JP2017116452A - Jig for laser displacement meter and measurement method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser displacement meter with one sensor head that can accurately and cheaply measure the thickness of a desired part of a sample.SOLUTION: There is provided a jig for a laser displacement meter for measuring the thickness of a sample by a laser light from a sensor head 3, which includes two parallel flat surfaces 10 (10a, 10b) with openings allowing transmission of a laser light; a first jig 1, that fixes a sample between the flat surfaces 10 (10a, 10b); and a second jig 2, that can make one of the flat surfaces 10 (10a, 10b) face the sensor head 3 and fixes the first jig 1 with the flat surface 10 facing the sensor head 3.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a laser displacement meter jig and a measurement method.

  One method for measuring the shape of a sample is to use a laser displacement meter. A laser displacement meter is a type of displacement meter that can measure the sample displacement, height, width, thickness, and the like. This laser displacement meter is applicable to any shape of a sample, has a feature that a measurement spot is small, it can be measured with high accuracy and high speed.

  The laser displacement meter is equipped with a laser light emitting element and a laser light receiving element (sensor head). For example, when measuring the thickness of a certain part of a sample (solid sample) using a laser displacement meter, a method suitable for the property of the sample is selected.

  For example, when a sample is sandwiched between two sensor heads, two sensor heads are arranged opposite to each other on the upper and lower surfaces of the sample, and the upper and lower surfaces of the portion where the thickness of the sample is desired to be obtained simultaneously with the two sensor heads. By measuring the position, the thickness of the part is obtained.

  However, there is a case where only one laser displacement meter is mounted with a sensor head. In such a case, first, the height position of the upper surface of the portion where the thickness of the sample is desired to be measured is measured. Thereafter, an operation such as rotating the sensor head or moving the sample is performed to place the portion corresponding to the lower surface of the portion in a measurable range, and the height position of the lower surface is measured. And the thickness of the said part is calculated | required by the difference of the position of an upper surface and a lower surface.

Hiroshi Kashiyama et al., “Analysis of perforated corrosion in steel plate joints”, Materials and Environment 2013 Proceedings, B-305, 179-182, 2013. Jun Murakoshi et al. “Examination of Applicability of Various Measurement Techniques to Measurement of Remaining Thickness of Corrosion Steel Members”, Society of Civil Engineers, Journal of Structural Engineering, Vol.59A, March 2013 KEYENCE, “Laser Displacement Meter Measurement Guide for Thickness / Width Measurement”, 2013 KEYENCE, “Laser Displacement Meter Introduction Guide for Beginners [Basics] What is a Displacement Meter?”, 2015 Nidec Tosok Corporation, high-speed 3D scanner RVL6540, [online], [searched on December 15, 2015], Internet <URL: http://www.nidec-tosok.co.jp/products/3d/pdf /catalog_150803.pdf // ＞

  However, when the thickness of the sample is to be obtained by the above method, there is a concern that a new frame for rotating the sensor head may be expensive. Also, if the sample has irregularities or curvatures, the surface that serves as the reference for the height position of the upper surface (the surface that has no height) and the surface that serves as the reference for the height position of the lower surface are the same when the sample is turned over. Or parallel surfaces. Therefore, the thickness of the desired part of the sample may not be accurately obtained. Although it is conceivable to use an inexpensive 3D scanner, the measurement accuracy is lower than that of a laser displacement meter. In view of the above, an object of the present invention is to solve the above-described problems and to measure the thickness of a desired portion of a sample at low cost and with high accuracy using a laser displacement meter having a single sensor head.

  In order to solve the above-described problems, the present invention provides a jig for a laser displacement meter that measures the thickness of a sample by laser light from a sensor head, and includes two openings through which the laser light can pass. A first jig for fixing the sample between the two planes, one of the two planes facing the sensor head, and the plane being the plane And a second jig for fixing the first jig in a state of being opposed to the sensor head.

  According to the present invention, the thickness of a desired portion of a sample can be measured inexpensively and accurately with a laser displacement meter having a single sensor head.

FIG. 1 is a diagram illustrating an example of a jig for a laser displacement meter according to the present embodiment. FIG. 2 is a diagram for explaining a measurement procedure using the laser displacement gauge jig of FIG. FIG. 3A is a diagram illustrating a configuration example of the first jig. FIG. 3B is a diagram illustrating details of a configuration example of the first jig. FIG. 4 is a diagram for explaining a sample fixing method in the first jig. FIG. 5A is a diagram illustrating a configuration example of the second jig. FIG. 5B is a diagram illustrating details of a configuration example of the second jig. FIG. 6 is a view for explaining a method of fixing the second jig. FIG. 7 is a diagram for explaining a measurement region on the first jig. FIG. 8 is a diagram illustrating an example of a measurement result obtained by a laser displacement meter. FIG. 9 is an image diagram for explaining the calculation of the height of the surface of each part of the sample. FIG. 10 is an image diagram for explaining reversal of the measurement result by the laser displacement meter. FIG. 11 is an image diagram for explaining the calculation of the thickness of the surface of each part of the sample. FIG. 12 is a flowchart showing a procedure for measuring the thickness of the sample.

