JP2018037543A - Load port device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a load port device that can keep the inside of a container in a clean state even in the case where a main opening of the container is opened.SOLUTION: A load port device has: a mounting table for mounting a container on which a main opening for inputting/outputting a wafer is formed; a wall part on which a device opening communicating with the main opening is formed; an opening/closing part which opens/closes the main opening and the device opening; a cover member which is protruded from the inside surface of the wall part and partitions the inside surface into an opening side closer to the device opening and an external side farther from the device opening; and a cover-attached movable plate which is connected to the cover member in a relatively movable manner, in which the cover-attached movable plate is moved between a shielding position at which a part of the plate is overlapped with the device opening seen from a direction perpendicular to the wall part and a retreat position at which an area overlapping the device opening is narrower than the shielding position seen from a direction perpendicular to the wall part.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a load port device that functions as an interface for taking out a wafer from a container.

  In a semiconductor manufacturing process, a wafer called a FOUP or the like is used to transfer a wafer between processing apparatuses. When performing processing on a wafer, the container is placed on a mounting table of a load port device provided in each processing apparatus, and the load port device transports the wafer connected to the space in the container and the processing chamber or the processing chamber. Communicate with the room space. As a result, the wafer can be taken out from the container by a robot arm or the like and transferred to the processing chamber.

  Here, in order to protect the wafer surface from oxidation and contamination, the environment in the container in which the wafer is stored is preferably maintained in an inactive state and a cleanliness level exceeding a predetermined state. However, when the wafer is taken out from the container, it is necessary to open the main opening of the container so that the container and the wafer transfer chamber communicate with each other. A technique for maintaining a clean state is required (see Patent Document 1).

JP 2012-19046 A

  However, in the conventional technique using a movable chamber, the chamber body that covers the entire opening of the apparatus is moved, so that a large-scale driving mechanism is required, and the number of particles generated from the driving mechanism increases. There is a problem that the cleanliness in the container cannot be raised sufficiently.

  The present invention is made in view of such a situation, and it is an object of the present invention to provide a load port device capable of maintaining the inside of a container in a clean state even when the main opening of the container is opened.

In order to achieve the above object, a load port device according to the present invention comprises:
A mounting table on which a container having a main opening formed on the side surface for loading and unloading a wafer is mounted;
A device opening communicating with the main opening is formed, and a wall portion having an outer surface facing the mounting table and an inner surface facing the opposite direction to the outer surface,
An opening / closing part for opening / closing the main opening and the device opening;
It is provided along at least one side of the device opening, protrudes from the inner surface of the wall portion, and divides the inner surface into an opening side near the device opening and an outer side far from the device opening. A cover member;
A cover-attached movable plate connected to the cover member so as to be relatively movable,
The cover-attached movable plate has a shielding position that partially overlaps the device opening when viewed from a direction perpendicular to the wall portion, and an area that overlaps the device opening when viewed from a direction perpendicular to the wall portion from the shielding position. It is characterized by being moved between a narrow retracted position.

  The load port device according to the present invention has a cover-attached movable plate connected so as to be relatively movable with respect to the cover member, and the cover-attached movable plate moves to the shielding position and communicates with the device opening. Even when the main opening is shielded and the main opening of the container is opened, the inside of the container can be kept clean. In addition, the movable plate attached to the cover has a simple shape, unlike the chamber, and can be moved by a small and simple drive unit, preventing the generation of particles and improving the cleanliness of the inside of the container and the wafer transfer chamber. To contribute. Moreover, the cover-attached movable plate moves to the retracted position, so that it does not hinder the wafer transfer by the transfer arm or the like.

Further, for example, the cover member may have a flange provided along an upper side that is one of the sides in the device opening,
The cover-attached movable plate may be connected to the collar so as to be relatively movable.

  Since the cover-attached movable plate is connected to the flange provided along the upper side, such a cover-attached movable plate has a problem that the downflow formed in the transfer chamber disturbs the airflow around the main opening of the container. Even when the main opening of the container is opened suitably, the inside of the container can be kept clean. Also, unlike the conventional heel part, the cover-attached movable plate attached to the heel part can extend to the shielding position where part of it overlaps the opening of the device. It can be suitably protected and the inside of the container can be kept clean.

Further, for example, the flange portion may have a flange upper surface extending obliquely downward from the inner side surface,
The cover-attached movable plate may move relative to the flange along the upper surface of the flange.

  By moving the cover-attached movable plate diagonally along the top surface of the lid, not only around the main opening, but also below the cover-attached movable plate, it is possible to prevent turbulence of airflow due to downflow, so particles Can be prevented and particles can be prevented from flowing into the container.

