JP6768305B2 - Flaw detector and flaw detection method - Google Patents
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本発明は、探傷装置および探傷方法に関する。 The present invention relates to a flaw detector and a flaw detection method.
たとえば、特許文献１は、鉄系構造物の壁内面の腐食等の欠陥を壁の外面から容易に検査可能な「鉄系構造物の劣化診断装置」を開示する。当該「鉄系構造物の劣化診断装置」は、磁気インピーダンス効果素子にバイアス磁界用コイルを付設し、その素子の出力を検波回路に通して検出する検出回路を備え、被検査面に磁気インピーダンス効果素子を接近させた状態でスキャニングさせるものであり、被検査面に添って弾性的に変形されるフレキシブル基板部を有し、このフレキシブル基板部に磁気インピーダンス効果素子及びバイアス磁界用コイルを実装することで、充分な精度で容易に鉄系構造物の劣化が診断できるとされている。 For example, Patent Document 1 discloses a "deterioration diagnosis device for iron-based structures" that can easily inspect defects such as corrosion on the inner surface of an iron-based structure from the outer surface of the wall. The "deterioration diagnosis device for iron-based structures" is provided with a coil for a bias magnetic field attached to a magnetic impedance effect element, and is equipped with a detection circuit that detects the output of the element through a detection circuit, and has a magnetic impedance effect on the surface to be inspected. It scans with the elements in close proximity, has a flexible substrate that is elastically deformed along the surface to be inspected, and mounts a magnetic impedance effect element and a coil for a bias magnetic field on this flexible substrate. Therefore, it is said that deterioration of iron-based structures can be easily diagnosed with sufficient accuracy.
特許文献１の劣化診断装置によれば、バイアス磁界の磁気回路を構成することとなる鉄系構造物に、錆等に起因する腐食や減肉が存在した場合、バイアス磁界に変化を生じ、当該変化を磁気インピーダンス効果素子により検出することで、腐食や減肉等の検出が可能となる。腐食や減肉等が微小である場合、あるいは遠方に位置する腐食や減肉等を検知しようとする場合、磁気インピーダンス効果素子からの信号は微弱になることから、バイアス磁界の強度を大きくして、磁気インピーダンス効果素子からの信号レベルを高める必要がある。 According to the deterioration diagnostic apparatus of Patent Document 1, when corrosion or wall thinning due to rust or the like is present in the iron-based structure constituting the magnetic circuit of the bias magnetic field, the bias magnetic field is changed. By detecting the change with the magnetic impedance effect element, it is possible to detect corrosion, wall thinning, and the like. When corrosion or wall thinning is minute, or when trying to detect corrosion or wall thinning located far away, the signal from the magnetic impedance effect element becomes weak, so increase the strength of the bias magnetic field. , It is necessary to increase the signal level from the magnetic impedance effect element.
しかし、磁気インピーダンス効果素子が感度を有する磁界強度の範囲（測定レンジ）には限界があり、バイアス磁界の強度をあまりに大きくすると、測定値が磁気インピーダンス効果素子の測定レンジを超えてしまい、磁界強度の変化を測定することができなくなる問題がある。本発明の目的は、大強度のバイアス磁界を印加する場合であっても、微小な磁界強度の変化を検出することを可能とし、腐食や減肉等に起因する欠陥や傷微が微小な場合または遠方に位置する場合でも、検出することが可能な探傷装置を提供することにある。 However, there is a limit to the range of magnetic field strength (measurement range) in which the magnetic impedance effect element has sensitivity, and if the strength of the bias magnetic field is made too large, the measured value exceeds the measurement range of the magnetic impedance effect element, and the magnetic field strength There is a problem that it becomes impossible to measure the change of. An object of the present invention is to make it possible to detect a minute change in the magnetic field strength even when a large bias magnetic field is applied, and when defects and scratches due to corrosion, wall thinning, etc. are minute. Alternatively, it is an object of the present invention to provide a flaw detector capable of detecting even if it is located far away.
