JP2017161605A - Meta-material particle, meta-material particle dispersion, meta-material product, meta-material sheet, and manufacturing method of them - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a meta-material product having a desired optical characteristic, provide a meta-material particle, meta-material particle dispersion, and meta-material sheet for the product, and provide a manufacturing method of them.SOLUTION: A meta-material particle 10 includes: a resonator portion 1 formed of a plurality of electromagnetic resonators 11 disposed so as to serve as a meta-material; and a dielectric portion 2 that is made of dielectric and has the resonator portion 1 inside it. The meta-material sheet has the meta-material particles 10 as unit regions, and has grooves that are formed between the unit regions and divide the sheet into the unit regions.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a structure of an optical element in which electric conductivity and magnetic permeability are controlled, and a manufacturing method thereof.

  Metamaterials have optical properties that are not possible with conventional materials such as negative refractive index and optical shielding, and have extremely wide application possibilities as optical components such as super-resolution super lenses and high-efficiency optical amplification. Therefore, active research is currently underway.

  On the other hand, in order to raise the metamaterial technology from the research level of verification of feasibility to a practical level that can be used in actual industries, it is essential to realize a metamaterial with a three-dimensional structure.

  As a conventional method for realizing a metamaterial having a three-dimensional structure, a multilayer structure is manufactured by a method of scraping a metal multilayer film by a dry etching method (for example, Non-Patent Document 1) or a plurality of lithography processes. (For example, Non-Patent Document 2). However, these methods are very time consuming and expensive to manufacture.

  On the other hand, a method of dispersing fine particles and rods, which are the basic structure of a metal microresonator fabricated in advance, in an appropriate support medium such as some liquid and coagulating the support medium is also being studied (for example, Patent Documents). 1, Patent Document 2). However, with this method, it is difficult to control the distance between the electromagnetic wave resonators, and it is difficult to control the optical performance because the resonators are in contact with each other, are too far apart, or the density is uneven.

  In addition, a method has been proposed in which a metal electromagnetic wave resonator is encapsulated in a microcapsule, dispersed in a liquid, and aggregated (for example, Patent Document 3).

Zhang, Nature 455, 376 (2008) Nature Materials 7, 31 (2008) JP2013-182212A International Publication Number WO2012 / 008551 JP2011-158665A

  In this case, a three-dimensional structure can be easily formed. On the other hand, the range in which the size of the microcapsule can be controlled is limited by the size and shape of the electromagnetic wave resonator serving as the core and the type of dielectric used as the material of the microcapsule. For this reason, it is difficult to make a metamaterial having desired optical properties.

  Therefore, the present invention aims to provide a metamaterial product having desired optical properties, to provide a metamaterial particle, a metamaterial particle dispersion, a metamaterial sheet therefor, and a production method thereof. And

  In order to achieve the above object, the first metamaterial particle of the present invention comprises a resonator part made up of a plurality of electromagnetic wave resonators arranged to function as a metamaterial, and a resonator part made up of a dielectric. And a dielectric portion included therein.

  In this case, the electromagnetic wave resonator has a rod structure in which two rods made of a conductor are arranged in parallel, or a split ring structure made of a conductor arranged perpendicularly or parallel to a surface having the maximum area of the dielectric. be able to.

  In addition, the second metamaterial particle of the present invention has a plurality of holes in the plane, and two first conductor layers and a second layer arranged in parallel so that the positions of the holes are vertically aligned. And a middle dielectric layer made of a dielectric material sandwiched between the first conductor layer and the second conductor layer and connected to the dielectric part through the hole, and functions as a metamaterial. And a dielectric part made of a dielectric and having the resonator part inside.

  The metamaterial particle dispersion of the present invention is characterized in that the metamaterial particles of the present invention are dispersed in a solvent. In this case, the solvent is preferably composed of a resin and a solvent capable of dissolving the resin. Moreover, it is preferable that the dielectric of the dielectric part of the metamaterial particles and the resin in the solvent are the same kind of materials having different degrees of polymerization.

  Moreover, the metamaterial product of the present invention is characterized in that the metamaterial particle dispersion of the present invention is applied to the surface.

