JP2017177085A - Coating equipment and coating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To continuously discharge a coating liquid while suppressing coating unevenness.SOLUTION: Coating equipment includes: a coating part which coats a coating liquid onto a coating object; a feed part having a first pump and a second pump which can feed the coating liquid to the coating part; a detection part which detects inner pressures of the first pump and the second pump; an adjustment part which can adjust the inner pressures of the first pump and the second pump; and a changeover part which performs changeover between the first pump and the second pump so that after the inner pressure of any one of the furst pump and the second pump is adjusted on the basis of the inner pressure of said one pump, the coating liquid is fed to the coating part from said one pump.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a coating apparatus and a coating method.

  2. Description of the Related Art Conventionally, coating apparatuses that apply a coating solution for forming a film or the like on a target substrate such as a glass substrate are known. Such a coating apparatus includes a stage on which a substrate is disposed, a nozzle capable of discharging a coating liquid, and a pump capable of supplying the coating liquid to the nozzle.

By the way, due to a lack of capacity of the pump, the coating liquid may not be continuously supplied to the nozzle, and the coating liquid may not be continuously discharged from the nozzle.
On the other hand, an increase in the size of the pump can be considered as a method for solving the shortage of the capacity of the pump. However, increasing the size of the pump is not practical because it is difficult to ensure the accuracy of discharging the coating liquid.
Therefore, the application liquid is continuously supplied to the nozzles by switching a plurality of (for example, two) pumps.

  For example, in Patent Document 1, the coating liquid is continuously supplied to the base by the switching operation of the first pump and the second pump, and the discharging operation by both the first pump and the second pump is discharged from the base. A configuration is disclosed that is performed while maintaining the discharge rate of the coating liquid at a constant rate.

JP 2014-187260 A

However, when the first pump and the second pump are switched, the coating liquid supplied to the base may pulsate. When the pulsating coating solution is supplied to the die, the pulsation is also transmitted to the coating solution discharged from the die. Therefore, the discharge amount of the coating liquid becomes unstable, and there is a possibility that uneven coating occurs.
Therefore, in patent document 1, there existed a subject in discharging a coating liquid continuously, suppressing application nonuniformity.

  In view of the circumstances as described above, it is an object of the present invention to provide a coating apparatus and a coating method capable of continuously discharging a coating liquid while suppressing coating unevenness.

  An application apparatus according to an aspect of the present invention includes an application unit that applies an application liquid to an application target, a supply unit that includes a first pump and a second pump that can supply the application liquid to the application unit, and the first A detection unit that detects internal pressures of the pump and the second pump, an adjustment unit that can adjust internal pressures of the first pump and the second pump, and an internal pressure of one of the first pump and the second pump. And a switching unit that switches the first pump and the second pump so that the coating liquid is supplied from the one to the coating unit after being adjusted based on the detection result of the one internal pressure.

  According to this configuration, by having the first pump and the second pump that can supply the coating liquid to the coating part, the coating liquid is continuously supplied to the coating part by the switching operation of the first pump and the second pump. Therefore, the coating liquid can be continuously discharged from the coating unit. In addition, after the internal pressure of either the first pump or the second pump is adjusted based on the detection result of the one internal pressure, the first pump and the second pump are supplied so that the coating liquid is supplied from the one to the application unit. By switching between the two pumps, the following effects can be obtained. Since the coating liquid can be supplied with the internal pressure of each pump being the same before and after switching between the first pump and the second pump, it is possible to avoid the pulsation of the coating liquid supplied to the coating section. . Therefore, it is possible to continuously discharge the coating liquid while suppressing coating unevenness. In addition, since the internal pressure of each pump can be adjusted based on the detection result of its own internal pressure before and after switching between the first pump and the second pump (that is, adjusted within the same pump), There is no detection error. Therefore, the internal pressure of each pump can be adjusted with higher accuracy than when adjusting the internal pressure of each pump based on the internal pressure of the other (that is, the counterpart pump).

In the coating apparatus, the switching unit is configured to supply the coating liquid from the one to the coating unit after the one internal pressure is adjusted based on the detection result of the internal pressure at the end of the most recent operation. As described above, the first pump and the second pump may be switched.
According to this configuration, the internal pressure of each pump can be adjusted based on the detection result of the internal pressure at the end of the most recent operation before and after switching between the first pump and the second pump. Compared with the case of adjusting based on the result, the internal pressure of each pump can be adjusted more accurately.

In the coating device, the first pump and the second pump are a casing, a flexible member that is coaxially disposed in the casing, and that stores the coating liquid, and a cylinder that stores the working fluid. And a plunger that is inserted so as to be reciprocally movable with respect to the cylinder portion, and that supplies the working fluid to a gap between the housing and the flexible member and discharges the coating liquid from the flexible member. , May be included.
According to this configuration, the application liquid can be discharged from the flexible member by using the pressing of the working fluid against the flexible member in a state where the application liquid is accommodated in the flexible member. It is possible to avoid contamination of the coating liquid when the coating liquid is supplied to the substrate.

In the coating apparatus, the detection unit may detect the pressure of the coating solution contained in the flexible member as the internal pressure.
According to this configuration, since the pressure of the coating liquid stored in the flexible member can be detected as the internal pressure, the pressure of the coating liquid flowing through the supply path (for example, piping) between each pump and the coating unit is reduced. Compared to the case of detection, a value excluding the pressure loss due to the supply path can be obtained, and the internal pressure of each pump can be adjusted with high accuracy. In addition, since the pressure of the coating liquid can be directly detected as the internal pressure, the internal pressure of each pump can be adjusted with higher accuracy than when the pressure of the working fluid is detected as the internal pressure.

In the coating apparatus, the detection unit may be disposed on a fluid discharge port side communicating with the downstream side of the flexible member.
According to this configuration, the pressure of the coating liquid immediately before being discharged from the flexible member (that is, the pressure of the portion of the coating liquid in the flexible member close to the coating portion) can be detected. The internal pressure of each pump can be adjusted with higher accuracy than when the portion is disposed on the upstream side of the flexible member.

In the coating apparatus, the switching unit includes a first valve capable of opening and closing the supply path of the coating liquid to the first pump, and a second valve capable of opening and closing the supply path of the coating liquid to the second pump. A valve, a third valve capable of opening / closing the supply path of the coating liquid from the first pump to the application section, and a fourth valve capable of opening / closing the supply path of the coating liquid from the second pump to the application section. A valve and a valve controller that controls opening and closing of the first valve, the second valve, the third valve, and the fourth valve may be included.
According to this configuration, by controlling the opening and closing of each valve, it is possible to supply the application liquid to one of the first pump or the second pump and to supply the application liquid from the other pump to the application unit. The coating solution can be continuously and stably supplied to the coating unit. Therefore, the coating solution can be continuously and stably discharged from the coating unit. For example, the first valve is opened, the second valve is closed, the third valve is closed, and the fourth valve is opened. While stopping the supply of the coating liquid to the pump, it is possible to supply the coating liquid from the second pump to the coating section while stopping the supply of the coating liquid from the first pump to the coating section.

In the coating apparatus, the valve control unit opens the third valve when switching from the first pump to supply to the coating unit, and opens the second valve while the third valve is open. Control may be performed to open the fourth valve when switching from the second pump to supply to the application unit, and control to open the first valve while the fourth valve is open.
According to this configuration, the second valve is “open” while the third valve is “open”, and the first valve is “open” while the fourth valve is “open”. While one of the two pumps or the second pump is supplying the coating liquid to the coating part, the coating liquid can be supplied to the other pump, so that after switching, the coating liquid is supplied from the other pump to the coating part. Preparations can be made in advance.

In the coating apparatus, the valve control unit may perform control to close the third valve when opening the first valve, and control to close the fourth valve when opening the second valve. .
According to this configuration, when the first valve is “open”, the third valve is “closed”, and when the second valve is “open”, the fourth valve is “closed”. When supplying the coating solution to one of the one pump or the second pump, the supply of the coating solution from the one pump to the coating unit can be stopped, so that the coating solution is stabilized from the other pump to the coating unit. Can be supplied.

In the coating apparatus, the valve control unit performs control to close the first valve and the third valve when adjusting the internal pressure of the first pump, and controls the internal pressure of the second pump. Control may be performed to close the second valve and the fourth valve.
According to this configuration, the first valve and the third valve are “closed” when adjusting the internal pressure of the first pump, and the second valve and the fourth valve are “closed” when adjusting the internal pressure of the second pump. Thus, the internal pressure of the other pump can be adjusted based on the internal pressure of one of the first pump and the second pump (the pump that is supplying the coating liquid to the coating unit). Further, it is possible to avoid the internal pressure of the other pump from fluctuating due to an external factor. Therefore, the internal pressure of each pump can be adjusted stably.

In the coating apparatus, the valve control unit performs control to open the third valve after adjusting the internal pressure of the first pump, and performs control to open the fourth valve after adjusting the internal pressure of the second pump. May be.
According to this configuration, the third valve is opened after adjusting the internal pressure of the first pump, and the fourth valve is opened after adjusting the internal pressure of the second pump. Together with one of the one pump or the second pump (the pump that is supplying the coating liquid to the coating unit), the internal pressure of the other pump can be temporarily reduced to atmospheric pressure. For this reason, adverse effects caused by internal pressure adjustment can be eliminated in advance, and the coating liquid can be stably supplied to the coating section. Further, even if the supply amount of the coating liquid from one pump to the application unit decreases, the decrease amount can be increased by increasing the supply amount of the coating liquid from the other pump to the application unit by the decrease amount. Can be complemented.

