JP2017225309A - Actuator, actuator unit and assembly method for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To guarantee performance after a sterilization process by enabling the sterilization process of an actuator unit at a low cost.SOLUTION: An actuator unit 1b has an actuator body 1a and a sensor unit 10. An actuator body 1a has: a casing 4 with a window part 6 formed in it; and a member 3 to be driven, which is provided with a part 8 to be detected. The window part 6 is covered with a coating member 7. A sensor unit 10 includes: an engagement part 10b that is engaged with the casing 4 in the window part 6; and a detection part 10a that detects movement of the part 8 to be detected. By removing the coating member 7 from the casing 4, the engagement part 10b and the casing 4 can be engaged, and the sensor unit 10 is attached to the casing 4. By disengaging the engagement part 10 and the casing 4, the sensor unit 10 can be detached from the casing 4.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an actuator, an actuator unit, and an assembly method thereof.

  An actuator unit on which a displacement detection device such as an optical encoder is mounted and an optical device using the actuator unit are known (for example, see Patent Document 1). In order to use such an actuator unit for medical purposes, development for making it applicable to sterilization processing performed in a high-temperature and high-pressure environment has been actively carried out.

JP 2005-198424 A

  In an actuator unit including an optical encoder or the like, a light-emitting diode with low heat resistance is used as a light source for the optical encoder or the like, and a transparent resin or the like with low heat resistance is used as a housing for the optical encoder or the like. Easy to assume. In this case, the overall heat resistance of the actuator unit is low. When such an actuator unit is exposed to a predetermined high pressure environment at a temperature of 121 ° C. to 135 ° C. for high-pressure steam sterilization or the like, a housing due to failure of the light source or sudden boiling of moisture in the resin, etc. The body may be damaged. That is, when high-pressure steam sterilization or the like is performed when an actuator unit with low heat resistance is used for medical purposes, it is difficult to ensure the performance of the actuator unit thereafter. It may be possible to take measures against this problem by using an ethylene oxide gas sterilization method or a plasma sterilization method known as a sterilization method that can be carried out in a lower temperature environment. There is a problem that it is more expensive than the high-pressure steam sterilization method.

  An object of this invention is to provide the technique which can perform a sterilization process cheaply about an actuator unit provided with a device with low heat resistance, and can guarantee the performance after a sterilization process.

  An actuator unit according to the present invention is an actuator unit having an actuator body and a sensor unit, wherein the actuator body includes an actuator having a movable part provided with a detected part and a window part, and includes the actuator. A casing that covers the window portion, and the sensor unit includes an engaging portion that can be engaged with the casing in the window portion, and a detection portion that detects the movement of the detected portion. The sensor unit is configured such that the engagement portion and the casing can be engaged with each other when the covering means does not perform the function of covering the window portion. It is mounted and removed from the casing by releasing the engagement between the engaging portion and the casing. The features.

  According to the present invention, it is possible to sterilize an actuator unit including a device having low heat resistance at low cost, and to guarantee the performance after sterilization.

It is a schematic perspective view of an actuator body and an actuator unit according to the first embodiment. It is a schematic sectional drawing of the actuator main body and actuator unit of FIG. It is a figure which shows the workflow which uses the actuator unit of FIG. It is a schematic perspective view of the actuator main body and actuator unit which concern on 2nd Embodiment. FIG. 5 is a schematic cross-sectional view of the actuator main body and the actuator unit in FIG. 4 and an enlarged view of a region A in the cross-sectional view showing the actuator main body. FIG. 6 is an enlarged view of a region B in the cross-sectional view showing the actuator unit of FIG. 5 and a schematic perspective view of the sensor unit. It is the schematic sectional drawing of the actuator unit in the plane which passes along the straight line C in FIG.5 (b), and the enlarged view of the area | region D in sectional drawing. It is a schematic perspective view of the actuator main body and actuator unit which concern on 3rd Embodiment. It is a schematic sectional drawing of the actuator main body and actuator unit of FIG. FIG. 10 is an enlarged view of regions E, F, H, and I in FIG. 9. It is a perspective view which shows the structure of the vibrating body with which the actuator main body of FIG. 8 is provided. It is a schematic sectional drawing of the actuator unit in the plane which passes along the straight line G in FIG.9 (b). It is a schematic perspective view of the sensor unit with which the actuator unit of FIG. 8 is provided, and the enlarged view of the area | region J in FIG.

<First Embodiment>
Fig.1 (a) is a perspective view which shows schematic structure of the actuator main body 1a which concerns on 1st Embodiment. FIG. 1B is a perspective view showing a schematic configuration of an actuator unit 1b in which the sensor unit 10 is mounted on the actuator body 1a. The actuator body 1a includes a casing 4 having a cylindrical shape serving as an exterior (housing), and an output shaft 3a (output unit) for taking out rotational output to the outside. The casing 4 and the output shaft 3a are hermetically sealed (sealed) by a sealing member 9 in a state where the output shaft 3a is rotatable. A bearing (not shown) that rotatably supports the output shaft 3a is appropriately disposed inside the casing 4, and a detailed description thereof is omitted. A part of the casing 4 is provided with a window 6 that is an opening, and the window 6 can be sealed with a covering member 7. The actuator body 1 a has a sealed structure in which the inside of the casing 4 is isolated from the external environment by the covering member 7 and the sealing member 9 in a state where the covering member 7 covers the window portion 6. The sensor unit 10 is attached to the casing 4 in the window portion 6 by breaking the covering member 7 or peeling or removing at least part of the covering member 7 so that the covering member 7 does not perform the function of covering the window portion 6. It becomes possible.

