JP2017090197A - Measurement device and measurement method - Google Patents

Measurement device and measurement method Download PDF

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JP2017090197A
JP2017090197A JP2015219551A JP2015219551A JP2017090197A JP 2017090197 A JP2017090197 A JP 2017090197A JP 2015219551 A JP2015219551 A JP 2015219551A JP 2015219551 A JP2015219551 A JP 2015219551A JP 2017090197 A JP2017090197 A JP 2017090197A
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contact
movable member
reference line
movable
measurement
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JP6676931B2 (en
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将司 河本
Shoji Kawamoto
将司 河本
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JTEKT Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a measurement device and measurement method that stabilize a contact state with respect to a measurement object surface of the cylindrical workpieces in measurement devices measuring diameters of cylindrical workpieces.SOLUTION: A measurement device 10 includes a first probe 11, a second probe 12, and a third probe 13, and brings the probes 11, 12 and 13 into contact with a trajectory 7 of an outer wheel 6 to be installed with one point C on a reference line L0 as a center to thereby measure a diameter D1 of the trajectory 7. The measurement device 10 comprises: a movable member 20 that loads the third probe 13; an elastic member 25 that urges the movable member 20 to thereby press the third probe 13 against the trajectory 7; displacement meters 41 and 42 that measure an amount of displacement of the movable member 20; and a restriction member 50. The restriction member 50 is configured to make the movable member 20 movable as to an amount of first movement allowance in a state where the movable member is in a retreat position, and make the movable member 20 movable as to an amount of second movement allowance smaller than the amount of first movement allowance in a state where the movable member is in a restriction position.SELECTED DRAWING: Figure 1

Description

本発明は、測定装置及び測定方法に関するものであり、例えば、転がり軸受用の軌道輪の軌道における直径を測定するための装置及び方法に関する。   The present invention relates to a measuring apparatus and a measuring method, for example, an apparatus and a method for measuring a diameter of a raceway for a rolling bearing.

例えば玉軸受の外輪の内周面に形成されている軌道は、断面が円弧状の溝として形成されており、この溝の最大径、つまり、溝底位置における直径を計測して、加工寸法の確認(検査)等が行われる(例えば、特許文献1参照)。
このような計測を行う装置として、次のようなものが知られている。図12に示すように、測定装置は、第一接触子91、第二接触子92、第三接触子93、この第三接触子93を搭載している可動部材94、可動部材94を基準線L0に沿って誘導するガイド部材95、第三接触子93を外輪99の軌道98に押し付けるための弾性部材(圧縮ばね)96、及び、変位計97を有している。
For example, the raceway formed on the inner peripheral surface of the outer ring of the ball bearing has a cross section formed as an arc-shaped groove, and the maximum diameter of this groove, that is, the diameter at the groove bottom position is measured to determine the machining dimension. Confirmation (inspection) or the like is performed (see, for example, Patent Document 1).
The following devices are known as devices for performing such measurement. As shown in FIG. 12, the measuring apparatus includes a first contact 91, a second contact 92, a third contact 93, a movable member 94 on which the third contact 93 is mounted, and the movable member 94 as a reference line. A guide member 95 that guides along L0, an elastic member (compression spring) 96 for pressing the third contactor 93 against the raceway 98 of the outer ring 99, and a displacement meter 97 are provided.

軌道98の直径D1を測定するために、三つの接触子91,92,93を軌道98に接触させた状態とする。第一接触子91及び第二接触子92は、基準線L0を軸として線対称の配置にあり、装置基台に固定されているのに対して、第三接触子93は基準線L0に沿って移動可能となっている。そこで、第三接触子93を搭載している可動部材94の移動量が変位計97によって計測され、その計測値に基づいて軌道98の溝底位置における直径D1が求められる。   In order to measure the diameter D1 of the track 98, the three contacts 91, 92, 93 are brought into contact with the track 98. The first contactor 91 and the second contactor 92 are arranged symmetrically with respect to the reference line L0 and are fixed to the apparatus base, whereas the third contactor 93 is along the reference line L0. Can be moved. Therefore, the displacement of the movable member 94 on which the third contactor 93 is mounted is measured by the displacement meter 97, and the diameter D1 at the groove bottom position of the track 98 is obtained based on the measured value.

直径D1を求める処理では、寸法が既知である外輪(ワークマスタ)を対象として可動部材94の移動量が変位計97により既に求められている。そして、加工済みの外輪99を実際の測定対象として可動部材94の移動量を変位計97により求め、ワークマスタによる計測値を基準とし、実際の測定対象である外輪99の計測値に基づいて、軌道98の直径D1が求められる。   In the process of obtaining the diameter D1, the displacement meter 97 has already obtained the movement amount of the movable member 94 for the outer ring (work master) whose dimensions are known. Then, the displacement of the movable member 94 is obtained by the displacement meter 97 with the processed outer ring 99 as an actual measurement object, and based on the measurement value of the outer ring 99 that is the actual measurement object, based on the measurement value by the work master, The diameter D1 of the track 98 is determined.

特開2006−47060号公報(図2参照)JP 2006-47060 A (see FIG. 2)

前記のような測定装置を用いて測定を行う準備として、先ず、三つの接触子91,92,93の外側の所定位置に外輪99を設置するが、この際、可動部材94を大きな逃し量Y(図13参照)について(図13では右側へ)移動させる必要がある。作業者は、可動部材94に取り付けられているレバー94aを引くことで、弾性部材96の弾性力に抗して、可動部材94を容易に移動させる(逃がす)ことができる。なお、前記逃し量Yは、外輪99の軌道98における直径D1と肩部99aにおける直径D2との差以上とする必要があり、軸受の型番によって様々な値となるが、数ミリメートル程度又はそれ以上となる場合がある。   In preparation for performing measurement using the measuring device as described above, first, the outer ring 99 is installed at a predetermined position outside the three contacts 91, 92, 93. At this time, the movable member 94 has a large escape amount Y. It is necessary to move (see FIG. 13) (to the right in FIG. 13). The operator can easily move (release) the movable member 94 against the elastic force of the elastic member 96 by pulling the lever 94 a attached to the movable member 94. The escape amount Y must be greater than or equal to the difference between the diameter D1 of the raceway 98 of the outer ring 99 and the diameter D2 of the shoulder 99a, and varies depending on the bearing model number, but is about several millimeters or more. It may become.

そして、外輪99を所定位置に設置した後、レバー94aを引く力を解除すると、弾性部材96の弾性力(復元力)によって第三接触子93は、図13において左側に移動し、図12に示すように、軌道98に接触し更に押圧し、これにより測定荷重が付与された状態となる。
しかし、前記逃し量Yが数ミリメートル程度と大きく、また、その逃し量Yが試行毎に様々であると、軌道98に対する第三接触子93の当て方(当たる力)にばらつきが生じ、試行毎に軌道98に対する接触子91,92,93の接触状態が異なり、測定荷重が異なる場合がある。このように接触状態(測定荷重)が試行毎に異なると、測定精度の安定性が損なわれ、測定誤差が発生しやすい。
なお、以上の説明は、測定対象が玉軸受の外輪99となる場合であるが、玉軸受の内輪の外周面に形成されている軌道を計測する場合も同様である。
When the pulling force of the lever 94a is released after the outer ring 99 is installed at a predetermined position, the third contactor 93 moves to the left in FIG. 13 by the elastic force (restoring force) of the elastic member 96, and FIG. As shown, the track 98 is contacted and further pressed, whereby a measurement load is applied.
However, if the escape amount Y is as large as several millimeters, and the escape amount Y varies from trial to trial, the manner in which the third contactor 93 is applied to the track 98 (the force applied) varies. In some cases, the contact state of the contacts 91, 92, 93 with respect to the track 98 is different, and the measurement load is different. Thus, when the contact state (measurement load) varies from trial to trial, the stability of measurement accuracy is impaired, and measurement errors are likely to occur.
The above explanation is for the case where the measurement target is the outer ring 99 of the ball bearing, but the same applies to the case where the track formed on the outer peripheral surface of the inner ring of the ball bearing is measured.

そこで、本発明は、円筒ワークの測定対象面に対する接触子の接触状態を安定させることが可能となる測定装置及び測定方法を提供することを目的とする。   Then, an object of this invention is to provide the measuring apparatus and measuring method which can stabilize the contact state of the contact with the measuring object surface of a cylindrical workpiece.

本発明は、基準線を軸として線対称の配置にある第一接触子及び第二接触子と、前記基準線上に位置する第三接触子とを有し、前記基準線上の一点を中心として設置する円筒ワークの外周面及び内周面の内のいずれか一方の測定対象面に、当該第一接触子、当該第二接触子及び当該第三接触子を接触させることで、当該測定対象面における直径の測定を行うための測定装置であって、前記第三接触子を搭載し前記基準線に平行な方向に移動可能である可動部材と、前記可動部材を前記基準線に平行な方向に付勢して前記第三接触子を前記測定対象面に押し付けるための弾性部材と、前記可動部材の変位量を計測する変位計と、退避位置及び規制位置の間を位置変化可能として設けられており前記可動部材の移動許容量を変更させるための規制部材と、を備え、前記規制部材は、前記退避位置にある状態で、前記可動部材を第一移動許容量について移動可能とさせ、前記規制位置にある状態で、前記可動部材を前記第一移動許容量よりも小さい第二移動許容量について移動可能とさせる。   The present invention has a first contact and a second contact in a line-symmetric arrangement with respect to a reference line, and a third contact located on the reference line, and is installed around one point on the reference line By bringing the first contact, the second contact, and the third contact into contact with either one of the outer peripheral surface and the inner peripheral surface of the cylindrical workpiece, A measuring apparatus for measuring a diameter, comprising a movable member mounted with the third contactor and movable in a direction parallel to the reference line, and the movable member attached in a direction parallel to the reference line. An elastic member for pressing the third contact against the surface to be measured, a displacement meter for measuring the amount of displacement of the movable member, and a position changeable between a retracted position and a restricting position are provided. Regulations for changing the movement allowable amount of the movable member And the restriction member is movable in the first movement allowable amount in the state where the restriction member is in the retracted position, and the movable member is moved in the state where the restriction member is in the restriction position. The second movement allowable amount smaller than the allowable amount is allowed to move.

