JP2017161461A - Inspection processing method and inspection processing system of gas inspector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection processing technique of a gas inspector for executing gas alarm confirmation processing of confirming the presence or absence of an abnormality of a gas alarm function by supplying an inspection gas to the gas inspector, the technique attaining accurate inspection results in the gas alarm confirmation processing while reducing the space for setting a gas container.SOLUTION: Dilution processing is executed for generating an inspection gas G1 by diluting a raw material gas G0 taken out from a gas container C1 with atmospheric air OA.SELECTED DRAWING: Figure 11

Description

  The present invention supplies gas to the gas introduction part of the gas inspection machine with respect to a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction part. The present invention relates to an inspection processing method and an inspection processing system for a gas inspection machine that supplies gas for inspection through a section and executes a gas alarm confirmation process for confirming whether there is an abnormality in the gas alarm function of the gas inspection machine.

  When using a gas inspection machine having a gas alarm function that outputs an alarm according to the state of a specific component such as carbon monoxide or flammable gas in the air, whether or not the state of the gas inspection machine is normal It is necessary to check regularly. Thus, an inspection processing system for automatically inspecting such a gas inspection machine is known (see, for example, Patent Document 1).

  In the inspection processing system for a gas inspection machine disclosed in Patent Document 1, as the above inspection processing, a bump test is performed in which an inspection gas is supplied to the gas introduction part of the gas inspection machine to check whether there is an abnormality in the gas alarm function of the gas inspection machine. A gas alarm confirmation process (confirmation test process), also called as, is executed. Specifically, in this gas alarm confirmation process, the gas supply unit (gas supply tube connection unit 75) is used for the gas inspection machines (gas detectors 10A and 10B) stored in the storage unit (mounting units 50 and 55). The gas for inspection (specific gas) is supplied via the, and it is confirmed whether or not the concentration indication value of the gas inspection machine is appropriate.

JP 2013-257160 A

  In a conventional gas inspection machine inspection processing system, an inspection gas sealed in a gas container such as a cylinder is supplied to the gas inspection machine as it is to execute a gas alarm confirmation process. Therefore, a large-capacity gas container corresponding to the required amount of inspection gas is required. Furthermore, when inspection gases having the same composition but different concentrations are used, a separate gas container is required for each different concentration, leading to an increase in installation space.

  Further, the inspection gas sealed in the gas container is a dry state in which specific components such as carbon monoxide and flammable gas are diluted with purified air, inert gas, and the like, and hardly contains moisture. If such dry inspection gas is used in the gas alarm check process of a gas inspection machine, the sensor part of the gas inspection machine will be in a dry state and will operate under conditions different from those during normal use. As a result, accurate inspection results could not be obtained.

  In view of this situation, the main problem of the present invention is an inspection processing technique for a gas inspection machine that performs a gas alarm confirmation process for supplying an inspection gas to a gas inspection machine and confirming whether there is an abnormality in the gas alarm function. Another object of the present invention is to provide a technique capable of obtaining an accurate inspection result by gas alarm confirmation processing while reducing the installation space of the gas container.

The first characteristic configuration of the present invention is such that a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm in accordance with the state of a specific component in the introduced gas introduced from the gas introduction unit, the gas of the gas inspection machine A gas inspection machine inspection processing method for supplying gas for inspection via a gas supply unit to an introduction unit and executing a gas alarm confirmation process for confirming whether there is an abnormality in the gas alarm function of the gas inspection machine,
The source gas taken out from the gas container is diluted in the atmosphere to perform a dilution process for generating the inspection gas.

According to this configuration, the gas for inspection is not sealed and stored in the gas container, but a high-concentration source gas is sealed in the gas container, and the source gas is diluted in the atmosphere by the above dilution process. Since the inspection gas is generated, the gas container can have a smaller capacity than the required amount of the inspection gas. Furthermore, in the above-described dilution treatment, the atmosphere containing water appropriately is used as the gas for diluting the raw material gas, not dry purified air or inert gas. Therefore, when the inspection gas generated in this dilution process is supplied to the gas inspection machine in the gas alarm confirmation process, the sensor unit of the gas inspection machine is maintained in the same level as the atmosphere without being excessively dried. Therefore, it will operate under the same conditions as normal use.
Therefore, according to the present invention, there is provided a technique capable of obtaining an accurate inspection result by gas alarm confirmation processing while reducing the installation space of the gas container.

  The second characteristic configuration of the present invention is a concentration stabilization process for exhausting the inspection gas generated in the dilution process to the outside and stabilizing the concentration of the inspection gas before the execution of the gas alarm confirmation process. Is to execute.

  According to this configuration, before the execution of the gas alarm check process, the concentration stabilization process is executed, and the inspection gas whose flow rate or concentration is not yet stable is exhausted to the outside. An accurate inspection result can be obtained by supplying an inspection gas having a stable flow rate and concentration from the beginning of the confirmation process to the gas introduction part of the gas inspection machine.

The third characteristic configuration of the present invention is configured such that the gas inspection machine sucks the introduced gas from the gas introducing portion,
In the gas alarm check process, the inspection gas that is larger than the gas suction flow rate of the gas inspection machine is supplied to the gas supply unit, and the inspection gas that has not been drawn into the gas introduction unit of the gas inspection machine is exhausted. In the point.

  According to this configuration, in supplying the inspection gas to the gas introduction part of the suction type gas inspection machine through the gas supply part in the gas alarm confirmation process, the same amount of inspection as the gas suction flow rate of the gas inspection machine is performed. Instead of supplying the working gas, the checking gas larger than the gas suction flow rate is supplied, and the checking gas that has not been sucked into the gas introduction part of the gas tester is exhausted. Then, the gas inspection machine sucks the inspection gas without any shortage, and further maintains the suction flow rate at an appropriate suction flow rate regardless of the supply flow rate of the inspection gas on the system body side. It will operate under the same conditions. Therefore, a more accurate inspection result can be obtained in this gas alarm confirmation process.

  A fourth characteristic configuration of the present invention resides in that the flow rate of the source gas is temporarily made higher than a set flow rate corresponding to the dilution ratio of the source gas at the start of execution of the dilution process.

  According to this configuration, the concentration of the inspection gas generated in the dilution process is appropriately increased as soon as possible by temporarily increasing the flow rate of the raw material gas above the set flow rate at the start of execution of the dilution process. Since the concentration can be reached, the gas alarm check process using the check gas can be started early.

According to a fifth characteristic configuration of the present invention, in the dilution process, the source gas is caused to flow through the source gas path, and air having a larger flow rate than that of the source gas is allowed to flow through the atmosphere supply path. Diluting the raw material gas flowing into the atmosphere flowing into the atmosphere supply path,
Instead of the dilution process, when performing a non-dilution process in which the source gas taken out from the gas container is used as the inspection gas without being diluted as it is, the source gas is supplied to the gas via the atmosphere supply path. It is in the point which supplies to a supply part.

According to this configuration, since the source gas is diluted in the atmosphere having a larger flow rate than that in the dilution process, the air supply path through which the air flows at that time, the flow meter provided in the path, etc. In this case, it is configured to correspond to a larger flow rate than the source gas path through which the source gas flows. In this case, when the undiluted process is performed without dilution of the raw material gas, the flow rate of the raw material gas becomes a relatively large flow rate corresponding to the required flow rate of the inspection gas. When the source gas is allowed to flow through the source gas path, the source gas path and the flow meter provided in the path need to be configured as a complicated and large-sized one corresponding to a wide range of flow rates from a small flow rate to a large flow rate. is there.
Therefore, in the non-dilution process, a relatively large flow rate of the source gas is supplied to the gas supply unit via the atmospheric supply path corresponding to the large flow rate, thereby reducing the source gas path and the flow meter provided in the path. It can be configured as a relatively simple and compact device that can handle only the flow rate.

