JP2017133899A - Airtightness inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an airtightness inspection device capable of fitting differently shaped glove ports and obtaining reliable inspection results without changing an airtightness lid material or mounting an attachment for each airtightness inspection task.SOLUTION: An airtightness inspection device comprises a glove port closing member, changing means of a pressure inside a work glove, and a pressure detector. The glove port closing member includes a lid member with which the glove port is covered from outside of a work room, and a cylindrical portion integrated with the lid member for being inserted to an inner peripheral part of the glove port. The cylindrical portion comprises at least two cylindrical bodies coaxially stacked and corresponding to differently sized or shaped glove ports, and incorporates an annular expansion seal along with the outer periphery of each cylindrical body for abutting on an inner periphery of the corresponding glove port.SELECTED DRAWING: Figure 6

Description

  The present invention relates to an airtightness inspection device for inspecting the airtightness of a work glove installed inward from a wall surface such as an isolator device or a glove box.

  When working in a clean atmosphere, such as pharmaceutical manufacturing or semiconductor or electronic component manufacturing, keep the interior sterile and dust-free to prevent contaminants from entering the external environment. Work is done in a clean working environment. As such a work environment, a clean room is generally used. In this clean room, a worker wearing a dust-free garment performs work. However, in order to raise the sterility assurance level and the dust-free assurance level, work is performed with a more advanced clean area in the clean room.

  As one method for configuring an advanced clean region, an isolator device or a glove box (hereinafter, referred to as “isolator device” collectively) is used. This isolator device uses a chamber sealed from the outside environment, and an operator works from outside the chamber through a work glove or the like. Such an isolator device is particularly called a sterile isolator device.

  As another method for configuring an advanced clean area, an RABS (Access Restriction Barrier System) is used. This RABS is provided with a region surrounded by a wall whose lower part is released in a part of the clean room, and a laminar flow of laminar flow of a one-way flow that flows downward from above to the inside of the RABS, It is intended to perform strict access restrictions for workers. In this RABS, an operator performs work through a work glove provided on a wall surface.

  In general, the interior of an isolator device or RABS that manufactures pharmaceuticals or the like has completed advanced decontamination validation in accordance with GMP (Good Manufacturing Practice), and guarantees Grade A (Ministry of Health, Labor and Welfare, Guidelines for Aseptic Drug Production). In this case, the isolator device and the outside of the RABS are maintained in a state of grade B, grade C, D or the like. As described above, it is important to maintain not only an isolator device or RABS that requires a high level of sterility assurance but also a sterilization environment of the external environment.

  On the other hand, work that deals with substances that affect the human body, such as work in the manufacturing stage of pharmaceuticals, work with highly toxic microorganisms in the fields of medicine and biology, or work with radioactive substances, affects the human body. It is necessary to protect workers from contamination with chemical substances and microorganisms that affect the environment, and to prevent these chemical substances and microorganisms that affect the human body from leaking from the work environment to the external environment. Also in such work, an isolator device that can work from the outside of the chamber sealed from the outside environment via a glove or a half suit is used. Such an isolator device is particularly called a containment isolator device.

  The isolator device is airtightly shielded from the external environment in which the operator works, and also supplies external air to the chamber after cleaning it with a filter and cleans the air inside the chamber with a filter. Exhaust. Accordingly, such an isolator device can basically be used as a sterile isolator device or a containment isolator device.

  Moreover, when using an isolator apparatus, safety | security can be improved further by adjusting the air pressure in a chamber according to the objective. That is, when used as a sterile isolator device, the inside of the chamber is set to a pressure higher than the external air pressure (hereinafter referred to as positive pressure), and even if leakage from the chamber occurs, the air flows from the chamber side to the outside. Airborne bacteria are prevented from entering the chamber.

  On the other hand, when it is used as a containment isolator device, by using the inside of the chamber at a pressure lower than the external air pressure (hereinafter referred to as negative pressure), even if leakage from the chamber occurs, the air flows from the outside into the chamber. Therefore, chemical substances in the chamber are prevented from contaminating the external environment.

  Here, at the boundary between the inside and outside of the sterile isolator device or RABS, what is considered to be particularly important is the airtightness of the work glove itself or its mounting portion. Maintaining a high degree of sterility in the interior of a work glove that is frequently used by an operator by generating holes (pinholes) or tears in the body, or by breaking the airtightness of these parts become unable.

  On the other hand, at the boundary between the containment isolator device and the outside, in order to protect workers from contamination with chemical substances and microorganisms that affect the human body, it is considered to be particularly important for the work gloves themselves or their mounting parts. Airtight. Holes (pinholes) or rifts occur in the work glove body, or the airtightness of these mounting parts breaks down, causing chemical substances and microorganisms that affect the human body to leak to the external environment Is contaminated.

  In view of this, various airtightness inspection devices have been proposed and actually used in order to manage the airtightness of the working gloves themselves or their mounting portions. For example, Patent Document 1 below proposes a negative pressure glove tightness inspection device including a negative pressure chamber. In this device, a connecting member (hereinafter referred to as “globe port”) for attaching a work glove to the isolator device is covered with the chamber base of the negative pressure chamber, and a negative pressure space is formed between the work glove and the negative pressure chamber. Inspect the airtightness of the work gloves and wearing parts.

  In Non-Patent Document 1 below, a glove integrity tester including an airtight lid member connected to the apparatus main body by wire is introduced. In this apparatus, the glove port is covered with an airtight lid member, and the inside of the work glove is pressurized to a positive pressure state to inspect the airtightness. Further, in the following Non-Patent Document 2, a wireless glove leak test apparatus including an airtight lid member having a wireless function is introduced. This device covers the glove port with an airtight lid member having a wireless function, pressurizes the work glove to a positive pressure state, and inspects the air tightness of the work glove and the mounting portion.