この測定装置によれば、円筒ワークを設置する際、規制部材を退避位置とする。これにより、第三接触子を搭載する可動部材を第一移動許容量について移動させて、第一接触子、第二接触子及び第三接触子と円筒ワークとが干渉しない状態とすることができ、円筒ワークの設置が可能となる。そして、弾性部材によって第三接触子を測定対象面に押し付け、第一接触子、第二接触子及び第三接触子それぞれを測定対象面に接触させた状態とすることができる。次に、規制部材を規制位置とする。これにより、可動部材を小さい第二移動許容量について移動させて第三接触子と測定対象面との間に微小隙間を形成してから、弾性部材によって可動部材を付勢して第三接触子を測定対象面に押し付けて当該微小隙間を解消することができる。
このように、可動部材を退避位置とすることで、可動部材の移動量を大きくして、円筒ワークを所定位置に設置することができ、そして、規制部材を規制位置とすることで、可動部材の移動量を小さくすることができる(微小隙間と同寸法とすることができる)ので、測定対象面に対する第三接触子の当て方にばらつきが生じにくくなり、円筒ワークの測定対象面に対する接触子の接触状態を安定させることが可能となる。
According to this measuring apparatus, when installing the cylindrical workpiece, the restricting member is set to the retracted position. Thereby, the movable member carrying the third contact can be moved with respect to the first movement allowance so that the first contact, the second contact, the third contact and the cylindrical workpiece do not interfere with each other. The cylindrical work can be installed. Then, the third contact can be pressed against the surface to be measured by the elastic member, and the first contact, the second contact, and the third contact can be brought into contact with the surface to be measured. Next, the restriction member is set as a restriction position. As a result, the movable member is moved by a small second movement allowance to form a minute gap between the third contactor and the surface to be measured, and then the movable member is urged by the elastic member to move the third contactor. Can be pressed against the surface to be measured to eliminate the minute gap.
Thus, by setting the movable member to the retracted position, the amount of movement of the movable member can be increased, and the cylindrical workpiece can be installed at a predetermined position. And, by setting the restricting member to the restricting position, the movable member Since the amount of movement of the third contact can be reduced (it can be the same size as the minute gap), the method of applying the third contact to the surface to be measured is less likely to vary, and the contact to the surface to be measured of the cylindrical workpiece It is possible to stabilize the contact state.

また、前記円筒ワークは、玉軸受の外輪又は内輪であり、前記第一移動許容量は、前記外輪又は内輪の軌道における直径と前記外輪又は前記内輪の肩部における直径との差以上であるのが好ましい。
この場合、玉軸受の外輪の軌道又は内輪の軌道の直径の測定が可能となる。
The cylindrical workpiece is an outer ring or an inner ring of a ball bearing, and the first movement allowance is equal to or greater than a difference between a diameter of the outer ring or the inner ring and a diameter of a shoulder of the outer ring or the inner ring. Is preferred.
In this case, the diameter of the outer ring raceway or inner ring raceway of the ball bearing can be measured.

また、前記測定装置は、装置基台と、当該装置基台に固定されている固定部材とを、更に備え、前記規制部材は、前記規制位置にある状態で,前記装置基台に対して移動可能である前記可動部材と前記固定部材との間に介在し、前記退避位置にある状態で、前記可動部材と前記固定部材との間から離脱しているのが好ましい。
これにより、規制部材が退避位置にある状態で、可動部材を第一移動許容量について移動可能とさせ、規制部材が規制位置にある状態で、可動部材を小さい第二移動許容量について移動可能とさせる構成が簡単に得られる。
The measuring device further includes a device base and a fixing member fixed to the device base, and the restricting member moves relative to the device base in the state of the restricting position. It is preferable that the movable member is interposed between the movable member and the fixed member, and is separated from the movable member and the fixed member in the retracted position.
Accordingly, the movable member can be moved with respect to the first movement allowable amount while the restricting member is in the retracted position, and the movable member can be moved with respect to the small second allowable movement amount while the restricting member is in the restricting position. The structure to be made can be obtained easily.

また、本発明は、基準線を軸として線対称の配置にある第一接触子及び第二接触子と、前記基準線上に位置する第三接触子とを、前記基準線上の一点を中心として設置する円筒ワークの外周面及び内周面の内のいずれか一方の測定対象面に接触させることで、当該測定対象面における直径を測定するための方法であって、前記第一接触子、前記第二接触子及び前記第三接触子と前記円筒ワークとが干渉しない位置まで、当該第三接触子を搭載する可動部材を前記基準線に平行な方向に第一移動許容量について移動させ、当該円筒ワークを設置する設置工程と、前記設置工程の後、前記第三接触子を前記測定対象面に押し付け、前記第一接触子、前記第二接触子及び前記第三接触子それぞれを前記測定対象面に接触させた状態とする準備工程と、前記測定対象面における直径を求めるために、前記可動部材の変位量を計測する計測工程と、を備え、前記準備工程では、前記可動部材を前記第一移動許容量よりも小さい第二移動許容量について移動させて当該第三接触子と当該測定対象面との間に微小隙間を形成してから、当該可動部材を付勢して当該第三接触子を当該測定対象面に押し付けて当該微小隙間を解消し、その後、前記計測工程を行う。   In the present invention, the first contact and the second contact that are arranged symmetrically with respect to the reference line as an axis, and the third contact located on the reference line are installed around a point on the reference line. A method for measuring a diameter of a measurement target surface by contacting any one of an outer peripheral surface and an inner peripheral surface of the cylindrical workpiece, the first contactor, the first contact The movable member carrying the third contact is moved in the direction parallel to the reference line to the position where the second contact and the third contact do not interfere with the cylindrical workpiece, and the cylinder is moved. After the installation step of installing a workpiece, and after the installation step, the third contactor is pressed against the measurement target surface, and the first contactor, the second contactor, and the third contactor are respectively connected to the measurement target surface. A preparatory process to bring it into contact with A measuring step of measuring a displacement amount of the movable member in order to obtain a diameter on the measurement target surface, and in the preparation step, the second movement allowable amount is smaller than the first movement allowable amount in the preparing step. To form a minute gap between the third contact and the measurement target surface, and then bias the movable member to press the third contact against the measurement target surface. After that, the measurement step is performed.

この測定方法によれば、設置工程では、可動部材の移動量を大きくして、円筒ワークを所定位置に設置することができ、そして、準備工程では、可動部材の移動量を小さくして第三接触子と測定対象面との間に微小隙間を形成してから、可動部材を付勢して第三接触子を測定対象面に押し当てる(微小隙間を解消させる)。これにより、測定対象面に対する第三接触子の当て方にばらつきが生じにくくなり、円筒ワークの測定対象面に対する接触子の接触状態を安定させることが可能となる。   According to this measurement method, in the installation step, the moving amount of the movable member can be increased to install the cylindrical workpiece at a predetermined position, and in the preparation step, the moving amount of the movable member can be reduced to reduce the third amount. After a minute gap is formed between the contact and the measurement target surface, the movable member is urged to press the third contact against the measurement target surface (to eliminate the minute gap). Thereby, it becomes difficult to produce dispersion | variation in the method of applying the 3rd contact with respect to a measuring object surface, and it becomes possible to stabilize the contact state of the contact with respect to the measuring object surface of a cylindrical workpiece.

本発明によれば、測定対象面に対する第三接触子の当て方にばらつきが生じにくくなり、円筒ワークの測定対象面に対する接触子の接触状態を安定させることが可能となる。この結果、測定を繰り返し行う場合において、測定精度のばらつき発生が抑制される。   According to the present invention, the method of applying the third contact to the measurement target surface is less likely to vary, and the contact state of the contact with the measurement target surface of the cylindrical workpiece can be stabilized. As a result, when measurement is repeated, occurrence of variations in measurement accuracy is suppressed.

測定装置の実施の一形態の概略を示す平面図である。It is a top view which shows the outline of one Embodiment of a measuring apparatus. 図1に示す測定装置を横から見た断面図である。It is sectional drawing which looked at the measuring apparatus shown in FIG. 1 from the side. 規制部材の説明図であり、規制部材が上方に回転して退避位置にある状態を示している。It is explanatory drawing of a control member, and has shown the state which a control member rotates upwards and exists in a retracted position. 規制部材の説明図であり、規制部材が下方に回転して規制位置にある状態を示している。It is explanatory drawing of a control member, and has shown the state which a control member rotates below and exists in a control position. 測定方法を説明するフローチャート図である。It is a flowchart figure explaining a measuring method. 測定方法に含まれる工程を説明するための測定装置の概略図である。It is the schematic of the measuring device for demonstrating the process included in the measuring method. 測定方法に含まれる工程を説明するための測定装置の概略図である。It is the schematic of the measuring device for demonstrating the process included in the measuring method. 測定方法に含まれる工程を説明するための測定装置の概略図である。It is the schematic of the measuring device for demonstrating the process included in the measuring method. 測定方法に含まれる工程を説明するための測定装置の概略図である。It is the schematic of the measuring device for demonstrating the process included in the measuring method. 測定の対象を内輪とする場合の測定装置の平面図である。It is a top view of a measuring device in case a measuring object is an inner ring. 図10に示す測定装置を横から見た断面図である。It is sectional drawing which looked at the measuring apparatus shown in FIG. 10 from the side. 従来の測定装置の概略図である。It is the schematic of the conventional measuring apparatus. 従来の測定装置の概略図である。It is the schematic of the conventional measuring apparatus.