上記課題を解決するために、本発明の第１の態様においては、被検体の表面または内部に存在する傷を探知する探傷装置であって、磁気発生手段と、前記磁気発生手段により生じた磁場の第１方向成分である第１磁場強度を計測する磁気センサと、を有し、前記磁気センサが、無傷であると予め判明している標準検体を前記被検体とした場合に、前記第１磁場強度の絶対値が最少になるよう前記磁気発生手段との相対位置が調整された探傷装置を提供する。 In order to solve the above problems, in the first aspect of the present invention, it is a flaw detection device that detects scratches existing on the surface or inside of a subject, and is a magnetic generating means and a magnetic field generated by the magnetic generating means. When a standard sample having a magnetic sensor for measuring the first magnetic field strength, which is a first-direction component of the above, and the magnetic sensor is known to be intact in advance, is used as the subject. Provided is a flaw detector whose position relative to the magnetic generating means is adjusted so that the absolute value of the magnetic field strength is minimized.
前記磁気センサが、前記第１磁場強度に加えて、前記第１方向に直交する第２方向の磁場成分である第２磁場強度、並びに、前記第１方向および前記第２方向に直交する第３方向の磁場成分である第３磁場強度、を計測するものであり、前記標準検体を前記被検体とした場合に、前記第１磁場強度および前記第２磁場強度、または、前記第１磁場強度および前記第３磁場強度の各絶対値が最少になるよう前記磁気発生手段との相対位置が調整されたものであってもよい。 In addition to the first magnetic field strength, the magnetic sensor has a second magnetic field strength which is a magnetic field component in the second direction orthogonal to the first direction, and a third magnetic field orthogonal to the first direction and the second direction. The third magnetic field strength, which is a magnetic field component in the direction, is measured, and when the standard sample is the subject, the first magnetic field strength and the second magnetic field strength, or the first magnetic field strength and The position relative to the magnetic generating means may be adjusted so that each absolute value of the third magnetic field strength is minimized.
前記磁気センサが、前記被検体と前記磁気発生手段とを結ぶ最近接線上に配置されてもよい。この場合、前記最近接線は、前記被検体の表面に含まれる任意点と前記磁気発生手段におけるＮ極およびＳ極の中点とを結ぶ直線であってもよい。 The magnetic sensor may be arranged on the closest tangent line connecting the subject and the magnetic generating means. In this case, the closest tangent line may be a straight line connecting an arbitrary point included in the surface of the subject and the midpoints of the north and south poles of the magnetic generating means.
特定方向成分の磁場強度の測定が可能な複数のセンサがアレイ状またはマトリックス状に配置され、当該複数のセンサのうち、少なくとも一つが前記磁気センサであってもよい。 A plurality of sensors capable of measuring the magnetic field strength of a specific direction component may be arranged in an array or a matrix, and at least one of the plurality of sensors may be the magnetic sensor.
また、本発明の第２の態様においては、上記した探傷装置を用いた探傷方法であって、前記第１方向が表面の法線方向である被検体の前記表面に沿って前記探傷装置を移動させるステップを有し、前記探傷装置を移動させるステップにおいて前記第１磁場強度に変化が有った場合には前記傷があると判断する探傷方法を提供する。 Further, in the second aspect of the present invention, in the flaw detection method using the flaw detector described above, the flaw detector is moved along the surface of the subject whose first direction is the normal direction of the surface. Provided is a flaw detecting method for determining that there is a scratch when the first magnetic field strength is changed in the step of moving the flaw detecting device.
前記磁気センサが、前記第１磁場強度に加えて、前記第１方向に直交する第２方向の磁場成分である第２磁場強度を計測するものであり、前記探傷装置を移動させるステップにおいて前記探傷装置を前記第２方向に移動させ、前記探傷装置を移動させるステップにおける前記第２磁場強度の変化により前記傷深さを推定し、前記第２磁場強度および前記第１磁場強度の変化により前記傷の幅を推定してもよい。 The magnetic sensor measures the second magnetic field strength, which is a magnetic field component in the second direction orthogonal to the first direction, in addition to the first magnetic field strength, and the flaw detection is performed in the step of moving the flaw detection device. The device is moved in the second direction, the scratch depth is estimated by the change in the second magnetic field strength in the step of moving the flaw detector, and the scratch is caused by the change in the second magnetic field strength and the first magnetic field strength. The width of may be estimated.
