JP2017150904A - Flaw detection device and flaw detection method - Google Patents
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Description
本発明は、探傷装置および探傷方法に関する。 The present invention relates to a flaw detection apparatus and a flaw detection method.
たとえば、特許文献１は、鉄系構造物の壁内面の腐食等の欠陥を壁の外面から容易に検査可能な「鉄系構造物の劣化診断装置」を開示する。当該「鉄系構造物の劣化診断装置」は、磁気インピーダンス効果素子にバイアス磁界用コイルを付設し、その素子の出力を検波回路に通して検出する検出回路を備え、被検査面に磁気インピーダンス効果素子を接近させた状態でスキャニングさせるものであり、被検査面に添って弾性的に変形されるフレキシブル基板部を有し、このフレキシブル基板部に磁気インピーダンス効果素子及びバイアス磁界用コイルを実装することで、充分な精度で容易に鉄系構造物の劣化が診断できるとされている。 For example, Patent Document 1 discloses an “iron structure deterioration diagnosis device” capable of easily inspecting defects such as corrosion on the wall inner surface of an iron structure from the outer surface of the wall. The "iron structure degradation diagnosis device" includes a magnetic field impedance coil and a detection circuit for detecting the output of the element through a detection circuit, and the surface to be inspected has a magnetic impedance effect. Scanning with the element approached, having a flexible substrate part that is elastically deformed along the surface to be inspected, and mounting the magneto-impedance effect element and the bias magnetic field coil on this flexible substrate part Therefore, it is said that the deterioration of the iron-based structure can be easily diagnosed with sufficient accuracy.
特許文献１の劣化診断装置によれば、バイアス磁界の磁気回路を構成することとなる鉄系構造物に、錆等に起因する腐食や減肉が存在した場合、バイアス磁界に変化を生じ、当該変化を磁気インピーダンス効果素子により検出することで、腐食や減肉等の検出が可能となる。腐食や減肉等が微小である場合、あるいは遠方に位置する腐食や減肉等を検知しようとする場合、磁気インピーダンス効果素子からの信号は微弱になることから、バイアス磁界の強度を大きくして、磁気インピーダンス効果素子からの信号レベルを高める必要がある。 According to the degradation diagnosis device of Patent Document 1, when there is corrosion or thinning due to rust or the like in an iron-based structure that constitutes a magnetic circuit of a bias magnetic field, a change occurs in the bias magnetic field, By detecting the change by the magneto-impedance effect element, it becomes possible to detect corrosion, thinning, and the like. When corrosion or thinning is very small, or when trying to detect corrosion or thinning located far away, the signal from the magneto-impedance effect element becomes weak, so increase the strength of the bias magnetic field. It is necessary to increase the signal level from the magneto-impedance effect element.
しかし、磁気インピーダンス効果素子が感度を有する磁界強度の範囲（測定レンジ）には限界があり、バイアス磁界の強度をあまりに大きくすると、測定値が磁気インピーダンス効果素子の測定レンジを超えてしまい、磁界強度の変化を測定することができなくなる問題がある。本発明の目的は、大強度のバイアス磁界を印加する場合であっても、微小な磁界強度の変化を検出することを可能とし、腐食や減肉等に起因する欠陥や傷微が微小な場合または遠方に位置する場合でも、検出することが可能な探傷装置を提供することにある。 However, there is a limit to the range (measurement range) of the magnetic field strength that the magneto-impedance effect element has sensitivity. If the bias magnetic field intensity is too large, the measured value will exceed the measurement range of the magneto-impedance effect element, and the magnetic field strength There is a problem that it becomes impossible to measure the change of the. The object of the present invention is to detect a minute change in magnetic field strength even when a high-strength bias magnetic field is applied, and when defects and scratches caused by corrosion, thinning, etc. are minute. Another object of the present invention is to provide a flaw detection apparatus that can detect even when located far away.
上記課題を解決するために、本発明の第１の態様においては、被検体の表面または内部に存在する傷を探知する探傷装置であって、磁気発生手段と、前記磁気発生手段により生じた磁場の第１方向成分である第１磁場強度を計測する磁気センサと、を有し、前記磁気センサが、無傷であると予め判明している標準検体を前記被検体とした場合に、前記第１磁場強度の絶対値が最少になるよう前記磁気発生手段との相対位置が調整された探傷装置を提供する。 In order to solve the above-mentioned problem, in the first aspect of the present invention, there is provided a flaw detection device for detecting a flaw existing on the surface or inside of a subject, the magnetic generation means and a magnetic field generated by the magnetic generation means. A magnetic sensor that measures a first magnetic field strength that is a first direction component of the first sensor. Provided is a flaw detection apparatus whose relative position with respect to the magnetism generating means is adjusted so that the absolute value of the magnetic field intensity is minimized.
