JP2017208213A - Light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device having several light source members each of which is intermittently lit and driven and capable of increasing estimation illuminance intensity without sacrificing brightness of each of the light source members.SOLUTION: A light source device comprises several light source members including flash lamps lit under a condition in which a light-emitting time of each one light-emitting time is 1 ms or less; and a reflection member for reflecting light got from each of the several light source members and emits the reflected light from the reflection member. The light source device comprises a lighting drive device for lighting and driving each of the several light source members in such a way that at least one light source member is operated and a driving mechanism for driving the reflection member to cause its reflection surface to face to an optical axis direction of light radiated from the light source member during its operating period, and the light incident from each of the several light source members to the reflection member is emitted along the same optical axis.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a light source device, and more particularly, to a multi-lamp type light source device having a plurality of light source bodies each provided with a flash lamp that is turned on under the condition that each emission time is 1 ms or less.

At present, discharge lamps that perform flash lighting are used in various industrial applications such as flash annealing in semiconductor manufacturing processes.
For example, a short arc flash lamp can be handled as a light source close to a point light source, and can easily obtain light with relatively little unevenness in the directionality and distribution of light. Can be irradiated in time. In addition, since the arc formation time between the main electrodes is extremely short, the opportunity for the light output by the discharge to be blocked or absorbed by the arc is reduced, which is excellent in terms of light utilization efficiency. Yes. Such a short arc type flash lamp is described in Patent Document 1, for example.

  However, the flash lamp has a problem that it is difficult to increase the integrated light quantity because the light emission time is extremely short. Therefore, it is difficult to secure a necessary light amount depending on the intended use. For example, Patent Document 2 describes a light source device for exposure using vacuum ultraviolet light radiated from a flash lamp. However, in the current flash lamp, the amount of radiated vacuum ultraviolet light is small. Therefore, the actual situation is that the exposure cannot be completed with one light emission and a long processing time is required.

On the other hand, a light source device equipped with a plurality of discharge lamps is known. For example, Patent Document 3 includes, for example, a configuration including a plurality of light source units each including a high-pressure mercury lamp that emits light including ultraviolet light and a reflecting mirror. The light source device is described.
However, in such a multi-lamp type light source device, the light from each light source unit cannot be collected within the same viewing angle. For this reason, the luminance of the light source unit located at the end is sacrificed, and it is difficult to design a high-luminance light source device.

JP 2015-162404 A JP 2014-235965 A Japanese Patent No. 5212629

  The present invention has been made based on the circumstances as described above, and includes a plurality of light source bodies that are driven to be intermittently driven and integrated without sacrificing the luminance of each light source body. It aims at providing the light source device which can make illumination intensity high.

The light source device of the present invention includes a plurality of light source bodies each provided with a flash lamp that is turned on under the condition that each light emission time is 1 ms or less, and a reflecting member that reflects light from each of the plurality of light source bodies. In the light source device that emits the reflected light from the reflective member,
A lighting driving device that lights and drives each of the plurality of light source bodies so that at least one light source body is in an operating state;
A driving mechanism for driving the reflecting member so that the reflecting surface thereof faces the optical axis direction of the light emitted from the light source body during the operation period;
The light incident on the reflecting member from each of the plurality of light source bodies is emitted along the same optical axis.

In the light source device of the present invention, each of the plurality of light source bodies preferably includes a reflector that reflects light emitted from the flash lamp toward the reflecting member.
In the thing of such a structure, it is preferable that the said reflector has a condensing property.

In the light source device of the present invention, the drive mechanism rotates the reflecting member around an axis passing through the reflecting surface.
The plurality of light source bodies are preferably arranged along the circumference of a circle centered on the rotation center axis of the reflecting member.
Moreover, in the thing of such a structure, it is preferable that each of these light source bodies is arrange | positioned in the state which the optical axis inclined with respect to the plane perpendicular | vertical to the rotation center axis | shaft of the said reflection member.

