JP2017195340A - Substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate storage container which prevents occurrence of vibration in a gas jet nozzle part and displacement of the gas jet nozzle part and twisting caused in a center portion of the gas jet nozzle part during transportation of the substrate storage container.SOLUTION: A substrate storage container 1 has: a filter part having a ventilation passage allowing communication between a substrate storage space 27 and an external space of a container body 2, and a filter disposed in the ventilation passage, the filter part disposed in a wall part 20 and allowing a gas to pass between the external space of the container body 2 and the substrate storage space 27; and a gas jet nozzle part 110 which supplies a gas flowing into the ventilation passage of the filter part to the substrate storage space 27. The substrate storage container includes a support member 160 which engages with at least one or more portions of the gas jet nozzle part 110 which includes a center portion between one end part of the gas jet nozzle part 110 and the other end part to support at least the center portion.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a substrate storage container used when a substrate made of a semiconductor wafer or the like is stored, stored, transported, transported, or the like.

  2. Description of the Related Art Conventionally, as a substrate storage container for storing a substrate made of a semiconductor wafer and transporting it in a process in a factory, a structure including a container main body and a lid is known. The container body has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed.

  A front retainer is provided in a portion of the lid that faces the substrate storage space when the container main body opening is closed. The front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid. Further, the back substrate support portion is provided on the wall portion so as to be paired with the front retainer. The back side substrate support part can support the edges of a plurality of substrates. When the container body opening is closed by the lid, the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in a parallel state (see Patent Document 1).

  The container body is provided with an air supply valve having a valve body. Through the air supply valve, dry gas (hereinafter referred to as purge gas) from which inert gas such as nitrogen or moisture has been removed (1% or less) flows from the outside of the container main body into the substrate storage space, and gas purge is performed.

  In the substrate storage container, in order to efficiently replace the air inside the container with the purge gas in a short time, the left and right air supply valves on the back side of the container body have gas ejection nozzle portions extending in the vertical direction of the container body. Is provided. And the ejection wall which ejects purge gas is formed in the surrounding wall of a gas ejection nozzle part on the upper and lower surfaces of each board | substrate accommodated.

Japanese Patent Laying-Open No. 2006-4949

  The purge gas ejected from the gas ejection nozzle has a large flow rate because the gas purge is performed for a predetermined time. For this reason, during the ejection of the purge gas, there is a possibility that vibration is generated in the gas ejection nozzle part, or the gas ejection nozzle part is displaced with respect to the container body. Then, due to the occurrence of such vibration, there is a risk that the parts rub against each other to generate particles. In addition, due to the occurrence of such vibration and deviation, the purge gas may not be uniformly distributed in the substrate storage space.

  Further, when the substrate storage container is transported at a high speed, there is a possibility that the gas ejection nozzle portion is displaced from the predetermined installation position in the horizontal direction (horizontal direction), the vertical direction (vertical direction), or the like due to the action of vibration or acceleration. . As a result, it may be difficult to efficiently replace the air inside the substrate storage container with the purge gas. More specifically, in the substrate storage container described in Patent Document 1, only the upper end of the gas ejection nozzle portion (tubular ejection portion) is pressed by the support member. In this configuration, it is possible to fix the position of the upper end of the gas ejection nozzle part, but in the central part in the longitudinal direction of the gas ejection nozzle part, the circumferential direction of the gas ejection nozzle part centered on the axis of the gas ejection nozzle part Twisting can occur. In such a state where the twist is still occurring, the purge gas is not ejected in a predetermined direction, and the purge gas may not be uniformly distributed in the substrate storage space.

  The present invention suppresses occurrence of vibrations in the gas ejection nozzle portion, positional displacement of the gas ejection nozzle portion, and twisting of the central portion of the gas ejection nozzle portion during transport of the substrate storage container. It is an object of the present invention to provide a substrate storage container that can be used.

  The present invention includes a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and a plurality of substrates can be accommodated by the inner surface of the wall, and the container body opening is formed in the container body opening. A container body in which a communicating substrate storage space is formed; a lid that is detachable with respect to the container body opening; and that can close the container body opening; and the outside of the substrate storage space and the container body. An air passage capable of communicating with the space, and a filter disposed in the air passage, disposed on the wall portion, and between the space outside the container body and the substrate storage space through the filter. A filter part through which gas can pass, and a gas ejection nozzle part for supplying the gas flowing into the ventilation path of the filter part to the substrate storage space, and one end part and the other end part of the gas ejection nozzle part The gas jet including a central portion between It engages over at least one location of the nozzle portion, relates to a substrate storage container comprising a support member for supporting at least said central portion.

  The support member includes a center support member that engages with the center portion and supports the center portion. The center support member includes a support member base fixed to the wall portion, and the support member base. It is preferable to have an extending arm portion extending in the direction of the container main body opening and a central partial engaging portion located at the extending end portion of the extending arm portion.

  The support member further includes a second end support member that engages with the other end portion of the gas ejection nozzle portion and supports the other end portion of the gas ejection nozzle portion, It is preferable to have an other end engaging portion that engages with the other end portion of the gas ejection nozzle portion, and an end surface abutting portion that abuts against an end surface of the other end portion of the gas ejection nozzle portion.

  Moreover, it is preferable that the said end surface contact part has elasticity so that it can displace relatively with respect to the said other end part engaging part.

