JP6783050B2 - Tilt angle measuring device and measuring device - Google Patents

Description

The present invention relates to an inclination angle measuring device and a measuring device for measuring an inclination angle of an apparatus main body.

As one of the tilt angle measuring devices, there is a tilt angle measuring device that utilizes the fact that the free liquid level is maintained horizontal.

As an inclination angle measuring device that utilizes the free liquid level, for example, there is a tilt sensor.

In the tilt sensor, the free liquid level is tilted relative to the device body by tilting the device body provided with the tilt sensor.

By incidenting the detection light on the free liquid surface, receiving the detection light reflected on the free liquid surface, and detecting the change in the light receiving position due to the inclination of the liquid surface, the inclination angle of the liquid surface, that is, the inclination of the device body can be determined. Can be detected.

When the free liquid level is used, the followability or stability of the free liquid level to the inclination change of the inclination angle measuring device is affected by the viscosity of the liquid forming the free liquid level.

That is, when the viscosity of the liquid is lowered, the followability is improved, but the stability is lowered, and the liquid is easily affected by vibration or the like. On the contrary, as the viscosity of the liquid increases, the followability decreases and it takes time to detect the tilt angle, but the stability improves.

Further, the viscosity of the liquid is affected by the temperature, and the viscosity increases in cold regions, and the followability decreases. Therefore, in a cold region, a large amount of time is spent each time the inclination angle is detected, resulting in poor workability. For this reason, if the viscosity of the liquid is lowered assuming use in cold regions, the stability of the liquid surface at room temperature will decrease, and it will be easily affected by vibrations, etc., and the reliability of angle detection will be reduced. The sex is reduced.

Japanese Unexamined Patent Publication No. 2000-266545 Japanese Unexamined Patent Publication No. 2011-149854 Jikkenhei 5-38521 Japanese Unexamined Patent Publication No. 2001-221635

The present invention provides an inclination angle measuring device and a measuring device that suppress the vibration of the free liquid level in angle detection and improve the stability of the free liquid level.

The present invention includes a disk-shaped container in which a liquid forming a free liquid surface is sealed, a light emitting source for incident detection light on the free liquid surface, and a light receiving element for receiving the detection light reflected on the free liquid surface. An inclination angle measuring device that detects the inclination of the free liquid level based on the detection signal from the light receiving element. The container has a groove formed concentrically with the center of the container at the bottom and the center of the container. It is related to an inclination angle measuring device which is formed in the above and has a central portion raised from the groove, and the liquid is stored so as to fill the groove and form the shallowest portion in the central portion.

Further, the present invention relates to an inclination angle measuring device configured such that a plurality of flow resistance elements are projected in the groove at equal intervals, and the flow resistance elements are submerged in the liquid.

Further, the present invention relates to an inclination angle measuring device in which the flow resistance element has an arc shape and the upper surface is flat.

Further, in the present invention, a ring-shaped flow restraint plate covering the groove is provided on the flow resistance element, and a plurality of cutout portions are formed at equal intervals on the inner edge of the flow restraint plate to suppress the flow. The plate relates to an inclination angle measuring device that is submerged in the liquid.

The present invention also relates to an inclination angle measuring device in which the circumferential position of the flow resistance element and the circumferential position of the cutout portion coincide with each other.

The present invention also relates to an inclination angle measuring device in which the position of the flow resistance element in the circumferential direction and the position of the cutout portion in the circumferential direction are different.

The present invention also relates to an inclination angle measuring device that further includes an acceleration sensor and detects an inclination angle based on the detection result of the acceleration sensor when the inclination angle detection range by the light receiving element is exceeded.

Further, the present invention comprises a leveling unit, a measuring device main body provided in the leveling unit, a control unit, the tilt angle measuring device as the first tilt angle measuring device, and the first tilt angle measuring device. A second tilt angle measuring device that detects a wide range of tilt angles and is more responsive than the first tilt angle measuring device is provided, and the control unit, the first tilt angle measuring device, and the second tilting device are provided. The angle measuring device is provided in the measuring device main body, and the control unit drives the leveling unit based on the detection result of the second tilt angle measuring device, and the tilt angle detected by the second tilt angle measuring device is determined. It relates to a measuring device that performs rough leveling until the first tilt angle measuring device reaches a detectable range, and horizontally leveled the measuring device main body based on the detection result of the first tilt angle measuring device. is there.

