JP2018051949A - Transfer device, transfer method and method for production of liquid discharge head - Google Patents

Transfer device, transfer method and method for production of liquid discharge head Download PDF

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JP2018051949A
JP2018051949A JP2016191199A JP2016191199A JP2018051949A JP 2018051949 A JP2018051949 A JP 2018051949A JP 2016191199 A JP2016191199 A JP 2016191199A JP 2016191199 A JP2016191199 A JP 2016191199A JP 2018051949 A JP2018051949 A JP 2018051949A
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adhesive
opening
transfer
transfer plate
support member
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健太 古澤
kenta Furusawa
健太 古澤
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Canon Inc
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a transfer device capable of restraining such risks that the film of an adhesive breaks to generate variation in the thickness of the adhesive, or a desired adhesive pattern is not obtained when an adhesive film is formed on the opening of a transfer plate in transfer of the adhesive.SOLUTION: A transfer device has a transfer plate 60 which is equipped with a transfer surface 61 on which a first opening 62 is provided, and is movable between an adhesive feeding part bringing the transfer surface to adherence of an adhesive 57 to the transfer surface 61 including the periphery of the first opening 62, and the member on which the adhesive 57 adhered to the transfer surface 61 is transferred. Besides, the transfer plate 60 is equipped with a second opening 63 communicating with the first opening 62 on a side face 64 which is different from the transfer surface 61 and is located ahead in a direction heading for the member from the adhesive feeding part.SELECTED DRAWING: Figure 3

Description

本発明は、接着剤を転写する転写装置、接着剤を転写する転写方法、および液体を吐出する液体吐出ヘッドの製造方法に関する。   The present invention relates to a transfer device that transfers an adhesive, a transfer method that transfers an adhesive, and a method of manufacturing a liquid discharge head that discharges liquid.

接着剤を所望の量やパターンでワーク上に設ける方法として、様々な方法が知られている。例えば、所望のパターンに形成された転写版を、スキージなどで厚さが一定になるように管理された回転ステージ上の接着剤に押し付けて転写版に付着させ、その転写版をワークに押し付けて接着剤を転写する「転写方式」が知られている。この転写方式は、転写版の形状でパターンが決まるため、同じパターンを大量に形成する場合に広く使用されている。   Various methods are known as a method of providing an adhesive on a workpiece in a desired amount or pattern. For example, a transfer plate formed in a desired pattern is pressed against an adhesive on a rotary stage that is controlled so as to have a constant thickness by a squeegee or the like, and is attached to the transfer plate, and the transfer plate is pressed against a workpiece. A “transfer method” for transferring an adhesive is known. This transfer method is widely used when a large number of the same pattern is formed because the pattern is determined by the shape of the transfer plate.

特許文献1には、転写方式を用いて転写された接着剤を介し、液体を吐出して記録を行う記録素子基板とこれを支持する支持部材とを接着することが記載されている。   Patent Document 1 describes that a recording element substrate that performs recording by ejecting a liquid and a support member that supports the recording element are bonded via an adhesive transferred using a transfer method.

特開2006−334804号公報JP 2006-334804 A

上記の転写方式において、接着剤を転写するための転写版の転写面に開口があり、この開口の周囲に接着剤を付着させて転写する転写版を用いると、以下の課題が生じる。すなわち、転写面に接着剤を付着させて回転ステージから離した際に転写面の開口に接着剤の膜が張る場合がある。そして、この接着剤の膜が回転ステージ上で破裂すると、接着剤が回転ステージに再付着して、回転ステージ上の接着剤の厚さにばらつきが生じ、次の転写の際に所望の量の接着剤を転写できなくなる恐れがある。また、接着剤が転写されるワーク上で接着剤の膜が破裂すると、所望のパターン以外の場所に接着剤が付着する恐れがある。   In the above-described transfer method, when a transfer plate for transferring an adhesive has an opening on the transfer surface, and the transfer plate is transferred with the adhesive attached around the opening, the following problems occur. That is, when the adhesive is attached to the transfer surface and separated from the rotary stage, an adhesive film may be stretched over the opening of the transfer surface. Then, when the adhesive film ruptures on the rotary stage, the adhesive is reattached to the rotary stage, resulting in variations in the thickness of the adhesive on the rotary stage, and a desired amount of the film is transferred during the next transfer. The adhesive may not be transferred. Further, when the adhesive film ruptures on the work to which the adhesive is transferred, the adhesive may adhere to a place other than the desired pattern.

そこで、本発明は、転写版の開口に張った接着剤が破裂して、接着剤の厚みにばらつきが生じたり、所望の接着剤のパターンが得られなくなったりする恐れを抑制することを目的とする。   Therefore, the present invention aims to suppress the risk that the adhesive stretched on the opening of the transfer plate will rupture, resulting in variations in the thickness of the adhesive, or the inability to obtain a desired adhesive pattern. To do.