Furthermore, in the light source device of the present invention, the plurality of light source bodies are arranged in one direction,
The drive mechanism may be configured to move the reflecting member along the one direction.

  Furthermore, in the light source device of the present invention, when the reflecting surface of the reflecting member is in a state facing any one light source body, the projection of the reflecting member onto the surface perpendicular to the optical axis of the light source body is performed. It is preferable that the size of the reflector is not larger than the opening diameter of the reflector.

  According to the light source device of the present invention, the reflecting member is driven so that the reflecting surface thereof faces the optical axis direction of the light irradiated from the light source body during the operation period, and thereby the reflecting member is irradiated from each light source body. Light can be collected within the same viewing angle. Therefore, the integrated illuminance can be increased without sacrificing the luminance of each light source body.

It is a perspective view which shows the structure in an example of the light source device which concerns on 1st embodiment of this invention. It is the top view which looked at the light source device shown in FIG. 1 from the light emission direction. It is the schematic which shows the relationship between the magnitude | size of the opening diameter of the reflector in a light source body, and the magnitude | size of a reflection member. It is a figure which shows the relationship between the angle variation | change_quantity of the reflection member in the light emission period of a flash lamp, and the captured light quantity in an exposure surface. It is a figure which shows the structure in the other example of the light source device which concerns on 1st embodiment of this invention. It is a perspective view which shows the structure in an example of the light source device which concerns on 2nd embodiment of this invention. It is a figure which shows schematically the structure in the further another example of the light source device which concerns on 1st embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail.

[First embodiment]
FIG. 1 is a perspective view showing a configuration of an example of a light source device according to the first embodiment of the present invention. FIG. 2 is a plan view of the light source device shown in FIG. 1 viewed from the light emitting direction.
The light source device includes a plurality of light source bodies 10, a common reflecting member 20 that reflects light from each light source body 10, and each of the plurality of light source bodies 10 so that at least one light source body is in an operating state. A lighting drive device (not shown) that drives and drives, and a driving mechanism 30 that drives the reflecting member 20 continuously, for example, so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. And.

  Each light source body 10 includes a point light source type, that is, a short arc type flash lamp 11 and a reflector 15 that reflects light emitted from the flash lamp 11 toward the reflecting member 20. The reflector 15 is provided in a state where the optical axis thereof coincides with the central axis of the flash lamp 11 and the focal point thereof coincides with the bright spot S of the flash lamp 11.

The flash lamp 11 has, for example, a distance between a pair of main electrodes opposed to each other in an arc tube made of a vacuum ultraviolet light transmissive material, for example, 12.5 mm or less, and a gas containing xenon gas is predetermined in the arc tube. (VUV-SFL) is used which is sealed at a sealing pressure of 5%. The flash lamp 11 is provided with a pair of start-up auxiliary electrodes so that the tips thereof are positioned between the pair of main electrodes.
The flash lamp 11 may be either one-end sealed type, both-end sealed type, or any type.

  It is preferable that the reflector 15 has a light collecting property. By using the reflector 15 having a light collecting property, the light receiving surface (reflective surface 21) of the reflective member 20 can be designed to be small. That is, as shown in FIG. 3, when the case where the reflecting surface 21 of the reflecting member 20 is in a state of facing any one of the light source bodies 10a, the reflecting member 20 is perpendicular to the optical axis La of the light source body 10a. A size having a dimension Dp of the projection P onto a flat surface (the thickness of the reflecting member 20 can be ignored) is not more than the size Dr of the opening diameter of the reflector 15 can be used. The same applies to the dimension in the direction perpendicular to the paper surface in the projection of the reflecting member 20. As described above, by using the reflector 15 having a light collecting property, the light receiving surface (reflective surface 21) of the reflecting member 20 can be designed to be small, and as a result, drive control of the reflecting member 20 can be easily performed. It can be carried out.