図１は、本発明の一実施の形態である探傷装置１００の概要を示した概念図であり、（ａ）は上面図、（ｂ）は側面図である。図２は、探傷装置１００の実例を示した写真である。 1A and 1B are conceptual views showing an outline of a flaw detection device 100 according to an embodiment of the present invention, in which FIG. 1A is a top view and FIG. 1B is a side view. FIG. 2 is a photograph showing an actual example of the flaw detector 100.
探傷装置１００は、被検体２００の表面または内部に存在する傷を探知する。探傷装置１００は、磁気発生手段１０２、磁気センサ１０４、支持体１０６、センサ基板１０８、センサ駆動検出回路１１０、制御部１１２、表示部１１４を有する。被検体２００は、強磁性体、常磁性体、反磁性体の何れであっても良いが、内部の傷を検知する場合には、強磁性体または常磁性体である必要がある。以下の実施の形態の説明においては、被検体２００には凹み２０２を有するとする。 The flaw detector 100 detects flaws existing on or inside the subject 200. The flaw detection device 100 includes a magnetic generating means 102, a magnetic sensor 104, a support 106, a sensor substrate 108, a sensor drive detection circuit 110, a control unit 112, and a display unit 114. The subject 200 may be a ferromagnetic material, a paramagnetic material, or a diamagnetic material, but when detecting an internal scratch, the subject 200 needs to be a ferromagnetic material or a paramagnetic material. In the following description of the embodiment, it is assumed that the subject 200 has a recess 202.
磁気発生手段１０２は、磁場を発生し、磁気センサ１０４は、磁気発生手段１０２により生じた磁場を計測する。支持体１０６は、磁気発生手段１０２を支持し、センサ基板１０８には、磁気センサ１０４が配置される。支持体１０６およびセンサ基板１０８は、磁気発生手段１０２および磁気センサ１０４の相対位置が変動しない程度に硬い材料で構成されることが好ましく、また、磁界への影響が小さい常磁性体であることが好ましい。支持体１０６として、アクリル、ポリカーボネート等のプラスチックが、センサ基板１０８としてエポキシ、ガラスエポキシ等の電子回路基板が例示できる。 The magnetic generating means 102 generates a magnetic field, and the magnetic sensor 104 measures the magnetic field generated by the magnetic generating means 102. The support 106 supports the magnetic generating means 102, and the magnetic sensor 104 is arranged on the sensor substrate 108. The support 106 and the sensor substrate 108 are preferably made of a material that is hard enough that the relative positions of the magnetic generating means 102 and the magnetic sensor 104 do not fluctuate, and are paramagnetic materials having a small influence on the magnetic field. preferable. Examples of the support 106 include plastics such as acrylic and polycarbonate, and examples of the sensor substrate 108 include electronic circuit boards such as epoxy and glass epoxy.
センサ駆動検出回路１１０は、磁気センサ１０４を駆動し、磁気センサ１０４からの出力信号を検出する。制御部１１２は、センサ駆動検出回路１１０および磁気センサ１０４を制御し、表示部１１４は、磁気センサ１０４からの信号を表示する。 The sensor drive detection circuit 110 drives the magnetic sensor 104 and detects an output signal from the magnetic sensor 104. The control unit 112 controls the sensor drive detection circuit 110 and the magnetic sensor 104, and the display unit 114 displays a signal from the magnetic sensor 104.
