JP2017087186A - Coating device, manufacturing apparatus and measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique capable of measuring a variation of a distance (gap) from an ejection port to an absorption surface without injuring the adsorption surface of a backup roller, in a coating device for coating a surface of a substrate of a long-size band shape with material.SOLUTION: A coating device includes: a backup roller 20 which is rotated while retaining a substrate; a nozzle 31 which ejects material toward the substrate retained by the backup roller 20; and a measuring part 37 which measures a variation of a gap G. A cylindrical adsorption surface 21 for adsorbing the substrate and a cylindrical surface 81 to be measured which is rotated together with the adsorption surface 21 are provided on a circumference of the backup roller 20. A plurality of adsorption holes are provided only on the adsorption surface 21, of the adsorption surface 21 and the surface 81 to be measured. The measuring part 37 performs measurement of the gap G by causing a probe 374 to contact with the surface 81 to be measured. Therefore, the variation of the gap G can be measured without injuring the adsorption surface 21 of the backup roller 20.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a coating apparatus that applies a material to the surface of a long belt-shaped substrate, a manufacturing apparatus for a membrane / catalyst layer assembly including the coating apparatus, and a distance from an ejection port to an adsorption surface in the coating apparatus. The present invention relates to a measuring method for measuring the amount of change in the temperature.

In recent years, fuel cells have attracted attention as drive power sources for automobiles and mobile phones. A fuel cell is a power generation system that generates electric power by an electrochemical reaction between hydrogen (H ₂ ) contained in fuel and oxygen in air (O ₂ ). The fuel cell has a feature that the power generation efficiency is high and the load on the environment is small compared to other cells.

  There are several types of fuel cells depending on the electrolyte used. One of them is a polymer electrolyte fuel cell (PEFC) using an ion exchange membrane (electrolyte membrane) as an electrolyte. Since the polymer electrolyte fuel cell can operate at room temperature and can be reduced in size and weight, it is expected to be applied to automobiles and portable devices.

  A polymer electrolyte fuel cell generally has a structure in which a plurality of cells are stacked. One cell is configured by sandwiching both sides of a membrane-electrode assembly (MEA) with a pair of separators. The membrane / electrode assembly is a membrane-catalyst-coated membrane (CCM) with a catalyst layer formed on both sides of an electrolyte thin film (polymer electrolyte membrane), and a gas diffusion layer placed on both sides. It is. A pair of electrode layers is composed of a catalyst layer and a gas diffusion layer disposed on both sides of the polymer electrolyte membrane. One of the pair of electrode layers is an anode electrode, and the other is a cathode electrode. When a fuel gas containing hydrogen contacts the anode electrode and air contacts the cathode electrode, electric power is generated by an electrochemical reaction.

  The membrane / catalyst layer assembly is typically coated with a catalyst ink (electrode paste) in which catalyst particles containing platinum (Pt) are dispersed in a solvent such as alcohol on the surface of the electrolyte membrane. It is created by drying the catalyst ink. A conventional technique for manufacturing a membrane / catalyst layer assembly is described in Patent Document 1, for example.

JP 2013-161557 A

  In an apparatus for manufacturing a membrane / catalyst layer assembly, catalyst ink is discharged onto the surface of an electrolyte membrane by discharging the catalyst ink from a nozzle while holding the electrolyte membrane on the outer peripheral surface (adsorption surface) of a roller having a plurality of adsorption holes. Apply. At this time, when the distance (gap) from the nozzle discharge port to the suction surface changes due to expansion or contraction of the roller due to temperature change, external vibration, or the like, the application state of the catalyst ink also changes. For this reason, in order to uniformly apply the catalyst ink to the surface of the electrolyte membrane, it is preferable to always measure the gap and feedback control the position of the nozzle so that the gap is constant.

  However, the suction surface of the roller is curved and has a number of suction holes. For this reason, in a reflection type sensor such as a laser displacement meter, it is difficult to accurately reflect the laser light applied to the suction surface, and measurement errors are likely to occur. On the other hand, if an attempt is made to measure a change in the gap by bringing a probe into contact with the suction surface, the suction surface may be damaged due to sliding between the suction surface and the probe. If the adsorption surface is damaged, the holding power of the electrolyte membrane may be reduced, or an error may occur in the gap measurement result.

  The present invention has been made in view of such circumstances, and in a coating apparatus that applies a material to the surface of a long belt-like base material, from the discharge port to the suction surface without damaging the suction surface of the backup roller. It is an object to provide a technique capable of measuring the amount of change in the distance.

  In order to solve the above problems, a first invention of the present application is a coating apparatus that applies a material to the surface of a long belt-like base material, and the base material is directly applied to a cylindrical suction surface or via another sheet. A backup roller to be held, a rotation drive unit that rotates the backup roller about its axis, a nozzle having a discharge port that discharges material toward the base material held by the backup roller, and the discharge port; An advancing and retreating mechanism for advancing and retreating in a first direction parallel to the direction of material discharge, a measuring unit for measuring a change in distance in the first direction from the discharge port to the suction surface, and a measurement result of the measuring unit A control unit that controls the advance / retreat mechanism and a cylindrical measurement surface that rotates together with the adsorption surface, and among the adsorption surface and the measurement surface, a plurality of adsorptions are provided only on the adsorption surface. Hole is provided, front Measuring unit has a measuring element that contacts the surface to be measured.

  2nd invention of this application is a coating device of 1st invention, Comprising: It further has the protective film wound around a part of the said adsorption | suction surface, and the surface of the said protective film is the said to-be-measured surface.

  3rd invention of this application is a coating device of 2nd invention, Comprising: The thickness of the said protective film and the thickness of a base material are substantially the same.

  4th invention of this application is a coating device of any one invention from 1st invention to 3rd invention, Comprising: The said adsorption | suction surface has a holding | maintenance area | region which hold | maintains a base material, The said to-be-measured surface is the said In the second direction parallel to the axial center, it is provided at a position different from the holding region.

  5th invention of this application is a coating device of 4th invention, Comprising: A pair of said to-be-measured surface is provided in the both sides of the said 2nd direction of the said holding | maintenance area | region, The said measurement part is a pair of said to-be-measured surface A pair of measuring elements in contact with each other.

  6th invention of this application is a coating device of any one invention from 1st invention to 5th invention, Comprising: The said measurement part has a measurement part main body relatively stationary with respect to the said nozzle, The measuring element advances and retreats with respect to the measuring unit main body.

