JP2017208245A - Light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device capable of increasing estimation illuminance without sacrificing luminance of several light source members each of which is intermittently lit and driven.SOLUTION: A light source device comprises several light source members each of which is lit and driven by a lighting and driving device under a specific condition arranged either in a planer manner or three-dimensional manner around a reflection member for reflecting light from each of the several light source members. The light source device comprises a reflection member attitude control device comprising at least two driving mechanisms selected from a rotating driving mechanism around an axis extending in one direction, either a rotating driving mechanism or a swinging mechanism around an axis extending in a direction crossing at a right angle with the prescribed one direction, a translation driving mechanism in the prescribed one direction and a translation driving mechanism in a plane crossing at a right angle with the prescribed one direction so as to control the attitude of the reflection member in such a way that its reflection surface may face to an optical axis direction of light radiated from the light source members during its operation period, and the light incident from each of the several light source members to the reflection member is emitted along the same optical axis.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a light source device, and more particularly to a multi-lamp type light source device having a plurality of light source bodies that are driven to be turned on under the condition that each emission time is 1 ms or less.

At present, discharge lamps that perform flash lighting are used in various industrial applications such as flash annealing in semiconductor manufacturing processes.
For example, a short arc flash lamp can be handled as a light source close to a point light source, and can easily obtain light with relatively little unevenness in the directionality and distribution of light. Can be irradiated in time. In addition, since the arc formation time between the main electrodes is extremely short, the opportunity for the light output by the discharge to be blocked or absorbed by the arc is reduced, which is excellent in terms of light utilization efficiency. Yes. Such a short arc type flash lamp is described in Patent Document 1, for example.

  However, the flash lamp has a problem that it is difficult to increase the integrated light quantity because the light emission time is extremely short. Therefore, it is difficult to secure a necessary light amount depending on the intended use. For example, Patent Document 2 describes a light source device for exposure using vacuum ultraviolet light emitted from a flash lamp. However, in the current flash lamp, since the amount of emitted vacuum ultraviolet light is very small, it is impossible to complete the exposure with a single light emission, and a lot of processing time is required. is there.

On the other hand, a light source device equipped with a plurality of discharge lamps is known. For example, Patent Document 3 includes, for example, a configuration including a plurality of light source units each including a high-pressure mercury lamp that emits light including ultraviolet light and a reflecting mirror. The light source device is described.
However, in such a multi-lamp type light source device, the light from each light source unit cannot be collected within the same viewing angle. For this reason, the luminance of the light source unit located at the end is sacrificed, and it is difficult to design a high-luminance light source device.

JP 2015-162404 A JP 2014-235965 A Japanese Patent No. 5212629

  The present invention has been made based on the circumstances as described above, and includes a plurality of light source bodies that are driven to be intermittently driven and integrated without sacrificing the luminance of each light source body. It aims at providing the light source device which can make illumination intensity high.

The light source device of the present invention includes a plurality of light source bodies that are driven to be driven under the condition that each light emission time is 1 ms or less, and a reflecting member that reflects light from each of the plurality of light source bodies. In the light source device in which the plurality of light source bodies are arranged in a plane or three-dimensionally around the reflecting member,
A lighting drive device that lights and drives each of the plurality of light source bodies so that at least one light source body is in an operating state, and an optical axis direction of light emitted from the light source body during the operation of the reflecting surface of the reflecting member A reflection member attitude control device that controls the attitude of the reflection member so as to face
The reflection member attitude control device includes a rotation drive mechanism centered on an axis extending in one direction, a rotation drive mechanism or a swing mechanism centered on an axis extending in a direction orthogonal to the one direction, and the one-way translation drive mechanism. And at least two drive mechanisms selected from translational drive mechanisms in a plane perpendicular to the one direction,
The light incident on the reflecting member from each of the plurality of light source bodies is emitted along the same optical axis.

In the light source device of the present invention, each of the plurality of light source bodies is preferably configured to include a flash lamp and a reflector that reflects light emitted from the flash lamp toward the reflecting member. .
In the thing of such a structure, it is preferable that the said reflector has a condensing property.

In the light source device of the present invention, a first light source body group and a second light source body group are formed by the plurality of light source bodies, and each of the light source bodies and the second light source body constituting the first light source body group. Each light source constituting the group is arranged along the circumference of an imaginary circle centered on an axis extending in the one direction in the first region and the second region set at different positions in one direction. And
The reflecting member is disposed on the central axis of the virtual circle,
The reflection member attitude control device has a swing mechanism that swings the reflection member about an axis extending in a direction orthogonal to the one direction along the reflection surface of the reflection member, and a central axis of the virtual circle. And a rotation drive mechanism for rotating the reflection member.

In such a structure, each light source body that constitutes the first light source body group and each light source body that constitutes the second light source body group has an optical axis radially outward of the virtual circle. It is arranged in a state extending toward
From the second reflecting member that reflects the light emitted from each light source body constituting the first light source body group and enters the reflecting member, and from each light source body constituting the second light source body group It can be set as the structure further provided with the 3rd reflection member which reflects the light irradiated and injects into the said reflection member.

Furthermore, in the light source device of the present invention, a first light source body group and a second light source body group are formed by the plurality of light source bodies, and each of the light source bodies constituting the first light source body group and the first light source body group. Each of the light source bodies constituting the two light source body groups is arranged along the circumference of a virtual circle centered on an axis extending in the one direction in the first region and the second region set at different positions in one direction. Has been placed,
The reflecting member is disposed on the central axis of the virtual circle,
The reflection member attitude control device includes: a rotational drive mechanism that rotationally drives the reflective member around the central axis of the virtual circle; and a translational drive mechanism that translates the reflective member along the central axis of the virtual circle. It can be set as the structure provided.

Furthermore, in the light source device of the present invention, a first light source body group and a second light source body group are formed by the plurality of light source bodies, and each of the light source bodies constituting the first light source body group and the first light source body group. Each of the light source bodies constituting the two light source body groups has a direction in which the scanning path extends in the first area and the second area located on both sides of the scanning path extending linearly in a plane orthogonal to one direction. Arranged side by side,
The reflection member attitude control device includes a rotational drive mechanism that rotationally drives the reflection member about an axis extending in the one direction, and a translation drive of the reflection member along the scanning path in a plane orthogonal to the one direction. And a translation drive mechanism.

