JP2017089444A - Liquid supply device and liquid supply method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve operability in liquid supply work by a liquid supply device.SOLUTION: A liquid supply device 10a comprises a first liquid flow passage 21 and a second liquid flow passage 22 communicating between a suction port 13 and a discharging port 14. The first liquid flow passage 21 is provided with a first pump 25. The second liquid flow passage 22 is provided with a second pump 26 operated to perform a suction work when the first pump 25 performs a discharging work and to perform a discharging work when the first pump 25 performs a suction work. A three-way valve 42a acting as a change-over valve mechanism 41 changes over to a first pump flow passage charging mode for charging liquid in the second liquid flow passage 21, a second pump flow passage charging mode for charging liquid in the second liquid flow passage 22 and a continuous discharging mode for communicating each of the first liquid flow passage 21 and the second liquid flow passage 22 with the suction port 13 and the discharging port 14.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a liquid supply technique using a liquid supply device for supplying a liquid to an object to be coated.

  In a technical field such as a semiconductor integrated circuit device or a liquid crystal panel, a liquid supply device is used to supply a liquid such as a photoresist solution to an object to be coated. This liquid supply device is provided between a suction flow path connected to a container containing a liquid and a discharge flow path connected to an applicator, and uses the liquid stored in the container as an application nozzle or the like. It supplies to a to-be-coated object through an applicator. The liquid supply device has a tube frame type or plunger type pump, and the liquid is supplied to the object to be coated by the expansion and contraction operation of the pump chamber.

  Patent Document 1 discloses a reciprocating pump constituted by two diaphragms. FIG. 4 of Patent Document 1 discloses a configuration in which a diaphragm included in each pump head portion constituting a reciprocating pump has a configuration in which when one diaphragm is in the backward movement process, the other diaphragm is in the forward movement process. Has been. That is, according to the reciprocating pump shown in FIG. 4, one diaphragm is driven to complement the other diaphragm, and the other diaphragm is driven to complement one diaphragm, so that the pulsation can be effectively improved. A pump can be obtained.

  A multiple plunger pump using two plungers is described in Patent Document 2. Plunger pumps have their inlets and outlets connected to each other, and the change in the amount of fluid discharged from each plunger pump is smoothed over time so that the total amount of fluid discharged by all plunger pumps is smoothed over time. The phase is shifted.

JP 2003-042069 A JP 2001-234850 A

  As described in Patent Document 1 and Patent Document 2, in a pump including two diaphragms and a plunger, that is, a liquid supply apparatus, a first liquid channel and a second liquid channel each provided with a pump are containers. And the applicator are arranged in parallel. In such a pump, before the pump is operated, by supplying compressed air to the container, the liquid is simultaneously filled in the first liquid channel and the second liquid channel. For this reason, only one liquid flow path may be filled with liquid, and the other liquid flow path may not be sufficiently filled with liquid, leaving air. This is because the liquid may flow easily to only one liquid flow path and difficult to flow to the other due to a difference in fluid resistance of the liquid flow path. Even if the filling operation is continued for a long time, the fact that the other liquid flow path is not filled with the liquid often cannot be solved.

  When the normal operation is performed in a state where the other liquid flow path is not filled with liquid and air remains, that is, in a state where there are residual bubbles, the following operation is performed. At the time of suction, the remaining bubbles are expanded by the negative pressure, so that the amount of liquid corresponding to the decrease in the volume of the pump chamber cannot be sucked, and the amount of sucked liquid decreases by the amount corresponding to the expansion of the remaining bubbles. At the time of discharge, the remaining bubbles are contracted by the positive pressure, so that the amount of liquid corresponding to the decrease in the volume of the pump chamber cannot be discharged, and the amount of discharged liquid is decreased by the amount of compression of the remaining bubbles. This reduction often occurs in one pump chamber where bubbles remain. Further, even if the amount of remaining bubbles is small, the liquid discharge amount pulsates.

  As described above, in the conventional liquid supply apparatus, it takes time to fill the liquid into the pump, that is, the preparation work before operating the liquid supply apparatus, and further, when bubbles remain, the liquid discharge amount pulsates. There is a problem of doing.

  An object of the present invention is to improve the operability of the liquid supply operation by the liquid supply device.

