JP2017223444A - Hardness tester and hardness test method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hardness tester and a hardness test method capable of avoiding the occurrence of various errors related to image analysis while saving the labor of an operator.SOLUTION: A hardness tester comprises: push-in depth measuring means (CPU101) for measuring the push-in depth of an indenter when forming a hollow; prediction means (CPU101) for predicting the size of the hollow on the basis of the push-in depth measured by the push-in depth measuring means; area setting means (CPU101) for setting an area served as a target of image analysis on the basis of the size of the hollow predicted by the prediction means; image acquiring means (CPU101) for acquiring image data on the surface of a sample imaged by image means (an imaging part 10); and image analysis means (CPU101) for image-analyzing the area set by the area setting means out of the image data on the surface of the sample acquired by the image acquiring means.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a hardness tester and a hardness test method.

  In a conventional hardness test, an automatic reading or autofocusing of a dent formed on a sample (workpiece) is performed by analyzing an image observed by a camera. In order to perform the automatic reading of the dent and autofocus, it is necessary to select an objective lens having an optimum magnification according to the size of the dent. Therefore, the amount of indentation of the indenter into the sample is detected, the distance between the predetermined feature points of the depression is calculated based on the detected amount of penetration, and a plurality of distances are calculated based on the calculated distance between the predetermined feature points of the depression. A technique for selecting a predetermined objective lens from among objective lenses is disclosed (for example, see Patent Document 1).

  By the way, the observation image of the sample may include information that hinders image analysis such as a polishing mark and a hole, and automatic reading and autofocus may not be performed by such information. Therefore, in order to avoid the above problems, the operator can pre-specify the area to analyze the image from the entire acquired image, so that more efficient image analysis is possible by eliminating information that hinders image analysis. This technology is known.

JP 2005-114608 A

However, in the conventional technique for designating the image analysis area in advance, it is necessary to set the designation of the area before the hardness test, and the number of areas that can be designated is one pattern at present. When the hardness test is performed, it is necessary to designate an area in accordance with the largest indentation so that all hardness tests can be handled. For example, as shown in FIGS. 8A and 8B, it is necessary to set an area E10 corresponding to the large depression K2 for both the small depression K11 and the large depression K12. Originally, analysis with a narrowed area is particularly effective for small indentations, but when an area is designated in accordance with the largest indentation, it is not possible to designate an area suitable for the small indentation. In this case, since it is difficult to eliminate information that hinders image analysis, there is a problem that errors related to automatic reading and autofocus cannot be avoided.
On the other hand, there is a technique for designating an area by observing the depression after forming the depression, but it is necessary for the area to be designated every time the depression is formed, which is troublesome for the operator and increases the work time. There is a problem.

  An object of the present invention is to provide a hardness tester and a hardness test method capable of avoiding various errors related to image analysis while saving labor of an operator.

The invention described in claim 1 has been made to achieve the above object,
In a hardness tester that measures the hardness of a sample by applying a predetermined test force to the surface of the sample with an indenter to form a recess and measuring the size of the recess,
An indentation depth measuring means for measuring an indentation depth of the indenter at the time of forming the depression;
Predicting means for predicting the size of the indentation based on the indentation depth measured by the indentation depth measuring means;
Area setting means for setting an area to be subjected to image analysis based on the size of the indent predicted by the prediction means;
Image acquisition means for acquiring image data of the surface of the sample imaged by the imaging means;
Of the image data of the surface of the sample acquired by the image acquisition means, image analysis means for image analysis of the area set by the area setting means,
It is characterized by providing.

The invention according to claim 2 is the hardness tester according to claim 1,
The area setting means sets an area for measuring the size of the depression as an area to be subjected to the image analysis,
The image analysis means performs image analysis on an area for measuring the size of the recess and measures the size of the recess.

The invention according to claim 3 is the hardness tester according to claim 1 or 2,
The area setting means sets an area for performing autofocus on an image based on image data of the surface of the sample acquired by the image acquisition means as the area to be subjected to the image analysis,
The image analysis means analyzes the area for performing the autofocus and performs the autofocus.

