JP2017173102A - Electric inspection head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electric inspection head capable of suppressing strain due to temperature change in arrangement of probes, according to the present invention.SOLUTION: An electronic inspection head according to the present invention comprises: a plurality of acicular probes which are arranged in parallel with each other; and a plate-like guide member which is arranged perpendicularly to the probes and a plurality of guide holes that the respective probes penetrate, and further comprises a first support member which is arranged on a proportional division line bisecting the mass of the guide member in plan view of the guide member, and restricts the guide member from moving in a direction along the proportional division line, a normal direction of the guide member and a direction perpendicular to them, and a second support member which is arranged on the proportional division line in plan view and allows the guide member to move only in the direction along the proportional division line. The electronic inspection head preferably comprises a third support member which is arranged at a position apart from the proportional division line in plan view of the guide member and restricts the guide member from moving only in the normal direction of the guide member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electrical inspection head.

  For example, in manufacturing sites such as semiconductor wafers and printed circuit boards, electrical inspection heads that use these products as inspection objects and inspect the electrical characteristics of the inspection objects by contacting a plurality of probes (electrical contacts) are used. .

  In such an electrical inspection head, as described in JP-A-2015-52511, in order to bring a plurality of probes into accurate contact with the measurement points to be inspected, they are close to the inspection object at the time of inspection. And a plate-shaped guide member having a plurality of through holes for guiding the probes.

  As described above, even if the relative positions of the plurality of probes are accurately determined by the guide member, if the inspection head cannot be correctly aligned with the inspection object, the plurality of probes are correctly applied to the measurement points of the inspection object. I can't touch you. In view of this, Japanese Patent Laid-Open No. 2015-52511 discloses that in order to accurately position a plurality of probes with respect to a measurement point to be inspected, a camera is disposed on the inspection head, and the position of the measurement point to be inspected is determined by image processing. Recognizing and proposing an electrical inspection apparatus that correctly faces a plurality of probes with respect to a measurement point to be inspected.

  On the other hand, it may be desirable to inspect the electrical characteristics while the inspection object is heated, for example, when the inspection object is used in a product used in a high temperature environment. For this reason, in the inspection apparatus described in Japanese Patent No. 4965425, a heater is disposed on a head plate on which a substrate (probe card) having a plurality of probes is mounted. Japanese Patent No. 4965425 proposes correcting the distortion of the head plate by forming the head plate from a shape memory alloy.

  However, when the head plate is heated with a heater, distortion of the head plate can be prevented and distortion of the substrate can be suppressed. However, when the guide member is supported so as to be close to the inspection object, the guide member is There is a possibility that the relative position of the plurality of probes becomes inaccurate due to distortion caused by the temperature change.

Japanese Patent Laying-Open No. 2015-52511 Japanese Patent No. 4965425

  In view of the above inconveniences, an object of the present invention is to provide an electrical inspection head capable of suppressing distortion due to temperature changes in the arrangement of probes.

  The invention made in order to solve the above-mentioned problems is a plate-shaped guide having a plurality of needle-like probes arranged in parallel to each other and a plurality of guide holes which are arranged perpendicular to the probes and through which the probes respectively penetrate. An electrical inspection head comprising a member, disposed on a bisector that bisects the mass of the guide member in plan view of the guide member, a direction along the sequel, a normal direction of the guide member, and A first support member that restricts the movement of the guide member in a direction perpendicular thereto, and a second support that is disposed on the phantom line in a plan view and allows only the movement of the guide member in the direction along the phantom line. An electrical inspection head, further comprising a member.

  The electrical inspection head is disposed on a prorated line that bisects the mass of the guide member in a plan view of the guide member, and a direction along the prorated line, a normal direction of the guide member, and a direction perpendicular thereto. A first support member that restricts movement of the guide member, and a second support member that is disposed on the draft line in plan view and that allows only movement of the guide member in a direction along the draft line of the guide member. When the temperature changes, the guide member can freely expand and contract in the direction along the promiscuous line with the support point at the first support member as the center. For this reason, since the said electrical inspection head can suppress the bending of a guide member even if temperature changes, it can suppress the distortion | strain of the arrangement | positioning of a probe.

