JP2017074800A - Liquid jet head and liquid jet device - Google Patents

Liquid jet head and liquid jet device Download PDF

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JP2017074800A
JP2017074800A JP2017020588A JP2017020588A JP2017074800A JP 2017074800 A JP2017074800 A JP 2017074800A JP 2017020588 A JP2017020588 A JP 2017020588A JP 2017020588 A JP2017020588 A JP 2017020588A JP 2017074800 A JP2017074800 A JP 2017074800A
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support frame
liquid
substrate
detection element
temperature detection
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JP6527894B2 (en
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行弘 佐賀
Yukihiro Saga
行弘 佐賀
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SII Printek Inc
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SII Printek Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/08—Embodiments of or processes related to ink-jet heads dealing with thermal variations, e.g. cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/10—Finger type piezoelectric elements

Abstract

PROBLEM TO BE SOLVED: To provide a liquid jet head which detects temperature close to temperature of liquid actually discharged.SOLUTION: A liquid jet head 1 includes: a liquid compression plate 2 including a substrate end surface Ta, a substrate side surface Tb intersecting with the substrate end surface Ta, and a plurality of channels C which open to the substrate end surface Ta and apply pressure to liquid; a support frame 3 fixed to the substrate side surface Tb; and a temperature sensor 4 which contacts with the support frame 3. The temperature sensor 4 contacts with the support frame 3, thereby, the temperature sensor is able to detect averaged temperature of the liquid actually discharged.SELECTED DRAWING: Figure 1

Description

本発明は、被記録媒体に液滴を噴射して記録する液体噴射ヘッド及び液体噴射装置に関する。   The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject and record liquid droplets on a recording medium.

近年、記録紙等にインク滴を吐出して文字や図形を記録する、或いは素子基板の表面に液体材料を吐出して機能性薄膜を形成するインクジェット方式の液体噴射ヘッドが利用されている。この方式は、インクや液体材料などの液体を液体タンクから供給管を介してチャンネルに導き、チャンネルに充填される液体に圧力を印加してチャンネルに連通するノズルから液体を吐出する。液体の吐出の際には、液体噴射ヘッドや被記録媒体を移動させて文字や図形を記録する、或いは所定形状の機能性薄膜を形成する。   In recent years, an ink jet type liquid ejecting head has been used in which ink droplets are ejected onto recording paper or the like to record characters and figures, or a liquid material is ejected onto the surface of an element substrate to form a functional thin film. In this method, a liquid such as ink or a liquid material is guided from a liquid tank to a channel via a supply pipe, pressure is applied to the liquid filled in the channel, and the liquid is discharged from a nozzle communicating with the channel. When discharging the liquid, the liquid ejecting head or the recording medium is moved to record characters and figures, or a functional thin film having a predetermined shape is formed.

この種の液体噴射ヘッドはサーマル方式やピエゾ方式が知られている。サーマル方式の液体噴射ヘッドは、チャンネル内に発熱体を設置し、発熱体を急激に加熱して液体に蒸気泡を発生させ、この蒸気泡の圧力を利用してノズルから液滴を吐出する。ピエゾ方式の液体噴射ヘッドは、チャンネルの側壁の一部をピエゾ素子により形成し、側壁を急激に変形させて内部の液体に圧力波を発生させてノズルから液滴を吐出する。   As this type of liquid jet head, a thermal method and a piezo method are known. In a thermal type liquid jet head, a heating element is installed in a channel, the heating element is rapidly heated to generate vapor bubbles in the liquid, and droplets are ejected from the nozzles using the pressure of the vapor bubbles. In a piezo-type liquid ejecting head, a part of a side wall of a channel is formed by a piezo element, and the side wall is rapidly deformed to generate a pressure wave in an internal liquid, thereby ejecting a droplet from a nozzle.

液体噴射ヘッドは記録品質の一層の向上が求められている。例えば、液体はその温度が変化すると粘性が変化し、ノズルから吐出される液滴の液量や吐出速度が変化する。液滴の液量が変化すると、被記録媒体上に濃淡となって表れ、記録品質を低下させる。また、液滴の吐出速度が変化すると、被記録媒体上の着弾位置が変動し、やはり記録品質の低下となって表れる。液体噴射ヘッドは、ヘッド部に駆動信号を供給する駆動回路やチャンネルの側壁を構成するピエゾ素子が発熱源となって液体の温度を変化させる。   Liquid jet heads are required to further improve recording quality. For example, when the temperature of the liquid changes, the viscosity changes, and the amount of liquid discharged from the nozzle and the discharge speed change. When the liquid volume of the droplet changes, it appears as a shading on the recording medium, and the recording quality deteriorates. Further, when the droplet discharge speed changes, the landing position on the recording medium changes, which also appears as a reduction in recording quality. In the liquid ejecting head, a driving circuit that supplies a driving signal to the head unit and a piezo element that forms a side wall of the channel change the temperature of the liquid using a heat generation source.

特許文献１では、吐出する液体の温度管理を行うために、液体噴射ヘッドに温度センサを設置することが記載される。図１１は、特許文献１に記載されるヘッドチップ１２１（液体噴射ヘッド）の側面図である。ヘッドチップ１２１は、液滴を吐出する吐出部１７０と、吐出部１７０を駆動するための駆動回路１２５が設置される駆動回路基板１２６と、吐出部１７０と駆動回路基板１２６とを信号線１２８を介して電気的に接続するフレキシブルプリント基板１２７とを備える。そして、フレキシブルプリント基板１２７には温度センサ１５０がランド１２９ｄに設置され、ランド１２９ｄは第二接続配線１２９ｂ、貫通配線１２９ｃ、第一接続配線１２９ａからなる接続配線１２９を介して駆動回路基板１２６に接続される。温度センサ１５０はサーミスタからなり、温度変化に応じて抵抗が変化し、温度を検出することができる。   Patent Document 1 describes that a temperature sensor is installed in a liquid ejecting head in order to perform temperature management of liquid to be discharged. FIG. 11 is a side view of a head chip 121 (liquid ejecting head) described in Patent Document 1. The head chip 121 includes a discharge unit 170 that discharges droplets, a drive circuit board 126 on which a drive circuit 125 for driving the discharge unit 170 is installed, and a signal line 128 that connects the discharge unit 170 and the drive circuit board 126 to each other. And a flexible printed circuit board 127 that is electrically connected through the wiring board. A temperature sensor 150 is installed on the land 129d on the flexible printed circuit board 127, and the land 129d is connected to the drive circuit board 126 via the connection wiring 129 including the second connection wiring 129b, the through wiring 129c, and the first connection wiring 129a. Is done. The temperature sensor 150 is formed of a thermistor, and the resistance changes according to the temperature change, and the temperature can be detected.

なお、吐出部１７０は、アクチュエータプレート１３０と、アクチュエータプレート１３０に設置され、インク導入孔１３１ａを備えるカバープレート１３１と、フレキシブルプリント基板１２７及びアクチュエータプレート１３０の吐出側の外周に設置される支持プレート１３２と、これらの端面に設置されるノズルプレート１３３とを備える。また、駆動回路基板１２６は、アクチュエータプレート１３０の駆動信号を生成する駆動回路１２５と温度センサ１５０に与える電圧を設定する駆動電圧値設定手段１６０が設置される。   The ejection unit 170 is installed on the actuator plate 130, the actuator plate 130, the cover plate 131 including the ink introduction holes 131a, and the support plate 132 installed on the outer periphery of the flexible printed circuit 127 and the actuator plate 130 on the ejection side. And a nozzle plate 133 installed on these end faces. The drive circuit board 126 is provided with a drive circuit 125 that generates a drive signal for the actuator plate 130 and a drive voltage value setting unit 160 that sets a voltage to be applied to the temperature sensor 150.

特開２０１０−１３１８５０号公報JP 2010-131850 A

特許文献１のヘッドチップ１２１では、温度センサ１５０はフレキシブルプリント基板１２７に設置される。しかし、フレキシブルプリント基板１２７はアクチュエータプレート１３０から離れているので、アクチュエータプレート１３０のチャンネルを流れるインクの温度を測っていることにならない。また、アクチュエータプレート１３０の他に駆動回路１２５も熱源となるので、温度センサ１５０は駆動回路１２５の発熱の影響を受ける。   In the head chip 121 of Patent Document 1, the temperature sensor 150 is installed on the flexible printed circuit board 127. However, since the flexible printed circuit board 127 is separated from the actuator plate 130, the temperature of the ink flowing through the channel of the actuator plate 130 is not measured. In addition to the actuator plate 130, the drive circuit 125 also serves as a heat source, so that the temperature sensor 150 is affected by the heat generated by the drive circuit 125.

本発明の液体噴射装置は、基板端面と、前記基板端面と交差する基板側面と、前記基板端面に開口し液体に圧力を印加する複数のチャンネルと、を備える液体加圧プレートと、前記基板側面に固定される支持枠と、前記支持枠に接触する温度センサと、を備えることとした。   The liquid ejecting apparatus according to the aspect of the invention includes a liquid pressurizing plate including a substrate end surface, a substrate side surface intersecting the substrate end surface, and a plurality of channels that open to the substrate end surface and apply pressure to the liquid, and the substrate side surface And a temperature sensor in contact with the support frame.

また、前記温度センサは、電極が形成されるフレキシブル基板と、前記フレキシブル基板の第一面に設置される温度検出素子と、を有し、前記温度検出素子が設置される近傍の前記フレキシブル基板が前記支持枠に接触することとした。   The temperature sensor includes a flexible substrate on which an electrode is formed, and a temperature detection element installed on the first surface of the flexible substrate, and the flexible substrate in the vicinity where the temperature detection element is installed The support frame was touched.

また、前記フレキシブル基板は、前記第一面とは反対側の第二面が前記支持枠に接触することとした。   In the flexible substrate, the second surface opposite to the first surface is in contact with the support frame.

また、前記温度センサは、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に接触することとした。   The temperature sensor is in contact with a third surface of the support frame opposite to the side where the channel opens.

また、前記基板側面に固定され、前記支持枠の前記第三面に当接する流路部材を更に備え、前記流路部材は前記支持枠の側の第四面に切欠き部を有し、前記温度検出素子は前記切欠き部と前記第三面により囲まれる領域に収納されることとした。   Further, the flow path member is fixed to the side surface of the substrate and abuts against the third surface of the support frame, and the flow path member has a notch on the fourth surface on the support frame side, The temperature detection element is accommodated in a region surrounded by the notch and the third surface.

また、前記支持枠は前記第三面に凹部を有し、前記凹部に前記温度検出素子が収納されることとした。   The support frame has a recess on the third surface, and the temperature detecting element is accommodated in the recess.

また、前記基板側面に固定され、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に当接する流路部材を更に備え、前記流路部材は前記凹部の開口の一部を覆うこととした。   In addition, a flow path member fixed to the side surface of the substrate and contacting a third surface of the support frame opposite to the side where the channel opens is provided, and the flow path member has a part of the opening of the recess. I decided to cover it.

また、前記流路部材は、前記支持枠の側の第四面の前記凹部が開口する位置に切欠き部を有し、前記温度検出素子は、前記切欠き部を通して前記凹部に収納されることとした。   The flow path member has a notch at a position where the recess on the fourth surface on the support frame side opens, and the temperature detecting element is housed in the recess through the notch. It was.