  The support member includes a central support member that engages with the central portion and supports the central portion, and the central support member includes a central portion engaging portion that engages with the central portion, It is preferable that the center part engaging part has a shape along the outer surface of the center part.

  According to the present invention, vibrations in the gas ejection nozzle portion, positional displacement of the gas ejection nozzle portion occurs, and twisting occurs in the central portion of the gas ejection nozzle portion during transport of the substrate storage container. A substrate storage container that can be suppressed can be provided.

It is a disassembled perspective view which shows a mode that the board | substrate W was accommodated in the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a downward perspective view which shows the container main body 2 of the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is sectional drawing which shows the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a disassembled perspective view which shows the gas ejection control mechanism 101 of the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a perspective view which shows the state before the tubular gas distribution part 110 of the substrate storage container 1 which concerns on 1st Embodiment of this invention is supported by the center support member 170. FIG. It is a perspective view showing the state where tubular gas circulation part 110 of substrate storage container 1 concerning a 1st embodiment of the present invention is supported by central support member 170. It is a back perspective view showing support member base 171 of center support member 170 of substrate storage container 1 concerning a 1st embodiment of the present invention. It is a perspective view which shows the base fixing | fixed part 210 of the back wall 22 of the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is sectional drawing which shows 1 A of substrate storage containers which concern on 2nd Embodiment of this invention. It is a perspective view which shows the state by which the tubular gas distribution part 110 of the board | substrate storage container which concerns on 3rd Embodiment of this invention is supported by the center support member 170 and the other end part support member 180B. It is a perspective view which shows the state before 110 C of tubular gas distribution parts of the board | substrate storage container which concern on 4th Embodiment of this invention are supported by the center support member 170C. It is a perspective view showing the state where tubular gas circulation part 110D of a substrate storage container concerning a 5th embodiment of the present invention is supported by central support member 170D.

Hereinafter, the substrate storage container 1 according to the first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an exploded perspective view showing a state in which a substrate W is stored in a substrate storage container 1 according to the first embodiment of the present invention. FIG. 2 is a lower perspective view showing the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view showing the substrate storage container 1 according to the first embodiment of the present invention. FIG. 4 is an exploded perspective view showing the gas ejection control mechanism 101 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 5 is a perspective view showing a state before the tubular gas circulation part 110 of the substrate storage container 1 according to the first embodiment of the present invention is supported by the central support member 170.

  FIG. 6 is a perspective view showing a state in which the tubular gas circulation part 110 of the substrate storage container 1 according to the first embodiment of the present invention is supported by the central support member 170. FIG. 7 is a rear perspective view showing the support member base 171 of the center support member 170 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 8 is a perspective view showing the base fixing portion 210 of the back wall 22 of the substrate storage container 1 according to the first embodiment of the present invention.

  Here, for convenience of explanation, a direction (from the upper right to the lower left in FIG. 1) from the container body 2 to the lid 3 described later is defined as the front direction D11, and the opposite direction is the rear direction (the back side direction). This is defined as D12, and these are collectively defined as the front-rear direction D1. Further, a direction (upward direction in FIG. 1) from the lower wall 24 described later to the upper wall 23 is defined as an upward direction D21, and the opposite direction is defined as a downward direction D22. Define. Further, a direction from the second side wall 26 to be described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32. Are defined as a horizontal direction D3. In the main figure, arrows indicating these directions are shown.

  The substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin one used in the industry. The substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm to 450 mm.

  As shown in FIG. 1, the substrate storage container 1 is used as an in-process container for storing a substrate W made of a silicon wafer or the like as described above and transporting it in a process in a factory. It is used as a shipping container for transporting a substrate by a transportation means such as a maritime means, and includes a container body 2, a lid 3, a substrate support plate-like portion 5, and a back side substrate support portion 6 (FIG. 3) and a front retainer 7 (see FIG. 3).

  The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

  The substrate support plate-like portions 5 are provided on the wall portion 20 so as to form a pair in the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the substrate support plate-like portion 5 abuts the edges of the plurality of substrates W to separate the adjacent substrates W at a predetermined interval. The edges of the plurality of substrates W can be supported in a state where they are aligned in parallel. A back side substrate support portion 6 is provided on the back side of the substrate support plate-like portion 5.

  The back side substrate support 6 is provided on the wall 20 so as to form a pair with a front retainer 7 described later in the substrate storage space 27. The back side substrate support portion 6 can support the rear portions of the edges of the plurality of substrates W by contacting the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. It is.

  The lid 3 can be attached to and detached from the opening peripheral edge 31 (FIG. 1 and the like) forming the container main body opening 21 and can close the container main body opening 21. The front retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.

  The front retainer 7 can support the front portions of the edges of the plurality of substrates W by contacting the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. When the container main body opening 21 is closed by the lid 3, the front retainer 7 supports a plurality of substrates W in cooperation with the back substrate support 6, thereby allowing adjacent substrates W to be predetermined. A plurality of substrates W are held in a state where they are spaced apart and arranged in parallel.

  The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin of the material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutyl. Examples thereof include thermoplastic resins such as terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. When imparting electrical conductivity to these molding material resins, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added. It is also possible to add glass fiber, carbon fiber or the like in order to increase the rigidity.

Hereinafter, each part will be described in detail.
As shown in FIG. 1 and the like, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-described materials and are integrally formed.

  The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. The opening peripheral part 31 which forms is comprised.

