JP2017140766A

JP2017140766A - Metal mask for screen printing

Info

Publication number: JP2017140766A
Application number: JP2016023495A
Authority: JP
Inventors: 泰行馬場; Yasuyuki Baba
Original assignee: Bon Mark Co Ltd
Current assignee: Bon Mark Co Ltd
Priority date: 2016-02-10
Filing date: 2016-02-10
Publication date: 2017-08-17

Abstract

PROBLEM TO BE SOLVED: To obtain a metal mask for screen printing suitable for forming a finger electrode of a solar battery.SOLUTION: A printing pattern region that is formed at a center part of a metal mask and in which many finger opening parts for forming a finger electrode are formed, and many mesh opening parts that is formed so as to surround many finger opening parts and made of an opening dimension smaller than an opening dimension of the finger opening part are provided, in which the finger opening part is formed by arranging many finger opening part element assemblies each of which is formed of a horizontally long rectangular regularly in a line in a direction orthogonal to a longitudinal direction, the mesh opening part surrounding a circumference of the finger opening part is formed from an aggregate of a square or rectangular mesh opening part element assemblies that are smaller than an opening dimension in the longitudinal direction of each finger opening part element assembly and has a dimension identical as a dimension in a shorter direction of each finger opening part element assembly.SELECTED DRAWING: Figure 7

Description

この発明は、太陽電池のフィンガー電極を形成するためのスクリーン印刷用メタルマスクに関するものである。 The present invention relates to a metal mask for screen printing for forming a finger electrode of a solar cell.

従来、太陽電池のフィンガー電極を形成するためのスクリーン印刷法で用いられているスクリーン製版は、互いに直交する経糸と横糸を編み込んだＳＵＳメッシュ材を、感光性の乳剤で被覆するとともに、この乳剤を露光により一部除去することによって略長方形のパターン孔を形成して形成される。しかし、ＳＵＳメッシュ材からなるメッシュマスクを用いたスクリーン印刷では、太陽電池のフィンガー電極の細線化に伴い、例えば約１００μｍ幅の細線電極の形成が困難であったため、近年ではメッシュ材の代わりにメタルマスクが用いられるようになってきた。このようなメタルマスクとしては、フィンガー電極を形成するための導電性ペーストを吐出するための１つ以上のフィンガー開口部を有する印刷用パターン領域を有し、印刷用パターン領域の外側に補助開口を有するものが知られている（例えば、特許文献１参照）。
また、他の先行技術として、金属メッシュクロスであって、２組の互いに垂直なメッシュ線からなるメッシュ領域が設けられ、メッシュ領域の中央領域にはパターン領域が設けられ、パターンは金属メッシュクロスが横方向又は縦方向にメッシュ線を欠損することで構成されるものが知られている（例えば、特許文献２参照）。 Conventionally, screen plate making used in a screen printing method for forming finger electrodes of a solar cell coats a SUS mesh material in which warp yarns and weft yarns orthogonal to each other are coated with a photosensitive emulsion. By removing a part by exposure, a substantially rectangular pattern hole is formed. However, in screen printing using a mesh mask made of SUS mesh material, it has been difficult to form a thin wire electrode having a width of, for example, about 100 μm with the thinning of finger electrodes of solar cells. Masks have come to be used. As such a metal mask, it has a printing pattern region having one or more finger openings for discharging a conductive paste for forming finger electrodes, and an auxiliary opening is provided outside the printing pattern region. What has is known (for example, refer patent document 1).
As another prior art, a metal mesh cloth is provided with a mesh region composed of two sets of mesh lines perpendicular to each other, a pattern region is provided in the center region of the mesh region, and the pattern is a metal mesh cloth. What is comprised by lacking a mesh line in the horizontal direction or the vertical direction is known (for example, refer patent document 2).

特開２０１５−１１２８３２号公報JP 2015-111282 A 特表２０１５−５１９２２３号公報（図５−図８）JP-T-2015-519223 (FIGS. 5-8)

従来のフィンガー電極を形成するための導電性ペーストを吐出するための１つ以上のフィンガー開口部を有する印刷用パターン領域を有し、印刷用パターン領域の外側に補助開口を有するメタルマスクでは、補助開口が印刷用パターン領域の一部（上下部）に直線状、ドットパターン一列、ドットパターン三列、四角形状、台形状、直線状二列に形成されているだけであるので、メタルマスク中の伸縮の少ない部分（最も外側に位置するフィンガー開口付近のメタル部分）のみに局所的に伸縮性を与えるだけのものであった。また、従来のメッシュ領域の中央領域にはパターン領域が設けられ、パターンは金属メッシュクロスが横方向又は縦方向にメッシュ線を欠損することで構成される金属メッシュクロスでは、パターン及びパターン周囲の金属めっき部分の面積が少ないため、耐久性が低下するという課題があった。 In a conventional metal mask having a printing pattern area having one or more finger openings for discharging a conductive paste for forming finger electrodes, and having an auxiliary opening outside the printing pattern area, Since the openings are only formed in a part of the printing pattern area (upper and lower parts) in a straight line, a dot pattern line, a dot pattern three line, a square shape, a trapezoidal shape, and two straight lines, Only the portion with little expansion / contraction (the metal portion near the finger opening located on the outermost side) was only given local elasticity. In addition, a pattern area is provided in the center area of the conventional mesh area, and the pattern is a metal mesh cloth formed by missing a mesh line in the horizontal direction or the vertical direction. Since the area of the plating portion is small, there is a problem that durability is lowered.

