JP2018079549A - Plate-like body processing method and plate-like body processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plate-like body processing method by which a dimension of a plate-like body after processing can be stabilized.SOLUTION: According to this plate like-body processing method, cut processing, in which a table and a rotary grindstone are relatively moved according to a target locus of a rotation center of the rotary grindstone with respect to the table and an outer peripheral edge of a plate-like body held by the table is cut by an outer peripheral edge of the rotary grindstone, is repeated while replacing the plate-like body. Said cut processing has: processes S103, S109 in which imaging of outer peripheral edges of one plate-like body and another plate-like body is performed within pre-set plural imaging ranges; a process S111 in which a dimensional change amount between the outer peripheral edge of one plate-like body after cutting and the outer peripheral edge of another plate-like body after cutting and a positional deviation of each imaging range are calculated on the basis of a positional relationship between the outer peripheral edge of one plate-like body after cutting and the outer peripheral edge of another plate-like body after cutting within said imaging ranges; and a process S112 in which the target locus is corrected on the basis of the dimensional change amount.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a plate-like body processing method and a plate-like body processing apparatus.

  The glass plate end surface grinding apparatus described in Patent Literature 1 includes a belt conveyance unit, an adsorption conveyance unit, a grinding unit, a sensor, and a position control unit. The belt conveying means conveys the glass plate in the X-axis direction. The suction conveyance means conveys the glass plate in the X-axis direction together with the belt conveyance means. The grinding means has a grindstone for grinding the end face of the glass plate. The grindstone is moved in the Y-axis direction by a motor. The sensor is disposed upstream of the grinding means in the X-axis direction and detects the position of the end face of the glass plate. As the sensor, a non-contact type sensor is preferable, and a camera or an ultrasonic sensor is used. The position control unit feed-forward controls the position of the grindstone in the Y-axis direction based on the detection result of the sensor.

JP 2008-213090 A

  Conventionally, the table and the rotating grindstone are moved relative to each other according to the target trajectory of the rotation center of the rotating grindstone with respect to the table, and the outer peripheral edge of the plate-like body held by the table is ground by the outer peripheral edge of the rotating grindstone. ing.

  This grinding process is repeated by replacing the plate-like body. Meanwhile, the outer peripheral edge of the rotating grindstone gradually becomes smaller due to wear. Therefore, the amount of change in the outer diameter of the rotating grindstone is calculated to correct the target locus.

  Conventionally, the amount of change in the outer diameter of the rotating grindstone has been calculated using a function of grinding time or the like, but it sometimes did not match the actual amount of change. Therefore, the dimension of the plate-like body after processing was unstable.

  This invention is made | formed in view of the said subject, Comprising: The main objective is to provide the processing method of a plate-shaped body which can stabilize the dimension of the plate-shaped body after a process.

In order to solve the above problems, according to one aspect of the present invention,
According to the target trajectory of the rotation center of the rotating grindstone with respect to the table, the table and the rotating grindstone are moved relative to each other, and the grinding process for grinding the outer peripheral edge of the plate-like body held by the table with the outer peripheral edge of the rotating grindstone, A method for processing a plate-like body, wherein the plate-like body is replaced and repeated,
Imaging an outer peripheral edge of the one plate-like body held by the table after the grinding process by an imaging unit in a plurality of preset imaging ranges;
Imaging the outer peripheral edge of the other plate-like body held by the table after the grinding process by the imaging unit within the plurality of preset imaging ranges;
Based on the positional relationship between the outer peripheral edge after the grinding of the one plate-like body and the outer peripheral edge after the grinding of the other one plate-like body in each imaging range, the one Calculating a dimensional change amount between the outer peripheral edge of the plate-like body after the grinding process and the outer peripheral edge of the other plate-like body after the grinding process, and a positional deviation of each imaging range. A method for processing a plate-like body is provided.

  According to one aspect of the present invention, there is provided a method for processing a plate-like body that can stabilize the dimensions of the plate-like body after processing.

FIG. 1 is a side view showing a glass plate processing apparatus according to an embodiment. FIG. 2 is a flowchart illustrating a glass plate processing method according to an embodiment. FIG. 3 shows an outer peripheral edge after grinding of the A-th glass plate, an outer peripheral edge after grinding of the B-th glass plate, and an image capturing range in the XY coordinate system according to the embodiment. It is a top view which shows a positional relationship. FIG. 4 is a diagram showing an image in the imaging range FR1 of FIG. FIG. 5 is a diagram showing an image in the imaging range FR2 of FIG. It is a figure which shows an example of the image process of the image imaged by the imaging part of FIG.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In the drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and description thereof is omitted. In the following description, the plate-like body to be processed is a glass plate, but the present invention is not limited to this. The plate-like body to be processed may be a metal plate or a ceramic plate.

