessary to apply pressure and heat to a material to be bonded using a hot press apparatus or the like, and therefore the plate of the material to be bonded is held under high pressure and high temperature. In addition, the plate material that forms the flow channel in the main body of the heat exchanger has a non-joint surface portion on the flow channel side, and therefore is less constrained from the surroundings than other plate materials ((( See A)). Therefore, for example, as shown in FIG. 3 (B), the heat of the diffusion bonding process may cause thermal deformation that causes the plate material to expand to the flow path side at the non-bonding surface portion, depending on the degree of the thermal expansion. However, even after cooling after completion of the diffusion bonding process, there was a problem that the deformed portion was not restored.

  The present invention has been devised to solve the above problems. Stainless steel for diffusion bonding jigs that suppresses deformation of the material to be bonded while maintaining the diffusion bonding property of the material to be bonded, and has excellent releasability after the diffusion bonding process (peelability between the material to be bonded and the release member). The purpose is to provide steel.

  The inventors paid attention to the material and characteristics of the release member that is in direct contact with the material to be joined (plate material). As a constituent material of the release member, it is found that the above object can be achieved by selecting a material that does not react with the material to be joined and is suitable for suppressing deformation after diffusion joining, and the present invention is completed. It came. Specifically, the present invention provides the following.

(1) The present invention is a stainless steel material containing 1.5 mass% or more of Si, and the high temperature strength (Fr) of the stainless steel material at 1000 ° C. and the high temperature at 1000 ° C. of the materials to be joined by diffusion bonding. It is a stainless steel material for a diffusion bonding jig having a ratio (Fr / Fp) to strength (Fp) of 0.9 or more and excellent deformation control and releasability.

(2) In the present invention, the stainless steel material is C: 0.1% by mass or less, Si: 1.5 to 5.0% by mass, Mn: 2.5% by mass or less, P: 0.06% by mass or less. S: 0.02% by mass or less, Ni: 8.0-15.0% by mass, Cr: 13.0-23.0% by mass, N: 0.2% by mass or less, with the balance being Fe and inevitable The stainless steel material for a diffusion bonding jig having excellent composition for suppressing deformation and releasability according to the above (1), which has a composition composed of mechanical impurities.

(3) In the present invention, the stainless steel material further includes Mo: 3.0 mass% or less, Cu: 4.0 mass% or less, Nb: 0.8 mass% or less, Ti: 0.5 mass% or less, V: 1.0 mass% or less, B: One or more types selected from 0.02 mass% or less, and the stainless steel material for a diffusion bonding jig excellent in deformation suppression and releasability according to (2) above It is.

(4) In the present invention, the stainless steel material further includes Al: 0.2% by mass or less, REM: 0.2% by mass or less, Y: 0.2% by mass or less, Ca: 0.1% by mass or less, Mg: The stainless steel material for a diffusion bonding jig according to (2) or (3), which includes one or more selected from 0.1% by mass or less and excellent in deformation suppression and releasability.

(5) This invention is a mold release member comprised with the stainless steel material in any one of said (1)-(4).

  By using a combination of a material to be bonded and a release member having the above-described configuration, the present invention suppresses the deformation of the material to be bonded while maintaining the diffusion bonding property of the material to be bonded. Thus, it is possible to provide a stainless steel material for a diffusion bonding jig that is excellent in releasability after being applied.

It is a schematic diagram for demonstrating embodiment of the to-be-joined material in a hot press apparatus. It is a figure which shows the pattern of the heating and cooling of the diffusion bonding process in an Example. It is a schematic diagram for demonstrating the measuring method of the deformation amount in an Example. (A) is a figure which shows the state which set the test assembly before diffusion joining, (B) is a figure which shows the state which the plate material after diffusion joining deform | transformed. It is a schematic diagram for demonstrating the measuring method regarding the mold release property in an Example.

  Hereinafter, embodiments of the present invention will be described. The present invention is not limited by these descriptions.

  The present embodiment relates to a diffusion bonding jig used in a method of manufacturing a heat exchanger in which a plurality of materials to be bonded made of stainless steel are stacked, heated and pressurized, and diffusion bonded to the materials to be bonded. In the manufacturing method described above, a release member is disposed on both surfaces of the material to be bonded, a press jig is disposed so as to sandwich the material to be bonded via the release member, and then the press jig is interposed. By pressing with a pressurizing device, the plate material, which is the material to be joined, is diffused and joined to produce a heat exchanger. In this embodiment, the release member of the diffusion bonding jig is disposed between the plate material and the holding jig.

