JP2017187480A - Resin solidification piece preparation tool - Google Patents

Resin solidification piece preparation tool Download PDF

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JP2017187480A
JP2017187480A JP2017054964A JP2017054964A JP2017187480A JP 2017187480 A JP2017187480 A JP 2017187480A JP 2017054964 A JP2017054964 A JP 2017054964A JP 2017054964 A JP2017054964 A JP 2017054964A JP 2017187480 A JP2017187480 A JP 2017187480A
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resin
hole
jig
piece
frame
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JP6746523B2 (en
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正和 木村
Masakazu Kimura
正和 木村
昭弘 麻生
Akihiro Aso
昭弘 麻生
木村 昌弘
Masahiro Kimura
昌弘 木村
吉田 仁
Hitoshi Yoshida
仁 吉田
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JX Nippon Mining and Metals Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a resin solidification piece preparation tool capable of preparing a resin solidification piece having a suitable shape and size.SOLUTION: A resin solidification piece preparation tool 300 comprises: a first tool 100 having a rectangular parallelepiped shape space formed by a through hole 12 having a cross-section rectangle having a length of 2-12 mm and a width of 1-3 mm and having a granular material sample and a resin injected into the through hole from the opening on one side of the through hole (an upper side) in the state that an opening on the other side (a lower side) of the through hole is blocked by a polymer film 40; and a second tool 200 for pushing a resin solidification piece by fitting the second tool from the opening on the one side (the upper side) into the through hole in the state that the resin is solidified in the through hole, and the blockage of the opening on the other side (the lower side) is released by the polymer film.SELECTED DRAWING: Figure 1

Description

本発明は、樹脂固結片作製治具に関する。   The present invention relates to a resin consolidated piece production jig.

粉粒体試料を分析する場合には、粉粒体試料を樹脂固結して作製される樹脂固結片を成型加工し、観察試料を作製する(例えば、特許文献1,2等参照)。また、樹脂固結片を成型加工する場合、観察断面をイオンミリング加工することがある。   When analyzing a powder sample, a resin-solidified piece produced by resin-solidifying the powder sample is molded to produce an observation sample (see, for example, Patent Documents 1 and 2). Further, when molding the resin consolidated piece, the observation cross section may be ion milled.

特開2015−40724号公報Japanese Patent Laying-Open No. 2015-40724 特開2015−114241号公報Japanese Patent Laying-Open No. 2015-114241

イオンミリング加工においては、樹脂固結片を遮蔽板と隙間なくホルダにセットする必要があり、このためには、樹脂固結片の少なくとも1組の隣接する2面のなす角度を略垂直にする必要がある。また、分析対象の観察試料は既存のホルダに保持させる必要があるため、大きさに制限がある。   In the ion milling process, it is necessary to set the resin consolidated piece on the holder without a gap with the shielding plate. For this purpose, the angle formed by at least one pair of adjacent two surfaces of the resin consolidated piece is made substantially vertical. There is a need. Moreover, since the observation sample to be analyzed needs to be held in an existing holder, the size is limited.

しかるに、現在のところ、上述したような条件を満たす粉粒体試料の樹脂固結片を作製するための有効な方法が提案されていない。例えば、既存のホルダに保持させるための小試料片を作製するためには、ある程度の大きさの樹脂固結片を作製した後に、所定の大きさまで切断し、研磨して成型する方法が考えられるが、小試料片が極めて小さい場合、切断や研磨の際に角が崩れるという問題があった。また、樹脂固結片に導入する粉粒体試料の中には、水分や熱によって変質する試料もあるが、その場合、切断や研磨作業時に観察面が水分と接触したり、摩擦により発生する熱により変質してしまうことにより、正確な分析ができないという問題があった。   However, at present, no effective method has been proposed for producing a resin-solidified piece of a granular sample that satisfies the above-described conditions. For example, in order to produce a small sample piece to be held by an existing holder, a method is conceivable in which a resin-solidified piece of a certain size is produced, then cut to a predetermined size, polished and molded. However, when a small sample piece is extremely small, there is a problem that corners are broken during cutting and polishing. In addition, some of the particulate samples introduced into the resin consolidated pieces may be altered by moisture or heat. In this case, the observation surface comes into contact with moisture or is generated by friction during cutting or polishing operations. There was a problem that accurate analysis could not be performed due to deterioration due to heat.

本発明は上記の課題に鑑みてなされたものであり、適切な形状及び大きさの樹脂固結片を作製することが可能な樹脂固結片作製治具を提供することを目的とする。   This invention is made | formed in view of said subject, and it aims at providing the resin-solidified piece preparation jig | tool which can produce the resin-solidified piece of a suitable shape and a magnitude | size.