(Glass plate processing equipment)
FIG. 1 is a side view showing a processing apparatus according to an embodiment. In FIG. 1, an X axis, a Y axis, and a Z axis are orthogonal coordinate axes fixed to the table 10. The Z axis is arranged on the same straight line as the rotation axis 11 of the table 10 and is vertical, and the X axis and the Y axis are horizontal. The X axis, the Y axis, and the Z axis move linearly in the Y axis direction together with the table 10 and rotate about the Z axis. In FIG. 1, the x axis, the y axis, and the z axis are orthogonal coordinate axes fixed to the imaging unit 60. The z-axis is arranged on the same line as the center line of the imaging lens of the imaging unit 60 and is vertical, and the x-axis and y-axis are horizontal. The intersection of the x axis and the y axis is the center point of the image captured by the imaging unit 60. When the table 10 is in a position to receive the glass plate 2 from the transport device, the x axis is parallel to the X axis and the y axis is parallel to the Y axis. Note that these coordinate axes are for convenience, and the way of taking the coordinate axes is not particularly limited.

  The processing apparatus includes a table 10, a rotating grindstone 20 that grinds the outer peripheral edge 4 of the glass plate 2 held by the table 10, a driving unit 30 that relatively moves the table 10 and the rotating grindstone 20, and a driving unit 30. And a control unit 50 for controlling. The processing apparatus further includes an imaging unit 60 that captures an image of the outer peripheral edge 4 of the glass plate 2 held by the table 10.

  The table 10 holds a portion inside the outer peripheral edge 4 of the glass plate 2 so as not to interfere with the rotating grindstone 20. Suction holes are formed in the holding surface for holding the glass plate 2 of the table 10, and the suction holes are connected to a vacuum pump. When the vacuum pump is operated while the glass plate 2 is placed on the holding surface of the table 10, the table 10 vacuum-sucks the glass plate 2.

  The table 10 includes, for example, a table body 12 and a plurality of suction pads 14 attached to the table body 12. The suction pad 14 vacuum-sucks the glass plate 2, for example. The suction pad 14 is detachably attached to the table body 12. The attachment position of the suction pad 14 with respect to the table body 12 is appropriately selected according to the size and shape of the glass plate 2.

  The table 10 is a Yθ table, for example, which is not movable in the X-axis direction with respect to the frame Fr, is movable in the Y-axis direction, and is rotatable about a rotation axis 11 parallel to the Z-axis direction. The Note that the table 10 may be an XY table, and may be movable in the X-axis direction and the Y-axis direction.

  The rotating grindstone 20 grinds the outer peripheral edge 4 of the glass plate 2 held by the table 10. The rotary grindstone 20 is, for example, a chamfering grindstone, and may have a grinding groove having a U-shaped cross section on the outer peripheral surface. The rotary grindstone 20 may be a general-purpose grindstone. An electric motor or the like is used as the rotation driving unit 21 that rotates the rotating grindstone 20. The rotation drive unit 21 is fixed to the frame Fr.

  The drive unit 30 relatively moves the table 10 and the rotating grindstone 20 under the control of the control unit 50. The drive unit 30 moves the table 10 relative to the frame Fr in order to move the table 10 and the rotating grindstone 20 relatively. The drive unit 30 includes a Y-axis direction drive unit 31 and a θ-direction drive unit 32.

  The Y-axis direction drive unit 31 moves the table 10 in the Y-axis direction with respect to the frame Fr. The Y-axis direction drive unit 31 includes, for example, an electric motor fixed to the frame Fr, and a ball screw that converts the rotational movement of the electric motor into a linear movement of the table 10.

  The θ-direction drive unit 32 rotates the table 10 around the rotation axis 11 parallel to the Z-axis direction. The θ-direction drive unit 32 includes, for example, a bearing that rotatably supports the rotary shaft 11 fixed to the table 10 and an electric motor that rotates the rotary shaft 11.

  When the Y-axis direction drive unit 31 is operated, the θ-direction drive unit 32 moves along the Y-axis guide laid on the frame Fr, and the table 10 moves in the Y-axis direction. Further, when the θ-direction drive unit 32 is operated, the table 10 rotates about the rotation shaft 11.

  In addition, since the drive part 30 of this embodiment moves the table 10 with respect to the flame | frame Fr in order to move the table 10 and the rotary grindstone 20 relatively, you may move the rotary grindstone 20 with respect to the flame | frame Fr. However, both may be moved relative to the frame Fr.

  The control unit 50 includes a CPU (Central Processing Unit) 51, a storage medium 52 such as a memory, an input interface 53, and an output interface 54. The control unit 50 performs various controls by causing the CPU 51 to execute a program stored in the storage medium 52. Further, the control unit 50 receives a signal from the outside through the input interface 53 and transmits a signal to the outside through the output interface 54.

