JP2017092118A - Coating film formation method, coating film formation device, and computer readable recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating film formation method for forming a coating film more uniformly along the surface of a workpiece including a salient.SOLUTION: A coating film formation method includes a first step S2 of heating a workpiece including a substrate, and a salient provided on the surface of the substrate, a second step S5 of blowing the coating liquid droplets from a nozzle to the surface of the workpiece after it is heated in the first step, a third step S7 of heating the workpiece after the coating liquid droplets are blown thereto, and a step S8 of determining whether or not the blowing of the coating liquid droplets from the nozzle to the surface of the workpiece has reached a predetermined number of times.SELECTED DRAWING: Figure 10

Description

  The present disclosure relates to a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium.

  Patent Document 1 discloses a method of forming a coating liquid (for example, a resist film) on an object to be processed in which convex portions (protrusions, protrusions, etc.) are provided on the surface of a substrate (wafer). The method includes heating the object by heating means when spraying the coating liquid droplets from the nozzle while meandering the nozzle above the surface of the object.

JP 2005-019560 A

  In the method disclosed in Patent Document 1, the coating film is formed substantially uniformly along the surface of the object to be processed (including the surface of the convex portion) without filling the space between the convex portions with the coating liquid material. The purpose is that. However, according to the method, the next coating liquid can be sprayed before the solvent of the coating liquid completely evaporates on the surface of the object to be processed where the spray areas overlap as the nozzle moves. Therefore, even if the object to be processed is heated by the heating means, the coating liquid droplet (solvent) flows before the solute of the coating liquid droplet (coating liquid material particles) is fixed on the side wall surface of the convex portion. In particular, the film thickness of the coating film may increase on the base end side of the convex portion.

  Thus, the present disclosure describes a coating film forming method, a coating film forming apparatus, and a computer-readable recording medium that can form a coating film more uniformly along the surface of the object to be processed including the protrusions. .

  A coating film forming method according to one aspect of the present disclosure includes a first step of heating an object to be processed including a substrate and a convex portion provided on the surface of the substrate, and after being heated in the first step And a second step of spraying a coating liquid droplet from the nozzle onto the surface of the object to be processed.

  In the coating film forming method according to one aspect of the present disclosure, the target object is heated in the first step before the second step of spraying the coating liquid droplets from the nozzles on the surface of the target object. Therefore, the solvent of the coating liquid droplet sprayed in the second process is volatilized by receiving heat from the target object over the entire surface of the object to be processed including the surface of the convex portion, and the coating liquid material of the coating liquid droplets Particles (solutes) adhere to the surface of the object to be processed. Therefore, the coating liquid droplets are prevented from aggregating and flowing on the surface of the object to be processed, particularly on the side surfaces of the protrusions. As a result, the coating liquid material particles easily adhere uniformly on the surface of the object to be processed, particularly on the side surfaces of the convex portions.

  In addition, in the coating film forming method according to one aspect of the present disclosure, at the start of the first step, a fluid liquid, that is, an unsolidified coating liquid droplet exists on the surface of the object to be processed. However, the solvent is completely volatilized by the heat treatment in the first step, and the unsolidified coating liquid droplets are solidified on the surface of the object to be processed including the side surfaces of the convex portions. Therefore, in the subsequent second step, when the coating liquid droplet is sprayed from the nozzle onto the surface of the object to be processed, the previously sprayed coating liquid droplet is in a completely solidified state. Therefore, coating liquid droplets having different spraying timings are mixed and aggregated, and are prevented from flowing on the surface of the object to be processed (particularly, the side surface of the convex portion). As described above, the coating film can be more uniformly formed along the surface of the object to be processed including the convex portion.

  The coating film forming method according to one aspect of the present disclosure may further include a third step of heating the object to be processed after the coating liquid droplets are sprayed in the second step. In this case, the solvent (solvent) of the coating liquid droplets sprayed on the surface of the object to be processed in the second step is volatilized by receiving heat from the object to be processed in the third step. Therefore, the flow of the coating liquid droplets on the surface of the object to be processed is further suppressed. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion.

  The heating temperature of the object to be processed may be set to a temperature that is 10 ° C. to 50 ° C. lower than the boiling point of the solvent contained in the coating liquid droplets. When the heating temperature of the object to be processed is equal to or higher than the boiling point of the solvent contained in the coating liquid droplets by 50 ° C., the solvent of the coating liquid droplets sprayed in the second step is hardly evaporated. It is difficult for the coating liquid droplet to flow on the surface of the body. For this reason, the film thickness of the coating film is suppressed from becoming particularly large on the base end side of the convex portion. When the heating temperature of the object to be treated is 10 ° C. or lower than the boiling point of the solvent contained in the coating liquid droplet, before the coating liquid droplet sprayed in the second step reaches the surface of the object to be processed. In addition, it is difficult to cause a situation in which most of the solvent of the coating liquid droplets volatilizes. Therefore, it is suppressed that the coating liquid material particles contained in the coating liquid droplets are successively deposited on the surface of the object to be processed while maintaining the shape.

  The solvent contained in the coating liquid droplets may be propylene glycol monomethyl ether acetate (hereinafter also referred to as PGMEA). Since the boiling point of PGMEA is 146 ° C., if the heating temperature of the object to be processed is set to about 90 ° C. to 140 ° C., PGMEA which is a solvent when the coating liquid droplets are sprayed on the surface of the object to be processed. Volatilizes moderately. For this reason, the coating liquid droplets maintain appropriate fluidity on the surface of the object to be processed, and easily spread on the surface of the object to be processed. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion.

  In the second step, the coating liquid droplets may be sprayed from the nozzles on the surface of the target object heated in the first step while the target object is rotated. In this case, compared with the case where the coating liquid droplet is sprayed from the nozzle onto the surface of the object to be processed while the nozzle is meandering on the surface of the stationary object to be processed, the coating liquid droplet from the nozzle is applied to the surface of the object to be processed. It is difficult to be sprayed on the same. Therefore, it becomes possible to form the coating film more uniformly along the surface of the object to be processed including the convex portion.

  In the second step, the liquid to be processed is sprayed from the nozzle to the surface of the object to be processed after being heated in the first step, and a gas nozzle different from the nozzle is made to follow the nozzle, while the object to be processed is Alternatively, heated nitrogen gas may be sprayed from the gas nozzle to the sprayed portion of the coating liquid droplets on the surface. In this case, since the solvent is dried during the spraying of the coating liquid droplets, the time required to form the coating film on the surface of the object to be processed can be shortened.

