JP2017141896A - Valve and manifold valve using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve capable of making a fluid that is stagnant within a flow passage, easily flow away in accordance with a simple principle without complicating a valve structure, and a manifold valve that is configured by combining the valve.SOLUTION: A valve comprises: an inflow chamber 20 including a first fluid inflow part 21 into which a first fluid flows; a second fluid flow passage part 15 through which a second fluid is circulated from an upstream opening 16 to a downstream opening 17; a connection flow passage part 22 which connects the inflow chamber with the second fluid flow passage part and circulates the first fluid from the inflow chamber to a side of the second fluid flow passage part; a valve seat part 25 which is formed in an opening of the connection flow passage part closer to the inflow chamber; a valve element part 30 which is disposed within the inflow chamber and includes a diaphragm part 35 so as to make the first fluid flow into the second fluid flow passage part and stop the flow, while being abutted to the valve seat part; and a small columnar part 45 which is provided in an abutment surface part 41 of the valve element part to a side of the valve seat part, extends into the connection flow passage part and is formed longer than a full length of the connection flow passage part.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a valve and a manifold valve using the same, and more particularly to a valve used at a site where a plurality of types of fluids are mixed and a manifold valve formed by combining the valves.

  For example, extremely high cleanliness is required for fluids such as chemicals for cleaning and etching of silicon wafers in semiconductor manufacturing and the like. Single-wafer cleaning is the mainstream. This is because by cleaning the silicon wafers one by one, a high cleaning effect can be obtained without receiving contamination from other cleaning objects. In the case of this method, pure water and chemicals corresponding to each operation stage are sequentially prepared and supplied to a silicon wafer to be cleaned. If it does so, the dispersion | variation in a component must be suppressed to the limit in the preparation of sequential pure water or a chemical | medical solution.

  Therefore, a manifold valve is used as a valve for mixing individual fluids (see Patent Document 1). The structure of the manifold valve (combination of valves 500) disclosed in FIG. 6 and the like of Patent Document 1 will be described (see FIG. 10). The valve 500 includes a combination of a base block 501 formed of a fluororesin or the like, and a housing block 502 that accommodates the valve body portion 503 and the urging spring 504. The base block 501 is formed with a main flow path 505 that penetrates the inside. A valve chamber 506 is formed immediately above. A secondary fluid inlet 507 for the secondary fluid flowing into the valve chamber 506 is provided. The valve chamber 506 and the main flow path 505 are connected by a communication path 508. The valve portion 510 of the valve body portion 503 is seated (contacted) with the valve seat 509 of the communication passage 508. The communication passage 508 is opened or closed by the forward and backward movement of the valve body 503 (see the central valve 500 in the drawing).

  The auxiliary fluid that has flowed into the valve chamber 506 from the auxiliary fluid inlet 507 flows into the main flow path 505 from the valve chamber 506 via the communication path 508. Then, the main fluid and the sub fluid are mixed in the main flow path 505 (see the valve 500 on the left in the drawing). Next, when the valve portion 510 of the valve body portion 503 contacts (seats) the valve seat 509 of the communication passage 508, the secondary fluid cannot pass through the communication passage 508, and the supply of the secondary fluid is stopped. In the illustrated example, since the communication path 508 is orthogonal to the main flow path 505, the secondary fluid tends to accumulate in the communication path 508 (see the right valve 500 in the figure). If it does so, there exists a possibility that a difference | error may arise in a component density | concentration etc. in the case of preparation of a chemical | medical solution. Therefore, since the main fluid flowing through the main flow path 505 completely flows away the sub-fluid (so-called starch) in the communication path 508, a large amount of main fluid is required, and it is not easy to suppress the amount of fluid used. .

  In order to reduce the stagnation (stagnation) of the fluid flowing in the flow path, a valve having another flow path and a throttle portion for flowing away the secondary fluid staying when the flow of the secondary fluid is stopped has been proposed. (For example, refer to Patent Document 2). However, according to the valve disclosed in Patent Document 2, the structure is complicated and manufacturing and processing are not easy. From a series of circumstances, there has been a demand for a valve that can quickly stabilize the quality of the fluid while avoiding the staying state of the secondary fluid that joins the main fluid as much as possible, and that has a simplified device structure.

JP-A-10-292877 JP 2009-281475 A

  As a result of intensive studies on the structure of the valve, the inventor has developed a valve that can easily avoid the staying state of the sub-fluid that joins the main fluid while utilizing the existing valve design technology.

