JP2017170564A - Wire saw and traverse method for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a traverse method for a wire saw evenly winding a wire around a reel with a simple mechanism.SOLUTION: In a traverse method for a wire saw 1, a wire 11 is delivered from a delivery reel 12, the delivered wire 11 is pressed on a workpiece member W so as to cut the workpiece member W, and the wire 11 is wound around a winding reel 13. In the traverse method, a link member 47 is provided to be connected to each of two moving units 30a, 30b which are integrated with each of the delivery reel 12 and the winding reel 13. The delivery reel 12 and the winding reel 13 are moved in axial directions of the reels via the link member 47, thereby delivering and winding the wire 11 so that the wire is substantially perpendicular to the axial directions of the delivery reel 12 and the winding reel 13 by two guide pulleys 15a, 15b for guiding the wire 11 to each of the delivery reel 12 and the winding reel 13.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a wire saw and a wire saw traversing method. More specifically, the present invention relates to a wire saw that performs feeding and winding of a wire with high accuracy and a traverse method of the wire saw.

  2. Description of the Related Art Conventionally, there is known a wire saw that cuts a workpiece by running a wire in one direction or a reciprocating direction and pressing the workpiece (for example, sapphire, silicon carbide, silicon, crystal, etc.) on the wire. ing. Recently, a fixed abrasive wire in which diamond abrasive grains are fixed on the surface of the wire by electrodeposition or resin is widely used.

  In the wire saw, the wire is wound around a supply reel in a multiple manner, and after the wire is supplied from the supply reel, it contributes to the cutting of the workpiece, and is then wound around the take-up reel. In addition, when the wire travels back and forth, the winding side and the feeding side are switched at a predetermined cycle, and during reverse rotation, the wire is fed out from the winding reel, and the wire is wound around the feeding reel (usually in reciprocating traveling) There is a difference in the wire feed amount, and the wire is supplied from the feed reel to the take-up reel by a predetermined amount). And when winding a wire, the traverse mechanism is provided so that a wire may be wound up uniformly (for example, patent documents 1).

If the wire is not evenly wound when winding the wire, particularly in the case of a fixed abrasive wire type wire saw, there is a problem that the abrasive grains of adjacent wires are caught by each other and disconnected. Further, when the winding is biased, the outer diameter on the reel becomes irregular and the rotation speed becomes non-uniform, and there is a problem that the wire is broken by bending or pulling the wire. Furthermore, there is a problem that the wires are damaged due to non-uniform contact between the wires, or the abrasive grains fall off and wear quickly. In addition, when the feeding and winding of the wire are reversed during reciprocating traveling, the wire wound non-uniformly may be caught at the time of feeding, and the wire may be worn early or damaged and disconnected.
Japanese Patent No. 5250376

  By the way, the traverse mechanism as disclosed in Patent Document 1 moves the guide pulleys corresponding to each of the supply reel and the take-up reel along the axial direction of the reels so as to wind the wire uniformly. ing. Each guide pulley is provided with a drive source.

  When the traverse mechanism itself is to be mounted on a wire saw, it is necessary to mount a traverse mechanism corresponding to both the supply reel and the take-up reel and to provide a plurality of drive sources. Therefore, when applied to a small wire saw, it is necessary to secure a space for arranging the drive source, and it is necessary to enlarge the wire saw itself.

  Recently, a small wire saw has been used as a desktop or robot tool, but it is difficult to mount the traverse mechanism as described above. Short wires have been used. However, when the traverse mechanism is not provided, a short wire is used, which limits the material and size of the workpiece.

The invention according to claim 1 is a wire saw that cuts the workpiece by pressing the wire against the workpiece between a supply reel that feeds the wire and a take-up reel that winds the wire.
A wire saw unit having the supply reel and the take-up reel;
The wire saw unit is
Two guide pulleys for guiding the wire respectively to the supply reel and the take-up reel;
Two moving units that move in the axial direction integrally with the feeding reel and the take-up reel,
A drive unit that moves either one of the two moving units in the axial direction of the reel,
By moving either one of the two moving units in the axial direction of the reel and moving the feeding reel and take-up reel along the axial direction of the reel, the wires guided by the both guide pulleys are respectively fed out. A wire saw that employs a configuration in which the reel is wound and wound so as to be substantially perpendicular to the axial direction of the reel and the take-up reel.