  The liquid supply apparatus of the present invention is a liquid supply apparatus that continuously discharges the liquid sucked from the suction port from the discharge port, and is provided in a first liquid flow path that connects the suction port and the discharge port. A first pump that performs a suction operation for sucking liquid from the suction port and a discharge operation for discharging liquid to the discharge port; and a second liquid flow path that connects the suction port and the discharge port; A second pump that performs a suction operation during a discharge operation of the first pump, and a discharge operation during a suction operation of the first pump; the first liquid channel and the second liquid channel; and the suction port and the discharge port, respectively. A continuous discharge mode that communicates with the first liquid flow path, a first pump flow path filling mode that communicates the first liquid flow path with the suction port and the discharge port, and blocks communication between the second liquid flow path, and the second liquid. Has a switching valve mechanism for switching the second pump channel filling mode communicates the road to the discharge port and said suction port to block the communication of the first liquid flow path, the.

  The liquid filling method of the present invention is provided in a first liquid flow path that connects the suction port and the discharge port, and performs a suction operation for sucking liquid from the suction port and a discharge operation for discharging liquid to the discharge port. A second liquid channel that communicates the first pump with the suction port and the discharge port, and performs a suction operation during a discharge operation of the first pump and a discharge operation during a suction operation of the first pump; A liquid filling method for filling a liquid supply apparatus comprising a pump, wherein the first liquid channel is communicated with the suction port and the discharge port, and the communication between the second liquid channel is blocked. A first pump flow path filling step for filling the first pump with a liquid; and the second liquid flow path is communicated with the suction port and the discharge port, and the communication of the first liquid flow path is cut off and the second liquid flow path is cut off. Fill pump with liquid A second pump channel filling step of the.

  The liquid supply method of the present invention is provided in a first liquid flow path that connects the suction port and the discharge port, and performs a suction operation for sucking liquid from the suction port and a discharge operation for discharging liquid to the discharge port. A second liquid channel that communicates the first pump with the suction port and the discharge port, and performs a suction operation during a discharge operation of the first pump and a discharge operation during a suction operation of the first pump; A liquid supply method for continuously discharging liquid sucked into the suction port from the discharge port by a liquid supply device including a pump, wherein the first liquid flow path is connected to the suction port and the discharge port. A first pump flow path filling step for communicating and blocking the communication of the second liquid flow path to fill the first pump with a liquid; and the second liquid flow path is connected to the suction port and the discharge port. The second pump flow path filling step for blocking the communication of the first liquid flow path and filling the second pump with the liquid, the first pump flow path filling step, and the second pump flow path filling step are executed. And a continuous discharge step of discharging the liquid continuously from the discharge port by alternately discharging and sucking the first pump and the second pump.

  Before the first pump and the second pump are alternately discharged and sucked to continuously discharge liquid continuously from the discharge port, the first pump flow path filling mode is performed on the first pump flow path. By filling the liquid and filling the second pump flow path with the liquid in the second pump flow path filling mode, air is discharged from the respective pumps. As described above, before the liquid is discharged from the discharge port in the continuous discharge mode, air can be easily discharged from the flow path in advance, so that the liquid supply can be performed by switching from the pump flow path filling mode to the continuous discharge mode. The initial setting work for starting up the apparatus can be easily performed, and the workability of the liquid supply work can be improved.

It is the schematic which shows the liquid supply apparatus which is one Embodiment. It is the schematic which shows the initial setting operation | work of the liquid supply apparatus shown by FIG. 1, (A) shows the state in which the liquid in a container is being sent toward the pump chamber of a 1st pump, (B) is The state in which the liquid in a container is sent toward the pump chamber of a 2nd pump is shown. It is the schematic which shows the liquid supply apparatus which is other embodiment. It is the schematic which shows the initial setting operation | work of the liquid supply apparatus shown by FIG. 3, (A) shows the state in which the liquid in a container is being sent toward the pump chamber of a 1st pump, (B) is The state in which the liquid in a container is sent out toward the pump chamber of a 2nd pump is shown. It is the schematic which shows the liquid supply apparatus which is other embodiment. It is the schematic which shows the liquid supply apparatus which is other embodiment. It is the schematic which shows the liquid supply apparatus which is a comparative example.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, members having common functions are denoted by the same reference numerals. The liquid supply apparatus 10a shown in FIGS. 1 and 2 supplies the liquid L stored in the container 11 toward the applicator 12. Examples of the liquid L supplied to the object to be coated include a photoresist liquid and a cleaning liquid used in the technical field such as a semiconductor integrated circuit device and a liquid crystal panel. The liquid supply device 10 a has a suction port 13 and a discharge port 14, and a suction flow path 15 attached to the container 11 is connected to the suction port 13. The discharge channel 16 is connected to the discharge port 14, and the applicator 12 is provided at the tip of the discharge channel 16.