  The control unit 50 performs relative movement between the table 10 and the rotating grindstone 20 according to the target locus of the rotation center of the rotating grindstone 20 with respect to the table 10, and moves the outer peripheral edge 4 of the glass plate 2 held by the table 10 to the outside of the rotating grindstone 20. Grinding is performed at the periphery. In the present embodiment, the entire outer peripheral edge 4 of the glass plate 2 is ground, but only a part of the outer peripheral edge 4 of the glass plate 2 may be ground.

  The target locus of the rotation center of the rotating grindstone 20 is outside the processing target outer peripheral edge (hereinafter also referred to as “processing target outer peripheral edge”) of the glass plate 2 and a fixed distance (OD / 2) from the processing target outer peripheral edge. And drawn along the processing target outer periphery. Here, OD represents the outer diameter of the rotating grindstone 20 (hereinafter also referred to as “grinding wheel diameter”).

  As the processing target outer peripheral edge and the grindstone diameter OD, those stored in advance in the storage medium 52 are read out and used. When the grindstone diameter OD stored in the storage medium 52 matches the actual grindstone diameter OD, the outer peripheral edge 4 after grinding of the glass plate 2 coincides with the processing target outer peripheral edge.

  The control unit 50 repeatedly performs the grinding process of grinding the outer peripheral edge 4 of the glass plate 2 held by the table 10 with the outer peripheral edge of the rotating grindstone 20 while replacing the glass plate 2. Meanwhile, the outer peripheral edge of the rotating grindstone 20 gradually decreases due to wear, and the grindstone diameter OD gradually decreases, so that the outer peripheral edge 4 after grinding is gradually increased.

  Therefore, the control unit 50 monitors the outer peripheral edge 4 after grinding of the glass plate 2 held by the table 10 in a plurality of preset imaging ranges in order to monitor the dimensional change of the outer peripheral edge 4 after grinding. Imaging is performed by the imaging unit 60.

  The imaging unit 60 images the outer peripheral edge 4 of the glass plate 2 held by the table 10 after grinding in a plurality of preset imaging ranges under the control of the control unit 50. As the imaging unit 60, for example, a CCD camera or a CMOS camera is used. The captured image is transmitted to the control unit 50, and the control unit 50 acquires the image.

  The imaging unit 60 is fixed with respect to the frame Fr, for example. By adjusting the position in the Y-axis direction and the position in the θ direction of the table 10 with respect to the frame Fr, the image capturing range can be changed. A plurality of images obtained by imaging a plurality of portions of the outer peripheral edge 4 after grinding are used to calculate a dimensional change amount ΔA (hereinafter also simply referred to as “dimensional change amount ΔA”) of the outer peripheral edge 4 after grinding. The dimensional change ΔA of the outer peripheral edge 4 after grinding is measured in a direction orthogonal to the outer peripheral edge 4 after grinding.

  The imaging unit 60 is fixed with respect to the frame Fr in this embodiment, but may be movable. If the imaging unit 60 and the table 10 are relatively movable, the imaging range of the image can be changed.

  When a plurality of imaging units 60 are used, the imaging unit 60 and the table 10 do not have to move relatively. If a plurality of portions of the outer peripheral edge 4 can be imaged, the calculation accuracy of the dimensional change amount ΔA can be improved.

(Glass plate processing method)
Next, with reference to FIG. 2 etc., the processing method using the processing apparatus of the said structure is demonstrated. The following operations of the processing apparatus are controlled by the control unit 50. FIG. 2 is a flowchart illustrating a glass plate processing method according to an embodiment.

  The processing after step S101 in FIG. 2 is started when the table 10 receives the A-th glass plate 2 from the transport device. Here, A is a predetermined natural number of 1 or more. Each time the rotary grindstone 20 is replaced, the cumulative number of glass plates 2 is reset to 1.

  The glass plate 2 is placed on the table 10 by the transport device after being aligned by the alignment device. The position for receiving the glass plate 2 of the table 10 with respect to the frame Fr is set in advance.

  In step S <b> 101 of FIG. 2, the control unit 50 starts holding the A-th glass plate 2 by the table 10.

  Subsequently, in step S <b> 102, the control unit 50 controls the driving unit 30 in accordance with the target locus of the rotation center of the rotating grindstone 20 with respect to the table 10, and the outer peripheral edge 4 of the glass plate 2 held by the table 10 is moved to the rotating grindstone 20. Grind at the outer periphery. The outer peripheral edge 4 of the glass plate 2 after grinding may coincide with the processing target outer peripheral edge.

