JP2017112231A5 - - Google Patents
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- JP2017112231A5 JP2017112231A5 JP2015245647A JP2015245647A JP2017112231A5 JP 2017112231 A5 JP2017112231 A5 JP 2017112231A5 JP 2015245647 A JP2015245647 A JP 2015245647A JP 2015245647 A JP2015245647 A JP 2015245647A JP 2017112231 A5 JP2017112231 A5 JP 2017112231A5
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015245647A JP6700771B2 (ja) | 2015-12-16 | 2015-12-16 | インプリント装置、及び物品の製造方法 |
PCT/JP2016/084972 WO2017104382A1 (en) | 2015-12-16 | 2016-11-25 | Imprint apparatus, and method of manufacturing article |
KR1020187019253A KR102081527B1 (ko) | 2015-12-16 | 2016-11-25 | 임프린트 장치 및 물품 제조 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015245647A JP6700771B2 (ja) | 2015-12-16 | 2015-12-16 | インプリント装置、及び物品の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017112231A JP2017112231A (ja) | 2017-06-22 |
JP2017112231A5 true JP2017112231A5 (ko) | 2019-01-24 |
JP6700771B2 JP6700771B2 (ja) | 2020-05-27 |
Family
ID=59056275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015245647A Active JP6700771B2 (ja) | 2015-12-16 | 2015-12-16 | インプリント装置、及び物品の製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6700771B2 (ko) |
KR (1) | KR102081527B1 (ko) |
WO (1) | WO2017104382A1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108539052B (zh) * | 2018-03-30 | 2019-07-09 | 华中科技大学 | 一种封装柔性显示薄膜的装置、系统及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7641840B2 (en) * | 2002-11-13 | 2010-01-05 | Molecular Imprints, Inc. | Method for expelling gas positioned between a substrate and a mold |
US7316554B2 (en) * | 2005-09-21 | 2008-01-08 | Molecular Imprints, Inc. | System to control an atmosphere between a body and a substrate |
US20110140304A1 (en) * | 2009-12-10 | 2011-06-16 | Molecular Imprints, Inc. | Imprint lithography template |
JP5647029B2 (ja) * | 2011-02-18 | 2014-12-24 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
JP6064466B2 (ja) * | 2012-09-11 | 2017-01-25 | 大日本印刷株式会社 | インプリント方法およびそれを実施するためのインプリント装置 |
WO2014054749A1 (ja) * | 2012-10-04 | 2014-04-10 | 大日本印刷株式会社 | インプリント方法およびインプリント装置 |
JP6230041B2 (ja) * | 2013-04-18 | 2017-11-15 | キヤノン株式会社 | インプリント装置、それを用いた物品の製造方法 |
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2015
- 2015-12-16 JP JP2015245647A patent/JP6700771B2/ja active Active
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2016
- 2016-11-25 WO PCT/JP2016/084972 patent/WO2017104382A1/en active Application Filing
- 2016-11-25 KR KR1020187019253A patent/KR102081527B1/ko active IP Right Grant