JP2017146202A5

JP2017146202A5 -

Info

Publication number: JP2017146202A5
Application number: JP2016028169A
Authority: JP
Filing date: 2016-02-17
Publication date: 2019-03-07
Anticipated expiration: 2036-02-17

Description

１．３高速走査モアレ法による変形計測感度
高速走査モアレ法ではＴ_０間隔の基本走査線に相対的なピッチｐの試料格子のひずみは式、ε（ｎ）＝（ｐ−Ｔ_０）／Ｔ_０で表される。
この数式と数式（７）とを比較すれば、Ｔ（ｎ）＜ｎｐの場合には式、ε（ｎ）＝Ｔ_０／（ｄ−Ｔ_０）で得られ、Ｔ（ｎ）＞ｎｐの場合には式、ε（ｎ）＝−Ｔ_０／（ｄ＋Ｔ_０）で得られる。
モアレ間隔は通常ｙ方向には基本走査線間隔よりはるかに大きいことから相対ひずみは式、｜ε（ｎ）｜≒Ｔ_０／ｄ＝Ｔ（ｎ）／（ｎｄ）で簡素化される。 1.3 Deformation measurement sensitivity by the high-speed scanning moire method In the high-speed scanning moire method, the strain of the sample lattice with the pitch p relative to the basic scanning line at the interval T ₀ is expressed by the equation: ε (n) = (p−T ₀ ) / T It is represented by ₀ .
Comparing this equation with equation (7), if T (n) <np, the following equation is obtained: ε (n) = T ₀ / (d−T ₀ ), and T (n)> np In the case, it is obtained by the equation, ε (n) = − T ₀ / (d + T ₀ ).
Since the moire interval is usually much larger than the basic scanning line interval in the y direction, the relative distortion is simplified by the equation | ε (n) | ≈T ₀ / d = T (n) / (nd).

Claims

A scanning microscope having scanning lines that are composed of vertical and horizontal scanning points and can be scanned at an interval T (an integer is 1 or more ) that is an integral multiple of the basic scanning line interval T ₀ ;
The surface of the sample placed on the sample stage and having a regular lattice having a pitch p (p is close to T ₀ ) in one direction on the surface is scanned by the scanning line of the scanning microscope, and the surface of the sample is scanned. Get moire fringe images,
Calculate the displacement strain amount of the sample from the luminance information of the scanning point of the acquired moire fringe image,
Displaying the calculated displacement amount of strain the sample,
A displacement strain distribution measuring system using a scanning moire method,
Wherein the two or more integral multiple or the scanning point and the superlattice and its vicinity of the pitch p of the scanning point interval T of the scanning microscope is as mismatch or shift occurs, the displacement strain distribution measurement system.

The relative strain amount ε (n) of the pitch p of the regular lattice is obtained from the first derivative (the following equation (9)) of the displacement uni (u) (the following equation (8)) in the one direction ,

However, the one direction and the y direction, m is the order of the moire fringes, u (n) is the displacement of moire fringes in the y direction with respect to the basic scan line, the displacement strain distribution measurement system according to claim 1.

The amount of strain ε _actual is obtained from the geometric relationship of the regular lattice before and after deformation (the following equation (10)) .

However, p ₀ is the ordered lattice pitch of the sample prior to deformation in the y-direction, displacement of the strain distribution measurement system according to claim 2.

A scanning microscope having scanning lines that are composed of vertical and horizontal scanning points and can be scanned at an interval T (an integer is 1 or more ) that is an integral multiple of the basic scanning line interval T ₀ ;
The surface of the sample placed on the sample stage and on which a regular crossing lattice having a pitch p (p is close to T ₀ ) is generated in two directions perpendicular to the surface of the sample is scanned by the scanning line of the scanning microscope. Obtain a 2D moire fringe image of the surface,
Calculate the displacement strain amount of the sample from the luminance information of the scanning point of the acquired moire fringe image,
Displaying the calculated displacement amount of strain the sample,
A displacement strain distribution measuring system using a scanning moire method,
Wherein the scanning point and the scanning point and the rule intersecting grid disposed in close proximity to the rules intersecting grid and the basic scanning line interval T ₀ is as mismatch or shift occurs, the displacement strain distribution measurement system.

It said regular relative amount of strain of the cross grating _{ε i (i = x, y} ) , the rule crossing after separation on 1-dimensional scanning moiré two directions perpendicular performs image processing on the two-dimensional moiré fringe image The displacement relative to the basic scanning line in the two directions of the lattice u _i (i = x, y) (the following equation (11)) is obtained from the first derivative (the following equation (12)) ,

However, the two directions are the x and y directions, the displacement strain distribution measurement system according to claim 4.