  FIG. 2A is a one-side sectional view on the side of the window portion 6 when the actuator body 1a is cut along a plane including the rotation center shaft 5 of the output shaft 3a and passing through the window portion 6, and does not include the window portion 6. The illustration of one side is omitted. Similarly, FIG. 2B is a one-side sectional view of the window unit 6 when the actuator unit 1b is cut along a plane including the rotation center shaft 5 of the output shaft 3a and passing through the window unit 6. The illustration of one side not including is omitted.

  In the actuator main body 1a, the fixed portion 2 is attached to the casing 4. The fixed part 2 is, for example, a permanent magnet. A rotating portion 3c and a flange 3b that rotate together with the output shaft 3a are attached to the output shaft 3a. The rotating unit 3c is, for example, an armature such as a coil. The output shaft 3a, the flange 3b, and the rotating portion 3c constitute a driven member 3 that is a movable portion, and the driven member 3 rotates around the rotation center axis 5. That is, the actuator body 1a is configured as an electromagnetic motor, and the rotation output can be taken out from the output shaft 3a.

  An annular detected portion 8 is attached to the flange 3b. The detected portion 8 is an encoder scale plate (diffraction grating) or the like in which periodic bright and dark slits are formed, and is provided over the entire circumference of the flange 3b. The covering member 7 is a rubber cap, a rubber film, a film, or the like. The sealing member 9 is a packing or oil seal that is a contact seal, a mechanical seal or a labyrinth seal that is a non-contact seal. However, the sealing member 9 is not limited to these, and may be a bearing with a sealing function or a sliding bearing. The fixed part 2, the driven member 3, the casing 4, the detected part 8, the covering member 7, and the sealing member 9 are formed of a metal, ceramics, resin, rubber material, or the like having high heat resistance.

  When the covering member 7 is a rubber cap, the sensor unit 10 can be attached to the window 6 by removing the covering member 7. When the covering member 7 is a rubber film or a film, the sensor unit 10 can be attached to the window 6 by partially breaking the covering member 7 or peeling the entire covering member 7 from the casing 4. . In a state in which the sensor unit 10 is mounted on the actuator body 1a, it is desirable that the gap is not generated between the casing 4 and the sensor unit 10.

  The sensor unit 10 includes an exterior part 10d, a substrate 10c fixed to the exterior part 10d, and a detection part 10a fixed to the substrate 10c. Electronic components other than the detection unit 10a may be mounted on the substrate 10c. An engaging portion 10b is provided in a part of the exterior portion 10d. The engaging portion 10b has, for example, a snap-fit structure having a claw portion as shown in the figure, and when the sensor unit 10 is attached to the casing 4, the relative position of the detecting portion 10a with respect to the detected portion 8 is. The position and posture are appropriately adjusted. In addition, when the covering member 7 is a rubber film or a film, the covering member 7 attached to the window portion 6 is broken by pushing the tip (claw portion) of the engaging portion 10b into the window portion 6. At the same time, the engagement portion 10b may be engaged with the casing 4.

  The detection unit 10a has a light emitting unit (light source) and a light receiving unit (not shown), projects light from the light emitting unit to the detected unit 8, and receives light reflected from the detected unit 8 by the light receiving unit. Since the detected portion 8 is attached to the rotating flange 3b, the movement of the detected portion 8 (that is, the movement of the flange 3b) when the detected portion 8 rotates together with the flange 3b is used as light / dark information (light / dark signal). Reading is performed by the detection unit 10a. And the rotational position information and rotational speed information of the flange 3b can be acquired by the calculating means (not shown) with respect to the brightness information read by the detection unit 10a. A sensor unit 10 is configured by the detection unit 10a, the detected unit 8, and the calculation means.

  Next, an assembly method and usage method (workflow) of the actuator unit 1b will be described. Here, although the example which uses the actuator unit 1b in the medical field which performs surgery etc. is taken up, the use of the actuator unit 1b is not restricted to a medical field. FIG. 3 is a diagram illustrating an example of a workflow when the actuator unit 1b is used in a medical field. In FIG. 3, the step indicated by the solid line frame is a process that can be handled in a non-sterilized state, and is performed by, for example, an engineer or some nurses. On the other hand, the step indicated by the broken line frame is a process in which only sterilized items can be handled, and is performed by doctors, technicians, nurses, etc. involved in the treatment. Here, it is assumed that the sterilized state is lost when a person handling a non-sterilized object touches the sterilized object even once. The actuator body 1a (however, the state in which the covering member 7 is not attached) is manufactured in advance.