  In the second step, the surface of the object to be processed after being heated in the first step may be sprayed from the nozzle in a state where the coating liquid droplet is accompanied by the heated nitrogen gas. In this case, since the solvent is dried during the spraying of the coating liquid droplets, the time required to form the coating film on the surface of the object to be processed can be shortened.

  A coating film forming apparatus according to another aspect of the present disclosure includes a heating unit configured to heat a target object including a substrate and a convex portion provided on the surface of the substrate, and a coating liquid applied from a nozzle. A supply unit configured to be blown out as liquid droplets, and a control unit, the control unit controls the heating unit to heat the object to be processed and the supply unit; A second process of spraying coating liquid droplets from the nozzles on the surface of the object to be processed after being heated by the first process is performed.

  In the coating film forming apparatus according to one aspect of the present disclosure, the control unit heats the object to be processed by the heating unit before the second process of spraying the coating liquid droplets on the surface of the object to be processed from the nozzle. Process 1 is executed. Therefore, on the entire surface of the object to be processed including the surface of the convex portion, the solvent of the coating liquid droplets sprayed in the second process is volatilized by receiving heat from the object to be processed, and the coating liquid material of the coating liquid droplets Particles (solutes) adhere to the surface of the object to be processed. Therefore, the coating liquid droplets are prevented from aggregating and flowing on the surface of the object to be processed, particularly on the side surfaces of the protrusions. As a result, the coating liquid material particles easily adhere uniformly on the surface of the object to be processed, particularly on the side surfaces of the convex portions.

  In addition, in the coating film forming apparatus according to one aspect of the present disclosure, a fluid liquid, that is, an unsolidified coating liquid droplet is present on the surface of the object to be processed at the start of the first processing. However, the solvent is completely volatilized by the heat treatment (first treatment), and the unsolidified coating liquid droplets are solidified on the surface of the object to be processed including the side surfaces of the convex portions. Therefore, in the subsequent second step, when the coating liquid droplet is sprayed from the nozzle onto the surface of the object to be processed, the previously sprayed coating liquid droplet is in a completely solidified state. Therefore, coating liquid droplets having different spraying timings are mixed and aggregated, and are prevented from flowing on the surface of the object to be processed (particularly, the side surface of the convex portion). As described above, the coating film can be more uniformly formed along the surface of the object to be processed including the convex portion.

  A coating film forming apparatus according to another aspect of the present disclosure includes a first processing chamber in which a first processing is performed and a second processing chamber different from the first processing chamber, wherein the second processing is performed. You may further provide the 2nd processing chamber performed.

  The coating film forming apparatus according to another aspect of the present disclosure may further include a processing chamber in which both the first processing and the second processing are performed.

  The control unit may further execute a third process of controlling the heating unit to heat the object to be processed after the application liquid droplets are sprayed in the second process. In this case, the solvent (solvent) of the coating liquid droplets sprayed on the surface of the object to be processed in the second process is volatilized by receiving heat from the object to be processed in the third process. Therefore, the flow of the coating liquid droplets on the surface of the object to be processed is further suppressed. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion.

  When the control unit controls the heating unit to heat the object to be processed, the heating temperature of the object to be processed by the heating unit is set to a temperature that is 10 ° C. to 50 ° C. lower than the boiling point of the solvent contained in the coating liquid droplets. May be. When the heating temperature of the object to be processed by the heating unit is 50 ° C. or more lower than the boiling point of the solvent contained in the coating liquid droplets, the solvent of the coating liquid droplets sprayed in the second step hardly volatilizes. It is difficult for the coating liquid droplet to flow on the surface of the object to be processed. For this reason, the film thickness of the coating film is suppressed from becoming particularly large on the base end side of the convex portion. When the heating temperature of the object to be processed by the heating unit is 10 ° C. or lower than the boiling point of the solvent contained in the coating liquid droplets, the coating liquid droplets sprayed in the second step are applied to the surface of the target object. It is difficult to cause a situation in which most of the solvent of the coating liquid droplets volatilizes before reaching. Therefore, it is suppressed that the coating liquid material particles contained in the coating liquid droplets are successively deposited on the surface of the object to be processed while maintaining the shape.

  The solvent contained in the coating liquid droplets may be propylene glycol monomethyl ether acetate. Since the boiling point of PGMEA is 146 ° C., when the temperature of the heating part when heating the object to be processed is set to about 90 ° C. to 140 ° C., the coating liquid droplets are sprayed on the surface of the object to be processed. PGMEA as a solvent volatilizes moderately. For this reason, the coating liquid droplets maintain appropriate fluidity on the surface of the object to be processed, and easily spread on the surface of the object to be processed. Therefore, the coating film can be formed more uniformly along the surface of the object to be processed including the convex portion.

  The coating film forming apparatus according to another aspect of the present disclosure further includes a drive unit that rotates the object to be processed around an axis perpendicular to the surface of the substrate, and the control unit includes the drive unit in the second process. In a state where the object to be processed is rotated while being controlled, the application liquid is applied to the surface of the object to be processed after being heated by the first treatment by controlling the supply unit and supplying the application liquid to the nozzle. Drops may be sprayed from the nozzle. In this case, compared with the case where the coating liquid droplet is sprayed from the nozzle onto the surface of the object to be processed while the nozzle is meandering on the surface of the stationary object to be processed, the coating liquid droplet from the nozzle is applied to the surface of the object to be processed. It is difficult to be sprayed on the same. Therefore, it becomes possible to form the coating film more uniformly along the surface of the object to be processed including the convex portion.

  The coating film forming apparatus according to another aspect of the present disclosure further includes a gas supply unit configured to discharge heated nitrogen gas from the gas nozzle, and the control unit controls the supply unit in the second process. And while spraying a coating liquid droplet from a nozzle with respect to the surface of the to-be-processed object heated by the 1st process, controlling a gas supply part and making a gas nozzle follow a nozzle, to-be-processed object Alternatively, heated nitrogen gas may be sprayed from the gas nozzle to the sprayed portion of the coating liquid droplets on the surface. In this case, since the solvent is dried during the spraying of the coating liquid droplets, the time required to form the coating film on the surface of the object to be processed can be shortened.

  In the second process, the control unit controls the supply unit to cause the coating liquid droplets to accompany the heated nitrogen gas to the surface of the object to be processed after being heated by the first process. You may spray from a nozzle in a state. In this case, since the solvent is dried during the spraying of the coating liquid droplets, the time required to form the coating film on the surface of the object to be processed can be shortened.