Further, for example, the opening / closing part may have a door that is moved between a closed position for closing the device opening and an open position for opening the device opening,
A shield position that is connected to the door so as to be movable relative to the door, and in which the door is in the open position; And a door-attached movable plate that is moved between a retracted position that does not overlap the device opening when viewed from a direction perpendicular to the opening.

  Such a load port device can keep the inside of the container clean even when the main opening of the container is opened by moving the door-attached movable plate to the shielding position in addition to the cover-attached movable plate. it can. In addition, since it has two movable plates, it is possible to effectively protect the main opening, and by moving the two movable plates according to the movement of the transfer arm, a wide range of the main opening can be transferred. It is possible to protect the arm so as not to obstruct the movement of the arm.

  Further, for example, the cover-attached movable plate may be able to stop at the first shielding position and the second shielding position which are different from each other in the shielding position and overlap with the opening of the apparatus. The stop position may be changed in accordance with the movement of the wafer transfer arm for transferring.

  The stop position of the cover-attached movable plate is not limited to the two positions of the shield position and the retracted position, and the cover-attached movable plate stops at the two shield positions of the first shield position and the second shield position, thereby enabling the wafer transfer arm. It is possible to protect the periphery of the opening over a wide range according to the movement of the lens.

  Further, for example, the load port device according to the present invention is provided on the opening side with respect to the cover member, and introduces a cleaning gas into the container through the device opening and the main opening. You may further have a gas introduction part.

  The cover-attached movable plate can prevent a problem that the airflow of the front gas introduction portion provided on the opening side is disturbed by a downflow or the like. It can be cleaned.

A load port device according to a second aspect of the present invention is:
A mounting table on which a container having a main opening formed on the side surface for loading and unloading a wafer is mounted;
A device opening communicating with the main opening is formed, and a wall portion having an outer surface facing the mounting table and an inner surface facing the opposite direction to the outer surface,
An opening / closing part that has a door that is moved between a closed position that closes the device opening and an open position that opens the device opening; and that opens and closes the main opening and the device opening;
A door-attached movable plate connected to be movable relative to the door,
When the door is in the open position, the door-attached movable plate is seen from a direction perpendicular to the wall portion and a shielding position where the device opening partially overlaps the device opening as seen from the direction perpendicular to the wall portion. The area overlapping the opening of the apparatus is moved between a retracted position narrower than the shielding position.

  A load port device according to a second aspect of the present invention has a door-attached movable plate connected so as to be relatively movable with respect to the door, and when the door-attached movable plate moves to a shielding position, Even in a state where the main opening communicating therewith is shielded and the main opening of the container is opened, the inside of the container can be kept clean. Unlike the chamber, the door-attached movable plate is simple in shape and can be moved by a small and simple drive unit, preventing the generation of particles and improving the cleanliness of the inside of the container and the wafer transfer chamber. To contribute. Further, the door-attached movable plate moves to the retracted position, so that it does not hinder the wafer transfer by the transfer arm or the like. Furthermore, since the door has a size capable of closing the apparatus opening, a relatively large door-attached movable plate can be connected in a compact manner, which is advantageous in terms of miniaturization.

FIG. 1 is a schematic view of a load port apparatus and an EFEM including the load port apparatus according to an embodiment of the present invention. FIG. 2 is a schematic perspective view of the load port device shown in FIG. 1 as viewed from the inner surface side of the wall portion. 3A is a cross-sectional view illustrating a state in which the cover-attached movable plate is in the retracted position, and FIG. 3B is a cross-sectional view illustrating a state in which the cover-attached movable plate is in the shielding position. 4A is a side view of the cover-attached movable plate in the retracted position shown in FIG. 3A as viewed from a direction perpendicular to the wall portion, and FIG. 4B is a view in FIG. It is the side view which looked at the cover attachment movable board in the shielding position shown to from the direction perpendicular | vertical to a wall part. FIG. 5A is a cross-sectional view illustrating a state in which the cover-attached movable plate of the load port device according to the second embodiment is in the retracted position, and FIG. 5B is a cover-attached movable plate in the shielding position. It is sectional drawing showing a state. FIG. 6A is a cross-sectional view illustrating a state in which the door-attached movable plate of the load port device according to the third embodiment is in the retracted position, and FIG. 6B is a diagram illustrating the door-attached movable plate in the shielding position. It is sectional drawing showing a state. FIG. 7A is a side view of the door-attached movable plate in the retracted position shown in FIG. 6A as viewed from the direction perpendicular to the wall portion, and FIG. 7B is the same as FIG. It is the side view which looked at the door attached movable board in the shielding position shown to from the direction perpendicular | vertical to a wall part. FIG. 8A is a sectional view showing a state where the cover-attached movable plate and the door-attached movable plate of the load port device according to the fourth embodiment are in the retracted position, and FIG. 8B is a cover-attached movable plate. It is sectional drawing showing the state which has a door attached movable plate in a shielding position.