In the coating apparatus, the adjustment unit includes a first motor capable of adjusting the internal pressure of the first pump by increasing / decreasing the rotational speed, and a second motor capable of adjusting the internal pressure of the second pump by increasing / decreasing the rotational speed. And a motor control unit for controlling the rotation speeds of the first motor and the second motor.
According to this configuration, the internal pressure of the first pump can be adjusted by increasing or decreasing the rotation speed of the first motor, and the internal pressure of the second pump can be adjusted by increasing or decreasing the rotation speed of the second motor. The internal pressure can be easily adjusted with high accuracy.

In the coating apparatus, when the motor control unit adjusts the internal pressure of the first pump and the second pump, the sum of the rotation speed of the first motor and the rotation speed of the second motor does not change. As described above, the rotational speeds of the first motor and the second motor may be controlled.
According to this configuration, after adjusting the internal pressures of the first pump and the second pump, the total amount of the coating liquid supplied to the coating unit can be kept constant, so that the discharge amount of the coating liquid can be kept constant. Can do.

In the coating apparatus, when the motor control unit switches the first pump and the second pump, the first motor control unit is configured based on the internal pressure of either the first pump or the second pump before switching. You may control the rotation speed of a motor and said 2nd motor.
According to this configuration, at the time of switching, the internal pressure of the other pump can be accurately and easily adjusted based on the internal pressure of one pump before switching by increasing or decreasing the rotation speed of each motor. It becomes easy to make the internal pressure of the pump the same.

The coating apparatus may further include a portal frame that is formed in a gate shape so as to straddle the stage on which the coating target is disposed, and that is movable with respect to the stage. A nozzle that is attached to the mold frame and that can discharge the coating liquid by switching between the first pump and the second pump may be included.
According to this configuration, since the nozzle can be moved with respect to the stage by the portal frame having high rigidity as compared with the case of moving the nozzle along a general rail, the movement of the nozzle is stabilized. Can be done.

In the coating apparatus, the supply unit may include a supply source capable of supplying the coating liquid to both the first pump and the second pump.
According to this configuration, since the coating liquid can be supplied to both the first pump and the second pump using a common supply source, separate supply sources are used for the first pump and the second pump. In comparison, the apparatus configuration can be simplified.

  The coating method which concerns on 1 aspect of this invention is a supply step which supplies the said coating liquid from a 1st pump or a 2nd pump with respect to the coating part which apply | coats a coating liquid to a coating object, a said 1st pump and a said 1st A detection step of detecting the internal pressure of the two pumps, an adjustment step of adjusting the internal pressures of the first pump and the second pump, and the internal pressure of either the first pump or the second pump is the one of the internal pressures And a switching step of switching the first pump and the second pump so that the coating liquid is supplied from the one side to the coating unit after being adjusted based on the detection result.

  According to this method, the switching operation of the first pump and the second pump is performed by including a supply step of supplying the coating liquid from the first pump or the second pump and a switching step of switching the first pump and the second pump. Thus, since the coating liquid can be continuously supplied to the coating part, the coating liquid can be continuously discharged from the coating part. In addition, after the internal pressure of either the first pump or the second pump is adjusted based on the detection result of the one internal pressure, the first pump and the second pump are supplied so that the coating liquid is supplied from the one to the application unit. By switching between the two pumps, the following effects can be obtained. Since the coating liquid can be supplied with the internal pressure of each pump being the same before and after switching between the first pump and the second pump, it is possible to avoid the pulsation of the coating liquid supplied to the coating section. . Therefore, it is possible to continuously discharge the coating liquid while suppressing coating unevenness. In addition, since the internal pressure of each pump can be adjusted based on the detection result of its own internal pressure before and after switching between the first pump and the second pump (that is, adjusted within the same pump), There is no detection error. Therefore, the internal pressure of each pump can be adjusted with higher accuracy than when adjusting the internal pressure of each pump based on the internal pressure of the other (that is, the counterpart pump).

In the coating method, in the switching step, the coating liquid is supplied from the one side to the coating unit after the one internal pressure is adjusted based on the detection result of the internal pressure at the end of the most recent operation. As described above, the first pump and the second pump may be switched.
According to this method, before and after switching between the first pump and the second pump, the internal pressure of each pump can be adjusted based on the detection result of the internal pressure at the end of the most recent operation. Compared with the case of adjusting based on the result, the internal pressure of each pump can be adjusted more accurately.

In the above application method, as a switching unit for switching between the first pump and the second pump, a first valve capable of opening and closing the supply path of the application liquid to the first pump, and the application to the second pump A second valve capable of opening / closing a liquid supply path, a third valve capable of opening / closing the supply path of the coating liquid from the first pump to the application section, and the application from the second pump to the application section. A fourth valve capable of opening and closing a liquid supply path, and the switching step may open and close the first valve, the second valve, the third valve, and the fourth valve.
According to this method, the application liquid can be supplied to one of the first pump or the second pump and the application liquid from the other pump to the application part by opening and closing each valve. The coating liquid can be continuously and stably supplied. Therefore, the coating solution can be continuously and stably discharged from the coating unit. For example, the first valve is opened, the second valve is closed, the third valve is closed, and the fourth valve is opened. While stopping the supply of the coating liquid to the pump, it is possible to supply the coating liquid from the second pump to the coating section while stopping the supply of the coating liquid from the first pump to the coating section.

In the coating method, the switching step opens the third valve when starting supply from the first pump to the coating unit, and opens the second valve while the third valve is open. The fourth valve may be opened when the supply from the second pump to the application unit is started, and the first valve may be opened while the fourth valve is open.
According to this method, the second valve is “open” while the third valve is “open”, and the first valve is “open” while the fourth valve is “open”. While one of the two pumps or the second pump is supplying the coating liquid to the coating part, the coating liquid can be supplied to the other pump, so that after switching, the coating liquid is supplied from the other pump to the coating part. Preparations can be made in advance.

In the coating method, the switching step may close the third valve when opening the first valve and close the fourth valve when opening the second valve.
According to this method, when the second valve is opened, the fourth valve is closed, and when the second valve is opened, the fourth valve is closed. When supplying the coating solution to one of the one pump or the second pump, the supply of the coating solution from the one pump to the coating unit can be stopped, so that the coating solution is stabilized from the other pump to the coating unit. Can be supplied.

In the application method, the switching step closes the first valve and the third valve when adjusting the internal pressure of the first pump, and closes the second valve and the third valve when adjusting the internal pressure of the second pump. The fourth valve may be closed.
According to this method, the first valve and the third valve are “closed” when adjusting the internal pressure of the first pump, and the second valve and the fourth valve are “closed” when adjusting the internal pressure of the second pump. By doing so, the internal pressure of the other pump can be adjusted based on the internal pressure of one of the first pump and the second pump (the pump supplying the coating liquid to the coating unit). Further, it is possible to avoid the internal pressure of the other pump from fluctuating due to an external factor. Therefore, the internal pressure of each pump can be adjusted stably.

In the coating method, the switching step may open the third valve after adjusting the internal pressure of the first pump, and open the fourth valve after adjusting the internal pressure of the second pump.
According to this method, the third valve is opened after adjusting the internal pressure of the first pump, and the fourth valve is opened after adjusting the internal pressure of the second pump. Together with one of the one pump or the second pump (the pump that is supplying the coating liquid to the coating unit), the internal pressure of the other pump can be temporarily reduced to atmospheric pressure. For this reason, adverse effects caused by internal pressure adjustment can be eliminated in advance, and the coating liquid can be stably supplied to the coating section. Further, even if the supply amount of the coating liquid from one pump to the application unit decreases, the decrease amount can be increased by increasing the supply amount of the coating liquid from the other pump to the application unit by the decrease amount. Can be complemented.

In the above application method, as an adjustment unit capable of adjusting the internal pressure of the first pump and the second pump, a first motor capable of adjusting the internal pressure of the first pump by increasing or decreasing the rotation speed, and by increasing or decreasing the rotation speed A second motor capable of adjusting an internal pressure of the second pump, and the adjusting step may increase or decrease the rotational speeds of the first motor and the second motor.
According to this method, the internal pressure of the first pump can be adjusted by increasing or decreasing the rotation speed of the first motor, and the internal pressure of the second pump can be adjusted by increasing or decreasing the rotation speed of the second motor. The internal pressure can be easily adjusted with high accuracy.

In the coating method, the adjusting step may be configured such that the sum of the rotation speed of the first motor and the rotation speed of the second motor does not change when adjusting the internal pressure of the first pump and the second pump. The rotational speeds of the first motor and the second motor may be increased or decreased.
According to this method, after adjusting the internal pressures of the first pump and the second pump, the total amount of the coating liquid supplied to the coating unit can be kept constant, so that the discharge amount of the coating liquid can be kept constant. Can do.

In the coating method, when the first pump and the second pump are switched, the adjusting step is based on the internal pressure of either the first pump or the second pump before switching. And you may increase / decrease the rotation speed of said 2nd motor.
According to this method, at the time of switching, the internal pressure of the other pump can be accurately and easily adjusted based on the internal pressure of one pump before switching by increasing or decreasing the rotation speed of each motor. It becomes easy to make the internal pressure of the pump the same.

  ADVANTAGE OF THE INVENTION According to this invention, the coating device and the coating method which can discharge a coating liquid continuously, suppressing application nonuniformity can be provided.