  Further, the first metamaterial sheet of the present invention is (A) a dielectric part composed of a plurality of electromagnetic wave resonators arranged so as to function as a metamaterial, and a dielectric composed of a dielectric and having the resonator part inside. A plurality of unit regions each including a body part; and (B) a groove formed between the unit regions and divided into the unit regions.

Further, the second metamaterial sheet of the present invention has a plurality of holes in the plane (A), and two first conductor layers arranged in parallel so that the positions of the holes coincide with each other vertically. And a second conductor layer, and an intermediate dielectric layer made of a dielectric sandwiched between the first conductor layer and the second conductor layer and connected to the dielectric portion via the hole, A plurality of unit regions having a resonator part functioning as a material and a dielectric part made of a dielectric and having the resonator part inside,
(B) It has a groove formed between the unit regions and divided into the unit regions.

  In this case, the groove is preferably formed such that the dielectric portion has a thickness of 100 μm or less.

  Moreover, the first metamaterial sheet manufacturing method of the present invention includes (A) a resonator part composed of a plurality of electromagnetic wave resonators arranged so as to function as a metamaterial, and a dielectric part that includes the resonator part inside. For producing a metamaterial sheet having a plurality of unit regions each having a dielectric portion, and (B) a groove formed between the unit regions and divided into the unit regions. An electromagnetic wave resonator recess for forming the electromagnetic wave resonator and the groove forming step in the dielectric layer, the electromagnetic wave resonator recess filled with a conductor, and the electromagnetic wave resonance An electromagnetic wave resonator forming step for forming a body, and a dielectric layer coating step for covering the electromagnetic wave resonator with a dielectric.

  Moreover, the second metamaterial sheet manufacturing method of the present invention has a plurality of holes in the (A) plane, and is a two-layer first arranged in parallel so that the positions of the holes coincide with each other vertically. A conductive layer and a second conductive layer; and an intermediate dielectric layer sandwiched between the first conductive layer and the second conductive layer and made of a dielectric connected to the dielectric portion via the hole. A plurality of unit regions having a resonator part that functions as a metamaterial and a dielectric part made of a dielectric and having the resonator part therein; and (B) formed between the unit areas, A metamaterial sheet manufacturing method for manufacturing a metamaterial sheet having grooves for dividing each unit region, wherein a plurality of columnar protrusions are formed on a resin layer made of a resin formed on a dielectric layer. The convex forming step to be formed, and the columnar convex Forming a first conductor layer, a dielectric layer, and a second conductor layer in this order on the resin layer formed, and a three-layer structure having a plurality of columnar holes by removing the resin layer It has a resin removing step to be formed and a dielectric layer covering step for covering the three-layer structure with a dielectric.

  Moreover, the metamaterial particle manufacturing method of the present invention includes a dividing step of dividing the first or second metamaterial sheet of the present invention into each unit region by the groove.

  In addition, the method for producing a metamaterial particle dispersion of the present invention includes a dispersion step in which the first or second metamaterial particle of the present invention is added to a plurality of solvents and dispersed in the solvent.

  In addition, another method for producing a metamaterial particle dispersion of the present invention includes adding the first or second metamaterial sheet of the present invention to a solvent and stirring the solvent in the solvent so that the metamaterial sheet is the groove. It has a dispersion | distribution process divided | segmented into each unit area and disperse | distributing.

  Moreover, the metamaterial product manufacturing method of the present invention includes a coating step of applying the metamaterial particle dispersion liquid of the present invention to a molding, a drying step of drying the molding after the coating step, and a drying step. A fixing step of irradiating the molding object with light or heating the molding object after drying.

  Since the metamaterial particles of the present invention include an aggregate of electromagnetic wave resonators processed with high accuracy in shape, size and interval, one particle has the basic function of a metamaterial alone, The properties of the metamaterial can be easily controlled uniformly.

It is a schematic perspective view which shows the rod structure of the 1st metamaterial particle of this invention. It is a schematic perspective view which shows the division | segmentation ring structure of the 1st metamaterial particle | grains of this invention. It is a schematic perspective view which shows another division | segmentation ring structure of the 1st metamaterial particle of this invention. It is a schematic perspective view which shows the 2nd metamaterial particle of this invention. It is a schematic perspective view which shows the metamaterial sheet | seat of this invention. It is process drawing which shows the manufacturing method of the 1st metamaterial particle of this invention. It is process drawing which shows the manufacturing method of the 2nd metamaterial particle of this invention. It is a schematic front view which shows the metamaterial particle dispersion liquid of this invention. It is a figure which shows the application | coating process in the manufacturing method of the metamaterial product of this invention. It is a figure which shows the drying process in the manufacturing method of the metamaterial product of this invention.