  The present invention has been made in view of the above points, and a valve capable of easily flowing away the fluid staying in the flow path by a simple principle without complicating the valve structure and the valve. Providing a combined manifold valve.

  That is, the invention of claim 1 includes an inflow chamber provided with a first fluid inflow portion into which the first fluid flows, a second fluid flow path portion in which the second fluid flows from the upstream portion opening to the downstream portion opening, A connection flow channel portion connecting the inflow chamber and the second fluid flow channel portion to circulate the first fluid from the inflow chamber toward the second fluid flow channel portion; and the inflow chamber of the connection flow channel portion A valve seat portion formed in the opening on the side, and disposed in the inflow chamber, contacting the valve seat portion to stop the inflow and inflow of the first fluid into the second fluid flow path portion, A valve body part provided with a diaphragm part and a contact surface part of the valve body part on the valve seat part side are provided and extended in the connection flow path part and longer than the entire length of the connection flow path part And a small columnar part.

  According to a second aspect of the present invention, the first fluid inflow portion, the second fluid passage portion, the inflow chamber, the connection passage portion, and the valve seat portion are formed in one base block. The valve according to claim 1.

  A third aspect of the present invention relates to the valve according to the first or second aspect, wherein the small columnar portion has a cylindrical shape.

  According to a fourth aspect of the present invention, there is provided the valve according to any one of the first to third aspects, wherein the advancing / retreating of the valve body is performed by inflow / outflow of pressurized gas.

  According to a fifth aspect of the present invention, there is provided a manifold valve comprising a plurality of the second fluid flow path portions of the valve according to any one of the first to fourth aspects.

  According to the valve of the first aspect of the present invention, the inflow chamber provided with the first fluid inflow portion into which the first fluid flows in, and the second fluid flow path portion in which the second fluid flows from the upstream portion opening to the downstream portion opening. A connection flow channel portion that connects the inflow chamber and the second fluid flow channel portion and circulates the first fluid from the inflow chamber to the second fluid flow channel portion side, and the connection flow channel portion A valve seat portion formed in an opening on the inflow chamber side, and disposed in the inflow chamber, contacting the valve seat portion to stop the inflow and inflow of the first fluid into the second fluid flow path portion. Since the valve body portion to be provided and the small columnar portion provided in the contact surface portion of the valve body portion toward the valve seat portion and extended into the connection flow path portion, the valve structure is not complicated. The second fluid flowing through the second fluid flow path portion simply collides with the small columnar portion, and the flow of the second fluid is disturbed. The management, the fluid staying in the passage can leave easily flow.

  According to the valve of the invention of claim 2, in the invention of claim 1, the first fluid inflow part, the second fluid channel part, the inflow chamber, the connection channel part, and the valve seat part are: Since it is formed inside one base block, the number of members in contact with the fluid is small, and the cleanliness of the fluid is increased.

  According to the valve of the third aspect of the present invention, in the first or second aspect of the invention, the small columnar part has a columnar shape, so that the cutting of the small columnar part is simple and easy.

  According to the valve of the invention of claim 4, in the invention of any one of claims 1 to 3, the valve body part is driven forward / backward by inflow / outflow of pressurized gas, so the valve is not complicated. A quick response is realized when the body moves back and forth. Moreover, it is suitable when a corrosive fluid is used for the first fluid or the second fluid.

  According to the manifold valve of the fifth aspect of the present invention, a plurality of second fluid flow path portions of the valve according to any one of the first to fourth aspects are combined with each other, so that one manifold valve is configured. By changing the number of valves, the types of fluids that can be mixed can be freely increased or decreased. Further, the integration of each valve reduces the wetted area, which is convenient for maintaining the cleanliness of the fluid. In addition, installation space is also saved.

It is a longitudinal cross-sectional view of the inflow state in the 2nd fluid flow-path part direction of the valve | bulb of this invention. It is a longitudinal cross-sectional view of the inflow state in the 1st fluid inflow part of the valve | bulb. It is a longitudinal cross-sectional view of the inflow stop state in the 2nd fluid flow-path part direction of the valve | bulb. It is a longitudinal cross-sectional view of the inflow stop state in the 1st fluid inflow part of the valve | bulb. It is a partial expanded sectional view of the valve seat part vicinity of FIG. It is a schematic diagram which shows the flow of the fluid near a small columnar part. It is a partial expanded sectional view of the valve body part and valve seat part of other embodiments. It is a longitudinal cross-sectional view of the manifold valve of this invention. It is the schematic of the substrate processing apparatus incorporating the manifold valve of this invention. It is a longitudinal cross-sectional view of the conventional valve | bulb.