以下、本発明の実施の形態を図面に基づいて説明する。
〔測定装置について〕
図1は、測定装置の実施の一形態の概略を示す平面図である。図2は、図1に示す測定装置を横から見た断面図である。この測定装置10は、円筒ワークの外周面及び内周面の内のいずれか一方(の一部)を測定対象面としており、この測定対象面における直径を測定するためのものである。図1及び図2に示す測定装置10は、円筒ワークの内周面の直径を測定する場合の装置であり、特に本実施形態では、円筒ワークは玉軸受用の外輪6であり、この外輪6の内周面に形成されている軌道7の直径D1を計測するためのものである。玉軸受の外輪6の軌道7は、断面が円弧状の溝として形成されていることから、この溝の最大径、つまり、溝底位置における直径D1を計測する。つまり、軌道7を測定対象面としている。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[About measuring equipment]
FIG. 1 is a plan view showing an outline of an embodiment of a measuring apparatus. 2 is a cross-sectional view of the measuring apparatus shown in FIG. 1 as viewed from the side. This measuring device 10 uses one (a part) of an outer peripheral surface and an inner peripheral surface of a cylindrical workpiece as a measurement target surface, and is for measuring a diameter on the measurement target surface. A measuring apparatus 10 shown in FIGS. 1 and 2 is an apparatus for measuring the diameter of the inner peripheral surface of a cylindrical workpiece. In particular, in this embodiment, the cylindrical workpiece is an outer ring 6 for ball bearings. This is for measuring the diameter D1 of the track 7 formed on the inner peripheral surface. Since the raceway 7 of the outer ring 6 of the ball bearing is formed as an arc-shaped groove, the maximum diameter of this groove, that is, the diameter D1 at the groove bottom position is measured. That is, the track 7 is the measurement target surface.

測定装置10は、第一接触子11、第二接触子12、第三接触子13、可動部材20、ガイド部材31,32、弾性部材25、変位計(41,42)、及び規制部材50を備えている。さらに、測定装置10は、作業台上に設置される装置基台9、及びこの装置基台9に固定されている固定部材19を備えている。また、測定装置10は、ワーク受け部38、及び演算装置15を備えている。   The measuring device 10 includes a first contact 11, a second contact 12, a third contact 13, a movable member 20, guide members 31 and 32, an elastic member 25, a displacement meter (41 and 42), and a regulating member 50. I have. Further, the measuring apparatus 10 includes an apparatus base 9 installed on the work table, and a fixing member 19 fixed to the apparatus base 9. In addition, the measuring apparatus 10 includes a work receiving unit 38 and an arithmetic device 15.

装置基台9は平板状の部材であり、この上に前記各機器が設けられている。
固定部材19は、装置基台9に固定されており、固定ブロック19aと、固定ブロック19aから基準線L0に平行な方向に延びている複数のロッド19bとを有している。
なお、この測定装置10では、基準線L0が定義されている。図1において、基準線L0は、第一接触子11と軌道7との接触点及び第二接触子12と軌道7との接触点を結ぶ線分の垂直二等分線であって、装置基台9の面方向に平行な直線(本実施形態では水平方向の直線)である。この基準線L0は、各機器の配置及び測定対象となる外輪6の位置の基準になる。後の測定方法においても説明するが、基準線L0上の一点Qと外輪6の中心(中心点C)とを一致させて、外輪6をこの測定装置10に設置することで、軌道7の直径D1の測定が行われる。
The device base 9 is a flat plate member on which the devices are provided.
The fixing member 19 is fixed to the apparatus base 9 and includes a fixing block 19a and a plurality of rods 19b extending from the fixing block 19a in a direction parallel to the reference line L0.
In the measurement apparatus 10, a reference line L0 is defined. In FIG. 1, a reference line L0 is a perpendicular bisector connecting a contact point between the first contactor 11 and the track 7 and a contact point between the second contactor 12 and the track 7. A straight line parallel to the surface direction of the table 9 (in this embodiment, a straight line in the horizontal direction). The reference line L0 serves as a reference for the arrangement of the devices and the position of the outer ring 6 to be measured. As will be described later, the diameter of the track 7 is set by aligning the point Q on the reference line L0 with the center of the outer ring 6 (center point C) and installing the outer ring 6 in the measuring device 10. D1 is measured.

ワーク受け部38は、外輪6を下から支持するためのものであり、外輪6を載せる水平梁部38aと、この水平梁部38aを支える柱部38bとを有している。水平梁部38aは、平面視においてY字形状を有しており、その上面に外輪6を載せることができる。水平梁部38aの上面(載置面)は、基準線L0と平行であり、水平面を構成している。柱部38bは装置基台9に取り付けられており水平梁部38aを支えている。   The work receiving portion 38 is for supporting the outer ring 6 from below, and has a horizontal beam portion 38a on which the outer ring 6 is placed and a column portion 38b that supports the horizontal beam portion 38a. The horizontal beam portion 38a has a Y shape in plan view, and the outer ring 6 can be placed on the upper surface thereof. The upper surface (mounting surface) of the horizontal beam portion 38a is parallel to the reference line L0 and forms a horizontal plane. The column part 38b is attached to the apparatus base 9, and supports the horizontal beam part 38a.

第一接触子11及び第二接触子12は、それぞれ装置基台9に固定されている支持部材14に取り付けられており、これら接触子11,12は同じ高さに位置しており、平面視において(図1参照)基準線L0を軸として線対称の配置にある。第一接触子11及び第二接触子12は玉形状を有しており、ワーク受け部38上に載る外輪6の軌道7と点接触する。   The first contactor 11 and the second contactor 12 are respectively attached to a support member 14 fixed to the apparatus base 9, and these contacts 11 and 12 are located at the same height, and are viewed in plan view. (See FIG. 1), the line is symmetrical about the reference line L0. The first contactor 11 and the second contactor 12 have a ball shape, and are in point contact with the track 7 of the outer ring 6 placed on the work receiving portion 38.

装置基台9上において、第一接触子11及び第二接触子12は固定状態にあるのに対して、第三接触子13は移動可能となっている。また、第三接触子13は、第一接触子11及び第二接触子12と同じ高さに位置しており(図2参照)、平面視において(図1参照)基準線L0上に位置している。つまり、第三接触子13は、基準線L0に沿って移動可能となっている。第三接触子13を移動可能とするために、可動部材20及びガイド部材31,32が設けられている。第三接触子13は玉形状を有しており、ワーク受け部38上に載る外輪6の軌道7と点接触する。   On the apparatus base 9, the first contactor 11 and the second contactor 12 are in a fixed state, while the third contactor 13 is movable. The third contact 13 is located at the same height as the first contact 11 and the second contact 12 (see FIG. 2), and is located on the reference line L0 in plan view (see FIG. 1). ing. That is, the third contactor 13 is movable along the reference line L0. In order to make the third contactor 13 movable, a movable member 20 and guide members 31 and 32 are provided. The third contact 13 has a ball shape and makes point contact with the track 7 of the outer ring 6 placed on the work receiving portion 38.

本実施形態のガイド部材31,32は、LMガイド(登録商標)であり、ガイド部材31,32は、平面視において、基準線L0を軸として線対称の配置にある。これらガイド部材31,32は平行に配置されており、基準線L0に平行な方向を誘導方向として可動部材20(後述する可動ベース20a)を移動可能に支持する構成を有している。可動部材20は、ガイド部材31,32に沿って移動可能である可動ベース20aと、この可動ベース20aに固定されている支持部材20bと、固定部材19を間に挟んで可動ベース20aと一体となっている可動ブロック20dとを有している。支持部材20bに第三接触子13が取り付けられている。
以上より、可動部材20は、第三接触子13を搭載しており基準線L0に平行な方向に移動可能であり、ガイド部材31,32は、この可動部材20を基準線L0に沿って誘導する構成が得られる。
The guide members 31 and 32 of the present embodiment are LM guides (registered trademark), and the guide members 31 and 32 are arranged symmetrically about the reference line L0 in plan view. These guide members 31 and 32 are arranged in parallel, and have a configuration that supports the movable member 20 (movable base 20a described later) in a movable manner with the direction parallel to the reference line L0 as a guide direction. The movable member 20 is integrally formed with the movable base 20a with the movable base 20a movable along the guide members 31 and 32, a support member 20b fixed to the movable base 20a, and the fixed member 19 therebetween. And a movable block 20d. The third contact 13 is attached to the support member 20b.
As described above, the movable member 20 has the third contact 13 mounted thereon and can move in a direction parallel to the reference line L0. The guide members 31 and 32 guide the movable member 20 along the reference line L0. The structure to be obtained is obtained.

