JP2017159318A5

JP2017159318A5 -

Info

Publication number: JP2017159318A5
Application number: JP2016045342A
Authority: JP
Filing date: 2016-03-09
Publication date: 2019-02-14
Anticipated expiration: 2036-03-09

Description

本発明の一観点によると、
パルスレーザビームを出力するレーザ光源と、
前記パルスレーザビームの進行方向を偏向させることにより、加工対象物上において前記パルスレーザビームの入射位置を移動させるビーム偏向器と、
前記レーザ光源と前記ビーム偏向器との間の前記パルスレーザビームの経路に配置され、前記パルスレーザビームに光学的作用を及ぼす光学素子と、
前記パルスレーザビームの出力タイミング、及び前記ビーム偏向器の動作を制御する制御装置と
を有し、
前記制御装置は、
前記ビーム偏向器を制御して前記パルスレーザビームの入射位置を目標位置まで移動させる手順と、
前記パルスレーザビームの入射位置が目標位置に整定された後、前記レーザ光源から１つのレーザパルスを出力させる手順と
を繰り返し、
ある判定時刻に、前記判定時刻より前のモニタ期間における前記パルスレーザビームの平均パワーに基づいて、前記パルスレーザビームの入射位置が目標位置に整定された時点から、前記レーザ光源に発振開始の指令を送出するまでの待ち時間の値を決定し、前記判定時刻より後の反映期間において、決定された前記待ち時間の値に基づいて前記手順を繰り返すレーザ加工装置が提供される。
According to one aspect of the invention,
A laser light source that outputs a pulsed laser beam ;
By deflecting the traveling direction before Symbol pulsed laser beam, a beam deflector for moving the incident position of the pulsed laser beam on the machining object,
An optical element disposed in a path of the pulse laser beam between the laser light source and the beam deflector and exerting an optical action on the pulse laser beam;
A control device for controlling the output timing of the pulse laser beam and the operation of the beam deflector;
The control device includes:
A procedure for controlling the beam deflector to move the incident position of the pulsed laser beam to a target position;
After the incident position of the pulse laser beam is set to the target position, the procedure of outputting one laser pulse from the laser light source is repeated.
Based on the average power of the pulse laser beam in the monitoring period before the determination time at a certain determination time, the laser light source is instructed to start oscillation from the time when the incident position of the pulse laser beam is set to the target position. A laser processing apparatus is provided that determines a value of a waiting time until the signal is sent and repeats the procedure based on the determined waiting time value in a reflection period after the determination time.

Claims

A laser light source that outputs a pulsed laser beam ;
By deflecting the traveling direction before Symbol pulsed laser beam, a beam deflector for moving the incident position of the pulsed laser beam on the machining object,
An optical element disposed in a path of the pulse laser beam between the laser light source and the beam deflector and exerting an optical action on the pulse laser beam;
A control device for controlling the output timing of the pulse laser beam and the operation of the beam deflector;
The control device includes:
A procedure for controlling the beam deflector to move the incident position of the pulsed laser beam to a target position;
After the incident position of the pulse laser beam is set to the target position, the procedure of outputting one laser pulse from the laser light source is repeated.
Based on the average power of the pulse laser beam in the monitoring period before the determination time at a certain determination time, the laser light source is instructed to start oscillation from the time when the incident position of the pulse laser beam is set to the target position. The laser processing apparatus which determines the value of the waiting time until the time is transmitted and repeats the procedure based on the determined waiting time value in the reflection period after the determination time.

When the average power of the pulse laser beam in the monitoring period is equal to or less than a determination threshold, the control device sets the waiting time to be equal to or less than the current waiting time value, and the average power of the pulse laser beam in the monitoring period is The laser processing apparatus according to claim 1, wherein when the determination threshold is exceeded, the waiting time value is set longer than the current waiting time value.

The control device calculates the average power based on a shot number, a pulse width, a peak power, and a length of the monitoring period of the pulse laser beam output from the laser light source during the monitoring period. Or the laser processing apparatus of 2.

And a stage for holding the workpiece at a position where the pulsed laser beam is incident,
The surface of the workpiece is divided into a plurality of blocks having a size capable of moving the incident position of the pulse laser beam by the operation of the beam deflector,
The control device includes:
Placing one of the plurality of blocks in an irradiable range of the beam deflector, and performing laser processing of all target positions in the block arranged in the irradiable range;
After processing of all target positions in the block arranged in the irradiable range is completed, the stage is controlled to repeat the procedure of placing the unprocessed block in the irradiable range,
The laser processing apparatus according to claim 2 or 3 , wherein a value of the waiting time is determined at the determination time after processing of one block is completed and processing of the next block is performed.

The laser processing apparatus according to claim 4, wherein a processing period of at least one block processed immediately before the determination time is adopted as the monitoring period.

The laser processing apparatus according to claim 4 or 5, wherein a processing period of one block processed immediately after the determination time is adopted as the reflection period.