JP2017120699A - Conductor for high frequency and high frequency lightening-type light source deice - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conductor for high frequency capable of flowing high frequency current effectively and having shape processability and shape holding property and a high frequency lightening-type light source device capable of effectively providing high frequency power to the light source and providing high productivity and maintenance easiness.SOLUTION: A conductor for high frequency consists of a flexible conductor body having a bundle of a plurality of conducive single wires and flexible self shape holding strip body arranged along with the conductive body. A high frequency lighting type light source device has a light source to which high frequency power is supplied and a feeder cable electrically connected to the light source, wherein the feeder cable consists of the conductor for high frequency.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a high-frequency conductor and a high-frequency lighting type light source device. More specifically, the present invention relates to a high-frequency lead used as a power supply line for a light source that is lit by high-frequency power such as an excimer lamp, and a high-frequency lighting type light source device including a light source that is lit by high-frequency power and the high-frequency lead.

Conventionally, as a light source that is lit by high-frequency power (hereinafter, also referred to as “high-frequency light source”), for example, an excimer lamp, a fluorescent lamp (specifically, a high-frequency fluorescent lamp) There are discharge lamps such as arc type metal halide lamps, and light emitting elements such as LED elements.
These high-frequency light sources are widely used as light sources of light source devices (see, for example, Patent Documents 1 to 3).
Specifically, in Patent Document 1, a fluorescent lamp is electrically connected to a high-frequency inverter via a power supply line, and high-frequency power (specifically, for example, power having a frequency of 45 kHz) is supplied from the high-frequency inverter. A high-frequency lighting type light source device having a configuration in which the fluorescent lamp is turned on is disclosed. In this high-frequency lighting type light source device, the fluorescent lamp includes a straight tubular arc tube sealed at both ends, a fluorescent paint is applied to the inner peripheral surface of the arc tube, and the inside of the optical tube is A pair of electrodes are arranged to face each other.
In Patent Document 2, an excimer lamp is electrically connected to a push-pull type inverter circuit via a power supply line, and high-frequency power (specifically, a frequency of 20 to 100 kHz) output from the inverter circuit. A high frequency lighting type light source device is disclosed in which the excimer lamp is lit by being supplied with a rectangular wave power. In this high-frequency lighting optical device, the high-frequency power applied to the excimer lamp is obtained when the voltage changes steeply when the polarity of the inverter circuit is reversed, and a steep current is generated in the excimer lamp due to this steep voltage change. Is.
Patent Document 3 discloses a configuration in which an LED element is electrically connected to an LED driving device via a power supply line, and the LED element is turned on when output power is supplied from the LED driving device. A high-frequency lighting type light source device is disclosed.
In this high-frequency lighting optical device, the LED driving device includes a booster circuit and a step-down circuit, and the step-down circuit allows low-frequency pulse width modulation control (PWM control) and high-frequency (specifically, the frequency is reduced). The LED element is dimmed by performing PWM control of several tens of kHz to several hundreds of kHz.

Japanese Patent Laid-Open No. 9-298045 Japanese Patent Laid-Open No. 11-331506 JP 2013-110061 A

In such a high-frequency lighting type light source device, when the high-frequency light source is turned on, a high-frequency current flows through the feeder line. And the high frequency current which flows through a feeder line concentrates on the surface of the electroconductive strand which comprises the said feeder line by the skin effect. That is, the current density becomes extremely large on the surface of the conductive wire. For this reason, the AC resistance (power loss) of the feeder line is increased.
Thus, in a high-frequency light source, a single core wire made of one conductive wire is not a single-core conductor wire covered with an insulating material, but a large number of thin conductive wires are bundled as a feed line. A multi-core conductor whose core wire is covered with an insulating material is used. As this multi-core wire, a twisted wire obtained by twisting a large number of thin conductive wires is widely used.
By using a multi-core conducting wire as the feed line, a high-frequency current can be efficiently passed through a feed line (core wire) having an intended cross-sectional area.

Compared to single-core conductors with the same cross-sectional area of the core wires, and conductors having core wires in which the number of conductive strands less than the number of conductive strands constituting the multi-core conductor wires is bundled. Therefore, the wiring is easy because it is more flexible.
However, during the manufacturing operation of the high-frequency lighting type light source device and during the replacement work of the constituent members (specifically, for example, the high-frequency light source) of the high-frequency lighting type light source device, the feeder line has high flexibility. Due to this, various problems arise.
Specifically, particularly when the high-frequency lighting type light source device includes a plurality of high-frequency light sources, the power supply line hangs down during the operation (specifically, during the manufacturing operation and the replacement operation) It is difficult to work because a plurality of power supply lines are entangled with each other.
In addition, in a high-frequency lighting type light source device configured such that a high-frequency voltage is applied from a high-frequency power source to a high-frequency light source, specifically, an insulation distance should be secured so that a plurality of feeder lines do not approach each other. In addition, it may be necessary to support and fix each of the plurality of feeder lines using a fixing member. Here, in a high-frequency lighting type light source device configured to apply a high-frequency voltage from a high-frequency power source to a high-frequency light source, when the feeder lines are brought close to each other, current flows due to capacitive coupling. As a result, the amount of power supplied to the high-frequency light source decreases, and the light emission efficiency decreases.
Further, in the positional relationship with the high-frequency light source and the member electrically connected to the high-frequency light source via the power supply line, the power supply line is supported and fixed by the fixing member so that the power supply line is fixed at a desired position. May need to be done.

The present invention has been made based on the circumstances as described above, and an object thereof is to provide a high-frequency conductor capable of efficiently flowing a high-frequency current and having shape retainability as well as shape workability. It is in.
Another object of the present invention is to provide a high-frequency lighting type light source device that can efficiently supply high-frequency power to a light source and that can obtain high productivity and ease of maintenance.

  The high-frequency conductor of the present invention is characterized by comprising a flexible conductor main body having a bundle of a plurality of conductive wires, and a bendable self-shaped holding strip disposed along the conductor main body.

  In the high-frequency conductor according to the present invention, it is preferable that the conductor main body is formed by covering a bundle of the plurality of conductive strands with an insulating material.

In the high-frequency conductor of the present invention, the bendable self-shaped holding strip preferably has any one of the following configurations (1) to (5).
(1) The bendable self-shaped holding strip is arranged along the conductor main body by a metal wire being supported and fixed by a support member.
(2) The bendable self-shaped holding strip is made of a tubular body, and the conductor main body is inserted into the tubular body.
(3) The bendable self-shaped holding strip is made of a coil-shaped body, and the strands constituting the coil-shaped body are spirally wound around the conductor body.
(4) The bendable self-shaped holding strip is made of a plate-like body provided with a conductor main body holding section at both ends.
(5) The bendable self-shaped holding strip is made of a rod-shaped body, and the conductor body is provided along the rod-shaped body.