前記磁気センサが、前記第１磁場強度に加えて、前記第１方向に直交する第２方向の磁場成分である第２磁場強度、並びに、前記第１方向および前記第２方向に直交する第３方向の磁場成分である第３磁場強度、を計測するものであり、前記標準検体を前記被検体とした場合に、前記第１磁場強度および前記第２磁場強度、または、前記第１磁場強度および前記第３磁場強度の各絶対値が最少になるよう前記磁気発生手段との相対位置が調整されたものであってもよい。 In addition to the first magnetic field strength, the magnetic sensor includes a second magnetic field strength that is a magnetic field component in a second direction orthogonal to the first direction, and a third magnetic field that is orthogonal to the first direction and the second direction. A third magnetic field strength which is a magnetic field component in a direction, and when the standard specimen is the subject, the first magnetic field strength and the second magnetic field strength, or the first magnetic field strength and The relative position with respect to the magnetism generating means may be adjusted so that each absolute value of the third magnetic field intensity is minimized.
前記磁気センサが、前記被検体と前記磁気発生手段とを結ぶ最近接線上に配置されてもよい。この場合、前記最近接線は、前記被検体の表面に含まれる任意点と前記磁気発生手段におけるＮ極およびＳ極の中点とを結ぶ直線であってもよい。 The magnetic sensor may be arranged on a closest line connecting the subject and the magnetism generating unit. In this case, the closest tangent may be a straight line connecting an arbitrary point included on the surface of the subject and the midpoint of the N pole and the S pole in the magnetism generating means.
特定方向成分の磁場強度の測定が可能な複数のセンサがアレイ状またはマトリックス状に配置され、当該複数のセンサのうち、少なくとも一つが前記磁気センサであってもよい。 A plurality of sensors capable of measuring the magnetic field strength of the specific direction component may be arranged in an array or a matrix, and at least one of the plurality of sensors may be the magnetic sensor.
また、本発明の第２の態様においては、上記した探傷装置を用いた探傷方法であって、前記第１方向が表面の法線方向である被検体の前記表面に沿って前記探傷装置を移動させるステップを有し、前記探傷装置を移動させるステップにおいて前記第１磁場強度に変化が有った場合には前記傷があると判断する探傷方法を提供する。 In the second aspect of the present invention, there is provided a flaw detection method using the flaw detection apparatus described above, wherein the flaw detection apparatus is moved along the surface of the subject whose first direction is a normal direction of the surface. A flaw detection method for determining that there is a flaw when there is a change in the first magnetic field intensity in the step of moving the flaw detection apparatus.
前記磁気センサが、前記第１磁場強度に加えて、前記第１方向に直交する第２方向の磁場成分である第２磁場強度を計測するものであり、前記探傷装置を移動させるステップにおいて前記探傷装置を前記第２方向に移動させ、前記探傷装置を移動させるステップにおける前記第２磁場強度の変化により前記傷深さを推定し、前記第２磁場強度および前記第１磁場強度の変化により前記傷の幅を推定してもよい。 The magnetic sensor measures a second magnetic field strength that is a magnetic field component in a second direction orthogonal to the first direction in addition to the first magnetic field strength, and the flaw detection is performed in a step of moving the flaw detection device. The flaw depth is estimated from the change in the second magnetic field strength in the step of moving the device in the second direction and moving the flaw detection device, and the flaw is determined by the change in the second magnetic field strength and the first magnetic field strength. May be estimated.
図１は、本発明の一実施の形態である探傷装置１００の概要を示した概念図であり、（ａ）は上面図、（ｂ）は側面図である。図２は、探傷装置１００の実例を示した写真である。 FIG. 1 is a conceptual diagram showing an outline of a flaw detection apparatus 100 according to an embodiment of the present invention, where (a) is a top view and (b) is a side view. FIG. 2 is a photograph showing an actual example of the flaw detection apparatus 100.