Furthermore, in the light source device of the present invention, the plurality of light source bodies are arranged at positions spirally arranged along an axis extending in one direction,
The reflective member is disposed on a central axis of the spiral;
The reflection member attitude control device is centered on a rotation drive mechanism that rotates the reflection member around the central axis of the spiral, and an axis that extends in a direction orthogonal to the one direction along the reflection surface of the reflection member. It can be set as the structure provided with the rocking mechanism which rocks the said reflection member.

  According to the light source device of the present invention, the reflecting member is irradiated to the reflecting member from each light source body by controlling the posture so that the reflecting surface thereof faces the optical axis direction of the light irradiated from the light source body during the operation period. Light can be collected within the same viewing angle. Therefore, the integrated illuminance can be increased without sacrificing the luminance of each light source body.

It is a perspective view which shows roughly the structure in an example of the light source device which concerns on 1st embodiment of this invention. It is the top view which shows the example of arrangement | positioning of the light source body in the 1st light source body group which looked at the light source device shown in FIG. 1 from the light emission direction. It is a side view which abbreviate | omits and shows a part of light source device shown in FIG. It is the schematic which shows the relationship between the magnitude | size of the opening diameter of the reflector in a light source body, and the magnitude | size of a reflection member. It is a figure which shows the relationship between the angle variation | change_quantity of the reflection member in the light emission period of a flash lamp, and the captured light quantity in an exposure surface. It is a figure which shows schematically the structure in the other example of the light source device which concerns on 1st embodiment of this invention. It is a perspective view which shows roughly the structure in an example of the light source device which concerns on 2nd embodiment of this invention. It is a perspective view which shows roughly the structure in an example of the light source device which concerns on 3rd embodiment of this invention. It is a figure which shows schematically the structure in the further another example of the light source device which concerns on 1st embodiment of this invention. It is a figure which shows schematically the structure in the further another example of the light source device which concerns on 1st embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail.

[First embodiment]
FIG. 1 is a perspective view schematically showing a configuration of an example of a light source device according to the first embodiment of the present invention. FIG. 2 is a plan view showing an arrangement example of the light source bodies in the first light source body group when the light source device shown in FIG. 1 is viewed from the light emitting direction. FIG. 3 is a side view showing the light source device shown in FIG. 1 with a part thereof omitted.
The light source device includes a plurality of light source bodies 10, a common reflecting member 20 that reflects light from each light source body 10, and each of the plurality of light source bodies 10 so that at least one light source body is in an operating state. A lighting drive device (not shown) for driving the lighting and the reflecting member 20 are continuously driven, for example, so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. And a reflection member posture control device 30 for posture control.

  Each light source body 10 includes, for example, a point light source type, that is, a short arc type flash lamp 11 and a reflector 15 that reflects light emitted from the flash lamp 11 toward the reflecting member 20. The reflector 15 is provided in a state where the optical axis thereof coincides with the central axis of the flash lamp 11 and the focal point thereof coincides with the bright spot S of the flash lamp 11.

The flash lamp 11 has, for example, a distance between a pair of main electrodes opposed to each other in an arc tube made of a vacuum ultraviolet light transmissive material, for example, 12.5 mm or less, and a gas containing xenon gas is predetermined in the arc tube. What is sealed at a sealing pressure of 1 is used. The flash lamp 11 is provided with a pair of start-up auxiliary electrodes so that the tips thereof are positioned between the pair of main electrodes.
The flash lamp 11 may be either one-end sealed type, both-end sealed type, or any type.

  It is preferable that the reflector 15 has a light collecting property. By using the reflector 15 having a light collecting property, the light receiving surface (reflective surface 21) of the reflective member 20 can be designed to be small. That is, as shown in FIG. 4, when the case where the reflecting surface 21 of the reflecting member 20 is in a state of facing any one light source body 10, the reflecting member 20 is perpendicular to the optical axis La of the light source body 10. A size having a dimension Dp of the projection P onto a flat surface (the thickness of the reflecting member 20 can be ignored) is not more than the size Dr of the opening diameter of the reflector 15 can be used. The same applies to the dimension in the direction perpendicular to the paper surface in the projection of the reflecting member 20. As described above, by using the reflector 15 having a light collecting property, the light receiving surface (reflective surface 21) of the reflecting member 20 can be designed to be small, and as a result, drive control of the reflecting member 20 can be easily performed. It can be carried out.

Specifically, the reflector 15 is configured by an elliptical reflecting mirror that collects and irradiates light emitted from the flash lamp 11, or a parabolic reflector that irradiates the light emitted from the flash lamp 11 in parallel light. It is preferable that
In the case of using an elliptical reflecting mirror, light can be condensed, so that the light receiving surface (reflecting surface 21) of the reflecting member 20 can be designed to be extremely small. However, in order to project parallel light onto the exposure surface, an integrator optical system (rod integrator, fly-eye integrator, light tunnel, or other optical system used to increase the illuminance uniformity on the irradiated surface is indicated separately. It is necessary to use an optical member such as On the other hand, when a parabolic reflector is used, since parallel light is obtained, the optical member can be reduced, but it is necessary to ensure a large area of the light receiving surface (reflective surface 21) of the reflective member 20. There is a demerit that drive control of the reflecting member 20 becomes more difficult than when an elliptical reflecting mirror is used. From the above points, it is necessary to select an optimal reflecting mirror according to the application.

  In this light source device, the plurality of light source bodies 10 are three-dimensionally arranged around the reflecting member 20. Specifically, the first light source body group 10a and the second light source body group 10b are formed by the plurality of light source bodies 10, and the plurality of light source bodies 10 and the second light source body group constituting the first light source body group 10a. The plurality of light source bodies 10 constituting 10b are respectively arranged in the first region A1 and the second region A2 set at different positions in one direction, in this example, different level positions in the vertical direction. In the following, the vertical direction in FIG. 1 is referred to as a “vertical direction” for convenience, but the usage pattern and the like are not limited.

  The plurality of light source bodies 10 constituting the first light source body group 10a are in the state where the bright spot S of the flash lamp 11 is positioned on the same horizontal plane (hereinafter referred to as “light source body arrangement plane P1”). Arranged at equal intervals in the circumferential direction along the circumference of the virtual circle V having a radius of a predetermined size centered on the axis extending in the vertical direction set on the arrangement plane P1. In the light source device of this example, the optical axis La of each light source body 10 is positioned so as to extend inward in the radial direction of the virtual circle V on the light source body arrangement surface P1. Here, the size of the radius of the virtual circle V (the distance from the center of the virtual circle V to the bright spot S of each flash lamp 11) is, for example, 150 mm to 350 mm. Moreover, although the number of the light source bodies 10 can be set according to the objective, it is 4-16 pieces, for example.