  Hereinafter, embodiments (embodiments) for carrying out the present invention will be described with reference to the drawings. First, an outline of a sample measuring method using the laser displacement meter jig of the present embodiment will be described with reference to FIGS. 1 and 2. In the following description, it is assumed that the sample to be measured is a solid sample.

  As shown in FIG. 1, a sample to be measured by a laser displacement meter is fixed in a first jig 1, and the first jig 1 is a second jig 2 on a laser displacement meter base. It is fixed by. The laser displacement meter includes a sensor head 3 and a control device 4. The laser displacement meter moves the sensor head 3 in the X-axis and Y-axis directions by the control device 4, sequentially irradiates a desired portion of the sample from the sensor head 3, and measures the height of the portion. Then, the laser displacement meter outputs the measurement result of the height of each part of the sample to the computer 100 by the control device 4. The measurer measures the height of each part of the sample using the laser displacement meter as described above on the front and back surfaces of the sample.

  For example, as shown in FIG. 2, when the measurer fixes the sample in the first jig 1, the second jig is placed with the flat surface 10 a of the first jig 1 facing the sensor head 3. Fix on the tool 2. The laser displacement meter measures the height of the surface of each part of the sample and outputs the measurement result to the computer 100.

  Thereafter, the measurer turns over the first jig 1. That is, the first jig 1 is fixed on the second jig 2 with the flat surface 10 b facing the sensor head 3. The laser displacement meter measures the height of the back surface of each part of the sample, and outputs the measurement result to the computer 100.

  In this way, when the computer 100 obtains the measurement results of the heights of the front and back surfaces of each part of the sample, the computer 100 calculates the thickness of each part of the sample based on the measurement result. In addition, since the 1st jig | tool 1 is turned over at the time of the measurement of the back surface of a sample, the position of each part of a sample becomes a contrast position with respect to the axis | shaft (for example, Y-axis of FIG. 1) when turned over. Therefore, the computer 100 replaces the measurement results of the portions located on the opposite side of the axis (eg, the Y axis in FIG. 1) of the measurement results of the respective portions on the back surface of the sample with each other. The thickness of each part is calculated.

  Thus, in measuring the thickness (shape) of each part of the sample by the laser displacement meter, the sample is fixed using the first jig 1 and the second jig 2. As a result, when turning the sample upside down for measurement, even if the sample is uneven or curved, the surface that serves as the reference for the height position of the surface of the sample and the surface that serves as the reference for the height position of the back surface are the same. Or parallel planes. As a result, the thickness (shape) of each part of the sample can be calculated with high accuracy.

(First jig)
Next, an example of the first jig 1 will be described with reference to FIGS. 3A, 3B and FIG. The first jig 1 has two parallel planes 10 (10a, 10b). Each of the planes 10 (10a, 10b) has a size, and includes openings 11 (11a, 11b) at the same coordinate positions when the plane 10 (10a, 10b) is an XY plane. That is, the XY coordinates of the edges of the openings 11a and 11b coincide on the planes 10a and 10b. The shape of the opening 11 may be a rectangle as shown in FIG. 3A or other shapes.

  The first jig 1 fixes the sample between the planes 10 (10a, 10b). For example, the side surface of the first jig 1 is provided with a plurality of screw holes 40, and by inserting a screw 41 into the screw hole 40, the sample inserted from the opening 21 is flat 10 (10a, 10b). (See FIG. 4).

  For example, as shown in FIG. 4, the measurer inserts the sample into the first jig 1 from the opening 21 provided on the side surface of the first jig 1, and then the screw 41 through the screw hole 40. To fix the sample. When fixing the sample in the first jig 1, it is preferable to sandwich the plate 30 or the like between the sample and the screw 41. By doing in this way, the force of each screw 41 can be applied equally to the sample. Further, a soft material such as rubber may be sandwiched between at least the sample side of both surfaces of the plate 30. By doing in this way, the force of each screw 41 is evenly applied by the sample, and the sample is not easily damaged.

  When the sample is turned upside down for measurement by fixing the sample with the first jig 1 in this way, even when the sample has irregularities or curvature, a surface serving as a reference for the height position of the surface of the sample, The surface serving as a reference for the height position of the back surface can be the same surface or a parallel surface. As a result, the computer 100 can accurately obtain the heights of the front and back surfaces of each part of the sample, and therefore can accurately obtain the thickness of each part of the sample.

  In addition, although the raw material of the 1st jig | tool 1 is not ask | required, brass etc. are used, for example. For example, the first jig 1 having the size shown in FIG. 3B is created by cutting a brass block.