Furthermore, in the present invention, the control unit determines whether or not the measuring device main body can be leveled by the leveling unit based on the detection result of the second tilt angle measuring device when the measuring device is installed, and adjusts the measuring device body. It relates to a measuring device that notifies a change in installation posture or a change in installation position when it is not possible to do so.

According to the present invention, a disk-shaped container in which a liquid forming a free liquid surface is sealed, a light emitting source for incident detection light on the free liquid surface, and a light receiving light for receiving the detection light reflected on the free liquid surface. An inclination angle measuring device that detects the inclination of the free liquid surface based on the element and the detection signal from the light receiving element. The container has a groove formed concentrically with the center of the container at the bottom and the container. The liquid has a central portion formed in the center of the groove and is raised from the groove, and the liquid is stored so as to fill the groove and form the shallowest portion in the central portion. Resistance is given to the flow of the liquid, and the vibration suppression effect is exhibited.

Further, according to the present invention, a plurality of flow resistance elements are provided in the groove at equal intervals, and the flow resistance elements are configured to be submerged in the liquid. Therefore, the flow resistance element causes the liquid to flow. Resistance is given to the vibration, and the vibration suppression effect is generated.

Further, according to the present invention, a ring-shaped flow restraint plate covering the groove is provided on the flow resistance element, and a plurality of notches are formed at equal intervals on the inner edge of the flow restraint plate. Since the flow suppression plate is submerged in the liquid, the flow suppression plate gives resistance to the flow of the liquid, and a vibration suppression effect is produced.

Further, according to the present invention, when the acceleration sensor is further provided and the tilt angle detection range by the light receiving element is exceeded, the tilt angle is detected based on the detection result of the acceleration sensor, so that the tilt angle can be detected in a wide range. However, the horizontal can be detected with high accuracy.

Further, according to the present invention, the leveling unit, the measuring device main body provided in the leveling unit, the control unit, the tilt angle measuring device as the first tilt angle measuring device, and the first tilt angle measurement. It is equipped with a second tilt angle measuring device that detects a wider range of tilt angles than the device and is more responsive than the first tilt angle measuring device, and includes the control unit, the first tilt angle measuring device, and the first tilt angle measuring device. The two tilt angle measuring device is provided in the measuring device main body, and the control unit drives the leveling unit based on the detection result of the second tilt angle measuring device, and the tilt detected by the second tilt angle measuring device. Rough leveling is performed until the angle is within the range that can be detected by the first tilt angle measuring device, and the measuring device main body is leveled horizontally based on the detection result of the first tilt angle measuring device. The automatic leveling can be performed with high accuracy and in a short time.

Further, according to the present invention, the control unit determines whether or not the measuring device main body can be leveled by the leveling unit based on the detection result of the second tilt angle measuring device when the measuring device is installed. Since the change of the installation posture or the change of the installation position is notified when the leveling is impossible, the excellent effect that the installation work of the measuring device can be performed quickly is exhibited.

It is sectional drawing of the inclination angle measuring apparatus which concerns on 1st Example of this invention. It is a partial cross-sectional view of the inclination angle measuring apparatus which concerns on this Example. It is an elevation schematic diagram which shows the optical system of the Example. It is a plan schematic diagram which shows the optical system of this Example. (A) is a cross-sectional view of a container of the tilt angle measuring device of the embodiment, and (B) is a cross-sectional view showing a state in which the container is tilted. It is a top view of the container of the inclination angle measuring apparatus which concerns on 2nd Example. It is sectional drawing of the container. It is a top view of the container of the inclination angle measuring apparatus which concerns on 3rd Example to which a flow restraint plate is attached. It is sectional drawing of the container which attached the flow restraint plate. It is a top view of the container which concerns on the modification of the 3rd Example which attached the flow restraint plate. It is a figure which shows the damping characteristic under the vibration environment in this Example. It is sectional drawing of the measuring apparatus which concerns on embodiment of this invention. It is a control block diagram of the measuring device. (A) is a schematic diagram of the leveling portion, (B) is a schematic diagram showing the relationship between the leveling portion and the measuring device main body, and (C) is a schematic diagram showing a state in which the measuring device main body is rotated with respect to the leveling portion. It is a figure. It is a flowchart of the automatic leveling of the measuring apparatus which concerns on this Example.

Hereinafter, examples of the present invention will be described with reference to the drawings.

The inclination angle measuring device according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 4.

The tilt angle measuring device 1 detects the horizontal with high accuracy or detects the tilt angle from the horizontal, and is used as a tilt sensor. Further, the detectable tilt angle of the tilt angle measuring device 1 is, for example, ± 2 ° with respect to the horizontal.

