JP2018058694A - Long body supporting apparatus and supporting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a long body supporting device and supporting method capable of surely supporting a long body at a predetermined position of a supporting shaft.SOLUTION: A long body supporting device 20 for supporting a long body RS wound so as to have a hole CH in the center includes: a supporting shaft 21 for supporting the long body RS by being inserted into the hole CH; and discriminating means 23 for discriminating that the long body RS is supported at a predetermined position of the supporting shaft 21. The discrimination means 23 includes: an abutting member 23A to which the long body RS to be inserted into the support shaft 21 abuts directly or indirectly; and detection means 23C for detecting the position of the abutting member 23A.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a long body support device and a support method.

  2. Description of the Related Art Conventionally, a long body support device that supports a long body wound with a hole in the center by a support shaft is known (see, for example, Patent Document 1).

JP 2013-115367 A

  In the conventional long body support device as described in Patent Document 1, even if the long body is supported at a position shifted from a predetermined position with respect to the support shaft, there is no way to notice it, and rarely This causes a disadvantage that the long body is supplied in a state where the supply position is shifted.

  An object of the present invention is to provide a long body support device and a support method that can reliably support a long body at a predetermined position of a support shaft.

  The long body support device of the present invention is a long body support device that supports a long body wound so as to have a hole in the center, and supports the long body by being inserted into the hole. A support shaft; and a determining means for determining that the long body is supported at a predetermined position of the support shaft, wherein the determining means is configured such that the long body inserted into the support shaft is directly or indirectly And a detecting means for detecting the position of the abutting member.

In the long body support device of the present invention, the determination means biases the contact member in a direction opposite to the insertion direction of the long body, and the insertion direction is determined by the long body inserted into the support shaft. It is preferable to provide a buffer means for reducing the impact applied to the.
The long body support device of the present invention preferably includes output means for receiving a determination result of the determination means and outputting a predetermined signal.

  The long body support method of the present invention is a long body support method for supporting a long body wound so as to have a hole in the center, and supports the long body by being inserted into the hole. A supporting step and a determining step for determining that the elongated body is supported at a predetermined position, wherein the determining step directly or indirectly contacts the elongated body inserted in the supporting step. And a detecting step of detecting the position of the abutting member.

  According to the invention according to claim 1 or 4, since the technique for determining that the long body is supported at the predetermined position of the support shaft has been obtained, the long body can be reliably supported at the predetermined position of the support shaft. it can.

According to the invention which concerns on Claim 2, the said long body support apparatus or the processing apparatus by which the said long body support apparatus was employ | adopted can be protected from the impact at the time of supporting a long body on a support shaft.
According to the invention of claim 3, since it is possible to notify the user of the long body support device that the long body is supported at a predetermined position of the support shaft, the long body is more reliably supported by the support shaft. Can be supported at a predetermined position.

The side view which shows the elongate body support apparatus which concerns on one Embodiment of this invention. Operation | movement explanatory drawing of a elongate body support apparatus. The perspective view which shows the elongate body support apparatus which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the front side in FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis and “down” is the opposite direction, “ The “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

  1 and 2, a sheet sticking device 10 as a processing device is wound around a cylindrical member AM having a through-hole so that a raw fabric RS as a long body wound so as to have a hole CH at the center. A long body support device 20 for supporting, and a pasting means 30 for pressing and sticking the adhesive sheet AS to a semiconductor wafer (hereinafter also simply referred to as “wafer”) WF as an adherend, and supporting the wafer WF. It is arranged above the wafer transfer means 40 that transfers it. In the case of the present embodiment, the raw fabric RS is employed in which the adhesive sheet AS is temporarily attached to one surface of the strip-shaped release sheet RL with a predetermined interval.

  The long body support device 20 includes a support roller 21 as a support shaft that supports the original fabric RS by being inserted into the hole CH, and a movement restricting unit that restricts the movement of the original fabric RS relative to the support roller 21 in the front-rear direction. 22, determination means 23 for determining that the original fabric RS is supported at a predetermined position of the support roller 21, and output means 24 for receiving a determination result of the determination means 23 and outputting a predetermined signal.