JP 2002-280277 A

Globe Integrity Testers (SKAN AG), search January 13, 2016, Internet URL: http://www.pharmaceuticalonline.com/doc/glove-integrity-testers-0001 Wireless glove leak test equipment (Airex Co., Ltd.), search on January 13, 2016, Internet URL: http://www.airexx.co.jp/en/contents/aboutus/news.htm

  In an isolator device or the like, a circular 8-inch glove port, a circular 10-inch glove port, an elliptical 10-inch glove port, and the like, which are distinguished by the inner diameter of an insertion portion into which an arm is inserted, are widely used. In general, many users use a device having a circular 8-inch glove port and a device having a circular 10-inch glove port. Alternatively, many users utilize devices with circular 8-inch glove ports and devices with elliptical 10-inch glove ports.

  By the way, in the apparatus of the said patent document 1, it is necessary to use properly the chamber base part of a negative pressure chamber according to the magnitude | size and shape of a glove port. Therefore, if the size or shape of the glove port of the isolator device or the like changes, it must be replaced with another negative pressure chamber. Similarly, in Non-Patent Document 1 and Non-Patent Document 2 described above, if the size or shape of the glove port changes, replace it with another airtight lid member or attach an attachment that matches the size and shape of the glove port. There is a need.

  As described above, preparing a plurality of airtightness inspection devices in accordance with the size and shape of the glove port to be used has a problem in terms of cost, burdensome management, and complexity. Even when using a single airtightness inspection device, replacing the airtight cover material with the size and shape of the glove port or attaching an attachment causes airtightness due to defective replacement or mounting failure. The airtightness of the sex inspection device main body may be impaired. If it does so, there existed a problem that the reliability of evaluation will be impaired by variation in a measurement result.

  Therefore, the present invention can cope with the above-mentioned problems and can cope with a glove port having a different size and shape with one airtightness inspection device, and replaces the airtight cover material every time the airtightness inspection is performed. An object of the present invention is to provide an airtightness inspection apparatus capable of obtaining a stable inspection result without attaching an attachment.

  In solving the above problems, the present inventors have found that the object of the present invention can be achieved by using an airtight cover material in which seal portions corresponding to at least two types of glove ports are integrated as a result of intensive studies. The present invention has been completed.

That is, the airtightness inspection apparatus according to the present invention is as described in claim 1.
A work glove (20) which is attached while maintaining airtightness from the glove port (30) provided in the work opening (15) opened in the wall surface of the work room (12) toward the inside of the work room. ), And a glove airtightness inspection device for inspecting leakage from the work glove body and the mounting portion (23),
A glove port closing member (100), working glove pressure setting means and pressure detection means,
The globe port closing member includes a lid portion (100a) that covers the globe port from the outside of the working chamber, and a cylindrical portion (100b) that is integrated with the lid portion and inserted into the inner peripheral portion of the globe port. Configured,
The cylindrical portion has at least two cylindrical bodies (50, 60) corresponding to glove ports having different sizes or shapes stacked on the same axis,
An annular expansion seal (52, 62) capable of contacting along the inner peripheral portion of the corresponding globe port is incorporated in the outer periphery of each cylindrical body.

Moreover, according to the description of Claim 2, this invention is the airtightness inspection apparatus of Claim 1, Comprising:
The expansion seal is an annular seal having an inner space, and when the cylindrical body is inserted into the corresponding glove port, the expansion seal is used in a contracted state,
When airtightly contacting the cylindrical body and the glove port, air is introduced from the air supply means into the hollow portion to expand the diameter of the expansion seal,
A closed space surrounded by the cylindrical body, the glove port, and the inner surface of the working glove can be formed.

According to a third aspect of the present invention, there is provided an airtightness testing apparatus according to the first or second aspect,
Among the at least two cylinders constituting the cylinder member, when the cylinder (60) having a small diameter forms the closed space by the action of the expansion seal (62),
The cylindrical body (50) having a larger diameter than the cylindrical body is located outside the closed space.

Moreover, according to the description of Claim 4, this invention is the airtightness inspection apparatus of Claim 1 or 2, Comprising:
Among the at least two cylinders constituting the cylinder member, when the large-diameter cylinder (50) forms the closed space by the action of the expansion seal (52),
A cylinder (60) having a smaller diameter than the cylinder is located inside the closed space.

Moreover, according to the description of Claim 5, this invention is the airtightness test | inspection apparatus of Claim 4, Comprising:
When the large-diameter cylinder forms the closed space and the small-diameter cylinder is located inside the closed space,
An annular member (67) having an inner diameter with which the expansion seal of the small-diameter cylinder can abut is attached to the outer periphery of the small-diameter cylinder,
Air flows into the hollow part from the air supply means (70), the diameter of the expansion seal expands, and the small-diameter cylindrical body and the annular member abut on each other in an airtight manner.

Moreover, according to the description of Claim 6, this invention is the airtightness inspection apparatus of Claim 3 or 4,
The cylinder body includes sensors (53, 63) for detecting the globe port or the annular member on the outer periphery thereof,
When it is detected that the outer periphery of each cylinder is inserted into the inner periphery of the globe port or the annular member,
Air flows into the hollow part from the air supply means, and the diameter of the expansion seal of each cylindrical body expands.

  According to the above configuration, the airtightness inspection apparatus according to the present invention includes the glove port closing member, the working glove pressure setting means, and the pressure detection means. The glove port closing member is composed of an integrated lid portion and a cylindrical portion. The lid portion is a portion that covers the globe port from the outside of the working chamber. Moreover, a cylinder part is a part inserted in the inner peripheral part of a glove port. In this cylindrical portion, at least two cylindrical bodies are stacked on the same axis, each corresponding to a glove port having a different size or shape. Further, an expansion seal is incorporated in the outer periphery of each cylinder. This expansion seal can abut on the inner peripheral part of the globe port to which each cylinder corresponds.

  According to this configuration, it is possible to deal with glove ports having different sizes and shapes with a single airtightness inspection device. In addition, the airtight lid member is not exchanged or an attachment is not attached every time the airtightness inspection is performed.

  Moreover, according to the said structure, an expansion | swelling seal is a cyclic | annular seal | sticker which has an inner space part. When the expansion seal is contracted, the cylinder of the glove port closing member can be inserted into the corresponding glove port. On the other hand, the diameter of the expansion seal expands when air from the air supply means flows into the hollow portion. In this state, the cylindrical body and the glove port abut on each other in an airtight manner. This forms a closed space surrounded by the cylinder, the glove port, and the inner surface of the work glove. This closed space is a target for an airtightness test. According to this configuration, it is possible to deal with glove ports having different sizes and shapes with a single airtightness inspection device without replacing the airtight lid member or attaching an attachment.