  The opening peripheral edge 31 is provided at one end of the container body 2, and the back wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 31 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

  A base fixing portion 210 is provided on the back wall 22. As shown in FIG. 8, a pair of base fixing portions 210 are provided in the vicinity of both end portions in the left-right direction of the back wall 22 and in the central portion in the up-down direction D2. The base fixing part 210 has a horizontal extension part 221 and an L-shaped part 231. The horizontal extension 221 protrudes from the inner surface of the back wall 22 toward the front direction D11 and extends in a straight line in the left-right direction D3. The L-shaped portions 231 are respectively provided below the horizontal extending portions 221, protrude from the inner surface of the back wall 22 toward the front direction D11, bend at the protruding end portions, and downward until reaching a predetermined position. It extends to D22. For this reason, the L-shaped portion 231 has an L-shape when viewed from the side. A rib 235 is provided at the center position of the L-shaped portion 231 in the left-right direction D3. The rib 235 protrudes upward from the upper surface of the L-shaped portion 231 in the portion where the L-shaped portion 231 extends in the forward direction D11, and the L-shaped portion 231 extends in the downward direction D22. In the part, it protrudes from the front surface of the L-shaped part 231 toward the front direction D11.

  As shown in FIG. 1, latch engaging recesses 40 </ b> A and 40 </ b> B that are recessed toward the outside of the substrate storage space 27 in the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge 31. , 41A, 41B are formed. A total of four latch engagement recesses 40A, 40B, 41A, 41B are formed in the vicinity of the left and right ends of the upper wall 23 and the lower wall 24, one each.

  As shown in FIG. 1, ribs 28 are integrally formed with the upper wall 23 on the outer surface of the upper wall 23. The ribs 28 increase the rigidity of the container body. A top flange 29 is fixed to the central portion of the upper wall 23. The top flange 29 is a member that is a portion that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer conveyance system), PGV (wafer substrate conveyance carriage), or the like.

  As shown in FIGS. 1 and 2, at the four corners of the lower wall 24, air supply holes 45 and exhaust holes 46, which are two types of through holes, are formed as ventilation paths. In the present embodiment, the two through holes at the front part of the lower wall 24 are exhaust holes 46 for discharging the gas inside the container body 2, and the two through holes at the rear part are the container body 2. It is the air supply hole 45 for supplying gas inside. An air supply filter portion 80 is disposed in the through hole as the air supply hole 45, and an exhaust filter portion 81 is disposed in the through hole as the exhaust hole 46. Therefore, the gas flow paths inside the air supply filter unit 80 and the exhaust filter unit 81 constitute a part of a ventilation path that allows the substrate storage space 27 and the space outside the container body 2 to communicate with each other. In addition, the air supply filter unit 80 and the exhaust filter unit 81 are disposed on the wall 20, and the air supply filter unit 80 and the exhaust filter unit 81 pass through the filter 83 to the outside of the container body 2. Gas can pass between this space and the substrate storage space 27.

  As shown in FIG. 4, the air supply filter unit 80 includes a housing 82 as a filter unit housing, a filter 83, and a check valve 84. The filter 83 and the check valve 84 are fixed to the housing 82. The filter 83 is disposed in the ventilation path, and is disposed closer to the substrate storage space 27 than the check valve 84. The air supply filter unit 80 can pass gas only from the space outside the container body 2 to the substrate storage space 27 through the filter 83 by the check valve 84. At that time, the filter 83 prevents particles contained in the gas from the external space of the container body 2 from passing through.

  The exhaust filter unit 81 has the same configuration as the air supply filter unit 80. However, the function of the check valve is different from the function of the check valve 84 for air supply, and the substrate storage space 27 is provided. Gas can only pass through to the space outside the container body 2.

  As shown in FIG. 3, the gas ejection control mechanism 101 is provided in the vicinity of the inner surface of the back wall 22 of the substrate storage space 27 of the container body 2. Two gas ejection control mechanisms 101 are provided facing each other in the left-right direction. In FIG. 3, only one gas ejection control mechanism 101 appears. As the gas ejection control mechanism 101, polyethylene, polypropylene, or the like can be used in addition to the resin of the substrate storage container 1 described above. Although a pair of gas ejection control mechanisms 101 are provided, the left gas ejection control mechanism 101 will be described since the gas ejection control mechanism 101 has a symmetrical shape, and the description of the right gas ejection control mechanism 101 will be omitted.

  The gas ejection control mechanism 101 is disposed above the air supply hole 45 (see FIG. 2). As shown in FIG. 4, the gas ejection control mechanism 101 has a plurality of openings 130 as gas ejection nozzles that supply the gas that has flowed into the ventilation path inside the air supply filter unit 80 to the substrate storage space 27. The gas supply section 110, the supply air filter section 80, and the tubular gas distribution section 110 are connected to each other so that the gas can be circulated from the supply air filter section 80 to the tubular gas distribution section 110 as a gas ejection nozzle section. And a connecting portion 120 for the purpose. The tubular gas circulation part 110 has a substantially cylindrical shape whose top end is closed, whose lower end part is open, and which becomes thinner as it approaches the upper end part from the lower end part. Is fixed to the lower wall 24 via a connecting portion 120.

  The tubular gas circulation part 110 has an opening 130. The opening 130 opens toward the substrate storage space 27. The inside of the tubular gas circulation part 110 is hollow. The size and arrangement of the openings 130 can be appropriately designed so that the flow rate of the gas ejected from each opening 130 is uniform. In this embodiment, between the substrates W adjacent in the vertical direction D2 between the first to fourteenth substrates W among the plurality of substrates W stored in the vertical direction D2 in the substrate storage container 1. The opening part 130 is arrange | positioned so that it may eject.