  A computer-readable recording medium according to another aspect of the present disclosure records a program for causing a coating film forming apparatus to execute the coating film forming method. In the computer-readable recording medium according to another aspect of the present disclosure, it is possible to form the coating film more uniformly along the surface of the object to be processed including the convex portion, as in the above-described coating film forming method. Become. In this specification, a computer-readable recording medium includes a non-transitory tangible medium (non-transitory computer recording medium) (for example, various main storage devices or auxiliary storage devices) and a propagation signal (transitory computer recording medium). (E.g., a data signal that can be provided over a network).

  According to the coating film forming method, the coating film forming apparatus, and the computer-readable recording medium according to the present disclosure, the coating film can be more uniformly formed along the surface of the target object including the convex portion. .

FIG. 1 is a perspective view showing a coating film forming apparatus. 2 is a cross-sectional view taken along line II-II in FIG. 3 is a cross-sectional view taken along line III-III in FIG. FIG. 4 is a block diagram showing the coating film forming apparatus. FIG. 5 is a schematic diagram illustrating a hardware configuration of the controller. FIG. 6 is a schematic diagram showing a liquid processing unit. FIG. 7 is a partial cross-sectional view showing the vicinity of the nozzle. FIG. 8 is a cross-sectional view of the heat treatment unit as viewed from the side. 9 is a cross-sectional view taken along line IX-IX in FIG. FIG. 10 is a flowchart for explaining a coating film forming procedure. FIG. 11 is a schematic diagram for explaining a procedure for forming a coating film. FIG. 12 is a schematic diagram partially showing another example of the liquid processing unit. FIG. 13 is a diagram for explaining the embodiment.

  Since the embodiment according to the present disclosure described below is an example for explaining the present invention, the present invention should not be limited to the following contents. In the following description, the same reference numerals are used for the same elements or elements having the same function, and redundant description is omitted.

[Coating film forming device]
First, an outline of the coating film forming apparatus 1 will be described. The coating film forming apparatus 1 is an apparatus that forms a coating film R (see FIG. 4 and the like) on the surface of the workpiece W (see FIG. 4 and the like).

  Here, as shown in FIG. 4 and the like, the workpiece W has a substrate (wafer) W1 and at least one convex portion W2. The substrate W1 may have a disk shape, a part of a circle may be cut out, or may have a shape other than a circle, such as a polygon. The substrate W1 may be, for example, a semiconductor substrate, a glass substrate, a mask substrate, an FPD (Flat Panel Display) substrate, or other various substrates. The convex portion W2 is provided on the surface W1a of the substrate W1. The convex part W2 should just protrude outward from the surface W1a of the board | substrate W1. That is, the shape of the convex portion W2 may be a rectangular parallelepiped shape or other various shapes, and is not limited at all. The material of the convex portion W2 may be an organic material or an inorganic material as long as the coating film R can be formed on the surface W2a (the upper surface and the outer peripheral surface exposed to the outside) of the convex portion W2. It is not limited. In the present specification, the “surface of the object to be processed W” refers to a surface obtained by combining the surface W1a of the substrate W1 and the surface W2a of the convex portion W2.

  The coating film R is formed on the surface of the workpiece W by the coating film forming apparatus 1. The material constituting the coating film R may be a resist material, a color resist material, a polyimide material, an SOC (Spin On Carbon) material, a metal hard mask material, or other materials, and is not limited at all. The resist material may be a resin material or other materials, and is not limited at all. The resist material may be, for example, a photosensitive material that is sensitive to light having a predetermined wavelength. The photosensitive material may be a negative type or a positive type.

  As shown in FIGS. 1 to 3, the coating film forming apparatus 1 includes a carrier block 2, a processing block 3, and a controller (control unit) CU.

  The carrier block 2 includes a carrier station 21 and a carry-in / carry-out unit 22. The carrier station 21 supports a plurality of carriers 10. The carrier 10 accommodates at least one workpiece W in a sealed state. On the side surface 10a of the carrier 10, an opening / closing door (not shown) for taking in and out the workpiece W is provided.

  The carry-in / carry-out unit 22 is located between the carrier station 21 and the processing block 3. The carry-in / carry-out unit 22 has a plurality of opening / closing doors 22a. When the carrier 10 is placed on the carrier station 21, the opening / closing door of the carrier 10 faces the opening / closing door 22a. By opening the opening / closing door 22a and the opening / closing door on the side surface 10a at the same time, the inside of the carrier 10 and the inside of the carry-in / out unit 22 are communicated. The carry-in / carry-out unit 22 incorporates a delivery arm A1. The delivery arm A <b> 1 takes out the workpiece W from the carrier 10 and delivers it to the processing block 3, receives the workpiece W from the processing block 3, and returns it to the carrier 10.

  The processing block 3 includes a plurality of processing modules 31, 32, a shelf 33, and a transfer arm A2. For example, as illustrated in FIG. 2, the processing modules 31 and 32 are arranged so as to be aligned along the moving direction of the transfer arm A2.

The processing module 31 includes a plurality of liquid processing units U1 (second processing chambers) arranged in the vertical direction, a coating liquid source B1, and a nitrogen gas source B2. The liquid processing unit U1 is configured to apply a liquid for forming the coating film R onto the surface of the object to be processed W. The coating liquid source B1 and the nitrogen gas source B2 are disposed below the liquid processing unit U1. Each of the coating liquid source B1 and the nitrogen gas source B2 contains a coating liquid and nitrogen gas (N ₂ gas) to be supplied to the liquid processing unit U1. The coating solution stored in the coating solution source B1 is obtained by diluting coating solution material particles (solute) with a solvent (solvent). The solvent is not limited as long as it is a known solvent suitable for dilution of coating solution material particles. For example, isopropyl alcohol (hereinafter sometimes referred to as IPA), PGMEA, γ-butyrolactone (hereinafter referred to as GBL). Or the like may be used.

  The processing module 32 has a plurality of heat treatment units U2 (first processing chambers) arranged in the vertical direction. The heat treatment unit U <b> 2 is configured to perform heat treatment on the workpiece W when forming the coating film R. Specific examples of the heat treatment include heat treatment for volatilizing the solvent of the coating solution and curing the coating solution material.