  The liquid supply device 10 a communicates the suction port 13 and the discharge port 14 in parallel with the first liquid flow path 21 that communicates the suction port 13 and the discharge port 14. And a second liquid channel 22. The first liquid channel 21 and the second liquid channel 22 each extend in the up-down direction. The suction side part of the first liquid channel 21 and the suction side part of the second liquid channel 22 communicate with the suction port 13 via the branch part 23. On the other hand, the discharge side portion of the first liquid channel 21 and the discharge side portion of the second liquid channel 22 communicate with the discharge port 14 via the junction 24.

  The first pump 25 is provided in the first liquid channel 21, and the second pump 26 is provided in the second liquid channel 22. The first pump 25 has a pump chamber P1 that expands and contracts, and the second pump 26 has a pump chamber P2 that expands and contracts. As forms of the first pump 25 and the second pump 26, a tube diaphragm type, a bellows type, a diaphragm type, a piston type, and the like can be applied. In any type of pump, when the pump chambers P1 and P2 are expanded and sucked, that is, sucked, the liquid L in the container 11 is sucked into the pump chambers P1 and P2. On the other hand, when the pump chambers P1 and P2 are contracted and discharged, the liquid L in the pump chambers P1 and P2 is supplied toward the applicator 12.

  A first suction side check valve 31 is provided in the first liquid flow path 21 on the upstream side of the first pump 25. The first suction side check valve 31 allows the liquid to flow from the suction port 13 to the first pump 25 during the suction operation of the first pump 25, and sucks from the first pump 25 during the discharge operation of the first pump 25. Block liquid flow to port 13. A first discharge side check valve 32 is provided on the downstream side of the first pump 25 in the first liquid flow path 21. The first discharge side check valve 32 allows the liquid to flow from the first pump 25 to the discharge port 14 during the discharge operation of the first pump 25, and the first discharge port 14 from the discharge port 14 during the suction operation of the first pump 25. The liquid flow to the pump 25 is shut off.

  A second suction side check valve 33 is provided on the upstream side of the second pump 26 in the second liquid flow path 22. The second suction side check valve 33 allows the flow of liquid from the suction port 13 to the second pump 26 during the suction operation of the second pump 26 and sucks from the second pump 26 during the discharge operation of the second pump 26. Block liquid flow to port 13. A second discharge side check valve 34 is provided on the downstream side of the second pump 26 in the second liquid flow path 22. The second discharge side check valve 34 allows the flow of liquid from the second pump 26 to the discharge port 14 during the discharge operation of the second pump 26, and the second from the discharge port 14 during the suction operation of the second pump 26. The flow of liquid to the pump 26 is shut off.

  In the first suction side check valve 31, a valve body made of a hard ball or the like abuts against the lower valve seat surface by its own weight to close the first suction side check valve 31, and the downstream pump chamber P 1 When the pressure is lower than the pressure of the upstream suction port 13, the valve body is separated from the valve seat surface by the flow of fluid, and the first suction side check valve 31 is opened. In the first discharge-side check valve 32, a valve body made of a hard ball or the like abuts against the lower valve seat surface by its own weight to close the first discharge-side check valve 32, and the upstream pump chamber P1. When the pressure becomes higher than the pressure of the discharge port 14 on the downstream side, the valve body is separated from the valve seat surface by the flow of fluid, and the first discharge side check valve 32 is opened. The second suction side check valve 33 and the second discharge side check valve 34 operate in the same manner as the first suction side check valve 31 and the first discharge side check valve 32. As described above, each check valve automatically opens and closes the flow path by the suction operation and the discharge operation of the pump, so that driving means such as a solenoid for driving the check valve is unnecessary. Thereby, the structure of the liquid supply apparatus 10a is simple.