  Subsequently, in step S <b> 103, the control unit 50 images a plurality of portions of the outer peripheral edge 4 of the glass plate 2 held by the table 10 with the imaging unit 60. This imaging is performed after adjusting the Y-axis direction position and the θ-direction position of the table 10 with respect to the frame Fr to a preset position. That is, each imaging range is set in advance.

  Subsequently, in step S104, the control unit 50 performs image processing on each image captured in step S103, and detects the position of the outer peripheral edge 4 in each imaging range. The image processing will be described later.

  In step S103 to step S104, image processing is started after all images have been captured. However, image processing may be performed every time an image is captured, and all images are captured. Image processing may be started before Moreover, the said step S104 should just be completed by the start of the following step S111.

  Subsequently, in step S105, the control unit 50 releases the holding of the glass plate 2 by the table 10. Thereafter, the transfer device removes the A-th glass plate 2 from the table 10, and then places the A + 1-th glass plate 2 on the table 10.

  Subsequently, in step S106, the control unit 50 starts holding the new glass plate 2 by the table 10.

  Subsequently, in step S <b> 107, the control unit 50 controls the drive unit 30 according to the target locus of the rotation center of the rotary grindstone 20 with respect to the table 10, and the outer peripheral edge 4 of the glass plate 2 held by the table 10 is moved to the rotary grindstone 20. Grind at the outer periphery.

  Subsequently, in step S108, the control unit 50 checks whether or not the cumulative number of glass plates 2 is B. Here, B is a predetermined natural number larger than A. As the difference between B and A is smaller, the frequency of checking the dimensional change ΔA is increased and the processing accuracy is improved, but the throughput is lowered. B may be set as appropriate based on processing accuracy and throughput.

  When the cumulative number of glass plates 2 is less than B (No at Step S108), the control unit 50 returns to Step S105 and continues the processes after Step S105.

  On the other hand, when the cumulative number of glass plates 2 is B (Yes in step S108), the control unit 50 proceeds to step S109, and captures a plurality of portions of the outer peripheral edge 4 of the glass plate 2 held by the table 10. Take an image with. This imaging is performed after adjusting the Y-axis direction position and the θ-direction position of the table 10 with respect to the frame Fr to a preset position. That is, each imaging range is set in advance. Each preset imaging range is the same in step S109 and step S103.

  Subsequently, in step S110, the control unit 50 performs image processing on each image captured in step S109, and detects the position of the outer peripheral edge 4 in each imaging range. The image processing will be described later.

  In step S109 to step S110, image processing is started after all images have been captured. However, image processing may be performed each time an image is captured, and all images are captured. Image processing may be started before

  Subsequently, in step S111, the control unit 50 has a positional relationship between the outer peripheral edge 4 after grinding of the A-th glass plate 2 and the outer peripheral edge 4 after grinding of the B-th glass plate 2 in each imaging range. Based on the above, the positional deviation of each imaging range is calculated, and the dimensional change amount ΔA is calculated. A method for calculating the positional deviation of each imaging range and the dimensional change amount ΔA will be described later.

  Subsequently, in step S112, the control unit 50 corrects the target locus of the rotation center of the rotating grindstone 20 based on the dimensional change amount ΔA calculated in step S111. The corrected target trajectory is shifted from the target trajectory before correction toward the machining target outer periphery. The shift amount is a dimensional change amount ΔA. The dimensional change amount ΔA corresponds to a half value of the change amount of the grindstone diameter OD.

  Thereafter, the control unit 50 ends the current process. The corrected target trajectory is used for grinding the B + 1 and subsequent glass plates 2. Thereby, the magnitude | size of the outer periphery of the glass plate 2 after a grinding process can be arrange | equalized accurately.

  The series of processes from Step S101 to Step S112 may be repeatedly performed from when the rotating grindstone 20 is mounted on the rotation driving unit 21 until it is removed. That is, a plurality of A and B may be prepared.

(Calculation of displacement in each imaging range and calculation of grinding wheel diameter change)
The calculation of the positional deviation of each imaging range and the calculation of the dimensional change amount ΔA in step S111 will be specifically described with reference to FIGS. FIG. 3 shows an outer peripheral edge after grinding of the A-th glass plate, an outer peripheral edge after grinding of the B-th glass plate, and an image capturing range in the XY coordinate system according to the embodiment. It is a top view which shows a positional relationship. FIG. 4 is a diagram showing an image in the imaging range FR1 of FIG. FIG. 5 is a diagram showing an image in the imaging range FR2 of FIG. 3 to 5, the positional shift and the dimensional change amount ΔA of the imaging ranges FR1 to FR8 are exaggerated. 3 to 5, the ratio of the size of each imaging range FR1 to FR8 with respect to the size of the glass plate 2 is shown larger than the actual ratio. 3 to 5, 4A represents the outer peripheral edge 4 of the A-th glass plate 2 after grinding, and 4B and 4B ′ represent the outer peripheral edge 4 of the B-th glass plate 2 after grinding. Represent.

