JP2017078614A - Inclination angle measuring instrument and measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inclination angle measuring instrument and a measuring instrument that restrain vibration of a free liquid level and improve the stability of the free liquid level in angle detection.SOLUTION: An inclination angle measuring instrument 1 includes a disk-shaped container 4 in which liquid 6 forming a free liquid level 6a is contained and sealed, a light-emitting source that makes detection light enter the free liquid level, and a light-receiving element 16 that receives detection light reflected by the free liquid level, and detects inclination of the free liquid level on the basis of a detection signal from the light-receiving element. The container includes, on its bottom, a groove formed concentric with the center of the container, and a central part 4a formed at the center of the container and raised from the groove, and the liquid is stored so that it fills the groove and forms the shallowest part at the central part.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a tilt angle measuring device and a measuring device for measuring a tilt angle of a device body.

  As one of the tilt angle measuring devices, there is an tilt angle measuring device using the fact that the free liquid level is kept horizontal.

  For example, there is a tilt sensor as a tilt angle measuring device using a free liquid level.

  In the tilt sensor, the apparatus main body provided with the tilt sensor is inclined, so that the free liquid surface is inclined relative to the apparatus main body.

  The detection light is incident on the free liquid surface, the detection light reflected by the free liquid surface is received, and the change in the light receiving position associated with the inclination of the liquid surface is detected. Can be detected.

  When the free liquid level is used, the followability or stability of the free liquid level with respect to the tilt change of the tilt angle measuring device is affected by the viscosity of the liquid forming the free liquid level.

  That is, when the viscosity of the liquid is lowered, the followability is improved, but the stability is lowered and the liquid is easily affected by vibrations and the like. On the contrary, when the viscosity of the liquid increases, the followability decreases, and it takes time to detect the tilt angle, but the stability is improved.

  Furthermore, the viscosity of the liquid is affected by the temperature, the viscosity increases in a cold region, and the followability decreases. For this reason, in cold districts, much time is spent each time the inclination angle is detected, and workability is deteriorated. For this reason, assuming that it is used in cold regions, if the viscosity of the liquid is lowered, the stability of the liquid level at normal temperature will be reduced, and it will be more susceptible to vibrations, etc. Sexuality decreases.

JP 2000-266545 A JP 2011-149854 A Japanese Utility Model Publication No. 5-38521 JP 2001-221635 A

  The present invention provides a tilt angle measuring device and a measuring device that suppress the vibration of the free liquid surface in angle detection and improve the stability of the free liquid surface.

  The present invention includes a disk-shaped container in which a liquid forming a free liquid surface is sealed, a light emitting source that makes detection light incident on the free liquid surface, and a light receiving element that receives the detection light reflected by the free liquid surface. An inclination angle measuring device for detecting an inclination of the free liquid level based on a detection signal from the light receiving element, wherein the container has a groove formed concentrically with the center of the container at the bottom, and the center of the container And the liquid is filled with the groove and is stored so as to form a shallowest portion at the center.

  The present invention also relates to a tilt angle measuring device in which a plurality of flow resistance elements are provided at equal intervals in the groove, and the flow resistance elements are configured to be immersed in the liquid.

  Further, the present invention relates to a tilt angle measuring device in which the flow resistance element has an arc shape and a flat upper surface.

  According to the present invention, a ring-shaped flow restraining plate covering the groove is provided on the flow resistance element, and a plurality of notches are formed at equal intervals on the inner edge of the flow restraining plate. The plate relates to an inclination angle measuring device adapted to be immersed in the liquid.

  The present invention also relates to a tilt angle measuring device in which a circumferential position of the flow resistance element coincides with a circumferential position of the cutout portion.

  The present invention also relates to a tilt angle measuring device in which a circumferential position of the flow resistance element is different from a circumferential position of the notch.

  The present invention further relates to a tilt angle measuring apparatus that further includes an acceleration sensor and detects a tilt angle based on a detection result of the acceleration sensor when a tilt angle detection range by the light receiving element is exceeded.

