JP2017159482A - Liquid discharge head, liquid discharge unit, and liquid discharging device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharge head in which attenuation of a pressure wave in a common liquid chamber becomes slow by high frequency oscillation, and fluctuation in liquid discharging performance can be reduced when continuously discharging.SOLUTION: A liquid discharge head comprises a nozzle plate 2 on which plural nozzles 4 for discharging a liquid are formed, and a flow channel plate 3 which form plural individual liquid chambers 6 with which the nozzles 4 are communicated. The flow channel plate 2 has a damper 21 as a deformable wall part which forms a wall surface a liquid introduction part 8 which constitutes a flow channel communicated with the individual liquid chamber 6, and a cavity part 22 which is provided on a side opposite to the liquid introduction part 8 with the damper 21 interposed therebetween, in the direction orthogonal to the nozzle arrangement direction. An end of the damper 21 on the nozzle plate side is displaceably joined to a nozzle plate 1 by an adhesive 25, and an end thereof on a side opposite to the nozzle plate side is fixed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a liquid discharge head, a liquid discharge unit, and an apparatus for discharging liquid.

  In the liquid discharge head, when the liquid in the individual liquid chamber is pressurized and discharged, the pressure wave propagates from the individual liquid chamber to the common liquid chamber, and the pressure wave reverses from the common liquid chamber to the other individual liquid chambers. Propagation causes crosstalk such as fluctuations in the ejection characteristics of the nozzles corresponding to the individual liquid chambers.

  Conventionally, on the surface of the flow path forming substrate on which the piezoelectric element is formed, a reservoir that communicates with the pressure generating chambers and supplies ink to each pressure generating chamber is configured together with a communicating portion formed on the flow path forming substrate. A reservoir forming substrate having a reservoir portion is joined, and a flow passage forming substrate in a region corresponding to the reservoir portion is provided with a penetrating portion that penetrates without communicating with the pressure generating chamber. There is known a head having a flexible film made up of members that constitute a diaphragm and a piezoelectric element, having flexibility (Patent Document 1).

Japanese Patent No. 358918

  However, in the configuration disclosed in Patent Document 1, since the wall surface of the reservoir portion serving as the common liquid chamber is formed of a flexible film, the pressure wave generated in the individual liquid chamber reaches the reservoir portion. Thus, it takes time to be attenuated.

  For this reason, when the drive frequency increases, the pressure wave due to the next discharge is repeatedly propagated before the pressure wave is attenuated in the reservoir, and the liquid discharge characteristics vary due to the pressure fluctuation in the reservoir. There is.

  The present invention has been made in view of the above problems, and an object thereof is to reduce variations in liquid ejection characteristics.

In order to solve the above-described problem, a liquid discharge head according to claim 1 of the present invention includes:
A nozzle plate formed with a plurality of nozzles for discharging liquid;
A flow path plate forming a plurality of individual liquid chambers through which the nozzle communicates,
The flow path plate has a deformable wall part forming a wall surface of the flow path leading to the individual liquid chamber in a direction orthogonal to the nozzle arrangement direction, and a side opposite to the flow path across the wall part. A hollow portion provided, and
The wall is
The nozzle plate side end is adhesively bonded to the nozzle plate in a displaceable manner,
The end opposite to the nozzle plate side is fixed.

  According to the present invention, it is possible to reduce variations in liquid ejection characteristics.

