JP2017165830A - Cleaning fluid and cleaning method - Google Patents
Cleaning fluid and cleaning method Download PDFInfo
- Publication number
- JP2017165830A JP2017165830A JP2016050779A JP2016050779A JP2017165830A JP 2017165830 A JP2017165830 A JP 2017165830A JP 2016050779 A JP2016050779 A JP 2016050779A JP 2016050779 A JP2016050779 A JP 2016050779A JP 2017165830 A JP2017165830 A JP 2017165830A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- cleaning liquid
- weight
- cleaning
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000012530 fluid Substances 0.000 title abstract 3
- 239000002082 metal nanoparticle Substances 0.000 claims abstract description 46
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000002253 acid Substances 0.000 claims abstract description 24
- 239000002270 dispersing agent Substances 0.000 claims abstract description 23
- 239000003960 organic solvent Substances 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 53
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 17
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 12
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 11
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 9
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- 238000005406 washing Methods 0.000 claims description 7
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- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 claims description 5
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 claims description 4
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- GXMIHVHJTLPVKL-UHFFFAOYSA-N n,n,2-trimethylpropanamide Chemical compound CC(C)C(=O)N(C)C GXMIHVHJTLPVKL-UHFFFAOYSA-N 0.000 claims description 4
- 229910017604 nitric acid Inorganic materials 0.000 claims description 4
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 claims description 3
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- 230000000694 effects Effects 0.000 abstract description 9
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- 230000002378 acidificating effect Effects 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 125000002467 phosphate group Chemical group [H]OP(=O)(O[H])O[*] 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
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Landscapes
- Paints Or Removers (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
Abstract
Description
本件は、洗浄液および洗浄方法に関する。 The present case relates to a cleaning liquid and a cleaning method.
金属ナノ粒子を含む金属ナノインクが用いられている。金属ナノインクを塗布するための塗布装置では、流路に金属ナノインクが付着するため、定期的あるいは随時、流路に洗浄処理を行うことが好ましい。しかしながら、金属ナノインクを洗浄しようとすると、金属ナノ粒子の凝集などに起因する詰まりが発生することがある。 Metal nano inks containing metal nanoparticles are used. In the coating apparatus for applying the metal nano ink, since the metal nano ink adheres to the flow path, it is preferable to perform a cleaning process on the flow path periodically or as needed. However, when metal nano ink is washed, clogging due to aggregation of metal nanoparticles may occur.
例えば、特許文献1では、洗浄剤組成物が開示されている。しかしながら、特許文献1で開示されている洗浄剤組成物では、金属ナノインクを洗浄することは困難である。 For example, Patent Document 1 discloses a cleaning composition. However, with the cleaning composition disclosed in Patent Document 1, it is difficult to clean the metal nano ink.
本件は上記課題に鑑みなされたものであり、金属ナノインクに対する洗浄効果を得ることができる洗浄液および洗浄方法を提供することを目的とする。 The present invention has been made in view of the above problems, and an object thereof is to provide a cleaning liquid and a cleaning method capable of obtaining a cleaning effect on the metal nano ink.
本発明に係る洗浄液は、有機溶剤と、水と、酸と、過酸化水素と、金属ナノ粒子を分散させる分散剤とを含み、前記有機溶剤の添加量は、80重量%未満であり、前記分散剤の添加量は、5重量%未満であり、前記酸の添加量は、1.0重量%を上回り、前記過酸化水素の添加量は、0.3重量%を上回ることを特徴とする。 The cleaning liquid according to the present invention includes an organic solvent, water, an acid, hydrogen peroxide, and a dispersant for dispersing the metal nanoparticles, and the amount of the organic solvent added is less than 80% by weight, The addition amount of the dispersant is less than 5% by weight, the addition amount of the acid is more than 1.0% by weight, and the addition amount of the hydrogen peroxide is more than 0.3% by weight. .
前記過酸化水素の添加量は、0.5重量%以上10重量%以下としてもよい。前記酸の添加量は、2重量%以上30重量%以下としてもよい。前記酸は、硫酸、塩酸、硝酸、ギ酸、スルファミン酸、p−トルエンスルホン酸、クエン酸、およびグルコン酸のいずれかを含んでいてもよい。前記有機溶剤の添加量は、5重量%以上70重量%以下としてもよい。前記有機溶剤は、ブチルジグリコール、イソプロピルアルコール、プロピレングリコール、γ−ブチロラクトン、N,N−ジメチルイソブチルアミド、アセトン、および1,3−ジメチル−2−イミダゾリジノンのいずれかを含んでいてもよい。前記分散剤の添加量は、0.01重量%以上3重量%以下としてもよい。 The amount of hydrogen peroxide added may be 0.5 wt% or more and 10 wt% or less. The addition amount of the acid may be 2 wt% or more and 30 wt% or less. The acid may contain any of sulfuric acid, hydrochloric acid, nitric acid, formic acid, sulfamic acid, p-toluenesulfonic acid, citric acid, and gluconic acid. The addition amount of the organic solvent may be 5% by weight or more and 70% by weight or less. The organic solvent may contain any of butyl diglycol, isopropyl alcohol, propylene glycol, γ-butyrolactone, N, N-dimethylisobutyramide, acetone, and 1,3-dimethyl-2-imidazolidinone. . The amount of the dispersant added may be 0.01% by weight or more and 3% by weight or less.