この発明は、上述のような課題を解決するためになされたもので、太陽電池のフィンガー電極を形成するために適したスクリーン印刷用メタルマスクを提供するものである。 The present invention has been made to solve the above-described problems, and provides a screen printing metal mask suitable for forming finger electrodes of solar cells.

この発明に係るスクリーン印刷用メタルマスクにおいては、メッキにより薄厚の平板状に形成され、太陽電池のフィンガー電極を形成するためのものであって、メタルマスクの中央部に形成され、フィンガー電極を形成するための導電性ペーストを吐出する多数のフィンガー開口部が形成された印刷用パターン領域と、印刷用パターン領域の多数のフィンガー開口部の周囲を取り囲むように形成され、フィンガー開口部の開口寸法よりも小さい開口寸法からなる多数のメッシュ開口部と、を備え、多数のフィンガー開口部は、それぞれ横長の長方形状からなる各フィンガー開口部素体を長手方向と直交する方向に一列となるように規則正しく多数配置したものであり、フィンガー開口部の周囲を取り囲むように形成されるメッシュ開口部は、各フィンガー開口部素体の長手方向の開口寸法よりも小さく、各フィンガー開口部素体の短手方向の開口寸法と同等寸法以上となる正方形状又は長方形状のメッシュ開口部素体の集合体により形成されているものである。 The metal mask for screen printing according to the present invention is formed into a thin flat plate shape by plating, and is used to form a finger electrode of a solar cell, and is formed at the center of the metal mask to form the finger electrode The pattern area for printing in which a large number of finger openings for discharging the conductive paste to be formed are formed, and the circumference of the large number of finger openings in the pattern area for printing is formed. A large number of mesh openings, each of which has a small opening size, and each of the finger openings is regularly arranged in a row in a direction perpendicular to the longitudinal direction. A large number of mesh openings formed so as to surround the periphery of the finger openings, Formed by a collection of square or rectangular mesh opening elements that are smaller than the opening dimension in the longitudinal direction of the finger opening element body and equal to or larger than the opening dimension in the short direction of each finger opening element element It is what has been.

また、印刷用パターン領域に形成されるフィンガー開口部の各フィンガー開口部素体は、横長の長方形の四隅を丸めた隅丸状を呈しており、印刷パターンとして必要な各フィンガー開口部素体の中央のみを貫通孔として残し、各フィンガー開口部素体の隅丸を含む両端部と、その周囲のメッシュ開口部素体を塞ぐようにマスキング物質で埋めるものである。 In addition, each finger opening element body of the finger opening formed in the pattern area for printing has a rounded shape obtained by rounding four corners of a horizontally long rectangle, and each finger opening element body necessary as a printing pattern is formed. Only the center is left as a through hole, and both end portions including the corners of each finger opening portion element body and the mesh opening element body surrounding it are filled with a masking substance.

また、印刷用パターン領域に形成されるフィンガー開口部の各フィンガー開口部素体は、横長の楕円形状又はカプセル状からなり、印刷パターンとして必要な各フィンガー開口部素体の中央のみを貫通孔として残し、各フィンガー開口部素体の両端部半円部分と、その周囲のメッシュ開口部素体を塞ぐようにマスキング物質で埋めるものである。 In addition, each finger opening element body of the finger opening formed in the pattern area for printing has a horizontally long elliptical shape or capsule shape, and only the center of each finger opening element body necessary as a printing pattern is a through hole. It is left and it fills with a masking substance so that the both-ends semicircle part of each finger opening element | base_body and the mesh opening element | element body of the circumference | surroundings may be plugged up.

また、メタルマスクの印刷用パターン領域の外側に形成されたテンション緩衝領域と、
メタルマスクのテンション緩衝領域の外側周縁部に形成され、版枠にテンションが掛かるように張られる合成樹脂製メッシュ又は金属製メッシュが接合される接合部領域と、を更に備え、テンション緩衝領域には、印刷用パターン領域に形成される多数のメッシュ開口部素体よりも小さい丸円形状のメッシュ開口部素体が多数形成されているものである。 Further, a tension buffer region formed outside the pattern region for printing of the metal mask,
A synthetic resin mesh formed on the outer peripheral edge of the tension buffering region of the metal mask, and a joint region to which a mesh made of synthetic resin or a metal mesh is bonded so that tension is applied to the plate frame. A large number of round circular mesh opening elements that are smaller than the large number of mesh opening elements formed in the pattern area for printing are formed.

また、テンション緩衝領域に多数形成される丸円形状のメッシュ開口部素体は、メタルマスクの印刷用パターン領域の外側の３０〜５０ｍｍの範囲内に形成するものである。 A large number of round circular mesh opening elements formed in the tension buffer region are formed within a range of 30 to 50 mm outside the pattern region for printing of the metal mask.

また、版枠と、前記版枠にテンションが掛かるように張られ、メタルマスクのテンション緩衝領域の外側周縁部に形成された接合部領域に接合される合成樹脂製メッシュ又は金属製メッシュとを更に備えたスクリーン印刷用メタルマスク版である。 Further, a plate frame and a synthetic resin mesh or a metal mesh that is stretched so that tension is applied to the plate frame and is bonded to a joint region formed on the outer peripheral edge of the tension buffer region of the metal mask. A metal mask plate for screen printing provided.