可動ベース20aの可動ブロック20dには、基準線L0に平行な貫通孔20cが複数形成されており、前記ロッド19bを挿通させた状態としている。そして、可動ブロック20dと固定ブロック19aとの間に、ロッド19bに外嵌するようにして、コイルばねからなる弾性部材25が設けられている。本実施形態では、弾性部材25は圧縮コイルばねである。これにより、弾性部材25は、可動部材20に搭載されている第三接触子13を軌道5に押し付けることができる。   A plurality of through holes 20c parallel to the reference line L0 are formed in the movable block 20d of the movable base 20a, and the rod 19b is inserted. An elastic member 25 made of a coil spring is provided between the movable block 20d and the fixed block 19a so as to be fitted on the rod 19b. In this embodiment, the elastic member 25 is a compression coil spring. Thereby, the elastic member 25 can press the third contact 13 mounted on the movable member 20 against the track 5.

本実施形態では、一対(図1では上下一対)のロッド19bが、基準線L0を軸として線対称となる配置で設けられていることから、これらロッド19bに沿って設けられている弾性部材25についても、基準線L0を挟んで両側にそれぞれ設けられた構成となり、これにより、一対の弾性部材25が、可動部材20の可動ブロック20dの内の基準線L0を軸として線対称となる二つの押圧位置P1,P2を押すことができる。この構成によれば、可動部材20が基準線L0に平行な方向に押されやすくなり、可動部材20の傾きを可及的に抑えることが可能となる。なお、一対の弾性部材25の形状(長さ)及び弾性係数は同じものである。   In the present embodiment, the pair of upper and lower rods 19b (in FIG. 1, a pair of rods 19b) are provided in a line-symmetric arrangement with respect to the reference line L0, so that the elastic member 25 provided along these rods 19b. Are also provided on both sides of the reference line L0, whereby the pair of elastic members 25 are two symmetrical with respect to the reference line L0 in the movable block 20d of the movable member 20. The pressing positions P1, P2 can be pressed. According to this configuration, the movable member 20 is easily pushed in a direction parallel to the reference line L0, and the inclination of the movable member 20 can be suppressed as much as possible. The shape (length) and the elastic coefficient of the pair of elastic members 25 are the same.

また、この構成以外に、中央のロッド19bに弾性部材25が設けられていてもよい。両側のロッド19bに設けられている場合、及び、中央のロッド19bに設けられている場合のいずれにおいても、弾性部材25は、可動部材20を基準線L0に平行な方向に付勢して、第三接触子13を軌道7に押し付けることができる構成が得られる。   In addition to this configuration, the elastic member 25 may be provided on the central rod 19b. The elastic member 25 urges the movable member 20 in a direction parallel to the reference line L0 in both cases where it is provided on the rods 19b on both sides and in the case where it is provided on the central rod 19b. The structure which can press the 3rd contactor 13 against the track | orbit 7 is obtained.

可動ベース20aには、作業者が操作するレバー26が取り付けられている。レバー26を引くことで、弾性部材25の弾性力に抗して、可動部材20(第三接触子13)を第一接触子11及び第二接触子12に接近させる方向に移動させることが可能となる。そして、レバー26を引く力を解除すると、弾性部材25の弾性力(復元力)によって可動部材20(第三接触子13)は第一接触子11及び第二接触子12から離れる方向に移動し、第三接触子13が軌道7に接触し更に押圧することができる。   A lever 26 operated by an operator is attached to the movable base 20a. By pulling the lever 26, it is possible to move the movable member 20 (third contactor 13) in a direction to approach the first contactor 11 and the second contactor 12 against the elastic force of the elastic member 25. It becomes. When the force that pulls the lever 26 is released, the movable member 20 (third contactor 13) moves away from the first contactor 11 and the second contactor 12 by the elastic force (restoring force) of the elastic member 25. The third contact 13 can contact the track 7 and be further pressed.

本実施形態では、可動部材20の基準線L0に沿った方向の変位量を計測する変位計が二つ設けられている。第一変位計41及び第二変位計42は接触式のセンサであり、双方で同じものである。変位計41(42)は、本体部41a(42a)と、この本体部41a(42a)に対して基準線L0に平行な方向に進退移動する端子41b(42b)とを有しており、可動部材20に接触する端子41b(42b)の移動量を検出信号として出力する。なお、第一変位計41及び第二変位計42は非接触式のセンサであってもよい。第一変位計41及び第二変位計42は、それぞれが独立して計測に用いられ、計測値(計測信号)を、演算装置15に出力する。端子41b(42b)が可動部材20の可動ベース20aの平坦な面に点で接触した状態にあり、第一変位計41及び第二変位計42は可動部材20の変位量を計測する。   In the present embodiment, two displacement meters that measure the amount of displacement of the movable member 20 in the direction along the reference line L0 are provided. The first displacement meter 41 and the second displacement meter 42 are contact-type sensors, and are the same in both. The displacement meter 41 (42) includes a main body 41a (42a) and a terminal 41b (42b) that moves forward and backward in a direction parallel to the reference line L0 with respect to the main body 41a (42a). The amount of movement of the terminal 41b (42b) in contact with the member 20 is output as a detection signal. The first displacement meter 41 and the second displacement meter 42 may be non-contact sensors. The first displacement meter 41 and the second displacement meter 42 are independently used for measurement, and output a measurement value (measurement signal) to the arithmetic device 15. The terminal 41b (42b) is in a state in which the terminal 41b (42b) is in contact with the flat surface of the movable base 20a of the movable member 20, and the first displacement meter 41 and the second displacement meter 42 measure the displacement amount of the movable member 20.

第一変位計41及び第二変位計42は、平面視において、基準線L0を軸として線対称となる配置に設けられており、検出方向を基準線L0に平行な方向としている。これにより、第一変位計41及び第二変位計42は、可動部材20の内の基準線L0を軸として線対称となる二つの位置を計測位置P11,P12として、可動部材20の変位量をそれぞれ計測する。   The first displacement meter 41 and the second displacement meter 42 are provided in a line-symmetric arrangement with respect to the reference line L0 in plan view, and the detection direction is a direction parallel to the reference line L0. Thereby, the first displacement meter 41 and the second displacement meter 42 set the displacement amount of the movable member 20 with the two positions that are symmetric about the reference line L0 of the movable member 20 as the measurement positions P11 and P12. Measure each.

可動部材20の変位量は第三接触子13の変位量と等しくなり、設計上では、第一変位計41及び第二変位計42は、同じ値の計測値(変位量)を取得する。しかし、仮に、ガイド部材31,32に対する可動部材20の直進性が不安定となって、軌道7に対する第三接触子13の接触位置を中心として可動部材20が回転し、可動部材20が基準線L0に対して傾いた状態になると、第一変位計41及び第二変位計42はそれぞれ異なる計測値(変位量)を取得する。これら異なる計測値(変位量)をそれぞれ仮変位量と呼ぶことができる。   The displacement amount of the movable member 20 becomes equal to the displacement amount of the third contact 13, and in design, the first displacement meter 41 and the second displacement meter 42 obtain the same measured value (displacement amount). However, temporarily, the linearity of the movable member 20 with respect to the guide members 31 and 32 becomes unstable, the movable member 20 rotates around the contact position of the third contactor 13 with respect to the track 7, and the movable member 20 becomes the reference line. If it will be in the state inclined with respect to L0, the 1st displacement meter 41 and the 2nd displacement meter 42 will acquire a different measured value (displacement amount), respectively. These different measurement values (displacement amounts) can be called temporary displacement amounts.

演算装置15は、例えば各種演算を行うコンピュータ装置からなり、第一変位計41及び第二変位計42の計測値(仮変位量)の平均値を求める処理を行う。更に、本実施形態の演算装置15は、この平均値を用いて、軌道7の直径D1を求める処理も行う。これらの処理については、後の測定方法で説明する。   The computing device 15 is composed of, for example, a computer device that performs various computations, and performs processing for obtaining an average value of measured values (temporary displacement amounts) of the first displacement meter 41 and the second displacement meter 42. Furthermore, the arithmetic unit 15 of the present embodiment also performs processing for obtaining the diameter D1 of the track 7 using this average value. These processes will be described later in the measurement method.

本実施形態の測定装置10では、第一接触子11、第二接触子12及び第三接触子13は、基準線L0上の点Qを中心とする一つの仮想円上に配置された状態となることができ、この状態で、点Qを中心として周方向に均等配置されている。つまり、接触子11,12,13は120度ピッチで配置されている。そして、前記のとおり、平面視において、第一接触子11及び第二接触子12は、基準線L0を軸として線対称の配置にあり、また、第三接触子13は、基準線L0上に位置していることから、前記のとおり、第一接触子11と軌道7との接触点と、第二接触子12と軌道7との接触点とを結ぶ線分の垂直二等分線が、基準線L0と一致する。
なお、三つの接触子11,12,13は、周方向に均等配置されていなくてもよいが、第一接触子11及び第二接触子12は、基準線L0を軸として線対称の配置にあり、第三接触子13は、基準線L0上に位置している必要がある。そして、第三接触子13は、この基準線L0に沿って移動可能となっている。
In the measuring apparatus 10 of the present embodiment, the first contact 11, the second contact 12, and the third contact 13 are arranged on a single virtual circle centered on the point Q on the reference line L0. In this state, they are evenly arranged around the point Q in the circumferential direction. That is, the contacts 11, 12, and 13 are arranged at a pitch of 120 degrees. And as above-mentioned, in planar view, the 1st contactor 11 and the 2nd contactor 12 are in the line symmetrical arrangement about the reference line L0, and the 3rd contactor 13 is on the reference line L0. As described above, the vertical bisector connecting the contact point between the first contactor 11 and the track 7 and the contact point between the second contactor 12 and the track 7 is as described above. It matches the reference line L0.
Note that the three contacts 11, 12, and 13 do not have to be evenly arranged in the circumferential direction, but the first contact 11 and the second contact 12 are arranged symmetrically about the reference line L0. Yes, the third contactor 13 needs to be positioned on the reference line L0. And the 3rd contactor 13 can move along this reference line L0.