本発明の転写装置は、第1の開口が設けられた面を備える転写版であって、前記第1の開口の周囲を含む前記面に接着剤を付着させる接着剤供給部と、前記面に付着された接着剤が転写される部材と、の間で移動可能な前記転写版を有する転写装置において、前記転写版は、前記面と異なる面であり、前記接着剤供給部から前記部材へ向かう方向における前方に位置する面に、前記第1の開口と連通する第2の開口を備えることを特徴とする。   The transfer apparatus according to the present invention is a transfer plate having a surface provided with a first opening, an adhesive supply unit that attaches an adhesive to the surface including the periphery of the first opening, and the surface. In the transfer apparatus having the transfer plate movable between the member to which the adhered adhesive is transferred, the transfer plate is a surface different from the surface, and is directed from the adhesive supply unit to the member. A second opening that communicates with the first opening is provided on a front surface in the direction.

本発明によれば、接着剤の転写の際に転写版の開口に接着剤の膜が張った場合に、この接着剤の膜が破裂して接着剤の厚みにばらつきが生じたり、所望の接着剤のパターンが得られなくなったりする恐れを抑制することができる。   According to the present invention, when the adhesive film is stretched over the opening of the transfer plate during the transfer of the adhesive, the adhesive film is ruptured, resulting in variations in the thickness of the adhesive, or the desired adhesion. The fear that the pattern of the agent cannot be obtained can be suppressed.

第1の実施形態の転写版を示す図である。It is a figure which shows the transfer plate of 1st Embodiment. マウント装置を説明するための模式図である。It is a schematic diagram for demonstrating a mounting apparatus. 転写版の移動と転写された接着剤のパターンを説明するための模式図である。It is a schematic diagram for demonstrating the movement of a transcription | transfer plate, and the pattern of the transferred adhesive agent. 液体吐出ヘッドを示す斜視図である。It is a perspective view which shows a liquid discharge head. 記録素子ユニットを示す斜視図である。FIG. 6 is a perspective view showing a recording element unit. 記録素子基板の構成を説明するための図である。FIG. 4 is a diagram for explaining a configuration of a recording element substrate. 第2の実施形態の転写版を示す図である。It is a figure which shows the transcription | transfer plate of 2nd Embodiment.

以下、本発明を適用可能な例として、液体を吐出する液体吐出ヘッドに関して説明する。具体的には、液体吐出ヘッドを構成する記録素子基板と支持部材との接着に用いられる接着剤を支持部材に転写することを例に挙げ、接着剤の転写装置や転写方法について説明する。なお、接着剤が転写される部材は液体吐出ヘッドの支持部材に限定されず、本発明の転写装置や転写方法をその他の部材への接着剤の転写に用いることも可能である。   Hereinafter, a liquid discharge head that discharges liquid will be described as an example to which the present invention can be applied. Specifically, an adhesive transfer device and a transfer method will be described by taking an example of transferring an adhesive used for bonding a recording element substrate constituting a liquid discharge head and a support member to the support member. Note that the member to which the adhesive is transferred is not limited to the support member of the liquid ejection head, and the transfer apparatus and transfer method of the present invention can be used for transferring the adhesive to other members.

(液体吐出ヘッド)
図4〜図6を用いて、インクジェットプリンタ等に搭載される記録ヘッド40(液体吐出ヘッド)の構成を説明する。図4は記録ヘッド40を示す斜視図である。図5(a)は記録ヘッド40を構成する記録素子ユニット10の全体を示す斜視図であり、図5(b)は記録素子ユニット10を分解して示す斜視図である。図6は記録素子ユニット10を構成する記録素子基板1を示す斜視図であり、その構成を説明するために一部を破断して示している。
(Liquid discharge head)
The configuration of the recording head 40 (liquid ejection head) mounted on an ink jet printer or the like will be described with reference to FIGS. FIG. 4 is a perspective view showing the recording head 40. FIG. 5A is a perspective view showing the entire recording element unit 10 constituting the recording head 40, and FIG. 5B is an exploded perspective view showing the recording element unit 10. FIG. 6 is a perspective view showing the recording element substrate 1 constituting the recording element unit 10, and a part thereof is broken for explaining the configuration.

図4に示すように、記録ヘッド40は、記録素子ユニット10を含むチップタンクユニット20と、インクタンクを収容するタンクホルダ30と、を有しており、これらが組み付けられて構成されている。図5に示すように、記録素子ユニット10は、記録素子基板1、支持部材2、補助板3、電気配線基板4を有している。   As shown in FIG. 4, the recording head 40 includes a chip tank unit 20 including the recording element unit 10 and a tank holder 30 that stores an ink tank, and these are assembled. As shown in FIG. 5, the recording element unit 10 includes a recording element substrate 1, a support member 2, an auxiliary plate 3, and an electric wiring substrate 4.