また、前記凹部は側面に段差部を有し、前記フレキシブル基板は前記段差部に装着され、前記温度検出素子は前記フレキシブル基板の前記凹部の側であり前記凹部の底面及び側面から離間して設置されることとした。   The concave portion has a stepped portion on a side surface, the flexible substrate is mounted on the stepped portion, and the temperature detecting element is on the concave portion side of the flexible substrate and is spaced apart from the bottom surface and the side surface of the concave portion. It was decided to be done.

また、前記フレキシブル基板は長尺形状を有し、前記温度検出素子は前記長尺形状の一方の端部よりも手前側に設置され、前記長尺形状の一方の端部は前記温度検出素子が設置される側に折れ曲がって前記温度検出素子に被さることとした。   The flexible substrate has a long shape, the temperature detection element is installed on the near side of one end of the long shape, and the one end of the long shape has the temperature detection element. The temperature detecting element is bent on the side where it is installed.

また、前記長尺形状の一方の端部は複数の枝部に分岐し、前記温度検出素子は前記分岐した枝部の基部に設置され、複数の前記枝部が前記温度検出素子の設置される側に折れ曲がって前記温度検出素子に被さることとした。   One end of the elongated shape branches into a plurality of branches, the temperature detection element is installed at the base of the branched branch, and the plurality of branches are installed in the temperature detection element. It was decided to bend to the side and cover the temperature detecting element.

また、前記基板側面に固定され、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に当接する流路部材を更に備え、前記支持枠は前記第三面に凹部を有し、前記温度検出素子は前記凹部に収納され、前記フレキシブル基板は、前記第一面とは反対側の第二面が前記凹部の一方の側の側面に接触し、前記端部の先端が前記凹部の他方の側の側面と前記流路部材の前記支持枠の側の第四面とに当接することとした。   The support frame further includes a flow path member fixed to the side surface of the substrate and contacting a third surface of the support frame opposite to the side where the channel opens. The support frame has a recess on the third surface. The temperature detecting element is housed in the recess, and the flexible substrate has a second surface opposite to the first surface in contact with a side surface on one side of the recess, and a tip of the end is the recess. The side surface of the other side and the fourth surface of the flow path member on the side of the support frame are brought into contact with each other.

また、前記流路部材は前記支持枠の側の第四面の前記凹部が開口する位置に切欠き部を有することとした。   Further, the flow path member has a notch at a position where the concave portion of the fourth surface on the support frame side opens.

また、前記基板側面に固定され、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に当接する流路部材を更に備え、前記流路部材は、前記支持枠の側の第四面の前記基板側面の側に切欠き部を有し、前記支持枠は前記第三面に凹部を有し、前記切欠き部と前記凹部とは連通し、前記フレキシブル基板は長尺形状を有し、前記温度検出素子は、前記長尺形状の一方の端部よりも手前側に設置されて前記凹部に収納され、前記長尺形状の一方の端部は前記温度検出素子の設置される側とは反対側に折れ曲がり、前記端部の先端が前記切欠き部の内面に当接し、前記端部の先端と前記温度検出素子との間の前記フレキシブル基板が前記支持枠に接触することとした。   In addition, a flow path member fixed to the side surface of the substrate and in contact with a third surface of the support frame opposite to the side on which the channel opens is provided, and the flow path member is provided on the support frame side. The four sides have a notch on the side of the substrate, the support frame has a recess on the third surface, the notch and the recess communicate with each other, and the flexible substrate has an elongated shape. The temperature detection element is installed on the near side of the one end of the elongated shape and is stored in the recess, and the one end of the elongated shape is installed on the temperature detection element The end of the end is in contact with the inner surface of the notch, and the flexible substrate between the end of the end and the temperature detecting element is in contact with the support frame; did.

また、前記凹部に熱伝導性樹脂が充填されることとした。   Further, the concave portion is filled with a heat conductive resin.

本発明の液体噴射装置は、上記液体噴射ヘッドと、前記液体噴射ヘッドと被記録媒体とを相対的に移動させる移動機構と、前記液体噴射ヘッドに液体を供給する液体供給管と、前記液体供給管に前記液体を供給する液体タンクと、を備えることとした。   The liquid ejecting apparatus according to the aspect of the invention includes the liquid ejecting head, a moving mechanism that relatively moves the liquid ejecting head and the recording medium, a liquid supply pipe that supplies liquid to the liquid ejecting head, and the liquid supply And a liquid tank for supplying the liquid to the pipe.

本発明による液体噴射ヘッドは、基板端面と、基板端面と交差する基板側面と、基板端面に開口し液体に圧力を印加する複数のチャンネルと、を備える液体加圧プレートと、基板側面に固定される支持枠と、支持枠に接触する温度センサと、を備える。温度センサは液体加圧プレートに固定される支持枠に接触するので、液体の実際の温度に近い温度を検出することができる。   A liquid jet head according to the present invention is fixed to a substrate side surface, a liquid pressure plate including a substrate end surface, a substrate side surface intersecting the substrate end surface, and a plurality of channels that open to the substrate end surface and apply pressure to the liquid. And a temperature sensor in contact with the support frame. Since the temperature sensor contacts the support frame fixed to the liquid pressurizing plate, it is possible to detect a temperature close to the actual temperature of the liquid.

本発明の第一実施形態に係る液体噴射ヘッドの断面模式図である。FIG. 3 is a schematic cross-sectional view of the liquid jet head according to the first embodiment of the present invention. 本発明の第二実施形態に係る液体噴射ヘッドの前方斜め上方から見る模式的な部分斜視図である。FIG. 9 is a schematic partial perspective view of the liquid jet head according to the second embodiment of the present invention as viewed from the front and obliquely above. 本発明の第三実施形態に係る液体噴射ヘッドの断面模式図である。FIG. 9 is a schematic cross-sectional view of a liquid jet head according to a third embodiment of the present invention. 本発明の第四実施形態に係る液体噴射ヘッドの断面模式図である。FIG. 10 is a schematic cross-sectional view of a liquid jet head according to a fourth embodiment of the present invention. 本発明の第五実施形態に係る液体噴射ヘッドの断面模式図である。FIG. 10 is a schematic cross-sectional view of a liquid jet head according to a fifth embodiment of the present invention. 本発明の第六実施形態に係る液体噴射ヘッドを説明するための図である。It is a figure for demonstrating the liquid jet head which concerns on 6th embodiment of this invention. 本発明の液体噴射ヘッドに使用する温度センサの変形例を表す。The modification of the temperature sensor used for the liquid jet head of this invention is represented. 本発明の第七実施形態に係る液体噴射ヘッドの断面模式図である。FIG. 10 is a schematic cross-sectional view of a liquid jet head according to a seventh embodiment of the present invention. 本発明の第八実施形態に係る液体噴射ヘッドの説明図である。It is explanatory drawing of the liquid jet head which concerns on 8th embodiment of this invention. 本発明の第九実施形態に係る液体噴射装置の模式的な斜視図である。FIG. 10 is a schematic perspective view of a liquid ejecting apparatus according to a ninth embodiment of the present invention. 従来公知の液体噴射ヘッドの側面図である。It is a side view of a conventionally known liquid jet head.

（第一実施形態）
図１は本発明の第一実施形態に係る液体噴射ヘッド１の断面模式図である。この第一実
施形態を用いて本発明の基本的な構成を説明する。 (First embodiment)
FIG. 1 is a schematic cross-sectional view of a liquid jet head 1 according to the first embodiment of the present invention. The basic configuration of the present invention will be described using this first embodiment.

図１に示すように、液体噴射ヘッド１は液体加圧プレート２と、液体加圧プレート２に固定される支持枠３と、支持枠３に接触する温度センサ４とを備える。液体加圧プレート２は、基板端面Ｔａと基板端面Ｔａと交差する基板側面Ｔｂと、基板端面Ｔａに開口し、内部に充填される液体に圧力を印加する複数のチャンネルＣとを備える。複数のチャンネルＣには吐出用の液体が充填される。支持枠３は図示しないベース部材に接着剤により固定され、このベース部材がキャリッジ等にネジ等で固定される。   As shown in FIG. 1, the liquid ejecting head 1 includes a liquid pressurizing plate 2, a support frame 3 fixed to the liquid pressurizing plate 2, and a temperature sensor 4 in contact with the support frame 3. The liquid pressurizing plate 2 includes a substrate end surface Ta, a substrate side surface Tb intersecting the substrate end surface Ta, and a plurality of channels C that open to the substrate end surface Ta and apply pressure to the liquid filled therein. The plurality of channels C are filled with a discharge liquid. The support frame 3 is fixed to a base member (not shown) with an adhesive, and this base member is fixed to a carriage or the like with screws or the like.

ここで、液体加圧プレート２は、チャンネルＣの側壁に圧電体を用い、駆動信号に基づいて側壁を変形させて内部液体に圧力波を生成するピエゾ方式であってもよいし、チャンネルＣ内に発熱体を設け駆動信号に基づいてチャンネルＣ内に蒸気泡を生成するサーマル方式であってもよい。支持枠３は、ステンレス、アルミニウム等の金属材料や、熱伝導性プラスチック材料等からなる熱伝導性材料を使用することができる。温度センサ４は、支持枠３に接触して支持枠３の温度検出を可能とするものであればよい。なお、「温度センサ４が支持枠３に接触する」とは、温度センサ４を構成する温度検出素子４ａや、温度検出素子４ａを搭載し温度検出素子４ａの近傍のフレキシブル基板４ｂが支持枠３に直接接触する場合の他に、温度検出素子４ａや温度検出素子４ａの近傍のフレキシブル基板４ｂが接着剤を介して支持枠３に固定される場合も含む。以下同じである。   Here, the liquid pressurizing plate 2 may be a piezo method in which a piezoelectric body is used for the side wall of the channel C, and the side wall is deformed based on a drive signal to generate a pressure wave in the internal liquid. A thermal system may be used in which a heating element is provided in the channel C and vapor bubbles are generated in the channel C based on a drive signal. The support frame 3 can use a heat conductive material made of a metal material such as stainless steel or aluminum, or a heat conductive plastic material. The temperature sensor 4 only needs to be capable of detecting the temperature of the support frame 3 by contacting the support frame 3. “The temperature sensor 4 is in contact with the support frame 3” means that the temperature detection element 4a constituting the temperature sensor 4 or the flexible substrate 4b mounted with the temperature detection element 4a and in the vicinity of the temperature detection element 4a is supported by the support frame 3. In addition to direct contact with the temperature detection element 4a, the temperature detection element 4a and the flexible substrate 4b in the vicinity of the temperature detection element 4a are also fixed to the support frame 3 via an adhesive. The same applies hereinafter.

これにより、チャンネルＣに近接する部材の温度を検出するので、実際の液体温度に近い温度を検出することができる。また、温度センサ４を支持枠３に接触させて検出するので、各チャンネルＣ間において駆動によって温度差が生じる場合でも、液体加圧プレート２の平均的な温度を検出することができる。以下、具体的に説明する。   Thereby, since the temperature of the member close to the channel C is detected, the temperature close to the actual liquid temperature can be detected. Further, since the temperature sensor 4 is detected in contact with the support frame 3, even if a temperature difference occurs between the channels C due to driving, the average temperature of the liquid pressurizing plate 2 can be detected. This will be specifically described below.

