JP2018083224A - Fine hole composite processing device and processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fine hole composite processing device and processing method which processes a fine hole for a work-piece comprising a non-conductive material layer and a conductive material layer or a work-piece for which processing is difficult only by fine hole discharging processing, easily and with high processing quality and processing efficiency, and reduces an equipment cost.SOLUTION: A fine hole composite processing device which performs laser processing and fine hole discharging processing includes: a built-in processing head 20 which contains a water jet laser processing head part 30 and a fine hole discharging processing head part 40 integrally and allows an optical axis line Oof the water jet laser processing head part and a spindle axis line Rof the fine hole discharging processing head part to be coaxially lined up; a table on which a work-piece is mounted; a feeding device 50 which performs a relative feeding movement of the processing head and the table; and a control device 60 which selectively performs the laser processing and the discharging processing and controls the movement of the feeding device.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a fine hole combined machining apparatus and a machining method for performing laser machining and fine hole electric discharge machining.

  Conventionally, a fine hole electric discharge machine has been used to make a fine hole in a difficult-to-cut material such as a nickel alloy or a titanium alloy that cannot be cut efficiently. In recent years, there has been an increasing demand for making a fine hole in a difficult-to-cut material obtained by coating such a difficult-to-cut material with a non-conductive material such as ceramic. In such a case, laser processing is usually applied to narrow hole processing for a non-conductive material, and narrow hole electric discharge processing is applied to narrow hole processing for a metal material.

  In Patent Document 1, in order to efficiently and highly accurately perform a fine hole electric discharge machining on a difficult-to-cut material made of only a metal material, a pilot hole penetrating the workpiece by laser machining prior to the fine hole electric discharge machining (processing tip) A processing method for making holes) is described.

  Patent Document 2 describes a combined machining system in which fine hole electric discharge machining is applied to machining of fine holes (piercings) required prior to laser cutting in order to perform laser cutting on a metal material. The combined machining system of Patent Document 2 has an integrated machining head in which a laser machining head and a fine hole electric discharge machining head are connected in parallel.

JP 2000-24923 A JP-A-7-112339

  When drilling narrow holes by laser processing, dross and debris are generated during processing, the thermal effect on the workpiece is large, and deformation of the hole shape in the depth direction is likely to occur, so highly precise narrow holes are drilled. It is not easy. In addition, when drilling fine holes in difficult-to-cut materials coated with non-conductive materials, there are only a few cases that can be machined with only a laser beam machine. Therefore, both a laser beam machine and a small hole machine are usually used. Must. If it does so, since it is necessary to transfer a workpiece | work from a laser processing machine to a fine hole electric discharge machine, a setup operation will generate | occur | produce in each processing machine. These problems similarly occur even when the method of Patent Document 1 is performed.

  According to the combined machining system of Patent Document 2, it is not necessary to replace the workpiece as in Patent Document 1. However, since the optical axis of laser irradiation and the center axis of the electrode for fine hole electric discharge machining are shifted in the X direction, the machining head becomes larger in the X direction, and laser irradiation is performed after the machining head is pierced by electric discharge machining. It is necessary to move a predetermined distance in the X direction in order to align the optical axis with the piercing. For this reason, the machining time and the number of steps in the machining program increase with the movement distance. Further, in the combined machining system of Patent Document 2, when it is assumed that laser machining is applied to narrow hole machining instead of cutting, it is considered that it is not easy to make a high-precision narrow hole for the above-described reason. .

  The present invention has been made in view of the above circumstances, and it is easy and high to make a fine hole in a work made of a non-conductive material layer and a conductive material layer, or a work difficult to machine only by fine hole electric discharge machining. An object of the present invention is to provide a fine hole composite processing apparatus and a fine hole composite processing method capable of processing with processing quality and processing efficiency and reducing the equipment cost.

  In order to achieve the above object, according to the first aspect of the present invention, a water jet laser machining head unit and a fine hole electric discharge machining head in a fine hole combined machining apparatus for performing laser machining and fine hole electric discharge machining. And an integrated machining head in which the optical axis of the water jet laser machining head and the main axis of the fine hole electric discharge machining head are coaxially aligned, a table on which the workpiece is placed, and machining Control for selectively performing laser processing by the water jet laser machining head unit and electric discharge machining by the fine hole electric discharge machining head unit and controlling the operation of the feeding device while relatively moving the head and the table. And a fine hole composite processing apparatus comprising the apparatus.