  A valve 10 illustrated as one embodiment of the present invention is mainly disposed in a fluid conduit such as a semiconductor manufacturing factory or a semiconductor manufacturing apparatus. In particular, the valve 10 is used at a site where a plurality of types of fluids are mixed and stopped. The structure of the valve 10 will be described with reference to the overall cross-sectional views of FIGS. 1 and 2 are cross-sectional views of the flow state (fluid mixing state) of the first fluid described later. 3 and 4 are cross-sectional views of the first fluid flow stop state. As shown in the figure, the valve 10 according to the embodiment includes a combination of a base block 11 and a housing block 12, and a fixed block 13 is sandwiched between the blocks.

  First, as can be understood from the cross-sectional views of FIGS. 1 and 2, the inflow chamber 20 into which the first fluid flows is formed in the base block 11. The first fluid inflow portion 21 is connected to the inflow chamber 20, and the first fluid flows from the first fluid inflow portion 21 into the inflow chamber 20. A second fluid channel portion 15 through which the second fluid flows is formed immediately below the inflow chamber 20 of the illustrated base block 11. The left hand side of FIG. 1 is the upstream opening 16 of the second fluid flow path portion 15, and the right hand side of FIG. 1 is the downstream opening 17 of the second fluid flow path portion 15. The second fluid flows from the upstream opening 16 into the second fluid flow path section 15 and flows through the second fluid flow path section 15, and the second fluid flows from the downstream opening 17 to the outside of the base block 11 (valve 10). To leak.

  The inflow chamber 20 and the second fluid channel portion 15 are connected by the connection channel portion 22. Therefore, the first fluid that has flowed into the inflow chamber 20 from the first fluid inflow portion 21 flows into the second fluid flow path portion 15 via the connection flow path portion 22. Thus, the first fluid is mixed into the second fluid flowing through the second fluid flow path portion 15, both fluids are mixed in the second fluid flow path portion 15, and the mixed fluid is mixed from both fluids. Prepared. The inflow chamber 20 side of the connection channel portion 22 is an inflow opening portion 23 (opening portion on the inflow chamber side), and the second fluid channel portion 15 side is an outflow opening portion 24. And the valve seat part 25 is formed in the inflow chamber 20 side of the inflow opening part 23 of the connection flow path part 22. FIG.

  When it is assumed that the use of the valve 10 is in the semiconductor manufacturing field, the second fluid is ultrapure water (cold water, hot water) or the like and corresponds to the “main fluid”. The first fluid is hydrofluoric acid, hydrogen peroxide solution, ammonia water, hydrochloric acid, a surfactant, and other various agents, and corresponds to a “subfluid”. Of course, the first fluid and the second fluid are not limited to these types of fluids, and the fluids are selected as necessary.

  In the valve 10 of the present embodiment, a portion that comes into contact with liquid is formed in a single base block 11. Specifically, the first fluid inflow portion 21, the second fluid flow passage portion 15, the inflow chamber 20, the connection flow passage portion 22, and the valve seat portion 25 are all formed inside one base block 11. Since the number of members in contact with the fluid is reduced, the cleanliness of the fluid is increased. The base block 11 is made of a fluororesin such as PFA (tetrafluoroethylene / perfluoroalkoxyethylene copolymer, perfluoroalkoxyalkane or the like), PTFE (polytetrafluoroethylene) or the like. In the case of PTFE, the base block 11 is processed into a desired shape by cutting. In the case of PFA, the base block 11 can be melted and molded in addition to cutting.

  The valve body portion 30 that is moved forward and backward with respect to the valve seat portion 25 and disposed in the inflow chamber 20. The valve body portion 30 of the illustrated embodiment is configured by a combination of a valve portion 40 and a drive portion 50 (see FIG. 2 and the like) that drives the valve portion 40 to advance and retract. When the valve body portion 30 abuts (sits) the valve seat portion 25, the inflow opening portion 23 of the connection channel portion 22 is closed, and the first fluid in the inflow chamber 20 does not flow to the connection channel portion 22, The inflow of one fluid is stopped. On the contrary, when the valve body part 30 is separated from the valve seat part 25 (separated), the inflow opening 23 of the connection flow path part 22 is opened, and the first fluid flows into the connection flow path part 22. In this manner, the valve portion 40 contacts the valve seat portion 25 in conjunction with the advance / retreat operation of the valve body portion 30. Thus, inflow and stop of inflow of the first fluid are performed, and mixing of the first fluid and the second fluid is controlled.