The sixth characteristic configuration of the present invention is such that a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm in accordance with the state of a specific component in the introduced gas introduced from the gas introduction unit, the gas of the gas inspection machine Inspection of a gas inspection machine provided with inspection processing means for supplying an inspection gas to the introduction part via a gas supply part and executing a gas alarm confirmation process for confirming whether there is an abnormality in the gas alarm function of the gas inspection machine A processing system,
A dilution processing means capable of performing a dilution process for generating the inspection gas by diluting the raw material gas taken out from the gas container with the atmosphere is provided.

  According to this configuration, the apparatus includes the inspection processing unit that performs the gas alarm confirmation process and the dilution processing unit that can perform the dilution process. Thus, it is possible to construct an inspection processing system for executing the inspection processing method of the gas inspection machine according to the present invention, and a plurality of gases to be inspected as in the inspection processing method of the gas inspection apparatus according to the present invention. The inspection process can be reasonably executed for the inspection machine.

External view of gas inspection machine inspection processing system The top view explaining the schematic structure of a gas inspection machine, and the internal structure of the adapter in which the gas inspection machine was accommodated Exploded perspective view of adapter Flow chart showing the flow of the inspection processing method carried out by the inspection processing system The flowchart which shows the flow of the inspection process performed with the inspection processing method of FIG. The figure which shows the example of a display of the display of an inspection processing system The figure which shows the operating state of various auxiliary machines in the initial confirmation processing and the gas flow state The figure which shows the operating state and gas flow state of various auxiliary machines in the blockage alarm confirmation processing and concentration stabilization processing The figure which shows the operating state of various auxiliary machines and the gas flow state in the suction flow rate confirmation processing and concentration stabilization processing The figure which shows the operation state of various auxiliary machines in the concentration stabilization process in a standby state, and the gas flow state The figure which shows the operation state of various auxiliary machines and the gas flow state in the gas alarm confirmation process when performing the dilution process The figure which shows the operating state of various auxiliary machines in a cleaning process, and the gas flow state The figure which shows the operation state of various auxiliary machines and the gas flow state in the gas alarm confirmation process when not performing the dilution process

Embodiments of the present invention will be described with reference to the drawings.
The inspection processing system 100 shown in FIG. 1 is configured as a system that implements an inspection processing method for checking the state of the gas inspection machine 70, and a housing portion 5 for housing the gas inspection machine 70 is provided in the front. The system main body 1 and the adapter 50 which is detachably attached to the housing portion 5 and allows the gas inspection machine 70 to be housed in the housing portion 5 are provided.

  In addition, in this application, the surface (surface on the near side in FIG. 1, surface on the left side in FIG. 2, surface on the left front side in FIG. 3) on which the housing portion 5 and the display 3 are provided in the system main body 1 is referred to as “front”. The direction in which the front faces is called “front side”. On the other hand, the surface on the opposite side of the front is referred to as “rear surface”, and the direction toward the rear surface is referred to as “depth direction”. Further, the left side in front view is simply referred to as “left side”, and the right side in front view is simply referred to as “right side”.

[Gas inspection machine]
First, the configuration of the gas inspection machine 70 will be described with reference to FIGS. 1 and 2.
Although details will be described later, the gas inspection machine 70 is predetermined according to the state of, for example, combustible gas (hydrogen, methane, propane, etc.) or carbon monoxide as a specific component in the introduced gas introduced from the gas introduction unit 72. And a gas alarm function for outputting a predetermined gas alarm when the gas introduction unit 72 is closed.

Specifically, the gas inspection machine 70 includes an inspection machine main body 71 and a gas introduction unit 72 for introducing gas into the inspection machine main body 71.
The gas introduction part 72 includes a substantially cylindrical part 74 projecting from the inspection machine main body 71 and a pointed suction nozzle 73 connected to the distal end side of the cylindrical part 74. On the other hand, a suction pump 75 for sucking an external gas through a gas introduction part 72 is provided in the inspection machine main body 71, whereby the gas inspection machine 70 is positively activated from the suction nozzle 73. It is configured as a suction type for sucking gas.
Further, the inspection machine main body 71 is supplied with the introduced gas sucked by the suction pump 75, and includes a sensor unit 76 configured by a sensor element or the like that is sensitive to a specific component in the introduced gas, and a control unit comprising a computer. 78 etc. are provided.

  A display operation unit 80 for performing predetermined display and input operation is provided on the front surface of the gas inspection machine 70, and the control unit 78 obtains a specific component concentration in the introduced gas from the output signal of the sensor unit 76, In addition to displaying on the display operation unit 80 provided in the inspection machine main body 71 and when the combustible gas concentration exceeds the allowable range, a predetermined gas is displayed on the display operation unit 80 to notify the operator of the fact. An alarm display (an example of a gas alarm) is displayed, and a speaker 82 provided in the inspection machine main body 71 is configured to generate a predetermined gas alarm sound (an example of a gas alarm). Such a function is called a gas alarm function.

  Further, the control unit 78 of the gas inspection machine 70 monitors the load of the suction pump 75 (hereinafter referred to as “pump load”) by the current value of the driving power of the suction pump 75 or the like when the suction pump 75 is operated. If the pump load is abnormally high during the operation of the suction pump 75, it is determined that the state of the gas introduction part 72 is a closed state that is blocked by dust or the like. Then, in order to notify the operator of this occlusion state as an occlusion abnormality, a predetermined occlusion alarm display (an example of an occlusion alarm) is displayed on the display operation unit 80, and further, the speaker 82 has a predetermined occlusion alarm sound (occlusion). An example of an alarm) is generated. Such a function is called a blockage alarm function.

  On the side surface side of the inspection machine main body 71, an exhaust unit 77 that discharges the gas that has passed through the sensor unit 76, and a communication unit 79 for the control unit 78 to perform infrared communication (an example of wireless communication) with the outside. And are arranged.

[Inspection processing system]
Next, a detailed configuration of the inspection processing system 100, that is, a detailed configuration of the system main body 1 and the adapter 50 included in the inspection processing system 100 will be described in order.
In the following description, an example in which the inspection object of the inspection processing system 100 is the suction-type gas inspection machine 70 will be described. However, in addition to the suction-type gas inspection machine 70, gas is naturally introduced into the sensor unit. A diffusion type gas inspection machine may be the inspection target. In this case, necessary processes may be added as appropriate or unnecessary processes may be omitted as appropriate.

[System unit]
Next, the configuration of the system main body 1 included in the inspection processing system 100 will be described with reference to FIGS. 1, 2, and 7 to 13.
As shown in FIG. 1, the front surface of the system main body 1 is provided with four accommodating portions 5 for accommodating the gas inspection machines 70, so that a plurality of gas inspection machines 70 can be inspected. Is possible. On the front surface of the system main body 1, in addition to the housing portion 5, devices such as the display 3 and other operation switches and speakers are arranged, and further, the sensor portion 76 of the gas inspection machine 70 to be inspected. Two gas containers C1 and C2 for storing a source gas containing a specific component to which is sensitive are detachably mounted. Although details will be described later, the raw material gas stored in the gas containers C1 and C2 is appropriately diluted with the atmosphere and used as an inspection gas.