  Further, the tubular gas circulation part 110 has a central support member engaging recess 113. As shown in FIG. 5, in the tubular gas circulation part 110, the central support member engagement recess 113 is formed between the sixth opening part 130 from the top and the seventh opening part 130 from the top. A pair is formed at 110 in the circumferential diameter position. Each of the central support member engaging recesses 113 is recessed inward in the radial direction of the tubular gas circulation part 110 and extends in the vertical direction D2.

  Further, as shown in FIG. 5, the tubular gas circulation part 110 has an upper support member engagement recess 115. A pair of upper support member engaging recesses 115 are formed between the first opening 130 from the top and the second opening 130 from the top at the diameter position in the circumferential direction of the tubular gas flow part 110. . Each of the upper support member engaging recesses 115 is recessed inward in the radial direction of the tubular gas circulation part 110 and extends in the vertical direction D2.

  Moreover, as shown in FIG. 3 etc., the tubular gas circulation part 110 has a predetermined height between the lower wall 24 and the upper wall 23. In the present embodiment, the tubular gas circulation part 110 has a height at which the uppermost opening 130 can be disposed between the 13th and 14th sheets from the bottom of the substrate W stored in the container body 2. Yes.

  The tubular gas flow part 110 is supported by a support member 160. That is, the tubular gas circulation part 110 has a central support member engagement recess formed in a central part 117 between a lower end part 116 as one end part of the tubular gas circulation part 110 and an upper end part 118 as the other end part. 113 is engaged to support the central portion 117. Here, the central portion 117 means a portion of a region having a predetermined spread in the vertical direction D2, including a portion at an intermediate position between the upper end and the lower end of the tubular gas circulation portion 110. Similarly, the lower end portion 116 means a portion of a region having a predetermined spread in the upward direction D21 including the lower end portion of the tubular gas circulation portion 110. Moreover, the upper end portion 118 means a portion of a region having a predetermined spread in the downward direction D22 including the upper end portion of the tubular gas circulation portion 110.

  The support member 160 has a center support member 170 that engages with the center support member engagement recess 113 and supports the center portion 117. The central support member 170 has a support member base 171, an extended arm 172, and a central partial engagement portion 176. A pair of central support members 170 constituting the support member 160 are provided, but since they have a symmetrical shape, the left central support member 170 will be described, and the right central support member 170 will be described. Omitted.

  The support member base 171 is fixed to the base fixing part 210 of the back wall 22 constituting the wall part 20. Specifically, as shown in FIGS. 5 to 7, the support member base portion 171 includes a substantially rectangular plate-like base portion 1711, a rear surface side protruding portion 1712, and a front surface side rib that are integrally formed and connected to each other. 1713 and a central through hole 1714.

  The central through-hole 1714 (see FIG. 7) is formed in the plate-like base portion 1711 and has a rectangular shape. A pair of surface side ribs 1713 (see FIG. 5) are provided extending from the upper end to the lower end of the plate-like base portion 1711 along a pair of sides of the central through hole 1714 along the vertical direction D2. Projecting in the forward direction D11 from the surface of the base 1711. The upper part of the plate-like base portion 1711 is formed so as to span the protruding end portions in the front direction D11 of the surface side rib 1713. A protrusion 1715 (see FIG. 12) is provided on the surface side rib 1713 located below the plate-like base portion 1711 so as to protrude toward the other surface side rib 1713.

  A pair of surface side ribs 1713 located on the upper part of the plate-like base portion 1711 has a horizontal extension portion engaging groove 1717 that is recessed in a direction (left-right direction D3) in which the pair of surface side ribs 1713 are separated from each other. (See FIG. 7). The horizontal extending portion engaging groove 1717 is formed from the foremost end of the surface-side rib 1713 to the upper portion of the plate-like base portion 1711 in the rear direction D12. The portion of the pair of surface side ribs 1713 from the pair of surface side ribs 1713 located at the upper end portion of the plate-like base portion 1711 to the horizontal extension portion engaging groove 1717 is spaced downward. It has the taper-shaped part 1718 which becomes narrow as it progresses to D22, ie, approaches the horizontal extension part engaging groove 1717. In the horizontal extension portion engaging groove 1717, the distance between the pair of surface side ribs 1713 is slightly wider than the narrowest portion of the tapered portion 1718.

  The rear surface side protruding portions 1712 are provided at the four corners of the substantially rectangular plate-shaped base portion 1711 and protrude in the rear direction D12 in a hemispherical shape. Adjustment of the protrusion height of the center part engaging part 176 from the back wall 22 is performed by adjusting the protrusion amount of the back surface side protrusion part 1712.

As shown in FIG. 5 and the like, the extending arm portion 172 extends from the left end portion of the lower part of the plate-like base portion 1711 in the left direction D31, bends in the front direction D11, and moves in the front direction D11, that is, in the container body opening 21. Extends in the direction.
The central part engaging part 176 has a shape along the outer surface of the central part 117 in the vertical direction D2 of the tubular gas flow part 110. That is, the center part engaging part 176 has a substantially semicircular shape, and the center part 117 of the center part engaging part 176 is located and connected to the extending end part of the extending arm part 172. . The front end portion of the central portion engaging portion 176, that is, the front end portion, is provided with an arm portion hook portion 1863 that protrudes in the diameter direction of the central portion engaging portion 176. The arm hook portion 1763 can be engaged with the central support member engaging recess 113, and the central support member 170 supports the tubular gas flow portion 110 by this engagement.