The invention according to claim 4 is the hardness tester according to any one of claims 1 to 3,
Storage means for storing image data reflecting the area set by the area setting means in the image data of the surface of the sample acquired by the image acquisition means.

The invention according to claim 5 is the hardness tester according to any one of claims 1 to 4,
The area setting means, when a plurality of depressions are formed on the surface of the sample, based on the size of each depression predicted by the prediction means, an area to be subjected to the image analysis for each depression. It is characterized by setting each.

The invention according to claim 6 is the hardness tester according to any one of claims 1 to 5,
The area setting means sets the area according to the size of the dent predicted by the prediction means and the shape of the dent as the area to be subjected to the image analysis.

The invention described in claim 7
In the hardness test method of a hardness tester that measures the hardness of a sample by applying a predetermined test force to the surface of the sample with an indenter to form a dent and measuring the size of the dent.
An indentation depth measuring step for measuring the indentation depth of the indenter at the time of forming the depression;
Based on the indentation depth measured in the indentation depth measurement step, a prediction step for predicting the size of the indentation,
An area setting step for setting an area to be subjected to image analysis based on the size of the indent predicted in the prediction step;
An image acquisition step of acquiring image data of the surface of the sample imaged by the imaging means;
Of the image data of the surface of the sample acquired in the image acquisition step, an image analysis step of performing image analysis on the area set in the area setting step,
Is a hardness test method.

  According to the present invention, it is possible to avoid the occurrence of various errors related to image analysis while saving the labor of an operator.

It is a side view which shows the whole structure of the hardness tester based on this invention. It is a side view which shows the whole structure of the hardness tester based on this invention. It is a block diagram which shows the control structure of the hardness tester which concerns on this invention. It is a flowchart which shows operation | movement of the hardness tester based on this embodiment. It is a figure which shows an example of a mode that the area used as the object of an image analysis is set based on the magnitude | size of the predicted hollow. It is a figure which shows an example of a mode that each area made into the object of image analysis is set with respect to the several hollow formed in the sample. It is a figure which shows an example of a mode that the area according to the magnitude | size and shape of a hollow is set. It is a figure which shows an example of a mode that the area used as the object of the image analysis in the past is set.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[1. Description of configuration]
As shown in FIGS. 1 to 3, the hardness testing machine 1 according to the present embodiment includes a testing machine main body 2 in which each component is disposed, and a load arm that is rotatably supported by the testing machine main body 2. 3, an arm actuating section 4 that applies an acting force (test force) to the load arm 3 to actuate the load arm, a turret 8 that is rotatably provided in the test machine main body 2 below the load arm 3, and the turret 8 An indenter shaft 6 provided with an indenter 5 at the tip, an objective lens 7 attached to the turret 8, a sample table 9 placed opposite to the turret 8 on which the sample S is placed, and the sample table 9 The imaging unit 10 for imaging the depression formed in the sample S, a control unit 100, an operation unit 110, a display unit 120, and the like are configured. In the hardness tester 1, operation control of each unit is performed by the control unit 100 shown in FIG.

The load arm 3 includes an arm main body 31 and a rotation shaft 32 that pivotally supports one end 31 a of the arm main body 31 on the tester main body 2.
The other end side of the arm main body 31 is bifurcated into a first other end 31b and a second other end 31c. The first other end portion 31b is formed in a flexible leaf spring shape.
On the lower surface side of the arm main body 31, a load shaft 33 is provided between the lower surface of the arm main body 31 and the tester main body 2 and is elastically supported by a coil spring 33a.
The arm body 31 has an arm displacement detector 34 that detects an opening amount between the first other end 31b and the second other end 31c when the load arm 3 (arm body 31) is operated. Is provided.