本発明に係る洗浄方法は、上記洗浄液を用いて、金属ナノ粒子を洗浄する工程を含むことを特徴とする。前記金属ナノ粒子は、ナノオーダーの粒子径を有する銅としてもよい。 The cleaning method according to the present invention includes a step of cleaning metal nanoparticles using the cleaning liquid. The metal nanoparticles may be copper having a nano-order particle size.
本発明に係る洗浄液および洗浄方法によれば、金属ナノインクに対する洗浄効果を得ることができる。 According to the cleaning liquid and the cleaning method of the present invention, a cleaning effect on the metal nano ink can be obtained.
実施形態に係る洗浄液および洗浄方法の説明に先立って、洗浄対象である金属ナノインクの概略について説明する。 Prior to the description of the cleaning liquid and the cleaning method according to the embodiment, an outline of the metal nano ink that is a cleaning target will be described.
金属ナノインクは、ナノオーダーの径を有する金属ナノ粒子が分散した金属粒子分散液である。金属ナノ粒子は、特に限定されるものではないが、銅粒子、金粒子、銀粒子、ニッケル粒子、スズ粒子などである。金属ナノ粒子の粒子径は、一例として、1nm〜100nmである。分散媒として、例えば、プロトン性分散媒および比誘電率30以上の非プロトン性の極性分散媒などを用いることができる。分散剤として、例えば、少なくとも1個の酸性官能基を有する分子量200〜100000の化合物またはその塩を用いることができる。 The metal nano ink is a metal particle dispersion liquid in which metal nanoparticles having a nano-order diameter are dispersed. The metal nanoparticles are not particularly limited, but are copper particles, gold particles, silver particles, nickel particles, tin particles, and the like. As an example, the particle diameter of the metal nanoparticles is 1 nm to 100 nm. As the dispersion medium, for example, a protic dispersion medium and an aprotic polar dispersion medium having a relative dielectric constant of 30 or more can be used. As the dispersant, for example, a compound having a molecular weight of 200 to 100,000 having at least one acidic functional group or a salt thereof can be used.
金属ナノインクの一例を以下に示す。
金属ナノインク:銅ナノインク
銅ナノ粒子:中心粒子径20nm、45wt%
分散媒:ジエチレングリコール(プロトン性溶媒)
分散剤:PVP−K25、2.0wt%
An example of the metal nano ink is shown below.
Metal nano ink: Copper nano ink Copper nano particle: Center particle diameter 20nm, 45wt%
Dispersion medium: Diethylene glycol (protic solvent)
Dispersant: PVP-K25, 2.0 wt%
このような金属ナノインクは、塗布装置を用いて基板などに塗布される。塗布装置として、例えば、インクジェット印刷装置、スクリーン印刷装置、グラビア印刷装置、グラビアオフセット印刷装置、フレキソ印刷装置などの印刷装置が挙げられる。これら塗布装置においては、流路に金属ナノインクが付着するため、定期的あるいは随時、流路に洗浄処理を行うことが好ましい。しかしながら、金属ナノインクを洗浄しようとすると、凝集などに起因する詰まりが発生することがある。 Such metal nano ink is applied to a substrate or the like using a coating apparatus. Examples of the coating apparatus include printing apparatuses such as an inkjet printing apparatus, a screen printing apparatus, a gravure printing apparatus, a gravure offset printing apparatus, and a flexographic printing apparatus. In these coating apparatuses, since the metal nano ink adheres to the flow path, it is preferable to perform a cleaning process on the flow path periodically or as needed. However, when the metal nano ink is to be washed, clogging due to aggregation or the like may occur.
洗浄対象物の金属ナノ粒子が例えば1nm〜100nmと小さいため、従来の洗浄液では、洗浄が進む前に、ソルベントショック(金属微粒子分散液の分散媒とは異なる性質の溶媒を加えたことによる金属ナノ粒子の凝集現象)により金属ナノ粒子が凝集、沈殿してしまい、例えばインクジェットヘッド(数十〜数百μmのノズル径)が詰まるおそれがある。 Since metal nanoparticles of the object to be cleaned are as small as 1 nm to 100 nm, for example, in conventional cleaning liquids, before the cleaning progresses, a solvent shock (a metal nanoparticle obtained by adding a solvent having a property different from that of the dispersion medium of the metal fine particle dispersion liquid). There is a possibility that the metal nanoparticles are aggregated and precipitated due to the particle agglomeration phenomenon, and the inkjet head (nozzle diameter of several tens to several hundreds μm) is clogged.