The high frequency lighting type light source device of the present invention is a high frequency lighting type light source device comprising a light source to which high frequency power is supplied and a feeder line electrically connected to the light source.
The power supply line is composed of the high-frequency conductor.

  In the high frequency lighting type light source device of the present invention, the light source is preferably an excimer lamp.

The high-frequency conductor of the present invention is composed of a flexible conductor main body having a bundle of a plurality of conductive strands, and a flexible self-shaped holding strip disposed along the conductor main body. For this reason, in the conductor main body, it is possible to suppress the occurrence of the skin effect, so that a high-frequency current can be passed efficiently. Moreover, since the lead wire body is flexible and the bendable self-shaped holding strip is flexible, it can be easily bent into a desired shape by hand. The shape can be retained by the self-shape retaining property of the flexible self-shape retaining strip.
Therefore, according to the high frequency conductor of the present invention, a high frequency current can be efficiently passed, and excellent shape workability and excellent shape retention, that is, excellent lead forming performance can be obtained.

In the high-frequency lighting type light source device of the present invention, the high-frequency lead wire of the present invention is used as a power supply line electrically connected to a light source to which high-frequency power is supplied. That is, a high-frequency conductor that can efficiently flow a high-frequency current and has excellent lead forming performance is used as a power supply line. Therefore, when performing the manufacturing operation of the high-frequency lighting type light source device and the replacement operation of the components in the high-frequency lighting type light source device, the feed line can be lead-formed in advance or during the operation. As a result, during operation, the power supply line does not hang down and entangle with other members, and the power supply line can be arranged in a desired state at a desired position without using a dedicated fixing member.
Therefore, according to the high frequency lighting type light source device of the present invention, high frequency power can be efficiently supplied to the light source, and high productivity and ease of maintenance can be obtained.

It is explanatory drawing which shows notionally an example of a structure of the high frequency lighting type light source device of this invention. It is explanatory drawing which shows an example of a structure of the excimer lamp used as a light source of the high frequency lighting type light source device of this invention of FIG. It is explanatory drawing which shows the method for confirming the softness | flexibility of the conducting wire main body which comprises the conducting wire for high frequencies of this invention. It is explanatory drawing which shows an example of a structure of the 1st high frequency conducting wire of this invention in the state in which the end of the conducting wire main body which comprises the said 1st high frequency conducting wire was electrically connected to the light source. It is explanatory drawing which shows an example of a structure of the 2nd high frequency conducting wire of this invention in the state in which the end of the conducting wire main body which comprises the said 2nd high frequency conducting wire was electrically connected to the light source. It is explanatory drawing which shows an example of a structure of the 3rd high frequency conducting wire of this invention in the state in which the end of the conducting wire main body which comprises the said 3rd high frequency conducting wire was electrically connected to the light source. It is explanatory drawing which shows an example of a structure of the 4th high frequency conductor of this invention, Comprising: (a) comprises the said 4th high frequency conductor of an example of a structure of the 4th high frequency conductor of this invention. It is explanatory drawing shown in the state electrically connected to the light source at the end of the conducting wire main body to perform, (b) is explanatory drawing which shows the plate-shaped body which comprises the 4th high frequency conducting wire of (a). It is explanatory drawing which shows the other example of a structure of the 4th high frequency conductor of this invention, Comprising: (a) is the 4th high frequency of the other example of the structure of the 4th high frequency conductor of this invention. It is explanatory drawing shown in the state electrically connected to the light source in the end of the conducting wire main body which comprises a conducting wire, (b) is explanatory drawing which shows the plate-shaped body which comprises the 4th high frequency conducting wire of (a). FIG. It is explanatory drawing which shows an example of a structure of the 5th high frequency conductor of this invention, Comprising: (a) comprises the said 5th high frequency conductor in an example of a structure of the 5th high frequency conductor of this invention. It is explanatory drawing shown in the state electrically connected to the light source in the end of the conducting wire main body to do, (b) is explanatory drawing which shows the tubular body which comprises the 5th high frequency conducting wire of (a). It is explanatory drawing which shows an example of a structure of the 6th high frequency conductor of this invention, Comprising: (a) comprises the said 6th high frequency conductor of an example of a structure of the 6th high frequency conductor of this invention. It is explanatory drawing shown in the state electrically connected to the light source at the end of the conducting wire main body to perform, (b) is explanatory drawing which shows the tube-shaped part which comprises the 6th high frequency conducting wire of (a). It is explanatory drawing which shows an example of a structure of the 7th high frequency conducting wire of this invention in the state in which the end of the conducting wire main body which comprises the said 7th high frequency conducting wire was electrically connected to the light source. It is explanatory drawing which shows an example of a structure of the 8th high frequency conducting wire of this invention in the state in which the end of the some conducting wire main body which comprises the said 8th high frequency conducting wire was electrically connected to the light source.

  Hereinafter, embodiments of the high-frequency lighting type light source device of the present invention and the high-frequency conductor of the present invention will be described.

FIG. 1 is an explanatory diagram conceptually showing an example of the configuration of the high-frequency lighting type light source device of the present invention.
The high-frequency lighting type light source device 10 includes a light source (high-frequency light source) 11 that is supplied with high-frequency power and is lit by the high-frequency power, and a power source 12 for supplying high-frequency power to the high-frequency light source 11. Are electrically connected via the feeder line 15.

As the high-frequency light source 11, for example, a discharge lamp such as an excimer lamp, a fluorescent lamp (specifically, a fluorescent lamp dedicated to high-frequency lighting) and a long arc type metal halide lamp, and a light-emitting element such as an LED element are used.
In the example of this figure, an excimer lamp is used as the high frequency light source 11.
As shown in FIG. 2, the excimer lamp includes a plate-like discharge vessel 21 having a discharge space formed therein and elongated in one direction as a whole, and the discharge space of the discharge vessel 21 includes the discharge vessel 21. Excimer gas is hermetically sealed. Of the four peripheral side surfaces extending along the longitudinal direction of the discharge vessel 21, a net-like high-voltage side electrode 22 is disposed on the outer surface of one wide peripheral side surface 21a, and the other wide side facing the peripheral side surface 21a. A net-like earth side electrode is arranged on the outer surface of the peripheral side surface. A ceramic base 25 is mounted on each of both ends of the excimer lamp (discharge vessel 21) in a state where a part of the discharge vessel 21 is received and held.