(Second jig)
Next, an example of the second jig 2 will be described with reference to FIGS. 5A and 5B and FIG. In the second jig 2, any one of the two planes 10 a and 10 b of the first jig 1 can be opposed to the sensor head 3. Further, the second jig 2 has the first jig 1 so that the position of the first jig 1 with respect to the sensor head 3 does not change even when any of the two planes 10a and 10b faces the sensor head 3. Fix the jig 1. Specifically, the plane 10 a and the plane 10 b of the first jig 1 are fixed so as to be a plane (XY plane) orthogonal to the optical axis of the laser light from the sensor head 3. Thereby, the XY coordinates of the plane 10a and the plane 10b can be matched.

  For example, as shown in FIG. 5A, the second jig 2 is a first jig in a state where the plane 10 a or the plane 10 b of the first jig 1 is in contact with the plane 22 of the second jig 2. 1 is fixed. The second jig 2 has a shape obtained by cutting the upper part of the second jig 2 in the X-axis direction and Y-axis direction sizes of the flat surface 10 (10a, 10b) of the first jig 1.

  For example, as shown in FIG. 5A, when the size in the X-axis direction × the size in the Y-axis direction of the plane 10 (10a, 10b) of the first jig 1 is Amm × Bmm, the upper part of the second jig 2 is The shape of the plane 22 cut out at a predetermined depth is the same Amm × Bmm as the plane 10 (10a, 10b). Accordingly, the second jig 2 can fix the first jig 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction.

  In addition, although the raw material of the 2nd jig | tool 2 is not ask | required, brass etc. are used, for example. For example, the upper surface of the brass block is processed so that the first jig 1 (see FIG. 3B) fits snugly to create the second jig 2 having the size shown in FIG. 5B.

  As shown in FIG. 1, the second jig 2 is installed within the movable range of the sensor head 3 and is fixed to a gantry or the like. Then, the first jig 1 is installed on the second jig 2. For example, the second jig 2 may be fixed by screwing the second jig 2 to the gantry, or as shown in FIG. 6, a magnet or a weight around the second jig 2 of the gantry. It may be fixed by placing.

  The measurer installs the first jig 1 on the second jig 2 and then uses a laser displacement meter to form the shape of each part of the sample in the first jig 1 (sensor head). (Distance from 3) is measured. Although the shape and size of the measurement region by the laser displacement meter are not limited, for example, as shown in FIG. 7, the region including the opening 11 on the plane 10 of the first jig 1 is preferable. . Thereby, when the computer 100 analyzes the measurement result of the sample, the plane 10 (upper surface) of the first jig 1 can be used as the reference plane of the XYZ coordinates of the sample.

  Furthermore, by dividing the laser displacement meter jig into two jigs, a first jig 1 and a second jig 2, the following effects can be obtained. For example, when the length of the sample exceeds the length of the first jig 1 (for example, the length in the X direction), or a soft material or thin shape that cannot be fastened with the screw 41 of the first jig 1 Even in this case, it is not necessary to modify the second jig 2. For example, when the length of the sample exceeds the length in the X direction of the first jig 1 shown in FIG. 5A, the height (C) of the first jig 1 is set to the second jig. It is set to be higher than the depth (D) of the second cut portion. Then, the sample is inserted from the opening 21 of the first jig 1, and the first jig 1 is placed on the second jig 2 with the sample protruding from the opening 21, and laser displacement is performed. The sample may be measured by a meter. In addition, by dividing the jig for the laser displacement meter into two jigs, the first jig 1 and the second jig 2, the sample can be easily turned over if only the first jig 1 is moved. There is also an advantage of being able to.

(Computer)
The computer 100 receives a measurement result from the control device 4 of the laser displacement meter. The computer 100, for example, for each XY coordinate on the surface of the sample and the upper surface (for example, the plane 10a) of the sample as shown in FIG. ) Is received. In FIG. 8, each numerical value in the region inside the edge of the opening 11 of the first jig 1 indicates the measurement result of the surface of the sample, and the outside of the edge of the opening 11 of the first jig 1. Each numerical value in the region indicates a measurement result of the upper surface (for example, the flat surface 10a) of the first jig 1. The measurement result is output to the computer 100 in, for example, CSV (Comma Separated Values) format.

  And the computer 100 calculates the thickness of each part of a sample based on said measurement result. For example, the height of the surface of each part of the sample is measured on the upper surface (for example, the plane 10a) of the first jig 1 when the upper surface (for example, the plane 10a) of the first jig 1 is used as a reference plane. This is the difference between the result and the measurement result of the surface of each part of the sample (see FIG. 9). Therefore, the computer 100 obtains the difference between the measurement result of the upper surface (for example, the flat surface 10a) of the first jig 1 and the measurement result of the surface of each part of the sample, thereby increasing the height of the surface of each part of the sample. Is calculated.