All four accommodating parts 5 are formed as a common rectangular cross-sectional recessed part opened to the front side.
As shown in FIG. 1 and FIG. 2, an air supply that is a gas supply unit for supplying gas such as inspection gas to the gas introduction unit 72 of the gas inspection machine 70 is provided on the inner back surface side of the housing unit 5. The joint 5a for exhaust, the exhaust joint 5b that is an exhaust suction part for sucking the exhaust discharged from the gas inspection machine 70 and discharging it to the outside, and the connector 55 of the base 52 provided in the adapter 50 are connected. A connector 5c is arranged.
In FIG. 1, a cover 5 d is provided on the front surface of the accommodating portion 5 to which the adapter 50 is not mounted in order to prevent erroneous insertion of the gas inspection machine 70.

  The connector 5 c is connected to a control unit 2 that is also a computer provided in the system main body 1. Therefore, by connecting the connector 55 of the base 52 on the adapter 50 side and the connector 5c on the system main body 1 side, the control unit 2 on the system main body 1 side can perform wired communication with the control unit 54 on the adapter 50 side. It becomes possible. Although details will be described later, the control unit 54 on the adapter 50 side is configured to be capable of wireless communication with the control unit 78 of the gas tester 70 accommodated in the gas tester storage unit 60 of the adapter 50. ing. Therefore, the control unit 2 on the system main body 1 side can communicate with the control unit 54 on the adapter 50 side, and is accommodated via the control unit 54 in the accommodation unit 5 with the adapter 50 interposed therebetween. Communication with the controller 78 on the gas inspection machine 70 side is also possible.

As shown in FIG. 7 and the like, the control unit 2 on the system main body 1 side functions as inspection processing means 2a that executes predetermined inspection processing, as will be described in detail later, by executing a predetermined program.
Further, in addition to the inspection processing unit 2a, the control unit 2 includes adapter identification information acquisition unit 2b that can acquire adapter identification information that is identification information of the adapter 50 attached to the storage unit 5, and the storage unit 5. It also functions as gas inspection machine identification information acquisition means 2c capable of acquiring gas inspection machine identification information that is identification information of the accommodated gas inspection machine 70.

That is, the adapter identification information acquisition unit 2b communicates with the control unit 54 on the adapter 50 side mounted in the housing unit 5 to obtain adapter identification information such as the model of the adapter 50 from the control unit 54. Acquired in association with the accommodation unit 5 in which the adapter 50 is mounted.
On the other hand, the gas inspection machine identification information acquisition unit 2c communicates with the control unit 78 on the gas inspection machine 70 side accommodated in the storage unit 5 with the adapter 50 interposed therebetween, so that the control unit 78 The gas inspection machine identification information such as the model of the gas inspection machine 70 is acquired in association with the storage unit 5 in which the gas inspection machine 70 is stored.

In addition, the control unit 2 can store the acquired various types of identification information in the storage unit 4 including a memory and take out necessary information from the timely storage unit 4.
The acquisition timing of the adapter identification information can be the same as the acquisition timing of the gas inspection machine information when it is accommodated in the accommodating portion 5 of the gas inspection apparatus 70. For the purpose of reducing the amount of processing, etc., it is set when the adapter 50 is attached to the accommodating portion 5.

As shown in FIGS. 7 to 13, the system main body 1 is provided with open portions O1 to O4 that are opened to the outside to take in the atmosphere OA or discharge the exhaust EA to the outside. Although omitted, the open portions O <b> 1 to O <b> 4 are provided on the back side of the system main body 1. Furthermore, inside the system main body 1, there are provided various paths for connecting the air supply joint 5a and the exhaust joint 5b provided in the housing part 5, and the open parts O1 to O4 and the gas containers C1 and C2. In these paths, pressure gauges Mp1 to Mp5, flow meters Mf1 to Mf3, valves V1 to V13, pumps P1 and P2, pressure regulators R1 and R2, filters F1 to F3, and the like are arranged. The pressure values measured by the pressure gauges Mp1 to Mp3 and the flow values measured by the flowmeters Mf1 to Mf3 are input to the control unit 2, and the control unit 2 is based on the input signals and the like. Operation control of the valves V1 to V13, the pumps P1 and P2, and the pressure regulators R1 to R3 is executed.
7 to 13, in the valves V <b> 1 to V <b> 13, the closed ports are indicated by black triangles, and the open ports are indicated by white triangles.

For example, the raw material gas path 6b through which the raw material gas G0 taken from the gas containers C1 and C2 flows in the dilution process described later is connected to the respective pressure gauges Mp4 and Mp5 and the respective pressure regulators R1 from the respective gas containers C1 and C2. , R2, the respective flow rate adjusting valves V9, V10, the three-way valve V8, the two-way valve V7, and the flow meter Mf2, and provided as a path to the junction B1.
The inspection gas path 6c through which the inspection gas G1 flows is a path from the junction B1 to the supply joint 5a via the three-way valve V4, the three-way valve V3, the branching section B2, and the three-way valve V1. Is provided.
A path through which the inspection gas G1 or the raw material gas G0 as the raw material flows is called a gas path, such as the raw material gas path 6b and the inspection gas path 6c.

In addition, an atmosphere supply path 6a through which the atmosphere OA for diluting the source gas G0 in a dilution process to be described later flows from the open portion O3 to the filter F3, the pump P1, the three-way valve V13, the three-way valve V12, and the two-way valve V11. , And the flowmeter Mf3, and is provided as a path to the junction B1.
The air release path through which the air supply joint 5a can be opened to the atmosphere is a path from the air supply joint 5a to the open portion O2 via the three-way valve V1, the three-way valve V3, the flow meter Mf1, and the filter F2. It is provided as.

  The source gas path 6b and the atmosphere supply path 6a serve as a dilution processing means 6 capable of executing a dilution process in which the source gas G0 taken out from the gas containers C1 and C2 is diluted with the atmosphere OA to generate the inspection gas G1. Function.

〔adapter〕
Next, the configuration of the adapter 50 will be described with reference to FIGS. 1, 2, and 3.
As shown in FIG. 1, the adapter 50 is detachably attached to the accommodating portion 5 provided on the front surface of the system main body 1 so that the adapter 50 can be accommodated in the accommodating portion 5 of the gas inspection machine 70. It is configured. That is, the outer shape of the adapter 50 has a common rectangular cross section so as to be inserted into the interior of the housing portion 5 from the front side, and the adapter 50 is located above and below the front side of the adapter 50 with respect to the system body 1. A mounting claw 64 for fixing the screw with a screw is formed so as to protrude in the vertical direction.
The adapter 50 is inserted in the depth direction from the front side with respect to the housing portion 5, and the mounting claws 64 of the adapter 50 are fixed to the edge portion of the housing portion 5 with screws. Installed.

  The adapter 50 may be attached to the system main body 1 prior to the inspection of the gas inspection machine 70. However, in order to prevent erroneous attachment, etc., it is not performed by the user side, but by the supplier (manufacturer, etc.). ) Side is desirable. That is, the delivery source grasps the specifications of the gas inspection machine 70 used by the user in advance at the time of receiving an order for the inspection system 100, and based on this, the inspection system 100 in which the appropriate adapter 50 is mounted in the system main body 1 in advance. To the user. Further, the supplier can change the adapter 50 based on the change of the adapter 50 used by the user at the time of maintenance or overhaul.