  The present invention also includes a leveling unit, a measuring device main body provided in the leveling unit, a control unit, the tilt angle measuring device as the first tilt angle measuring device, and the first tilt angle measuring device. A second tilt angle measuring device that detects a wide range of tilt angles and is more responsive than the first tilt angle measuring device; and includes the control unit, the first tilt angle measuring device, and the second tilt angle measuring device. The angle measuring device is provided in the measuring device main body, and the control unit drives the leveling unit based on the detection result of the second tilt angle measuring device, and the tilt angle detected by the second tilt angle measuring device is The measurement apparatus according to the present invention performs rough leveling until the first tilt angle measuring device reaches a detectable range, and leveles the measuring device main body horizontally based on a detection result of the first tilt angle measuring device. is there.

  Furthermore, in the present invention, the control unit determines whether or not the measuring device main body can be leveled by the leveling unit based on the detection result of the second tilt angle measuring device when the measuring device is installed. The present invention relates to a measuring device that notifies a change in installation posture or a change in installation position when it is not possible.

  According to the present invention, a disk-shaped container in which a liquid forming a free liquid surface is enclosed, a light emission source that makes detection light incident on the free liquid surface, and a light reception that receives the detection light reflected by the free liquid surface An inclination angle measuring device for detecting an inclination of the free liquid level based on a detection signal from the light receiving element, wherein the container has a groove formed in a bottom portion concentrically with a center of the container, and the container And the liquid is stored so as to fill the groove and form the shallowest part at the center. Resistance is given to the flow of the liquid, and the vibration suppressing effect is exhibited.

  According to the present invention, a plurality of flow resistance elements are provided at equal intervals in the groove, and the flow resistance elements are configured to be submerged in the liquid. Is given resistance, and a vibration suppressing effect is produced.

  According to the present invention, a ring-shaped flow restraining plate that covers the groove is provided on the flow resistance element, and a plurality of notches are formed at equal intervals on the inner edge of the flow restraining plate, Since the flow suppression plate is submerged in the liquid, the flow suppression plate provides resistance to the flow of the liquid, and a vibration suppression effect is generated.

  In addition, according to the present invention, when an acceleration sensor is further provided and the inclination angle detection range by the light receiving element is exceeded, the inclination angle is detected based on the detection result of the acceleration sensor, so that the inclination angle can be detected in a wide range. Horizon can be detected with high accuracy.

  According to the invention, the leveling unit, the measuring device main body provided in the leveling unit, the control unit, the tilt angle measuring device as the first tilt angle measuring device, and the first tilt angle measurement are provided. And a second tilt angle measuring device that is more responsive than the first tilt angle measuring device, and includes the control unit, the first tilt angle measuring device, and the first tilt angle measuring device. The two tilt angle measuring device is provided in the measuring device main body, and the control unit drives the leveling unit based on the detection result of the second tilt angle measuring device, and the tilt detected by the second tilt angle measuring device. Since the rough leveling is executed until the angle is in a range that can be detected by the first tilt angle measuring device, and the measuring device main body is leveled based on the detection result of the first tilt angle measuring device, the measuring device Automatic leveling can be performed with high accuracy in a short time.

  Furthermore, according to the present invention, the control unit determines whether the measuring device main body can be leveled by the leveling unit based on the detection result of the second tilt angle measuring device when the measuring device is installed. When the leveling is impossible, the change of the installation posture or the change of the installation position is notified, so that an excellent effect that the installation work of the measuring device can be performed quickly is exhibited.

It is sectional drawing of the inclination-angle measuring apparatus which concerns on 1st Example of this invention. It is a fragmentary sectional view of the inclination-angle measuring apparatus which concerns on this Example. It is an elevational schematic diagram showing the optical system of the example. It is a plane schematic diagram showing the optical system of the example. (A) is sectional drawing of the container of the inclination-angle measuring apparatus of this Example, (B) is sectional drawing which shows the state which this container inclined. It is a top view of the container of the inclination-angle measuring apparatus which concerns on a 2nd Example. It is a cross-sectional perspective view of this container. It is a top view of the container of the inclination-angle measuring apparatus which concerns on the 3rd Example with which the flow suppression board was attached. It is a cross-sectional perspective view of the said container with which the flow suppression board was attached. It is a top view of the said container which concerns on the modification of a 3rd Example with which the flow suppression board was attached. It is a figure which shows the damping characteristic under the vibration environment in a present Example. It is sectional drawing of the measuring apparatus which concerns on the Example of this invention. It is a control block diagram of this measuring device. (A) is a schematic diagram of the leveling unit, (B) is a schematic diagram showing a relationship between the leveling unit and the measuring device main body, and (C) is a schematic diagram showing a state in which the measuring device main body is rotated with respect to the leveling unit. FIG. It is a flowchart of the automatic leveling of the measuring apparatus which concerns on a present Example.