  The first support member includes a column that is disposed in parallel with the probe and abuts against the guide member at a tip surface, and a screw that is screwed perpendicularly to the tip surface of the column, and the second support member is A support column disposed in parallel with the probe and contacting the guide member at the front end surface; a screw that is screwed perpendicularly to the front end surface of the support column; and a sleeve that is fitted to the outer periphery of the screw; The guide member may include a fixing hole through which the screw of the first support member passes, and a long hole into which the sleeve of the second support member is fitted and extends along the promiscuous line. As described above, the first support member includes the support column and the screw, the second support member includes the support column, the screw, and the sleeve, and the guide member includes the fixing hole and the long hole. With a simple configuration, the guide member can be supported so that it can freely expand and contract in the direction along the promiscuous line, so that distortion due to temperature changes in the probe arrangement can be suppressed relatively easily and reliably. .

  It is good to further provide the 3rd support member which is arranged in the position spaced apart from the draft line by plane view of the guide member, and controls only the movement of the guide member in the normal line direction. As described above, the guide member is further provided with a third support member that is disposed at a position away from the draft line in a plan view and restricts only the movement of the guide member in the normal direction. It is possible to effectively prevent the swinging around the promiscuous line.

  A heater disposed on the guide member may be further provided. As described above, by further including the heater disposed on the guide member, the inspection target can be heated relatively efficiently, and the electrical characteristics of the inspection target at a high temperature can be inspected relatively easily.

  The planar shape of the guide member may be a substantially rectangular shape, and the promiscuous line may be a center line parallel to the long side of the guide member. Thus, when the planar shape of the guide member is a substantially rectangular shape, the expansion and contraction of the guide member in a plan view due to a temperature change is even in the direction along the phantom line and in the direction perpendicular to the phantom line. Thereby, the distortion of the whole guide member can be suppressed more reliably.

  As described above, the electrical inspection head of the present invention can suppress distortion due to temperature changes in the arrangement of probes.

It is a typical side view showing composition of an electric inspection head of one embodiment of the present invention. FIG. 2 is a bottom view (a surface facing an inspection target) of the electrical inspection head of FIG. 1. It is a fragmentary sectional view in the plane perpendicular | vertical to the proposition line which shows the structure of the 1st supporting member of the electrical inspection head of FIG. It is a fragmentary sectional view in the plane perpendicular | vertical to the proposition line which shows the structure of the 2nd supporting member of the electrical inspection head of FIG. It is a fragmentary sectional view in the plane perpendicular | vertical to the proposition line which shows the structure of the 3rd supporting member of the electrical inspection head of FIG.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.

[Electrical inspection head]
An electrical inspection head according to an embodiment of the present invention shown in FIG. 1 is used for inspecting electrical characteristics of an inspection object such as a printed circuit board.

  The electrical inspection head is arranged on a base plate 1, a plurality of needle-like probes 2, plate-like first guide members 3 and second guide members 4 through which the plurality of probes 2 pass, and a second guide member 4. And a heater 5 provided. The first guide member 3 is disposed below the base plate 1 in parallel with the base plate 1, and the second guide member 4 is further below the first guide member 3 and parallel to the base plate 1 and the first guide member 3. Placed in. Note that “upper” and “lower” in the present specification specify the relative position by using the upper-limit relationship in a general usage mode of the electric inspection head for convenience, It does not limit the direction of use.

  The electrical inspection head is disposed on the lower surface of the base plate 1 and is disposed on the lower surface of the first guide member 3 and the spacer 6 that supports the first guide member 3, and supports the second guide member 3. And a first support member 7, a second support member 8, and a plurality of third support members 9.

  As shown in FIG. 2, the first support member 7 is disposed on a promiscuous line L that bisects the mass of the second guide member 4 in a plan view of the second guide member 4. The movement of the second guide member 4 in the direction along the normal direction of the second guide member 4 and the direction perpendicular thereto is restricted, that is, fixed to the first support member 7 so as not to move relative to all directions.

  The second support member 8 is disposed on the promiscuous line L in a plan view of the second guide member 4 and allows only movement of the second guide member 4 in the direction along the promiscuous line L. In other words, the second support member 8 is relative to the second support member 8 of the second guide member 4 in the normal direction of the second guide member 4 and the direction perpendicular to the normal direction and the direction along the plunging line L. Regulate relative movement.

  The third support member 9 is disposed at a position separated from the draft line L in a plan view of the second guide member 4 and only moves relative to the third support member 9 in the normal direction of the second guide member 4. regulate. In other words, the second support member 8 is a second guide member in a direction along the phantom line L of the second guide member 4 and a direction perpendicular to the direction along the phantom line and the normal direction of the second guide member 4. Relative movement with respect to the third support member 9 is allowed.