本発明の樹脂固結片作製治具は、縦2〜12mm、横1〜3mmの断面長方形の貫通孔により直方体状の空間が形成され、前記貫通孔の一側の開口部が閉塞部材により閉塞された状態で前記貫通孔の他側の開口部から前記貫通孔内に粉粒体試料と樹脂が注入される第1の治具と、前記樹脂が前記貫通孔内で固結した状態、かつ前記閉塞部材による前記一側の開口部の閉塞が解除された状態で、前記他側の開口部から前記貫通孔に嵌入することで、前記粉粒体試料及び前記樹脂を含む樹脂固結片を押し出す第2の治具と、を備える。   In the resin-bonded piece manufacturing jig of the present invention, a rectangular parallelepiped space is formed by a through hole having a rectangular section of 2 to 12 mm in length and 1 to 3 mm in width, and an opening on one side of the through hole is closed by a closing member A first jig in which a granular material sample and a resin are injected into the through-hole from the opening on the other side of the through-hole in a state of being formed, and the resin is solidified in the through-hole; and In a state where the opening on the one side by the closing member is released, the resin solidified piece containing the powder sample and the resin is inserted into the through hole from the opening on the other side. A second jig to be extruded.

本発明の樹脂固結片作製治具は、適切な形状及び大きさの樹脂固結片を作製することができるという効果を奏する。   The resin-consolidated piece preparation jig of the present invention has an effect that a resin-consolidated piece having an appropriate shape and size can be prepared.

一実施形態に係る樹脂固結片作製治具の構成を示す斜視図である。It is a perspective view which shows the structure of the resin consolidation piece preparation jig which concerns on one Embodiment. 図2(a)〜図2(c)は、樹脂固結片の作製方法について説明するための図である。Fig.2 (a)-FIG.2 (c) are the figures for demonstrating the production method of a resin consolidated piece. 樹脂固結片を示す斜視図である。It is a perspective view which shows a resin consolidated piece. 図4(a)〜図4(c)は、樹脂固結片をホルダスタンドにセットする手順について説明するための図である。FIG. 4A to FIG. 4C are diagrams for explaining the procedure for setting the resin consolidated piece on the holder stand. 図5(a)、図5(b)は、樹脂固結片の隣接する2面が90°の場合のイオン研磨について模式的に示す図である。FIG. 5A and FIG. 5B are diagrams schematically showing ion polishing in the case where two adjacent surfaces of the resin consolidated piece are 90 °. 図6(a)、図6(b)は、樹脂固結片の隣接する2面が90°でない場合のイオン研磨について模式的に示す図である。FIG. 6A and FIG. 6B are diagrams schematically showing ion polishing in the case where two adjacent surfaces of the resin consolidated piece are not 90 °.

以下、一実施形態に係る樹脂固結片作製治具について、図1〜図6に基づいて、詳細に説明する。図1は、一実施形態に係る樹脂固結片作製治具300の構成を概略的に示す斜視図である。   Hereinafter, the resin consolidated piece preparation jig according to an embodiment will be described in detail with reference to FIGS. FIG. 1 is a perspective view schematically showing a configuration of a resin consolidated piece producing jig 300 according to an embodiment.

樹脂固結片作製治具300は、最終的に走査型電子顕微鏡(SEM:Scanning Electron Microscope)において表面を分析、観察する観察試料の元になる樹脂固結片を作製するための治具であり、図1に示すように、第1の治具100と、第2の治具200とを備えている。   The resin-solidified piece preparation jig 300 is a jig for producing a resin-solidified piece that is the basis of an observation sample that is finally analyzed and observed by a scanning electron microscope (SEM). As shown in FIG. 1, a first jig 100 and a second jig 200 are provided.

第1の治具100は、略円柱状の形状を有し、2つの枠状部材10と、変形抑制部材としての樹脂部20と、有する。   The first jig 100 has a substantially columnar shape, and has two frame members 10 and a resin portion 20 as a deformation suppressing member.

枠状部材10は、例えば、ナイロンを材料とし、断面長方形の貫通孔12が形成された略筒状部材である。貫通孔12により、枠状部材10には、直方体状の空間が形成されている。貫通孔12の断面は、縦2〜12mm、横1〜3mmであるものとする。また、貫通孔12の深さは、6mm程度であるものとする。ここで、枠状部材10の貫通孔12を形成する内面は凹凸が少なく、平滑な状態となっている。なお、枠状部材10の材料としては、シリコン系や金属系等を用いてもよい。   The frame-like member 10 is a substantially cylindrical member made of, for example, nylon and having a through-hole 12 having a rectangular cross section. A rectangular parallelepiped space is formed in the frame-shaped member 10 by the through hole 12. The cross section of the through-hole 12 shall be 2-12 mm long and 1-3 mm wide. Moreover, the depth of the through-hole 12 shall be about 6 mm. Here, the inner surface forming the through hole 12 of the frame-shaped member 10 is smooth with few irregularities. In addition, as a material of the frame-shaped member 10, a silicon system, a metal system, etc. may be used.