  Embodiments of the present invention will be described below with reference to the drawings.

  A tilt angle measuring apparatus according to a first embodiment of the present invention will be described with reference to FIGS.

  The tilt angle measuring apparatus 1 detects high-precision horizontal or detects a tilt angle from the horizontal, and is used as a tilt sensor. Furthermore, the detectable tilt angle of the tilt angle measuring apparatus 1 is, for example, ± 2 ° with respect to the horizontal.

  A liquid-tight container 4 is provided on the upper surface of the support block 3. The container 4 forms a disk-like space 5 therein, and a transparent liquid 6 having a predetermined viscosity is sealed in the space 5. As the liquid 6, silicon oil or the like is used.

  The space 5 has a sufficiently large volume with respect to the amount of liquid to be sealed, and the liquid 6 has a free liquid level 6a regardless of whether the inclination angle measuring device 1 is in a horizontal state or in an inclined state. Form.

  An optical path hole 7 for detection light is provided on the bottom surface of the container 4, and the optical path hole 7 has an axis that is concentric with the center line of the container 4. A quarter-λ plate 14 is provided. The optical axis 9 of the condenser lens 8 coincides with the axis of the optical path hole 7.

  Two orthogonal optical paths are formed inside the support block 3, and the two optical paths are arranged in a plane orthogonal to the optical axis 9. A reflecting mirror 11 is provided at the point of intersection with the plane perpendicular to the optical axis 9.

  The center of one of the two optical paths is formed along the reflection optical axis 12 of the reflection mirror 11 (see FIGS. 1 and 3), and the reflection mirror is disposed on the reflection optical axis 12. A condenser lens 13, a polarizing beam splitter 15, and a light receiving element 16 are disposed from the 11th side.

  The polarizing beam splitter 15 has a characteristic of transmitting linearly polarized light having a predetermined polarization plane and reflecting linearly polarized light having a polarization plane different from the linearly polarized light by 90 °.

  The light receiving element 16 is mounted on a wiring board 17 and fixed to the side surface of the support block 3 via the wiring board 17. A temperature sensor 18 and an acceleration sensor 19 are mounted on the wiring board 17.

  The light receiving element 16 is a CCD, CMOS sensor or the like, and can output a signal of a light receiving position of detection light and further an image signal based on signals from pixels constituting the CCD, CMOS sensor.

  Of the two optical paths, the other optical path is formed along the light projecting optical axis 21 (see FIGS. 2 and 4), and the light projecting optical axis 21 intersects the reflected light axis 12, and this intersecting position. The polarization beam splitter 15 is provided. Accordingly, the reflected optical axis 12 extends in a direction perpendicular to the polarizing beam splitter 15 (direction perpendicular to the paper surface) in FIG.

  On the light projecting optical axis 21, a polarizing plate 24, a tilt pattern 22, a collimating lens 23, and an LED light source (light emitting source) 25 are provided from the polarizing beam splitter 15 side. It is attached to a side surface (a surface orthogonal to the above-described side surface).

  In FIG. 2, the detection light emitted from the LED light source 25 is collected by the collimating lens 23 and passes through the tilt pattern 22 and the polarizing plate 24. By passing through the polarizing plate 24, linearly polarized light, for example, P linearly polarized light is obtained.

  The detection light is reflected by the polarizing beam splitter 15 in a direction perpendicular to the paper surface and reflected upward by the reflecting mirror 11.

  The detection light passes through the ¼λ plate 14, passes through the condenser lens 8, projects the tilt pattern image onto the free liquid surface 6a, and is further reflected by the free liquid surface 6a. When the tilt angle measuring device 1 is tilted, the free liquid level 6a is kept horizontal, so that the free liquid level 6a is tilted relative to the tilt angle measuring device 1.

  Due to the inclination of the free liquid surface 6a, the detection light is reflected at an angle twice the inclination angle on the principle of optical insulator. The reflected detection light passes through the ¼λ plate 14, is reflected by the reflecting mirror 11, passes through the condenser lens 13, and enters the polarizing beam splitter 15. Since the detection light passes through the ¼λ plate 14 twice in the forward and return paths, the reflected detection light becomes S linearly polarized light and passes through the polarization beam splitter 15.