  According to a second aspect of the present invention, in the first aspect of the invention, the drive unit includes an eccentric cam, a motor that rotationally drives the eccentric cam, an eccentric shaft of the eccentric cam, and both moving units. A link member connected thereto, and the eccentric shaft is connected to one of both moving units so that the feeding reel and the take-up reel are moved in the axial direction of the reel via the link member. This is a wire saw that employs the above configuration.

  According to a third aspect of the present invention, in the first aspect of the present invention, the drive unit is connected to a ball screw provided along a moving direction of the moving unit, a driving unit for driving the ball screw, and both moving units. A wire saw that employs a configuration in which both moving units are moved in the axial direction of the reel through the link member by driving either one of the moving units.

  A fourth aspect of the present invention is a wire saw that adopts a configuration in which the movement period of both the moving units is controlled in a sinusoidal shape in the first aspect of the present invention.

  A fifth aspect of the present invention is a wire saw that adopts a configuration in which the wire saw unit is connected to a tip of a freely movable robot arm in the first aspect of the present invention.

The invention of claim 6 is a traverse method of a wire saw in which a wire is fed from a feeding reel, the workpiece is cut by pressing the fed wire against the workpiece, and the wire is wound on a take-up reel.
Two guide pulleys that guide the wire to each of the supply reel and the take-up reel by moving either one of the two moving units integrated with the supply reel and the take-up reel in the axial direction of the reel. This is a wire saw traversing method adopting a configuration in which the wire is fed and wound so as to be substantially perpendicular to the axial direction of the feeding reel and the winding reel, respectively.

The invention of claim 7 is a wire saw traversing method in which a wire is fed from a feeding reel, the workpiece is cut by pressing the fed wire against the workpiece, and the wire is wound on a take-up reel.
A link member connected to each of two moving units integrated with the supply reel and the take-up reel is provided, and the supply reel and the take-up reel are moved along the axial direction of the reel via the link member. In this configuration, the two guide pulleys for guiding the wire to each of the supply reel and the take-up reel are used to supply and take up the wire so as to be substantially perpendicular to the axial direction of the supply reel and the take-up reel, respectively. Is a wire saw traversing method.

  The invention according to claim 8 is the invention according to claim 6 or 7, wherein a wire saw unit having the feeding reel, the take-up reel, and the both moving units is provided, and the wire saw unit is used as a robot. This is a wire saw traversing method that employs a configuration in which a workpiece is processed by freely moving the robot arm by connecting to the tip of the arm.

  A ninth aspect of the present invention is the wire saw traversing method according to any one of the sixth to eighth aspects, wherein the moving period of the both moving units is controlled in a sinusoidal shape.

  In the first to ninth aspects of the present invention, the movement of the supply reel and the take-up reel may be in the same direction or in different directions as long as they move along the axial direction of the reel.

  According to the present invention, at the time of traversing, either the supply reel or the take-up reel is driven in the reel axial direction so that the other supply reel or take-up reel is in the same direction or different from each other along the axial direction of the reel. Therefore, the wire is wound on the supply reel or the take-up reel via the guide pulley with a predetermined pitch accurately in the direction substantially perpendicular to the axial direction.

  Further, according to the present invention, since there is one drive source for traversing the reel, the wire saw unit can be reduced in size and the cost can be reduced.

  In addition, according to the present invention, since the wire saw unit can be reduced in size, if mounted on the tip of a movable robot arm, a wire saw capable of cutting a workpiece into various shapes can be provided.

  In the present invention, if the traverse moving period is controlled in a sinusoidal shape, the feeding reel and the take-up reel move smoothly, so that the wire is evenly wound and the wire is not broken. .