樹脂部20は、エポキシ樹脂からなり、2つの枠状部材10の変形を抑えるために、枠状部材10の側面の周囲を取り囲む部材である。枠状部材内に粉粒体試料とともに樹脂を注入して固結する際に、注入した樹脂の圧力や固結時の体積変化の影響を受けて枠状部材が変形する恐れがあるが、樹脂部20により、枠状部材10の変形を抑制することができ、貫通孔12の断面形状を長方形に維持することができる。このように樹脂部20のような変形抑制部材を枠状部材の周囲に設けることにより、枠状部材として変形しやすい材質を選択しても問題が無くなる。このため、枠状部材の材質を選択する場合には、樹脂固結後に樹脂を押し出しやすい材質を優先的に選択することが可能となる。また、枠状部材のみでは治具として非常に小さいため樹脂固結後の押し出し作業時に枠状部材を固定するのが困難となり、作業性が低下するが、変形抑制部材を設けることで固定しやすくなり、作業性向上にもつながる。樹脂部20の上面と枠状部材10の上面とは面一になっており、樹脂部20の下面と枠状部材10の下面とは面一になっている。   The resin portion 20 is made of epoxy resin and is a member that surrounds the periphery of the side surface of the frame-shaped member 10 in order to suppress deformation of the two frame-shaped members 10. When the resin is injected into the frame-shaped member together with the granular sample and consolidated, the frame-shaped member may be deformed due to the pressure of the injected resin or the volume change during consolidation. The portion 20 can suppress the deformation of the frame-shaped member 10 and can maintain the cross-sectional shape of the through hole 12 to be rectangular. Thus, by providing a deformation suppressing member such as the resin portion 20 around the frame-shaped member, there is no problem even if a material that is easily deformed is selected as the frame-shaped member. For this reason, when selecting the material of the frame-like member, it is possible to preferentially select a material that can easily extrude the resin after the resin is consolidated. In addition, since the frame-shaped member alone is very small as a jig, it becomes difficult to fix the frame-shaped member during the extruding operation after resin consolidation, and the workability is lowered, but it is easy to fix by providing a deformation suppressing member. This also leads to improved workability. The upper surface of the resin part 20 and the upper surface of the frame member 10 are flush with each other, and the lower surface of the resin part 20 and the lower surface of the frame member 10 are flush with each other.

なお、第1の治具100を用いた樹脂固結片の作製時には、貫通孔12の一側(下側)の開口部を閉塞するように、第1の治具100の下面に閉塞部材としての高分子フィルム(例えば、PET(Polyethylene terephthalate)フィルム)40が設けられ、粘着テープ50(図2(a)参照)により固定される。高分子フィルム40は、ほとんど凹凸がない平坦な表面を有している。   Note that when the resin-bonded piece using the first jig 100 is manufactured, a closing member is provided on the lower surface of the first jig 100 so as to close the opening on one side (lower side) of the through hole 12. The polymer film (for example, PET (Polyethylene terephthalate) film) 40 is provided and fixed by an adhesive tape 50 (see FIG. 2A). The polymer film 40 has a flat surface with almost no unevenness.

なお、図1においては、第1の治具100に2つの枠状部材10が設けられているが、これに限らず、枠状部材10は1つ又は3つ以上設けられてもよい。   In FIG. 1, the two jigs 10 are provided on the first jig 100. However, the present invention is not limited to this, and one or three or more frames 10 may be provided.

第2の治具200は、土台部62と、押し出し板60と、を有する。土台部62は、略円柱形状を有し、押し出し板60の一端部が差し込まれた状態となっている。押し出し板60は、断面長方形の金属製の板である。押し出し板60は、第1の治具100の枠状部材10に形成された貫通孔12に嵌合する大きさを有する。すなわち、押し出し板60の断面長方形は、貫通孔12の断面長方形とほぼ同一又はわずかに小さい。なお、押し出し板60の土台部62とは反対側の端部(他端部)には、切り欠き60aが設けられている。   The second jig 200 has a base portion 62 and an extrusion plate 60. The base portion 62 has a substantially cylindrical shape, and is in a state in which one end portion of the extrusion plate 60 is inserted. The extrusion plate 60 is a metal plate having a rectangular cross section. The extrusion plate 60 has a size that fits into the through hole 12 formed in the frame-shaped member 10 of the first jig 100. That is, the cross-sectional rectangle of the extrusion plate 60 is substantially the same as or slightly smaller than the cross-sectional rectangle of the through hole 12. A notch 60 a is provided at the end (other end) of the pusher plate 60 opposite to the base portion 62.