  The reflected detection light transmitted through the polarization beam splitter 15 is detected by the light receiving element 16. That is, the tilt pattern 22 is projected onto the light receiving element 16.

  As described above, when the free liquid surface 6 a is inclined, the reflected detection light is received by the light receiving element 16 in a state of being shifted from the reflected optical axis 12. By detecting the deviation of the light receiving position on the basis of the position of the reflected optical axis 12, it is possible to detect whether the free liquid level 6a is horizontal and the inclination angle of the free liquid level 6a.

  Further, when the tilt angle is detected with high accuracy, the shift amount is detected from the displacement of the image of the tilt pattern 22, thereby enabling highly accurate angle detection.

  As described above, in the tilt angle measuring apparatus 1, when the free liquid level 6a remains shaken during tilting or the free liquid level 6a vibrates, the reflected direction of the detection light This causes a detection error due to the influence of vibration.

  In this embodiment, shaking and vibration are suppressed as follows.

  With reference to FIGS. 5A and 5B, the container 4 in the present embodiment will be further described.

  On the bottom surface of the container 4, a ring-shaped groove 28 is formed around the optical axis 9. A central portion 4 a (including the optical path hole 7 portion) of the bottom surface of the container 4 is a plane orthogonal to the optical axis 9.

  The cross-sectional shape of the groove 28 is substantially V-shaped so that the central part of the groove becomes the deepest part 28a. The range from the deepest portion 28a to the central portion 4a is formed by a convex curved surface 28b that gently rises from the deepest portion 28a and contacts the central portion 4a.

  The liquid 6 stored in the container 4 is an amount that fills the groove 28 and further reaches the required liquid depth (the shallowest part) at the central portion 4a. Here, the liquid depth of the shallowest part is, for example, about 1 mm.

  By forming the groove 28 in the container 4 and forming the central portion 4a raised from the groove 28, the liquid depth of the portion where the detection light is incident on the free liquid surface 6a is made as shallow as possible. Can do.

  Since the liquid depth is shallow at the reflection portion of the detection light, a shearing force due to the viscous resistance (viscous friction) of the liquid 6 acts strongly on the free liquid surface 6a. Accordingly, minute vibrations or the like are hardly transmitted to the free liquid surface 6a, and minute waves due to vibrations on the free liquid surface 6a are hardly generated. Furthermore, since the liquid depth is shallow, it is difficult for large waves to be generated. Accordingly, the stability of the stationary state is improved.

  Next, when the tilt angle measuring apparatus 1 is tilted (FIG. 5B), the right side is raised in the drawing.

  When the tilt angle measuring device 1 is tilted, the liquid 6 flows from right to left.

  Since the sufficient liquid 6 is stored in the groove 28, a sufficient amount of liquid movement can be ensured even if the liquid depth of the central portion 4a is shallow. Furthermore, since the deepest portion 28a to the central portion 4a are smoothly continuous by the convex curved surface 28b, the liquid 6 is smoothly moved. Therefore, the vibration of the liquid itself due to the movement of the liquid 6 is suppressed.

  Further, the flow of the liquid 6 due to the inclination moves over the central portion 4a and moves to the groove 28 on the opposite side. Therefore, the potential energy is consumed in the process of getting over the central portion 4a.

  Furthermore, when the liquid 6 passes through the shallowest portion, it passes through the minimum portion of the cross-sectional area of the flow path, and the flow velocity increases compared to the case where the cross-sectional area of the flow path is constant. In addition to receiving strong viscous resistance and shearing force from the central portion 4a, an increase in flow velocity results in an increase in viscous resistance, and the kinetic energy of the liquid 6 is consumed.

  Accordingly, when the liquid 6 flows due to the inclination angle measuring device 1 being inclined, a damping force acts on the liquid 6 strongly. For this reason, the swing back of the liquid is suppressed, and the liquid 6 is stabilized in a short time after the tilting, and measurement is possible.

  A second embodiment will be described with reference to FIGS. 6 and 7 show the container 4. In FIGS. 6 and 7, the same components as those shown in FIGS. 1 and 2 are denoted by the same reference numerals.

  In the second embodiment, the damping effect is further increased by generating more resistance to the flow of the liquid 6.