  The same applies to the plurality of light source bodies 10 constituting the second light source body group 10b, and the plurality of light source bodies 10 have the same bright surface S of the flash lamp 11 (hereinafter referred to as “light source body arrangement surface P2”). In the state of being positioned above, in the circumferential direction along the circumference of an imaginary circle having a radius of a predetermined size centered on an axis extending in the vertical direction, which is set on the light source body arrangement plane P2. They are arranged side by side. The central axis of the virtual circle coincides with the central axis of the virtual circle V related to the first light source group 10a. Each of the light source bodies 10 in the second light source body group 10b is configured to be arranged in a state where the optical axis La is inclined with respect to the light source body arrangement surface P2. The inclination angle of the optical axis La of each light source body 10 with respect to the light source body arrangement surface P2 is not particularly limited, but is preferably 20 ° to 45 °, for example.

  In this example, the flash lamp 11 in each of the plurality of light source bodies 10 is intermittently driven by a lighting drive device, and for example, the light emission period of the flash lamp 11 in one light source body for each light source body group. The flash lamps 11 in other light source bodies are sequentially turned on and driven continuously so that the light-off state is maintained.

  It is preferable that the lighting frequency of the flash lamp 11 in each light source body 10 is set to such a magnitude that the lighting cycle (operation interval) is 1/300 [sec] or more, for example. When the lighting cycle (operation interval) is smaller than 1/300 [sec], the discharge becomes unstable and the risk of non-lighting increases. Actually, the lighting frequency is preferably set to 100 Hz or less so that the lighting cycle is 1/100 [sec] or more.

  Further, the light emission time (lighting time) of the flash lamp 11 in each light source body 10 is, for example, 1 msec or less, and more preferably 500 μsec or less. If the flash lamp 11 emits light longer than 1 msec, an arc is likely to remain even after the power supply to the flash lamp 11 is stopped, and recharging between the main electrodes cannot be performed during that time. The luminous efficiency of vacuum ultraviolet light (VUV) is greatly related to the light emission time of the flash lamp 11, and the shorter the light emission time, the higher the light emission efficiency of vacuum ultraviolet light. Therefore, in consideration of the output of vacuum ultraviolet light, the light emission time is more preferably set to 50 μsec or less.

  The reflecting member 20 is constituted by a flat mirror, for example, and is disposed on the central axis of the virtual circle V. In this example, the reflecting member 20 is arranged on the reflecting surface 21 in a state where the intersections of the optical axes of all the light source bodies 10 constituting one light source body group are located. That is, the reflecting surface 21 of the reflecting member 20 constitutes a secondary light source, and a light emitting point X is formed at the intersection of the optical axes of the plurality of light source bodies 10 on the reflecting surface 21. In this light source device, it is not necessary that the optical axes La of all the light source bodies 10 intersect at one point, and the reflecting member 20 is arranged on all the light source bodies 10 on the central axis of the virtual circle. As long as it is placed at a position where light from the light enters.

As described above, the reflecting member 20 is posture-controlled by the reflecting member posture control device 30 so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period.
The reflecting member attitude control device 30 in this example is capable of swinging the reflecting member 20 around an axis (oscillation axis) C1 extending in the horizontal direction along the reflecting surface 21, for example, and passing vertically through the light emitting point X. A support member 31 that rotatably supports a central axis (rotation center axis) C2 of the virtual circle extending in the direction, a swing mechanism 35 that swings the reflecting member 20 about the swing axis C1, and a reflecting member And a rotation drive mechanism 38 that rotates the rotation center 20 about the rotation center axis C2. In this example, the swing axis C1 is located at a level position in the vertical direction where, for example, the light emission point X is located.

  The support member 31 includes a rod-like column 32 extending in the vertical direction that is rotatable about the rotation center axis C <b> 2 and a support arm 33 fixed to the upper end portion of the column 32. The support arm 33 includes a plate-like base portion 33a extending in the horizontal direction and plate-like support portions 33b extending in the vertical direction continuously at both ends of the base portion 33a. The reflecting member 20 is pivotally supported by a support portion 33b of the support arm 33 so that the pivot shaft extending outward in the horizontal direction on each of both side surfaces thereof is swingable.

  The swing mechanism 35 includes a driving motor (not shown) such as a stepping motor, for example, and the pivoting shaft is rotated by driving the driving motor with a controlled driving amount, so that the reflecting member 20 is rotated. Is swung around the swing axis C1. The swinging angle range of the reflecting member 20 is, for example, within a range of ± 10 ° with respect to a state where the reflecting surface 21 is inclined by 45 ° with respect to the light source body arrangement surface related to the first light source body group 10a.

  The rotation drive mechanism 38 includes a drive motor 39 such as a stepping motor, for example, and the support member 31 is rotated by driving the drive motor 39 with a controlled drive amount, so that the reflection member 20 is rotated at the central axis. It is rotated around C2.

  The rotation cycle of the reflecting member 20 by the rotation drive mechanism 38 can be set as appropriate according to the lighting cycle of the flash lamp 11, and can be set to 1/300 [sec] or less (a rotation frequency of 300 Hz or less), for example. desirable. Thereby, the angle change amount of the reflecting member 20 in the light emission period (the period from the light emission start to the light emission end) of the flash lamp 11 can be appropriately controlled, and the light use efficiency can be increased.

That is, as the rotation period of the reflecting member 20 becomes smaller (the number of revolutions becomes larger), the amount of change in the angle of the reflecting member 20 during the light emission period of the flash lamp 11 becomes larger. As the angle change amount increases, the reflection efficiency from the reflection member 20 is significantly deteriorated. For this reason, the amount of change in the angle of the reflecting member 20 during the light emission period of the flash lamp 11 needs to be suppressed to at least 18 ° or less. This angle change amount is uniquely determined by the length of the light emission period and the number of rotations of the reflection member 20, and if the angle change amount is 18 ° or more, the irradiation area of the reflected light greatly deviates. Efficiency is greatly degraded and is not practical. Further, in order to make it more efficient (to obtain utilization efficiency of about 80% or more), it is necessary to suppress the angle change amount of the reflecting member 20 to 10 ° or less, and if aiming for utilization efficiency of 90% or more, It is desirable to design the angle change amount to 7 ° or less. If the angle change amount is 3 ° or less, substantially all light can be used.
For example, when the light emission period of the flash lamp 11 is 166 μsec, if the rotation period of the reflecting member 20 is 1/300 [sec] or less, the angle change amount of the reflecting member 20 can be 18 ° or less. Further, when the rotation period of the reflection member 20 is 1/167 [sec] or less, 1/117 [sec] or less, and 1/50 [sec] or less, the angle change amount of the reflection member 20 is 10 ° or less, respectively. , 7 ° or less, and 3 ° or less.