本実施形態の規制部材50は、図2に示すように、可動ブロック20dにピン51を介して支持されている。規制部材50は板状の部材であり、図3及び図4に示すように、ピン51の中心線回りに回転することができる。図3は、規制部材50が上方に回転して退避位置にある状態を示し、図4は、規制部材50が下方に回転して規制位置にある状態を示している。   As shown in FIG. 2, the regulating member 50 according to the present embodiment is supported by the movable block 20 d via a pin 51. The regulating member 50 is a plate-like member, and can rotate around the center line of the pin 51 as shown in FIGS. FIG. 3 shows a state where the regulating member 50 is rotated upward and is in the retracted position, and FIG. 4 shows a state where the regulating member 50 is rotated downward and is in the regulated position.

図1に示すように、固定ブロック19aにはストッパピン19cが取り付けられており、規制部材50が退避位置(図3参照)にある状態では、ストッパピン19cと可動ブロック20dとの間に大きな第一隙間X1(図2参照)が形成される。これに対して、規制部材50が規制位置(図4参照)にある状態では、この規制部材50は、ストッパピン19cと可動ブロック20dとの間に介在する(図2の二点鎖線を参照)。この状態では、ストッパピン19cの先端と規制部材50との間には、第一隙間X1よりも小さい微小な第二隙間X2が形成される(X2<X1)。   As shown in FIG. 1, a stopper pin 19c is attached to the fixed block 19a, and when the restricting member 50 is in the retracted position (see FIG. 3), a large second portion is provided between the stopper pin 19c and the movable block 20d. One gap X1 (see FIG. 2) is formed. On the other hand, when the regulating member 50 is in the regulated position (see FIG. 4), the regulating member 50 is interposed between the stopper pin 19c and the movable block 20d (see the two-dot chain line in FIG. 2). . In this state, a minute second gap X2 smaller than the first gap X1 is formed between the tip of the stopper pin 19c and the regulating member 50 (X2 <X1).

これら第一隙間X1及び第二隙間X2は、可動部材20(可動ブロック20d)の移動許容量となる。つまり、規制部材50が退避位置(図3参照)にある状態では、作業者がレバー26を引くことで、可動部材20の可動ブロック20dは、ストッパピン19cに当たるまで、前記第一隙間X1(図2参照)の値について移動可能となる。これに対して、規制部材50が規制位置(図4参照)にある状態では、作業者がレバー26を引くことで、可動部材20の可動ブロック20dは、規制部材50がストッパピン19cに当たるまで、前記第二隙間X2(図2参照)の値についてのみ移動可能となる。第一隙間X1が可動部材20の第一移動許容量となり、第二隙間X2が可動部材20の第二移動許容量となり、規制部材50の位置変化によって大小の二段階の移動許容量が設定される。   The first gap X1 and the second gap X2 become a movement allowable amount of the movable member 20 (movable block 20d). That is, in a state where the regulating member 50 is in the retracted position (see FIG. 3), the operator pulls the lever 26 so that the movable block 20d of the movable member 20 contacts the first gap X1 (see FIG. 3) until it hits the stopper pin 19c. 2), the value can be moved. On the other hand, in a state where the regulating member 50 is in the regulated position (see FIG. 4), the operator pulls the lever 26, so that the movable block 20d of the movable member 20 moves until the regulating member 50 hits the stopper pin 19c. Only the value of the second gap X2 (see FIG. 2) can be moved. The first gap X1 becomes the first movement allowable amount of the movable member 20, the second gap X2 becomes the second movement allowable amount of the movable member 20, and a large and small two-stage movement allowable amount is set by the position change of the regulating member 50. The

本実施形態では、測定の対象を外輪6としていることから、第一隙間(第一移動許容量)X1は、外輪6の軌道7における直径D1と外輪6の肩部6a(図1参照)における直径D2との差(差の絶対値)以上に設定される。例えば、第一隙間X1は、1ミリメートル以上であり、数ミリメートル程度又はそれ以上となる。これに対して、前記第二隙間X2は、例えば0.5ミリメートル以下であり、本実施形態では0.2ミリメートルとしている。第二隙間(第二移動許容量)X2は、第一隙間(第一移動許容量)X1の例えば1/10倍に設定される。   In the present embodiment, since the measurement target is the outer ring 6, the first gap (first movement allowance) X <b> 1 is in the diameter D <b> 1 on the track 7 of the outer ring 6 and the shoulder 6 a (see FIG. 1) of the outer ring 6. It is set to be greater than or equal to the difference from the diameter D2 (absolute value of the difference). For example, the first gap X1 is 1 millimeter or more, and is about several millimeters or more. On the other hand, the second gap X2 is 0.5 mm or less, for example, and is 0.2 mm in this embodiment. The second gap (second movement allowable amount) X2 is set to, for example, 1/10 times the first gap (first movement allowable amount) X1.

このように、規制部材50は、退避位置(図3)及び規制位置(図4)の間を位置変化可能として設けられており、可動部材20の移動許容量を変更させることができる。具体的に説明すると、規制部材50は、退避位置にある状態で、可動部材20を第一移動許容量(X1)について移動可能とさせ、規制位置にある状態で、可動部材20を第一移動許容量(X1)よりも小さい第二移動許容量(X2)について移動可能とさせる。これにより、可動部材20は、二段階の許容移動量(移動ストローク)を有することができる。   As described above, the restricting member 50 is provided such that the position of the restricting member 50 can be changed between the retracted position (FIG. 3) and the restricting position (FIG. 4), and the movement allowable amount of the movable member 20 can be changed. More specifically, the regulating member 50 allows the movable member 20 to move with respect to the first movement allowable amount (X1) in the state at the retracted position, and moves the movable member 20 to the first movement in the state at the regulated position. The second movement allowable amount (X2) smaller than the allowable amount (X1) is allowed to move. Thereby, the movable member 20 can have a two-stage allowable movement amount (movement stroke).

図2に示すように、規制部材50には把手54が取り付けられており、作業者はこの把手54を操作することにより規制部材50の状態を変化させることができる。また、可動ブロック20dには、図3,4に示すように、支持部材52,53が設けられており、退避位置にある規制部材50を一方の支持部材52が支持することができ、規制位置にある規制部材50を他方の支持部材53が支持することができる。   As shown in FIG. 2, a handle 54 is attached to the restriction member 50, and the operator can change the state of the restriction member 50 by operating the handle 54. Further, as shown in FIGS. 3 and 4, the movable block 20d is provided with support members 52 and 53, and one support member 52 can support the restricting member 50 in the retracted position. The other supporting member 53 can support the regulating member 50 in the above.

〔測定方法について〕
以上の構成を備えている測定装置10によって行われる測定方法について説明する。
この測定方法は、測定装置10の基準線L0上の一点Qを中心として外輪6を設置し、この外輪6の内周面に形成されている軌道7(測定対象面)に対して、固定状態にある第一接触子11及び第二接触子12と、移動可能となっている第三接触子13とを接触させることで、この軌道7における直径D1を測定する方法である。測定方法には、設置工程St1、準備工程St2、計測工程St3及び演算工程St4が含まれる(図5参照)。図6〜図8は、各工程を説明するための測定装置10の概略図である。
[Measurement method]
A measurement method performed by the measurement apparatus 10 having the above configuration will be described.
In this measuring method, the outer ring 6 is installed around a point Q on the reference line L0 of the measuring apparatus 10, and the outer ring 6 is fixed to the track 7 (measurement target surface) formed on the inner peripheral surface of the outer ring 6. This is a method of measuring the diameter D1 in the track 7 by bringing the first contact 11 and the second contact 12 in contact with the movable third contact 13. The measurement method includes an installation process St1, a preparation process St2, a measurement process St3, and a calculation process St4 (see FIG. 5). 6-8 is the schematic of the measuring apparatus 10 for demonstrating each process.

設置工程St1では、図6に示すように、第一接触子11、第二接触子12及び第三接触子13と外輪6とが干渉しない位置まで、第三接触子13を初期位置から移動させ、測定の対象となる外輪6を接触子11,12,13の外側の所定位置に設置する。前記初期位置は、(弾性部材25の付勢力によって)ストッパピン19c(図2参照)の先端が可動ブロック20dに接触した状態であり、図6において、第三接触子13が初期位置にある状態を、破線で示している。
第三接触子13を移動させるために、前記規制部材50を退避位置(図3参照)としており、可動部材20を基準線L0に平行な方向に前記初期位置から前記第一移動許容量(X1:図2参照)について移動させる。なお、作業者はレバー26(図1参照)を引くことにより弾性部材25の弾性力に抗して可動部材20に搭載の第三接触子13を移動させることができる。
In the installation step St1, as shown in FIG. 6, the third contact 13 is moved from the initial position to a position where the first contact 11, the second contact 12, the third contact 13, and the outer ring 6 do not interfere with each other. The outer ring 6 to be measured is installed at a predetermined position outside the contacts 11, 12, 13. The initial position is a state in which the tip of the stopper pin 19c (see FIG. 2) is in contact with the movable block 20d (by the urging force of the elastic member 25). In FIG. 6, the third contactor 13 is in the initial position. Is indicated by a broken line.
In order to move the third contact 13, the restricting member 50 is set to the retracted position (see FIG. 3), and the movable member 20 is moved from the initial position in the direction parallel to the reference line L0 to the first movement allowable amount (X1). : Refer to FIG. 2). The operator can move the third contactor 13 mounted on the movable member 20 against the elastic force of the elastic member 25 by pulling the lever 26 (see FIG. 1).