  In the second embodiment, a flow resistance element 31 is provided in the groove 28 for suppressing the smooth flow of the liquid 6.

  The flow resistance element 31 shown in the second embodiment has an arc shape that is concentric with the groove 28, and protrudes at a position divided into four circumferences. The cross-sectional shape of the flow resistance element 31 is a substantially pentagon with the deepest position of the groove 28 as a vertex. A protrusion 32 is formed at the center of the upper surface of the flow resistance element 31. The flow resistance element 31 is sized to be completely immersed in the liquid 6.

  Providing the flow resistance element 31 in the groove 28 prevents smooth flow of the liquid 6 in the groove 28 when the container 4 vibrates. For this reason, the formation of waves accompanying the vibration of the container 4 is suppressed, and the shaking of the liquid 6 is suppressed, and the stability of the inclination detection by the inclination angle measuring device 1 is improved. Further, when the container 4 is tilted, the flow resistance element 31 also becomes resistant to the flow of the liquid 6 and the swing back is suppressed, and after the tilt, the liquid 6 is stabilized in a short time, and the measurement is performed. Is possible.

  The flow resistance element 31 only needs to give resistance to the flow of the liquid 6, and the shape is not limited to the arc shape. For example, cylindrical protrusions may be provided at predetermined intervals.

  8 and 9 show a third embodiment.

  In the third embodiment, a flow suppression plate 33 is provided so as to cover the groove 28.

  The flow suppression plate 33 has a circular hole 34 at the center, and has a ring shape as a whole. The flow suppression plate 33 is provided with four fitting holes 35 corresponding to the protrusions 32 (positions corresponding to four circumferences). The flow suppression plate 33 has the fitting holes 35 formed in the protrusions 32. Installed in a mated state.

  In a state where the flow suppression plate 33 is attached, the flow suppression plate 33 is completely submerged in the liquid 6, and the flow suppression plate 33 is not exposed even when the tilt angle measuring device 1 is tilted. It is configured.

  The flow restraining plate 33 is formed with a notched portion 36 having a convex shape from the inner edge side between the fitting holes 35 and 35 (positions corresponding to four equal circumferences). The notch 36 forms a gap 37 between the center portion 4a and the liquid 6 in and out with the flow restraining plate 33 attached.

  By providing the flow restraining plate 33, a liquid shallow portion is formed over the entire interior of the container 4 to prevent a wave from being generated on the surface of the liquid 6, and the tilt angle measuring device 1 is further tilted. In this case, since the liquid 6 flows through the gap 37, the flow resistance is large and a damping effect is exhibited. Since the flow suppression plate 33 itself has a damping effect, the flow resistance element 31 may be omitted and only the flow suppression plate 33 may be provided.

  FIG. 10 shows a modification of the third embodiment.

  In this modification, the projecting portion 36a of the notch 36 formed in the flow restraining plate 33 can be fitted into the projection 32, and the flow restraining plate 33 is at a required angle (45 ° in the drawing) with respect to the third embodiment. It is provided by rotating it.

  By fitting the projecting portion 36 a to the protrusion 32, the flow resistance element 31 becomes the position of the notch 36, and the substantial opening area of the gap 37 is reduced. Accordingly, the flow resistance is further increased and the damping effect is also increased. Further, since the fitting hole 35 is fully opened and the liquid 6 flows in and out from the fitting hole 35, the outflow and inflow are dispersed, and the flow state of the liquid 6 is averaged.

  As described above, in this embodiment, since the damping effect is large, it is possible to use the liquid 6 having a low viscosity. Use of the liquid 6 having a low viscosity leads to an improvement in followability, and an improvement in workability of leveling work in the apparatus using the tilt angle measuring apparatus 1 can be achieved.

  The liquid 6 used in the conventional tilt sensor has a viscosity of 100 cSt, but in this embodiment, the liquid 6 having a viscosity of 50 cSt can be used.

  Furthermore, since the liquid 6 having a low viscosity can be used, efficient use in a cold region with a high latitude is possible.

  FIG. 11 shows the vibration suppression effect corresponding to the second and third embodiments described above in a vibration environment. In FIG. 11, 50 cSt silicon oil is used in the second and third embodiments, and 100 cSt silicon oil is used in the conventional tilt sensor.

