JP2018044836A - Method for manufacturing machine part, and method for manufacturing watch - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a mechanical part made of a base material containing silicon with simple steps, and a method for manufacturing a watch.SOLUTION: A method for manufacturing a machine part made of a material containing silicon includes: a step of etching a base material containing the silicon so as to form a base material 350 of the machine part; a step of placing the base material 350 on a tray 50; and a step of performing oxidation treatment in a state of the base material 350 being placed on the tray 50.SELECTED DRAWING: Figure 7D

Description

  The present invention relates to a method for manufacturing a machine part and a method for manufacturing a timepiece.

  Many timepieces such as gears are mounted on a timepiece such as a mechanical timepiece. Recently, a base material having silicon has been used as a watch material. Since mechanical parts made of silicon are lighter than those made of metal, they are suitable for the material of parts having a small inertial force, and an improvement in energy transmission efficiency is expected. In addition, silicon has an advantage that the degree of freedom of shape is high and the processing accuracy can be improved.

Silicon machine parts are required to establish a production method capable of improving the manufacturing efficiency while improving mechanical strength compared to metal machine parts. For example, Patent Document 1 describes a manufacturing method for preventing dispersion of parts separated after etching of a base material by manufacturing a mechanical part (hairspring) for a mechanical watch using an SOI substrate. ing.
Further, in Patent Document 1, after etching, when the sacrificial layer of the SOI substrate is removed, the mechanical parts are arranged on the base material so that a plurality of mechanical parts formed on the base material are not dispersed. The structure connected by the connection part formed as a part is described.
Patent Document 2 describes that the mechanical strength can be improved by forming a silicon oxide film on the surface of a machine part after etching.

Japanese Patent Laying-Open No. 2015-179013 JP 2011-185932 A

However, in the method of manufacturing a mechanical component described in Patent Document 1, the manufacturing process such as removal of the sacrificial layer is complicated and complicated, and the SOI substrate is relatively expensive, which may increase the manufacturing cost.
In addition, when a plurality of mechanical parts formed on the base material are separated into pieces by breaking the connection portion, reliability is ensured by the absence of an oxide film on the end surface (cut surface) of the broken portion of the connection portion. There has been a problem that it may be lowered or a crack may occur in the machine part portion from the break-off portion of the connection portion, which may cause damage.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A machine part manufacturing method according to this application example is a machine part manufacturing method made of a material containing silicon, and forms a base material of the machine part by etching a base material containing silicon. And a step of placing the base material on a tray, and a step of performing an oxidation treatment in a state where the base material is placed on the tray.

In this application example, the “base material” of the machine part is a prototype of the machine part formed by etching the base material, and a state in which a further processing step is required to obtain a piece of machine part For example, a resin material used in a process of forming a base material, such as an etching mask made of a photoresist, where a plurality of mechanical parts formed on a base material are connected by connection parts that are removed in a subsequent process It means the state where is left.
In addition, it is known that mechanical parts formed by etching a material containing silicon are lighter than metal mechanical parts, have a high degree of freedom in shape, and have high processing accuracy. By performing this oxidation treatment, the mechanical strength of the mechanical component can be improved by the silicon oxide film formed on the surface of the substrate.
According to this application example, the processing of the oxidation process, which is a subsequent process, is performed in a state where the base material is placed on the tray, so that it is possible to prevent scattering of individual machine parts from the state of the base material. Can do. Therefore, it is possible to provide a manufacturing method capable of efficiently and accurately forming a mechanical component made of a base material containing silicon by a simple process.

  Application Example 2 In the method of manufacturing a mechanical component according to the application example, the base material includes a resin material used in the step of forming the base material, and the base material is placed on the tray. And a removing step of removing the resin material by plasma treatment.

In this application example, when the resin material remains on one surface of the base material and the other surface on the opposite side of the one surface, with the base material placed on the tray, plasma treatment is performed. If the removal process for removing the resin material is performed, the inventors will be able to reliably remove the resin material by properly acting on the resin material formed on the surface of the base material facing the tray. Found.
Therefore, according to this application example, since the base material is placed on the tray, the base material after etching is suppressed while suppressing scattering of mechanical parts that are separated from the base material by removing the resin material. The resin material can be reliably removed.