そして、前記設置工程St1の後、準備工程St2では、前記レバー26の引く力を解除することで、弾性力(復元力)によって弾性部材25が可動部材20を押し、可動部材20をガイド部材31,32により基準線L0に平行な方向に誘導して移動させ、第三接触子13を軌道7に押し付け、図7に示すように、第一接触子11、第二接触子12及び第三接触子13それぞれを軌道7に接触させた状態とする。前記レバー26の引く力を解除すると、可動部材20は、前記第一移動許容量(X1)と同寸法の大きな移動ストロークについて移動し、第三接触子13が軌道7に接触した状態となると共に、第一接触子11及び第二接触子12も軌道7に接触した状態となる。   Then, in the preparation step St2 after the installation step St1, the elastic member 25 pushes the movable member 20 by the elastic force (restoring force) by releasing the pulling force of the lever 26, and the movable member 20 is guided by the guide member 31. , 32 is guided and moved in a direction parallel to the reference line L0, the third contact 13 is pressed against the track 7, and as shown in FIG. 7, the first contact 11, the second contact 12, and the third contact Each child 13 is brought into contact with the track 7. When the pulling force of the lever 26 is released, the movable member 20 moves along a large movement stroke having the same dimension as the first movement allowance (X1), and the third contactor 13 comes into contact with the track 7. The first contactor 11 and the second contactor 12 are also in contact with the track 7.

この準備工程St2では、更に、第一接触子11及び第二接触子12を軌道7に接触させた状態で、再びレバー26を引くことで可動部材20を移動させて第三接触子13を軌道7から離れた状態とする(図8参照)。
このように可動部材20を移動させる前に、前記規制部材50を規制位置(図4)とする。これにより、可動部材20は、第一移動許容量(X1)よりも小さい第二移動許容量(X2:例えば0.2ミリメートル)について移動可能となる。
つまり、図8に示すように、第一接触子11及び第二接触子12が軌道7に接触したままの状態で、可動部材20を微小な第二移動許容量(X2)について移動させて、第三接触子13と軌道7との間に微小隙間δを形成する(X2=δ)。そして、この微小隙間δを形成してから、前記レバー26の引く力を解除することで、弾性部材25によって可動部材20を付勢して、(微小隙間δと同じである)小さい移動ストロークについて移動させ、第三接触子13を軌道7に押し付けて微小隙間δを解消する(図9参照)。図9に示す状態では、弾性部材25の力により、外輪6に測定荷重が付与されている。
In the preparation step St2, the movable member 20 is moved by pulling the lever 26 again while the first contactor 11 and the second contactor 12 are in contact with the track 7 to move the third contactor 13 to the track. 7 (see FIG. 8).
Before the movable member 20 is moved in this way, the restriction member 50 is set to the restriction position (FIG. 4). Thereby, the movable member 20 becomes movable about the second movement allowable amount (X2: 0.2 mm, for example) smaller than the first movement allowable amount (X1).
That is, as shown in FIG. 8, with the first contactor 11 and the second contactor 12 still in contact with the track 7, the movable member 20 is moved for the minute second movement allowance (X2), A minute gap δ is formed between the third contactor 13 and the track 7 (X2 = δ). Then, after forming the minute gap δ, by releasing the pulling force of the lever 26, the movable member 20 is urged by the elastic member 25, and a small movement stroke (which is the same as the minute gap δ) is achieved. The third contact 13 is pressed against the track 7 to eliminate the minute gap δ (see FIG. 9). In the state shown in FIG. 9, a measurement load is applied to the outer ring 6 by the force of the elastic member 25.

以上のような設置工程St1及び準備工程St2によれば、先ず、設置工程St1では、可動部材20の移動量を大きくして(図6参照)、外輪6を所定位置に設置することができる。そして、次の準備工程St2では、可動部材20の移動量を小さくして第三接触子13と軌道7との間に微小隙間δを形成してから(図8参照)、可動部材20を付勢して第三接触子13を軌道7に押し当てる(微小隙間δを解消させる:図9参照)。このように準備工程St2では、第三接触子13を非常に小さくかつ一定となる移動ストローク(本実施形態では0.2ミリメートル)で移動させて軌道7に当てるため、試行毎に、また、作業者が異なっても、軌道7に対する第三接触子13の当て方にばらつきが生じにくくなる。これにより、外輪6の軌道7に対する接触子11,12,13(特に第三接触子13)の接触状態を、試行毎に、安定させることが可能となる。   According to the installation process St1 and the preparation process St2 as described above, first, in the installation process St1, the moving amount of the movable member 20 can be increased (see FIG. 6), and the outer ring 6 can be installed at a predetermined position. Then, in the next preparation step St2, after the moving amount of the movable member 20 is reduced to form a minute gap δ between the third contactor 13 and the track 7 (see FIG. 8), the movable member 20 is attached. Then, the third contact 13 is pressed against the track 7 (the minute gap δ is eliminated: see FIG. 9). In this way, in the preparation step St2, the third contact 13 is moved with a very small and constant moving stroke (0.2 mm in the present embodiment) and applied to the track 7, so that the work is performed for each trial. Even if persons are different, variations in how the third contact 13 is applied to the track 7 are less likely to occur. This makes it possible to stabilize the contact state of the contacts 11, 12, 13 (particularly the third contact 13) with respect to the track 7 of the outer ring 6 for each trial.

なお、前記設置工程St1(図6,7参照)では、前記のとおり、可動部材20を、弾性部材25の付勢力によって、前記第一移動許容量(X1)と同寸法の大きな移動ストロークについて移動させて、第三接触子13を軌道7に接触させた状態としている。この場合、第三接触子13は、弾性部材25の付勢力に起因して大きな移動ストローク(X1)について移動して軌道7に衝突することから、第三接触子13と軌道7との接触状態が、試行毎で異なる可能性が高い。
しかし、本実施形態のように、前記設置工程St1の後の前記準備工程St2では、可動部材20(第三接触子13)を小さな移動ストローク(0.2ミリメートル)について移動させていることで、軌道7に対して第三接触子13が接触していく際の態様、及び接触した後の状態に、ばらつき(差)が生じにくく、接触状態を安定させることができる。
そして、このような準備工程St2の後、計測工程St3が行われる。
In the installation step St1 (see FIGS. 6 and 7), as described above, the movable member 20 is moved by a biasing force of the elastic member 25 for a large movement stroke having the same dimensions as the first movement allowable amount (X1). Thus, the third contact 13 is brought into contact with the track 7. In this case, since the third contact 13 moves about a large movement stroke (X1) due to the biasing force of the elastic member 25 and collides with the track 7, the contact state between the third contact 13 and the track 7 is reached. However, there is a high possibility that it differs from trial to trial.
However, as in this embodiment, in the preparation step St2 after the installation step St1, the movable member 20 (third contactor 13) is moved for a small movement stroke (0.2 mm). Variations (differences) are unlikely to occur in the manner in which the third contactor 13 comes into contact with the track 7 and the state after the contact, and the contact state can be stabilized.
And measurement process St3 is performed after such preparation process St2.

計測工程St3では、軌道7における直径D1(図1参照)を求めるために、可動部材20の変位量を計測する。具体的に説明すると、外輪6に前記測定荷重が付与された状態で、第一変位計41及び第二変位計42による可動部材20(可動ベース20a)の変位量が計測される。本実施形態では、第一変位計41及び第二変位計42により、可動部材20(可動ベース20a)の内の基準線L0を軸として線対称となる二つの位置を計測位置P11,P12として、この可動部材20(可動ベース20a)の変位量が計測される。第一変位計41及び第二変位計42の計測値(計測信号)は、演算装置15に出力され、演算装置15によって、これら計測値を用いて軌道7の直径D1が演算により求められる。   In the measurement step St3, the displacement amount of the movable member 20 is measured in order to obtain the diameter D1 (see FIG. 1) in the track 7. More specifically, the displacement amount of the movable member 20 (movable base 20a) by the first displacement meter 41 and the second displacement meter 42 is measured in a state where the measurement load is applied to the outer ring 6. In the present embodiment, the first displacement meter 41 and the second displacement meter 42 serve as two measurement positions P11 and P12 that are symmetrical with respect to the reference line L0 in the movable member 20 (movable base 20a). The displacement amount of the movable member 20 (movable base 20a) is measured. The measurement values (measurement signals) of the first displacement meter 41 and the second displacement meter 42 are output to the calculation device 15, and the calculation device 15 calculates the diameter D1 of the track 7 using these measurement values.

次の演算工程St4では、軌道7における直径D1を求めるために、二つの計測位置P11,P12における前記変位量の平均値が求められる。
また、演算装置15が有している記憶部には、計測が行われる毎に前記計測値及び前記平均値が記憶されると共に、ワークマスタの寸法が既に記憶されている。ワークマスタは、測定の対象とする前記外輪6と同じ形状を有する外輪であり、その軌道の寸法(直径)が既知のものである。そして、このワークマスタについても測定装置10を用いて可動ベース20aの変位量(二つの計測値の平均値)が求められており、その結果(平均値)が演算装置15の記憶部に記憶されている。
In the next calculation step St4, in order to obtain the diameter D1 in the track 7, the average value of the displacement amounts at the two measurement positions P11 and P12 is obtained.
Further, the measurement unit and the average value are stored every time measurement is performed, and the dimensions of the work master are already stored in the storage unit of the arithmetic device 15. The work master is an outer ring having the same shape as the outer ring 6 to be measured, and has a known track dimension (diameter). And also about this work master, the displacement amount (average value of two measured values) of the movable base 20a is obtained using the measuring device 10, and the result (average value) is stored in the storage unit of the arithmetic unit 15. ing.