  In the valve body portion 30, the valve portion 40 includes a diaphragm portion 35 (movable film portion) and a flange portion 34 (edge portion). The flange portion 34 is formed around the diaphragm portion 35. When the diaphragm part 35 receives the fluid pressures of the first fluid and the second fluid, the advance / retreat position of the valve body part 30 (valve part 40) can be changed in a timely manner. In particular, the diaphragm portion 35 effectively acts to accurately control the pressure and flow rate of the fluid. When the valve portion 40 is fixed, the flange portion 34 is placed at a predetermined position of the base block 11, and the fixing block 13 is mounted on the flange portion 34. As a result, the flange portion 34 is sandwiched and fixed by both the base block 11 and the fixed block 13. Further, in the valve body portion 30, a small columnar portion 45 is provided on the contact surface portion 41 of the valve portion 40.

  In the valve 10 of the present embodiment, the valve body portion 30 is provided with the valve portion 40, the shaft body portion 31 and the piston head portion 32 connected to the valve portion 40. The shaft body portion 31 is inserted into the fixed block 13 so as to freely advance and retract (up and down freely). The piston head 32 is accommodated in a piston space 33 in the housing block 12 so as to be able to advance and retreat (up and down). Packings 19, 37, and 38 are attached to the sliding surfaces of the members to ensure airtightness. These packings are O-rings etc. which are formed from well-known durable materials, such as urethane rubber, NBR, HNBR, silicone rubber, and fluororesin rubber.

  The drive part 50 which drives the valve body part 30 forward and backward is demonstrated using FIG. In the illustrated valve body portion 30, the valve portion 40 and the shaft body portion 31 are fixed by screwing or the like. A biasing spring 55 is disposed between the upper portion 36 of the piston head 32 and the housing block 12. The piston head 32 is always pushed downward by the urging force (spring elasticity) of the urging spring 55.

  The pressurized gas (working gas) flows from the first air port 51 into the piston space 33. Due to the supply of pressurized gas at this time (pressure increase in the piston space portion 33), the piston head 32 is pushed upward against the force of the biasing spring 55. This state is the state of FIGS. 1 and 2, and the valve portion 40 of the valve body portion 30 is separated from the valve seat portion 25. The gas (air) above the piston head 32 in the piston space 33 is discharged from the second air port 52 to the outside of the valve 10. Air accumulated in the space opposite to the liquid contact side of the diaphragm portion 35 enters and exits from the respiratory path 18.

  Next, when the flow of pressurized gas from the first air port 51 stops and the pressure in the piston space 33 decreases, the biasing spring 55 is attached as can be seen from the cross-sectional views of FIGS. With the force, the piston head 32 starts to be pressed, and the valve portion 40 comes into contact (seats) with the valve seat portion 25. At this time, inflow of air or pressurized gas from the second air port 52 into the piston space 33 also occurs. Air flows into the space on the opposite side of the diaphragm 35 from the liquid contact side through the breathing path 18.

  When it does so, the valve part 40 of the valve body part 30 will contact | abut (seed) to the valve seat part 25. FIG. Even if the first fluid flows into the inflow chamber 20 from the first fluid inflow portion 21, it remains in the inflow chamber 20. Therefore, the first fluid is not mixed with the second fluid flowing through the second fluid flow path portion 15, and only the second fluid passes through the valve 10 (second fluid flow path portion 15). When resuming the mixing of the first fluid, the same processing as in FIGS. 1 and 2 is resumed.

  In the illustrated embodiment, the drive unit 50 of the valve 10 is a pressurized gas that flows into the biasing spring 55, the piston head 32 that receives the biasing spring 55, and the piston space 33. By mounting the drive unit 50 on the valve 10, the valve body unit 30 can be moved back and forth (the seating and separation of the valve unit 40) remotely. Further, as described above, the valve body portion 30 is driven back and forth by the flow of pressurized gas. When the pressurized gas flows in and out, the pressurized gas of a predetermined pressure or higher is supplied from the air regulator, and the supply and stop of the supply of the pressurized gas are performed through a device such as a solenoid valve. Therefore, a quick response can be realized without complicating the mechanism.