この発明によれば、メッキにより薄厚の平板状に形成された太陽電池のフィンガー電極を形成するために好適なスクリーン印刷用メタルマスクを得ることができる。特に、メッキを使うことにより、フィンガー電極の細線化に適した高密度メッシュを実現することができる。 According to the present invention, it is possible to obtain a metal mask for screen printing suitable for forming a finger electrode of a solar cell formed into a thin flat plate shape by plating. In particular, by using plating, a high-density mesh suitable for thinning finger electrodes can be realized.

版枠にコンビネーション張りされたスクリーン印刷用メタルマスクを示す全体の平面図である。It is the whole top view which shows the metal mask for screen printing by which the combination was attached to the plate frame. スクリーン印刷用メタルマスクの印刷用パターン領域を示す平面図である。It is a top view which shows the pattern area for printing of the metal mask for screen printing. この発明の実施例１におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部を拡大して示す拡大平面図である。It is an enlarged plan view which expands and shows a part of printing pattern area | region of the metal mask for screen printing in Example 1 of this invention. この発明の実施例１におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を拡大して示す部分拡大平面図である。It is a partial expanded plan view which expands and shows a finger opening part and the mesh opening part of the circumference | surroundings among a part of printing pattern area | region of the metal mask for screen printing in Example 1 of this invention. この発明の実施例１におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図である。It is the schematic diagram which represented typically the finger opening part and the mesh opening part of the circumference | surroundings among a part of printing pattern area | region of the metal mask for screen printing in Example 1 of this invention. 図５のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを残しフィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填した状態を示す模式図である。5 shows a state in which a masking substance is applied and filled at both ends of the finger openings and the surrounding mesh openings, leaving only the finger openings necessary as a printing pattern out of a part of the printing pattern area of the screen printing metal mask of FIG. It is a schematic diagram which shows. この発明の実施例２におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図である。It is the schematic diagram which represented typically the finger opening part and the mesh opening part of the circumference | surroundings among a part of printing pattern area | region of the metal mask for screen printing in Example 2 of this invention. 図７のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを残しフィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填した状態を示す模式図である。A state in which only a finger opening necessary as a printing pattern is left out of a part of the printing pattern area of the metal mask for screen printing in FIG. 7 and a masking substance is applied and filled at both ends of the finger opening and the surrounding mesh openings. It is a schematic diagram which shows. この発明の実施例３におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図である。It is the schematic diagram which represented typically the finger opening part and the mesh opening part of the circumference | surroundings among a part of printing pattern area | region of the metal mask for screen printing in Example 3 of this invention. 図９のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを残しフィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填した状態を示す模式図である。9 shows a state in which a masking substance is coated and filled at both ends of the finger opening and the surrounding mesh opening, leaving only the finger opening necessary as a printing pattern out of a part of the printing pattern area of the metal mask for screen printing in FIG. It is a schematic diagram which shows. この発明の実施例４におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図である。It is the schematic diagram which represented typically the finger opening part and the mesh opening part of the circumference | surroundings among a part of printing pattern area | region of the metal mask for screen printing in Example 4 of this invention. 図１１のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを残しフィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填した状態を示す模式図である。A state in which only a finger opening necessary as a printing pattern is left out of a part of a printing pattern area of the metal mask for screen printing shown in FIG. 11 and a masking substance is applied and filled at both ends of the finger opening and the surrounding mesh openings. It is a schematic diagram which shows.