As the power source 12, a power source capable of supplying high frequency power to the high frequency light source 11 is used. Specifically, when a discharge lamp is used as the high-frequency light source 11, one capable of supplying alternating sine wave power having a frequency of several kHz to several hundred kHz to the high-frequency light source is used. Here, the lighting frequency of the fluorescent lamp (high-frequency lighting dedicated fluorescent lamp) is 20 to 70 kHz, and the lighting frequency of the excimer lamp is 20 to 200 kHz. When a light emitting element (LED element) is used as the high frequency light source 11, a power supply 12 that can supply pulsating rectangular wave power to the high frequency light source 11 is used.
Specific examples of the power supply 12 include a high-frequency power supply, a DC power supply and a push-pull inverter circuit, and a configuration capable of outputting high-frequency power from the inverter circuit. That is, the power supply 12 supplies a high-frequency power to the high-frequency light source 11 by causing the voltage to change steeply in the polarity reversal of the inverter circuit and generating a steep current in the high-frequency light source 11 by this steep voltage change. The thing of a structure can be used.
In the example of this figure, a high frequency power source is used as the power source 12.

As the power supply line 15, a flexible lead body having a bundle of a plurality of conductive strands (hereinafter also referred to as “strand bundle”), and a bendable self-shaped holding strip disposed along the lead body. In other words, the high-frequency conductive wire of the present invention is used.
Here, in this specification, as shown in FIG. 3, the “flexible conductor main body” means a position where the distance D from the tip T is 100 mm in a state where the conductor main body 16 is held horizontally. In addition, when a 10 g weight 19 is added to the tip T, the tip T has a flexibility in which the sag length L is 10 mm or more.
In FIG. 3, the conductor main body 16 in a state where it is held horizontally before the weight 19 is added to the tip T is indicated by a broken line, and the conductor main body 16 in a state where the weight 19 is added to the tip T is a solid line. It is shown in

  As the strand bundle, a configuration in which a plurality of conductive strands are simply bundled or a configuration in which a plurality of conductive strands are twisted can be used, but a plurality of conductive strands are twisted together. Or a structure such as a litz wire (specifically, a structure in which conductive strands covered with an insulating material are twisted together) is preferable.

The number of conductive wires constituting the wire bundle depends on the outer diameter (cross-sectional area) of the conductive wires, and the material of the conductive wires, the type of the high frequency light source 11 and the high frequency supplied to the high frequency light source 11 It is determined appropriately in consideration of the frequency of power.
Specifically, the number of conductive wires in the wire bundle is preferably 7 or more, and more preferably 19 or more when the AWG (American Wire Gauge) value of the wire bundle is 18, for example. And it is 37 or less. Here, in the present specification, the “AWG value of the strand bundle” indicates the total cross-sectional area of the plurality of conductive strands constituting the strand bundle.
If the number of conductive strands in the strand bundle is too small, the AC resistance (power loss) of the strand bundle is increased due to the occurrence of the skin effect. There is a risk that high-frequency power cannot be supplied.
In addition, when the number of the conductive wires is excessive, in the conductor main body, the electrical connection member such as the crimp terminal is subjected to connection processing (terminal processing), thereby causing disconnection in a part of the conductive wire, As a result, the mechanical strength may be reduced and the electrical resistance may be increased at the connection portion with the electrical connection member.

An annealed copper wire is used as the conductive strand.
The outer diameter of the conductive wire is preferably 0.5 mm (φ0.5) or less from the viewpoint of skin effect suppression and flexibility in the conductor body.

It is preferable that the lead wire body is formed by covering a wire bundle with a covering layer made of an insulating material.
In order to ensure insulation between the lead wire main body and the flexible self-shaped holding strip, the flexible main body is a flexible self-shaped holding strip. Since the material and shape of the body and the positional relationship between the conductor body and the flexible self-shaped holding strip are not limited, the degree of freedom in designing the high-frequency conductor is increased.
Further, the conductive main body is electrically insulated from the conductive main body and the flexible self-shaped holding strip, for example, because the flexible self-shaped holding strip has an insulating property. As long as it is in the state, the wire bundle may not be covered with the coating layer. That is, the conductive main body may be made of a wire bundle.

It is preferable that the coating layer has an insulating property and a flexibility approximating that of the wire bundle in order to make the conductor body have a desired flexibility.
As the insulating material constituting the coating layer, fluororesin, silicone and the like are used.
Further, the thickness of the coating layer is appropriately determined according to the material of the coating layer and the like, and considering the flexibility required for the coating layer.

  In a state where the flexible self-shaped holding strip is arranged along the conductor main body, the conductor main body to which the flexible self-shaped holding strip is attached is manually shaped without using a tool. It has a flexible self-shape-holding function that can be bent and hold its shape. That is, the bendable self-shape-holding strip has excellent flexibility (shape workability) and excellent work shape retention.

Specific examples of the bendable self-shaped holding strip include various configurations described later.
Which configuration of the flexible self-shape holding body is used depends on the flexibility of the conductor body, the construction of the conductor body (specifically, for example, the length and outer diameter of the conductor body, and the type of insulating material constituting the conductor body) ) And the like are selected as appropriate.

(First flexible self-shaped holding strip)
FIG. 4 illustrates an example of the configuration of the first high-frequency conductor according to the present invention in a state where one end of a conductor main body constituting the first high-frequency conductor is electrically connected to a light source (high-frequency light source). FIG.
In the first high-frequency conductor 30, one end of the conductor body 16 is inserted into a base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of an excimer lamp shown in FIG. In FIG. 2, the electrode is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
The first bendable self-shaped holding strip 31 constituting the first high-frequency conductor 30 includes a metal wire 32 and a support member 34, and the metal wire 32 is supported and fixed by the support member 34. Thus, the conductor body 16 is configured to extend along the length direction. The support member 34 has a tubular shape and is disposed so as to extend along the conductor body 16 and the metal wire 32 so as to cover the conductor body 16 and the metal wire 32.
In the first bendable self-shaped holding strip 31, the metal wire 32 requires bendability (shape workability) and work shape retainability, and the support member 34 has bendability (shape workability). ) Is required.