  FIG. 5 is a diagram showing the relationship between the angle change amount (rotation angle) [°] of the reflecting member 20 during the light emission period of the flash lamp 11 and the captured light amount (relative value) on the exposure surface. This result was obtained when each of the flash lamps 11 was driven and lit under the following conditions while appropriately changing the rotation period of the reflecting member 20 in the light source device having the following specifications. A curve (a) in FIG. 5 is a curve showing the amount of captured light with respect to the angle change amount of the reflecting member 20, and a curve (b) is a curve showing the time average value of the amount of captured light with respect to the angle change amount of the reflecting member 20.

<Specifications of light source device>
Number of light source body groups: 2 Number of light source bodies (10) constituting each light source body group (10a, 10b): 8 Rotation center axis (C2) of reflecting member (20) on each light source body arrangement surface Between the bright spot of the lamp and the flash lamp (11) (the radius of the virtual circle): 200 mm
Distance between main electrodes of flash lamp (11): 3 mm
Luminescent gas type: Xenon gas, Filling pressure: 15 MPa
Reflector (15): elliptical reflector, aperture diameter: φ100 mm
Reflective member (20): plane mirror having a reflective surface (21) of 40 × 55 mm Size of incident surface of rod integrator (50): 35 mm square, reflective member (20 as a secondary light source of incident surface of rod integrator (50)) ) Distance from light emitting point (X): 100 mm
<Lighting conditions and operating conditions>
Applied voltage between one main electrode and one start auxiliary electrode, between the other main electrode and the other start auxiliary electrode, and between the pair of start auxiliary electrodes: 10 kV
Flash lamp (11) emission period: 20 μsec
Flash lamp (11) lighting frequency: 15 Hz (lighting cycle: 1/15 sec)

In the above light source device, for example, the reflection member 20 is controlled in posture so that the reflection surface 21 of the reflection member 20 faces the optical axis direction of the light emitted from the light source body 10 constituting the first light source body group 10a. , Each of the plurality of light source bodies 10 constituting the first light source body group 10a is driven to turn on sequentially, and the reflecting surface 21 is rotated so as to face the optical axis direction of the light emitted from the light source bodies during the operation period. The reflection member 20 is rotationally driven by the drive mechanism 38. That is, the reflecting member 20 is continuously rotated, for example, so that the reflecting surface 21 faces the light source body during the operation period. Next, the posture of the reflecting member 20 is controlled by the swing mechanism 35 so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source bodies 10 constituting the second light source body group 10b. In this state, each of the plurality of light source bodies 10 constituting the second light source body group 10b is driven to turn on sequentially, and the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the reflection member 20 is rotationally driven by the rotational drive mechanism 38. That is, the reflecting member 20 is continuously rotated, for example, so that the reflecting surface 21 faces the light source body during the operation period. Thereafter, the selection operation of the light source body group by the swinging of the reflecting member 20 and the scanning driving by the rotational driving of the reflecting member 20 are repeated.
By such lighting drive control, the light emitted from each light source body 10 is reflected by the reflecting member 20 and extends in the vertical direction passing through the light emitting point X on the reflecting surface 21 of the reflecting member 20. Are emitted along the optical axis Lb. The light emitted from the light source device is incident on an integrator optical system such as a rod integrator 50, for example, as shown in FIG.

  Thus, according to the light source device according to the first embodiment, the reflecting member 20 is continuously driven so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the light irradiated from the respective light source bodies 10 to the reflecting member 20 during the light emission period of the flash lamp 11 can be collected within the same viewing angle. For this reason, it is possible to make the luminance of the reflecting surface 21 of the reflecting member 20 as the secondary light source uniform for all the light source bodies 10, and thus the integrated illuminance can be reduced without sacrificing the luminance of each light source body 10. Can be high.

FIG. 6 is a diagram schematically showing a configuration in another example of the light source device according to the first embodiment of the present invention.
In this light source device, a first light source body group 10a and a second light source body group 10b are formed by a plurality of light source bodies 10, and the plurality of light source bodies 10 and the second light source bodies constituting the first light source body group 10a. The plurality of light source bodies 10 constituting the group 10b are respectively arranged in the first area A1 and the second area A2 set at different positions in one direction, for example, different level positions in the vertical direction. In the following, the vertical direction in FIG. 6 is referred to as a “vertical direction” for the sake of convenience, but the usage pattern and the like are not limited.

  The plurality of light source bodies 10 constituting the first light source body group 10a are in the state where the bright spot S of the flash lamp 11 is positioned on the same horizontal plane (hereinafter referred to as “light source body arrangement plane P1”). Arranged at equal intervals in the circumferential direction along the circumference of a virtual circle having a radius of a predetermined size centered on an axis extending in the vertical direction set on the arrangement plane P1. In the light source device of this example, the optical axis La of each light source body 10 is positioned on the light source body arrangement surface P1 so as to extend outward in the radial direction of the virtual circle.

  The same applies to the plurality of light source bodies 10 constituting the second light source body group 10b, and the plurality of light source bodies 10 have the same bright surface of the flash lamp 11 (hereinafter referred to as “light source body arrangement surface P2”). .) In the state of being positioned above, equidistant in the circumferential direction along the circumference of a virtual circle having a radius of a predetermined size centered on the axis extending in the vertical direction, which is set on the light source body arrangement plane P2 Are arranged side by side. The optical axis La of each light source body 10 is positioned on the light source body arrangement plane P2 so as to extend outward in the radial direction of the virtual circle.

  In this light source device, a first reflecting member 20a that emits light from each of the light source bodies 10 along the same optical axis Lb extending in the vertical direction and a plurality of light sources constituting the first light source body group 10a. Are irradiated from each of the plurality of light source bodies 10 constituting the second light reflecting body group 10b and the second reflecting member 20b that reflects the light emitted from each of the light source bodies 10 toward the first reflecting member 20a. And a third reflecting member 20c that reflects the reflected light toward the first reflecting member 20a.