支持枠３は液体加圧プレート２の基板側面Ｔｂに固定される。液体加圧プレート２の各チャンネルＣが開口する側の基板端面Ｔａと支持枠３の基板端面Ｔａ側の表面とは面一に形成される。基板端面Ｔａと支持枠３の基板端面Ｔａ側の表面にはノズルプレート１２が貼りつられる。ノズルプレート１２は複数のノズルＮを有し、各ノズルＮは基板端面Ｔａに開口する各チャンネルＣにそれぞれ連通する。流路部材５は液体加圧プレート２の基板側面Ｔｂに設置される。流路部材５は、本実施形態においては支持枠３のノズルプレート１２側とは反対側の第三面Ｓｃに当接する例を示しているが、支持枠３の第三面Ｓｃから離間してもよい。流路部材５は内部に流路５ａを備え、液体加圧プレート２のチャンネルＣに液体を供給する。   The support frame 3 is fixed to the substrate side surface Tb of the liquid pressure plate 2. The substrate end surface Ta on the side where each channel C of the liquid pressurizing plate 2 is opened and the surface of the support frame 3 on the substrate end surface Ta side are formed flush with each other. A nozzle plate 12 is attached to the substrate end surface Ta and the surface of the support frame 3 on the substrate end surface Ta side. The nozzle plate 12 has a plurality of nozzles N, and each nozzle N communicates with each channel C opened in the substrate end face Ta. The flow path member 5 is installed on the substrate side surface Tb of the liquid pressurizing plate 2. In the present embodiment, the flow path member 5 is shown in contact with the third surface Sc of the support frame 3 opposite to the nozzle plate 12 side, but is separated from the third surface Sc of the support frame 3. Also good. The flow path member 5 includes a flow path 5 a inside and supplies a liquid to the channel C of the liquid pressurizing plate 2.

温度センサ４は、電極が形成されるフレキシブル基板４ｂとフレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａとを有する。温度検出素子４ａが設置される近傍のフレキシブル基板４ｂが支持枠３に接触する。具体的には、フレキシブル基板４ｂの温度検出素子４ａが設置される第一面Ｓａとは反対側の第二面Ｓｂであり、温度検出素子４ａの近傍の第二面Ｓｂが、支持枠３のチャンネルＣが開口する側とは反対側の第三面Ｓｃに接触する。温度検出素子４ａとしてサーミスタを使用することができる。これにより、簡便な構成で液体加圧プレート２に固定される支持枠３の温度を検出し、液体の実際の温度に近い温度を検出することができる。また、チャンネルＣごとに液体の温度にばらつきがある場合でも、液体の平均化される温度を検出することができる。   The temperature sensor 4 includes a flexible substrate 4b on which electrodes are formed and a temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b. The flexible substrate 4b in the vicinity where the temperature detection element 4a is installed contacts the support frame 3. Specifically, the second surface Sb on the opposite side of the first surface Sa on which the temperature detection element 4a of the flexible substrate 4b is installed, and the second surface Sb in the vicinity of the temperature detection element 4a is The third surface Sc is in contact with the side opposite to the side where the channel C opens. A thermistor can be used as the temperature detection element 4a. Thereby, the temperature of the support frame 3 fixed to the liquid pressurizing plate 2 with a simple configuration can be detected, and a temperature close to the actual temperature of the liquid can be detected. Even when the temperature of the liquid varies for each channel C, the temperature at which the liquid is averaged can be detected.

なお、本実施形態においては、流路部材５は液体加圧プレート２の基板側面Ｔｂの一方側と他方側の両面に設置される。また、液体加圧プレート２に形成されるチャンネルＣは、基板側面Ｔｂの一方側と他方側に形成され、一方側のチャンネルＣが一方側の流路部材５の流路５ａから液体が供給され、他方側のチャンネルＣが他方側の流路部材５の流路５ａから液体が供給される。しかし、本発明はこの構成に限定されず、流路部材５やチャン
ネルＣが一方側又は他方側にのみ形成されるものであってもよい。 In the present embodiment, the flow path member 5 is installed on both the one side and the other side of the substrate side surface Tb of the liquid pressurizing plate 2. Further, the channel C formed in the liquid pressurizing plate 2 is formed on one side and the other side of the substrate side surface Tb, and the liquid on the one side C is supplied from the flow path 5a of the flow path member 5 on one side. The other side channel C is supplied with liquid from the flow path 5a of the flow path member 5 on the other side. However, the present invention is not limited to this configuration, and the flow path member 5 and the channel C may be formed only on one side or the other side.

（第二実施形態）
図２は本発明の第二実施形態に係る液体噴射ヘッド１の前方斜め上方から見る模式的な部分斜視図である。本実施形態は第一実施形態のより詳しい構造を表す。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Second embodiment)
FIG. 2 is a schematic partial perspective view of the liquid jet head 1 according to the second embodiment of the present invention as seen from the front and obliquely above. This embodiment represents a more detailed structure of the first embodiment. The same portions or portions having the same function are denoted by the same reference numerals.

図２に示すように、液体噴射ヘッド１は、２列のチャンネルＣ、Ｃ’を有する液体加圧プレート２と、液体加圧プレート２の基板側面Ｔｂに固定される支持枠３と、支持枠３に接触する温度センサ４と、を備える。液体噴射ヘッド１は、更に、液体加圧プレート２の各チャンネルＣ、Ｃ’が開口する基板端面Ｔａに貼り付けられるノズルプレート１２と、液体加圧プレート２の基板側面Ｔｂに設置され、支持枠３のノズルプレート１２側とは反対側の第三面Ｓｃに当接する２つの流路部材５、５’と、液体加圧プレート２のノズルプレート１２とは反対側に接続する２枚の駆動用フレキシブル基板１３、１３’と、を備える。２枚の駆動用フレキシブル基板１３、１３’は、一方側が２枚の圧電プレート９、９’のノズルプレート１２とは反対側にそれぞれ接続し、他方側は図示しない回路基板に接続する。回路基板には液体加圧プレート２を駆動する駆動信号を生成する駆動用ドライバー等が搭載される。   As shown in FIG. 2, the liquid jet head 1 includes a liquid pressure plate 2 having two rows of channels C and C ′, a support frame 3 fixed to the substrate side surface Tb of the liquid pressure plate 2, and a support frame. Temperature sensor 4 in contact with 3. The liquid jet head 1 is further installed on the substrate side face Tb of the liquid pressure plate 2 and the nozzle plate 12 attached to the substrate end face Ta where the channels C and C ′ of the liquid pressure plate 2 are opened. Two flow path members 5 and 5 'that abut on the third surface Sc opposite to the nozzle plate 12 side, and two drive members connected to the opposite side of the liquid pressurizing plate 2 to the nozzle plate 12 Flexible substrates 13 and 13 '. The two driving flexible boards 13 and 13 'are connected on one side to the opposite side of the nozzle plate 12 of the two piezoelectric plates 9 and 9', and the other side is connected to a circuit board (not shown). A drive driver for generating a drive signal for driving the liquid pressurizing plate 2 is mounted on the circuit board.

液体加圧プレート２は、複数の溝が形成される面とは反対側の面が接合する２枚の圧電プレート９、９’と、２枚の圧電プレート９、９’の表面に形成される複数の溝を覆うように圧電プレート９、９’の表面に接合される２枚のカバープレート１０、１０’と、を備える。各溝は一方側が圧電プレート９、９’の基板端面Ｔａに開口し、他方側が圧電プレート９、９’の表面においてそれぞれ終端するチャンネルＣ、Ｃ’を構成する。各カバープレート１０、１０’は各圧電プレート９、９’の基板端面Ｔａと面一に、各圧電プレート９、９’の基板端面Ｔａとは反対側の表面が露出するように各圧電プレート９、９’の表面にそれぞれ接合される。各カバープレート１０、１０’は複数の溝（チャンネルＣ、Ｃ’）に連通する液体供給室１１、１１’をそれぞれ備える。従って、２枚の圧電プレート９、９’の各基板端面Ｔａには各チャンネルＣ、Ｃ’の開口Ｋ、Ｋ’が２列に配列する。２枚の圧電プレート９、９’の基板端面Ｔａとは反対側の露出表面には２枚の駆動用フレキシブル基板１３、１３’がそれぞれ接着され、各溝の側面に形成される図示しない駆動電極に駆動信号を供給可能とする。   The liquid pressurizing plate 2 is formed on the surfaces of the two piezoelectric plates 9 and 9 ′ and the surfaces of the two piezoelectric plates 9 and 9 ′ that are joined to the surface opposite to the surface on which the plurality of grooves are formed. And two cover plates 10 and 10 ′ joined to the surfaces of the piezoelectric plates 9 and 9 ′ so as to cover the plurality of grooves. Each groove forms a channel C, C 'that opens on the substrate end face Ta of the piezoelectric plates 9, 9' on one side and terminates on the surface of the piezoelectric plates 9, 9 'on the other side. Each cover plate 10, 10 ′ is flush with the substrate end face Ta of each piezoelectric plate 9, 9 ′, and each piezoelectric plate 9, 9 ′ is exposed so that the surface opposite to the substrate end face Ta is exposed. , 9 ′, respectively. Each cover plate 10, 10 ′ includes a liquid supply chamber 11, 11 ′ communicating with a plurality of grooves (channels C, C ′). Accordingly, the openings K and K ′ of the channels C and C ′ are arranged in two rows on the substrate end faces Ta of the two piezoelectric plates 9 and 9 ′. Two driving flexible substrates 13 and 13 ′ are bonded to the exposed surfaces of the two piezoelectric plates 9 and 9 ′ opposite to the substrate end face Ta, respectively, and driving electrodes (not shown) formed on the side surfaces of the respective grooves. It is possible to supply a drive signal.

２枚のカバープレート１０、１０’の外表面及び２枚の圧電プレート９、９’の側面が基板側面Ｔｂを構成する。支持枠３は中央に開口が形成され、この開口に２枚の圧電プレート９、９’及び２枚のカバープレート１０、１０’からなる液体加圧プレート２のチャンネルＣ、Ｃ’の開口Ｋ、Ｋ’側の端部が挿入され、支持枠３と液体加圧プレート２が固定される。つまり、液体加圧プレート２の基板側面Ｔｂと支持枠３の開口の内側面とが接着剤により固定される。更に、２つの流路部材５、５’が２枚のカバープレート１０、１０’の表面、つまり、液体加圧プレート２の基板側面Ｔｂに設置され、支持枠３の基板端面Ｔａ側とは反対側の第三面Ｓｃに当接する。   The outer surfaces of the two cover plates 10 and 10 'and the side surfaces of the two piezoelectric plates 9 and 9' constitute a substrate side surface Tb. The support frame 3 is formed with an opening at the center, and the openings K of the channels C and C ′ of the liquid pressurizing plate 2 including the two piezoelectric plates 9 and 9 ′ and the two cover plates 10 and 10 ′ are formed in the opening. The end on the K ′ side is inserted, and the support frame 3 and the liquid pressure plate 2 are fixed. That is, the substrate side surface Tb of the liquid pressurizing plate 2 and the inner side surface of the opening of the support frame 3 are fixed by the adhesive. Further, the two flow path members 5 and 5 ′ are installed on the surfaces of the two cover plates 10 and 10 ′, that is, on the substrate side surface Tb of the liquid pressurizing plate 2, and opposite to the substrate end surface Ta side of the support frame 3. It abuts on the third surface Sc on the side.