本発明者は、鋭意研究により、金属ナノインクに対する洗浄効果を得ることができる洗浄液および洗浄方法を見出した。以下、実施形態に係る洗浄液および洗浄方法について説明する。 The present inventor has found a cleaning liquid and a cleaning method capable of obtaining a cleaning effect on the metal nano ink through intensive studies. Hereinafter, the cleaning liquid and the cleaning method according to the embodiment will be described.
(実施形態)
一実施形態に係る洗浄液は、有機溶剤と、水と、酸と、過酸化水素と、金属ナノ粒子を分散させる分散剤とを含み、有機溶剤の添加量は80重量%未満であり、分散剤の添加量は5重量%未満であり、酸の添加量は1.0重量%を上回り、過酸化水素の添加量は0.3重量%を上回る。
(Embodiment)
The cleaning liquid according to one embodiment includes an organic solvent, water, an acid, hydrogen peroxide, and a dispersant for dispersing the metal nanoparticles, and the addition amount of the organic solvent is less than 80% by weight. Is less than 5% by weight, acid is added in excess of 1.0% by weight, and hydrogen peroxide is added in excess of 0.3% by weight.
本実施形態に係る洗浄液は、酸化作用を有する過酸化水素を、0.3重量%を上回るように含むことから、金属ナノ粒子を酸化することができる。まず、下記式(1)に従って、過酸化水素の分解によって活性酸素が発生する。次に、下記式(2)に従って、活性酸素により金属ナノ粒子が酸化する。下記式(2)では、一例として銅の酸化反応を示している。
H2O2 → H2O + (O) (1)
Cu + (O) → CuO (2)
Since the cleaning liquid according to the present embodiment contains hydrogen peroxide having an oxidizing action so as to exceed 0.3% by weight, the metal nanoparticles can be oxidized. First, in accordance with the following formula (1), active oxygen is generated by the decomposition of hydrogen peroxide. Next, according to the following formula (2), the metal nanoparticles are oxidized by active oxygen. In the following formula (2), an oxidation reaction of copper is shown as an example.
H 2 O 2 → H 2 O + (O) (1)
Cu + (O) → CuO (2)
次に、本実施形態に係る洗浄液は、1.0重量%を上回る酸を含むことから、金属酸化物の溶解速度を向上させることができる。一例として、金属ナノ粒子として銅を用いて酸として硫酸を用いる場合には、下記式(3)に従って、酸化銅の溶解速度を向上させることができる。
CuO + H2SO4 → CuSO4 + H2O (3)
Next, since the cleaning liquid according to the present embodiment contains an acid exceeding 1.0% by weight, the dissolution rate of the metal oxide can be improved. As an example, when copper is used as the metal nanoparticles and sulfuric acid is used as the acid, the dissolution rate of copper oxide can be improved according to the following formula (3).
CuO + H 2 SO 4 → CuSO 4 + H 2 O (3)
また、本実施形態に係る洗浄液は、有機溶剤を含むことから、金属ナノ粒子の凝集を抑制することができる。一方で、有機溶剤の添加量に上限(80重量%未満)を設けることで、金属ナノ粒子の溶解を促進することができる。また、本実施形態に係る洗浄液は、水を含むことから、金属の溶解性を向上させることができる。また、本実施形態に係る洗浄液は、金属ナノ粒子を分散させる分散剤を含むことから、金属ナノ粒子の凝集、沈殿などを遅くすることができる。一方で、分散剤の添加量に上限(5重量%未満)を設けることで、高分子化合物の過剰添加による凝析を抑制することができる。 Moreover, since the washing | cleaning liquid which concerns on this embodiment contains the organic solvent, it can suppress aggregation of a metal nanoparticle. On the other hand, dissolution of the metal nanoparticles can be promoted by providing an upper limit (less than 80% by weight) for the amount of organic solvent added. Moreover, since the washing | cleaning liquid which concerns on this embodiment contains water, it can improve the solubility of a metal. Moreover, since the washing | cleaning liquid which concerns on this embodiment contains the dispersing agent which disperse | distributes a metal nanoparticle, aggregation, precipitation, etc. of a metal nanoparticle can be delayed. On the other hand, coagulation due to excessive addition of the polymer compound can be suppressed by providing an upper limit (less than 5% by weight) to the amount of dispersant added.
以上のことから、本実施形態に係る洗浄液によれば、金属ナノ粒子を溶解させることができるとともに、金属ナノ粒子の凝集を抑制することができるため、金属ナノインクに対する洗浄効果を得ることができる。 From the above, according to the cleaning liquid according to the present embodiment, the metal nanoparticles can be dissolved and aggregation of the metal nanoparticles can be suppressed, so that a cleaning effect on the metal nano ink can be obtained.