A liquid-tight container 4 is provided on the upper surface of the support block 3. The container 4 forms a disk-shaped space 5 inside, and the space 5 is filled with a transparent liquid 6 having a predetermined viscosity. Silicone oil or the like is used as the liquid 6.

The space 5 has a volume sufficiently large with respect to the amount of the liquid to be enclosed, and the liquid 6 has a free liquid level 6a regardless of whether the inclination angle measuring device 1 is in a horizontal state or an inclined state. Form.

An optical path hole 7 for detection light is provided on the bottom surface of the container 4, the optical path hole 7 has an axial center concentric with the center line of the container 4, and the optical path hole 7 has a condenser lens 8. , 1 / 4λ plate 14 is provided. The optical axis 9 of the condenser lens 8 coincides with the axis of the optical path hole 7.

Two optical paths orthogonal to each other are formed inside the support block 3, and the two optical paths are arranged in a plane orthogonal to the optical axis 9. A reflecting mirror 11 is provided at a position of an intersection with a plane orthogonal to the optical axis 9.

The center of one of the two optical paths is formed along the reflected optical axis 12 of the reflecting mirror 11 (see FIGS. 1 and 3), and the reflecting mirror is on the reflected optical axis 12. A condenser lens 13, a polarization beam splitter 15, and a light receiving element 16 are arranged from the 11 side.

The polarized beam splitter 15 has a property of transmitting linearly polarized light having a predetermined polarization plane and reflecting linearly polarized light having a polarization plane 90 ° different from the linearly polarized light.

The light receiving element 16 is mounted on a wiring board 17 and fixed to a side surface of the support block 3 via the wiring board 17. Further, a temperature sensor 18, an acceleration sensor 19, and the like are mounted on the wiring board 17.

A CCD, CMOS sensor, or the like is used as the light receiving element 16, and a signal at the light receiving position of the detection light and an image signal can be output based on the signals from the pixels constituting the CCD and the CMOS sensor.

Of the two optical paths, the other optical path is formed along the light projecting axis 21 (see FIGS. 2 and 4), and the light projecting axis 21 intersects the reflected optical axis 12 and is positioned at the intersection. Is provided with the polarization beam splitter 15. Therefore, the reflected optical axis 12 extends in a direction perpendicular to the polarizing beam splitter 15 (direction perpendicular to the paper surface) in FIG. 2.

A polarizing plate 24, a tilt pattern 22, a collimating lens 23, and an LED light source (light emitting source) 25 are provided on the light projecting axis 21 from the polarization beam splitter 15 side, and the LED light source 25 is the support block 3 of the support block 3. It is attached to a side surface (a surface orthogonal to the above-mentioned side surface).

In FIG. 2, the detection light emitted from the LED light source 25 is collected by the collimating lens 23 and transmitted through the tilt pattern 22 and the polarizing plate 24. By passing through the polarizing plate 24, linearly polarized light, for example, P linearly polarized light is obtained.

The detection light is reflected by the polarization beam splitter 15 in a direction perpendicular to the paper surface, and is reflected upward by the reflector 11.

After passing through the 1 / 4λ plate 14, the detection light is projected onto the free liquid surface 6a through the condenser lens 8 and further reflected by the free liquid surface 6a. When the tilt angle measuring device 1 is tilted, the free liquid level 6a is kept horizontal, so that the free liquid level 6a is tilted relative to the tilt angle measuring device 1.

Due to the inclination of the free liquid surface 6a, the detected light is reflected at an angle twice the inclination angle by the principle of photocatching. The reflection detection light is transmitted through the 1 / 4λ plate 14, then reflected by the reflector 11, passes through the condenser lens 13, and is incident on the polarization beam splitter 15. Since the detection light is transmitted twice through the 1 / 4λ plate 14 on the outward path and the return path, the reflection detection light is S linearly polarized and is transmitted through the polarization beam splitter 15.

The reflection detection light transmitted through the polarization beam splitter 15 is detected by the light receiving element 16. That is, the tilt pattern 22 is projected onto the light receiving element 16.

As described above, when the free liquid surface 6a is tilted, the reflected detection light is received by the light receiving element 16 in a state of being deviated from the reflected optical axis 12. By detecting the deviation of the light receiving position with reference to the position of the reflected optical axis 12, it is possible to detect whether the free liquid surface 6a is horizontal and the inclination angle of the free liquid surface 6a.