The adapter 50 is provided with a gas inspection device accommodating portion 60 which is a rectangular cross-sectional recess for accommodating the gas inspection device 70 through the opening on the front side. The gas inspection machine housing 60 is configured such that its shape and the arrangement of various parts provided on it are adapted to a predetermined type of the gas inspection machine 70. Plural types of adapters 50 suitable for each are prepared. Thus, a plurality of types of gas inspection machines 70 can be accommodated in a form in which the adapter 50 is interposed with respect to the common accommodation part 5. The gas inspection machine 70 owned by the user is stored in the accommodation part 5. The adapter 50 corresponding to the model is selected and mounted.
It should be noted that such selection and mounting of the adapter 50 may be performed by the user himself, but it is desirable to be performed by the seller of the inspection processing system 100 in order to prevent erroneous selection and mounting.

As shown in FIG. 3, the adapter 50 is composed of an upper and lower split structure composed of an upper casing 50a and a lower casing 50b, and the above-described gas inspection machine housing 60 is provided with a recess on the lower surface side of the upper casing 50a. It forms in the form which combines with the recessed part of the upper surface side of the lower casing 50b.
An exhaust guide provided with an exhaust tube 57 and a filter 58 on the lower surface side of the upper casing 50a and the upper surface side of the lower casing 50b of the adapter 50 will be described later in detail in addition to the gas inspection device housing 60. A path 56, an air supply guide path 61 in which an air supply tube 62 is provided, a base accommodating part 51 in which a base 52 provided with a communication part 53, a control part 54, and the like are accommodated, a communication path 63, and the like are formed. Various recesses are provided.

  The exhaust guide path 56 is provided adjacent to the left side of the gas tester housing 60 as a passage for guiding the exhaust from the gas tester 70 housed in the housing 5 to the exhaust joint 5b. The exit direction is a direction along the mounting direction (that is, the depth direction) of the adapter 50 to the accommodating portion 5. The exhaust guide path 56 has an opening 59 that opens from the side with respect to the gas inspection machine housing 60, and the opening 59 is a gas inspection machine 70 housed in the gas inspection machine housing 60. The exhaust portion 77 is disposed to face the exhaust portion 77 with a predetermined interval. Further, the gas suction flow rate of the exhaust joint 5b (that is, the suction flow rate of the pump P2 on the system body 1 side (see FIGS. 7 to 13)) is the exhaust flow rate of the gas tester 70 (that is, the suction pump on the gas tester 70 side). More than 75 (suction flow rate). As a result, the exhaust discharged from the exhaust part 77 of the gas inspection machine 70 can be reliably sucked into the exhaust guide path 56 from the opening 59. Furthermore, in addition to the exhaust from the gas tester 70, the air around the gas tester housing 60 is taken into the opening 59. That is, the exhaust from the gas inspection machine 70 can be diluted with ambient air and sucked into the exhaust guide path 56 from the opening 59, and the diluted exhaust can be safely discharged from the system main body 1 side to the outside. Can be discharged.

  In the exhaust guide path 56, a filter 58 is provided in a space facing the opening 59, and an exhaust tube 57 is fitted inside the filter 58. The back end of the exhaust tube 57 is fitted and connected to an exhaust joint 5b provided on the inner back surface side of the housing portion 5, and the connection direction is the mounting direction of the adapter 50 to the housing portion 5 ( That is, it is set in a direction along the depth direction. Thus, when the adapter 50 is attached to the housing portion 5, the exhaust tube 57 can be easily connected to the exhaust joint 5b.

  The air supply guide path 61 is provided on the back side of the gas inspection device housing 60 as a passage for guiding the inspection gas supplied to the air supply joint 5a to the gas introduction portion 72 of the gas inspection device 70. The extending direction is a direction along the mounting direction (that is, the depth direction) of the adapter 50 to the housing portion 5. An air supply tube 62 is fitted in the air supply guide path 61. The front end portion of the air supply tube 62 is fitted and connected to the suction nozzle 73 of the gas inspection device 70 accommodated in the gas inspection device accommodating portion 60, and the connection direction thereof is connected to the gas inspection device accommodating portion 60. It is set in a direction along the insertion direction (that is, the depth direction) of the gas inspection machine 70. This makes it possible to easily connect the suction nozzle 73 to the air supply tube 62 when the gas tester 70 is inserted into the gas tester housing 60.

  Further, the back end portion of the air supply tube 62 is fitted and connected to an air supply joint 5 a provided on the inner back surface side of the housing portion 5, and the connection direction thereof is the adapter 50 to the housing portion 5. Is set in a direction along the mounting direction (that is, the depth direction). This makes it possible to easily connect the air supply tube 62 to the air supply joint 5a when the adapter 50 is attached to the housing portion 5.

  The base accommodating part 51 is provided adjacent to the left side of the exhaust guide path 56, and its extending direction is a direction along the mounting direction (that is, the depth direction) of the adapter 50 to the accommodating part 5. In this base accommodating part 51, a plate-like base 52 is accommodated in a posture in which the plate surface is perpendicular to the left-right direction. And the connector 55 provided in the back | inner side edge part of this base | substrate 52 is fittingly connected to the connector 5c provided in the inner back surface side of the accommodating part 5, and the connection direction is the adapter 50 to the accommodating part 5. Is set in a direction along the mounting direction (that is, the depth direction). Thus, when the adapter 50 is attached to the housing portion 5, the connector 55 on the adapter 50 side can be easily connected to the connector 5c on the system body 1 side.

Further, a control unit 54 composed of a CPU or the like is disposed on the base 52, and a gas inspection machine 70 accommodated in the gas inspection machine accommodation unit 60 is provided on the surface of the gas inspection machine accommodation unit 60. A communication unit 53 for performing infrared communication with the communication unit 79 is disposed.
And the adapter 50 is formed in the adapter 50 with the attitude | position extended in the left-right direction for the infrared rays for communication transmitted / received between these communication parts 79 and 53 to pass through. Thus, when the gas inspection device 70 is accommodated in the gas inspection device accommodating portion 60 of the adapter 50, infrared communication between the communication portions 79 and 53 becomes possible when the gas inspection device 70 is completely accommodated. Therefore, by detecting the state in which such infrared communication is possible, it is possible to determine whether or not the gas inspection machine 70 has been accommodated.
In the adapter 50, for the base 52 on which the communication unit 53 is provided, patterns of a plurality of types of communication units 53 are prepared so that the various types of adapters can be adopted, and which communication unit is mounted at the time of manufacture. By making the decision, the base 52 is shared.

[Inspection processing method]
Next, an inspection processing method executed by the above-described inspection processing system 100 will be described with reference to FIGS.
First, the operator inserts the gas tester 70 to be inspected into the gas tester storage 60 of the adapter 50 attached to the storage 5 while operating the gas tester 70. Then, as described above, the suction nozzle 73 on the gas tester 70 side is connected to the air supply tube 62 on the adapter 50 side, and the communication unit 79 on the gas tester 70 side and the communication unit 53 on the adapter 50 side are connected. It becomes a state where infrared communication is possible. And the control part 2 by the side of the system main body 1 determines the state in which the infrared communication became possible as the completion of the accommodation of the gas tester 70.

Then, the control unit 2 displays the initial screen (see FIG. 6A) on the display 3 in a state where the gas inspection machine 70 is accommodated in the accommodating unit 5, and the “bump test” button on the initial screen is displayed. When operated by the user, execution of the inspection processing method is started.
Then, in the inspection processing method, as shown in FIG. 4, the consistency check processing (# S1) and the predetermined grouping processing (# S2) are sequentially executed to determine the gas inspection machine 70 to be inspected (# S3). After that, an inspection process (# S4) is performed on the determined gas inspection machine 70. Further, after this inspection process (# S4) is executed, a cleaning process (# S6) is executed. In addition, when a plurality of gas inspection machines 70 are stored in the four storage units 5, a plurality of the gas inspection machines 70 are set as inspection targets, and a plurality of gas inspection machines 70 set as the inspection targets are used. The inspection process (# S4) is sequentially executed in series. In the present embodiment, the various processes constituting the inspection processing method are sequentially executed in series. However, the processing order thereof may be changed, at least a part of the plurality of processes may be overlapped, The execution procedure may be changed within a possible range, such as by interposing a process.
Hereinafter, the details of each process constituting these inspection processing methods will be described in order.

