JP2017103955A5 - - Google Patents

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Publication number
JP2017103955A5
JP2017103955A5 JP2015236650A JP2015236650A JP2017103955A5 JP 2017103955 A5 JP2017103955 A5 JP 2017103955A5 JP 2015236650 A JP2015236650 A JP 2015236650A JP 2015236650 A JP2015236650 A JP 2015236650A JP 2017103955 A5 JP2017103955 A5 JP 2017103955A5
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JP
Japan
Prior art keywords
tip
longitudinal direction
contact portion
length
drive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015236650A
Other languages
English (en)
Japanese (ja)
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JP6662007B2 (ja
JP2017103955A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015236650A priority Critical patent/JP6662007B2/ja
Priority claimed from JP2015236650A external-priority patent/JP6662007B2/ja
Priority to CN201611089232.4A priority patent/CN106877733B/zh
Priority to US15/367,553 priority patent/US10601345B2/en
Publication of JP2017103955A publication Critical patent/JP2017103955A/ja
Publication of JP2017103955A5 publication Critical patent/JP2017103955A5/ja
Application granted granted Critical
Publication of JP6662007B2 publication Critical patent/JP6662007B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015236650A 2015-12-03 2015-12-03 圧電駆動装置、モーター、ロボット、およびポンプ Expired - Fee Related JP6662007B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015236650A JP6662007B2 (ja) 2015-12-03 2015-12-03 圧電駆動装置、モーター、ロボット、およびポンプ
CN201611089232.4A CN106877733B (zh) 2015-12-03 2016-11-30 压电驱动装置、马达、机器人、以及泵
US15/367,553 US10601345B2 (en) 2015-12-03 2016-12-02 Piezoelectric driving device, motor, robot, and pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015236650A JP6662007B2 (ja) 2015-12-03 2015-12-03 圧電駆動装置、モーター、ロボット、およびポンプ

Publications (3)

Publication Number Publication Date
JP2017103955A JP2017103955A (ja) 2017-06-08
JP2017103955A5 true JP2017103955A5 (enExample) 2018-12-06
JP6662007B2 JP6662007B2 (ja) 2020-03-11

Family

ID=59015774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015236650A Expired - Fee Related JP6662007B2 (ja) 2015-12-03 2015-12-03 圧電駆動装置、モーター、ロボット、およびポンプ

Country Status (1)

Country Link
JP (1) JP6662007B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7035761B2 (ja) * 2018-04-24 2022-03-15 セイコーエプソン株式会社 移動体装置、ハンド、ロボットおよび移動体装置の制御方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4033643B2 (ja) * 2001-06-18 2008-01-16 日本碍子株式会社 圧電／電歪デバイスおよびその製造方法
JP2005086991A (ja) * 2003-09-11 2005-03-31 Seiko Epson Corp 圧電アクチュエータ、モータおよび圧電アクチュエータを備えた機器
JP4058018B2 (ja) * 2003-12-16 2008-03-05 松下電器産業株式会社 圧電素子及びその製造方法、並びにその圧電素子を備えたインクジェットヘッド、インクジェット式記録装置及び角速度センサ
JP5760748B2 (ja) * 2011-06-29 2015-08-12 セイコーエプソン株式会社 圧電アクチュエーターの駆動方法、及び、駆動ユニット
JP5929138B2 (ja) * 2011-12-06 2016-06-01 セイコーエプソン株式会社 圧電モーターおよびロボット
CN102651623B (zh) * 2012-02-02 2015-12-16 长春理工大学 多振子旋转型压电电机
JP5895953B2 (ja) * 2014-01-24 2016-03-30 セイコーエプソン株式会社 マイクロポンプ

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