JP2017226894A - プラズマ成膜方法およびプラズマ成膜装置 - Google Patents
プラズマ成膜方法およびプラズマ成膜装置 Download PDFInfo
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- 238000000151 deposition Methods 0.000 title claims abstract description 13
- 230000008021 deposition Effects 0.000 title abstract description 7
- 239000007789 gas Substances 0.000 claims abstract description 170
- 239000001307 helium Substances 0.000 claims abstract description 16
- 229910052734 helium Inorganic materials 0.000 claims abstract description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 18
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 13
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
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- 239000000463 material Substances 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 230000000087 stabilizing effect Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
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- 238000001816 cooling Methods 0.000 description 1
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- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】チャンバー内に被処理体を配置し、チャンバー内に成膜ガスを供給するとともに、チャンバー内にプラズマを生成させ、そのプラズマにより成膜ガスを励起させて被処理体上に所定の膜を成膜するにあたり、チャンバー内に、成膜ガスとともにプラズマ生成ガスとしてヘリウムガスを供給し、チャンバー内にヘリウムガスを含むプラズマを生成させる。
【選択図】図2
Description
図1は本発明の一実施形態に係るプラズマ成膜方法が適用可能なプラズマ成膜装置の一例を示す断面図である。図1のプラズマ処理装置は、RLSA(登録商標)マイクロ波プラズマ成膜装置として構成されており、被処理体である半導体ウエハ(以下単に「ウエハ」と記す)にプラズマCVDにより窒化珪素(SiN)膜を成膜するようになっている。
次に、このように構成されるプラズマ成膜装置100を用いたプラズマ成膜方法の一実施形態について図2のフローチャートを参照して説明する。
マイクロ波発生装置39からの所定のパワーのマイクロ波を、マッチング回路38を経て導波管37に導く。導波管37に導かれたマイクロ波は、矩形導波管37bをTEモードで伝播される。TEモードのマイクロ波はモード変換器40でTEMモードにモード変換され、TEMモードのマイクロ波が同軸導波管37aをTEMモードで伝播される。そして、TEMモードのマイクロ波は、遅波材33、平面アンテナ31のスロット32、およびマイクロ波透過板28を透過し、チャンバー1内に放射される。
処理温度(サセプタ2表面の温度):250〜550℃
処理圧力:6.5〜100Pa(50〜750mTorr)
Heガス流量:100〜400mL/min(sccm)
SiH4ガス流量:10〜200mL/min(sccm)
N2ガス流量:10〜200mL/min(sccm)
マイクロ波パワー密度:0.01〜0.04W/cm2
次に、実験例について説明する。
ここでは、図1に示すプラズマ成膜装置を用いてプラズマCVDによりSiN膜を成膜するにあたり、プラズマ生成ガスとしてHeガスを添加しない場合とHeガスを添加した場合について膜厚均一性を比較した。
SiH4ガス流量:90sccm
N2ガス流量:70sccm
マイクロ波パワー密度:2.78W/cm2
処理時間:80sec
SiH4ガス流量:10〜200sccm
N2ガス流量:5〜200sccm
マイクロ波パワー密度:2.43〜3.34W/cm2
処理時間:10〜200sec
以上、添付図面を参照して本発明の実施形態について説明したが、本発明は、上記の実施の形態に限定されることなく、本発明の思想の範囲内において種々変形可能である。
2;サセプタ
5;ヒーター
15;ガス導入部
16;ガス供給機構
24;排気機構
28;マイクロ波透過板
31;平面アンテナ
32;スロット
33;遅波材
37;導波管
38;マッチング回路
39;マイクロ波発生装置
40;モード変換器
50;制御部
100;プラズマ成膜装置
W;半導体ウエハ(被処理体)
Claims (14)
- チャンバー内に被処理体を配置し、前記チャンバー内に成膜ガスを供給するとともに、前記チャンバー内にプラズマを生成させ、前記プラズマにより前記成膜ガスを励起させて被処理体上に所定の膜を成膜するプラズマ成膜方法であって、
前記チャンバー内に、前記成膜ガスとともにプラズマ生成ガスとしてヘリウムガスを供給し、前記チャンバー内にヘリウムガスを含むプラズマを生成させることを特徴とするプラズマ成膜方法。 - 前記チャンバー内に生成されるプラズマは、マイクロ波プラズマであることを特徴とする請求項1に記載のプラズマ成膜方法。
- 前記マイクロ波プラズマは、RLSA(登録商標)マイクロ波プラズマ処理装置により生成されたものであることを特徴とする請求項2に記載のプラズマ成膜方法。
- 前記成膜ガスと前記ヘリウムガスとの分圧比率は、0.15〜2.5の範囲であることを特徴とする請求項1から請求項3のいずれか1項に記載のプラズマ成膜方法。
- 前記成膜ガスとして、シリコン原料ガスおよび窒素含有ガスを用い、前記所定の膜として窒化珪素膜を成膜することを特徴とする請求項1から請求項4のいずれか1項に記載のプラズマ成膜方法。
- 前記被処理体の処理温度は、250〜550℃の範囲であることを特徴とする請求項5に記載のプラズマ成膜方法。
- 前記チャンバー内の処理圧力は、6.5〜100Paの範囲であることを特徴とする請求項5または請求項6に記載のプラズマ成膜方法。
- 被処理体が収容されるチャンバーと、
前記チャンバー内で被処理体が保持される基板保持部材と、
前記チャンバー内にガスを供給するガス供給機構と、
前記チャンバー内を排気する排気機構と、
前記チャンバー内にプラズマを生成させるプラズマ生成手段と
を有し、
前記ガス供給機構は、前記被処理体上に所定の膜を成膜させるための成膜ガスと、プラズマ生成ガスとしてのヘリウムガスとを前記チャンバー内に供給し、
前記プラズマ生成手段により、前記チャンバー内にヘリウムガスを含むプラズマを生成させ、該プラズマにより前記成膜ガスを励起させて前記被処理体上に所定の膜を成膜することを特徴とするプラズマ成膜装置。 - 前記プラズマ生成手段は、前記チャンバー内にマイクロ波プラズマを生成させるものであることを特徴とする請求項8に記載のプラズマ成膜装置。
- 前記プラズマ生成手段は、マイクロ波を発生させるマイクロ波発生装置と、マイクロ波を放射するスロットを有する平面アンテナと、前記チャンバーの天壁を構成する誘電体からなるマイクロ波透過板とを有し、前記平面アンテナの前記スロットおよび前記マイクロ波透過板を介してマイクロ波を前記チャンバー内に放射させ、前記チャンバー内にマイクロ波プラズマを供給し、前記チャンバー内にマイクロ波プラズマを生成させることを特徴とする請求項9に記載のプラズマ成膜装置。
- 前記ガス供給機構は、前記成膜ガスと前記ヘリウムガスとの分圧比率を、0.15〜2.5の範囲にして供給することを特徴とする請求項8から請求項10のいずれか1項に記載のプラズマ成膜装置。
- 前記ガス供給機構は、前記成膜ガスとして、シリコン原料ガスおよび窒素含有ガスを供給し、前記所定の膜として窒化珪素膜が成膜されることを特徴とする請求項8から請求項11のいずれか1項に記載のプラズマ成膜装置。
- 前記被処理体の処理温度を制御する手段を有し、前記被処理体の温度が250〜550℃の範囲に制御されることを特徴とする請求項12に記載のプラズマ成膜装置。
- 前記チャンバー内の処理圧力を制御する手段を有し、前記チャンバー内の処理圧力が6.5〜100Paの範囲に制御されることを特徴とする請求項12または請求項13に記載のプラズマ成膜装置。
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