  Each check valve 31, 32, 33, 34 has a configuration in which the flow path is closed by contacting the lower valve seat surface by its own weight as described above. May be pressed against the valve seat.

  Of the first liquid channel 21, the first suction side check valve 31 to the first discharge side check valve 32 are named as a first pump channel. Similarly, the second liquid flow path 22 is designated as a second pump flow path from the second suction side check valve 33 to the second discharge side check valve 34. The first pump channel and the second pump channel are channels to which both positive pressure and negative pressure generated by the pump chambers P1 and P2 are applied. Air, that is, bubbles remaining in the first pump channel and the second pump channel are compressed and expanded by positive pressure and negative pressure when the liquid supply device operates.

  A switching valve mechanism 41 is provided in the liquid supply apparatus 10a. The switching valve mechanism 41 shown in FIGS. 1 and 2 is a three-way valve 42 a, and the three-way valve 42 a is a junction 24 between the discharge side portion of the first liquid channel 21 and the discharge side portion of the second liquid channel 22. Is provided. The three-way valve 42a has a valve casing 43 and a valve body 44 that is rotatably incorporated therein. An inflow side port 43a that forms the first liquid flow path 21 and an inflow side port 43b that forms the second liquid flow path 22 are provided in the valve casing 43 so as to face each other, and both the inflow side ports 43a and 43b are connected to each other. An outflow port 43 c is provided in the valve casing 43 at a right angle to the valve casing 43. The outflow side port 43 c constitutes the merging portion 24. The inlet / outlet channels 44a and 44b are provided in a straight line on the valve body 44, and the inlet / outlet channels 44c are provided in the valve body 44 at right angles to the inlet / outlet channels 44a and 44b.

  The three-way valve 42a has three modes: a continuous discharge mode shown in FIG. 1, a first pump flow path filling mode shown in FIG. 2 (A), and a second pump flow path filling mode shown in FIG. 2 (B). Operate in position. The continuous discharge mode is a mode in which the first liquid channel 21 and the second liquid channel 22 are communicated with the suction port 13 and the discharge port 14, respectively. At this time, as shown in FIG. 1, both the inflow ports 43a and 43b of the three-way valve 42a communicate with the outflow port 43c. When the liquid L in the container 11 is supplied from the applicator 12 to the application object, the three-way valve 42a is set to the continuous discharge mode. In the continuous discharge mode, the liquid is continuously discharged from the discharge port 14 by supplying the first pump 25 and the second pump 26 alternately, and the liquid is supplied from the applicator 12 to the application object. Is done.

  The first pump flow path filling mode is a mode in which liquid is filled into the first liquid flow path between the pump chamber P1 of the first pump 25 and the suction port 13 and the discharge port 14, and air is discharged. In the first pump flow path filling mode, the valve body 44 of the three-way valve 42a is rotationally driven to the position shown in FIG. 2A, the inflow side port 43a is communicated with the outflow side port 43c, and the inflow side port 43b. Is cut off. By setting the first pump flow path filling mode and pressurizing the container 11, at least the first suction side check valve 31 including the pump chamber P1 of the first pump 25 to the first discharge side check valve. Up to 32, that is, the first pump flow path is filled with liquid. Alternatively, the liquid is filled not only from the first pump flow path but also from the first liquid flow path 21 and the discharge flow path 16 to the applicator 12.

  The second pump flow path filling mode is a mode in which the liquid is filled in the pump chamber P2 of the second pump 26 and the second liquid flow path between the suction port 13 and the discharge port 14 and the air is discharged. In the second pump flow path filling mode, the valve body 44 of the three-way valve 42a is rotationally driven to the position shown in FIG. 2B, the inflow side port 43b is communicated with the outflow side port 43c, and the inflow side port 43a. Is cut off. By setting the second pump flow path filling mode and pressurizing the container 11, at least the second suction side check valve 33 including the pump chamber P2 of the second pump 26 to the second discharge side check valve. 34, that is, the second pump flow path is filled with the liquid. Alternatively, the liquid is filled not only from the second pump flow path but also from the second liquid flow path 22 and the discharge flow path 16 to the applicator 12.