  As shown in FIG. 1 and the like, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 31 of the container body 2. The lid 3 can be attached to and detached from the opening peripheral edge 31 of the container main body 2, and the lid 3 can close the container main body opening 21 by attaching the lid 3 to the opening peripheral edge 31. . It is the inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1), at the position in the rearward direction D12 of the opening peripheral edge 31 when the lid 3 closes the container body opening 21. An annular seal member 4 is attached to a surface facing the formed stepped portion surface (seal surface 30). The seal member 4 is made of various types of thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluorine rubber, and silicon rubber. The seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.

  When the lid 3 is attached to the opening peripheral edge 31, the seal member 4 is sandwiched between the seal surface 30 and the inner surface of the lid 3, and is elastically deformed. The lid 3 seals the container body opening 21. Shuts down in a closed state. By removing the lid 3 from the opening peripheral edge 31, the substrate W can be taken in and out of the substrate storage space 27 in the container body 2.

  The lid body 3 is provided with a latch mechanism. The latch mechanism is provided in the vicinity of both left and right ends of the lid 3, and as shown in FIG. 1, two upper latch portions 32A and 32B that can project in the upward direction D21 from the upper side of the lid 3, and the lid 3, two lower latch portions (not shown) that can project in the downward direction D22 from the lower side of 3. The two upper latch portions 32 </ b> A and 32 </ b> B are disposed in the vicinity of the left and right ends of the upper side of the lid 3, and the two lower latch portions are disposed in the vicinity of the left and right ends of the lower side of the lid 3.

  An operation unit 33 is provided on the outer surface of the lid 3. By operating the operation portion 33 from the front side of the lid body 3, the upper latch portions 32A and 32B and the lower latch portion (not shown) can be protruded from the upper side and the lower side of the lid body 3, It can be set as the state which does not protrude from a lower side. The upper latch portions 32A and 32B protrude from the upper side of the lid 3 in the upward direction D21, engage with the latch engagement recesses 40A and 40B of the container body 2, and the lower latch portion (not shown) is the lid. The lid 3 is fixed to the opening peripheral edge 31 of the container body 2 by projecting in the downward direction D22 from the lower side of the container 3 and engaging with the latch engagement recesses 41A and 41B of the container body 2.

  A recess 35 (see FIG. 3) that is recessed outward from the substrate storage space 27 is formed inside the lid 3. A front retainer 7 is fixed to the recess 35 and the portion of the lid 3 outside the recess 35.

  As shown in FIG. 3, the front retainer 7 has a front retainer substrate receiving portion 71. Two front retainer substrate receiving portions 71 are arranged in pairs in the left-right direction D3 so as to be spaced apart at a predetermined interval. The front retainer substrate receiving portions 71 arranged in pairs so as to form a pair in this way are provided in a state where 25 pairs are juxtaposed in the vertical direction D2. When the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the front retainer substrate receiving portion 71 holds the edge of the edge of the substrate W and supports it.

The support of the tubular gas circulation part 110 by the support member 160 in the substrate storage container 1 as described above will be described.
First, the pair of central support members 170 are fixed to the fixing portion of the back wall. Specifically, the L-shaped portion 231 of the base fixing portion 210 is inserted into the central through hole 1714 of the plate-shaped base portion 1711, and the central support member 170 is moved upward relative to the L-shaped portion 231. . Thus, the L-shaped portion 231 is engaged with the lower portion of the plate-like base portion 1711 of the central support member 170 in a state where it is caught. Accordingly, the horizontal extension portion 221 is guided to the horizontal extension portion engaging groove 1717 by the tapered portion 1718 of the plate-like base portion 1711. And the protrusion 1715 provided in the part of the surface side rib 1713 located in the lower part of the plate-shaped base part 1711 contacts the surface side rib 1713, and the horizontal extension part 221 is fitted in the horizontal extension part engagement groove 1717. By doing so, the center support member 170 (support member 160) having the plate-like base portion 1711 to the base fixing portion 210 of the back wall 22 is positioned and fixed.

  Next, the central support member engaging recess 113 is engaged with the central portion engaging portion 176 of the central support member 170 fixed to the base fixing portion 210. Specifically, from the state shown in FIG. 5, the tubular gas flow part 110 is moved in the rearward direction D12 with respect to the central part engaging part 176, and as shown in FIG. The tubular gas circulation part 110 is fitted between the pair of arm part hook parts 1863 of the part 176. Thereby, a pair of arm part hook parts 1863 are each engaged with the center support member engagement recessed part 113, and the center part engagement part 176 of the center support member 170 is the center part of the tubular gas circulation part 110 in the up-down direction D2. 117 is fixed. As a result, in the substrate storage container 1, the central portion 117 of the tubular gas circulation part 110 in the vertical direction D <b> 2 is supported by the central support member 170. 5 and 6, the back wall 22 and the base fixing part 210 are not shown for convenience.

  According to the substrate storage container 1 according to the embodiment having the above configuration, the following effects can be obtained.