電気配線基板4は、テープ基材、配線、カバー層の積層体であり、記録素子基板1に対してインクを吐出するための電気信号を送るための配線部材である。電気配線基板4の一例としてはTABテープが挙げられる。電気配線基板4には、記録素子基板1に対応するデバイスホールが設けられており、さらにデバイスホールからインナーリードが露出して設けられている。   The electrical wiring board 4 is a laminated body of a tape base material, wiring, and a cover layer, and is a wiring member for sending an electrical signal for ejecting ink to the recording element substrate 1. An example of the electric wiring board 4 is a TAB tape. The electrical wiring substrate 4 is provided with a device hole corresponding to the recording element substrate 1, and further an inner lead is exposed from the device hole.

記録素子ユニット10の製造は以下のように行うことができる。まず支持部材2に対して補助板3を接着し、次に支持部材2に記録素子基板1を接着し、その後、補助板3に電気配線基板4を接着し、記録素子基板1と電気配線基板4との電気接続を行う。例えば、電気配線基板4としてTABテープを用いる場合、インナーリードボンディング(ILB) で電気配線基板4のインナーリードと記録素子基板1の電極部18とを接合することができる。そして、この記録素子基板1をインクによる腐食や外的衝撃から保護するために、記録素子基板1の外周部を第1の封止剤5で封止する。さらに、記録素子基板1と電気配線基板4との電気接続部の表側を第2の封止剤6で封止する。   The recording element unit 10 can be manufactured as follows. First, the auxiliary plate 3 is bonded to the support member 2, then the recording element substrate 1 is bonded to the support member 2, and then the electric wiring substrate 4 is bonded to the auxiliary plate 3, and the recording element substrate 1 and the electric wiring substrate are bonded. 4 to make electrical connection. For example, when a TAB tape is used as the electrical wiring board 4, the inner leads of the electrical wiring board 4 and the electrode portions 18 of the recording element substrate 1 can be joined by inner lead bonding (ILB). In order to protect the recording element substrate 1 from ink corrosion and external impact, the outer periphery of the recording element substrate 1 is sealed with a first sealant 5. Further, the front side of the electrical connection portion between the recording element substrate 1 and the electrical wiring substrate 4 is sealed with the second sealant 6.

このようにして製造された記録素子ユニット10を、チップタンク11と精度良く位置決めし、両者をネジで固定する。その後、電気配線基板4の外部信号入力端子とプリンタ本体からインクを吐出する記録信号となる電気パルスを受け取るPWB基板12との電気接続を行う。電気配線基板4の外部入力端子側をチップタンク11の外形に合わせて折り曲げ、さらにPWB基板12を熱加締めによってチップタンク11に固定する。このようにして、チップタンクユニット20が完成する。   The recording element unit 10 manufactured in this way is positioned accurately with the chip tank 11, and both are fixed with screws. Thereafter, an electrical connection is made between the external signal input terminal of the electric wiring board 4 and the PWB board 12 that receives an electric pulse serving as a recording signal for ejecting ink from the printer body. The external input terminal side of the electric wiring board 4 is bent according to the outer shape of the chip tank 11, and the PWB board 12 is fixed to the chip tank 11 by heat caulking. In this way, the chip tank unit 20 is completed.

チップタンク11には、記録素子ユニット10を組み付けの位置決め部や記録素子ユニット10に供給されるインクの供給路が設けられており、供給路にはフィルターが溶着され、その周囲にはシールゴムが組み付けられている。   The chip tank 11 is provided with a positioning portion for assembling the recording element unit 10 and a supply path for ink supplied to the recording element unit 10. A filter is welded to the supply path, and a seal rubber is assembled around it. It has been.

図6に示すように、記録素子基板1は、吐出口13が形成された吐出口形成部材14と、供給口15が形成された厚さ0.5〜1.0mmのSi基板16と、を有している。吐出口形成部材14は樹脂材料で形成され、フォトリソ技術を用いて吐出口13や流路が形成されている。Si基板16には、供給口15を挟む両側にそれぞれ1列ずつ千鳥状に配列された吐出素子(記録素子)であるヒーター17の列と、ヒーター17と電気配線で接続され、外部との電気接続のための接続パッドである電極部18と、が設けられている。接続パッドにはAuスタッドバンプが形成されている。   As shown in FIG. 6, the recording element substrate 1 includes a discharge port forming member 14 in which a discharge port 13 is formed, and a Si substrate 16 having a thickness of 0.5 to 1.0 mm in which a supply port 15 is formed. Have. The discharge port forming member 14 is formed of a resin material, and the discharge port 13 and the flow path are formed by using a photolithography technique. The Si substrate 16 is connected to a row of heaters 17 which are ejection elements (recording elements) arranged in a staggered pattern on both sides of the supply port 15, and to the heater 17 by electric wiring, and is electrically connected to the outside. An electrode portion 18 that is a connection pad for connection is provided. Au stud bumps are formed on the connection pads.