These are the perspective views of the wire saw which concerns on one Embodiment of this invention. These are the partially notched top views of the wire saw unit part in this invention. FIG. 3 is a cross-sectional view taken along arrow AA in FIG. 2. These are the front views of the wire saw unit part in this invention. These are explanatory drawings showing operation | movement of the wire saw unit part in this invention. These are explanatory drawings showing operation | movement of the wire saw unit part in this invention. These are the time charts which concern on one Embodiment of traverse control in this invention. These are arrow sectional views of the wire saw unit part which concerns on another embodiment of this invention in the AA direction of FIG. These are explanatory drawings showing operation | movement in the case of cut | disconnecting a workpiece with the wire saw of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 9.

  FIG. 1 is a perspective view of a wire saw according to an embodiment of the present invention. The wire saw 1 according to the present invention includes an articulated robot 4, a wire saw unit 2 connected to the tip of the articulated robot 4, a table 6 provided within the movement range of the articulated robot 4, and the like.

  The articulated robot 4 is erected on a machine base 3 fixedly installed on a floor surface or the like, and a plurality of arms can freely turn and bend at joint portions so that the arm tip 4a can move freely. It has become. The arm tip 4a of the articulated robot 4 is controlled to move freely by a control unit (not shown).

  A frame shaft 10a of a wire saw unit 2 is connected to an arm tip 4a of the articulated robot 4 via a tool changer 5, and the wire saw unit 2 can be freely moved by driving the articulated robot 4. Is possible.

  The tool changer 5 may be configured such that the articulated robot 4 and the wire saw unit 2 are detachable, and various appropriate mechanisms are used. For example, the articulated robot 4 and the wire saw unit 2 may be attached to and detached from each other using a ball plunger or other engaging member. Further, the articulated robot 4 side and the wire saw unit 2 side can be attached to and detached from each other by using magnetic force, adsorption force, or the like. Note that the wire saw unit 2 may be directly fixed to the articulated robot 4 without using the tool changer 5.

  When the tool changer 5 is used, for example, by preparing a plurality of different wire diameters of the wire 11 of the wire saw unit 2 to be described later, it is possible to flexibly handle various workpieces W. If a plurality of tools other than the wire saw unit 2 are prepared, in place of cutting with the wire saw unit 2, drilling or polishing can be performed freely.

  The table 6 has a support portion fixed to a floor surface or the like, and a plurality of suction holes 6a are provided on the upper surface thereof. The suction hole 6a is connected to a vacuum pump (not shown) so as to suck and hold the workpiece W to be placed. The workpiece W is, for example, silicon, sapphire, silicon carbide, CFRP, or the like. In addition, recently, honeycomb members used for automobiles, aircrafts, and the like as workpieces W are also cut. This honeycomb member is formed by arranging a large number of cylindrical cells made of members such as aramid fibers and aluminum in a honeycomb shape, and has air permeability in the longitudinal direction of the cells. When cutting the breathable honeycomb member or the like, the breathable member may be covered with a non-breathable nylon sheet or the like and held on the table 6 by suction.

  As shown in FIGS. 2 to 4, the wire saw unit 2 is provided on a U-shaped frame 10 and is provided with a feeding reel 12 of a wire 11 supported on a reel shaft 20a and a wire supported on a reel shaft 20b. 11 take-up reel 13, a plurality of guide pulleys 15 a to 17 a and 15 b to 17 b provided on the frame 10, and the feed reel 12 and take-up reel 13, respectively, in the direction of the reel shafts 20 a and 20 b. One end of each of the movable units 30a and 30b, the drive unit 40 for driving one of the two movable units 30a and 30b, and the center of the movable unit 30a and the movable unit 30b are engaged with each other. A link member 47 or the like that is pivotally supported by the shaft is provided.