  Furthermore, in order to achieve the above-mentioned object, according to the second aspect of the present invention, the fine hole combined machining method for machining a fine hole in a workpiece by laser machining and fine hole electric discharge machining is used for fine hole electric discharge machining. A step of bringing the tip of the pipe electrode close to the workpiece and facing each other and a water column reaching the workpiece are formed through the pipe electrode, and the laser beam is guided to the workpiece by the water column, and a part of the fine hole to be machined is lasered. Applying a voltage between the pipe electrode and the workpiece, and supplying water from the same source as the water used in the laser processing step into the pipe electrode to make the other part of the narrow hole narrow There is provided an electrical discharge machining step, and a fine hole composite machining method for machining a desired fine hole in a workpiece by selectively performing a laser machining step and a fine hole electric discharge machining step is provided. It is.

  According to the present invention, by appropriately combining water jet laser machining and fine hole electric discharge machining, for example, a work made of a metal difficult-to-cut material coated with a non-conductive material, or a work difficult to machine by only fine hole electric discharge machining. However, it is possible to process the fine holes with high accuracy and high efficiency. In addition, it is possible to economically install one fine hole combined machining apparatus according to the present invention as compared to individually installing a water jet laser machining apparatus and a fine hole electric discharge machining apparatus one by one.

  Further, in the fine hole composite machining apparatus according to the present invention, the optical axis line of the laser machining head part and the main axis line of the electric discharge machining head part are aligned coaxially, so that a compact machining head can be realized at least in the horizontal direction. Further, there is no need to move the machining head when shifting from water jet laser machining to fine hole electric discharge machining, so the machining time is shortened and the machining program is efficiently created.

It is a figure showing typically composition of a processing head mainly of a fine hole compound processing device by an embodiment of the present invention. It is a typical front view of the machine main body of the fine hole compound processing apparatus by embodiment of this invention. It is typical sectional drawing of the workpiece | work which is implementing water jet laser processing. It is typical sectional drawing of the workpiece | work which is implementing the fine hole electric discharge machining.

  Hereinafter, with reference to FIG.1 and FIG.2, the thin hole composite processing apparatus 100 by embodiment of this invention is demonstrated. FIG. 1 is a diagram schematically showing the configuration of a fine hole composite machining apparatus 100 according to an embodiment of the present invention, with a machining head 20 as the center, and FIG. 2 is a schematic view of a machine main body of the fine hole complex machining apparatus 100. FIG. In the following, an X-axis direction, a Y-axis direction, and a Z-axis direction that are orthogonal to each other are defined as illustrated, and these are also referred to as a left-right direction, a front-rear direction, and a vertical direction, respectively.

  The fine hole combined machining apparatus 100 can selectively perform both the laser machining and the fine hole electric discharge machining. Laser processing in the present embodiment is water jet laser processing in which laser light is guided to the work 5 by a water column 39 formed by a nozzle 37a, and fine hole electric discharge processing uses a pipe-shaped electrode 18.

The fine hole combined machining apparatus 100 selectively performs a machining head 20, a table 10 on which the workpiece 5 is placed, a feeding device 50 that relatively feeds the machining head 20 and the table 10, and laser machining and electric discharge machining. And a control device 60 for controlling the operation of the feeding device 50, an electric discharge machining power source 70, and a water supply source 80 are provided as main components. The machining head 20 integrally includes a laser machining head unit 30 for performing water jet laser machining and an electric discharge machining head unit 40 for performing fine hole electric discharge machining, and the optical axis O of the laser machining head unit 30. the axis of rotation of the main shaft 41 of the electric discharge machining head unit 40 and the _a (hereinafter, referred to as "spindle axis") R _Z extends in the Z-axis direction are aligned coaxially.

  As shown in FIG. 2, the fine hole combined machining apparatus 100 further includes a column 2 erected from the rear portion of the bed 1, an X slider 3 supported on the upper surface of the column 2 so as to be movable in the X-axis direction, A ram 4 supported on the upper surface of the X slider 3 so as to be movable in the Y-axis direction is provided. A machining head 20 is supported on the front surface of the ram 4 so as to be movable in the Z-axis direction. The electrode holder 7 is detachably connected to the tip of the main shaft 41 protruding from the lower end of the processing head 20. An electrode guide 8 is disposed below the electrode holder 7 in the vertical direction, and the electrode guide 8 is supported by the lower end portion of the guide arm 9. The guide arm 9 is supported by a bracket 4a provided on the right side surface of the ram 4 so as to be movable in the vertical direction. The vertical movement axis of the guide arm 9 is parallel to the Z axis and is referred to as the W axis in this specification. The guide arm 9 has an inclined portion so that the electrode 18 can be supported by the electrode guide 8.