FIG. 3 is a schematic cross-sectional view in a direction orthogonal to a nozzle arrangement direction of the liquid ejection head according to the first embodiment of the present invention. It is a plane explanatory view of a channel board similarly. It is a plane explanatory view of a nozzle plate. It is principal part sectional drawing of FIG. FIG. 5 is a perspective explanatory view of the damper as seen from the liquid introduction part side. It is sectional explanatory drawing with which it uses for description of a damper effect | action. FIG. 6 is a cross-sectional explanatory diagram in a direction orthogonal to a nozzle arrangement direction of a liquid ejection head according to a second embodiment of the present invention. It is principal part sectional drawing explanatory drawing of the direction orthogonal to the nozzle arrangement direction of the liquid discharge head which concerns on 3rd Embodiment of this invention. It is a plane explanatory view of a channel board similarly. It is a plane explanatory view of a channel plate and a nozzle plate of a liquid discharge head concerning a 4th embodiment of the present invention. It is a plane explanatory view of a channel plate and a nozzle plate of a liquid discharge head concerning a 5th embodiment of the present invention. It is a plane explanatory view of a channel board of a liquid discharge head concerning a 6th embodiment of the present invention. It is a plane explanatory view of a channel plate of a liquid discharge head concerning a 7th embodiment of the present invention. It is sectional explanatory drawing corresponded to the AA line of FIG. It is a plane explanatory view of a channel board of a liquid discharge head concerning an 8th embodiment of the present invention. It is principal part enlarged plan explanatory drawing of the flow-path board of the liquid discharge head which concerns on 9th Embodiment of this invention. It is a plane explanatory view of a channel plate of a liquid discharge head concerning a 10th embodiment of the present invention. It is a plane explanatory view of the channel board of the liquid discharge head concerning an 11th embodiment of the present invention. It is a plane explanatory view of the nozzle plate of the liquid discharge head concerning a 12th embodiment of the present invention. FIG. 20 is an explanatory cross-sectional view corresponding to the line BB in FIG. 19. It is principal part sectional explanatory drawing of the liquid discharge head which concerns on 12th Embodiment of this invention. It is principal part plane explanatory drawing of an example of the apparatus which discharges the liquid which concerns on this invention. It is principal part side explanatory drawing of the apparatus. It is principal part plane explanatory drawing of the other example of the liquid discharge unit which concerns on this invention. It is front explanatory drawing of the further another example of the liquid discharge unit which concerns on this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. A liquid discharge head according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic sectional view of the head in a direction orthogonal to the nozzle arrangement direction.

  The liquid discharge head includes a nozzle plate 1, a flow path plate 2, a vibration plate 3, a piezoelectric element 11 that is a pressure generating element (pressure generating means), a holding substrate 50, a common liquid chamber member 70, and a drive IC500 etc. are provided. The flow path plate 2 and the vibration plate 3 are collectively referred to as “flow path member 20”.

  The nozzle plate 1 is provided with a nozzle row in which a plurality of nozzles 4 for discharging liquid are arranged.

  The flow path plate 2, together with the nozzle plate 1 and the vibration plate 3, forms an individual liquid chamber 6 that communicates with the nozzle 4, a fluid resistance portion 7 that communicates with the individual liquid chamber 6, a liquid introduction portion 8, and the like. In the individual liquid chamber 6, the common liquid formed by the common liquid chamber member 70 through the fluid resistance portion 7 and the liquid introduction portion 8, the opening 9 of the diaphragm 3, and the opening 51 serving as the flow path of the holding substrate 50. Liquid is supplied from the chamber 10.

  The vibration plate 3 forms a deformable vibration region 30 that forms a part of the wall surface of the individual liquid chamber 6. Although the opening 9 of the diaphragm 3 is a filter part, it may be a simple opening.

  A piezoelectric element 11 is provided integrally with the vibration region 30 on the surface of the vibration plate 3 opposite to the individual liquid chamber 6 in the vibration region 30, and the vibration region 30 and the piezoelectric element 11 constitute a piezoelectric actuator. .

  The piezoelectric element 11 is configured by sequentially laminating a lower electrode 13, a piezoelectric layer (piezoelectric body) 12, and an upper electrode 14 from the vibration region 30 side.

  The holding substrate 50 is formed with an opening 51 which is a through hole that becomes a part of a flow path from the common liquid chamber 10 to the individual liquid chamber 6. Further, the holding substrate 50 is formed with a recess 52 that covers and accommodates the piezoelectric element 11 and an opening 53 that accommodates the drive IC 500. The opening 51 is a slit-shaped through hole extending in the nozzle arrangement direction.

  The holding substrate 50 is interposed between the flow path member 20 and the common liquid chamber member 70 and forms a part of the wall surface of the common liquid chamber 10.