It is a schematic diagram of the coating device which concerns on embodiment. It is a perspective view of the coating device concerning an embodiment. It is a schematic block diagram of the 1st pump which concerns on embodiment. It is a figure for demonstrating switching operation | movement of the 1st pump which concerns on embodiment, and a 2nd pump. It is a flowchart for demonstrating switching operation | movement of the 1st pump which concerns on embodiment, and a 2nd pump.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Coating device>
As shown in FIGS. 1 and 2, the coating apparatus 1 applies a coating solution 3 a for forming a film or the like on a substrate 10 (application target). The coating apparatus 1 includes a coating unit 2, a supply unit 3, a detection unit 60, an adjustment unit 4, a switching unit 5, a removal unit 6, a stage 7, a moving device 8, and a control unit 9. The control unit 9 performs overall control of the components of the coating apparatus 1.

<Applying part>
The application unit 2 includes a nozzle 2 a that discharges the application liquid 3 a onto the substrate 10. The nozzle 2a is formed in a long shape and can accommodate the coating liquid 3a therein. For example, the nozzle 2a uses a slit nozzle having a slit-like discharge port 2b that discharges the coating liquid 3a at the tip (lower end) of the nozzle 2a.

<Supply section>
The supply unit 3 includes a first pump 31 and a second pump 32 that can supply the coating liquid 3 a to the coating unit 2, and a supply source 30 that can supply the coating liquid 3 a to both the first pump 31 and the second pump 32. Prepare.
The supply source 30 includes a storage tank 30 a that stores a coating liquid 3 a to be supplied to the coating unit 2. A pipe 30b capable of introducing an inert gas such as nitrogen gas is connected to the storage tank 30a. The piping 30b is connected to a pressurization source (both not shown) via a valve, and the pressure in the storage tank 30a is adjusted by opening / closing control of the valve. The supply source 30 supplies a predetermined amount of the coating liquid 3a toward the first pump 31 and the second pump 32 by adjusting the pressure in the storage tank 30a.

For example, the coating liquid 3a uses a liquid material for forming a resin substrate, an interlayer insulating film, and the like.
In the present embodiment, the coating liquid 3a is a liquid containing polyimide having a viscosity of about 1 to 10 Pa · s. In general, a liquid material for forming a TFT, a liquid crystal layer, and the like used in a liquid crystal display device has a viscosity of 0.01 Pas or less. Therefore, the liquid containing polyimide has a higher viscosity than the liquid for forming the TFT and the liquid crystal layer. As the coating liquid 3a, a liquid material other than the liquid material containing polyimide, for example, a chemical solution (liquid) such as a photoresist may be used.

  The coating apparatus 1 includes a plurality of pipes 101 to 111 that form supply paths (flow paths) for the coating liquid 3a. As described above, the coating liquid 3 a flows from the supply source 30 toward the coating unit 2. Hereinafter, in the direction in which the coating liquid 3a flows, the supply source 30 side may be referred to as “upstream side” and the application unit 2 side may be referred to as “downstream side”.

<Detector>
The detection unit 60 detects the internal pressures of the first pump 31 and the second pump 32. The detection unit 60 includes a first sensor 61 that detects the internal pressure of the first pump 31 and a second sensor 62 that detects the internal pressure of the second pump 32.

<Adjustment unit>
The adjusting unit 4 includes a first motor 41 that can adjust the internal pressure of the first pump 31 by increasing or decreasing the rotational speed, a second motor 42 that can adjust the internal pressure of the second pump 32 by increasing or decreasing the rotational speed, and the first motor. 41 and a motor control unit 40 for controlling the rotation speed of the second motor 42.

<Switching unit>
The switching unit 5 opens and closes the four valves 51, 52, 53, 54 (first valve 51, second valve 52, third valve 53, and fourth valve 54) and the valves 51, 52, 53, 54. And a valve control unit 50 for controlling.

The first valve 51 can open and close the supply path of the coating liquid 3 a to the first pump 31.
The second valve 52 can open and close the supply path of the coating liquid 3 a to the second pump 32.
The third valve 53 can open and close the supply path of the coating liquid 3 a from the first pump 31 to the coating unit 2.
The fourth valve 54 can open and close the supply path of the coating liquid 3 a from the second pump 32 to the coating unit 2.

<Removal part>
The removing unit 6 includes a filter for removing foreign substances contained in the coating liquid 3a. For example, the filter is formed of Teflon (registered trademark).
The removing unit 6 is provided on a flow path (between the pipe 101 and the pipe 102) between the supply source 30 and the switching unit 5 (the first valve 51 and the second valve 52).

<Supply liquid supply>
The first pump 31 is connected to the supply source 30 via the pipe 101, the removal unit 6, the pipe 102, the pipe 103, the first valve 51, and the pipe 104 in order from the upstream side.
By opening and closing the first valve 51, the supply of the coating liquid 3a from the pipe 103 side (supply source 30) to the pipe 104 side (first pump 31) is started or stopped.

The second pump 32 is connected to the supply source 30 via the pipe 101, the removal unit 6, the pipe 102, the pipe 105, the second valve 52, and the pipe 106 in order from the upstream side.
By opening and closing the second valve 52, the supply of the coating liquid 3a from the pipe 105 side (supply source 30) to the pipe 106 side (second pump 32) is started or stopped.

The application unit 2 is connected to the first pump 31 via the pipe 107, the third valve 53, the pipe 108, and the pipe 111 in order from the upstream side, and also connects the pipe 109, the fourth valve 54, the pipe 110, and the pipe 111. To the second pump 32.
By opening and closing the third valve 53, the supply of the coating liquid 3a from the pipe 107 side (first pump 31) to the pipe 111 side (application unit 2) is started or stopped.
By opening / closing the fourth valve 54, the supply of the coating liquid 3a from the pipe 109 side (second pump 32) to the pipe 111 side (application unit 2) is started or stopped.

The nozzle 2 a of the application unit 2 can discharge the application liquid 3 a by switching between the first pump 31 and the second pump 32.
By adjusting the internal pressures of the first pump 31 and the second pump 32, the coating liquid 3 a can flow smoothly toward the coating unit 2 even when the high-viscosity coating liquid 3 a is used.

<Stage>
As shown in FIG. 2, the stage 7 is formed in a rectangular parallelepiped shape. A rectangular substrate 10 is disposed on the upper surface of the stage 7. The stage 7 is provided with a plurality of rollers (not shown) for transporting the substrate 10. Note that the stage 7 may be provided with a floating conveyance unit (not shown) that floats and conveys the substrate 10.

<Moving device>
The moving device 8 includes a pair of rails 81 (a first rail 81a and a second rail 81b) and a portal frame 82.
The first rail 81 a and the second rail 81 b have a rectangular parallelepiped shape extending in the direction along the longitudinal direction of the stage 7 and are disposed so as to face each other with the stage 7 interposed therebetween.

The portal frame 82 is formed in a portal shape so as to straddle the stage 7 on which the substrate 10 is disposed. The portal frame 82 is movable with respect to the stage 7.
The gate-type frame 82 includes a pair of support pillars 82a and 82b (first support pillar 82a and second support pillar 82b) that form a column shape extending vertically, and a bridging part 82c that passes between the pair of support pillars 82a and 82b. Is provided.

Lower ends of the first support column 82a and the second support column 82b are attached to the first rail 81a and the second rail 81b via sliders (not shown), respectively. The portal frame 82 is movable in the arrow v direction in the figure along the longitudinal direction of the pair of rails 81a and 81b.
The bridging portion 82c may be moved up and down (movable in the direction of arrow u in the figure) with respect to the pair of support columns 82a and 82b.

  A rectangular plate-like plate member 83 that holds the application unit 2 and the supply unit 3 is detachably supported at the center of the bridging unit 82c. For example, the plate member 83 is detachably attached to the bridging portion 82c with a screw (not shown) or the like.

  The application unit 2 and the supply unit 3 are attached to the bridging unit 82 c of the portal frame 82 via the plate member 83. The applicator 2 is movable in the direction of the arrow v in the figure along the longitudinal direction of the pair of rails 81a and 81b together with the supply unit 3 by driving of a drive mechanism (not shown).

<First pump>
Hereinafter, the first pump 31 among the first pump 31 and the second pump 32 will be described. Since the second pump 32 has the same configuration as that of the first pump 31, detailed description thereof is omitted.

As shown in FIG. 3, the first pump 31 is a plunger pump that includes a main body 130, a cylinder 140, and a piston 150 (plunger).
The main body portion 130 includes a case member (housing) 131 that is fixed to the cylinder portion 140 with bolts (not shown), and a flexible tube (flexible member) 132 that is attached in the case member 131. .

  The case member 131 includes a first connection part 133 connected to the upstream pipe 104, a second connection part 134 connected to the downstream pipe 107, and the first connection part 133 and the second connection part 134. And a cylindrical connecting cylinder portion 135 that connects the two. For example, the case member 131 is formed of a metal member such as aluminum.

  A fluid supply port 133 h communicating with the upstream side of the flexible tube 132 is formed in the first connection portion 133. By opening the first valve 51, the coating liquid 3a can be supplied from the pipe 104 side (supply source 30) into the flexible tube 132 via the fluid supply port 133h (supply). The direction is the direction of arrow m in the figure).

The second connection part 134 is formed with a fluid discharge port 134 h that communicates with the downstream side of the flexible tube 132. The working fluid 130a, which will be described later, allows the coating liquid 3a to be discharged from the flexible tube 132 to the pipe 107 side (coating portion 2) through the fluid discharge port 134h (the discharging direction is indicated by an arrow in the figure). n direction).
The connecting cylinder part 135 is formed with a main body side opening part 135h that opens to the cylinder part 140 side.

  The flexible tube 132 extends along the longitudinal direction of the connecting cylinder portion 135. The flexible tube 132 is coaxially disposed in the case member 131. The flexible tube 132 contains the coating liquid 3a.