  The arm main body 31 is pivotally supported on the testing machine main body 2 at one end 31a by a rotation shaft 32, and has an acting force as a test force for operating the load arm 3 on the first other end 31b. The arm actuating part 4 to be generated is connected. The arm main body 31 rotates about the rotation shaft 32 in accordance with the operation of the arm actuating unit 4. As the arm body 31 rotates downward, the arm body 31 presses and moves the load shaft 33 downward. The load shaft 33 transmits the driving and operation of the arm body 31 (load arm 3) to the indenter shaft 6 (see FIG. 1).

  The arm displacement detection unit 34 includes, for example, a scale in which a scale having a predetermined interval is engraved and a linear encoder that optically reads the scale scale. The arm displacement detection unit 34 detects the opening amount (spring displacement amount) between the first other end 31b and the second other end 31c when the indenter 5 is pushed into the sample S via the indenter shaft 6 or the like. Then, an arm displacement signal based on the detected opening amount is output to the control unit 100. The opening amount corresponds to the pressing force (test force) by which the indenter 5 pushes the sample S or the load applied to the sample S.

  The arm operating unit 4 includes a servo motor 41, a ball screw 43, a timing belt 42 spanned between the motor shaft 41 a of the servo motor 41 and the screw shaft 43 a of the ball screw 43, and a fixing jig 44 held by the ball screw 43. , Etc. are provided. The arm operating unit 4 is connected to the load arm 3 by fixing the plate spring 44 a of the fixing jig 44 to the first other end 31 b of the arm body 31.

The servo motor 41 is driven based on the drive control signal input from the control unit 100. The motor shaft 41 a of the servo motor 41 is rotated by driving the servo motor 41. The driving force of the motor shaft 41 a is transmitted to the screw shaft 43 a of the ball screw 43 through the timing belt 42 and rotates the ball screw 43. The fixing jig 44 moves up and down by the rotational drive of the ball screw 43.
As described above, the arm operating unit 4 moves the fixing jig 44 up and down based on the drive of the servo motor 41, and drives the first other end 31 b of the arm main body 31 connected to the fixing jig 44. By transmitting (driving force), the arm body 31 (load arm 3) is rotated. The leaf spring 44a is bent when the arm operating unit 4 operates the load arm 3.

The sample stage 9 includes a sample stage 91 on which the sample S is placed, a stage elevating unit 92 provided on the lower surface of the sample stage 91, and the like.
The stage elevating part 92 includes a screw part 92a, and the sample stage 91 can be moved up and down with respect to the tester main body 2 by rotating the screw part 92a.

The turret 8 includes a turret main body 81, a rotation shaft 82 that rotatably supports the turret main body 81 on the tester main body 2, and the like.
The turret body 81 includes an indenter shaft 6, an objective lens 7, and an indenter shaft displacement detection unit 20 that detects a displacement amount of the indenter shaft 6. The indenter shaft 6 is provided in the turret body 81 via an indenter shaft holding portion 61.
The turret body 81 can switch the arrangement of the indenter shaft 6 and the objective lens 7 by rotating around the rotation shaft 82.

The indenter shaft holding portion 61 includes a vertical holding member 61a and leaf springs 61b and 61b extending in the horizontal direction from the vertical holding member 61a. The indenter shaft 6 is elastically supported by the plate springs 61 b and 61 b of the indenter shaft holding portion 61, and with respect to the mounting surface of the sample S of the sample stage 91, particularly the surface (upper surface) of the sample mounted on the sample stage 91. Are provided vertically.
An indenter 5 is replaceably provided at the lower end of the indenter shaft 6. For example, when the Vickers hardness test is performed, a Vickers quadrangular pyramid indenter (a facing angle is 136 ± 0.5 °) is used as the indenter 5. In the present embodiment, a Vickers quadrangular pyramid indenter is used as the indenter 5.
As shown in FIG. 1, the hardness tester 1 rotates the turret 8 (the turret body 81) and switches the indenter shaft 6 to an arrangement corresponding to the load shaft 33, thereby loading the load arm 3 with the rotation. The acting force of the operation of moving the shaft 33 downward can be transmitted to the indenter shaft 6. Thereby, the hardness tester 1 can press the indenter 5 against the sample S and push it in.