  The common liquid chamber member 70 forms a common liquid chamber 10 for supplying a liquid to each individual liquid chamber 6. A part of the wall surface of the common liquid chamber 10 is a damper 90.

  In this liquid discharge head, voltage is applied between the upper electrode 14 and the lower electrode 13 of the piezoelectric element 11 from the driving IC (also referred to as driver IC) 500, so that the piezoelectric layer 12 is in the electrode stacking direction, that is, the electric field direction. And contract in a direction parallel to the vibration region 30. At this time, since the lower electrode 13 side is constrained by the vibration region 30, a tensile stress is generated on the lower electrode 13 side of the vibration region 30, and the vibration region 30 bends toward the individual liquid chamber 6 side and applies the internal liquid. By pressurizing, the liquid is discharged from the nozzle 4.

  Next, the damper structure in this embodiment will be described with reference to FIGS. 2 is an explanatory plan view of the flow path plate, FIG. 3 is an explanatory plan view of the nozzle plate, FIG. 4 is an explanatory cross-sectional view of the main part of FIG. 1, and FIG. . In addition, let the flow path plate be the plane explanatory drawing seen from the nozzle plate side, and let the nozzle plate be the plane explanatory drawing seen from the flow path plate side (the same applies below).

  As described above, the flow path plate 2 is provided with the individual liquid chamber 6 and the fluid resistance section 7 and the liquid introduction section 8 that form a flow path leading to the individual liquid chamber 6. In the present embodiment, as shown in FIG. 5, the adjacent individual liquid chamber 6, the fluid resistance portion 7, and the liquid introduction portion 8 are separated by a partition wall portion 60. That is, the liquid introduction part 8 is also an individual flow path.

  The flow path plate 2 sandwiches the damper 21 between the deformable wall portion (hereinafter referred to as “damper”) 21 that forms the wall surface 21 a of the liquid introduction portion 8 in a direction orthogonal to the nozzle arrangement direction. And the cavity portion 22 provided on the opposite side to the liquid introduction portion 8 (flow path).

  Here, the cavity 22 is formed by providing the groove 22 a in the flow path plate 2 constituting the flow path member 20, and the damper 21 is formed on the liquid introduction part 8 side.

  On the other hand, on the nozzle plate 1 side, a recess 23 serving as an adhesive reservoir is provided along the nozzle arrangement direction at a portion where the damper 21 is joined. As shown in FIGS. 2 and 3, the width W1 of the recess 23 in the direction orthogonal to the nozzle arrangement direction is larger than the thickness t1 of the damper 21 in the direction orthogonal to the nozzle arrangement direction (t <W1). .

  And the edge part by the side of the nozzle plate of the damper 21 is joined to the nozzle plate 1 so that a displacement is possible with the adhesive agent 25 with which the recessed part 23 was filled. In this case, the adhesive 25 has elasticity that allows displacement of the end portion of the damper 21. Specifically, an adhesive having a high Young's modulus is preferably used, and an adhesive having 4 Gpa or more is preferably used.

  In the present embodiment, as shown in FIG. 4, the thickness (height) h <b> 1 of the flow path plate 2 and the height h <b> 2 of the damper 21 in the thickness direction of the flow path plate are the same. Therefore, the surface of the end portion on the nozzle plate side of the damper 21 is in contact with the adhesive 25.

  On the other hand, the end of the damper 21 opposite to the end on the nozzle plate side is integrated and fixed to the diaphragm 3 constituting the flow path member 20. In other words, in the present embodiment, the flow path plate 2 and the vibration plate 3 are formed as a concave portion or a groove portion or a through hole that forms the individual liquid chamber 6 or the like in an integral member. The end opposite to this end is in a state of being fixed integrally with the diaphragm 3.

  Next, the damper action in this embodiment will be described with reference to the cross-sectional explanatory view of FIG.

  As described above, by driving the piezoelectric element 11, the piezoelectric element 11 is deformed with the deformation of the vibration region 30, the liquid in the individual liquid chamber 6 is pressurized, and the liquid is discharged from the nozzle 4. .