  According to the above configuration, when the small-diameter cylinder forms the closed space by the action of the expansion seal among the at least two cylinders of the globe port closing member, the larger-diameter cylinder is the closed space. Located outside of. On the other hand, when the large-diameter cylinder forms the closed space by the action of the expansion seal, the smaller-diameter cylinder is positioned inside the closed space. According to this configuration, it is possible to deal with glove ports having different sizes and shapes with a single airtightness inspection device without replacing the airtight lid member or attaching an attachment.

  According to the above configuration, when the large-diameter cylinder forms a closed space and the small-diameter cylinder is located inside the closed space, the annular member is attached to the outer periphery of the small-diameter cylinder. In this state, when air flows into the hollow portion from the air supply means and the diameter of the expansion seal expands, the cylindrical body and the annular member come into airtight contact. As a result, the airtightness of the small-diameter cylinder positioned inside the closed space is not secured, and the object of the airtightness inspection is secured.

  Moreover, according to the said structure, each cylinder of the glove port closing member is equipped with the sensor in each outer periphery. This sensor detects that the outer periphery of each cylinder has been inserted into the inner periphery of the globe port or the annular member. By this detection, air flows from the air supply means into the hollow portion of the expansion seal, and the diameter of the expansion seal expands.

  Therefore, according to each of the above-described configurations, a single airtightness inspection device can handle glove ports of different sizes and shapes, and the airtight cover material can be replaced or an attachment can be attached at each airtightness inspection. Therefore, it is possible to provide an airtightness inspection apparatus that can obtain a stable inspection result.

It is an outline figure of the front of the isolator device which provided the work glove. It is a cross-sectional schematic diagram of the left side surface of the isolator apparatus shown in FIG. FIG. 3 is an enlarged cross-sectional view of a portion X in FIG. 2, and is a schematic cross-sectional view showing a state in which a work glove is attached to a glove port attached to a glass window. It is the front view, top view, and side view which show the airtightness inspection apparatus which concerns on this embodiment. It is sectional drawing which shows the state by which the large diameter cylinder was inserted in the glove port in Example 1, and the cyclic | annular member was mounted | worn with the small diameter cylinder. It is sectional drawing which shows the state which the expansion | swelling seal | sticker of the large diameter cylinder of FIG. 5 and the small diameter cylinder expanded. It is a piping diagram of compressed air which shows a state until a glove port closure member is airtightly installed in a glove port in Example 1. It is a piping diagram of compressed air which shows the state where the globe port closing member was airtightly attached to the globe port in Example 1. It is a piping diagram of compressed air which shows the state where a glove port closure member is airtightly canceled from a glove port in Example 1. In Example 2, it is sectional drawing which shows the state by which the small diameter cylinder was inserted in the glove port. It is sectional drawing which shows the state which the expansion seal of the cylindrical body of the small diameter of FIG. 10 expanded. It is a piping diagram of compressed air which shows a state until a glove port closure member is airtightly installed in a glove port in Example 2. It is a piping diagram of compressed air which shows the state where the globe port closing member was airtightly attached to the globe port in Example 2. It is a piping diagram of compressed air which shows the state where a glove port closure member is airtightly canceled from a glove port in Example 2. In Example 3, it is sectional drawing which shows the state by which the large diameter cylinder is inserted in the glove port and the annular member is not mounted | worn with the small diameter cylinder. It is sectional drawing which shows the state which the expansion seal of the large diameter cylinder of FIG. 15 expanded. It is a piping diagram of compressed air which shows a state until a glove port closure member is airtightly installed in a glove port in Example 3. It is a piping diagram of compressed air which shows the state where the globe port closing member was airtightly attached to the globe port in Example 3. It is a piping diagram of compressed air which shows the state where a glove port closure member is airtightly canceled from a glove port in Example 3.

  Hereinafter, the present invention will be described in detail. FIG. 1 is a schematic diagram of the front of an isolator device provided with a work glove. FIG. 2 is a schematic cross-sectional view of the left side surface of the isolator device. 1 and 2, an isolator device 10 includes a gantry 11 placed on a floor surface, a working chamber (chamber) 12 laid on the gantry 11, and a right side wall of the chamber 12. And a machine room 13 (see FIG. 1) joined to the part.

  The chamber 12 is made of a stainless steel casing that is airtightly shielded from the external environment. The intake and exhaust filter units (not shown), and the air inside the chamber 12 are filtered by the filter unit. After that, a blower (not shown) for exhausting outside is provided.

  A transparent glass window 14 that can visually recognize the inside is provided on the front wall of the chamber 12 (see FIG. 1). The glass window 14 has two circular work openings 15 that allow communication between the outside and the inside of the chamber 12. Each of the working openings 15 has a mounting frame (glove port) 30 for hermetically mounting the work glove and a synthetic resin work glove 20 (see FIG. 2) attached to the glove port 30. Is attached). In FIG. 2, the work glove 20 is shown in a horizontal and expanded state for convenience.

  FIG. 3 is an enlarged cross-sectional view of a portion X in FIG. 2 and shows a state in which the work glove 20 is attached to the glove port 30 attached to the work opening 15 of the glass window 14 of the isolator device 10. It is a cross-sectional schematic diagram. The glove port 30 is inserted into the work opening 15 and fixed to the glass window 14, and the inner peripheral side of the glove port 30 forms an insertion portion 31 into which an operator inserts an arm. On the other hand, the base end portion (upper arm portion) 21 of the working glove 20 to be attached to the glove port 30 is fixed with two O-rings 32 on the outer peripheral side of the inner side (left side in the drawing) of the chamber 12 of the glove port 30. An annular groove 33 is provided (see FIG. 3).

  Hereinafter, an airtightness inspection apparatus according to the present invention will be described with reference to embodiments. In addition, this invention is not limited only to the following embodiment.

  The airtightness inspection apparatus according to the present embodiment is a wireless airtightness inspection apparatus that performs airtightness securing after mounting on a glove port and airtightness inspection through wireless communication with a personal computer (PC). , Evaluation and data accumulation are executed according to a program set in the PC.