Hereinafter, the present invention will be described based on embodiments shown in the drawings.
FIG. 1 is a schematic diagram of a load port apparatus 10 and an EFEM 50 including the load port apparatus 10 according to an embodiment of the present invention. An EFEM (Equipment front end module) 50 includes a mini-environment device 51 in addition to the load port device 10.

  The mini-environment device 51 includes a wafer transfer chamber 52, a wafer transfer machine 54, a fan filter unit 56, and the like. The wafer transfer machine 54 includes an arm 54 a that can hold the wafer 1 and an arm drive unit 54 b that moves the arm 54 a, and transfers the wafer 1. The wafer transfer machine 54 can move the wafer 1 accommodated in the FOUP 2 to the inside of a processing chamber (not shown) through the wafer transfer chamber 52 maintained in a clean state. Further, the wafer transfer machine 54 can move the wafer 1 that has been processed in the processing chamber from the processing chamber to the inside of the FOUP 2.

  The wafer transfer chamber 52 is a space that connects the FOUP 2 as a container for transferring the wafer 1 and a processing chamber (not shown). A load port device 10 to be described later is provided at an end portion of the wafer transfer chamber 52, and the wall portion 11 of the load port device 10 closes the opening formed in the outer wall of the wafer transfer chamber 52. 52.

  A fan filter unit 56 having a fan 56 a as a blowing means and a filter 56 b for removing particles and the like is provided on the ceiling of the wafer transfer chamber 52. The fan filter unit 56 is lowered to the wafer transfer chamber 52. Form a flow. The fan 56a has, for example, blades inclined with respect to the rotation direction and a motor for rotating the blades. The fan 56a is provided immediately above the filter 56b. Although it does not specifically limit as the filter 56b, For example, what combined the particle removal filter and the chemical filter can be used, The particle and contaminant which exist in the gas which fills the wafer conveyance chamber 52 can be removed. The fan filter unit 56 only needs to have a blower unit such as the fan 56a and a filter 56b. The fan filter unit 56 includes a unit in which the blower unit and the filter are separately arranged.

  The load port device 10 has a mounting table 14 on which a hoop (Front Opening Unified Pod) 2 is mounted. The hoop 2 is transported to the top of the mounting table 14 by, for example, a ceiling transport system.

  The FOUP 2 mounted on the mounting table 14 seals and stores and transports a plurality of wafers 1 as contained items. A space for accommodating the wafer 1 is formed inside the hoop 2. The hoop 2 has a box shape, and a main opening 2b through which the wafer 1 accommodated in the hoop 2 is taken in and out is formed in one of a plurality of side surfaces of the hoop 2. Further, the hoop 2 includes a lid 4 for sealing the main opening 2b.

  The load port device 10 can hermetically connect the main opening 2 b of the FOUP 2 mounted on the mounting table 14 to the wafer transfer chamber 52. That is, the load port device 10 has an opening / closing portion 18 for opening and closing the main opening 2b of the hoop 2 and the device opening 13 formed in the wall portion 11. The load port device 10 moves the mounting table 14 to connect the main opening 2b of the hoop 2 to the device opening 13 as shown in FIG. Thereby, the device opening 13 of the wall portion 11 communicates with the main opening 2 b of the hoop 2. The main opening 2b of the hoop 2 and the device opening 13 formed in the wall 11 are both substantially rectangular.

  The opening / closing part 18 of the load port apparatus 10 removes the lid 4 closing the main opening 2b connected to the apparatus opening 13 from the main opening 2b, and transfers the wafer inside and inside the FOUP 2 via the main opening 2b and the apparatus opening 13. The chamber 52 can be communicated. That is, the opening / closing part 18 has a door 18a for closing the device opening 13 and a door driving part 18b for moving the door 18a. The door 18a closes the device opening 13 (FIGS. 1 and 2) and an open position (see FIGS. 3A and 3B) where the device opening 13 is opened. The door drive unit 18b can move the lid 4 of the hoop 2 engaged with the door 18a together with the door 18a into the wafer transfer chamber 52 (see FIG. 3).