  The objective lens 7 is a lens unit attached to the microscope unit 11 of the imaging unit 10. As shown in FIG. 2, the hardness tester 1 rotates the turret 8 (turret body 81) and switches the objective lens 7 to an arrangement corresponding to the imaging unit 10, so that the imaging of the sample S can be performed by the imaging unit 10. It becomes possible.

  The indenter shaft displacement detection unit 20 includes, for example, a scale in which a graduation with a predetermined interval is engraved and a linear encoder that optically reads the scale graduation. The indenter shaft displacement detector 20 detects and detects the amount of displacement that the indenter shaft 6 has moved when the indentation is formed in the sample S (that is, the amount of penetration of the indenter 5 into the sample S and the depth of the indentation). An indenter shaft displacement signal based on the displacement amount is output to the control unit 100.

  The imaging unit (imaging means) 10 includes a microscope unit 11, a CCD camera 10a attached to the microscope unit 11, an illumination device (not shown) that illuminates the observation position of the sample S, and the like. An image of the depression formed on the surface of the film is taken. Then, the imaging unit 10 (CCD camera 10a) outputs the captured image data of the depression to the control unit 100.

  As shown in FIG. 3, the control unit 100 includes a CPU 101, a RAM 102, and a storage unit 103. The control unit 100 has a predetermined hardness by executing a predetermined program stored in the storage unit 103. It has a function of performing operation control and the like for performing tests.

The CPU 101 reads the processing program stored in the storage unit 103, develops it in the RAM 102, and executes it to control the entire hardness tester 1.
The RAM 102 develops a processing program executed by the CPU 101 in a program storage area in the RAM 102, and stores input data and a processing result generated when the processing program is executed in the data storage area.
The storage unit (storage means) 103 has, for example, a recording medium (not shown) that stores programs, data, and the like, and this recording medium is configured by a semiconductor memory or the like. In addition, the storage unit 103 stores various data, various processing programs, data processed by the execution of these programs, and the like for realizing a function for the CPU 101 to control the entire hardness tester 1.

  For example, the CPU 101 compares the arm displacement signal input from the arm displacement detector 34 with preset arm displacement data. Then, since the CPU 101 rotates the load arm 3 so that the indenter 5 acts on the sample S with a predetermined test force (load), a drive control signal for controlling the driving of the arm operating unit 4 (servo motor 41) is provided. Output to the servo motor 41.

  In addition, the CPU 101 controls the stage elevating unit 92 to move the sample stage 9 (sample stage 91) in the vertical direction and change the relative distance between the sample stage 91 and the objective lens 7 to thereby change the sample stage 91. An autofocus function for focusing on the surface of the sample S placed on the surface is realized.

Further, the CPU 101 analyzes the image data of the depression input from the imaging unit 10 by performing predetermined image processing or the like, automatically measures the size (dimension) of the depression, and detects the distance between the predetermined feature points. I do.
Further, the CPU 101 calculates the hardness of the sample S based on the distance between the predetermined feature points of the detected indentation. That is, the CPU 101 measures the hardness of the sample S from the size of the indent formed by the indenter 5 being pushed into the sample S (distance between predetermined feature points), for example, based on the Vickers hardness test. The hardness of the sample S is calculated.

  The operation unit 110 includes a pointing device such as a keyboard and a mouse, and accepts an input operation by an operator (operator) when performing a hardness test. When the operation unit 110 receives a predetermined input operation by the worker, the operation unit 110 generates a predetermined operation signal corresponding to the input operation and outputs the operation signal to the control unit 100.

  The display unit 120 is configured by a display device such as an LCD, for example. The display unit 120 displays the setting condition of the hardness test input in the operation unit 110, the result of the hardness test, the surface of the sample S imaged by the CCD camera 10a, the image of the depression formed on the surface of the sample S, and the like. To do.