(第1の実施形態)
図1〜図3を用いて、記録素子基板1を支持部材2へマウント、接着するプロセスを説明する。図1(a)は本実施形態の転写版60を示す斜視図であり、図1(b)は図1(a)のIB−IB線における断面図であり、図1(c)は転写版60の転写面61を示す上面図である。また、図2はマウント装置50の概略を示す平面図である。また、図3(a)は転写版60の移動を説明するための模式図であり、図3(b)は支持部材2に転写される接着剤57のパターンを示す図である。
(First embodiment)
A process for mounting and bonding the recording element substrate 1 to the support member 2 will be described with reference to FIGS. 1A is a perspective view showing a transfer plate 60 of the present embodiment, FIG. 1B is a cross-sectional view taken along line IB-IB in FIG. 1A, and FIG. 1C is a transfer plate. FIG. 6 is a top view showing 60 transfer surfaces 61. FIG. 2 is a plan view showing an outline of the mounting device 50. 3A is a schematic diagram for explaining the movement of the transfer plate 60, and FIG. 3B is a diagram showing a pattern of the adhesive 57 transferred to the support member 2. As shown in FIG.

まず、図2に示すように、支持部材2は供給部51から、記録素子基板1は供給部52からそれぞれ供給される。スカラロボット53のフィンガーにより、支持部材2は接着剤転写装置54の回転ステージ55(接着剤供給部)に隣接する転写位置決め台56に、記録素子基板1は画像処理ステージ58にそれぞれ供給される。   First, as shown in FIG. 2, the support member 2 is supplied from the supply unit 51, and the recording element substrate 1 is supplied from the supply unit 52. By the fingers of the SCARA robot 53, the support member 2 is supplied to the transfer positioning table 56 adjacent to the rotation stage 55 (adhesive supply unit) of the adhesive transfer device 54, and the recording element substrate 1 is supplied to the image processing stage 58.

次に、接着剤転写装置54の転写位置決め台56に供給された支持部材2は、X方向、Y方向のクランプを交互に動作させて転写位置決め台56に設けられた位置決め版に対して突き当てて位置決めされる。その後、支持部材2は、転写位置決め台56に設けられた吸着穴で吸着され、転写位置決め台56に固定される。   Next, the support member 2 supplied to the transfer positioning table 56 of the adhesive transfer device 54 abuts against the positioning plate provided on the transfer positioning table 56 by alternately operating the clamps in the X direction and the Y direction. Is positioned. Thereafter, the support member 2 is sucked by a suction hole provided in the transfer positioning table 56 and fixed to the transfer positioning table 56.

次に、図3(a)に示すように、転写版60を用いて支持部材2に対して接着剤57を転写する。この転写は以下のように行う。まず、転写版60を下降させて回転ステージ55上の接着剤57を転写版60の転写面61に付着させる(付着工程)。そして、転写版60を上昇させて回転ステージ55から離間する。次に、接着剤57が付着された転写版60を転写位置決め台56に固定された支持部材2の上方まで移動させる(移動工程)。さらに、転写版60を下降させて支持部材2に接着剤57を転写する(転写工程)。転写版60は支持部材2への接着剤57の転写を繰り返し行うために、回転ステージ55の上方と支持部材2の上方との間で移動可能に構成されている。なお、本実施形態では、接着剤57は一例として紫外線硬化型接着剤を用いる。   Next, as shown in FIG. 3A, the adhesive 57 is transferred to the support member 2 using the transfer plate 60. This transfer is performed as follows. First, the transfer plate 60 is lowered and the adhesive 57 on the rotary stage 55 is attached to the transfer surface 61 of the transfer plate 60 (attachment step). Then, the transfer plate 60 is raised and separated from the rotary stage 55. Next, the transfer plate 60 to which the adhesive 57 is attached is moved to above the support member 2 fixed to the transfer positioning table 56 (moving step). Further, the transfer plate 60 is lowered to transfer the adhesive 57 to the support member 2 (transfer process). The transfer plate 60 is configured to be movable between the upper side of the rotary stage 55 and the upper side of the support member 2 in order to repeatedly transfer the adhesive 57 to the support member 2. In the present embodiment, as the adhesive 57, an ultraviolet curable adhesive is used as an example.

このようにして転写版60を用いて接着剤57が転写された支持部材2は、スカラロボット53により転写位置決め台56から貼り合わせ装置70の、貼り合わせ台71に移載される。また、画像処理ステージ58上に載置されている記録素子基板1は、記録素子基板1に形成されたアライメントマークが画像処理によって認識され、X方向、Y方向、Θ方向の向き補正が行われる。次に、紫外線照射ユニット73にて支持部材2に転写された接着剤57に対して紫外線が照射される。画像処理によって向き補正された記録素子基板1は、吸着フィンガー72によって保持されたまま、貼り合わせ台71上の支持部材2の上方へ旋回して移動される。その後、吸着フィンガー72によって、接着剤57を介して記録素子基板1と支持部材2とを接触させ、記録素子基板1と支持部材2とを貼り合わせる。   The support member 2 to which the adhesive 57 has been transferred using the transfer plate 60 in this way is transferred from the transfer positioning table 56 to the bonding table 71 of the bonding apparatus 70 by the SCARA robot 53. The recording element substrate 1 placed on the image processing stage 58 recognizes the alignment mark formed on the recording element substrate 1 by image processing, and corrects the orientation in the X, Y, and Θ directions. . Next, ultraviolet rays are irradiated to the adhesive 57 transferred to the support member 2 by the ultraviolet irradiation unit 73. The recording element substrate 1 whose orientation has been corrected by the image processing is rotated and moved above the support member 2 on the bonding table 71 while being held by the suction fingers 72. Thereafter, the recording element substrate 1 and the support member 2 are brought into contact with each other by the adsorbing fingers 57 by the suction fingers 72, and the recording element substrate 1 and the support member 2 are bonded together.