  Further, the load port device 10 includes a bottom gas introduction part 16 as a gas introduction part for introducing the cleaning gas into the inside of the hoop 2 and a front gas introduction part 17. The bottom gas introduction part 16 has a gas introduction nozzle which can be connected to the bottom holes 5 and 6 provided on the bottom surface of the hoop 2 by protruding from the mounting table 14. Is introduced into the hoop 2. The bottom gas introduction unit 16 can introduce the cleaning gas into the inside of the FOUP 2 in a state where the inside of the FOUP 2 and the wafer transfer chamber 52 communicate with each other. Even when the opening 2 b is closed by the lid 4, the cleaning gas can be introduced into the hoop 2.

  As shown in FIG. 1, the front gas introduction part 17 is provided on the inner side surface 11 a of the wall part 11, and introduces the cleaning gas into the hoop 2 through the main opening 2 b and the apparatus opening 13. The front gas introduction unit 17 has gas discharge nozzles provided along two side sides 13b (see FIG. 2) of the device opening 13, respectively.

  As shown in FIG. 1, the front gas introduction part 17 has an opening side 11 aa (FIG. 2) close to the apparatus opening 13 with respect to a cover member 20 (see FIG. 2 and the like) described later on the inner side surface 11 a of the wall part 11. The cleaning gas is introduced into the hoop 2 by discharging the cleaning gas from a gas discharge nozzle disposed adjacent to the apparatus opening 13. Therefore, unlike the bottom gas introduction unit 16, the front gas introduction unit 17 can introduce the cleaning gas into the inside of the FOUP 2 only when the inside of the FOUP 2 and the wafer transfer chamber 52 communicate with each other.

  A cleaning gas is supplied to the bottom gas introduction part 16 and the front gas introduction part 17 via a pipe part (not shown). The cleaning gas introduced into the hoop 2 by the bottom gas introduction part 16 and the front gas introduction part 17 is not particularly limited, but for example, nitrogen gas or the like is preferably used.

  FIG. 2 is a schematic perspective view of the load port device 10 shown in FIG. 1 as viewed from the inner surface 11a side of the wall portion 11. In FIG. 2, the front gas introduction part 17 and the hoop 2 shown in FIG. 1 are not shown for convenience of explanation.

  As shown in FIG. 2, the wall portion 11 of the load port apparatus 10 has an outer surface 11b facing the mounting table 14 on which the hoop 2 is placed, and a wafer transfer chamber 52 side opposite to the outer surface 11b. And an inner side surface 11a facing. A cover member 20 is provided on the inner side surface 11 a along the upper side 13 a and the two side sides 13 b in the device opening 13. The cover member 20 protrudes from the inner side surface 11 a of the wall portion 11 and partitions the inner side surface 11 a into an opening side 11 aa close to the device opening 13 and an outer side 11 ab far from the device opening 13.

  The cover member 20 has a flange 22 provided along the upper side 13a which is one of the sides in the device opening 13, and a side flange 24 provided along the side 13b which is the other side in the device opening 13. have. The cover member 20 is provided along the upper side 13a and the pair of side sides 13b of the device opening 13, and surrounds the device opening 13 from three directions excluding the lower side 13c side.

  As shown in FIG. 2, the flange 22 has a flange upper surface 22 b that extends obliquely downward from the inner surface 11 a of the wall 11, and a flange that extends substantially parallel to the inner surface 11 a from the tip of the flange upper surface 22 b downward. And a folded portion 22a. As shown in FIG. 1, a fan filter unit 56 is provided above the wafer transfer chamber 52, and a downflow from the upper side to the lower side is formed in most of the wafer transfer chamber 52. The flange portion 22 blocks the downflow in the wafer transfer chamber 52 and prevents a relatively clean gas from flowing into the FOUP 2 through the device opening 13.

  The base part of the side flange part 24 protrudes substantially perpendicularly from the inner side surface 11 a of the wall part 11, and prevents a relatively clean gas from flowing from the side toward the device opening 13. The side flange portion 24 has a side flange return portion 24a that extends substantially parallel to the inner surface 11a from the tip of the base portion toward the device opening 13 side. The flange portion 22 and the side flange portion 24 are integrally connected and constitute a cover member 20 surrounding the device opening 13.

  As shown in FIG. 2, the load port device 10 has a cover-attached movable plate 30 connected to the cover member 20. As shown in FIGS. 3A and 3B, the cover-attached movable plate 30 can be moved relative to the flange portion 22 of the cover member 20 by being driven by a drive unit (not shown). . The drive unit of the cover-attached movable plate 30 is not particularly limited, and for example, a stepping motor, a servo motor, a linear motor, or the like can be employed.