磁気発生手段１０２により発生する磁場の強度は、自然に存在する外部磁場より十分大きいものとする。当該磁場は、被検体２００の表面または内部の傷により影響を受け、磁界分布に変動を生じる。磁気センサ１０４は当該変動を検知し、傷を検出する。磁気発生手段１０２は、たとえば永久磁石、電磁石等が例示できる。本実施の形態においては磁気発生手段１０２として永久磁石を例示する。 The strength of the magnetic field generated by the magnetic generating means 102 is assumed to be sufficiently larger than the naturally occurring external magnetic field. The magnetic field is affected by scratches on the surface or inside of the subject 200, causing fluctuations in the magnetic field distribution. The magnetic sensor 104 detects the fluctuation and detects a scratch. Examples of the magnetic generating means 102 include permanent magnets and electromagnets. In this embodiment, a permanent magnet is exemplified as the magnetic generating means 102.
磁気センサ１０４から被検体２００までの距離ａは、被検体２００の残留磁場の影響を受けない程度の距離だけ離すことが望ましい。距離ａは、たとえば２ｍｍとすることができる。磁気発生手段１０２から被検体２００までの距離ｂは、被検体２００に残留磁場を発生させない程度の距離だけ離すことが望ましい。距離ｂは、たとえば１９ｍｍとすることができる。 It is desirable that the distance a from the magnetic sensor 104 to the subject 200 is a distance that is not affected by the residual magnetic field of the subject 200. The distance a can be, for example, 2 mm. It is desirable that the distance b from the magnetic generating means 102 to the subject 200 is a distance that does not generate a residual magnetic field in the subject 200. The distance b can be, for example, 19 mm.
磁気センサ１０４は、磁気発生手段１０２により生じた磁場の、少なくとも第１方向成分である第１磁場強度を計測し、無傷であると予め判明している標準検体を被検体２００とした場合に、第１磁場強度の絶対値が最少になるよう磁気発生手段１０２との相対位置を調整する。磁気発生手段１０２と磁気センサ１０４との位置関係について、図３を用いて説明する。 The magnetic sensor 104 measures at least the strength of the first magnetic field, which is a first-direction component of the magnetic field generated by the magnetic generating means 102, and when the standard sample that is known to be intact is the subject 200, The relative position with the magnetic generating means 102 is adjusted so that the absolute value of the first magnetic field strength is minimized. The positional relationship between the magnetic generating means 102 and the magnetic sensor 104 will be described with reference to FIG.
図３は、探傷装置１００における磁場と磁気センサ１０４の位置関係を示した模式図であり、（ａ）は上面図、（ｂ）は側面図、（ｃ）は正面図である。図中矢印付の線として磁力線を表示する。磁気センサ１０４の近傍に示した矢印ｐの方向は第１方向であり、従って、磁気センサ１０４が計測する第１磁場強度の方向は矢印ｐの方向である。このように矢印ｐを定義した場合、磁気センサ１０４は、矢印ｐが磁力線と直交するように、すなわち、第１磁場強度の絶対値が最少になるよう配置する。 3A and 3B are schematic views showing the positional relationship between the magnetic field and the magnetic sensor 104 in the flaw detector 100, where FIG. 3A is a top view, FIG. 3B is a side view, and FIG. 3C is a front view. The magnetic field lines are displayed as lines with arrows in the figure. The direction of the arrow p shown in the vicinity of the magnetic sensor 104 is the first direction, and therefore the direction of the first magnetic field strength measured by the magnetic sensor 104 is the direction of the arrow p. When the arrow p is defined in this way, the magnetic sensor 104 is arranged so that the arrow p is orthogonal to the magnetic field line, that is, the absolute value of the first magnetic field strength is minimized.
第１磁場強度の絶対値が最少になるよう磁気センサ１０４を配置することにより、磁気発生手段１０２で発生する磁場の強度を相当に大きくしても磁気センサ１０４の測定レンジを超えることがない。一方、磁気発生手段１０２で発生する磁場を強くすることで相対的に遠くの傷、あるいは相対的に小さい傷による磁場の変動が大きくなり、高感度に傷を検出することができる。 By arranging the magnetic sensor 104 so that the absolute value of the first magnetic field strength is minimized, the measurement range of the magnetic sensor 104 is not exceeded even if the strength of the magnetic field generated by the magnetic generating means 102 is considerably increased. On the other hand, by strengthening the magnetic field generated by the magnetic generating means 102, the fluctuation of the magnetic field due to a relatively distant scratch or a relatively small scratch becomes large, and the scratch can be detected with high sensitivity.