Specifically, the reflector 15 is configured by an elliptical reflecting mirror that collects and irradiates light emitted from the flash lamp 11, or a parabolic reflector that irradiates the light emitted from the flash lamp 11 in parallel light. It is preferable that
In the case of using an elliptical reflecting mirror, light can be condensed, so that the light receiving surface (reflecting surface 21) of the reflecting member 20 can be designed to be extremely small. However, in order to project parallel light onto the exposure surface, an integrator optical system (rod integrator, fly-eye integrator, light tunnel, or other optical system used to increase the illuminance uniformity on the irradiated surface is indicated separately. It is necessary to use an optical member such as On the other hand, when a parabolic reflector is used, since parallel light is obtained, the optical member can be reduced, but it is necessary to ensure a large area of the light receiving surface (reflective surface 21) of the reflective member 20. There is a demerit that drive control of the reflecting member 20 becomes more difficult than when an elliptical reflecting mirror is used. From the above points, it is necessary to select an optimal reflecting mirror according to the application.

The plurality of light source bodies 10 have a predetermined size set on the light source body arrangement surface in a state where the bright spot S of the flash lamp 11 is located on the same horizontal plane (hereinafter referred to as “light source body arrangement surface”). Are arranged at equal intervals in the circumferential direction along the circumference of the virtual circle V having a radius of. In the light source device of this example, the optical axis La of each light source body 10 is positioned on the light source body arrangement surface.
Here, the size of the radius of the virtual circle V (the distance from the center of the virtual circle V to the bright spot S of each flash lamp 11) is, for example, 150 mm to 350 mm. Moreover, although the number of the light source bodies 10 can be set according to the objective, it is 4-16 pieces, for example.

  In this example, the flash lamp 11 in each of the plurality of light source bodies 10 is intermittently driven by a lighting driving device, and for example, another light source body during the light emission period of the flash lamp 11 in one light source body. The flash lamps 11 are sequentially turned on and driven so that the flash lamp 11 is kept off.

  It is preferable that the lighting frequency of the flash lamp 11 in each light source body 10 is set to such a magnitude that the lighting cycle (operation interval) is 1/300 [sec] or more, for example. When the lighting cycle (operation interval) is smaller than 1/300 [sec], the discharge becomes unstable and the risk of non-lighting increases. Actually, the lighting frequency is preferably set to 100 Hz or less so that the lighting cycle is 1/100 [sec] or more.

  Further, the light emission time (lighting time) of the flash lamp 11 in each light source body 10 is, for example, 1 msec or less, and more preferably 500 μsec or less. If the flash lamp 11 emits light longer than 1 msec, an arc is likely to remain even after the power supply to the flash lamp 11 is stopped, and recharging between the main electrodes cannot be performed during that time. The luminous efficiency of vacuum ultraviolet light (VUV) is greatly related to the light emission time of the flash lamp 11, and the shorter the light emission time, the higher the light emission efficiency of vacuum ultraviolet light. Therefore, in consideration of the output of vacuum ultraviolet light, the light emission time is more preferably set to 50 μsec or less.

  The reflecting member 20 is constituted by a flat mirror, for example. The reflection member 20 is arranged in a state where the reflection surface 21 is inclined with respect to the light source body arrangement surface and the intersections of the optical axes of the plurality of light source bodies 10 are positioned on the reflection surface 21. That is, the reflecting surface 21 of the reflecting member 20 constitutes a secondary light source, and the intersection of the optical axes of the plurality of light source bodies 10 on the reflecting surface 21 forms the light emitting point X. In this example, the inclination angle of the reflection surface 21 of the reflection member 20 with respect to the light source body arrangement surface is, for example, 45 °.

The reflection member 20 is rotationally driven by the drive mechanism with the axis extending in the vertical direction passing through the intersection (light emission point X) of each of the light sources 10 on the reflection surface 21 as the rotation center axis C.
The drive mechanism 30 includes, for example, a drive source 31 formed of a drive motor disposed in a posture in which the rotation shaft extends in the vertical direction, and the reflecting member 20 is fixed to the upper end of the rotation shaft.