  As shown in FIG. 2, the cover-attached movable plate 30 has a rectangular flat plate-like outer shape, and is connected to the upper surface 22 b of the flange portion 22 in the cover member 20.

  3A is a cross-sectional view illustrating a state where the cover-attached movable plate 30 is in the retracted position, and FIG. 3B is a cross-sectional view illustrating a state where the cover-attached movable plate 30 is in the shielding position. The cover-attached movable plate 30 is moved between a retracted position shown in FIG. 3A and a shield position shown in FIG. The cover-attached movable plate 30 in the retracted position shown in FIG. 3A moves to the shielding position shown in FIG. 3B by moving relatively obliquely downward along the collar upper surface 22b. Further, the cover-attached movable plate 30 in the shielding position shown in FIG. 3B moves to the retracted position shown in FIG. 3A by moving relatively obliquely upward along the upper surface 22b.

  FIG. 4A is a side view of the cover-attached movable plate 30 in the retracted position as viewed from the direction perpendicular to the wall portion 11 (Y-axis positive direction side), and FIG. It is the side view which looked at a certain cover attachment movable board 30 from the direction (Y-axis positive direction side) perpendicular to the wall part 11. FIG. In FIG. 3A, FIG. 3B, FIG. 4A, and FIG. 4B, the front gas introduction portion 17 shown in FIG. 1 is not shown for convenience of explanation.

  As shown in FIG. 4B, the cover-attached movable plate 30 in the shielding position partially overlaps the device opening 13 when viewed from the direction perpendicular to the wall portion 11 (region A). On the other hand, as shown in FIG. 4A, the cover-attached movable plate 30 in the retracted position has an area that overlaps the device opening 13 when viewed from the direction perpendicular to the wall 11 and is smaller than the shielding position. The form does not overlap with the device opening 13.

  The position of the cover-attached movable plate 30 is controlled by the control unit of the load port device 10 or the EFEM 50. The cover-attached movable plate 30 can be stopped at least at the shielding position and the retracted position, but may be able to be stopped at positions other than those shown in FIGS. 4 (a) and 4 (b). .

  For example, the cover-attached movable plate 30 has a plurality of shielding positions including a first shielding position and a second shielding position that are different in area overlapping the device opening 13, and a retreat position where the area overlapping the device opening 13 is smaller than these shielding positions. It may be possible to stop. In this case, the cover-attached movable plate 30 avoids the problem of interfering with the arm 54a, for example, by changing the stop position according to the movement of the arm 54a of the wafer transfer machine 54 that transfers the wafer 1. The environment in the hoop 2 can be effectively protected.

  The load port device 10 sets the stop position of the cover-attached movable plate 30 to the opening / closing state of the door 18a by the opening / closing mechanism 18, the operation of introducing the cleaning gas into the hoop 2 by the front gas introduction unit 17, and the wafer transfer device 54. Can be changed according to the movement of the. For example, the cover-attached movable plate 30 is located at the shielding position until the door 18a moves from the closed position to the open position, the door 18a moves to the open position, and the arm 54a of the wafer transfer device 54 moves to the wafer 1 position. While carrying, it may be located at the retracted position. Further, even when the wafer transfer device 54 is transferring the wafer 1, if the movement path of the arm 54 a does not interfere with the shielding position of the cover-attached movable plate 30 (for example, the wafer 1 below the hoop 2 is transferred). In some cases, the cover-attached movable plate 30 may be positioned at the shielding position.

  In the load port device 10 as described above, the cover-attached movable plate 30 moves to the shielding position as shown in FIGS. 3B and 4B, whereby the device opening 13 and the main opening 2b communicating with the device opening 13 are obtained. Can be shielded from downflow or the like in the wafer transfer chamber 52, and the inside of the hoop 2 can be kept clean even when the main opening 2b of the hoop 2 is opened. Further, the cover-attached movable plate 30 attached to the collar portion 22 can extend to the shielding position where the device opening 13 partially overlaps, so that the periphery of the main opening 2b of the hoop 2 is suitably protected from downflow or the like. In addition, the inside of the hoop 2 can be kept clean. Also, the cover-attached movable plate 39 can be moved to the retracted position shown in FIGS. 3A and 4A when the arm 54a passes through the apparatus opening 13, and the like. There is no hindrance to the transfer of the wafer 1.