  FIG. 4 shows an airtightness inspection apparatus according to this embodiment. In FIG. 4, A is a front view of the airtightness inspection device viewed from the tube portion side. B is a plan view and C is a right side view. In FIG. 4, the airtightness inspection device includes a glove port closing member 100, a working glove pressure setting device and a pressure detection device (built in the main body of the glove port closing member 100), and a control device for controlling them. It has a communication device (built in the main body of the globe port closing member 100 and an external PC).

  The glove port closing member 100 includes a lid portion 100a and a cylinder portion 100b. The lid portion 100a is made of a metal, resin, or reinforced resin lid 40 having a combined shape of a cylinder and a hemisphere, and the main body of the pressure setting device for working gloves and the body of the pressure detection device are housed inside the lid portion 100a. (To be described later). The cylinder portion 100b is composed of two cylinders 50 and 60 made of metal, resin or reinforced resin, and these cylinders 50 and 60 are stacked in two stages on the same axis. Further, these cylinders 50 and 60 are integrated with the cylinder of the lid body 40 in a coaxial manner.

  In the present embodiment, the cylindrical body 50 has an outer peripheral diameter that can be inserted into the inner peripheral portion of a circular 10-inch glove port and hermetically attached by the action of an expansion seal (described later). On the other hand, the cylindrical body 60 has an outer peripheral diameter that can be inserted into the inner peripheral portion of a circular 8-inch glove port and hermetically attached by the action of an expansion seal (described later). These cylinders 50 and 60 have spaces inside and communicate with each other (described later).

  4B and 4C, a groove 51 is formed along the outer periphery of the cylinder 50, and an annular expansion seal 52 is inserted into the groove 51. Similarly, a groove 61 is formed along the outer periphery of the cylindrical body 60, and an annular expansion seal 62 is inserted into the groove 61.

  These expansion seals 52 and 62 are annular seal members (packings) made of an elastic body such as rubber or resin, and have a tubular cross section and an inner space inside. These expansion seals 52 and 62 communicate with each other by a compressed air generator (built in the inside of the lid 40) and a compressed air supply pipe (described later), and are tubular when air is supplied to the inner space. It expands in the radial direction. When these expansion seals 52 and 62 expand and become larger than the outer diameters of the respective cylinders 50 and 60, the closed spaces are brought into airtight contact with the inner peripheral portion of the globe port into which the respective cylinders 50 and 60 are inserted. Form.

  In FIG. 4B, an insertion sensor 53 for detecting that the cylinder 50 is inserted into the inner periphery of the circular 10-inch glove port is located beside the expansion seal 52 on the outer periphery of the cylinder 50 (on the lid 40 side). Embedded. On the other hand, an insertion sensor 63 for detecting that the cylindrical body 60 is inserted into the inner periphery of the circular 8-inch glove port is embedded beside the expansion seal 62 on the outer periphery of the cylindrical body 60 (on the cylindrical body 50 side). ing.

  As these insertion sensors 53 and 63, any mechanism such as a contact type or a non-contact type may be used, but a non-contact type photoelectric sensor or the like is preferably used. In the present embodiment, a fiber type sensor is used as the photoelectric sensor.

  The working glove pressure setting device has a compressed air generator (used together with an expansion seal), a compressed air supply pipe, and a compressed air supply valve. This working glove pressure setting device sets the pressure in the inspection region to a predetermined inspection pressure based on detection by the pressure sensor of the pressure detection device and control by the control device. The compressed air generator is housed inside the lid 40 of the lid portion 100 a of the glove port closing member 100. The compressed air supply pipe and the compressed air supply valve are housed inside the cylinder portion 100 b of the globe port closing member 100. Further, the outlet of the compressed air supply valve 65 is open to the front end face 64 (the working glove side) of the cylindrical body 60 (see FIG. 4A).

  The pressure detection device has a pressure sensor and is used for pressurization setting in a work glove and airtightness inspection. The pressure sensor 66 is disposed on the distal end face 64 (the working glove side) of the cylindrical body 60 (see FIG. 4A).

  In such a configuration, the operation of the airtightness inspection apparatus according to the present embodiment will be described with reference to the following examples.

  In the first embodiment, the airtightness inspection apparatus having the above-described configuration is used for a circular 10-inch glove port of an isolator apparatus. Therefore, the large-diameter cylindrical body 50 of the globe port closing member 100 is inserted into the 10-inch circular globe port 30a. In the first embodiment, an annular member (the effect of which will be described later) is attached to the small-diameter cylindrical body 60.

  FIG. 5 is a cross-sectional view showing a state in which the large-diameter cylinder 50 is inserted into the globe port 30a (circular 10 inches) and an annular member 67 (described later) is attached to the small-diameter cylinder 60. On the other hand, FIG. 6 is a cross-sectional view showing a state in which the expansion seals 52 and 62 of the large-diameter cylinder 50 and the small-diameter cylinder 60 are expanded.

  In FIG. 5, the outer peripheral portion of the large-diameter cylindrical body 50 of the globe port closing member 100 is inserted into the inner peripheral portion 34a of the globe port 30a. In this state, the outer peripheral part of the cylinder 50 and the inner peripheral part 34a of the globe port 30a are not in airtight contact. A circular 8-inch annular member 67 is attached to the outer periphery of the small-diameter cylindrical body 60. In this state, the outer peripheral portion of the cylindrical body 60 and the inner peripheral portion of the annular member 67 are not in airtight contact. FIG. 5 shows a cross section of the cylinder portion 100b (cylinders 50 and 60) of the globe port closing member 100. The cylinders 50 and 60 have a space and are integrated.

  A groove 51 is formed along the outer periphery of the cylindrical body 50, and an annular expansion seal 52 is inserted into the groove 51. The expansion seal 52 communicates with a compressed air generator (not shown, built in the lid body 40) via a compressed air supply pipe 52a. Further, a groove 61 is formed along the outer periphery of the cylindrical body 60, and an annular expansion seal 62 is inserted into the groove 61. The expansion seal 62 communicates with a compressed air generator (not shown, built in the lid body 40) via a compressed air supply pipe 62a.