  Application Example 3 In the method of manufacturing a mechanical component according to the application example, the oxidation process includes performing a thermal oxidation process.

  According to the thermal oxidation treatment, a dense oxide film having a sufficient thickness can be formed in a relatively short time, so that a mechanical part having high mechanical strength can be efficiently manufactured.

  Application Example 4 In the method of manufacturing a mechanical component according to the application example, the tray is formed of a material containing silicon.

  Silicon is suitable as a material for a tray because it has heat resistance against thermal oxidation treatment as well as a substrate containing silicon, is relatively inexpensive, and has good workability.

  Application Example 5 In the method of manufacturing a mechanical component according to the application example, the tray includes a recess and a partition frame having a shape corresponding to the position and size of the base material formed on the base material. And

In this application example, “the shape corresponding to the position and size of the base material” refers to a plurality of mechanical parts formed on the base material in a state where the base material is placed on the recess and the partition frame of the tray. When the connecting portion for connecting is removed, the individual machine parts are shaped to fit in the recesses and the partition frame.
According to this application example, when each machine part is separated by removing the connection portion of the base material, scattering of the machine parts in the tray can be suppressed, and each machine part is neatly arranged in the tray. The components can be supplied in the post-process in the manufacturing process of the machine parts or in the machine manufacturing process such as a watch using the machine parts in the arranged state.

  Application Example 6 In the method of manufacturing a mechanical component according to the application example, the uppermost surface in the thickness direction of the tray has a predetermined roughness.

  According to this application example, when the above-described resin material is removed while the etched base material is placed on the tray, the surface that contacts the base material of the tray has a predetermined roughness. Therefore, the rough surface has an effect that the plasma treatment is appropriately performed by the gap generated between the tray and the base material, and the resin material is reliably removed.

  [Application Example 7] A timepiece manufacturing method according to this application example is any one of the barrel wheel, the watch wheel, the escape wheel, the ankle, and the balance with the method for manufacturing a mechanical part according to any one of the above application examples. It includes an assembling step of assembling a movement using the manufactured machine parts.

According to this application example, since the process includes the step of assembling the movement using the machine part manufactured by the method for manufacturing a machine part according to any of the above application examples, the inertial force is lighter than the metal machine part. A movement with high energy transmission efficiency can be configured by using machine parts with a small size.
Therefore, a highly accurate timepiece having excellent reliability and durability can be manufactured.

The top view of the front side of the movement of the timepiece concerning an embodiment. The top view of the escapement mechanism of a movement. The perspective view of an escapement mechanism. Sectional drawing which follows the AA line of FIG. The top view of the escape gear part as a machine part. The top view which shows the tray used with the manufacturing method of a machine part. Sectional drawing which follows the BB line of FIG. 6A. It is explanatory drawing for demonstrating a gear part creation process, Comprising: Sectional drawing corresponded in FIG. It is explanatory drawing for demonstrating a gear part creation process, Comprising: Sectional drawing corresponded in FIG. It is explanatory drawing for demonstrating a gear part creation process, Comprising: Sectional drawing corresponded in FIG. It is explanatory drawing for demonstrating a gear part creation process, Comprising: Sectional drawing corresponded in FIG. It is explanatory drawing for demonstrating a gear part creation process, Comprising: Sectional drawing corresponded in FIG. The top view which shows the base material in a gear part creation process. The top view which shows the state which mounted the base material in the tray in a gear part creation process. The top view which shows the gear part manufactured by the gear part preparation process and mounted in the tray.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the present embodiment, as an example of the mechanical part of the present invention, a escape wheel which is one of the gears constituting the timepiece part in the movement of the mechanical timepiece will be described as an example. In the following drawings, each layer and each member may be shown on a different scale from the actual scale in order to make each layer and each member recognizable.

[Mechanical watch]
First, the mechanical timepiece 1 will be described. FIG. 1 is a plan view of the front side of a movement 10 of a mechanical timepiece 1 as a timepiece according to this embodiment.
As shown in FIG. 1, the mechanical timepiece 1 according to the present embodiment includes a movement 10 and a casing (not shown) that houses the movement 10.