  Further, as shown in FIG. 3B, the cover-attached movable plate 30 is moved not only around the main opening 2b but also below the cover-attached movable plate 30 by moving obliquely along the upper surface 22b. Since turbulence of the air flow due to the downflow can be widely prevented, it is possible to prevent the particles from being rolled up and flowing into the hoop 2. Further, it is possible to prevent the airflow of the cleaning gas discharged from the front gas introduction part 17 provided on the opening side 11aa from the cover member 20 from being disturbed, and to increase the cleanliness in the hoop 2. In addition, since the cover-attached movable plate 30 extends obliquely downward in the load port device 10, there is a problem of interfering with the movement path of the door 18 a by the opening / closing portion 18 even when the cover-attached movable plate 30 is in the shielding position. It is difficult to occur and the environment inside the hoop 2 can be effectively protected.

Second Embodiment FIG. 5 is a schematic cross-sectional view showing a load port device 110 according to a second embodiment, and FIG. 5 (a) is a cross-sectional view showing a state where the cover-attached movable plate 130 is in the retracted position. FIG. 5B is a cross-sectional view showing a state where the cover-attached movable plate 30 is in the shielding position. The load port device 110 according to the second embodiment is different in that the cover-attached movable plate 130 moves not along the heel upper surface 22b but along the heel folding portion 22a. The other points are the load according to the first embodiment. This is the same as the port device 10. Therefore, in the description of the load port device 110, only differences from the load port device 10 will be described, and description of common points will be omitted.

  As shown in FIGS. 5 (a) and 5 (b), the cover-attached movable plate 130 has a substantially rectangular flat plate shape, similar to the cover-attached movable plate 30 shown in FIGS. 3 (a) and 3 (b). The cover member 20 is connected to the flange portion 22 so as to be relatively movable. However, the cover-attached movable plate 130 shown in FIGS. 5A and 5B moves up and down along the fold-back portion 22a that is substantially parallel to the inner surface 11a of the wall portion 11.

  As shown in FIG. 5B, the cover-attached movable plate 130 moves substantially parallel to the inner side surface 11 a, so that the cover-attached movable plate 130 at the shielding position overlaps with the device opening 13. Therefore, even if the cover-attached movable plate 130 shown in FIG. 5B is the same size as the cover-attached movable plate 30 shown in FIG. 3B, the device opening 13 and the main opening 2b communicating with the device opening 13 are provided. Can protect more effectively.

  In addition, the load port device 110 shown in FIGS. 5A and 5B also has the same effect as the load port device 10 according to the first embodiment. However, when the cover-attached movable plate 130 at the shielding position shown in FIG. 5B interferes with the movement path of the door 18a by the opening / closing part 18, the load port device 110 has the door 18a by the opening / closing part 18. The position of the cover-attached movable plate 130 is changed in accordance with the moving operation of the cover, and interference between the door 18a and the cover-attached movable plate 130 can be avoided.

Third Embodiment FIG. 6 is a schematic cross-sectional view showing a load port device 210 according to a third embodiment, and FIG. 6A is a cross-sectional view showing a state in which the door-attached movable plate 230 is in the retracted position. FIG. 6B is a cross-sectional view showing a state in which the door-attached movable plate 230 is in the shielding position. The load port device 210 according to the third embodiment is different in that it has a door-attached movable plate 230 instead of the cover-attached movable plate 30 shown in FIG. 3, but the other points are the load port device according to the first embodiment. 10 is the same. Therefore, in the description of the load port device 210, only differences from the load port device 10 will be described, and description of common points will be omitted.

  The door-attached movable plate 230 has a substantially rectangular flat plate-like outer shape, and is connected to the door 18a of the opening / closing portion 18 so as to be relatively movable. The drive unit of the door-attached movable plate 230 is not particularly limited, but, for example, a small stepping motor, servo motor, linear motor, or the like that can be mounted on the door 18a is employed in the same manner as the cover-attached movable plate 30 shown in FIG. be able to.

  The door-attached movable plate 230 is moved between a retracted position shown in FIG. 6A and a shield position shown in FIG. 6B by a driving unit (not shown). The door-attached movable plate 230 in the retracted position shown in FIG. 6 (a) moves to the shielding position shown in FIG. 6 (b) by relatively moving upward along the door 18a in the open position. Further, the door-attached movable plate 230 in the shielding position shown in FIG. 6B moves to the retracted position shown in FIG. 6A by relatively moving downward along the door 18a.

  Moreover, since the door attached movable plate 230 is connected to the door 18a, it is moved together with the door 18a by the door driving portion 18b of the opening / closing portion 18. When the door 18a is in the closed position for closing the device opening 13 or when the door 18a is moving between the closed position and the open position, the door-attached movable plate 230 is stored in a state of overlapping the back surface of the door 18a. In the retracted position. Therefore, when the door attached movable plate 230 moves with the door 18a, problems such as collision with peripheral members such as the cover member 20 can be appropriately avoided.