  The flexible tube 132 is formed of an elastic member that can expand and contract in the radial direction. The flexible tube 132 is accommodated in the case member 131 such that a gap is formed between the flexible tube 132 and the case member 131. The gap forms a body-side drive chamber 136 that expands and contracts the flexible tube 132 when the working fluid 130a flows in.

For example, the flexible tube 132 is formed of a flexible material such as a resin material or a rubber material.
Note that the flexible tube 132 may be formed of a fluororesin such as tetrafluoroethylene perfluoroalkyl vinyl ether copolymer (PFA). Since the fluororesin does not react with the photoresist, it is suitable for maintaining the quality of the coating solution 3a when a chemical solution such as a photoresist is used as the coating solution 3a. In this case, it is preferable that the first connection portion 133 (at least a portion where the fluid supply port 133h is formed) and the second connection portion 134 (at least a portion where the fluid discharge port 134h is formed) are also formed of a fluororesin.

  The cylinder part 140 has a cylindrical shape that extends along the longitudinal direction of the connecting cylinder part 135. The cylinder part 140 is formed with a cylinder hole 140 a extending in the longitudinal direction of the cylinder part 140. The cylinder part 140 is formed with a cylinder side opening part 140h that opens to the main body part 130 side so as to communicate with the main body side opening part 135h.

  The piston 150 includes a plunger portion 151 extending in the longitudinal direction of the cylinder portion 140 and a guide block 152 provided at an end portion of the plunger portion 151 opposite to the cylinder portion 140 side.

The plunger portion 151 is inserted in a reciprocating manner with respect to the cylinder portion 140.
The guide block 152 is connected to a linear guide actuator 41 b that extends parallel to the longitudinal direction of the plunger portion 151. A first motor 41 is connected to the linear guide actuator 41b via a speed reducer 41a incorporating a plurality of gears. The guide block 152 is movable in the direction of the arrow g in the drawing along the longitudinal direction of the linear guide actuator 41b together with the plunger 151 by driving the first motor 41. In this way, the piston 150 can reciprocate with respect to the cylinder part 140.

  In the cylinder part 140, a cylinder-side drive chamber 141 whose volume is changed by the reciprocating motion of the piston 150 is formed between the distal end surface 151a of the plunger part 151 and the side wall surface 140b facing the cylinder hole 140a. The cylinder side drive chamber 141 communicates with the main body side drive chamber 136 via the cylinder side opening 140h and the main body side opening 135h.

  A working fluid 130 a is sealed in the main body side driving chamber 136 and the cylinder side driving chamber 141. For example, the working fluid 130a uses an incompressible medium. The working fluid 130a in each of the drive chambers 136 and 141 can flow freely through the openings 135h and 140h.

<Action of plunger (working fluid)>
When the plunger portion 151 is moved toward the side wall surface 140b of the cylinder portion 140 (closer to the side wall surface 140b), the cylinder side drive chamber 141 contracts. Due to the contraction of the cylinder side drive chamber 141, the working fluid 130a in the cylinder side drive chamber 141 flows into the main body side drive chamber 136 via the cylinder side opening 140h and the main body side opening 135h. Then, the flexible tube 132 is pressed by the working fluid 130a and contracts. Thereby, the coating liquid 3a accommodated in the flexible tube 132 is discharged | emitted from the fluid discharge port 134h to the piping 107 side (application | coating part 2). That is, the plunger portion 151 supplies the working fluid 130 a to the gap (main body side drive chamber 136) between the case member 131 and the flexible tube 132 and discharges the coating liquid 3 a from the flexible tube 132.

  On the other hand, when the plunger portion 151 is moved toward the side opposite to the side wall surface 140b of the cylinder portion 140 (separated from the side wall surface 140b), the cylinder side drive chamber 141 expands. Due to the expansion of the cylinder side driving chamber 141, the working fluid 130a in the main body side driving chamber 136 flows into the cylinder side driving chamber 141 via the main body side opening 135h and the cylinder side opening 140h. Then, the pressing of the flexible tube 132 by the working fluid 130a is released.

  Thus, when the plunger part 151 reciprocates with respect to the cylinder part 140, the main body side drive chamber 136 expands and contracts due to the movement of the working fluid 130a enclosed in the drive chambers 136 and 141. Therefore, the application liquid 3 a can be supplied to the application unit 2 through the pipe 107 by opening and closing the third valve 53 in conjunction with the expansion and contraction of the main body side drive chamber 136.

<First sensor>
The first sensor 61 (detection unit 60) is disposed on the fluid discharge port 134h side communicating with the downstream side of the flexible tube 132. That is, the first sensor 61 is disposed in the flexible tube 132 at a portion of the second connection portion 134 near the fluid discharge port 134h. The first sensor 61 detects the pressure of the coating liquid 3 a accommodated in the flexible tube 132 as the internal pressure of the first pump 31. The detection result of the first sensor 61 is sent to the motor control unit 40 and the valve control unit 50. The second sensor 62 has the same configuration as that of the first sensor 61, and thus detailed description thereof is omitted.

  As shown in FIGS. 1 and 3, the motor control unit 40 controls the rotational speeds of the motors 41 and 42 based on the detection results of the detection unit 60 (the first sensor 61 and the second sensor 62). The valve control unit 50 controls the opening and closing of the valves 51 to 54 based on the detection result of the detection unit 60. After the internal pressures of the first pump 31 and the second pump 32 become the same, the switching unit 5 is configured so that the coating liquid 3a is supplied to the coating unit 2 from either the first pump 31 or the second pump 32. The first pump 31 and the second pump 32 are switched. In addition, after the internal pressure of either the first pump 31 or the second pump 32 is adjusted based on the detection result of the one internal pressure, the switching unit 5 applies the coating liquid 3a to the coating unit 2 from the one. The first pump 31 and the second pump 32 are switched so as to be supplied.

<Switching operation of the first pump and the second pump>
FIG. 4 shows the discharge status of the pumps 31 and 32 (lower stage in FIG. 4), the drive status of the motors 41 and 42 (middle stage in FIG. 4), and the open / close status of the valves 51 to 54 (upper stage in FIG. 4). The relationship is shown.

  The horizontal axis in FIG. 4 indicates time t. In addition, time At1-At12 shows the time regarding the time-dependent change of the internal pressure of the 1st pump 31. FIG. Times Bt <b> 1 to Bt <b> 9 indicate times related to a change with time in the internal pressure of the second pump 32. Times Ct <b> 1 to Ct <b> 13 indicate time related to the change with time of the rotation speed of the first motor 41. Times Dt <b> 1 to Dt <b> 20 indicate a time related to a change with time in the rotation speed of the second motor 42.

  The vertical axis in FIG. 4 indicates the internal pressure p in relation to the discharge status of each pump 31, 32, and indicates the rotational speed r in the relationship with the drive status of each motor 41, 42. The internal pressure p0 is atmospheric pressure. The internal pressure p2 is a discharge pressure of the coating liquid 3a. The rotational speed r0 is a motor stationary state (non-rotating state). The rotation speeds r1 and r2 are the rotation speeds during normal rotation of the motor. The rotational speeds -r1 and -r2 are rotational speeds when the motor is reversely rotated.

  In FIG. 4, a graph G <b> 1 (thick line) shows a change with time of the internal pressure of the first pump 31. A graph G2 (thin line) shows a change with time of the internal pressure of the second pump 32. A graph G3 (thick line) shows a change with time in the rotation speed of the first motor 41. A graph G4 (thin line) shows a change with time in the rotational speed of the second motor 42. A range E1 indicates a time range in which the first valve 51 is “open”. A range E2 indicates a time range in which the second valve 52 is “open”. A range E3 indicates a time range in which the third valve 53 is “open”. A range E4 indicates a time range in which the fourth valve 54 is “open”.

Hereinafter, the time t0 and At1 to At12 will be described mainly with the temporal change (graph G1) of the internal pressure of the first pump 31.
As shown in FIG. 4, at time t0 to At1, the internal pressure of the first pump 31 gradually increases from the internal pressure p0 (atmospheric pressure) to p2 (discharge pressure).
From time At1 to At2, the first pump 31 maintains the internal pressure p2.
From time At2 to At3, the internal pressure of the first pump 31 gradually decreases from the internal pressure p2 to p0.
From time At3 to At4, the first pump 31 maintains the internal pressure p0.
From time At4 to At5, the internal pressure of the first pump 31 gradually increases from the internal pressure p0 to the internal pressure p1.
From time At5 to At6, the first pump 31 maintains the internal pressure p1.
From time At6 to At7, the internal pressure of the first pump 31 gradually decreases from the internal pressure p1 to the internal pressure p0.

  After time At7, the first pump 31 repeats the above-described change in internal pressure over time. In other words, the first pump 31 repeats the same cycle as the one cycle after the time At7, with the time-dependent change in internal pressure from time t0 to At7 as one cycle. In other words, times At7, At8, At9, At10, At11, and At12 correspond to times t0, At1, At2, At3, At4, and At5, respectively.

Hereinafter, the description will be made mainly with respect to the change over time in the internal pressure of the second pump 32 (graph G2) at times t0 and Bt1 to Bt9.
From time t0 to Bt1, the second pump 32 is stopped.
During time Bt1 to Bt2, the internal pressure of the second pump 32 gradually increases from the internal pressure p0 (atmospheric pressure) to p2 (discharge pressure).
In time Bt2 to Bt3, the second pump 32 maintains the internal pressure p2.
From time Bt3 to Bt4, the internal pressure of the second pump 32 gradually decreases from the internal pressure p2 to p0.
From time Bt4 to Bt5, the second pump 32 maintains the internal pressure p0.
From time Bt5 to Bt6, the internal pressure of the second pump 32 gradually increases from the internal pressure p0 to the internal pressure p1.
From time Bt6 to Bt7, the second pump 32 maintains the internal pressure p1.
From time Bt7 to Bt8, the internal pressure of the second pump 32 gradually decreases from the internal pressure p1 to the internal pressure p0.