  7th invention of this application is a coating device of 6th invention, Comprising: The said measuring element advances / retreats in the said 1st direction with respect to the said measurement-part main body.

  The eighth invention of the present application is the coating apparatus according to any one of the first to fifth inventions, wherein the measurement unit has a measurement unit main body fixed at a position where it does not move with the nozzle, The measuring element advances and retreats with respect to the measuring unit main body.

  A ninth invention of the present application is the coating apparatus according to any one of the first to eighth inventions, wherein the measuring element is directed to the axis of the backup roller.

  A tenth invention of the present application is the coating apparatus according to any one of the first to ninth inventions, wherein the measuring element is rotatable about an axis parallel to the axis of the backup roller. And the measuring roller contacts the surface to be measured.

  An eleventh invention of the present application is the coating apparatus according to any one of the first to tenth inventions, wherein the measuring section includes an air cylinder that presses the measuring element against the surface to be measured.

  A twelfth invention of the present application is the coating apparatus according to any one of the first to ninth inventions, further comprising a heating unit that heats the substrate held by the backup roller.

  A thirteenth invention of the present application is a device for manufacturing a membrane / catalyst layer assembly in which a catalyst layer is formed on the surface of an electrolyte membrane, the coating device according to any one of the first to twelfth inventions, The coating device includes an introduction unit that introduces a base material including an electrolyte membrane layer, and a recovery unit that recovers the base material from the coating device, and the nozzle faces the base material held by the backup roller. Then, the catalyst material is discharged.

  In the fourteenth invention of the present application, the material is discharged onto the surface of the substrate by discharging the material from the discharge port while holding the substrate directly on the cylindrical suction surface of the rotating backup roller or via another sheet. In a coating apparatus, a measuring method for measuring a change amount of a distance from the discharge port to the suction surface, a) a step of bringing a measuring element into contact with a cylindrical measurement surface that rotates together with the suction surface; B) calculating a change amount of the distance from the discharge port to the suction surface based on the displacement of the probe, and of the suction surface and the surface to be measured, only the suction surface In addition, a plurality of suction holes are provided.

  According to the first to fourteenth aspects of the present application, it is possible to measure the amount of change in the distance from the discharge port to the suction surface without damaging the suction surface of the backup roller.

  In particular, according to the seventh invention of the present application, the advancing / retreating direction of the nozzle by the advancing / retreating mechanism and the advancing / retreating direction of the probe in the measuring unit are parallel to each other. For this reason, there is no problem that the moving axis of the measuring element is shifted due to the advance / retreat of the nozzle. Therefore, the amount of change in the distance from the discharge port to the suction surface can be measured more accurately using the measuring element.

  In particular, according to the ninth invention of the present application, the displacement of the suction surface can be measured more accurately when the backup roller expands or contracts around the axis.

  In particular, according to the tenth aspect of the present invention, it is possible to suppress the probe from sliding relative to the surface to be measured. Thereby, damage to a to-be-measured surface and a measuring element can be controlled.

  In particular, according to the eleventh aspect of the present invention, the contact state of the probe with respect to the surface to be measured can be kept good.

  In particular, according to the twelfth aspect of the present invention, the heating roller heats the backup roller together with the base material. For this reason, it is particularly important to suppress changes in the gap due to thermal expansion or contraction of the backup roller.

It is the figure which showed the structure of the manufacturing apparatus of a membrane / catalyst layer assembly. It is an enlarged view of the vicinity of a peeling roller. It is an enlarged view of the vicinity of a laminating roller. It is the block diagram which showed the connection of a control part and each part. It is the figure which looked at the backup roller and the application part from one side of the axial center direction of the backup roller. It is the figure which looked at the backup roller and the application part from the back side of the nozzle. It is an enlarged view of the vicinity of a measuring element. It is the flowchart which showed the flow of operation | movement when apply | coating a catalyst ink on the surface of an electrolyte membrane, maintaining a gap constant in a manufacturing apparatus. It is the figure which looked at the backup roller and application part which concern on a modification from the one side of the axial direction of a backup roller.

  Embodiments of the present invention will be described below with reference to the drawings.

<1. Configuration of manufacturing equipment>
FIG. 1 is a diagram showing a configuration of a manufacturing apparatus 1 for a membrane / catalyst layer assembly according to an embodiment of the present invention. The production apparatus 1 is an apparatus for producing a membrane / catalyst layer assembly for a polymer electrolyte fuel cell by forming a catalyst layer to be an electrode on the surface of an electrolyte membrane that is a long strip-shaped substrate. . As shown in FIG. 1, the apparatus 1 for manufacturing a membrane / catalyst layer assembly according to this embodiment includes an introduction peeling unit 10, a backup roller 20, a coating unit 30, a drying furnace 40, a recovery unit 50, a surface cooling unit 60, and a control. Part 70 is provided.

  In the present embodiment, the part constituted by the backup roller 20, the coating unit 30, and the drying furnace 40 in the membrane / catalyst layer assembly manufacturing apparatus 1 is an example of the “coating apparatus” in the present invention.

  The introduction peeling unit 10 is a part that introduces the laminated base material 90 composed of two layers of the support film 91 and the electrolyte film 92 to the outer peripheral surface of the backup roller 20 and peels the support film 91 from the electrolyte film 92. .

  As the electrolyte membrane 92, for example, a fluorine-based or hydrocarbon-based polymer electrolyte membrane is used. Specific examples of the electrolyte membrane 92 include a polymer electrolyte membrane containing perfluorocarbon sulfonic acid (for example, Nafion (registered trademark) manufactured by DuPont of the United States, Flemion (registered trademark) manufactured by Asahi Glass Co., Ltd., and Asahi Kasei Corporation) Aciplex (registered trademark), and Goreselect (registered trademark) manufactured by Gore Co., Ltd.). The film thickness of the electrolyte membrane 92 is, for example, 5 μm to 30 μm. The electrolyte membrane 92 is swollen by moisture in the atmosphere, and contracts when the humidity is low. That is, the electrolyte membrane 92 has a property of being easily deformed according to the humidity in the atmosphere.

  The support film 91 is a film for suppressing deformation of the electrolyte membrane 92. As the material of the support film 91, a resin having higher mechanical strength than the electrolyte membrane 92 and having an excellent shape holding function is used. Specific examples of the support film 91 include PEN (polyethylene naphthalate) and PET (polyethylene terephthalate) films. The film thickness of the support film 91 is, for example, 25 μm to 100 μm.