  The first reflecting member 20a is constituted by a flat mirror, for example, and is disposed on the central axis of the virtual circle. In this example, the first reflecting member 20a is an intersection of optical axes Lc and Ld of light reflected from the second reflecting member 20b and the third reflecting member 30c of light emitted from each of the plurality of light source bodies 10. Are arranged on the reflecting surface 21a.

The second reflecting member 20b and the third reflecting member 20c are configured by, for example, a cylindrical mirror that expands upward in the vertical direction. The second reflecting member 20b and the third reflecting member 20c are configured by a plurality of mirror elements arranged along a circumference that is concentric with a virtual circle in which the plurality of light source bodies 10 are arranged. Also good. In the case where the second reflecting member 20b and the third reflecting member 20c are formed of cylindrical mirrors, the shapes of the reflecting surfaces 21b and 21c of the cylindrical mirror can be appropriately changed according to a desired optical design.
The second reflecting member 20b and the third reflecting member 20c have their optical axes passing through the center of the virtual circle and extending in a direction perpendicular to the light source arrangement surfaces P1 and P2, and around each of the plurality of light source bodies 10. It is arranged to surround.

  The flash lamps 11 in each of the plurality of light source bodies 10 are intermittently driven by a lighting driving device, and, for example, for each light source body group, during the light emission period of the flash lamp 11 in one light source body, The light source body is sequentially driven to be turned on so that the flash lamp 11 is kept off in the light source body. The lighting condition of the flash lamp 11 in each of the plurality of light source bodies 10 is the same as that of the light source device shown in FIG.

  The posture of the first reflecting member 20 a is controlled by the reflecting member posture control device 30. The reflection member attitude control device 30 has the same configuration as that of the light source device shown in FIG. 1, and includes a swing mechanism that swings the first reflection member 20a about a swing axis C1 that extends in the horizontal direction, And a rotational drive mechanism that rotationally drives the reflective member 20a with the central axis of the virtual circle extending in the vertical direction as the rotational central axis C2. The driving condition of the first reflecting member 20a is the same as that of the light source device shown in FIG.

In the above light source device, for example, the optical axis of the reflected light by the second reflecting member 20b of the light irradiated from the light source body 10 whose reflecting surface 21a of the first reflecting member 20a constitutes the first light source body group 10a. The posture of the first reflecting member 20a is controlled so as to face the Lc direction. In this state, each of the plurality of light source bodies 10 constituting the first light source body group 10a is driven to turn on sequentially, and the light irradiated from the light source body during the operation period of the reflecting surface 21a is the second reflecting member. It is continuously rotated by the rotation drive mechanism so as to face the direction of the optical axis Lc of the reflected light reflected by 20b. Next, the light reflecting surface 21a of the first reflecting member 20a is irradiated from the light source body 10 constituting the second light source body group 10b by the swing mechanism in the direction of the optical axis Ld of the light reflected by the third reflecting member 20c. The posture of the first reflecting member 20a is controlled so as to face the. In this state, each of the plurality of light source bodies 10 constituting the second light source body group 10b is driven to turn on sequentially, and the light irradiated from the light source body during the operation period of the reflecting surface 21a is the third reflecting member. It is continuously rotated by the rotation drive mechanism so as to face the direction of the optical axis Ld of the reflected light reflected by 20c.
Thereafter, the selection operation of the light source group by the swinging of the first reflecting member 20a and the scanning drive by the rotational driving of the first reflecting member 20a are repeated.
By such lighting drive control, the light emitted from each light source body 10 is reflected by the first reflecting member 20a and emitted along the same optical axis Lb extending in the vertical direction. . As shown in FIG. 6, the light emitted from the light source device is incident on an integrator optical system such as a rod integrator 50.

  Thus, even with such a light source device, the same effect as the light source device shown in FIG. 1 can be obtained.

[Second Embodiment]
FIG. 7 is a perspective view schematically showing a configuration in an example of a light source device according to the second embodiment of the present invention.
This light source device has the same configuration as the light source device shown in FIG. 1 except that the arrangement of the plurality of light source bodies constituting the second light source body group and the configuration of the reflecting member attitude control device are different. In FIG. 7, the same components as those of the light source device shown in FIG. In addition, although the vertical direction in FIG. 7 is referred to as a “vertical direction” for convenience, the usage form and the like are not limited.

  In the plurality of light source bodies 10 constituting the second light source body group 10b in this light source device, similarly to the first light source body group 10a, the bright spot S of the flash lamp 11 is positioned on the same horizontal plane (light source body arrangement surface). In the state where the light source body is arranged, the light source body is arranged at equal intervals in the circumferential direction along the circumference of a virtual circle having a radius of a predetermined size centered on an axis extending in one direction, for example, the vertical direction. (See FIG. 2). And the optical axis La of each light source body 10 is located on the light source body arrangement | positioning surface so that it may extend toward the radial inside of a virtual circle.

The reflection member attitude control device 30a includes a rotation drive mechanism 38 that rotates the reflection member 20 around a vertical axis (rotation center axis) C2 that passes through the light emission point X, and the reflection member 20 along the rotation center axis C2. A translation drive mechanism 40 that translates in the vertical direction. Here, the reflecting member 20 is arranged in a state where the reflecting surface 21 is inclined with respect to the light source body arrangement surface related to the first light source body group 10a and the light source body arrangement surface related to the second light source body group 10b. In this example, the inclination angle of the reflection surface 21 of the reflection member 20 with respect to the light source body arrangement surface is, for example, 45 °.
The rotation drive mechanism 38 has the same configuration as the rotation drive mechanism 38 in the light source device shown in FIG. Moreover, the rotational drive conditions of the reflection member 20 are the same as that of the light source device shown in FIG.
The translation drive mechanism 40 is constituted by, for example, an elevating mechanism that moves a stage 41 on which the drive motor 39 in the rotation drive mechanism 38 is placed in the vertical direction. By this translation drive mechanism 40, the reflecting member 20 constitutes the second light source body group 10b and the vertical level position of the first region A1 where the plurality of light source bodies 10 constituting the first light source body group 10a are arranged. Translational drive (reciprocation) is performed between the vertical direction level position of the second region A2 where the plurality of light source bodies 10 are arranged.

