JP2017228584A5 - - Google Patents

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Publication number
JP2017228584A5
JP2017228584A5 JP2016121958A JP2016121958A JP2017228584A5 JP 2017228584 A5 JP2017228584 A5 JP 2017228584A5 JP 2016121958 A JP2016121958 A JP 2016121958A JP 2016121958 A JP2016121958 A JP 2016121958A JP 2017228584 A5 JP2017228584 A5 JP 2017228584A5
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JP
Japan
Prior art keywords
insulating layer
layer
charging
conductive
substrate
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JP2016121958A
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English (en)
Japanese (ja)
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JP2017228584A (ja
JP6678526B2 (ja
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Priority claimed from JP2016121958A external-priority patent/JP6678526B2/ja
Publication of JP2017228584A publication Critical patent/JP2017228584A/ja
Publication of JP2017228584A5 publication Critical patent/JP2017228584A5/ja
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JP2016121958A 2016-06-20 2016-06-20 電気機械変換器 Active JP6678526B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016121958A JP6678526B2 (ja) 2016-06-20 2016-06-20 電気機械変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016121958A JP6678526B2 (ja) 2016-06-20 2016-06-20 電気機械変換器

Publications (3)

Publication Number Publication Date
JP2017228584A JP2017228584A (ja) 2017-12-28
JP2017228584A5 true JP2017228584A5 (zh) 2019-01-17
JP6678526B2 JP6678526B2 (ja) 2020-04-08

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Family Applications (1)

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JP2016121958A Active JP6678526B2 (ja) 2016-06-20 2016-06-20 電気機械変換器

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JP (1) JP6678526B2 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6700139B2 (ja) * 2016-08-01 2020-05-27 シチズン時計株式会社 エレクトレット基板の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5931457B2 (ja) * 2012-01-17 2016-06-08 学校法人 関西大学 エレクトレットの製造方法、エレクトレット、発電装置
JP5627130B2 (ja) * 2012-08-30 2014-11-19 アオイ電子株式会社 正イオンを含有したエレクトレットの形成方法
JP2014107890A (ja) * 2012-11-26 2014-06-09 Panasonic Corp エレクトレット素子およびそれを用いた振動発電器
WO2015019919A1 (ja) * 2013-08-08 2015-02-12 アオイ電子株式会社 アクチュエータ、シャッタ装置、流体制御装置、スイッチおよび２次元走査型センサ装置
JP6335742B2 (ja) * 2014-09-30 2018-05-30 シチズン時計株式会社 電子機器

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