Electrode 18 extends along the spindle axis R _Z between the electrode holder 7 and the electrode guide 8. The electrode 18 is a cylindrical pipe electrode 18, and its upper end is held by the electrode holder 7. The lower end portion of the pipe electrode 18 penetrates the electrode guide 8 in the vertical direction. The outer peripheral surface of the pipe electrode 18 is supported by the electrode guide 8 and is slidable in the vertical direction within the electrode guide 8 while restraining the position in the front-rear and left-right directions. A liquid such as water is supplied into the pipe electrode 18 at the time of electric discharge machining, and is ejected from the tip (lower end) 18 a of the pipe electrode 18. On the other hand, at the time of water jet laser processing, laser light is jetted and irradiated from the tip 18a of the pipe electrode 18 together with a liquid such as water.

Since the pipe electrode 18 whose upper end is held by the electrode holder 7, during the discharge machining by the spindle 41 rotates about the spindle axis R _Z, the electrode holder 7 connected to the main shaft 41, the electrode The pipe electrode 18 held by the holder 7 rotates. Although the tip 18a of the pipe electrode 18 is consumed as the electric discharge machining proceeds, the machining head 20 descends with respect to the guide arm 9 as the pipe electrode 18 is consumed. Therefore, the position of the tip 18a of the pipe electrode 18 in the Z-axis direction is desirable. Maintained in position.

  In the present embodiment, an inclined rotary table device 12 is mounted on the upper surface of the table 10 provided on the upper surface of the front portion of the bed 1. The tilt rotary table device 12 includes a pair of front and rear support members 13 projecting upward from the upper surface of the table 10 and a pivot axis Rb extending in the Y-axis direction between the support members 13 in the B-axis direction. And a rotary table 15 supported on the left end surface of the inclined member 14 so as to be rotatable in the A-axis direction about a rotation axis Ra perpendicular to the rotation axis Rb. The rotary table 15 is provided with a chuck 16, and the workpiece 5 is attached to the chuck 16.

  A machining tank 17 for electric discharge machining is provided around the table 10 so as to be able to move up and down so as to surround the entire table 10 and the inclined rotary table device 12. 2 indicates a state in which the machining tank 17 is raised during the electric discharge machining, and a solid line indicates a state in which the machining tank 17 is lowered during the setup work or the laser machining. Although drawing is omitted, the fine hole combined machining apparatus 100 also includes a cover that covers the entire apparatus mainly for shielding the laser beam.

  Although not shown, the fine hole machining apparatus 100 includes an X-axis drive unit that moves the X slider 3 in the left-right direction, a Y-axis drive unit that moves the ram 4 in the front-rear direction, and a machining head 20 in the up-down direction. The Z-axis drive unit to be moved, the spindle rotation drive mechanism 43 that rotates the spindle 41 around the spindle axis Rz, the W-axis drive unit that moves the guide arm 9 in the vertical direction, and the tilting member 14 with respect to the turning axis Rb And a B-axis drive unit that rotates the rotary table 15 around the rotation axis Ra. These X-axis drive unit, Y-axis drive unit, Z-axis drive unit, W-axis drive unit, main shaft rotation drive mechanism 43, B-axis drive unit, and A-axis drive unit are controlled by the control device 60 of the fine hole composite machining apparatus 100. Is done. Further, in the present specification, these various drive units are collectively referred to as a feeding device 50.

  With the above configuration, the tip 18a of the pipe electrode 18 can be moved relative to the workpiece 5 fixed to the table 10 in the X-axis direction, the Y-axis direction, and the Z-axis direction, and relative to the B-axis direction and the A-axis direction. It becomes movable.

