JP6686588B2 - Non-contact strain measurement device and cooling treatment equipment - Google Patents

Description

  The present invention relates to a non-contact strain measuring device capable of measuring strain of a heated object in a high temperature state, and a cooling treatment facility including the non-contact strain measuring device.

Conventionally, as one of cooling methods at the time of quenching, a method is known in which a mold heated to a quenching temperature in a heating chamber is taken out of the heating chamber and put into an oil cooling tank as it is for quenching.
However, when such a rapid cooling is directly performed on a mold which is in a high temperature state in a large mold, a large temperature difference occurs between the respective parts, for example, between a corner part and a central part of the mold, and heat is generated. The stress causes the mold to be greatly distorted or cracked.

Since the distortion of the mold generated during such heat treatment is greatly affected by the cooling conditions at a high temperature of 600 ° C. or higher, it is possible to confirm the degree of distortion of the mold in the high temperature state during the cooling process during quenching. Is desirable.
However, when approaching the mold in a high temperature state, the radiation heat of the mold easily causes damage or deterioration of the measuring device, and on the other hand, when the mold is away from the mold to be measured, the measurement accuracy deteriorates.
Further, considering that the measurement is performed during the cooling process at the time of quenching, the temperature of the high temperature mold changes (temperature decrease) with time, and therefore strain measurement needs to be performed in a short time.

In Patent Document 1 below, a non-contact type sensor is housed inside a megaphone-shaped sensor hood with the top of a pyramid cut off, and a heat insulating curtain is arranged in a form that extends in the vertical and horizontal directions of the sensor hood. A shape measuring apparatus capable of measuring the shape of an inside high temperature material is disclosed.
However, in the device described in Patent Document 1, an opening is formed at the tip of the sensor hood, and there is no wall for shielding radiant heat between the sensor and the high temperature material to be measured. For this reason, it is difficult to measure the shape by bringing the sensor close to the object, and there is a limit in improving the measurement accuracy.
In addition, when moving the measurement points, it is necessary to wind and pull out the heat insulating curtains arranged in the surroundings in conjunction with the movement of the sensor and the sensor hood. There was a problem that became.

JP, 2004-219223, A

  In view of the above circumstances, the present invention is a non-contact strain measuring device and a cooling process capable of accurately measuring the strain amount of an object such as a mold in a heated high temperature state in a short time. It was made for the purpose of providing facilities.

Thus, claim 1 relates to a non-contact type strain measuring device, which forms a box with a non-contact type sensor for detecting displacement of an object, and accommodates the sensor in a fixed position inside. a heat shield positioned moves integrally with the sensor, it is possible positions move in three-dimensional directions, and a movable arm for holding the heat shield to the tip, the interior to the heat shield An introduction port for introducing a cooling gas is provided, and the movable arm moves the heat shield to a position where the sensor can detect displacement of the object .

Of those claims 2, Oite to claim 1, wherein the sensor is a displacement sensor of the laser type, and wherein the laser beam irradiated is a blue laser light having a wavelength of 350 to 450 nm.

According to a third aspect of the present invention, in any one of the first and second aspects, a water cooling mechanism section is provided on the first wall surface of the heat shield located between the object and the sensor during displacement detection. It is characterized by being.
According to a fourth aspect, in any one of the first to third aspects, the object is a mold.
According to a fifth aspect, in any one of the first to fourth aspects, the movable arm rotates the heat shield.

Claim 6 relates to a cooling treatment facility, wherein the non-contact strain measuring device according to any one of claims 1 to 4, temperature detecting means for detecting a temperature distribution on the surface of the object, and a discharge port. Cooling means for discharging a cooling gas to cool the surface of the object, and the heat shield is rotatably attached to the tip of a movable arm that is positionally movable in three-dimensional directions. At the time of detection, the cooling gas is discharged from the second wall surface, which is different from the first wall surface of the heat shield located between the object and the sensor, so that the cooling gas is discharged. An outlet is formed, and the first wall surface and the second wall surface of the heat shield can be alternately opposed to the surface of the object by the rotation operation of the tip portion. Characterize.