<Detection board>
The base plate 1 is a member that is held by the positioning device when the electrical inspection head is attached to a positioning device (not shown) such as a robot. Accordingly, the base plate 1 is formed of a material having rigidity such as metal.

  The electrical inspection head is positioned by a positioning device that holds the base plate 1 so that the second guide member 4 faces the printed circuit board to be inspected, and is pressed against the printed circuit board, so that the plurality of probes 2 are connected to the printed circuit board. A plurality of measurement points (for example, measurement lands) are brought into contact with each other.

<Probe>
The probe 2 has an upper end connected to an electric circuit (not shown) via, for example, a flexible wire, and a lower end protruding from the second guide member 2 to the lower side, that is, the printed circuit board side to be detected. The probe 2 is in conductive contact with a measurement point on the printed circuit board when the electrical inspection head is pressed against the printed circuit board.

<First guide member>
The first guide member 3 has a plurality of guide holes 10 through which the probe 2 penetrates in the thickness direction.

  The material of the first guide member 3 may be any material having rigidity and insulation, and is formed of, for example, an inorganic compound fired material such as resin or ceramics.

<Second guide member>
The second guide member 4 has a plurality of guide holes 11 that overlap the guide holes 10 of the first guide member 3 in a plan view of the second guide member 4 and through which the probe 2 penetrates in the thickness direction. For this reason, the plurality of probes 2 are arranged in parallel with each other between the support member 3 and the second guide member 4. In other words, the first guide member 3 and the second guide member 4 are arranged perpendicular to the plurality of probes 2.

  The second guide member 4 has a relatively small diameter, a fixing hole 12 with which the first support member 7 engages, and a long hole that extends along the promiscuous line L and with which the second support member 8 engages. 13 and a plurality of auxiliary holes 14 having a relatively large diameter and with which the third support member 9 is engaged. These fixed holes 12, long holes 13, and auxiliary holes 14 have counterbore that expands in a stepwise manner on the lower side.

  The planar shape of the second guide member 4 is preferably line symmetric with respect to a promiscuous line L including a support point by the first support member 7 and a support point by the second support 8. Since the second guide member 4 has a plane shape that is line-symmetric with respect to the draft line L, the dimensional change accompanying expansion due to temperature rise and shrinkage due to temperature drop is equal on both sides of the draft line L. It is difficult for stress to bend the segment L.

  Furthermore, it is more preferable that the planar shape of the second guide member 4 is line symmetric with respect to the center line perpendicular to the draft line L. Since the planar shape of the second guide member is axisymmetric in two directions, expansion and contraction due to temperature change is unlikely to cause distortion of the shape, and as a whole, the second guide member expands and contracts at an equal ratio. The measurement position can be accurately determined even at the same position.

  Furthermore, the planar shape of the second guide member 4 is more preferably a rectangle having the promiscuous line L as the center line in the longitudinal direction. The second guide member 4 has a rectangular planar shape and is supported by the first support member 7 and the second support body 8 on the longitudinal center line thereof, whereby the first support member 7 and the second support body. Since the distance between the second guide member 4 and the second support member 8 can be relatively large, the second guide member 4 can be effectively rotated in the plane due to slight backlash between the second guide member 4 and the second support 8. Can be suppressed.

  The material of the second guide member 4 may be any material having rigidity and insulation, and for example, an inorganic compound fired material such as ceramics or a resin can be used, but the linear expansion coefficient is substantially equal to the inspection object. Is preferred.

  When the linear expansion coefficient of the second guide member 4 is substantially equal to the linear expansion coefficient of the inspection object, the increase / decrease in the distance between the measurement points of the inspection object due to the temperature change and the increase / decrease in the distance between the probes 2 of the electrical inspection head Are substantially equal, it is possible to accurately inspect the electrical characteristics of the inspection object at different temperatures.

  On the other hand, when the linear expansion coefficient of the second guide member 4 is different from the linear expansion coefficient of the inspection object, the probe 2 is respectively set at the inspection temperature in consideration of the expansion and contraction of the second guide member 4 and the inspection object due to the temperature change. The arrangement of the guide holes 11 of the second guide member 4 is determined so that it can come into contact with the measurement point to be inspected. In other words, the arrangement of the guide holes 11 in the second guide member 4 includes a change in the distance between the guide holes 11 (and thus the probe 2) caused by a temperature change and a change in the distance between measurement points to be inspected caused by the temperature change. In consideration, the arrangement of the measurement points to be inspected at room temperature may be slightly different.