Further, when the tilt angle is detected with high accuracy, the angle can be detected with high accuracy by detecting the deviation amount from the displacement of the image of the tilt pattern 22.

As described above, in the tilt angle measuring device 1, when the free liquid surface 6a remains swaying at the time of tilting or the free liquid surface 6a is vibrating, the reflection direction of the detected light. The effect of vibration appears, resulting in a detection error.

In this embodiment, shaking and vibration are suppressed as follows.

The container 4 in the present embodiment will be further described with reference to FIGS. 5 (A) and 5 (B).

A ring-shaped groove 28 is formed on the bottom surface of the container 4 with the optical axis 9 as the center. Further, the central portion 4a (including the optical path hole 7 portion) of the bottom surface of the container 4 is a plane orthogonal to the optical axis 9.

The cross-sectional shape of the groove 28 is a substantially V shape such that the central portion of the groove is the deepest portion 28a. The range from the deepest portion 28a to the central portion 4a is composed of a convex curved surface 28b that gently rises from the deepest portion 28a and is in contact with the central portion 4a.

The liquid 6 stored in the container 4 is an amount that fills the groove 28 and further reaches a required liquid depth (shallowest portion) in the central portion 4a portion. Here, the liquid depth of the shallowest portion is, for example, about 1 mm.

By forming the groove 28 in the container 4 and forming the central portion 4a raised from the groove 28, the liquid depth of the portion where the detection light is incident on the free liquid surface 6a is made as shallow as possible. Can be done.

Since the liquid depth is shallow at the portion where the detection light is reflected, the shearing force due to the viscous resistance (viscous friction) of the liquid 6 strongly acts on the free liquid surface 6a. Therefore, minute vibrations and the like are less likely to be transmitted to the free liquid surface 6a, and minute waves due to vibrations at the free liquid surface 6a are less likely to be generated. Furthermore, since the liquid depth is shallow, large waves are unlikely to occur. Therefore, the stability in the stationary state is improved.

Next, when the inclination angle measuring device 1 is inclined (FIG. 5B), the right side is raised in the figure.

When the tilt angle measuring device 1 is tilted, the liquid 6 flows from right to left.

Since a sufficient amount of the liquid 6 is stored in the groove 28, a sufficient amount of liquid can be secured even if the liquid depth of the central portion 4a is shallow. Further, since the deepest portion 28a to the central portion 4a are gently continuous by the convex curved surface 28b, the liquid 6 is smoothly moved. Therefore, the vibration of the liquid itself due to the movement of the liquid 6 is suppressed.

Further, the flow of the liquid 6 due to the inclination goes over the central portion 4a and moves to the groove 28 on the opposite side. Therefore, the potential energy is consumed in the process of getting over the central portion 4a.

Further, when the liquid 6 passes through the shallowest portion, it passes through the minimum portion of the flow path cross-sectional area, and the flow velocity increases as compared with the case where the flow path cross-sectional area is constant. In addition to strongly receiving viscous resistance and shearing force from the central portion 4a, an increase in flow velocity results in an increase in viscous resistance, and the kinetic energy of the liquid 6 is consumed.

Therefore, when the liquid 6 is caused to flow due to the tilt angle measuring device 1 being tilted, a damping force strongly acts on the liquid 6. Therefore, the swinging back of the liquid is suppressed, and the liquid 6 stabilizes in a short time after tilting, and measurement becomes possible.

A second embodiment will be described with reference to FIGS. 6 and 7. 6 and 7 show the container 4. In addition, in FIGS. 6 and 7, the same reference numerals are given to those equivalent to those shown in FIGS. 1 and 2.

In the second embodiment, the damping effect is further increased by further generating resistance to the flow of the liquid 6.

In the second embodiment, the flow resistance element 31 is provided in the groove 28 to suppress the smooth flow of the liquid 6.

The flow resistance element 31 shown in the second embodiment has an arc shape concentric with the groove 28, and is projected at a position divided into four circumferences. The cross-sectional shape of the flow resistance element 31 is a substantially pentagon whose apex is the deepest position of the groove 28. A protrusion 32 is formed in the center of the upper surface of the flow resistance element 31. Further, the flow resistance element 31 has a size so as to be completely submerged in the liquid 6.