  The rotation period of the reflecting member 20 can be appropriately set according to the lighting period of the flash lamp 11, and is preferably set to 1/300 [sec] or less (a rotation frequency of 300 Hz or less), for example. Thereby, the angle change amount of the reflecting member 20 in the light emission period (the period from the light emission start to the light emission end) of the flash lamp 11 can be appropriately controlled, and the light use efficiency can be increased.

That is, as the rotation period of the reflecting member 20 becomes smaller (the number of revolutions becomes larger), the amount of change in the angle of the reflecting member 20 during the light emission period of the flash lamp 11 becomes larger. As the angle change amount increases, the reflection efficiency from the reflection member 20 is significantly deteriorated. For this reason, the amount of change in the angle of the reflecting member 20 during the light emission period of the flash lamp 11 needs to be suppressed to at least 18 ° or less. This angle change amount is uniquely determined by the length of the light emission period and the number of rotations of the reflection member 20, and if the angle change amount is 18 ° or more, the irradiation area of the reflected light greatly deviates. Efficiency is greatly degraded and is not practical. Further, in order to make it more efficient (to obtain utilization efficiency of about 80% or more), it is necessary to suppress the angle change amount of the reflecting member 20 to 10 ° or less, and if aiming for utilization efficiency of 90% or more, It is desirable to design the angle change amount to 7 ° or less. If the angle change amount is 3 ° or less, substantially all light can be used.
For example, when the light emission period of the flash lamp 11 is 166 μsec, if the rotation period of the reflecting member 20 is 1/300 [sec] or less, the angle change amount of the reflecting member 20 can be 18 ° or less. Further, when the rotation period of the reflection member 20 is 1/167 [sec] or less, 1/117 [sec] or less, and 1/50 [sec] or less, the angle change amount of the reflection member 20 is 10 ° or less, respectively. , 7 ° or less, and 3 ° or less.

  FIG. 4 is a diagram showing the relationship between the angle change amount (rotation angle) [°] of the reflecting member 20 during the light emission period of the flash lamp 11 and the captured light amount (relative value) on the exposure surface. This result was obtained when each of the flash lamps 11 was driven and lit under the following conditions while appropriately changing the rotation period of the reflecting member 20 in the light source device having the following specifications. A curve (a) in FIG. 4 is a curve showing the amount of captured light with respect to the angle change amount of the reflecting member 20, and a curve (b) is a curve showing the time average value of the amount of captured light with respect to the angle change amount of the reflecting member 20.

<Specifications of light source device>
Number of light source bodies (10): 8 Between a light emitting point (intersection of optical axes of each light source body (10)) as a secondary light source and a bright spot of the flash lamp (11) Distance (radius of virtual circle): 200mm
Distance between main electrodes of flash lamp (11): 3 mm
Luminescent gas type: Xenon gas, Filling pressure: 15 MPa
Reflector (15): elliptical reflector, aperture diameter: φ100 mm
Reflective member (20): plane mirror having a reflective surface (21) of 40 × 55 mm, inclination angle of reflective surface (21) with respect to light source body arrangement surface: 45 °
Size of incident surface of rod integrator (40): 35 mm square, distance from light emitting point (X) of reflecting member (20) as secondary light source of incident surface of rod integrator (40): 100 mm
<Lighting conditions and operating conditions>
Applied voltage between one main electrode and one start auxiliary electrode, between the other main electrode and the other start auxiliary electrode, and between the pair of start auxiliary electrodes: 10 kV
Flash lamp (11) emission period: 20 μsec
Flash lamp (11) lighting frequency: 15 Hz (lighting cycle: 1/15 sec)

  In the above light source device, each of the plurality of light source bodies 10 is sequentially turned on and the reflecting member 20 is continuously arranged so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. Driven. That is, the reflecting member 20 is continuously driven so that the reflecting surface 21 faces the light source body during the operation period. Thereby, the light irradiated from each light source body 10 is reflected by the reflecting member 20 and emitted along the same optical axis Lb extending in the vertical direction passing through the light emitting point X on the reflecting surface 21 of the reflecting member 20. The As shown in FIG. 1, the light emitted from the light source device is incident on an integrator optical system such as a rod integrator 40, for example.