  As shown in FIG. 1, the introduction peeling unit 10 includes a peeling roller 11, an introduction unit 12, and a discharge unit 13.

  The peeling roller 11 is a roller that rotates around a horizontally extending axis. The peeling roller 11 has a cylindrical outer peripheral surface formed of an elastic body. The outer peripheral surface of the peeling roller 11 and the outer peripheral surface of the backup roller 20 described later are opposed to each other with a gap through which the laminated base material 90 passes. Further, the peeling roller 11 is pressurized toward the backup roller 20 by an air cylinder (not shown).

  The introduction unit 12 includes a substrate unwinding roller 121 and a first detection roller 122. The substrate unwinding roller 121 and the first detection roller 122 are both arranged in parallel with the peeling roller 11. The laminated base material 90 before supply is wound around the base material unwinding roller 121. The substrate unwinding roller 121 is rotated by the power of a motor (not shown). When the substrate unwinding roller 121 rotates, the laminated substrate 90 is unwound from the substrate unwinding roller 121.

  The laminated base material 90 fed out from the base material unwinding roller 121 changes its direction by contacting the outer peripheral surface of the first detection roller 122 and is conveyed to the peeling roller 11 side. The first detection roller 122 detects the tension applied to the laminated base material 90 in the introduction unit 12 by measuring the load received from the laminated base material 90 with a load cell. The control unit 70 described later controls the rotation speed of the substrate unwinding roller 121 so that the tension of the laminated substrate 90 detected by the first detection roller 122 becomes a preset value.

  FIG. 2 is an enlarged view of the vicinity of the peeling roller 11. As shown in FIG. 2, the laminated base material 90 that has passed through the first detection roller 122 is introduced into the gap between the peeling roller 11 and the backup roller 20. At this time, the support film 91 contacts the outer peripheral surface of the peeling roller 11, and the electrolyte membrane 92 contacts the outer peripheral surface of the backup roller 20. The laminated base material 90 is pressed against the outer peripheral surface of the backup roller 20 by the pressure received from the peeling roller 11. The electrolyte membrane 92 is adsorbed on the outer peripheral surface of the backup roller 20 by a negative pressure generated in an adsorption hole described later of the backup roller 20.

  In the present embodiment, a layer of the catalyst material 9 a is formed in advance on one surface of the electrolyte membrane 92 that is fed from the substrate unwinding roller 121. For this reason, the electrolyte membrane 92 is adsorbed on the outer peripheral surface of the backup roller 20 together with the layer of the catalyst material 9a. The layer of the catalyst material 9a is an apparatus different from the manufacturing apparatus 1, while the laminated substrate 90 composed of two layers of the support film 91 and the electrolyte film 92 is conveyed as it is in a roll-to-roll system, It is formed by intermittently applying a catalyst ink on the surface of the film 92 and drying the applied catalyst ink.

  The discharge unit 13 includes a film winding roller 131 and a second detection roller 132. Both the film take-up roller 131 and the second detection roller 132 are arranged in parallel with the peeling roller 11. The support film 91 that has passed between the peeling roller 11 and the backup roller 20 is separated from the backup roller 20 and conveyed toward the second detection roller 132. Thereby, the support film 91 is peeled from the electrolyte membrane 92. The peeled support film 91 changes its direction by coming into contact with the outer peripheral surface of the second detection roller 132 and is conveyed to the film take-up roller 131 side.

  The film winding roller 131 is rotated by the power of a motor (not shown). As a result, the support film 91 is wound around the film winding roller 131. The second detection roller 132 detects the tension applied to the support film 91 in the discharge unit 13 by measuring the load received from the support film 91 with a load cell. The control unit 70 described later controls the rotation speed of the film take-up roller 131 so that the tension of the support film 91 detected by the second detection roller 132 becomes a preset value.

  The backup roller 20 is a roller that rotates while adsorbing and holding the electrolyte membrane 92. The backup roller 20 has a cylindrical outer peripheral surface having a diameter larger than that of the peeling roller 11. The outer peripheral surface is a suction surface 21 having a plurality of suction holes. The diameter of the backup roller 20 is 400 mm to 1600 mm, for example. As indicated by a broken line in FIG. 1, the backup roller 20 is connected to a rotational drive unit 22 having a drive source such as a motor. When the rotation driving unit 22 is operated, the backup roller 20 rotates around an axis extending horizontally (that is, parallel to the peeling roller 11). The rotation direction of the backup roller 20 and the rotation direction of the peeling roller 11 are opposite to each other.

As the material of the backup roller 20, for example, a porous material such as porous carbon or porous ceramics is used. Specific examples of the porous ceramic include a sintered body of alumina (Al ₂ O ₃ ) or silicon carbide (SiC). The pore diameter of the porous backup roller 20 is, for example, 5 μm or less, and the porosity is, for example, 15% to 50%.

  A suction port 23 is provided on the end surface of the backup roller 20. The suction port 23 is connected to a suction mechanism (for example, an exhaust pump) not shown. When the suction mechanism is operated, a negative pressure is generated at the suction port 23 of the backup roller 20. A negative pressure is also generated in the plurality of suction holes provided in the suction surface 21 of the backup roller 20 through the pores in the backup roller 20. The electrolyte membrane 92 is conveyed in an arc shape by the rotation of the backup roller 20 while being adsorbed and held on the adsorption surface 21 of the backup roller 20 by the negative pressure.

  Further, as indicated by broken lines in FIG. 1, a plurality of water cooling tubes 24 are provided inside the backup roller 20. The water cooling pipe 24 is supplied with cooling water whose temperature is adjusted to a predetermined temperature from a water supply mechanism (not shown). During the operation of the manufacturing apparatus 1, the heat of the backup roller 20 is absorbed by the cooling water that is a heat medium. Thereby, the backup roller 20 is cooled. The cooling water that has absorbed the heat is discharged to a drainage mechanism (not shown).

  The application unit 30 is a mechanism for applying a catalyst ink, which is a material, to the surface of the electrolyte membrane 92 conveyed by the backup roller 20. As the catalyst ink, an electrode paste in which particles containing a catalyst material (for example, platinum (Pt)) are dispersed in a solvent such as alcohol is used. As shown in FIG. 1, the application unit 30 has a nozzle 31. The nozzle 31 is provided downstream of the peeling roller 11 in the conveying direction of the electrolyte membrane 92 by the backup roller 20. The nozzle 31 has a discharge port 311 that faces the suction surface 21 of the backup roller 20. The discharge port 311 is a slit-like opening that extends horizontally along the suction surface 21 of the backup roller 20.