In the above light source device, for example, the reflecting member 20 is in the first region A1 so that the reflecting surface 21 of the reflecting member 20 faces the optical axis direction of the light emitted from the light source body 10 constituting the first light source body group 10a. It is in a state of being positioned at the vertical level position (level position of the light source body arrangement surface). In this state, each of the plurality of light source bodies 10 constituting the first light source body group 10a is driven to turn on sequentially, and the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the reflection member 20 is rotationally driven by the rotational drive mechanism 38. That is, the reflecting member 20 is continuously rotated, for example, so that the reflecting surface 21 faces the light source body during the operation period. Next, the translational drive mechanism 40 drives the reflecting member 20 upward in the vertical direction so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source bodies 10 constituting the second light source body group 10b. It is in a state of being positioned at the vertical direction level position (level position of the light source body arrangement surface) of the two areas A2. In this state, each of the plurality of light source bodies 10 constituting the second light source body group 10b is driven to turn on sequentially, and the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the reflection member 20 is rotationally driven by the rotational drive mechanism 38. That is, the reflecting member 20 is continuously rotated, for example, so that the reflecting surface 21 faces the light source body during the operation period. Thereafter, the selection operation of the light source group by the translational driving of the reflecting member 20 and the scanning driving by the rotational driving of the reflecting member 20 are repeated.
By such lighting drive control, the light emitted from each light source body 10 is reflected by the reflecting member 20 and extends in the vertical direction passing through the light emitting point X on the reflecting surface 21 of the reflecting member 20. Are emitted along the optical axis Lb. As shown in FIG. 7, the light emitted from the light source device is incident on an integrator optical system such as the rod integrator 50.

  Thus, even with the light source device according to the second embodiment, the same effect as that of the light source device shown in FIG. 1 can be obtained. That is, the reflecting member 20 is continuously driven so that the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period, so that each light source body during the light emission period of the flash lamp 11 is obtained. The light irradiated from 10 to the reflecting member 20 can be collected within the same viewing angle. For this reason, according to said light source device, integrated illuminance can be made high without sacrificing the brightness | luminance of each light source body 10. FIG.

[Third embodiment]
FIG. 8 is a perspective view schematically showing a configuration in an example of a light source device according to the third embodiment of the present invention.
The light source device includes a plurality of light source bodies 10, a first reflecting member 20a that reflects light emitted from each of the plurality of light source bodies 10 and emits the light along the same optical axis Lb, and a first reflection. The second reflecting member 20b that emits the reflected light from the member 20a along the optical axis Lc extending in one direction, for example, the vertical direction (hereinafter, this direction is referred to as “z direction”), and the plurality of light source bodies 10 sequentially. And a lighting drive device (not shown) that drives the light source to continuously reflect the first reflecting member 20a so that the reflecting surface 21a faces the optical axis direction of the light emitted from the light source body during the operation period. And a member attitude control device 30b. In FIG. 8, the same components as those of the light source device shown in FIG. In this example, the vertical direction in FIG. 8 is referred to as a “vertical direction” for the sake of convenience, but the usage pattern and the like are not limited.

  In this light source device, the plurality of light source bodies 10 are arranged in a plane around the first reflecting member 20a. Specifically, the first light source body group 10a and the second light source body group 10b are formed by the plurality of light source bodies 10, and the plurality of light source bodies 10 and the second light source body group constituting the first light source body group 10a. The plurality of light source bodies 10 constituting 10b are respectively provided in a first area A1 and a second area A2 set on both sides of a scanning path 46 extending linearly in a plane orthogonal to the one direction, for example, in a horizontal plane. Has been placed. Hereinafter, the direction in which the scanning path 46 extends is referred to as “x direction”.

  The plurality of light source bodies 10 constituting the first light source body group 10a are in a state where the bright spots of the flash lamps 11 are located on the same horizontal plane (light source body arrangement surface), for example, at positions arranged at equal intervals in the x direction. Is arranged in. The optical axes La of the respective light source bodies 10 are arranged so as to extend in a direction perpendicular to the x direction (hereinafter referred to as “y direction”) in parallel to each other on the light source body arrangement surface.

In the plurality of light source bodies 10 constituting the second light source body group 10b, the bright spots of the flash lamp 11 are the same as the light source body arrangement surface related to the first light source body group 10a, for example, at positions arranged at equal intervals in the x direction. They are placed on a horizontal plane. The optical axes La of the respective light source bodies 10 are arranged to extend in the y direction in parallel to each other on the light source body arrangement surface.
In this example, the plurality of light source bodies 10 constituting the second light source body group 10b are in a state of facing each other with the plurality of light source bodies 10 constituting the first light source body group 10a.

  The flash lamp 11 in each of the plurality of light source bodies 10 is intermittently driven by a lighting driving device, and the flash lamps 11 in other light source bodies are turned off during the light emission period of the flash lamp 11 in one light source body. In order to maintain the state, the lighting is continuously driven sequentially. The lighting condition of the flash lamp 11 in each of the plurality of light source bodies 10 is the same as that of the light source device shown in FIG.

  The first reflecting member 20a is constituted by a flat mirror, for example, and is arranged in a posture in which the reflecting surface 21a extends along the z direction.

The attitude of the first reflecting member 20a is controlled by the reflecting member attitude control device 30b.
The reflection member attitude control device 30b in this example includes a rotation drive mechanism 38 that rotates the first reflection member 20a about the axis extending in the z direction (vertical direction) as a rotation center axis C, and the first reflection member 20a in a horizontal plane. And a translation drive mechanism 45 that translates (reciprocates) along a scanning path 46 extending in the x direction.

  The rotation drive mechanism has the same configuration as the rotation drive mechanism 38 in the light source device shown in FIG. Moreover, the rotational drive conditions of the 1st reflection member 20a are the same as that of the light source device shown in FIG.

The translation drive mechanism 45 is constituted by, for example, a uniaxial stage, and thereby a linear scanning path 46 is constituted.
The moving speed of the first reflecting member 20a by the translation drive mechanism 45 can be appropriately set according to the lighting cycle of the flash lamp 11, and is preferably set to 100 [m / sec] or less, for example. Thereby, the amount of movement of the first reflecting member 20a in the light emission period of the flash lamp 11 (the period from the start of light emission to the end of light emission) can be appropriately controlled, and the light utilization efficiency can be increased.