  At this time, part of the pressure wave generated in the individual liquid chamber 6 propagates from the fluid resistance portion 7 into the common liquid chamber 10 through the liquid introduction portion 8, the opening portion 9, and the opening portion 51 of the holding substrate 50.

  In this case, as shown in FIG. 6, the damper 21 receives a pressure wave that reaches the liquid introduction part 8 from the individual liquid chamber 6 through the fluid resistance part 7, and the nozzle plate 1 side is hollow as shown by an arrow Y. It deforms while displacing to the part 22 side, and absorbs or attenuates the pressure wave from the liquid introduction part 8 toward the common liquid chamber 10.

  Here, the effect of the pressure attenuation of the damper on the pressure wave generated from the individual liquid chamber 6 by driving the piezoelectric actuator is generated earlier as the distance from the generation source to the damper is shorter, so that the damper is disposed on the wall surface of the common liquid chamber 10. Therefore, the damping effect can be exhibited more efficiently than the damper.

  As a result, even when high frequency driving is performed, the pressure wave can be quickly attenuated, and variations in liquid ejection characteristics can be reduced.

  Next, a liquid ejection head according to a second embodiment of the present invention will be described with reference to FIG. FIG. 7 is an explanatory cross-sectional view in a direction orthogonal to the nozzle arrangement direction of the head.

  In the present embodiment, an air release passage 26 that opens the cavity 22 to the atmosphere is provided. The air release passage 26 passes through the cavity 22 and the outside air through the diaphragm 3, the holding substrate 50 and the common liquid chamber member 70.

  By opening the cavity 22 to the atmosphere, the damper 21 is easily displaced, and pressure wave absorption or reduction efficiency is improved.

  Next, a liquid ejection head according to a third embodiment of the present invention will be described with reference to FIGS. FIG. 8 is a cross-sectional explanatory view of a main part in a direction orthogonal to the nozzle arrangement direction of the head, and FIG. 9 is a plan explanatory view of the flow path plate.

  In the present embodiment, the height h2 of the damper 21 in the thickness direction of the flow path plate 2 is higher than the thickness (height) h1 of the flow path plate 2. Therefore, the nozzle plate side end portion of the damper 21 is buried in the adhesive 25 accumulated in the recess portion 23 of the nozzle plate 1.

  Even in such a configuration, the same effect as that of the first embodiment can be obtained by allowing the adhesive 25 to displace the end portion of the damper 21 on the nozzle plate side.

  Next, a liquid discharge head according to a fourth embodiment of the invention will be described with reference to FIG. FIG. 10 is an explanatory plan view of a flow path plate and a nozzle plate of the head.

  In the present embodiment, the recess 23 is provided to the outside of the outermost individual liquid chamber 6 in the nozzle arrangement direction. Therefore, the length L2 of the recess 23 in the nozzle array direction is longer than the maximum length (array width) L2 of the row of the individual liquid chambers 6.

  As a result, it is possible to displace the portion of the damper 21 corresponding to the individual liquid chamber 6 at both ends in the nozzle arrangement direction in substantially the same manner as the portion of the damper 21 corresponding to the individual liquid chamber 6 in the central portion. Variations can be reduced.

  Next, a liquid ejection head according to a fifth embodiment of the invention will be described with reference to FIG. FIG. 11 is an explanatory plan view of a flow path plate and a nozzle plate of the head.

  In the present embodiment, the recessed portion 23 is disposed in the region D from the cavity portion 22 to the liquid introducing portion 8 in a direction orthogonal to the nozzle arrangement direction. That is, the recessed portion 23 filled with the adhesive 25 is prevented from being applied to the fluid resistance portion 7.

  As a result, it is possible to prevent the adhesive 25 from entering the fluid resistance portion 7 to vary the fluid resistance between the nozzles and to vary the discharge characteristics.

  Next, a liquid ejection head according to a sixth embodiment of the invention will be described with reference to FIG. FIG. 12 is an explanatory plan view of the flow path plate of the head.