  The nozzle 31 is connected to the catalyst ink supply source 33 through a supply pipe 32. An on-off valve 34 is interposed on the supply pipe 32. Therefore, when the opening / closing valve 34 is opened, the catalyst ink is supplied from the catalyst ink supply source 33 to the nozzle 31 through the supply pipe 32. Then, the catalyst ink is discharged from the discharge port 311 of the nozzle 31 toward the electrolyte membrane 92. As a result, the catalyst ink is applied to the outer surface of the electrolyte membrane 92 held by the backup roller 20.

  In this embodiment, the catalyst ink is intermittently discharged from the discharge port 311 of the nozzle 31 by opening and closing the on-off valve 34 at a constant cycle. Thereby, the catalyst ink is intermittently applied to the surface of the electrolyte membrane 92 at regular intervals in the transport direction. However, the on-off valve 34 may be continuously opened to apply the catalyst ink to the surface of the electrolyte membrane 92 without any break in the transport direction.

  As the catalyst material in the catalyst ink, a material that causes a fuel cell reaction at the anode or cathode of the polymer fuel cell is used. Specifically, platinum (Pt), a platinum alloy, a platinum compound, or the like can be used as the catalyst material. Examples of platinum alloys include, for example, at least one selected from the group consisting of ruthenium (Ru), palladium (Pd), nickel (Ni), molybdenum (Mo), iridium (Ir), iron (Fe), and the like. An alloy of metal and platinum can be mentioned. In general, platinum is used as the catalyst material for the cathode, and platinum alloy is used as the catalyst material for the anode. The catalyst ink discharged from the nozzle 31 may be for the cathode or for the anode. However, the catalyst materials 9a and 9b formed on the front and back surfaces of the electrolyte membrane 92 are catalyst materials having opposite polarities.

  The drying furnace 40 is a part that dries the catalyst ink applied to the surface of the electrolyte membrane 92. The drying furnace 40 of the present embodiment is disposed on the downstream side of the coating unit 30 in the transport direction of the electrolyte membrane 92 by the backup roller 20. The drying furnace 40 is provided in an arc shape along the suction surface 21 of the backup roller 20. The drying furnace 40 blows heated gas (hot air) toward the electrolyte membrane 92 held by the backup roller 20. If it does so, the electrolyte membrane 92 and the catalyst ink apply | coated to the surface will be heated, and the solvent in a catalyst ink will vaporize. Thereby, the catalyst ink is dried, and a layer of the catalyst material 9 b is formed on the surface of the electrolyte membrane 92.

  The collection unit 50 is a part that collects the obtained membrane / catalyst layer assembly 94 by attaching a band-shaped cover film 93 to the surface of the electrolyte membrane 92 on which the layer of the catalyst material 9b is formed. The collection unit 50 is disposed on the downstream side of the drying furnace 40 in the conveying direction of the electrolyte membrane 92 by the backup roller 20. As shown in FIG. 1, the collection unit 50 includes a laminating roller 51, a film supply unit 52, and a joined body winding unit 53.

  FIG. 3 is an enlarged view of the vicinity of the laminating roller 51. The laminating roller 51 is a roller that rotates around a horizontally extending axis. The laminating roller 51 has a cylindrical outer peripheral surface whose diameter is smaller than that of the backup roller 20. The outer peripheral surface of the laminating roller 51 and the outer peripheral surface of the backup roller 20 face each other with a gap through which the electrolyte membrane 92 and the cover film 93 pass. The laminating roller 51 is pressed toward the backup roller 20 by an air cylinder (not shown).

  For example, a metal having high thermal conductivity is used as the material of the laminating roller 51. In addition, a heater 511 that generates heat when energized is provided inside the laminating roller 51. For example, a sheathed heater can be used as the heater 511. When the heater 511 is energized, the heat generated from the heater 511 adjusts the outer peripheral surface of the laminating roller 51 to a predetermined temperature higher than the environmental temperature. The temperature of the outer peripheral surface of the laminating roller 51 is measured using a temperature sensor such as a radiation thermometer, and the output of the heater 511 is adjusted so that the outer peripheral surface of the laminating roller 51 has a constant temperature based on the measurement result. May be controlled.

  Returning to FIG. The film supply unit 52 includes a film unwinding roller 521 and a third detection roller 522. The film unwinding roller 521 and the third detection roller 522 are both arranged in parallel with the laminating roller 51. The cover film 93 before supply is wound around the film unwinding roller 521. The film unwinding roller 521 is rotated by the power of a motor (not shown). When the film unwinding roller 521 rotates, the cover film 93 is unwound from the film unwinding roller 521.

  As the material of the cover film 93, a resin having higher mechanical strength than the electrolyte membrane 92 and having an excellent shape holding function is used. Specific examples of the cover film 93 include PEN (polyethylene naphthalate) and PET (polyethylene terephthalate) films. The cover film 93 may be the same as the support film 91. Further, the support film 91 taken up by the film take-up roller 131 may be fed out from the film take-out roller 521 as the cover film 93.

  The fed cover film 93 changes its direction by contacting the outer peripheral surface of the third detection roller 522, and is conveyed to the laminating roller 51 side. The third detection roller 522 detects the tension applied to the cover film 93 in the film supply unit 52 by measuring the load received from the cover film 93 with a load cell. The control unit 70 described later controls the rotation speed of the film unwinding roller 521 so that the tension of the cover film 93 detected by the third detection roller 522 becomes a preset value.

  The cover film 93 that has passed through the third detection roller 522 is introduced between the electrolyte film 92 adsorbed and held on the outer peripheral surface of the backup roller 20 and the laminating roller 51. At this time, the cover film 93 is pressed against the electrolyte membrane 92 by the pressure from the laminating roller 51 and is heated by the heat of the laminating roller 51. As a result, the cover film 93 is attached to the outer surface of the electrolyte membrane 92. The catalyst material 9 b formed on the surface of the electrolyte membrane 92 is sandwiched between the electrolyte membrane 92 and the cover film 93. As a result, a membrane / catalyst layer assembly 94 composed of the electrolyte membrane 92, the catalyst materials 9a and 9b, and the cover film 93 is formed.