温度センサ４は、支持枠３の基板端面Ｔａとは反対側の第三面Ｓｃに接触して（接着剤を介する場合を含む）固定される。より詳しくは、温度センサ４は、電極が形成されるフレキシブル基板４ｂと、フレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａとを備え、支持枠３の第三面Ｓｃに接着される。ノズルプレート１２は、液体加圧プレート２の基板端面Ｔａ、及び基板端面Ｔａと面一に形成される支持枠３の表面に接着される。ノズルプレート１２は複数のノズルＮを備え、各チャンネルＣ、Ｃ’にそれぞれ連通する。   The temperature sensor 4 is fixed in contact with the third surface Sc of the support frame 3 opposite to the substrate end surface Ta (including a case where an adhesive is interposed). More specifically, the temperature sensor 4 includes a flexible substrate 4b on which electrodes are formed, and a temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b, and is bonded to the third surface Sc of the support frame 3. The The nozzle plate 12 is bonded to the substrate end surface Ta of the liquid pressurizing plate 2 and the surface of the support frame 3 formed flush with the substrate end surface Ta. The nozzle plate 12 includes a plurality of nozzles N and communicates with the channels C and C ′.

液体噴射ヘッド１は次のように動作する。液体は、図示しない液体タンクから流路部材５、５’の流路５ａ、５’ａに流入し、液体供給室１１、１１’を介して複数のチャンネルＣ、Ｃ’に流入する。そして、駆動用フレキシブル基板１３、１３’を介して駆動信号がチャンネルＣ、Ｃ’の側壁に与えられ、側壁が変形してチャンネルＣ、Ｃ’内の液体に圧力波が生成され、ノズルＮから液滴が吐出される。また、温度検出素子４ａは支持枠３の温度を検出し、図示しない制御部は、検出された温度に応じてヘッド部の動作を制御する。例えば、検出された温度に応じて側壁に印加する駆動信号の波高値を制御する。   The liquid ejecting head 1 operates as follows. The liquid flows from a liquid tank (not shown) into the flow paths 5a and 5'a of the flow path members 5 and 5 ', and flows into the plurality of channels C and C' via the liquid supply chambers 11 and 11 '. Then, a driving signal is given to the side walls of the channels C and C ′ via the flexible driving substrates 13 and 13 ′, and the side walls are deformed to generate pressure waves in the liquid in the channels C and C ′. A droplet is ejected. The temperature detection element 4a detects the temperature of the support frame 3, and a control unit (not shown) controls the operation of the head unit according to the detected temperature. For example, the peak value of the drive signal applied to the side wall is controlled according to the detected temperature.

なお、本実施形態では圧電プレート９、９’とカバープレート１０、１０’からなる加圧プレートを２層に積層した液体加圧プレート２について説明したが、本発明はこの構成に限定されない。圧電プレート９とカバープレート１０からなる単層の液体加圧プレート２を支持枠３に固定する構成であってもよいし、３層以上の加圧プレートを積層する液体吐出基板２であってもよい。また、圧電プレート９、９’に形成する溝の形状や駆動用フレキシブル基板１３、１３’の接続態様は図２に示す構成に限定されず、例えば、液体が一方側の流路部材５から流入し、他方側の流路部材５’から排出される循環タイプの液体加圧プレート２であってもよい。   In the present embodiment, the liquid pressure plate 2 in which the pressure plates including the piezoelectric plates 9 and 9 'and the cover plates 10 and 10' are stacked in two layers has been described. However, the present invention is not limited to this configuration. The single-layer liquid pressure plate 2 composed of the piezoelectric plate 9 and the cover plate 10 may be fixed to the support frame 3, or the liquid discharge substrate 2 in which three or more pressure plates are stacked. Good. Further, the shape of the grooves formed in the piezoelectric plates 9 and 9 ′ and the connection mode of the driving flexible substrates 13 and 13 ′ are not limited to the configuration shown in FIG. 2. For example, liquid flows from the flow path member 5 on one side. Alternatively, it may be a circulation type liquid pressurizing plate 2 discharged from the other channel member 5 ′.

（第三実施形態）
図３は、本発明の第三実施形態に係る液体噴射ヘッド１の断面模式図である。第一又は第二実施形態と異なる点は、温度センサ４が設置される場所の支持枠３の形態である。その他の構成は第一実施形態と同様である。従って、以下、第一又は第二実施形態と異なる点について説明し、同一の部分については説明を省略する。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Third embodiment)
FIG. 3 is a schematic cross-sectional view of the liquid jet head 1 according to the third embodiment of the present invention. The difference from the first or second embodiment is the form of the support frame 3 where the temperature sensor 4 is installed. Other configurations are the same as those of the first embodiment. Therefore, differences from the first or second embodiment will be described below, and description of the same parts will be omitted. The same portions or portions having the same function are denoted by the same reference numerals.

図３に示すように、支持枠３は流路部材５側の第三面Ｓｃに凹部７を有し、この凹部７に温度検出素子４ａが収納される。より具体的には、温度センサ４は、電極が形成されるフレキシブル基板４ｂと、このフレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａを備える。フレキシブル基板４ｂは長尺形状を有し、この長尺形状の端部に温度検出素子４ａが設置される。凹部７は外部に開口し、この開口部から凹部７の内部に温度検出素子４ａが挿入される。フレキシブル基板４ｂの第一面Ｓａとは反対側の第二面Ｓｂが凹部７の内側面に接触して（接着剤を介する場合を含む）固定される。温度検出素子４ａは、凹部７の内側面に接触し又は接着される第二面Ｓｂの領域の近傍であり、第二面Ｓｂとは反対側の第一面Ｓａに設置される。フレキシブル基板４ｂの他方の端部は図示しない回路基板に電気的に接続され、回路基板に設置される温度検出回路に電気的に接続される。   As shown in FIG. 3, the support frame 3 has a recess 7 in the third surface Sc on the flow path member 5 side, and the temperature detection element 4 a is accommodated in the recess 7. More specifically, the temperature sensor 4 includes a flexible substrate 4b on which electrodes are formed, and a temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b. The flexible substrate 4b has a long shape, and the temperature detection element 4a is installed at the end of the long shape. The concave portion 7 opens to the outside, and the temperature detecting element 4a is inserted into the concave portion 7 through the opening portion. The second surface Sb opposite to the first surface Sa of the flexible substrate 4b comes into contact with the inner surface of the recess 7 (including the case where an adhesive is interposed) and is fixed. The temperature detection element 4a is located in the vicinity of the region of the second surface Sb that is in contact with or adhered to the inner surface of the recess 7, and is disposed on the first surface Sa opposite to the second surface Sb. The other end of the flexible substrate 4b is electrically connected to a circuit board (not shown), and is electrically connected to a temperature detection circuit installed on the circuit board.

このように、温度検出素子４ａが設置される近傍のフレキシブル基板４ｂが凹部７の側面に接触して（接着剤を介する場合を含む）固定されるので、支持枠３の温度が温度検出素子４ａに伝達しやすい。また、第三面Ｓｃの露出面が狭い場合でも温度検出素子４ａを容易に設置することができる。   In this way, the flexible substrate 4b in the vicinity where the temperature detection element 4a is installed contacts and is fixed to the side surface of the recess 7 (including the case where the adhesive is interposed), so that the temperature of the support frame 3 is set to the temperature detection element 4a. Easy to communicate to. Further, even when the exposed surface of the third surface Sc is narrow, the temperature detecting element 4a can be easily installed.

なお、凹部７に熱伝導性の接着剤を充填して熱伝導性の接着剤に温度検出素子４ａを埋め込むことができる。これにより、支持枠３から温度検出素子４ａへの熱伝導性が向上し、また、温度センサ４を凹部７から抜け難くすることができる。   The recess 7 can be filled with a heat conductive adhesive, and the temperature detecting element 4a can be embedded in the heat conductive adhesive. Thereby, the thermal conductivity from the support frame 3 to the temperature detection element 4a is improved, and the temperature sensor 4 can be made difficult to come out of the recess 7.

（第四実施形態）
図４は、本発明の第四実施形態に係る液体噴射ヘッド１の断面模式図である。第一又は第二実施形態と異なる点は、温度検出素子４ａを流路部材５と支持枠３との間に設置する点であり、その他の構成は第一又は第二実施形態と同様である。従って、以下、第一又は第二実施形態と異なる点について説明し、同一の部分については説明を省略する。同一の
部分又は同一の機能を有する部分には同一の符号を付している。 (Fourth embodiment)
FIG. 4 is a schematic cross-sectional view of the liquid jet head 1 according to the fourth embodiment of the present invention. The difference from the first or second embodiment is that the temperature detecting element 4a is installed between the flow path member 5 and the support frame 3, and other configurations are the same as those of the first or second embodiment. . Therefore, differences from the first or second embodiment will be described below, and description of the same parts will be omitted. The same portions or portions having the same function are denoted by the same reference numerals.

図４に示すように、流路部材５は、液体加圧プレート２の基板側面Ｔｂに設置され、支持枠３の第三面Ｓｃに当接する。更に、流路部材５は支持枠３に当接する第四面Ｓｄに切欠き部６を備え、温度検出素子４ａはこの切欠き部６と第三面Ｓｃにより囲まれる領域に収納される。より詳しくは、流路部材５の支持枠３側の第四面Ｓｄには段差状に切欠き部６が設けてある。そのため、支持枠３の第三面Ｓｃと切欠き部６によりポケット状の空間が形成される。この空間に、フレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａが収納される。支持枠３の第三面Ｓｃにはフレキシブル基板４ｂの第二面Ｓｂが接触して（接着剤を介する場合を含む）固定される。温度検出素子４ａと切欠き部６の側面とは離間する。   As shown in FIG. 4, the flow path member 5 is installed on the substrate side surface Tb of the liquid pressurizing plate 2 and abuts on the third surface Sc of the support frame 3. Further, the flow path member 5 includes a notch portion 6 on the fourth surface Sd that contacts the support frame 3, and the temperature detection element 4 a is accommodated in a region surrounded by the notch portion 6 and the third surface Sc. More specifically, a notch portion 6 is provided in a step shape on the fourth surface Sd of the flow path member 5 on the support frame 3 side. Therefore, a pocket-shaped space is formed by the third surface Sc of the support frame 3 and the notch 6. In this space, the temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b is stored. The second surface Sb of the flexible substrate 4b comes into contact with the third surface Sc of the support frame 3 (including the case where an adhesive is interposed). The temperature detection element 4a and the side surface of the notch 6 are separated from each other.

このように、温度検出素子４ａを流路部材５に設けた切欠き部６と支持枠３の第三面Ｓｃに囲まれる領域に収納するので、支持枠３の温度が温度検出素子４ａに伝達しやすい。また、第三面Ｓｃの露出面が狭い場合でも温度検出素子４ａを容易に設置することができる。また、温度検出素子４ａは支持枠３や流路部材５に接触することなく収納することができるので、温度検出素子４ａの電極が外部に露出し、支持枠３や流路部材５が導電材料からなる場合でも、温度検出素子４ａの電極端子が短絡することがない。なお、切欠き部６と第三面Ｓｃがなすポケット状の空間に熱伝導性の接着剤を充填して温度検出素子４ａを埋め込むことができる。これにより、支持枠３から温度検出素子４ａへの熱伝導性が向上し、同時に、ポケット状の空間から温度検出素子４ａを抜け難くすることができる。   Thus, since the temperature detection element 4a is housed in the region surrounded by the notch 6 provided in the flow path member 5 and the third surface Sc of the support frame 3, the temperature of the support frame 3 is transmitted to the temperature detection element 4a. It's easy to do. Further, even when the exposed surface of the third surface Sc is narrow, the temperature detecting element 4a can be easily installed. Moreover, since the temperature detection element 4a can be accommodated without contacting the support frame 3 and the flow path member 5, the electrodes of the temperature detection element 4a are exposed to the outside, and the support frame 3 and the flow path member 5 are made of a conductive material. Even if it consists of, the electrode terminal of the temperature detection element 4a does not short-circuit. Note that the temperature detecting element 4a can be embedded by filling a pocket-shaped space formed by the notch 6 and the third surface Sc with a heat conductive adhesive. Thereby, the thermal conductivity from the support frame 3 to the temperature detection element 4a is improved, and at the same time, the temperature detection element 4a can hardly be removed from the pocket-shaped space.