このようにして、記録素子基板1と支持部材2との供給、支持部材2への接着剤57の転写、記録素子基板1と支持部材2との貼り合わせ、といった一連の工程が繰り返し行われる。   In this way, a series of steps such as supply of the recording element substrate 1 and the support member 2, transfer of the adhesive 57 to the support member 2, and bonding of the recording element substrate 1 and the support member 2 are repeated.

本実施形態では、図1(a)〜(c)に示すように、転写版60の転写面61には開口62(第1の開口)が設けられており、転写版60は図3(b)で示すような接着剤57のパターンを支持部材2に転写する。このような転写面61の開口62の周囲を含む部分に接着剤57を付着させると、転写面61の開口62の領域内にも接着剤57の膜が張ってしまう場合がある。特に、開口62の近傍の周囲を囲うような接着剤57のパターンを転写面61に付着させると、開口62に接着剤57の膜が張り易くなってしまう。   In this embodiment, as shown in FIGS. 1A to 1C, an opening 62 (first opening) is provided on the transfer surface 61 of the transfer plate 60, and the transfer plate 60 is shown in FIG. The pattern of the adhesive 57 as shown in FIG. If the adhesive 57 is attached to such a portion including the periphery of the opening 62 of the transfer surface 61, a film of the adhesive 57 may be stretched in the region of the opening 62 of the transfer surface 61 in some cases. In particular, if a pattern of the adhesive 57 that surrounds the vicinity of the opening 62 is attached to the transfer surface 61, the film of the adhesive 57 is easily stretched on the opening 62.

そこで、本実施形態の転写版60には、転写面61の開口62に連通する開口63(第2の開口)が側面64に設けられている。図3(a)に示すように、この開口63が設けられる側面64は、転写版60が回転ステージ55の上方から転写位置決め台56の上に固定された支持部材2の上方へ移動する際の前方に位置する面である。このように開口63を設けることで、転写版60が回転ステージ55の上方から支持部材2の上方へ移動する際に、側面64の開口63から転写面61の開口62へ向かう空気の流れが生じる。この空気の流れによって開口62の領域内に張った接着剤57の膜を破裂させることが可能となる。したがって、回転ステージ55の上方から支持部材2の上方まで転写版60が移動する間で接着剤57の膜を破裂させやすくすることができ、接着剤57の膜の破裂が回転ステージ55上や支持部材2上で生じる恐れを抑制することができる。また、本実施形態は、簡単な構成で空気を流すことができるので、転写版60の開口62の側から転写版60内部の空間に空気を流し込むための複雑な機構を設けることなく接着剤57の膜を破裂させることができる。   In view of this, the transfer plate 60 of this embodiment is provided with an opening 63 (second opening) on the side face 64 that communicates with the opening 62 of the transfer surface 61. As shown in FIG. 3A, the side surface 64 provided with the opening 63 is formed when the transfer plate 60 moves from above the rotation stage 55 to above the support member 2 fixed on the transfer positioning table 56. It is a surface located in front. By providing the opening 63 in this way, when the transfer plate 60 moves from above the rotation stage 55 to above the support member 2, an air flow from the opening 63 on the side surface 64 toward the opening 62 on the transfer surface 61 is generated. . This flow of air makes it possible to rupture the film of the adhesive 57 stretched in the region of the opening 62. Therefore, the film of the adhesive 57 can be easily ruptured while the transfer plate 60 moves from above the rotation stage 55 to above the support member 2, and the rupture of the film of the adhesive 57 occurs on the rotation stage 55 or on the support. The fear of occurring on the member 2 can be suppressed. Further, in the present embodiment, since air can be flowed with a simple configuration, the adhesive 57 is provided without providing a complicated mechanism for flowing air from the opening 62 side of the transfer plate 60 into the space inside the transfer plate 60. The film can be ruptured.