探傷装置１００は、被検体２００の表面または内部に存在する傷を探知する。探傷装置１００は、磁気発生手段１０２、磁気センサ１０４、支持体１０６、センサ基板１０８、センサ駆動検出回路１１０、制御部１１２、表示部１１４を有する。被検体２００は、強磁性体、常磁性体、反磁性体の何れであっても良いが、内部の傷を検知する場合には、強磁性体または常磁性体である必要がある。以下の実施の形態の説明においては、被検体２００には凹み２０２を有するとする。 The flaw detection apparatus 100 detects a flaw existing on the surface or inside of the subject 200. The flaw detection apparatus 100 includes a magnetic generation means 102, a magnetic sensor 104, a support 106, a sensor substrate 108, a sensor drive detection circuit 110, a control unit 112, and a display unit 114. The subject 200 may be any of a ferromagnetic material, a paramagnetic material, and a diamagnetic material. However, when detecting an internal flaw, the subject 200 needs to be a ferromagnetic material or a paramagnetic material. In the following description of the embodiment, it is assumed that the subject 200 has a dent 202.
磁気発生手段１０２は、磁場を発生し、磁気センサ１０４は、磁気発生手段１０２により生じた磁場を計測する。支持体１０６は、磁気発生手段１０２を支持し、センサ基板１０８には、磁気センサ１０４が配置される。支持体１０６およびセンサ基板１０８は、磁気発生手段１０２および磁気センサ１０４の相対位置が変動しない程度に硬い材料で構成されることが好ましく、また、磁界への影響が小さい常磁性体であることが好ましい。支持体１０６として、アクリル、ポリカーボネート等のプラスチックが、センサ基板１０８としてエポキシ、ガラスエポキシ等の電子回路基板が例示できる。 The magnetic generation means 102 generates a magnetic field, and the magnetic sensor 104 measures the magnetic field generated by the magnetic generation means 102. The support 106 supports the magnetic generation means 102, and the magnetic sensor 104 is disposed on the sensor substrate 108. The support 106 and the sensor substrate 108 are preferably made of a hard material so that the relative positions of the magnetism generating means 102 and the magnetic sensor 104 do not fluctuate, and are preferably a paramagnetic material that has little influence on the magnetic field. preferable. Examples of the support 106 include plastics such as acrylic and polycarbonate, and examples of the sensor substrate 108 include electronic circuit boards such as epoxy and glass epoxy.
センサ駆動検出回路１１０は、磁気センサ１０４を駆動し、磁気センサ１０４からの出力信号を検出する。制御部１１２は、センサ駆動検出回路１１０および磁気センサ１０４を制御し、表示部１１４は、磁気センサ１０４からの信号を表示する。 The sensor drive detection circuit 110 drives the magnetic sensor 104 and detects an output signal from the magnetic sensor 104. The control unit 112 controls the sensor drive detection circuit 110 and the magnetic sensor 104, and the display unit 114 displays a signal from the magnetic sensor 104.
磁気発生手段１０２により発生する磁場の強度は、自然に存在する外部磁場より十分大きいものとする。当該磁場は、被検体２００の表面または内部の傷により影響を受け、磁界分布に変動を生じる。磁気センサ１０４は当該変動を検知し、傷を検出する。磁気発生手段１０２は、たとえば永久磁石、電磁石等が例示できる。本実施の形態においては磁気発生手段１０２として永久磁石を例示する。 It is assumed that the intensity of the magnetic field generated by the magnetism generation unit 102 is sufficiently larger than the external magnetic field that exists naturally. The magnetic field is affected by flaws on the surface or inside of the subject 200, and the magnetic field distribution fluctuates. The magnetic sensor 104 detects the fluctuation and detects a flaw. Examples of the magnetism generating means 102 include a permanent magnet and an electromagnet. In the present embodiment, a permanent magnet is exemplified as the magnetism generating means 102.
磁気センサ１０４から被検体２００までの距離ａは、被検体２００の残留磁場の影響を受けない程度の距離だけ離すことが望ましい。距離ａは、たとえば２ｍｍとすることができる。磁気発生手段１０２から被検体２００までの距離ｂは、被検体２００に残留磁場を発生させない程度の距離だけ離すことが望ましい。距離ｂは、たとえば１９ｍｍとすることができる。 The distance a from the magnetic sensor 104 to the subject 200 is desirably separated by a distance that is not affected by the residual magnetic field of the subject 200. The distance a can be set to 2 mm, for example. The distance b from the magnetic generation means 102 to the subject 200 is desirably separated by a distance that does not cause the subject 200 to generate a residual magnetic field. The distance b can be 19 mm, for example.