(Material to be joined)
FIG. 1 shows an outline of a material to be joined to be subjected to diffusion bonding processing. As an apparatus for performing diffusion bonding, a hot press apparatus that can perform pressurization and heating in a predetermined atmosphere is used. A material to be bonded (plate material) to be diffusion-bonded is prepared as a stacked body in which a plurality of plate materials are stacked and loaded into a pressure heating apparatus. And a release member is arrange | positioned so that both surfaces of the said laminated body may be contact | connected. FIG. 1 shows an example using a plate laminate 2 in which four plate materials 1 are stacked. In the pressure heating apparatus, the holding jig 4 is arranged so as to be in contact with each of the two release members 3 arranged outside the plate laminate 2. The pressing jig 4 is connected to the pressing shaft 5 of the pressing device. When a pressurizing mechanism (not shown) is operated, the presser jig 4 presses the plate stack 2 through the pressurizing shaft 5, a predetermined pressure is applied to the plate material 1, and the pressurization state is maintained for a predetermined time. Retained. In a pressurizing and heating apparatus that maintains a vacuum or an inert atmosphere, the plate laminate 2 of the material to be joined is pressurized and heated under predetermined conditions, and the plate material 1 is diffusion bonded. The plate material is not limited to four. You may join the assembly which inserted the mold release member between each plate laminated body using several plate laminated body. Further, since the plate material 1 shown in FIG. 1 is provided with a flow path (not shown) in the two inner sheets, the thickness is larger than the two outer sheets. The combination of the flow paths is not limited to the structure shown in FIG.

  The pressurizing device may be any device provided with a pressurizing mechanism such as a servo, a spring, or a weight. A release agent may be applied to the surface of the release member before diffusion bonding so that the material to be joined and the release member can be easily removed after diffusion bonding.

  In a heat exchanger in which a plurality of plate materials are stacked, the fluid passes through a narrow flow path formed by the plate materials, and heat exchange is performed between the high temperature side fluid and the low temperature side fluid via each plate material. It is. Therefore, the plate material is required to have good mechanical strength (high temperature strength) and corrosion resistance in a high temperature range. From this point of view, this embodiment uses stainless steel having excellent heat resistance and durability for the plate material. Moreover, it is desirable to use a thin plate shape in order to improve the heat exchange performance.

(Release member)
In the present embodiment, it is preferable to use a release member made of a steel material containing 1.5% by mass or more of Si. Since the release member is placed under high temperature and high pressure in contact with the material to be bonded at the time of diffusion bonding, it is required that there is little damage or corrosion at high temperature and that it does not react with the material to be bonded. The release member according to the present embodiment is preferably configured using a steel material having a high Si content from the viewpoint of suppressing the reaction with the material to be joined.

(Si content)
The release member according to the present embodiment includes a steel material containing 1.5 mass% or more of Si. Si is an easily oxidizable element and forms a strong oxide film on the surface of the release member. Since the base material of the release member and the material to be joined are in contact with each other via the Si oxide film, the reaction at the interface between the release member and the material to be joined is inhibited. By forming this Si oxide film, adhesion and interface reaction between both members are suppressed, so that after the diffusion bonding process is completed, the release member can be easily removed from the material to be bonded with a small pulling force. . In addition, since the above-described Si oxide film also inhibits the components contained in the release member from penetrating into the material to be joined, while maintaining good heat resistance and corrosion resistance of the stainless steel to be joined, Smooth surface texture is maintained. From such a viewpoint, it is preferable that the release member includes a steel material containing 1.5% by mass or more of Si.

  In addition, even if a Si oxide film is formed on the surface of the release member, if the shape change of the release member due to an external load or thermal expansion / contraction is excessive, partial destruction of the oxide film may occur. There is. In that case, since the part which adhere | attaches a to-be-joined material and a mold release member without interposing the said oxide film arises, there exists a possibility that the mold release property of both members may fall. From this point of view, it is desirable to apply a steel material containing a certain amount or more of Si to the release member so that a stable and strong oxide film can be formed.

  Considering the mechanical strength and corrosion resistance in a high temperature environment, the constituent material of the release member according to this embodiment is preferably an austenitic stainless steel material having excellent heat resistance, durability, formability, etc. A steel material having the following composition can be used.