The movement 10 has a ground plane 11 constituting a substrate. A dial (not shown) is arranged on the back side of the main plate 11. A train wheel incorporated on the front side of the movement 10 is referred to as a front train wheel, and a train wheel incorporated on the back side of the movement 10 is referred to as a back train wheel.
A winding stem guide hole 11a is formed in the base plate 11, and a winding stem 12 is rotatably incorporated therein. The winding stem 12 is positioned in the axial direction by a switching device having a setting lever 13, a yoke 14, a yoke spring 15 and a back presser 16. In addition, a chichi wheel 17 is rotatably provided on the guide shaft portion of the winding stem 12.

  Under such a configuration, the winding stem 12 is rotated in a state where the winding stem 12 is in the first winding stem position (0th stage) closest to the inside of the movement 10 along the rotation axis direction. Then, the hour wheel 17 rotates through the rotation of the spell wheel (not shown). And when this chi-wheel 17 rotates, the round hole wheel 20 which meshes with this rotates. And when this round hole wheel 20 rotates, the square wheel 21 which meshes with this rotates. Further, when the square hole wheel 21 rotates, the mainspring (power source) (not shown) housed in the barrel complete 22 is wound up.

  In addition to the barrel wheel (machine part) 22 described above, the front wheel train of the movement 10 includes a second car (machine part) 25, a third car (machine part) 26, and a fourth car (machine part) called a so-called car. ) 27 and fulfills the function of transmitting the rotational force of the barrel complete 22. Further, an escapement mechanism 30 and a speed adjusting mechanism 31 for controlling the rotation of the front wheel train are arranged on the front side of the movement 10.

The center wheel 25 is a gear that meshes with the barrel complete 22. The third wheel 26 is a gear that meshes with the second wheel 25. The fourth wheel 27 is a gear that meshes with the third wheel 26.
The escapement mechanism 30 is a mechanism for controlling the rotation of the front wheel train described above, and the escape wheel (mechanical part) 35 that meshes with the fourth wheel 27 and the escape wheel 35 are caused to escape. An ankle (mechanical part) 36 that rotates regularly.
The speed control mechanism 31 is a mechanism for controlling the above-described escapement mechanism 30 and includes a balance (mechanical part) 40.

<Escape mechanism>
Next, the above-described escape mechanism 30 of the movement 10 will be described in more detail. 2 is a plan view of the escapement mechanism 30, FIG. 3 is a perspective view of the escapement mechanism 30, and FIG. 4 is a cross-sectional view taken along the line AA of FIG.
As shown in FIGS. 2 to 4, the escape wheel 35 of the escapement mechanism 30 is fixed to the escape gear portion (rotating body) 101 and the escape gear portion 101 on the same axis (axis O <b> 1). And a shaft member (rotating shaft) 102. In the following description, the direction along the axis O1 of the escape gear portion 101 and the shaft member 102 is simply referred to as the axial direction, the direction orthogonal to the axis O1 is referred to as the radial direction, and the direction of circling around the axis O1 is referred to as the circumferential direction.

FIG. 5 is a plan view of the escape gear portion 101 as a mechanical part.
As shown in FIGS. 2 to 5, the escape gear portion 101 has a plate-like shape in which the front surface 101 a and the back surface 101 b are flat surfaces and the entire surface has a uniform thickness. Specifically, the escape gear portion 101 includes a peripheral rim portion 111, a central hub portion 112, and a plurality of spoke portions 113 that connect the rim portion 111 and the hub portion 112.
On the outer peripheral surface of the rim portion 111, a plurality of tooth portions 114 formed in a special saddle shape are provided projecting outward in the radial direction. The claw stones 144a and 144b of the ankle 36, which will be described later, are in contact with the tips of the plurality of tooth portions 114.
The cantilever gear portion 101 is made of a material having a crystal orientation such as single crystal silicon.

  As shown in FIGS. 3 to 5, the hub portion 112 is a disc-shaped member disposed inside the rim portion 111, and a through hole 115 penetrating in the axial direction is formed at the center portion thereof. . The through-hole 115 has a circular shape in plan view, and penetrates from the front surface 101a to the back surface 101b along the axial direction.