  Hereinafter, the first metamaterial particle 10 of the present invention will be described. As shown in FIGS. 1 to 3, the first metamaterial particle 10 of the present invention is mainly composed of a resonator part 1 and a dielectric part 2.

  The resonator unit 1 includes a plurality of electromagnetic wave resonators 11 arranged so as to function as a metamaterial for a desired electromagnetic wave. Metamaterials have optical properties that are not possible with conventional materials such as negative refractive index and optical shielding, and have extremely wide application possibilities as optical components such as super high resolution super lenses and high efficiency optical amplification. It is a material to have. The number of electromagnetic resonators formed in the resonator unit 1 may be any number as long as it functions as a metamaterial for a desired electromagnetic wave.

The electromagnetic wave resonator 11 may be anything as long as it resonates with a desired electromagnetic wave. For example, as shown in FIG. 1, a rod structure in which two rods made of conductors are arranged in parallel, A C-shaped or U-shaped split ring structure made of a conductor may be used as shown in FIG. In the case of the split ring structure, the structure is such that the plane of the split ring (C-shaped or U-shaped plane) is arranged perpendicularly to the plane having the largest area of the particles as shown in FIG. It is better to arrange them in parallel as shown. At this time, the pitch between the electromagnetic resonators is set to 1/4 or less, 1/5 or less, or 1/10 or less of the wavelength of the desired electromagnetic wave. The electromagnetic resonator is sufficiently smaller than the desired wavelength of the electromagnetic wave. For example, when the wavelength of the electromagnetic wave is 1000 nm, the pitch between the electromagnetic resonators may be 400 nm or less, and the size of the electromagnetic resonator may be 200 nm or less. With such a configuration, it becomes possible to artificially control the dielectric constant ε and / or the magnetic permeability μ of the optical member. Since the refractive index n of the optical member is n = ± [ε · μ] ^1/2 , as a result, the refractive index n can be artificially controlled. By appropriately adjusting the shape, size, and the like of the electromagnetic wave resonator 11, the refractive index can be set to a negative value with respect to an electromagnetic wave having a desired wavelength.

  The conductor forming the electromagnetic wave resonator 11 may be any conductor as long as it resonates with respect to at least a certain range of electromagnetic waves. For example, a metal such as gold, silver, or aluminum, graphene, or indium tin oxide Zinc oxide, tin oxide, and the like can be used. Moreover, these combinations may be sufficient.

  The dielectric portion 2 is made of a dielectric and has the resonator portion 1 therein. Any dielectric material may be used as long as it can transmit the electromagnetic waves that resonate the electromagnetic wave resonators 11. For example, a transparent inorganic material such as silicon dioxide, aluminum oxide, magnesium oxide, magnesium fluoride, or polycarbonate A transparent organic material such as acrylic or acrylic can be used.

  Since the first metamaterial particle 10 includes an aggregate of electromagnetic wave resonators 11 processed with high accuracy in shape, size, and interval, one particle has a basic function of metamaterial alone. Therefore, the characteristics of the metamaterial can be easily controlled uniformly.

  The second metamaterial particle 20 of the present invention will be described with reference to FIG. The metamaterial particle 20 is also mainly composed of the resonator unit 1 and the dielectric unit 2, but the structure of the resonator unit 1 is different. The resonator unit 1 includes a first conductor layer 21, a second conductor layer 22, and an intermediate dielectric layer 23 sandwiched between the first conductor layer 21 and the second conductor layer 22. It has a three-layer structure. Further, the first conductor layer 21 and the second conductor layer 22 have a plurality of holes 28 perpendicular to the plane. That is, the first conductor layer 21 and the second conductor layer 22 are arranged in parallel so that the positions of the respective holes 28 coincide with each other vertically. The intermediate dielectric layer 23 is made of a dielectric, and is connected to the dielectric portion 2 via the hole. The first conductor layer 21 and the second conductor layer 22 may be different kinds of conductors, but preferably the same kind of conductors. Examples of the conductor that can be used include metals such as gold, silver, and aluminum, graphene, indium tin oxide, zinc oxide, and tin oxide.