The metal wire 32 is made of stainless steel, nickel, iron, or the like. When the conductor main body 16 is made of a strand of wires, that is, the strand of wire is not covered with a coating layer, the metal wire 32 is a metal strand made of stainless steel, nickel, iron, or the like. What is covered with an insulating material is used.
The length (full length) of the metal wire 32 depends on the length of the conductor main body 16 (specifically, the length of the region protruding outside from the base 25), the outer diameter of the conductor main body 16, and the conductor main body. It is determined appropriately in consideration of the weight of 16, etc.
Specifically, the length of the metal wire 32 is preferably slightly shorter than the length of the lead wire body 16 from the viewpoints of handleability and workability. Alternatively, the metal wire 32 may have a length approximately the same as that of the conductor main body 16, and the metal wire 32 may be attached to the entire region of the conductor main body 16 protruding from the base 25.
The outer diameter of the metal wire 32 depends on the material of the metal wire 32, takes into account the dimensions of the conductor main body 16 (specifically, the outer diameter and length), the weight of the conductor main body 16, and the like. It is determined as appropriate.
In the example of this figure, the metal wire 32 is slightly shorter than the length of the conductor main body 16 and is disposed at the center of the conductor main body 16. That is, the metal wire 32 is not attached to both ends of the region of the conductor body 16 that protrudes from the base 25 to the outside.

The support member 34 may be any member that can support the metal wire 32 so as to extend along the conductor main body 16. Specifically, it may be constituted by a tubular body having a length substantially equal to the length (full length) of the metal wire 32, and may cover the metal wire 32 entirely or substantially entirely. It may be configured by a plurality of tube-shaped portions, and the metal wire 32 may be partially covered by the plurality of tube-shaped portions. Further, the support member 34 does not necessarily have to be in close contact with the conductor main body 16, but may be in close contact.
In the example of this figure, the support member 34 is configured by a long cylindrical tubular body that is slightly shorter than the length (full length) of the metal wire 32, and covers the central portion of the metal wire 32. That is, both end portions of the metal wire 32 are not covered with the support member 34, and are protruded from the support member 34. Further, the tubular body constituting the support member 34 is provided in close contact with the metal wire 32 and the conductor main body 16.

The support member 34 preferably has a flexibility equal to or higher than that of the metal wire 32 in order to make the first high-frequency conductor 30 have sufficient flexibility (shape workability).
Examples of the material of the support member 34 include polyolefin resin, fluororesin, thermoplastic elastomer, and silicone. In order to provide the support member 34 in close contact with the metal wire 32 and the conductor main body 16, a heat shrinkable tube can also be used as the support member forming material.
Further, the thickness of the support member 34 is appropriately determined according to the material of the support member 34 and the like, and considering the flexibility required for the support member 34.
In the example of this figure, the support member 34 is obtained by using a heat shrinkable tube as a support member forming material.

(Second flexible self-shaped holding strip)
FIG. 5 shows an example of the configuration of the second high-frequency conductor according to the present invention in a state where one end of a conductor main body constituting the second high-frequency conductor is electrically connected to a light source (high-frequency light source). FIG.
In the second high-frequency conductor 35, one end of the conductor body 16 is inserted into a base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of the excimer lamp shown in FIG. In FIG. 2, the electrode is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
The second bendable self-shaped holding strip constituting the second high-frequency conductor 35 is composed of a cylindrical tube-shaped body 36 having bendability (shape workability) and work shape holdability. The conductor body 16 is inserted into the tube-shaped body 36 so as to extend along the length direction of the conductor body 16. One end portion (right end portion in FIG. 5) of this tubular body 36 is supported and fixed to the base 25 by being embedded in the base 25.

The tubular body 36 is made of metal or resin. In particular, when the conductor body 16 is made of a wire bundle, that is, the wire bundle is not covered with a coating layer, the tubular body 36 is made of a resin (specifically, an insulating resin). A thing formed by covering a tubular base material made of metal or metal with an insulating material is used.
Examples of the resin constituting the tubular body 36 include polytetrafluoroethylene resin and silicone resin.
Examples of the metal constituting the tubular body 36 include aluminum, copper, and iron. Moreover, when the tube-shaped body 36 consists of a metal, it is preferable that the metal tube-shaped body 36 is what was annealed from a viewpoint of flexibility (shape workability).

The length of the tubular body 36 (specifically, the length of the region protruding outward from the base 25, hereinafter also referred to as “projection length”) is the length (specifically, the length of the conductor body 16). Specifically, the length is appropriately determined according to the length of the region protruding from the base 25 to the outside and taking into consideration the outer diameter of the conductor main body 16 and the weight of the conductor main body 16. Specifically, the protruding length of the tubular body 36 is preferably slightly shorter than the length of the conductor body 16 from the viewpoints of handleability and workability.
Further, the inner diameter of the tubular body 36 is set to a size suitable for the outer diameter of the conductor main body 16.
The thickness of the tube-like body 36 depends on the material of the tube-like body 36, takes into account the dimensions of the conductor body 16 (specifically, the outer diameter and length), the weight of the conductor body 16, and the like. Are determined appropriately.
In the example of this figure, the tubular body 36 is slightly shorter than the length of the conductor body 16, and one end portion (the right end portion in FIG. 5) of the region projecting outside from the base 25 in the conductor body 16, and It is arranged in a region extending over the central part. That is, the tubular body 36 is not disposed at the other end portion (the left end portion in FIG. 5) of the conductor body 16 that protrudes from the base 25 to the outside. It is in a state protruding from 36.

(Third bendable self-shaped holding strip)
FIG. 6 illustrates an example of the configuration of the third high-frequency conductor according to the present invention in a state where one end of a conductor body constituting the third high-frequency conductor is electrically connected to a light source (high-frequency light source). FIG.
In the third high-frequency conductor 40, one end of the conductor body 16 is inserted into a base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of an excimer lamp shown in FIG. In FIG. 2, the electrode is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
The third bendable self-shaped holding strip constituting the third high-frequency conductor 40 has a coil shape made of a non-elastic material strand having bendability (shape workability) and work shape holdability. The coil-like body 41 is arranged so as to extend along the length direction of the conductor main body 16 in a state in which the element wire is spirally wound around the outer peripheral surface of the conductor main body 16. It is a thing of composition.
Here, as an example of a method for disposing the third bendable self-shaped holding strip (coiled body 41) on the conductor main body 16, the conductor main body 16 and the wire for forming the coiled body 41 are used. Is prepared, and the wire is spirally wound around the outer peripheral surface of the conductor main body 16 from one end side to the other end side of the conductor main body 16. As another method, a conductor main body 16 and a coiled body 41 having an inner diameter (coil inner diameter) substantially equal to the outer diameter of the conductor main body 16 are prepared, and the conductor main body is provided inside the coiled body 41. A method of inserting 16 is used.