  In step S111, it is assumed that the control unit 50 first captures images in the imaging ranges FR1 to FR8 having the same coordinates in the XY coordinate system in steps S103 and S109. Next, the control unit 50 superimposes images for each of the imaging ranges FR1 to FR8, and uses the XY coordinate system to indicate the positional relationship between the outer peripheral edge 4A detected in step S104 and the outer peripheral edge 4B detected in step S110. Investigate.

  For example, in the imaging range FR1 shown in FIG. 4, the position of the outer peripheral edge 4A indicated by the solid line is shifted from the position of the outer peripheral edge 4B indicated by the alternate long and short dash line. Further, in the imaging range FR2 illustrated in FIG. 5, the position of the outer peripheral edge 4A indicated by the solid line is shifted from the position of the outer peripheral edge 4B indicated by the alternate long and short dash line.

  The imaging range FR1 shown in FIG. 4 and the imaging range FR2 shown in FIG. 5 differ in how the position of the outer peripheral edge 4A is shifted from the position of the outer peripheral edge 4B. Here, the difference in displacement includes at least one of a difference in displacement and a difference in displacement direction.

  As described above, when the displacements of the positions of the outer peripheral edges 4A and 4B are different in at least two imaging ranges, the control unit 50 captures the images that are accurately determined by the accurate imaging ranges FR1 ′ to FR8 ′ of the image captured in step S109. It is determined that the position is out of the range FR1 to FR8. That is, in this case, the control unit 50 determines that the positional deviations of the imaging ranges FR1 to FR8 have occurred.

  Note that if all the eight imaging ranges FR1 to FR8 have the same way of shifting the positions of the outer peripheral edges 4A and 4B, the control unit 50 temporarily assumes that the accurate imaging ranges FR1 ′ to FR8 ′ of the image captured in step S109 are used. It is determined that it matches the defined imaging ranges FR1 to FR8. That is, in this case, the control unit 50 determines that there is no positional deviation between the imaging ranges FR1 to FR8.

  As a cause that the accurate imaging ranges FR1 ′ to FR8 ′ of the image captured in step S109 deviate from the temporarily determined imaging ranges FR1 to FR8, for example, there is a change in the temperature of the frame Fr. When the temperature of the frame Fr changes, the size and shape of the frame Fr change, and the position of the imaging unit 60 may shift.

  The positional deviation of the imaging unit 60 with respect to the frame Fr can be expressed by a parallel movement amount Δx in the x-axis direction, a parallel movement amount Δy in the y-axis direction, and a rotational movement amount Δθ around the z-axis. Therefore, the accurate imaging ranges FR1 ′ to FR8 ′ of the image captured in step S109 can also be represented by Δx, Δy, and Δθ.

  For example, as shown in FIG. 4, in the XY coordinate system, the accurate imaging range FR1 ′ of the image captured in step S109 is translated by Δx in the x-axis direction with respect to the provisional imaging range FR1, and the y-axis Δy is translated in the direction and Δθ is rotated around the z axis. Similarly, as shown in FIG. 5, in the XY coordinate system, the accurate imaging range FR2 ′ of the image captured in step S109 is translated by Δx in the x-axis direction with respect to the provisional imaging range FR2, and y Δy is translated in the axial direction, and Δθ is rotated around the z-axis.

  Thus, in the XY coordinate system, the accurate imaging ranges FR1 ′ to FR8 ′ of the image captured in step S109 are translated by Δx in the x-axis direction with respect to the temporarily determined imaging ranges FR1 to FR8, Δy is translated in the y-axis direction and Δθ is rotated around the z-axis.

  Therefore, in the XY coordinate system, the outer peripheral edge 4B ′ in each accurate imaging range FR1 ′ to FR8 ′ is translated by Δx in the x-axis direction with respect to the outer peripheral edge 4B in each temporarily determined imaging range FR1 to FR8, and y Δy is translated in the axial direction, and Δθ is rotated around the z axis (see FIGS. 4 and 5).

  Further, in the XY coordinate system, the outer peripheral edge 4B ′ in each of the accurate imaging ranges FR1 ′ to FR8 ′ has a certain distance from the outer peripheral edge 4A outside the outer peripheral edge 4A in each of the imaging ranges FR1 to FR8 that are provisionally determined. Are arranged in parallel. This interval is a dimensional change ΔA caused by a change in the grindstone diameter OD.