有機溶剤は、特に限定されるわけではないが、一例として、アルコール、グリコール、グリコールエーテル、ケトン、ラクトン、ラクタム、環状エーテル、アミド、ニトリル、オキサゾリジノン、イミダゾリジノン、スルホン、スルホキシド、カーボネートなどの水溶性溶媒を用いることができる。 The organic solvent is not particularly limited, but examples include water such as alcohol, glycol, glycol ether, ketone, lactone, lactam, cyclic ether, amide, nitrile, oxazolidinone, imidazolidinone, sulfone, sulfoxide, and carbonate. An organic solvent can be used.
アルコールとしては、イソプロピルアルコール、メタノ−ル、エタノ−ル、イソプロパノ−ル、n−ブチルアルコール、n−アミルアルコール、n−ヘキシルアルコール、2−メチルペンタノール、2−ヘキシルアルコール、2−エチルブチルアルコール、2−ヘプチルアルコール、ヘプタノール−3,2−エチルヘキシルアルコール、ベンジルアルコール、2−オクタノール、3−メトキシ−3−メチルブタノールなどを用いることができる。 As alcohol, isopropyl alcohol, methanol, ethanol, isopropanol, n-butyl alcohol, n-amyl alcohol, n-hexyl alcohol, 2-methylpentanol, 2-hexyl alcohol, 2-ethylbutyl alcohol 2-heptyl alcohol, heptanol-3,2-ethylhexyl alcohol, benzyl alcohol, 2-octanol, 3-methoxy-3-methylbutanol and the like can be used.
グリコールまたはグリコールエーテルとして、エチレングリコール、エチレングリコールモノメチルエーテル、トリエチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、ジエチレングリコール、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノブチルエーテル(ブチルジグリコール)、プロピレングリコール、プロピレングリコールモノメチルエーテル、プロピレングリコールモノブチルエーテル、エチレングリコールモノヘキシルエーテル、エチレングリコールモノ−tert−ブチルエーテル、ジプロピレングリコールモノメチルエーテル、1,3−ブチレングリコール、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、トリエチレングリコールジメチルエーテル、トリエチレングリコールジエチルエーテルなどを用いることができる。 As glycol or glycol ether, ethylene glycol, ethylene glycol monomethyl ether, triethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether (butyl diglycol), propylene glycol, propylene Glycol monomethyl ether, propylene glycol monobutyl ether, ethylene glycol monohexyl ether, ethylene glycol mono-tert-butyl ether, dipropylene glycol monomethyl ether, 1,3-butylene glycol, diethylene glycol dimethyl ether, diethylene glycol di Chirueteru, triethylene glycol dimethyl ether, or the like can be used triethylene glycol diethyl ether.
ケトンとして、アセトン、ジエチルケトン、アセトフェノン、メチルエチルケトン、シクロヘキサノン、シクロペンタノン、ジアセトンアルコールなどを用いることができる。 As the ketone, acetone, diethyl ketone, acetophenone, methyl ethyl ketone, cyclohexanone, cyclopentanone, diacetone alcohol, or the like can be used.
ラクトンとして、β−プロピオラクトン、β−ブチロラクトン、γ−ブチロラクトン、γ−バレロラクトン、δ−バレロラクトンなどを用いることができる。 As the lactone, β-propiolactone, β-butyrolactone, γ-butyrolactone, γ-valerolactone, δ-valerolactone, and the like can be used.
ラクタムとして、N−メチル−2−ピロリドン、N−エチル−2−ピロリドン、N−ヒドロキシメチル−2−ピロリドンなどを用いることができる。 As the lactam, N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, N-hydroxymethyl-2-pyrrolidone and the like can be used.
環状エーテルとして、テトラヒドロフラン、テトラヒドロピランなどを用いることができる。 Tetrahydrofuran, tetrahydropyran, etc. can be used as the cyclic ether.
アミドとして、N,N−ジメチルイソブチルアミド、N,N−ジメチルホルムアミド、N−メチルホルムアミド、N,N−ジメチルアセトアミド、N,N−ジメチルプロピオンアミドなどを用いることができる。 As the amide, N, N-dimethylisobutyramide, N, N-dimethylformamide, N-methylformamide, N, N-dimethylacetamide, N, N-dimethylpropionamide and the like can be used.
ニトリルとして、アセトニトリル、プロピオニトリル、ブチロニトリル、アクリロニトリル、メタクリルニトリル、ベンゾニトリルなどを用いることができる。 As the nitrile, acetonitrile, propionitrile, butyronitrile, acrylonitrile, methacrylonitrile, benzonitrile and the like can be used.
オキサゾリジノンとして、N−メチル−2−オキサゾリジノン、3,5−ジメチル−2−オキサゾリジノンなどを用いることができる。 As oxazolidinone, N-methyl-2-oxazolidinone, 3,5-dimethyl-2-oxazolidinone, and the like can be used.