  The shelf 33 is arranged on the carrier block 2 side in the processing block 3. The shelf 33 temporarily accommodates the workpiece W and is used for delivery of the workpiece W between the delivery arm A1 and the processing block 3. The transport arm A <b> 2 transports the workpiece W between the shelf 33 and the processing modules 31 and 32 and between the processing modules 31 and 32.

  The controller CU controls the coating film forming apparatus 1 partially or entirely. As shown in FIG. 4, the controller CU includes a reading unit M1, a storage unit M2, a processing unit M3, and an instruction unit M4 as functional modules. These functional modules are merely the functions of the controller CU divided into a plurality of modules for convenience, and do not necessarily mean that the hardware configuring the controller CU is divided into such modules. Each functional module is not limited to that realized by executing a program, but is realized by a dedicated electric circuit (for example, a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) in which this is integrated. May be.

  The reading unit M1 reads a program from the computer-readable recording medium 200. The recording medium 200 records a program for causing the coating film forming apparatus 1 to execute various operations. The recording medium 200 may be, for example, a semiconductor memory, an optical recording disk, a magnetic recording disk, or a magneto-optical recording disk.

  The storage unit M2 stores various data. The storage unit M2 stores, for example, setting data input from an operator via an external input device (not shown), for example, in addition to the program read by the reading unit M1.

  The processing unit M3 processes various data. For example, the processing unit M3 generates a signal for operating the liquid processing unit U1 and the heat treatment unit U2 based on various data stored in the storage unit M2.

  The instruction unit M4 transmits the signal generated in the processing unit M3 to the liquid processing unit U1 or the heat treatment unit U2.

  The hardware of the controller CU is constituted by, for example, one or a plurality of control computers. The controller CU includes, for example, a circuit CU1 illustrated in FIG. 5 as a hardware configuration. The circuit CU1 may be composed of electric circuit elements (circuitry). Specifically, the circuit CU1 includes a processor CU2, a memory CU3, a storage CU4, a driver CU5, and an input / output port CU6. The processor CU2 configures each functional module described above by executing a program in cooperation with at least one of the memory CU3 and the storage CU4 and executing input / output of signals via the input / output port CU6. The driver CU5 is a circuit that drives various devices of the coating film forming apparatus 1. The input / output port CU6 inputs and outputs signals between the driver CU5 and the various apparatuses of the coating film forming apparatus 1.

  In the present embodiment, the coating film forming apparatus 1 includes one controller CU, but may include a controller group (control unit) including a plurality of controllers CU. When the coating film forming apparatus 1 includes a controller group, each of the above functional modules may be realized by one controller CU, or may be realized by a combination of two or more controllers CU. Good. When the controller CU is composed of a plurality of computers (circuit CU1), each of the above functional modules may be realized by one computer (circuit CU1), or two or more computers (circuit CU1). ) May be realized. The controller CU may have a plurality of processors CU2. In this case, each of the functional modules may be realized by one processor CU2, or may be realized by a combination of two or more processors CU2.

[Configuration of liquid processing unit]
Subsequently, the liquid processing unit U1 will be described in more detail with reference to FIGS. As shown in FIG. 6, the liquid processing unit U1 includes a rotation holding unit 40, a driving unit 50, a pump P, and a valve V.

  The rotation holding unit 40 includes a rotation unit 41 and a holding unit 42. The rotating part 41 has a shaft 43 protruding upward. The rotating unit 41 rotates the shaft 43 using, for example, an electric motor as a power source. The holding portion 42 is provided at the tip portion of the shaft 43. A workpiece W is arranged on the holding unit 42. The holding unit 42 holds the workpiece W substantially horizontally, for example, by suction or the like. That is, the rotation holding unit 40 has a posture of the workpiece W substantially horizontal, and the workpiece W around an axis (rotation axis) perpendicular to the surface of the workpiece W (surface W1a of the substrate W1). Rotate. In the present embodiment, the rotation axis passes through the center of the object to be processed W (substrate W1) having a circular shape, and is also the center axis. In the present embodiment, as shown in FIG. 6, the rotation holding unit 20 rotates the workpiece W clockwise as viewed from above.

  The drive unit 50 is configured to drive the nozzle N. The drive unit 50 includes a guide rail 51, a slide block 52, and an arm 53. The guide rail 51 extends along the horizontal direction above the rotation holding unit 40 (object W). The slide block 52 is connected to the guide rail 51 so as to be movable in the horizontal direction along the guide rail 51. The arm 53 is connected to the slide block 52 so as to be movable in the vertical direction. A nozzle N is connected to the lower end of the arm 53. In the arm 53, a channel through which the coating liquid can flow is formed. The flow path is connected to the coating liquid source B1 via the pump P.

  The drive unit 50 moves the slide block 52 and the arm 53 by a power source (not shown) such as an electric motor, and moves the nozzle N accordingly. In plan view, the nozzle N moves along the radial direction of the object to be processed W on a straight line perpendicular to the rotation axis of the object to be processed W when discharging the coating liquid.

  The nozzle N opens downward toward the surface of the workpiece W. The nozzle N may be, for example, an internal mixing type two-fluid nozzle, an external mixing type two-fluid nozzle, or a one-fluid nozzle. In the present specification, the structure of the nozzle N will be described with reference to FIG. 7, taking an internal mixing type two-fluid nozzle as an example. The nozzle N has a main body N1 having a substantially cylindrical shape and a pipe N2 connected to a side surface of the main body N1. The pipe N2 is connected to the nitrogen gas source B2 through the valve V.

  Flow paths N3 and N4 are formed inside the main body N1. The flow path N3 communicates with the flow path of the coating liquid formed inside the arm 53. The flow path N3 extends in the vertical direction in the main body N1, and the lower end communicates with the discharge port N5 of the nozzle N. The flow path N4 communicates with the pipe N2. The flow path N4 extends from the outer surface of the main body N1 to the vicinity of the lower end of the flow path N3 in the main body N1. At the junction N6 where the flow path N4 joins the flow path N3, the coating liquid flowing through the flow path N3 and the nitrogen gas flowing through the flow path N4 collide and mix to generate minute coating liquid droplets. . From the discharge port N5, the coating liquid droplet is blown out (sprayed) toward the surface of the workpiece W.

  Returning to FIG. 6, the pump P receives the control signal from the controller CU and sends the coating liquid from the coating liquid source B1 to the nozzle N. The pump P, the arm 53, the nozzle N (flow path N3), and the coating liquid source B1 constitute a supply unit 60 for supplying the coating liquid to the workpiece W.

