JP2017173331A - 層状ナノリボンに基づいた化学センサー - Google Patents
層状ナノリボンに基づいた化学センサー Download PDFInfo
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- JP2017173331A JP2017173331A JP2017058830A JP2017058830A JP2017173331A JP 2017173331 A JP2017173331 A JP 2017173331A JP 2017058830 A JP2017058830 A JP 2017058830A JP 2017058830 A JP2017058830 A JP 2017058830A JP 2017173331 A JP2017173331 A JP 2017173331A
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- 239000002074 nanoribbon Substances 0.000 title claims abstract description 107
- 239000000126 substance Substances 0.000 title claims abstract description 57
- 239000002086 nanomaterial Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 230000008859 change Effects 0.000 claims abstract description 16
- 230000000704 physical effect Effects 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 28
- 229920002120 photoresistant polymer Polymers 0.000 claims description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910021389 graphene Inorganic materials 0.000 claims description 6
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 230000005669 field effect Effects 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000008569 process Effects 0.000 description 7
- 239000002041 carbon nanotube Substances 0.000 description 4
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 150000004770 chalcogenides Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910015800 MoS Inorganic materials 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000005180 public health Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1606—Graphene
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02527—Carbon, e.g. diamond-like carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
- H01L21/042—Changing their shape, e.g. forming recesses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/465—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/467—Chemical or electrical treatment, e.g. electrolytic etching using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
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Abstract
【解決手段】活性な層状ナノ材料の複数のナノリボンを含む基板と、物質と接触するときに複数のナノリボンの少なくとも一部の電気的又は物理的特性における変化を測定するための物質検出構成要素と、を有する化学センサーが記載される。
【選択図】図1
Description
本特許出願は、2016年3月25日に出願された“Chemical Sensor based on layered nanoribbons”という題名の仮出願番号第62/313,526号に対する優先権を主張し、本出願の譲渡人に譲渡され、それによって、全ての目的のためにここで参照によって明示的に組み込まれる。
Claims (20)
- 基板と:
前記基板の上に位置する活性な層状ナノ材料の複数のナノリボンと;
物質と接触するときに前記複数のナノリボンの少なくとも一部の、電気的又は物理的特性の変化を測定するための物質検出構成要素と;
を含む、化学センサー。 - 前記活性な層状ナノ材料が、グラフェンを含む、請求項1に記載の化学センサー。
- 前記活性な層状ナノ材料が、二次元材料を含む、請求項1に記載の化学センサー。
- 前記二次元材料が、二硫化モリブデンを含む、請求項3に記載の化学センサー。
- 前記複数のナノリボンの少なくとも一部が、実質的に均一のエッジ形状を有する、請求項1に記載の化学センサー。
- 前記実質的に均一のエッジ形状が、ジグザグエッジ又はアームチェアエッジの内の一以上を含む、請求項5に記載の化学センサー。
- 前記複数のナノリボンの少なくとも一部における前記活性な層状ナノ材料を清潔にするために、前記複数のナノリボンの少なくとも一部を連続的に照射するための放射源をさらに含む、請求項1に記載の化学センサー。
- 前記放射源が、連続的な紫外線光照射を供給する、請求項7に記載の化学センサー。
- 化学的電界効果トランジスタ(FET)であって、
電荷を供給するためのソース端と;
前記複数のナノリボンの少なくとも一部へ電位を供給するためのゲート端と;
前記ソース端から電流を受け取るためのドレイン端と;
を含む、化学的電界効果トランジスタ(FET)、をさらに含み、
前記基板が、前記ゲート端に結合され、前記物質検出構成要素が、前記ソース端へ電荷を供給する、請求項1に記載の化学センサー。 - 基板の上に位置する複数のナノリボンへ電荷を供給する段階であって、前記複数のナノリボンが、活性な層状ナノ材料から成る、段階と;
前記複数のナノリボンの物理的又は電気的特性における変化をモニタリングする段階と;
前記複数のナノリボンの前記物理的又は電気的特性における前記変化がしきい値に達することを決定することに基づいて物質の存在を検出する段階と;
を含む、化学センサーを用いて物質を検出するための方法。 - 前記活性な層状ナノ材料が、グラフェンを含む、請求項10に記載の方法。
- 前記活性な層状ナノ材料が、二次元材料を含む、請求項10に記載の方法。
- 前記二次元材料が、二硫化モリブデンを含む、請求項12に記載の方法。
- 前記複数のナノリボンの少なくとも一部が、実質的に均一のエッジ形状を有する、請求項10に記載の方法。
- 前記実質的に均一のエッジ形状が、ジグザグエッジ又はアームチェアエッジの内の一以上を含む、請求項14に記載の方法。
- 基板の上に活性な層状ナノ材料を配する段階と;
フォトレジスト層によって前記活性な層状ナノ材料を被覆する段階と;
複数の平行な梁を有するマスクを前記フォトレジスト層へ適用する段階と;
前記マスクによって覆われた前記活性な層状ナノ材料の領域を露出するために前記基板を現像して、前記フォトレジスト層によって被覆された前記活性な層状ナノ材料の複数のナノリボンを生成する段階と;
前記活性な層状ナノ材料の前記露出された領域をエッチング除去して、前記複数のナノリボンのエッジに関して実質的に均一のエッジ形状を達成する段階と;