イミダゾリジノンとして、1,3−ジメチル−2−イミダゾリジノン、1,3−ジエチル−2−イミダゾリジノン、1,3−ジイソプロピル−2−イミダゾリジノンなどを用いることができる。 As the imidazolidinone, 1,3-dimethyl-2-imidazolidinone, 1,3-diethyl-2-imidazolidinone, 1,3-diisopropyl-2-imidazolidinone and the like can be used.
スルホンとして、ジメチルスルホン、ジエチルスルホン、ビス(2−ヒドロキシエチル)スルホンなどを用いることができる。 As the sulfone, dimethylsulfone, diethylsulfone, bis (2-hydroxyethyl) sulfone, or the like can be used.
スルホキシドとして、ジメチルスルホキシド、スルホラン、ブチルスルホン、3−メチルスルホラン、2,4−ジメチルスルホランなどを用いることができる。 As the sulfoxide, dimethyl sulfoxide, sulfolane, butyl sulfone, 3-methyl sulfolane, 2,4-dimethyl sulfolane and the like can be used.
カーボネートとして、エチレンカーボネート、プロピオンカーボネートなどを用いることができる。 As the carbonate, ethylene carbonate, propion carbonate or the like can be used.
なお、有機溶剤として、ブチルジグリコール、イソプロピルアルコール、プロピレングリコール、γ−ブチロラクトン、N,N−ジメチルイソブチルアミド、アセトン、1,3−ジメチル−2−イミダゾリジノンなどを用いることが好ましい。金属ナノ粒子に対して分散安定性が高く、金属ナノインクに一般的に用いられる溶媒であるため、金属ナノインクを洗浄する際にソルベントショックによる凝集が起こりにくいからである。 Note that as the organic solvent, it is preferable to use butyl diglycol, isopropyl alcohol, propylene glycol, γ-butyrolactone, N, N-dimethylisobutyramide, acetone, 1,3-dimethyl-2-imidazolidinone, and the like. This is because the dispersion stability is high with respect to the metal nanoparticles and the solvent is generally used for the metal nano ink, and therefore, aggregation due to a solvent shock hardly occurs when the metal nano ink is washed.
有機溶剤の添加量は、5重量%以上であることが好ましい。金属ナノ粒子の凝集を抑制することできるからである。有機溶剤の添加量は、10重量%以上であることがより好ましい。一方で、有機溶剤の添加量は、70重量%以下であることが好ましい。金属ナノ粒子の溶解を促進することができるからである。有機溶剤の添加量は、60重量%以下であることがより好ましい。 The addition amount of the organic solvent is preferably 5% by weight or more. This is because aggregation of metal nanoparticles can be suppressed. The addition amount of the organic solvent is more preferably 10% by weight or more. On the other hand, the addition amount of the organic solvent is preferably 70% by weight or less. This is because dissolution of metal nanoparticles can be promoted. The addition amount of the organic solvent is more preferably 60% by weight or less.
次に、分散剤は、金属ナノ粒子を分散させる効果を有していれば特に限定されないが、一例として、少なくとも1個以上の酸性官能基を有する分子量200以上100000以下の化合物またはその塩を用いることができる。分散剤の酸性官能基は、酸性、すなわち、プロトン供与性を有する官能基であり、例えば、リン酸基、ホスホン酸基、スルホン酸基、硫酸基およびカルボキシル基である。リン酸基を有する分子量約1500の化合物(ビックケミー社製、商品名「DISPERBYK(登録商標)−111」)、リン酸基を有する分子量数万の化合物(「DISPERBYK(登録商標)−2001」)、低分子のポリアミノアマイドと酸ポリマー塩(ビックケミー社製、商品名「ANTI−TERRA(登録商標)−U100」)、分子量1000以上2000以下のリン酸基を有する化合物のアルキルアンモニウム塩(ビックケミー社製、商品名「DISPERBYK(登録商標)−180」)、分子量約20000のリン酸基を有し、球状構造を持つポリマー(ビックケミー社製、商品名「DISPERBYK(登録商標)−2155」)、ポリビニルピロリドン、フッ素系界面活性剤の(ネオス社製、商品名「フタージェント208G」)などを用いることができる。 Next, the dispersant is not particularly limited as long as it has an effect of dispersing the metal nanoparticles. As an example, a compound having at least one acidic functional group and having a molecular weight of 200 or more and 100,000 or less or a salt thereof is used. be able to. The acidic functional group of the dispersant is acidic, that is, a functional group having proton donating properties, such as a phosphoric acid group, a phosphonic acid group, a sulfonic acid group, a sulfuric acid group, and a carboxyl group. A compound having a phosphate group and a molecular weight of about 1500 (manufactured by Big Chemie, trade name “DISPERBYK (registered trademark) -111”), a compound having a phosphate group and a molecular weight of tens of thousands (“DISPERBYK (registered trademark) -2001”), Low molecular weight polyaminoamide and acid polymer salt (BIC Chemie, trade name “ANTI-TERRA (registered trademark) -U100”), alkylammonium salt of a compound having a phosphate group with a molecular weight of 1000 to 2000 (BIC Chemie, (Trade name “DISPERBYK (registered trademark) -180”), a polymer having a phosphate group having a molecular weight of about 20,000 and having a spherical structure (trade name “DISPERBYK (registered trademark) -2155” manufactured by Big Chemie), polyvinylpyrrolidone, Fluorosurfactant (manufactured by Neos, trade name “Futaji Cement 208G "), or the like can be used.