実施例１．
図１は版枠にコンビネーション張りされたスクリーン印刷用メタルマスクを示す全体の平面図、図２はスクリーン印刷用メタルマスクの印刷用パターン領域を示す平面図である。
太陽電池のフィンガー電極を形成するためのスクリーン印刷用メタルマスクは、図１に示すように、ニッケルメッキにより薄厚の平板状に形成されたスクリーン印刷用メタルマスク１の外周に伸縮性のあるポリエステルのメッシュ２を接合し、スクリーン印刷用メタルマスク１に外側のテンションが掛かるようにポリエステル等の合成樹脂製メッシュ２の外周部を版枠３に接着固定したものである。したがって、メッキにより薄厚の平板状に形成されたスクリーン印刷用メタルマスク１は、ポリエステル等の合成樹脂製メッシュ２により常に大きなテンションが掛かる。そして、このメッキにより薄厚の平板状に形成されたスクリーン印刷用メタルマスク１の中央部には、メッキ形成時に印刷用パターン領域４が形成されており、この印刷用パターン領域４には、メッキ形成時にフィンガー電極を形成するための導電性ペーストを吐出する多数のフィンガー開口部５が、例えば左右方向に並列でかつ上下方向に３段となるように形成されている。このフィンガー開口部５の線幅は、約１００μｍ程度である。スクリーン印刷用メタルマスク１の周縁部は、ポリエステル等の合成樹脂製メッシュ２との接合部領域６である。また、印刷用パターン領域４の外側と接合部領域６の内側との間はテンション緩衝領域７である。
図３はこの発明の実施例１におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部を拡大して示す拡大平面図であり、この発明の印刷用パターン領域４は、フィンガー電極を形成するための導電性ペーストを吐出する多数のフィンガー開口部５だけではなく、フィンガー開口部５の周囲にもフィンガー開口部５の開口寸法（例えば、１００μｍ×４０μｍ、ギャップは１６μｍ）よりも小さい開口寸法（例えば、３９μｍ×３８μｍ、ギャップは２０μｍ）からなるメッシュ開口部８が多数形成されている。図４はこの発明の実施例１におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を拡大して示す部分拡大平面図であり、フィンガー電極を形成するための導電性ペーストを吐出する多数のフィンガー開口部５は、それぞれ横長の長方形状からなる各フィンガー開口部素体５１を長手方向と直交する方向に一列となるように規則正しく多数配置したものであり、各フィンガー開口部素体５１は長方形の四隅を丸めた隅丸状を呈している。また、多数のフィンガー開口部５の周囲を取り囲む部分には、各フィンガー開口部素体５１の長手方向の開口寸法よりも小さく、各フィンガー開口部素体５１の短手方向の開口寸法と同等寸法となる略正方形状の小開口からなるメッシュ開口部素体８１の集合体によりメッシュ開口部８が形成されている。
図５はこの発明の実施例１におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図で、フィンガー開口部５は、それぞれ横長の長方形状からなる各フィンガー開口部素体５１を長手方向と直交する方向に一列となるように４段に省略して配置した例を示すものであり、各フィンガー開口部素体５１のうちの最上部上方及び最下部下方に配置されるメッシュ開口部素体８２の形状を判り易く表したものである。すなわち、このメッシュ開口部素体８２は、各フィンガー開口部素体５１の長手方向の開口寸法よりも小さいが、その周囲の略正方形状のメッシュ開口部素体８１の長手方向の開口寸法よりも若干大きい開口寸法となった長方形状である。そして、略正方形状のメッシュ開口部素体８１と長方形状のメッシュ開口部素体８２の集合体によりフィンガー開口部５の周囲を取り囲むメッシュ開口部８が形成されている。
図６は図５のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを貫通孔として残し、フィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填して塞いだ状態を示すものであり、印刷パターンとして必要な各フィンガー開口部素体５１の中央のみを貫通孔として残し、各フィンガー開口部素体５１の隅丸を含む両端部と、その周囲のメッシュ開口部素体８１、８２を塞ぐようにマスキング物質９を塗布充填したものである。なお、メッシュ開口部８、各メッシュ開口部素体８１、８２は、多数のフィンガー開口部５の周囲を取り囲む部分だけでなく、印刷用パターン領域４の外側とポリエステルのメッシュ２が接合される接合部領域６の内側との間に形成されるテンション緩衝領域７に形成しても良い。また必要があれば、ポリエステルのメッシュ２との接合部領域６に形成しても良い。この場合、各メッシュ開口部素体８１、８２の形状は、四角形状、長方形状だけに限らず、丸円形状であっても良い。
これにより、印刷に供されるフィンガー開口部５の中央のみが貫通孔として残るだけで、それ以外のフィンガー開口部５の両端部の隅丸部分を含み、フィンガー開口部５の周囲のメッシュ開口部８はマスキング物質９を塗布充填することで埋められて塞がれているので、印刷に供されることはない。 Example 1.
FIG. 1 is an overall plan view showing a screen printing metal mask combined with a plate frame, and FIG. 2 is a plan view showing a printing pattern area of the screen printing metal mask.
As shown in FIG. 1, the screen printing metal mask for forming the finger electrode of the solar cell is made of a stretchable polyester on the outer periphery of the screen printing metal mask 1 formed into a thin flat plate shape by nickel plating. The mesh 2 is joined, and the outer peripheral portion of a mesh 2 made of synthetic resin such as polyester is bonded and fixed to the plate frame 3 so that an outer tension is applied to the screen printing metal mask 1. Accordingly, the screen printing metal mask 1 formed into a thin flat plate shape by plating is always subjected to a large tension by the synthetic resin mesh 2 such as polyester. A printing pattern region 4 is formed in the central portion of the screen printing metal mask 1 formed into a thin flat plate shape by this plating at the time of plating formation. In this printing pattern region 4, plating is formed. Sometimes, a large number of finger openings 5 for discharging a conductive paste for forming finger electrodes are formed, for example, in parallel in the left-right direction and in three steps in the up-down direction. The line width of the finger opening 5 is about 100 μm. The peripheral portion of the screen printing metal mask 1 is a joint region 6 with a synthetic resin mesh 2 such as polyester. Further, a tension buffering region 7 is provided between the outside of the printing pattern region 4 and the inside of the joint region 6.
FIG. 3 is an enlarged plan view showing an enlarged part of the printing pattern area of the screen printing metal mask according to the first embodiment of the present invention. The printing pattern area 4 of the present invention is for forming finger electrodes. In addition to a large number of finger openings 5 for discharging the conductive paste, an opening size smaller than the opening size of the finger openings 5 (for example, 100 μm × 40 μm, the gap is 16 μm) around the finger openings 5 (for example, , 39 μm × 38 μm, and the gap is 20 μm). FIG. 4 is a partially enlarged plan view showing a finger opening and a surrounding mesh opening in a part of a printing pattern region of the screen printing metal mask according to the first embodiment of the present invention. A large number of finger openings 5 for discharging a conductive paste for forming a plurality of finger openings 5 are regularly arranged in a row perpendicular to the longitudinal direction. Each finger opening element body 51 has a rounded corner shape obtained by rounding four corners of a rectangle. In addition, the portion surrounding the periphery of the large number of finger openings 5 is smaller than the opening dimension in the longitudinal direction of each finger opening element body 51 and is the same as the opening dimension in the short direction of each finger opening element body 51. The mesh opening 8 is formed by an assembly of mesh opening element bodies 81 each having a substantially square small opening.
FIG. 5 is a schematic view schematically showing a finger opening and a mesh opening around the part of a printing pattern region of the screen printing metal mask according to the first embodiment of the present invention. FIG. 11 shows an example in which each finger opening element body 51 made of a horizontally long rectangular shape is omitted in four steps so as to form a line in a direction perpendicular to the longitudinal direction. Among these, the shape of the mesh opening element body 82 arranged above the uppermost part and below the lowermost part is shown in an easily understandable manner. That is, the mesh opening element body 82 is smaller than the opening dimension in the longitudinal direction of each finger opening element body 51, but is larger than the opening dimension in the longitudinal direction of the substantially square mesh opening element body 81 around it. A rectangular shape with a slightly larger opening size. A mesh opening 8 that surrounds the periphery of the finger opening 5 is formed by an assembly of the substantially square mesh opening element 81 and the rectangular mesh opening element 82.
6 leaves only the finger openings necessary as a printing pattern as a through hole in a part of the printing pattern area of the screen printing metal mask of FIG. 5, and the both ends of the finger opening and the mesh openings around the finger opening. It shows a state in which the masking substance is applied and filled and closed, leaving only the center of each finger opening element body 51 necessary as a printing pattern as a through hole, and both ends including the rounded corners of each finger opening element body 51 The masking substance 9 is applied and filled so as to close the portion and the mesh opening element bodies 81 and 82 around the portion. The mesh openings 8 and the mesh opening elements 81 and 82 are joined not only to the portions surrounding the periphery of the large number of finger openings 5, but also to the outside of the printing pattern region 4 and the polyester mesh 2. You may form in the tension buffer area | region 7 formed between the inside of the partial area | region 6. FIG. If necessary, it may be formed in the joint region 6 with the polyester mesh 2. In this case, the shape of each mesh opening element body 81 and 82 is not limited to a square shape or a rectangular shape, but may be a round shape.
As a result, only the center of the finger opening 5 used for printing remains as a through hole, including the rounded corners at both ends of the other finger opening 5, and the mesh opening around the finger opening 5. Since 8 is filled and closed by applying and filling the masking substance 9, it is not used for printing.