  The second reflecting member 20b is constituted by, for example, a flat mirror. The second reflecting member 20b is arranged with its reflecting surface 21b facing the reflecting surface 21a of the first reflecting member 20a. The reflection surface 21b of the second reflection member 20b is inclined with respect to the light source body arrangement surface (a plane extending in the x direction and the y direction). In this example, the inclination angle of the reflection surface 21b of the second reflection member 20b with respect to the light source body arrangement surface is 45 °, for example.

In the above light source device, for example, the first reflecting member 20a is such that the reflecting surface 21a of the first reflecting member 20a faces the optical axis direction of the light emitted from the light source body 10 constituting the first light source body group 10a. Is controlled in posture. In this state, each of the plurality of light source bodies 10 constituting the first light source body group 10a is sequentially driven to be turned on, and the reflecting surface 21a faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the first reflection member 20a is translated by the translation drive mechanism 45. That is, the first reflecting member 20a is continuously translated, for example, so that the reflecting surface 21a faces the light source body during the operation period. Next, the posture of the first reflecting member 20a is controlled by the rotation driving mechanism 38 so that the reflecting surface 21a faces the optical axis direction of the light emitted from the light source bodies 10 constituting the second light source body group 10b. In this state, each of the plurality of light source bodies 10 constituting the second light source body group 10b is driven to turn on sequentially, and the reflecting surface 21a faces the optical axis direction of the light emitted from the light source body during the operation period. Thus, the first reflection member 20a is translated by the translation drive mechanism 45. That is, the first reflecting member 20a is continuously translated, for example, so that the reflecting surface 21a faces the light source body during the operation period. Thereafter, the selection operation of the light source body group by the rotational driving of the first reflecting member 20a and the scanning driving by the translational driving of the first reflecting member 20a are repeated.
By such lighting drive control, the light emitted from each light source body 10 is reflected by the first reflecting member 20a and emitted along the same optical axis Lb extending in the x direction. . The reflected light from the first reflecting member 20a is reflected by the second reflecting member 20b and emitted along the optical axis Lc extending in the z direction. The light emitted from the light source device enters an integrator optical system such as the rod integrator 50, for example.

  Thus, according to the light source device according to the third embodiment, the first reflecting member 20a is continuously arranged so that the reflecting surface 21a faces the optical axis direction of the light emitted from the light source body during the operation period. The light emitted from each light source body 10 during the light emission period of the flash lamp 11 is collected within the same viewing angle at the light emission point X on the reflection surface 21b of the second reflection member 20b. it can. Therefore, the integrated illuminance can be increased without sacrificing the luminance of each light source body 10.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, in the light source device of the present invention, the configuration of the light source body is not limited to that according to the above-described embodiment, and one light source body may be configured to include a plurality of flash lamps.
Moreover, in the light source device of the present invention, the plurality of light source bodies may be in an operating state during the same period (simultaneously) by the lighting driving device.
Furthermore, in the light source device of the present invention, the light source body may be constituted by, for example, a laser excitation light source type.

Further, in the light source device according to the first embodiment, as shown in FIG. 9, the plurality of light source bodies 10 are arranged in a spiral along the optical axis Lb of the reflected light by the reflecting member extending in one direction, for example, the vertical direction. It can be set as the structure arrange | positioned in the position. In this example, the plurality of light source bodies 10 are arranged at positions spirally arranged along the peripheral surface of the virtual cylindrical body centering on the optical axis Lb of the reflected light by the reflecting member 20. Each light source body 10 is arranged, for example, in such a posture that the optical axes intersect at one point, and the reflecting member 20 has the intersection (light emitting point X) of the optical axes La of all the light source bodies 10 on the reflecting surface 21. Arranged in a state where it is located.
The reflecting member posture control device 30 in this example has the same configuration as the reflecting member posture control device 30 in the light source device shown in FIG.
In this light source device, the reflecting member 20 is driven to swing horizontally extending along the reflecting surface by the swing mechanism while being rotated about the center axis of the virtual cylindrical body extending in the vertical direction by the rotation driving mechanism as the rotation center axis C2. By oscillating about the moving axis, the reflecting member 20 is directed so as to face the optical axis direction of the light emitted from the light source body during the operation period of the plurality of light source bodies 10 that are sequentially driven to be lit. Is attitude controlled.

  Furthermore, a plurality of light source bodies may be arranged along the spherical surface of the virtual sphere. In such a configuration, the reflecting member is disposed on the center point of the virtual sphere, and the posture control device includes a rotation drive mechanism and a swing mechanism as in the light source device shown in FIG. It can be of a configuration.

  Furthermore, in the light source device according to the first embodiment and the light source device according to the second embodiment, in a configuration in which a plurality of light source bodies are arranged in three dimensions, a light source body formed by a plurality of light source bodies. The number of groups is not limited to two. For example, a third light source body group is formed by a plurality of light source bodies, and a plurality of light source bodies constituting the third light source body group are arranged in a first region and a third region having different vertical level positions from the second region. It may be configured as such.

  Furthermore, in the light source device of the present invention, the reflecting member that reflects the light emitted from the plurality of light source bodies does not need to be a planar mirror, and is configured by a scanning mirror device such as a polygon mirror. May be.

FIG. 10 is a diagram schematically showing a configuration in still another example of the light source device according to the first embodiment of the present invention.
In this light source device, the third light source body group 10c is further formed by the plurality of light source bodies 10, and the plurality of light source bodies 10 constituting the third light source body group 10c is the first light source body group 10a related to the first light source body group 10a. The region A1 and the second region A2 related to the second light source body group 10b are arranged in positions different from each other in one direction, for example, in a third region having a different level position in the vertical direction.
The reflecting member 20 in this example is constituted by, for example, a polygon mirror, and is arranged in a posture in which the rotation center axis C1 extends in the horizontal direction.
The reflection member attitude control device rotates and drives the reflection member 20 around the rotation center axis C1 that horizontally rotates the reflection member 20 with the axis extending in the vertical direction as the rotation center axis C2. It can be set as the structure provided with the 2nd rotational drive mechanism. The first rotation drive mechanism can have the same configuration as the rotation drive mechanism 38 in the light source device shown in FIG. 1, for example.