As described above, the non-contact type strain measuring device of the present invention has a box shape with a non-contact type sensor for detecting displacement of an object, and accommodates the sensor in a fixed state inside, and is integrated with the sensor. And a heat shield that moves in position.
According to such a non-contact strain measuring device of the present invention, the sensor is positionally fixed to the heat shield, and the sensor and the heat shield form an integral structure. Therefore, the shape measuring device including the conventional heat shield is provided. As described above, it is not necessary to separately provide a mechanism for moving or deforming the heat shield in conjunction with the movement of the sensor. According to the present invention, it is possible to move both the sensor and the box-shaped heat shield as the heat shield means at the same time by one moving means. It is possible to move the position at high speed.
Further, the present invention accommodates the sensor inside a box-shaped heat shield, and provides the heat shield with an inlet for cooling gas. It protects the sensor from the radiant heat emitted from the sensor and prevents the temperature of the heat shield and the sensor from rising due to the cooling gas introduced into the sensor. It becomes possible to approach the object, and the strain amount can be measured in a state where the measurement accuracy is improved.

Also in the present invention, when the displacement detection, Ru can be preferably provided a water cooling mechanism in the first wall of the thermal shield positioned between the object and the sensor. At the time of displacement detection, the first wall surface of the heat shield located between the object and the sensor receives the radiant heat from the high temperature object most strongly, so that the first wall surface is provided with the water cooling mechanism section. Suppressing the temperature rise of the first wall surface is effective in preventing the temperature rise of the internal sensor.

Also in the present invention, the sensor as a displacement sensor of the laser type, Ru can be a blue laser light having a wavelength of 350~450nm a laser beam irradiated. When measuring the amount of strain on the surface of an object in a high temperature heated to the quenching temperature, if the laser light emitted from the sensor is red, it is easily affected by the red heat of the object itself, causing a deterioration in measurement accuracy. Become. This pair Shi wave length by eliminating the influence of the red-hot in the measurement object itself by using a blue laser beam of 350~450nm it is possible to accurately measure the amount of strain.

In the present invention, our Ku is held the thermal shield on the tip portion of the position movable movable arm in three-dimensional directions. In the present invention, it is necessary to bring the sensor close to the object in order to accurately measure the strain amount of the object. However, the object heated to the quenching temperature may reach a high temperature of 1000 ° C. or higher. Therefore, if the heat shield is held at the tip of the movable arm in accordance with the present invention, the portion of the movable arm that approaches the object is limited to the tip of the movable arm and the heat shield attached thereto. It is possible to dispose a drive mechanism or the like that does not have sufficient heat resistance away from the object.

Next, in addition to the non-contact type strain measuring device of the present invention, the cooling treatment equipment of the present invention further includes a temperature detecting means for detecting the temperature distribution on the surface of the object, and a cooling gas discharged from the discharge port. A cooling means for cooling the surface of the object, and having a function of locally discharging a cooling gas to a specific part of the object based on the detected temperature distribution of the surface of the object. is there.
Further, in the cooling treatment facility of the present invention , a heat shield is rotatably attached to the tip of the movable arm that can move in three-dimensional directions, and the heat shield located between the object and the sensor during displacement detection. The discharge port of the cooling means is formed so that the cooling gas is discharged from the second wall surface different from the first wall surface of the body. Switching between the strain measurement operation performed by making the first wall surface of the body face the surface of the target object and the local cooling operation performed by making the second wall surface of the heat shield face the surface of the target object. You can
According to the cooling treatment equipment of the present invention , the strain measurement operation and the local cooling operation can be easily switched by the rotation operation of the tip portion, so that the degree of distortion of the object can be easily and easily shortened in the cooling process during quenching. It is suitable for checking in time.

  According to the present invention as described above, a non-contact strain measuring device and a cooling treatment facility capable of accurately measuring the strain amount of an object such as a mold in a heated high temperature state in a short time are provided. can do.