  The second metamaterial particle 20 is processed with high accuracy in the shape, size, and interval of the resonator unit 1 so as to function as a metamaterial in the particle, and the characteristics of the metamaterial can be easily and uniformly controlled. Can do.

Next, a method for producing such metamaterial particles will be described.
The metamaterial particle manufacturing method mainly includes a metamaterial sheet manufacturing process for manufacturing a metamaterial sheet in a state in which a plurality of metamaterial particles are connected so as to be split, and the metamaterial sheet is divided into each metamaterial particle. A dividing step.

  Here, as shown in FIG. 5, the metamaterial sheet includes (A) a plurality of unit regions 100 and (B) grooves 35 formed between the unit regions 100 and divided into the unit regions 100. , Is made up of. The unit region 100 means a region that becomes one metamaterial particle when divided by the groove 35. Therefore, the unit region 100 of the first metamaterial sheet 30 for manufacturing the first metamaterial particle 10 includes the resonator unit 1 including a plurality of electromagnetic wave resonators 11 arranged so as to function as a metamaterial. The dielectric portion 2 is made of a dielectric and has a resonator portion 1 inside. Further, the unit region 100 of the second metamaterial sheet 40 for producing the second metamaterial particle 20 has a plurality of holes in the plane, and is parallel so that the positions of the holes are perpendicular to each other. The first conductor layer and the second conductor layer of the two disposed layers, and the dielectric sandwiched between the first conductor layer and the second conductor layer and connected to the dielectric part via the hole And a dielectric part that functions as a metamaterial, and a dielectric part that is made of a dielectric and has the resonator part inside.

First, the manufacturing method of the 1st metamaterial sheet | seat 30 for manufacturing the 1st metamaterial particle | grains 10 is demonstrated using FIG.
The manufacturing method of the first metamaterial sheet 30 mainly includes a concavo-convex forming step, an electromagnetic wave resonator forming step, and a dielectric layer covering step.

  The concave / convex forming step is a step of forming the electromagnetic wave resonator concave portion 31 for forming the electromagnetic wave resonator 11 and the groove 35 in the dielectric layer 32. Any method may be used to form the electromagnetic wave resonator concave portion 31 and the groove 35 in the dielectric layer 32. For example, an imprint technique in which molding is performed using the mold 6 on which the fine pattern 61 is formed may be used. . The imprint technique may be a thermal imprint method or an optical imprint method. As the mold 6, for example, as shown in FIG. 6A, a plurality of divided ring fine patterns 61 for forming a substantially U-shaped divided ring structure, and the periphery of the divided ring fine patterns 61 A frame-shaped groove pattern 65 for forming the groove 35 of the metamaterial sheet 30 is prepared. The height of the groove pattern 65 is preferably higher than the height of the fine pattern 61 for split rings. Further, it is desirable that the width of the groove pattern 65 is wider than the width of the divided ring fine pattern 61. The dielectric layer 32 for forming the pattern may be prepared by applying a resin onto the substrate 39 on which the release layer 38 is formed. Next, as shown in FIG. 6B, the mold 6 and the dielectric layer 32 are pressed. Any resin may be used as long as it is a dielectric and can be imprinted and is a transparent resin. Then, as shown in FIG. 6C, after the resin is sufficiently cured, the mold 6 is released from the resin. As a result, the electromagnetic wave resonator recess 31 and the groove 35 are formed in the dielectric layer 32.

  As shown in FIG. 6D, the electromagnetic wave resonator forming step is a step of forming the electromagnetic wave resonator 11 by filling the concave portion 31 for the electromagnetic wave resonator formed in the unevenness forming step with a conductor. Any method may be used to form the electromagnetic wave resonators 11. However, for example, by using a method such as plating or CVD, the electromagnetic wave resonators 31 are filled with a conductor, and polishing or etch back is used to polish the flat portion. What is necessary is just to remove a conductor.