  The joined body winding unit 53 includes a joined body winding roller 531 and a fourth detection roller 532. The joined body winding roller 531 and the fourth detection roller 532 are both arranged in parallel with the laminating roller 51. The membrane / catalyst layer assembly 94 that has passed between the backup roller 20 and the laminate roller 51 is separated from the backup roller 20 and conveyed toward the fourth detection roller 532. Then, the membrane / catalyst layer assembly 94 changes its direction by coming into contact with the outer peripheral surface of the fourth detection roller 532 and is conveyed to the assembly winding roller 531 side.

  The joined body winding roller 531 is rotated by the power of a motor (not shown). As a result, the membrane / catalyst layer assembly 94 is wound around the bonded body winding roller 531. The fourth detection roller 532 detects the tension applied to the membrane / catalyst layer assembly 94 at the assembly winding unit 53 by measuring the load received from the membrane / catalyst layer assembly 94 with a load cell. The control unit 70 described later controls the number of rotations of the joined body winding roller 531 so that the tension of the membrane / catalyst layer assembly 94 detected by the fourth detection roller 532 becomes a preset value.

  The surface cooling unit 60 is a mechanism for cooling the outer peripheral surface of the backup roller 20. The surface cooling unit 60 is disposed on the outer peripheral surface of the backup roller 20 at a position facing a region that does not hold the electrolyte membrane 92 between the collection unit 50 and the introduction peeling unit 10. For example, the surface cooling unit 60 sprays clean dry air having a temperature lower than the environmental temperature (for example, about 5 ° C.) on the outer peripheral surface of the backup roller 20. The backup roller 20 heated by the drying furnace 40 and the laminating roller 51 is cooled by receiving the clean dry air.

  Thus, in the manufacturing apparatus 1 of the present embodiment, the laminated base material 90 is fed out from the base material unwinding roller 121, the support film 91 is peeled off from the electrolyte membrane 92, the catalyst ink is applied to the electrolyte membrane 92, and dried. Each process of drying by the furnace 40 and attaching the cover film 93 to the electrolyte membrane 92 is sequentially performed. As a result, the membrane / catalyst layer assembly 94 used for the electrode of the polymer electrolyte fuel cell is manufactured. The electrolyte membrane 92 is always held on the support film 91, the backup roller 20, or the cover film 93. Thereby, deformations such as swelling and shrinkage of the electrolyte membrane 92 in the manufacturing apparatus 1 are suppressed.

  The control unit 70 is means for controlling the operation of each unit in the manufacturing apparatus 1. FIG. 4 is a block diagram showing the connection between the control unit 70 and each unit in the manufacturing apparatus 1. As conceptually shown in FIG. 4, the control unit 70 is configured by a computer having an arithmetic processing unit 71 such as a CPU, a memory 72 such as a RAM, and a storage unit 73 such as a hard disk drive. A computer program P for executing the manufacturing process of the membrane / catalyst layer assembly is installed in the storage unit 73.

  As shown in FIG. 4, the control unit 70 includes the motor for the base material unwinding roller 121, the load cell for the first detection roller 122, the motor for the film winding roller 131, the load cell for the second detection roller 132, and a backup. Rotation drive unit 22 of roller 20, suction mechanism of backup roller 20, water supply mechanism of backup roller 20, opening / closing valve 34, drying furnace 40, heater 511, motor of film unwinding roller 521, load cell of third detection roller 522, bonding The motor of the body winding roller 531, the load cell of the fourth detection roller 532, and the surface cooling unit 60 are connected so as to be able to communicate with each other. The control unit 70 is also communicably connected to a servo motor 361 described later, an air pressure source of the measurement unit 37, and a displacement sensor 375.

  The control unit 70 temporarily reads the computer program P and data stored in the storage unit 73 into the memory 72, and the arithmetic processing unit 71 performs arithmetic processing based on the computer program P, whereby each of the above-described units is performed. Control the operation. Thereby, the manufacturing process of the membrane / catalyst layer assembly in the manufacturing apparatus 1 proceeds.

<2. About Advance / Retreat Mechanism and Measurement Unit>
The manufacturing apparatus 1 has a mechanism for keeping the distance from the discharge port 311 of the nozzle 31 to the suction surface 21 of the backup roller 20 substantially constant. Hereinafter, the mechanism will be described. FIG. 5 is a view of the backup roller 20 and the application unit 30 as viewed from one side in the axial direction of the backup roller 20. FIG. 6 is a view of the backup roller 20 and the application unit 30 as viewed from the back side of the nozzle 31.

  The application unit 30 of the manufacturing apparatus 1 includes a moving table 35 that supports the nozzle 31. The nozzle 31 is fixed to the upper surface of the moving table 35 arranged horizontally. The discharge port 311 of the nozzle 31 faces the cylindrical suction surface 21 of the backup roller 20 vertically. Hereinafter, a direction parallel to the direction of ejection of the catalyst ink from the nozzle 31 is referred to as a “first direction”. A direction parallel to the axis of the backup roller 20 is referred to as a “second direction”.

  As shown in FIGS. 5 and 6, the application unit 30 of the present embodiment includes a pair of advance / retreat mechanisms 36 and a pair of measurement units 37.

  The advance / retreat mechanism 36 is a mechanism for moving the nozzle 31 forward and backward in the first direction together with the moving table 35. The pair of advancing / retreating mechanisms 36 are disposed near both ends in the second direction on the lower surface of the moving table 35. As shown in FIG. 5, each of the pair of advance / retreat mechanisms 36 includes a servo motor 361 that is a drive source, a guide rail 362, and a ball screw 363. The guide rail 362 is provided on the upper surface of the base portion 360 that is fixedly installed on the floor of the factory, and extends in the first direction. The moving table 35 is installed along the guide rail 362 so as to advance and retreat in the first direction. The ball screw 363 is disposed above the guide rail 362. The ball screw 363 extends in the first direction in parallel with the guide rail 362. A nut provided on the lower surface of the moving table 35 is assembled to the ball screw 363.

  When the servo motor 361 is driven by the drive signal from the control unit 70, the ball screw 363 rotates. As a result, the moving table 35 and the nozzle 31 move in the first direction along the guide rail 362. Further, when the nozzle 31 moves in the first direction, the discharge port 311 of the nozzle 31 approaches or moves away from the suction surface 21 of the backup roller 20 in the first direction. That is, the distance in the first direction from the discharge port 311 to the suction surface 21 (hereinafter referred to as “gap G”) changes.