  As described above, since the first jig 1 is turned over when measuring the back surface of the sample, the position of each part of the sample is the rotation axis (for example, the Y axis) when turned over as shown in the image diagram of FIG. It becomes a control position. Therefore, the computer 100 first replaces the measurement results of the contrast position portions with respect to the axis (for example, the Y axis in FIG. 10) when turning over the measurement results of the back surface of each portion of the sample. Next, the computer 100 obtains the difference between the measurement result of the upper surface (for example, the flat surface 10a) of the first jig 1 and the measurement result of each part of the back surface of the sample, thereby obtaining the back surface of each part of the sample. Calculate the height.

  The computer 100 obtains the thickness of each part of the sample using the heights of the front and back surfaces of each part of the sample calculated as described above. For example, as shown in the image diagram of FIG. 11, the thickness of each part of the sample is a value obtained by subtracting the height of the front surface and the back surface of each part of the sample from the height of the first jig 1. . Therefore, the computer 100 calculates a value obtained by subtracting the height of the front surface and the back surface of each part of the sample from the height of the first jig 1 as the thickness of the part. By doing in this way, even if a laser displacement meter is provided with only one sensor head 3, the shape of the sample (the thickness of each part) can be calculated with high accuracy.

(Measurement procedure)
Next, a sample measurement procedure will be described with reference to FIG. First, the measurer fixes the sample to the first jig 1 (S1), and then fixes the first jig 1 to the second jig 2 (S2). Then, the measurer measures the position (height) in the Z-axis direction of the surface of each part of the sample with a laser displacement meter (S3). Thereafter, the measurer turns over the first jig 1 and fixes it to the second jig 2 (S4). Then, the measurer measures the position (height) in the Z-axis direction of the back surface of each part of the sample with a laser displacement meter (S5).

  When the computer 100 obtains the measurement results in S3 and S5, it reverses the measurement results on the back surface of each part of the sample (S6). That is, the computer 100 interchanges the measurement result values of the portion located in contrast to the axis when the first jig 1 is turned upside down in the measurement results of the back surface of each portion of the sample. Then, the computer 100 calculates the height of each part of the sample from the measurement result of the position (height) in the Z-axis direction of the front and back surfaces of each part of the sample (S7). Next, the computer 100 calculates the thickness of each part of the sample by subtracting the height of the front and back surfaces of each part of the sample from the height of the first jig 1 (S8).

  By doing so, even when the laser displacement meter has only one sensor head 3, the shape of the sample (the thickness of each part) can be calculated at low cost and with high accuracy.

(Other embodiments)
If there is a possibility that the measurement results of the front and back surfaces of each part of the sample may have an error due to the gantry or the inclination of the floor on which the gantry is installed, the controller 4 corrects this and then sends the computer 100 It may be output. By doing in this way, the thickness of the desired part of a sample can be calculated more accurately.

DESCRIPTION OF SYMBOLS 1 1st jig | tool 2 2nd jig | tool 3 Sensor head 4 Control apparatus 10 (10a, 10b), 22 Plane 11 (11a, 11b), 21 Opening part 30 Plate | board 40 Screw hole 41 Screw 100 Computer

Claims (3)

A jig for a laser displacement meter that measures the thickness of a sample with a laser beam from a sensor head,
A first jig that has two parallel planes each having an opening through which the laser beam can pass, and fixes the sample between the two planes;
A second jig for fixing either of the two planes to the sensor head and fixing the first jig in a state where the plane is opposed to the sensor head;
A jig for a laser displacement meter, comprising: The second jig is
2. The first jig is fixed in a state where one of the two planes of the first jig is in contact with a plane of the second jig. Jig for laser displacement meter. A measurement method using a laser displacement meter that measures the thickness of a sample with a laser beam from a sensor head,
A sample fixing step of fixing the sample to a first jig having two parallel planes each having an opening through which the laser beam can be transmitted;
Either of the two planes can be opposed to the sensor head, and the first jig in a state where the plane is opposed to the sensor head is fixed to a second jig. A jig fixing step;
A first measurement step of measuring the height of each part of the surface of the sample from a predetermined reference plane by making the first plane of the first jig face the sensor head;
The first jig is turned upside down, and the second plane of the first jig is opposed to the sensor head, thereby measuring the height of each portion of the back surface of the sample from the predetermined reference plane. A second measuring step,
A conversion step in which the height values of the portions on the back surface of the sample from the predetermined reference surface are interchanged with the height values of the portions positioned in contrast to the axis when the first jig is turned over. When,
Based on the height of each part on the surface of the sample from the predetermined reference surface and the height of each part on the back surface of the sample from the predetermined reference surface after the replacement, And a thickness calculating step for calculating the thickness.

Images