  Next to the expansion seal 52 on the outer periphery of the cylindrical body 50 (on the lid body 40 side), an insertion sensor (fiber type sensor) that detects that the cylindrical body 50 has been inserted into the inner periphery of a 10-inch circular globe port 30a. 53 is embedded. The insertion sensor 53 is connected to a control device (not shown, built in the lid 40) via a wiring 53a. In FIG. 5, the insertion sensor 53 detects the inner peripheral portion 34a of the globe port 30a.

  Further, an insertion sensor (fiber type sensor) 63 that detects that an annular member 67 having a circular shape of 8 inches is attached to the cylindrical body 60 beside the expansion seal 62 on the outer periphery of the cylindrical body 60 (on the lid body 40 side). Is embedded. The insertion sensor 63 is connected to a control device (not shown, built in the lid 40) via a wiring 63a. In FIG. 5, the insertion sensor 63 detects the inner peripheral portion of the annular member 67. In the first embodiment, the insertion sensor 63 is provided with an airtight seal 68 (the operation will be described later).

  In FIG. 5, a blowout port of a compressed air supply valve 65 is opened at the distal end surface 64 (the working globe 20 side) of the cylindrical body 60. The compressed air supply valve 65 is connected to a compressed air supply pipe 65a. Via a compressed air generator (not shown, built in the lid 40). In addition, a pressure sensor 66 is disposed below the compressed air supply valve 65 on the distal end face 64 (the working globe 20 side) of the cylindrical body 60. The pressure sensor 66 is connected via a wiring 66a. It is connected to a control device (not shown, built in the lid 40).

  Next, in FIG. 6, a state where the expansion seals 52 and 62 of the large-diameter cylinder 50 and the small-diameter cylinder 60 are expanded will be described. In FIG. 6, the expansion seal 52 inserted into the outer peripheral portion of the large-diameter cylindrical body 50 is expanded, and the outer peripheral portion of the cylindrical body 50 and the inner peripheral portion 34a of the globe port 30a are in airtight contact. ing. Further, the expansion seal 62 inserted in the outer peripheral portion of the small-diameter cylindrical body 60 is expanded, and the outer peripheral portion of the cylindrical body 60 and the inner peripheral portion of the annular member 67 are in airtight contact. In FIG. 6, for the sake of clarity, the cross section is painted black for the sake of clarity.

  Thus, a closed space 22 a surrounded by the inner surfaces of the cylinders 50 and 60, the glove port 30 a and the work glove 20 is formed. In the first embodiment, the closed space 22a is used as an inspection area for an airtightness inspection. Thereby, the airtightness of the working glove body 20 and the mounting portion 23a (the portion where the base end portion 21 of the working glove 20 is fixed by the two O-rings 32) can be inspected.

《Formation of enclosed space》
Here, the flow of the compressed air flowing from the compressed air generating device (built in the lid body 40) to the expansion seals 52 and 62 via the compressed air supply pipes 52a and 62a will be described. FIG. 7 is a compressed air piping diagram showing a state until the glove port closing member 100 is hermetically attached to the glove port 30a in the first embodiment.

  In FIG. 7, the compressed air generator 70 includes a filter (F) 71 and an air compressor (P) 72. The air compressor 72 communicates with the electromagnetic valve 73 via the compressed air supply pipes 72a and 72b. The electromagnetic valve 73 communicates with the expansion seal (IF8) 62 via the compressed air supply pipe 62a. A pipe branched from the compressed air supply pipe 62a communicates with the electromagnetic valve 74. The electromagnetic valve 74 communicates with the expansion seal (IF10) 52 via the compressed air supply pipe 52a. The compressed air supply pipe 62a is provided with a pressure sensor (S) 75 for detecting the internal pressure of the expansion seal.

  Further, piping branched from the compressed air supply piping 72 a and 72 b communicates with the electromagnetic valve 76 and the electromagnetic valve 77. The electromagnetic valve 76 communicates with the closed space (G) 22a, which is an airtightness inspection region, via the compressed air supply pipe 65a and the compressed air supply valve 65. A pressure sensor (S) 66 for airtightness inspection is disposed in the closed space 22a. Further, from the solenoid valve 77, the compressed air of each pipe is discharged out of the path.

  In the piping path configured as described above, first, as shown in FIG. 5, when the large-diameter cylinder 50 is inserted into the glove port 30a (circular 10 inches), the insertion sensor 53 detects the glove port 30a. In FIG. 5, an annular member 67 is attached to the small-diameter cylindrical body 60, and the insertion sensor 63 detects the annular member 67. These detection signals are transmitted to the control device via the wirings 53a and 63a.

  In FIG. 7, the control device (not shown) opens the electromagnetic valves 73 and 74 in response to the transmitted signal and operates the air compressor 72 of the compressed air generating device 70. At this time, the solenoid valves 76 and 77 are closed. Thus, the compressed air generated by the compressed air generator 70 expands the expansion seals 52 and 62. At this time, the pressure sensor 75 detects the internal pressure of the expansion seals 52 and 62 and transmits the signal to the control device.

  FIG. 8 is a compressed air piping diagram showing a state in which the globe port closing member 100 is airtightly attached to the globe port 30a. In FIG. 8, when it is confirmed that the internal pressure of the expansion seals 52 and 62 has reached the set value, the control device (not shown) closes the electromagnetic valve 73 and stops the compressed air generation device 70. Thereby, the closed spaces 22a surrounded by the cylinders 50 and 60, the glove port 30a, and the inner surface of the work glove 20 are formed (see FIG. 6).

  In FIG. 6, the insertion sensor 63, the pressure sensor 66, and the compressed air supply valve 65 inside the closed space 22a are each hermetically sealed, so that the pressure in the closed space 22a does not leak. Further, the connection portion between the expansion seal 62 and the compressed air supply pipe 62 a does not leak pressure due to expansion of the expansion seal 62. On the other hand, in the first embodiment, the insertion sensor 53 is not hermetically sealed, but the insertion sensor 53 is outside the closed space 22a and does not cause a problem.