[Consistency check process]
In the consistency confirmation process (# S1) shown in FIG. 4, the adapter identification information acquired by the adapter identification information acquisition means 2b and the gas acquired by the gas inspection machine identification information acquisition means 2c before the execution of the inspection process (# S4). Check consistency with inspection machine identification information.
That is, in the consistency confirmation process (# S1), the adapter identification information of each storage unit 5 stored in advance in the storage unit 4 when the adapter 50 is mounted is referred to, and the gas of the gas inspection machine 70 stored in the storage unit 5 is referred to. Whether or not the adapter 50 suitable for the gas inspection machine 70 to be inspected is used in a form of comparing whether or not the inspection machine identification information is compatible with the adapter identification information associated with the same container 5. To check. If not, the inspection process (# S4) is stopped and the user is notified, and conversely, if it is compatible, the process proceeds to the next grouping process (# S2). .
Then, by executing such consistency check processing (# S1), for example, the subsequent inspection processing (# S4) is executed in a state where the gas inspection machine 70 that does not conform to the adapter 50 is set. Is prevented. Therefore, the problem of leaking inspection gas and obtaining an incorrect inspection result due to such a combination of the gas inspection machine 70 and the adapter 50 being incompatible is avoided.

[Grouping process]
In the grouping process (# S2) shown in FIG. 4, a plurality of gas inspection machines 70 accommodated in the four accommodation units 5 are to be inspected, and for each of the plurality of gas inspection machines 70 as the inspection objects, Grouping is performed according to the inspection gas supplied to the gas inspection machine 70. Furthermore, in this grouping process (# S2), various information relating to the inspection gas can be used as an index for grouping, but in this embodiment, the composition and concentration of the inspection gas supplied to the gas inspection machine 70 are determined. It is an index for grouping.

Such a grouping process (# S2) is executed, and after the subsequent inspection process (# S4), it is confirmed whether or not there is a next inspection target gas inspection machine 70 belonging to the same group (# S5). ). If there is a next inspection target gas inspection device 70 belonging to the same group, the inspection processing (# S4) for the gas inspection device 70 is preferentially executed. After performing the cleaning process (# S6) to be performed, it is checked whether there is a gas inspection machine 70 to be inspected belonging to another group (# S7), and the gas inspection machine 70 belonging to the other group is checked. The process proceeds to the inspection process (# S4).
Then, by executing the grouping process (# S2) in this way and sequentially executing the inspection process (# S4) for each group, the change in the composition and concentration of the inspection gas associated with the switching of the inspection object is simplified. It has become.

[Inspection process]
FIG. 5 shows a detailed processing flow of the inspection process (# S4) shown in FIG. As shown in FIG. 5, in this inspection process, an operator confirmation process (# S10), an initial confirmation process (# S12), a blockage alarm confirmation process (# S13), and a suction are performed on the gas inspection machine 70 to be inspected. A flow rate confirmation process (# S14) and a gas alarm confirmation process (# S15) are sequentially executed. In addition, the concentration stabilization process (# S11) is executed before the execution of the gas alarm confirmation process, specifically in parallel with the execution of the initial confirmation process (# S12) to the suction flow rate confirmation process (# S14).
Hereinafter, the details of various processes constituting these inspection processes will be described.

(Worker confirmation process)
In the worker confirmation process (# S10), a worker confirmation screen (see FIG. 6B) is displayed on the display 3. On this operator confirmation screen, inspection items that the operator should confirm visually are displayed, and when the operator performs an inspection by visually confirming the gas inspection machine 70 along this display, there is no problem. In this case, the “confirmation completed” button displayed on the same screen is operated. When the “confirmation complete” button is operated, the worker confirmation process (# S10) is terminated, and the worker confirmation screen (see FIG. 6B) on the display 3 is changed to the bump test screen (FIG. 6C). And the execution of the next initial confirmation process (# S12) is started.

(Initial confirmation process)
FIG. 7 shows operating states of various auxiliary machines and gas flow states in the initial confirmation process (# S12). In the initial confirmation process (# S12), auto zero setting and battery remaining amount confirmation are performed.
In the auto-zero setting, the switching state of the three-way valve V1 is set so that the supply joint 5a to which the gas introduction part 72 of the gas inspection machine 70 is connected is opened to the opening part O1. Then, the gas inspection machine 70 is in a state where the atmosphere OA is sucked from the gas introduction part 72 via the opening part O <b> 1 and the sucked atmosphere OA is supplied to the sensor part 76. In this state, a zero setting instruction is transmitted to the control unit 78 on the gas inspection machine 70 side, and the control unit 78 on the gas inspection machine 70 side receiving the instruction sets the output of the sensor unit 76 to zero. On the other hand, in the battery remaining amount confirmation, the battery remaining amount on the gas inspection machine 70 side is received from the control unit 78 of the gas inspection machine 70.
When the auto zero setting and the battery remaining amount confirmation are completed, the fact that the zero setting has been performed and the remaining battery amount are displayed on the bump test screen (see FIG. 6C) displayed on the display 3, The initial confirmation process (# S12) is terminated.

(Blockage alarm confirmation processing)
FIG. 8 shows the operating state and gas flow state of various auxiliary machines in the blockage alarm confirmation process (# S13). In this blockage alarm confirmation process (# S13), the gas tester 70 confirms whether there is an abnormality in the blockage alarm function that outputs a predetermined blockage alarm when the gas introduction unit 72 is blocked.
That is, in the blockage alarm confirmation process (# S13), in a state where the supply joint 5a is connected to the gas introduction part 72 of the gas inspection machine 70, the outflow of gas from the supply joint 5a is blocked. The switching state of the three-way valves V1, V3, V4, V5 leading to the supply joint 5a is set. Then, the state of the gas introduction part 72 of the gas tester 70 becomes a pseudo blockage state, and the presence or absence of a blockage alarm output by the blockage alarm function of the gas tester 70 at that time is compared with the control unit 78 on the gas tester 70 side. Confirm by communication.

And when the blockage alarm is output with the interruption | blocking of the gas outflow from the supply joint 5a, it is judged that the blockage alarm function of the gas test | inspection machine 70 is operating normally. On the other hand, when the blockage alarm is not output with the interruption of the gas outflow from the air supply joint 5a, it is determined that the blockage alarm function of the gas tester 70 is not operating normally. In addition, for the gas inspection machine 70 having an abnormality in the blockage alarm function, the blockage abnormality in which the suction flow rate becomes substantially zero before the gas suction flow rate has deviated from the appropriate flow rate range. It can be judged that there is a possibility of having it.
Then, the presence / absence of abnormality of the clogging alarm function of the gas tester 70 is displayed on the bump test screen (see FIG. 6C) displayed on the display 3, and then this clogging alarm confirmation process (# S13) is terminated. .

  Further, when ending the blockage alarm confirmation process (# S13), the next suction flow rate confirmation process (# S14) is executed only for the gas tester 70 having no abnormality in the blockage alarm function. On the other hand, when it is determined that there is an abnormality in the blockage alarm function, it is abnormal as a comprehensive determination in order to avoid unnecessary execution of the subsequent processes including the gas alarm confirmation process (# S15) for the gas inspection machine 70. After displaying the effect (# S17), the inspection process (# S4 in FIG. 4) is terminated to streamline the inspection process.