  The first pump flow path filling mode and the second pump flow path filling mode are performed when the liquid supply apparatus 10a is started up, that is, when it is started up. In this way, by separately executing the first pump flow path filling mode and the second pump flow path filling mode, the air remaining in the flow path from the suction flow path 15 to the applicator 12 is externally exposed. Discharged. Accordingly, when supplying the liquid to the object to be coated in the continuous discharge mode, no bubbles remain in the flow path, so that no pulsation occurs in the flow rate of the discharged liquid.

  In the first pump channel filling mode and the second pump channel filling mode, the container 11 is pressurized with compressed air to fill the first liquid channel and the second liquid channel. On the other hand, the container 11 is opened to the atmosphere, the discharge port 14 or the discharge flow path 16 or the applicator 12 side is evacuated, the liquid is sucked, and the first liquid flow path and the second liquid flow path are filled with the liquid. May be. To vacuum the discharge port 14 side, a method of sucking air with a syringe is simple.

  FIG. 7 is a schematic view showing a liquid supply apparatus 10 as a comparative example. 7, members that are the same as those in FIG. 1 are given the same reference numerals. In the liquid supply apparatus 10, the discharge side end portions of the first liquid channel 21 and the second liquid channel 22 are directly connected to the discharge port 14. Therefore, when the liquid supply apparatus 10 is operated, the first liquid channel 21 and the second liquid channel 22 are simultaneously filled with liquid by supplying compressed air to the container 11. For this reason, even if the filling operation is continued for a long time, only one liquid flow path may be filled with liquid, and the other liquid flow path may not be sufficiently filled with air, and air may remain. This is because the liquid may flow easily to only one liquid flow path and difficult to flow to the other due to a difference in fluid resistance of the liquid flow path. In contrast, in the present invention, since the liquid is separately filled in the first liquid channel 21 and the second liquid channel 22, the liquid is not affected by such a difference. Filled. Therefore, air does not remain in the liquid flow path, and the filling operation is reliably completed in a short time. Thereby, the time for the preparation work before operating the liquid supply apparatus is shortened, and the workability of starting up the apparatus can be improved.

  In order to continuously supply the liquid L to the object to be coated by the liquid supply apparatus 10a, a liquid filling method for filling the flow path in the liquid supply apparatus 10a with a liquid is performed when the liquid supply apparatus 10a is started up. The liquid filling method includes a first pump flow path filling step shown in FIG. 2 (A) and a second pump flow path filling step shown in FIG. 2 (B). In the first liquid flow path filling step, the three-way valve 42a is operated to the first pump flow path filling mode position to pressurize the container 11, and liquid is introduced into the first liquid flow path 21 including the first pump chamber P1. Filling and discharging the air in the flow path from the applicator 12 to the outside. In the first liquid channel filling step, the container 11 is pressurized, and the liquid L in the container 11 is sent out into the pump chamber P1. In order to discharge the air in the flow path to the outside, the air may be discharged through the applicator 12, but may be discharged to the outside from the middle of the discharge port 14 or the discharge flow path 16.

  In the first pump channel filling step and the second pump channel filling step, the container 11 is pressurized with compressed air, and the pressurized liquid is filled into the first liquid channel and the second liquid channel. On the other hand, the container 11 is opened to the atmosphere, the discharge port 14 or the discharge flow path 16 or the applicator 12 side is sucked with a negative pressure, and the liquid supplied from the suction port causes the first liquid flow path and the second The liquid channel may be filled with a liquid.

  In the second pump flow path filling step, the three-way valve 42a is operated to the second pump flow path filling mode position to pressurize the container 11, and liquid is supplied into the second liquid flow path 22 including the second pump chamber P2. Filling and discharging the air in the flow path from the applicator 12 to the outside. In the second liquid channel filling step, the container 11 is pressurized, and the liquid L in the container 11 is sent out into the pump chamber P2.

  In order to discharge bubbles from the flow path of the liquid supply apparatus 10a, either the first pump filling step or the second pump filling step may be performed first, and both pump filling steps are alternately performed a plurality of times. May be.