It is a figure showing the whole cooling processing equipment composition of one embodiment of the present invention. It is the figure which expanded and showed the front-end | tip part of the movable arm of FIG. It is the figure which showed the state before and behind when the front-end | tip part of the movable arm of FIG. 2 is rotated. It is a figure showing the relation between the color of laser light used for distortion measurement, and measurement accuracy. It is a figure for demonstrating the cooling operation of the same embodiment. It is the figure which showed the relationship between the cooling rate, the quenching state of the die, and the maximum strain amount. It is a figure showing an example of a result of distortion amount measurement performed in the middle of cooling processing. It is the figure which expanded and showed the principal part of other embodiment of this invention.

Next, an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing the overall configuration of a cooling treatment facility 10 of this embodiment. In FIG. 1, reference numeral 12 denotes a mold as an object to be processed, which is heated to the quenching temperature in a heating chamber (not shown) and then placed on the setting jig 14 by a crane or the like. Reference numeral 20 is a robot to which a nozzle 22 for local cooling, which will be described later, is attached, and 24 is an infrared camera which is located in front of the mold 12 and serves as a temperature detecting means for detecting the temperature distribution on the surface of the mold 12.
Further, the cooling treatment facility 10 has a compressor 26, a dryer 27, and an air tank 28, which are a series of devices for generating and storing compressed air, on the left side in FIG. 1 (A). Further, the cooling treatment facility 10 has a control unit 30 that controls the operation of the facility.

The mold 12 is made of tool steel (SKD61), has a width of 600 mm, a height of 600 mm, and a thickness of 150 mm, and is provided with an uneven design surface 12a and a flat back surface 12b opposite to the design surface 12a. In this example, the mold 12 is placed on the setting jig 14 with the back surface 12b facing forward (on the side where the robot 20 and the infrared camera 24 are arranged).
The steel type used for the mold 12 is not particularly limited, and a special steel excellent in hardenability can be appropriately adopted. The size of the mold is also not particularly limited, but the present invention is particularly effective when the mold has a weight of 150 kg or more, which tends to cause a temperature difference (variation in cooling rate) during the cooling process during quenching.

  The position of the infrared camera 24 is set so that the entire back surface 12b of the mold 12 is included in the detection range. The infrared camera 24 detects the temperature distribution on the surface of the mold 12 (specifically, the back surface 12b), and 12 The highest temperature portion of the surface is specified, and the temperature of the highest temperature portion is detected. The result of temperature detection by the infrared camera 24 is sent to the control unit 30. The control unit 30 controls the cooling condition for the mold 12 based on the detection result.

The robot 20 has a base 34 fixed on the pedestal 32 and a movable arm 36 extending from the base 34. The movable arm 36 has a plurality of joints that rotate or bend, and the distal end portion 38 of the movable arm 36 moves up and down, left and right, and in the front-back direction within a movable range indicated by a two-dot chain line in FIG. It is supposed to be movable. A nozzle 22 for locally cooling the die 12 is attached to the tip portion 38 thereof.
The mold 12 immediately after being heated to the quenching temperature becomes extremely hot. In this example, in order to prevent the influence of radiation heat from the mold 12 on the entire robot 20, the robot 20 is installed at a position displaced from the front of the mold 12.

FIG. 2 is an enlarged view of the tip portion 38 of the movable arm 36. As shown in the figure, the tip portion 38 is rotatably connected to the base side of the movable arm 36 about the joint axis P.
A box-shaped heat shield 42 is attached and fixed to an attachment member 40 located on the opposite side of the distal end portion 38 from the joint axis P by an attachment bolt 44.

  The heat shield 42 includes a plate-shaped fixed portion 42a directly fixed to the mounting member 40 on the movable arm 36 side, a flat plate-shaped base body 42b fixed in a state orthogonal to the fixed portion 42a, and a base body. A lid 42c fixed to the base body 42b so as to cover one surface on 42b, and forms a box shape in which a wall for heat shielding is formed in each of the up, down, left, right and front directions as a whole. ing. The heat shield 42 shields the heat radiated from the mold 12 toward the tip 38 of the movable arm 36 and protects the sensor and the like housed inside.