  In the present embodiment, the servo motors 361 of the pair of advance / retreat mechanisms 36 can be driven independently of each other. For this reason, the gap G can be individually adjusted in the vicinity of both end portions of the nozzle 31 in the second direction. However, the pair of advance / retreat mechanisms 36 may always operate simultaneously. Further, the number of advance / retreat mechanisms 36 may be one, or may be three or more.

  The measuring unit 37 is a mechanism for measuring the amount of change in the gap G. The pair of measuring units 37 is disposed near both end portions in the second direction on the upper surface of the moving table 35. As shown in FIG. 5, the pair of measurement units 37 includes a support member 371, a measurement unit main body 372, a rod 373, a measuring element 374, and a displacement sensor 375. The support member 371 extends upward from the upper surface of the moving table 35. The measurement unit body 372 is fixed near the upper end of the support member 371. Therefore, the measurement unit main body 372 is disposed at a position relatively stationary with respect to the nozzle 31.

  The rod 373 is a columnar member extending in the first direction from the measurement unit main body 372 toward the backup roller 20 side. The measuring element 374 is provided at the tip of the rod 373. In the present embodiment, air cylinders are used for the measurement unit main body 372 and the rod 373. The rod 373 and the probe 374 advance and retreat in the first direction in accordance with the air pressure supplied from the air pressure source (not shown) to the measuring unit main body 372.

  The displacement sensor 375 is a measuring instrument that detects the amount of displacement of the rod 373 and the probe 374. When the positions of the rod 373 and the probe 374 in the first direction change, the displacement sensor 375 measures the amount of displacement and outputs a signal indicating the measurement result to the control unit 70.

  As shown in FIG. 6, the suction surface 21 of the backup roller 20 includes a holding region 211 that holds the electrolyte membrane 92 and a pair of measurement regions 212 provided on both sides of the holding region 211 in the second direction. A protective film 80 is wound around the entire circumference of the pair of measurement regions 212. For the protective film 80, for example, a non-porous resin film such as polyimide is used. The thickness of the protective film 80 is preferably substantially the same as the thickness of the electrolyte membrane 92. For example, the thickness of the protective film 80 is preferably not less than ½ times and not more than twice the thickness of the electrolyte membrane 92.

  When measuring the gap G, the measuring element 374 contacts the surface of the protective film 80. That is, in the present embodiment, the surface of the protective film 80 becomes the cylindrical measurement surface 81. As shown in the enlarged view in FIG. 6, the suction surface 21 of the backup roller 20 is provided with a plurality of suction holes 25, but the surface to be measured 81 is not provided with suction holes.

  FIG. 7 is an enlarged view of the vicinity of the probe 374. As shown in FIG. 7, the measuring element 374 of this embodiment includes a measuring roller 376 that can rotate around an axis extending in the second direction. At the time of measuring the gap G, the measuring roller 376 rotates following the rotation of the backup roller 20 while contacting the surface to be measured 81. Thereby, the sliding of the measuring element 374 with respect to the to-be-measured surface 81 is suppressed. Accordingly, the gap G can be measured while suppressing damage to the probe 374 and the measurement surface 81.

<3. Operation during gap measurement>
Next, in the manufacturing apparatus 1, an operation when applying the catalyst ink to the surface of the electrolyte membrane 92 while keeping the gap G constant will be described with reference to the flowchart of FIG. 8. Of the operations in steps S1 to S9 in FIG. 8, at least the operations after step S2 are realized by causing the control unit 70 to operate each unit in the manufacturing apparatus 1 based on the computer program P.

  When manufacturing the membrane / catalyst layer assembly in the manufacturing apparatus 1, first, the protective film 80 is wound around the measurement region 212 in the adsorption surface 21 of the backup roller 20 (step S <b> 1). The winding operation of the protective film 80 may be automatically performed by the manufacturing apparatus 1 based on a command from the control unit 70 or may be performed by an operator. Further, the winding operation of the protective film 80 may be performed in advance before the manufacture of the membrane / catalyst layer assembly is started.

  Next, the control unit 70 operates the suction mechanism of the backup roller 20 (step S2). As a result, negative pressure is generated in the plurality of suction holes 25 provided on the suction surface 21 of the backup roller 20. At this time, a plurality of suction holes 25 provided in the measurement region 212 in the suction surface 21 are closed by the protective film 80. For this reason, the negative pressure generated in the plurality of suction holes 25 in the holding region 211 is higher than when the protective film 80 is not provided.

  Next, the control unit 70 operates the advance / retreat mechanism 36 to arrange the nozzle 31 at a preset position (step S3). As a result, the discharge port 311 of the nozzle 31 and the suction surface 21 of the backup roller 20 face each other in the first direction with the gap G interposed therebetween. Subsequently, the control unit 70 causes the rod 373 to protrude toward the backup roller 20 by supplying air pressure to the measurement unit main body 372. Then, the probe 374 comes into contact with the measured surface 81 of the protective film 80 (step S4). Thereafter, the probe 374 is continuously pressed against the measurement surface 81 by air pressure. Thereby, the contact state of the measuring element 374 with respect to the to-be-measured surface 81 is maintained favorable.

  Subsequently, the control unit 70 starts rotation of each roller in the manufacturing apparatus 1. Then, the electrolyte membrane 92 is introduced on the surface of the backup roller 20 (step S5). The introduced electrolyte membrane 92 rotates together with the adsorption surface 21 while being held in the holding region 211 of the adsorption surface 21 by the negative pressure of the plurality of adsorption holes 25. Further, the measured surface 81 of the protective film 80 also rotates together with the suction surface 21.

  Thereafter, the control unit 70 opens the on-off valve 34. Then, the catalyst ink is discharged from the discharge port 311 of the nozzle 31 toward the surface of the electrolyte membrane 92. Thereby, the application process of the catalyst ink to the electrolyte membrane 92 is started (step S6).

  When the gap G between the discharge port 311 and the suction surface 21 changes due to expansion / contraction due to temperature change of the backup roller 20 or external vibration, the position of the measuring element 374 in the first direction with respect to the measuring unit main body 372 changes. To do. Then, the displacement sensor 375 measures the amount of displacement and outputs a signal indicating the measurement result to the control unit 70 (step S7). The controller 70 calculates the amount of change of the gap G based on the obtained measurement result (step S8).