  FIG. 7A is a side view of the door-attached movable plate 230 in the retracted position when viewed from the direction perpendicular to the wall portion 11 (Y-axis positive direction side) in a state where the door 18a is in the open position. FIG. 4B shows the door-attached movable plate 230 in the shielding position in a direction perpendicular to the wall portion 11 (Y-axis positive direction) when the door 18a is in the open position as in FIG. 7A. It is the side view seen from the side.

  As shown in FIG. 7B, the door-attached movable plate 230 in the shielding position partially overlaps the device opening 13 when viewed from the direction perpendicular to the wall portion 11 (region A). On the other hand, as shown in FIG. 7A, the door-attached movable plate 230 in the retracted position has an area that overlaps with the device opening 13 when viewed from the direction perpendicular to the wall 11 and is smaller than the shielding position. The form does not overlap with the device opening 13.

  The load port device 210 can change the stop position of the door-attached movable plate 230 according to the operation of introducing the cleaning gas into the hoop 2 by the front gas introduction unit and the movement of the wafer transfer device 54. For example, the load port device 210 places the movable plate 230 attached to the door in the shielding position while the cleaning gas is introduced into the FOUP 2 from the front gas introduction unit before the transfer of the wafer 1 is started. While one transport is being performed, it may be positioned at the retracted position. Further, even when the wafer transfer device 54 is transferring the wafer 1, if the movement path of the arm 54 a does not interfere with the shielding position of the door-attached movable plate 230 (for example, transfer the wafer 1 above the hoop 2). In some cases, the door-attached movable plate 230 may be positioned at the shielding position.

  Like the door 18a in the open position, the door-attached movable plate 230 in the retracted position is in a position that does not overlap with the apparatus opening 13 when viewed from the direction perpendicular to the wall 11, so that the arm 54a of the wafer transfer device 54 is located. Etc. can prevent the door-attached movable plate 230 from colliding.

  The door-attached movable plate 230 can be stopped at least at the retracted position shown in FIG. 7A and the shielding position shown in FIG. 7B, but FIG. 7A and FIG. It may be possible to stop at a position other than that shown in FIG. Further, the door-attached movable plate 230 does not need to shield the entire device opening 13 at the shielding position (FIG. 7B) that moves relative to the door 18a in the uppermost position. Any overlapping state is sufficient.

  The load port device 210 having such a door-attached movable plate 230 has the same effect as the load port device 10 according to the first embodiment, and prevents inflow of particles or low-cleanness gas into the hoop 2. The environment inside the hoop 2 can be protected. Further, since the door 18a to which the door-attached movable plate 230 is connected has a size that can close the device opening 13, it is possible to connect the relatively large door-attached movable plate 230 in a compact manner. This is advantageous in terms of downsizing the port device 210. Further, since the door-attached movable plate 230 shields the lower side of the device opening 13 in particular, the device opening 13 can be effectively shielded from the rolled up particles and the like.

  In the load port device 210 according to the present embodiment, the door-attached movable plate 230 moves upward relative to the door 18a to shield the device opening 13, but the door-attachable movable plate moves as this. It is not limited to. For example, when the opening / closing mechanism moves the door 18a upward or sideward with respect to the device opening 13, the door-attached movable plate relatively moves downward or sideward with respect to the door 18a, so that the device opening 13 is moved. Can be shielded.

State Fourth Embodiment FIG 8 is a schematic sectional view showing a load port apparatus 310 according to the fourth embodiment, FIG. 8 (a), the cover comes movable plate 30 and the door comes movable plate 230 is in the retracted position FIG. 8B is a cross-sectional view illustrating a state in which the cover-attached movable plate 30 and the door-attached movable plate 230 are in the shielding position. The load port device 10 according to the fourth embodiment is the same as the first or third embodiment in that both the cover-attached movable plate 30 according to the first embodiment and the door-attached movable plate 230 according to the third embodiment are included. Although different from the load port devices 10 and 210, the cover-attached movable plate 30 and the door-attached movable plate 230 are the same as those described in the first or third embodiment.

  Since the load port device 310 according to the fourth embodiment includes both the cover-attached movable plate 30 and the door-attached movable plate 230, as shown in FIG. By moving both of the movable plates 230 to the shielding position, the apparatus opening 13 and the hoop 2 can be effectively shielded from a relatively clean gas flowing into the wafer transfer chamber 52.