  In the present embodiment, the thickness t1 of the damper 21 is smaller than the interval (width of the partition wall 60) S between the individual liquid chambers 6 (t1 <S).

  Thereby, the pressure fluctuation transmitted to the adjacent individual liquid chamber 6 is blocked by the thick partition wall portion 60, while the damper 21 can be made thin so that the pressure fluctuation can be easily transmitted.

  Next, a liquid ejection head according to a seventh embodiment of the invention will be described with reference to FIGS. FIG. 13 is an explanatory plan view of the flow path plate of the head, and FIG. 14 is an explanatory sectional view corresponding to the line AA in FIG.

  In the present embodiment, the damper 21 has a shape that tapers toward the nozzle plate 1 in a cross-sectional shape along a direction orthogonal to the nozzle arrangement direction.

  In this way, by tapering the portion on the nozzle plate 1 side that greatly deforms even in the damper 21, it is possible to reduce rigidity and facilitate deformation.

  Next, a liquid ejection head according to an eighth embodiment of the invention will be described with reference to FIG. FIG. 15 is an explanatory plan view of the flow path plate of the head.

  In the present embodiment, the wall surface 21a of the liquid introduction portion 8 formed by the damper 21 has a curved surface shape in plan view. On the other hand, the wall surface 22b on the cavity portion 22 side of the damper 21 has a wave shape that substantially follows the wall surface 21a of the liquid introduction portion 8 in the nozzle arrangement direction.

  Thereby, even when the wall surface 21a of the liquid introduction part 8 has a curved surface shape, the thickness t1 of the damper 21 forming the wall surface 21a of the liquid introduction part 8 can be made substantially constant, and is easily displaced and deformed.

  Next, a liquid ejection head according to a ninth embodiment of the invention will be described with reference to FIG. FIG. 16 is an enlarged plan view of an essential part of the flow path plate of the head.

  Also in this embodiment, the wall surface 21a of the liquid introduction part 8 formed by the damper 21 has a curved surface shape in plan view. On the other hand, the wall surface 22b on the cavity portion 22 side of the damper 21 has a curved surface shape that follows the wall surface 21a of the liquid introduction portion 8 in the nozzle arrangement direction. That is, the wall surface 22b on the cavity portion 22 side includes a curved surface portion 22b1 corresponding to the wall surface 21a and a flat end portion 22b2 corresponding to the partition wall portion 60 of the adjacent liquid introduction portion 8.

  Thereby, even when the wall surface 21a of the liquid introduction part 8 has a curved shape, the thickness t1 of the damper 21 forming the wall surface 21a of the liquid introduction part 8 can be made constant, and is easily displaced and deformed.

  Next, a liquid ejection head according to a tenth embodiment of the invention will be described with reference to FIG. FIG. 17 is an explanatory plan view of the flow path plate of the head.

  In the present embodiment, the cavity portion 22 has a portion 22b formed in the partition wall portion 60 between the liquid introduction portions 8 that are adjacent flow paths.

  By forming the portion 22b of the cavity portion 22, the restraining force of the damper 21 by the partition wall portion 60 is relaxed, the damper 21 is easily deformed and displaced, the displacement amount is increased, and the damper efficiency can be improved.

  Next, a liquid ejection head according to an eleventh embodiment of the present invention will be described with reference to FIG. FIG. 18 is an explanatory plan view of the flow path plate of the head.

  In the present embodiment, the cavity 22 is provided independently for each individual liquid chamber 6.

  Thereby, variation in the damper action between the central portion and the end portion in the nozzle arrangement direction can be reduced, and variations in the liquid ejection characteristics can be reduced.

  Next, a liquid ejection head according to a twelfth embodiment of the present invention will be described with reference to FIGS. FIG. 19 is an explanatory plan view of the nozzle plate of the head, and FIG. 20 is an explanatory sectional view corresponding to the line BB in FIG.

  In the present embodiment, the recess 23 serving as an adhesive reservoir on the nozzle plate 1 side is provided independently for each individual liquid chamber 6.