磁気センサ１０４は、磁気発生手段１０２により生じた磁場の、少なくとも第１方向成分である第１磁場強度を計測し、無傷であると予め判明している標準検体を被検体２００とした場合に、第１磁場強度の絶対値が最少になるよう磁気発生手段１０２との相対位置を調整する。磁気発生手段１０２と磁気センサ１０４との位置関係について、図３を用いて説明する。 The magnetic sensor 104 measures the first magnetic field strength that is at least the first direction component of the magnetic field generated by the magnetism generation unit 102, and when the standard specimen that is previously known to be intact is the subject 200, The relative position with the magnetism generating means 102 is adjusted so that the absolute value of the first magnetic field strength is minimized. The positional relationship between the magnetic generation means 102 and the magnetic sensor 104 will be described with reference to FIG.
図３は、探傷装置１００における磁場と磁気センサ１０４の位置関係を示した模式図であり、（ａ）は上面図、（ｂ）は側面図、（ｃ）は正面図である。図中矢印付の線として磁力線を表示する。磁気センサ１０４の近傍に示した矢印ｐの方向は第１方向であり、従って、磁気センサ１０４が計測する第１磁場強度の方向は矢印ｐの方向である。このように矢印ｐを定義した場合、磁気センサ１０４は、矢印ｐが磁力線と直交するように、すなわち、第１磁場強度の絶対値が最少になるよう配置する。 3A and 3B are schematic views showing the positional relationship between the magnetic field and the magnetic sensor 104 in the flaw detection apparatus 100, where FIG. 3A is a top view, FIG. 3B is a side view, and FIG. Magnetic field lines are displayed as lines with arrows in the figure. The direction of the arrow p shown in the vicinity of the magnetic sensor 104 is the first direction. Therefore, the direction of the first magnetic field intensity measured by the magnetic sensor 104 is the direction of the arrow p. When the arrow p is defined in this way, the magnetic sensor 104 is arranged so that the arrow p is orthogonal to the magnetic field lines, that is, the absolute value of the first magnetic field strength is minimized.
第１磁場強度の絶対値が最少になるよう磁気センサ１０４を配置することにより、磁気発生手段１０２で発生する磁場の強度を相当に大きくしても磁気センサ１０４の測定レンジを超えることがない。一方、磁気発生手段１０２で発生する磁場を強くすることで相対的に遠くの傷、あるいは相対的に小さい傷による磁場の変動が大きくなり、高感度に傷を検出することができる。 By arranging the magnetic sensor 104 so that the absolute value of the first magnetic field strength is minimized, the measurement range of the magnetic sensor 104 is not exceeded even if the strength of the magnetic field generated by the magnetism generating means 102 is considerably increased. On the other hand, by increasing the magnetic field generated by the magnetism generating means 102, the fluctuation of the magnetic field due to a relatively distant scratch or a relatively small scratch increases, and the scratch can be detected with high sensitivity.
図３に示す位置関係では、磁気センサ１０４により計測する第１磁界強度の方向（矢印ｐの方向）をZ方向と一致させている。この場合、磁気センサ１０４がｘｙｚ方向の磁場強度を出力するＭＩセンサ（マグネト・インピーダンスセンサ）である場合にはＺ方向出力を計測すればよい。また、この場合、磁気センサ１０４は、被検体２００と磁気発生手段１０２とを結ぶ最近接線φ上に配置される。最近接線φは、被検体２００の表面に含まれる任意点と磁気発生手段１０２におけるＮ極およびＳ極の中点とを結ぶ直線である。 In the positional relationship shown in FIG. 3, the direction of the first magnetic field intensity measured by the magnetic sensor 104 (the direction of the arrow p) is matched with the Z direction. In this case, if the magnetic sensor 104 is an MI sensor (magnet impedance sensor) that outputs a magnetic field intensity in the xyz direction, the Z direction output may be measured. In this case, the magnetic sensor 104 is disposed on the closest line φ connecting the subject 200 and the magnetism generation means 102. The closest tangent line φ is a straight line connecting an arbitrary point included on the surface of the subject 200 and the midpoint of the N pole and the S pole in the magnetic generation means 102.