（第五実施形態）
図５は、本発明の第五実施形態に係る液体噴射ヘッド１の断面模式図である。第三実施形態と異なる点は、凹部７の開口部に位置する流路部材５に切欠き部６を設ける点であり、その他の構成は第三実施形態と同様である。従って、以下、第三実施形態と異なる点について説明し、同一の部分については説明を省略する。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Fifth embodiment)
FIG. 5 is a schematic cross-sectional view of the liquid jet head 1 according to the fifth embodiment of the present invention. The difference from the third embodiment is that a notch 6 is provided in the flow path member 5 located in the opening of the recess 7, and the other configuration is the same as that of the third embodiment. Therefore, hereinafter, differences from the third embodiment will be described, and description of the same parts will be omitted. The same portions or portions having the same function are denoted by the same reference numerals.

図５に示すように、支持枠３は流路部材５側の第三面Ｓｃに凹部７を有し、この凹部７に温度検出素子４ａが収納される。流路部材５は、液体加圧プレート２の基板側面Ｔｂに固定され、支持枠３のチャンネルＣが開口する側とは反対側の第三面Ｓｃに当接する。流路部材５は、更に、上記凹部７の開口の一部を覆い、支持枠３に当接する第四面Ｓｄの上記凹部７が開口する位置に切欠き部６を有する。より具体的には、支持枠３の第三面Ｓｃには凹部７が形成され、流路部材５が凹部７の開口部を覆うように配置される。流路部材５は、支持枠３側の第四面Ｓｄであり、凹部７が開口する位置に切欠き部６を有する。凹部７は、流路部材５の第四面Ｓｄにより開口の一部が覆われ、また、第四面Ｓｄに形成される円弧状の切欠き部６を介して外部と連通する。   As shown in FIG. 5, the support frame 3 has a recess 7 in the third surface Sc on the flow path member 5 side, and the temperature detection element 4 a is accommodated in the recess 7. The flow path member 5 is fixed to the substrate side surface Tb of the liquid pressurizing plate 2 and abuts on the third surface Sc on the side opposite to the side where the channel C of the support frame 3 opens. The flow path member 5 further includes a notch 6 at a position where the recess 7 of the fourth surface Sd that covers a part of the opening of the recess 7 and contacts the support frame 3 is opened. More specifically, the recess 7 is formed in the third surface Sc of the support frame 3, and the flow path member 5 is disposed so as to cover the opening of the recess 7. The flow path member 5 is the fourth surface Sd on the support frame 3 side, and has a notch 6 at a position where the recess 7 is opened. The recess 7 is partially covered by the fourth surface Sd of the flow path member 5, and communicates with the outside via an arcuate notch 6 formed in the fourth surface Sd.

温度検出素子４ａは長尺形状を有するフレキシブル基板４ｂの端部の第一面Ｓａに設置され、温度検出素子４ａは切欠き部６を通して凹部７に収納される。フレキシブル基板４ｂの第一面Ｓａとは反対側の第二面Ｓｂが凹部７の内側面に接触して（接着剤を介する場合を含む）固定される。   The temperature detection element 4 a is installed on the first surface Sa of the end of the flexible substrate 4 b having a long shape, and the temperature detection element 4 a is accommodated in the recess 7 through the notch 6. The second surface Sb opposite to the first surface Sa of the flexible substrate 4b comes into contact with the inner surface of the recess 7 (including the case where an adhesive is interposed) and is fixed.

このように、凹部７の開口部を流路部材５が覆うように配置され、流路部材５の第四面Ｓｄに切欠き部６を設けたので、第三面Ｓｃの露出面が狭い場合でも温度検出素子４ａを凹部７に容易に収納することができる。また、凹部７の開口が流路部材５により覆われても切欠き部６を通して温度検出素子４ａを凹部７内に収納することができる。更に、温度検出素子４ａは支持枠３に接触することなく収納することができるので、支持枠３に導電材料を使用し、温度検出素子４ａの電極が外部に露出する場合で、温度検出素子４ａの電
極端子は短絡しない。なお、凹部７に熱伝導性の接着剤を充填して温度検出素子４ａを埋め込むことができる。これにより、支持枠３から温度検出素子４ａへの熱伝導性が向上し、同時に、温度センサ４が凹部７から抜け難くすることができる。 As described above, the flow path member 5 is disposed so as to cover the opening of the recess 7, and the notch 6 is provided on the fourth surface Sd of the flow path member 5, so that the exposed surface of the third surface Sc is narrow. However, the temperature detecting element 4a can be easily accommodated in the recess 7. Even if the opening of the recess 7 is covered with the flow path member 5, the temperature detecting element 4 a can be accommodated in the recess 7 through the notch 6. Further, since the temperature detection element 4a can be accommodated without contacting the support frame 3, a conductive material is used for the support frame 3, and the temperature detection element 4a is exposed when the electrode of the temperature detection element 4a is exposed to the outside. The electrode terminals of are not short-circuited. The recess 7 can be filled with a heat conductive adhesive to embed the temperature detecting element 4a. Thereby, the thermal conductivity from the support frame 3 to the temperature detection element 4 a is improved, and at the same time, the temperature sensor 4 can be made difficult to come out of the recess 7.

（第六実施形態）
図６は、本発明の第六実施形態に係る液体噴射ヘッド１を説明するための図である。図６（ａ）は液体噴射ヘッド１の断面模式図であり、図６（ｂ）は、温度センサ４の部分平面図と部分側面図である。第五実施形態と異なる点は温度センサ４であり、その他の構成は第五実施形態とほぼ同じである。従って、以下、主に第五実施形態と異なる点について説明し、同一の部分については説明を省略する。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Sixth embodiment)
FIG. 6 is a view for explaining the liquid jet head 1 according to the sixth embodiment of the present invention. FIG. 6A is a schematic cross-sectional view of the liquid ejecting head 1, and FIG. 6B is a partial plan view and a partial side view of the temperature sensor 4. The difference from the fifth embodiment is the temperature sensor 4, and other configurations are substantially the same as those of the fifth embodiment. Accordingly, the following description will mainly focus on differences from the fifth embodiment, and description of the same parts will be omitted. The same portions or portions having the same function are denoted by the same reference numerals.

流路部材５は、液体加圧プレート２の基板側面Ｔｂに固定され、支持枠３のチャンネルＣが開口する側とは反対側の第三面Ｓｃに当接する。支持枠３は第三面Ｓｃに凹部７を有し、流路部材５の支持枠３側の第四面Ｓｄは凹部７の開口部の一部を覆う。図６（ｂ）に示すように、温度センサ４は、長尺形状を有するフレキシブル基板４ｂと、フレキシブル基板４ｂの第一面Ｓａであり、長尺形状の一方の端部８よりも手前側に設置される温度検出素子４ａとを備える。   The flow path member 5 is fixed to the substrate side surface Tb of the liquid pressurizing plate 2 and abuts on the third surface Sc on the side opposite to the side where the channel C of the support frame 3 opens. The support frame 3 has a recess 7 on the third surface Sc, and the fourth surface Sd on the support frame 3 side of the flow path member 5 covers a part of the opening of the recess 7. As shown in FIG. 6 (b), the temperature sensor 4 is a flexible substrate 4b having a long shape and a first surface Sa of the flexible substrate 4b, and is closer to the front side than one end 8 of the long shape. And a temperature detecting element 4a to be installed.

具体的に説明する。フレキシブル基板４ｂの第一面Ｓａには電極４ｃが形成され、電極４ｃは温度検出素子４ａの端子電極に電気的に接続する。フレキシブル基板４ｂの端部８の手前側の両辺にはノッチ４ｄが形成され、端部８はこのノッチ４ｄから折れ曲がって温度検出素子４ａに被さる。フレキシブル基板４ｂはポリイミド樹脂等の弾力性のある材料からなり、塑性的に折り曲げない限りその弾力性により開く方向に反発力が働く。   This will be specifically described. An electrode 4c is formed on the first surface Sa of the flexible substrate 4b, and the electrode 4c is electrically connected to a terminal electrode of the temperature detection element 4a. Notches 4d are formed on both sides of the front side of the end 8 of the flexible substrate 4b, and the end 8 is bent from the notch 4d and covers the temperature detecting element 4a. The flexible substrate 4b is made of an elastic material such as polyimide resin, and a repulsive force acts in the opening direction due to its elasticity unless it is bent plastically.

図６（ａ）に示すように、温度検出素子４ａを凹部７に収納する。この際に、フレキシブル基板４ｂは、第一面Ｓａとは反対側の第二面Ｓｂが凹部７の一方側の側面に接触し、端部８の先端が凹部７の他方の側の側面と流路部材５の支持枠３側の第四面Ｓｄに当接する。そして、端部８はフレキシブル基板４ｂの弾力性により開く方向に反発力が働いて、フレキシブル基板４ｂの第二面Ｓｂは凹部７の一方側の側面に押圧される。そのため、支持枠３からフレキシブル基板４ｂへの熱伝導性が向上し、温度検出素子４ａの温度検出感度が向上する。同時に、フレキシブル基板４ｂが凹部７から抜け難くなり、簡単な構造で装着強度が向上する。また、温度検出素子４ａが端部８に被さるので、温度検出素子４ａの電極端子が露出する場合でも短絡し難くなる。   As shown in FIG. 6A, the temperature detection element 4 a is accommodated in the recess 7. At this time, in the flexible substrate 4b, the second surface Sb opposite to the first surface Sa is in contact with one side surface of the concave portion 7, and the tip of the end portion 8 is in contact with the other side surface of the concave portion 7. It abuts on the fourth surface Sd of the road member 5 on the support frame 3 side. The repulsive force acts in the direction in which the end 8 opens due to the elasticity of the flexible substrate 4 b, and the second surface Sb of the flexible substrate 4 b is pressed against one side surface of the recess 7. Therefore, the thermal conductivity from the support frame 3 to the flexible substrate 4b is improved, and the temperature detection sensitivity of the temperature detection element 4a is improved. At the same time, it becomes difficult for the flexible substrate 4b to come out of the recess 7, and the mounting strength is improved with a simple structure. Moreover, since the temperature detection element 4a covers the end portion 8, it is difficult to short-circuit even when the electrode terminal of the temperature detection element 4a is exposed.