<Airtightness inspection>
In the first embodiment, the closed space 22a is used as an inspection area for an airtightness inspection. In the present invention, the airtightness inspection is executed with the same configuration and operation as the conventional airtightness inspection apparatus. In the first embodiment, the compressed air generating device of the working glove pressure setting device uses the compressed air generating device 70 in FIG. 8 together. First, the control device opens the electromagnetic valve 76 according to the set program and operates the air compressor 72 of the compressed air generating device 70. At this time, the solenoid valves 73 and 77 are closed. The generated compressed air is supplied into the closed space 22a via the compressed air supply pipe 65a and the compressed air supply valve 65. At this time, the pressure sensor 66 detects the internal pressure of the closed space 22a and sets it to a predetermined inspection pressure under the control of the control device.

  When confirming that the internal pressure of the closed space 22a has reached a set value (for example, 3 kPa), the control device closes the electromagnetic valve 76 and stops the compressed air generation device 70. Thereafter, a change in the internal pressure of the closed space 22a is detected by the pressure sensor 66 of the pressure detection device for a predetermined time, and the signal is transmitted to the control device. In this way, the air tightness test is executed according to the program set in the control device. At this time, if the pressure drop within a predetermined time is larger than the set value, it can be seen that the airtightness of the work glove itself or its mounting portion is broken.

《Release of closed space》
FIG. 9 is a compressed air piping diagram showing a state in which the globe port closing member 100 is airtightly released from the globe port 30a. In FIG. 9, when the airtightness inspection is completed, the control device (not shown) opens the electromagnetic valves 73 and 77 according to the set program. At this time, the electromagnetic valve 74 is released and the electromagnetic valve 76 is closed. As a result, the compressed air that has expanded the expansion seals 52 and 62 is discharged out of the path through the electromagnetic valves 73, 74, and 77. Therefore, the expansion seals 52 and 62 contract and the closed space 22a is released.

  In the second embodiment, an airtightness inspection device having the same configuration as that of the first embodiment is used for a circular 8-inch glove port of an isolator device. Therefore, the small-diameter cylindrical body 60 of the glove port closing member 100 is inserted into the circular 8-inch glove port 30b.

  FIG. 10 is a cross-sectional view showing a state where a small-diameter cylindrical body 60 is inserted into the glove port 30b (circular 8 inches). On the other hand, FIG. 11 is a cross-sectional view showing a state in which the expansion seal 62 of the small diameter cylindrical body 60 is expanded.

  In FIG. 10, the outer peripheral part of the small-diameter cylindrical body 60 of the globe port closing member 100 is inserted into the inner peripheral part 34b of the globe port 30b. In this state, the outer peripheral portion of the cylindrical body 60 and the inner peripheral portion 34b of the globe port 30b are not in airtight contact. On the other hand, the large-diameter cylindrical body 50 is not inserted into the glove port 30b and is outside the chamber 12 (on the side opposite to the working glove 20). FIG. 10 shows a cross section of the cylindrical portion 100b (the cylindrical bodies 50 and 60) of the globe port closing member 100. The internal configuration of these cylinders 50 and 60 is the same as that in the first embodiment, and the description thereof is omitted here.

  Next, a state in which the expansion seal 62 of the small-diameter cylinder 60 is expanded in FIG. 11 will be described. In FIG. 11, the expansion seal 62 inserted into the outer peripheral portion of the small-diameter cylindrical body 60 expands, and the outer peripheral portion of the cylindrical body 60 and the inner peripheral portion 34b of the globe port 30b come into airtight contact. ing. On the other hand, the expansion seal 52 inserted into the outer peripheral portion of the large-diameter cylindrical body 50 is not expanded. In FIG. 11, for the sake of clarity, the cross section is blacked out for the sake of clarity.

  Thus, a closed space 22b surrounded by the cylinder 60, the glove port 30b, and the inner surface of the work glove 20 is formed. In the second embodiment, the closed space 22b is used as an inspection area for an airtightness inspection. Thereby, the airtightness of the working glove body 20 and the mounting portion 23b (the portion where the base end portion 21 of the working glove 20 is fixed by the two O-rings 32) can be inspected.

《Formation of enclosed space》
Here, the flow of the compressed air flowing from the compressed air generator (built in the inside of the lid body 40) to the expansion seal 62 via the compressed air supply pipe 62a will be described. FIG. 12 is a compressed air piping diagram showing a state until the globe port closing member 100 is hermetically attached to the globe port 30b in the second embodiment. In addition, the structure of the piping path | route in the present Example 2 is the same as that of the said Example 1, and abbreviate | omits description here.

  In the piping path configured as described above, first, as shown in FIG. 10, when the small-diameter cylindrical body 60 is inserted into the glove port 30b (circular 8 inches), the insertion sensor 63 detects the glove port 30b. On the other hand, in FIG. 10, the large-diameter cylindrical body 50 is not inserted into the globe port 30b, and the insertion sensor 53 does not detect the insertion. The detection signal of the insertion sensor 63 is transmitted to the control device via the wiring 63a.

  In FIG. 12, the control device (not shown) opens the electromagnetic valve 73 in response to the transmitted signal and operates the air compressor 72 of the compressed air generating device 70. At this time, the solenoid valves 74, 76 and 77 are closed. As a result, the compressed air generated by the compressed air generator 70 causes the expansion seal 62 to expand. At this time, the pressure sensor 75 detects the internal pressure of the expansion seal 62 and transmits the signal to the control device.

  FIG. 13 is a compressed air piping diagram showing a state where the globe port closing member 100 is airtightly attached to the globe port 30b. In FIG. 13, when it is confirmed that the internal pressure of the expansion seal 62 has reached the set value, the control device (not shown) closes the electromagnetic valve 73 and stops the compressed air generation device 70. As a result, a closed space 22b surrounded by the cylindrical body 60, the globe port 30b, and the inner surface of the working globe 20 is formed (see FIG. 11).

  In FIG. 11, the pressure sensor 66 and the compressed air supply valve 65 in the closed space 22b are each hermetically sealed, and the pressure in the closed space 22b does not leak. On the other hand, in the second embodiment, the connection portion between the insertion sensor 53 and the expansion seal 52 and the compressed air supply pipe 52a is not hermetically sealed. However, these are all outside the closed space 22b and are not a problem.