実施例２.
図７はこの発明の実施例２におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図で、フィンガー開口部５は、それぞれ横長の楕円形状又はカプセル状からなる各フィンガー開口部素体５２を長手方向と直交する方向に一列となるように４段に省略して配置した例を示すものである。ここで、横長の楕円形状又はカプセル状からなる各フィンガー開口部素体５２は、丸円の集合体を左右方向に連続して多数重ねるようにすることで形成している。各フィンガー開口部素体５２のうちの最上部上方及び最下部下方に配置されるメッシュ開口部素体８２の形状を判り易く表したものである。すなわち、このメッシュ開口部素体８２は、各フィンガー開口部素体５２の長手方向の開口寸法よりも小さいが、その周囲の略正方形状のメッシュ開口素体８１の長手方向の開口寸法よりも若干大きい開口寸法となった長方形状である。そして、略正方形状のメッシュ開口部素体８１と長方形状のメッシュ開口部素体８２の集合体によりフィンガー開口部５の周囲を取り囲むメッシュ開口部８が形成されている。
図８は図７のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを貫通孔として残し、フィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填して塞いだ状態を示すものであり、印刷パターンとして必要な楕円形状又はカプセル状の各フィンガー開口部素体５２の中央のみを貫通孔として残し、楕円形状又はカプセル状の各フィンガー開口部素体５２の両端部半円部分とその周囲のメッシュ開口部素体８１、８２を塞ぐようにマスキング物質９を塗布充填したものである。なお、メッシュ開口部８、各メッシュ開口部素体８１、８２は、多数のフィンガー開口部５の周囲を取り囲む部分だけでなく、印刷用パターン領域４の外側とポリエステルのメッシュ２が接合される接合部領域６の内側との間に形成されるテンション緩衝領域７に形成しても良い。また必要があれば、ポリエステルのメッシュ２との接合部領域６に形成しても良い。この場合、各メッシュ開口部素体８１、８２の形状は、四角形状、長方形状だけに限らず、丸円形状であっても良い。
これにより、印刷に供されるフィンガー開口部５の中央のみが貫通孔として残るだけで、それ以外のフィンガー開口部５の両端部半円部分を含み、フィンガー開口部５の周囲のメッシュ開口部８はマスキング物質９を塗布充填することで埋められて塞がれているので、印刷に供されることはない。 Example 2.
FIG. 7 is a schematic view schematically showing a finger opening and a mesh opening around the part of a printing pattern area of the screen printing metal mask according to the second embodiment of the present invention. In this example, the finger opening element bodies 52 each having a horizontally long oval shape or a capsule shape are omitted and arranged in four rows so as to form a line in a direction orthogonal to the longitudinal direction. Here, each finger opening element body 52 having a horizontally long elliptical shape or a capsule shape is formed by stacking a large number of round circle assemblies continuously in the left-right direction. The shape of the mesh opening element body 82 arranged above the uppermost part and below the lowermost part of each finger opening element body 52 is shown in an easily understandable manner. That is, the mesh opening element body 82 is smaller than the opening dimension in the longitudinal direction of each finger opening element body 52, but is slightly smaller than the opening dimension in the longitudinal direction of the surrounding square-shaped mesh opening element body 81. A rectangular shape with a large opening size. A mesh opening 8 that surrounds the periphery of the finger opening 5 is formed by an assembly of the substantially square mesh opening element 81 and the rectangular mesh opening element 82.
8 leaves only the finger openings necessary as a printing pattern as a through hole in a part of the printing pattern area of the screen printing metal mask of FIG. 7, and the both ends of the finger opening and the mesh openings around the finger opening. It shows a state where the masking substance is applied and filled and closed, leaving only the center of each elliptical or capsule-shaped finger opening element body 52 required as a printing pattern as a through hole, and each elliptical or capsule-shaped The masking substance 9 is applied and filled so as to close the semicircular portions at both ends of the finger opening element body 52 and the surrounding mesh opening element bodies 81 and 82. The mesh openings 8 and the mesh opening elements 81 and 82 are joined not only to the portions surrounding the periphery of the large number of finger openings 5, but also to the outside of the printing pattern region 4 and the polyester mesh 2. You may form in the tension buffer area | region 7 formed between the inside of the partial area | region 6. FIG. If necessary, it may be formed in the joint region 6 with the polyester mesh 2. In this case, the shape of each mesh opening element body 81 and 82 is not limited to a square shape or a rectangular shape, but may be a round shape.
As a result, only the center of the finger opening 5 used for printing remains as a through-hole, and the mesh openings 8 around the finger openings 5 include the semicircular portions at both ends of the other finger openings 5. Since it is filled and closed by applying and filling the masking substance 9, it is not used for printing.