次に、樹脂固結片作製治具300を用いた樹脂固結片の作製方法について、図2(a)〜図2(c)に基づいて説明する。なお、樹脂固結片の作製作業は、不活性ガス中(グローブボックス内)で行われる。   Next, a method for producing a resin-solidified piece using the resin-solidified piece producing jig 300 will be described with reference to FIGS. 2 (a) to 2 (c). In addition, the production work of the resin consolidated piece is performed in an inert gas (in the glove box).

まず、作業者は、図2(a)に示すように、第1の治具100の下面に、貫通孔12の一側(下側)の開口部を閉塞するように高分子フィルム40を設け、粘着テープ50で固定する。   First, as shown in FIG. 2A, the worker provides a polymer film 40 on the lower surface of the first jig 100 so as to close the opening on one side (lower side) of the through hole 12. Fix with adhesive tape 50.

次いで、作業者は、図2(b)に示すように、貫通孔12の他側(上側)の開口部から貫通孔12内に粉粒体試料80を入れるとともに樹脂材料90を注入する。ここで、樹脂材料90は、エポキシ埋込樹脂を1時間程度40℃の雰囲気内に放置した後、硬化剤を例えば25:3(=エポキシ埋込樹脂:硬化剤)の割合で混ぜたものである。本実施形態では、前述したように、枠状部材10と樹脂部20の上面が面一となっている。したがって、粉粒体試料80や樹脂材料90を貫通孔12内に投入する際に貫通孔12から外れた場合でも、爪楊枝や薬さじ等を用いて、再度かき入れることができる。   Next, as shown in FIG. 2 (b), the operator puts the granular material sample 80 into the through hole 12 through the opening on the other side (upper side) of the through hole 12 and injects the resin material 90. Here, the resin material 90 is obtained by leaving the epoxy-embedded resin in an atmosphere of 40 ° C. for about 1 hour and then mixing a curing agent at a ratio of 25: 3 (= epoxy-embedded resin: curing agent), for example. is there. In the present embodiment, as described above, the upper surfaces of the frame-shaped member 10 and the resin portion 20 are flush with each other. Therefore, even when the granular material sample 80 or the resin material 90 is removed from the through hole 12 when it is put into the through hole 12, the powder sample 80 and the resin material 90 can be stirred again using a toothpick or a spoon.

その後、作業者は、図2(b)の第1の治具100を常温で真空脱泡(または減圧脱泡)する。これにより、粉粒体試料80と樹脂材料90が混合して貫通孔12の底に沈殿する。その後は、大気で固結するまで放置し、粉粒体試料80と樹脂材料90の混合したものが固結するまで待つ。   Thereafter, the operator performs vacuum degassing (or vacuum degassing) of the first jig 100 in FIG. Thereby, the granular material sample 80 and the resin material 90 are mixed and settled to the bottom of the through-hole 12. After that, it is allowed to stand until it is consolidated in the atmosphere, and it waits until the mixture of the powder sample 80 and the resin material 90 is consolidated.

次いで、作業者は、図2(c)に示すように第1の治具100から粘着テープ50と高分子フィルム40とを取り外し、第2の治具200の押し出し板60を枠状部材10の貫通孔12内に他側(上側)の開口部から挿入する。これにより、図3に示すような樹脂固結片180が第1の治具100の貫通孔12から押し出されるようになっている。この場合、押し出し板60は、樹脂固結片180と面接触しているので、樹脂固結片180に大きな圧力がかからないようになっている。これにより、樹脂固結片180が変形したり破損するのを抑制することができる。なお、押し出し板60の端部には、切り欠き60aが設けられているので、貫通孔12への押し出し板60の挿入が容易となっている。   Next, the operator removes the adhesive tape 50 and the polymer film 40 from the first jig 100 as shown in FIG. 2 (c), and moves the extrusion plate 60 of the second jig 200 to the frame-shaped member 10. It inserts into the through-hole 12 from the opening on the other side (upper side). Thereby, the resin consolidated piece 180 as shown in FIG. 3 is pushed out from the through hole 12 of the first jig 100. In this case, since the extrusion plate 60 is in surface contact with the resin consolidated piece 180, a large pressure is not applied to the resin consolidated piece 180. Thereby, it can suppress that the resin consolidated piece 180 deform | transforms or breaks. In addition, since the notch 60a is provided in the edge part of the extrusion board 60, insertion of the extrusion board 60 to the through-hole 12 becomes easy.