図３に示す位置関係では、磁気センサ１０４により計測する第１磁界強度の方向（矢印ｐの方向）をZ方向と一致させている。この場合、磁気センサ１０４がｘｙｚ方向の磁場強度を出力するＭＩセンサ（マグネト・インピーダンスセンサ）である場合にはＺ方向出力を計測すればよい。また、この場合、磁気センサ１０４は、被検体２００と磁気発生手段１０２とを結ぶ最近接線φ上に配置される。最近接線φは、被検体２００の表面に含まれる任意点と磁気発生手段１０２におけるＮ極およびＳ極の中点とを結ぶ直線のうち最も距離が短い直線である。 In the positional relationship shown in FIG. 3, the direction of the first magnetic field strength measured by the magnetic sensor 104 (direction of arrow p) coincides with the Z direction. In this case, if the magnetic sensor 104 is an MI sensor (magnetoimpedance sensor) that outputs the magnetic field strength in the xyz direction, the output in the Z direction may be measured. Further, in this case, the magnetic sensor 104 is arranged on the closest tangent line φ connecting the subject 200 and the magnetic generating means 102. The closest tangent φ is the straight line having the shortest distance among the straight lines connecting an arbitrary point included in the surface of the subject 200 and the midpoints of the north and south poles of the magnetic generating means 102.
なお、磁気センサ１０４は、第１磁場強度の絶対値が最少になるよう配置されればよく、最近接線φ上に配置される必要はない。たとえば図４に示すように、磁力線とｐ方向が直交するように傾いて配置されても良く、図５に示すように、磁力線とｐ方向が直交する限り平行移動して配置されてもよい。 The magnetic sensor 104 may be arranged so that the absolute value of the first magnetic field strength is minimized, and does not need to be arranged on the nearest tangent φ. For example, as shown in FIG. 4, they may be arranged so as to be tilted so that the magnetic field lines and the p direction are orthogonal to each other, and as shown in FIG. 5, they may be arranged by translating as long as the magnetic force lines and the p direction are orthogonal to each other.
また、磁気センサ１０４が、第１磁場強度に加えて、第１方向に直交する第２方向の磁場成分である第２磁場強度、並びに、第１方向および第２方向に直交する第３方向の磁場成分である第３磁場強度、を計測するものであってもよい。この場合、標準検体を被検体２００とした場合に、第１磁場強度および第２磁場強度、または、第１磁場強度および第３磁場強度、の各絶対値が最少になるよう磁気発生手段１０２との相対位置が調整することが好ましい。この場合、第１磁場強度だけでなく、絶対値が最少になるよう調整された第２磁場強度または第３磁場強度も傷検出に用いることができる。 Further, in addition to the first magnetic field strength, the magnetic sensor 104 has a second magnetic field strength which is a magnetic field component in the second direction orthogonal to the first direction, and a third direction orthogonal to the first direction and the second direction. It may measure the third magnetic field strength, which is a magnetic field component. In this case, when the standard sample is the subject 200, the magnetic generating means 102 and the magnetic generating means 102 have the minimum absolute values of the first magnetic field strength and the second magnetic field strength, or the first magnetic field strength and the third magnetic field strength. It is preferable to adjust the relative position of. In this case, not only the first magnetic field strength but also the second magnetic field strength or the third magnetic field strength adjusted so as to minimize the absolute value can be used for scratch detection.
また、図１（ａ）の上面図に示すように、複数のセンサがアレイ状またはマトリックス状に配置されてもよい。複数のセンサは、特定方向成分の磁場強度の測定が可能なものであり、このうち少なくとも一つが磁気センサ１０４であればよい。この場合、多数のセンサにより測定でき、ノイズを低減することができる。 Further, as shown in the top view of FIG. 1A, a plurality of sensors may be arranged in an array or a matrix. The plurality of sensors can measure the magnetic field strength of a specific direction component, and at least one of them may be a magnetic sensor 104. In this case, it can be measured by a large number of sensors and noise can be reduced.