なお、磁気センサ１０４は、第１磁場強度の絶対値が最少になるよう配置されればよく、最近接線φ上に配置される必要はない。たとえば図４に示すように、磁力線とｐ方向が直交するように傾いて配置されても良く、図５に示すように、磁力線とｐ方向が直交する限り平行移動して配置されてもよい。 The magnetic sensor 104 only needs to be arranged so that the absolute value of the first magnetic field strength is minimized, and does not need to be arranged on the closest tangent line φ. For example, as shown in FIG. 4, the magnetic lines of force may be arranged so as to be perpendicular to the p direction, and as shown in FIG. 5, they may be arranged so as to be translated as long as the magnetic lines of force are orthogonal to the p direction.
また、磁気センサ１０４が、第１磁場強度に加えて、第１方向に直交する第２方向の磁場成分である第２磁場強度、並びに、第１方向および第２方向に直交する第３方向の磁場成分である第３磁場強度、を計測するものであってもよい。この場合、標準検体を被検体２００とした場合に、第１磁場強度および第２磁場強度、または、第１磁場強度および第３磁場強度、の各絶対値が最少になるよう磁気発生手段１０２との相対位置が調整することが好ましい。この場合、第１磁場強度だけでなく、絶対値が最少になるよう調整された第２磁場強度または第３磁場強度も傷検出に用いることができる。 Further, in addition to the first magnetic field strength, the magnetic sensor 104 has a second magnetic field strength that is a magnetic field component in the second direction orthogonal to the first direction, and a third direction orthogonal to the first direction and the second direction. The third magnetic field intensity, which is a magnetic field component, may be measured. In this case, when the standard specimen is the subject 200, the magnetic generation means 102 and the first magnetic field intensity and the second magnetic field intensity or the absolute values of the first magnetic field intensity and the third magnetic field intensity are minimized. It is preferable to adjust the relative position. In this case, not only the first magnetic field strength but also the second magnetic field strength or the third magnetic field strength adjusted to minimize the absolute value can be used for the flaw detection.
また、図１（ａ）の上面図に示すように、複数のセンサがアレイ状またはマトリックス状に配置されてもよい。複数のセンサは、特定方向成分の磁場強度の測定が可能なものであり、このうち少なくとも一つが磁気センサ１０４であればよい。この場合、多数のセンサにより測定でき、ノイズを低減することができる。 Moreover, as shown in the top view of FIG. 1A, a plurality of sensors may be arranged in an array or a matrix. The plurality of sensors can measure the magnetic field strength of the component in a specific direction, and at least one of them may be the magnetic sensor 104. In this case, measurement can be performed by a large number of sensors, and noise can be reduced.
図６〜図１１は、凹みまでの距離Ｌを変えた場合のＺ方向出力の変化値を示すグラフである。図６は凹みの幅が１０ｍｍ、深さが１ｍｍの場合、図７は凹みの幅が１０ｍｍ、深さが３ｍｍの場合、図８は凹みの幅が２０ｍｍ、深さが１ｍｍの場合、図９は凹みの幅が２０ｍｍ、深さが３ｍｍの場合、図１０は凹みの幅が２５ｍｍ、深さが２ｍｍの場合、図１１は凹みの幅が３０ｍｍ、深さが２ｍｍの場合である。また、図１２は、凹みが無い場合のＺ方向出力の変化値を示した比較のためのグラフである。 6 to 11 are graphs showing changes in the Z-direction output when the distance L between the recesses is changed. 6 shows a case where the width of the dent is 10 mm and the depth is 1 mm, FIG. 7 shows a case where the width of the dent is 10 mm and the depth is 3 mm, and FIG. 8 shows a case where the width of the dent is 20 mm and the depth is 1 mm. 10 shows a case where the width of the dent is 20 mm and a depth of 3 mm, FIG. 10 shows a case where the width of the dent is 25 mm and the depth is 2 mm, and FIG. 11 shows a case where the width of the dent is 30 mm and the depth is 2 mm. FIG. 12 is a graph for comparison showing the change value of the output in the Z direction when there is no dent.
図１２と図６〜図１１とを対比すれば、凹みがあるとＺ方向出力が変化することがわかる。また、凹みの幅が大きいほど、凹みの深さが深いほど、Ｚ方向出力の変化値が大きくなっていることがわかる。 If FIG. 12 and FIGS. 6-11 are contrasted, it will be understood that if there is a dent, the output in the Z direction changes. Further, it can be seen that the change value of the output in the Z direction increases as the width of the recess increases and the depth of the recess increases.