<Airtightness inspection>
In the second embodiment, the closed space 22b is used as an inspection area for an airtightness inspection. Note that the airtightness inspection in the second embodiment is the same as that in the first embodiment, and the description thereof is omitted here.

《Release of closed space》
FIG. 14 is a compressed air piping diagram showing a state in which the globe port closing member 100 is airtightly released from the globe port 30b. In FIG. 14, when the airtightness test is completed, the control device (not shown) opens the electromagnetic valves 73 and 77 according to the set program. At this time, the solenoid valves 74 and 76 are closed. As a result, the compressed air that has expanded the expansion seal 62 is discharged out of the path through the electromagnetic valves 73 and 77. Therefore, the expansion seal 62 contracts and the closed space 22b is released.

  In the third embodiment, the airtightness inspection device having the above-described configuration is used for a circular 10-inch glove port of an isolator device. Therefore, the large-diameter cylindrical body 50 of the globe port closing member 100 is inserted into the 10-inch circular globe port 30a. In the third embodiment, unlike the first embodiment, no annular member is attached to the small-diameter cylindrical body 60.

  FIG. 15 is a cross-sectional view showing a state where the large-diameter cylinder body 50 is inserted into the glove port 30a (circular 10 inches) and the annular member is not attached to the small-diameter cylinder body 60. On the other hand, FIG. 16 is a cross-sectional view showing a state where the expansion seal 52 of the large-diameter cylindrical body 50 is expanded.

  In FIG. 15, the outer peripheral part of the large-diameter cylinder 50 of the glove port closing member 100 is inserted into the inner peripheral part 34a of the glove port 30a. In this state, the outer peripheral part of the cylinder 50 and the inner peripheral part 34a of the globe port 30a are not in airtight contact. Further, the annular member is not attached to the outer peripheral portion of the small-diameter cylindrical body 60. FIG. 15 shows a cross section of the cylinder portion 100b (cylinders 50 and 60) of the globe port closing member 100. The internal configuration of these cylinders 50 and 60 is the same as that in the first embodiment, and the description thereof is omitted here.

  Next, a state where the expansion seal 52 of the large-diameter cylinder 50 is expanded in FIG. 16 will be described. In FIG. 16, the expansion seal 52 inserted into the outer peripheral portion of the large-diameter cylindrical body 50 is expanded, and the outer peripheral portion of the cylindrical body 50 and the inner peripheral portion 34a of the globe port 30a are in airtight contact. ing. On the other hand, the expansion seal 62 inserted into the outer peripheral portion of the small-diameter cylindrical body 60 is not expanded. In FIG. 16, the cross section is blacked for convenience in order to clearly show the expanded seal 52.

  Thus, a closed space 22 a surrounded by the inner surfaces of the cylinders 50 and 60, the glove port 30 a and the work glove 20 is formed. In the third embodiment, the closed space 22a is used as an inspection area for an airtightness inspection. Thereby, the airtightness of the working glove body 20 and the mounting portion 23a (the portion where the base end portion 21 of the working glove 20 is fixed by the two O-rings 32) can be inspected.

《Formation of enclosed space》
Here, the flow of the compressed air flowing from the compressed air generating device (built in the lid body 40) to the expansion seal 52 via the compressed air supply pipe 52a will be described. FIG. 17 is a compressed air piping diagram showing a state until the globe port closing member 100 is airtightly attached to the globe port 30a in the third embodiment.

  In FIG. 17, unlike the first embodiment, an electromagnetic valve 78 is added. The compressed air generator 70 includes a filter (F) 71 and an air compressor (P) 72. The air compressor 72 communicates with the electromagnetic valve 73 via the compressed air supply pipes 72a and 72b. The electromagnetic valve 73 communicates with the electromagnetic valve 74 and the electromagnetic valve 78 via the compressed air supply pipe 73a. The electromagnetic valve 74 communicates with the expansion seal (IF10) 52 via the compressed air supply pipe 52a. On the other hand, the electromagnetic valve 78 communicates with the expansion seal (IF8) 62 through the compressed air supply pipe 62a. The compressed air supply pipe 73a is provided with a pressure sensor (S) 75 for detecting the internal pressure of the expansion seal.

  Further, piping branched from the compressed air supply piping 72 a and 72 b communicates with the electromagnetic valve 76 and the electromagnetic valve 77. The electromagnetic valve 76 communicates with the closed space (G) 22a, which is an airtightness inspection region, via the compressed air supply pipe 65a and the compressed air supply valve 65. A pressure sensor 66 for airtightness inspection is disposed in the closed space 22a. Further, from the solenoid valve 77, the compressed air of each pipe is discharged out of the path.

  In the piping path configured as described above, first, as shown in FIG. 15, when the large-diameter cylindrical body 50 is inserted into the globe port 30a (circular 10 inches), the insertion sensor 53 detects the globe port 30a. Further, in FIG. 15, the annular member is not attached to the small-diameter cylindrical body 60, and the insertion sensor 63 does not detect the insertion. The detection signal of the insertion sensor 53 is transmitted to the control device via the wiring 53a.

  In FIG. 17, the control device (not shown) opens the electromagnetic valves 73 and 74 in response to the sent signal and operates the air compressor 72 of the compressed air generating device 70. At this time, the solenoid valves 76, 77, 78 are closed. As a result, the compressed air generated by the compressed air generator 70 expands the expansion seal 52. At this time, the pressure sensor 75 detects the internal pressure of the expansion seal 52 and transmits the signal to the control device.

  FIG. 18 is a compressed air piping diagram showing a state where the globe port closing member 100 is airtightly attached to the globe port 30a. In FIG. 18, when it is confirmed that the internal pressure of the expansion seal 52 has reached the set value, the control device (not shown) closes the electromagnetic valve 73 and stops the compressed air generation device 70. As a result, a closed space 22a surrounded by the inner surfaces of the cylinders 50 and 60, the glove port 30a, and the work glove 20 is formed (see FIG. 16).