The machining head 20 includes an electric discharge machining head unit 40 and a laser machining head unit 30 integrally. The main shaft 41 of the electric discharge machining head portion 40 is formed in a cylindrical shape having a central hole penetrating in the longitudinal direction thereof, and most of the main shaft 41 is disposed in the housing 21 of the machining head 20 and has a lower end side. A part of which protrudes from the housing 21. Spindle 41 is rotatably supported on the spindle axis R _Z around again by a pair of bearings 42 disposed within the housing 21. In the housing 21, the aforementioned main shaft rotation drive mechanism 43 including a motor (not shown) and a power transmission mechanism (not shown) for driving the main shaft 41 to rotate is also disposed. A waterproof seal member 44 is disposed at the boundary between the upper end portion of the main shaft 41 and the laser processing head portion 30. The electrode holder 7 is detachably connected to the lower end portion of the main shaft 41. The electric discharge machining head portion 40 includes a main shaft 41, a bearing 42, a main shaft rotation drive mechanism 43, a seal member 44, and a portion of the housing 21 that accommodates them.

  Water, which is a machining fluid for the fine hole electric discharge machining, is introduced from the water supply source 80 into the central hole of the main shaft 41 via the pipe 81 and the nozzle head 37 and the nozzle 37a of the laser machining head unit 30. Further, it is supplied into the pipe electrode 18 through a flow path (not shown) in the electrode holder 7.

Various components necessary for carrying out water jet laser processing are arranged on the upper side of the electric discharge machining head portion 40 of the machining head 20. Specifically, a laser irradiation head 32 that receives laser light from the laser oscillator 31 via a light guide member such as an optical fiber 31a, a collimation lens 33 that collimates the laser light emitted from the laser irradiation head 32, and collimation In order to form a first mirror 34 and a second mirror 35 for shifting the laser light from the lens 33 parallel to the left side of the figure, a focus lens 36 for narrowing the laser light from the second mirror 35, and a water column 39. Nozzle head 37 and nozzle 37a are provided. These components for water jet laser processing and the portion of the housing 21 that accommodates them are included in the laser processing head portion 30. Moreover, as can be seen from Figure 1, the optical axis O _A of the focus lens 36 coincides with the spindle axis R _Z.

  The aforementioned mirror and lens are arranged so that the laser light emitted from the laser irradiation head 32 is focused by the focus lens 36 and focused at the center of the inlet of the nozzle 37a. However, since there are actually various errors, it is necessary to adjust the focal position. Therefore, the laser processing head unit 30 adjusts the vertical positions of the first motor 34a and the second motor 35a and the focus lens 36 for changing the angles of the first and second mirrors 34 and 35. It also includes a third motor that does not, and an alignment camera 38 that images the focus. The second mirror 35 is formed from a glass plate on which a dielectric multilayer film that reflects light having a wavelength other than the wavelength of the laser light is deposited while reflecting the laser light emitted from the laser oscillator 31. Yes. Therefore, the alignment camera 38 can pick up the focal point of the laser light even though it is disposed above the second mirror 35. The focus adjustment is performed by the operator driving the first to third motors by a minute amount while viewing the image of the alignment camera 38 displayed on the monitor (not shown) of the operation panel (not shown).

  The nozzle head 37 is a hollow member that receives supply of water from a water supply source 80 via a pipe line 81. A nozzle 37 a for ejecting a water jet is provided on the bottom wall of the nozzle head 37, and a window 37 b made of a transparent material such as glass is provided on the upper surface facing the focus lens 36 on the opposite side of the bottom wall. A water column 39 is formed by a water jet ejected from the nozzle 37 a, and the water column 39 passes from the main shaft 41 of the electric discharge machining head portion 40 and the electrode holder 7 through the pipe electrode 18 to the work 5 placed on the table 10. Reach. On the other hand, the laser beam focused on the inlet of the nozzle 37 a reaches the workpiece 5 by repeating total reflection at the outer peripheral boundary surface of the formed water column 39 and can process the workpiece 5.

In the present embodiment, the water supplied at the time of water jet laser processing and the water supplied at the time of the aforementioned fine hole electric discharge machining are usually different in water pressure (the water pressure at the time of water jet laser processing is higher). However, both are supplied from the same water supply source 80 through the same flow path. Moreover, axes, and therefore the laser light of the optical axis O _A guided by the water column 39 of the water column 39 formed by the nozzle 37a is coaxially aligned with the spindle axis R _Z.

  According to the fine hole combined machining apparatus 100 configured as described above, it is possible to selectively carry out fine hole electric discharge machining and water jet laser machining, which have been conventionally carried out with separate apparatuses, for one workpiece. become.