  (1) C: 0.1 mass% or less, Si: 1.5-5.0 mass%, Mn: 2.5 mass% or less, P: 0.06 mass% or less, S: 0.02 mass% or less , Ni: 8.0 to 15.0% by mass, Cr: 13.0 to 23.0% by mass, N: 0.2% by mass or less, with the balance being Fe and inevitable impurities.

  (2) Further, in the composition of (1), Mo: 3.0% by mass or less, Cu: 4.0% by mass or less, Nb: 0.8% by mass or less, Ti: 0.5% by mass or less, V : Stainless steel material containing 1 or more types selected from 1.0 mass% or less and B: 0.02 mass% or less.

  (3) Further, in the composition of (1) or (2), Al: 0.2% by mass or less, REM: 0.2% by mass or less, Y: 0.2% by mass or less, Ca: 0.1% by mass Hereinafter, Mg: a stainless steel material containing at least one selected from 0.1% by mass or less.

  The components contained in the above stainless steel material will be described.

  C improves the strength and hardness of steel by solid solution strengthening. On the other hand, when the C content is increased, the workability and toughness of the steel are lowered, so the C content is preferably 0.1% by mass or less.

  As described above, Si is blended in order to form a strong oxide film on the surface of the release member, and is preferably contained in an amount of 1.5% by mass or more. Since the reaction at the interface between the release member and the material to be joined is inhibited by the formed Si oxide film, the release member can be easily removed from the material to be joined with a small pulling force after diffusion bonding. In addition, the Si oxide film prevents the components contained in the release member from penetrating into the material to be joined, so that the good heat resistance and corrosion resistance of the material to be joined are maintained, and smooth surface properties are maintained. Is maintained. When the Si content is less than 1.5% by mass, the above-described effect due to the formation of the oxide film cannot be sufficiently obtained. In addition, even if it adds exceeding 5.0 mass%, while said effect will be substantially saturated, moderate workability will not be acquired by hardening, Therefore It should just contain 5.0 mass% or less.

  Mn is an element that improves high-temperature oxidation characteristics. If contained in excess, the Mn content is preferably 2.5% by mass or less in order to reduce workability by work hardening.

  Cr is an element that forms a passive film and imparts corrosion resistance, and improves corrosion resistance. If it is less than 13.0% by mass, the effect is not sufficient. When it exceeds 23.0 mass%, workability will fall. Therefore, the Cr content is preferably 13.0 to 23.0% by mass.

  Ni is an essential element for stabilizing the austenite phase and maintaining the corrosion resistance, and is also effective for workability. If the amount is less than 8.0% by mass, these effects are not sufficient. If the amount exceeds 15.0% by mass, the effect is saturated and the cost is high, so the Ni content is 8.0 to 15. 0% by mass is preferred.

  P and S are mixed as inevitable impurities. The lower the content, the better, and the P content is preferably 0.06% by mass or less and the S content is preferably 0.02% by mass or less as long as the workability and material properties are not adversely affected.

  N is effective as an austenite stable element, and improves the high-temperature strength and corrosion resistance of stainless steel together with Cr and Ni. On the other hand, if added excessively, the productivity is lowered, so the N content is preferably 0.2% by mass or less.

  Mo and Cu are elements that contribute to improvement in high-temperature strength and corrosion resistance. Both the Mo content and the Cu content are preferably 0.02% by mass or more. On the other hand, if Mo is excessively contained, there is a possibility that the ferrite phase is formed and the workability is lowered. Therefore, the Mo content is preferably 3.0% by mass or less. If Cu is excessively contained, it causes a decrease in hot workability, so the Cu content is preferably 4.0% by mass or less.

  Nb, Ti, and V are effective in improving the high temperature strength. The Nb content is preferably 0.01% by mass or more, the Ti content is preferably 0.01% by mass or more, and the V content is preferably 0.01% by mass or more. On the other hand, if each element is contained excessively, the workability is lowered, so the Nb content is preferably 0.8% by mass or less, the Ti content is preferably 0.5% by mass or less, and the V content. Is preferably 1.0% by mass or less.

  B is an element that improves hot workability. The B content is preferably 0.0002% by mass or more. On the other hand, if added excessively, boride precipitates and deteriorates workability, so the B content is preferably 0.02% by mass or less.

  One or more selected from Mo, Cu, Nb, Ti, V and B may be added.