  The valve V receives a control signal from the controller CU and sends nitrogen gas from the nitrogen gas source B2 to the nozzle N. The valve V, the pipe N2, the nozzle N (flow path N4), and the nitrogen gas source B2 constitute a supply unit 70 for supplying nitrogen gas to the workpiece W.

[Configuration of heat treatment unit]
Then, with reference to FIG.8 and FIG.9, the structure of the heat processing unit U2 is demonstrated. The heat treatment unit U <b> 2 includes a heating unit 110 that heats the workpiece W and a transport mechanism 120 that transports the workpiece W in the housing 100. A loading / unloading port 101 for carrying the workpiece W into the casing 100 and carrying the workpiece W out of the casing 100 on both side walls of the portion corresponding to the transport mechanism 120 in the casing 100. Is formed.

  The heating unit 110 includes a lid portion 111 and a hot plate housing portion 112. The lid portion 111 is located above the hot plate housing portion 112 and can be moved up and down between an upper position separated from the hot plate housing portion 112 and a lower position placed on the hot plate housing portion 112. It is. The lid part 111 constitutes the processing chamber PR together with the hot plate accommodating part 112 when in the lower position. An exhaust part 111 a is provided at the center of the lid part 111. The exhaust part 111a is used for exhausting gas from the processing chamber PR.

  The hot plate accommodating portion 112 has a cylindrical shape, and accommodates the hot plate 113 therein. The outer peripheral portion of the hot plate 113 is supported by a support member 114. The outer periphery of the support member 114 is supported by a cylindrical support ring 115. A gas supply port 115 a that opens upward is formed on the upper surface of the support ring 115. The gas supply port 115a ejects an inert gas into the processing chamber PR.

  As shown in FIG. 9, the hot plate 113 is a flat plate having a circular shape. The outer shape of the hot plate 113 is larger than the outer shape of the workpiece W. The hot plate 113 is formed with three through holes HL extending in the thickness direction (see FIG. 9). On the upper surface of the hot plate 113, six support pins PN that support the workpiece W are erected (see FIG. 8). The height of the support pin PN may be about 100 μm, for example.

  Returning to FIG. 8, the heater 116 is disposed on the lower surface of the hot plate 113. The heater 116 is connected to the controller CU and is controlled based on an instruction signal from the controller CU.

  An elevating mechanism 119 is disposed below the hot plate 113. The elevating mechanism 119 includes a motor 119a disposed outside the housing 100, and three elevating pins 119b that move up and down by the motor 119a. The elevating pins 119b are configured to be able to pass through the corresponding through holes HL. When the controller CU transmits an ascending signal or a descending signal to the motor 119a, the elevating pins 119b move up and down while moving in the corresponding through holes HL. When the tip of the lift pin 119b protrudes above the hot plate 113, the workpiece W can be placed on the tip of the lift pin 119b. The workpiece W placed on the tip of the lifting pin 119b moves up and down as the lifting pin 119b moves up and down.

  The transport mechanism 120 is located adjacent to the heating unit 110. The transport mechanism 120 includes a transport plate 121 on which the workpiece W is placed. The conveyance plate 121 is a flat plate having a rectangular shape as shown in FIG. An end of the transport plate 121 on the heating unit 110 side has an arc shape protruding toward the heating unit 110.

  The conveyance plate 121 is attached to a rail 122 that extends toward the heating unit 110. The transport plate 121 is driven by the drive unit 123 and can move horizontally on the rail 122. The transport plate 121 moved to the heating unit 110 side is located above the hot plate 113.

  The transport plate 121 is formed with two slits 124 extending along the extending direction of the rail 122. The slit 124 is formed so as to extend from the end of the transport plate 121 on the heating unit 110 side to the vicinity of the center of the transport plate 121. The slit 124 prevents interference between the transport plate 121 moved to the heating unit 110 side and the elevating pins 119b protruding on the hot plate 113.

  As shown in FIG. 8, an elevating mechanism 125 is disposed below the transport plate 121. The elevating mechanism 125 includes a motor 125a disposed outside the housing 100 and three elevating pins 125b that move up and down by the motor 125a. The elevating pins 125b are configured to be able to pass through the slits 124, respectively. When the controller CU transmits an ascending signal or a descending signal to the motor 125a, the elevating pin 125b moves up and down while moving in the slit 124. When the tip of the lift pin 125b protrudes above the transport plate 121, the workpiece W can be placed on the tip of the lift pin 125b. The workpiece W placed on the tip of the elevating pin 125b moves up and down as the elevating pin 125b moves up and down.

[Method of forming coating film]
Next, a method for forming the coating film R on the surface of the workpiece W will be described with reference to FIGS. First, the controller CU controls the delivery arm A1, and the workpiece W in the carrier 10 is conveyed to the shelf 33 by the delivery arm A1. Next, the controller CU controls the transport arm A2, takes out the workpiece W from the shelf 33 by the transport arm A2, and transports it to the heat treatment unit U2. In the heat treatment unit U2, the controller CU controls the transport mechanism 120 (transport plate 121), and the workpiece W is transported into the heating unit 110 (step S1). When the workpiece W is placed on the hot plate 113, the controller CU controls the lifting mechanism 119 to lower the lid 111 to the lower position by the lifting mechanism 119. As a result, the object to be processed W is accommodated in the processing chamber PR constituted by the lid portion 111 and the hot plate accommodating portion 112.

  Next, the controller CU controls the heating unit 110 and heats the workpiece W to a predetermined temperature by the heating unit 110 (step S2). The heating temperature of the workpiece W in the heating unit 110 may be set to a temperature that is 0 ° C. to 30 ° C. lower than the boiling point of the solvent contained in the coating liquid droplets. When the heating temperature of the object to be processed W by the heating unit 110 is equal to or higher than the temperature 30 ° C. lower than the boiling point of the solvent contained in the coating liquid droplets, the solvent of the coating liquid droplets sprayed in step S5 described below is almost volatile. Without such a situation, the coating liquid droplets hardly flow on the surface of the workpiece W. Therefore, it is possible to suppress the coating film R from becoming particularly thick on the base end side of the convex portion W2. When the heating temperature of the article W to be processed by the heating unit 110 is equal to or lower than the temperature 0 ° C. lower than the boiling point of the solvent contained in the coating liquid droplets (that is, a temperature equal to the boiling point), the coating sprayed in step S5 described later. It is difficult for a situation in which most of the solvent of the coating liquid droplets volatilizes before the liquid droplets reach the surface of the workpiece W. Therefore, it is suppressed that the coating liquid material particles contained in the coating liquid droplets are successively deposited on the surface of the workpiece W while maintaining the shape.