なお、本実施形態では、複数の記録素子基板1が支持部材2に接合されるため、それぞれの記録素子基板1に対応して開口62が設けられており、すなわち、転写面61には複数の開口62が設けられている。このような構成の場合、複数の開口62にそれぞれ連通する開口63が設けられていることが好ましい。これにより、それぞれの開口63からそれぞれの開口62に向かう空気の流れを生じやすくすることができるためである。また、確実に接着剤57の膜を破裂させるために、回転ステージ55の上方から支持部材2の上方へ移動する際の転写版60の移動速度は350mm/sec以上であることが好ましい。   In the present embodiment, since a plurality of recording element substrates 1 are bonded to the support member 2, openings 62 are provided corresponding to the respective recording element substrates 1. An opening 62 is provided. In the case of such a configuration, it is preferable that an opening 63 communicating with each of the plurality of openings 62 is provided. This is because it is possible to easily generate an air flow from each opening 63 toward each opening 62. Further, in order to reliably rupture the film of the adhesive 57, it is preferable that the moving speed of the transfer plate 60 when moving from above the rotating stage 55 to above the supporting member 2 is 350 mm / sec or more.

また、接着剤57の膜をより破裂させやすくするためには、開口63の開口面積を開口62の開口面積以上とすることが好ましく、さらに、開口63の開口面積を開口62の開口面積よりも大きくすることがより好ましい。一方で、転写版60の形状によっては開口63の開口面積を十分に確保できない可能性があるが、接着剤57の膜を確実に破裂させるためには、開口63の開口面積は開口62の開口面積の1/10以上であることが好ましい。   Further, in order to make the film of the adhesive 57 easier to rupture, it is preferable that the opening area of the opening 63 is equal to or larger than the opening area of the opening 62, and the opening area of the opening 63 is larger than the opening area of the opening 62. It is more preferable to enlarge it. On the other hand, there is a possibility that the opening area of the opening 63 cannot be sufficiently secured depending on the shape of the transfer plate 60, but the opening area of the opening 63 is the opening area of the opening 62 in order to surely rupture the film of the adhesive 57. It is preferable that it is 1/10 or more of the area.

なお、本実施形態では、開口62は転写面61の外縁と離れた位置に設けられているが、開口62の一部が転写面61の外縁と繋がっていてもよい。   In this embodiment, the opening 62 is provided at a position away from the outer edge of the transfer surface 61, but a part of the opening 62 may be connected to the outer edge of the transfer surface 61.

(第2の実施形態)
本実施形態では、上述の実施形態とは異なる構成を有する転写版を用いて接着剤の転写を行う。その他の装置の構成や接着剤の転写、支持部材と記録素子基板との貼り合わせの方法等は上述の実施形態と同様とすることができるため、説明を省略する。
(Second Embodiment)
In this embodiment, the adhesive is transferred using a transfer plate having a configuration different from that of the above-described embodiment. Other apparatus configurations, adhesive transfer, a method of bonding the support member and the recording element substrate, and the like can be the same as those in the above-described embodiment, and thus description thereof is omitted.

図7(a)は本実施形態の転写版80を示す斜視図であり、図7(b)は図7(a)のVIIB−VIIB線における断面図である。本実施形態の転写版80は、転写面81の開口82と側面84の開口83とが連通する連通路の構成が上述の実施形態と異なっている。具体的には、開口82と開口83とを連通する連通路85の上面86が傾斜面となっている。この上面86は、転写面81及び側面84に対して傾斜している。このように連通路85の上面86を傾斜面とすることで、転写版80が回転ステージ55の上方から支持部材2の上方へ移動する際に、上述の実施形態と比べて、開口83から開口82へ向かう方向へ空気の流れを形成しやすくすることができる。これにより、転写面81の開口82の領域内に接着剤57の膜が張った場合に、転写版80の移動の間に接着剤57をより破裂しやすくすることができる。   FIG. 7A is a perspective view showing the transfer plate 80 of the present embodiment, and FIG. 7B is a cross-sectional view taken along the line VIIB-VIIB in FIG. 7A. The transfer plate 80 of the present embodiment is different from the above-described embodiment in the configuration of the communication path in which the opening 82 of the transfer surface 81 and the opening 83 of the side surface 84 communicate with each other. Specifically, the upper surface 86 of the communication path 85 that connects the opening 82 and the opening 83 is an inclined surface. The upper surface 86 is inclined with respect to the transfer surface 81 and the side surface 84. Thus, by making the upper surface 86 of the communication path 85 an inclined surface, when the transfer plate 80 moves from above the rotation stage 55 to above the support member 2, the opening 83 opens from the opening 83 as compared to the above embodiment. An air flow can be easily formed in a direction toward 82. Thereby, when the film | membrane of the adhesive agent 57 stretches in the area | region of the opening 82 of the transfer surface 81, the adhesive agent 57 can be more easily ruptured during the transfer plate 80 movement.

(実施例)
図1(a)〜(c)に示した転写版60を用いて支持部材2に接着剤57を転写して塗布した。転写版60としては、転写面61に設けられた開口62と側面64に設けられた開口63との面積が等しいものを用いた。接着剤57としては、紫外線硬化型の接着剤KR−825−24M(株式会社ADEKA製)を用いた。また、支持部材2に転写された後の接着剤57の重量が5.6mgとなるように、回転ステージ55上の接着剤57の厚さをスキージによって調整した。
(Example)
Using the transfer plate 60 shown in FIGS. 1A to 1C, the adhesive 57 was transferred to the support member 2 and applied. As the transfer plate 60, one having the same area of the opening 62 provided on the transfer surface 61 and the opening 63 provided on the side surface 64 was used. As the adhesive 57, an ultraviolet curable adhesive KR-825-24M (manufactured by ADEKA Corporation) was used. Further, the thickness of the adhesive 57 on the rotary stage 55 was adjusted with a squeegee so that the weight of the adhesive 57 after being transferred to the support member 2 was 5.6 mg.