  Al, REM (rare earth elements), Y, Ca, and Mg are effective in improving high-temperature oxidation resistance, and one or more selected from these elements may be added. The Al content is preferably 0.001% by mass or more, the REM content is preferably 0.001% by mass or more, the Y content is preferably 0.0002% by mass or more, and the Ca content is 0.0002%. The mass content is preferably at least, and the Mg content is preferably at least 0.0002 mass%. However, if each element is excessively contained, the workability is lowered. Therefore, the Al content is preferably 0.2% by mass or less, the REM content is preferably 0.2% by mass or less, and the Y content is 0.2 mass% or less is preferable, Ca content is preferably 0.1 mass% or less, and Mg content is preferably 0.1 mass% or less.

  The shape of the release member is appropriately selected according to the shape of the material to be joined. Since the plate material of the plate heat exchanger is generally plate-shaped, a release member disposed in contact with the plate material is used as a release plate. The plate thickness is preferably 2 to 10 mm, and more preferably 3 to 8 mm.

(High temperature strength ratio)
Furthermore, in this embodiment, the ratio (Fr / Fp) of the high temperature strength (Fr) at 1000 ° C. of the release member to the high temperature strength (Fp) at 1000 ° C. of the material to be joined is 0.9 or more. It is preferable to perform diffusion bonding using a combination of a material and a release member.

  Since the release member is sandwiched between the material to be joined and the pressing jig during diffusion bonding and exposed to high pressure and high temperature, deformation may occur when the release member has low high temperature strength. If the release member is deformed, the uniformity of the pressure applied to the material to be joined with the release member may be impaired, which may lead to a defective joint. Therefore, in the present embodiment, the high temperature characteristics of the release member were examined based on the high temperature strength at 1000 ° C. used as a standard processing temperature during diffusion bonding.

  Specifically, the evaluation was made based on the ratio (Fr / Fp) between the high temperature strength (Fr) at 1000 ° C. of the release member and the high temperature strength (Fp) at 1000 ° C. of the material to be joined. The release member is preferably a steel material having a high temperature strength ratio (Fr / Fp) at 1000 ° C. of 0.9 or more. If the high-temperature strength of the release member is less than 0.9 compared to the high-temperature strength of the material to be joined, the release member may be excessively deformed due to pressurization by the holding jig. Due to the deformation of the release member, the pressure applied to the material to be bonded becomes non-uniform, and the material to be bonded may be deformed. Therefore, from the viewpoint of suppressing deformation, it is preferable to use a combination of a release member having a high temperature strength ratio of 0.9 or more and a material to be joined, and more preferably 1.0 or more.

(Coefficient of thermal expansion)
In the material to be joined and the release member, the ratio (Tr / Tp) of the thermal expansion coefficient (Tr) of the release member and the thermal expansion coefficient (Tp) of the material to be joined at 30 to 1000 ° C. is 0.90 to 1. It is preferred to use a combination that is .60. If the material to be joined and the release member are both thermally expanded during heating, elastic deformation occurs. If there is a difference in thermal expansion between both members, the two members restrain each other's deformation to accumulate strain, which may lead to plastic deformation depending on the degree of strain.

  In particular, the material to be joined that forms the heat medium flow path (hollow part) in the heat exchanger has a portion that can be a non-joint surface on the opposite surface side even if it is in contact with the release member on one surface side. . Whereas the joining surfaces of the materials to be joined are constrained from the surroundings, the hollow part as described above is not restrained from the surroundings, and therefore elastic deformation due to thermal expansion occurs ((( See B)). If the degree of this elastic deformation is excessive, it may become difficult to restore the shape due to plastic deformation.

  When using a release member having a small high-temperature strength ratio, since the deformation resistance of the release member is lower than that of the plate material, both the thermal expansion coefficients of the material to be joined and the release member may be approximately the same. preferable. In this embodiment, this thermal characteristic can be evaluated based on the ratio (Tr / Tp) between the thermal expansion coefficient (Tr) of the release member and the thermal expansion coefficient (Tp) of the material to be joined. When using a release member having a small high-temperature strength ratio, the thermal expansion coefficient ratio (Tp / Tr) is in the range of ± 5% centering on 1.0, that is, 0.95 to 1.05. Good.