By providing the flow resistance element 31 in the groove 28, smooth flow of the liquid 6 in the groove 28 is hindered when the container 4 vibrates. Therefore, the formation of waves due to the vibration of the container 4 is suppressed, the shaking of the liquid 6 is suppressed, and the stability of the tilt detection by the tilt angle measuring device 1 is improved. Further, when the container 4 is tilted, the flow resistance element 31 also becomes a resistance to the flow of the liquid 6, and swinging back or the like is suppressed, and the liquid 6 stabilizes and measures in a short time after tilting. Is possible.

The flow resistance element 31 may give resistance to the flow of the liquid 6, and the shape is not limited to the arc shape. For example, columnar protrusions may be provided at predetermined intervals.

8 and 9 show a third embodiment.

In the third embodiment, the flow restraint plate 33 is provided so as to cover the groove 28.

The flow restraint plate 33 has a circular hole 34 in the center, and has a ring shape as a whole. The flow restraint plate 33 is provided with fitting holes 35 corresponding to the protrusions 32 at four locations (positions that divide the circumference into four equal parts), and the flow restraint plate 33 has the fitting holes 35 in the protrusions 32. It is installed in a mated state.

When the flow restraint plate 33 is attached, the flow restraint plate 33 is completely submerged in the liquid 6, and the flow restraint plate 33 is not exposed even when the inclination angle measuring device 1 is tilted. It is configured.

The flow restraining plate 33 is formed with a convex cutout portion 36 from the inner edge side between the fitting holes 35 and 35 (positions that divide the circumference into four equal parts). The cutout portion 36 forms a gap 37 through which the liquid 6 flows in and out from the central portion 4a with the flow restraining plate 33 attached.

By providing the flow restraint plate 33, a shallow liquid portion is formed over the entire inside of the container 4, waves are prevented from being generated on the surface of the liquid 6, and the tilt angle measuring device 1 is tilted. In this case, the liquid 6 flows through the gap 37, so that the flow resistance is large and the damping effect is exhibited. Since the flow restraint plate 33 itself has a damping effect, the flow resistance element 31 may be omitted and only the flow restraint plate 33 may be provided.

FIG. 10 shows a modified example of the third embodiment.

In the modified example, the protruding portion 36a of the cutout portion 36 formed in the flow suppressing plate 33 can be fitted to the protrusion 32, and the flow suppressing plate 33 has a required angle (45 ° in the figure) with respect to the third embodiment. It is provided by rotating it.

By fitting the protruding portion 36a to the protrusion 32, the flow resistance element 31 becomes the position of the cutout portion 36, and the substantially opening area of the gap 37 is reduced. Therefore, the flow resistance is further increased and the damping effect is also increased. Further, since the fitting hole 35 is fully opened and the liquid 6 flows in and out from the fitting hole 35, the inflow and outflow are dispersed and the flow state of the liquid 6 is averaged.

As described above, in this embodiment, since the damping effect is large, it is possible to use the liquid 6 having a low viscosity. The use of the liquid 6 having a low viscosity leads to an improvement in the followability, and the workability of the leveling work in the apparatus using the inclination angle measuring apparatus 1 can be improved.

The viscosity of the liquid 6 used in the conventional tilt sensor was 100 cSt, but in this embodiment, the liquid 6 having a viscosity of 50 cSt can be used.

Furthermore, since the liquid 6 having a low viscosity can be used, it can be efficiently used in a cold region having a high latitude.

FIG. 11 shows the vibration suppression effect corresponding to the above-mentioned second embodiment and the third embodiment in a vibration environment. In FIG. 11, 50 cSt of silicone oil is used in the second and third embodiments, and 100 cSt of silicone oil is used in the conventional tilt sensor.

In FIG. 11, the accumulation time indicates the time during which the light receiving signal is taken from the light receiving element 16 (exposure time), and the error rate is the error occurrence rate in a vibration environment (tilt pattern reading error occurring during the accumulation time). Rate) is shown. Further, the conventional tilt sensor indicates that the bottom surface of the container for storing the liquid is flat.

As shown in FIG. 11, in the conventional tilt sensor, the accumulation time is set to 30 ms from the attenuation state of the liquid 6 (viscosity: 100 cSt), and in this accumulation time, the error occurrence rate in the vibration environment. Is 27%.

On the other hand, in the second embodiment and the third embodiment, the accumulation time was 42 ms and the error occurrence rate was 25% in each of the second and third embodiments, even though the viscosity of the liquid 6 was lowered to 50 cSt. If it is 24% and the accumulation time is 40 ms or less, the error occurrence rate is lower than that of the conventional tilt sensor, and good results for vibration are obtained.