[2. Explanation of operation]
Next, operation | movement of the hardness tester 1 which concerns on this embodiment is demonstrated with reference to the flowchart of FIG.
First, the CPU 101 of the control unit 100 causes the indenter 5 to form a recess on the surface of the sample S (step S101).
Specifically, first, the CPU 101 rotates the turret 8 to switch the arrangement of the indenter shaft 6 to an arrangement for forming a depression in the hardness test, that is, an arrangement corresponding to the load shaft 33 (see FIG. 1). . Next, the CPU 101 adjusts the sample stage 91 of the sample stage 9 on which the sample S is placed to a predetermined height and position. Next, the CPU 101 drives the arm operation unit 4 to rotate the load arm 3 downward. The load shaft 33 is pressed by the arm body 31 and moves downward as the load arm 3 rotates downward, and moves the indenter shaft 6 that contacts the load shaft 33 downward. Then, the indenter shaft 6 pushes the indenter 5 attached to the tip into the sample S to form a recess.

  Next, the CPU 101 pushes the indenter 5 into the sample S based on the displacement amount of the indenter shaft 6 detected by the indenter shaft displacement detector 20 when the indenter 5 is pressed against the sample S in step S101. The depth (pushing depth) is measured (step S102). That is, the CPU 101 functions as an indentation depth measuring unit of the present invention.

  Next, the CPU 101 predicts the size of the depression formed on the surface of the sample S based on the indentation depth measured in step S102 (step S103). That is, the CPU 101 functions as a prediction unit of the present invention. As a method for predicting the size of the indentation from the indentation depth of the indenter 5, a conventionally known technique can be used as appropriate.

Next, the CPU 101 sets an area to be subjected to image analysis based on the size of the indent predicted in step S103 (step S104). That is, the CPU 101 functions as an area setting unit of the present invention. For example, as shown in FIGS. 5A and 5B, a small area E1 is set for the small recess K1, and a large area E2 is set for the large recess K2.
In the present embodiment, as an area to be subjected to image analysis, an autofocus area for the image of the surface of the sample S on which the depression is formed, and an area for automatically reading the depression formed on the sample S (the size of the depression). Are set). When autofocus is performed based on the recess formed in the sample S, the autofocus area may be the same area as the automatic reading area. The processing in step S104 makes it possible to set the analysis area before measuring the actual size of the indentation.

Next, the CPU 101 acquires image data of the surface of the sample S imaged by the imaging unit 10 (step S105). That is, the CPU 101 functions as an image acquisition unit of the present invention.
Specifically, first, the CPU 101 rotates the turret 8 and switches the arrangement of the objective lens 7 to an arrangement for dent observation in the hardness test, that is, an arrangement corresponding to the imaging unit 10 (see FIG. 2). . Next, the CPU 101 causes the imaging unit 10 to image the indent formed in the sample S. Next, the CPU 101 acquires the image data of the surface of the sample S output from the imaging unit 10.

  Next, the CPU 101 performs autofocus based on the image data acquired in step S105 (step S106). Specifically, the CPU 101 analyzes the image of the autofocus area set in step S104 out of the image data acquired in step S105, and moves the stage lifting unit 92 up and down based on the analysis result. Perform autofocus. That is, the CPU 101 functions as an image analysis unit of the present invention. By the processing in step S105, information that hinders image analysis such as dust on the surface of the sample S can be excluded and autofocusing can be performed, so that the occurrence of errors can be avoided.

  Next, the CPU 101 measures the size of the indent formed on the surface of the sample S based on the image data that has been subjected to autofocus in step S106 (step S107). Specifically, the CPU 101 analyzes the area for automatic reading of the dent set in step S104 out of the image data that has been subjected to autofocus in step S106, and forms a substantially rectangular dent formed by the indenter 5. Measure the diagonal length of.