  For example, a fixed abrasive wire having diamond abrasive grains fixed on the surface thereof by electrodeposition, resin bonding, or the like is wound around the supply reel 12 in multiple layers. The wire 11 fed from the feeding reel 12 is guided to the guide pulley 17a via the plurality of guide pulleys 15a and 16a, and then guided to the outside of the cover 21 to form a cutting area 19. After being guided to the cutting area 19, the wire 11 is guided to the arm portion of the winding-side frame 10, and is wound around the winding reel 13 via the guide pulleys 17b, 16b, and 15b. Yes.

  Two injection nozzles 14 and 14 (see FIG. 1) are provided in the vicinity of the cutting area 19 so that a working fluid or cooling air is injected. Water, glycol, or the like is used as the processing liquid. When a fixed abrasive wire is not used, a slurry in which abrasive grains such as diamond and silicon carbide are kneaded in the processing liquid is used. In addition, when the workpiece W chemically reacts with the machining liquid, it is possible to blow cooling air from the jet nozzle 14 and cut it in a dry environment. In this case, cutting waste is blown away while cooling the wire 11 of the cutting part with cooling air. In place of jetting the cooling air, suction may be performed, both sides may be sucked, or one may be sucked and switched according to the traveling direction of the wire 11.

  The guide pulleys 15a and 15b are pivotally supported by support frames that are erected on the frame 10, respectively. The guide pulleys 15a and 15b are provided with load sensors 18 and 18 on their respective pulley shafts. The tension of the wire 11 is measured, and the reel 11 and the winding reel 12 are wound so that a predetermined tension is applied to the wire 11. The rotation of the take-up reel 13 is controlled. In this embodiment, the load sensor 18 is provided in both of the guide pulleys 15a and 15b, but it may be provided only in either one.

  The wire 11 may be moved in one direction by rotating the supply reel 12 and the take-up reel 13 only in one direction, or the wire 11 is rotated by rotating the supply reel 12 and the take-up reel 13 forward and reverse. You may make it make it reciprocate. When the wire 11 is reciprocated, it is preferable to provide a difference between forward rotation and reverse rotation and supply the wire 11 by a predetermined amount. The workpiece W is cut by pressing the wire 11 in the cutting area 19 against the workpiece W while the wire 11 is traveling.

  The wire 11 is guided to the two guide pulleys 16 a and 16 a via the guide pulley 15 a, changed in direction, and supplied to the cutting area 19. The guide pulley 17a immediately before the cutting area 19 and the guide pulley 17b immediately after the cutting area 19 are pivotally supported by the support frame 22, and support the wire 11 from above as shown in FIG. Therefore, when the workpiece W is cut by the wire 11 in the cutting area 19, the workpiece W is pressed from the lower side to the upper side in FIG. By doing in this way, since the workpiece W does not interfere with the pocket portion of the U-shaped cover 21, the degree of freedom in the size of the workpiece W to be cut increases. Further, when the wire 11 in the cutting area 19 is swung and cut, the wire 11 in the cutting area 19 is swung only by rotating the arm tip 4a of the articulated robot 4 forward and backward with respect to the frame shaft 10b. be able to. Although the operation is complicated, the articulated robot 4 can be controlled to swing the frame 10.

  The moving unit 30a includes an L-shaped moving frame 31, and the supply reel 12 is pivotally supported on the surface of the moving frame 31 (upward in FIG. 3). Below the moving unit 30a, a motor 36 connected to the reel shaft 20a of the supply reel 12 is provided. The motor 36 is fixed to the moving frame 31.

  A rail 32 is laid on the back surface of the moving frame 31 along the reel shafts 20a and 20b. A support frame 33 is erected downward along the rail 32 on the lower surface of the frame 10, and a slider 34 is provided along the support frame 33. The slider 34 is fitted to the rail 32, and the moving frame 31 can move up and down along the rail 32. The moving frame 31 moves through the opening 10 a of the frame 10 and does not interfere with the frame 10.

  Note that the moving unit 30a and the moving unit 30b have the same structure except for the connecting portion with the motor 36, and thus description thereof will be omitted. Similarly to the moving unit 30a, the moving unit 30b moves up and down along the rail 32 on the moving unit 30b side.

