JP2017172998A - Non-contact type strain measuring device and cooling processing facility - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a non-contact type strain measuring device which can precisely and rapidly measure the strain amount of an object such as a metal mold in a high-temperature state.SOLUTION: The present invention includes: a non-contact type sensor 46 for detecting the displacement of an object; and a heat blocking member 42 containing the sensor 46 while fixing the position of the sensor, and moving with the sensor 46, the heat blocking member 42 forming the shape of a box and having an inlet port 54 for introducing a cooling gas into the inside.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a non-contact type strain measuring apparatus capable of measuring strain of a heated object in a high temperature state and a cooling processing facility provided with the same.

Conventionally, as one cooling method at the time of quenching, there is known a method in which a mold heated to a quenching temperature in a heating chamber is taken out of the heating chamber and directly placed in an oil cooling bath for quenching.
However, when such rapid cooling is performed directly on a mold that is in a high temperature state in a large mold, a large temperature difference occurs between each part, for example, between the corner and the center of the mold. The mold is greatly distorted or cracked by the stress.

The distortion of the mold that occurs during such heat treatment is particularly affected by the cooling conditions at a high temperature of 600 ° C. or higher, so that the degree of distortion of the mold in a high temperature state can be confirmed during the cooling process during quenching. Is desirable.
However, when approaching a high temperature mold, the measuring device is likely to be damaged or deteriorated by the radiant heat. On the other hand, if it is away from the measurement target mold, the measurement accuracy deteriorates.
Considering that measurement is performed during the cooling process during quenching, the temperature of the high-temperature mold changes with time (temperature decrease), so that strain measurement must be performed in a short time.

In the following Patent Document 1, a non-contact sensor is accommodated in a megaphone-shaped sensor hood with the top of the pyramid cut off, and a heat insulating curtain is arranged in a form extending in the vertical and horizontal directions of the sensor hood, and heat treatment is performed. A shape measuring device capable of measuring the shape of a high temperature material therein is disclosed.
However, in the device described in Patent Document 1, an opening is formed at the tip of the sensor hood, and there is no wall that shields radiant heat between the sensor and the high-temperature material to be measured. For this reason, it is difficult to measure the shape by bringing the sensor close to the object, and there is a limit to the improvement of measurement accuracy.
Also, when moving the measurement points, the thermal curtain placed around must be wound up and pulled out in conjunction with the movement of the sensor and sensor hood. There was a problem that would become.

JP 2004-219223 A

  The present invention is based on the circumstances as described above, and a non-contact strain measuring apparatus and a cooling process capable of accurately measuring a strain amount of an object such as a mold in a heated high temperature state in a short time. It was made for the purpose of providing facilities.

  Thus, claim 1 relates to a non-contact type strain measuring device, which is in the form of a box and a non-contact type sensor for detecting the displacement of an object, and contains the sensor in a fixed position inside. And a heat shield that moves in position integrally with the sensor, wherein the heat shield is provided with an inlet for introducing a cooling gas into the interior.

  According to a second aspect of the present invention, in the first aspect, the thermal shield is held at the tip of a movable arm that can move in a three-dimensional direction.

  A third aspect of the present invention is characterized in that, in any one of the first and second aspects, the sensor is a laser type displacement detection sensor, and the irradiated laser beam is a blue laser beam having a wavelength of 350 to 450 nm. To do.

  According to a fourth aspect of the present invention, in any one of the first to third aspects, a water-cooling mechanism is provided on the first wall surface of the thermal shield located between the object and the sensor when detecting displacement. It is characterized by being.

  A fifth aspect of the present invention relates to a cooling processing facility, wherein the non-contact strain measuring device according to any one of the first to fourth aspects, a temperature detecting means for detecting a temperature distribution on the surface of the object, and a discharge port Cooling means for discharging a cooling gas to cool the surface of the object, and the heat shield is rotatably attached to the tip of a movable arm that is movable in a three-dimensional direction. In the detection, the cooling means discharges so that the cooling gas is discharged from a second wall surface different from the first wall surface of the thermal shield located between the object and the sensor. An outlet is formed, and the first wall surface and the second wall surface of the heat shield can be alternately opposed to the surface of the object by the rotation operation of the tip portion. Features.