The support roller 21 includes an annular flange portion 21A and a stopper 21B supported by the flange portion 21A.
The movement restricting means 22 includes an annular guide plate 22B supported by a cylindrical member 22A having an opening through which the support roller 21 is inserted, and a screw for fixing the guide plate 22B to the support roller 21. And fixing means 22C such as a member or a clamper.
The discriminating means 23 urges the contact member 23A in direct contact with the original fabric RS inserted in the support roller 21 and the contact member 23A in the direction opposite to the insertion direction ID of the original fabric RS. A coil spring 23B serving as a buffering means for reducing the impact applied to the insertion direction ID by the raw material RS inserted into the sheet, and a detecting means 23C for detecting the position of the contact member 23A.
The contact member 23 </ b> A has a disk shape in which an opening through which the support roller 21 is inserted is formed at the center thereof, and is configured to be movable in the axial direction (front-rear direction) of the support roller 21.
One end side (rear side) of the coil spring 23B is supported by the flange portion 21A, and the other end side (front side) supports the contact member 23A.
The detection unit 23C includes an imaging unit such as a camera or a microscope, or a distance measurement unit such as an optical sensor or a proximity sensor that measures the distance to the contact member 23A.
The output unit 24 includes an indicator lamp 24A that receives the determination result of the determination unit 23 and outputs light as a predetermined signal.

  The affixing means 30 is a guide roller 31 for guiding the original fabric RS supported by the support roller 21, a peeling plate 32 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL, and pressing the adhesive sheet AS against the wafer WF. Then, a release roller RL is sandwiched between a pressing roller 33 as a pressing means to be pasted and a pinch roller 34, and a driving roller 36 is driven by a rotation motor 35 as a driving device, and a recovery roller 37 is to recover the release sheet RL. And the entire support roller 21 is supported by the frame 38.

  The wafer transfer means 40 is supported by a linear motor 41 as a driving device and a slider 41A of the linear motor 41, and a table having a support surface 42A capable of attracting and holding the wafer WF by a decompression means (not shown) such as a decompression pump or a vacuum ejector. 42.

The procedure for sticking the adhesive sheet AS to the wafer WF in the sheet sticking apparatus 10 will be described.
First, a user (hereinafter simply referred to as “user”) of the sheet sticking apparatus 10 in FIG. 2A shows a sheet sticking apparatus 10 in a state indicated by a solid line in FIG. As shown in FIG. 2, the original fabric RS is moved in the insertion direction ID and set on the support roller 21. At this time, after the raw fabric RS contacts the contact member 23A, the contact member 23A is pushed rearward against the urging force of the coil spring 23B, and as shown in FIG. The member 23A contacts the stopper 21B. When the contact member 23A comes into contact with the stopper 21B, the detection means 23C detects the contact member 23A, the original fabric RS is inserted into the support roller 21 by a predetermined distance, and is placed at a predetermined position in the axial direction of the support roller 21. It is determined that it was supported. Then, the output means 24 outputs a predetermined external output signal such as electricity or radio wave, and the indicator lamp 24A receives the external output signal and turns on the light. Thereby, the user can recognize that the original fabric RS is set at a predetermined position of the support roller 21.

  Next, as shown in FIG. 2B, the user inserts the guide plate 22B into the support roller 21 so that the raw material RS is sandwiched between the contact member 23A that contacts the stopper 21B, and the guide plate is fixed by the fixing means 22C. After fixing 22B to the support roller 21, as shown in FIG. Thereafter, when the user inputs an automatic operation signal via an operation means (not shown) such as an operation panel or a personal computer, the pasting means 30 drives the rotation motor 35 to feed out the original fabric RS. When the leading adhesive sheet AS is peeled off by the peeling plate 32 for a predetermined length by an imaging means such as a camera or a detection means (not shown) such as an optical sensor, the sticking means 30 drives the rotation motor 35. Is stopped and the unit enters a standby state.

  Next, when the wafer WF is placed on the table 42 by a user or a transfer means (not shown) such as an articulated robot, the wafer transfer means 40 drives a pressure reduction means (not shown) and sucks the wafer WF by the support surface 42A. After being held, the linear motor 41 is driven to move the table 42 to the left. When the detection means (not shown) such as an image sensor such as a camera or an optical sensor detects that the wafer WF has reached a predetermined position, the sticking means 30 drives the rotation motor 35 and the moving speed of the table 42 The raw fabric RS is sent out in accordance with. As a result, the adhesive sheet AS is peeled off from the release sheet RL by the release plate 32, and is pressed against the wafer WF by the pressing roller 33 as shown by a two-dot chain line in FIG. 1, and the next adhesive sheet AS is attached to the release plate 32. When the detecting means (not shown) detects that the predetermined length has been peeled off, the sticking means 30 stops driving the rotation motor 35 and enters the standby state again.

  When the application of the adhesive sheet AS to the wafer WF is completed, the wafer transfer unit 40 stops driving the linear motor 41 and a decompression unit (not shown). When the user or a transfer means (not shown) transfers the wafer WF with the adhesive sheet AS attached to the next process, the wafer transfer means 40 drives the linear motor 41 to return the table 42 to the initial position. Similar operations are repeated.