前記複数のナノリボンから前記フォトレジスト層の残りの部分を除去する段階と;
を含む、化学センサーによって化学的検出を促進するための基板を構築するための方法。 - 前記活性な層状ナノ材料が、グラフェンを含む、請求項16に記載の方法。
- 前記活性な層状ナノ材料が、二次元材料を含む、請求項16に記載の方法。
- 前記二次元材料が、二硫化モリブデンを含む、請求項18に記載の方法。
- 前記実質的に均一のエッジ形状が、ジグザグエッジ又はアームチェアエッジの内の一以上を含む、請求項16に記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662313526P | 2016-03-25 | 2016-03-25 | |
US62/313,526 | 2016-03-25 | ||
US15/453,324 | 2017-03-08 | ||
US15/453,324 US10514357B2 (en) | 2016-03-25 | 2017-03-08 | Chemical sensor based on layered nanoribbons |
Publications (2)
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JP2017173331A true JP2017173331A (ja) | 2017-09-28 |
JP6974018B2 JP6974018B2 (ja) | 2021-12-01 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US10141412B2 (en) * | 2016-10-25 | 2018-11-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Field effect transistor using transition metal dichalcogenide and a method for manufacturing the same |
US20210181146A1 (en) * | 2018-01-04 | 2021-06-17 | Lyten, Inc. | Sensing device for detecting analytes in packages |
US11988628B2 (en) * | 2018-01-04 | 2024-05-21 | Lyten, Inc. | Container including analyte sensing device |
US11913901B2 (en) * | 2018-01-04 | 2024-02-27 | Lyten, Inc. | Analyte sensing device |
CN110311010B (zh) * | 2019-06-28 | 2022-06-07 | 西安交通大学 | 一种基于石墨烯纳米带的红外宽光谱探测器 |
US11519068B2 (en) | 2020-04-16 | 2022-12-06 | Honda Motor Co., Ltd. | Moisture governed growth method of atomic layer ribbons and nanoribbons of transition metal dichalcogenides |
US11639546B2 (en) * | 2020-04-16 | 2023-05-02 | Honda Motor Co., Ltd. | Moisture governed growth method of atomic layer ribbons and nanoribbons of transition metal dichalcogenides |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010530063A (ja) * | 2007-06-08 | 2010-09-02 | バラス アール. タクラパリ, | ナノ構造電界効果型センサならびに同センサを形成する方法および使用する方法 |
JP2011045944A (ja) * | 2009-08-26 | 2011-03-10 | National Institute For Materials Science | ナノリボン及びその製造方法、ナノリボンを用いたfet及びその製造方法、ナノリボンを用いた塩基配列決定方法およびその装置 |
US20120282594A1 (en) * | 2011-05-08 | 2012-11-08 | Honda Motor Co., Ltd. | Method of enhanced detection for nanomaterial-based molecular sensors |
US20130309776A1 (en) * | 2011-07-22 | 2013-11-21 | The Trustees Of The University Of Pennsylvania | Graphene-Based Nanopore and Nanostructure Devices and Methods for Macromolecular Analysis |
JP2013253010A (ja) * | 2011-12-01 | 2013-12-19 | Tohoku Univ | グラフェン構造体及びそれを用いた半導体装置並びにそれらの製造方法 |
JP2014052237A (ja) * | 2012-09-06 | 2014-03-20 | Seiko Instruments Inc | ガスセンサ、ガス測定装置、及びガスセンサの製造方法 |
WO2014171969A1 (en) * | 2013-04-18 | 2014-10-23 | The Board Of Trustees Of The University Of Illinois | Method and apparatus analyzing a target material |
WO2014191892A1 (en) * | 2013-05-29 | 2014-12-04 | Csir | A field effect transistor and a gas detector including a plurality of field effect transistors |
JP2014532982A (ja) * | 2011-10-21 | 2014-12-08 | ユニバーシティ・オブ・ユタ・リサーチ・ファウンデイション | 均一複数バンドギャップデバイス |
WO2015032646A1 (en) * | 2013-09-04 | 2015-03-12 | Basf Se | Purification process for graphene nanoribbons |
JP2015521107A (ja) * | 2012-03-05 | 2015-07-27 | テフニーシェ・ユニヴェルツィーテイト・デルフト | 高精細ナノ構造を除去する方法、部分的独立層、部分的独立層を備えるセンサー、及びそのセンサーを使用する方法 |
US20150355540A1 (en) * | 2013-03-25 | 2015-12-10 | Korea Electronics Technology Institute | Photosensitive coating composition, coating conductive film using photosensitive coating composition, and method for forming coating conductive film |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7301199B2 (en) * | 2000-08-22 | 2007-11-27 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
CN1590998A (zh) * | 2003-09-06 | 2005-03-09 | 鸿富锦精密工业(深圳)有限公司 | 气体传感器 |
US8052932B2 (en) * | 2006-12-22 | 2011-11-08 | Research Triangle Institute | Polymer nanofiber-based electronic nose |