Reference numeral 46 denotes a laser-type displacement detection sensor used for measuring the strain on the surface of the mold 12, and is housed inside the heat shield 42, and is attached to the base body 42b via a bracket 47 having a T-shaped cross section. It is fixed on the inner surface. As shown in FIGS. 2 (A) and 2 (B), the sensor 46 is located at a position farthest from the joint axis P (on the left side in the drawing), that is, at a position most accessible to the surface of the mold 12. It is arranged near the first wall surface 48 of the shield 42. An opening 51 is formed in the first wall surface 48, and a heat resistant glass 52 is fitted therein, and the laser light for displacement detection emitted from the light emitting portion 46a of the sensor 46 is emitted to the outside through the opening 51. After being reflected by the surface of the mold 12 as an object, the light is received by the light receiving portion 46b through the opening 51 as well. The received reflected light is imaged on the optical position detection element in the light receiving section 46b, and the amount of displacement in the height direction to the surface of the mold 12 is measured based on the imaged position.
In this example, the sensor 46, the heat shield 42, and the movable arm 36 movably holding them constitute the non-contact strain measuring device 11.

  In this example, the sensor 46 is used to measure the amount of displacement (distortion amount) of the surface of the mold 12 heated to the quenching temperature in the high temperature state. Therefore, if the laser light emitted from the sensor 46 is red, It is easily affected by the red heat of the mold 12 itself. Therefore, the sensor 46 of this example uses blue laser light having a wavelength of 350 to 450 nm.

  FIG. 4 shows the measurement accuracy when the laser light emitted from the laser displacement sensor 46 is red (FIG. (B)) and blue (wavelength is 350 to 450 nm) (FIG. (C)). It is a figure. The measurement results shown in FIGS. 4B and 4C are obtained by forming a step of 10 mm × 10 mm × height 1 mm near the center of the block 13 of 300 mm × 300 mm × 300 mm shown in FIG. 4A. It is the result of measuring the step difference in a state where the block 13 is heated to 800 ° C. Specifically, the step of 1 mm is measured 10 times, and the average value of 10 times and the measured value having the largest difference from the average value are plotted as an error bar. The measurement is performed while sequentially changing the measurement distance between the block 13 and the sensor 46.

  As shown in FIG. 4B, in the case of a red laser, the step height of 1 mm cannot be measured properly due to the influence of red heat of the block 13. On the other hand, in the case of the blue laser, as shown in FIG. 4C, the closer the measurement distance (distance between the block 13 and the sensor 46) is, the more accurately the step can be measured. In the measurement of mold strain, it is required that the repeatability is within 0.2 mm. According to the result shown in FIG. 4, if the measurement distance is 500 mm or less for the blue laser, the repeatability is within 0.2 mm, that is, within 1 mm of the step, the measurement can be performed within an error range of ± 0.1 mm. I see that it is possible.

However, since the mold 12 is extremely hot, if the measurement distance (L _{1 in} FIG. 3A) is set to 500 mm or less, the temperature of the sensor 46 inside the heat shield 42 may exceed the guaranteed operating range. For this reason, in this example, as shown in FIG. 2, the fixed portion 42a of the heat shield 42 is provided with an inlet port 54 for introducing compressed air for cooling into the heat shield 42. Through this inlet 54, the tip of a pipe 55 connected to the air tank 28 via a flow control valve (not shown) is inserted into the inside of the heat shield 42, and in this example, based on the control of the controller 30. The compressed air in the air tank 28 is supplied into the heat shield 42 from the inlet 54. An exhaust port 58 is formed in the base body 42b so as to communicate with the outside, and the compressed air introduced into the heat shield 42 is exhausted to the outside through the exhaust port 58.
As described above, in this example, the compressed air flows through the inside of the heat shield 42 to prevent the sensor 46 from reaching a high temperature (specifically, 50 ° C. or higher). As will be described later, by providing a water cooling mechanism on the first wall surface 48 that is located between the sensor 46 and the mold 12 and shields heat during strain measurement, it is possible to prevent the sensor 46 from reaching a high temperature. It is also possible to prevent it.

On the other hand, the nozzle 22 for locally cooling the die 12 is attached and fixed to the inside of the fixed portion 42a of the heat shield 42 via the bracket 60 as shown in FIG. The ejection port 22a protrudes outward from a second wall surface 49 different from the first wall surface 48 in which the sensor 46 in the heat shield 42 is arranged in proximity.
The nozzle 22 is connected to an air tank 28 via a flow control valve (not shown), and under the control of the control unit 30, the die 12 is cooled for local cooling from the discharge port 22a of the nozzle 22. Compressed air is discharged as a working gas.