As described above, the non-contact type strain measuring device of the present invention has a box shape with a non-contact type sensor that detects the displacement of an object, and accommodates the sensor in a fixed position inside, and is integrated with the sensor. And a heat shield that moves in position.
According to the non-contact type strain measuring device of the present invention, since the sensor is fixed to the heat shield and the sensor and the heat shield have an integral structure, the conventional shape measuring device including the heat shield is provided. Thus, it is not necessary to provide a separate mechanism for moving or deforming the heat shield in conjunction with the sensor movement. According to the present invention, it is possible to simultaneously move the position of both the sensor and the box-shaped heat shield as the heat shield means by one moving means, so compared with the conventional shape measuring apparatus. It is possible to move the position at high speed.
In the present invention, the sensor is housed in a box-shaped heat shield, and a cooling gas inlet is provided in the heat shield. In the present invention, the heat shield provides a high-temperature object. In addition to protecting the sensor from the radiant heat emitted from the heat, it is possible to prevent the temperature of the heat shield and the sensor from rising due to the cooling gas introduced into the interior. It becomes possible to approach the object, and the distortion amount can be measured in a state where the measurement accuracy is improved.

  In the present invention, a water-cooling mechanism can be provided on the first wall surface of the heat shield positioned between the object and the sensor when detecting the displacement. At the time of displacement detection, the first wall surface of the heat shield located between the object and the sensor receives the radiant heat most strongly from the high-temperature object. Therefore, a water cooling mechanism is provided on the first wall surface. Suppressing the temperature rise of the first wall surface is effective in preventing the temperature rise of the internal sensor.

  In the present invention, the sensor may be a laser type displacement detection sensor, and the irradiated laser beam may be a blue laser beam having a wavelength of 350 to 450 nm. When measuring the amount of distortion on the surface of a high-temperature object heated to the quenching temperature, if the laser light emitted from the sensor is red, it is easily affected by the red heat of the object itself, which may cause a deterioration in measurement accuracy. Become. On the other hand, by using blue laser light having a wavelength of 350 to 450 nm according to claim 3, it is possible to accurately measure the amount of distortion by eliminating the influence of red heat on the measurement object itself.

  In the present invention, the heat shield can be held at the tip of the movable arm that can move in the three-dimensional direction (claim 2). In the present invention, it is necessary to bring the sensor close to the object in order to accurately measure the amount of distortion of the object. However, the object heated to the quenching temperature may be as high as 1000 ° C. or higher. Therefore, if the heat shield is held at the tip of the movable arm according to the second aspect, the portion approaching the object that becomes extremely hot is limited to the tip of the movable arm and the heat shield attached thereto. It is possible to dispose a drive mechanism or the like that does not have sufficient heat resistance away from the object.

Next, claim 5 relates to a cooling treatment facility. In addition to the non-contact type strain measuring apparatus of the present invention, the temperature detecting means for detecting the temperature distribution of the surface of the object and the cooling gas are discharged from the discharge port. And a cooling means for cooling the surface of the object, and having a function of locally cooling by discharging a cooling gas to a specific part of the object based on the detected temperature distribution of the surface of the object It is a thing.
Further, in the cooling processing facility according to claim 5, a heat shield is rotatably attached to the tip of the movable arm whose position is moved in a three-dimensional direction, and the heat located between the object and the sensor when detecting the displacement. The discharge port of the cooling means is formed so that the cooling gas is discharged from the second wall surface different from the first wall surface of the shield. Switching between a strain measurement operation that is performed with the first wall surface of the shield facing the surface of the object and a local cooling operation that is performed with the second wall surface of the heat shield facing the surface of the object. be able to.
According to the fifth aspect, since the distortion measuring operation and the local cooling operation can be easily switched by the rotation operation of the tip portion, the degree of distortion of the object can be easily confirmed in a short time in the cooling process during quenching. It is suitable for doing.

  According to the present invention as described above, there is provided a non-contact strain measuring apparatus and a cooling processing facility capable of accurately measuring a strain amount of a target object such as a mold in a heated high temperature state in a short time. can do.