  Accordingly, in each of the imaging ranges FR1 to FR8 defined, the outer peripheral edge 4B is translated by Δx in the x-axis direction, translated by Δy in the y-axis direction, moved by Δθ around the z-axis, and then the outer circumferential edge. When ΔA moves toward the inside of 4B, it overlaps with the outer peripheral edge 4A. That is, in the xy coordinate system, the outer peripheral edge 4B is translated by Δx in the x-axis direction, is translated by Δy in the y-axis direction, is rotated by Δθ around the z-axis, and is then directed toward the inner side of the outer peripheral edge 4B. When ΔA is moved, the outer peripheral edge 4A overlaps (see FIGS. 4 and 5). Here, overlapping with the outer peripheral edge 4A includes overlapping with an extension line of the outer peripheral edge 4A.

  Therefore, the control unit 50 obtains an optimal solution of Δx, Δy, Δθ, ΔA for superimposing the outer peripheral edge 4B on the outer peripheral edge 4A in each imaging range FR1 to FR8, thereby shifting the position of each imaging range FR1 to FR8. And the dimensional change amount ΔA are calculated. As a solution for the optimization problem, for example, a general solution such as a quasi-Newton method is used.

  In order to obtain the optimum solution of these four independent variables, usually, four or more imaging ranges are imaged by the imaging unit 60. This is because each imaging range is sufficiently narrow, and in each image, the outer peripheral edge 4 can often be regarded as a straight line.

  However, there may be a case where the optimal solution of the four independent variables can be obtained by imaging the two imaging ranges with the imaging unit 60. As such a case, the case where the outer periphery 4 is a broken line in each image is mentioned, for example. A broken line is formed in the corner | angular part of the glass plate 2, for example. Therefore, in order to obtain the optimum solution of the four independent variables, there are cases where two or more imaging ranges may be imaged by the imaging unit 60.

  As the number of imaging ranges increases, the calculation accuracy of the optimum solution improves, but the imaging time becomes longer. Therefore, the number of imaging ranges may be set as appropriate based on the calculation accuracy of the optimal solution and the imaging time.

  As described above, the control unit 50 according to the present embodiment calculates the positional deviation and dimensions of the imaging ranges FR1 to FR8 based on the positional relationship between the outer periphery 4A and the outer periphery 4B in each imaging range FR1 to FR8. The amount of change ΔA is calculated. Since the dimensional change amount ΔA is calculated using the image, the target locus can be corrected with higher accuracy than in the case where the change amount of the grindstone diameter is calculated using a function of the grinding time as in the prior art. Further, even when a positional deviation occurs in each of the imaging ranges FR1 to FR8, the dimensional change amount ΔA can be calculated with high accuracy, and the target locus can be corrected with high accuracy. Therefore, the dimension of the glass plate 2 after processing can be stabilized.

  The control unit 50 according to the present embodiment calculates each of the imaging ranges FR1 to FR8 by calculating both the parallel movement amounts Δx and Δy and the rotational movement amount Δθ for superimposing the outer peripheral edge 4B on the outer peripheral edge 4A. The positional deviation of the ranges FR1 to FR8 is calculated. Since both the parallel movement amounts Δx and Δy and the rotational movement amount Δθ are calculated, it is possible to cope with various temperature changes of the frame Fr and to cope with various dimensional changes and shape changes of the frame Fr.

  On the other hand, a dimensional change and a shape change accompanying a temperature change of the frame Fr may show a specific tendency. In this case, the control unit 50 may calculate only one of the parallel movement amounts Δx and Δy and the rotational movement amount Δθ. There may be a case where the positional deviation of each of the imaging ranges FR1 to FR8 can be accurately calculated by calculating only one of them.

  The control unit 50 according to the present embodiment calculates a parallel movement amount and a rotational movement amount for superimposing the outer peripheral edge 4B on the outer peripheral edge 4A. The movement amount may be calculated. In either case, it is possible to calculate the positional deviation of each imaging range FR1 to FR8.

  By the way, when there is no positional shift between the imaging ranges FR1 to FR8, since Δx, Δy, and Δθ are zero, the controller 50 only needs to calculate ΔA. In order to obtain only ΔA, it is sufficient to image one imaging range with the imaging unit 60.

  In the short term, it can often be assumed that there is no displacement in the imaging range. Therefore, the control unit 50 changes the dimensions based on the positional relationship between the outer peripheral edge 4 after grinding of one glass plate 2 and the outer peripheral edge 4 after grinding of the other glass plate 2 in one imaging range. Only the amount ΔA may be calculated, and the target locus may be corrected based on the calculated dimensional change amount ΔA.

  The calculation of only the dimensional change amount ΔA may be performed in combination with the calculation of both the positional deviation of each imaging range FR1 to FR8 and the dimensional change amount ΔA. The calculation of only the dimensional change amount ΔA requires only one imaging range, so that the imaging time is short. Therefore, the frequency of calculating only the dimensional change amount ΔA may be higher than the frequency of calculating both the positional deviation of each of the imaging ranges FR1 to FR8 and the dimensional change amount ΔA.