  When the solvent of the coating solution is IPA, since the boiling point of IPA is 82 ° C., the heating temperature of the workpiece W in the heating unit 110 may be set to about 55 ° C. to 85 ° C. When the solvent of the coating solution is PGMEA, since the boiling point of PGMEA is 146 ° C., the heating temperature of the workpiece W in the heating unit 110 may be set to about 110 ° C. to 150 ° C. When the solvent of the coating solution is GBL, since the boiling point of GBL is 204 ° C., the heating temperature of the workpiece W in the heating unit 110 may be set to about 150 ° C. to 205 ° C. In these cases, when a coating liquid droplet is sprayed on the surface of the workpiece W in step S5 described later, the solvent IPA, PGMEA, or GBL is appropriately volatilized. For this reason, the coating liquid droplets maintain appropriate fluidity on the surface of the object to be processed W, and easily spread uniformly on the surface of the object to be processed W. Therefore, the coating film R can be formed more uniformly along the surface of the workpiece W including the convex portion W2.

  Next, the controller CU controls the elevating mechanism 119 and the transport mechanism 120 to carry out the heated workpiece W from the heating unit 110. Next, the controller CU controls the transport arm A2, takes out the workpiece W from the heat treatment unit U2 by the transport arm A2, and transports it to the liquid processing unit U1 (step S3). The time required for the workpiece W to be transported to the liquid processing unit U1 after being heated by the heating unit 110 is, for example, about several seconds to 10 seconds. At the time of this conveyance, the temperature of the to-be-processed object W heated can fall about 20 to 30 degreeC, for example.

  When the object to be processed W is conveyed to the liquid processing unit U1 and is held by the holding part 42 of the rotation holding part 40, the controller CU controls the rotating part 41 to rotate the object to be processed W (step S4). . In this state, the controller CU controls the drive unit 50, the pump P, and the valve V, and the nozzle N moves on the straight line perpendicular to the rotation axis of the workpiece W along the radial direction of the workpiece W. Then, a coating liquid droplet is sprayed from the discharge port N5 of the nozzle N onto the surface of the rotating workpiece W (Step S5; see FIG. 11A). At this time, since the object to be processed W is heated in step S2 and the surface of the object to be processed W is at a predetermined temperature, the solvent of the coating liquid droplets is volatilized by receiving heat from the object to be processed W and is applied. The coating liquid material particles (coating liquid material) of the liquid droplets adhere to the surface of the workpiece W (see FIG. 11B).

  Next, the controller CU controls the transfer arm A2, takes out the workpiece W from the liquid processing unit U1 by the transfer arm A2, and transfers it to the heat treatment unit U2. Next, the controller CU controls the transport mechanism 120 (transport plate 121), so that the workpiece W is transported into the heating unit 110 (step S6). Thereby, the to-be-processed object W is accommodated in the process chamber PR similarly to step S1.

  Next, the controller CU controls the heating unit 110 and heats the workpiece W to a predetermined temperature by the heating unit 110 (step S7; see FIG. 11C). At this time, the heating temperature of the workpiece W in the heating unit 110 may be the same as in step S2. As a result, the solvent of the coating liquid droplets is completely volatilized, and the coating film R is formed on the surface of the workpiece W.

  Next, the controller CU determines whether or not the spraying of the coating liquid droplets from the nozzle N to the surface of the workpiece W has reached a predetermined number of times (step S8). Specifically, the controller CU counts the number of times of spraying and determines whether or not the number of times is equal to or greater than a preset threshold value. As a result of the determination in step S8, if the number of times has not reached the predetermined number (NO in step S8), the processes of step S3 to step S7 are repeated, and the coating liquid droplets on the surface of the workpiece W Is sprayed multiple times. The threshold value of the number of times of spraying may be appropriately set according to the target film thickness of the coating film R to be formed on the surface of the workpiece W, for example. In addition, it can be said that the heating process in step S7 is a pre-process of the spraying process in step S5 at the time of repetition.

  On the other hand, if the number of times has reached the predetermined number as a result of the determination in step S8 (YES in step S8), the controller CU controls the transfer arm A2 and moves the workpiece W by the transfer arm A2. After taking out from the heat treatment unit U2 and cooling the workpiece W to a predetermined temperature, it is transported to the shelf 33. At this time, the workpiece W may be forcibly cooled using a cooling mechanism such as a cooling plate or may be natural cooling. Thereafter, the controller CU controls the delivery arm A1, and returns the workpiece W from the shelf 33 into the carrier 10 by the delivery arm A1 (step S9). Thereby, the formation process of the coating film R is completed (see FIG. 11D).

  In the present embodiment as described above, before the coating liquid droplets are sprayed from the nozzle N onto the surface of the object to be processed W (before step S5), the object to be processed W is heated by the heating unit 110 (step S2). ). Therefore, the solvent of the coating liquid droplets sprayed in step S5 is volatilized by receiving heat from the target object W over the entire surface of the target object W including the surface W2a of the convex part W2, and the coating liquid droplets are applied. The liquid material particles (solute) adhere to the surface of the workpiece W. Accordingly, the coating liquid droplets are prevented from aggregating and flowing on the surface of the workpiece W, particularly on the side surface of the convex portion W2. As a result, the coating liquid material particles (coating liquid material) easily adhere uniformly on the surface of the object to be processed W, particularly on the side surface of the convex portion W2.

  In the present embodiment, since the workpiece W is heated by the heating unit 110 (step S7), at the start of step S7, a fluid liquid, that is, an unsolidified coating liquid droplet is applied to the workpiece W. Even if it exists on the surface, the solvent is completely volatilized by the heat treatment, and the unsolidified coating liquid droplets are solidified on the surface of the object to be processed W including the side surface of the convex portion W2. Therefore, when the coating liquid droplets are sprayed from the nozzle N to the surface of the workpiece W in the repeated step S5, the previously sprayed coating liquid droplets are completely solidified. . Accordingly, it is possible to prevent the coating liquid droplets having different spraying timings from mixing and aggregating and flowing on the surface of the workpiece W (particularly, the side surface of the convex portion W2). As described above, the coating film R can be more uniformly formed along the surface of the workpiece W including the convex portion W2.