As described above, the substrate storage container 1 includes the cylindrical wall portion 20 in which the container main body opening 21 is formed at one end and the other end is closed, and a plurality of substrates W are stored by the inner surface of the wall portion 20. A container main body 2 in which a substrate storage space 27 communicating with the container main body opening 21 is formed, and a lid 3 detachable from the container main body opening 21 and capable of closing the container main body opening 21. And a vent path that allows the substrate storage space 27 and the space outside the container body 2 to communicate with each other, and a filter disposed in the vent path. A filter part through which gas can pass between the space and the substrate storage space 27; a tubular gas circulation part 110 as a gas ejection nozzle part for supplying the gas flowing into the ventilation path of the filter part to the substrate storage space 27; Is provided.
The substrate storage container 1 is engaged with at least one or more places of the tubular gas circulation part 110 including a central portion 117 between one end (upper end 118) and the other end (lower end 116) of the tubular gas circulation part 110. The support member 160 that supports at least the central portion 117 is provided.

  With this configuration, since the support member 160 supports the central portion 117, the support member 160 can suppress the displacement of the central portion 117. For this reason, it can suppress that a vibration generate | occur | produces in the tubular gas circulation part 110 during ejection of purge gas, or the position shift of the tubular gas circulation part 110 with respect to the container main body 2 generate | occur | produces. And it can suppress that the components which comprise the board | substrate storage container 1 rub against each other by generation | occurrence | production of such a vibration, and a particle | grain generate | occur | produces. Further, it is possible to prevent the purge gas from being uniformly distributed in the substrate storage space 27 due to the occurrence of such vibrations and deviations.

  Compared with the case where the tubular gas circulation part 110 is not supported, the front-rear direction D1, the vertical direction D2 and the vertical direction D2 of the tubular gas circulation part 110 with respect to external stresses such as vibration and acceleration acting on the substrate storage container 1, and It is possible to suppress a shift in the left-right direction D3, a change in posture, a twist of the central portion 117 in the circumferential direction of the central portion 117 around the axis of the central portion 117, and the like. As a result, even the substrate storage container 1 that has been used for a long period of time can be prevented from reducing the efficiency of gas purge, and can be uniformly replaced with an inert gas.

  In addition, the support member 160 includes a center support member 170 that engages with the center portion 117 and supports the center portion 117. The central support member 170 includes a support member base portion 171 fixed to the wall portion 20, an extension arm portion 172 extending from the support member base portion 171 toward the container body opening 21, and an extension end portion of the extension arm portion 172. A central portion engaging portion 176 located at the center.

  With this configuration, since the central portion engaging portion 176 engages with the central portion 117 of the tubular gas circulation portion 110 in the vertical direction, the tubular gas circulation portion 110 centered on the axial center of the tubular gas circulation portion 110 due to secular change. Twist and the like can be reliably suppressed. Further, the central support member 170 has an extending arm portion 172 extending from the support member base portion 171 toward the container body opening 21. For this reason, it is possible to move the tubular gas flow part 110 in the direction from the container main body opening 21 to the inner wall 22 and engage with the central part engaging part 176.

  In addition, the support member 160 includes a center support member 170 that engages with the center portion 117 and supports the center portion 117. The central support member 170 has a central portion engaging portion 176 that engages with the central portion 117. The central part engaging portion 176 has a shape along the outer surface of the central part 117.

  With this configuration, the central portion engaging portion 176 engages along the outer surface of the central portion 117 of the tubular gas flow portion 110 in the vertical direction, so that the central portion engaging portion 176 is attached to the central portion 117 of the tubular gas flow portion 110. It is possible to stably maintain the engaged state.

  Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to FIG. FIG. 9 is a cross-sectional view showing a substrate storage container 1A according to the second embodiment of the present invention.

  In the substrate storage container according to the second embodiment, the length of the tubular gas circulation part 110A in the vertical direction D2 is different from that of the tubular gas circulation part 110 in the first embodiment. Accordingly, the center support member 170 is fixed to the back wall 22 so that the center portion engagement portion 176 can be engaged with the center support member engagement recess 113 formed at the center position in the longitudinal direction of the tubular gas circulation portion 110. It differs from 1st Embodiment by the point by which the base fixing | fixed part 210 (refer FIG. 8) to arrange | position is arrange | positioned. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

  In the tubular gas circulation part 110A, the uppermost opening 130 is arranged between the 24th and 25th sheets (between the 1st sheet and the 2nd sheet from the top) from the bottom of the substrate W stored in the container body 2. It has a possible height. Therefore, the openings 130 are also arranged between the substrates W adjacent in the vertical direction D2 from the 14th to the 25th substrate from the bottom of the substrate W stored in the container body 2. A pair of central support member engaging recesses 113 are formed between the twelfth opening 130 from the bottom and the thirteenth opening 130 from the bottom at the diameter position in the circumferential direction of the tubular gas flow part 110. . The central portion engaging portion 176 is engaged with the central supporting member engaging recess 113, and the central supporting member 170 is fixed to the base fixing portion 210 (see FIG. 8). Thereby, the tubular gas circulation part 110 </ b> A is fixed to the base fixing part 210 of the back wall 22 by the central support member 170.

  Next, a substrate storage container according to a third embodiment of the present invention will be described with reference to FIG. FIG. 10 is a perspective view showing a state in which the tubular gas circulation part 110 of the substrate storage container according to the third embodiment of the present invention is supported by the center support member 170 and the other end support member 180B.