  After the time Bt8, the second pump 32 repeats the change over time of the internal pressure described above. That is, the second pump 32 repeats the same cycle as the one cycle after the time Bt8, with the time-dependent change of the internal pressure from time Bt1 to Bt8 taken as one cycle. In other words, times Bt8 and Bt9 correspond to times Bt1 and Bt2, respectively.

  The time when the internal pressures of the first pump 31 and the second pump 32 are the same is time Bt2, At8, Bt9. The internal pressures of the first pump 31 and the second pump 32 are maintained at the same level during the time Bt2 to At2, during the time At8 to Bt3, and during the time Bt9 to At9.

The switching unit 5 switches the first pump 31 and the second pump 32 so that the coating liquid 3a is supplied from the second pump 32 to the coating unit 2 after the time Bt2 and after the time Bt9.
The valve control unit 50 opens the fourth valve 54 when switching from the second pump 32 to the supply to the application unit 2, and controls to open the first valve 51 while the fourth valve 54 is open (range E4). (Range E1 is within range E4). The valve control unit 50 performs control to close the third valve 53 when opening the first valve 51.

The switching unit 5 switches the first pump 31 and the second pump 32 so that the coating liquid 3a is supplied from the first pump 31 to the coating unit 2 after time At8.
The valve control unit 50 opens the third valve 53 when switching from the first pump 31 to the supply to the application unit 2, and controls to open the second valve 52 while the third valve 53 is open (range E3). (Range E2 is within range E3). The valve control unit 50 performs control to close the fourth valve 54 when opening the second valve 52.

  The valve control unit 50 performs control to close the first valve 51 and the third valve 53 when adjusting the internal pressure of the first pump 31 (for example, until reaching the time At6 to At8). The valve control unit 50 controls to open the third valve 53 after adjusting the internal pressure of the first pump 31 (for example, after time At8).

  The valve control unit 50 controls to close the second valve 52 and the fourth valve 54 when adjusting the internal pressure of the second pump 32 (for example, until reaching the time Bt7 to Bt9). The valve control unit 50 controls to open the fourth valve 54 after adjusting the internal pressure of the second pump 32 (for example, after time Bt9).

Hereinafter, the time t0 and Ct1 to Ct13 will be described mainly with respect to the change with time in the rotation speed of the first motor 41 (graph G3).
From time t0 to Ct1, the rotation speed of the first motor 41 gradually increases from the rotation speed r0 (no rotation) to r2 (maximum positive rotation). The time Ct1 is substantially the same as the time At1. That is, the interval from time t0 to Ct1 is substantially the same as the interval from time t0 to At1.
In time Ct1-Ct2, the 1st motor 41 maintains the rotation speed r2. The time Ct2 is substantially the same as the time At2. That is, the interval from time Ct1 to Ct2 is substantially the same as the interval from time At1 to At2.
From time Ct2 to Ct3, the rotational speed of the first motor 41 gradually decreases from the rotational speed r2 to r0. The time Ct3 is substantially the same as the time At3. That is, the interval from time Ct2 to Ct3 is substantially the same as the interval from time At2 to At3.
From time Ct3 to Ct4, the first motor 41 maintains the rotational speed r0. Note that the time Ct4 is substantially the same as the time At4. That is, the interval from time Ct3 to Ct4 is substantially the same as the interval from time At3 to At4.
From time Ct4 to Ct5, the rotation speed of the first motor 41 gradually increases from the rotation speed r0 to the rotation speed −r2 (maximum reverse rotation). Note that the time Ct5 is substantially the same as the time At5. That is, the interval from time Ct4 to Ct5 is substantially the same as the interval from time At4 to At5.
In time Ct5-Ct6, the 1st motor 41 maintains rotation speed -r2.
From time Ct6 to Ct7, the rotational speed of the first motor 41 gradually decreases from the rotational speed −r2 to the rotational speed r0.
From time Ct7 to Ct8, the first motor 41 maintains the rotational speed r0. Note that the time Ct8 is substantially the same as the time Bt3.

  After time Ct8, the first motor 41 repeats the above-described change in the rotational speed with time. That is, the first motor 41 repeats the same cycle as the one cycle after the time Ct8, with the time-dependent change in the rotation speed from time t0 to Ct8 taken as one cycle. In other words, times Ct8, Ct9, Ct10, Ct11, Ct12, and Ct13 correspond to times t0, Ct1, Ct2, Ct3, Ct4, and Ct5, respectively.

Hereinafter, the time t0 and Dt1 to Dt20 will be described mainly with the temporal change (graph G4) of the rotational speed of the second motor 42.
From time t0 to Dt1, the second motor 42 maintains the rotation speed r0 (no rotation). Note that the time Dt1 is substantially the same as the time Bt1. That is, the interval from time t0 to Dt1 is substantially the same as the interval from time t0 to Bt1.
From time Dt1 to Dt2, the rotational speed of the second motor 42 gradually increases from the rotational speed r0 to r1.
From time Dt2 to Dt3, the second motor 42 maintains the rotational speed r1.
From time Dt3 to Dt4, the rotational speed of the second motor 42 gradually decreases from the rotational speed r1 to r0. Note that the time Dt4 is substantially the same as the time Bt2. That is, the interval from time Dt1 to Dt4 is substantially the same as the interval from time Bt1 to Bt2.
From time Dt4 to Dt5, the second motor 42 maintains the rotational speed r0. The time Dt5 is substantially the same as the time Ct2. That is, the interval from time t0 to Dt5 is substantially the same as the interval from time t0 to Ct2.
From time Dt5 to Dt6, the rotational speed of the second motor 42 gradually increases from the rotational speed r0 to the rotational speed r2 (maximum positive rotation). The time Dt6 is substantially the same as the time Ct3. That is, the interval from time Dt5 to Dt6 is substantially the same as the interval from time Ct2 to Ct3.
From time Dt6 to Dt7, the second motor 42 maintains the rotational speed r2. Time Dt7 is substantially the same as time Bt3 and time Ct8. That is, the interval from time Dt4 to Dt7 is substantially the same as the interval from time Bt2 to Bt3. The interval from time Dt6 to Dt7 is substantially the same as the interval from time Ct3 to Ct8.
From time Dt7 to Dt8, the rotation speed of the second motor 42 gradually decreases from the rotation speed r2 to the rotation speed r0. Time Dt8 is substantially the same as time Bt4 and time Ct9. That is, the interval from time Dt7 to Dt8 is substantially the same as the interval from time Bt3 to Bt4 and the interval from time Ct8 to Ct9.
From time Dt8 to Dt9, the second motor 42 maintains the rotational speed r0. Note that the time Dt9 is substantially the same as the time Bt5. That is, the interval from time Dt8 to Dt9 is substantially the same as the interval from time Bt4 to Bt5.
From time Dt9 to Dt10, the rotational speed of the second motor 42 gradually increases from the rotational speed r0 to the rotational speed −r2 (maximum reverse rotation). Note that the time Dt10 is substantially the same as the time Bt6. That is, the interval from time Dt9 to Dt10 is substantially the same as the interval from time Bt5 to Bt6.
From time Dt10 to Dt11, the second motor 42 maintains the rotational speed −r2.
From time Dt11 to Dt12, the rotational speed of the second motor 42 gradually decreases from the rotational speed −r2 to the rotational speed r0.
From time Dt12 to Dt13, the second motor 42 maintains the rotational speed r0. Time Dt13 is substantially the same as time Bt7. That is, the interval from time Dt10 to Dt13 is substantially the same as the interval from time Bt6 to Bt7.
From time Dt13 to Dt14, the rotational speed of the second motor 42 gradually increases from the rotational speed r0 to the rotational speed −r1.
From time Dt14 to Dt15, the second motor 42 maintains the rotational speed −r1. The time Dt15 is substantially the same as the time Bt8. That is, the interval from time Dt13 to Dt15 is substantially the same as the interval from time Bt7 to Bt8.
From time Dt15 to Dt16, the rotational speed of the second motor 42 gradually changes from the rotational speed −r1 to the rotational speed r1.
From time Dt16 to Dt17, the second motor 42 maintains the rotational speed r1.
From time Dt17 to Dt18, the rotational speed of the second motor 42 gradually decreases from the rotational speed r1 to the rotational speed r0. The time Dt18 is substantially the same as the time Bt9. That is, the interval from time Dt15 to Dt18 is substantially the same as the interval from time Bt8 to Bt9.
From time Dt18 to Dt19, the second motor 42 maintains the rotational speed r0.

  After the time Dt19, the second motor 42 repeats the above-described change in the rotational speed with time. That is, the second motor 42 repeats the same cycle as the one cycle after the time Dt19, with the time-dependent change in the rotation speed from the time Dt5 to the time Dt19 as one cycle. In other words, times Dt19 and Dt20 correspond to times Dt5 and Dt6, respectively.

The motor control unit 40 adjusts the internal pressure of the first pump 31 and the second pump 32 so that the sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 does not change. 41 and the number of rotations of the second motor 42 are controlled. The sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 is the sum of the rotation speeds of the motors 41 and 42 when the positive rotation is “plus” and the reverse rotation is “minus”. To calculate.
For example, the sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 is not changed while the internal pressure of the first pump 31 is being adjusted (time At2 to At8).
Further, while adjusting the internal pressure of the second pump 32 (time Bt3 to Bt9), the sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 is prevented from changing.