  Thus, according to the light source device according to the first embodiment, the reflecting member 20 is continuously driven so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the light irradiated from the respective light source bodies 10 to the reflecting member 20 during the light emission period of the flash lamp 11 can be collected within the same viewing angle. For this reason, it is possible to make the luminance of the reflecting surface 21 of the reflecting member 20 as the secondary light source uniform for all the light source bodies 10, and thus the integrated illuminance can be reduced without sacrificing the luminance of each light source body 10. Can be high.

  In the light source device according to the first embodiment of the present invention described above, for example, as shown in FIG. 5, each of the plurality of light source bodies 10 has a plane in which the optical axis La is perpendicular to the rotation center axis C of the reflecting member 20. On the other hand, that is, a configuration may be adopted in which the light source body is arranged in an inclined state with respect to the light source body arrangement surface. Although the inclination angle of the optical axis La of each light source body 10 with respect to the light source body arrangement surface is not particularly limited, it is preferably, for example, 20 ° to 45 °. According to such a configuration, the same effects as those of the above light source device can be obtained, and a plurality of light source bodies 10 can be densely arranged, so that the configuration is more compact than the light source device shown in FIG. It can be.

[Second Embodiment]
FIG. 6 is a perspective view showing a configuration of an example of a light source device according to the second embodiment of the present invention.
The light source device includes a plurality of light source bodies 10 arranged in equal intervals in one direction (hereinafter, this direction is referred to as “x direction”), and light emitted from each of the plurality of light source bodies 10. The first reflecting member 20a to be reflected and the light reflected from the first reflecting member 20a are incident, and the light from each of the light source bodies 10 is in the vertical direction (hereinafter, this direction is referred to as “z direction”). A second reflecting member 20b that emits along the same optical axis Lb, a lighting driving device (not shown) that sequentially drives the plurality of light source bodies 10 to light, and the first reflecting member 20a that reflects the first reflecting member 20a. A driving mechanism 30a that continuously drives the surface 21a so as to face the optical axis direction of the light emitted from the light source body during the operation period is provided. In FIG. 6, the same components as those of the light source device shown in FIG.

  In the plurality of light source bodies 10, the bright spots of the flash lamps 11 are positioned on the same horizontal plane (light source body arrangement surface), and the optical axes La are parallel to each other on the light source body arrangement surface and perpendicular to the x direction (hereinafter, “ “y direction”).

  The flash lamp 11 in each of the plurality of light source bodies 10 is intermittently driven by a lighting driving device, and the flash lamps 11 in other light source bodies are turned off during the light emission period of the flash lamp 11 in one light source body. In order to maintain the state, the lighting is continuously driven sequentially. The lighting condition of the flash lamp 11 in each of the plurality of light source bodies 10 is the same as that of the light source device shown in FIG.

  The first reflecting member 20a is constituted by a flat mirror, for example. The first reflecting member 20a is arranged in a state where the reflecting surface 21a is inclined with respect to a plane extending in the y direction and the z direction. In this example, the inclination angle of the reflecting surface 21a of the first reflecting member 20a with respect to the plane extending in the y direction and the z direction is, for example, 45 °.

The first reflecting member 20a is moved (reciprocated) along the x direction by the drive mechanism 30a with the direction of the reflecting surface 21a fixed. The drive mechanism 30a is configured by, for example, a uniaxial stage.
The moving speed of the first reflecting member 20a can be appropriately set according to the lighting cycle of the flash lamp 11, and is preferably set to 100 [m / sec] or less, for example. Thereby, the movement amount of the 1st reflection member 20 in the light emission period (period from the light emission start to light emission end) of the flash lamp 11 can be controlled appropriately, and the utilization efficiency of light can be made high.