分散剤の添加量は、0.01重量%以上であることが好ましい。金属ナノ粒子の分散をより促進することができるからである。また、分散剤の添加量は、0.02重量%以上であることがより好ましい。一方で、分散剤の添加量は、3重量%以下であることが好ましい。金属ナノ粒子の凝集をより抑制することができるからである。また、分散剤の添加量は、1重量%以下であることがより好ましい。 The addition amount of the dispersant is preferably 0.01% by weight or more. This is because the dispersion of the metal nanoparticles can be further promoted. Further, the addition amount of the dispersant is more preferably 0.02% by weight or more. On the other hand, it is preferable that the addition amount of a dispersing agent is 3 weight% or less. This is because aggregation of metal nanoparticles can be further suppressed. Further, the addition amount of the dispersant is more preferably 1% by weight or less.
洗浄液における過酸化水素の添加量は、0.5重量%以上であることが好ましい。金属ナノ粒子の溶解が促進されるからである。洗浄液における過酸化水素の添加量は、1重量%以上であることがより好ましい。一方で、洗浄液における過酸化水素の添加量は、10重量%以下であることが好ましい。洗浄液で金属ナノインクを洗浄する際の発熱量を抑制することができるからである。洗浄液における過酸化水素の添加量は、5重量%以下であることがより好ましい。 The amount of hydrogen peroxide added to the cleaning liquid is preferably 0.5% by weight or more. This is because dissolution of metal nanoparticles is promoted. The amount of hydrogen peroxide added to the cleaning liquid is more preferably 1% by weight or more. On the other hand, the amount of hydrogen peroxide added to the cleaning liquid is preferably 10% by weight or less. This is because the amount of heat generated when the metal nano ink is washed with the washing liquid can be suppressed. The addition amount of hydrogen peroxide in the cleaning liquid is more preferably 5% by weight or less.
洗浄液に添加する酸は、特に限定されるものではない。洗浄液に添加する酸として、塩酸、硫酸、硝酸、スルファミン酸、リン酸、ホウ酸、フッ化水素酸、ギ酸、酢酸、プロピオン酸、酪酸、イソ酪酸、吉草酸、イソ吉草酸、トリメチル酢酸、カプロン酸、シュウ酸、マロン酸、コハク酸、グルタル酸、アジピン酸、ピメリン酸、スベリン酸、マレイン酸、フマル酸、シトラコン酸、イタコン酸、グルタコン酸、グリコール酸、グリオキシル酸、乳酸、リンゴ酸、酒石酸、クエン酸、安息香酸、ケイ皮酸、トルイル酸、ナフトエ酸、フタル酸、トリメリット酸、サリチル酸、没食子酸、メタンスルホン酸、エタンスルホン酸、ベンゼンスルホン酸、p−トルエンスルホン酸、エチドロン酸などを用いることができる。 The acid added to the cleaning liquid is not particularly limited. Acids added to the cleaning solution include hydrochloric acid, sulfuric acid, nitric acid, sulfamic acid, phosphoric acid, boric acid, hydrofluoric acid, formic acid, acetic acid, propionic acid, butyric acid, isobutyric acid, valeric acid, isovaleric acid, trimethylacetic acid, capron Acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, maleic acid, fumaric acid, citraconic acid, itaconic acid, glutaconic acid, glycolic acid, glyoxylic acid, lactic acid, malic acid, tartaric acid Citric acid, benzoic acid, cinnamic acid, toluic acid, naphthoic acid, phthalic acid, trimellitic acid, salicylic acid, gallic acid, methanesulfonic acid, ethanesulfonic acid, benzenesulfonic acid, p-toluenesulfonic acid, etidronic acid, etc. Can be used.
洗浄液に添加する酸として、硫酸、塩酸、硝酸、ギ酸、スルファミン酸、p−トルエンスルホン酸、クエン酸、グルコン酸などを用いることが好ましい。金属ナノ粒子の溶解を促進するからである。特に、スルファミン酸を用いることが好ましい。金属ナノ粒子を凝集させずに溶解させることができるからである。 As the acid to be added to the cleaning liquid, it is preferable to use sulfuric acid, hydrochloric acid, nitric acid, formic acid, sulfamic acid, p-toluenesulfonic acid, citric acid, gluconic acid and the like. This is because dissolution of metal nanoparticles is promoted. In particular, it is preferable to use sulfamic acid. This is because the metal nanoparticles can be dissolved without aggregation.