It is the figure which showed the whole structure of the cooling processing equipment of one Embodiment of this invention. It is the figure which expanded and showed the front-end | tip part of the movable arm of FIG. It is the figure which showed the state before and behind at the time of rotating the front-end | tip part of the movable arm of FIG. It is the figure which showed the relationship between the color of the laser beam used for distortion measurement, and measurement accuracy. It is a figure for demonstrating the cooling operation of the embodiment. It is the figure which showed the relationship between a cooling rate, the hardening state of a metal mold | die, and the maximum distortion amount. It is the figure which showed an example of the result of the distortion amount measurement performed in the middle of cooling processing. It is the figure which expanded and showed the principal part of other embodiment of this invention.

Next, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram illustrating an overall configuration of a cooling processing facility 10 according to the present embodiment. In FIG. 1, reference numeral 12 denotes a mold as an object to be processed, which is heated to a quenching temperature in a heating chamber (not shown) and then placed on a set jig 14 by a crane or the like. Reference numeral 20 denotes a robot to which a nozzle 22 for local cooling described later is attached. Reference numeral 24 denotes an infrared camera which is positioned in front of the mold 12 and serves as a temperature detection means for detecting the temperature distribution on the surface of the mold 12.
Further, the cooling processing facility 10 has a compressor 26, a dryer 27, and an air tank 28 as a series of devices for generating and storing compressed air on the left side in FIG. Further, the cooling processing facility 10 includes a control unit 30 that controls the operation of the facility.

The mold 12 is made of tool steel (SKD61), has a width 600 mm × height 600 mm × thickness 150 mm, and has a design surface 12 a having irregularities, and a flat back surface 12 b located on the opposite side of the design surface 12 a. In this example, the mold 12 is placed on the setting jig 14 with the back surface 12b facing forward (the side on which the robot 20 and the infrared camera 24 are disposed).
The steel type used for the mold 12 is not particularly limited, and special steel having excellent hardenability can be appropriately employed. Also, the size of the mold is not particularly limited, but the present invention is particularly effective when the weight is 150 kg or more, in which a temperature difference (variation in cooling rate) easily occurs during the cooling process during quenching.

  The position of the infrared camera 24 is set so that the entire back surface 12b of the mold 12 is included in the detection range, and the temperature distribution of the surface of the mold 12 (specifically, the back surface 12b) is detected. 12 The highest temperature part of the surface is specified, and the temperature of the highest temperature part is detected. The result of temperature detection by the infrared camera 24 is sent to the control unit 30. The control unit 30 controls the cooling condition for the mold 12 based on the detection result.

The robot 20 has a base 34 fixed on the gantry 32 and a movable arm 36 extending therefrom. The movable arm 36 has a plurality of joint portions that rotate or bend, and the distal end portion 38 of the movable arm 36 moves vertically and horizontally, and in the front-rear direction, that is, in a three-dimensional direction, within a movable range indicated by a two-dot chain line in FIG. It can be moved. A nozzle 22 for locally cooling the mold 12 is attached to the tip portion 38.
The mold 12 immediately after being heated to the quenching temperature becomes very high. In this example, the robot 20 is installed at a position shifted from the front of the mold 12 in order to prevent the influence of the radiant heat from the mold 12 from reaching the entire robot 20.

FIG. 2 is an enlarged view of the distal end portion 38 of the movable arm 36. As shown in the figure, the distal end portion 38 is rotatably connected to the base side of the movable arm 36 around the joint axis P.
A box-shaped heat shield 42 is attached and fixed to the attachment member 40 on the opposite side of the joint portion P of the distal end portion 38 by attachment bolts 44.

  The heat shield 42 includes a plate-like fixed portion 42a directly fixed to the mounting member 40 on the movable arm 36 side, a flat substrate 42b fixed in a state orthogonal to the fixed portion 42a, And a lid 42c fixed to the base 42b so as to cover one surface on the surface 42b, and as a whole, has a box shape in which heat shielding walls are formed in the vertical and horizontal directions. ing. The heat shield 42 shields heat radiated from the mold 12 toward the distal end portion 38 of the movable arm 36 to protect a sensor and the like housed inside.