  The second reflecting member 20b is constituted by, for example, a flat mirror. The second reflecting member 20b is arranged with its reflecting surface 21b facing the reflecting surface 21a of the first reflecting member 20a. The reflection surface 21b of the second reflection member 20b is inclined with respect to the light source body arrangement surface (a plane extending in the x direction and the y direction). In this example, the inclination angle of the reflection surface 21b of the second reflection member 20b with respect to the light source body arrangement surface is 45 °, for example.

In the light source device described above, each of the plurality of light source bodies 10 is sequentially driven to be lit, and the first reflecting member 20a is continuously along the x direction so that the reflecting surface 21a faces the light source body during the operation period. Driven. Thereby, the light irradiated from each light source body 10 is reflected toward the x direction by the first reflecting member 20a and is incident on the second reflecting member 20b. Lc in FIG. 6 is an optical axis of light reflected by the first reflecting member 20a.
The light incident on the second reflecting member 20b is reflected by the second reflecting member 20b and emitted along the same optical axis Lb extending in the z direction. The light emitted from the light source device enters an integrator optical system such as the rod integrator 40, for example.

  Thus, according to the light source device according to the second embodiment, the first reflecting member 20a is continuously arranged so that the reflecting surface 21a faces the optical axis direction of the light emitted from the light source body during the operation period. The light emitted from each light source body 10 during the light emission period of the flash lamp 11 is collected within the same viewing angle at the light emission point X on the reflection surface 21b of the second reflection member 20b. it can. Therefore, the integrated illuminance can be increased without sacrificing the luminance of each light source body 10.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.

FIG. 7 is a diagram schematically showing a configuration in still another example of the light source device according to the first embodiment of the present invention.
The light source device includes a plurality of light source bodies 10 each including a point light source type (short arc type) flash lamp 11, a first reflecting member 20a that reflects light emitted from each light source body 10, and A plurality of light source bodies, a second reflecting member 20b that receives light reflected from one reflecting member 20a and emits light from each of the plurality of light source bodies 10 along the same optical axis Lb extending in the vertical direction; And a lighting drive device (not shown) for sequentially lighting 10 and a second reflecting member 20b in the optical axis direction (first reflecting member 20a) of the light irradiated from the light source body whose reflecting surface 21 is operating. And a drive mechanism 30 that is continuously driven so as to face the direction of the optical axis Lc of the reflected light. In FIG. 7, the same components as those of the light source device shown in FIG.

  The plurality of light source bodies 10 are virtual circles having a predetermined radius set on the light source body arrangement surface in a state where the bright spot of the flash lamp 11 is located on the same horizontal plane (light source body arrangement surface). It arrange | positions along with the circumference at equal intervals in the circumferential direction. In the light source device of this example, the optical axis La of each light source body 10 is positioned so as to extend radially outward in the radial direction of the virtual circle on the light source body arrangement surface.

  The flash lamp 11 in each of the plurality of light source bodies 10 is intermittently driven by a lighting driving device, and for example, during the light emission period of the flash lamp 11 in one light source body, In order to maintain the extinguished state, the light is continuously driven continuously. The lighting condition of the flash lamp 11 in each of the plurality of light source bodies 10 is the same as that of the light source device shown in FIG.

The first reflecting member 20a in this example is configured by, for example, a cylindrical mirror that expands upward in the vertical direction. The first reflecting member 20a may be configured by a plurality of mirror elements arranged along a circumference that is concentric with a virtual circle in which the plurality of light source bodies 10 are arranged. In the case where the first reflecting member 20a is formed of a cylindrical mirror, the shape of the reflecting surface 21a of the cylindrical mirror can be appropriately changed according to a desired optical design.
The first reflecting member 20a is arranged so as to surround each of the plurality of light source bodies 10 with an optical axis passing through the center of the virtual circle and extending in a direction perpendicular to the light source arrangement surface.