  Each spoke portion 113 extends radially from the outer peripheral edge of the hub portion 112 toward the inner peripheral edge of the rim portion 111, and connects the rim portion 111 and the hub portion 112.

The shaft member 102 has tenon portions 121a and 121b located at both ends in the axial direction and a pinch portion 122 meshed with the gear portion of the fourth wheel 27 described above.
Of the tenon portions 121a and 121b, one end tenon portion 121a located on one end side in the axial direction is rotatably supported by a train wheel (not shown), and the other end tenon portion 121b located on the other end side in the axial direction is as described above. The base plate 11 is rotatably supported.

  The escape portion 122 is formed closer to the tenon portion 121 a at the one end in the shaft member 102. Then, when the escape wheel 122 is engaged with the fourth wheel 27 (see FIG. 1), the rotational force of the fourth wheel 27 is transmitted to the shaft member 102 so that the escape wheel 35 rotates. ing.

  The press-fit shaft portion 123 is formed to have a larger diameter than the tenon portions 121a and 121b described above, and is inserted into the through hole 115 of the escape gear portion 101 from the back surface 101b side. In this case, the press-fit shaft portion 123 is disposed in the through hole 115 in a state in which a part thereof protrudes from the escape gear portion 101 toward the other end side in the axial direction.

  In addition, a flange portion 124 that protrudes outward in the radial direction is formed between the pinch portion 122 and the press-fit shaft portion 123 of the shaft member 102. The flange portion 124 has a larger diameter than the opening on the back surface 101 b side of the through hole 115, and an end surface located on the other end side in the axial direction is in contact with the back surface 101 b of the hub portion 112.

  In the escape wheel 35 thus configured, a plurality of teeth 114 are engaged with the ankle 36 (see FIG. 2). The ankle 36 includes an ankle body 142d formed in a T shape by three ankle beams 143 and an ankle true 142f. The ankle true 142f, which is a shaft, is configured to be rotatable. ing. It should be noted that both ends of the ankle stem 142f are supported so as to be rotatable with respect to the above-described ground plane 11 and an ankle receiver (not shown).

  Of the three ankle beams 143, claw stones 144 a and 144 b are provided at the tips of two ankle beams 143, and an ankle lever 145 is attached to the tip of the remaining one ankle beam 143. The claw stones 144a and 144b are rubies formed in a quadrangular prism shape, and are bonded and fixed to the ankle beam 143 with an adhesive or the like.

  The ankle 36 configured in this manner is configured such that the claw stone 144a or the claw stone 144b contacts the tip of the tooth portion 114 of the escape wheel 35 when the ankle 36 rotates about the ankle true 142f. . At this time, the ankle beam 143 to which the ankle lever 145 is attached comes into contact with a not-shown dote pin so that the ankle 36 does not further rotate in the same direction. As a result, the rotation of the escape wheel 35 is also temporarily stopped.

[Manufacturing method of escape wheel]
Next, the manufacturing method of the escape wheel 35 mentioned above is demonstrated.
FIG. 7A to FIG. 7E are explanatory views for explaining a production process of the escape gear portion 101 and are sectional views corresponding to FIG. 4.

In FIG. 7A, in the step of creating the escape wheel portion 101 of the escape wheel 35, first, a base material (wafer) 200 containing silicon is prepared, and then, for example, by a spin coat method or a spray coat method. Photosensitive photoresist 211 is applied to surface 200a, which is one surface of material 200, and back surface coating material 221 is applied to back surface 101b, which is the other surface opposite to one surface of substrate 200. . As the photoresist 211, any of a negative type material and a positive type material can be adopted. In addition, the back surface coating material 221 has a mask performance capable of protecting the back surface 200b of the base material 200 from etching when the base material 200 is etched in the etching process described later, and is a resin after the etching process. A resin material having a property that can be surely removed in the removing step of removing is selected.
Each of the photoresist 211 and the back surface coating material 221 applied to the substrate 200 is cured at a predetermined temperature. However, when the difference between the curing conditions of the photoresist 211 and the back surface coating material 221 is large, Curing is performed separately for the photoresist 211 and the back surface coating material 221. If the curing conditions for the photoresist 211 and the curing conditions for the back surface coating material 221 are the same or approximate, the curing process is performed simultaneously to increase the efficiency of the process. Can be achieved.
The order in which the photoresist 211 applied to the front surface 200a of the base material 200 and the back surface coating material 221 applied to the back surface 200b of the base material 200 are set in the order of processes in consideration of the curing conditions of each resin material. It may be determined for convenience.