  As described above, in this example, the discharge port 22a of the nozzle 22 is provided so that the cooling gas is discharged from the second wall surface 49 of the heat shield 42, which is different from the first wall surface 48, and the tip thereof is provided. By rotating the portion 38 around the joint axis P, switching between strain measurement and local cooling is performed. That is, when measuring the strain of the mold 12, the first wall surface 48 of the heat shield 42 is opposed to the surface of the mold 12 as shown in FIG. Further, when the mold 12 is locally cooled, the second wall surface 49 of the heat shield 42 is opposed to the surface of the mold 12 as shown in FIG. 3B.

The operation when the cooling processing is performed using the cooling processing facility 10 of the present embodiment will be specifically described below. In this example, the cooling process is performed so that the cooling rate is 10 ° C./min at the highest temperature portion, that is, the slowest cooling portion in the mold 12 made of SKD61 and having a width of 600 mm, a height of 600 mm, and a thickness of 150 mm. I shall.
As shown in FIG. 1, first, the mold 12 is heated to the quenching temperature in a heating chamber (not shown) and then placed on the setting jig 14 by a crane or the like.
Then, the mold 12 is allowed to cool in the atmosphere. At the same time, the infrared camera 24 detects the temperature distribution on the surface of the mold 12. Then, the highest temperature site on the surface of the mold 12 is specified based on the detection result of the temperature distribution. The control unit 30 outputs the position information (X, Y coordinates) of the highest temperature portion to the robot 20.

As shown in FIG. 3B, the robot 20 moves the ejection port 22a of the nozzle 22 attached to the tip end portion 38 of the movable arm 36 to the point G of the identified maximum temperature portion. Then, the compressed air for cooling is blown toward the highest temperature portion from a distance L ₂ above the point G of the highest temperature portion (here, 300 mm) to locally cause the highest temperature portion (or the highest temperature portion and its peripheral portion). Cooling.

In this example, this cooling operation is continued until the highest temperature portion reaches 600 ° C. As indicated by the alternate long and short dash line in FIG. 5, the controller 30 presets the transition of the planned surface temperature after the start of the cooling operation, that is, the cooling rate (10 ° C./min in this example). While the position of the discharge port 22a of the nozzle 22 is moved to the highest temperature portion specified by the monitoring of the camera 24 at any time, the cooling condition is controlled based on the difference between the detected temperature at the highest temperature portion and the planned surface temperature.
Specifically, when the detected temperature of the highest temperature portion is higher than the planned surface temperature shown in FIG. 5, the amount of compressed air for local cooling is increased, and when the detected temperature is lower than the planned surface temperature, Reduce the amount of compressed air for local cooling. By doing so, it is possible to cool the highest temperature portion on the back surface 12b which is the target of the cooling process at a planned cooling rate or a cooling rate close to this.
Note that, even after the detected temperature of the highest temperature portion falls below 600 ° C., it is possible to continue the cooling treatment so as to match the transition of the preset surface temperature set in advance. In some cases, when the detected temperature of the highest temperature portion reaches a predetermined temperature of 600 ° C. or lower, it is possible to switch to oil cooling and continue the cooling process.

FIG. 6 is a block diagram of a mold simulation test piece (SKD61, width 600 mm × height 600 mm × thickness 150 mm), and the maximum cooling rate is 1000 ° C. to 500 ° C. as shown in FIG. It is the figure which showed the result of having evaluated the quenching state and the maximum strain of the simulated test piece after local cooling of the temperature part and completion of the cooling treatment. Atmosphere was used as the cooling gas, and the height L ₂ of the nozzle discharge port was set to 300 mm from the mold surface.

Here, the quenching state was evaluated by examining the hardness at a predetermined location on the surface of the simulated test piece after completion of the cooling treatment and determining whether or not a predetermined hardness (HRC 48 or higher) was obtained.
Regarding the maximum strain, after the cooling treatment was completed, the displacement in the height direction was measured at predetermined positions on the surface of the simulated test piece at two locations in the peripheral portion and one location in the central portion, and the line connecting the both ends of the peripheral portion was used as the reference line. The displacement amount in the height direction in this case was evaluated as the maximum strain amount.