図3(a)に示したように、転写版60に接着剤57を付着させて回転ステージ55から転写版60を離した状態とすると、転写版60の転写面61の開口62に接着剤57の膜が張った。その後、転写版60の開口63が進行方向における正面を向いた状態で、回転ステージ55の上方から転写位置決め台56に固定された支持部材2の上方まで350mm/secの速度で移動させた。すると、開口63から開口62へ向かう空気流が生じ、転写版60の移動の途中で開口62に張った接着剤57の膜が破裂した。その後、転写位置決め台56の上方に到達した転写版60を下降させて支持部材2に接着剤57を転写した。   As shown in FIG. 3A, when the adhesive 57 is attached to the transfer plate 60 and the transfer plate 60 is separated from the rotary stage 55, the adhesive 57 enters the opening 62 of the transfer surface 61 of the transfer plate 60. The film was stretched. Thereafter, the transfer plate 60 was moved at a speed of 350 mm / sec from above the rotation stage 55 to above the support member 2 fixed to the transfer positioning table 56 with the opening 63 of the transfer plate 60 facing the front in the traveling direction. Then, an air flow from the opening 63 toward the opening 62 was generated, and the film of the adhesive 57 stretched on the opening 62 was ruptured during the movement of the transfer plate 60. Thereafter, the transfer plate 60 that reached above the transfer positioning table 56 was lowered to transfer the adhesive 57 to the support member 2.

転写版60が回転ステージ55の上方と支持部材2の上方の間を移動している間に接着剤57の膜が破裂したため、飛散した接着剤57が回転ステージ55の上に再付着しなかった。また、破裂した接着剤57は支持部材2の上にも飛散せず、支持部材2に対して所望の接着剤57のパターンを転写することができた。さらに、記録素子基板1と支持部材2とを貼り合わせるまでの一連の動作が終了した後に確認した結果、飛散した接着剤57が回転ステージ55に再付着していなかった。そのため、回転ステージ55上の接着剤57の厚みにばらつきが生じることはなく、次の転写の際においても所望の厚みの接着剤57を転写版60に付着させることができた。   Since the film of the adhesive 57 ruptured while the transfer plate 60 moved between the upper part of the rotary stage 55 and the upper part of the support member 2, the scattered adhesive 57 did not reattach on the rotary stage 55. . Further, the ruptured adhesive 57 was not scattered on the support member 2, and a desired pattern of the adhesive 57 could be transferred to the support member 2. Further, as a result of confirmation after a series of operations until the recording element substrate 1 and the support member 2 were bonded together, the scattered adhesive 57 was not reattached to the rotary stage 55. Therefore, there is no variation in the thickness of the adhesive 57 on the rotary stage 55, and the adhesive 57 having a desired thickness can be adhered to the transfer plate 60 during the next transfer.

1 記録素子基板
2 支持部材
40 記録ヘッド
55 回転ステージ
57 接着剤
60 転写版
61 転写面
62 開口
63 開口
64 側面
DESCRIPTION OF SYMBOLS 1 Recording element board | substrate 2 Support member 40 Recording head 55 Rotation stage 57 Adhesive 60 Transfer plate 61 Transfer surface 62 Opening 63 Opening 64 Side

Claims (10)