  Next, by developing after exposing the photoresist 211 by photolithography technique, as shown in FIG. 7B, as a mask (etching mask) corresponding to the outline of the escape gear portion 101 in plan view. The photoresist pattern 212 is formed. Here, the opening 212 a of the photoresist pattern 212 in the drawing corresponds to the through hole 115 of the escape gear portion 101.

  Next, as shown in FIG. 7C, the base material 200 including the outer shape of the escape gear portion 101 (see FIG. 7E) described later is formed by etching the base material 200 using the photoresist pattern 212 as a mask. .

  Here, the base material 350 will be described in detail. FIG. 8 is a plan view showing the base material 350 in the escape gear portion 101 creation step. 7C corresponds to a cross-sectional view taken along the line cc in FIG. As shown in these drawings, the “base material 350” of the escape gear portion 101 as a mechanical part is formed by etching the base material 200 to form the individual escape gear portion 101. Further, in this embodiment, it is necessary to go through a processing step, and in this embodiment, the escape gear portion 101 which is a plurality of mechanical parts formed by etching the base material 200 is removed in a subsequent step. The resin material used in the process of forming the base material 350 such as a photoresist pattern 212 as a mask (etching mask) made of a photoresist 211 is connected by a material 221 (functioning as a “connecting portion”). The state that remains.

In addition, the etching process for forming the base material 350 is specifically performed by performing deep reactive ion etching (DRIE = Deep Reactive Ion Etching) so as to penetrate the base material 200 in the thickness direction. Thus, the outer shape of the escape gear portion 101 can be obtained. Here, since the inner surface (inner wall) of the through portion such as the through hole 115 formed by the opening 212a of the photoresist pattern 212 is protected by the back surface coating material 221 formed on the back surface 200b of the base material 200, The inner surface shape of the through portion does not change without being etched from the back surface 200b.
Further, as described above, the back surface coating material 221 functions as a connecting portion that connects a plurality of escape gear portions 101 (mechanical parts) separated by etching, and is separated into pieces after etching. It is possible to prevent the spring gear 101 from being scattered.

  Next, the base material 350 of the escape gear portion 101 as a mechanical part formed by etching is placed on the tray 50 as shown in FIG. 7D.

  FIG. 6A is a plan view showing the tray 50 used in the method for manufacturing the mechanical component (the escape gear portion 101) of this embodiment, and FIG. 6B is a cross-sectional view taken along line BB in FIG. 6A. FIG. 9 is a plan view showing a state in which the base material 350 is placed on the tray 50. 7D described above corresponds to a cross-sectional view taken along the line dd of FIG.

As shown in these drawings, the tray 50 includes a recess 51 and a partition frame 52 having a shape corresponding to the position and size of the base material 350 formed by processing the base material 200 in the above-described process. ing. Here, the shape corresponding to the position and size of the base material 350 means that the base material 350 is placed on the recess 51 and the partition frame 52 of the tray 50 as shown in FIG. When the back surface coating material 221 that functions as a connecting portion that connects a plurality of escape gear portions 101 (mechanical parts) formed on the surface is removed, the individual escape gear portions 101 are separated into individual pieces. , It refers to the shape that fits within the recess 51 and the partition frame 52.
The tray 50 is made of a material containing silicon similar to the base material 200.

  In the tray 50 of the present embodiment, the upper surface 52a of the partition frame 52 that is the uppermost surface in the thickness direction of the tray 50 has a predetermined roughness.

  Returning to FIG. 7D, in a state where the base material 350 formed by etching is placed on the tray 50, next, a removal process of removing the photoresist pattern 212 by the photoresist 211 and the back surface coating material 221 is performed. Thereby, as shown to FIG. 7E, the escape gear part 101 as a mechanical component mentioned above can be obtained. Removal of the resin in the removing step is performed by plasma treatment such as oxygen plasma ashing. According to the resin removal step by oxygen plasma ashing performed with the base material 350 placed on the tray 50, the base material 350 is formed on the back surface 200b that is the surface facing the tray 50 of the escape gear portion 101. The inventors have found that the plasma can sufficiently act on the applied back surface coating material 221 to remove the back surface coating material 221 without any problem. The inventors have confirmed that the same effect can be obtained even when the substrate 200 is placed on the tray 50 so that the surface 200a of the substrate 200 faces the tray.