  When the pump filling step is executed, the preparation for supplying the liquid L to the object to be coated by the liquid supply apparatus 10a is completed. After the pump filling step is executed, the three-way valve 42a is switched to the continuous discharge mode shown in FIG. 1 and the continuous discharge step is executed in order to supply the liquid to the object to be coated.

  In the continuous discharge step, when the first pump 25 and the second pump 26 alternately perform the discharge operation and the suction operation, the liquid L is continuously discharged from the discharge port 14 and the discharge flow path 16 connected to the discharge port 14 is discharged. The liquid is supplied from the applicator 12 to the object to be applied. When the supply of liquid to one coated object is stopped, the discharge operation and the suction operation of both pumps 25 and 26 are stopped. When the next object to be coated is disposed to face the applicator 12, the liquid is supplied to the object to be coated under the continuous discharge mode. When the remaining amount of liquid in the container 11 decreases, the liquid is replenished in the container 11.

  As described above, when the above-described pump filling method is executed before the liquid supply method for the coating object is executed, bubbles in the flow path in the liquid supply apparatus 10a are exhausted. The liquid can be supplied with accuracy, and the initial setting operation for starting up the liquid supply apparatus 10a can be easily performed.

  FIG. 3 is a schematic view showing a liquid supply apparatus 10b according to another embodiment. FIG. 4A is a schematic view of FIG. 3 showing a state in which the liquid in the container is being delivered toward the pump chamber P1 of the first pump, and FIG. 4B is toward the pump chamber P2 of the second pump. It is the schematic of FIG. 3 which shows the state which is sending out the liquid in a container.

  In the liquid supply apparatus 10 b shown in FIGS. 3 and 4, a three-way valve 42 b is provided as a switching valve mechanism 41 at the branch portion 23. The three-way valve 42b has the same structure as the three-way valve 42a shown in FIGS. 1 and 2, and includes a continuous discharge mode shown in FIG. 3 and a first pump filling mode shown in FIG. 4 (A). It operates in 3 positions with the second pump filling mode shown in FIG. 4 (B).

  Therefore, when the container 11 is pressurized with the three-way valve 42b set to the first pump flow path filling mode, the first liquid flow path 21 is filled with liquid and air is discharged. Similarly, when the container 11 is pressurized with the three-way valve 42b set to the second pump flow path filling mode, the liquid is filled in the second liquid flow path 22 and air is discharged. . Thus, the liquid filling method of the liquid supply apparatus 10b is executed by performing the first pump flow path filling step and the second pump flow path filling step. As a result, air is removed from the flow path of the liquid supply apparatus 10b, and the operation can be easily switched to supplying liquid to the object to be coated, thereby improving the operability of the liquid supply apparatus 10b.

  FIG. 5 is a schematic view showing a liquid supply apparatus 10c which is still another embodiment. In the liquid supply apparatus 10c shown in FIG. 5, a switching valve mechanism 41 is constituted by the first on-off valve 51a and the second on-off valve 52a. The first on-off valve 51 a is provided on the discharge side portion of the first liquid passage 21, and the second on-off valve 52 a is provided on the discharge side portion of the second liquid passage 22.

  The first on-off valve 51a includes a valve casing 53 and a valve body 54 that is rotatably incorporated therein. An inflow side port 53 a and an outflow side port 53 b are provided in the valve casing 53, and a communication passage 54 a that communicates the inflow side port 53 a and the outflow side port 53 b is provided in the valve body 54. By rotating the valve body 54, the first on-off valve 51a is set to a position where the first liquid channel 21 communicates with the discharge port 14, that is, a first pump channel filling mode position, and a position where communication is blocked. . The second on-off valve 52a has the same structure as that of the first on-off valve 51a, and a position where the second liquid flow path 22 communicates with the discharge port 14, that is, a second pump flow path filling mode position, and a position where communication is blocked. Operates on.

  Therefore, when the container 11 is pressurized with the first on-off valve 51a set to the first pump flow path filling mode and the second on-off valve 52a set to the shut-off position, the inside of the first liquid flow path 21 Is filled with liquid and air is discharged. Similarly, when the container 11 is pressurized under the condition that the second on-off valve 52a is set to the second pump flow path filling mode and the first on-off valve 51a is set to the shut-off position, the second liquid flow path 22 The inside is filled with liquid and air is discharged. Thus, the liquid filling method of the liquid supply apparatus 10b is executed by performing the first pump flow path filling step and the second pump flow path filling step.