  According to the figure, if the cooling rate is less than 9 ° C / min, quenching failure occurs. On the other hand, if the cooling rate is 9 ° C./min or more, normal quenching is performed, but as the cooling rate increases, the maximum strain amount increases. From this result, it can be seen that a suitable cooling rate of the mold test piece, that is, a cooling rate at which the maximum strain amount is within 0.05 mm without causing defective quenching is 9 to 15 ° C./min. In this example, the transition of the planned surface temperature is set in advance in the control unit 30 based on the suitable cooling rate thus obtained, and the transition of the planned surface temperature at which the detected temperature of the highest temperature portion is applied matches. By controlling the cooling conditions in this manner, it is possible to favorably prevent the occurrence of quenching defects and distortion.

Further, in the cooling treatment facility of the present embodiment, it is possible to confirm the degree of distortion of the surface that is locally cooled during the cooling treatment.
In this example, the nozzle 22 is so arranged that the compressed air for local cooling is discharged from the second wall surface 49 of the heat shield 42, which is different from the first wall surface 48 emitting the laser beam for displacement detection by 90 °. The discharge port 22a is provided, and by rotating the distal end portion 38 by 90 ° around the joint axis P, it is possible to switch between the state of performing local cooling and the state of measuring the amount of strain.

  When measuring the amount of strain, it is desired to measure the amount of strain with the first wall surface 48 of the heat shield 42 shown in FIG. 3 (A) facing the surface of the mold 12 that is the measurement target. The sensor 46 is moved to a point (X, Y coordinates), and the distance to the surface of the mold 12 is measured at a designated measurement point on the surface of the mold 12. Then, based on the position information of the sensor 46 and the distance information to the surface of the mold 12 measured by the sensor 46, the displacement in the height direction of the surface of the mold 12, that is, the amount of strain can be measured. FIG. 7 is a diagram showing a result of detecting displacements at a plurality of measurement points located on a straight line by moving the sensor 46 in the horizontal direction along the back surface 12b of the mold 12 at 800 ° C. during the cooling process. Is.

  As described above, in this example, in addition to the temperature distribution information on the mold surface, it is possible to detect the distortion state of the mold surface during the cooling process. Therefore, the cooling condition can be changed according to the distortion state. Is also possible. Although the local cooling is interrupted during the strain amount measurement, in this example, the local cooling state and the strain amount measuring state can be switched in a short time, so the strain amount is measured during the cooling process. This can shorten the time period during which the local cooling is interrupted.

In the strain measuring apparatus 11 according to the present embodiment as described above, the sensor 46 is positionally fixed to the heat shield 42, and the sensor 46 and the heat shield 42 have an integrated structure. The position can be moved, and the moving operation can be speeded up.
In addition, in the present embodiment, the box-shaped heat shield 42 protects the sensor 46 from the radiant heat emitted from the mold 12 in a high temperature state, and the cooling gas introduced into the interior protects the heat shield 42 and the sensor 46 from each other. Since it is possible to prevent the temperature from rising, it is possible to move closer to the hot mold 12 as compared with the conventional shape measuring apparatus, and the strain amount is measured with the measurement accuracy improved. be able to.

  Further, in the present embodiment, the sensor 46 is a laser type displacement detection sensor, and the emitted laser light is blue laser light having a wavelength of 350 to 450 nm. Therefore, the strain amount of the high temperature mold 12 may be measured. Also, the strain amount can be accurately measured by eliminating the influence of red heat of the mold 12 itself.

  In addition, in the present embodiment, the heat shield 42 is held at the tip 38 of the movable arm 36 that is movable in three-dimensional directions, so that the movable arm can be located at a portion approaching the die 12 that becomes extremely hot. It can be limited to the tip portion 38 of 36 and the heat shield 42 attached thereto, and the drive mechanism of the robot 20 that does not have sufficient heat resistance can be arranged away from the mold 12.