  Here, as described above, the tray 50 of the present embodiment has a shape corresponding to the position and size of each part of the base material 350 including the escapement gear portion 101 as a mechanical part formed by the base material 200. The recess 51 and the partition frame 52 are provided. Thereby, in a state where the base material 350 is placed on the concave portion 51 and the partition frame 52 of the tray 50, each escape gear portion 101 (individualized by removing the back surface coating material 221 of the base material 350). Machine parts) are accommodated in the recess 51 and the partition frame 52, and scattering of the machine parts in the tray 50 can be suppressed.

  Further, as described above, in the tray 50 of the present embodiment, the upper surface 52a of the partition frame 52 that is the uppermost surface in the thickness direction of the tray 50 has a predetermined roughness. Thus, when the back surface coating material 221 is removed in a state where the base material 350 is placed on the tray 50, the upper surface 52a that is a surface that contacts the base material 350 of the tray 50 is a surface having a predetermined roughness. As a result, the plasma processing is appropriately performed by the gap generated between the upper surface 52a of the tray 50 and the base material 350, and the effect that the back surface coating material 221 is reliably removed can be obtained.

Next, silicon dioxide is formed on the surface of the escape gear portion 101 made of the material of the base material 200 containing silicon in a state where the resin material is removed and placed in the recess 51 and the partition frame 52 of the tray 50. An oxidation process for forming a silicon oxide film made of (SiO ₂ ) is performed. In addition, as for an oxidation process, it is desirable to perform the atmospheric pressure thermal oxidation using the apparatus which oxidizes at atmospheric pressure with respect to the surface of the escape gear part 101. FIG. The inventors have found that, by atmospheric pressure thermal oxidation, a good silicon oxide film can be formed on the surface of the escape gear portion 101 on the side in contact with the tray 50 without any difference from other parts. .
By this oxidation treatment, the silicon oxide film formed on the surface of the escape gear portion 101 can improve the mechanical strength of the escape gear portion 101 (mechanical part). A reliable escape gear portion 101 (mechanical part) can be provided.

Moreover, it is preferable to perform the thermal oxidation process at a high temperature of 800 ° C. or higher in the step of oxidizing the escape gear portion 101 (mechanical part).
According to the thermal oxidation treatment, a dense silicon oxide film (SiO ₂ ) having a sufficient thickness can be formed in a relatively short time. Therefore, mechanical parts such as the escape wheel portion 101 having high mechanical strength can be obtained. It can be manufactured efficiently.
Here, as described above, the tray 50 is formed of a material containing silicon similar to the base material 200. The tray 50 made of a material containing silicon has heat resistance to high-temperature processing such as thermal oxidation processing described later, as well as the base material 200 containing silicon, and is relatively inexpensive and has good workability. It is suitable as a material for the tray 50.

  FIG. 10 is a plan view showing the gear portion manufactured in the step of creating the escape gear portion 101 and placed on the tray 50. As shown in this figure, according to the method for manufacturing a machine part using the tray 50 of the present embodiment, the machine parts are arranged in an orderly manner in the tray 50 with each machine part (the escape gear portion 101) being arranged in an orderly manner. The parts can be supplied to a post-process in the manufacturing process or a machine manufacturing process using a mechanical part such as a watch.

According to the manufacturing method of the escape gear portion 101 (mechanical part) of the present embodiment described above, the following effects can be obtained.
According to the present embodiment, the substrate 200 made of a material containing silicon is processed using a standard photolithography technique and etching, so that it is a rigorous mechanical part in a relatively simple process. The gear part 101 can be manufactured.
In addition, precision mechanical parts such as the escape gear portion 101 formed by processing the substrate 200 containing silicon by the manufacturing method of the present embodiment are lighter than the metal mechanical parts and can be freely shaped. The advantage is that the outer shape is highly precise and can be formed with high accuracy. Therefore, it is possible to manufacture a mechanical component that can contribute to the manufacture of a highly accurate and lightweight mechanical timepiece.