  As mentioned above, although embodiment of the processing method etc. were described, this invention is not limited to the said embodiment etc., A various deformation | transformation and improvement are possible within the range of the summary of this invention described in the claim. is there.

  For example, in the above embodiment, correction of the target locus in the XY coordinate system is not performed from the grinding process of the A-th glass plate 2 to the grinding process of the B-th glass plate 2, but in the XY coordinate system, The target trajectory may be corrected. In this case, the control unit 50 calculates the displacement of each of the imaging ranges FR1 to FR8 and calculates the dimensional change ΔA based on the correction of the target locus in the XY coordinate system.

  The correction of the target locus in the XY coordinate system may include at least one of parallel movement and rotational movement of the target locus in the XY coordinate system. The parallel movement or rotational movement of the target locus in the XY coordinate system is performed when the posture of the glass plate 2 placed on the table 10 slightly changes due to wear of the alignment device or wear of the transport device.

  When the translation or rotation of the target locus in the XY coordinate system is performed during the process from the grinding of the A-th glass plate to the grinding of the B-th glass plate, the control unit 50 uses the XY coordinate system. Then, the outer peripheral edge 4A is translated or rotated together with the target locus to correct the position of the outer peripheral edge 4A. Then, the control unit 50 calculates the displacement of each imaging range FR1 to FR8 and calculates the dimensional change ΔA based on the corrected position of the outer peripheral edge 4A.

  In the above embodiment, the imaging unit 60 is fixed with respect to the frame Fr. However, the imaging unit 60 may be movable with respect to the frame Fr. A guide or the like is laid on the frame Fr, and a bracket or the like that supports the imaging unit 60 is attached to the slider that travels along the guide. In this case, not only the temperature change of the frame Fr but also the position change of the imaging ranges FR1 to FR8 may be caused by the temperature change of the guide or the temperature change of the bracket. Also in this case, it is possible to calculate the positional deviation and the dimensional change amount ΔA of the imaging ranges FR1 to FR8.

  FIG. 6 is a diagram illustrating an example of image processing of an image captured by the imaging unit in FIG. In FIG. 6, the arrow direction represents the direction in which the change in luminance of the image is examined. The control unit 50 examines a change in luminance of the image along the arrow direction.

  The luminance of the image is uniformly low in the portion where the glass plate 2 is not present, and changes according to the surface shape in the portion where the glass plate 2 is present. The portion where the surface shape is flat has a low luminance, and the portion where the surface shape changes abruptly, such as an outer peripheral edge or a defective portion, has a high luminance. The outer peripheral edge is usually easily damaged by cutting or grinding, and a defective part is likely to occur.

  When a change in luminance is examined from one of two opposite sides of the image toward the other, a point where the luminance rapidly increases is detected as the outer peripheral edge 4 of the glass plate 2. The outer peripheral edge 4 of the glass plate 2 is detected based on the absolute value of luminance, the change rate of luminance, and the like. The point where the luminance increases rapidly is detected by examining the change in luminance in a specific direction.

  FIG. 6A shows a point P1 at which the luminance rapidly increases when the luminance change is examined in the vertical direction (hereinafter referred to as “first direction”) from the upper side of the image toward the lower side of the image. An approximate straight line ASL1 is shown. In part of FIG. 6A, the change in luminance is examined only inside the glass plate 2. Therefore, the brightness increases rapidly at the defective portion of the glass plate 2. Further, the error between the point P1 at which the brightness changes rapidly and the approximate straight line ASL1 is large.

  FIG. 6B shows a point P2 at which the brightness rapidly increases when the change in brightness is examined in the horizontal direction (hereinafter referred to as “second direction”) from the left side of the image toward the right side of the image. An approximate straight line ASL2 is shown. In FIG. 6B, a change in luminance is examined from the inside of the glass plate 2 toward the outside. For this reason, the luminance increases rapidly at a position slightly inside the outer peripheral edge 4 of the glass plate 2. Moreover, the brightness | luminance is increasing rapidly in the defect part of the glass plate 2. FIG. As a result, there is a large error between the point P2 at which the brightness rapidly increases and the approximate straight line ASL2.

  FIG. 6 (c) shows a point P3 at which the luminance rapidly increases when the change in luminance is examined in the horizontal direction (hereinafter referred to as “third direction”) from the right side of the image toward the left side of the image. An approximate straight line ASL3 is shown. In FIG. 6C, the change in luminance is examined from the outside to the inside of the glass plate 2. Therefore, the luminance increases rapidly at the position of the outer peripheral edge 4 of the glass plate 2. Further, the error between the point P3 at which the luminance increases rapidly and the approximate straight line ASL3 is small.