Therefore, the viscosity of the liquid 6 can be lowered, and the excellent effect that the high responsiveness of the tilt angle measuring device 1 can be obtained even in a low temperature environment is exhibited.

12 and 13 show a measuring device 41 including the tilt angle measuring device 1 according to the present embodiment. Further, FIG. 12 shows a total station as an example of the measuring device.

In FIG. 12, 42 indicates a support portion for a measuring device such as a tripod, and 43 indicates a leveling portion.

The measuring device main body 44 is provided on the support portion 42 via the leveling portion 43, and the measuring device main body 44 is rotatable about a vertical axis with respect to the leveling portion 43. ..

The measuring device main body 44 mainly includes a frame portion 45 and a telescope portion 46. The telescope portion 46 is provided on the suspension portion 45 via the horizontal shaft 47, and the telescope portion 46 can rotate all around the circumference via the horizontal shaft 47.

Inside the frame 45, there is a drive unit 48 including a horizontal rotation drive unit that horizontally rotates the measuring device 41, a vertical drive unit that rotationally drives the telescope unit 46 in the vertical direction, a horizontal angle, and a vertical drive unit. A azimuth angle detecting unit 49 for detecting an angle and an inclination angle measuring device 50 for detecting an inclination angle of the measuring device main body 44 with respect to the horizontal are provided.

Further, a control unit 51 is provided inside the suspension unit 45, and the control unit 51 processes a signal from the inclination angle measuring device 50 and processes the leveling unit 43, the driving unit 48, and the distance measuring unit. The unit 53 (described later) and the like are controlled.

The telescope unit 46 includes a collimation telescope 52 and the distance measuring unit 53. The ranging unit 53 emits ranging light to the object to be measured via the collimation telescope 52, receives the reflected light from the object to be measured, and performs ranging based on the detection result of the reflected light. It is configured like this.

The tilt angle measuring device 50 detects a tilt sensor 54 (shown as a tilt angle measuring device 1 in FIG. 1) as a first tilt angle measuring device for detecting horizontal with high accuracy, and a wide range of tilt angles. It also includes an acceleration sensor 55 (shown as an acceleration sensor 19 in FIG. 1) as a second tilt angle measuring device that has high responsiveness and detects tilt in the three axial directions.

FIG. 14 shows a schematic configuration of the leveling unit 43.

The leveling portion 43 is provided with a reference shaft 57, a first leveling shaft 58, and a second leveling shaft 59 so as to be located at the apex of the triangle, and the measuring device main body 44 is centered on the reference shaft 57. The first leveling shaft 58 and the second leveling shaft 59 are rotated by the first leveling motor 61 and the second leveling motor 62 (see FIG. 13), respectively. By adjusting the height, the measuring device main body 44 can be tilted in any direction. The first and second leveling motors 61 and 62 are attached with the first and second encoders 63 and 64 (see FIG. 13), and the rotation speed (height adjustment amount) is the number of encoder pulses. It is monitored by the control unit 51.

The control unit 51 controls the leveling unit 43 based on the detection results of the tilt sensor 54 and the acceleration sensor 55 to automatically level the measuring device main body 44.

As will be described later, in the case of coarse leveling (eg, leveling within ± 10 ′), the detection result of the acceleration sensor 55 is used and precision leveling (example: within ± 30 ″). When performing leveling), the detection result of the tilt sensor 54 is used.

In the case of rough leveling (the state in which the acceleration sensor 55 is operating), the measuring device 41 stops supplying power to the tilt sensor 54, and in the case of precision leveling (the tilt sensor 54 operates). In this state), the power supply to the acceleration sensor 55 may be stopped. Electric power can be saved by selectively supplying electric power to the tilt sensor 54 and the acceleration sensor 55.

An inertial guidance sensor (IMU) may be used as the second inclination angle measuring device.

Hereinafter, automatic leveling will be described with reference to FIGS. 14 (A) to 14 (C) and FIG.

The measuring device 41 is installed at a predetermined position. Start leveling after installation.

In the first leveling, it is assumed that the measuring device main body 44 faces the leveling portion 43 in the reference direction. That is, the reference direction of the leveling unit 43 and the reference direction of the measuring device main body 44 match.

STEP: 01 The acceleration sensor 55 detects the tilt direction and the coarse tilt angle of the measuring device main body 44.