(Average cooling rate)
The average cooling rate after heating in diffusion bonding is preferably less than 1.2 ° C./min. While the material to be joined and the release member are thermally expanded at the time of diffusion bonding, they are thermally contracted in the cooling process after diffusion bonding and restored to their original shapes. If there is a difference in thermal expansion between the material to be joined and the release member, both members constrain the shrinkage change during cooling, so that distortion is accumulated. If this shrinkage change becomes excessively large, plastic deformation may occur. Therefore, this embodiment focuses on the average cooling rate after the diffusion bonding is completed. When the treatment is performed at an average cooling rate of less than 1.2 ° C./min, the amount of deformation remaining after cooling can be suppressed. If the cooling rate is higher than that, the heat shrinkage change becomes large, and the amount of deformation remaining after cooling becomes large, which is not preferable. The average cooling rate may be controlled within a temperature range from the holding temperature during diffusion bonding to about 400 ° C.

(Pressing jig)
The holding jig is a member that is connected to the pressurizing mechanism of the pressurizing device and transmits the pressing force to the material to be joined. Since it is required to have heat resistance at the temperature at the time of diffusion bonding and not to be damaged, it is preferable to use a carbon material for the holding jig.

(Release agent)
In the present invention, it is preferable to apply a release agent on both surfaces of the release member. For example, a boron night (boron nitride) spray such as hexagonal boron nitride powder (h-BN) can be used. The application thickness of the release agent may be three times or more (about 10 μm) of the average particle size (for example, about 3 μm) of the release agent powder.

  Examples of the present invention will be described below. The present invention is not limited to the following examples, and can be implemented with appropriate modifications.

(Production of test materials)
Steel No. 1 composed of the remaining Fe having the composition shown in Table 1 and inevitable impurities. 1 to steel No. 9 was melted by 30 kg of vacuum melting, and the resulting steel ingot was forged into a 30 mm thick plate. Subsequently, hot rolling at 1200 ° C. was performed to obtain a hot-rolled sheet having a thickness of 6 mm, and soaking was performed at 1100 ° C. for 60 seconds to obtain a hot-rolled annealed sheet. After cold rolling the hot-rolled annealed sheet to a thickness of 3.0 mm, a final annealing is performed at 1100 ° C. for 30 seconds soaking, the final finished sheet thickness is 3 mm, and the surface finish treatment is 2B finish or 2D finish The cold-rolled annealed sheet was obtained. Further, the steel materials 5 and 6 used for the plate are further subjected to cold rolling and annealing, the final finished plate thickness is set to 0.4 mm and 1.0 mm, the surface finishing treatment is performed by 2B or 2D finishing, and cold rolling is performed. An annealed material was obtained. From the cold-rolled annealed plate, a plate was cut out with a size of 210 mm × 160 mm to prepare a test material. These test materials were subjected to a test relating to a material to be joined or a release member.

  Steel No. 1 to steel No. 1 5 is austenitic stainless steel. Steel No. 6 to Steel No. 9 is ferritic stainless steel.

(Measurement of high temperature strength)
The obtained test material was subjected to a high-temperature tensile test at a strain rate of 0.3% / min at a temperature of 1000 ° C. in accordance with JIS G 0567, and 0.2% yield strength was measured. In the present specification, this measured value is the high temperature strength at 1000 ° C. The measurement results are shown in Table 1 (unit: MPa). And based on the measured numerical value, ratio (Fr / Fp) of the high temperature strength (Fr) of a mold release member and the high temperature strength (Fp) of a to-be-joined material was computed. The results are shown in Table 2.

(Measurement of thermal expansion coefficient)
Using the obtained test material, in accordance with JIS Z 2285, a temperature increase rate of 1 ° C./second using a differential expansion analyzer (manufactured by Rigaku Corporation, infrared heating thermal expansion measuring device (TMA), standard sample: quartz). At 30 to 1000 ° C. The amount of expansion of the test piece at that time was measured and calculated as a coefficient of thermal expansion (α30-1000 ° C.) at 30 ° C. to 1000 ° C. The measurement results are shown in Table 1 (unit: × 10 ⁻⁶ / ° C.).

(Joining test)
A test assembly was prepared by combining four test materials for the material to be joined (plate material) and one test material for the release member (release plate). As shown in Table 2, in this test, the steel material No. Four test materials consisting of 5 were used. Two plate materials (thickness: 1.0 mm / sheet) having an opening to be a flow path were used, and a steel material No. 1-No. Two plate materials (thickness 0.4 mm / sheet) as heat transfer plates not having the above-mentioned openings are stacked so that a test material having a thickness of 3.0 mm consisting of 5 is stacked and the two plate materials are sandwiched. Arranged. A carbon jig was used as the holding jig. Hexagonal boron nitride powder (boron spray manufactured by YK Inoas Co., Ltd.) was applied to both surfaces of the release member as a release agent. With the hot press apparatus, the above-mentioned test assembly was subjected to diffusion bonding treatment under the following pressure and heating conditions.