The strands constituting the coiled body 41 are required to have flexibility (shape workability) and work shape retention.
And as a strand which comprises the coil-shaped body 41, what consists of metals, such as stainless steel, nickel, iron, copper, aluminum, and resin is used. In particular, when the conductor main body 16 is made of a wire bundle, that is, the wire bundle is not covered with a coating layer, the coiled body 41 is made of a resin (specifically, an insulating resin). Or a coiled base material made of metal and coated with an insulating material is used.
The length (full length) of the coil-like body 41 depends on the length of the conductor main body 16 (specifically, the length of the region protruding outside from the base 25), the outer diameter of the conductor main body 16, and the conductor It is determined appropriately in consideration of the weight of the main body 16 and the like. Specifically, the length of the coil-like body 41 is preferably slightly shorter than the length of the conductor body 16 from the viewpoints of handleability and workability.
Further, the outer diameter of the wire constituting the coil-like body 41 depends on the material of the wire, the dimensions of the conductor body 16 (specifically, the outer diameter and length, the coil pitch), and the conductor body 16 It is determined appropriately in consideration of the weight of
In the example of this figure, the coil-like body 41 is slightly shorter than the length of the conductor main body 16 and is disposed at the center of the region of the conductor main body 16 that protrudes from the base 25 to the outside. That is, the coil-shaped body 41 is not disposed at both ends of the region of the conductor body 16 that protrudes outside from the base 25, and the both ends are in a state of projecting from the coil-shaped body 41. .

(Fourth flexible self-shaped holding strip)
FIG. 7 is an explanatory view showing an example of the configuration of the fourth high-frequency conductor of the present invention. FIG. 7A shows an example of the configuration of the fourth high-frequency conductor of the present invention. It is explanatory drawing shown in the state electrically connected to the light source (high frequency light source) of the one end of the conducting wire main body which comprises the conducting wire for (b), (b) is plate shape which comprises the 4th high frequency conducting wire of (a) It is explanatory drawing which shows a body. FIG. 8 is an explanatory view showing another example of the configuration of the fourth high-frequency conductor of the present invention. FIG. 8A shows another example of the configuration of the fourth high-frequency conductor of the present invention. FIG. 8 is an explanatory view showing a state in which one end of a conductor main body constituting the fourth high-frequency conductor is electrically connected to a light source (high-frequency light source), and (b) is a fourth high-frequency conductor in (a). It is explanatory drawing which shows the plate-shaped body which comprises conducting wire.
In these fourth high-frequency conductors 43 and 46, one end of the conductor body 16 is inserted into the base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of the excimer lamp shown in FIG. In the base 25, it is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
Each of the fourth bendable self-shaped holding strips constituting the fourth high-frequency conducting wires 43 and 46 is flexible (shaped processing) in which a conducting wire main body holding portion is provided at each of both end portions. ) And a processed shape retaining property, and the plate-like members 44 and 47 are supported and fixed in a plurality of conductor main body holding portions, thereby along the length direction of the conductor main body 16. It is the thing of the structure arrange | positioned so that it may extend. In the plate-like bodies 44 and 47, when the conductor main body holding portion is provided in a region other than both ends, specifically, in a region between the conductor main body holding portions provided at both ends, the conductor main body in the region is provided. The arrangement position of the holding portion is appropriately determined according to the length of the plate-like bodies 44 and 47 and the like.
In the example of FIG. 7, the plate-like body 44 has a long rectangular flat substrate 45A, and a conductor main body holding portion is provided at each of both ends of the rectangular flat substrate 45A. Each conductor main body holding portion has two rectangular plate pieces 45B extending from each of the long side edges of the rectangular flat substrate 45A in a direction perpendicular to the length direction of the plate member 44 (the length direction of the rectangular flat substrate 45A). , 45B, and the rectangular plate pieces 45B, 45B are bent so as to be wound around the conductor body 16, thereby supporting the conductor body 16. The two rectangular plate pieces 45 </ b> B and 45 </ b> B are arranged so as to be close to each other without overlapping each other in a state of being bent so as to be wound around the conductor body 16. On the other hand, in the example of FIG. 8, the plate-like body 47 has a long rectangular flat plate shape, and a conductor main body holding portion is provided at each of both ends. Each conductor main body holding portion is a tunnel formed by squeezing and bulging portions 47a and 47a defined by two cuts extending parallel to a direction orthogonal to the length direction of the plate-like body 47. The conductor body 16 is supported by inserting the conductor body 16 into the space 48, 48 and sandwiching it.

As the plate-like bodies 44 and 47, those made of an appropriate material according to the flexible self-shape holding function required for the flexible self-shape holding strip can be used.
Specifically, the plate-like bodies 44 and 47 are made of a metal such as stainless steel, nickel, iron, copper, or aluminum, and a resin. Alternatively, a combination of a plurality of materials such as ceramics can be used. In particular, when the conductor body 16 is made of a wire bundle, that is, the wire bundle is not covered with a coating layer, the plate-like bodies 44 and 47 are made of resin (specifically, insulating resin). Made of a resin (specifically insulating resin) and ceramics (specifically insulating ceramic), or a metal plate-like substrate covered with an insulating material. .
The length (full length) of the plate-like bodies 44 and 47 depends on the length of the conductor main body 16 (specifically, the length of the region protruding outside from the base 25), and the outer diameter of the conductor main body 16; It is determined appropriately in consideration of the weight of the conductor main body 16 and the configuration of the conductor main body holding portion. Specifically, the lengths of the plate-like bodies 44 and 47 are preferably slightly shorter than the length of the conductor body 16 from the viewpoints of handleability and workability.
The widths of the plate-like bodies 44 and 47 are appropriately determined according to the material of the plate-like bodies 44 and 47, the outer diameter of the conductor main body 16, the configuration of the conductor main body holding portion, and the like.
The thicknesses of the plate-like bodies 44 and 47 depend on the material of the plate-like bodies 44 and 47, the dimensions of the conductor main body 16 (specifically, the outer diameter and length), the weight of the conductor main body 16, It is determined as appropriate in consideration of the configuration of the conductor main body holding portion.