  In the substrate storage container according to the third embodiment, the support member 160B further includes an upper end portion 118 (see FIG. 5) as the other end portion of the tubular gas circulation portion 110 in addition to the central support member 170 in the first embodiment. It differs from 1st Embodiment by the point which has the other end part support member 180B which supports 1st. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

The other end support member 180B includes a support member base 171, an extending arm 172, the other end engagement portion 176 </ b> B, and an end surface abutting portion 183 </ b> B.
A pair of the other end support members 180B are provided, but have a symmetrical shape. Therefore, the other end support member 180B on the left side will be described, and the other end support member 180B on the right side will be described. Omitted. Further, the support member base 171 and the extension arm 172 are the same as the support member base 171 and the extension arm 172 of the central support member 170 in the first embodiment, and thus description thereof is omitted. Further, the other end portion engaging portion 176B has a slightly smaller radius than the central portion engaging portion 176 of the central support member 170 in the first embodiment, and the arm portion hook portion 1763B is a tubular gas flow portion. 110 is different from the central portion engaging portion 176 in the first embodiment in that it can be engaged with the upper support member engaging recess 115 of the first embodiment, but the other configuration is the central portion engaging portion 176 in the first embodiment. Since it is the same, description is abbreviate | omitted.

  The end surface abutting portion 183B extends from the upper left end of the plate-like base portion 1711 in the left direction D31, bends in the front direction D11, extends in the front direction D11, that is, in the direction of the container body opening 21, and The extending end portion 1831B of the contact portion 183B is located above the other end portion engaging portion 176B having a substantially semicircular shape. The end surface abutting portion 183B is thick with a thickness in the vertical direction D2 of the portion on the left side from the upper left end portion of the plate-like base portion 1711 to the position above the other end engaging portion 176B. Part 1832B. The arm hook portion 1763B of the other end engaging portion 176B is engaged with the upper support member engaging recess 115 of the tubular gas circulation portion 110, and the other end support member 180B is at the upper end portion of the tubular gas circulation portion 110. When the upper end 118 of the tubular gas circulation part 110A is supported by the other end support member 180B, the extended end of the end surface abutting part 183B is connected to the upper end surface 111 of the tubular gas circulation part 110. Abut.

  According to the substrate storage container according to the embodiment having the above configuration, the following effects can be obtained.

  As described above, the support member 160B engages with the other end portion (upper end portion 118 (see FIG. 5)) of the tubular gas circulation portion 110 as the gas ejection nozzle portion, and the upper end portion 118 of the tubular gas circulation portion 110 is engaged. It further has the other end part supporting member 180B to support. The other end support member 180B includes the other end engaging portion 176B that engages with the upper end portion 118 of the tubular gas circulation portion 110, and an end surface abutting portion 183B that abuts against the end surface of the upper end portion 118 of the tubular gas circulation portion 110. Have.

  With this configuration, as in the first embodiment, in addition to being able to support the central portion 117 of the tubular gas circulation portion 110 in the vertical direction D2 by the central support member 170, as the other end portion of the tubular gas circulation portion 110, Can be supported by the other end support member 180B. For this reason, it is possible to support the whole tubular gas circulation part 110 with sufficient balance.

  Next, a substrate storage container according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 11 is a perspective view showing a state before the tubular gas circulation part 110C of the substrate storage container according to the fourth embodiment of the present invention is supported by the central support member 170C.

  In the substrate storage container according to the fourth embodiment, the configuration of the central portion engaging portion 176C is different from the configuration of the central portion engaging portion 176 in the first embodiment. Further, the configuration of the tubular gas circulation part 110C with which the central part engagement part 176C is engaged is different from the configuration of the tubular gas circulation part 110 in the first embodiment. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

  The central partial engagement portion 176C has an annular shape having a positional relationship in which the axis coincides with the vertical direction D2. The tubular gas flow part 110C can be inserted into the through hole 1762C in the center part of the center part engaging part 176C. The tubular gas flow part 110C has an engaged annular groove 113C. The engaged annular groove 113C goes around the tubular gas circulation part 110C around the tubular gas circulation part 110C between the seventh opening 130 from the bottom and the eighth opening 130 from the bottom. Is formed. When the tubular gas circulation part 110C is inserted into the through hole 1762C of the central part engagement part 176C from the upper end part of the tubular gas circulation part 110C, the central part engagement part 176C is fitted into the engaged annular groove 113C. , Is configured to engage. In this engaged state, the central support member 170C can support the central portion 117C of the tubular gas flow part 110C in the up-down direction D2.

  Next, a substrate storage container according to a fifth embodiment of the present invention will be described with reference to FIG. FIG. 12 is a perspective view showing a state in which the tubular gas circulation part 110D of the substrate storage container according to the fifth embodiment of the present invention is supported by the central support member 170D.

  In the substrate storage container according to the fifth embodiment, the configuration of the central portion engaging portion 176D is different from the configuration of the central portion engaging portion 176C in the fourth embodiment. Further, the configuration of the tubular gas circulation part 110D with which the central part engagement part 176D engages is different from the configuration of the tubular gas circulation part 110C in the fourth embodiment. Since the configuration other than this is the same as the configuration of the substrate storage container according to the fourth embodiment, the same configuration as each configuration in the fourth embodiment is denoted by the same reference numeral, and the description thereof is omitted.