  As shown in FIG. 6E, the dielectric layer coating step is a step of covering the electromagnetic wave resonators 11 formed in the electromagnetic wave resonator forming step with a dielectric material. Any method may be used for coating with a dielectric, and for example, the surface of the electromagnetic wave resonator 11 may be covered with a resin that is a dielectric using a method such as coating, vapor deposition, laser ablation, or CVD.

  Then, as shown in FIG. 6F, the first metamaterial sheet 30 is completed by separating the resin from the substrate 39 or by melting the substrate.

  The metamaterial sheet 30 thus formed becomes the metamaterial particles 10 through a dividing step as shown in FIG. Each unit region 100 of the metamaterial sheet 30 is easily divided by the groove 35 by an external force. For example, the metamaterial sheet 30 is immersed in a liquid and stirred by an external force of a certain level or more, so that the metamaterial particles 10 are divided into the unit regions 100 by being separated by the grooves 35.

  A method for producing the second metamaterial sheet 40 for producing the second metamaterial particle 20 will be described.

  The manufacturing method of the second metamaterial sheet 40 mainly includes a convex portion forming step, a three-layer forming step, a resin removing step, and a dielectric layer covering step.

  The convex portion forming step is a step of forming a plurality of columnar convex portions 41 on the resin layer 48 formed on the dielectric layer 42. Any method may be used to form the columnar convex portions 41 on the resin layer 48. For example, an imprint technique in which molding is performed using the mold 7 on which the fine pattern 71 is formed may be used. The imprint technique may be a thermal imprint method or an optical imprint method. The resin may be any resin as long as it can form the columnar convex portions 41 and can be removed in the resin removing step. For example, an imprint resist made of acrylic or the like can be used. As shown in FIG. 7A, the mold 7 is prepared with a fine pattern 71 formed of a plurality of columnar recesses for forming vertical columnar protrusions 41 on the resin layer. As the resin layer 48, a resin layer coated on a substrate 49 having a dielectric layer 42 formed thereon may be used. The thickness of the dielectric layer 42 is set to be equal to or less than the thickness of the groove 45 formed in the metamaterial sheet 40. Next, as shown in FIG. 7B, the mold 7 and the resin layer 48 are pressed. Then, as shown in FIG. 7C, after the resin is sufficiently cured, the mold 7 is released from the resin. Thereby, the columnar convex portions 41 are formed in the resin layer 48. As shown in FIG. 7C, when a remaining film other than the columnar protrusion 41 remains on the dielectric layer 42, the remaining film is removed as shown in FIG. 7D. The remaining film may be removed by using a known technique, for example, oxygen etching, oxygen ashing, oxygen plasma, or the like.

  In the three-layer forming step, as shown in FIG. 7E, the first conductor layer 21, the intermediate dielectric layer 23, and the second dielectric layer are formed on the resin layer 48 on which the columnar convex portions 41 are formed in the convex portion forming step. In this step, the conductor layer 22 is formed in this order. The first conductor layer 21, the intermediate dielectric layer 23, and the second conductor layer 22 may be formed by any method as long as the three layers can be formed. For example, the conductor or the dielectric may be formed by vapor deposition or laser ablation. It can be deposited.

  The resin removing step is a step of removing the resin layer 48 used in the convex portion forming step and forming a three-layer structure having a plurality of holes 28 as shown in FIG. The removal method of the resin layer 48 may be any method as long as the resin layer 48 can be removed. For example, lift-off that removes the resin using a stripping solution may be used. As a result, a three-layer structure including the first conductor layer 21, the dielectric layer 23, and the second conductor layer 22 and having a plurality of holes 28 is formed.

  The dielectric layer covering step is a step of covering the three-layer structure with a dielectric as shown in FIG. The dielectric coating may be any coating that can coat the three-layer structure with a dielectric and can fill the holes formed in the three-layer structure with a dielectric. For example, coating, vapor deposition, laser ablation A method such as CVD may be used. Since the portion without the three-layer structure becomes the groove 35 of the metamaterial sheet 40, the groove 35 is covered so as to have a desired thickness. The size of the thickness is not limited as long as the metamaterial sheet 40 can be divided by the unit region 100, but is preferably 100 μm or less, for example.

  Finally, as shown in FIG. 7H, the second metamaterial sheet 40 is completed by separating the resin from the substrate 49 or by dissolving the substrate.