(Suction flow confirmation process)
FIG. 9 shows operating states of various auxiliary machines and gas flow states in the suction flow rate confirmation processing (# S14). In this suction flow rate confirmation process (# S14), it is confirmed whether there is an abnormality in the suction flow rate in which the gas suction flow rate from the gas introduction unit 72 of the gas tester 70 deviates from the appropriate flow rate range.
That is, in the suction flow rate confirmation process (# S14), the switching state of the three-way valve V1 and the three-way valve V3 is set and opened in a state where the gas supply joint 5a is connected to the gas introduction part 72 of the gas inspection machine 70. The air supply joint 5a is opened to the atmosphere via the atmosphere release path leading to the portion O2. Then, since the gas inspection machine 70 sucks the atmosphere OA from the gas introduction part 72 through the atmosphere release path, it is measured by a flow meter Mf1 (an example of an open flow measurement part) provided in the atmosphere release path. The obtained gas flow rate is acquired as the gas suction amount of the gas inspection machine 70, and the presence or absence of an abnormal suction flow rate in which an appropriate gas suction flow rate cannot be secured in the gas inspection machine 70 is grasped.
Then, the presence / absence of an abnormality in the suction flow rate of the gas tester 70 is displayed on the bump test screen (see FIG. 6C) displayed on the display 3, and the suction flow rate confirmation processing (# S14) is ended.

  Further, when ending the suction flow rate abnormality confirmation process (# S14), the next gas alarm confirmation process (# S15) is executed only for the gas inspection machine 70 having no suction flow rate abnormality. On the other hand, if it is determined that there is an abnormality in the suction flow rate, it is indicated that the determination is abnormal as a comprehensive determination in order to avoid unnecessary execution of subsequent processing including the gas alarm confirmation processing (# S15) for the gas inspection machine 70. After the display (# S17), the inspection process (# S4 in FIG. 4) is terminated, thereby rationalizing the inspection process.

(Concentration stabilization treatment)
FIGS. 8 to 10 show the operating states and gas flow states of various auxiliary machines in the concentration stabilization process (# S11). This concentration stabilization process (# S11) is performed by supplying the inspection gas G1 having a stable flow rate and concentration from the beginning of the subsequent gas alarm confirmation process (# S15) to the gas introduction unit 72 of the gas inspection machine 70. In order to obtain a correct inspection result, it is a process executed at the time of execution of the blockage alarm confirmation process (# S13) or the suction flow rate confirmation process (# S14) before the execution of the alarm confirmation process (# S15). It is executed in parallel with the execution of the initial confirmation process (# S12) to the suction flow rate confirmation process (# S14) (see FIGS. 8 and 9), and also after the suction flow rate confirmation process (# S14) is performed. Until the flow rate and concentration of the working gas G1 are stabilized, the warning check process (# S15) is executed in a standby state (see FIG. 10).

That is, in the concentration stabilization processing (# S11), the inspection gas G1 generated by the dilution processing by the dilution processing means 6 described above is exhausted to the outside to stabilize the concentration of the inspection gas G1.
Specifically, by opening the two-way valve V7 and the flow rate adjusting valve V10 and setting the switching state of the three-way valve V8, the raw material gas G0 taken out from the gas container C1 (in this embodiment, stored in the gas container C1). The raw material gas G0 is used, but another gas container C2 may be used.) After the pressure is stabilized by the pressure regulator R2, the flow is passed through the flow meter Mf2. And then supplied to the junction B1. At the same time, by operating the pump P1, opening the two-way valve V11 and setting the switching state of the three-way valves V12, V13, the atmosphere OA taken from the open portion O3 is passed through the filter F3 and the flow meter Mf3. And supply to the junction B1. As a result, in the junction B1, the source gas G0 passed through the source gas path 6b provided with the flow meter Mf2 is diluted by the atmosphere OA passed through the atmosphere supply path 6a provided with the flow meter Mf3. The so-called dilution process is performed, and the inspection gas G1 is generated.

The flow rate of the raw material gas G0 supplied to the junction B1 is controlled by adjusting the opening of the flow rate adjustment valve V10, while the flow rate of the atmosphere OA supplied to the junction B1 is controlled by adjusting the output of the pump P1. Has been. By these controls, the flow rate and concentration of the inspection gas G1 are adjusted to the desired flow rate and concentration.
In such a dilution process, the set flow rate of the source gas G0 set according to the dilution ratio of the source gas G0 is set according to the dilution ratio so that the capacity of the gas containers C1 and C2 is as small as possible. Is set to be smaller than the set flow rate of the atmospheric OA.
In this concentration stabilization process (# S11), by setting the switching state of the three-way valves V4 and V5, the inspection gas G1 generated in the junction B1 is opened through the three-way valves V4 and V5. Supplied to O4 and exhausted to the outside from the open portion O4. That is, the supply destination of the inspection gas G1 is configured to be able to exhaust the inspection gas G1 by switching from the supply joint 5a on the gas inspection machine 70 side to the external open portion O4.

  In this concentration stabilization process (# S11), by opening the two-way valves V2 and V6 while operating the pump P2, the ambient air taken in from the opening 59 of the adapter 50 is used as the exhaust EA from the opening O4. It is assumed that it is discharged to the outside. That is, the inspection gas G1 exhausted to the outside through the open portion O4 is diluted with the ambient air taken in from the opening 59 of the adapter 50, and the inspection gas G1 is exhausted to the outside with a high concentration. It has been avoided.

  Further, at the start of execution of the above-described dilution process, that is, at the start of execution of the concentration stabilization process (# S11), the opening degree of the flow rate adjustment valve V10 is temporarily increased, and the flow rate of the raw material gas G0 is increased. More than the set flow rate according to the dilution ratio of the source gas G0. As a result, the concentration of the inspection gas G1 generated in the merging section B1 rises early and reaches an appropriate concentration, and as a result, in a state of waiting for the start of the alarm confirmation process (# S15). The execution time of the density stabilization process (# S11) can be made as short as possible.

  Further, as shown in FIG. 9, while the concentration stabilization process (# S11) is executed while waiting for the start of the alarm confirmation process (# S15), the same as the initial confirmation process (# S12) described above. Further, by opening the air supply joint 5a to which the gas introduction part 72 of the gas inspection machine 70 is connected to the opening part O1, the gas inspection machine 70 releases the atmosphere OA from the gas introduction part 72 through the opening part O1. Try to suck.

(Gas alarm confirmation process (dilution process))
FIG. 11 shows operating states of various auxiliary machines and gas flow states in the gas alarm confirmation process (# S15) when the dilution process is performed. In this gas alarm confirmation process (# S15), the inspection gas generated by the dilution process with respect to the gas introduction part 72 of the gas inspection machine 70 via the branch part B2 which is a gas supply part and the supply joint 5a. G1 is supplied to check whether there is an abnormality in the gas alarm function of the gas inspection machine 70.
In this gas alarm confirmation process (# S15), since the inspection gas G1 diluted with the atmosphere OA that has not been subjected to the drying process by the dilution process is supplied to the gas inspection machine 70, the sensor of the gas inspection machine 70 The unit 76 is maintained in the same level as the normal atmosphere OA that contains moderately moisture without being excessively dried, and operates under the same conditions as in normal use.