  In FIG. 11, the accumulation time indicates the time (exposure time) during which a light reception signal is captured from the light receiving element 16, and the error rate indicates the error occurrence rate under vibration environment (the occurrence of a tilt pattern reading error that occurred during the accumulation time). Rate). Further, the conventional tilt sensor indicates a flat bottom surface of a container for storing liquid.

  As shown in FIG. 11, in the conventional tilt sensor, the accumulation time is set to 30 ms from the attenuation state of the liquid 6 (viscosity: 100 cSt). With this accumulation time, the error occurrence rate in the vibration environment Is 27%.

  On the other hand, despite the fact that the viscosity of the liquid 6 is lowered to 50 cSt, in the second and third embodiments, the accumulation time is 42 ms and the error rate is 25% in the vibration environment. If the storage time is 40 ms or less, the error rate is lower than that of the conventional tilt sensor, and a good result with respect to vibration is obtained.

  Therefore, the viscosity of the liquid 6 can be lowered, and an excellent effect that the high responsiveness of the tilt angle measuring apparatus 1 can be obtained even in a low temperature environment is exhibited.

  12 and 13 show a measuring apparatus 41 provided with the tilt angle measuring apparatus 1 according to this embodiment. FIG. 12 shows a total station as an example of a measuring apparatus.

  In FIG. 12, reference numeral 42 denotes a support for a measuring device such as a tripod, and 43 denotes a leveling part.

  The measuring device main body 44 is provided on the support portion 42 via the leveling portion 43, and the measuring device main body 44 is rotatable about the vertical axis with respect to the leveling portion 43. .

  The measurement apparatus main body 44 mainly includes a frame part 45 and a telescope part 46. The telescope unit 46 is provided on the mount unit 45 via a horizontal shaft 47, and the telescope unit 46 can be rotated all around via the horizontal shaft 47.

  Inside the gantry 45, a driving unit 48 including a horizontal rotation driving unit that horizontally rotates the measuring device 41, a vertical driving unit that rotates the telescope unit 46 in the vertical direction, a horizontal angle and a vertical A direction angle detector 49 for detecting the angle and an inclination angle measuring device 50 for detecting the inclination angle of the measuring device main body 44 with respect to the horizontal are provided.

  Further, a control unit 51 is provided inside the rack unit 45, and the control unit 51 processes a signal from the tilt angle measuring device 50 and at the same time the leveling unit 43, the driving unit 48 and the distance measuring unit. The unit 53 (described later) and the like are controlled.

  The telescope unit 46 includes a collimating telescope 52 and the distance measuring unit 53. The distance measuring unit 53 emits distance measuring light to the measurement object via the collimating telescope 52, receives reflected light from the measurement object, and performs distance measurement based on the detection result of the reflected light. It is configured like this.

  The tilt angle measuring device 50 detects a wide range of tilt angles as a tilt sensor 54 (shown as the tilt angle measuring device 1 in FIG. 1) as a first tilt angle measuring device that detects high-precision horizontal. In addition, an acceleration sensor 55 (shown as the acceleration sensor 19 in FIG. 1) is provided as a second inclination angle measuring device that detects the inclination in the triaxial direction with high responsiveness.

  FIG. 14 shows a schematic configuration of the leveling unit 43.

  The leveling unit 43 is provided with a reference axis 57, a first leveling axis 58, and a second leveling axis 59 so as to be positioned at the apex of the triangle, and the measuring device main body 44 is centered on the reference axis 57. The first leveling shaft 58 and the second leveling shaft 59 are rotated by a first leveling motor 61 and a second leveling motor 62 (see FIG. 13), respectively. The measuring device main body 44 can be tilted in an arbitrary direction by adjusting the height. The first and second leveling motors 61 and 62 are attached with first and second encoders 63 and 64 (see FIG. 13), and the rotation speed (height adjustment amount) is set as the number of encoder pulses. Monitoring is performed by the control unit 51.

  The control unit 51 controls the leveling unit 43 based on the detection results of the tilt sensor 54 and the acceleration sensor 55 to automatically level the measuring apparatus main body 44.

  As will be described later, in the case of rough leveling (for example, leveling to within ± 10 '), the detection result of the acceleration sensor 55 is used, and precision leveling (for example, to within ± 30' '). When leveling in), the detection result of the tilt sensor 54 is used.