洗浄液における酸の添加量は、2重量%以上であることが好ましい。金属ナノ粒子の溶解が促進されるからである。洗浄液における酸の添加量は、3重量%以上であることがより好ましい。一方で、洗浄液における酸の添加量は、30重量%以下であることが好ましい。洗浄液で金属ナノインクを洗浄する際の発熱量を抑制することができるからである。洗浄液における酸の添加量は、20重量%以下であることがより好ましい。 The amount of acid added to the cleaning liquid is preferably 2% by weight or more. This is because dissolution of metal nanoparticles is promoted. The addition amount of the acid in the cleaning liquid is more preferably 3% by weight or more. On the other hand, the amount of acid added to the cleaning liquid is preferably 30% by weight or less. This is because the amount of heat generated when the metal nano ink is washed with the washing liquid can be suppressed. The addition amount of the acid in the cleaning liquid is more preferably 20% by weight or less.
続いて、本実施形態に係る洗浄方法について説明する。本実施形態に係る洗浄方法は、上述した洗浄液を用いて金属ナノ粒子を洗浄する工程を含む。洗浄対象は、金属インクを塗布する塗布装置の流路である。例えば、流路を構成するノズル等に本実施形態に係る洗浄液を通液するなどの手法を採用することができる。本実施形態に係る洗浄方法によれば、上述した洗浄液を用いることにより、金属ナノ粒子を溶解させることができるとともに、金属ナノ粒子が溶解するまでの間の凝集、沈殿などが抑制されるため、金属ナノインクに対する洗浄効果を得ることができる。 Next, the cleaning method according to this embodiment will be described. The cleaning method according to the present embodiment includes a step of cleaning the metal nanoparticles using the above-described cleaning liquid. The object to be cleaned is a flow path of a coating apparatus that applies metal ink. For example, it is possible to employ a technique such as passing the cleaning liquid according to the present embodiment through a nozzle or the like constituting the flow path. According to the cleaning method according to the present embodiment, by using the cleaning liquid described above, the metal nanoparticles can be dissolved, and aggregation, precipitation, and the like until the metal nanoparticles are dissolved are suppressed. A cleaning effect on the metal nano ink can be obtained.
(実施例)
以下、上記実施形態に係る洗浄液を用いて金属ナノインクの溶解性について実験(サンプル1〜サンプル30)を行った。具体的には、フィルタリング径が1μmのシリンジフィルタに金属ナノインクを1mL通液した後、当該フィルタに洗浄液を5mL通液し、当該フィルタが洗浄されたか否かを確認した。
(Example)
Hereinafter, experiments (Sample 1 to Sample 30) were conducted on the solubility of the metal nano ink using the cleaning liquid according to the above embodiment. Specifically, after 1 mL of the metal nano ink was passed through a syringe filter having a filtering diameter of 1 μm, 5 mL of a cleaning liquid was passed through the filter, and it was confirmed whether or not the filter was cleaned.
金属ナノインクの組成を以下に示す。
金属ナノインク:銅ナノインク
銅ナノ粒子:中心粒子径20nm、45wt%
分散媒:ジエチレングリコール(プロトン性溶媒)
分散剤:PVP−K25、2.0wt%
The composition of the metal nano ink is shown below.
Metal nano ink: Copper nano ink Copper nano particle: Center particle diameter 20nm, 45wt%
Dispersion medium: Diethylene glycol (protic solvent)
Dispersant: PVP-K25, 2.0 wt%
洗浄液の組成について、表1に示す。なお、BYK−180は、ビックケミー社製、商品名「DISPERBYK(登録商標)−180」である。BYK−111は、ビックケミー社製、商品名「DISPERBYK(登録商標)−111」である。BYK−2001は、ビックケミー社製、商品名「DISPERBYK(登録商標)−2001」である。BYK−2155は、ビックケミー社製、商品名「DISPERBYK(登録商標)−2155」である。サーフィノール485は、アセチレン基を中央に持つ左右対称な界面活性剤であって、EO付加品である。フタージェント208Gは、分子内に二重結合を有し、複雑に分岐したパーフルオロアルケニルの構造であり、ネオス社製のフッ素系界面活性剤である。PEG600は、分子量600のポリエチレングリコールである。PVP2500は、重量平均分子量が約2500の試薬ポリビニルピロリドンである。プライサーフA219Bは、ポリオキシエチレンラウリルエーテルリン酸エステルであって、水系分散剤である。
(比較例)
一方、上記実施形態に係る洗浄液の組成を満たさない洗浄液を用いて金属ナノインクの溶解性について実験(比較サンプル1〜比較サンプル11)を行った。洗浄対象の金属ナノインクおよび実験手順は、実施例と同じである。比較例に係る洗浄液の組成について、表2に示す。
On the other hand, experiments (Comparative Sample 1 to Comparative Sample 11) were conducted on the solubility of the metal nano-ink using a cleaning liquid that does not satisfy the composition of the cleaning liquid according to the above embodiment. The metal nano ink to be cleaned and the experimental procedure are the same as in the examples. Table 2 shows the composition of the cleaning liquid according to the comparative example.