  Then, the control unit 70 performs feedback control of the servo motor 361 of the advance / retreat mechanism 36 so as to reduce the calculated change amount of the gap G (step S9). Thereby, the position of the nozzle 31 in the first direction is adjusted. For example, when the gap G decreases, the nozzle 31 is moved in a direction away from the backup roller 20. Further, when the gap G increases, the nozzle 31 is moved in a direction approaching the backup roller 20.

  Thereby, the change of the gap G is suppressed. That is, the distance in the first direction from the discharge port 311 to the surface of the electrolyte membrane 92 is kept substantially constant. As a result, the application state of the catalyst ink on the surface of the electrolyte membrane 92 can be kept constant. That is, the layer of the catalyst material 9b can be formed on the surface of the electrolyte membrane 92 with a constant film thickness.

  As described above, in the manufacturing apparatus 1 of the present embodiment, the protective film 80 is wound around the suction surface 21 of the backup roller 20, and the probe 374 is brought into contact with the surface of the protective film 80. Thereby, the change amount of the gap G can be measured without damaging the suction surface 21 of the backup roller 20. Therefore, it is possible to suppress a decrease in the suction force due to the damage of the suction surface 21 and the occurrence of a measurement error of the gap G.

  In particular, in the structure of this embodiment, the nozzle 31 and the measurement unit main body 372 are fixed on the common moving table 35. For this reason, when the position of the nozzle 31 changes, the position of the measurement part main body 372 is also displaced with the nozzle 31. Therefore, the change amount of the gap G corresponding to the difference between these displacement amounts can be measured by one measuring unit 37 without separately measuring the displacement amount of the nozzle 31 and the displacement amount of the suction surface 21.

  In the structure of this embodiment, the advance / retreat direction of the nozzle 31 by the advance / retreat mechanism 36 and the advance / retreat direction of the probe 374 in the measurement unit 37 are both in the first direction. That is, the nozzle 31 and the measuring element 374 move in parallel with each other. In this way, there is no problem that the moving axis of the probe 374 is shifted depending on the position of the nozzle 31. Therefore, the change amount of the gap G can be measured more accurately using the measuring element 374.

  In the structure of the present embodiment, a drying furnace 40 serving as a heating unit is provided along the outer peripheral surface of the backup roller 20. The drying furnace 40 heats the electrolyte membrane 92 held by the backup roller 20 and also heats the backup roller 20. For this reason, as described above, suppressing the change in the gap G due to the thermal expansion or contraction of the backup roller 20 is particularly important in the structure of the present embodiment.

<4. Modification>
Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

  FIG. 9 is a view of the backup roller 20 and the application unit 30 according to one modification as viewed from one side in the axial direction of the backup roller 20. In the example of FIG. 9, the measurement unit 37 includes a first measurement unit 37 </ b> A that measures the amount of displacement of the suction surface 21 and a second measurement unit 37 </ b> B that measures the amount of displacement of the nozzle 31. The measurement unit main body 372A of the first measurement unit 37A and the measurement unit main body 372B of the second measurement unit 37B are both fixed at a position stationary with respect to the floor of the factory by a support member (not shown). Yes. Therefore, even when the nozzle 31 moves, the positions of the two measurement unit bodies 372A and 372B do not change.

  The measuring element 374A of the first measuring unit 37A comes into contact with the measured surface 81 of the protective film 80 wound around the backup roller 20. When the backup roller 20 expands or contracts due to a temperature change, the position of the measuring element 374A changes according to the displacement of the measurement surface 81. The displacement sensor 375A of the first measurement unit 37A measures the amount of displacement and outputs a signal indicating the measurement result to the control unit 70.

  On the other hand, the probe 374B of the second measurement unit 37B contacts the rear end surface of the nozzle 31 in the first direction. When the position of the nozzle 31 in the first direction changes, the position of the probe 374B changes accordingly. The displacement sensor 375B of the second measurement unit 37B measures the amount of displacement and transmits a signal indicating the measurement result to the control unit 70.

  The control unit 70 calculates the change amount of the gap G based on the difference between the displacement amount obtained from the first measurement unit 37A and the displacement amount obtained from the second measurement unit 37B. That is, in the example of FIG. 9, the first measurement unit 37A and the second measurement unit 37B constitute the measurement unit 37 that measures the amount of change in the gap G. The control unit 70 controls the servo motor 361 of the advance / retreat mechanism 36 so that the measured change amount of the gap G becomes small.

  In particular, in the example of FIG. 9, the probe 374 </ b> A of the first measurement unit 37 </ b> A is directed to the axis of the backup roller 20. That is, the measuring element 374A advances and retreats in the radial direction with respect to the axis of the backup roller 20. In this way, the displacement amount of the suction surface 21 can be measured more accurately when the backup roller 20 expands or contracts around the axis.

  In the structure of the above-described embodiment, the measuring element 374 of the measuring unit 37 may be disposed so as to face the axial center of the backup roller 20. For example, the position of the measuring unit 37 may be changed to a position slightly lower than the state of FIGS. 5 and 6, and the measuring element 374 may be disposed at the same height as the discharge port 311 of the nozzle 31. Then, the measuring element 374 can be advanced and retracted in a direction parallel to the advance / retreat direction of the nozzle 31 and toward the axis of the backup roller 20.

  In the above-described embodiment, the backup roller 20 holds the electrolyte membrane 92 by directly contacting the electrolyte membrane 92 with the adsorption surface 21. However, the backup roller 20 may hold the electrolyte membrane 92 on the suction surface 21 via another sheet. For example, when the electrolyte membrane 92 is introduced into the backup roller 20, a porous sheet may be introduced together with the electrolyte membrane 92, and the electrolyte membrane 92 may be adsorbed and held together with the sheet on the adsorption surface 21 of the backup roller 20.

  In the above embodiment, the nozzle 31 is advanced and retracted in the first direction by the advance / retreat mechanism 36 using the guide rail 362 and the ball screw 363. However, the mechanism for moving the nozzle 31 back and forth is not necessarily a mechanism using the guide rail 362 and the ball screw 363. For example, the position of the nozzle 31 may be advanced and retracted by a mechanism using a conveyance belt or a mechanism using a linear motor.