When the motor control unit 40 switches the first pump 31 and the second pump 32, the first motor 41 and the second motor are based on the internal pressure of either the first pump 31 or the second pump 32 before switching. The rotational speed of 42 is controlled. For example, when the motor control unit 40 switches from supplying the second pump 32 to the application unit 2, the motor control unit 40 determines whether each of the motors 41 and 42 is based on the internal pressure of the standby second pump 32 that is not currently discharging. Control the number of revolutions.
For example, the switching unit 5 opens the fourth valve 54 during the discharge operation of the first pump 31 (after the time At1 and before the time At2), so that the first pump 31 that is not currently performing the discharge operation is in the standby state. The internal pressure of the two pumps 32 is acquired. And the motor control part 40 controls the rotation speed of each motor 41 and 42 based on the acquired internal pressure. In this way, the internal pressure of the second pump 32 that performs the discharge operation after switching is adjusted to the internal pressure of itself (second pump 32) that is waiting before switching.

  Hereinafter, an example of the switching operation of the first pump 31 and the second pump 32 will be described. In FIG. 5, steps S10 to S18 are operations on the first pump 31 side, steps S20 to S28 are operations on the second pump 32 side, and steps S30 to S31 are operations for switching between the first pump 31 and the second pump 32. Each is shown.

  As shown in FIG.1 and FIG.5, operation | movement of the 1st pump 31 is started in step S10. Specifically, in step S <b> 10, the supply of the coating liquid 3 a from the first pump 31 to the coating unit 2 is started by opening the third valve 53.

  In step S11, the internal pressure of the first pump 31 is detected. Specifically, in step S11, the first sensor 61 detects the pressure of the coating liquid 3a accommodated in the flexible tube 132 (see FIG. 3) as the internal pressure of the first pump 31. The detection result of the first sensor 61 is sent to the motor control unit 40 and the valve control unit 50.

  In step S12, the first pump 31 starts decelerating. That is, as shown in FIG. 4, in step S12, the rotational speed of the first motor 41 is gradually decreased from the rotational speed r2 during the time Ct2 to Ct3.

  As shown in FIGS. 1 and 5, the internal pressure of the first pump 31 is detected in step S13. Specifically, in step S13, the internal pressure of the first pump 31 is detected when the first pump 31 is stopped (ie, when the first motor 41 is not rotating) and when the second pump 32 is operating. That is, in step S13, the internal pressure of the first pump 31 is detected during the times Ct3 to Ct4 shown in FIG.

As shown in FIGS. 1 and 5, in step S14, the first valve 51 is opened and the third valve 53 is closed.
In step S15, the coating liquid 3a is supplied to the first pump 31.
In step S16, the first valve 51 is closed.

  In step S17, the internal pressure of the first pump 31 is adjusted. Specifically, in step S17, the internal pressure of the first pump 31 is adjusted to the internal pressure of the first pump 31 detected in step S13. That is, in step S17, the internal pressure of the first pump 31 is adjusted based on the detection result of the internal pressure at the end of the most recent operation. For example, in step S17, the internal pressure of the first pump 31 is adjusted during the time Ct7 to Ct8 shown in FIG.

In step S18, the operation of the first pump 31 is started. Specifically, in step S18, the supply of the coating liquid 3a from the first pump 31 to the coating unit 2 is started by opening the third valve 53.
In addition, after step S18, it returns to step S12 and repeats the operation | movement similar to the operation | movement after step S12 mentioned above.

  On the other hand, after step S12 and after step S20, the first pump 31 and the second pump 32 are switched in step S30. That is, after step S12 and after step S20, the operation of the second pump 32 is started in step S21. Specifically, in step S <b> 21, the supply of the coating liquid 3 a from the second pump 32 to the coating unit 2 is started by opening the fourth valve 54.

  Here, before step S21, the internal pressure of the second pump 32 is adjusted in step S20. Specifically, in step S20, the internal pressure of the second pump 32 is adjusted to the internal pressure of the first pump 31 detected in step S11. For example, in step S20, the internal pressure of the second pump 32 is adjusted between times Bt1 and Bt2 shown in FIG.

  Thus, in step S30, after the internal pressure of the second pump 32 is adjusted based on the detection result of the internal pressure of the first pump 31 (for example, the internal pressure of the first pump 32 is the same as the internal pressure of the first pump 31). After that, the first pump 31 and the second pump 32 are switched so that the coating liquid 3a is supplied from the second pump 32 to the coating unit 2.

  As shown in FIG.1 and FIG.5, the deceleration of the 2nd pump 32 is started in step S22 after step S21. That is, as shown in FIG. 4, in step S22, the rotational speed of the second motor 42 is gradually decreased from the rotational speed r2 during the time Dt7 to Dt8.

  As shown in FIGS. 1 and 5, the internal pressure of the second pump 32 is detected in step S23. Specifically, in step S23, the internal pressure of the second pump 32 is detected when the second pump 32 is stopped (that is, when the second motor 42 is not rotating) and when the first pump 31 is operating. That is, in step S23, the internal pressure of the second pump 32 is detected during the time Dt8 to Dt9 shown in FIG.

As shown in FIGS. 1 and 5, in step S24, the second valve 52 is opened and the fourth valve 54 is closed.
In step S25, the coating liquid 3a is supplied to the second pump 32.
In step S26, the second valve 52 is closed.

  In step S27, the internal pressure of the second pump 32 is adjusted. Specifically, in step S27, the internal pressure of the second pump 32 is adjusted to the internal pressure of the second pump 32 detected in step S23. That is, in step S27, the internal pressure of the second pump 32 is adjusted based on the detection result of the internal pressure at the end of the most recent operation. For example, in step S27, the internal pressure of the second pump 32 is adjusted during the time Dt16 to Dt17 shown in FIG.

As shown in FIG.1 and FIG.5, operation | movement of the 2nd pump 32 is started in step S28. Specifically, in step S28, the supply of the coating liquid 3a from the second pump 32 to the coating unit 2 is started by opening the fourth valve 54.
In addition, after step S28, it returns to step S22 and repeats the operation | movement similar to the operation | movement after step S22 mentioned above.

  On the other hand, after step S22 and after step S17, the first pump 31 and the second pump 32 are switched in step S31. That is, after step S22 and after step S17, the operation of the first pump 31 is started in step S18. Specifically, in step S18, the supply of the coating liquid 3a from the first pump 31 to the coating unit 2 is started by opening the third valve 53.

Thus, in step S31, after the internal pressure of the first pump 31 is adjusted based on the detection result of the internal pressure at the end of the most recent operation, the coating liquid 3a is supplied from the first pump 31 to the coating unit 2. As described above, the first pump 31 and the second pump 32 are switched.
In addition, after step S18, it returns to step S12 and repeats the operation | movement similar to the operation | movement after step S12 mentioned above.

<Application method>
Next, the coating method according to this embodiment will be described. In the present embodiment, the coating liquid 3a is applied to the substrate 10 using the coating apparatus 1 described above. The operation performed in each part of the coating apparatus 1 is controlled by the control unit 9.

The application method according to the present embodiment includes an application step, a supply step, a detection step, an adjustment step, and a switching step.
In the application step, the application liquid 3 a is applied to the substrate 10.
In the supply step, the coating liquid 3 a is supplied from the first pump 31 or the second pump 32 to the coating unit 2.
In the detection step, the internal pressures of the first pump 31 and the second pump 32 are detected.
In the adjustment step, the internal pressures of the first pump 31 and the second pump 32 are adjusted. In the adjustment step, the rotational speeds of the first motor 41 and the second motor 42 are increased or decreased.
In the switching step, after the internal pressures of the first pump 31 and the second pump 32 become the same, the coating liquid 3a is supplied to the coating unit 2 from either the first pump 31 or the second pump 32. The first pump 31 and the second pump 32 are switched. In addition, in the switching step, after the internal pressure of either the first pump 31 or the second pump 32 is adjusted based on the detection result of the one internal pressure, the coating liquid 3a is supplied from the one to the coating unit 2 The first pump 31 and the second pump 32 are switched as described above. In the switching step, the first valve 51, the second valve 52, the third valve 53, and the fourth valve 54 are opened and closed.

As shown in FIG. 1 and FIG. 4, the switching step opens the fourth valve 54 when starting the supply from the second pump 32 to the application unit 2, while the fourth valve is open (range E4). The first valve 51 is opened (the range E1 is within the range E4). The valve control unit 50 closes the third valve 53 when opening the first valve 51.
In the switching step, the third valve 53 is opened when the supply from the first pump 31 to the application unit 2 is started, and the second valve 52 is opened while the third valve 53 is open (range E3) (range E2). Is within range E3). In the switching step, the fourth valve 54 is closed when the second valve 52 is opened.

  In the switching step, the first valve 51 and the third valve 53 are closed when the internal pressure of the first pump 31 is adjusted (for example, until time At6 to At8). In the switching step, after adjusting the internal pressure of the first pump 31 (for example, after time At8), the third valve 53 is opened.

  The switching step closes the second valve 52 and the fourth valve 54 when adjusting the internal pressure of the second pump 32 (for example, from time Bt7 to Bt9). In the switching step, after adjusting the internal pressure of the second pump 32 (for example, after time Bt9), the fourth valve 54 is opened.

In the adjustment step, when adjusting the internal pressure of the first pump 31 and the second pump 32, the first motor 41 and the second motor 42 are controlled so that the sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 does not change. The number of rotations of the second motor 42 is increased or decreased.
For example, the sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 is not changed while the internal pressure of the first pump 31 is being adjusted (time At2 to At8).
Further, while adjusting the internal pressure of the second pump 32 (time Bt3 to Bt9), the sum of the rotation speed of the first motor 41 and the rotation speed of the second motor 42 is prevented from changing.