Reference numeral 46 denotes a laser type displacement detection sensor used for measuring the distortion of the surface of the mold 12. The laser type displacement detection sensor 46 is housed in the heat shield 42 and is attached to the base 42 b via a bracket 47 having a T-shaped cross section. It is fixed to the inner surface. As shown in FIGS. 2 (A) and 2 (B), the sensor 46 is located at a position farthest from the joint axis P (on the left side in the drawing), that is, at a position closest to the surface of the mold 12. The shield 42 is disposed in the vicinity of the first wall surface 48. An opening 51 is formed in the first wall surface 48, and a heat-resistant glass 52 is fitted therein, and the laser beam for displacement detection emitted from the light emitting portion 46a of the sensor 46 is emitted to the outside through the opening 51. Then, after being reflected by the surface of the mold 12 that is the object, the light is received by the light receiving portion 46 b through the opening 51. The received reflected light is imaged on the optical position detecting element in the light receiving portion 46b, and the amount of displacement in the height direction to the surface of the mold 12 is measured based on the imaging position.
In this example, the non-contact type strain measuring device 11 is configured by the sensor 46, the heat shield 42, and the movable arm 36 that holds these movably.

  In this example, the sensor 46 is used to measure the amount of displacement (distortion amount) of the surface of the mold 12 heated to the quenching temperature. Therefore, if the laser light emitted from the sensor 46 is red, The mold 12 itself is susceptible to red heat. Accordingly, the sensor 46 of this example uses blue laser light having a wavelength of 350 to 450 nm.

  FIG. 4 shows the measurement accuracy when the laser light emitted from the laser displacement sensor 46 is red (FIG. (B)) and blue (wavelength is 350 to 450 nm) (FIG. (C)). It is a figure. The measurement results shown in FIGS. 4B and 4C create a step of 10 mm × 10 mm × 1 mm in height near the center of the block 13 of 300 mm × 300 mm × 300 mm shown in FIG. It is the result of measuring the level | step difference in the state which heated the block 13 at 800 degreeC. Specifically, the step of 1 mm is measured 10 times, and the average value of 10 times and the measured value having the largest difference from the average value are plotted as error bars. The measurement is performed while sequentially changing the measurement distance between the block 13 and the sensor 46.

  As shown in FIG. 4B, in the case of a red laser, a step of 1 mm cannot be measured accurately due to the influence of red heat of the block 13. On the other hand, in the case of the blue laser, as shown in FIG. 4C, the step can be measured more accurately as the measurement distance (the distance between the block 13 and the sensor 46) is shorter. In the measurement of mold strain, it is necessary that the repeatability is within 0.2 mm. According to the results shown in FIG. 4, if the measurement distance is set to 500 mm or less for a blue laser, it is possible to measure within a repeatability within 0.2 mm, that is, within an error range of ± 0.1 mm for a step of 1 mm. It turns out that it is possible.

However, since the mold 12 is extremely high in temperature, if the measurement distance (L _{1 in} FIG. 3A) is 500 mm or less, the temperature of the sensor 46 inside the thermal shield 42 may exceed the guaranteed operating range. For this reason, in this example, as shown in FIG. 2, an inlet 54 for introducing compressed air for cooling into the heat shield 42 is provided in the fixed portion 42 a of the heat shield 42. Through this introduction port 54, the tip of a pipe 55 connected to the air tank 28 through a flow rate adjusting valve (not shown) is inserted into the heat shield 42, and in this example, based on the control of the control unit 30. Then, the compressed air in the air tank 28 is supplied from the introduction port 54 into the heat shield 42. The base 42 b is formed with an exhaust port 58 communicating with the outside, and the compressed air introduced into the heat shield 42 is discharged to the outside through the exhaust port 58.
As described above, in this example, the configuration in which the compressed air circulates inside the heat shield 42 prevents the sensor 46 from becoming high temperature (specifically, 50 ° C. or more). As will be described later, by providing a water cooling mechanism on the first wall surface 48 that is located between the sensor 46 and the mold 12 and shields heat during strain measurement, the temperature of the sensor 46 is increased. It is also possible to prevent.