That is, in the gas alarm confirmation process (# S15) shown in FIG. 11, the switching state of the three-way valves V1, V4, V5 is set from the state of the concentration stabilization process (# S11) in FIG. The inspection gas G1 supplied to the gas inspection unit 70 is supplied to the gas introduction unit 72 of the gas inspection machine 70 via the branch part B2 serving as the gas supply unit and the air supply joint 5a. G1 is aspirated. Then, the gas inspection device 70 introduces the inspection gas G1 containing the specific component from the gas introduction unit 72. At this time, the gas alarm function of the gas inspection device 70 operates normally and outputs a gas alarm. Whether or not there is an abnormality in the gas alarm function of the gas inspection machine 70 is confirmed by communication with the control unit 78 on the gas inspection machine 70 side.
Then, the presence / absence of abnormality of the gas alarm function of the gas tester 70 is displayed on the bump test screen (see FIG. 6C) displayed on the display 3, and the alarm confirmation process (# S15) is ended.

  Further, in the gas alarm confirmation process (# S15) shown in FIG. 11, the gas inspection machine 70 supplies the inspection gas G1 which is larger than the gas suction flow rate of the gas inspection machine 70, that is, the suction flow rate of the suction pump 75 on the gas inspection machine 70 side. 70 is supplied to a branching section B2 which is a gas supply section leading to a gas introduction section 72. Then, although the inspection gas G1 that has not been sucked into the gas introduction part 72 of the gas inspection machine 70 exists, the inspection gas G1 is discharged from the opening part O4 to the outside through the three-way valve V5. As a result, the gas inspection machine 70 sucks the inspection gas G1 without shortage, and further maintains the suction flow rate at an appropriate suction flow rate regardless of the supply flow rate of the inspection gas G1 on the system body 1 side. Therefore, it will operate under the same conditions as normal use.

  Further, in ending the gas alarm confirmation process (# S15), the previous blockage alarm confirmation process (# S13) and the suction flow rate confirmation process (# S14) are performed for the gas inspection machine 70 having no gas alarm abnormality. Therefore, the inspection process (# S4 in FIG. 4) is terminated after displaying that it is normal as a comprehensive judgment (# S16). On the other hand, if it is determined that there is a gas alarm abnormality, an abnormality is displayed as a comprehensive determination (# S17), and the inspection process (# S4 in FIG. 4) is terminated.

(Gas alarm confirmation process (undiluted process))
In the gas alarm confirmation process (# S15) shown in FIG. 11 described above, a dilution process is performed in which the source gas G0 taken out from the gas container C1 is diluted with the atmosphere OA to generate the inspection gas G1. Instead of this dilution process, a gas alarm confirmation process can be performed in the case of executing the non-dilution process in which the raw material gas G0 taken out from the gas container C1 is used as a check gas without being diluted as it is. Add details.
In this gas alarm confirmation process (# S15), the raw material gas G0 is used as it is as an inspection gas, and thus the above-described concentration stabilization process (# S11) is omitted.

  FIG. 13 shows the operating states and gas flow states of various auxiliary machines in the gas alarm confirmation process (# S15) when performing the non-dilution process. In this gas alarm confirmation process (# S15), the gas introduction unit 72 of the gas inspection machine 70 is subjected to non-dilution processing as a gas for inspection through the branch part B2 which is a gas supply part and the supply joint 5a. The raw material gas G0 taken out from the container C1 is supplied to check whether there is an abnormality in the gas alarm function of the gas inspection machine 70.

That is, in the gas alarm confirmation process (# S15) shown in FIG. 13, the operation of the pump P1 is stopped and the three-way valve V13 is closed to stop the intake of the atmosphere OA from the open portion O3. At the same time, the flow rate adjusting valve V10 is opened and the switching state of the three-way valve V8 is set, so that the pressure of the raw material gas G0 taken out from the gas container C1 is stabilized by the pressure regulator R2 and then diluted as described above. In the process, the air is passed through the air supply path 6a on the flow meter Mf3 side through which the air OA flows, and is supplied to the junction B1 as an inspection gas. Then, the raw material gas G0 is supplied to the branching section B2 as a gas supply section that supplies the inspection gas to the gas introduction section 72 of the gas inspection machine 70 and the supply joint 5a.
Thus, when the raw material gas G0 is used as it is as an inspection gas, even if the flow rate of the raw material gas G0 is a relatively large flow rate corresponding to the required flow rate of the inspection gas, the raw material gas G0 In the dilution process, the air is supplied to the air supply path 6a corresponding to the relatively large flow rate through which the relatively large flow rate of atmospheric OA flows, and for example, the flow rate of the raw material gas G0 is measured by the flow meter Mf3 corresponding to the relatively large flow rate. can do. On the other hand, the source gas supply path on the flow meter Mf2 side through which the relatively small flow rate of the source gas G0 flows in the dilution process is configured as a relatively simple and small size corresponding only to the small flow rate. As the total Mf2, one corresponding to a relatively small flow rate is used.

  The above is the detailed processing flow of the inspection process (# S4) in the inspection processing method shown in FIG. 4, and after the execution of the inspection process (# S4), the next gas inspection machine 70 to be inspected belonging to the same group. Is present (# S5), the gas inspection machine 70 to be inspected in the same group is changed, and the inspection process (# S4) is performed on the changed gas inspection machine 70. At that time, when the inspection gas G1 generated in the dilution process is used, the generated inspection gas G1 is temporarily passed through the three-way valves V4 and V5 when the inspection object is changed in the same group. Then, the dilution process is continued in such a manner that the air is supplied to the open portion O4 and exhausted. As a result, the concentration stabilization process when changing the inspection target is omitted, and the time required for the change is shortened.

  When shifting to the inspection process of the next gas inspection machine 70 belonging to the same group, a predetermined first cleaning process (# S8) is executed, and the inspection process of the gas inspection machines 70 in the same group is performed. Is completed, a predetermined second cleaning process (# S9) is executed.

[Cleaning process]
In the first cleaning process (# S8) executed when the inspection process of the next inspection target gas inspection machine 70 belonging to the same group is performed, the atmosphere OA is introduced into the gas introduction part 72 of the gas inspection machine 70 and the relevant inspection is performed. The gas inspection machine 70 is cleaned (hereinafter referred to as “gas inspection machine cleaning”).
On the other hand, in the second cleaning process (# S6) executed when all the inspection processes of the gas inspection machines 70 in the same group are completed, in addition to the gas inspection machine cleaning, the inspection gas G1 or the raw material gas that is the raw material thereof The atmosphere OA is passed through the gas path through which G0 flows, and the gas path is cleaned (hereinafter referred to as “gas path cleaning”).
FIG. 12 shows the operating states and gas flow states of various auxiliary machines when performing gas path cleaning and gas inspection machine cleaning at the same time.

(Gas path cleaning)
Specifically, in the gas path cleaning, the supply of the source gas G0 from the gas container C1 is stopped by closing the flow rate adjustment valve V10 from the state of the gas alarm confirmation process (# S15) in FIG. The switching state of the three-way valves V8 and V13 is set, and the source gas path 6b on the flow meter Mf2 side through which the source gas G0 has been flowing through the atmosphere OA taken in from the open portion O3 in the gas alarm confirmation process (# S15) or the like. Let it flow into. As a result, the source gas G0 remaining in the source gas path 6b is replaced with the atmosphere OA, and the source gas path 6b is cleaned.