・ Atmosphere: Initial vacuum is 1 × 10 ⁻² Pa or less ・ Junction temperature: 1080 ° C.
-Temperature rising time: About 2 hours from normal temperature to bonding temperature-Soaking (bonding) time: 3 hours-Average cooling rate: 3.2 ° C / min (pattern A) from 1080 ° C to 400 ° C, or 1. 1 ° C / min (B pattern)
・ Pressure: Surface pressure 2MPa

  FIG. 2 shows a heating and cooling pattern applied to the diffusion bonding process. The A pattern and B pattern in FIG. 2 show the above two patterns in which the average cooling rate is changed. After cooling to room temperature, the test assembly was taken out of the hot press apparatus and subjected to the following evaluation tests on deformation suppression and mold release.

(Evaluation on deformation suppression)
The deformation suppression was evaluated based on the deformation amount of the diffusion-bonded plate material. A method for measuring the deformation amount will be described. FIG. 3 is a schematic view showing a cross section of the test assembly. FIG. 3A shows a state before diffusion bonding, and a test assembly 14 in which four plate members 11a to 11d and two release plates 13 are combined with a carbon holding jig 15. A form in which pressure is applied while sandwiched is shown. FIG. 3B shows the state of the test assembly 14 after diffusion bonding. Since the plate materials 11a and 11d facing the cavity 16 side in the test assembly 14 after diffusion bonding are constrained by the release plate 3 and the other plate materials 11b and 11c except for the cavity portion side, they expand when heated. Then, it deforms so as to bend toward the cavity side. If the shape is not restored by the shrinkage change during cooling, it remains as a bent shape. The height 17 of the highest portion deformed with reference to the surfaces of the plate materials 11a and 11d in contact with the release plate 3 was measured, and the maximum value was obtained. In the present specification, this numerical value is referred to as a deformation amount of the plate material. Based on this deformation amount, the deformation state after diffusion bonding was evaluated. The height 17 was measured using a high-speed three-dimensional shape system manufactured by Combs. From the viewpoint of suppressing deformation, it was evaluated as good (◎) when the deformation amount was less than 30 μm, appropriate (◯) when it was 30 μm to 50 μm, and inappropriate (×) when it was over 50 μm.

(Evaluation on releasability)
In order to evaluate the releasability after joining using the test assembly, a peel test between the plate material and the release plate was performed. The outline is shown in FIG. Two tensioning devices (not shown) and two jigs each having a suction cup 25 attached to the tip of the wire 26 were prepared. A suction cup 25 of the jig was attached to the surfaces of the two release plates 23 in the test assembly 24 after diffusion bonding. After connecting a weight 27 having a predetermined weight to the wire 26 of one jig, the wire 26 of the other jig was pulled up by a tension device. By pulling both surfaces of the test assembly 24 with the weight 27, whether or not the plate material 21 and the release plate 23 were peeled was visually observed to confirm whether or not peeling occurred. The test was repeated in the same procedure while changing the weight of the weight 27. Regarding the evaluation criteria, it is desirable that the plate material and the release plate after diffusion bonding can be removed with a small force. Therefore, when the plate material and the release plate are peeled off with a weight of 5 kg or less, the release property is If the plate material and the release plate are peeled off with a weight of 20 kg or less, the releasability is slightly insufficient (△), and the plate material and the release plate with a weight weight exceeding 20 kg. When it did not peel, it was determined that the releasability was poor (x).

(Test results)
In this test, the steel material No. No. 5 plate material made of austenitic stainless steel, and steel material no. For the plate material made of ferritic stainless steel No. 6, steel No. 1-No. Tests on high temperature strength, coefficient of thermal expansion, deformation suppression, and mold release were performed using 18 types of test assemblies in which release plates made of 9 stainless steels were combined. The test results are shown in Table 2. For deformation suppression and releasability, tests were performed using three test assemblies for two types of heating and cooling patterns. About deformation | transformation suppression, it evaluated by the average value of three deformation amount. The releasability was evaluated by the average of three results.