  That is, as described in the first embodiment, when the continuous recess 23 is formed corresponding to all the individual liquid chambers 6, a portion corresponding to one individual liquid chamber 6 of the damper 21 is displaced. Thus, the portion corresponding to the adjacent individual liquid chamber 6 may be deformed to affect the liquid ejection characteristics of the adjacent individual liquid chambers 6.

  Therefore, the recess 23 filled with the adhesive 25 is made independent for each individual liquid chamber 6, and the bonding strength with the nozzle plate 1 is increased between the individual liquid chambers 6 to suppress the propagation of displacement to adjacent portions. ing.

  Next, a liquid ejection head according to a thirteenth embodiment of the present invention will be described with reference to FIG. FIG. 21 is an explanatory cross-sectional view of the main part of the head.

  In the present embodiment, the end of the damper 21 opposite to the end on the nozzle plate side is also adhesively bonded so as to be displaceable by the adhesive 25 filled in the recess 27 provided in the diaphragm 3 that is a wall surface member. .

  If comprised in this way, the damper 21 whole will be displaced to the direction along an in-plane direction, and a more efficient damper effect | action can be exhibited.

  Next, an example of an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. FIG. 22 is an explanatory plan view of the main part of the apparatus, and FIG. 23 is an explanatory side view of the main part of the apparatus.

  This apparatus is a serial type apparatus, and the carriage 403 reciprocates in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 spans the left and right side plates 491A and 491B and holds the carriage 403 so as to be movable. The carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 spanned between the driving pulley 406 and the driven pulley 407.

  A liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated is mounted on the carriage 403. The liquid discharge head 404 of the liquid discharge unit 440 discharges, for example, yellow (Y), cyan (C), magenta (M), and black (K) liquids. The liquid ejection head 404 is mounted with a nozzle row composed of a plurality of nozzles arranged in the sub-scanning direction orthogonal to the main scanning direction, and the ejection direction facing downward.

  The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

  The supply mechanism 494 includes a cartridge holder 451 that is a filling unit for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is fed from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

  This apparatus includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412 serving as transport means, and a sub-scanning motor 416 for driving the transport belt 412.

  The conveyance belt 412 adsorbs the paper 410 and conveys it at a position facing the liquid ejection head 404. The transport belt 412 is an endless belt and is stretched between the transport roller 413 and the tension roller 414. The adsorption can be performed by electrostatic adsorption or air suction.

  The transport belt 412 rotates in the sub-scanning direction when the transport roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418.

  Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 that performs maintenance / recovery of the liquid ejection head 404 is disposed on the side of the transport belt 412.

  The maintenance / recovery mechanism 420 includes, for example, a cap member 421 for capping the nozzle surface (surface on which the nozzle is formed) of the liquid ejection head 404, a wiper member 422 for wiping the nozzle surface, and the like.

  The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

  In this apparatus configured as described above, the paper 410 is fed and sucked onto the transport belt 412, and the paper 410 is transported in the sub-scanning direction by the circular movement of the transport belt 412.

Therefore, the liquid ejection head 404 is driven in accordance with the image signal while moving the carriage 403 in the main scanning direction, thereby ejecting liquid onto the stopped paper 410 to form an image.

  Thus, since this apparatus includes the liquid ejection head according to the present invention, a high-quality image can be stably formed.

  Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 24 is an explanatory plan view of the main part of the unit.

  The liquid discharge unit includes a casing portion composed of side plates 491A and 491B and a back plate 491C, a main scanning moving mechanism 493, a carriage 403, and a liquid among the members constituting the liquid discharge device. The discharge head 404 is configured.

  Note that a liquid discharge unit in which at least one of the above-described maintenance and recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit may be configured.

  Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 25 is an explanatory front view of the unit.

  This liquid discharge unit includes a liquid discharge head 404 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

  The flow path component 444 is disposed inside the cover 442. A head tank 441 may be included instead of the flow path component 444. In addition, a connector 443 that is electrically connected to the liquid ejection head 404 is provided above the flow path component 444.