  When the measuring device 41 performs rough leveling (when the acceleration sensor 55 is operating), the power supply to the tilt sensor 54 is stopped, and when the leveling is performed precisely (the tilt sensor 54 operates). The power supply to the acceleration sensor 55 may be stopped. By selectively supplying power to the tilt sensor 54 and the acceleration sensor 55, power can be saved.

  An inertial induction sensor (IMU) may be used as the second tilt angle measuring device.

  Hereinafter, automatic leveling will be described with reference to FIGS. 14 (A) to 14 (C) and FIG.

  The measuring device 41 is installed at a predetermined position. Start leveling after installation.

  In the first leveling, it is assumed that the measuring device main body 44 is oriented in the reference direction with respect to the leveling unit 43. That is, the reference direction of the leveling unit 43 and the reference direction of the measuring apparatus main body 44 are matched.

  STEP: 01 The acceleration sensor 55 detects the inclination direction and the coarse inclination angle of the measurement apparatus main body 44.

  (Step 02) The detection result is input to the control unit 51, and it is determined whether or not the rough detection angle is within the leveling range by the leveling unit 43. That is, the range in which the leveling shaft can be mechanically driven is the range in which the leveling motor can rotate and is managed by the encoder pulse of the motor unit. The current position of the leveling axis can be determined from the pulse count numbers of the first and second encoders 63 and 64, and the difference up to the upper limit or the lower limit can be driven. The control unit 51 has correlation data of “pulse count number” and “tilt angle”, so that it is determined whether or not the rough detection angle is within the leveling range by the leveling unit 43.

  STEP: 10 When the rough detection angle exceeds the leveling range by the leveling unit 43, the control unit 51 issues an alarm signal, the installation posture of the measuring device 41 is inappropriate, and the support unit 42 is adjusted to notify the user of a change in posture, or a change in the installation location or the like is notified that re-installation is necessary.

  (Step 03) Further, it is determined whether or not the detection result is within the precise detection range by the tilt sensor 54, that is, whether or not the detection result is within the detection range of the detection light by the light receiving element 16.

  If the coarse tilt angle is within the precise detection range of the tilt sensor 54, STEP: 06 or later is executed, and if the coarse tilt angle is outside the precise detection range of the tilt sensor 54, STEP: 04 or later. Is executed.

  STEP: 04 When the rough detection angle is within the leveling range by the leveling unit 43, whichever of the first leveling shaft 58 and the second leveling shaft 59 is based on the detected tilt direction. It is determined whether or not to adjust. Based on the determination, the control unit 51 drives and controls the leveling unit 43, and the leveling shaft to be adjusted by the first leveling motor 61 and the second leveling motor 62 while monitoring the number of encoder pulse counts. Rotate to perform coarse leveling.

  STEP: 05 The inclination angle is detected by the acceleration sensor 55, and it is determined whether or not the rough leveling is completed. Completion of rough leveling is determined based on whether the detection result from the acceleration sensor 55 has reached the detection range (precise detection range) of the tilt sensor 54.

  STEP: 06 When it is determined that the value is within the precise detection range, the control unit 51 uses the first leveling motor 61 and the second leveling motor 62 to perform the first leveling based on the signal from the tilt sensor 54. Fine adjustment is performed by finely adjusting the quasi-axis 58 or the second leveling axis 59.

  STEP: 07 Based on the detection result of the tilt sensor 54, it is detected whether it is horizontal.

  (Step 08) When the precision leveling is completed based on the detection result from the tilt sensor 54, the automatic leveling is completed. The control unit 51 notifies the operator that automatic leveling has been completed by, for example, displaying an alarm sound or blinking display.

  Next, a case will be described in which after the predetermined measurement is completed, the installation position of the measurement device 41 is changed and the measurement is continued.

  Normally, in the state where the scheduled measurement is completed, as shown in FIG. 14C, the measuring device main body 44 is rotated by an α angle with respect to the leveling unit 43. Therefore, when performing rough leveling based on the detection result of the acceleration sensor 55, the rotation angle α is taken into consideration in determining which of the first leveling axis 58 and the second leveling axis 59 should be adjusted. There must be.

  A rotation angle of the measuring device main body 44 with respect to the leveling unit 43 is detected by the direction angle detecting unit 49. That is, the horizontal rotation angle detected by the direction angle detection unit 49 when the previous measurement is completed is stored.