On the other hand, as shown in FIG. 2 (A), the nozzle 22 for locally cooling the mold 12 is fixedly attached to the inside of the fixed portion 42a of the heat shield 42 via a bracket 60. The discharge port 22a protrudes outward from a second wall surface 49 that is different from the first wall surface 48 where the sensor 46 in the thermal shield 42 is disposed in proximity.
The nozzle 22 is connected to the air tank 28 through a flow rate adjusting valve (not shown), and the die 12 is cooled for local cooling from the discharge port 22a of the nozzle 22 based on the control of the control unit 30. Compressed air is discharged as a working gas.

  As described above, in this example, the discharge port 22a of the nozzle 22 is provided so that the cooling gas is discharged from the second wall surface 49 different from the first wall surface 48 of the heat shield 42, and the tip By rotating the part 38 around the joint axis P, switching between strain measurement and local cooling is performed. That is, when measuring the distortion of the mold 12, the first wall surface 48 of the thermal shield 42 is opposed to the surface of the mold 12 as shown in FIG. When local cooling of the mold 12 is performed, the second wall surface 49 of the heat shield 42 is opposed to the surface of the mold 12 as shown in FIG.

The operation when the cooling process is performed using the cooling processing facility 10 of the present embodiment will be specifically described below. In this example, the cooling process is performed so that the cooling rate at the highest temperature portion, that is, the slowest cooling portion in the mold 12 made of SKD 61 and having a width of 600 mm × height of 600 mm × thickness of 150 mm is 10 ° C./min. Shall.
As shown in FIG. 1, first, the mold 12 is heated to a quenching temperature in a heating chamber (not shown) and then placed on a set jig 14 by a crane or the like.
The mold 12 is allowed to cool in the atmosphere. At the same time, the infrared camera 24 detects the temperature distribution on the surface of the mold 12. And the highest temperature site | part of the metal mold | die 12 surface is specified based on the detection result of the temperature distribution. The control unit 30 outputs position information (X, Y coordinates) of the highest temperature part to the robot 20.

As shown in FIG. 3B, the robot 20 moves the discharge port 22a of the nozzle 22 attached to the distal end portion 38 of the movable arm 36 to the point G of the specified maximum temperature region. The maximum temperature site point distance above L ₂ of G of (in this case 300 mm) blown toward the maximum temperature site compressed air for cooling from the maximum temperature site (or highest temperature portion and the peripheral portion) locally Cooling.

In this example, this cooling operation is continued until the maximum temperature portion reaches 600 ° C. As indicated by the one-dot chain line in FIG. 5, the control unit 30 is preset with a transition of the planned surface temperature after starting the cooling operation, that is, a cooling rate (10 ° C./min in this example). While the position of the discharge port 22a of the nozzle 22 is moved to the highest temperature portion specified as needed by monitoring the camera 24, the cooling condition is controlled based on the difference between the detected temperature at the highest temperature portion and the planned surface temperature.
Specifically, if the detected temperature of the highest temperature part is higher than the planned surface temperature shown in FIG. 5, the amount of compressed air for local cooling is increased, and if the detected temperature is lower than the planned surface temperature, Reduce the amount of compressed air for local cooling. By doing in this way, the highest temperature site | part in the back surface 12b used as the object of a cooling process can be cooled with the cooling rate which was planned, or the cooling rate approximated to this.
Even after the detected temperature of the highest temperature region falls below 600 ° C., it is possible to continue the cooling process so as to coincide with the transition of the preset surface temperature set in advance. In some cases, when the detected temperature of the highest temperature portion reaches a predetermined temperature of 600 ° C. or lower, it is possible to switch to oil cooling and continue the cooling process.

FIG. 6 shows a maximum of a mold cooling test piece block (SKD61, width 600 mm × height 600 mm × thickness 150 mm) at a constant cooling rate between 1000 ° C. and 500 ° C. as shown in FIG. It is the figure which performed the local cooling of the temperature site | part and showed the result evaluated about the quenching state and maximum distortion of the simulation test piece after completion of cooling processing. The cooling gas using atmospheric, height L ₂ of the discharge nozzles were from the mold surface and 300 mm.