  Next, the CPU 101 calculates the hardness of the sample S based on the size of the indent measured in step S107 (step S108). Specifically, the CPU 101 calculates the hardness of the sample S based on the length of the diagonal line of the indent measured in step S107. Then, the CPU 101 displays the calculated result (measured value) on the display unit 120.

[3. effect]
As described above, the hardness tester 1 according to the present embodiment includes the indentation depth measuring unit (CPU 101) that measures the indentation depth of the indenter 5 during the formation of the depression and the indentation measured by the indentation depth measurement unit. Prediction means (CPU 101) for predicting the size of the depression based on the depth, and area setting means (CPU 101) for setting the area to be subjected to image analysis based on the size of the depression predicted by the prediction means. Among the image acquisition means (CPU 101) for acquiring the image data of the surface of the sample S imaged by the imaging means (imaging unit 10), and the area setting among the image data of the surface of the sample S acquired by the image acquisition means Image analysis means (CPU 101) for image analysis of the area set by the means.
Therefore, according to the hardness tester 1 according to the present embodiment, it is possible to automatically set an appropriate area according to the size of the dent after predicting the size of the dent. The generation of various errors related to image analysis can be avoided while omitting the above.

Further, according to the hardness tester 1 according to the present embodiment, the area setting unit sets an area for measuring the size of the indentation as an area to be subjected to image analysis. Further, the image analysis means performs image analysis on an area for measuring the size of the dent, and measures the size of the dent.
Therefore, according to the hardness tester 1 according to the present embodiment, it is possible to set an optimum area for measuring the size of the dent, so that the reading accuracy of the dent can be improved, and the hardness of the sample S is related. Good measurements can be obtained.

Further, according to the hardness tester 1 according to the present embodiment, the area setting unit performs autofocus on an image based on the image data of the surface of the sample S acquired by the image acquisition unit as an area to be subjected to image analysis. Set the area to perform. In addition, the image analysis means performs image analysis by performing image analysis on an area for performing autofocus.
Therefore, according to the hardness tester 1 according to the present embodiment, it is possible to set an optimum area for execution of autofocus, so that the reading accuracy of the dent can be improved, and the hardness of the sample S is good. Measured values can be obtained.

  As mentioned above, although concretely demonstrated based on embodiment which concerns on this invention, this invention is not limited to the said embodiment, It can change in the range which does not deviate from the summary.

For example, in addition to the operations performed in the embodiment, the storage unit 103 stores image data that reflects the area set in step S104 in the image data of the surface of the sample S acquired in step S105 of FIG. May be performed.
As a result, among the image data of the surface of the sample S acquired in step S105, the operator can visually determine the area where the image analysis was actually performed, so that an error related to measurement occurred. The error content can be analyzed.

Moreover, although the said embodiment illustrated and demonstrated the case where one hollow was formed in the sample S, it is not limited to this. That is, even when a plurality of indentations are formed in the sample S, the present invention can be applied.
For example, the operation of the embodiment (see FIG. 4) may be performed for each recess formed in the sample S. For the plurality of depressions formed in the sample S, only the depression formation process in step S101 is performed collectively, and the processes from the indentation depth measurement (step S102) to the hardness calculation (step S108) are described. You may make it carry out for every hollow.

Further, for a plurality of indentations formed in the sample S, first, the processes from the indentation formation (step S101) to the indentation size prediction (step S103) are performed together, and further predicted in step S103. Based on the size of each indentation, an area for image analysis may be set for each indentation. For example, in the example shown in FIG. 6, areas E31 to E33 are set for the recesses K31 to K33, respectively.
Thereby, it is possible to collectively perform subsequent processing from acquisition of image data on the surface of the sample S (step S105) to calculation of hardness (step S108). Therefore, the test time can be greatly shortened.

In the above-described embodiment, a substantially square area is set as an area to be subjected to image analysis for the depression formed in a rhombus shape in plan view. However, the present invention is not limited to this. . For example, as the area to be subjected to image analysis, an area may be set in accordance with the size of the indent predicted in step S103 and the shape of the indent that cannot be estimated from the shape of the indenter 5 in advance. For example, as shown in FIG. 7, an area E4 having a rhombus shape in plan view may be set for a depression K4 formed in a rhombus shape in plan view.
As a result, information that hinders image analysis can be more reliably eliminated, and the occurrence of errors can be avoided more reliably.