なお、本実施形態においては、流路部材５が第四面Ｓｄの凹部７が開口する側に切欠き部６を備え、この切欠き部６を介して温度検出素子４ａ及び端部８を凹部７へ収納可能とするが、本発明はこの構成に限定されない。流路部材５の第四面Ｓｄに切欠き部６を設けないで、流路部材５が凹部７の開口部の一部を覆い、この開口部の他の部分が外部に開放するように構成してもよい。また、第五実施形態において説明したように、凹部７に熱伝導性の接着剤を充填して温度検出素子４ａを熱伝導性接着剤に埋め込むことができる。これにより、支持枠３から温度検出素子４ａへの熱伝導性が向上し、温度センサ４が凹部７から抜け難くなり装着強度が向上する。   In the present embodiment, the flow path member 5 has a notch 6 on the side where the recess 7 of the fourth surface Sd opens, and the temperature detecting element 4a and the end 8 are recessed via the notch 6. However, the present invention is not limited to this configuration. The notch 6 is not provided on the fourth surface Sd of the flow path member 5, and the flow path member 5 covers a part of the opening of the recess 7 and the other part of the opening is open to the outside. May be. Further, as described in the fifth embodiment, the temperature detecting element 4a can be embedded in the heat conductive adhesive by filling the concave portion 7 with the heat conductive adhesive. Thereby, the thermal conductivity from the support frame 3 to the temperature detection element 4a is improved, the temperature sensor 4 is difficult to be removed from the recess 7, and the mounting strength is improved.

（フレキシブル基板の変形例）
図７は、本発明の液体噴射ヘッド１に使用する温度センサ４の変形例を表す。図７（ａ）は、フレキシブル基板４ｂの一方の端部がＬ字形状を有する温度センサ４の部分平面模式図である。図７（ｂ）は、フレキシブル基板４ｂの一方の端部が分岐する温度センサ４の部分平面模式図である。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Modified example of flexible substrate)
FIG. 7 shows a modification of the temperature sensor 4 used in the liquid jet head 1 of the present invention. FIG. 7A is a schematic partial plan view of the temperature sensor 4 in which one end portion of the flexible substrate 4b has an L shape. FIG. 7B is a schematic partial plan view of the temperature sensor 4 at which one end of the flexible substrate 4b branches. The same portions or portions having the same function are denoted by the same reference numerals.

図７（ａ）に示すように、温度センサ４は電極４ｃが形成されるフレキシブル基板４ｂと、フレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａを備える。フレキシブル基板４ｂは、長尺形状を有し、第一面Ｓａには２本の電極４ｃが形成され、一方の端部の第一面Ｓａには温度検出素子４ａが設置される。更に、フレキシブル基板４ｂの一方の端部８はＬ字状に折れ曲がり、Ｌ字状の基部の両辺にはノッチ４ｅが形成される。一方の端部８はノッチ４ｅから折れ曲がって温度検出素子４ａに被さることができる。既に第六実施形態において説明したように、フレキシブル基板４ｂはポリイミド樹脂等の弾力性のある材料から形成し、図６（ａ）に示すように、凹部７に端部８を折り曲げて温度検出素子４ａを収納することができる。この場合も、フレキシブル基板４ｂの第二面Ｓｂが凹部７の一方の内側面に押圧され、支持枠３からフレキシブル基板４ｂへの熱伝導性が向上する。   As shown in FIG. 7A, the temperature sensor 4 includes a flexible substrate 4b on which an electrode 4c is formed, and a temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b. The flexible substrate 4b has an elongated shape, two electrodes 4c are formed on the first surface Sa, and the temperature detection element 4a is installed on the first surface Sa at one end. Furthermore, one end portion 8 of the flexible substrate 4b is bent in an L shape, and notches 4e are formed on both sides of the L shape base portion. One end 8 can be bent from the notch 4e and covered with the temperature detecting element 4a. As already described in the sixth embodiment, the flexible substrate 4b is formed of an elastic material such as polyimide resin, and as shown in FIG. 4a can be stored. Also in this case, the second surface Sb of the flexible substrate 4b is pressed against one inner surface of the recess 7, and the thermal conductivity from the support frame 3 to the flexible substrate 4b is improved.

図７（ｂ）に示すように、温度センサ４は電極４ｃが形成されるフレキシブル基板４ｂと、フレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａを備える。フレキシブル基板４ｂは長尺形状を有し、一方の端部は枝部８ａと枝部８ｂに分岐する。温度検出素子４ａは分岐した枝部８ａ、８ｂの基部に設置され、複数の枝部８ａ、８ｂが温度検出素子４ａの設置される側に折れ曲がって温度検出素子４ａに被さる。   As shown in FIG. 7B, the temperature sensor 4 includes a flexible substrate 4b on which an electrode 4c is formed, and a temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b. The flexible substrate 4b has a long shape, and one end portion branches into a branch portion 8a and a branch portion 8b. The temperature detection element 4a is installed at the base of the branched branches 8a and 8b, and the plurality of branches 8a and 8b are bent to the side where the temperature detection element 4a is installed and are covered with the temperature detection element 4a.

具体的に説明する。フレキシブル基板４ｂの第一面Ｓａであり、一方の端部の複数に分岐する枝部８ａ、８ｂの基部には温度検出素子４ａが設置される。枝部８ａ、８ｂの基部側の両辺にはノッチ４ｄ及びノッチ４ｅが形成され、各枝部８ａ、８ｂをこのノッチ４ｄ、４ｅから折り曲げて温度検出素子４ａに被せることができる。第六実施形態において既に説明したように、フレキシブル基板４ｂをポリイミド樹脂等の弾力性のある材料から形成し、図６（ａ）に示すように、凹部７に枝部８ａ、８ｂを折り曲げて温度検出素子４ａを収納することができる。枝部８ａ、８ｂの２カ所が折曲がるので、フレキシブル基板４ｂの第二面Ｓｂが凹部７の一方の内側面に一層強く押圧される。その結果、支持枠３からフレキシブル基板４ｂへの熱伝導性が一層向上する。   This will be specifically described. The temperature detection element 4a is installed on the base surface of the branch portions 8a and 8b which are the first surface Sa of the flexible substrate 4b and branch into a plurality of one end portions. A notch 4d and a notch 4e are formed on both sides on the base side of the branch portions 8a and 8b, and the branch portions 8a and 8b can be bent from the notches 4d and 4e and covered with the temperature detection element 4a. As already described in the sixth embodiment, the flexible substrate 4b is formed from an elastic material such as polyimide resin, and the branch portions 8a and 8b are bent into the recess 7 as shown in FIG. The detection element 4a can be accommodated. Since the two portions of the branch portions 8a and 8b are bent, the second surface Sb of the flexible substrate 4b is more strongly pressed against one inner side surface of the recess 7. As a result, the thermal conductivity from the support frame 3 to the flexible substrate 4b is further improved.

（第七実施形態）
図８は、本発明の第七実施形態に係る液体噴射ヘッド１の断面模式図である。他の実施形態と異なる点は、流路部材５に形成する切欠き部６と、温度センサ４の設置態様であり、その他の構成は他の実施形態と同様である。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Seventh embodiment)
FIG. 8 is a schematic cross-sectional view of the liquid jet head 1 according to the seventh embodiment of the present invention. A different point from other embodiment is the installation aspect of the notch part 6 formed in the flow-path member 5, and the temperature sensor 4, and other structures are the same as that of other embodiment. The same portions or portions having the same function are denoted by the same reference numerals.

図８に示すように、液体噴射ヘッド１は、液体加圧プレート２と、液体加圧プレート２の基板側面Ｔｂに固定される支持枠３と、液体加圧プレート２の基板側面Ｔｂに固定され、支持枠３のチャンネルＣが開口する側とは反対側の第三面Ｓｃに当接する流路部材５と、支持枠３に接触し温度を検出する温度センサ４とを備える。温度センサ４は、図示しない電極４ｃが形成されるフレキシブル基板４ｂと、フレキシブル基板４ｂの第一面Ｓａに設置される温度検出素子４ａを有する。そして、温度検出素子４ａが設置される近傍のフレキシブル基板４ｂが支持枠３に接触する。液体加圧プレート２は第一又は第二実施形態において説明したものと同様なので、説明を省略する。   As shown in FIG. 8, the liquid jet head 1 is fixed to the liquid pressure plate 2, the support frame 3 fixed to the substrate side surface Tb of the liquid pressure plate 2, and the substrate side surface Tb of the liquid pressure plate 2. The flow path member 5 is in contact with the third surface Sc on the side opposite to the side where the channel C of the support frame 3 is opened, and the temperature sensor 4 is in contact with the support frame 3 and detects the temperature. The temperature sensor 4 includes a flexible substrate 4b on which an electrode 4c (not shown) is formed, and a temperature detection element 4a installed on the first surface Sa of the flexible substrate 4b. Then, the flexible substrate 4 b in the vicinity where the temperature detection element 4 a is installed contacts the support frame 3. Since the liquid pressurizing plate 2 is the same as that described in the first or second embodiment, the description thereof is omitted.

流路部材５は、支持枠３の側の第四面Ｓｄの基板側面Ｔｂの側に切欠き部６を有する。支持枠３は第三面Ｓｃに凹部７を有し、切欠き部６と凹部７とは連通する。フレキシブル基板４ｂは長尺形状を有する。温度検出素子４ａは、長尺形状の一方の端部８よりも手前側のフレキシブル基板４ｂの第一面Ｓａに設置され、凹部７に収納される。長尺形状の一方の端部８は温度検出素子４ａの設置される側とは反対側に折れ曲がり、端部８の先端が切欠き部６の内面に当接し、端部８の先端と温度検出素子４ａとの間のフレキシブル基板
４ｂが支持枠３に接触する。 The flow path member 5 has a notch 6 on the substrate side surface Tb side of the fourth surface Sd on the support frame 3 side. The support frame 3 has a recess 7 on the third surface Sc, and the notch 6 and the recess 7 communicate with each other. The flexible substrate 4b has a long shape. The temperature detection element 4 a is installed on the first surface Sa of the flexible substrate 4 b on the nearer side than the one end 8 having a long shape, and is housed in the recess 7. One end 8 of the elongated shape is bent to the side opposite to the side where the temperature detecting element 4a is installed, the tip of the end 8 contacts the inner surface of the notch 6, and the tip of the end 8 and the temperature detection The flexible substrate 4b between the element 4a contacts the support frame 3.

具体的に説明する。支持枠３に形成される凹部７は、流路部材５の第四面Ｓｄであり、液体加圧プレート２側に形成される切欠き部６に連通し、かつ、流路部材５よりも外側の大気に連通する。温度センサ４は、図６（ｂ）に示すように、長尺形状を有するフレキシブル基板４ｂと、フレキシブル基板４ｂの第一面Ｓａであり、長尺形状の一方の端部８よりも手前側に設置される温度検出素子４ａを備える。フレキシブル基板４ｂの第一面Ｓａには温度検出素子４ａの端子電極に電気的に接続される図示しない電極４ｃが形成される。フレキシブル基板４ｂの端部８の手前側の両辺には図示しないノッチ４ｄが形成され、端部８はこのノッチ４ｄから温度検出素子４ａが設置される側とは反対側に折れ曲がる。   This will be specifically described. The recess 7 formed in the support frame 3 is the fourth surface Sd of the flow path member 5, communicates with the notch 6 formed on the liquid pressurizing plate 2 side, and is outside the flow path member 5. Communicate with the atmosphere. As shown in FIG. 6B, the temperature sensor 4 is a flexible substrate 4b having a long shape and a first surface Sa of the flexible substrate 4b, and is closer to the front side than one end 8 of the long shape. A temperature detecting element 4a is provided. On the first surface Sa of the flexible substrate 4b, an electrode 4c (not shown) that is electrically connected to the terminal electrode of the temperature detecting element 4a is formed. Notches 4d (not shown) are formed on both sides of the front side of the end 8 of the flexible substrate 4b, and the end 8 is bent from the notch 4d to the side opposite to the side where the temperature detecting element 4a is installed.