  Moreover, when the heater 5 is arrange | positioned like this embodiment, it is preferable that the 2nd guide member 4 has comparatively large heat conductivity so that the heat | fever of the heater 5 can be transmitted rapidly. For this reason, as the material of the second guide member 4, a material having an insulating property and a relatively high thermal conductivity, for example, a ceramic mainly composed of aluminum nitride, a resin containing a thermally conductive filler, or the like is preferably used. It is done.

<Heater>
The heater 5 is disposed on the upper surface of the second guide member 4, that is, on the surface opposite to the inspection target. The heater 5 may have a shape that does not buffer with other components, and may be divided into a plurality of parts as illustrated.

  The heater 5 indirectly heats the printed circuit board to be inspected by heating the second guide member 4. Thereby, the said electrical inspection head can test | inspect the electrical property in the high temperature environment of test object. In addition, since the heat of the heater 5 disposed on the second guide member 4 is relatively difficult to be transmitted to the base plate 1 and the first guide member 3, the inspection object can be efficiently heated, and the energy efficiency is relatively high. high.

<Spacer>
The spacer 6 may be any as long as it can hold the first guide member 3 in parallel with the substrate 1, and it is preferable that the first guide member 3 is not distorted due to thermal expansion.

<First support member>
As shown in detail in FIG. 3, the first support member 7 is disposed on the lower surface of the first guide member 3 in parallel with the probe 2, and the support 15 is in contact with the first guide member 4 at the distal end surface. And a screw 16 that is screwed perpendicularly to the front end surface of the screw. The screw 16 is housed inside the spot facing portion of the fixing hole 12 and has a head portion 16a that abuts against the flange end face of the spot facing portion. The first support member 7 sandwiches the second guide member 4 between the support column 15 and the head portion 16a of the screw 16, and holds the fixing hole 12 immovably.

  Further, the first support member 7 may have a spring washer for preventing the screw 16 from loosening or a plain washer for securing a contact area with the second guide member 4.

<Second support member>
As shown in detail in FIG. 4, the second support member 8 is disposed on the lower surface of the first guide member 3 in parallel with the probe 2, and a support column 17 that contacts the first guide member 4 at the distal end surface. And a sleeve 19 fitted on the outer periphery of the screw 18. The sleeve 19 has an axial length substantially equal to the thickness of the counterbore portion of the long hole 13 and an outer diameter substantially equal to the width of the portion excluding the counterbore of the long hole 13. The screw 18 has a head portion 18 a that is accommodated inside a counterbore portion of the long hole 13.

  The second support member 8 is preferably sandwiched between the head portion 18 a of the screw 18 and the sleeve 19, and further has a contact flat washer 20 on the flange end face of the counterbore portion of the long hole 13. The second support member 8 may further include a spring washer (not shown) for preventing the screw 18 from loosening. That is, the second support member 8 moves in the normal direction of the second guide member 4 when the diameter of the head 18 a of the screw 18 or the flat washer 20 is larger than the width of the portion excluding the counterbore of the long hole 13. To prevent.

  The sleeve 19 of the second support member 8 defines a distance between the front end surface of the second support member 8 and the flat washer 20, prevents the second guide member 4 from being separated from the second support member 8, and is a flat washer. It is possible to prevent a large frictional force from being generated between 20 and the flange end face of the spot facing portion of the second guide member 4. Thereby, it can prevent that the movement of the 2nd guide member 4 with respect to the 2nd support member 8 with respect to the 2nd support member 8 is inhibited by frictional force. Further, the sleeve 19 abuts against the inner wall of the portion other than the counterbore of the long hole 13, thereby preventing the movement of the second guide member 4 in the direction perpendicular to the proposition line L in the planar direction. As a result, the second support member 8 only allows the movement of the second guide member 4 in the direction along the promiscuous line L.

  As shown in detail in FIG. 5, the third support member 9 is disposed on the lower surface of the first guide member 3 in parallel with the probe 2, and a support column 21 that contacts the first guide member 4 at the distal end surface. And a sleeve 23 fitted to the outer periphery of the screw 22. The sleeve 23 has an axial length substantially equal to the thickness of the spot facing portion of the auxiliary hole 14 and an outer diameter smaller than the inner diameter of the portion excluding the spot facing portion of the auxiliary hole 14. The screw 22 is housed inside the counterbore portion of the auxiliary hole 14 and has a head portion 22a that abuts against the flange end surface of the counterbore portion.