  A support plate 35 (separately separated from the rotation of the motor 36) is provided between the motor 36 and the supply reel 12. Engagement pins 50a and 50b are erected vertically to the support plate 35. ing.

  A drive unit 40 is provided on the lower surface of the frame 10 between the moving unit 30a and the moving unit 30b. The drive unit 40 is erected at an eccentric position of the motor 41 that drives the moving unit 30a, an eccentric cam 43 that is rotatably connected to the motor shaft 42 of the motor 41, and the eccentric cam 43. An eccentric shaft 44, a connecting rod 45 having one end pivotally supported on the eccentric shaft 44, and a movable frame 31 of the moving unit 30a, and is pivotally supported on the other end side of the connecting rod 45. It consists of a shaft 46 and the like.

  The motor 41 is fixed in a horizontal direction on a support plate 51 erected in the downward direction of the frame 10. The eccentric cam 43 is fixed to the motor shaft 42 of the motor 41. An eccentric shaft 44 is fixed at the eccentric position of the eccentric cam 43. One end of the connecting rod 45 is pivotally supported by the eccentric shaft 44, and the other end is pivotally supported by a shaft 46 fixed to the moving frame 31 of the moving unit 30a. Accordingly, by driving the motor 41, the eccentric cam 43 rotates, and the moving unit 30a moves up and down via the connecting rod 45.

  A support frame 49 is erected in a downward direction of the frame 10 at an intermediate position between the moving unit 30a and the moving unit 30b. A shaft 48 as a base point projects from the front surface of the support frame 49. A central portion of a plate-like link member 47 is pivotally supported on the shaft 48. The link member 47 has elongated holes 47a and 47b at both ends thereof, and the engagement pins 50a and 50b are engaged with the elongated holes 47a and 47b, respectively. Accordingly, when the moving unit 30a is driven by driving the motor 41, the link member 47 swings around the shaft 48, and the moving unit 30b is driven in a direction different from the moving unit 30a.

  The above is the configuration of the wire saw according to the first embodiment of the present invention. Next, the traversing method of the wire saw of the present invention will be described below with reference to FIGS. 5 and 6 are partially schematic explanatory views, and it should be noted that the arrangement of the guide pulleys 15a and 15b and the drawing direction of the wire 11 are drawn differently from the actual ones.

  The motor 41 is driven while the wire 11 is running by rotating the feeding reel 12 and the take-up reel 13 of the wire saw 1 as shown in FIG. 5, and the feeding position of the wire 11 is matched with the feeding position of the feeding reel 12. At this time, the winding reel 13 is moved up and down via the link member 47 so that the winding position of the wire 11 matches the winding position of the winding reel 13.

  The motor 41 is connected to a control unit (not shown), and the movement of the movement units 30a and 30b is controlled at various cycles by controlling the rotation speed. FIG. 7 is a time chart according to an embodiment of traverse control in the present invention. The time chart drawn by setting time t in the horizontal axis direction and moving speed v of each of the moving units 30a (solid line) and 30b (two-dot chain line) in the vertical axis direction is shown. In the present embodiment, the movement units 30a and 30b are controlled so that the movement cycle is a sinusoidal curve. Controlling the motor 41 so that the moving period of the moving units 30a and 30b becomes a sine curve as in this embodiment is that the wire 11 is fed from the feeding reel 12 and the wire 11 is wound on the winding reel 13. This is preferable for uniform removal. Thus, by controlling the moving cycle of the moving units 30a and 30b in a sinusoidal manner, the moving units 30a and 30b can move smoothly, the catch of the wire 11 can be reduced, and the wire 11 does not break.

  Although the moving units 30a and 30b move in different directions, the moving units 30a and 30b are not limited to this, and may move in the same direction as long as they move along the axial direction of the reel. In this case, the link members 47 may be appropriately combined and moved in the same direction.