この温度センサ４を、端部８を温度検出素子４ａとは反対側に折り曲げた状態で凹部７の大気に連通する側の開口から挿入する。端部８の先端が切欠き部６に達すると、折り曲げた端部８は反発力で切欠き部６側に開き、端部８と切欠き部６とが係合する。このように、温度センサ４を支持枠３に容易に装着することができ、しかも温度センサ４を凹部７から抜け難くすることができる。また、温度検出素子４ａが搭載されるフレキシブル基板４ｂの第二面Ｓｂに接着剤を付着させておけば、フレキシブル基板４ｂを流路部材５の第四面Ｓｄに接着固定することができる。これにより、温度検出素子４ａの表面に電極端子が露出す場合でも、温度検出素子４ａと凹部７の内面とが接触して電極端子が短絡することを防止することができる。また、凹部７及び切欠き部６に熱伝導性の接着剤を充填して温度検出素子４ａを埋め込むことができる。   The temperature sensor 4 is inserted from the opening on the side communicating with the atmosphere of the recess 7 with the end 8 bent to the side opposite to the temperature detection element 4a. When the tip of the end portion 8 reaches the notch portion 6, the bent end portion 8 opens to the notch portion 6 side by a repulsive force, and the end portion 8 and the notch portion 6 are engaged. In this way, the temperature sensor 4 can be easily attached to the support frame 3, and the temperature sensor 4 can be made difficult to come out of the recess 7. In addition, if an adhesive is attached to the second surface Sb of the flexible substrate 4b on which the temperature detection element 4a is mounted, the flexible substrate 4b can be bonded and fixed to the fourth surface Sd of the flow path member 5. Thereby, even when the electrode terminal is exposed on the surface of the temperature detection element 4a, it is possible to prevent the temperature detection element 4a and the inner surface of the recess 7 from coming into contact with each other to short-circuit the electrode terminal. Further, the temperature detecting element 4a can be embedded by filling the recess 7 and the notch 6 with a heat conductive adhesive.

（第八実施形態）
図９は、本発明の第八実施形態に係る液体噴射ヘッド１の説明図である。図９（ａ）は液体噴射ヘッド１の断面模式図であり、図９（ｂ）は凹部７及び段差部１４を拡大した断面模式図である。第三又は第五実施形態と異なる点は、凹部７の形状及び温度センサ４の支持枠３への設置態様であり、その他の構成は第三又は第五実施形態と同様である。従って、以下、第三又は第五実施形態と異なる部分について説明し、同一の部分については説明を省略する。同一の部分又は同一の機能を有する部分には同一の符号を付している。 (Eighth embodiment)
FIG. 9 is an explanatory diagram of the liquid jet head 1 according to the eighth embodiment of the present invention. 9A is a schematic cross-sectional view of the liquid ejecting head 1, and FIG. 9B is a schematic cross-sectional view in which the concave portion 7 and the stepped portion 14 are enlarged. The difference from the third or fifth embodiment is the shape of the recess 7 and the manner in which the temperature sensor 4 is installed on the support frame 3, and the other configurations are the same as those of the third or fifth embodiment. Accordingly, the following description will be made only on parts different from the third or fifth embodiment, and description on the same parts will be omitted. The same portions or portions having the same function are denoted by the same reference numerals.

図９（ａ）に示すように、支持枠３は、第三面Ｓｃに凹部７を有し、凹部７に温度検出素子４ａが収納される。凹部７は、側面に段差部１４を有し、フレキシブル基板４ｂは段差部１４に装着され、温度検出素子４ａはフレキシブル基板４ｂの凹部７の側であり凹部７の底面及び側面から離間する。具体的には、流路部材５の凹部７に対向する第四面Ｓｄには切欠き部６が形成される。温度検出素子４ａはフレキシブル基板４ｂの第一面Ｓａに設置され、温度検出素子４ａが凹部７の内部に収納されるように第一面Ｓａが段差部１４に装着される。より具体的には、図９（ｂ）に示すように、凹部７の底面と温度検出素子４ａの頂部とが離間する。更に、支持枠３の第三面Ｓｃと平行な任意の方向において、段差部１４に装着されるフレキシブル基板４ｂの装着部の外端と段差部１４の内側面との間の隙間Ｄａは、温度検出素子４ａの外側面と凹部７の内側面との間の隙間Ｄｂよりも狭い。つまり、第三面Ｓｃに平行な任意の方向において、Ｄａ＜Ｄｂ、の関係を満たす。   As shown in FIG. 9A, the support frame 3 has a recess 7 on the third surface Sc, and the temperature detection element 4 a is accommodated in the recess 7. The concave portion 7 has a stepped portion 14 on the side surface, the flexible substrate 4b is attached to the stepped portion 14, and the temperature detecting element 4a is on the concave portion 7 side of the flexible substrate 4b and is separated from the bottom surface and the side surface of the concave portion 7. Specifically, a notch 6 is formed in the fourth surface Sd facing the recess 7 of the flow path member 5. The temperature detection element 4 a is installed on the first surface Sa of the flexible substrate 4 b, and the first surface Sa is attached to the stepped portion 14 so that the temperature detection element 4 a is housed inside the recess 7. More specifically, as shown in FIG. 9B, the bottom surface of the recess 7 and the top of the temperature detection element 4a are separated from each other. Further, in any direction parallel to the third surface Sc of the support frame 3, the gap Da between the outer end of the mounting portion of the flexible substrate 4b mounted on the step portion 14 and the inner side surface of the step portion 14 is a temperature. Narrower than the gap Db between the outer surface of the detection element 4a and the inner surface of the recess 7. That is, the relationship of Da <Db is satisfied in an arbitrary direction parallel to the third surface Sc.

これにより、温度検出素子４ａの表面に電極端子が露出する場合でも、温度検出素子４ａと凹部７の内側面とが接触して電極端子が短絡するのを防止することができる。なお、流路部材５の第四面Ｓｄに形成する切欠き部６はなくてもよい。また、凹部７の内部に導電性接着剤を充填して温度検出素子４ａを埋め込むことができる。   Thereby, even when the electrode terminal is exposed on the surface of the temperature detection element 4a, it is possible to prevent the temperature detection element 4a and the inner surface of the recess 7 from coming into contact with each other to short-circuit the electrode terminal. The notch 6 formed in the fourth surface Sd of the flow path member 5 may not be provided. In addition, the temperature detecting element 4a can be embedded by filling the recess 7 with a conductive adhesive.

（第九実施形態）
図１０は本発明の第九実施形態に係る液体噴射装置３０の模式的な斜視図である。液体噴射装置３０は、液体噴射ヘッド１、１’を往復移動させる移動機構４０と、液体噴射ヘ
ッド１、１’に液体を供給し、液体噴射ヘッド１、１’から液体を排出する流路部３５、３５’と、流路部３５、３５’に連通する液体ポンプ３３、３３’及び液体タンク３４、３４’とを備えている。各液体噴射ヘッド１、１’は、液体加圧プレート２と、支持枠３と、流路部材５と、ノズルプレート１２と、温度センサ４とを備える。また、図示しない圧力センサーや流量センサーを設置し、液体の流量を制御することができる。液体噴射ヘッド１、１’は既に説明した第一〜第八実施形態のいずれかを使用する。 (Ninth embodiment)
FIG. 10 is a schematic perspective view of a liquid ejecting apparatus 30 according to the ninth embodiment of the present invention. The liquid ejecting apparatus 30 includes a moving mechanism 40 that reciprocates the liquid ejecting heads 1 and 1 ′, and a flow path unit that supplies the liquid to the liquid ejecting heads 1 and 1 ′ and discharges the liquid from the liquid ejecting heads 1 and 1 ′. 35, 35 ′, liquid pumps 33, 33 ′ and liquid tanks 34, 34 ′ communicating with the flow path portions 35, 35 ′. Each liquid jet head 1, 1 ′ includes a liquid pressurizing plate 2, a support frame 3, a flow path member 5, a nozzle plate 12, and a temperature sensor 4. Further, a pressure sensor and a flow rate sensor (not shown) can be installed to control the liquid flow rate. The liquid ejecting heads 1 and 1 ′ use any of the first to eighth embodiments already described.

液体噴射装置３０は、紙等の被記録媒体４４を主走査方向に搬送する一対の搬送手段４１、４２と、被記録媒体４４に液体を吐出する液体噴射ヘッド１、１’と、液体噴射ヘッド１、１’を載置するキャリッジユニット４３と、液体タンク３４、３４’に貯留した液体を流路部３５、３５’に押圧して供給する液体ポンプ３３、３３’と、液体噴射ヘッド１、１’を主走査方向と直交する副走査方向に走査する移動機構４０とを備えている。図示しない制御部は液体噴射ヘッド１、１’、移動機構４０、搬送手段４１、４２を制御して駆動する。   The liquid ejecting apparatus 30 includes a pair of conveying units 41 and 42 that convey a recording medium 44 such as paper in the main scanning direction, liquid ejecting heads 1 and 1 ′ that eject liquid onto the recording medium 44, and a liquid ejecting head. 1, 1 ′ carriage unit 43, liquid tanks 34, 34 ′ and liquid pumps 33, 33 ′ that supply the liquid stored in the liquid tanks 34, 34 ′ to the flow path parts 35, 35 ′, And a moving mechanism 40 that scans 1 ′ in the sub-scanning direction orthogonal to the main scanning direction. A control unit (not shown) controls and drives the liquid ejecting heads 1, 1 ′, the moving mechanism 40, and the conveying units 41 and 42.

一対の搬送手段４１、４２は副走査方向に延び、ローラ面を接触しながら回転するグリッドローラとピンチローラを備えている。図示しないモータによりグリッドローラとピンチローラを軸周りに移転させてローラ間に挟み込んだ被記録媒体４４を主走査方向に搬送する。移動機構４０は、副走査方向に延びた一対のガイドレール３６、３７と、一対のガイドレール３６、３７に沿って摺動可能なキャリッジユニット４３と、キャリッジユニット４３を連結し副走査方向に移動させる無端ベルト３８と、この無端ベルト３８を図示しないプーリを介して周回させるモータ３９を備えている。   The pair of conveying means 41 and 42 includes a grid roller and a pinch roller that extend in the sub-scanning direction and rotate while contacting the roller surface. A grid roller and a pinch roller are moved around the axis by a motor (not shown), and the recording medium 44 sandwiched between the rollers is conveyed in the main scanning direction. The moving mechanism 40 couples a pair of guide rails 36 and 37 extending in the sub-scanning direction, a carriage unit 43 slidable along the pair of guide rails 36 and 37, and the carriage unit 43 to move in the sub-scanning direction. An endless belt 38 is provided, and a motor 39 that rotates the endless belt 38 via a pulley (not shown) is provided.