  In the embodiment described above, the protective film 80 is wound around the suction surface 21 of the backup roller 20, and the surface of the protective film 80 is used as the measured surface 81. However, the measured surface 81 may be provided by other methods. For example, the surface to be measured without the suction hole 25 may be formed on the outer peripheral surface of the backup roller 20 by covering only the measurement region 212 of the suction surface 21 of the backup roller 20 with a coating material.

  Alternatively, the central portion and both end portions in the second direction of the backup roller 20 may be formed of separate members, and only the central portion may be a porous member. And it is good also considering the outer peripheral surface of the member which comprises both ends as a to-be-measured surface. In that case, it is preferable that the thermal expansion coefficient of the member which comprises a center part and the thermal expansion coefficient of the member which comprises both ends are substantially the same. Alternatively, the backup roller 20 may be formed by a single cylindrical member, and only the central portion in the second direction of the backup roller 20 may be subjected to the porous processing.

  In the above embodiment, the pair of measured surfaces 81 are provided on both sides of the holding area 211 of the backup roller 20. However, the measured surface 81 may be provided only on one side of the holding region 211. The measured surface 81 only needs to be provided at a position in the second direction different from the holding region 211.

  In the above-described embodiment, the case where the catalyst material 9b is formed on the other surface of the electrolyte membrane 92 in which the layer of the catalyst material 9a is previously formed on one surface has been described. However, the manufacturing apparatus of the present invention may form a catalyst material for an electrolyte membrane in which a layer of the catalyst material is not formed on either side of the front and back surfaces.

  In the above embodiment, the case where the catalyst ink is applied to the surface of the electrolyte membrane has been described. However, the coating apparatus of the present invention may apply a material other than the catalyst ink to a long belt-like substrate other than the electrolyte membrane.

  Moreover, about the detailed structure of a coating device and a manufacturing apparatus, you may differ from each figure of this application. Moreover, you may combine suitably each element which appeared in said embodiment and modification in the range which does not produce inconsistency.

DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus 9a, 9b Catalyst material 10 Introducing peeling part 20 Backup roller 21 Adsorption surface 22 Rotation drive part 25 Adsorption hole 30 Application | coating part 31 Nozzle 35 Moving table 36 Advance / retreat mechanism 37 Measurement part 37A 1st measurement part 37B 2nd measurement part 40 Drying furnace 50 Collection unit 60 Surface cooling unit 70 Control unit 80 Protective film 81 Surface to be measured 92 Electrolyte membrane 211 Holding region 212 Measurement region 311 Discharge port 361 Servo motor 362 Guide rail 363 Ball screw 372, 372A, 372B Measurement unit main body 374 374A, 374B Measuring element 375, 375A, 375B Displacement sensor 376 Measuring roller G Gap

Claims (14)

An application device for applying a material to the surface of a long belt-shaped substrate,
A backup roller that holds the substrate directly on the cylindrical suction surface or via another sheet;
A rotation drive unit for rotating the backup roller about its axis;
A nozzle having a discharge port for discharging material toward the base material held by the backup roller;
An advancing and retracting mechanism for advancing and retracting the ejection port in a first direction parallel to the direction of material ejection;
A measurement unit that measures the amount of change in the distance in the first direction from the discharge port to the suction surface;
A control unit for controlling the advance / retreat mechanism based on the measurement result of the measurement unit;
A cylindrical surface to be measured that rotates with the suction surface;
With
Among the suction surface and the measured surface, only the suction surface is provided with a plurality of suction holes,
The said measurement part is a coating device which has a measuring element which contacts the said to-be-measured surface. The coating apparatus according to claim 1,
A protective film wound around a portion of the adsorption surface;
A coating apparatus in which the surface of the protective film is the surface to be measured. The coating apparatus according to claim 2,
The coating apparatus with which the thickness of the said protective film and the thickness of a base material are substantially the same. The coating apparatus according to any one of claims 1 to 3, wherein
The adsorption surface has a holding region for holding a base material,
The coating device is provided at a position different from the holding region in a second direction parallel to the axis. The coating apparatus according to claim 4,
A pair of surfaces to be measured are provided on both sides of the holding region in the second direction,
The said measurement part is a coating device which has a pair of said measuring element which contacts a pair of said to-be-measured surface. It is a coating device of any one of Claim 1- Claim 5, Comprising:
The measuring unit is
A measuring unit body stationary relative to the nozzle;
The measuring device is a coating device that advances and retreats with respect to the measuring unit main body. The coating apparatus according to claim 6,
The coating element is a coating apparatus that advances and retreats in the first direction with respect to the measurement unit main body. It is a coating device of any one of Claim 1- Claim 5, Comprising:
The measuring unit is
Having a measuring unit body fixed at a position not moving with the nozzle,
The measuring device is a coating device that advances and retreats with respect to the measuring unit main body. The coating apparatus according to any one of claims 1 to 8,
The applicator is directed to the axis of the backup roller. A coating apparatus according to any one of claims 1 to 9, wherein
The measuring element has a measuring roller rotatable around an axis parallel to the axis of the backup roller,
A coating apparatus in which the measurement roller is in contact with the surface to be measured. A coating apparatus according to any one of claims 1 to 10, wherein
The measuring unit is
A coating apparatus having an air cylinder that presses the measuring element against the surface to be measured. A coating apparatus according to any one of claims 1 to 9, wherein
The coating apparatus further provided with the heating part which heats the base material hold | maintained at the said backup roller. An apparatus for manufacturing a membrane / catalyst layer assembly in which a catalyst layer is formed on the surface of an electrolyte membrane,
A coating apparatus according to any one of claims 1 to 12,
An introduction unit for introducing a base material including an electrolyte membrane layer into the coating device;
A collection unit for collecting the substrate from the coating apparatus;
With
The nozzle is a manufacturing apparatus that discharges a catalyst material toward a base material held by the backup roller. In the apparatus for applying the material to the surface of the substrate by discharging the material from the discharge port while holding the substrate directly on the cylindrical suction surface of the rotating backup roller or via another sheet, the discharge A measurement method for measuring the amount of change in the distance from the outlet to the adsorption surface,
a) a step of bringing a probe into contact with a cylindrical measurement surface that rotates together with the suction surface;
b) calculating the amount of change in the distance from the discharge port to the suction surface based on the displacement of the probe;
Have
A measuring method in which a plurality of suction holes are provided only on the suction surface among the suction surface and the surface to be measured.

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