(分析)
比較サンプル1〜比較サンプル11では、良好な溶解性が得られなかった。比較サンプル1については、有機溶剤の80重量%以上となったことで水の重量%が低下し、金属ナノ粒子の溶解を促進できなかったと考えられる。比較サンプル2については、洗浄液に有機溶剤が添加されなかったことで、金属ナノ粒子の凝集を抑制できなかったと考えられる。比較サンプル3については、洗浄液の酸の濃度が1重量%以下となったことで、金属ナノ粒子の溶解を促進できなかったと考えられる。比較サンプル4については、洗浄液の過酸化水素の濃度が0.3重量%以下となったために、金属ナノ粒子を十分に酸化することができなかったと考えられる。比較サンプル5〜9については、酸化剤として過酸化水素を添加しなかったことで、金属ナノ粒子を十分に酸化することができなかったと考えられる。比較サンプル10については、洗浄液に分散剤を添加しなかったことで、金属ナノ粒子の凝集および沈殿を抑制できなかったと考えられる。比較サンプル11については、洗浄液の分散剤の濃度が5重量%以上となったために、高分子化合物の過剰添加に起因する凝析が生じたと考えられる。
(analysis)
In Comparative Sample 1 to Comparative Sample 11, good solubility was not obtained. Regarding Comparative Sample 1, it is considered that the weight percentage of water was reduced by 80% by weight or more of the organic solvent, and the dissolution of the metal nanoparticles could not be promoted. Regarding Comparative Sample 2, it is considered that aggregation of metal nanoparticles could not be suppressed because the organic solvent was not added to the cleaning liquid. Regarding Comparative Sample 3, it is considered that the dissolution of the metal nanoparticles could not be promoted because the acid concentration of the cleaning liquid was 1% by weight or less. With respect to Comparative Sample 4, it is considered that the metal nanoparticles could not be sufficiently oxidized because the concentration of hydrogen peroxide in the cleaning liquid was 0.3% by weight or less. Regarding Comparative Samples 5 to 9, it is considered that the metal nanoparticles could not be sufficiently oxidized because hydrogen peroxide was not added as an oxidizing agent. Regarding the comparative sample 10, it is considered that the aggregation and precipitation of metal nanoparticles could not be suppressed because the dispersant was not added to the cleaning liquid. In Comparative Sample 11, since the concentration of the dispersant in the cleaning liquid was 5% by weight or more, it is considered that coagulation was caused due to excessive addition of the polymer compound.
これに対して、実施例のサンプル1〜30においては、上記実施形態に係る組成の洗浄液を用いることによって、金属ナノインクに対する良好な溶解性が得られた。すなわち、金属ナノインクに対する良好な洗浄効果が得られた。サンプル3においては、特に良好な洗浄効果が得られた。イソプロピルアルコールの極性が高く、金属ナノ粒子の溶解を促進すると共に金属ナノ粒子の分散安定性が高いためであると考えられる。 On the other hand, in samples 1 to 30 of the examples, good solubility in the metal nano ink was obtained by using the cleaning liquid having the composition according to the above embodiment. That is, a good cleaning effect on the metal nano ink was obtained. In sample 3, a particularly good cleaning effect was obtained. This is probably because isopropyl alcohol has a high polarity, promotes dissolution of metal nanoparticles, and has high dispersion stability of metal nanoparticles.
以上、本発明の実施例について詳述したが、本発明は係る特定の実施例に限定されるものではなく、特許請求の範囲に記載された本発明の要旨の範囲内において、種々の変形・変更が可能である。 Although the embodiments of the present invention have been described in detail above, the present invention is not limited to such specific embodiments, and various modifications and changes can be made within the scope of the gist of the present invention described in the claims. It can be changed.
Claims (9)
前記有機溶剤の添加量は、80重量%未満であり、
前記分散剤の添加量は、5重量%未満であり、
前記酸の添加量は、1.0重量%を上回り、
前記過酸化水素の添加量は、0.3重量%を上回ることを特徴とする洗浄液。 An organic solvent, water, an acid, hydrogen peroxide, and a dispersant for dispersing the metal nanoparticles,
The amount of the organic solvent added is less than 80% by weight,
The amount of the dispersant added is less than 5% by weight,
The addition amount of the acid exceeds 1.0% by weight,
A cleaning liquid, wherein the amount of hydrogen peroxide added exceeds 0.3% by weight.
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