ここで、図3の樹脂固結片180は、断面長方形の貫通孔12内で鋳造されているため、後の工程でイオン研磨(イオンミリング)される面80aと、該面80aに隣接する面80bとがなす角度が90°となっている。また、イオン研磨される面80aは、図2(b)において高分子フィルム40が接触しているため、凹凸がほとんどない。このため、イオン研磨される面80aをイオン研磨する前に機械研磨や化学研磨等をする必要はない。   Here, since the resin consolidated piece 180 of FIG. 3 is cast in the through-hole 12 having a rectangular cross section, a surface 80a to be ion-polished (ion milling) in a later step and a surface adjacent to the surface 80a. The angle formed by 80b is 90 °. Further, the surface 80a to be ion-polished has almost no unevenness because the polymer film 40 is in contact with the surface 80a in FIG. For this reason, it is not necessary to perform mechanical polishing, chemical polishing, or the like before ion polishing of the surface 80a to be ion polished.

なお、本実施形態では、第2の治具200の押し出し板60として、A型、BF型、O型のコンセントプラグ差刃を用い、第1の治具100の枠状部材10として、A型、BF型、O型のコンセントプラグ差刃に装着可能なタイトラキャップを用いることができる。この場合、コンセントプラグ差刃とタイトラキャップとは嵌合するため、樹脂固結片180の押し出しが可能であり、タイトラキャップを用いることで適切な大きさの樹脂固結片を作製することができる。   In this embodiment, A-type, BF-type, and O-type outlet plug blades are used as the extrusion plate 60 of the second jig 200, and the A-type is used as the frame-shaped member 10 of the first jig 100. A Titra cap that can be attached to a plug plug blade of BF type or O type can be used. In this case, since the outlet plug blade and the tie tiger cap are fitted, the resin consolidated piece 180 can be pushed out, and a resin sized piece of an appropriate size can be produced by using the tie tiger cap. .

次に、樹脂固結片のイオン研磨工程について説明する。   Next, the ion polishing process of the resin consolidated piece will be described.

イオン研磨工程においては、作業者は、まず、図4(a)に示すようなホルダスタンド120を不活性ガス中(グローブボックス内)に用意する。ここで、ホルダスタンド120は、平板状の遮蔽板122と、位置合わせ面124aを有する位置合わせ部124とを有する。遮蔽板122の下面と位置合わせ面124aの間の角度は垂直(90°)となっている。   In the ion polishing step, an operator first prepares a holder stand 120 as shown in FIG. 4A in an inert gas (in a glove box). Here, the holder stand 120 includes a flat shielding plate 122 and an alignment portion 124 having an alignment surface 124a. The angle between the lower surface of the shielding plate 122 and the alignment surface 124a is vertical (90 °).

次いで、作業者は、図4(b)に示すように、樹脂固結片180を位置決めする。この場合、イオン研磨される面80aを位置合わせ面124aに当て、面80bを遮蔽板122に当てることで、位置合わせを行う。ここで、面80aと面80bのなす角を90°としておくことで、遮蔽板122と樹脂固結片180との間には隙間が生じないようになっている。   Next, the operator positions the resin consolidated piece 180 as shown in FIG. In this case, alignment is performed by applying the surface 80 a to be ion-polished to the alignment surface 124 a and applying the surface 80 b to the shielding plate 122. Here, the angle formed by the surfaces 80a and 80b is set to 90 °, so that no gap is generated between the shielding plate 122 and the resin consolidated piece 180.

次いで、作業者は、樹脂固結片180の位置を固定する固定部材130をホルダスタンド120にネジ止めする。その後は、ホルダスタンド120にホルダスタンド120内を大気遮断状態にするキャップを装着し、その状態でArイオン研磨装置にホルダスタンド120を設置し、イオン研磨を実行する。なお、ホルダスタンド120においては、遮蔽板122と位置合わせ面124aとの間の距離は1mm程度であり、また、遮蔽板122と固定部材130の間で樹脂固結片180を挟んで固定するには、1mm程度の寸法が必要となる。したがって、樹脂固結片180の図4(b)の左右方向の寸法は、2mm以上必要である。   Next, the operator screws the fixing member 130 that fixes the position of the resin consolidated piece 180 on the holder stand 120. Thereafter, a cap that puts the inside of the holder stand 120 into an atmosphere shut-off state is attached to the holder stand 120, and in that state, the holder stand 120 is installed in the Ar ion polishing apparatus, and ion polishing is executed. In the holder stand 120, the distance between the shielding plate 122 and the alignment surface 124a is about 1 mm, and the resin consolidated piece 180 is sandwiched and fixed between the shielding plate 122 and the fixing member 130. Requires a dimension of about 1 mm. Therefore, the dimension of the resin consolidated piece 180 in the left-right direction in FIG. 4B needs to be 2 mm or more.