Here, the quenching state was evaluated by examining the hardness at a predetermined location on the surface of the simulated test piece after completion of the cooling treatment to determine whether a predetermined hardness (HRC 48 or higher) was obtained.
For the maximum strain, after completion of the cooling treatment, the displacement in the height direction was measured at a predetermined position at two peripheral portions and one central portion on the surface of the mock test piece, and a line connecting both ends of the peripheral portion was used as a reference line. The amount of displacement in the height direction was evaluated as the maximum strain amount.

  According to the figure, quenching failure occurs when the cooling rate is less than 9 ° C./min. On the other hand, normal quenching is performed when the cooling rate is 9 ° C./min or more, but the maximum strain increases as the cooling rate increases. From this result, it can be seen that a suitable cooling rate in the die simulation test piece, that is, a cooling rate that does not cause quenching failure and is within a maximum strain of 0.05 mm is 9 to 15 ° C./min. In this example, based on the preferable cooling rate obtained in this way, the transition of the planned surface temperature is set in the control unit 30 in advance, and the detected temperature of the highest temperature part coincides with the transition of the planned surface temperature. By controlling the cooling conditions in this way, it is possible to satisfactorily prevent the occurrence of poor quenching and distortion.

In the cooling processing facility of the present embodiment, it is possible to check the degree of distortion of the surface on which local cooling is performed during the cooling processing.
In this example, the nozzle 22 is configured such that compressed air for local cooling is discharged from a second wall surface 49 of the thermal shield 42 that is 90 ° different from the first wall surface 48 that emits laser light for detecting displacement. The discharge port 22a is provided, and the distal end portion 38 is rotated by 90 ° around the joint axis P, so that the state of local cooling and the state of measuring the amount of distortion can be switched.

  When measuring the amount of strain, it is desired to measure the amount of strain in a state where the first wall surface 48 of the thermal shield 42 shown in FIG. 3A is opposed to the surface of the mold 12 that is the object to be measured. The sensor 46 is moved to a point (X, Y coordinate), and the distance to the surface of the mold 12 is measured at a designated measurement point on the surface of the mold 12. Based on the positional information of the sensor 46 and the distance information to the surface of the mold 12 measured by the sensor 46, the displacement in the height direction of the surface of the mold 12, that is, the amount of distortion can be measured. FIG. 7 shows the result of detecting displacement at a plurality of measurement points located on a straight line by moving the sensor 46 in the horizontal direction along the back surface 12b of the mold 12 at the time of 800 ° C. during the cooling process. It is.

  In this way, in this example, since the mold surface distortion state can be detected in addition to the temperature distribution information on the mold surface during the cooling process, the cooling condition can be changed according to the distortion state. Is also possible. Note that local cooling is interrupted during strain measurement, but in this example, the local cooling state and strain measurement state can be switched in a short time, so the strain measurement is performed during the cooling process. Thus, the time period during which local cooling is interrupted can be shortened.

In the strain measuring apparatus 11 of the present embodiment as described above, the sensor 46 is fixed to the heat shield 42, and the sensor 46 and the heat shield 42 have an integral structure. The position can be moved, and the speed of the moving operation can be increased.
In the present embodiment, the box-shaped heat shield 42 protects the sensor 46 from the radiant heat emitted from the mold 12 in a high temperature state, and the cooling gas introduced inside the heat shield 42 and the sensor 46. Since it is possible to prevent the temperature from rising, it becomes possible to approach the high-temperature mold 12 in comparison with the conventional shape measuring apparatus, and the amount of strain is measured in a state where the measurement accuracy is improved. be able to.

  In the present embodiment, the sensor 46 is a laser type displacement detection sensor, and the irradiated laser beam is a blue laser beam having a wavelength of 350 to 450 nm. Therefore, the strain amount of the high-temperature mold 12 is measured. In addition, it is possible to accurately measure the amount of distortion by eliminating the influence of red heat of the mold 12 itself.

  In the present embodiment, the heat shield 42 is held at the distal end portion 38 of the movable arm 36 that can move in the three-dimensional direction, so that the portion approaching the mold 12 that is extremely hot can be moved to the movable arm. It can be limited to the front end portion 38 of 36 and the heat shield 42 attached thereto, and the drive mechanism of the robot 20 that does not have sufficient heat resistance can be arranged away from the mold 12.