(Fifth flexible self-shaped holding strip)
FIG. 9 is an explanatory view showing an example of the configuration of the fifth high-frequency conductor of the present invention. FIG. 9A shows an example of the configuration of the fifth high-frequency conductor of the present invention. It is explanatory drawing shown in the state electrically connected to the light source (high frequency light source) of the one end of the conducting wire main body which comprises the conducting wire for (b), (b) is the tube shape which comprises the 5th high frequency conducting wire of (a) It is explanatory drawing which shows a body.
In the fifth high-frequency conductor 50, one end of the conductor body 16 is inserted into a base 25 attached to the high-frequency light source 11 (discharge vessel 21) composed of the excimer lamp shown in FIG. In FIG. 2, the electrode is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
The fifth bendable self-shaped holding strip that constitutes the fifth high-frequency conductor 50 is a tubular body in which a plurality of tubular portions 52A, 52B, and 52C are connected via hinge portions 53A and 53B. 51, and is configured to be disposed so as to extend along the length direction of the conductor body 16 by inserting the conductor body 16 into the tubular body 51. Here, the tubular body 51 may have a notch in a part thereof. Specifically, each of the tubular portions 52A, 52B, 52C constituting the tubular body 51 may have a cutout portion extending in the axial direction of the tubular portion. The tubular body 51 is bent at the hinge portions 53A and 53B. That is, the tubular body 51 exhibits flexibility (shape workability) due to hinge bending at the hinge portions 53A and 53B and also exhibits work shape retention due to hinge bending retention at the hinge portions 53A and 53B. is there.
Here, as an example of a method for producing the fifth bendable self-shaped holding strip (tube-like body 51), it has hinge bendability (shape workability) and hinge bendability (work shape holdability). A method of preparing a tubular tube-shaped material and forming a cut portion extending in the radial direction of the tube-shaped material in the tube-shaped material is exemplified. In this method, the hinge portions 53A and 53B are formed by the remaining cut portions. Further, the position of the hinge portion in the circumferential direction is appropriately determined by the shape processing direction.
In the example of this figure, the tubular body 51 is obtained by forming two cut portions extending in a direction perpendicular to the tube axis of a cylindrical tubular body material, and includes three tubular portions 52A. , 52B, 52C and two hinge portions 53A, 53B. The two hinge portions 53A and 53B are configured so that the first tube-shaped portion 52A and the third tube-shaped portion 52C are bent at a right angle with respect to the second tube-shaped portion 52B. The tube axis of the tubular part 52A and the tube axis of the third tubular part 52C are arranged so as to be located on the same straight line when viewed from the tube axis direction of the second tubular part 52B. .

As the tube-like body 51, a material made of a metal such as stainless steel, nickel, iron, copper, or aluminum and a resin is used. In particular, when the conductor body 16 is made of a wire bundle, that is, the wire bundle is not covered with a coating layer, the tubular body 51 is made of a resin (specifically, an insulating resin). A thing formed by covering a tubular base material made of metal or metal with an insulating material is used.
The length of the tubular body 51 depends on the length of the conductor main body 16 (specifically, the length of the region protruding outside from the base 25), the outer diameter of the conductor main body 16, and the length of the conductor main body 16. It is determined appropriately in consideration of weight and the like. Specifically, the length of the tubular body 51 is preferably slightly shorter than the length of the conductor body 16 from the viewpoints of handleability and workability. The lengths of the plurality of tube-like portions 52A, 52B, 52C constituting the tube-like body 51 are the flexibility (shape) required for the tube-like body 51, that is, the fifth bendable self-shaped holding strip. It is appropriately determined in consideration of processability (specifically, a bendable part) and the like. Here, the plurality of tubular portions 52A, 52B, and 52C may all have the same length, or at least some of them may have different lengths.
Further, the inner diameter of the tubular body 51 is set to a size suitable for the outer diameter of the conductor body 16.
In addition, the thickness of the tubular body 51 depends on the material of the tubular body 51, takes into account the dimensions (specifically, the outer diameter and length) of the conductor body 16, the weight of the conductor body 16, and the like. Are determined appropriately.
In the example of this figure, the tubular body 51 is slightly shorter than the length of the conductor main body 16. Further, the inner diameter of the tubular body 51 is slightly larger than the outer diameter of the conductor body 16 and smaller than the outer diameter (maximum outer diameter) of the crimp terminal 17. The tubular body 51 is slidably disposed along the length direction of the conductor body 16 in a state where the tube axes of the three tubular portions 52A, 52B, and 52C are coincident.

(Sixth bendable self-shaped holding strip)
FIG. 10 is an explanatory view showing an example of the configuration of the sixth high-frequency conductor of the present invention. FIG. 10A shows an example of the configuration of the sixth high-frequency conductor of the present invention. It is explanatory drawing shown in the state electrically connected to the light source (high frequency light source) at the end of the conducting wire main body which comprises the conducting wire for (b), (b) is the tube shape which comprises the 6th high frequency conducting wire of (a). It is explanatory drawing which shows a part.
In the sixth high-frequency conductor 55, one end of the conductor body 16 is inserted into the base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of the excimer lamp shown in FIG. In FIG. 2, the electrode is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
The sixth bendable self-shaped holding strip that constitutes the sixth high-frequency conductor 55 is composed of a tubular body 56 in which a plurality of tubular portions 57A, 57B, 57C are connected by a fixing member 58, The conductor body 16 is inserted into the tubular body 56 so as to extend along the length direction of the conductor body 16. The tubular body 56 is formed by bending a connecting portion of the tubular portions adjacent to each other, which is formed by the fixing member 58, as a rotation fulcrum. That is, the tube-like body 56 exhibits flexibility (shape workability) due to bending at the connection portion and also exhibits work shape retention due to friction generated at the connection portion.
In the example of this figure, the tubular body 56 is constituted by three substantially elliptical tubular portions 57A, 57B, 57C and two fixing members 58. Each of the tubular portions 57A, 57B, 57C has a substantially rectangular shape that extends from the one end of the elliptic cylinder portion 57a and one end of the elliptic cylinder portion 57a so as to face each other and protrude outward in the longitudinal direction of the elliptic cylinder portion 57a. It has the front-end | tip parts 57b and 57b. Circular fixing holes 59A and 59A are formed so as to face each other on one end side (the right end side in FIG. 10B) of the tip portions 57b and 57b. Further, on the other end side (the left end side in FIG. 10) of the elliptical cylinder part 57a, a circular fixing is provided on each of the extension lines of the center line extending in the length direction of the elliptical cylinder part 57a in the fixing holes 59A and 59A. The use holes 59B are formed to face each other. Then, a common fixing member 58 is inserted into the fixing hole 59B in the first tube-shaped portion 57A and the fixing hole 59A in the second tube-shaped portion 57B, so that the first tube-shaped portion 57A and the first tube-shaped portion 57A The second tubular portion 57B is connected, and a common fixing member 58 is inserted into the fixing hole 59B in the second tubular portion 57B and the fixing hole 59A in the third tubular portion 57C. Thus, the second tubular portion 57B and the third tubular portion 57C are connected.