The strain amount ε _{i_actual} of the regular cross lattice in the two directions is obtained from the geometrical relationship of the regular cross lattice pitch before and after deformation (the following equation (13)) .

However, the sample grating pitch of the undeformed x or y direction and _{p i_0 (i = x, y} ), the displacement strain distribution measurement system according to claim 5.

A scanning microscope having a scanning line consisting of scanning points that can be scanned at an interval T (an integer is 1 or more ) that is an integral multiple of the basic scanning line interval T ₀ vertically and horizontally;
The surface of the sample placed on the sample stage and on which a regular crossing lattice having a pitch p (p is close to T ₀ ) is generated in two directions perpendicular to the surface of the sample is scanned by the scanning line of the scanning microscope. Obtain a 2D moire fringe image of the surface,
The displacement strain amount of the sample is calculated from the luminance information of the scanning point of the acquired two-dimensional moire fringe image,
Display the calculated displacement strain of the sample,
A displacement strain distribution measuring system using a scanning moire method,
A scanning line interval T _x , T _y in two orthogonal directions of the scanning microscope is an integer multiple of the pitch p (an integer is 1 or more ) or the vicinity thereof; and
At least one of the scanning line intervals in the two directions is an integer multiple of 2 or more of the pitch p or the vicinity thereof,
Characterized in that as said regular cross grating and the scanning line interval T _x, the scanning point and the scanning point and the rule intersecting grid disposed in close proximity to the T _y is the mismatch or misalignment occurs, the displacement strain Distribution measurement system.

The relative amount of strain said regular cross grating _{_{ε i (n i) (i}} = x, y) were separated into 1-dimensional scanning moiré two directions perpendicular performs image processing on the two-dimensional moiré fringe image Later, the displacement relative to the scanning point in the two directions of the regular crossing lattice u _i (n _i ) (i = x, y) (the following equation (14)) is obtained from the first derivative (the following equation (15)). ,

However, the two directions are x and y directions, _{m i} is the i direction (i = x, y) the degree of moire _fringes, u i _{(n i)} at the displacement of moire fringes in the i direction with respect to the basic scan line to displacement strain distribution measurement system according to claim 7.

The strain amount ε _{i_actual} (n _i ) (i = x, y) of the regular cross lattice in the two directions is obtained from the geometrical relationship (the following equation (16)) of the regular cross lattice pitch before and after deformation.

However, the sample grating pitch of the undeformed x or y direction and _{p i_0 (i = x, y} ), the displacement strain distribution measurement system according to claim 8.

At least an objective lens, by using the imaging apparatus comprising a Louis Mejisensa such from the imaging element aligned in two directions, by photographing the surface of the measured object ordered lattice pitch p is generated in one direction on the surface thereof Get moire fringe images,
Calculate the displacement strain amount of the measurement object from the luminance information stored in the image sensor of the acquired moire fringe image,
Display the calculated displacement strain of the measured object,
Displacement strain distribution measurement system by sampling moire method,
Storing the moire fringe image in the image sensor array in the one direction which is an integer multiple of the pitch p in the image sensor of the pitch P in the one direction (an integer is 1 or more ) or in the vicinity thereof;
And calculates the displacement amount of strain said measured object from said recorded luminance information, the displacement strain distribution measurement system.

At least an objective lens, by using an imaging device that includes a Louis Mejisensa such from the imaging element aligned in two directions, the surface of the measured object rule intersecting lattice pitch P is generated in the two directions on the surface of shooting To obtain a 2D moire fringe image,
Calculating the displacement strain amount of the measurement object from the luminance information stored in the image sensor of the acquired two-dimensional moire fringe image;
Displaying the calculated displacement amount of strain the measurement was,
Displacement strain distribution measurement system by sampling moire method,
An image sensor array in an integer multiple of the pitch p in the image sensor of the pitch P in the two directions (an integer is 1 or more ) or in the vicinity thereof, and
At least one direction of the image pickup element column are two or more integral multiple or near near its said pitch p,
The moire fringe image is recorded in the two-direction image sensor array,
And calculates the displacement amount of strain said measured object from said recorded luminance information, the displacement strain distribution measurement system.

Displacement strain distribution measurement system according to claim 10 or claim 11, wherein the two directions are orthogonal.