  First, processing on the actuator body 1a and actuator unit 1b side will be described. A person who can handle unsterilized items (hereinafter referred to as “auxiliary”) attaches the covering member 7 to the actuator body 1a in step S11, and cleans the actuator body 1a in the subsequent step S12. Note that the assistant who executes the process shown in the workflow of FIG. 3 does not indicate a specific person, and one or a plurality of assistants can appropriately perform the predetermined process. Subsequently, a person who can handle only those that have been sterilized (hereinafter “subject”) performs high-pressure steam sterilization of the actuator body 1a in step S13, and after the high-pressure steam sterilization process, the actuator body 1a is sterilized. Take out from. As in the case of the assistant, the subject executing the process in the workflow of FIG. 3 does not indicate a specific person, but one or more subjects can appropriately perform the predetermined process. . Since the actuator body 1a is excellent in heat resistance, high-pressure steam sterilization, which is a sterilization method with a low processing cost, can be used in step S13. The conditions for the high-pressure steam sterilization treatment are not particularly limited, and for example, it can be carried out by exposing to high-temperature steam at a temperature of 110 ° C. to 140 ° C. for 30 minutes to 10 minutes.

  In step S14, the subject person removes the covering member 7 attached to the actuator body 1a to open the window 6, and attaches the sensor unit 10 to the actuator body 1a in step S15. As will be described later, the sensor unit 10 handled by the subject in step S15 is maintained in a sterilized state. Since the actuator unit 1b is assembled in step S15, the subject performs a predetermined treatment (surgery, treatment, examination, etc.) using the actuator unit 1b in step S16. When the predetermined treatment is completed, the assistant disassembles the actuator unit 1b into the actuator body 1a and the sensor unit 10 in step S17. The actuator body 1a is collected and returned to step S11 for reuse. On the other hand, the sensor unit 10 is sent to step S25 described later.

  Next, processing on the sensor unit 10 side will be described. The assistant creates the sensor unit 10 by mounting the detection unit 10a on the substrate 10c and assembling the detection unit 10a on the exterior 10d in step S21. Step S21 can be performed at a factory, for example, but is not limited to this. For example, if the assembly can be easily performed like an assembly kit, it can be performed at a medical site where it is used. Is also possible. In step S22, the subject performs low-temperature sterilization processing using the ethylene gas sterilization method, plasma sterilization method, or the like that can sterilize the produced sensor unit 10 at a temperature lower than the processing temperature of the high-pressure steam sterilization processing. Do. At this time, it is desirable to perform the low temperature sterilization processing of the plurality of sensor units 10 at a time. In step S23, the subject person hermetically wraps the sterilized sensor unit 10 (for example, vacuum packing). In step S24, the assistant opens the sealed package of the sensor unit 10 and takes out the sensor unit 10 into a sterilized bat or the like so as not to touch the sensor unit 10 at that time. Thereby, execution of step S15 mentioned above is attained. When the used actuator unit 1b is disassembled in step S17, the assistant discards the sensor unit 10 removed from the actuator body 1a in step S25.

  As described above, in the present embodiment, by providing the actuator main body 1a with the covering member 7, different sterilization treatments can be applied to the actuator main body 1a and the sensor unit 10, respectively. Thereby, it is possible to apply the low-pressure high-pressure steam sterilization method to the actuator body 1a having high heat resistance, and it is possible to reuse the actuator body 1a having high manufacturing cost. On the other hand, for the sensor unit 10 having low heat resistance and low manufacturing cost, it is necessary to perform low-temperature sterilization. However, the sterilization process for each sensor unit 10 can be reduced by collectively performing the sterilization process for the plurality of sensor units 10 at that time. That is, the total cost required for sterilization can be reduced by adopting a configuration in which the entire actuator unit 1b is not sterilized by high-cost low-temperature sterilization.

  In the present embodiment, the actuator body 1a having high heat resistance and the sensor unit 10 having low heat resistance are managed separately, and the sensor unit 10 is handled as a disposable part. Thereby, while improving the reliability of the detection part 10a, the safety at the time of performing the procedure using the actuator unit 1b in a medical field can be improved. Further, when the actuator body 1a is a motor with a brush, even if abrasion powder is generated at the sliding portion during use, the abrasion of the abrasion powder to the external environment of the casing 4 is caused because the sensor unit 10 is mounted. Can be prevented. Further, it is possible to prevent dust and stray light from entering the actuator unit 1b from the outside environment.

  In the present embodiment, the actuator unit 1b has a structure in which an output (driving force) is extracted by rotating the output shaft 3a. However, the configuration in which the actuator main body 1a and the sensor unit 10 can be managed separately is not limited to this, and can also be applied to a linear drive type actuator unit that outputs a linear drive force. . Further, in the present embodiment, the sensor unit 10 having the reflective optical encoder is taken up. However, instead of this, a transmissive optical encoder, a magnetic sensor, or a capacitive sensor can be used. The sensor unit can be mounted with a sensor having various sensors according to the characteristics of the actuator body 1a. For example, the sensor unit may be a speed sensor, a gyro sensor, a force sensor, a CCD sensor, or a CMOS sensor. In general, if the sensor unit is mounted with a device having a portion having low heat resistance (parts to which the high-pressure steam sterilization method is difficult to apply), the effects as described above can be obtained.

  In the present embodiment, as an example of a workflow using the actuator unit 1b, an example in which the actuator unit 1b is used in a medical site has been described with reference to FIG. 3, but the usage example is not limited to the medical site, and various processes in the workflow are performed. The procedure is not limited to this. For example, after the high-pressure steam sterilization process in step S13, the actuator body 1a may be hermetically packaged as in step S23. Moreover, if the process which exposes the actuator unit 1b to a high temperature environment is required, said effect obtained by making the actuator main body 1a and the sensor unit 10 into a different body can be acquired.

