JP2018066053A5 - - Google Patents
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- JP2018066053A5 JP2018066053A5 JP2016207307A JP2016207307A JP2018066053A5 JP 2018066053 A5 JP2018066053 A5 JP 2018066053A5 JP 2016207307 A JP2016207307 A JP 2016207307A JP 2016207307 A JP2016207307 A JP 2016207307A JP 2018066053 A5 JP2018066053 A5 JP 2018066053A5
- Authority
- JP
- Japan
- Prior art keywords
- mask
- resin
- metal
- vapor deposition
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000011347 resin Substances 0.000 claims 25
- 229920005989 resin Polymers 0.000 claims 25
- 239000002184 metal Substances 0.000 claims 16
- 229910052751 metal Inorganic materials 0.000 claims 16
- 238000007740 vapor deposition Methods 0.000 claims 12
- 238000001704 evaporation Methods 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 8
- 239000000463 material Substances 0.000 claims 5
- 239000007769 metal material Substances 0.000 claims 5
- 238000002360 preparation method Methods 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 230000000875 corresponding Effects 0.000 claims 3
- 229920001187 thermosetting polymer Polymers 0.000 claims 3
- 229910000640 Fe alloy Inorganic materials 0.000 claims 2
Claims (11)
前記樹脂マスクが、樹脂材料を含有しており、
前記金属マスクが、金属材料を含有している、
蒸着マスク。 A resin mask having a resin mask opening corresponding to a pattern to be formed by vapor deposition, and a metal mask having a metal mask opening are stacked so that the resin mask opening and the metal mask opening overlap. A mask,
The resin mask, which contains a resin material,
It said metal mask, contains a metallic material,
Evaporation mask.
請求項１に記載の蒸着マスク。 The resin material is a cured product of a thermosetting resin,
The vapor deposition mask according to claim 1.
請求項１又は２に記載の蒸着マスク。 The metal material is an iron alloy,
The vapor deposition mask according to claim 1.
前記蒸着マスクが、請求項１乃至３の何れか１項に記載の蒸着マスクである、
フレーム付き蒸着マスク。 An evaporation mask with a frame in which an evaporation mask is fixed to a frame,
The vapor deposition mask is the vapor deposition mask according to any one of claims 1 to 3,
Deposition mask with frame.
樹脂板上に、金属マスク開口部を有する金属マスクが積層されてなり、
前記樹脂板が、樹脂材料を含有しており、
前記金属マスクが、金属材料を含有している、
蒸着マスク準備体。 A resin mask having a resin mask opening corresponding to a pattern to be formed by vapor deposition, and a metal mask having a metal mask opening are stacked so that the resin mask opening and the metal mask opening overlap. A deposition mask preparation for obtaining a mask,
On a resin plate, a metal mask having a metal mask opening is laminated,
It said resin plate, and contains a resin material,
It said metal mask, contains a metallic material,
Preparation body for evaporation mask.
請求項５に記載の蒸着マスク準備体。 The resin material is a cured product of a thermosetting resin,
A deposition mask preparation according to claim 5.
請求項５又は６に記載の蒸着マスク準備体。 The metal material is an iron alloy,
A deposition mask preparation according to claim 5.
金属材料を含む金属板上に、樹脂材料を含む樹脂板を設ける工程と、
前記金属板に、金属マスク開口部を形成する工程と、
前記樹脂板に、樹脂マスク開口部を形成する工程と、
を含む、
蒸着マスクの製造方法。 A resin mask having a resin mask opening corresponding to a pattern to be formed by vapor deposition, and a metal mask having a metal mask opening are stacked so that the resin mask opening and the metal mask opening overlap. A method of manufacturing a mask,
A step of providing a resin plate containing a resin material on a metal plate containing a metal material,
Forming a metal mask opening in the metal plate;
Forming a resin mask opening in the resin plate;
The including,
Manufacturing method of evaporation mask.
請求項８に記載の蒸着マスクの製造方法。 The resin plate is a resin plate containing a cured product of a thermosetting resin,
A method for manufacturing the vapor deposition mask according to claim 8.
蒸着マスクを用いて蒸着対象物に蒸着パターンを形成する蒸着パターン形成工程を含み、
前記蒸着パターン形成工程で用いられる前記蒸着マスクが、請求項１乃至３の何れか１項に記載の蒸着マスク、又は請求項４に記載のフレーム付き蒸着マスクである、
有機半導体素子の製造方法。 A method for manufacturing an organic semiconductor element,
Including an evaporation pattern forming step of forming an evaporation pattern on the object to be evaporated using an evaporation mask,
The vapor deposition mask used in the vapor deposition pattern forming step is the vapor deposition mask according to any one of claims 1 to 3, or the vapor deposition mask with a frame according to claim 4.
A method for manufacturing an organic semiconductor device.
請求項１０に記載の有機半導体素子の製造方法により製造された有機半導体素子が用いられる、
有機ＥＬディスプレイの製造方法。 A method for manufacturing an organic EL display,
An organic semiconductor device manufactured by the method for manufacturing an organic semiconductor device according to claim 10 is used,
A method for manufacturing an organic EL display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016207307A JP2018066053A (en) | 2016-10-21 | 2016-10-21 | Vapor deposition mask, vapor deposition mask with frame, vapor deposition mask preparation body, method of manufacturing vapor deposition mask, method of manufacturing organic semiconductor element, and method of manufacturing organic el television |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016207307A JP2018066053A (en) | 2016-10-21 | 2016-10-21 | Vapor deposition mask, vapor deposition mask with frame, vapor deposition mask preparation body, method of manufacturing vapor deposition mask, method of manufacturing organic semiconductor element, and method of manufacturing organic el television |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018066053A JP2018066053A (en) | 2018-04-26 |
| JP2018066053A5 true JP2018066053A5 (en) | 2020-01-09 |
Family
ID=62085760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016207307A Pending JP2018066053A (en) | 2016-10-21 | 2016-10-21 | Vapor deposition mask, vapor deposition mask with frame, vapor deposition mask preparation body, method of manufacturing vapor deposition mask, method of manufacturing organic semiconductor element, and method of manufacturing organic el television |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2018066053A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6658790B2 (en) * | 2018-04-19 | 2020-03-04 | 大日本印刷株式会社 | Evaporation mask, evaporation mask with frame, evaporation mask preparation, method of manufacturing evaporation mask, method of manufacturing organic semiconductor element, method of manufacturing organic EL display, and method of forming pattern |
| JP7120262B2 (en) * | 2020-02-06 | 2022-08-17 | 大日本印刷株式会社 | Method for manufacturing vapor deposition mask preparation, method for manufacturing framed vapor deposition mask preparation, and framed vapor deposition mask preparation |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014067500A (en) * | 2012-09-24 | 2014-04-17 | Dainippon Printing Co Ltd | Method of producing material for vapor deposition mask, method of manufacturing vapor deposition mask |
| JP6078747B2 (en) * | 2013-01-28 | 2017-02-15 | 株式会社ブイ・テクノロジー | Vapor deposition mask manufacturing method and laser processing apparatus |
| JP6217197B2 (en) * | 2013-07-11 | 2017-10-25 | 大日本印刷株式会社 | Vapor deposition mask, metal mask with resin layer, and method of manufacturing organic semiconductor element |
| US10384417B2 (en) * | 2015-01-20 | 2019-08-20 | Sharp Kabushiki Kaisha | Deposition mask and manufacturing method |
-
2016
- 2016-10-21 JP JP2016207307A patent/JP2018066053A/en active Pending
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