  The second reflecting member 20b is constituted by, for example, a flat mirror. The reflection surface 21b of the second reflection member 20b is inclined with respect to the optical axis of the first reflection mirror 20a, and the light irradiated from each of the plurality of light source bodies 10 on the reflection surface 21b is first reflected. They are arranged with the intersection of the optical axes Lc of the reflected light reflected by the mirror 20a positioned.

  The second reflecting member 20b is rotationally driven by the drive mechanism with the optical axis of the first reflecting mirror 20a as the rotation center axis C. The drive mechanism 30 has the same configuration as the light source device shown in FIG. The driving conditions for the second reflecting member 20b are the same as those of the light source device shown in FIG.

  In the above light source device, each of the plurality of light source bodies 10 is sequentially turned on, and the light reflected from the light source body when the reflecting surface 21b of the second reflecting member 20b is operating is reflected first. It is continuously rotated so as to face the optical axis Lc direction of the reflected light reflected by the member 20a. Thereby, the reflected light in which the light irradiated from each light source body 10 is reflected by the first reflecting member 20a is reflected by the second reflecting member 20b and along the same optical axis Lb extending in the vertical direction. Emitted. The light emitted from the light source device enters an integrator optical system such as the rod integrator 40, for example.

  Thus, even with such a light source device, the same effect as the light source device shown in FIG. 1 can be obtained.

In the light source device of the present invention, the configuration of the light source body is not limited to that according to the above-described embodiment, and one light source body may be configured to include a plurality of flash lamps.
Furthermore, in the light source device of the present invention, the plurality of light source bodies may be in an operating state during the same period (simultaneously) by the lighting driving device.

  The light source device of the present invention is, for example, an exposure apparatus for patterning a self-assembled monomolecular film (hereinafter also referred to as “SAM film”) using vacuum ultraviolet light without using a pattern forming process using a photoresist. It is expected to be useful as a light source.

DESCRIPTION OF SYMBOLS 10 Light source body 10a Light source body 11 Flash lamp 15 Reflector 20 Reflective member 20a First reflective member 20b Second reflective member 21 Reflective surface 21a Reflective surface 21b Reflective surface 30 Drive mechanism 30a Drive mechanism 31 Drive source 40 Rod integrator C Rotation center Axis La Optical axis of light source body Lb Optical axis of light emitted from light source device Lc Optical axis of light reflected by first reflecting member P Projection S Bright point of flash lamp V Virtual circle X Light emitting point

Claims (7)

A plurality of light source bodies each including a flash lamp that is turned on under the condition that each light emission time is 1 ms or less; and a reflection member that reflects light from each of the plurality of light source bodies. In the light source device that emits the reflected light from the member,
A lighting driving device that lights and drives each of the plurality of light source bodies so that at least one light source body is in an operating state;
A driving mechanism for driving the reflecting member so that the reflecting surface thereof faces the optical axis direction of the light emitted from the light source body during the operation period;
The light source device, wherein light incident on the reflecting member from each of the plurality of light source bodies is emitted along the same optical axis.   2. The light source device according to claim 1, wherein each of the plurality of light source bodies includes a reflector that reflects light emitted from a flash lamp toward the reflecting member.   The light source device according to claim 2, wherein the reflector has a light collecting property. The drive mechanism rotates the reflection member around an axis passing through the reflection surface,
4. The light source device according to claim 1, wherein the plurality of light source bodies are arranged along a circumference of a circle centering on a rotation center axis of the reflecting member. 5.   5. The light source device according to claim 4, wherein each of the plurality of light source bodies is arranged in a state in which an optical axis is inclined with respect to a plane perpendicular to a rotation center axis of the reflecting member. The plurality of light source bodies are arranged in one direction,
4. The light source device according to claim 1, wherein the driving mechanism moves the reflecting member along the one direction. 5. When the reflecting surface of the reflecting member is in a state facing any one of the light source bodies, the size of projection of the reflecting member onto the surface perpendicular to the optical axis of the light source body is larger than the opening diameter of the reflector. The light source device according to any one of claims 3 to 6, wherein the light source device is less than or equal to.

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