In addition to the strain measuring device 11, the cooling processing device 10 of the present embodiment further includes an infrared sensor 24 that detects the temperature distribution on the surface of the mold 12 and a mold 12 that discharges a cooling gas from the discharge port 22a. And a nozzle 22 that cools the surface of the mold 12, and has a function of locally discharging the cooling gas to a specific portion of the mold 12 based on the detected temperature distribution of the surface of the mold 12. .
Further, in the cooling processing device 10, the strain measurement operation performed by causing the first wall surface 48 of the heat shield 42 to face the surface of the mold 12 by the rotation operation of the tip end portion 38 of the movable arm 36 that moves in the three-dimensional direction. And the local cooling operation performed by making the second wall surface 49 of the heat shield face the surface of the mold 12 can be switched, so that the degree of distortion of the mold 12 can be reduced in the cooling process during quenching. It can be confirmed easily and in a short time.

FIG. 8: is the figure which expanded and showed the principal part of other embodiment of this invention.
In this embodiment, a water cooling mechanism portion 64 is provided on the first wall surface 48 of the heat shield 42 located between the mold 12 and the sensor 46 during displacement detection.
The water cooling mechanism portion 64 is attached in contact with the first wall surface 48, a main body portion 65 that circulates the cooling water inside, an introduction pipe 66 that introduces the cooling water into the main body portion 65, and the main body portion that cools the cooling water. And a discharge pipe 67 for discharging from the inside. Reference numerals 69 and 70 are openings for passing the laser light emitted from the sensor 46 and the reflected light reflected by the mold surface.
During the displacement detection, the first wall surface 48 of the heat shield 42 located between the mold 12 and the sensor 46 receives the radiant heat from the hot mold 12 most strongly, and therefore the first wall surface 48 is cooled by water. By providing the mechanism portion 64 and suppressing the temperature rise of the first wall surface 48, the temperature rise of the sensor 46 housed inside can be prevented.

  Although the embodiment of the present invention has been described in detail above, this is merely an example. The present invention can be implemented in a mode in which various changes are made without departing from the spirit of the present invention.

10 Cooling treatment facility 11 Strain measuring device 12 Mold (object)
20 robot 22 nozzle (cooling means)
22a Discharge port 24 Infrared camera (temperature detection means)
30 Control part 36 Movable arm 38 Tip part 42 Thermal shield 46 Displacement detection sensor 48 First wall surface 49 Second wall surface 54 Inlet port 64 Water cooling mechanism part

Claims (6)

A non-contact sensor that detects displacement of the object,
A heat shield that has a box shape, accommodates the sensor in a fixed position inside, and moves in position integrally with the sensor;
A movable arm that can move in three dimensions and that holds the heat shield at its tip ,
The heat shield is provided with an inlet for introducing a cooling gas into the inside ,
The non-contact strain measurement device , wherein the movable arm moves the thermal shield to a position where the sensor can detect displacement of the object . Oite to claim 1, wherein the sensor is a displacement sensor of a laser type, non-contact strain measuring device, wherein the laser beam irradiated is a blue laser light having a wavelength of 350 to 450 nm. In any 1 item | term of Claim 1 or 2 , The water-cooling mechanism part is provided in the 1st wall surface of the said heat shield located between the said object and the said sensor at the time of displacement detection, It is characterized by the above-mentioned. Non-contact strain measuring device. The non-contact strain measuring device according to claim 1, wherein the object is a mold. The non-contact strain measurement device according to any one of claims 1 to 4, wherein the movable arm rotates the heat shield. A non-contact strain measuring device according to any one of claims 1 to 4,
Temperature detection means for detecting the temperature distribution of the surface of the object,
A cooling means for cooling the surface of the object by discharging a cooling gas from a discharge port,
The heat shield is rotatably attached to the tip of a movable arm that can move in three dimensions.
Further, when the displacement is detected, the cooling gas is discharged from a second wall surface different from the first wall surface of the heat shield located between the object and the sensor so that the cooling gas is discharged. A discharge port of the means is formed, and the first wall surface and the second wall surface of the heat shield can be alternately opposed to the surface of the object by the rotation operation of the tip portion. Cooling treatment facility characterized by

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