  In this light source device, for example, as shown in FIG. 10 (a), each of the plurality of light source bodies 10 constituting the first light source body group 10a is driven to turn on sequentially, and the reflecting member 20 is rotated about the central axis C2. Is driven around. Thereby, the light irradiated from each of the several light source body 10 which comprises the 1st light source body group 10a is reflected by the reflection member 20, and is radiate | emitted along the same optical axis Lb. Next, as shown in FIG. 10B, the reflecting member 20 is driven to rotate about the rotation center axis C1 with a driving amount controlled by the second rotation driving mechanism. In this state, each of the plurality of light source bodies 10 constituting the second light source body group 10b is driven to turn on sequentially, and the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. The reflecting member 20 is rotationally driven by the first rotational driving mechanism. Thereby, the light irradiated from each of the several light source body 10 which comprises the 2nd light source body group 10b is reflected by the reflection member 20, and is radiate | emitted along the same optical axis Lb. Further, as shown in FIG. 10C, the reflection member 20 is rotationally driven around the rotation center axis C1 with a drive amount controlled by the second rotation drive mechanism. In this state, each of the plurality of light source bodies 10 constituting the third light source body group 10c is sequentially turned on and the reflecting surface 21 faces the optical axis direction of the light emitted from the light source body during the operation period. The reflecting member 20 is rotationally driven by the first rotational driving mechanism. Thereby, the light irradiated from each of the several light source body 10 which comprises the 3rd light source body group 10b is reflected by the reflection member 20, and is radiate | emitted along the same optical axis Lb.

  The light source device of the present invention is, for example, an exposure apparatus for patterning a self-assembled monomolecular film (hereinafter also referred to as “SAM film”) using vacuum ultraviolet light without using a pattern forming process using a photoresist. It is expected to be useful as a light source.

DESCRIPTION OF SYMBOLS 10 Light source body 10a 1st light source body group 10b 2nd light source body group 10c 3rd light source body group 11 Flash lamp 15 Reflector 20 Reflective member 20a 1st reflective member 20b 2nd reflective member 20c 3rd reflective member 21 Reflective surface 21a Reflective surface 21b Reflective surface 21c Reflective surface 30 Reflective member posture control device 30a Reflective member posture control device 30b Reflective member posture control device 31 Support member 32 Support column 33 Support arm 33a Base portion 33b Support portion 35 Oscillating mechanism 38 Rotation drive mechanism 39 Drive Motor 40 translation drive mechanism 41 stage 45 translation drive mechanism 46 scanning path 50 rod integrator A1 first area A2 second area C1 swing axis C2 rotation center axis La light axis of light source body Lb light emitted from light source device Axis Lc Optical axis of light reflected by second reflecting member Ld Third counter Optical axis P projection P1 bright spot V imaginary circle X emission point of the light source placement surface S flash lamp according to the light source placement surface P2 second light source group according to the first light source group of the light reflected by the member

Claims (8)

A plurality of light source bodies that are driven to be lit under a condition that each light emission time is 1 ms or less, and a reflecting member that reflects light from each of the plurality of light source bodies. In the light source device arranged in a plane or three-dimensionally around the reflection member,
A lighting drive device that lights and drives each of the plurality of light source bodies so that at least one light source body is in an operating state, and an optical axis direction of light emitted from the light source body during the operation of the reflecting surface of the reflecting member A reflection member attitude control device that controls the attitude of the reflection member so as to face
The reflection member attitude control device includes a rotation drive mechanism centered on an axis extending in one direction, a rotation drive mechanism or a swing mechanism centered on an axis extending in a direction orthogonal to the one direction, and the one-way translation drive mechanism. And at least two drive mechanisms selected from translational drive mechanisms in a plane perpendicular to the one direction,
The light source device, wherein light incident on the reflecting member from each of the plurality of light source bodies is emitted along the same optical axis.   2. The light source device according to claim 1, wherein each of the plurality of light source bodies includes a flash lamp and a reflector that reflects light emitted from the flash lamp toward the reflecting member.   The light source device according to claim 2, wherein the reflector has a light collecting property. A first light source body group and a second light source body group are formed by the plurality of light source bodies, and each light source body constituting the first light source body group and each light source body constituting the second light source body group. Is
In the first region and the second region set at different positions in one direction, arranged along the circumference of a virtual circle centered on the axis extending in the one direction,
The reflecting member is disposed on the central axis of the virtual circle,
The reflection member attitude control device has a swing mechanism that swings the reflection member about an axis extending in a direction orthogonal to the one direction along the reflection surface of the reflection member, and a central axis of the virtual circle. The light source device according to claim 1, further comprising a rotation driving mechanism that rotationally drives the reflecting member. Each light source body constituting the first light source body group and each light source body constituting the second light source body group are arranged in a state where the optical axis extends outward in the radial direction of the virtual circle. ,
From the second reflecting member that reflects the light emitted from each light source body constituting the first light source body group and enters the reflecting member, and from each light source body constituting the second light source body group The light source device according to claim 4, further comprising a third reflecting member that reflects irradiated light and enters the reflecting member. A first light source body group and a second light source body group are formed by the plurality of light source bodies, and each light source body constituting the first light source body group and each light source body constituting the second light source body group. Are arranged along the circumference of a virtual circle centered on an axis extending in the one direction in the first region and the second region set at different positions in one direction,
The reflecting member is disposed on the central axis of the virtual circle,
The reflection member attitude control device includes: a rotational drive mechanism that rotationally drives the reflective member around the central axis of the virtual circle; and a translational drive mechanism that translates the reflective member along the central axis of the virtual circle. The light source device according to claim 1, wherein the light source device is provided. A first light source body group and a second light source body group are formed by the plurality of light source bodies, and each light source body constituting the first light source body group and each light source body constituting the second light source body group. Are arranged side by side in the direction in which the scanning path extends in the first area and the second area located on both sides of the scanning path extending linearly in a plane orthogonal to one direction,
The reflection member attitude control device includes a rotational drive mechanism that rotationally drives the reflection member about an axis extending in the one direction, and a translation drive of the reflection member along the scanning path in a plane orthogonal to the one direction. The light source device according to claim 1, further comprising: a translational drive mechanism that performs the following operation. The plurality of light source bodies are arranged at positions spirally arranged along an axis extending in one direction,
The reflective member is disposed on a central axis of the spiral;
The reflection member attitude control device is centered on a rotation drive mechanism that rotates the reflection member around the central axis of the spiral, and an axis that extends in a direction orthogonal to the one direction along the reflection surface of the reflection member. The light source device according to claim 1, further comprising a swing mechanism that swings the reflecting member.

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