  Here, even when the valve portion 40 abuts on the valve seat portion 25 and the inflow of the first fluid into the second fluid flow passage portion 15 is stopped, a part of the first fluid remains in the connection flow passage portion 22. It is thought that it is staying. That is, it is the stagnation of the first fluid in the connection flow path portion 22. As described in the background art, it is considered that this is a cause of a slight concentration change of the chemical solution caused by the staying fluid. Particularly in fields where precise component control is required, such as in the semiconductor manufacturing field, waste of the amount of fluid used and influence on product quality cannot be ignored.

  Therefore, the first fluid staying in the connection flow path portion 22 that connects the inflow chamber 20 and the second fluid flow path portion 15 needs to be quickly removed by circulation of a small amount of the second fluid as much as possible. is there. In addition, the structure of each part must be as simple as possible from the viewpoint of fluid cleanliness. In order to satisfy this requirement, a structure of the valve body portion 30 (valve portion 40) in the illustrated valve 10 is proposed.

  The main part structure of the valve body portion 30 (valve portion 40) will be described with reference to FIGS. In the valve portion 40 of the valve body portion 30, a small columnar portion 45 is provided on the contact surface portion 41 with the valve seat portion 25 side. The small columnar part 45 protrudes from the valve part 40 and extends into the connection flow path part 22. The valve portion 40 is formed of a fluororesin such as PTFE or PFA, like the base block 11. Therefore, a cylindrical columnar portion 45 is also formed in conjunction with the formation of the valve portion 40. The material of the valve part 40 of this embodiment is PTFE, and the valve part 40 itself, the small columnar part 45, the diaphragm part 35, and the flange part 34 are processed and formed by cutting. When the small columnar portion 45 is cylindrical, cutting is simple and easy. In the figure, reference numeral 42 denotes a connection concave part (female screw part), 43 denotes a connection convex part (male screw part), and the valve part 40 and the shaft body part 31 are fixed by screwing.

  Further, as can be understood from FIG. 5, the overall length (L) of the small columnar portion 45 is formed longer than the overall length (C) of the connection flow path portion 22. That is, a part of the small columnar part 45 is exposed from the connection flow path part 22 even when the valve part 40 is in contact with the valve seat part 25. If it carries out like this, the 2nd fluid which distribute | circulates the 2nd fluid flow-path part 15 will collide with the small columnar part 45 easily. Therefore, the small columnar part 45 is a member for disturbing the flow of the second fluid flowing through the second fluid flow path part 15.

  In addition, the flow of the second fluid in the vicinity of the small columnar portion 45 will be described using the schematic diagram of FIG. Since the small columnar portion 45 is present in the second fluid flow path portion 15, the second fluid flowing through the second fluid flow path portion 15 is estimated to be the flow of each arrow in FIG. 6 (a). . The second fluid flows from the outflow opening 24 into the connection flow path portion 22. Here, the first fluid remaining in the connection flow path portion 22 is washed away together with the second fluid. In addition, the second fluid goes down in the drawing so as to avoid the small columnar portion 45 and also flows behind the small columnar portion 45 (downstream side). The second fluid also enters the connection flow path portion 22. Here again, the first fluid remaining in the connection flow path portion 22 is washed away together with the second fluid. Since the flow velocity of the second fluid changes through the collision between the second fluid and the small columnar portion 45 and the fluid pressure of the second fluid also changes, it is considered that the second fluid can be circulated into the connection flow path portion 22. It is done.

  FIG. 6B is an estimation diagram of the flow of the second fluid in the cross section of the small columnar portion 45. When the second fluid that has circulated from the left side (upstream side) of the figure collides with the small columnar portion 45, a part of the second fluid circulates in the second fluid flow path portion 15 as it is. At the same time, a part of the second fluid flows to the right side (downstream side) of the small columnar part 45, and a fine vortex of the second fluid is generated on the downstream side of the small columnar part 45. The vortex of the second fluid is a phenomenon called Karman vortex. As described above, the flow of the second fluid is complicated three-dimensionally around the small columnar portion 45. As a result, the Karman vortex of the second fluid generated on the downstream side of the small columnar portion 45 and the flow of the second fluid entrained in the first fluid remaining in the connection flow path portion 22 are more easily mixed. As a result, the first fluid staying in the connection flow path portion 22 is quickly washed away.