ここで、前記のとおり、仮に、ガイド部材31,32に対する可動部材20の直進性が不安定となって、軌道7に対する第三接触子13の接触位置を中心として可動部材20が回転し、可動部材20が基準線L0に対して傾いた状態になると、第一変位計41及び第二変位計42はそれぞれ異なる計測値を、前記仮変位量として取得する。これら仮変位量は、基準線L0に沿った方向の実際の可動部材20の変位量ではなく、可動部材20が傾いた状態となることによる成分が含まれている。しかし、可動部材20の傾き角度(回転角度)は非常に小さいことから、第一変位計41及び第二変位計42からそれぞれ取得される仮変位量を平均することで前記傾きによる成分が補正され、この平均した値を、可動部材20の基準線L0に沿った方向の変位量とみなすことができる。   Here, as described above, it is assumed that the linearity of the movable member 20 with respect to the guide members 31 and 32 becomes unstable, and the movable member 20 rotates around the contact position of the third contactor 13 with respect to the track 7 to be movable. When the member 20 is tilted with respect to the reference line L0, the first displacement meter 41 and the second displacement meter 42 acquire different measurement values as the temporary displacement amounts. These temporary displacement amounts are not actual displacement amounts of the movable member 20 in the direction along the reference line L0, but include components due to the movable member 20 being inclined. However, since the tilt angle (rotation angle) of the movable member 20 is very small, the component due to the tilt is corrected by averaging the temporary displacement amounts acquired from the first displacement meter 41 and the second displacement meter 42, respectively. The average value can be regarded as the amount of displacement of the movable member 20 in the direction along the reference line L0.

このように、演算工程St4では、演算装置15は、第一変位計41及び第二変位計42の計測値の平均値を求める。そして、演算装置15は、前記平均値、及び、直径が既知であるワークマスタの軌道における当該直径を用いて、実際に測定の対象とした外輪6の軌道7における直径D1を演算によって求める。つまり、ワークマスタとの比較によって、外輪6の軌道7における直径D1が求められる。   Thus, in the calculation step St4, the calculation device 15 calculates the average value of the measurement values of the first displacement meter 41 and the second displacement meter 42. Then, the arithmetic unit 15 uses the average value and the diameter of the work master's track whose diameter is known to calculate the diameter D1 of the outer ring 6 on the track 7 that is actually measured. That is, the diameter D1 in the track 7 of the outer ring 6 is obtained by comparison with the work master.

なお、軌道7における直径D1を求める処理は、前記の方法以外であってもよく、例えば、第一変位計41及び第二変位計42の計測値の平均値を用いて、第一接触子11と第二接触子12と第三接触子13の配置に基づく幾何学的な計算により、直径D1を演算により求めてもよい。   The process for obtaining the diameter D1 in the track 7 may be other than the above-described method. For example, the average value of the measured values of the first displacement meter 41 and the second displacement meter 42 may be used. Further, the diameter D1 may be calculated by a geometric calculation based on the arrangement of the second contact 12 and the third contact 13.

以上のような構成を備えた測定装置10によって行われる測定方法では、設置工程St1において測定装置10に外輪6を設置するために、規制部材50(図3参照)を退避位置とする。これにより、図6に示すように、第三接触子13を搭載する可動部材20を基準線L0に平行な方向に第一移動許容量(X1)について移動させて、第一接触子11、第二接触子12及び第三接触子13と外輪6とが干渉しない状態とすることができ、外輪6の設置が可能となる。そして、弾性部材25によって第三接触子13を軌道7に押し付け、図7に示すように、第一接触子11、第二接触子12及び第三接触子13それぞれを軌道7に接触させた状態とすることができる。
次に、準備工程St2では、規制部材50(図4参照)を規制位置とすることにより、図8に示すように、可動部材20を第一移動許容量(X1)よりも小さい第二移動許容量(X2)について移動させて、第三接触子13と軌道7との間に微小隙間δを形成してから、弾性部材25によって可動部材20を付勢して第三接触子13を軌道7に押し付けて微小隙間δを解消する(図9参照)。
In the measuring method performed by the measuring apparatus 10 having the above configuration, the restricting member 50 (see FIG. 3) is set to the retracted position in order to install the outer ring 6 in the measuring apparatus 10 in the installation step St1. As a result, as shown in FIG. 6, the movable member 20 on which the third contactor 13 is mounted is moved in the direction parallel to the reference line L0 with respect to the first movement allowance (X1). The second contact 12 and the third contact 13 and the outer ring 6 can be prevented from interfering with each other, and the outer ring 6 can be installed. Then, the third contact 13 is pressed against the track 7 by the elastic member 25, and the first contact 11, the second contact 12, and the third contact 13 are brought into contact with the track 7 as shown in FIG. It can be.
Next, in the preparation step St2, by setting the restricting member 50 (see FIG. 4) as the restricting position, as shown in FIG. After moving about the capacity (X2) to form a minute gap δ between the third contact 13 and the track 7, the movable member 20 is biased by the elastic member 25 to move the third contact 13 to the track 7. To eliminate the minute gap δ (see FIG. 9).

このように、規制部材50を退避位置とすることで、可動部材20の移動量を大きくして、外輪6を所定位置に設置することができ、また、規制部材50を規制位置とすることで、可動部材20の移動量を小さくすることができるので、軌道7に対する第三接触子13の当て方にばらつきが生じにくくなり、外輪6の軌道7に対する第三接触子13の接触状態を安定させることが可能となる。
この結果、演算装置15が行う軌道7の直径D1の測定精度を高めることができ、また、測定の安定した繰返し性が得られる。そして、外輪6の直径D1の測定精度を向上させることができ、この結果、この外輪6を用いることにより、すきま(Raすきま)や接触角の安定した高いレベルの玉軸受を得ることが可能となる。
Thus, by setting the restricting member 50 to the retracted position, the amount of movement of the movable member 20 can be increased, and the outer ring 6 can be installed at a predetermined position, and by setting the restricting member 50 to the restricting position. Since the amount of movement of the movable member 20 can be reduced, variations in how the third contact 13 is applied to the track 7 are less likely to occur, and the contact state of the third contact 13 to the track 7 of the outer ring 6 is stabilized. It becomes possible.
As a result, the measurement accuracy of the diameter D1 of the track 7 performed by the arithmetic device 15 can be increased, and stable measurement repeatability can be obtained. And the measurement accuracy of the diameter D1 of the outer ring 6 can be improved. As a result, by using this outer ring 6, it is possible to obtain a high-level ball bearing with a stable clearance (Ra clearance) and contact angle. Become.

また、本実施形態の測定装置10では、規制部材50は、規制位置にある状態で(図4参照)、装置基台9に対して移動可能である可動部材20(可動ブロック20d)と、固定状態にある固定部材19(ストッパピン19c)との間に介在する。そして、規制部材50は、退避位置にある状態で(図3参照)、これら可動部材20と固定部材19との間から離脱する構成となっている。この構成によれば、規制部材50が退避位置にある状態で、可動部材20を第一移動許容量(X1)について移動可能とさせ、規制部材50が規制位置にある状態で、可動部材20を小さい第二移動許容量(X2)について移動可能とさせる構成が簡単に得られ、測定装置10の簡素化が可能となる。   Further, in the measuring apparatus 10 of the present embodiment, the regulating member 50 is fixed to the movable member 20 (movable block 20d) that is movable with respect to the apparatus base 9 in a state where the regulating member 50 is in the restricted position (see FIG. 4). It is interposed between the fixed member 19 (stopper pin 19c) in the state. The restricting member 50 is configured to be separated from between the movable member 20 and the fixed member 19 in a state of being in the retracted position (see FIG. 3). According to this configuration, the movable member 20 can be moved with respect to the first movement allowable amount (X1) while the restriction member 50 is in the retracted position, and the movable member 20 is moved while the restriction member 50 is in the restriction position. A configuration that allows the small second movement allowance (X2) to be moved is easily obtained, and the measurement apparatus 10 can be simplified.

前記実施形態では、測定の対象を外輪6としているが、内輪4であってもよい。この場合の測定装置を、図10及び図11に示す。この測定装置10では、内輪4の外周面に形成されている軌道5を測定対象面とし、この軌道5の直径D3が計測される。内輪4の場合、測定装置10では、三つの接触子11,12,13を内輪4の軌道5に対して径方向外側から接触させる構成となるが、その他の構成及び機能、並びに測定方法については、図1及び図2に示す形態と同様である。例えば、規制部材50は、退避位置及び規制位置の間を位置変化可能として設けられており、可動部材20の移動許容量を変更させる。つまり、規制部材50が、退避位置にある状態で、可動部材20を第一移動許容量(数ミリメートル)について移動可能とさせ、規制位置にある状態で、可動部材20を前記第一移動許容量よりも小さい第二移動許容量(例えば0.2ミリメートル)について移動可能とさせる。測定の対象が内輪4である場合、前記第一移動許容量を、内輪4の軌道5における直径D3と内輪4の肩部4aにおける直径D4との差(差の絶対値)以上とする。   In the above embodiment, the outer ring 6 is used as a measurement target, but the inner ring 4 may be used. The measurement apparatus in this case is shown in FIGS. In this measuring apparatus 10, the track 5 formed on the outer peripheral surface of the inner ring 4 is used as a measurement target surface, and the diameter D3 of the track 5 is measured. In the case of the inner ring 4, the measuring device 10 has a configuration in which the three contacts 11, 12, and 13 are brought into contact with the raceway 5 of the inner ring 4 from the outside in the radial direction. These are the same as those shown in FIGS. For example, the restricting member 50 is provided so as to be capable of changing the position between the retracted position and the restricting position, and changes the allowable movement amount of the movable member 20. That is, the movable member 20 can be moved with respect to the first movement allowance (several millimeters) while the restriction member 50 is in the retracted position, and the movable member 20 is moved to the first movement allowance with the restriction member 50 being in the restriction position. It is possible to move for a second movement allowable amount (for example, 0.2 millimeters) smaller than that. When the object of measurement is the inner ring 4, the first movement allowance is set to be equal to or larger than the difference (the absolute value of the difference) between the diameter D 3 of the track 5 of the inner ring 4 and the diameter D 4 of the shoulder 4 a of the inner ring 4.