In addition to the strain measuring device 11, the cooling processing device 10 of the present embodiment further discharges the cooling gas from the infrared sensor 24 that detects the temperature distribution on the surface of the die 12 and the discharge port 22a, thereby allowing the die 12 to be discharged. And a nozzle 22 that cools the surface of the mold 12, and has a function of locally cooling by discharging a cooling gas to a specific part of the mold 12 based on the detected temperature distribution of the surface of the mold 12. .
Further, in the cooling processing apparatus 10, a strain measurement operation is performed in which the first wall surface 48 of the heat shield 42 is opposed to the surface of the mold 12 by the rotation operation of the distal end portion 38 of the movable arm 36 that is moved in the three-dimensional direction. And the local cooling operation performed by making the second wall surface 49 of the heat shield face the surface of the mold 12, so that the degree of distortion of the mold 12 can be reduced in the cooling process during quenching. It can be confirmed easily in a short time.

FIG. 8 is an enlarged view showing a main part of another embodiment of the present invention.
In this embodiment, a water cooling mechanism 64 is provided on the first wall surface 48 of the thermal shield 42 located between the mold 12 and the sensor 46 when detecting the displacement.
The water cooling mechanism 64 is attached in contact with the first wall surface 48 and has a main body 65 for circulating the cooling water therein, an introduction pipe 66 for introducing the cooling water into the main body 65, and the cooling water for the main body. And a discharge pipe 67 for discharging from the inside of 65. Reference numerals 69 and 70 denote openings for allowing the laser light emitted from the sensor 46 and the reflected light reflected by the mold surface to pass therethrough.
When the displacement is detected, the first wall surface 48 of the heat shield 42 positioned between the mold 12 and the sensor 46 receives the radiant heat most strongly from the high-temperature mold 12. By providing the mechanism portion 64 and suppressing the temperature rise of the first wall surface 48, the temperature rise of the sensor 46 accommodated therein can be prevented.

  Although the embodiment of the present invention has been described in detail above, this is merely an example. The present invention can be implemented in variously modified forms without departing from the spirit of the present invention.

10 Cooling treatment equipment 11 Strain measuring device 12 Mold (object)
20 Robot 22 Nozzle (cooling means)
22a Discharge port 24 Infrared camera (temperature detection means)
DESCRIPTION OF SYMBOLS 30 Control part 36 Movable arm 38 Front-end | tip part 42 Heat shield 46 Displacement detection sensor 48 1st wall surface 49 2nd wall surface 54 Inlet 64 Water-cooling mechanism part

Claims (5)

A non-contact sensor for detecting the displacement of the object;
A box-like shape, containing the sensor in a fixed position inside, and having a heat shield that moves in position integrally with the sensor,
The non-contact type strain measuring apparatus, wherein the heat shield is provided with an inlet for introducing a cooling gas into the inside.   2. The non-contact type strain measuring apparatus according to claim 1, wherein the thermal shield is held at a tip of a movable arm that can move in a three-dimensional direction.   3. The non-contact type strain measuring apparatus according to claim 1, wherein the sensor is a laser type displacement detection sensor, and the irradiated laser beam is a blue laser beam having a wavelength of 350 to 450 nm. .   In any one of Claims 1-3, the water-cooling mechanism part is provided in the 1st wall surface of the said heat shield located between the said target object and the said sensor in the case of displacement detection, Non-contact type strain measuring device. The non-contact type strain measuring device according to any one of claims 1 to 4,
Temperature detecting means for detecting a temperature distribution on the surface of the object;
Cooling means for cooling the surface of the object by discharging a cooling gas from the discharge port,
The heat shield is rotatably attached to the tip of a movable arm that is movable in a three-dimensional direction,
Further, the cooling gas is discharged so that the cooling gas is discharged from a second wall surface different from the first wall surface of the thermal shield positioned between the object and the sensor when detecting displacement. The discharge port of the means is formed, and the first wall surface and the second wall surface of the thermal shield can be alternately opposed to the surface of the object by the rotation operation of the tip portion. A cooling treatment facility characterized by

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