  Each drawing of FIG. 7 is an example of another embodiment relating to the valve portion 40 and the valve seat portion 25 of the valve body portion 30. In (a), the contact surface portion 41 of the valve portion 40 is a flat portion 44. The small columnar portion 45 is provided (formed) in the center of the flat portion 44. In (b), the contact surface portion 41 of the valve portion 40 is a flat portion 44, and a valve body annular protrusion 46 (valve body annular seal portion) is formed on the flat portion 44. In (c), the contact surface portion 41 of the valve portion 40 is a flat portion 44. A valve seat annular protrusion 26 (valve seat annular seal portion) is formed on the valve seat portion 25 side to be contacted. In both (b) and (c), the small columnar portion 45 protrudes from the center of the flat portion 44. Further, (d) is an example in which a truncated cone-shaped small columnar portion 47 is formed on the contact surface portion 41 of the valve body. In the structure of the valve body in FIG. 7A, the contact surface is increased. In the case of the structure of the valve body and the valve seat portion shown in FIGS. 7B and 7C, the sealing performance between the members is enhanced by line contact. In addition, in the structure of the small columnar part in FIG. 7D, it is considered that the flow of the fluid flowing is more complicated than in the case of a simple cylindrical shape.

  FIG. 8 is a cross-sectional view of a manifold valve 80 in which a plurality of valves 10 disclosed in FIGS. 1 to 6 are combined. Each valve 10 is formed by combining a plurality of second fluid flow path portions 15 with each other. In the figure, there are three combinations. In addition, since the structure of each valve | bulb 10 is the same as that of above-mentioned, each code | symbol is used and description is abbreviate | omitted. Further, the connection structure between the valves is omitted because it is appropriate. The illustrated manifold valve 80 can supply (circulate) three types of first fluids (sub-fluids), which is the number of valves 10 arranged, to one type of second fluid (main fluid). Therefore, the types of fluids that can be mixed can be freely increased or decreased by changing the number of valves constituting one manifold valve. Particularly, since each valve is integrated as a single manifold valve, the liquid contact area is reduced, which is convenient for maintaining the cleanliness of the fluid. In addition, installation space is also saved. In the leftmost valve 10 in the figure, the valve body 30 (valve portion 40) is separated from the valve seat portion 25, and the first fluid enters the second fluid passage portion 15 via the connection passage portion 22. Inflow. In the drawing, in the central and rightmost valves 10, the valve body portion 30 (valve portion 40) is in contact (sitting) with the valve seat portion 25. That is, the inflow of the first fluid from the valve is stopped.

  Next, a specific usage example of the manifold valve 80 will be described. The schematic diagram of FIG. 9 is an example of a single wafer processing substrate processing apparatus that processes silicon wafers W one by one. The silicon wafer W is placed on the rotating disk of the spin chuck 1. A processing liquid nozzle 2 that discharges a processing liquid (mixed fluid) is provided immediately above the silicon wafer W. A processing liquid for cleaning the silicon wafer W is supplied to the processing liquid nozzle 2 through the fluid pipe 3. The treatment liquid is the first fluid (sub-fluid) and the second fluid (main fluid) described above. The first fluid is stored in the supply units 9S1, 9S2, and 9S3 for each type, and is supplied to the manifold valve 80 through the fluid pipes 3s1, 3s2, and 3s3 corresponding to the respective supply units. The second fluid is also stored in the supply unit 9M and supplied to the manifold valve 80 through the fluid pipe 3m.

  A flow rate control valve 4 and a fluid flow rate detection unit 6 are connected to each fluid pipe 3m, 3s1, 3s2, and 3s3 by pipes. The flow control valve 4 is a valve that stabilizes the fluid supply by stabilizing the flow rate and fluid pressure. The flow rate detection unit 6 is a known flow rate sensor, temperature sensor, or concentration sensor, and the circulating fluid is monitored.

  The supplied first fluid and second fluid are uniformly mixed in the manifold valve 80 and supplied to the processing liquid nozzle 2 through the fluid pipe 3. Supply of each first fluid and second fluid, and fluid mixing in the manifold valve 80 are controlled by the arithmetic and control unit 5. The arithmetic control device 5 includes an arithmetic unit 7 and a control unit 8.