Further, the atmosphere OA after flowing through the source gas path 6b passes through the inspection gas path 6c from the junction B1 to the branch B2 where the inspection gas G1 has been flowing in the gas alarm confirmation process (# S15) or the like. Circulate. Thus, the inspection gas G1 remaining in the inspection gas path 6c is replaced with OA in the atmosphere, and the inspection gas path 6c is cleaned.
Then, by performing such gas path cleaning, in the inspection process for the next inspection target gas inspection machine 70, erroneous inspection due to the inspection gas G1 and the raw material gas G0 remaining in the gas path is avoided. .
In this gas path cleaning, the atmosphere OA supplied to the branch section B2 after flowing through the source gas path 6b and the inspection gas path 6c is set via the open section O4 by setting the switching state of the three-way valves V1 and V5. Exhausted to the outside.

  In the gas path cleaning performed after the gas alarm confirmation process (# S15) in the case of performing the non-dilution process shown in FIG. 11, the gas gas alarm confirmation process (# S15) passes through the path through which the raw material gas G0 flows. It is desirable to let air OA flow. That is, by setting the switching state of the three-way valves V13, V8, V12, the atmosphere OA taken in from the open portion O3 is supplied to the gas path 6b side from the three-way valve V13, and the atmosphere OA is supplied from the three-way valve V8 to the three-way. Returning to the valve 12 side, it flows through the air supply path 6a on the downstream side of the three-way valve 12. As a result, the source gas G0 remaining in the path through which the source gas G0 flows in the gas alarm confirmation process (# S15) when performing the non-dilution process is replaced with the atmosphere OA, and the path is cleaned. Become.

  Further, in the gas path cleaning, when the gas inspection machine cleaning performed at the same time is completed, the switching state of the three-way valve V1 is set, and the atmosphere OA in the branch portion B2 is supplied to the three-way valve V1 side. Then, the inspection gas G1 and the raw material gas G0 remaining in the path from the branch part B2 to the three-way valve V1 are replaced with the atmosphere OA, and the path is cleaned.

(Gas inspection machine cleaning)
On the other hand, in the gas inspection machine cleaning, the gas supply joint 5a to which the gas introduction part 72 of the gas inspection machine 70 is connected is opened to the open part O1 in the same manner as in the initial confirmation process (# S12) described above, so that the gas The gas introduction part 72 of the inspection machine 70 is introduced with an atmosphere OA taken from the open part O1, that is, a fresh atmosphere OA different from that flowing through the gas path. Then, the atmosphere OA is introduced into the gas inspection machine 70 through the gas introduction unit 72 and flows through the sensor unit 76. Thus, the inspection gas G1 remaining in the gas introduction part 72 and the sensor part 76 on the gas inspection machine 70 side is replaced with the atmospheric air OA, and the gas inspection machine 70 is cleaned.
The gas inspection machine cleaning ends when it is determined from the output signal of the sensor unit 76 of the gas inspection machine 70 that the specific component concentration in the introduced gas has become substantially zero.

By performing such gas inspection machine cleaning, erroneous detection due to the inspection gas G1 remaining in the gas introduction part 72 and the like is avoided when the gas inspection machine 70 is used immediately after the inspection process.
In this gas inspection machine cleaning, the exhaust EA discharged from the exhaust part 77 of the gas inspection machine 70 is taken together with the ambient air from the opening part 59 and is discharged to the outside from the open part O4 through the exhaust joint 5b. The This prevents the exhaust EA from being released from the front surface on the housing portion 5 side. Further, the exhaust EA sucked from the opening 59 is discharged together with the atmosphere OA after flowing through the source gas path 6b and the inspection gas path 6c by gas path cleaning. This simplifies the exhaust path for gas inspection machine cleaning and gas path cleaning.
Note that the exhaust EA and the atmosphere OA may be separately discharged to the outside.

  In this embodiment, the gas path cleaning and the gas inspection machine cleaning are performed in different atmospheres OA. However, for example, the atmosphere flowing through the gas path is introduced into the gas inspection machine 70, respectively. The cleaning may be performed in the same atmosphere.

[Another embodiment]
(1) In the above embodiment, various processes are performed in addition to the inspection process (# S4) and the gas alarm confirmation process (# S15) when performing the dilution process before and after the inspection process (# S4). Other processes may be omitted or modified as appropriate.
In addition, regarding the details of the gas alarm confirmation process (# S15) when performing these dilution processes, the configuration of the above embodiment does not substantially limit the scope of rights of the present invention, and may be modified as appropriate. Absent.

(2) In the above embodiment, the gas inspection machine 70 is accommodated in the accommodating portion 5 with the adapter 50 detachably attached to the accommodating portion 5, but the adapter 50 is omitted, and the accommodating portion 5 may be adapted to the type of the gas inspection machine 70 so that the gas inspection machine 70 is directly accommodated in the accommodation portion 5.

2a Inspection processing means 2b Adapter identification information acquisition means 2c Gas inspection machine identification information acquisition means 5 Accommodating part 5a Supply joint (gas supply part)
5b Exhaust joint (exhaust suction part)
6 Dilution processing means 50 Adapter 53 Communication part 56 Exhaust guide path 59 Opening part 60 Gas inspection machine accommodating part 61 Air supply guide path 70 Gas inspection machine 72 Gas introduction part 77 Exhaust part 79 Communication part 100 Inspection processing system B2 Branch part (gas Supply department)
C1, C2 gas container Mf1 flow meter (open flow measurement unit)

Claims (6)

For a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction part, the gas introduction part of the gas inspection machine via a gas supply part A gas inspection machine inspection processing method for supplying a gas for inspection and executing a gas alarm confirmation process for confirming whether or not the gas alarm function of the gas inspection machine is abnormal.
An inspection processing method for a gas inspection machine that performs a dilution process for diluting a raw material gas taken out from a gas container in the atmosphere to generate the inspection gas.   The concentration stabilization process of exhausting the inspection gas generated in the dilution process to the outside and stabilizing the concentration of the inspection gas before the gas alarm confirmation process is performed. Inspection processing method for gas inspection machines. The gas inspection machine is configured to be a suction type that sucks the introduced gas from the gas introduction unit,
In the gas alarm check process, the inspection gas that is larger than the gas suction flow rate of the gas inspection machine is supplied to the gas supply unit, and the inspection gas that has not been drawn into the gas introduction unit of the gas inspection machine is exhausted. The inspection processing method of the gas inspection machine according to claim 1 or 2.   The gas inspection machine according to any one of claims 1 to 3, wherein the flow rate of the source gas is temporarily set to be higher than a set flow rate corresponding to a dilution ratio of the source gas at the start of execution of the dilution process. Inspection processing method. In the dilution process, the raw material gas is caused to flow through the raw material gas path, and air having a flow rate larger than that of the raw material gas is passed through the atmospheric supply path, and the raw material gas flowing through the raw material gas path is supplied to the atmospheric air. Diluted in the atmosphere flowing through the supply path,
Instead of the dilution process, when performing a non-dilution process in which the source gas taken out from the gas container is used as the inspection gas without being diluted as it is, the source gas is supplied to the gas via the atmosphere supply path. The inspection processing method for a gas inspection machine according to any one of claims 1 to 4, wherein the inspection processing method is supplied to a supply unit. For a gas inspection machine having a gas alarm function that outputs a predetermined gas alarm according to the state of a specific component in the introduced gas introduced from the gas introduction part, the gas introduction part of the gas inspection machine via a gas supply part An inspection processing system for a gas inspection machine comprising inspection processing means for supplying a gas for inspection and executing a gas alarm confirmation process for confirming whether there is an abnormality in the gas alarm function of the gas inspection machine,
An inspection processing system for a gas inspection machine provided with a dilution processing means capable of performing a dilution process for diluting a raw material gas taken out from a gas container in the atmosphere to generate the inspection gas.

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