  Moreover, in the said embodiment, although the Vickers hardness tester in which the planar shape of the indenter 5 was formed in the rectangular shape was illustrated and demonstrated as the hardness tester 1, it is not limited to this. That is, any hardness testing machine can be used as long as the indenter 5 applies a predetermined test force to the surface of the sample S to form a dent and measures the hardness of the sample S by measuring the size of the dent. It may be. For example, it may be a Knoop hardness tester having an indenter made of a diamond long pyramid and having a planar shape of the indenter formed in a rectangular shape like the Vickers hardness tester, and the shape of the indenter is formed in a spherical shape. Brinell hardness tester may be used.

  In addition, the detailed configuration of each device constituting the hardness tester and the detailed operation of each device can be changed as appropriate without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 Hardness tester 2 Test machine main body 3 Load arm 4 Arm operation part 5 Indenter 6 Indenter shaft 7 Objective lens 8 Turret 9 Sample stand 10 Imaging part (imaging means)
20 Indenter shaft displacement detection unit 100 Control unit 101 CPU (pushing depth measurement means, prediction means, area setting means, image acquisition means, image analysis means)
102 RAM
103 memory | storage part (memory | storage means)
110 Operation unit 120 Display unit S Sample

Claims (7)

In a hardness tester that measures the hardness of a sample by applying a predetermined test force to the surface of the sample with an indenter to form a recess and measuring the size of the recess,
An indentation depth measuring means for measuring an indentation depth of the indenter at the time of forming the depression;
Predicting means for predicting the size of the indentation based on the indentation depth measured by the indentation depth measuring means;
Area setting means for setting an area to be subjected to image analysis based on the size of the indent predicted by the prediction means;
Image acquisition means for acquiring image data of the surface of the sample imaged by the imaging means;
Of the image data of the surface of the sample acquired by the image acquisition means, image analysis means for image analysis of the area set by the area setting means,
A hardness tester comprising: The area setting means sets an area for measuring the size of the depression as an area to be subjected to the image analysis,
The hardness tester according to claim 1, wherein the image analysis unit performs image analysis on an area for measuring the size of the indentation and measures the size of the indentation. The area setting means sets an area for performing autofocus on an image based on image data of the surface of the sample acquired by the image acquisition means as the area to be subjected to the image analysis,
The hardness tester according to claim 1, wherein the image analysis unit performs image analysis by performing image analysis on an area for performing the autofocus.   The storage means which memorize | stores the image data which reflected the area set by the said area setting means in the image data of the surface of the sample acquired by the said image acquisition means is provided. The hardness tester according to one item.   The area setting means, when a plurality of depressions are formed on the surface of the sample, based on the size of each depression predicted by the prediction means, an area to be subjected to the image analysis for each depression. Each is set, The hardness tester as described in any one of Claims 1-4 characterized by the above-mentioned.   The area setting means sets the area according to the size of the dent predicted by the prediction means and the shape of the dent as the area to be subjected to the image analysis. The hardness tester as described in any one of Claims. In the hardness test method of a hardness tester that measures the hardness of a sample by applying a predetermined test force to the surface of the sample with an indenter to form a dent and measuring the size of the dent.
An indentation depth measuring step for measuring the indentation depth of the indenter at the time of forming the depression;
Based on the indentation depth measured in the indentation depth measurement step, a prediction step for predicting the size of the indentation,
An area setting step for setting an area to be subjected to image analysis based on the size of the indent predicted in the prediction step;
An image acquisition step of acquiring image data of the surface of the sample imaged by the imaging means;
Of the image data of the surface of the sample acquired in the image acquisition step, an image analysis step of performing image analysis on the area set in the area setting step,
Hardness test method including

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