  The calculation unit 7 is a known calculation device such as a microcomputer or a PLC (programmable logic controller). A signal for controlling the flow rate of the flow rate control valve 4 is generated in accordance with an instruction from the outside or a change in the measured flow rate value of the controlled fluid detected by the flow rate detection unit 6. The control unit 8 is an electropneumatic converter that supplies pressurized gas adjusted to a predetermined pressure necessary for the drive unit of the valve body in each flow control valve 4. When the drive unit in the flow control valve 4 is a stepping motor, a servo motor or the like, a pulse transmitter, a controller, a driver, or the like necessary for the drive is provided. The flow control valve 4 and the flow rate detection unit 6 are connected to the calculation control device 5 (the calculation unit 7 and the control unit 8) by a signal line sg. The signal line sg includes electrical signal wiring and pressurized gas supply piping. In the illustrated example, a pressurized gas supply pipe is connected to the manifold valve 80 as a signal line sg with the arithmetic control device 5.

  In the case of the illustrated single wafer type substrate processing apparatus, the use portion of the mixed fluid is arranged directly downstream of the manifold valve 80. Therefore, as described in the structure of the valve body portion 30 (valve portion 40) of the valve 10 of the manifold valve 80, since the fluid is likely to be mixed, the manifold valve 80 (the valve 10) It can be said that it is useful for reducing waste of fluid at the time of switching and for early stabilization of the quality of the mixed fluid. As a result, it greatly contributes to stabilizing the quality of manufactured products and reducing costs.

  The field of use of the valve and manifold valve of the present invention is not limited to the semiconductor manufacturing field described above. For example, it is also used in fields such as fluid mixing devices in the chemical industry and pharmaceutical manufacturing, biomedical devices for mixing drugs, and fuel supply control devices.

  With the structural improvement of the valve body (valve) of the valve of the present invention, the mixing efficiency of the fluid flowing through the interior increases. This contributes to reduction of fluid waste during fluid switching and early stabilization of the quality of the mixed fluid. Furthermore, by using a manifold valve in which a plurality of such valves are combined, it is possible to reduce the waste of the fluid and to stabilize the quality of the mixed fluid at an early stage even in complicated mixing with an increased number of fluids.

DESCRIPTION OF SYMBOLS 10 Valve 11 Base block 12 Housing block 13 Fixed block 15 2nd fluid flow-path part 16 Upstream part opening 17 Downstream part opening 20 Inflow chamber 21 1st fluid inflow part 22 Connection flow-path part 23 Inflow opening part 24 Outflow opening part 25 Valve Seat 26 Valve seat annular projection (valve seat annular seal)
DESCRIPTION OF SYMBOLS 30 Valve body part 31 Shaft body part 32 Piston head 33 Piston space part 34 Flange part 35 Diaphragm part 40 Valve part 41 Contact surface part 44 Flat part 45, 47 Small columnar part 46 Valve body cyclic | annular protrusion (valve ring annular seal part) )
DESCRIPTION OF SYMBOLS 50 Drive part 51 1st air port 52 2nd air port 55 Energizing spring 80 Manifold valve 1 Spin chuck 2 Process liquid nozzle 3 Fluid piping 4 Flow rate control valve 5 Control apparatus 6 Flow rate detection part 7 Calculation part 8 Control part W Silicon wafer

Claims (5)

An inflow chamber provided with a first fluid inflow portion into which the first fluid flows;
A second fluid flow path section through which the second fluid flows from the upstream opening to the downstream opening;
A connection flow path portion that connects the inflow chamber and the second fluid flow path portion and circulates the first fluid from the inflow chamber to the second fluid flow path portion side;
A valve seat portion formed in the opening on the inflow chamber side of the connection flow path portion;
A valve body portion provided with a diaphragm portion that is disposed in the inflow chamber and that abuts against the valve seat portion to stop the inflow and inflow of the first fluid into the second fluid flow path portion;
A small columnar portion that is provided on a contact surface portion of the valve body portion toward the valve seat portion and extends into the connection flow path portion and is longer than the entire length of the connection flow path portion. And a valve.   2. The valve according to claim 1, wherein the first fluid inflow portion, the second fluid passage portion, the inflow chamber, the connection passage portion, and the valve seat portion are formed inside one base block. .   The valve according to claim 1 or 2, wherein the small columnar part has a cylindrical shape.   The valve according to any one of claims 1 to 3, wherein the valve body portion is driven forward and backward by an inflow and outflow of pressurized gas.   A manifold valve comprising a plurality of second fluid flow path portions of the valve according to claim 1 in combination with each other.

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