Second Embodiment
FIG. 4A is a perspective view showing a schematic configuration of an actuator body 51a according to the second embodiment. FIG. 4B is a perspective view showing a schematic configuration of an actuator unit 51b in which the sensor unit 60 is mounted on the actuator body 51a. The actuator body 51a has a cylindrical casing 54a, a bottom plate member 54b that is attached to the bottom of the casing 54a and seals the casing 54a, and is disposed in the casing 54a, and outputs for taking out rotational output to the outside. And a shaft 53a. The casing 54a and the output shaft 53a are hermetically sealed by a sealing member 59 in a state where the output shaft 53a is rotatable. A covering member 57 provided on the outer peripheral side surface of the casing 54a covers a window portion 56 (not shown in FIG. 4A, see FIG. 5) provided in the casing 54a. By the covering member 57 and the sealing member 59, the inside of the casing 54a is blocked from the external environment. The sensor unit 60 can be attached to the window portion 56 by tearing, peeling or removing the covering member 57.

  FIG. 5A is a cross-sectional view of the actuator body 51a taken along a plane including the rotation center shaft 55 of the output shaft 53a and passing through the window portion 56. FIG. FIG. 5B is a cross-sectional view of the actuator unit 51b taken along a plane that includes the rotation center shaft 55 of the output shaft 53a and passes through the window portion 6. FIG.5 (c) is an enlarged view of the area | region A in Fig.5 (a). In FIG. 5, hatching is not shown for the cross-sections of some members in order to avoid the complexity of the drawing and obscure the configuration.

  Inside the actuator main body 51a, a housing 52a is fixed to the casing 54a, and two rolling ball bearings 62 are incorporated into the housing 52a by fitting. An output shaft 53a is incorporated in the inner ring of the rolling ball bearing 62 by fitting, and a male screw is provided on a side surface of the output shaft 53a. The male screw provided on the output shaft 53a is screwed with the female screw provided inside the preloading member 63. The preloading member 63 connects the inner rings of the two ball bearings 62 to each other in the thrust direction of the output shaft 53a ( The preload is applied so as to be pulled in the axial direction of the rotation center shaft 55. By rolling the balls of the two ball bearings 62 preloaded in this manner, the output shaft 53a can rotate smoothly without rattling around the rotation center shaft 55 with respect to the housing 52a.

  A flange 53b is attached to the output shaft 53a. A gap is provided between the bottom plate member 54b and the flange 53b so that the rotation of the flange 53b that rotates together with the output shaft 53a is not hindered. An anti-vibration rubber 53d is attached to the flange 53b, and a driven member 53c is attached to the anti-vibration rubber 53d. That is, the driven member 53c is disposed so as to be rotatable integrally with the flange 53b via the vibration isolating rubber 53d. A sliding portion is formed on the surface of the driven member 53c opposite to the surface in contact with the vibration isolating rubber 53d so as to have a spring property that bends in a direction substantially parallel to the thrust direction of the output shaft 53a. This sliding portion is in pressure contact with the upper surface of the convex portion provided on the elastic body 52f. The convex portions of the elastic body 52f are formed between adjacent groove portions by providing groove portions at predetermined intervals in the circumferential direction. An annular detected portion 58 is disposed on the outer peripheral side of the surface of the driven member 53c where the sliding portion is provided.

  An anti-rotation member 52d is fixed to the housing 52a, and claw portions 52e provided at a plurality of locations so as to protrude from the anti-rotation member 52d to the outer peripheral side are inserted into grooves of the elastic body 52f, whereby the elastic body 52f. Is restricted so as not to rotate in the circumferential direction. A piezoelectric element 52g, which is an example of an electro-mechanical energy conversion element, is bonded to the surface of the elastic body 52f opposite to the surface on which the convex portion is formed by an adhesive or the like. The elastic body 52f and the piezoelectric element 52g constitute a vibrating body as a driving body that drives the driven member 53c. A substrate 52h is attached to the piezoelectric element 52g with an adhesive, and a support member 52b is fixed to the housing 52a. A non-woven fabric 52i and a disc spring 52j are arranged in this order from the substrate 52h side between the substrate 52h and the support member 52b. By adjusting the vertical position of the housing 52a and the support member 52b in the thrust direction of the output shaft 53a to adjust the compression length of the disc spring 52j, the pressing force of the elastic body 52f against the driven member 53c is adjusted. be able to.

  By applying two or more alternating voltages having different phases to the piezoelectric element 52g through the substrate 52h, a traveling wave traveling in the circumferential direction of the elastic body 52f is excited in the elastic body 52f. As a result, an elliptical motion is generated at the tip of the convex portion of the elastic body 52f, and the driven member 53c that is in pressure contact with the convex portion is frictionally driven by the convex portion, so that the driven member 53c is relative to the elastic body 52f. Can be moved (rotated) automatically. As the driven member 53c rotates, the output shaft 53a connected to the driven member 53c rotates, so that the rotation output can be taken out. In other words, in the actuator main body 51a, the output shaft 53a, the flange 53b, and the driven member 53c constitute a movable part for outputting a driving force, and as will be described later, the rotational speed and the rotation angle of the driven member 53c are moved. The detected part 58 for detecting the is arranged. Since a method of exciting a traveling wave in the annular elastic body 52f is well known, a more detailed description is omitted.