実施例３.
図９はこの発明の実施例３におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図で、フィンガー開口部５は、それぞれ横長に長い楕円形状又はカプセル状からなる各フィンガー開口部素体５３を長手方向と直交する方向に一列となるように４段に省略して配置した例を示すものである。ここで、横長に長い楕円形状又はカプセル状からなる各フィンガー開口部素体５３は、図７に示す楕円形状又はカプセル状より更に横長となるように、丸円の集合体を左右方向に連続して更に多数重ねるようにすることで形成している。各フィンガー開口部素体５３のうちの最上部上方の中央部及び最下部下方の中央部に配置されるそれぞれ２個のメッシュ開口部素体８２の形状を判り易く表したものである。すなわち、このメッシュ開口部素体８２は、各フィンガー開口部素体５３の長手方向の開口寸法よりもかなり小さいが、その周囲の略正方形状のメッシュ開口部素体８１の長手方向の開口寸法よりも若干大きい開口寸法となった長方形状である。また、各フィンガー開口部素体５３のうちの最上部上方の両端部及び最下部下方の両端部には、略正方形状のメッシュ開口部素体８１が配置される。そして、略正方形状のメッシュ開口部素体８１と長方形状のメッシュ開口部素体８２の集合体によりフィンガー開口部５の周囲を取り囲むメッシュ開口部８が形成されている。
図１０は図９のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを貫通孔として残し、フィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填して塞いだ状態を示すものであり、印刷パターンとして必要な楕円形状又はカプセル状の各フィンガー開口部素体５３の中央のみを貫通孔として残し、楕円形状又はカプセル状の各フィンガー開口部素体５３の両端部半円部分とその周囲のメッシュ開口部素体８１、８２を塞ぐようにマスキング物質９を塗布充填したものである。なお、メッシュ開口部８、各メッシュ開口部素体８１、８２は、多数のフィンガー開口部５の周囲を取り囲む部分だけでなく、印刷用パターン領域４の外側とポリエステルのメッシュ２が接合される接合部領域６の内側との間に形成されるテンション緩衝領域７に形成しても良い。また必要があれば、ポリエステルのメッシュ２との接合部領域６に形成しても良い。この場合、各メッシュ開口部素体８１、８２の形状は、四角形状、長方形状だけに限らず、丸円形状であっても良い。
これにより、印刷に供されるフィンガー開口部５の中央のみが貫通孔として残るだけで、それ以外のフィンガー開口部５の両端部半円部分を含み、フィンガー開口部５の周囲のメッシュ開口部８はマスキング物質９を塗布充填することで埋められて塞がれているので、印刷に供されることはない。 Example 3.
FIG. 9 is a schematic diagram schematically showing a finger opening and a mesh opening around the part of the printing pattern area of the screen printing metal mask according to the third embodiment of the present invention. In this example, the finger opening element bodies 53 each having a horizontally long oval shape or capsule shape are omitted and arranged in four stages so as to form a line in a direction orthogonal to the longitudinal direction. Here, each of the finger opening element bodies 53 having a horizontally long elliptical shape or capsule shape has a collection of round circles continuously in the left-right direction so as to be further horizontally long than the elliptical shape or capsule shape shown in FIG. It is formed by stacking many more. The shape of each of the two mesh opening element bodies 82 arranged in the central part above the uppermost part and the central part below the lowermost part of each finger opening element body 53 is shown in an easily understandable manner. That is, the mesh opening element body 82 is considerably smaller than the opening dimension in the longitudinal direction of each finger opening element body 53, but is larger than the opening dimension in the longitudinal direction of the substantially square mesh opening element body 81 around it. Is a rectangular shape with a slightly larger opening size. In addition, a substantially square mesh opening element body 81 is disposed at both upper end portions of the finger opening element bodies 53 and both lower end portions of the finger openings. A mesh opening 8 that surrounds the periphery of the finger opening 5 is formed by an assembly of the substantially square mesh opening element 81 and the rectangular mesh opening element 82.
10 leaves only the finger openings necessary as a printing pattern as a through hole in a part of the printing pattern region of the screen printing metal mask of FIG. 9, and the both ends of the finger opening and the mesh openings around the finger opening. It shows a state in which the masking substance is applied and filled and closed, leaving only the center of each elliptical or capsule-shaped finger opening element 53 required as a printing pattern as a through-hole, The masking substance 9 is applied and filled so as to close the semicircular portions at both ends of the finger opening element body 53 and the surrounding mesh opening element bodies 81 and 82. The mesh openings 8 and the mesh opening elements 81 and 82 are joined not only to the portions surrounding the periphery of the large number of finger openings 5, but also to the outside of the printing pattern region 4 and the polyester mesh 2. You may form in the tension buffer area | region 7 formed between the inside of the partial area | region 6. FIG. If necessary, it may be formed in the joint region 6 with the polyester mesh 2. In this case, the shape of each mesh opening element body 81 and 82 is not limited to a square shape or a rectangular shape, but may be a round shape.
As a result, only the center of the finger opening 5 used for printing remains as a through-hole, and the mesh openings 8 around the finger openings 5 include the semicircular portions at both ends of the other finger openings 5. Since it is filled and closed by applying and filling the masking substance 9, it is not used for printing.