  FIG. 6 is a schematic view showing a liquid supply apparatus 10d which is still another embodiment. In the liquid supply device 10d shown in FIG. 6, the switching valve mechanism 41 is configured by the first on-off valve 51b and the second on-off valve 52b. The first on-off valve 51 b is provided on the suction side of the first liquid channel 21, and the second on-off valve 52 b is provided on the suction side of the second liquid channel 22.

  Similarly to the first on-off valve 51a shown in FIG. 5, the first on-off valve 51b blocks communication with the position where the first liquid passage 21 is communicated with the suction port 13, that is, the first pump passage filling mode position. Operates to the position to be. Similarly to the second on-off valve 52a shown in FIG. 5, the second on-off valve 52b blocks communication with the position where the second liquid passage 22 communicates with the suction port 13, that is, the second pump passage filling mode position. Operates to the position to be.

  Therefore, when the container 11 is pressurized with the first on-off valve 51b set to the first pump flow path filling mode, the liquid is filled in the first liquid flow path 21 and air is discharged. Similarly, when the container 11 is pressurized with the second on-off valve 52b set to the second pump flow path filling mode, the second liquid flow path 22 is filled with liquid and air is discharged. . Thus, the liquid filling method of the liquid supply apparatus 10b is executed by performing the first pump flow path filling step and the second pump flow path filling step.

  Also in the liquid supply apparatuses 10c and 10d shown in FIGS. 5 and 6, the liquid supply apparatuses 10c and 10d are filled with the liquid, so that the air is reliably removed from the flow path. Thereby, it can switch to the liquid supply operation | work with respect to a to-be-coated object easily, and the operativity of the liquid supply apparatuses 10c and 10d improves. Further, since there are no air and bubbles in the flow path, discharge without pulsation is performed.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. For example, in the illustrated liquid supply apparatuses 10 a to 10 d, two liquid flow paths, a first liquid flow path 21 and a second liquid flow path 22, are provided between the suction port 13 and the discharge port 14. However, more liquid flow paths may be provided.

10a to 10d Liquid supply device 11 Container 12 Applicator 13 Suction port 14 Discharge port 15 Suction flow path 16 Discharge flow path 21 First liquid flow path 22 Second liquid flow path 23 Branch part 24 Merge part 25 First pump 26 Second Pump 31 First suction side check valve 32 First discharge side check valve 33 Second suction side check valve 34 Second discharge side check valve 41 Switching valve mechanisms 42a, 42b Three-way valves 51a, 51b First on-off valve 52a , 52b Second on-off valve P1 First pump chamber P2 Second pump chamber

Claims (10)