  Fig.6 (a) is an enlarged view of the area | region B in FIG.5 (b). In FIG. 6A, in order to avoid that the drawing becomes complicated and the configuration becomes difficult to understand, hatching is not shown for the cross sections of some members. FIG. 6B is a perspective view showing a schematic configuration of the sensor unit 60. The sensor unit 60 includes a substrate 60c, a detection unit 60a mounted on the substrate 60c, a connector 60e for performing at least one of power supply to the detection unit 60a and signal acquisition from the detection unit 60a, and the substrate 60c and the connector. And an exterior portion 60d for holding 60e. As the detection unit 60a, for example, a detection unit similar to the detection unit 10a described in the first embodiment can be used, and includes a light emitting unit 60f and a light receiving unit 60g. Further, the detected part 58 is arranged at a position away from the sliding part of the driven member 53c (on the outer peripheral side compared to the sliding part provided on the inner peripheral side). On the surface of the detected portion 58, for example, a light and dark pattern is formed by a metal vapor deposition film or the like. By projecting light from the light emitting part 60f to the detected part 58 and receiving the reflected light from the detected part 58 by the light receiving part 60g, it is possible to read the information of the light / dark pattern formed on the detected part 58. Using known calculation means, the displacement amount, speed information, and the like of the driven member 53c can be obtained from the read light / dark pattern information. One end of the connector 60e is exposed to the outside of the exterior portion 60d, and a cable or the like (not shown) can be inserted into and removed from the connector 60e from the outside.

  A gripping portion 60h and an engaging portion 60b are formed on the side surface of the exterior portion 60d. FIG. 7A is a cross-sectional view showing a schematic configuration of the actuator unit 51b on a plane passing through the straight line C in FIG. 5B and orthogonal to the rotation center axis 55. FIG. FIG.7 (b) is an enlarged view of the area | region D in Fig.7 (a). The sensor unit 60 is positioned and fixed with respect to the actuator main body 51a when the engaging portion 60b engages with the casing 54a around the window portion 56. The sensor unit 60 is easily attached to and detached from the actuator main body 51a (engagement of the engaging portion 60b to the casing 54a and release thereof) by gripping the gripping portion 60h with an appropriate force so that the engaging portions 60b come close to each other. be able to. While the sensor unit 60 is mounted, it is desirable that the structure is in close contact so that no gap is generated between the casing 54a and the exterior portion 60d. Therefore, if necessary, a rubber sheet such as silicone rubber is disposed between the casing 54a and the exterior portion 60d so that no gap is generated between the casing 54a and the exterior portion 60d. Property).

  Next, materials that are applied to main components constituting the actuator unit 51b will be described. For the elastic body 52f, a metal such as iron, stainless steel, or copper, or a high toughness ceramic is preferably used. The driven member 53c that is frictionally slid by the elastic body 52f preferably has stable sliding characteristics and wear resistance characteristics. For example, the base material is formed of a metal such as aluminum and an alumite is formed on the friction sliding surface. Those having a cured film formed by treatment or the like are preferably used. In order to improve the friction state between the elastic body 52f and the driven member 53c, a friction material (not shown) may be separately provided on the sliding surface of the elastic body 52f or the driven member 53c. Butyl rubber or the like can be used for the vibration-proof rubber 53d. The nonwoven fabric 52i is preferably made of felt such as wool or glass wool. In order to minimize vibration loss as a vibrating body, for example, a flexible printed wiring board in which an electric circuit is formed on a polyimide (PI) film base with a copper foil is preferably used for the substrate 15. In addition, it is desirable that the exposed portion of the electric circuit formed on the substrate 15 is subjected to a plating process to suppress oxidation. For other members, materials such as metals, resins, and ceramics can be applied.

  In the actuator unit 51b, since the driven member 53c is frictionally driven by the elastic body 52f, the generation of wear powder is inevitable in principle. However, the window 56 provided in the casing 54a can be sealed by the covering member 57 when the actuator main body 51a is stored and by the exterior portion 60d of the sensor unit 60 when used as the actuator unit 51b. Therefore, even when the actuator unit 51b is used at a medical site or the like, it is possible to suppress wear powder generated inside the casing 54a from being scattered into the environment at the site of use with a simple configuration.

  When the actuator main body 51a is stored, the inside of the casing 54a is sealed by the covering member 57. Therefore, the amount of moisture contained in the actuator main body 51a can be controlled by controlling the work environment in which the covering member 57 is attached. . As a result, even if the environmental temperature at the time of storage of the actuator body 51a changes, the sticking caused by the chemical change in the transfer film and wear powder caused by the frictional sliding, the increase of the static friction coefficient, the static friction force due to moisture Performance change (characteristic change) such as deterioration can be prevented.