以上のとおり開示した実施形態はすべての点で例示であって制限的なものではない。つまり、本発明の測定装置は、図示する形態に限らず本発明の範囲内において他の形態のものであってもよい。
例えば、本実施形態では、可動部材20の変位量を計測するために変位計を二つ用いる場合について説明したが、変位計は一つであってもよい。
また、測定対象を玉軸受の内輪4、外輪6とする場合について説明したが、これに限らず、他の転がり軸受の軌道輪や、その他の円筒ワークの直径(内径や外径)を測定するために、本発明の測定装置及び測定方法を適用することができる。
The embodiments disclosed above are illustrative in all respects and not restrictive. That is, the measuring apparatus of the present invention is not limited to the illustrated form, and may be of another form within the scope of the present invention.
For example, in the present embodiment, the case where two displacement meters are used to measure the displacement amount of the movable member 20 has been described, but one displacement meter may be used.
Moreover, although the case where the measurement object is the inner ring 4 and the outer ring 6 of the ball bearing has been described, the present invention is not limited to this, and the diameters (inner diameter and outer diameter) of the race rings of other rolling bearings and other cylindrical workpieces are measured. Therefore, the measuring apparatus and measuring method of the present invention can be applied.

4:内輪(円筒ワーク) 4a:肩部 5:軌道(測定対象面)
6:外輪(円筒ワーク) 6a:肩部 7:軌道(測定対象面)
9:装置基台 10:測定装置 11:第一接触子
12:第二接触子 13:第三接触子 19:固定部材
20:可動部材 25:弾性部材 41:第一変位計
42:第二変位計 50:規制部材 D1:軌道の直径
D2:肩部の直径 L0:基準線 Q:基準線上の一点
X1:第一隙間(第一移動許容量) X2:第二隙間(第二移動許容量)
4: Inner ring (cylindrical workpiece) 4a: Shoulder part 5: Track (surface to be measured)
6: outer ring (cylindrical workpiece) 6a: shoulder 7: track (surface to be measured)
9: Device base 10: Measuring device 11: First contact 12: Second contact 13: Third contact 19: Fixed member 20: Movable member 25: Elastic member 41: First displacement meter 42: Second displacement Total 50: Restriction member D1: Diameter of the track D2: Diameter of the shoulder L0: Reference line Q: One point on the reference line X1: First gap (first movement allowable amount) X2: Second gap (second movement allowable amount)

Claims (4)

基準線を軸として線対称の配置にある第一接触子及び第二接触子と、前記基準線上に位置する第三接触子とを有し、前記基準線上の一点を中心として設置する円筒ワークの外周面及び内周面の内のいずれか一方の測定対象面に、当該第一接触子、当該第二接触子及び当該第三接触子を接触させることで、当該測定対象面における直径の測定を行うための測定装置であって、
前記第三接触子を搭載し前記基準線に平行な方向に移動可能である可動部材と、
前記可動部材を前記基準線に平行な方向に付勢して前記第三接触子を前記測定対象面に押し付けるための弾性部材と、
前記可動部材の変位量を計測する変位計と、
退避位置及び規制位置の間を位置変化可能として設けられており前記可動部材の移動許容量を変更させるための規制部材と、
を備え、
前記規制部材は、前記退避位置にある状態で、前記可動部材を第一移動許容量について移動可能とさせ、前記規制位置にある状態で、前記可動部材を前記第一移動許容量よりも小さい第二移動許容量について移動可能とさせる、
測定装置。
A cylindrical contact that has a first contact and a second contact in a line-symmetric arrangement with respect to a reference line, and a third contact located on the reference line, and is installed around one point on the reference line The diameter of the measurement target surface is measured by bringing the first contact, the second contact, and the third contact into contact with one of the measurement target surfaces of the outer peripheral surface and the inner peripheral surface. A measuring device for performing,
A movable member mounted with the third contactor and movable in a direction parallel to the reference line;
An elastic member for urging the movable member in a direction parallel to the reference line and pressing the third contact against the surface to be measured;
A displacement meter for measuring a displacement amount of the movable member;
A restricting member which is provided as a position changeable between a retracted position and a restricting position, and for changing a movement allowable amount of the movable member;
With
The restricting member enables the movable member to move with respect to the first allowable movement amount in the state at the retracted position, and the movable member is smaller than the first allowable movement amount in the state at the restricting position. It is possible to move about the two movement allowances,
measuring device.
前記円筒ワークは、玉軸受の外輪又は内輪であり、
前記第一移動許容量は、前記外輪又は内輪の軌道における直径と前記外輪又は前記内輪の肩部における直径との差以上である、請求項1に記載の測定装置。
The cylindrical workpiece is an outer ring or an inner ring of a ball bearing,
2. The measuring device according to claim 1, wherein the first movement allowable amount is equal to or greater than a difference between a diameter of the outer ring or the inner ring on a track and a diameter of a shoulder portion of the outer ring or the inner ring.
装置基台と、当該装置基台に固定されている固定部材とを、更に備え、
前記規制部材は、前記規制位置にある状態で,前記装置基台に対して移動可能である前記可動部材と前記固定部材との間に介在し、前記退避位置にある状態で、前記可動部材と前記固定部材との間から離脱している、請求項1又は2に記載の測定装置。
An apparatus base and a fixing member fixed to the apparatus base;
The restricting member is interposed between the movable member that is movable with respect to the apparatus base in the state where the restricting position is located, and the fixed member, and in the state where the restricting member is located in the retracted position, The measuring device according to claim 1, wherein the measuring device is separated from between the fixing member.
基準線を軸として線対称の配置にある第一接触子及び第二接触子と、前記基準線上に位置する第三接触子とを、前記基準線上の一点を中心として設置する円筒ワークの外周面及び内周面の内のいずれか一方の測定対象面に接触させることで、当該測定対象面における直径を測定するための方法であって、
前記第一接触子、前記第二接触子及び前記第三接触子と前記円筒ワークとが干渉しない位置まで、当該第三接触子を搭載する可動部材を前記基準線に平行な方向に第一移動許容量について移動させ、当該円筒ワークを設置する設置工程と、
前記設置工程の後、前記第三接触子を前記測定対象面に押し付け、前記第一接触子、前記第二接触子及び前記第三接触子それぞれを前記測定対象面に接触させた状態とする準備工程と、
前記測定対象面における直径を求めるために、前記可動部材の変位量を計測する計測工程と、
を備え、
前記準備工程では、前記可動部材を前記第一移動許容量よりも小さい第二移動許容量について移動させて当該第三接触子と当該測定対象面との間に微小隙間を形成してから、当該可動部材を付勢して当該第三接触子を当該測定対象面に押し付けて当該微小隙間を解消し、その後、前記計測工程を行う、測定方法。
An outer peripheral surface of a cylindrical workpiece in which a first contact and a second contact in a line-symmetric arrangement with respect to a reference line and a third contact located on the reference line are set around one point on the reference line. And a method for measuring the diameter of the measurement target surface by contacting one of the measurement target surfaces of the inner peripheral surface,
The movable member carrying the third contact is moved in the direction parallel to the reference line to the position where the first contact, the second contact, the third contact and the cylindrical workpiece do not interfere with each other. Move about the allowable amount and install the cylindrical work,
After the installation step, the third contact is pressed against the surface to be measured, and the first contact, the second contact, and the third contact are in contact with the measurement surface. Process,
A measuring step of measuring a displacement amount of the movable member in order to obtain a diameter in the measurement target surface;
With
In the preparation step, the movable member is moved for a second movement allowable amount smaller than the first movement allowable amount to form a minute gap between the third contactor and the measurement target surface, and then the A measurement method in which the movable member is urged to press the third contact against the measurement target surface to eliminate the minute gap, and then the measurement step is performed.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107626602A (en) * 2017-09-27 2018-01-26 常熟理工学院 Bearing automatic measurement sorting equipment based on micro-displacement sensor
JP2019174263A (en) * 2018-03-28 2019-10-10 株式会社東京精密 Inner diameter measuring apparatus and method for measurement using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107626602A (en) * 2017-09-27 2018-01-26 常熟理工学院 Bearing automatic measurement sorting equipment based on micro-displacement sensor
JP2019174263A (en) * 2018-03-28 2019-10-10 株式会社東京精密 Inner diameter measuring apparatus and method for measurement using the same
JP7077098B2 (en) 2018-03-28 2022-05-30 株式会社東京精密 Inner diameter measuring device and measuring method using it

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