  In FIG. 16, the insertion sensor 63, the pressure sensor 66, and the compressed air supply valve 65 in the closed space 22a are each hermetically sealed, so that the pressure in the closed space 22a does not leak. Further, in the third embodiment, an airtight seal 69 is also provided at a connection portion between the expansion seal 62 and the compressed air supply pipe 62a, and pressure does not leak even if the expansion seal 62 is not expanded.

<Airtightness inspection>
In the third embodiment, the closed space 22a is used as an inspection area for an airtightness inspection. Note that the airtightness inspection in the third embodiment is the same as that in the first embodiment, and the description thereof is omitted here.

《Release of closed space》
FIG. 19 is a compressed air piping diagram showing a state in which the globe port closing member 100 is airtightly released from the globe port 30a. In FIG. 19, when the airtightness inspection is completed, the control device (not shown) opens the electromagnetic valves 73 and 77 according to the set program. At this time, the solenoid valve 74 is released, and the solenoid valves 76 and 78 are closed. As a result, the compressed air that has expanded the expansion seal 52 is discharged out of the path through the electromagnetic valves 73, 74, and 77. Therefore, the expansion seal 52 contracts and the closed space 22a is released.

  From the above, in each of the above-described embodiments, it was possible to carry out an air tightness test on two types of globe ports of a circular 10 inch and a circular 8 inch using the air tightness inspection apparatus having the same configuration. Therefore, in the present invention, it is possible to correspond to a glove port having a different size and shape with one airtightness inspection device, without replacing the airtight cover material or attaching an attachment for each airtightness inspection, An airtightness inspection apparatus capable of obtaining a stable inspection result can be provided.

In implementing the present invention, not only the above-described embodiments but also the following various modifications can be mentioned.
(1) In each of the above-described embodiments, a wireless airtightness inspection device that performs airtightness securing after being attached to the glove port, airtightness inspection by wireless communication with a personal computer (PC), The evaluation and data storage are executed according to a program set in the PC. However, the present invention is not limited to this, and the apparatus main body and one or more glove port closing members are connected by wire. It may be a thing.
(2) In each of the above embodiments, the glove port closing member is a two-stage type corresponding to two types of glove ports, but the invention is not limited to this, and a three-stage type or more may be used. Good.
(3) In each of the above embodiments, the glove port closing member corresponds to a combination of a circular 8 inch and a circular 10 inch. However, the invention is not limited to this. Any combination such as a combination of
(4) In each of the above embodiments, the airtightness inspection device is used for the glove port of the isolator device, but is not limited to this, and is used for the glove port of the wall surface of the RABS (access restriction barrier system). You may make it do.

10 ... Isolator device, 11 ... Mount, 12 ... Chamber,
13 ... Machine room, 14 ... Glass window, 15 ... Work opening,
20 ... Work gloves, 21 ... Base end (upper arm),
22a, 22b ... closed space, 23a, 23b ... mounting part,
30, 30a, 30b ... glove port, 31 ... opening, 32 ... o-ring,
33 ... annular groove, 34a, 34b ... inner periphery of globe port,
40 ... Lid, 50, 60 ... Tube, 51, 61 ... Groove,
52, 62 ... expansion seal, 53, 63 ... insertion sensor,
64 ... tip surface, 65 ... compressed air supply valve, 66, 75 ... pressure sensor, 67 ... annular member,
52a, 62a, 65a, 73a, 76a, 76b ... compressed air supply piping,
53a, 63a, 66a, 75a ... wiring, 70 ... compressed air generator,
71 ... Filter, 72 ... Air compressor, 73, 74, 76, 78 ... Solenoid valve,
DESCRIPTION OF SYMBOLS 100 ... Globe port closing member, 100a ... Lid part, 100b ... Tube part.

Claims (6)

The work glove body and the attachment to the work glove that is attached while maintaining airtightness toward the inside of the work room from the glove port provided in the work opening that is opened on the wall surface of the work room. An airtightness inspection device for a glove for inspecting leakage from a part,
A glove port closing member, a working glove pressure setting means and a pressure detection means,
The glove port closing member is composed of a lid part that covers the glove port from the outside of the working chamber, and a cylindrical part that is integrated with the lid part and inserted into the inner peripheral part of the glove port,
The cylindrical portion is formed by coaxially stacking at least two cylindrical bodies corresponding to globe ports having different sizes or shapes,
An airtightness inspection device characterized in that an annular expansion seal capable of contacting along the inner peripheral part of the corresponding glove port is incorporated in the outer periphery of each cylindrical body. The expansion seal is an annular seal having an inner space, and when the cylindrical body is inserted into the corresponding glove port, the expansion seal is used in a contracted state,
When airtightly contacting the cylindrical body and the glove port, air is introduced from the air supply means into the hollow portion to expand the diameter of the expansion seal,
2. The airtightness inspection apparatus according to claim 1, wherein a closed space surrounded by the cylinder, the glove port, and an inner surface of the work glove can be formed. Of the at least two cylinders constituting the cylinder member, when the cylinder having a small diameter forms the closed space by the action of the expansion seal,
3. The airtightness inspection apparatus according to claim 1, wherein a cylindrical body having a larger diameter than the cylindrical body is located outside the closed space. Of the at least two cylinders constituting the cylinder member, when a large-diameter cylinder forms the closed space by the action of an expansion seal,
3. The airtightness inspection apparatus according to claim 1, wherein a cylindrical body having a smaller diameter than the cylindrical body is located inside the closed space. When the large-diameter cylinder forms the closed space and the small-diameter cylinder is located inside the closed space,
An annular member having an inner diameter that can be contacted by the expansion seal of the small-diameter cylinder is attached to the outer periphery of the small-diameter cylinder,
5. The air according to claim 4, wherein air flows from the air supply means into the hollow portion to expand a diameter of the expansion seal, and the small-diameter cylindrical body and the annular member abut on each other in an airtight manner. Airtightness inspection device. The cylinder includes a sensor for detecting the globe port or the annular member on each outer periphery,
When it is detected that the outer periphery of each cylinder is inserted into the inner periphery of the globe port or the annular member,
5. The airtightness inspection apparatus according to claim 3, wherein air flows into the hollow portion from the air supply means and a diameter of an expansion seal of each cylindrical body expands.