以上の結果から、第１方向（ｚ方向）が表面の法線方向である被検体２００の表面に沿って探傷装置１００を移動させ、第１磁場強度（ｚ方向出力）に変化が有った場合には傷があると判断することができる。 From the above results, the flaw detection apparatus 100 was moved along the surface of the subject 200 whose first direction (z direction) was the normal direction of the surface, and there was a change in the first magnetic field strength (z direction output). In some cases, it can be determined that there is a scratch.
図１３は、凹みの幅に対するＺ方向出力の変化値をプロットしたグラフであり、図１４は、凹みの深さに対するＺ方向出力の変化値をプロットしたグラフである。また、図１５は、凹みの幅に対するＹ方向出力の変化値をプロットしたグラフであり、図１６は、凹みの深さに対するＹ方向出力の変化値をプロットしたグラフである。 FIG. 13 is a graph plotting the change value of the Z direction output with respect to the width of the recess, and FIG. 14 is a graph plotting the change value of the Z direction output with respect to the depth of the recess. FIG. 15 is a graph in which the change value of the Y direction output is plotted with respect to the width of the recess, and FIG. 16 is a graph in which the change value of the Y direction output is plotted with respect to the depth of the recess.
図１３および図１４の結果から、Ｚ方向出力の変化値は、凹みの幅と深さの何れにおいても、大であるほど変化値が大きいことがわかる。一方、図１５および図１６の結果から、Ｚ方向出力の変化値においては、凹みの幅が変化してもＺ方向出力は変化せず、凹みの深さについては深いほど変化値が大きいことがわかる。つまり、Ｚ方向出力の変化値は凹みの幅および深さの両方に依存するが、Ｙ方向出力は凹みの深さに強く依存することが伺える。 From the results of FIGS. 13 and 14, it can be seen that the change value of the Z-direction output is larger as the change is larger in both the width and depth of the recess. On the other hand, from the results of FIG. 15 and FIG. 16, in the change value of the Z direction output, the Z direction output does not change even if the width of the recess changes, and the change value increases as the depth of the recess increases. Recognize. That is, it can be seen that the change value of the Z direction output depends on both the width and the depth of the recess, but the Y direction output strongly depends on the depth of the recess.
この結果から、磁気センサ１０４が、第１磁場強度（Ｚ方向出力）に加えて、第１方向（ｚ方向）に直交する第２方向（ｙ方向）の磁場成分である第２磁場強度（Ｙ方向出力）を計測するものであるとき、探傷装置１００を第２方向（ｙ方向）に移動させ、第２磁場強度（Ｙ方向出力）の変化により傷の深さを推定し、当該深さの推定値を前提に、第２磁場強度（Ｙ方向出力）および第１磁場強度（Ｚ方向出力）の変化から傷の幅を推定することができる。 From this result, in addition to the first magnetic field strength (Z direction output), the magnetic sensor 104 has a second magnetic field strength (Y that is a magnetic field component in the second direction (y direction) orthogonal to the first direction (z direction). (Direction output) is measured, the flaw detector 100 is moved in the second direction (y direction), the depth of the flaw is estimated by the change in the second magnetic field strength (Y direction output), On the assumption of the estimated value, the width of the scratch can be estimated from changes in the second magnetic field strength (Y direction output) and the first magnetic field strength (Z direction output).
以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲には限定されない。上記実施の形態に、多様な変更または改良を加えることが可能であることが当業者に明らかである。その様な変更または改良を加えた形態も本発明の技術的範囲に含まれ得ることが、特許請求の範囲の記載から明らかである。 As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.
たとえば、図１７〜図１９に示すように、磁気発生手段１０２である磁石に加えて、他の磁石１２０、１２２、１２４を付加してもよい。図１７〜図１９に例示した磁気発生手段の変更例においても、上記した実施の形態と同様な結果を得ることができる。 For example, as shown in FIGS. 17 to 19, other magnets 120, 122, and 124 may be added in addition to the magnet that is the magnetic generation means 102. Also in the modified examples of the magnetic generation means exemplified in FIGS. 17 to 19, the same result as in the above-described embodiment can be obtained.