STEP: 02 The detection result is input to the control unit 51, and it is determined whether or not the coarse detection angle is within the leveling range of the leveling unit 43. That is, the range in which the leveling shaft can be mechanically driven is the range in which the leveling motor can rotate and the range controlled by the encoder pulse of the motor unit. The current position of the leveling axis is known from the pulse counts of the first and second encoders 63 and 64, and the difference up to the upper limit or the lower limit is within the driveable range. Since the control unit 51 has the correlation data of the "pulse count number" and the "tilt angle", it is determined whether or not the coarse detection angle is within the leveling range of the leveling unit 43.

STEP: 10 When the coarse detection angle exceeds the leveling range by the leveling unit 43, the control unit 51 issues an alarm signal, the installation posture of the measuring device 41 is inappropriate, and the support unit Adjust 42 to give a notification to encourage a change in posture, or to notify that re-installation is necessary, such as changing the installation location.

STEP: 03 Further, it is determined whether or not the detection result is within the precision detection range by the tilt sensor 54, that is, whether or not it is within the detection range of the detection light by the light receiving element 16.

If the coarse tilt angle is within the precision detection range of the tilt sensor 54, STEP: 06 or later is executed, and if the rough tilt angle is outside the precision detection range of the tilt sensor 54, STEP: 04 or later is executed. Is executed.

STEP: 04 When the coarse detection angle is within the leveling range of the leveling unit 43, which of the first leveling axis 58 and the second leveling axis 59 is based on the detected inclination direction. Is determined whether to adjust. Based on the determination, the control unit 51 drives and controls the leveling unit 43, and while monitoring the count number of the encoder pulse, the leveling axis to be adjusted by the first leveling motor 61 and the second leveling motor 62. Rotate to perform rough leveling.

STEP: 05 The inclination angle is detected by the acceleration sensor 55, and it is determined whether or not the rough leveling is completed. Completion of rough leveling is determined by whether the detection result from the acceleration sensor 55 reaches the detection range (precision detection range) of the tilt sensor 54.

STEP: 06 When it is determined that the precision detection range is within the range, the control unit 51 uses the signal from the tilt sensor 54 to perform the first leveling by the first leveling motor 61 and the second leveling motor 62. The quasi-axis 58 or the second leveling axis 59 is finely adjusted to perform precision leveling.

STEP: 07 Whether it is horizontal or not is detected based on the detection result of the tilt sensor 54.

STEP: 08 Based on the detection result from the tilt sensor 54, when the precise leveling is completed, the automatic leveling is completed. The control unit 51 notifies the operator that the automatic leveling has been completed by making an alarm sound or blinking display.

Next, a case where the installation position of the measuring device 41 is changed and the measurement is continued after the predetermined measurement is completed will be described.

Normally, in the state where the scheduled measurement is completed, as shown in FIG. 14C, the measuring device main body 44 is rotated by an α angle with respect to the leveling portion 43. Therefore, when performing rough leveling based on the detection result of the acceleration sensor 55, the rotation angle α is taken into consideration in determining which of the first leveling axis 58 and the second leveling axis 59 should be adjusted. There must be.

The rotation angle of the measuring device main body 44 with respect to the leveling unit 43 is detected by the direction angle detecting unit 49. That is, the horizontal rotation angle detected by the direction angle detection unit 49 at the time when the pre-measurement is completed is stored.

The control unit 51 of the first leveling axis 58 and the second leveling axis 59 based on the stored rotation angle, the inclination angle of the measuring device main body 44 detected by the acceleration sensor 55, and the inclination direction. Decide which one to adjust.

Further, based on the determination result, the leveling unit 43 is controlled and driven to perform leveling. The leveling operation is the same as the leveling operation from STEP: 04 to STEP: 08.

In the above-mentioned automatic leveling, first, it is determined whether or not the measuring device 41 can be leveled based on the detection result of the acceleration sensor 55. Therefore, if the installation position is not appropriate, it can be immediately re-installed. It becomes. Therefore, as a result of executing the leveling operation, it is possible to significantly shorten the leveling time as compared with the case where it is determined that the leveling could not be performed.

Further, since the leveling is executed based on the detection result of the highly responsive acceleration sensor 55 until the inclination range where the precise leveling is possible is reached, the leveling state can be determined in real time, and the precision leveling can be performed. The leveling time to reach the possible tilt range is significantly reduced.

Further, even when the measuring device 41 is re-installed, it is not necessary to reset the measuring device main body 44 to the reference position with respect to the leveling unit 43, and automatic leveling can be performed immediately, and workability is good. Leveling time is shortened.