  The control unit 51 determines whether the first leveling shaft 58 and the second leveling shaft 59 are based on the stored rotation angle and the tilt angle and tilt direction of the measuring device main body 44 detected by the acceleration sensor 55. Determine which should be adjusted.

  Furthermore, based on the determination result, the leveling unit 43 is controlled and driven to perform leveling. The leveling operation is the same as the leveling operation from STEP 04 to STEP 08.

  In the automatic leveling described above, first, it is determined whether or not the measuring device 41 is levelable based on the detection result of the acceleration sensor 55. If the installation position is not appropriate, it can be immediately reinstalled. It becomes. Therefore, the leveling time can be greatly reduced as compared with the case where it is determined that leveling cannot be performed as a result of the leveling operation.

  Furthermore, since the leveling is executed based on the detection result of the highly responsive acceleration sensor 55 until the inclination range capable of precise leveling is reached, the leveling state can be determined in real time, and the leveling accuracy can be determined. Leveling time to reach the possible tilt range is greatly reduced.

  Even when the measuring device 41 is re-installed, it is not necessary to reset the measuring device main body 44 to a reference position with respect to the leveling unit 43, and automatic leveling can be performed immediately and workability is improved. Leveling time is shortened.

DESCRIPTION OF SYMBOLS 1 Inclination angle measuring device 3 Support block 4 Container 4a Center part 6 Liquid 6a Free liquid level 14 1/4 (lambda) board 15 Polarizing beam splitter 16 Light receiving element 22 Tilt pattern 24 Polarizing plate 25 LED light source 28 Groove 31 Flow resistance element 33 Flow suppression board 36 Notch 41 Measurement Device 43 Leveling Unit 44 Measurement Device Main Body 46 Telescope 48 Drive Unit 49 Direction Angle Detection Unit 51 Control Unit 54 Tilt Sensor 55 Acceleration Sensor

Claims (9)

  A disk-shaped container enclosing a liquid forming a free liquid surface, a light emitting source for making detection light incident on the free liquid surface, a light receiving element for receiving the detection light reflected by the free liquid surface, and the light receiving element An inclination angle measuring device for detecting the inclination of the free liquid level based on a detection signal from the container, wherein the container is formed at the bottom, a groove formed concentrically with the center of the container, and at the center of the container, A tilt angle measuring device having a central portion raised from the groove, and storing the liquid so as to fill the groove and form a shallowest portion at the central portion.   The inclination angle measuring device according to claim 1, wherein a plurality of flow resistance elements are provided at equal intervals in the groove, and the flow resistance elements are configured to be immersed in the liquid.   The tilt angle measuring device according to claim 2, wherein the flow resistance element has an arc shape and has a flat upper surface.   A ring-shaped flow restraining plate that covers the groove is provided on the flow resistance element, and a plurality of notches are formed at equal intervals on the inner edge of the flow restraining plate. 4. The tilt angle measuring device according to claim 2, wherein the tilt angle measuring device is immersed inside.   The inclination angle measuring device according to claim 4, wherein a circumferential position of the flow resistance element and a circumferential position of the cutout portion coincide with each other.   The inclination angle measuring device according to claim 4, wherein a circumferential position of the flow resistance element is different from a circumferential position of the notch.   7. The apparatus according to claim 1, further comprising an acceleration sensor, wherein an inclination angle is detected based on a detection result of the acceleration sensor when the inclination angle detection range by the light receiving element is exceeded. Inclination angle measuring device.   A leveling unit, a measuring device main body provided in the leveling unit, a control unit, the tilt angle measuring device according to any one of claims 1 to 6 as a first tilt angle measuring device, the first A tilt angle measuring device detects a wide range of tilt angles, and further includes a second tilt angle measuring device that is more responsive than the first tilt angle measuring device, the control unit, and the first tilt angle measuring device. The second tilt angle measuring device is provided in the measuring device main body, and the control unit drives the leveling unit based on a detection result of the second tilt angle measuring device, and the second tilt angle measuring device. Is performed until the tilt angle detected by the first tilt angle measuring device is in a range that can be detected by the first tilt angle measuring device, and the measuring device main body is leveled based on the detection result of the first tilt angle measuring device. measuring device.   The control unit determines whether or not the measuring device main body can be leveled by the leveling unit based on the detection result of the second tilt angle measuring device when the measuring device is installed. The measuring apparatus according to claim 8, wherein a change in posture or a change in installation position is notified.

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