  In the actuator unit 51b, since the detected portion 58 is joined to the driven member 53c, the weight of the rotating body (driven body) including the driven member 53c can be increased. The increase in the weight of the rotating body contributes to stabilization of the frictional contact between the driven member 53c and the vibrating body (the upper surface of the convex portion of the elastic body 52f). In addition, since the damping effect is imparted to the driven member 53c, generation of unnecessary vibration can be reduced. Further, in the actuator unit 51b, since the sensor unit 60 at the portion where the elastic body 52f and the driven member 53c slide can be disposed close to each other, high-density mounting and downsizing can be realized. In the present embodiment, in addition to the effects described above, the same effects as those obtained with the actuator main body 1a and the actuator unit 1b described in the first embodiment can be obtained.

  In the present embodiment, the actuator unit 51b including the vibration type actuator that frictionally drives the driven member 53c by the annular elastic body 52f has been described. However, the configuration in which the actuator main body 51a and the sensor unit 60 are separated from each other is described. It is not limited to. For example, the configuration of this embodiment can be applied to a linear drive vibration actuator, a hollow rotation drive vibration actuator, an in-plane drive vibration actuator, a spherical drive vibration actuator, and the like. It is. In the present embodiment, the configuration in which the sensor unit 60 can be attached to and detached from the window portion 56 provided on the outer peripheral side surface of the casing 54a has been described. However, the configuration for mounting the sensor unit 60 is limited to this. It is not something. For example, the detected portion 58 is provided on the surface of the flange 53b on the bottom plate member 54b side, the window portion is provided on the bottom plate member 54b, and the sensor unit 60 can be attached to and detached from the window portion in a direction parallel to the rotation center axis 55. It is good also as a structure. Thus, the position where the sensor unit 60 is inserted can be changed as appropriate according to the application of the actuator unit 51b.

  In the above description, the configuration in which the detected portion 58 is joined to the driven member 53c has been described. However, the pattern information of the detected portion 58 may be directly drawn on the driven member 53c by printing, machining, or the like. Good. The connector 60e has been described as being responsible for power supply and signal acquisition to the detection unit 60a and the substrate 60c, but potential detection (vibration) generated in the piezoelectric element 52g in response to power supply to the substrate 52h or vibration of the vibrating body. Detection). As an example of a workflow when using the actuator unit 51b, the workflow described with reference to FIG. 3 in the first embodiment can be applied as it is, and thus the description thereof is omitted here.

<Third Embodiment>
FIG. 8A is a perspective view showing a schematic configuration of an actuator main body 81a according to the third embodiment. FIG. 8B is a perspective view showing a schematic configuration of an actuator unit 81b in which the sensor unit 90 is mounted on the actuator body 81a. Hereinafter, constituent elements of the actuator main body 81a that are the same as the constituent elements of the actuator main body 51a described in the second embodiment are denoted by the same reference numerals, and redundant description is omitted. Similarly, constituent elements of the actuator unit 81b that are the same as the constituent elements of the actuator unit 81b described in the second embodiment are denoted by the same reference numerals, and redundant description is omitted.

  Similar to the actuator unit 51b, the actuator body 81a includes a vibration type actuator that rotates the output shaft 53a by frictionally sliding the driven member with the vibrating body. However, the structure is different between the vibration type actuator provided in the actuator body 81a and the vibration type actuator provided in the actuator body 51a. The actuator body 81a has a casing 84a in which the first connector 93 is disposed instead of the casing 54a constituting the actuator body 51a. A window portion 56 (not shown) (see FIG. 10) is formed on the side surface of the casing 84a, and the actuator body 81a has a configuration in which the window portion 56 is covered with a covering member 57. The actuator unit 81b has a configuration in which a sensor unit 90 is attached to a window portion 56 provided in the actuator body 81a.

  FIG. 9A is a cross-sectional view of the actuator body 81a taken along a plane that includes the rotation center shaft 55 of the output shaft 53a and passes through the window portion 56. FIG. FIG. 9B is a cross-sectional view when the actuator unit 51b is cut along a plane including the rotation center shaft 55 of the output shaft 53a and passing through the window portion 56. FIG. 10A is an enlarged view of a region E in FIG. FIG. 10B is an enlarged view of the region F in FIG. FIG. 10C is an enlarged view of a region H in FIG. FIG. 10 (d) is an enlarged view of region I in FIG. 9 (b). In FIGS. 9 and 10, hatching is not shown for the cross-sections of some members in order to prevent the drawings from becoming complicated and the configuration from becoming difficult to understand.

  The configuration of the actuator main body 81a will be described mainly with reference to FIG. 9 (a) and FIGS. 10 (a) and 10 (c). A housing 82a is fixed inside the casing 84a. The flange 53b is coupled to the driven member 83c via a vibration isolating rubber 53d. A support member 82d is fixed to the housing 82a, and a second connector 91 is disposed on the support member 82d. A base 82b is fixed to the housing 82a, a base 82e is joined to the base 82b, and a vibrating body is attached to the base 82e.