第1の開口が設けられた面を備える転写版であって、前記第1の開口の周囲を含む前記面に接着剤を付着させる接着剤供給部と、前記面に付着された接着剤が転写される部材と、の間で移動可能な前記転写版を有する転写装置において、
前記転写版は、前記面と異なる面であり、前記接着剤供給部から前記部材へ向かう方向における前方に位置する面に、前記第1の開口と連通する第2の開口を備えることを特徴とする転写装置。
A transfer plate having a surface provided with a first opening, wherein an adhesive supply unit attaches an adhesive to the surface including the periphery of the first opening, and the adhesive attached to the surface is transferred. A transfer apparatus having the transfer plate movable between the member and
The transfer plate is a surface different from the surface, and includes a second opening communicating with the first opening on a surface positioned in front of the adhesive supply unit toward the member. Transfer device.
前記転写版は、複数の前記第1の開口と、前記複数の第1の開口にそれぞれ連通する前記第2の開口を備える、請求項1に記載の転写装置。   The transfer device according to claim 1, wherein the transfer plate includes a plurality of the first openings and the second openings communicating with the plurality of first openings, respectively. 前記第2の開口の面積は、前記第1の開口の面積の1/10以上である、請求項1または請求項2に記載の転写装置。   The transfer apparatus according to claim 1, wherein an area of the second opening is 1/10 or more of an area of the first opening. 前記第2の開口の面積は、前記第1の開口の面積以上である、請求項1乃至請求項3のいずれか一項に記載の転写装置。   4. The transfer device according to claim 1, wherein an area of the second opening is equal to or larger than an area of the first opening. 5. 前記転写版は、前記面に接着剤が付着された後に前記接着剤供給部から離間し、前記接着剤供給部の上方から前記部材の上方へ移動し、前記部材に前記接着剤を介して接触されて前記部材に接着剤を転写する、請求項1乃至請求項4のいずれか一項に記載の転写装置。   The transfer plate is separated from the adhesive supply unit after the adhesive is attached to the surface, moves from above the adhesive supply unit to above the member, and contacts the member via the adhesive. The transfer device according to claim 1, wherein the transfer device transfers the adhesive to the member. 前記接着剤供給部の上方から前記部材の上方へ移動する前記転写版の速度は、350mm/sec以上である、請求項5に記載の転写装置。   The transfer apparatus according to claim 5, wherein a speed of the transfer plate moving from above the adhesive supply unit to above the member is 350 mm / sec or more. 前記転写版は、前記第1の開口と前記第2の開口とを連通する連通路を備えており、
前記連通路の上面は、前記第1の開口が設けられた面と前記第2の開口が設けられた前記面とに対して傾斜している、請求項1乃至請求項6のいずれか一項に記載の転写装置。
The transfer plate includes a communication path that communicates the first opening and the second opening;
The upper surface of the communication path is inclined with respect to the surface provided with the first opening and the surface provided with the second opening. The transfer apparatus according to 1.
液体を吐出するための吐出素子を備える素子基板と、接着剤を介して前記素子基板が接着される支持部材と、を有する液体吐出ヘッドの組み立ての際の、前記支持部材への接着剤の転写に用いられる、請求項1乃至請求項7のいずれか一項に記載の転写装置。   Transfer of adhesive to support member when assembling a liquid discharge head having an element substrate including an ejection element for ejecting liquid and a support member to which the element substrate is bonded via an adhesive The transfer device according to claim 1, wherein the transfer device is used in a printer. 転写版を用いて部材に接着剤を転写する転写方法において、
接着剤供給部において、前記転写版の第1の開口が設けられた面の、前記第1の開口の周囲を含む部分に接着剤を付着させる付着工程と、
前記転写版と前記接着剤供給部とを離間させ、前記面とは異なる面であって、前記第1の開口と連通する第2の開口が設けられた面が前方を向いた状態で、前記転写版を前記部材の上方まで移動させる移動工程と、
前記転写版と前記部材とを接着剤を介して接触させ、接着剤を前記部材に転写する転写工程と、
を有することを特徴とする転写方法。
In a transfer method of transferring an adhesive to a member using a transfer plate,
In the adhesive supply unit, an attaching step of attaching an adhesive to a portion including the periphery of the first opening on the surface of the transfer plate provided with the first opening;
In the state where the transfer plate and the adhesive supply part are separated from each other and the surface provided with a second opening which is different from the surface and communicates with the first opening faces forward. A moving step of moving the transfer plate above the member;
A transfer step of bringing the transfer plate and the member into contact with each other through an adhesive, and transferring the adhesive to the member;
A transfer method characterized by comprising:
液体を吐出するための吐出素子を備える素子基板と、接着剤を介して前記素子基板が接着される支持部材と、を有する液体吐出ヘッドの製造方法において、
接着剤供給部において、転写版の第1の開口が設けられた面の、前記第1の開口の周囲を含む部分に接着剤を付着させる付着工程と、
前記転写版と前記接着剤供給部とを離間させ、前記面とは異なる面であって、前記第1の開口と連通する第2の開口が設けられた面が前方を向いた状態で、前記転写版を前記支持部材の上方まで移動させる移動工程と、
前記転写版と前記支持部材とを接着剤を介して接触させ、接着剤を前記支持部材に転写する転写工程と、
接着剤を介して前記素子基板と前記支持部材とを接着させる工程と、
を有することを特徴とする液体吐出ヘッドの製造方法。
In a method of manufacturing a liquid ejection head, comprising: an element substrate including an ejection element for ejecting liquid; and a support member to which the element substrate is bonded via an adhesive.
In the adhesive supply section, an adhesion step of attaching an adhesive to a portion of the surface of the transfer plate provided with the first opening and including the periphery of the first opening;
In the state where the transfer plate and the adhesive supply part are separated from each other and the surface provided with a second opening which is different from the surface and communicates with the first opening faces forward. A moving step of moving the transfer plate to above the support member;
A transfer step of bringing the transfer plate and the support member into contact with each other via an adhesive, and transferring the adhesive to the support member;
Bonding the element substrate and the support member via an adhesive;
A method of manufacturing a liquid discharge head, comprising:
JP2016191199A 2016-09-29 2016-09-29 Transfer device, transfer method and method for production of liquid discharge head Pending JP2018051949A (en)

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