  When examining the change in luminance in the vertical direction (hereinafter referred to as the “fourth direction”) from the lower side of the image toward the upper side of the image, a part of the image is similar to FIG. The change in luminance is examined from the inside to the outside, and in the other part of the image, the change in luminance is examined only inside the glass plate 2 as in FIG. Therefore, the detection accuracy of the outer peripheral edge 4 of the glass plate 2 is low.

  As apparent from FIGS. 6A to 6C, the detection accuracy of the outer peripheral edge 4 of the glass plate 2 is improved by examining the change in luminance in the third direction as shown in FIG. 6C. it can. The direction for examining the change in luminance may be set in advance.

  By the way, when changing the relative position between the table 10 and the imaging unit 60 in order to change the imaging range of the glass plate 2 held by the table 10, as shown in FIG. 3, the xy coordinate system for each of the imaging ranges FR1 to FR8. The direction of the glass plate 2 changes. Therefore, for each of the imaging ranges FR1 to FR8, it is necessary to select a direction for examining a change in luminance from the first direction to the third direction.

  Therefore, the control unit 50 examines a change in luminance in the first direction, a change in luminance in the second direction, and a change in luminance in the third direction in each image, and determines the luminance in the first to third directions. The direction in which the error between the point at which the value rapidly increases and the approximate line is the smallest is examined. For example, when the approximation method is the least square method, the direction in which the sum of the squares of the residuals is the smallest among the first direction to the third direction is examined. The control unit 50 selects the direction with the smallest error as the direction used for detecting the outer peripheral edge 4 of the glass plate 2.

2 Glass plate 4 Outer peripheral edge 10 Table 20 Rotary grindstone 30 Drive unit 50 Control unit 60 Imaging unit

Claims (6)

According to the target trajectory of the rotation center of the rotating grindstone with respect to the table, the table and the rotating grindstone are moved relative to each other, and the grinding process for grinding the outer peripheral edge of the plate-like body held by the table with the outer peripheral edge of the rotating grindstone, A method for processing a plate-like body, wherein the plate-like body is replaced and repeated,
Imaging an outer peripheral edge of the one plate-like body held by the table after the grinding process by an imaging unit in a plurality of preset imaging ranges;
Imaging the outer peripheral edge of the other plate-like body held by the table after the grinding process by the imaging unit within the plurality of preset imaging ranges;
Based on the positional relationship between the outer peripheral edge after the grinding of the one plate-like body and the outer peripheral edge after the grinding of the other one plate-like body in each imaging range, the one Calculating a dimensional change amount between the outer peripheral edge of the plate-like body after the grinding process and the outer peripheral edge of the other plate-like body after the grinding process, and a positional deviation of each imaging range. The processing method of a plate-shaped body.   In each of the imaging ranges, the rotational movement amount and parallelism for overlapping the outer peripheral edge of the one plate-like body after the grinding process on the outer peripheral edge of the other one plate-like body after the grinding process. The plate-like body processing method according to claim 1, wherein the displacement of each imaging range is calculated by calculating at least one of the movement amounts.   The plate-like body processing method according to claim 1, wherein the target locus is corrected based on the dimensional change amount, and the grinding is performed according to the corrected target locus. A table for holding a plate-like body;
A rotating grindstone for grinding an outer peripheral edge of the plate-like body held by the table;
A drive unit for relatively moving the table and the rotating grindstone;
A control unit for controlling the drive unit according to a target trajectory of the rotation center of the rotary grindstone with respect to the table, and performing grinding processing for grinding an outer peripheral edge of the plate-like body with the outer peripheral edge of the rotary grindstone;
An imaging unit that images the outer peripheral edge after the grinding of the plate-like body held by the table in a plurality of preset imaging ranges;
The control unit, based on the positional relationship between the outer peripheral edge of the one plate-like body after the grinding process and the outer peripheral edge of the other one plate-like body after the grinding process in each of the imaging ranges, Calculating a dimensional change amount between an outer peripheral edge of the one plate-like body after the grinding and an outer peripheral edge of the other one of the plate-like bodies after the grinding, and a positional deviation of each imaging range; Plate body processing equipment.   The control unit is configured to overlap the outer peripheral edge of the one plate-like body after the grinding process with the outer peripheral edge of the other one plate-like body after the grinding process in each imaging range. The plate-shaped processing apparatus according to claim 4, wherein the displacement of each imaging range is calculated by calculating at least one of a rotational movement amount and a parallel movement amount.   The plate-like body processing apparatus according to claim 4, wherein the control unit corrects the target locus based on the dimensional change amount and performs the grinding according to the corrected target locus.