図６〜図１１は、凹みまでの距離Ｌを変えた場合のＺ方向出力の変化値を示すグラフである。図６は凹みの幅が１０ｍｍ、深さが１ｍｍの場合、図７は凹みの幅が１０ｍｍ、深さが３ｍｍの場合、図８は凹みの幅が２０ｍｍ、深さが１ｍｍの場合、図９は凹みの幅が２０ｍｍ、深さが３ｍｍの場合、図１０は凹みの幅が２５ｍｍ、深さが２ｍｍの場合、図１１は凹みの幅が３０ｍｍ、深さが２ｍｍの場合である。また、図１２は、凹みが無い場合のＺ方向出力の変化値を示した比較のためのグラフである。 6 to 11 are graphs showing changes in the Z-direction output when the distance L to the recess is changed. FIG. 6 shows the case where the width of the recess is 10 mm and the depth is 1 mm, FIG. 7 shows the case where the width of the recess is 10 mm and the depth is 3 mm, and FIG. 8 shows the case where the width of the recess is 20 mm and the depth is 1 mm. When the width of the dent is 20 mm and the depth is 3 mm, FIG. 10 shows the case where the width of the dent is 25 mm and the depth is 2 mm, and FIG. 11 shows the case where the width of the dent is 30 mm and the depth is 2 mm. Further, FIG. 12 is a graph for comparison showing the change value of the output in the Z direction when there is no dent.
図１２と図６〜図１１とを対比すれば、凹みがあるとＺ方向出力が変化することがわかる。また、凹みの幅が大きいほど、凹みの深さが深いほど、Ｚ方向出力の変化値が大きくなっていることがわかる。 Comparing FIG. 12 with FIGS. 6 to 11, it can be seen that the Z-direction output changes when there is a dent. Further, it can be seen that the larger the width of the dent and the deeper the depth of the dent, the larger the change value of the output in the Z direction.
以上の結果から、第１方向（ｚ方向）が表面の法線方向である被検体２００の表面に沿って探傷装置１００を移動させ、第１磁場強度（ｚ方向出力）に変化が有った場合には傷があると判断することができる。 From the above results, the flaw detector 100 was moved along the surface of the subject 200 whose first direction (z direction) is the normal direction of the surface, and the first magnetic field strength (output in the z direction) was changed. In some cases, it can be determined that there is a scratch.
図１３は、凹みの幅に対するＺ方向出力の変化値をプロットしたグラフであり、図１４は、凹みの深さに対するＺ方向出力の変化値をプロットしたグラフである。また、図１５は、凹みの幅に対するＹ方向出力の変化値をプロットしたグラフであり、図１６は、凹みの深さに対するＹ方向出力の変化値をプロットしたグラフである。 FIG. 13 is a graph plotting the change value of the Z direction output with respect to the width of the recess, and FIG. 14 is a graph plotting the change value of the Z direction output with respect to the depth of the recess. Further, FIG. 15 is a graph in which the change value of the output in the Y direction with respect to the width of the recess is plotted, and FIG. 16 is a graph in which the change value of the output in the Y direction with respect to the depth of the recess is plotted.
図１３および図１４の結果から、Ｚ方向出力の変化値は、凹みの幅と深さの何れにおいても、大であるほど変化値が大きいことがわかる。一方、図１５および図１６の結果から、Ｙ方向出力の変化値においては、凹みの幅が変化してもＹ方向出力は変化せず、凹みの深さについては深いほど変化値が大きいことがわかる。つまり、Ｚ方向出力の変化値は凹みの幅および深さの両方に依存するが、Ｙ方向出力は凹みの深さに強く依存することが伺える。 From the results of FIGS. 13 and 14, it can be seen that the larger the change value of the output in the Z direction is, the larger the change value is in both the width and the depth of the recess. On the other hand, from the results of FIGS. 15 and 16, in the change value of the output in the Y direction, the output in the Y direction does not change even if the width of the dent changes, and the deeper the depth of the dent, the larger the change value. Recognize. That is, it can be seen that the change value of the Z-direction output depends on both the width and the depth of the dent, but the Y-direction output strongly depends on the depth of the dent.