  The third support member 9 preferably further includes a flat washer 24 that is sandwiched between the head portion 22a of the screw 22 and the sleeve 23 and abuts against the flange end face of the counterbore portion of the auxiliary hole 14. The third support member 9 may further include a spring washer (not shown) for preventing the screw 21 from loosening.

  The sleeve 23 of the third support member 9 defines a distance between the front end surface of the third support member 9 and the flat washer 24, prevents the second guide member 4 from being separated from the third support member 9, and provides a flat washer. It is possible to prevent a large frictional force from being generated between 24 and the flange end face of the counterbore portion of the second guide member 4. Thereby, it can prevent that the movement of the 2nd guide member 4 with respect to the 3rd supporting member 9 with respect to the 3rd support member 9 is inhibited by frictional force. The sleeve 23 has an outer diameter smaller than the inner diameter of the auxiliary hole 14, and can move in the plane direction of the second guide member 4 in the auxiliary hole 14. Thus, the third support member 9 restricts only the movement of the second guide member 4 in the normal direction.

<How to use>
The electrical inspection head is attached to the end of the robot, and constitutes a part of an electrical inspection device that inspects the electrical characteristics of the inspection target.

  The robot used in the electrical inspection apparatus may be an articulated robot, but a movable body that can be positioned in the X direction and the Y direction perpendicular to each other, and provided on the movable body, the X direction and the Y direction. An orthogonal coordinate type robot provided with an elevating mechanism in the Z direction perpendicular to is preferably used.

  In such an electrical inspection apparatus, the electrical inspection head is held at the end of the Cartesian coordinate robot by the elevating mechanism, and is held by a turning mechanism that can be rotated and positioned around the rotation axis in the Z direction. It is preferable.

  Moreover, it is preferable that an electrical inspection apparatus is provided with the table holding a test object on the plane extended in a X direction and a Y direction.

  The electric inspection apparatus causes the electric inspection head to face the inspection object in the Z direction by moving the movable body in the X direction and the Y direction, and causes the plurality of probes 2 to face the inspection points to be inspected by the turning mechanism. Then, the electrical inspection head is lowered by the lifting mechanism to press the probe 2 against the inspection object. The electrical inspection apparatus determines that the electrical resistance between the plurality of probes 2 in pressure contact with the inspection object is within a predetermined range and determines that the electrical resistance between the plurality of probes 2 is outside the predetermined range. Judge as good.

  In particular, the electrical inspection apparatus including the electrical inspection head detects the electrical resistance between the probes 2 in a state where the second guide member and the inspection target are heated to a predetermined temperature by the heater 5, and the electrical inspection target in the high temperature environment is detected. Check for physical characteristics.

<Advantages>
The electrical inspection head is disposed on a promiscuous line L that bisects the mass of the second guide member 4 in a plan view of the second guide member 4, and a direction along the promiscuous line L, the second guide member The first support member 7 that restricts movement in the normal direction (Z direction) 4 and the direction perpendicular thereto, and the proration line of the second guide member 4 are disposed on the proposition line L in plan view. And a second support member 8 that allows only the movement of the second guide member 4 in the direction along the line L. Therefore, when the temperature changes, the second guide member 4 is supported at the first support member 7. Can be freely expanded and contracted in the direction along the promiscuous line L. For this reason, since the said electrical inspection head can suppress the bending of the 2nd guide member 4 even if temperature changes, it can suppress the distortion of arrangement | positioning of the probe 2. FIG.

  In the electrical inspection head, the first support member 7 has a column 15 and a screw 16, the second support member 8 has a column 17, a screw 18, and a sleeve 19, and the second guide member 4 has a first support. The fixing hole 12 that engages with the member 7 and the long hole 13 that engages with the second support member 8 are provided. Thus, the electrical inspection head can support the second guide member 4 so that it can freely expand and contract in the direction along the proposition line L, while having a relatively simple configuration. Distortion due to the temperature change of the arrangement can be suppressed relatively reliably.

[Other Embodiments]
The said embodiment does not limit the structure of this invention. Therefore, in the above-described embodiment, components of each part of the above-described embodiment can be omitted, replaced, or added based on the description and common general knowledge of the present specification, and they are all interpreted as belonging to the scope of the present invention. Should.