[Mechanical watch manufacturing method]
Next, a method for manufacturing the mechanical timepiece of the invention will be described.
The manufacturing method of the mechanical timepiece of the present invention includes a barrel wheel 22, a number wheel (second wheel 25, third wheel 26, fourth wheel 27), a escape wheel 35 shown in any of FIGS. An assembling process for assembling the movement 10 in any one of the ankle 36 and the balance with a mechanical part manufactured by any one of the mechanical part manufacturing methods described with the escape gear portion 101 of the above embodiment as a representative example. It is characterized by including.

According to such a method of manufacturing the mechanical timepiece 1, the process includes the step of assembling the movement 10 using the machine part manufactured by the method of manufacturing the machine part described in the above embodiment, so that it is compared with a metal machine part. The movement 10 having high energy transmission efficiency can be configured by mechanical parts that are light and light and have a small inertial force.
Therefore, a highly accurate mechanical timepiece having excellent reliability and durability can be provided.

  The embodiment of the present invention made by the inventor has been specifically described above, but the present invention is not limited to the above-described embodiment, and various modifications are made without departing from the scope of the present invention. Is possible.

  DESCRIPTION OF SYMBOLS 1 ... Mechanical type clock, 10 ... Movement, 11 ... Ground plate, 11a ... Winding true guide hole, 12 ... Winding true, 17 ... Kita wheel, 20 ... Round hole car, 21 ... Square hole car, 22 ... Barrel car, 25 ... Second wheel, 26 ... third wheel, 27 ... fourth wheel, 30 ... escape mechanism, 31 ... speed control mechanism, 35 ... escape wheel as a machine part, 36 ... ankle, 40 ... balance, 50 ... tray , 51 ... Recessed part, 52 ... Partition frame, 52a ... Upper surface which is the uppermost surface in the thickness direction of the tray, 101 ... Hook gear part, 102 ... Shaft member, 111 ... Rim part, 112 ... Hub part, 113 ... Spoke part , 114 ... tooth part, 115 ... through hole, 121 a ... tenon part at one end, 121 b ... tenon part at the other end, 122 ... pinch part, 123 ... press-fit shaft part, 124 ... flange part, 142 d ... ankle body, 142 f ... Uncle True, 143 ... Ankle Beam, 144a, 144 Numerals, 145 ... Ankle Jaco, 200 ... Base material, 200a ... Surface as one side, 200b ... Back side as the other side, 211 ... Photoresist, 212 ... Photoresist pattern, 212a ... Opening, 221 ... Backside coating 350, base material.

Claims (7)

A method of manufacturing a mechanical part made of a material containing silicon,
Etching a base material containing silicon to form a base material of the machine part;
Placing the base material on a tray;
And a step of performing oxidation treatment in a state where the base material is placed on the tray. In the manufacturing method of the machine component of Claim 1,
The base material has a resin material used in the step of forming the base material,
A method of manufacturing a mechanical component, comprising: a removing step of removing the resin material by plasma treatment in a state where the base material is placed on the tray. In the manufacturing method of the machine component of Claim 1 or 2,
The method of manufacturing a machine part characterized in that the step of performing the oxidation treatment performs a thermal oxidation treatment. In the manufacturing method of the machine parts according to any one of claims 1 to 3,
The said tray is formed with the material containing silicon, The manufacturing method of the mechanical components characterized by the above-mentioned. In the manufacturing method of the machine parts according to any one of claims 1 to 3,
The said tray has a recessed part and a partition frame of the shape corresponding to the position and magnitude | size of the said base material formed in the said base material, The manufacturing method of the mechanical components characterized by the above-mentioned. In the manufacturing method of the machine component of Claim 5,
The uppermost surface in the thickness direction of the tray has a predetermined roughness.   The assembly which assembles a movement using the machine part manufactured by the manufacturing method of the machine part as described in any one of Claims 1-6 in any one of a barrel wheel, a watch wheel, an escape wheel, an ankle, and a balance. A timepiece manufacturing method comprising a step.

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