  According to the embodiment as described above, since the technique for determining that the original fabric RS is supported at the predetermined position of the support roller 21 is obtained, the original fabric RS can be reliably supported at the predetermined position of the support roller 21. it can.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

For example, the long body support device 20 may include a support roller 21C and a contact member 23E as shown in FIGS. 3A and 3B, instead of the support roller 21 and the contact member 23A. The support roller 21C includes a guide groove 21D formed in a spiral shape on the outer peripheral surface thereof. The contact member 23E is formed in a plate shape having an oval shape, projects from the inner edge of the opening 23F through which the support roller 21C is inserted, and the opening 23F toward the center of the opening 23F, and engages with the guide groove 21D. And a protruding portion 23G to be stopped.
The long body support device 20 may include a drive device that rotates the support rollers 21 and 21C around their axial centers. When the configuration shown in FIGS. 3A and 3B is adopted, The support roller 21C is rotated by a driving device, and the contact member 23E is moved to the initial position shown in FIG. When the support roller 21C supports the original fabric RS, the contact member 23E moves along the guide groove 21D, and when the original fabric RS reaches a predetermined position of the support roller 21, FIG. As shown, the detection means 23C detects the contact member 23A. When the support roller 21C is not driven by a driving device, the user may rotate the support roller 21C and move the contact member 23E to the initial position.
The long body support device 20 is a wound long body that is not wound around the cylinder member AM, but is wound only with the raw fabric RS so as to have a hole CH in the center, or the hole CH is a through hole. There may be employed one in which the hole CH is not a through-hole, or the length in the width direction (front-rear direction) of the tubular member AM is shorter than the length in the width direction (front-rear direction) of the original fabric RS. A tube member AM having a length in the width direction that is longer than a width in the width direction of the original fabric RS may be employed, and a length in the width direction of the tube member AM is longer than a length in the width direction of the original fabric RS. When long ones are employed, the contact members 23A and 23E and the guide plate 22B may be configured such that the original fabric RS inserted into the support rollers 21 and 21C is indirectly contacted via the tubular member AM. It is good, the hole which can cross cylinder member AM is provided, and the original fabric RS directly contacts Sea urchin may be configured.
The support shaft is not limited to a columnar shape, and may be a cylindrical shape or a polygonal shape, provided non-rotatable with respect to the frame 38, and the original fabric RS may rotate with respect to the support shaft. You may be supported by another support body.
The stopper 21B may be a single piece or a plurality of stoppers. The stopper 21B may be moved in the front-rear direction according to the length in the width direction of the original fabric RS or the insertion distance to adjust the predetermined position of the original fabric RS with respect to the support rollers 21 and 21C. The configuration may be possible or may not be adopted, and the shape, material, arrangement position and the like are not limited at all.
The movement restricting means 22 may or may not be a guide plate 22B having an outer shape other than a circle, such as a triangle or a polygon more than a quadrangle, or an ellipse.
In place of or in combination with the movement restricting means 22 shown in the above embodiment, the outer peripheral surface of the support shaft expands and contracts, or the protrusion protrudes from and protrudes from the outer peripheral surface of the support shaft. It may be one that restricts the movement of the original fabric RS in the front-rear direction, and one or a plurality of such protrusions appear and disappear may be provided on the support shaft.
The discriminating means 23 may include an inclination restricting means for restricting the contact members 23A and 23E from being inclined in the front-rear direction with respect to the support rollers 21 and 21C, and the contact members 23A and 23E are inclined by the restricting means. Thus, the detection means 23 </ b> C is prevented from being detected, and the original fabric RS can be accurately supported at a predetermined position of the support roller 21.
The contact member 23A may have any shape such as a triangle, a quadrilateral or more polygonal shape, an elliptical shape, the original fabric RS inserted into the support roller 21 directly or indirectly contacts, and the detection means 23C. Any device can be used as long as the position can be detected.
The buffer means may be constituted by an elastic member such as a leaf spring, a disc spring, rubber, resin, or sponge, a shock absorber, a driving device, or the like, or may be supported on the outer peripheral surface of the support rollers 21 and 21C. When the buffering means is not employed, the contact members 23A and 23E may be removed from the support rollers 21 and 21C, or the contact members 23A and 23E may be removed from the support rollers 21 and 21C. If you do not like it, you can move in the axial direction of the support rollers 21 and 21C, and connect the contact members 23A and 23E to the support rollers 21 and 21C with a string or thread so as not to come out of the support rollers 21 and 21C. The support rollers 21 and 21C are formed with a narrow portion having a one-step diameter so that the contact members 23A and 23E can move in the axial direction of the support rollers 21 and 21C. It may be or.
The output unit 24 may output a character, symbol or sound as a predetermined signal in response to the determination result of the determination unit 23, or may suppress the operation of the sheet pasting apparatus 10 (inter The lock may be released.