As the tube-shaped portions 57A, 57B, and 57C constituting the tube-shaped body 56, those made of a metal such as stainless steel, nickel, iron, copper, and aluminum, a resin, and ceramics are used. In particular, when the conductor main body 16 is made of a wire bundle, that is, the wire bundle is not covered with a coating layer, the tubular body 56 is made of a resin (specifically, an insulating resin). Or a ceramic substrate (specifically, an insulating ceramic), or a tube-shaped substrate made of metal and covered with an insulating material. Here, the tube-shaped portions 57A, 57B, and 57C may have bendability (shape processability) and process shape retainability, but do not have bendability and process shape retainability. Also good.
The length of the tubular body 56 depends on the length of the conductor main body 16 (specifically, the length of the region protruding outside from the base 25), the outer diameter of the conductor main body 16, and the length of the conductor main body 16. It is determined appropriately in consideration of weight and the like. Specifically, the length of the tubular body 56 is preferably slightly shorter than the length of the conductor body 16 from the viewpoints of handleability and workability. The plurality of tube-like portions 57A, 57B, 57C constituting the tube-like body 56 are the flexibility (shape workability) required for the tube-like body 56, that is, the sixth bendable self-shaped holding strip. (Specifically, it is determined appropriately in consideration of the bendable part). Here, the plurality of tubular portions 57A, 57B, and 57C may all have the same length, or at least some of them may have different lengths.
Further, the inner diameter of the tubular body 56 is set to a size suitable for the outer diameter of the conductor body 16.
The thickness of the tube-like body 56 (tube-like portions 57A, 57B, 57C) depends on the material of the tube-like body 56 (tube-like portions 57A, 57B, 57C) and the dimensions of the conductor body 16 (specifically, Is appropriately determined in consideration of the outer diameter and length), the weight of the conductor body 16, and the like.
In the example of this figure, the tubular body 56 is slightly shorter than the length of the conductor main body 16. Further, the inner diameter (maximum inner diameter) of the tubular body 56 is slightly larger than the outer diameter of the conductor body 16 and smaller than the outer diameter (maximum outer diameter) of the crimp terminal 17. The tubular body 56 is slidably disposed along the length direction of the conductor body 16 in a state where the tube axes of the three tubular portions 57A, 57B, and 57C coincide.

(Seventh flexible self-shaped holding strip)
FIG. 11 illustrates an example of the configuration of the seventh high-frequency conductor of the present invention in a state where one end of a conductor body constituting the seventh high-frequency conductor is electrically connected to a light source (high-frequency light source). FIG.
In the seventh high-frequency conductor 60, one end of the conductor body 16 is inserted into a base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of an excimer lamp shown in FIG. In FIG. 2, the electrode is electrically connected to a high frequency light source (specifically, an external lead). The other end of the conductor main body 16 is a free end, and a crimp terminal 17 is provided at the other end. The other end of the conductor main body 16 is electrically connected to the power source 12 (see FIG. 1) via the crimp terminal 17.
The seventh bendable self-shaped holding strip constituting the seventh high-frequency conductor 60 is composed of a rod-shaped body 61 having bendability (shape workability) and processed shape-holding property. When the conductor main body 16 is provided, the conductor main body 16 is arranged so as to extend along the length direction of the conductor main body 16. Here, the rod-shaped body 61 may have a hollow structure. One end portion (right end portion in FIG. 11) of the rod-like body 61 is supported and fixed to the base 25 by being embedded in the base 25.
In the example of this figure, the conducting wire main body 16 is in a state of being spirally wound around the outer peripheral surface of the rod-shaped body 61. Here, the conducting wire main body 16 may be fixed to the outer peripheral surface of the rod-shaped body 61 at several places by a binding belt or the like.

The rod-shaped body 61 is made of metal or resin. In particular, when the conductor body 16 is made of a wire bundle, that is, the wire bundle is not covered with a coating layer, the rod-like body 61 is made of a resin (specifically, an insulating resin). Alternatively, a tube-shaped substrate made of a metal and coated with an insulating material is used.
Examples of the resin constituting the rod-shaped body 61 include polytetrafluoroethylene resin, silicone resin, and fluororesin.
Examples of the metal constituting the rod-shaped body 61 include aluminum, copper, stainless steel, and iron. When the rod-shaped body 61 is made of metal, the metal rod-shaped body 61 is preferably annealed from the viewpoint of flexibility (shape workability).

The length (full length) of the rod-shaped body 61 is appropriately determined according to the length of the conductor main body 16 (specifically, the length of the region protruding outside from the base 25). Specifically, the length of the rod-shaped body 61 is preferably shorter than the length of the conductor body 16 from the viewpoints of handleability and workability.
The cross-sectional shape of the rod-shaped body 61 is preferably circular (for example, an annular shape when the rod-shaped body 61 has a hollow structure) or an elliptical shape (for example, an elliptical ring shape when the rod-shaped body 61 has a hollow structure). Moreover, the cross-sectional shape of the rod-shaped body 61 may be a rectangular shape, a star shape, or the like, and a cross-sectional shape suitable for bending can be appropriately employed.
Further, the outer diameter of the rod-shaped body 61 depends on the material of the rod-shaped body 61, and the dimensions (specifically, the outer diameter and length) of the conductor main body 16 and the weight of the conductor main body 16 are taken into consideration. It is determined as appropriate.
In the example of this figure, the rod-shaped body 61 has a circular cross-sectional shape and is shorter than the entire length of the conductor body 16.

The high-frequency conductor of the present invention having the bendable self-shaped holding strip as described above is arranged along a flexible conductor main body 16 having a bundle of a plurality of conductive strands, and the conductor main body 16. It consists of a flexible self-shaped holding strip. Therefore, in the conductor main body 16, since generation | occurrence | production of a skin effect can be suppressed, a high frequency current can be sent efficiently. Moreover, since the lead wire body 16 is flexible and the bendable self-shaped holding strip has flexibility, it can be easily bent into a desired shape by hand, In addition, the shape can be retained by the self-shape retaining property of the flexible self-shape retaining strip.
Therefore, according to the high frequency conductor of the present invention, a high frequency current can be efficiently passed, and excellent shape workability and excellent shape retention, that is, excellent lead forming performance can be obtained.

In the high-frequency lighting type light source device 10, the high-frequency conductor of the present invention is used as the feeder line 15. That is, a conductive wire that can efficiently flow a high-frequency current and has excellent lead forming performance is used as the feeder line 15. Therefore, when performing the manufacturing operation of the high-frequency lighting type light source device 10 and the replacement operation of the components in the high-frequency lighting type light source device, the feed line 15 can be lead-formed in advance or during the operation. As a result, during operation, the power supply line 15 does not hang down and entangle with other members, and the power supply line 15 can be arranged in a desired state in a desired position without using a dedicated fixing member. In particular, when the power supply 12 is a high-frequency power supply, the power supply line 15 can be disposed in a state where an insulation distance is secured in relation to other power supply lines.
Therefore, according to the high frequency lighting type light source device 10, high frequency power can be efficiently supplied to the light source, and high productivity and ease of maintenance can be obtained.