A liquid supply device that continuously discharges liquid sucked from a suction port from a discharge port,
A first pump that is provided in a first liquid flow path that communicates the suction port and the discharge port, and that performs a suction operation for sucking liquid from the suction port and a discharge operation for discharging liquid to the discharge port;
A second pump that is provided in a second liquid flow path that communicates the suction port and the discharge port, performs a suction operation during a discharge operation of the first pump, and discharges during a suction operation of the first pump;
A continuous discharge mode in which the first liquid channel and the second liquid channel are communicated with the suction port and the discharge port, respectively, and the second liquid channel is in communication with the suction port and the discharge port. A first pump channel filling mode that blocks communication of the liquid channel, and a second pump channel that blocks communication of the first liquid channel by connecting the second liquid channel to the suction port and the discharge port. A switching valve mechanism for switching to a filling mode;
A liquid supply apparatus having The liquid supply apparatus according to claim 1, wherein the switching valve mechanism includes:
The continuous discharge mode, the first pump flow path filling mode, and the second pump flow path are provided at a junction between the discharge side portion of the first liquid flow path and the discharge side portion of the second liquid flow path. A liquid supply device that is a three-way valve that operates in a filling mode. The liquid supply apparatus according to claim 1, wherein the switching valve mechanism includes:
The continuous discharge mode, the first pump flow channel filling mode, and the second pump flow channel are provided at a branch portion between the suction side portion of the first liquid flow channel and the suction side portion of the second liquid flow channel. A liquid supply device that is a three-way valve that operates in a filling mode. The liquid supply apparatus according to claim 1, wherein the switching valve mechanism includes:
A first on-off valve provided at a discharge side portion of the first liquid channel and operating at a position where the first liquid channel communicates with the discharge port and a position where communication is blocked;
A second on-off valve provided at a discharge side portion of the second liquid flow path and operating at a position where the second liquid flow path communicates with the discharge port and a position where communication is cut off;
A liquid supply device. The liquid supply apparatus according to claim 1, wherein the switching valve mechanism includes:
A first on-off valve provided on a suction side portion of the first liquid channel and operating to a position where the first liquid channel communicates with the suction port and a position where communication is blocked;
A second on-off valve provided at a suction side portion of the second liquid flow path and operating to a position where the second liquid flow path communicates with the suction port and a position where communication is blocked;
A liquid supply device. In the liquid supply apparatus of any one of Claims 1-5,
Provided in the first liquid flow path, allowing a liquid flow from the suction port to the first pump during a suction operation of the first pump, and sucking from the first pump during a discharge operation of the first pump; A first suction-side check valve that blocks the flow of liquid to the port;
Provided in the first liquid flow path, allowing a liquid flow from the first pump to the discharge port during a discharge operation of the first pump, and from the discharge port during a suction operation of the first pump; A first discharge side check valve that shuts off a flow of liquid to the pump;
Provided in the second liquid flow path, allowing liquid flow from the suction port to the second pump during the suction operation of the second pump, and sucking from the second pump during the discharge operation of the second pump; A second suction side check valve for blocking liquid flow to the port;
Provided in the second liquid flow path, allowing a liquid flow from the second pump to the discharge port during a discharge operation of the second pump, and from the discharge port during the suction operation of the second pump; A second discharge side check valve that shuts off the flow of liquid to the pump;
A liquid supply device. A first pump which is provided in a first liquid flow path communicating with the suction port and the discharge port, and which performs a suction operation for sucking liquid from the suction port and a discharge operation for discharging liquid to the discharge port; and the suction port Supply device including a second pump provided in a second liquid flow path communicating with the discharge port and performing a suction operation during the discharge operation of the first pump and performing a discharge operation during the suction operation of the first pump And a liquid filling method for filling the liquid,
A first pump flow path filling step in which the first liquid flow path is communicated with the suction port and the discharge port, the communication with the second liquid flow path is blocked, and the first pump is filled with liquid;
A second pump flow path filling step in which the second liquid flow path is communicated with the suction port and the discharge port, the communication with the first liquid flow path is blocked and the second pump is filled with liquid;
A liquid filling method comprising: A first pump which is provided in a first liquid flow path communicating with the suction port and the discharge port, and which performs a suction operation for sucking liquid from the suction port and a discharge operation for discharging liquid to the discharge port; and the suction port Supply device including a second pump provided in a second liquid flow path communicating with the discharge port and performing a suction operation during the discharge operation of the first pump and performing a discharge operation during the suction operation of the first pump The liquid supply method for continuously discharging the liquid sucked into the suction port from the discharge port,
A first pump flow path filling step in which the first liquid flow path is communicated with the suction port and the discharge port, the communication with the second liquid flow path is blocked, and the first pump is filled with liquid;
A second pump flow path filling step in which the second liquid flow path is communicated with the suction port and the discharge port, the communication with the first liquid flow path is blocked and the second pump is filled with liquid;
After the first pump flow path filling step and the second pump flow path filling step are executed, the first pump and the second pump are alternately discharged and sucked to continuously from the discharge port. A continuous discharge step for discharging liquid into
A liquid supply method comprising: The liquid supply method according to claim 8.
Filling the first pump and the second pump with pressurized liquid supplied from the suction port in the first pump flow path filling step and the second pump flow path filling step;
Liquid supply method. The liquid supply method according to claim 8.
In the first pump flow path filling step and the second pump flow path filling step, liquid is supplied to the first pump and the second pump by the liquid supplied from the suction port with the discharge port side set to a negative pressure. Filling,
Liquid supply method.

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