  Next, a drive unit 60 which is another embodiment of the drive unit 40 will be described with reference to FIG. In addition, the same code | symbol is used for the same member as the above for convenience. The description of the same member is omitted.

  The drive unit 60 includes a motor 61, a ball screw 65 driven by the motor 61, a nut member 67 screwed into the ball screw 65, and the like.

  The motor 61 is supported downward by a support frame 68 erected on the lower surface near the center of the frame 10. A driving pulley 62 is fixed to the motor shaft of the motor 61. A ball screw 65 is provided in the vertical direction along the support frame 68, and the lower end of the ball screw 65 is pivotally supported by the support frame 68. A driven pulley 63 is fixed to the lower end of the ball screw 65 via a support frame 68. An endless belt 64 is stretched around the drive pulley 62 and the driven pulley 63. Accordingly, by driving the motor 61, the ball screw 65 is rotationally driven.

  A nut member 67 is fixed to the support frame 66 provided on the moving frame 31, and the nut member 67 and the ball screw 65 are screwed together. Since the link member 47 is the same as that in the above-described embodiment, the description thereof is omitted. By driving the motor 61, the moving frame 31 on the moving unit 30a side is driven up and down, and the moving unit 30b is driven in a direction different from the moving unit 30a via the link member 47. At this time, it is preferable to control the driving of the motor 61 so that the moving cycle of the moving unit 30a and the moving unit 30b is a sine curve. Also in this embodiment, the moving units 30a and 30b can be moved in the same direction by an appropriate combination of the link members 47.

  The first embodiment uses the same mechanism as described above except that the driving is performed by the ball screw 65 instead of the driving by the eccentric cam 43 as described above. The above is another embodiment of the present invention.

  Next, cutting of the workpiece W with the wire saw 1 of the present invention will be described below with reference to FIG.

  First, the workpiece W is placed on the table 6, and the workpiece W is sucked and held on the table 6 by generating a suction force in the suction hole 6a. Subsequently, the supply reel 12 and the take-up reel 13 are driven to reciprocate the wire 11, for example, and the moving units 30a and 30b are driven to supply the wire 11 from the supply reel 12 (take-up reel 13). Further, control is performed so that the winding of the wire 11 onto the take-up reel 13 (feed reel 12) is traversed and performed at a predetermined pitch. In addition, the rotational speeds of the drive reel 12 and the take-up reel 13 are controlled so that the tension of the wire 11 becomes a predetermined tension.

  Further, the arm tip portion 4a of the articulated robot 4 is driven to rotate forward and backward as necessary, so that the wire 11 is pressed against the workpiece W while the wire saw unit 2 is swung at a predetermined angle. The object W is cut. At this time, cooling air is jetted from the jet nozzle 14 to cool the wire 11 of the cutting portion and blow off the cutting waste. Further, movement control of the articulated robot 4 is performed so as to cut into a predetermined shape at the time of cutting. By cutting the workpiece W while swinging the wire 11 as described above, the cutting portion of the wire 11 and the workpiece W approaches point contact, and the processing efficiency is improved.

  The above is the configuration of the present invention, and appropriate modifications can be made within the scope of the invention. In the present embodiment, the wire saw unit is provided at the tip of the arm of the articulated robot, but it can also be used as a single wire saw unit.

  In this embodiment, one of the two moving units is moved by the drive unit. However, instead of moving the moving unit, the guide pulley side is driven by one drive unit, and both guides are driven. The pulley may be moved along the reel axial direction.

  In the present embodiment, the two moving units are moved in different directions by one motor using an eccentric cam or a ball screw. However, the present invention is not limited to the above, and either one of the two moving units can be driven. Any mechanism can be used. In the present embodiment, the moving cycle of the moving unit is a sine curve, but a thing approximated to a sine curve can be preferably used. In addition, it is preferable to use a device that controls in a curved manner when the movement of the moving unit is reversed.