  A substantial portion of structural or mechanical components such as the table 10, column 2, ram 4, and feeding device 50 of the fine hole combined machining apparatus 100 of this embodiment and the water supply source 80 are water jet laser machining and fine holes. Shared in EDM. This means that one thin hole composite machining apparatus 100 can be manufactured at a lower cost than two water jet laser processing apparatuses and two small hole electric discharge machining apparatuses. Further, the installation space is also reduced as compared with the case where the water jet laser processing apparatus and the fine hole electric discharge machining apparatus are separately prepared and installed.

According to the fine hole combined machining apparatus 100 of the present embodiment, water jet laser machining in which dross and debris are not generated in laser machining, the thermal influence on the workpiece is suppressed, and a uniform hole diameter is obtained in the depth direction. As a matter of course, the water jet laser machining and the fine hole electric discharge machining can be continuously performed while the workpiece 5 is fixed to the table 10, that is, by one set-up operation. Furthermore, in the small hole combined machining apparatus 100, since the spindle axis R _Z of the optical axis O _A of the laser processing head 30 discharge machining head 40 is coaxially aligned, the small hole electric discharge from the water jet laser processing When moving to machining (or vice versa), it is not necessary to move the machining head 20, so that machining time is shortened and creation of a machining program is made more efficient.

  Next, a fine hole composite processing method according to an embodiment of the present invention that can be performed using, for example, the fine hole composite processing apparatus 100 described above will be described with reference to FIGS. The workpiece 5 in this embodiment is made of, for example, a thermal barrier coating material that is also used as a material for a blade of a gas turbine or the like. The thermal barrier coating material is obtained by coating a base material 5a made of a nickel-base heat-resistant alloy with a ceramic layer 5b through a metal bond layer. Since the bond layer is a thin layer, drawing is omitted in FIGS. The narrow hole 5c to be processed has a uniform inner diameter and finally penetrates the workpiece 5.

  In the method according to this embodiment, first, the tip 18a of the pipe electrode 18 used for the fine hole electric discharge machining is brought close to the work 5, and is positioned so as to face the portion of the work 5 where the fine hole 5c is to be formed.

Next, as shown in FIG. 3, a part 5 c ₁ of the fine hole to be machined by water jet laser machining is provided in the work 5. More particularly, it forms a water column 39 reaches the workpiece 5, and guides the laser beam to the workpiece 5 by the water column 39 formed, open part 5c ₁ of the small hole to be machined in the workpiece 5. In the present embodiment, the water jet laser processing is performed in a state where the pipe electrode 18 is connected to the main shaft 41 via the electrode holder 7. Therefore, the water column 39 is formed in the pipe electrode 18. However, the water column 39 is formed with a thickness that does not contact the inner wall of the pipe electrode 18.

Although laser light is not shown in FIG. 3, the workpiece 5 is irradiated with laser light having a beam diameter substantially the same as the diameter of the water column 39. In the present embodiment, the diameter of the hole obtained by the water jet laser processing when the optical axis O _A of the laser light is stationary is considerably smaller than the diameter of the fine hole 5c having the final shape. hole diameter is enlarged by shaking the optical axis O _a in the XY horizontal direction. On the other hand, some depth of 5c ₁ of the small hole drilling in water jet laser processing is set to a depth of thickness plus α of the ceramic layer 5b in good, thus the present embodiment as long through the ceramic layer 5b .

Next, the other part 5c ₂ of the narrow hole is processed by the small hole electric discharge machining. More specifically, while rotating the main shaft 41, a voltage is applied between the pipe electrode 18 and the workpiece 5, and water from the same water supply source 80 as in the water jet laser processing is supplied into the pipe electrode 18. another portion of the small hole to be machined 5c ₂ processed by small hole electric discharge machining. Thereby, the narrow hole 5c which penetrates the workpiece | work 5 is completed.

  In the above embodiment, the water jet laser processing is performed before the fine hole electric discharge processing. However, for example, when the ceramic layer 5c of the workpiece 5 is under the metal base material 5a, the above-described processing order is as follows. Will be reversed. In addition, an embodiment in which water jet laser processing and fine hole electric discharge machining are repeatedly performed on one fine hole is also possible.