  In the present embodiment, the workpiece W is heated by the heating unit 110 (step S7) before returning the workpiece W to the carrier 10 (before YES in step S8). Therefore, the solvent of the coating liquid droplets sprayed on the surface of the object to be processed W in step S5 receives the heat from the object to be processed W and volatilizes in step S7. For this reason, even before the workpiece W is returned to the carrier 10, the flow of the coating liquid droplets on the surface of the workpiece W is further suppressed. Therefore, the coating film R can be formed more uniformly along the surface of the workpiece W including the convex portion W2.

  In the present embodiment, in step S <b> 5, the coating liquid droplets are sprayed from the nozzle N onto the surface of the object to be processed W while the object to be processed W is rotated. Therefore, compared with the case where the coating liquid droplet is sprayed from the nozzle N onto the surface of the target object W while the nozzle N is meandering on the surface of the stationary target object W, the coating liquid droplet from the nozzle N is not covered. It is difficult to spray on the surface of the processing body W in an overlapping manner. Therefore, the coating film R can be formed more uniformly along the surface of the workpiece W including the convex portion W2.

  As mentioned above, although embodiment concerning this indication was described in detail, you may add various deformation | transformation to said embodiment within the range of the summary of this invention. For example, in this embodiment, the process (step S2, S7) which heats the to-be-processed object W by the heating part 110 is performed in the heat processing unit U2, and the process (spraying a coating liquid droplet on the surface of the to-be-processed object W from the nozzle N ( Step S5) is performed in the liquid processing unit U1, but both processes may be performed in the processing chamber using a processing chamber having both the liquid processing unit U1 and the heat treatment unit U2. In this case, when heating the workpiece W, it is preferable to stop the rotation of the workpiece W.

  In the case where there are a plurality of convex portions W2 in the radial direction of the substrate W1, the centrifugal force becomes smaller as it is closer to the rotation axis of the substrate W1, so that when the coating liquid droplets aggregate on the surface of the workpiece W, The coating liquid aggregated as the convex portion W2 tends to stay. Therefore, the moving speed of the nozzle N may be increased when the nozzle N is positioned in the vicinity of the rotation axis. In this case, since the spray amount of the coating liquid droplet is reduced near the rotation axis on the surface of the workpiece W, the coating liquid droplet is less likely to aggregate.

  The controller CU may control the rotation unit 41 so that the number of rotations of the workpiece W increases as the position of the nozzle N is closer to the rotation axis of the substrate W1. At this time, the controller CU may control the rotating unit 41 so that the moving speed (linear velocity) of the workpiece W immediately below the nozzle N is constant regardless of the position of the nozzle N. The controller CU increases the rotational speed of the workpiece W as the position of the nozzle N is closer to the rotation axis of the substrate W1, and increases the moving speed of the nozzle N as the nozzle N is positioned closer to the rotation axis. You may perform in combination with control. The controller CU may control the rotating unit 41 such that the number of rotations of the workpiece W is constant regardless of the position of the nozzle N with respect to the substrate W1.

  When the spraying area of the coating liquid droplets from the nozzle N is larger than the size of the surface of the object to be processed W, the nozzle N need not be moved, and the object to be processed W need not be rotated. Also good.

  In addition to steps S2 and S7, the object to be processed W may be heated also in the process of spraying the coating liquid droplets onto the surface of the object to be processed W from the nozzle N (step S5).

  For example, as shown in FIG. 12, the liquid processing unit U1 further includes a gas nozzle GN configured to blow heated nitrogen gas (high-temperature nitrogen gas) onto the surface of the object to be processed W. From the controller CU Based on the instruction, the operation of the gas nozzle GN may be controlled by the gas supply unit. Specifically, in step S5, the controller CU controls the gas supply unit so that the gas nozzle GN follows the nozzle N, and the high temperature nitrogen is applied to the sprayed portion of the coating liquid droplet on the surface of the workpiece W. Gas may be blown from the gas nozzle GN. In this case, since the solvent is dried by the high-temperature nitrogen gas from the gas nozzle GN during the spraying of the coating liquid droplets, the time required to form the coating film R on the surface of the workpiece W can be shortened. it can. The temperature of the high-temperature nitrogen gas may be about 50 ° C to 150 ° C.

  Further, for example, when the nozzle N is a two-fluid nozzle, in step S5, heated nitrogen gas (high-temperature nitrogen gas) is supplied to the nozzle N, and the coating liquid droplet is accompanied by the high-temperature nitrogen gas. May be sprayed onto the surface of the workpiece W. In this case, since the solvent is dried during the spraying of the coating liquid droplets, the time required to form the coating film on the surface of the workpiece W can be shortened.

  When the coating film R is formed on the surface of the workpiece W using the coating film forming apparatus 1 according to this embodiment, the coating film R is uniformly formed along the surface of the workpiece W including the convex portion W2. In order to confirm that it was possible, the following tests 1 to 3 were performed.

(Test Example 1)
A workpiece W was prepared in which three convex portions W2 were provided on a disk-shaped substrate W1 having a diameter of 150 mm. The convex portions W2 were located at 0 mm (Test Example 1A), 35 mm (Test Example 1B), and 70 mm (Test Example 1C) from the center of the workpiece W in the radial direction. Further, a resist solution in which a positive photoresist was diluted with PGMEA was prepared.

  Next, the workpiece W was heated at 100 ° C. for 60 seconds by the heat treatment unit U2 (first treatment). Next, the heated object to be processed W was transported to the liquid processing unit U1, and the prepared resist solution was sprayed from the nozzle N of the two-fluid nozzle onto the surface of the object to be processed W (second process). At this time, the rotation speed of the workpiece W by the rotation holding unit 40 was varied within a range of 60 rpm to 600 rpm so that the moving speed (linear velocity) of the workpiece W just below the nozzle N was constant. The moving speed of the nozzle N was 10 mm / second to 150 mm / second. Next, the to-be-processed object W was again conveyed to the heat processing unit U2, and the to-be-processed object W was heated at 100 degreeC by the heat processing unit U2 for 60 second (3rd process). Thereafter, the second treatment and the third treatment described above were repeated 12 times, and a resist film (coating film R) was formed on the surface of the workpiece W.

  Next, the states of the cross sections of Test Examples 1A, 1B, and 1C were observed with an electron microscope. Schematic diagrams of cross sections of Test Examples 1A, 1B, and 1C are shown in FIGS. In any of Test Examples 1A, 1B, and 1C, the resist film (coating film R) was uniformly formed along the surface of the workpiece W including the convex portion W2. In particular, in Test Examples 1B and 1C, the resist film (coating film R) was extremely uniform.