1 Tilt angle measuring device 3 Support block 4 Container 4a Central part 6 Liquid 6a Free liquid level 14 1 / 4λ plate 15 Polarization beam splitter 16 Receiving element 22 Tilt pattern 24 Polarizing plate 25 LED light source 28 Groove 31 Flow resistance element 33 Flow suppression plate 36 Notch 41 Measuring device 43 Leveling unit 44 Measuring device body 46 Telescope unit 48 Drive unit 49 Direction angle detection unit 51 Control unit 54 Tilt sensor 55 Acceleration sensor

Claims (9)

A disk-shaped container in which a liquid forming a free liquid surface is sealed, a light emitting source for incident detection light on the free liquid surface, a light receiving element for receiving the detected light reflected on the free liquid surface, and the light receiving element. An inclination angle measuring device that detects the inclination of the free liquid level based on a detection signal from the container, wherein the container is formed at the bottom, a groove formed concentrically with the center of the container, and the center of the container. It has a central portion that rises from the groove, and the liquid is stored so as to fill the groove and form the shallowest portion at the central portion.
An inclination angle measuring device configured such that a plurality of flow resistance elements are projected from the groove at equal intervals, and the flow resistance elements are submerged in the liquid. The inclination angle measuring device according to claim 1 , wherein the flow resistance element has an arc shape and a flat upper surface. A ring-shaped flow restraint plate covering the groove is provided on the flow resistance element, and a plurality of notches are formed at equal intervals on the inner edge of the flow restraint plate, and the flow restraint plate is the liquid. The tilt angle measuring device according to any one of claims 1 and 2 , which is designed to be submerged in the inside. The tilt angle measuring device according to claim 3 , wherein the position in the circumferential direction of the flow resistance element and the position in the circumferential direction of the cutout portion coincide with each other. The tilt angle measuring device according to claim 3 , wherein the position in the circumferential direction of the flow resistance element and the position in the circumferential direction of the cutout portion are different. The method according to any one of claims 1 to 5 , wherein an acceleration sensor is further provided, and when the tilt angle detection range by the light receiving element is exceeded, the tilt angle is detected based on the detection result of the acceleration sensor. Tilt angle measuring device. The leveling unit, the measuring device main body provided in the leveling unit, the control unit, the tilt angle measuring device according to any one of claims 1 to 5 as the first tilt angle measuring device, and the first tilt angle measuring device. The control unit and the first tilt angle measuring device are provided with a second tilt angle measuring device that detects a wider range of tilt angles than the first tilt angle measuring device and has a higher response than the first tilt angle measuring device. The second tilt angle measuring device is provided in the measuring device main body, and the control unit drives the leveling unit based on the detection result of the second tilt angle measuring device, and the second tilt angle measuring device. Rough leveling is executed until the tilt angle detected by the first tilt angle measuring device is within a detectable range of the first tilt angle measuring device, and the measuring device main body is leveled horizontally based on the detection result of the first tilt angle measuring device. measuring device. A leveling unit, a measuring device main body provided in the leveling unit, a control unit, a first tilt angle measuring device, and a wider range of tilt angles than the first tilt angle measuring device are detected, and further, the first tilt angle is detected. A second tilt angle measuring device having a higher response than the tilt angle measuring device is provided, and the control unit, the first tilt angle measuring device, and the second tilt angle measuring device are provided in the measuring device main body. ,
The first tilt angle measuring device has a disk-shaped container in which a liquid forming a free liquid surface is sealed, a light emitting source for incident detection light on the free liquid surface, and detection light reflected on the free liquid surface. A light receiving element that receives light and an inclination angle measuring device that detects the inclination of the free liquid surface based on a detection signal from the light receiving element. The container has a groove formed at the bottom concentrically with the center of the container. The liquid has a central portion formed in the center of the container, raised from the groove, and formed in a plane orthogonal to the center line of the container, and the liquid fills the groove and is the shallowest in the central portion. Accumulated to form a part,
The control unit drives the leveling unit based on the detection result of the second tilt angle measuring device, and the tilt angle detected by the second tilt angle measuring device is within the range that the first tilt angle measuring device can detect. A measuring device that performs rough leveling until it reaches the point where the measuring device body is leveled horizontally based on the detection result of the first tilt angle measuring device. When the measuring device is installed, the control unit determines whether or not the measuring device main body can be leveled based on the detection result of the second tilt angle measuring device, and is installed when the leveling is not possible. The measuring device according to claim 7 or 8 , which notifies a change in posture or a change in installation position.

Images