  A vertical extending groove 113D is formed on the peripheral surface of the tubular gas circulation part 110D. As described above, the tubular gas circulation portion 110D has 13 openings 130 arranged in a line in the vertical direction D2, and a plurality of rows are formed in the circumferential direction of the tubular gas circulation portion 110D. An upper and lower extension groove 113D is formed between a predetermined column of the plurality of columns and another column adjacent to the predetermined column. The vertical extending groove 113 </ b> D extends from the position between the first opening 130 and the second opening 130 from the top to the position between the sixth opening 130 and the seventh opening 130 from the top. It extends to the end. The cross-sectional shape of the vertically extending groove 113D cut along the horizontal plane has a V-shape, and the V-shape expands in the downward direction D22.

  The central portion engaging portion 176D has a V-shaped convex portion 1863D. The V-shaped convex part 1763D is a part of the central part engaging part 176D having an annular shape, and the central part engaging part from the inner peripheral surface of the part in the diameter position with respect to the part connected to the extending arm part 172 It protrudes toward the center of 176D and has a V-shape when viewed in the axial direction of the central portion engaging portion 176D.

The support of the tubular gas circulation part 110D by the central support member 170D in the substrate storage container as described above will be described.
First, when the tubular gas circulation part 110D is inserted from the upper end of the tubular gas circulation part 110D into the through hole in the central part of the central part engagement part 176D, the V-shaped convex part 1763D becomes the vertical extension groove 113D. Engage. Further, when the tubular gas circulation part 110D is moved in the upward direction D21 with respect to the central part engaging part 176D, the V-shaped convex part 1763D is formed at the lower end part of the vertically extending groove 113D where the V-shaped part is expanded most. It is fixed to the tubular gas flow part 110D. Thereby, the center part engaging part 176D of center support member 170D is fixed to the center part 117D of the tubular gas circulation part 110D in the up-down direction D2.

  Next, the pair of central support members 170 </ b> D are fixed to the base fixing portion 210 of the back wall 22. As a result, the central support member 170D fixed to the base fixing part 210 of the back wall 22 is in a state where the central part 117D of the tubular gas circulation part 110D in the vertical direction D2 is supported.

The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.
For example, the configuration of each part of the substrate storage container, specifically, the shape of the gas ejection nozzle part, the support member, the container body, the lid, etc., and the number and dimensions of the substrates W that can be stored in the container body are as follows. It is not limited to the configuration of each part of the substrate storage container in the embodiment.
For example, the support member may be engaged with at least one or more portions of the gas ejection nozzle portion including the central portion between the one end portion and the other end portion of the gas ejection nozzle portion to support at least the central portion.
Further, for example, the central support member engagement recess 113 and the upper support member engagement recess 115 in the first embodiment may not be formed. In this case, for example, the arm hook portion 1863 may engage with the portion of the opening portion 130 of the tubular gas circulation portion 110 so as not to narrow or close the opening portion 130.
Further, for example, the end surface abutting portion 183B in the third embodiment may have elasticity so as to be relatively displaceable with respect to the other end portion engaging portion 176B. Moreover, although the tubular gas circulation part 110 had the substantially cylindrical shape with which the upper end part 118 was obstruct | occluded and the lower end part 116 was opened, it is not limited to this structure. For example, the outer shape of the cross-sectional shape cut in the horizontal direction may have a triangular shape or a quadrangular shape.

DESCRIPTION OF SYMBOLS 1, 1A Substrate storage container 2 Container main body 3 Lid 20 Wall part 21 Container main body opening part 27 Substrate storage space 80 Air supply filter part (filter part)
83 Filter 110 Tubular gas circulation part (gas ejection nozzle part)
111 Upper end surface (end surface of the other end)
117, 117D central portion 160 support member 170 central support member 171 support member base 172 extended arm portions 176, 176C, 176D central portion engagement portion 176B other end portion engagement portion 180B other end portion support member 183B end surface contact portion W substrate

Claims (5)

A substrate housing that includes a cylindrical wall portion that is formed with a container body opening at one end and is closed at the other end, and can accommodate a plurality of substrates by the inner surface of the wall and communicate with the container body opening. A container body in which a space is formed;
A lid that can be attached to and detached from the container body opening, and can close the container body opening;
An air passage that allows communication between the substrate storage space and a space outside the container body; and a filter disposed in the air passage, and is disposed on the wall portion and passes through the filter to the outside of the container body. A filter portion through which gas can pass between the space and the substrate storage space;
A gas ejection nozzle part for supplying the gas flowing into the ventilation path of the filter part to the substrate storage space,
A substrate storage container comprising a support member that engages at least one portion of the gas ejection nozzle portion including a central portion between one end portion and the other end portion of the gas ejection nozzle portion and supports at least the central portion. . The support member has a center support member that engages the center portion and supports the center portion;
The central support member is positioned at a support member base fixed to the wall, an extended arm extending from the support member base toward the container body opening, and an extended end of the extended arm. The substrate storage container according to claim 1, further comprising: a central part engaging portion that performs. The support member further includes another end support member that engages with the other end portion of the gas ejection nozzle portion and supports the other end portion of the gas ejection nozzle portion,
The other end support member includes: an other end engaging portion that engages with the other end of the gas ejection nozzle portion; and an end surface abutting portion that contacts the end surface of the other end of the gas ejection nozzle portion. The substrate storage container according to claim 2.   The substrate storage container according to claim 3, wherein the end surface abutting portion has elasticity so as to be relatively displaceable with respect to the other end portion engaging portion. The support member has a center support member that engages the center portion and supports the center portion;
The central support member has a central portion engaging portion that engages with the central portion,
The said center part engaging part is a substrate storage container in any one of Claims 1-4 which has a shape along the outer surface of the said center part.

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