W Workpiece 1 Wire saw 2 Wire saw unit 3 Machine stand 4 Articulated robot 4a Arm tip 5 Tool changer 6 Table 6a Adsorption hole 10 Frame 10a Opening 10b Shaft 11 Wire 12 Feeding reel 13 Take-up reel 14 Injection nozzles 15a, 15b Guide Pulleys 16a, 16b Guide pulleys 17a, 17b Guide pulley 18 Cutting cells 20a, 20b Reel shaft 21 Cover 22 Support frames 30a, 30b Moving unit 31 Moving frame 32 Rail 33 Support frame 34 Slider 35 Support plate 36 Motor 40 Drive unit 41 Motor 42 Motor shaft 43 Eccentric cam 44 Eccentric shaft 45 Connecting rod 46 Axis 47 Link members 47a and 47b Long hole 48 Axis (base point)
49 Support frames 50a, 50b Engagement pins 51 Support frame 60 Drive unit 61 Motor 62 Drive pulley 63 Driven pulley 64 Belt 65 Ball screw 66 Support frame 67 Nut member

Claims (9)

In a wire saw that cuts the workpiece by pressing the wire against the workpiece between a supply reel that feeds the wire and a take-up reel that winds the wire,
A wire saw unit having the supply reel and the take-up reel;
The wire saw unit is
Two guide pulleys for guiding the wire respectively to the supply reel and the take-up reel;
Two moving units that move in the axial direction integrally with the feeding reel and the take-up reel,
A drive unit that moves either one of the two moving units in the axial direction of the reel,
By moving either one of the two moving units in the axial direction of the reel and moving the feeding reel and take-up reel along the axial direction of the reel, the wires guided by the both guide pulleys are respectively fed out. A wire saw characterized by being fed and wound so as to be substantially perpendicular to the axial direction of the reel and the take-up reel.   The drive unit includes an eccentric cam, a motor that rotationally drives the eccentric cam, an eccentric shaft of the eccentric cam, and a link member connected to each of the moving units. 2. The wire saw according to claim 1, wherein the feeding reel and the take-up reel are moved in the axial direction of the reel through the link member by being connected to one of the moving units.   The drive unit includes a ball screw provided along a moving direction of the moving unit, a driving unit for driving the ball screw, and a link member connected to each of the moving units, and either one of the two moving units. 2. The wire saw according to claim 1, wherein the two moving units are moved in the axial direction of the reel through the link member by driving.   The wire saw according to any one of claims 1 to 3, wherein a moving cycle of the both moving units is controlled in a sinusoidal shape.   The wire saw according to any one of claims 1 to 4, wherein the wire saw unit is connected to a tip of a freely movable robot arm. In a traversing method of a wire saw that feeds a wire from a feeding reel, cuts the workpiece by pressing the fed wire against the workpiece, and winds the wire on a take-up reel.
Two guide pulleys that guide the wire to each of the supply reel and the take-up reel by moving either one of the two moving units integrated with the supply reel and the take-up reel in the axial direction of the reel. A wire saw traversing method characterized in that a wire is fed and wound so as to be substantially perpendicular to the axial direction of the feeding reel and the winding reel, respectively. In a traversing method of a wire saw that feeds a wire from a feeding reel, cuts the workpiece by pressing the fed wire against the workpiece, and winds the wire on a take-up reel.
A link member connected to each of two moving units integrated with the supply reel and the take-up reel is provided, and the supply reel and the take-up reel are moved along the axial direction of the reel via the link member. By doing so, the two guide pulleys for guiding the wire to each of the feeding reel and the take-up reel are used to feed and wind the wire so as to be substantially perpendicular to the axial direction of the take-up reel and the take-up reel, respectively. A traversing method of a wire saw characterized by.   A wire saw unit having the feeding reel, the take-up reel, and the both moving units is provided, and the robot arm can be moved freely by connecting the wire saw unit to the tip of the robot arm, and the workpiece The wire saw traversing method according to claim 6 or 7, wherein the wire saw is processed.   The traversing method of the wire saw according to any one of claims 6 to 8, wherein a moving cycle of the both moving units is controlled in a sinusoidal shape.

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