ここで、イオン研磨について、図5、図6に基づいてより詳細に説明する。図5(a)は、面80aと面80bのなす角が90°の場合を示し、図6(a)は、面80aと面80bのなす角が90°でない場合(比較例)を示している。図5(a)の場合、イオン研磨を行うと、図5(b)に示すように、観察断面を平滑に研磨することができる。一方、図6(a)の場合、面80bと遮蔽板122との間には隙間が生じるため、この状態でイオン研磨を行うと、図6(b)に示すように、遮蔽板122と面80bとの間にArイオンが入り込んでしまい、観察断面を平滑に研磨することができなくなる。   Here, ion polishing will be described in more detail with reference to FIGS. FIG. 5A shows a case where the angle formed by the surfaces 80a and 80b is 90 °, and FIG. 6A shows a case where the angle formed by the surfaces 80a and 80b is not 90 ° (comparative example). Yes. In the case of FIG. 5A, when ion polishing is performed, the observation cross section can be smoothly polished as shown in FIG. 5B. On the other hand, in the case of FIG. 6A, a gap is generated between the surface 80b and the shielding plate 122. Therefore, when ion polishing is performed in this state, as shown in FIG. Ar ions enter between 80b and the observation cross section cannot be polished smoothly.

このように、本実施形態では、図1の樹脂固結片作製治具300を用いて、面80a,80bのなす角が90°の樹脂固結片を作製しているので、イオン研磨により観察断面を適切な状態にすることができる。   Thus, in this embodiment, since the resin solidified piece having the angle of 90 ° formed by the surfaces 80a and 80b is produced using the resin solidified piece production jig 300 of FIG. 1, observation is performed by ion polishing. The cross section can be in an appropriate state.

イオン研磨終了後は、ホルダスタンド120にキャップを装着し、キャップが装着されたホルダスタンド120をArイオン研磨装置から取り出し、走査型電子顕微鏡(SEM)に設置する。SEMでは、SEM内部を真空にした後、ホルダスタンド120からキャップを外し、イオン研磨後の樹脂固結片(観察試料)の観察面の観察や分析を実行する。   After the ion polishing is completed, a cap is attached to the holder stand 120, and the holder stand 120 with the cap attached is taken out from the Ar ion polishing apparatus and placed on a scanning electron microscope (SEM). In the SEM, after evacuating the inside of the SEM, the cap is removed from the holder stand 120, and observation and analysis of the observation surface of the resin consolidated piece (observation sample) after ion polishing are executed.

以上、詳細に説明したように、本実施形態によると、樹脂固結片作製治具300は、縦2〜12mm、横1〜3mmの断面長方形の貫通孔12により直方体状の空間が形成され、貫通孔12の一側(下側)の開口部が高分子フィルム40により閉塞された状態で貫通孔12の他側(上側)の開口部から貫通孔12内に粉粒体試料80と樹脂材料90が注入される第1の治具100と、樹脂材料90が貫通孔12内で固結した状態、かつ高分子フィルム40による一側(下側)の開口部の閉塞が解除された状態で、他側(上側)の開口部から貫通孔12に嵌入することで、樹脂固結片を押し出す第2の治具200と、を備えている。これにより、イオン研磨を行う際に樹脂固結片をセットするホルダスタンド120の大きさに合った、適切な大きさの樹脂固結片180を鋳造することができる。なお、ホルダスタンド120としては、4〜5mm×3〜5mm×2mmの試料を保持できるホルダスタンドや、12mm×6mm×3mmの試料を保持できるホルダスタンドが存在している。また、断面長方形の貫通孔12(直方体状の空間)を用いて樹脂固結片180を鋳造するため、イオン研磨される面80aと近接する面80bとのなす角を90°にすることができる。これにより、イオン研磨の際に、遮蔽板122と面80bとの間に隙間が生じないため、観察表面を適切な状態に研磨することが可能となる。   As described above in detail, according to the present embodiment, the resin-bonded piece manufacturing jig 300 has a rectangular parallelepiped space formed by the through holes 12 having a rectangular section of 2 to 12 mm in length and 1 to 3 mm in width, In a state where the opening on one side (lower side) of the through hole 12 is closed by the polymer film 40, the granular material sample 80 and the resin material are inserted into the through hole 12 from the opening on the other side (upper side) of the through hole 12. In the state where the first jig 100 into which 90 is injected and the resin material 90 are solidified in the through-hole 12 and the blockage of the one side (lower side) opening by the polymer film 40 is released And a second jig 200 that pushes out the resin consolidated piece by fitting into the through-hole 12 from the opening on the other side (upper side). As a result, it is possible to cast a resin consolidated piece 180 having an appropriate size suitable for the size of the holder stand 120 on which the resin consolidated piece is set when performing ion polishing. As the holder stand 120, there are a holder stand that can hold a sample of 4 to 5 mm × 3 to 5 mm × 2 mm and a holder stand that can hold a sample of 12 mm × 6 mm × 3 mm. In addition, since the resin consolidated piece 180 is cast using the through hole 12 (rectangular space) having a rectangular cross section, the angle formed between the surface 80a to be ion-polished and the adjacent surface 80b can be 90 °. . Accordingly, no gap is generated between the shielding plate 122 and the surface 80b during ion polishing, so that the observation surface can be polished to an appropriate state.