  The metamaterial sheet 40 thus formed becomes metamaterial particles 20 through a dividing step as shown in FIG. Each unit region of the metamaterial sheet 40 is easily divided by the groove 35 by an external force. For example, by immersing the metamaterial sheet 40 in a liquid and stirring with an external force of a certain level or more, the metamaterial sheet 40 is separated into the unit regions by being separated by the grooves 35 to become the metamaterial particles 20.

  Next, the metamaterial particle dispersion liquid 50 will be described. The metamaterial particle dispersion 50 is obtained by dispersing the above-described metamaterial particles 10 in the solvent 51. The dispersion liquid 50 can be used as ink, and can be applied to the molding 61 by a printing technique such as inkjet.

  As the solvent 51 used in the dispersion step, a solvent composed of a resin and a solvent capable of dissolving the resin can be used. In this case, the solvent is preferably volatile. In addition, it is preferable that the dielectric of the dielectric part 2 of the metamaterial particle 10 and the resin in the solvent 51 are the same kind of materials having different degrees of polymerization in order to have the same or similar optical characteristics in the fixing step. .

  In the dispersion step described above, a metamaterial sheet may be added to the solvent 51 instead of the metamaterial particles 10. When the metamaterial sheet is stirred in the solvent 51, the metamaterial sheet is divided into each unit region 100 by the groove 35 of the metamaterial sheet, and becomes a metamaterial particle dispersion liquid 50.

  A metamaterial product is obtained by applying the metamaterial particle dispersion 50 thus formed to the surface of the molding 61. The manufacturing method of a metamaterial product includes an application process, a drying process, and a fixing process.

  The application process is a process of applying the metamaterial particle dispersion liquid 50 to the molding 61. As the molding 61, various types can be prepared according to the metamaterial product to be manufactured, and examples thereof include a film-like one and a lens-like one. Any coating method may be used. For example, the metamaterial particle dispersion 50 may be used as ink and sprayed from an inkjet nozzle 90 to be applied in a desired shape. In addition, dipping, spray coating, spin coating, or the like can be used.

  The drying process is a process of drying the molding 61 after the coating process. In this step, the solvent contained in the solvent 51 is vaporized. Any drying method can be used as long as the solvent can be dried. For example, natural drying or heat drying may be used.

  In the fixing step, the resin in the solvent 51 in the gap between the metamaterial particles 10 is cured. For example, the object 61 after drying may be irradiated with light, or the object 61 after drying may be heated. This completes the metamaterial product.

  In addition, you may have the orientation adjustment process of adjusting the orientation of the metamaterial particle 10 between an application | coating process and a drying process. In this case, for example, an electric field or a magnetic field may be applied in a predetermined direction to the application surface of the material particle dispersion liquid 50 on the molding 61.

1 Resonant part 2 Dielectric part
10 First metamaterial particle
11 Electromagnetic resonator
20 Second metamaterial particle
21 First conductor layer
22 Second conductor layer
23 Intermediate dielectric layer
28 holes
30 First metamaterial sheet
31 Recess for electromagnetic wave resonator
32 Dielectric layer
35 groove
40 Second metamaterial sheet
50 Metamaterial particle dispersion
51 Solvent
61 Molded object
100 unit area

Claims (17)