  In the high-frequency lighting type light source device 10 of the present invention, even when an excimer lamp that requires a high lighting frequency is used as the high-frequency light source 11, a high-frequency current can flow efficiently.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made.
For example, the high-frequency conductor of the present invention has the above-described configuration (specifically, the first high-frequency conductor, the second high-frequency conductor, the third high-frequency conductor, the fourth high-frequency conductor, the fifth high-frequency conductor, The high-frequency conductor, the sixth high-frequency conductor, and the seventh high-frequency conductor) are not limited.
Specifically, as shown in FIG. 12, the high-frequency conductor of the present invention has a plurality of conductors, and the flexible self-shaped holding strip is common to the plurality of conductors. Good.
FIG. 12 shows an example of the configuration of the eighth high-frequency conductor of the present invention, in a state where one end of the conductor main body constituting the eighth high-frequency conductor is electrically connected to the light source (high-frequency light source). It is explanatory drawing shown by.
The eighth high-frequency conductor 70 is composed of a plurality (three in the example of this figure) of conductor bodies 16 and an eighth flexible self-shaped holding strip 71 common to the plurality of conductor bodies 16. It is made up of. In the eighth high-frequency conductor 70, one end of each of the plurality of conductor bodies 16 is inserted into the base 25 attached to the high-frequency light source 11 (discharge vessel 21) made of the excimer lamp shown in FIG. In the base 25, it is electrically connected to a high frequency light source (specifically, an external lead). The other ends of the plurality of conductor main bodies 16 are free ends, and crimp terminals 17 are provided at the other ends. The crimp terminal 17 is common to the plurality of conductor main bodies 16. The other ends of the plurality of conductor main bodies 16 are electrically connected to the power source 12 (see FIG. 1) via the crimp terminals 17.
In the eighth high-frequency conductor 70, the eighth bendable self-shaped holding strip 71 is composed of a metal wire 72 and a plurality (four in the example of this figure) of binding materials 74, and the metal wire 72 is configured to be disposed so as to extend along the length direction of the plurality of conductor main bodies 16 by being supported and fixed by the plurality of binding members 74. Each of the plurality of binding members 74 is made of a binding belt or an adhesive tape, and is wound around the plurality of conductor main bodies 16 and the metal wires 72.
In the eighth bendable self-shaped holding strip 71, the metal wire 72 is required to have flexibility (shape workability) and work shape retention, and the metal wire 72 includes the first wire according to FIG. The thing of the structure similar to the metal wire 32 which comprises the 1 bendable self-shape holding | maintenance strip 30 can be used.

The high-frequency lighting type light source device of the present invention includes a light source (high-frequency light source) to which high-frequency power is supplied, and a power supply line electrically connected to the light source. The structure of the light source device is not limited to that shown in FIG. 1, and various configurations can be adopted.
For example, the high frequency lighting type light source device may have a configuration in which a plurality of light sources (high frequency light sources) are arranged in parallel. In the high-frequency lighting type light source device having such a configuration, the effect of the present invention is remarkably obtained. More specifically, during the manufacturing operation of the high-frequency lighting type light source device and during the replacement operation of the components (specifically, the light source) in the high-frequency lighting type light source device, the plurality of power supply lines related to the plurality of light sources hang down. There is no entanglement, and each of the plurality of feed lines can be arranged in a desired state at a desired position without using a dedicated fixing member. In particular, when the high-frequency lighting type light source device has a configuration in which a high-frequency voltage from a high-frequency power source is applied to the light source, a plurality of power supply lines can be arranged in a state where an insulation distance is secured. .

10 High-frequency lighting type light source device 11 Light source (high-frequency light source)
DESCRIPTION OF SYMBOLS 12 Power supply 15 Feed line 16 Conductor main body 17 Crimp terminal 19 Weight 21 Discharge vessel 21a Peripheral side surface 22 High voltage side electrode 25 Base 30 First high frequency conductive wire 31 First bendable self-shaped holding strip 32 Metal wire 34 Support Member 35 Second high-frequency conductor 36 Tubular body 40 Third high-frequency conductor 41 Coiled body 43 Fourth high-frequency conductor 44 Plate body 45A Rectangular flat substrate 45B Rectangular plate piece 46 Fourth high-frequency conductor 47 Plate-like body 47a Part 48 Space 50 Fifth high-frequency conductor 51 Tube-like bodies 52A, 52B, 52C Tube-like parts 53A, 53B Hinge part 55 Sixth high-frequency conductor 56 Tube-like bodies 57A, 57B, 57C Tube-like Part 57a elliptical cylinder part
57b Tip
58 fixing member 59A, 59B fixing hole 60 seventh high-frequency conductor 61 rod-shaped body 70 eighth high-frequency conductor 71 eighth bendable self-shaped holding strip 72 metal wire 74 binding material

Claims (9)

  A high-frequency conductor comprising a flexible conductor main body having a bundle of a plurality of conductive strands, and a bendable self-shaped holding strip disposed along the conductor main body.   The high-frequency conductor according to claim 1, wherein the conductor main body is formed by covering a bundle of the plurality of conductive strands with an insulating material.   3. The flexible bendable self-supporting strip is disposed along the conductor body by supporting and fixing a metal wire by a support member. A high-frequency conductor as described in 1.   3. The flexible body according to claim 1, wherein the bendable self-shaped holding strip is made of a tubular body, and the conductor body is inserted into the tubular body. High frequency lead wire.   The bendable self-shaped holding strip is made of a coil-shaped body, and the strands constituting the coil-shaped body are spirally wound around the conductor body. The high-frequency conductor according to claim 1 or 2.   3. The high-frequency conductor according to claim 1, wherein the bendable self-shaped holding strip is made of a plate-like body provided with a conductor main body holding portion at both ends.   3. The high-frequency conductor according to claim 1, wherein the bendable self-shaped holding strip is made of a rod-shaped body, and the conductor body is provided along the rod-shaped body. In a high-frequency lighting type light source device comprising a light source to which high-frequency power is supplied and a feeder line electrically connected to the light source,
The high-frequency lighting type light source device, wherein the power supply line comprises the high-frequency conductor according to any one of claims 1 to 7.   The high-frequency lighting type light source device according to claim 8, wherein the light source is an excimer lamp.

Images