また、本実施形態では、第1の治具100の貫通孔12を形成する壁面は、凹凸の少ない平滑面であるので、樹脂材料90と枠状部材10とが密着または接着せず、樹脂固結片180を枠状部材10からスムーズに押し出すことが可能である。   Further, in the present embodiment, the wall surface forming the through hole 12 of the first jig 100 is a smooth surface with few irregularities, so that the resin material 90 and the frame-like member 10 do not adhere or adhere to each other, and the resin solid It is possible to smoothly extrude the binding piece 180 from the frame-shaped member 10.

また、本実施形態では、第1の治具100は、貫通孔12が形成された枠状部材10と、枠状部材10の側面の周囲に設けられ、枠状部材10の変形を抑制する樹脂部20とを有する。これにより、枠状部材10を柔軟な部材としても、枠状部材10の変形が抑制されるので、樹脂固結片180の隣接する2面の角度を90°とすることが可能である。   In the present embodiment, the first jig 100 is provided around the frame-shaped member 10 in which the through-hole 12 is formed and the side surface of the frame-shaped member 10, and is a resin that suppresses deformation of the frame-shaped member 10. Part 20. Thereby, even if the frame-shaped member 10 is a flexible member, the deformation of the frame-shaped member 10 is suppressed, so that the angle between two adjacent surfaces of the resin consolidated piece 180 can be 90 °.

また、本実施形態では、樹脂部20の上面は、枠状部材10の上面と面一となっている。これにより、粉粒体試料80や樹脂材料90を貫通孔12内に注入する際に周辺にこぼれても、爪楊枝や薬さじなどでかき入れることが可能である。この際に、変形抑制部材を枠状部材に埋め込まれる樹脂と同一の樹脂にしておくことで、こぼれた試料をかき入れる際に誤って変形抑制部材を削ったとしても、枠状部材内に粉粒体試料と樹脂以外の異物を混入することを防止することができる。   In the present embodiment, the upper surface of the resin portion 20 is flush with the upper surface of the frame member 10. Thus, even if the powder sample 80 or the resin material 90 is spilled around the through hole 12, it can be scraped with a toothpick or a medicine spoon. At this time, if the deformation suppressing member is made of the same resin as that embedded in the frame-shaped member, even if the deformation suppressing member is accidentally shaved when scraping a spilled sample, the powder is not contained in the frame-shaped member. It is possible to prevent foreign matters other than the granular sample and the resin from being mixed.

また、本実施形態では、第2の治具200が、A型、BF型、O型のコンセントプラグ差刃を含み、第1の治具100の枠状部材10が、コンセントプラグ差刃に装着可能なタイトラキャップであってもよい。これにより、市販の商品を用いて、簡易かつ安価に樹脂固結片作製治具300を用意することが可能となる。   In the present embodiment, the second jig 200 includes A-type, BF-type, and O-type outlet plug blades, and the frame-shaped member 10 of the first jig 100 is attached to the outlet plug blade. Possible tie tiger caps. Thereby, it becomes possible to prepare the resin consolidated piece preparation jig 300 simply and inexpensively using a commercially available product.

また、本実施形態では、貫通孔12の下側の開口部を高分子フィルム40で閉塞することとしている。これにより、樹脂固結片180のイオン研磨する面80aを平坦にすることができる。このため、イオン研磨される面80aをイオン研磨する前に機械研磨や化学研磨等する必要がなくなる。この場合、水等を用いた研磨を行わなくてもよいため、粉粒体試料が水等により変質するのを抑制することができる。   In the present embodiment, the opening on the lower side of the through hole 12 is closed with the polymer film 40. Thereby, the surface 80a to be ion-polished of the resin consolidated piece 180 can be flattened. This eliminates the need for mechanical polishing or chemical polishing before ion polishing of the surface 80a to be ion polished. In this case, since it is not necessary to perform polishing using water or the like, it is possible to prevent the granular sample from being altered by water or the like.