この結果から、磁気センサ１０４が、第１磁場強度（Ｚ方向出力）に加えて、第１方向（ｚ方向）に直交する第２方向（ｙ方向）の磁場成分である第２磁場強度（Ｙ方向出力）を計測するものであるとき、探傷装置１００を第２方向（ｙ方向）に移動させ、第２磁場強度（Ｙ方向出力）の変化により傷の深さを推定し、当該深さの推定値を前提に、第２磁場強度（Ｙ方向出力）および第１磁場強度（Ｚ方向出力）の変化から傷の幅を推定することができる。 From this result, the magnetic sensor 104 has a second magnetic field strength (Y) which is a magnetic field component in the second direction (y direction) orthogonal to the first direction (z direction) in addition to the first magnetic field strength (Z direction output). When measuring (direction output), the flaw detector 100 is moved in the second direction (y direction), the depth of the scratch is estimated by the change in the second magnetic field strength (y direction output), and the depth of the flaw is measured . The width of the scratch can be estimated from the changes in the second magnetic field strength (Y direction output) and the first magnetic field strength (Z direction output) on the premise of the estimated value .
以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲には限定されない。上記実施の形態に、多様な変更または改良を加えることが可能であることが当業者に明らかである。その様な変更または改良を加えた形態も本発明の技術的範囲に含まれ得ることが、特許請求の範囲の記載から明らかである。 Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that such modified or improved forms may also be included in the technical scope of the present invention.
たとえば、図１７〜図１９に示すように、磁気発生手段１０２である磁石に加えて、他の磁石１２０、１２２、１２４を付加してもよい。図１７〜図１９に例示した磁気発生手段の変更例においても、上記した実施の形態と同様な結果を得ることができる。 For example, as shown in FIGS. 17 to 19, other magnets 120, 122, and 124 may be added in addition to the magnet that is the magnetic generating means 102. Also in the modified example of the magnetic generating means illustrated in FIGS. 17 to 19, the same result as the above-described embodiment can be obtained.
１００…探傷装置、１０２…磁気発生手段、１０４…磁気センサ、１０６…支持体、１０８…センサ基板、１１０…センサ駆動検出回路、１１２…制御部、１１４…表示部、１２０，１２２，１２４…磁石、２００…被検体、２０２…凹み。 100 ... flaw detector, 102 ... magnetic generating means, 104 ... magnetic sensor, 106 ... support, 108 ... sensor board, 110 ... sensor drive detection circuit, 112 ... control unit, 114 ... display unit, 120, 122, 124 ... magnet , 200 ... subject, 202 ... dent.
Claims (5)
磁気発生手段と、
前記磁気発生手段により生じた磁場の第１方向成分である第１磁場強度、および前記第１方向に直交する第２方向の磁場成分である第２磁場強度、を計測する磁気センサと、
を有し、
前記磁気センサが、前記被検体の表面に含まれる任意点と前記磁気発生手段におけるＮ極およびＳ極の中点とを結ぶ直線のうち最も距離が短い直線である最近接線上に配置されるとともに、無傷であると予め判明している標準検体を前記被検体とした場合に、前記第１磁場強度の絶対値および前記第２磁場強度の絶対値のそれぞれが最少になるよう前記磁気発生手段との相対位置が調整されたものであり、
表面の法線方向が前記第１方向と同じである前記被検体の前記表面に沿って、前記第２方向に移動させたとき、前記移動による前記第２磁場強度の変化により、前記第２方向に離間して位置する前記傷の深さを推定し、前記移動による前記第１磁場強度および前記第２磁場強度の変化により、前記第２方向に離間して位置する前記傷の幅を推定する
探傷装置。 A flaw detector that detects scratches on the surface or inside of a subject.
Magnetic generating means and
A magnetic sensor that measures the first magnetic field strength, which is a first-direction component of the magnetic field generated by the magnetic generating means, and the second magnetic field strength, which is a second-direction magnetic field component orthogonal to the first direction.