実施例４.
図１１はこの発明の実施例４におけるスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうちフィンガー開口部とその周囲のメッシュ開口部を模式的に表した模式図で、フィンガー開口部５は、それぞれ横長に長い楕円形状又はカプセル状からなる各フィンガー開口部素体５４を長手方向と直交する方向に一列となるように４段に省略して配置した例を示すものである。ここで、横長に長い楕円形状又はカプセル状からなる各フィンガー開口部素体５４は、図７に示す楕円形状又はカプセル状より更に横長となるように、丸円の集合体を左右方向に連続して更に多数重ねるようにすることで形成している。各フィンガー開口部素体５４のうちの最上部上方及び最下部下方に配置されるそれぞれ２個のメッシュ開口部素体８３の形状を判り易く表すとともに、メタルマスク１の印刷用パターン領域４の外側約３０〜５０ｍｍの範囲に位置するテンション緩衝領域７に丸形開口からなる多数のメッシュ開口部素体８４を形成したものである。すなわち、このメッシュ開口部素体８３は、各フィンガー開口部素体５４の長手方向の開口寸法の半分の大きさで、その周囲の略正方形状のメッシュ開口素体８１の長手方向の開口寸法の倍の大きさとなった長方形状である。また、テンション緩衝領域７に形成される丸円形状からなる多数のメッシュ開口部素体８４は、略正方形状のメッシュ開口部素体８１に比較して開口面積が小さいので、その分メッキ面積を増大することができ、金属メッシュの破損や伸びを防ぐことができ、耐久性がアップする。また、メッシュ開口部素体８４は、丸味があるので、正方形状のメッシュ開口部素体８１に比べて、レジスト等からなるマスキング物質９を剥離し易いという利点がある。
図１２は図１１のスクリーン印刷用メタルマスクの印刷用パターン領域の一部のうち印刷パターンとして必要なフィンガー開口部のみを貫通孔として残し、フィンガー開口部の両端部とその周囲のメッシュ開口部にマスキング物質を塗布充填して塞いだ状態を示すものであり、印刷パターンとして必要な楕円形状又はカプセル状の各フィンガー開口部素体５４の中央のみを貫通孔として残し、楕円形状又はカプセル状の各フィンガー開口部素体５４の両端部半円部分とその周囲のメッシュ開口部素体８１、８３、８４を塞ぐようにマスキング物質９を塗布充填したものである。なお、各メッシュ開口部素体８４は、印刷用パターン領域４の外側とポリエステルのメッシュ２が接合される接合部領域６の内側との間に形成されるテンション緩衝領域７の全体に形成しても良い。また必要があれば、ポリエステルのメッシュ２との接合部領域６に形成しても良い。
これにより、印刷に供されるフィンガー開口部５の中央のみが貫通孔として残るだけで、それ以外のフィンガー開口部５の両端部半円部分を含み、フィンガー開口部５の周囲のメッシュ開口部８はマスキング物質９を塗布充填することで埋められて塞がれているので、印刷に供されることはない。 Example 4
FIG. 11 is a schematic diagram schematically showing a finger opening and a mesh opening around the part of a printing pattern area of the screen printing metal mask according to the fourth embodiment of the present invention. In this example, the finger opening element bodies 54 each having a horizontally long oval shape or a capsule shape are omitted in four steps so as to form a line in a direction orthogonal to the longitudinal direction. Here, each finger opening element body 54 having a horizontally long elliptical shape or capsule shape has a circular circle assembly continuously in the left-right direction so as to be further horizontally long than the elliptical shape or capsule shape shown in FIG. It is formed by stacking many more. The shape of each of the two mesh opening element bodies 83 arranged above the uppermost part and the lowermost part of each finger opening element body 54 is shown in an easy-to-understand manner, and outside the printing pattern region 4 of the metal mask 1. A number of mesh opening element bodies 84 each having a round opening are formed in the tension buffer region 7 located in a range of about 30 to 50 mm. That is, the mesh opening element body 83 is half the opening dimension in the longitudinal direction of each finger opening element body 54 and has the opening dimension in the longitudinal direction of the substantially square mesh opening element body 81 around the mesh opening element body 54. It is a rectangular shape that is twice the size. In addition, a large number of mesh opening element bodies 84 having a round shape formed in the tension buffer region 7 have a smaller opening area than that of the substantially square mesh opening element body 81. It can increase, can prevent the breakage and elongation of the metal mesh, and improve durability. Further, since the mesh opening element body 84 is round, there is an advantage that the masking substance 9 made of resist or the like can be easily peeled off compared to the square mesh opening element body 81.
12 leaves only the finger openings necessary as a printing pattern as a through hole in a part of the printing pattern region of the screen printing metal mask of FIG. 11, and the both ends of the finger opening and the mesh openings around the finger opening. It shows a state in which the masking substance is applied and filled and closed, leaving only the center of each elliptical or capsule-shaped finger opening element 54 necessary as a printing pattern as a through hole, and each of the elliptical or capsule-shaped The masking substance 9 is applied and filled so as to close the semicircular portions at both ends of the finger opening element body 54 and the mesh opening element bodies 81, 83, 84 around it. Each mesh opening element body 84 is formed on the entire tension buffer region 7 formed between the outside of the printing pattern region 4 and the inside of the joint region 6 to which the polyester mesh 2 is joined. Also good. If necessary, it may be formed in the joint region 6 with the polyester mesh 2.
As a result, only the center of the finger opening 5 used for printing remains as a through-hole, and the mesh openings 8 around the finger openings 5 include the semicircular portions at both ends of the other finger openings 5. Since it is filled and closed by applying and filling the masking substance 9, it is not used for printing.