  FIG. 11 is a perspective view showing the structure of the vibrating body and the vicinity thereof. Note that FIG. 11 is opposite to FIG. 10C in the vertical direction (thrust direction of the output shaft 53a). The vibrating body includes a plate-like elastic body 82h, two protrusions 82g provided on one surface in the thickness direction of the elastic body 82h, and a surface opposite to the surface of the elastic body 82h where the protrusion 82g is provided. And a piezoelectric element 82c provided on the substrate. The elastic body 82h is attached to the pedestal 82e via a flexible pressure part 82f provided integrally with the elastic body 82h. By adjusting the relative positions of the housing 82a and the base 82b in the direction parallel to the rotation center axis 55, the protrusion 82g provided on the elastic body 82h is pressed against the driven member 83c. The pressurizing part 82f desirably has a lower rigidity than the elastic body 82h in order to suppress the influence on the vibration characteristics of the elastic body 82h. The piezoelectric element 82c is joined to the elastic body 82h by an adhesive. A substrate (not shown) is attached to the piezoelectric element 82c using an adhesive. Two or more alternating voltages having different frequencies are applied to the piezoelectric element 82c through the substrate so that the elliptical motion indicated by the arrow K in FIG. 11 is excited at the tip of the protrusion 82g. The elliptical motion indicated by the arrow K occurs in a plane including the direction connecting the two protrusions 82g and the protruding direction of the protrusion 82g (the thickness direction of the elastic body 82h). Since the application method of the alternating voltage for causing the elliptical motion indicated by the arrow K to the protrusion 82g is well known, detailed description thereof is omitted here.

  12 is a cross-sectional view showing a schematic configuration of the actuator unit 81b on a plane passing through the straight line G in FIG. 9B and orthogonal to the rotation center axis 55. As shown in FIG. Three vibrating bodies (elastic bodies 82h) are arranged every 120 degrees in the circumferential direction of the base 82b, and each vibrating body has a circle whose center line about the rotation center axis 55 is a line connecting the two protrusions 82g. Arranged to be tangent. 11 is excited by the protrusion 82g, the driven member 83c is frictionally driven by the protrusion 82g so as to rotate about the rotation center axis 55.

  FIG. 13A is a perspective view illustrating a schematic configuration of the sensor unit 90. FIG. 13B is an enlarged view of a region J in FIG. The configuration and arrangement of the sensor unit 90 will be described mainly with reference to FIGS. 9 (b), 10 (b), 10 (d) and FIG. The sensor unit 90 includes a substrate 90c, a detection unit 60a mounted on the substrate 90c, a third connector 90e mounted on the substrate 90c to perform power supply and signal acquisition to the detection unit 60a and the substrate 90c, And an exterior portion 90d for holding the substrate 60c. The detected part 88 is equivalent to the detected part 58 described in the second embodiment, and is provided on the outer peripheral side of the sliding part of the driven member 83c. The configuration of the detection unit 60a is as described in the second embodiment.

  By attaching the sensor unit 90 to the actuator body 81a, the third connector 90e is inserted into the second connector 91 and electrically connected. A cable 92 is connected to the second connector 91, and the cable 92 is connected to a first connector 93 that is fixed to the casing 84a through the inside of the actuator body 81a. Therefore, the first connector 93 and the third connector 90 e can be electrically connected via the second connector 91. A gap between the wall surface of the hole provided in the casing 84 a for arranging the first connector 93 and the outer peripheral surface of the first connector 93 is sealed by a sealing member 94. By connecting the first connector 93 and an external device (not shown), power supply to the sensor unit 90 and signal acquisition from the sensor unit 90 via the first connector 93 by the external device can be performed.

  On the side surface of the exterior portion 90d of the sensor unit 90, a grip portion 90h and an engagement portion 90b are formed. When the engaging portion 90b engages with the casing 84a, the sensor unit 90 is positioned and fixed with respect to the actuator body 81a. The sensor unit 90 can be easily attached to and detached from the actuator main body 51a by pinching the grip portion 90h with an appropriate force so that the engaging portions 90b come close to each other. As in the second embodiment, while the sensor unit 90 is mounted, it is desirable to have a structure in which these are in close contact so that no gap is generated between the casing 84a and the exterior portion 90d. Therefore, if necessary, a rubber sheet such as silicone rubber may be disposed between the casing 84a and the exterior portion 90d to enhance the adhesion. In addition, since the material used for the component of the actuator unit 81b is based on the material used for the component of the actuator unit 51b demonstrated in 2nd Embodiment, description is abbreviate | omitted. Further, as an example of a workflow when using the actuator unit 81b, the workflow described with reference to FIG. 3 in the first embodiment can be applied as it is, and thus description thereof is omitted.

  In the actuator unit 81b, since the plurality of vibrating bodies are discretely arranged in the circumferential direction, the sensor unit 90 can be arranged between the two vibrating bodies in the circumferential direction. Thereby, in the actuator unit 81b, compared with the actuator unit 51b which concerns on 2nd Embodiment, size reduction by shortening of an outer diameter dimension is attained. At this time, the configuration in which the third connector 90e is inserted toward the inside of the casing 84a makes it possible to reduce the thickness of the exterior portion 90d. Therefore, the actuator unit 81b can be further reduced in size by reducing the outer diameter. Can be realized. Further, since it is not necessary to expose the connector from the exterior portion 90d to the outside, when the cable is connected to the sensor unit 90 from the outside, the sensor unit 90 is dropped or the posture is changed due to an external force acting through the cable. Can be prevented. The cable 92 and the first connector 93 are not limited to the power supply and signal acquisition to the sensor unit 90, but the potential detection (vibration detection) generated in the piezoelectric element 82c in response to the power supply to the piezoelectric element 82c or the vibration of the vibrating body. Can also be used.