Have,
The magnetic sensor is arranged on the closest tangent line, which is the shortest straight line connecting an arbitrary point included in the surface of the subject and the midpoint of the N pole and the S pole in the magnetic generating means. When a standard sample known to be intact is used as the subject, the magnetic generating means is used so that the absolute value of the first magnetic field strength and the absolute value of the second magnetic field strength are minimized. The relative position of is adjusted,
When the subject is moved in the second direction along the surface of the subject whose surface normal direction is the same as the first direction, the change in the second magnetic field strength due to the movement causes the second direction. The depth of the scratches located apart from each other is estimated, and the width of the scratches located apart from each other in the second direction is estimated from the changes in the first magnetic field strength and the second magnetic field strength due to the movement. Flaw detector.
磁気発生手段と、
前記磁気発生手段により生じた磁場の第２方向成分である第２磁場強度を計測する磁気センサと、
を有し、
前記磁気センサが、前記被検体の表面に含まれる任意点と前記磁気発生手段におけるＮ極およびＳ極の中点とを結ぶ直線のうち最も距離が短い直線である最近接線上に配置されるとともに、無傷であると予め判明している標準検体を前記被検体とした場合に、前記第２磁場強度の絶対値が最少になるよう前記磁気発生手段との相対位置が調整されたものであり、
表面の法線方向が前記第２方向に直交する第１方向と同じである前記被検体の前記表面に沿って、前記第２方向に移動させたとき、前記移動による前記第２磁場強度の変化により、前記第２方向に離間して位置する前記傷の深さを推定する
探傷装置。 A flaw detector that detects scratches on the surface or inside of a subject.
Magnetic generating means and
A magnetic sensor that measures the strength of the second magnetic field, which is a second-direction component of the magnetic field generated by the magnetic generating means, and
Have,
The magnetic sensor is arranged on the closest tangent line, which is the shortest straight line connecting an arbitrary point included in the surface of the subject and the midpoint of the N pole and the S pole in the magnetic generating means. When a standard sample known to be intact is used as the subject, the relative position with the magnetic generating means is adjusted so that the absolute value of the second magnetic field strength is minimized.
When the subject is moved in the second direction along the surface of the subject whose normal direction of the surface is the same as the first direction orthogonal to the second direction, the change in the strength of the second magnetic field due to the movement. A flaw detector that estimates the depth of the scratches located apart from each other in the second direction.
当該複数のセンサのうち、少なくとも一つが前記磁気センサである
請求項１または請求項２に記載の探傷装置。 Multiple sensors capable of measuring the magnetic field strength of a specific direction component are arranged in an array or matrix.
The flaw detection device according to claim 1 or 2 , wherein at least one of the plurality of sensors is the magnetic sensor.
前記表面に沿って前記探傷装置を前記第２方向に移動させるステップを有し、
前記移動させるステップにおいて、前記移動による前記第２磁場強度の変化により、前記第２方向に離間して位置する前記傷の深さを推定し、前記移動による前記第１磁場強度および前記第２磁場強度の変化により、前記第２方向に離間して位置する前記傷の幅を推定する
探傷方法。 A flaw detection method using the flaw detection device according to claim 1 or 3 .
It has a step of moving the flaw detector in the second direction along the surface.
In the moving step, the depth of the scratches located apart from each other in the second direction is estimated from the change in the second magnetic field strength due to the movement, and the first magnetic field strength and the second magnetic field due to the movement are estimated. A flaw detection method that estimates the width of the scratches located apart from each other in the second direction by changing the strength.
前記表面に沿って前記探傷装置を前記第２方向に移動させるステップを有し、
前記移動させるステップにおいて、前記移動による前記第２磁場強度の変化により、前記第２方向に離間して位置する前記傷の深さを推定する
探傷方法。 A flaw detection method using the flaw detection device according to claim 2 or 3 .
It has a step of moving the flaw detector in the second direction along the surface.
A flaw detection method for estimating the depth of a scratch located at a distance in the second direction from a change in the second magnetic field strength due to the movement in the moving step.
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