US20080030352A1 (en) | 2006-02-27 | 2008-02-07 | Thorn Security Limited | Methods and systems for gas detection |
US20070275230A1 (en) * | 2006-05-26 | 2007-11-29 | Robert Murphy | Methods and systems for creating a material with nanomaterials |
GB0802912D0 (en) * | 2008-02-15 | 2008-03-26 | Carben Semicon Ltd | Thin-film transistor, carbon-based layer and method of production thereof |
US20100224998A1 (en) | 2008-06-26 | 2010-09-09 | Carben Semicon Limited | Integrated Circuit with Ribtan Interconnects |
KR101681950B1 (ko) | 2009-01-15 | 2016-12-05 | 삼성전자주식회사 | 그라펜 에지의 화학적 변형 방법 및 이에 의하여 얻어진 그라펜 |
US20100226811A1 (en) * | 2009-03-05 | 2010-09-09 | Xerox Corporation | Feature forming process using plasma treatment |
WO2010122635A1 (ja) | 2009-04-21 | 2010-10-28 | 富士通株式会社 | グラフェンシート系材料の処理方法及び電子機器の製造方法 |
US20120261644A1 (en) | 2011-04-18 | 2012-10-18 | International Business Machines Corporation | Structure and method of making graphene nanoribbons |
JP5772299B2 (ja) | 2011-06-29 | 2015-09-02 | 富士通株式会社 | 半導体デバイス及びその製造方法 |
US9388513B2 (en) | 2011-07-01 | 2016-07-12 | The University Of Kentucky Research Foundation | Crystallographically-oriented carbon nanotubes grown on few-layer graphene films |
US9472450B2 (en) | 2012-05-10 | 2016-10-18 | Samsung Electronics Co., Ltd. | Graphene cap for copper interconnect structures |
KR101993767B1 (ko) | 2012-10-17 | 2019-07-01 | 한국전자통신연구원 | 그래핀 나노리본 센서 |
US9356151B2 (en) | 2013-02-01 | 2016-05-31 | William Marsh Rice University | Fabrication of graphene nanoribbons and nanowires using a meniscus as an etch mask |
US10345289B2 (en) * | 2013-04-18 | 2019-07-09 | The Board Of Trustees Of The University Of Illinois | Method and apparatus for analyzing a target material |
CN104538449B (zh) | 2014-12-29 | 2018-09-14 | 连江县维佳工业设计有限公司 | 一种石墨烯场效应晶体管结构及其大规模制作工艺 |
CN105301061B (zh) * | 2015-09-23 | 2018-05-22 | 西南交通大学 | 一种自组装式网格状α-MoO3纳米带气敏传感器 |
-
2017
- 2017-03-08 US US15/453,324 patent/US10514357B2/en active Active
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Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010530063A (ja) * | 2007-06-08 | 2010-09-02 | バラス アール. タクラパリ, | ナノ構造電界効果型センサならびに同センサを形成する方法および使用する方法 |
JP2011045944A (ja) * | 2009-08-26 | 2011-03-10 | National Institute For Materials Science | ナノリボン及びその製造方法、ナノリボンを用いたfet及びその製造方法、ナノリボンを用いた塩基配列決定方法およびその装置 |
US20120282594A1 (en) * | 2011-05-08 | 2012-11-08 | Honda Motor Co., Ltd. | Method of enhanced detection for nanomaterial-based molecular sensors |
US20130309776A1 (en) * | 2011-07-22 | 2013-11-21 | The Trustees Of The University Of Pennsylvania | Graphene-Based Nanopore and Nanostructure Devices and Methods for Macromolecular Analysis |
JP2014532982A (ja) * | 2011-10-21 | 2014-12-08 | ユニバーシティ・オブ・ユタ・リサーチ・ファウンデイション | 均一複数バンドギャップデバイス |
JP2013253010A (ja) * | 2011-12-01 | 2013-12-19 | Tohoku Univ | グラフェン構造体及びそれを用いた半導体装置並びにそれらの製造方法 |
JP2015521107A (ja) * | 2012-03-05 | 2015-07-27 | テフニーシェ・ユニヴェルツィーテイト・デルフト | 高精細ナノ構造を除去する方法、部分的独立層、部分的独立層を備えるセンサー、及びそのセンサーを使用する方法 |
JP2014052237A (ja) * | 2012-09-06 | 2014-03-20 | Seiko Instruments Inc | ガスセンサ、ガス測定装置、及びガスセンサの製造方法 |
US20150355540A1 (en) * | 2013-03-25 | 2015-12-10 | Korea Electronics Technology Institute | Photosensitive coating composition, coating conductive film using photosensitive coating composition, and method for forming coating conductive film |
WO2014171969A1 (en) * | 2013-04-18 | 2014-10-23 | The Board Of Trustees Of The University Of Illinois | Method and apparatus analyzing a target material |
WO2014191892A1 (en) * | 2013-05-29 | 2014-12-04 | Csir | A field effect transistor and a gas detector including a plurality of field effect transistors |
WO2015032646A1 (en) * | 2013-09-04 | 2015-03-12 | Basf Se | Purification process for graphene nanoribbons |
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