なお、上記実施形態では、第1の治具100が、枠状部材10と樹脂部20とを有する場合について説明したが、これに限られるものではない。たとえば、第1の治具100は、一部に断面長方形の貫通孔が形成されている物体であってもよい。この場合、物体の材料としては、粉粒体試料80の観察や分析に対して影響を与えない材料で、貫通孔の断面形状が変形しない材料を採用することができる。   In addition, although the said embodiment demonstrated the case where the 1st jig | tool 100 had the frame-shaped member 10 and the resin part 20, it is not restricted to this. For example, the first jig 100 may be an object in which a through hole having a rectangular cross section is formed in part. In this case, as the material of the object, a material that does not affect the observation and analysis of the granular sample 80 and that does not deform the cross-sectional shape of the through hole can be used.

上述した実施形態は本発明の好適な実施の例である。但し、これに限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変形実施可能である。   The above-described embodiment is an example of a preferred embodiment of the present invention. However, the present invention is not limited to this, and various modifications can be made without departing from the scope of the present invention.

10 枠状部材
12 貫通孔
20 樹脂部(変形抑制部材)
40 高分子フィルム(閉塞部材)
80 粉粒体試料
90 樹脂
100 第1の治具
180 樹脂固結片
200 第2の治具
300 樹脂固結片作製治具
DESCRIPTION OF SYMBOLS 10 Frame-shaped member 12 Through-hole 20 Resin part (deformation suppression member)
40 Polymer film (occlusion member)
80 Powder Sample 90 Resin 100 First Jig 180 Resin Consolidated Piece 200 Second Jig 300 Resin Consolidated Piece Jig

Claims (7)

縦2〜12mm、横1〜3mmの断面長方形の貫通孔により直方体状の空間が形成され、前記貫通孔の一側の開口部が閉塞部材により閉塞された状態で前記貫通孔の他側の開口部から前記貫通孔内に粉粒体試料と樹脂が注入される第1の治具と、
前記樹脂が前記貫通孔内で固結した状態、かつ前記閉塞部材による前記一側の開口部の閉塞が解除された状態で、前記他側の開口部から前記貫通孔に嵌入することで、前記粉粒体試料及び前記樹脂を含む樹脂固結片を押し出す第2の治具と、を備える樹脂固結片作製治具。
A rectangular parallelepiped space is formed by a through hole having a rectangular cross section of 2 to 12 mm in length and 1 to 3 mm in width, and the opening on the other side of the through hole is closed by the closing member on one side of the through hole. A first jig in which a granular material sample and a resin are injected into the through hole from a portion;
In the state where the resin is solidified in the through hole and the state where the opening of the one side by the closing member is released, the resin is inserted into the through hole from the other side of the opening, And a second jig for extruding the resin solid piece including the powder sample and the resin.
前記第1の治具の前記貫通孔を形成する壁面は、平滑面であることを特徴とする請求項1に記載の樹脂固結片作製治具。   The resin-bonded piece manufacturing jig according to claim 1, wherein a wall surface forming the through hole of the first jig is a smooth surface. 前記第1の治具は、
前記貫通孔が形成された枠状部材と、
前記枠状部材の側面の周囲に設けられ、前記枠状部材の変形を抑制する変形抑制部材と、を有することを特徴とする請求項1又は2に記載の樹脂固結片作製治具。
The first jig is
A frame-like member in which the through hole is formed;
3. The resin-bonded piece manufacturing jig according to claim 1, further comprising: a deformation suppressing member that is provided around a side surface of the frame-shaped member and suppresses deformation of the frame-shaped member.
前記変形抑制部材は、前記樹脂固結片に含まれる前記樹脂と同一の樹脂を材料とすることを特徴とする請求項3に記載の樹脂固結片作製治具。   The resin deformation piece manufacturing jig according to claim 3, wherein the deformation suppressing member is made of the same resin as the resin included in the resin consolidation piece. 前記変形抑制部材は、前記枠状部材の前記他側の開口部周りの面と面一の面を有することを特徴とする請求項3又は4に記載の樹脂固結片作製治具。   5. The resin-bonded piece manufacturing jig according to claim 3, wherein the deformation suppressing member has a surface flush with a surface around the opening on the other side of the frame-shaped member. 前記第2の治具は、A型、BF型、O型のコンセントプラグ差刃を含み、
前記第1の治具の前記枠状部材は、前記コンセントプラグ差刃に装着可能なタイトラキャップである、ことを特徴とする請求項3〜5のいずれか一項に記載の樹脂固結片作製治具。
The second jig includes A-type, BF-type, and O-type outlet plug blades,
6. The resin consolidated piece production according to claim 3, wherein the frame-shaped member of the first jig is a tie tiger cap that can be attached to the outlet plug insertion blade. jig.
前記閉塞部材は、高分子フィルムであることを特徴とする請求項1〜6のいずれか一項に記載の樹脂固結片作製治具。   The resin-occlusion piece production jig according to any one of claims 1 to 6, wherein the closing member is a polymer film.
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