１スクリーン印刷用メタルマスク
２ポリエステルのメッシュ
３版枠
４印刷用パターン領域
５フィンガー開口部
６接合部領域
７テンション緩衝領域
８メッシュ開口部
９マスキング物質
５１〜５４フィンガー開口部素体
８１〜８４メッシュ開口部素体 DESCRIPTION OF SYMBOLS 1 Metal mask for screen printing 2 Polyester mesh 3 Plate frame 4 Printing pattern area | region 5 Finger opening part 6 Joint part area | region 7 Tension buffer area | region 8 Mesh opening part 9 Masking substance 51-54 Finger opening part body 81-84 Mesh opening Part body

Claims

A metal mask for screen printing for forming a finger electrode of a solar cell, formed into a thin flat plate shape by plating,
A pattern region for printing formed in a central portion of the metal mask and formed with a plurality of finger openings for discharging a conductive paste for forming the finger electrodes;
A plurality of mesh openings formed so as to surround the periphery of the plurality of finger openings in the pattern area for printing, and having an opening dimension smaller than the opening dimension of the finger openings,
The plurality of finger openings are regularly arranged in a row in the direction perpendicular to the longitudinal direction, each of the finger opening elements having a horizontally long rectangular shape,
The mesh opening formed so as to surround the periphery of the finger opening is smaller than the opening dimension in the longitudinal direction of each finger opening element body, and the opening dimension in the short direction of each finger opening element body A metal mask for screen printing, characterized in that it is formed of an assembly of square or rectangular mesh opening elements having equal dimensions or more.

Each finger opening element body of the finger opening formed in the pattern area for printing has a rounded shape with rounded four corners of a horizontally long rectangle, and only the center of each finger opening element element necessary as a printing pattern 2. The screen printing according to claim 1, wherein the first and second openings are filled with a masking material so as to close both ends of each finger opening element body including the corner circles and surrounding mesh opening element bodies. Metal mask.

Each finger opening element body of the finger opening formed in the pattern area for printing consists of a horizontally long oval shape or capsule shape, leaving only the center of each finger opening element body necessary as a printing pattern as a through hole, 2. The metal mask for screen printing according to claim 1, wherein a mask material is used to fill the semicircular portions at both ends of each finger opening element body and the surrounding mesh opening element bodies.

A metal mask for screen printing for forming a finger electrode of a solar cell, formed into a thin flat plate shape by plating,
A pattern region for printing formed in a central portion of the metal mask and formed with a plurality of finger openings for discharging a conductive paste for forming the finger electrodes;
A plurality of mesh openings formed so as to surround the plurality of finger openings in the pattern area for printing, and having an opening size smaller than the opening size of the finger openings;
A tension buffer region formed outside the pattern region for printing of the metal mask;
A synthetic resin mesh formed on the outer peripheral edge of the tension buffer region of the metal mask, and a joint region to which a mesh made of a synthetic resin or a metal mesh that is stretched so that tension is applied to the plate frame,
The plurality of finger openings are regularly arranged in a row in the direction perpendicular to the longitudinal direction, each of the finger opening elements having a horizontally long rectangular shape,
The mesh opening formed so as to surround the periphery of the finger opening is smaller than the opening dimension in the longitudinal direction of each finger opening element body, and the opening dimension in the short direction of each finger opening element body It is formed by an assembly of square or rectangular mesh opening elements that are equal or larger in size,
A metal for screen printing, wherein the tension buffering area is formed with a large number of round circular mesh opening elements smaller than the large number of mesh opening elements formed in the printing pattern area. mask.

5. The screen printing according to claim 4, wherein a large number of round circular mesh opening elements formed in the tension buffer region are formed within a range of 30 to 50 mm outside the printing pattern region of the metal mask. Metal mask for use.

A metal mask for screen printing according to claim 4 or 5,
A plate frame and a synthetic resin mesh or a metal mesh that is stretched so that tension is applied to the plate frame and is bonded to a bonding region formed on the outer peripheral edge of the tension buffering region of the metal mask. Metal mask plate for screen printing characterized by