  According to this fine hole composite processing method, it is possible to efficiently carry out fine fine hole processing on a material composed of a non-conductive material such as ceramic and a metal material. In addition, since the laser processing in this embodiment is water jet laser processing, the hole shape disorder in the depth direction, the occurrence of dross and debris, and the thermal effect on the workpiece, which are problems during normal laser processing Does not occur.

  The fine hole composite machining method according to the present invention may be applied to a workpiece made of only a metal material having no non-conductive material. When there are multiple types of fine holes to be machined in one workpiece, the optimum machining method is selected from water jet laser machining and fine hole electric discharge machining according to the depth, inner diameter, tolerance, etc. It's okay. Alternatively, in some cases, the processing time can be shortened by applying both water jet laser machining and fine hole electric discharge machining to one fine hole of a workpiece made of only a metal material. For example, when machining a stepped narrow hole consisting of a relatively large diameter and a deep large diameter portion and a relatively small diameter and a shallow small diameter portion, the small diameter electric discharge machining is applied to the large diameter portion, On the other hand, by applying water jet laser processing, it becomes possible to efficiently obtain the stepped fine holes without exchanging the electrodes.

7 Electrode holder 10 Table 18 Electrode 20 Processing head 30 Laser processing head section 37a Nozzle 39 Water column 40 Narrow hole electric discharge processing head section 41 Spindle 50 Feeder 60 Controller 80 Water supply source

In order to achieve the above object, according to the first aspect of the present invention, a water jet laser machining head unit and a fine hole electric discharge machining head in a fine hole combined machining apparatus for performing laser machining and fine hole electric discharge machining. And an integrated machining head in which the optical axis of the water jet laser machining head and the main axis of the fine hole electric discharge machining head are coaxially aligned, and the water jet laser machining head. , A nozzle capable of forming a water column having a thickness that does not contact the inner wall of the pipe electrode attached to the main shaft of the fine hole electric discharge machining head portion, a table on which the workpiece is placed, and the machining head and the table are moved relative to each other. The feed device and the laser processing by the water jet laser processing head portion and the electric discharge processing by the narrow hole electric discharge processing head portion are selectively performed and the operation of the feed device is performed. Comprising a control device for controlling a small hole composite working device is provided.

Furthermore, in order to achieve the above-mentioned object, according to the second aspect of the present invention, the fine hole combined machining method for machining a fine hole in a workpiece by laser machining and fine hole electric discharge machining is used for fine hole electric discharge machining. The step of bringing the tip of the pipe electrode close to the workpiece and facing the workpiece and the water column reaching the workpiece through the pipe electrode are formed with a thickness that does not contact the inner wall of the pipe electrode , and the laser beam is guided to the workpiece by the water column. Then, water is supplied into the pipe electrode from the same source as the water used in the step of laser machining a part of the fine hole to be machined, the voltage applied between the pipe electrode and the workpiece and the laser machining step. A step of subjecting the other part of the fine hole to a small hole electric discharge machining, and selectively performing the step of laser machining and the step of electric discharge machining of the fine hole to form a desired fine hole in the workpiece. Small hole combined machining method for machining is provided.

Claims (2)

In the fine hole combined machining device that performs laser machining and fine hole electric discharge machining,
A water jet laser machining head part and a fine hole electric discharge machining head part which are integrated, and the optical axis of the water jet laser machining head part and the main axis of the fine hole electric discharge machining head part are coaxially aligned. Machining head
A table for placing a workpiece;
A feeding device that relatively feeds the machining head and the table;
A control device for selectively performing laser processing by the water jet laser processing head portion and electric discharge processing by the fine hole electric discharge processing head portion and controlling the operation of the feeding device;
A fine hole composite processing apparatus comprising: In the fine hole combined machining method that cuts a fine hole in the workpiece by laser machining and fine hole electric discharge machining,
A step of bringing the tip of a pipe electrode used for narrow hole electric discharge machining to face the workpiece and facing the workpiece, and forming a water column that reaches the workpiece through the pipe electrode, and guiding the laser beam to the workpiece by the water column and machining Laser machining a portion of the fine hole to be
A voltage is applied between the pipe electrode and the workpiece, and water from the same supply source as that used in the laser processing step is supplied into the pipe electrode, and the other part of the narrow hole is narrow. An electric discharge machining step;
A thin hole composite machining method comprising: machining a desired fine hole in the workpiece by selectively performing the laser machining step and the fine hole electric discharge machining step.

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