(Test Example 2)
Similar to Test Example 1 except that the heating temperature of the object to be processed W in the first process and the third process is set to 150 ° C., 0 mm from the center of the object to be processed W in the radial direction (Test Example 2A). A resist film (coating film R) was formed on the surface of the workpiece W on which the convex portion W2 is located at 35 mm (Test Example 2B) and 70 mm (Test Example 2C). Next, the states of the cross sections of Test Examples 2A, 2B, and 2C were observed with an electron microscope. Schematic diagrams of cross sections of Test Examples 2A, 2B, and 2C are shown in FIGS. 13 (d) to (f), respectively. In any of Test Examples 2A, 2B, and 2C, the resist film (coating film R) was uniformly formed along the surface of the workpiece W including the convex portion W2. In particular, in Test Examples 2B and 2C, the resist film (coating film R) was extremely uniform.

(Test Example 3)
In the second process, as shown below, the nozzle N is set so that the moving speed of the nozzle N increases as the nozzle N is closer to the center of the workpiece W. A resist film (coating film R) was formed on the surface of the workpiece W on which the convex portion W2 is located at 0 mm (Test Example 3) in the radial direction from the center.
-Between the center of the workpiece W and a position 50 mm in the radial direction from the center: 30 mm / second to 150 mm / second-A position 50 mm in the radial direction from the center of the workpiece W and the position of the workpiece W Between peripheral edges: 10 mm / second to 30 mm / second Next, the cross section of Test Example 3 was observed with an electron microscope. A schematic diagram of a cross section of Test Example 3 is shown in FIG. In Test Example 3, resist droplets hardly aggregate near the center of the workpiece W, so that the resist film (coating film R) was formed more uniformly than Test Examples 1A and 2A.

  DESCRIPTION OF SYMBOLS 1 ... Coating film formation apparatus, 40 ... Rotation holding part, 60 ... Supply part, 70 ... Supply part, 110 ... Heating part, CU ... Controller (control part), GN ... Gas nozzle, N ... Nozzle, R ... Coating film, U1 ... Liquid treatment unit (second treatment chamber), U2 ... Heat treatment unit (first treatment chamber), W ... Object to be treated, W1 ... Substrate, W1a ... Surface, W2 ... Projection, W2a ... Surface.

Claims (17)

A first step of heating an object to be processed including a substrate and a convex portion provided on the surface of the substrate;
And a second step of spraying a coating liquid droplet from a nozzle onto the surface of the object to be processed after being heated in the first step.   The coating film forming method according to claim 1, further comprising a third step of heating the object to be processed after the coating liquid droplets are sprayed in the second step.   The coating film forming method according to claim 1, wherein the heating temperature of the object to be processed is set to a temperature that is 10 ° C. to 50 ° C. lower than the boiling point of the solvent contained in the coating liquid droplets.   The coating film forming method according to claim 3, wherein the solvent contained in the coating liquid droplets is propylene glycol monomethyl ether acetate.   In the second step, the coating liquid droplets are sprayed from the nozzle onto the surface of the object to be processed after being heated in the first process in a state where the object to be processed is rotated. Item 5. The method for forming a coating film according to any one of Items 1 to 4.   In the second step, the coating liquid droplets are sprayed from the nozzle onto the surface of the object to be processed after being heated in the first step, and a gas nozzle different from the nozzle is used as the nozzle. The coating film formation according to any one of claims 1 to 5, wherein a nitrogen gas heated from a surface of the object to be treated is sprayed from the gas nozzle to the sprayed portion of the coating liquid droplet. Method.   In the second step, the surface of the object to be processed after being heated in the first step is sprayed from the nozzle in a state where the coating liquid droplets are accompanied by heated nitrogen gas. The coating film formation method as described in any one of Claims 1-5. A heating unit configured to heat an object to be processed including a substrate and a convex portion provided on a surface of the substrate;
A supply unit configured to spray the coating liquid as coating liquid droplets from the nozzle;
A control unit,
The controller is
A first process for controlling the heating unit to heat the object to be processed;
Forming a coating film by controlling the supply unit and performing a second process of spraying the coating liquid droplets from the nozzle on the surface of the object to be processed after being heated by the first process apparatus. A first processing chamber in which the first processing is performed;
The coating film forming apparatus according to claim 8, further comprising a second processing chamber that is different from the first processing chamber and in which the second processing is performed.   The coating film forming apparatus according to claim 8, further comprising a processing chamber in which both the first processing and the second processing are performed.   The said control part controls the said heating part, and further performs the 3rd process which heats the said to-be-processed object after the said coating liquid droplet is sprayed in a said 2nd process. The coating film forming apparatus according to claim 10.   When the controller controls the heating unit to heat the object to be processed, the heating temperature of the object to be processed by the heating unit is 10 ° C. to the boiling point of the solvent contained in the coating liquid droplets. The coating film forming apparatus according to any one of claims 8 to 11, which is set to a temperature lower by 50 ° C.   The coating film forming apparatus according to claim 12, wherein the solvent contained in the coating liquid droplets is propylene glycol monomethyl ether acetate. A drive unit for rotating the object to be processed around an axis perpendicular to the surface of the substrate;
In the second process, the control unit controls the driving unit to rotate the object to be processed and controls the supply unit to supply the coating liquid to the nozzle. The coating film forming apparatus according to claim 8, wherein the coating liquid droplets are sprayed from the nozzle onto the surface of the object to be processed after being heated by the processing of 1. A gas supply unit configured to discharge the heated nitrogen gas from the gas nozzle;
In the second process, the control unit controls the supply unit to spray the coating liquid droplets from the nozzle onto the surface of the object to be processed after being heated by the first process. Along with controlling the gas supply unit, while the gas nozzle follows the nozzle, the heated nitrogen gas is blown from the gas nozzle to the sprayed portion of the coating liquid droplet in the surface of the object to be processed. The coating film formation apparatus as described in any one of Claims 8-14.   In the second process, the control unit controls the supply unit and applies the coating liquid to the heated nitrogen gas with respect to the surface of the object to be processed after being heated by the first process. The coating film forming apparatus according to any one of claims 8 to 14, which is sprayed from the nozzle in a state where a droplet is accompanied.   The computer-readable recording medium which recorded the program for making a coating film forming apparatus perform the coating film forming method as described in any one of Claims 1-7.

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