The affixing means 30 may be configured to affix the adhesive sheet AS to the lower surface or the side surface of the wafer WF by placing it upside down or horizontally, or the strip-shaped adhesive sheet is strip-shaped. When the original fabric temporarily attached to the release sheet RL or the original fabric made of a strip-like adhesive sheet not temporarily attached to the release sheet RL is adopted, the strip-like adhesive sheet is cut into a predetermined shape by a cutting means. The adhesive sheet AS may be formed and the adhesive sheet AS may be attached.
The component of the sticking means 30 may be supported on a support different from the frame 38.

  The wafer transfer means 40 may fix the position of the table 42, or move the sticking means 30 while moving the table 42 to stick the adhesive sheet AS to the wafer WF. If the wafer WF is moved by another apparatus, it may not be necessary.

The long body is an adhesive sheet original fabric in which a plurality of adhesive sheets AS are temporarily attached to a strip-shaped release sheet RL at a predetermined interval, a strip-shaped adhesive sheet composed of a base material and an adhesive layer, a single layer or a multi-layer Besides paper, it may be an electric wire, wire, thread, cloth, rope, hose, steel plate, resin plate, etc., and is not limited at all.
The processing apparatus is, for example, a winding device that winds up the original fabric RS, an inspection device that inspects the original fabric RS, a cutting device that cuts the original fabric RS into a predetermined length, and an adhesive sheet AS using the original fabric RS. It is not limited in any way, such as a peeling device for peeling the protective sheet from the wafer WF, and the long body support device 20 of the present invention has a support shaft on the side for feeding the raw fabric RS in these devices, and the raw fabric RS. It can be employed as a support shaft on the winding side.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be of an adhesive form such as pressure sensitive adhesive or heat sensitive adhesive, When the heat-sensitive adhesive sheet AS is employed, it may be bonded by an appropriate method such as providing an appropriate coil heater for heating the adhesive sheet or a heating means such as a heat pipe. The adhesive sheet AS is, for example, a single layer having only an adhesive layer, a layer having an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer, and the double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the support shaft is not limited as long as it can support the long body by being inserted into the hole, in light of the technical common sense at the time of filing, and within the technical scope. (Description of other means and steps is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed.
In the above-described embodiment, when rollers are employed, a drive device that rotationally drives each roller may be provided, or the surface of each roller may be configured with a member capable of elastic deformation such as rubber or resin. In addition, each roller may be constituted by a member that does not elastically deform, or when a pressing means or pressing member such as a pressing roller or a pressing head is employed, instead of or in combination with those exemplified above, a roller , A pressing member made of a round bar, blade material, rubber, resin, sponge, etc., or a structure of pressing by blowing air such as air or gas, or a pressing means or pressing member The part may be composed of a member that can be elastically deformed, such as rubber or resin, or may be composed of a member that is not elastically deformed, and when a peeling means or a peeling member is employed, a plate-like member, Consists of round bars, rollers, etc. Alternatively, when a structure that supports or holds a supported member such as a supporting (holding) means or a supporting (holding) member is employed, a gripping means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesion A configuration in which a supported member is supported (held) by an agent, an adhesive, magnetic force, Bernoulli adsorption, a drive device, or the like may be employed, and when a cutting means or a cutting blade is employed, the configuration exemplified above Instead of or in combination, cutting blades, laser cutters, ion beams, thermal power, heat, water pressure, heating wires, cutting members such as spraying of gas or liquid, etc., or a combination of appropriate driving equipment You may make it cut | disconnect by moving a cutting member.

20 Long body support device 21 Support roller (support shaft)
23 discriminating means 23A abutting member 23B coil spring (buffer means)
23C detection means 24 output means CH hole RS original fabric (long body)

Claims (4)

A long body support device for supporting a long body wound with a hole in the center,
A support shaft that supports the elongated body by being inserted into the hole;
Determining means for determining that the elongated body is supported at a predetermined position of the support shaft;
The discriminating means includes an abutting member with which a long body inserted into the support shaft abuts directly or indirectly, and a detecting means for detecting the position of the abutting member. Long body support device.   The discriminating means includes a buffering means that urges the contact member in a direction opposite to the insertion direction of the long body and relaxes an impact applied in the insertion direction by the long body inserted into the support shaft. The long body support device according to claim 1, wherein   The long body support device according to claim 1 or 2, further comprising an output unit that receives a determination result of the determination unit and outputs a predetermined signal. A long body support method for supporting a long body wound with a hole in the center,
A supporting step of supporting the elongated body by being inserted into the hole;
A determination step of determining that the elongated body is supported at a predetermined position,
The discriminating step includes a contact step of directly or indirectly contacting the long member inserted in the support step, and a detection step of detecting the position of the contact member. A feature for supporting a long body.

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