In the adjustment step, when the first pump 31 and the second pump 32 are switched, the first motor 41 and the second motor 42 are changed based on the internal pressure of either the first pump 31 or the second pump 32 before switching. Increase or decrease the rotational speed. For example, in the adjustment step, when switching from the second pump 32 to the supply to the application unit 2, the number of rotations of each of the motors 41 and 42 is based on the internal pressure of the second pump 32 that is not currently discharging and is waiting. Increase or decrease.
For example, in the switching step, during the discharge operation of the first pump 31 (after the time At1 and before the time At2), the fourth valve 54 is set to “open”, so that the second pump that is not currently performing the discharge operation is waiting. The internal pressure of the pump 32 is acquired. And an adjustment step increases / decreases the rotation speed of each motor 41 and 42 based on the acquired internal pressure. In this way, the internal pressure of the second pump 32 that performs the discharge operation after switching is adjusted to the internal pressure of itself (second pump 32) that is waiting before switching.

As described above, according to the present embodiment, by having the first pump 31 and the second pump 32 that can supply the coating liquid 3a to the coating unit 2, the first pump 31 and the second pump 32 can be switched. Since the coating liquid 3a can be continuously supplied to the coating unit 2, the coating liquid 3a can be continuously discharged from the coating unit 2.
Further, after the internal pressure of either the first pump 31 or the second pump 32 is adjusted based on the detection result of the one internal pressure, the coating liquid 3a is supplied from the one to the application unit 2 so as to be supplied. By switching the one pump 31 and the second pump 32, the following effects can be obtained. Since the application liquid 3a can be supplied with the internal pressures of the pumps 31 and 32 being the same before and after switching between the first pump 31 and the second pump 32, the application liquid 3a supplied to the application unit 2 pulsates. Can be avoided. Therefore, the coating liquid 3a can be continuously discharged while suppressing coating unevenness.
For example, the internal pressure of the pump fluctuates when bubbles are generated inside the pump or when the generated bubbles disappear. For this reason, it is difficult to prevent the discharge amount of the coating liquid 3a from becoming unstable due to fluctuations in the internal pressure of the pump by maintaining the discharge speed of the coating liquid 3a at a constant speed. On the other hand, according to the present embodiment, the coating liquid 3a can be supplied with the internal pressures of the pumps 31 and 32 being the same before and after switching between the first pump 31 and the second pump 32. The supply amount of the coating liquid 3a supplied to the unit 2 can be stably maintained.
In addition, since the internal pressure of each pump 31, 32 can be adjusted based on the detection result of its own internal pressure before and after switching between the first pump 31 and the second pump 32 (that is, adjusted in the same pump) Detection errors due to individual differences between the pumps 31 and 32 do not occur. Therefore, the internal pressures of the pumps 31 and 32 can be accurately adjusted as compared with the case where the internal pressures of the pumps 31 and 32 are adjusted based on the internal pressure of the other (that is, the counterpart pump).

  In addition, after the switching unit 5 adjusts the one internal pressure based on the detection result of the internal pressure at the end of the most recent operation, the switching unit 5 supplies the coating liquid 3a to the coating unit 2 from the one side. By switching the one pump 31 and the second pump 32, the following effects can be obtained. Since the internal pressure of each of the pumps 31 and 32 can be adjusted before and after switching between the first pump 31 and the second pump 32 based on the detection result of the internal pressure at the end of the most recent operation, only the detection result of the internal pressure of itself. Compared with the case where it adjusts based on this, the internal pressure of each pump 31 and 32 can be adjusted still more accurately.

  The first pump 31 and the second pump 32 are arranged coaxially in the case member 131, the case member 131, the flexible tube 132 that stores the coating liquid 3a, and the cylinder that stores the working fluid 130a. A piston that is inserted in the gap between the case member 131 and the flexible tube 132 to supply the working fluid 130a and discharge the coating liquid 3a from the flexible tube 132. 150 and the following effects are obtained. Since the coating liquid 3a can be discharged from the flexible tube 132 using the pressure of the working fluid 130a against the flexible tube 132 in a state where the coating liquid 3a is accommodated in the flexible tube 132, the coating section It is possible to avoid contamination of the coating liquid 3a when the coating liquid 3a is supplied to 2.

  In addition, the detection unit 60 detects the pressure of the coating liquid 3a accommodated in the flexible tube 132 as the internal pressure, thereby producing the following effects. Since the pressure of the coating liquid 3a accommodated in the flexible tube 132 can be detected as the internal pressure, the coating liquid flowing through the supply path (for example, the pipes 107 to 111) between the pumps 31 and 32 and the coating unit 2 is used. Compared with the case of detecting the pressure of 3a, a value excluding the pressure loss due to the supply path can be obtained, and the internal pressure of each pump 31, 32 can be adjusted with high accuracy. Further, since the pressure of the coating liquid 3a can be directly detected as the internal pressure, the internal pressure of each of the pumps 31 and 32 can be accurately adjusted as compared with the case of detecting the pressure of the working fluid 130a as the internal pressure. it can.

  In addition, since the detection unit 60 is disposed on the fluid discharge port 134h side that communicates with the downstream side of the flexible tube 132, the following effects can be obtained. Since the pressure of the coating liquid 3a immediately before being discharged from the flexible tube 132 (that is, the pressure of the coating liquid 3a in the flexible tube 132 close to the coating unit 2) can be detected, the detection unit Compared with the case where 60 is arrange | positioned in the upstream of the flexible tube 132, the internal pressure of each pump 31 and 32 can be adjusted with a sufficient precision.

  Further, by controlling the opening and closing of the valves 51 to 54, the coating liquid 3a is supplied to one of the first pump 31 and the second pump 32, and the coating liquid 3a is supplied to the coating unit 2 from the other pump. Therefore, the coating liquid 3a can be continuously and stably supplied to the coating unit 2. Therefore, the coating liquid 3a can be continuously and stably discharged from the coating unit 2. For example, the first valve 51 is opened, the second valve 52 is closed, the third valve 53 is closed, and the fourth valve 54 is opened. The supply of the coating liquid 3a to the second pump 32 is stopped while supplying the coating liquid, and the coating liquid from the second pump 32 to the coating section 2 is stopped while the supply of the coating liquid 3a from the first pump 31 to the coating section 2 is stopped. 3a can be supplied.

  Further, the second valve 52 is “open” while the third valve 53 is “open”, and the first valve 51 is “open” while the fourth valve 54 is “open”. While one of the one pump 31 or the second pump 32 is supplying the application liquid 3a to the application unit 2, the application liquid 3a can be supplied to the other pump. Preparation for supplying the coating liquid 3a can be performed in advance.

  Further, when the first valve 51 is “open”, the third valve 53 is “closed”, and when the second valve 52 is “open”, the fourth valve 54 is “closed”. When supplying the coating liquid 3a to one of the one pump 31 or the second pump 32, the supply of the coating liquid 3a from the one pump to the coating unit 2 can be stopped, and therefore the coating unit 2 from the other pump. The coating liquid 3a can be supplied stably.

  Further, when adjusting the internal pressure of the first pump 31, the first valve 51 and the third valve 53 are “closed”, and when adjusting the internal pressure of the second pump 32, the second valve 52 and the fourth valve 54 are “ By setting it to “closed”, the internal pressure of the other pump can be adjusted based on the internal pressure of one of the first pump 31 and the second pump 32 (the pump supplying the coating liquid 3a to the coating unit 2). Further, it is possible to avoid the internal pressure of the other pump from fluctuating due to an external factor. Therefore, the internal pressure of each pump 31 and 32 can be adjusted stably.

  In addition, the third valve 53 is set to “open” after adjusting the internal pressure of the first pump 31, and the fourth valve 54 is set to “open” after adjusting the internal pressure of the second pump 32. Together with one of the one pump 31 or the second pump 32 (the pump that is supplying the coating liquid 3a to the coating unit 2), the internal pressure of the other pump can be temporarily reduced to atmospheric pressure. For this reason, it is possible to eliminate in advance the adverse effects caused by the internal pressure adjustment, and it is possible to stably supply the coating liquid 3 a to the coating unit 2. Even if the supply amount of the coating liquid 3a from one pump to the coating unit 2 is decreased, the supply amount of the coating liquid 3a from the other pump to the coating unit 2 is increased by the reduced amount. The decrease can be supplemented.

  In addition, the internal pressure of the first pump 31 can be adjusted by increasing or decreasing the rotation speed of the first motor 41, and the internal pressure of the second pump 32 can be adjusted by increasing or decreasing the rotation speed of the second motor 42. , 32 can be adjusted accurately and easily.

  Moreover, when adjusting the internal pressure of the 1st pump 31 and the 2nd pump 32, the 1st motor 41 and the 2nd motor so that the sum of the rotation speed of the 1st motor 41 and the rotation speed of the 2nd motor 42 may not change. By controlling the rotational speed of 42, the following effects are produced. After adjusting the internal pressures of the first pump 31 and the second pump 32, the total amount of the application liquid 3a supplied to the application unit 2 can be kept constant, so that the discharge amount of the application liquid 3a can be kept constant. it can.

  Moreover, when switching the 1st pump 31 and the 2nd pump 32, the rotation speed of the 1st motor 41 and the 2nd motor 42 is based on the internal pressure of any one of the 1st pump 31 or the 2nd pump 32 before switching. By controlling, the following effects can be obtained. At the time of switching, the internal pressure of the other pump can be accurately and easily adjusted based on the internal pressure of one pump before switching by increasing or decreasing the rotation speed of each motor 41, 42. It becomes easy to make the internal pressure of 32 the same.