  In the present application, the liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head, and the viscosity becomes 30 mPa · s or less at room temperature, normal pressure, or by heating and cooling. It is preferable. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional materials such as polymerizable compounds, resins, and surfactants, and biocompatible materials such as DNA, amino acids, proteins, and calcium. , Edible materials such as natural pigments, solutions, suspensions, emulsions, and the like. These include, for example, inkjet inks, surface treatment liquids, components of electronic devices and light emitting devices, and formation of electronic circuit resist patterns It can be used in applications such as liquids for use, three-dimensional modeling material liquids, and the like.

  As energy generation sources for discharging liquid, piezoelectric actuators (laminated piezoelectric elements and thin film piezoelectric elements), thermal actuators using electrothermal transducers such as heating resistors, electrostatic actuators consisting of a diaphragm and counter electrode are used. To be included.

  The “liquid ejection unit” is a unit in which functional parts and mechanisms are integrated with a liquid ejection head, and includes an assembly of parts related to liquid ejection. For example, the “liquid discharge unit” includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, and a main scanning movement mechanism with a liquid discharge head.

  Here, the term “integrated” refers to, for example, a liquid discharge head, a functional component, and a mechanism that are fixed to each other by fastening, adhesion, engagement, etc., and one that is held movably with respect to the other. Including. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

  For example, there is a liquid discharge unit in which a liquid discharge head and a head tank are integrated. Also, there are some in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter may be added between the head tank and the liquid discharge head of these liquid discharge units.

  In addition, there is a liquid discharge unit in which a liquid discharge head and a carriage are integrated.

  In addition, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably on a guide member that constitutes a part of the scanning movement mechanism. In some cases, a liquid discharge head, a carriage, and a main scanning movement mechanism are integrated.

  Also, there is a liquid discharge unit in which a cap member that is a part of the maintenance / recovery mechanism is fixed to a carriage to which the liquid discharge head is attached, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. .

  In addition, there is a liquid discharge unit in which a tube is connected to a liquid discharge head to which a head tank or a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid from the liquid storage source is supplied to the liquid discharge head via this tube.

  The main scanning movement mechanism includes a guide member alone. The supply mechanism includes a single tube and a single loading unit.

The “apparatus for ejecting liquid” includes an apparatus that includes a liquid ejection head or a liquid ejection unit and that ejects liquid by driving the liquid ejection head. The apparatus for ejecting a liquid includes not only an apparatus capable of ejecting a liquid to an object to which the liquid can adhere, but also an apparatus for ejecting the liquid into the air or liquid.

  This “apparatus for discharging liquid” may include means for feeding, transporting, and discharging a liquid to which liquid can adhere, as well as a pre-processing apparatus and a post-processing apparatus.

  For example, as a “liquid ejecting device”, an image forming device that forms an image on paper by ejecting ink, a powder is formed in layers to form a three-dimensional model (three-dimensional model) There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that discharges a modeling liquid onto the powder layer.

  Further, the “apparatus for ejecting liquid” is not limited to an apparatus in which significant images such as characters and figures are visualized by the ejected liquid. For example, what forms a pattern etc. which does not have a meaning in itself, and what forms a three-dimensional image are also included.

  The above-mentioned “applicable liquid” means that the liquid can be attached at least temporarily and adheres and adheres, or adheres and penetrates. Specific examples include recording media such as paper, recording paper, recording paper, film, and cloth, electronic parts such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, unless specifically limited, includes everything that the liquid adheres to.

  The material of the above-mentioned “material to which liquid can adhere” is not limited as long as liquid such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics can be adhered even temporarily.

  In addition, the “device for ejecting liquid” includes a device in which the liquid ejection head and the device to which the liquid can adhere move relatively, but is not limited thereto. Specific examples include a serial type apparatus that moves the liquid discharge head, a line type apparatus that does not move the liquid discharge head, and the like.

  In addition, as the “device for ejecting liquid”, other than the above, a treatment liquid coating apparatus that ejects a treatment liquid onto a sheet in order to apply the treatment liquid to the surface of the sheet for the purpose of modifying the surface of the sheet, There is an injection granulation apparatus that granulates raw material fine particles by spraying a composition liquid in which raw materials are dispersed in a solution through a nozzle.