  The load port device 310 includes a cover-attached movable plate 30 that is retracted upward and a door-attached movable plate 230 that is retracted downward. Therefore, the load port device adjusts the position of the gap formed between the cover-attached movable plate 30 and the door-attached movable plate 230 so that the arm 54a of the wafer transfer device 54 can pass through, for example. It is possible to effectively shield the apparatus opening 13 and the main opening 2b of the hoop 2 even during the conveyance. In addition, the load port device 310 has the same effects as the load port devices 10 and 210 according to the first and third embodiments.

  The above-described embodiments exemplify some of the embodiments included in the present invention, and do not limit the present invention in any way. Needless to say, the present invention includes other embodiments. . For example, in the above-described embodiment, the cover-attached movable plates 30 and 130 and the door-attached movable plate 230 move in parallel between the shielding position and the retracted position. It is not limited to this. For example, the cover-attached movable plate and the door-attached movable plate may move between the shielding position and the retracted position by rotating. Further, the cover-attached movable plate may be connected to the side flange 24 instead of the flange 22 so as to be movable relative to the side flange 24.

DESCRIPTION OF SYMBOLS 1 ... Wafer 2 ... Hoop 4 ... Cover 5, 6 ... Bottom hole 10, 110, 210, 310 ... Load port apparatus 11 ... Wall part 11a ... Inner side surface 11b ... Outer side surface 13 ... Device opening 13a ... Upper side 13b ... Side 14 ... Place 16 ... Bottom gas introduction part 17 ... Front gas introduction part 18 ... Opening / closing part 18a ... Door 18b ... Door drive part 20 ... Cover member 22 ... Early part 22a ... Early folding part 22b ... Early upper surface 24 ... Side lateral part 24a ... Side fold-back part 30, 130 ... Moving plate 230 with cover ... Moving plate 50 with door ... EFEM
51 ... Mini-environment device 52 ... Wafer transfer chamber 54 ... Wafer transfer machine 54a ... Arm 56 ... Fan filter unit 56a ... Fan 56b ... Filter

Claims (7)

A mounting table on which a container having a main opening formed on the side surface for loading and unloading a wafer is mounted;
A device opening communicating with the main opening is formed, and a wall portion having an outer surface facing the mounting table and an inner surface facing the opposite direction to the outer surface,
An opening / closing part for opening / closing the main opening and the device opening;
It is provided along at least one side of the device opening, protrudes from the inner surface of the wall portion, and divides the inner surface into an opening side near the device opening and an outer side far from the device opening. A cover member;
A cover-attached movable plate connected to the cover member so as to be relatively movable,
The cover-attached movable plate has a shielding position that partially overlaps the device opening when viewed from a direction perpendicular to the wall portion, and an area that overlaps the device opening when viewed from a direction perpendicular to the wall portion from the shielding position. A load port device which is moved between a narrow retreat position. The cover member has a flange provided along an upper side that is one of the sides in the device opening;
The load port device according to claim 1, wherein the cover-attached movable plate is connected to the collar portion so as to be relatively movable. The collar portion has a collar upper surface extending obliquely downward from the inner surface,
The load port device according to claim 2, wherein the cover-attached movable plate moves relative to the flange along the upper surface of the flange. The opening / closing part has a door that is moved between a closed position for closing the device opening and an open position for opening the device opening,
A shield position that is connected to the door so as to be movable relative to the door, and in which the door is in the open position; 4. The door-attached movable plate further moved between a retracted position having an area overlapping the device opening as viewed from a direction perpendicular to the retraction position narrower than the shielding position. 5. Load port device.   The cover-attached movable plate can stop at a first shielding position and a second shielding position that are different from each other in the shielding position and overlap with the apparatus opening. The load port device according to any one of claims 1 to 4, wherein a stop position changes according to the movement.   The apparatus further comprises a front gas introduction part that is provided on the opening side with respect to the cover member and introduces a cleaning gas into the container through the apparatus opening and the main opening. The load port device according to any one of claims 1 to 5. A mounting table on which a container having a main opening formed on the side surface for loading and unloading a wafer is mounted;
A device opening communicating with the main opening is formed, and a wall portion having an outer surface facing the mounting table and an inner surface facing the opposite direction to the outer surface,
An opening / closing part that has a door that is moved between a closed position that closes the device opening and an open position that opens the device opening; and that opens and closes the main opening and the device opening;
A door-attached movable plate connected to be movable relative to the door,
When the door is in the open position, the door-attached movable plate is seen from a direction perpendicular to the wall portion and a shielding position where the device opening partially overlaps the device opening as seen from the direction perpendicular to the wall portion. The load port device, wherein the load port device is moved between a retreat position in which an area overlapping with the device opening is narrower than the shielding position.

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