A resonator unit composed of a plurality of electromagnetic wave resonators arranged to function as a metamaterial;
A dielectric part comprising a dielectric part and having the resonator part therein;
Metamaterial particles characterized by comprising:   The metamaterial particle according to claim 1, wherein the electromagnetic wave resonator has a rod structure in which two rods made of a conductor are arranged in parallel.   2. The metamaterial particle according to claim 1, wherein the electromagnetic wave resonator has a split ring structure made of a conductor arranged perpendicularly or parallel to a surface having the maximum area of the dielectric. A first conductor layer and a second conductor layer of two layers, each having a plurality of holes in a plane and arranged in parallel so that the positions of the holes are vertically aligned, and the first conductor layer and the second conductor layer; A dielectric part sandwiched between two conductor layers and composed of an intermediate dielectric layer made of a dielectric and connected through the hole, and functioning as a metamaterial;
A dielectric part comprising a dielectric part and having the resonator part therein;
The metamaterial particle according to claim 1, comprising:   A metamaterial particle dispersion liquid, wherein the metamaterial particles according to any one of claims 1 to 4 are dispersed in a solvent.   6. The metamaterial particle dispersion according to claim 5, wherein the solvent comprises a resin and a solvent capable of dissolving the resin.   The metamaterial particle dispersion according to claim 6, wherein the dielectric of the dielectric part of the metamaterial particle and the resin in the solvent are the same kind of materials having different degrees of polymerization.   A metamaterial product, wherein the metamaterial particle dispersion according to any one of claims 5 to 7 is applied to the surface. (A) A plurality of unit regions having a resonator part made of a plurality of electromagnetic wave resonators arranged so as to function as a metamaterial, and a dielectric part made of a dielectric and having the resonator part inside,
(B) a groove formed between the unit regions and divided into the unit regions;
A metamaterial sheet characterized by comprising: (A) A first conductor layer and a second conductor layer of two layers which have a plurality of holes in the plane and are arranged in parallel so that the positions of the holes are vertically aligned, and the first conductor A dielectric layer sandwiched between the layer and the second conductor layer and connected to the dielectric portion through the hole, and a dielectric portion that functions as a metamaterial, and a dielectric. A plurality of unit regions having a dielectric part having the resonator part therein,
(B) a groove formed between the unit regions and divided into the unit regions;
A metamaterial sheet characterized by comprising: 11. The metamaterial sheet according to claim 9, wherein the groove is formed so that a thickness of the dielectric portion is 100 μm or less.

(A) A plurality of unit regions composed of a resonator part made up of a plurality of electromagnetic wave resonators arranged to function as a metamaterial, and a dielectric part made of a dielectric and having the resonator part inside, (B) A metamaterial sheet manufacturing method for manufacturing a metamaterial sheet having a groove formed between the unit regions and divided into the unit regions,
An unevenness forming step for forming a recess for an electromagnetic wave resonator for forming the electromagnetic wave resonator and the groove in a dielectric layer;
An electromagnetic wave resonator forming step of filling the concave portion for the electromagnetic wave resonator with a conductor to form the electromagnetic wave resonator;
A dielectric layer coating step of covering the electromagnetic wave resonator with a dielectric;
The metamaterial sheet manufacturing method characterized by having. (A) A first conductor layer and a second conductor layer of two layers which have a plurality of holes in the plane and are arranged in parallel so that the positions of the holes are vertically aligned, and the first conductor A dielectric layer sandwiched between the layer and the second conductor layer and connected to the dielectric portion through the hole, and a dielectric portion that functions as a metamaterial, and a dielectric. A metamaterial having a plurality of unit regions having a dielectric portion therein, and (B) a groove formed between the unit regions and divided into the unit regions. A metamaterial sheet manufacturing method for manufacturing a sheet,
A protrusion forming step of forming a plurality of columnar protrusions on a resin layer made of resin formed on the dielectric layer;
A three-layer forming step of forming a first conductor layer, a dielectric layer, and a second conductor layer in this order on the resin layer on which the columnar protrusions are formed;
Removing the resin layer and forming a three-layer structure having a plurality of columnar holes; and
A dielectric layer coating step of coating the three-layer structure with a dielectric;
The metamaterial sheet manufacturing method characterized by having.   A method for producing metamaterial particles, comprising: a dividing step of dividing the metamaterial sheet according to any one of claims 9 to 11 into each unit region by the groove.   A method for producing a metamaterial particle dispersion, comprising a dispersion step of adding the metamaterial particles according to any one of claims 1 to 4 to a plurality of solvents and dispersing them in the solvent.   It has a dispersion | distribution process which divides | segments the said metamaterial sheet | seat into each unit area | region by the said groove | channel, and disperses by adding the metamaterial sheet | seat in any one of Claim 9 thru | or 11 to a solvent, and stirring in the said solvent. A method for producing a metamaterial particle dispersion liquid. An application step of applying the metamaterial particle dispersion according to any one of claims 5 to 7 to a molding;
A drying step of drying the molding after the coating step;
Irradiating the molded object after the drying process with light, or fixing the heated molded object after drying;
The metamaterial product manufacturing method characterized by having.

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