  In Invention Examples 1 to 6, the release plates are steel Nos. 1-No. 3 is an example in which diffusion bonding is performed by the test assembly configured by No. 3; The amount of deformation after diffusion bonding was good (◎) or appropriate (○) and was in the range of 50 µm or less, and a diffusion bonded product in which deformation was suppressed was obtained. When the combination of the material to be joined and the release plate corresponding to the present invention is used, it is presumed that deformation is suppressed because thermal expansion and contraction due to heating and cooling during the diffusion bonding process proceed appropriately.

  Moreover, regarding the releasability of Invention Examples 1 to 6, the plate material and the release plate were peeled off with a small tensile force. When the combination of the material to be joined and the release plate corresponding to the present invention was used, the release plate could be easily detached from the material to be joined after diffusion bonding. It is presumed that the Si oxide film formed on the surface of the release plate hinders the interfacial reaction between the material to be joined and the release plate, suppresses the adhesion between both members, and improves the release property.

  Furthermore, when the average cooling rate after the diffusion bonding is 3.2 ° C./min (A pattern) and 1.1 ° C./min (B pattern), the results of the examples 1 to 6 show that the average cooling rate. The test assembly cooled with a small B pattern had improved deformation suppression compared to the test assembly with the A pattern. If the cooling rate is low, the degree of thermal contraction change is relaxed, so that the strain accumulation is reduced and the deformation is presumed to be suppressed.

  On the other hand, Comparative Examples 1 to 12 are steel Nos. 4-No. A release plate composed of 9 is used. In Comparative Examples 1 to 12, the Si content of the steel material of the release plate is less than 1.5 mass%, which is outside the scope of the present invention. In either case, the releasability was slightly insufficient (Δ) or unsuitable (×), and removal after diffusion bonding was difficult.

  Furthermore, since Comparative Examples 3-6, 10, and 12 had a high-temperature strength ratio of less than 0.9, the deformation after diffusion bonding was large, and the deformation suppression after diffusion bonding was inappropriate (x).

  According to the above test results, the stainless steel material having the specified composition of the present invention can suppress the deformation of the material to be bonded while maintaining the diffusion bonding property of the material to be bonded. It was confirmed that an excellent diffusion bonding jig could be provided, and particularly suitable for a release member.

1 Plate material (material to be joined)
DESCRIPTION OF SYMBOLS 2 Plate laminated body 3 Release member 4 Holding jig 5 Pressurization shaft 11a, 11b, 11c, 11d Plate material 13 Release plate 14 Test assembly 15 Holding jig 16 Cavity part 17 Height (deformation amount)
21 Plate Material 23 Release Plate 24 Test Assembly 25 Suction Cup 26 Wire 27 Weight

Claims (5)

  A ratio of the high temperature strength (Fr) at 1000 ° C. of the stainless steel material and the high temperature strength (Fp) at 1000 ° C. of the material to be joined by diffusion bonding, which is a stainless steel material containing 1.5% by mass or more of Si. (Fr / Fp) is 0.9 or more, a stainless steel material for a diffusion bonding jig excellent in deformation suppression and releasability.   The stainless steel materials are: C: 0.1% by mass or less, Si: 1.5-5.0% by mass, Mn: 2.5% by mass or less, P: 0.06% by mass or less, S: 0.02% by mass %: Ni: 8.0-15.0% by mass, Cr: 13.0-23.0% by mass, N: 0.2% by mass or less, with the balance being composed of Fe and inevitable impurities The stainless steel material for a diffusion bonding jig excellent in deformation suppression and releasability according to claim 1.   The stainless steel material further includes Mo: 3.0 mass% or less, Cu: 4.0 mass% or less, Nb: 0.8 mass% or less, Ti: 0.5 mass% or less, V: 1.0 mass% Hereinafter, the stainless steel material for a diffusion bonding jig according to claim 2, including at least one selected from B: 0.02% by mass or less and excellent in deformation suppression and releasability.   The stainless steel material is further Al: 0.2 mass% or less, REM: 0.2 mass% or less, Y: 0.2 mass% or less, Ca: 0.1 mass% or less, Mg: 0.1 mass% The stainless steel material for diffusion bonding jigs according to claim 2 or 3, comprising at least one selected from the following, having excellent deformation suppression and releasability.   The mold release member comprised with the stainless steel material in any one of Claims 1-4.

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