  The electrical inspection head may support the first guide member with respect to the base plate by the first support member and the second support member on the plan line. In this case, the shape of the first guide member and the second guide member may be set so that expansion and contraction due to temperature change are equal, and the first guide member and the second guide member may be fixed so as not to be relatively movable. . In addition, a single guide member having a thickness that can determine the axial direction of the probe may be supported by the first support member and the second support member on the proposed line.

  The planar shape of the base plate in the electrical inspection head can be an arbitrary shape, and may be a shape that is not line symmetric. The support position of the guide member by the first support member and the second support member may be on a proration line that bisects the mass of the guide member in plan view of the guide member. For example, the first support member and the second support member may be arranged on a diagonal line of the guide member in a rectangular shape.

  The electrical inspection head may include a plurality of second support members on the guide line of the guide member. For example, the guide member may be supported by the first support member, and the guide member may be supported by the second support member on both sides of the draft line. A plurality of second support members may be arranged on one side of the first support member. In addition, the effect which suppresses rotation in the plane of a guide member becomes large by enlarging the space | interval of a 1st support member and a 2nd support member.

  The electrical inspection head may not be provided with a heater, and a heater may be disposed at a place other than the second guide plate. When the electric inspection head does not have a heater, a heater for heating the electric inspection head and the inspection object may be provided outside, and the temperature of the space (room or booth) where the electric inspection head is arranged can be adjusted. May be.

  In the electrical inspection head, the third support member may be omitted. As a specific example, the third support member may be omitted when the ratio of the diameter of the column of the first support member or the second support member to the width in the direction perpendicular to the tangent line of the guide member is relatively large. The electrical inspection head may have a third support member only on one side of the guide line of the guide member.

  The electrical inspection head may be disposed below the inspection target so that the guide member faces the inspection target, and the probe may be brought into contact with the measurement point on the lower surface of the inspection target. In addition, for example, when conducting an electrical inspection using a double-sided printed circuit board with electrical circuit patterns formed on both front and back surfaces, the electrical inspection heads are arranged on both the upper and lower sides of the inspection target, and the probe is brought into contact with both the upper and lower sides. Thus, an electrical inspection of the inspection target may be performed.

  The electrical inspection head can be particularly suitably used for inspecting electrical characteristics in a high temperature environment such as a printed circuit board.

DESCRIPTION OF SYMBOLS 1 Base plate 2 Probe 3 1st guide member 4 2nd guide member 5 Heater 6 Spacer 7 1st support member 8 2nd support member 9 3rd support member 10, 11 Guide hole 12 Fixing hole 13 Long hole 14 Auxiliary holes 15, 17 , 21 Posts 16, 18, 22 Screws 16a, 18a, 22a Head 19, 23 Sleeve 20, 24 Plain washer L

Claims (5)

An electrical inspection head comprising a plurality of needle-like probes arranged in parallel to each other and a plate-like guide member that is arranged perpendicular to the probes and has a plurality of guide holes through which the probes pass, respectively.
The guide member is arranged on a prorated line that bisects the mass of the guide member in plan view, and the guide member moves in a direction along the prorated line, a normal direction of the guide member, and a direction perpendicular thereto. A first support member to be regulated;
An electrical inspection head, further comprising: a second support member that is disposed on the phantom line in plan view and allows only movement of the guide member in the direction along the phantom line. The first support member is
A column that is arranged in parallel with the probe and abuts against the guide member at the tip surface;
Having a screw that vertically engages with the front end surface of the column,
The second support member is
A column that is arranged in parallel with the probe and abuts against the guide member at the tip surface;
A screw that vertically engages with the front end surface of the column;
A sleeve fitted on the outer periphery of the screw;
The guide member is
A fixing hole through which the screw of the first support member passes;
The electrical inspection head according to claim 1, wherein a sleeve of the second support member is fitted and has a long hole extending along the draft line.   3. The electricity according to claim 1, further comprising a third support member disposed at a position spaced apart from the draft line in a plan view of the guide member and restricting only a movement of the guide member in a normal direction. Inspection head.   The electrical inspection head according to claim 1, further comprising a heater disposed on the guide member.   5. The electrical inspection head according to claim 1, wherein the planar shape of the guide member is a substantially rectangular shape, and the promiscuous line is a center line parallel to a long side of the guide member.

Images