キャリッジユニット４３は、複数の液体噴射ヘッド１、１’を載置し、例えばイエロー、マゼンタ、シアン、ブラックの４種類の液滴を吐出する。液体タンク３４、３４’は対応する色の液体を貯留し、液体ポンプ３３、３３’、流路部３５、３５’を介して液体噴射ヘッド１、１’に供給する。各液体噴射ヘッド１、１’は駆動信号に応じて各色の液滴を吐出する。液体噴射ヘッド１、１’から液体を吐出させるタイミング、キャリッジユニット４３を駆動するモータ３９の回転及び被記録媒体４４の搬送速度を制御することにより、被記録媒体４４上に任意のパターンを記録することできる。   The carriage unit 43 mounts a plurality of liquid jet heads 1, 1 ′, and ejects, for example, four types of liquid droplets of yellow, magenta, cyan, and black. The liquid tanks 34 and 34 'store liquids of corresponding colors and supply them to the liquid jet heads 1 and 1' via the liquid pumps 33 and 33 'and the flow path portions 35 and 35'. Each liquid ejecting head 1, 1 ′ ejects droplets of each color according to the drive signal. An arbitrary pattern is recorded on the recording medium 44 by controlling the timing at which liquid is ejected from the liquid ejecting heads 1, 1 ′, the rotation of the motor 39 that drives the carriage unit 43, and the conveyance speed of the recording medium 44. I can.

なお、本実施形態は、移動機構４０がキャリッジユニット４３と被記録媒体４４を移動させて記録する液体噴射装置３０であるが、これに代えて、キャリッジユニットを固定し、移動機構が被記録媒体を２次元的に移動させて記録する液体噴射装置であってもよい。つまり、移動機構は液体噴射ヘッドと被記録媒体とを相対的に移動させるものであればよい。   In this embodiment, the moving mechanism 40 moves the carriage unit 43 and the recording medium 44 to perform recording, but instead, the carriage unit is fixed and the moving mechanism is the recording medium. It may be a liquid ejecting apparatus that records the image by moving it two-dimensionally. That is, the moving mechanism may be any mechanism that relatively moves the liquid ejecting head and the recording medium.

１ 液体噴射ヘッド
２ 液体加圧プレート
３ 支持枠
４ 温度センサ
４ａ 温度検出素子、４ｂ フレキシブル基板、４ｃ 電極
４ｄ、４ｅ ノッチ
５、５’ 流路部材、５ａ、５’ａ 流路
６ 切欠き部
７ 凹部
８ 端部、８ａ、８ｂ 枝部
９、９’ 圧電プレート
１０、１０’ カバープレート
１１、１１’ 液体供給室
１２ ノズルプレート
１３、１３’ 駆動用フレキシブル基板
１４ 段差部
Ｔａ 基板端面、Ｔｂ 基板側面、Ｃ、Ｃ’ チャンネル、Ｎ ノズル
Ｓａ 第一面、Ｓｂ 第二面、Ｓｃ 第三面、Ｓｄ 第四面、Ｋ、Ｋ’ 開口 DESCRIPTION OF SYMBOLS 1 Liquid ejecting head 2 Liquid pressurizing plate 3 Support frame 4 Temperature sensor 4a Temperature detection element 4b Flexible substrate 4c Electrode 4d 4e Notch 5, 5 'Channel member 5a, 5'a Channel 6 Notch 7 Recess 8 End, 8a, 8b Branch 9, 9 'Piezoelectric plate 10, 10' Cover plate 11, 11 'Liquid supply chamber 12 Nozzle plate 13, 13' Driving flexible substrate 14 Stepped portion Ta substrate end surface, Tb substrate side surface , C, C ′ channel, N Nozzle Sa first surface, Sb second surface, Sc third surface, Sd fourth surface, K, K ′ opening

Claims (16)

基板端面と、前記基板端面と交差する基板側面と、前記基板端面に開口し液体に圧力を印加する複数のチャンネルと、を備える液体加圧プレートと、
前記基板側面に固定される支持枠と、
前記支持枠に接触する温度センサと、を備える液体噴射ヘッド。 A liquid pressure plate comprising: a substrate end surface; a substrate side surface intersecting the substrate end surface; and a plurality of channels that open to the substrate end surface and apply pressure to the liquid;
A support frame fixed to the side surface of the substrate;
And a temperature sensor in contact with the support frame. 前記温度センサは、電極が形成されるフレキシブル基板と、前記フレキシブル基板の第一面に設置される温度検出素子と、を有し、
前記温度検出素子が設置される近傍の前記フレキシブル基板が前記支持枠に接触する請求項１に記載の液体噴射ヘッド。 The temperature sensor has a flexible substrate on which electrodes are formed, and a temperature detection element installed on the first surface of the flexible substrate,
The liquid ejecting head according to claim 1, wherein the flexible substrate in the vicinity where the temperature detection element is installed contacts the support frame. 前記フレキシブル基板は、前記第一面とは反対側の第二面が前記支持枠に接触する請求項２に記載の液体噴射ヘッド。   The liquid ejecting head according to claim 2, wherein the flexible substrate has a second surface opposite to the first surface in contact with the support frame. 前記温度センサは、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に接触する請求項１〜３のいずれか一項に記載の液体噴射ヘッド。   The liquid jet head according to claim 1, wherein the temperature sensor is in contact with a third surface of the support frame opposite to a side where the channel opens. 前記基板側面に固定され、前記支持枠の前記第三面に当接する流路部材を更に備え、
前記流路部材は前記支持枠の側の第四面に切欠き部を有し、
前記温度検出素子は前記切欠き部と前記第三面により囲まれる領域に収納される請求項４に記載の液体噴射ヘッド。 A flow path member fixed to the side surface of the substrate and in contact with the third surface of the support frame;
The flow path member has a notch on the fourth surface on the support frame side,
The liquid ejecting head according to claim 4, wherein the temperature detection element is housed in a region surrounded by the notch and the third surface. 前記支持枠は前記第三面に凹部を有し、前記凹部に前記温度検出素子が収納される請求項１〜３のいずれか一項に記載の液体噴射ヘッド。   The liquid ejecting head according to claim 1, wherein the support frame has a concave portion on the third surface, and the temperature detecting element is accommodated in the concave portion. 前記基板側面に固定され、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に当接する流路部材を更に備え、
前記流路部材は前記凹部の開口の一部を覆う請求項６に記載の液体噴射ヘッド。 A flow path member fixed to the side surface of the substrate and further in contact with a third surface of the support frame opposite to the side where the channel opens;
The liquid ejecting head according to claim 6, wherein the flow path member covers a part of the opening of the concave portion. 前記流路部材は、前記支持枠の側の第四面の前記凹部が開口する位置に切欠き部を有し、
前記温度検出素子は、前記切欠き部を通して前記凹部に収納される請求項７に記載の液体噴射ヘッド。 The flow path member has a notch at a position where the concave portion of the fourth surface on the support frame side opens,
The liquid ejecting head according to claim 7, wherein the temperature detection element is accommodated in the recess through the notch. 前記凹部は側面に段差部を有し、前記フレキシブル基板は前記段差部に装着され、前記温度検出素子は前記フレキシブル基板の前記凹部の側であり前記凹部の底面及び側面から離間して設置される請求項６〜８のいずれか一項に記載の液体噴射ヘッド。   The concave portion has a stepped portion on a side surface, the flexible substrate is mounted on the stepped portion, and the temperature detection element is disposed on the concave portion side of the flexible substrate and spaced apart from the bottom surface and the side surface of the concave portion. The liquid ejecting head according to claim 6. 前記フレキシブル基板は長尺形状を有し、前記温度検出素子は前記長尺形状の一方の端部よりも手前側に設置され、
前記長尺形状の一方の端部は前記温度検出素子が設置される側に折れ曲がって前記温度検出素子に被さる請求項２に記載の液体噴射ヘッド。 The flexible substrate has a long shape, and the temperature detection element is installed on the near side of one end of the long shape,
The liquid jet head according to claim 2, wherein one end of the elongated shape is bent toward a side where the temperature detection element is installed and covers the temperature detection element. 前記長尺形状の一方の端部は複数の枝部に分岐し、前記温度検出素子は前記分岐した枝部の基部に設置され、複数の前記枝部が前記温度検出素子の設置される側に折れ曲がって前記温度検出素子に被さる請求項１０に記載の液体噴射ヘッド。   One end of the elongated shape branches into a plurality of branches, the temperature detection element is installed at the base of the branched branch, and the plurality of branches are on the side where the temperature detection element is installed. The liquid jet head according to claim 10, wherein the liquid jet head is bent and covers the temperature detection element. 前記基板側面に固定され、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に当接する流路部材を更に備え、
前記支持枠は前記第三面に凹部を有し、
前記温度検出素子は前記凹部に収納され、
前記フレキシブル基板は、前記第一面とは反対側の第二面が前記凹部の一方の側の側面に接触し、前記端部の先端が前記凹部の他方の側の側面と前記流路部材の前記支持枠の側の第四面とに当接する請求項１０又は１１に記載の液体噴射ヘッド。 A flow path member fixed to the side surface of the substrate and further in contact with a third surface of the support frame opposite to the side where the channel opens;
The support frame has a recess on the third surface;
The temperature detecting element is housed in the recess;
The flexible substrate has a second surface opposite to the first surface in contact with a side surface on one side of the recess, and a tip of the end portion on the other side surface of the recess and the flow path member. The liquid ejecting head according to claim 10, wherein the liquid ejecting head is in contact with a fourth surface on the support frame side. 前記流路部材は前記支持枠の側の第四面の前記凹部が開口する位置に切欠き部を有する請求項１２に記載の液体噴射ヘッド。   The liquid ejecting head according to claim 12, wherein the flow path member has a notch at a position where the concave portion of the fourth surface on the support frame side opens. 前記基板側面に固定され、前記支持枠の前記チャンネルが開口する側とは反対側の第三面に当接する流路部材を更に備え、
前記流路部材は、前記支持枠の側の第四面の前記基板側面の側に切欠き部を有し、
前記支持枠は前記第三面に凹部を有し、前記切欠き部と前記凹部とは連通し、
前記フレキシブル基板は長尺形状を有し、
前記温度検出素子は、前記長尺形状の一方の端部よりも手前側に設置されて前記凹部に収納され、
前記長尺形状の一方の端部は前記温度検出素子の設置される側とは反対側に折れ曲がり、前記端部の先端が前記切欠き部の内面に当接し、前記端部の先端と前記温度検出素子との間の前記フレキシブル基板が前記支持枠に接触する請求項２に記載の液体噴射ヘッド。 A flow path member fixed to the side surface of the substrate and further in contact with a third surface of the support frame opposite to the side where the channel opens;
The flow path member has a notch on the side surface of the substrate on the fourth surface on the support frame side,
The support frame has a recess on the third surface, and the notch and the recess communicate with each other.
The flexible substrate has a long shape,
The temperature detection element is installed on the near side of one end of the elongated shape and is stored in the recess,
One end of the elongated shape is bent to the side opposite to the side where the temperature detecting element is installed, the tip of the end contacts the inner surface of the notch, and the tip of the end and the temperature The liquid ejecting head according to claim 2, wherein the flexible substrate between the detecting element and the support frame is in contact with the supporting frame. 前記凹部に熱伝導性樹脂が充填される請求項６〜９、１２〜１４のいずれか一項に記載の液体噴射ヘッド。   The liquid jet head according to claim 6, wherein the concave portion is filled with a heat conductive resin. 請求項１に記載の液体噴射ヘッドと、
前記液体噴射ヘッドと被記録媒体とを相対的に移動させる移動機構と、
前記液体噴射ヘッドに液体を供給する液体供給管と、
前記液体供給管に前記液体を供給する液体タンクと、を備える液体噴射装置。 A liquid ejecting head according to claim 1;
A moving mechanism for relatively moving the liquid ejecting head and the recording medium;
A liquid supply pipe for supplying a liquid to the liquid ejecting head;
And a liquid tank that supplies the liquid to the liquid supply pipe.
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