  Although the present invention has been described in detail based on preferred embodiments thereof, the present invention is not limited to these specific embodiments, and various forms within the scope of the present invention are also included in the present invention. included. Furthermore, each embodiment mentioned above shows only one embodiment of this invention, and it is also possible to combine each embodiment suitably.

1a, 51a, 81a Actuator body 1b, 51b, 81b Actuator unit 3, 53c, 83c Driven member 3a, 53a Output shaft 4, 54a, 84a Casing 6, 56 Window part 7, 57 Cover member 8, 58, 88 Detected Part 9, 59, 94 sealing member 10, 60, 90 sensor unit 10a, 60a, detection part 10b, 60b, 90b engagement part 52f, 82h elastic body 52g, 82c piezoelectric element 60e connector 60f light emitting part 60g light receiving part 90e first 3 connectors 91 2nd connector 93 1st connector

Claims (16)

An actuator unit having an actuator body and a sensor unit,
The actuator body is
An actuator having a movable part provided with a detected part;
A casing formed with a window and enclosing the actuator;
Covering means for covering the window,
The sensor unit is
An engaging portion capable of engaging with the casing in the window portion;
A detection unit for detecting the movement of the detected unit;
The sensor unit is attached to the casing so that the engagement portion and the casing can be engaged by the covering means not performing the function of covering the window portion. The actuator unit is removed from the casing by releasing the engagement between the engaging portion and the casing.   2. The state in which the covering means does not perform the function of covering the window portion is a state in which the covering means is broken and at least a part of the covering means is peeled off or removed. The actuator unit described. An actuator having a movable part provided with a detected part;
A casing formed with a window and enclosing the actuator;
A sensor unit having a detection unit for detecting the movement of the detected unit;
The sensor unit has an engaging portion that can be engaged with the casing in the window portion, and the sensor unit is attached to the casing when the engaging portion and the casing are engaged with each other. The actuator unit is removed from the casing by releasing the engagement between the portion and the casing.   4. The actuator unit according to claim 1, wherein when the sensor unit is attached to the casing, the detection unit is positioned with respect to the detected unit. 5.   The said sensor unit and the said casing are sealed when the said sensor unit is mounted | worn with the said casing, The inside of the said casing is isolated from the external environment of Claim 1 thru | or 4 characterized by the above-mentioned. An actuator unit given in any 1 paragraph. The movable part has an output part that outputs the driving force of the movable part to the outside of the casing,
The actuator unit according to any one of claims 1 to 5, wherein a gap between the output portion and the casing is sealed by a sealing unit. The sensor unit includes a connector that performs at least one of power supply and signal acquisition to the detection unit,
The actuator unit according to claim 1, wherein an external cable can be inserted into and removed from the connector. A first connector that is provided in the casing so as to enable insertion and removal of a cable from the outside, and that performs at least one of power supply and signal acquisition to the sensor unit;
A second connector provided in the casing and electrically connected to the first connector;
The actuator according to claim 1, wherein the sensor unit includes a third connector that is electrically connected to the second connector in a state where the sensor unit is mounted on the casing. unit.   The actuator unit according to claim 8, wherein the first connector is provided on a surface different from a surface on which the window portion is provided in the casing.   The actuator unit according to claim 8 or 9, wherein power can be supplied to the means for driving the movable portion through the first connector. The actuator is a vibration type actuator having a vibrating body, a driven member that constitutes the movable part, and a pressurizing unit that pressurizes and contacts the vibrating body and the driven member,
The detected portion is provided on the driven member,
The vibrating body includes an elastic body and an electro-mechanical energy conversion element joined to the elastic body, and is excited to the vibrating body by applying a predetermined AC voltage to the electro-mechanical energy conversion element. The actuator unit according to any one of claims 1 to 10, wherein the driven member is frictionally driven by the generated vibration, and the vibrating body and the driven member move relatively. A plurality of the vibrators are arranged at predetermined intervals,
The actuator unit according to claim 11, wherein the casing is provided with the window so that the detection unit is disposed between two vibrating bodies of the plurality of vibrating bodies.   The sensor unit is any one of an optical encoder having a light emitting part and a light receiving part, a magnetic sensor, a capacitance sensor, a speed sensor, a gyro sensor, a force sensor, a CCD sensor, and a CMOS sensor. The actuator unit according to any one of claims 1 to 12. Moving parts;
A detected part provided in the movable part;
A casing containing the movable part,
An actuator that outputs the driving force of the movable part to the outside of the casing;
The casing has a window part to which a sensor unit for detecting the movement of the detected part is mounted,
The actuator is characterized in that the window portion is covered with a covering means.   The actuator according to claim 14, wherein the covering means is one of a film, a sheet, and a cap. Performing a high-pressure steam sterilization process on an actuator body having a sealed structure in which a window provided in a casing containing the actuator is covered with a covering means;
Sterilizing the sensor unit attached to the actuator body at a temperature lower than the processing temperature of the high-pressure steam sterilization;
The covering means is removed from the actuator body after the high-pressure steam sterilization treatment, the window portion is opened, and the sensor unit after the sterilization treatment at the low temperature is attached to the casing at the window portion to the actuator And a step of assembling the unit.

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