１００…探傷装置、１０２…磁気発生手段、１０４…磁気センサ、１０６…支持体、１０８…センサ基板、１１０…センサ駆動検出回路、１１２…制御部、１１４…表示部、１２０，１２２，１２４…磁石、２００…被検体、２０２…凹み。 DESCRIPTION OF SYMBOLS 100 ... Flaw detection apparatus, 102 ... Magnetic generation means, 104 ... Magnetic sensor, 106 ... Support body, 108 ... Sensor substrate, 110 ... Sensor drive detection circuit, 112 ... Control part, 114 ... Display part, 120, 122, 124 ... Magnet , 200 ... subject, 202 ... dent.
Claims (7)
磁気発生手段と、前記磁気発生手段により生じた磁場の第１方向成分である第１磁場強度を計測する磁気センサと、を有し、
前記磁気センサが、無傷であると予め判明している標準検体を前記被検体とした場合に、前記第１磁場強度の絶対値が最少になるよう前記磁気発生手段との相対位置が調整された
探傷装置。 A flaw detection device for detecting a flaw existing on or inside a subject,
A magnetic sensor, and a magnetic sensor that measures a first magnetic field strength that is a first direction component of the magnetic field generated by the magnetic generator,
The relative position with respect to the magnetism generating means is adjusted so that the absolute value of the first magnetic field strength is minimized when the subject is a standard specimen that is previously known that the magnetic sensor is intact. Flaw detection equipment.
前記標準検体を前記被検体とした場合に、前記第１磁場強度および前記第２磁場強度、または、前記第１磁場強度および前記第３磁場強度、の各絶対値が最少になるよう前記磁気発生手段との相対位置が調整されたものである
請求項１に記載の探傷装置。 In addition to the first magnetic field strength, the magnetic sensor includes a second magnetic field strength that is a magnetic field component in a second direction orthogonal to the first direction, and a third magnetic field that is orthogonal to the first direction and the second direction. Measuring the third magnetic field strength, which is the magnetic field component of the direction,
When the standard specimen is the subject, the magnetic field is generated so that the absolute values of the first magnetic field intensity and the second magnetic field intensity, or the first magnetic field intensity and the third magnetic field intensity are minimized. The flaw detection apparatus according to claim 1, wherein the relative position with respect to the means is adjusted.
請求項１または請求項２に記載の探傷装置。 The flaw detection apparatus according to claim 1, wherein the magnetic sensor is disposed on a closest line connecting the subject and the magnetism generation unit.
請求項３に記載の探傷装置。 The flaw detection apparatus according to claim 3, wherein the closest tangent is a straight line connecting an arbitrary point included on the surface of the subject and the midpoint of the N pole and the S pole in the magnetism generating means.
当該複数のセンサのうち、少なくとも一つが前記磁気センサである
請求項１から請求項４の何れか一項に記載の探傷装置。 A plurality of sensors capable of measuring the magnetic field strength of a specific direction component are arranged in an array or matrix,
The flaw detection apparatus according to any one of claims 1 to 4, wherein at least one of the plurality of sensors is the magnetic sensor.
前記第１方向が表面の法線方向である被検体の前記表面に沿って前記探傷装置を移動させるステップを有し、
前記探傷装置を移動させるステップにおいて前記第１磁場強度に変化が有った場合には前記傷があると判断する
探傷方法。 A flaw detection method using the flaw detection apparatus according to any one of claims 1 to 5,
Moving the flaw detector along the surface of the subject whose first direction is a normal direction of the surface,
A flaw detection method in which it is determined that there is a flaw when there is a change in the first magnetic field intensity in the step of moving the flaw detection apparatus.
前記探傷装置を移動させるステップにおいて前記探傷装置を前記第２方向に移動させ、
前記探傷装置を移動させるステップにおける前記第２磁場強度の変化により前記傷の深さを推定し、前記第２磁場強度および前記第１磁場強度の変化により前記傷の幅を推定する
請求項６に記載の探傷方法。 The magnetic sensor measures a second magnetic field strength that is a magnetic field component in a second direction orthogonal to the first direction in addition to the first magnetic field strength,
Moving the flaw detector in the second direction in the step of moving the flaw detector,
The depth of the flaw is estimated from a change in the second magnetic field strength in the step of moving the flaw detector, and the width of the flaw is estimated from a change in the second magnetic field strength and the first magnetic field strength. Described flaw detection method.
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