  Note that the terms “image formation”, “recording”, “printing”, “printing”, “printing”, “modeling” and the like in the terms of the present application are all synonymous.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Channel plate 3 Vibration plate 4 Nozzle 6 Individual liquid chamber 11 Piezoelectric element 20 Channel member 21 Damper (wall part)
22 Cavity 23 Recess 25 Adhesive 26 Tournament Open 27 Recess 50 Holding Substrate 51 Opening (Through Hole)
70 Common liquid chamber member 403 Carriage 404 Liquid discharge head 430 Liquid discharge unit

Claims (14)

A nozzle plate formed with a plurality of nozzles for discharging liquid;
A flow path plate forming a plurality of individual liquid chambers through which the nozzle communicates,
The flow path plate has a deformable wall part forming a wall surface of the flow path leading to the individual liquid chamber in a direction orthogonal to the nozzle arrangement direction, and a side opposite to the flow path across the wall part. A hollow portion provided, and
The wall is
The nozzle plate side end is adhesively bonded to the nozzle plate in a displaceable manner,
An end of the nozzle plate side opposite to the nozzle plate side is fixed. A nozzle plate on which nozzles for discharging liquid are formed;
A flow path plate forming a plurality of individual liquid chambers through which the nozzle communicates,
The flow path plate is provided on the opposite side of the flow path with a wall portion forming a wall surface of the flow path leading to the individual liquid chamber in a direction orthogonal to the nozzle arrangement direction, and the wall portion interposed therebetween. A cavity, and
The wall is
The nozzle plate side end is adhesively bonded to the nozzle plate in a displaceable manner,
2. The liquid discharge head according to claim 1, wherein the end opposite to the nozzle plate is adhesively bonded to a wall surface member forming a wall surface of the individual flow path. The nozzle plate is provided with a recessed portion that serves as an adhesive reservoir along the nozzle arrangement direction,
The liquid discharge head according to claim 1, wherein the wall portion is adhesively bonded by an adhesive in the recess. The liquid ejection head according to claim 3, wherein the recess is provided to the outside of the outermost individual liquid chamber in the nozzle arrangement direction. The flow path includes a fluid resistance portion that leads from the individual liquid chamber side to the individual liquid chamber and a liquid introduction portion that leads to the fluid resistance portion,
The recessed portion is provided in a range that is closer to the wall portion than the fluid resistance portion and closer to the wall portion than the cavity portion in a direction orthogonal to the nozzle arrangement direction. The liquid discharge head according to claim 3 or 4. 6. The liquid ejection head according to claim 1, wherein a thickness of the wall portion in a direction orthogonal to a nozzle arrangement direction is thinner than a thickness of a partition wall portion between adjacent individual liquid chambers. . The liquid discharge head according to claim 1, wherein the wall portion has a cross-sectional shape along a direction orthogonal to the nozzle arrangement direction and tapers toward the nozzle plate side. . The wall surface of the flow path formed by the wall portion has a curved shape in plan view,
7. The liquid discharge head according to claim 1, wherein a wall surface of the wall portion on the hollow portion side has a curved surface shape that follows the wall surface of the flow path. The liquid ejection head according to claim 1, wherein the hollow portion has a portion formed in a partition wall between the adjacent flow paths.
The liquid ejection head according to claim 1, wherein the hollow portion is divided for each individual liquid chamber in a nozzle arrangement direction. The liquid ejection head according to claim 1, wherein the hollow portion communicates with the atmosphere.   A liquid discharge unit comprising the liquid discharge head according to claim 1. A head tank for storing liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism for supplying liquid to the liquid discharge head, a maintenance / recovery mechanism for maintaining and recovering the liquid discharge head, and the liquid The liquid discharge unit according to claim 12, wherein the liquid discharge head is integrated with at least one of a main scanning movement mechanism that moves the discharge head in the main scanning direction.   An apparatus for ejecting liquid, comprising the liquid ejection head according to claim 1 or the liquid ejection unit according to claim 12 or 13.

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