  In addition, the application unit 2 is attached to the portal frame 82 and includes the nozzle 2a capable of discharging the application liquid 3a by switching between the first pump 31 and the second pump 32, thereby providing the following effects. Compared to the case where the nozzle 2a is moved along a general rail, the nozzle 2a can be moved with respect to the stage 7 by the portal frame 82 having high rigidity, so that the movement of the nozzle 2a is stably performed. It can be carried out.

  In addition, the supply unit 3 includes the supply source 30 capable of supplying the coating liquid 3a to both the first pump 31 and the second pump 32, thereby providing the following effects. Since the coating liquid 3a can be supplied to both the first pump 31 and the second pump 32 using the common supply source 30, the first pump 31 and the second pump 32 use separate supply sources. In comparison, the apparatus configuration can be simplified.

The shapes and combinations of the constituent members shown in the above-described examples are merely examples, and various changes can be made based on design requirements and the like.
For example, in the above-described embodiment, the slit-type nozzle 2a is used as the application unit 2, but this is not a limitation. For example, a central dropping type application unit or an ink jet type application unit may be used. Moreover, the structure which spread | diffuses and apply | coats the liquid body arrange | positioned on the board | substrate 10 using a squeegee etc. may be sufficient.

  Moreover, in the said embodiment, although the coating device 1 gave the example which apply | coats the liquid body containing a polyimide as the coating liquid 3a on the board | substrate 10, the example is not restricted. For example, a resist solution may be used as the coating solution 3a, or a liquid other than the resist solution may be used.

  Moreover, in the said embodiment, although the supply part 3 gave the example containing the supply source 30 which can supply the coating liquid 3a to both the 1st pump 31 and the 2nd pump 32, it was not restricted to this. For example, the supply unit may include a first supply source capable of supplying the coating liquid 3 a to the first pump 31 and a second supply source capable of supplying the coating liquid 3 a to the second pump 32.

  In addition, each component described as embodiment or its modification in the above can be combined suitably, in the range which does not deviate from the meaning of this invention, and some components are combined among several combined components. It is also possible not to use as appropriate.

  DESCRIPTION OF SYMBOLS 1 ... Application | coating apparatus 2 ... Application | coating part 2a ... Nozzle 3 ... Supply part 3a ... Application liquid, 4 ... Adjustment part 5 ... Switching part 7 ... Stage 30 ... Supply source 31 ... First pump 32 ... Second pump 40 ... Motor control part DESCRIPTION OF SYMBOLS 41 ... 1st motor 42 ... 2nd motor 50 ... Valve control part 51 ... 1st valve 52 ... 2nd valve 53 ... 3rd valve 54 ... 4th valve 60 ... Detection part 82 ... Portal-type frame 131 ... Case member (housing) Body) 132 ... Flexible tube (flexible member) 134h ... Fluid discharge port 140 ... Cylinder portion 150 ... Piston (plunger)

Claims (25)

An application part for applying the application liquid to the application object;
A supply unit having a first pump and a second pump capable of supplying the coating solution to the coating unit;
A detector for detecting the internal pressure of the first pump and the second pump;
An adjustment unit capable of adjusting the internal pressure of the first pump and the second pump;
After the internal pressure of either the first pump or the second pump is adjusted based on the detection result of the one internal pressure, the first liquid is supplied from the one to the application unit. A switching unit for switching between the pump and the second pump;
A coating apparatus comprising: The switching unit is configured to supply the coating liquid from the one side to the coating unit after the one internal pressure is adjusted based on the detection result of the internal pressure at the end of the one most recent operation. The coating apparatus according to claim 1, wherein the pump and the second pump are switched. The first pump and the second pump are:
A housing,
A flexible member that is coaxially disposed in the housing and that stores the coating liquid;
A cylinder portion for storing the working fluid;
A plunger that is reciprocally inserted into the cylinder portion and that supplies the working fluid to a gap between the housing and the flexible member to discharge the coating liquid from the flexible member. The coating device according to claim 1 or 2. The coating device according to claim 3, wherein the detection unit detects the pressure of the coating liquid contained in the flexible member as the internal pressure. The coating device according to claim 4, wherein the detection unit is disposed on a fluid discharge port side communicating with the downstream side of the flexible member. The switching unit is
A first valve capable of opening and closing the supply path of the coating liquid to the first pump;
A second valve capable of opening and closing the supply path of the coating liquid to the second pump;
A third valve capable of opening and closing the supply path of the coating liquid from the first pump to the coating unit;
A fourth valve capable of opening and closing the supply path of the coating liquid from the second pump to the coating unit;
The coating device according to claim 1, further comprising: a valve control unit that controls opening and closing of the first valve, the second valve, the third valve, and the fourth valve. The valve control unit
When switching to supply from the first pump to the application unit, the third valve is opened, and the second valve is controlled to open while the third valve is open,
The coating apparatus according to claim 6, wherein when switching to supply from the second pump to the coating unit, the fourth valve is opened, and control is performed to open the first valve while the fourth valve is open. The valve control unit
Control to close the third valve when opening the first valve,
The coating apparatus according to claim 7, wherein the fourth valve is controlled to be closed when the second valve is opened. The valve control unit
When the internal pressure of the first pump is adjusted, the first valve and the third valve are controlled to be closed,
The coating apparatus according to any one of claims 6 to 8, wherein when the internal pressure of the second pump is adjusted, the second valve and the fourth valve are controlled to be closed. The valve control unit
Control the opening of the third valve after adjusting the internal pressure of the first pump,
The coating apparatus according to claim 9, wherein the fourth valve is controlled to open after adjusting the internal pressure of the second pump. The adjustment unit is
A first motor capable of adjusting the internal pressure of the first pump by increasing or decreasing the rotational speed;
A second motor capable of adjusting the internal pressure of the second pump by increasing or decreasing the rotational speed;
The coating apparatus as described in any one of Claims 1-10 including the motor control part which controls the rotation speed of said 1st motor and said 2nd motor. The motor control unit adjusts the internal pressure of the first pump and the second pump so that the sum of the rotation speed of the first motor and the rotation speed of the second motor does not change. The coating device according to claim 11, wherein the number of rotations of the second motor is controlled. When the motor control unit switches the first pump and the second pump, the first motor and the second motor are based on the internal pressure of either the first pump or the second pump before switching. The coating device according to claim 11, wherein the number of rotations is controlled. It is formed in a gate shape so as to straddle the stage on which the application target is arranged, and further includes a portal frame that is movable with respect to the stage,
The application unit according to claim 1, wherein the application unit includes a nozzle that is attached to the portal frame and that can discharge the application liquid by switching between the first pump and the second pump. apparatus. The coating apparatus according to any one of claims 1 to 14, wherein the supply unit includes a supply source capable of supplying the coating liquid to both the first pump and the second pump. A supply step of supplying the coating liquid from the first pump or the second pump to the coating unit that applies the coating liquid to the coating target;
A detection step of detecting internal pressures of the first pump and the second pump;
An adjustment step of adjusting the internal pressure of the first pump and the second pump;
After the internal pressure of either the first pump or the second pump is adjusted based on the detection result of the one internal pressure, the first liquid is supplied from the one to the application unit. A switching step of switching between the pump and the second pump;
A coating method comprising: In the switching step, after the one internal pressure is adjusted based on the detection result of the internal pressure at the end of the most recent operation, the first application liquid is supplied from the one to the application unit. The coating method according to claim 16, wherein the pump and the second pump are switched. As a switching unit for switching between the first pump and the second pump,
A first valve capable of opening and closing the supply path of the coating liquid to the first pump;
A second valve capable of opening and closing the supply path of the coating liquid to the second pump;
A third valve capable of opening and closing the supply path of the coating liquid from the first pump to the coating unit;
A fourth valve capable of opening and closing the supply path of the coating liquid from the second pump to the coating unit,
The coating method according to claim 16 or 17, wherein the switching step opens and closes the first valve, the second valve, the third valve, and the fourth valve. The switching step includes
Open the third valve when starting the supply from the first pump to the application unit, open the second valve while the third valve is open,
The coating method according to claim 18, wherein the fourth valve is opened when supply from the second pump to the coating unit is started, and the first valve is opened while the fourth valve is open. The switching step includes
Close the third valve when opening the first valve,
The coating method according to claim 19, wherein the fourth valve is closed when the second valve is opened. The switching step includes
Closing the first valve and the third valve when adjusting the internal pressure of the first pump;
The coating method according to any one of claims 18 to 20, wherein the second valve and the fourth valve are closed when the internal pressure of the second pump is adjusted. The switching step includes
After adjusting the internal pressure of the first pump, open the third valve,
The coating method according to claim 21, wherein the fourth valve is opened after adjusting the internal pressure of the second pump. As an adjustment unit capable of adjusting the internal pressure of the first pump and the second pump,
A first motor capable of adjusting the internal pressure of the first pump by increasing or decreasing the rotational speed;
A second motor capable of adjusting the internal pressure of the second pump by increasing or decreasing the rotational speed,
The coating method according to any one of claims 16 to 22, wherein the adjusting step increases or decreases the rotation speeds of the first motor and the second motor. The adjusting step includes adjusting the internal pressure of the first pump and the second pump so that the sum of the rotational speed of the first motor and the rotational speed of the second motor does not change. The coating method according to claim 23, wherein the number of rotations of the second motor is increased or decreased. In the adjustment step, when the first pump and the second pump are switched, the adjustment of the first motor and the second motor is based on the internal pressure of either the first pump or the second pump before switching. The coating method according to claim 23, wherein the number of rotations is increased or decreased.

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